A device for debugging the position of a mechanical hand of a semiconductor transfer chamber

Abstract

The application provides a device for adjusting the position of a mechanical hand of a semiconductor transmission cavity, comprising a plurality of calibration components and a simulation wafer tool, the simulation wafer tool is configured to be transmitted by the mechanical hand to a bearing table in a reaction chamber; the plurality of calibration components are detachably arranged in the reaction chamber and are spaced apart from each other along the circumference of the bearing table, the calibration components can move in the direction of approaching or moving away from the bearing table, the calibration components are configured to obtain the relative position information of the simulation wafer tool relative to the center of the reaction chamber, so that the mechanical hand is adjusted according to the position information. By detachably arranging a plurality of calibration components in the reaction chamber, the position of the calibration components is adjustable and the position information can be obtained, the accuracy and consistency of the position adjustment of the mechanical hand required by different transmission cavities and reaction chambers are realized, the adjustment is simple, meanwhile, in the whole adjustment process, the subjective factors such as human eyes cannot affect, the cost is low, and the practicability is high.

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