Precision pressure regulating device and control system

Abstract

The application discloses a kind of precision pressure regulating device and control system, comprising: base, with gas source cavity;Amplifier is used to amplify gas flow, installed in base, with input cavity, output cavity and first adjusting component, gas source cavity and input cavity are used to be connected with gas source, output cavity and gas source cavity are communicated, and first adjusting component is used to adjust the gas pressure of output cavity with the pressure change of input cavity;Second adjusting mechanism, including adjusting cavity, nozzle communicated with input cavity, floating plate and second adjusting component, nozzle is towards the surface first end of floating plate, and second adjusting component is used to adjust the interval between the first end of floating plate and the nozzle orifice of nozzle to adjust the gas pressure in adjusting cavity;Feedback component is used to make the gas pressure of output cavity act on the second end of floating plate to adjust the gas pressure in adjusting cavity to adjust the gas pressure of input cavity.The device is a pure mechanical structure precision pressure regulating device, not disturbed by external electrical signal, compact structure, realize stepless regulation and high precision, stable.

Description

Technical Field

[0001] This invention relates to the field of instrument pneumatic control technology, and in particular, to a precision pressure regulating device and control system. Background Technology

[0002] Gas pressure regulators are widely used in pneumatic control circuits. Connected to the circuit, after adjusting or setting a certain pressure value, the device utilizes its self-regulating function to output a stable pressure. Gas pressure regulators are suitable for applications requiring precise control of gas pressure or flow rate.

[0003] The pressure regulating elements in the existing technology are large in size, and the linearity of the balancing speed and the adjustment process is poor. Directly adjusting the opening changes can easily cause air pressure fluctuations, which can easily affect the stability of the air circuit. Summary of the Invention

[0004] This invention provides a precision pressure regulating device and control system to solve the technical problems of large size and poor linearity of pressure regulating elements in the prior art.

[0005] The technical solution adopted in this invention is as follows:

[0006] A precision pressure regulating device, comprising:

[0007] The base serves as a support and has a gas source chamber, an inlet for inputting gas, and an outlet for outputting gas.

[0008] An amplifier for amplifying gas flow rate is mounted on the base and has an input chamber, an output chamber, and a first adjustment component. The first adjustment component is used to change the gas pressure in the output chamber according to the pressure change in the input chamber.

[0009] The second adjustment mechanism, installed on the base, includes an adjustment chamber, a second adjustment component, a floating plate, and a nozzle communicating with the input chamber. The second adjustment component is used to adjust the distance between the first end of the floating plate and the nozzle orifice, thereby adjusting the air pressure in the adjustment chamber.

[0010] A feedback component is disposed on the base, with its two ends connected to the outlet end of the second adjustment mechanism and the output cavity, respectively, for causing the air pressure of the output cavity to act on the second end of the floating plate to adjust the air pressure of the adjustment cavity.

[0011] As a further improvement to the above technical solution, the amplifier further includes a first cover plate, the base has a first mounting cavity located on the gas source cavity, and the first cover plate is sealed and covered on the first mounting cavity; the first adjustment assembly includes a diaphragm assembly disposed in the first mounting cavity, the diaphragm assembly being used to divide the first mounting cavity into the input cavity and the output cavity.

[0012] As a further improvement to the above technical solution, the base includes a valve seat mounted on the gas source chamber for separating the gas source chamber and the first mounting chamber; the first adjusting assembly further includes a valve core and a first elastic element, the first elastic element being mounted between the bottom of the gas source chamber, the first elastic element being used to keep the valve core abutting against the valve hole of the valve seat; the diaphragm assembly is used to move towards the output chamber when the pressure in the input chamber increases, thereby moving the valve core to open the valve hole or increase the gap between the valve core and the valve hole, the diaphragm assembly is also used to move towards the input chamber when the pressure in the input chamber decreases, thereby resetting the valve core under the action of the first elastic element to reduce the gap between the valve core and the valve hole or close the valve hole.

[0013] As a further improvement to the above technical solution, the sidewall of the diaphragm assembly is provided with a release hole for releasing excess air pressure after stabilization.

[0014] As a further improvement to the above technical solution, the second adjustment mechanism includes a second elastic element. The first end of the second elastic element is connected to the first end of the floating plate, and the second end of the second elastic element is fixedly connected to the base. The extension and retraction direction of the second elastic element is perpendicular to or tends to be perpendicular to the floating plate. A traction beam is fixedly arranged above the first end of the floating plate. The second adjustment assembly includes a traction block arranged above the floating plate and an adjustment screw that passes through the traction block and is arranged along the length direction of the floating plate and parallel to the floating plate. The traction block is connected to the traction beam through a third elastic element. The adjustment screw is used to drive the traction block to move towards the second end of the floating plate so that the traction beam is applied through the third elastic element, thereby driving the first end of the floating plate to move towards the nozzle. The adjustment screw is also used to drive the traction block to move towards the first end of the floating plate to cancel the traction on the traction beam, thereby causing the first end of the floating plate to reset under the elastic force of the second elastic element in the stretched state and move towards the nozzle.

[0015] As a further improvement to the above technical solution, the second adjustment mechanism further includes a mounting base installed on the base, the nozzle being installed at the bottom of the mounting base and communicating with the upper surface of the mounting base; mounting plates are provided on both sides of the mounting base; the second adjustment assembly further includes a limiting rod, the limiting rod being arranged perpendicular to the axial direction of the adjustment screw, a limiting groove for the limiting rod to pass through being opened on the mounting plate along the length direction of the floating plate, and / or a limiting groove for the limiting rod to pass through being opened on the floating block along the length direction of the floating plate.

[0016] As a further improvement to the above technical solution, the third elastic element is a spring, and the two ends of the third elastic element are respectively attached to the traction beam and the limiting rod.

[0017] As a further improvement to the above technical solution, the second adjustment mechanism includes two throttling orifices opened on the first cover plate. The throttling orifices are connected to the input cavity, and the two throttling orifices are used to connect the air source and the nozzle respectively.

[0018] As a further improvement to the above technical solution, the base has a second mounting cavity, which is connected to the output cavity; the feedback component includes a second cover plate sealed to the second mounting cavity and a first diaphragm disposed in the second mounting cavity, the first diaphragm being used to move with the change in air pressure of the output cavity and the regulating cavity, thereby controlling the movement of the second end of the floating plate to adjust the air pressure of the output cavity and the regulating cavity.

[0019] According to another aspect of the present invention, a control system is also provided, which applies any of the precision pressure regulating devices described above.

[0020] This invention has the following beneficial effects: When this regulating device is installed in the target control system, its input port is connected to an external air source, and its output port outputs pressure. After the external air source is turned on, it splits into two paths: one path fills the air source chamber, and the other path fills the input chamber. At this time, the air pressure in the input chamber increases. The first regulating component adjusts the air path connection between the output chamber and the air source chamber (i.e., increases the air path size between the output chamber and the air source chamber) according to the increase in input chamber pressure, so that the output chamber has air pressure, thus enabling output. The second regulating component adjusts the distance between the first end of the floating plate and the nozzle, thereby adjusting the air pressure in the regulating chamber and thus regulating the air pressure in the input chamber. The first regulating component adjusts the output chamber air pressure according to the change in input chamber air pressure, achieving stepless adjustment of the output pressure, resulting in high control precision and efficient regulation. During the process, the input chamber pressure may be relatively low while the output chamber pressure may be relatively high. In this case, the output chamber pressure is fed back to the second end of the floating plate via the feedback component, causing it to move and thus adjusting the pressure in the regulating chamber. This, in turn, increases the input chamber pressure, ensuring that the pressure remains stable throughout the adjustment process. Conversely, if the input chamber pressure is relatively high while the output chamber pressure is relatively low, the force exerted by the feedback component on the second end of the floating plate decreases, and the regulating chamber pressure adjusts accordingly, maintaining a stable pressure throughout the adjustment process. The output pressure is stable, and the device is highly reliable. This device is a precision pressure regulating device with a purely mechanical structure, unaffected by external electrical signals. It has a compact structure, high adjustment accuracy, stable output pressure, and stepless adjustment, making it widely applicable.

[0021] In addition to the objectives, features, and advantages described above, the present invention has other objectives, features, and advantages. The invention will now be described in further detail with reference to the accompanying drawings. Attached Figure Description

[0022] The accompanying drawings, which form part of this application, are used to provide a further understanding of the invention. The illustrative embodiments of the invention and their descriptions are used to explain the invention and do not constitute an undue limitation of the invention. In the drawings:

[0023] Figure 1 This is a schematic diagram of a preferred embodiment of the present invention;

[0024] Figure 2 This is a schematic diagram of the amplifier structure according to a preferred embodiment of the present invention;

[0025] Figure 3 This is a schematic diagram of the second adjustment mechanism structure according to a preferred embodiment of the present invention;

[0026] Figure 4 This is a schematic diagram of the feedback component structure according to a preferred embodiment of the present invention;

[0027] Figure 5 This is a simplified structural diagram of a preferred embodiment of the present invention;

[0028] 1. Amplifier 11. Throttling orifice 12. Tubing 13. First cover plate 14. Diaphragm assembly 15. Spring 16. Valve seat 17. First sealing ring 18. Valve core 19. First elastic element 2. Second adjusting mechanism 21. Mounting base 22. Mounting plate 23. Traction block 24. Nozzle 25. Floating plate 26. Third elastic element 27. Traction beam 28. Adjusting screw 29. Retaining ring 210. Knob 211. Nut 212. Limiting rod 213. Second elastic element 3. Input hole 4. Feedback assembly 41. Second cover plate 42. First diaphragm 43. Second sealing ring 5. Base 6. Output hole 7. Input chamber 8. Output chamber 9. Air source chamber Detailed Implementation

[0029] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. The present invention will now be described in detail with reference to the accompanying drawings and embodiments.

[0030] Reference Figures 1 to 5 A preferred embodiment of the present invention provides a precision pressure regulating device, comprising:

[0031] The base 5 serves as a support and has a gas source chamber 9, an inlet 3 for inputting gas, and an outlet 6 for outputting gas.

[0032] Amplifier 1, used to amplify gas flow, is mounted on base 5 and has an input chamber 7, an output chamber 8 and a first adjustment component. The gas source chamber 9 and the input chamber 7 are respectively connected to the same external gas source. The output chamber 8 and the gas source chamber 9 are connected. The output chamber 8 is used to output gas. The first adjustment component is used to make the gas pressure in the output chamber 8 change with the pressure in the input chamber 7.

[0033] The second adjustment mechanism 2 is installed on the base 5 and includes an adjustment chamber, a nozzle 24 communicating with the input chamber 7, a floating plate 25 and a second adjustment assembly. The nozzle 24 has its spray hole facing the first end of the surface of the floating plate 25. The second adjustment assembly is used to adjust the distance between the first end of the floating plate 25 and the spray hole of the nozzle 24, thereby adjusting the air pressure in the adjustment chamber.

[0034] Feedback component 4 is mounted on base 5 and its two ends are connected to the outlet end of second adjustment mechanism 2 and output chamber 8, respectively. It is used to apply the air pressure of output chamber 8 to the second end of floating plate 25 to adjust the air pressure of adjustment chamber and thus adjust the air pressure of input chamber 7.

[0035] The working principle of this regulating device is as follows: The device is installed in the target control system. Its input port 3 is connected to an external air source, and its output port 6 outputs air. When the external air source is turned on, it splits into two paths: one flows into the air source chamber 9, and the other flows into the input chamber 7. At this time, the air pressure in the input chamber 7 increases. The first regulating component adjusts the air passage connection between the output chamber 8 and the air source chamber 9 (i.e., increases the air passage size between the output chamber 8 and the air source chamber 9) as the pressure in the input chamber 7 increases, thus giving the output chamber 8 air pressure for output. The second regulating component adjusts the distance between the first end of the floating plate 25 and the nozzle 24, thereby adjusting the air pressure in the regulating chamber and thus the air pressure in the input chamber 7. The first regulating component adjusts the air pressure in the output chamber 8 according to the change in the air pressure in the input chamber 7, achieving stepless adjustment of the output pressure and high control precision. During the adjustment process, the air pressure in the input chamber 7 may be relatively too low, while the air pressure in the output chamber 8 may be relatively too high. In this case, the air pressure in the output chamber 8 is fed back to the second end of the floating plate 25 via the feedback component, causing it to move and thus adjusting the air pressure in the regulating chamber. This causes the air pressure in the input chamber 7 to increase in tandem, ensuring that the air pressure remains stable throughout the adjustment process. Conversely, if the air pressure in the input chamber 7 is relatively too high and the air pressure in the output chamber 8 is relatively too low, the force exerted by the feedback component on the second end of the floating plate 25 decreases, and the air pressure in the regulating chamber is adjusted accordingly, maintaining a stable air pressure throughout the adjustment process. The output pressure is stable, and the device is highly reliable. This device is a precision pressure regulating device with a purely mechanical structure, unaffected by external electrical signals. It has a compact structure, high adjustment accuracy, stable output pressure, and stepless adjustment, making it widely applicable.

[0036] In this embodiment, the amplifier 1 further includes a first cover plate 13, and the base 5 has a first mounting cavity located on the gas source cavity 9. The first cover plate 13 is sealed and covered on the first mounting cavity. The first adjustment component includes a diaphragm assembly 14 disposed in the first mounting cavity. The diaphragm assembly 14 is used to divide the first mounting cavity into an input cavity 7 and an output cavity 8. The diaphragm assembly 14 has a three-layer structure consisting of a diaphragm-metal body-diaphragm, which divides the first mounting cavity into an input cavity 7 and an output cavity 8. It can be understood that the external gas source is input to the gas source cavity 9 and the input cavity 7 respectively through two paths, and the output cavity 8 is connected to the output port 6 and the feedback component. When the pressure in the input cavity 7 increases, the diaphragm assembly 14 moves towards the output cavity 8, and when the pressure decreases, the diaphragm assembly 14 moves towards the input cavity 7.

[0037] Furthermore, the base 5 includes a valve seat 16 mounted on the air source chamber 9 to separate the air source chamber 9 from the first mounting chamber. The valve seat 16 is fixedly disposed within the base 5. The valve seat 16 is provided with a first sealing ring 17. A spring sheet 15 is disposed between the diaphragm assembly 14 and the valve seat 16 to limit the downward movement range of the diaphragm assembly 14. The first adjusting assembly also includes a valve core 18 and a first elastic element 19. The first elastic element 19 is installed between the valve core 18 and the bottom of the air source chamber 9. The first elastic element 19 is used to keep the valve core 18 abutting against the valve seat 16. The valve orifice at position 6 serves to reset the valve core 18. The diaphragm assembly 14 moves towards the output chamber 8 when the pressure in the input chamber 7 increases, thereby moving the valve core 18 to open the valve orifice or increase the gap between the valve core 18 and the valve orifice. For example, when the gas source is first turned on, both the gas source chamber 9 and the input chamber 7 are filled with gas. The increased gas pressure in the input chamber 7 causes the diaphragm assembly 14 to move towards the output chamber 8, which in turn moves the valve core 18 to compress the first elastic element 19 and open the valve orifice. Gas is then output from the gas source chamber 9 to the output chamber 8, and the pressure in the output chamber 8 increases to the pressure in the input chamber 7 and the output chamber 8. 8. When the pressure is balanced, the second regulating mechanism 2 adjusts to reduce the gap between the floating plate 25 and the nozzle 24, thus reducing the air pressure in the regulating chamber and increasing the air pressure in the input chamber 7. This causes the diaphragm assembly 14 to move towards the output chamber 8, increasing both the input and output air pressures. Similarly, the diaphragm assembly 14 is also used to move towards the input chamber 7 when the pressure in the input chamber 7 decreases, thereby resetting the valve core 18 under the action of the first elastic element 19, thus reducing the gap between the valve core 18 and the valve orifice or closing the valve orifice. That is, when the pressures in the input chamber 7 and the output chamber 8 are balanced, the second regulating mechanism 2... The adjustment increases the gap between the floating plate 25 and the nozzle 24, increasing the air pressure in the adjustment chamber and decreasing the air pressure in the input chamber 7. The diaphragm assembly 14 moves towards the input chamber 7, and the valve core 18 resets under the action of the first elastic element 19. The gap between the valve core 18 and the valve orifice decreases, thereby reducing the size of the air passage between the air source chamber 9 and the output chamber 8, resulting in a decrease in the air pressure in the output chamber 8 and a decrease in the output air pressure. If the air source is closed, there is no air pressure in the input chamber 7, the valve core 18 resets under the action of the first elastic element 19 and drives the diaphragm assembly 14 to move, the valve orifice closes, and there is no air pressure in the output chamber 8.

[0038] The diaphragm assembly 14 has a release hole on its side wall, which is used to release excess air pressure after the pressure is stabilized. That is, after the adjustment is completed, the air pressure in the input chamber 7 and the output chamber 8 tends to be stable, and the excess air pressure enters the diaphragm assembly 14 from the output chamber 8 and is released to the atmosphere through the release hole, so as to maintain the stability of the device.

[0039] In this embodiment, the second adjustment mechanism 2 includes a second elastic element 213. The first end of the second elastic element 213 is connected to the first end of the floating plate 25, and the second end of the second elastic element 213 is fixedly connected to the base 5. The extension and retraction direction of the second elastic element 213 is perpendicular to or tends to be perpendicular to the floating plate 25. A traction beam 27 is fixedly arranged above the first end of the floating plate 25. The second adjustment assembly includes a traction block 23 arranged above the floating plate 25 and an adjustment screw 28 that passes through the traction block 23 and is arranged along the length direction of the floating plate 25 and parallel to the floating plate 25. The traction block 23 is connected to the traction beam 27 through a third elastic element 26. The adjustment screw 28 is used to drive the traction block 23 toward the floating plate. The second end of the 25 moves in the direction of the third elastic element 26 to apply traction force to the traction beam 27, thereby causing the first end of the floating plate 25 to rise. The adjusting screw 28 is also used to drive the traction block 23 to move towards the first end of the floating plate 25 to cancel the traction on the traction beam 27, thereby causing the first end of the floating plate 25 to reset under the elastic force of the second elastic element 213 in the stretched state and move towards the nozzle 24. By applying traction force to the traction beam 27 through the third elastic element 26 by the axial movement of the adjusting screw 28, the traction force on the traction beam 27 is further converted into the traction force on the floating plate 25. Under the large range of movement of the adjusting screw 28, only the floating plate 25 is driven to make a small displacement, thereby achieving precise adjustment.

[0040] In this embodiment, the second adjustment mechanism 2 further includes a mounting base 21 installed on the base 5, and a nozzle 24 installed at the bottom of the mounting base 21 and connected to the upper surface of the mounting base 21; mounting plates 22 are provided on both sides of the mounting base 21; the second adjustment assembly further includes a limiting rod 212, which is arranged axially perpendicular to the adjusting screw 28, and a limiting groove for the limiting rod 212 is provided on the mounting plate 22 along the length direction of the floating plate 25 and / or a limiting groove for the limiting rod 212 is provided on the floating block along the length direction of the floating plate 25.

[0041] The second elastic element 213 is an L-shaped elastic sheet, which is connected to the floating plate 25 and the mounting base 21 respectively. The mounting base 21 is fixedly provided with a nut 211 for threaded connection with the first end of the adjusting screw 28. The second end of the adjusting screw 28 is provided with a retaining ring 29 for sealing. A knob 210 is provided at the end of the second end for easy rotation.

[0042] In this embodiment, the third elastic element 26 is a spring, and the two ends of the third elastic element 26 are respectively attached to the traction beam 27 and the limiting rod 212;

[0043] In this embodiment, the second regulating mechanism 2 includes two throttling orifices 11 opened on the first cover plate 13. The throttling orifices 11 are connected to the input cavity 7. The two throttling orifices 11 are used to connect the gas source and the nozzle 24 through the hose 12 respectively, so as to amplify the gas flow rate delivered to the input cavity 7 and the regulating cavity.

[0044] In this embodiment, the base 5 has a second mounting cavity, which is connected to the output cavity 8. The feedback component includes a second cover plate 41 sealed to the second mounting cavity and a first diaphragm 42 disposed in the second mounting cavity. A second sealing ring 43 is disposed on the lower surface of the first diaphragm 42. The first diaphragm 42 is used to move with the change in air pressure of the output cavity 8 and the regulating cavity, thereby controlling the movement of the second end of the floating plate 25 to adjust the air pressure of the output cavity 8 and the regulating cavity, so that the output pressure is more stable with feedback control. The first diaphragm 42 can be the first diaphragm 42 in the prior art.

[0045] The above description is merely a preferred embodiment of the present invention and is not intended to limit the invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A precision pressure regulating device, characterized in that, include: The base (5) is used as a support and has a gas source chamber (9), an inlet (3) for inputting gas and an outlet (6) for outputting gas. An amplifier (1), used to amplify gas flow, is mounted on the base (5) and has an input chamber (7), an output chamber (8), and a first regulating component. The first regulating component is used to make the gas pressure in the output chamber (8) change with the pressure change in the input chamber (7). The amplifier (1) also includes a first cover plate (13). The base (5) has a first mounting cavity located on the gas source chamber (9). The first cover plate (13) is sealed and covered on the first mounting cavity. The first regulating component includes a diaphragm assembly (14) disposed in the first mounting cavity. The diaphragm assembly (14) is used to divide the first mounting cavity into the input chamber (7) and the output chamber (8). The base (5) includes a valve seat (16) mounted on the gas source chamber (9) for separating the gas source chamber (9) and the output chamber (8). The first mounting cavity is described above; the first adjusting assembly further includes a valve core (18) and a first elastic element (19), the first elastic element (19) being installed between the bottom of the air source cavity (9), the first elastic element (19) being used to keep the valve core (18) abutting against the valve hole of the valve seat (16); the diaphragm assembly (14) is used to move towards the output cavity (8) when the pressure in the input cavity (7) increases, thereby moving the valve core (18) to open the valve hole or increase the gap between the valve core (18) and the valve hole, the diaphragm assembly (14) is also used to move towards the input cavity (7) when the pressure in the input cavity (7) decreases, thereby resetting the valve core (18) under the action of the first elastic element (19), thereby reducing the gap between the valve core (18) and the valve hole or closing the valve hole; The second adjustment mechanism (2) is installed on the base (5) and includes an adjustment cavity, a second adjustment component, a floating plate (25) and a nozzle (24) communicating with the input cavity (7). The second adjustment component is used to adjust the distance between the first end of the floating plate (25) and the nozzle (24) and thus adjust the air pressure in the adjustment cavity. Feedback component (4) is disposed on the base (5) and its two ends are respectively connected to the outlet end of the second adjustment mechanism (2) and the output cavity (8), and is used to make the air pressure of the output cavity (8) act on the second end of the floating plate (25) to adjust the air pressure of the adjustment cavity.

2. The precision pressure regulating device according to claim 1, characterized in that, The diaphragm assembly (14) has a release hole on its side wall for releasing excess air pressure after stabilization.

3. The precision pressure regulating device according to claim 1, characterized in that, The second adjustment mechanism (2) includes a second elastic element (213), the first end of which is connected to the first end of the floating plate (25), and the second end of which is fixedly connected to the base (5). The extension and retraction direction of the second elastic element (213) is perpendicular to or tends to be perpendicular to the floating plate (25). A traction beam (27) is fixedly arranged above the first end of the floating plate (25). The second adjustment assembly includes a traction block (23) arranged above the floating plate (25) and an adjustment screw (28) that passes through the traction block (23) and is arranged along the length direction of the floating plate (25) and parallel to the floating plate (25). The traction block (23) is connected to the traction beam (27) via the third elastic element (26). The adjusting screw (28) is used to drive the traction block (23) to move towards the second end of the floating plate (25) so that the traction beam (27) is pulled by the third elastic element (26) and the first end of the floating plate (25) moves toward the nozzle (24). The adjusting screw (28) is also used to drive the traction block (23) to move towards the first end of the floating plate (25) so as to cancel the traction on the traction beam (27) and so that the first end of the floating plate (25) is reset under the elastic force of the second elastic element (213) in the stretched state and moves toward the nozzle (24).

4. The precision pressure regulating device according to claim 3, characterized in that, The second adjustment mechanism (2) further includes a mounting base (21) installed on the base (5), the nozzle (24) is installed at the bottom of the mounting base (21) and communicates with the upper surface of the mounting base (21); mounting plates (22) are provided on both sides of the mounting base (21); the second adjustment assembly further includes a limiting rod (212), the limiting rod (212) is arranged perpendicular to the axial direction of the adjustment screw (28), the mounting plate (22) is provided with a limiting groove for passing through the limiting rod (212) along the length direction of the floating plate (25), and / or the floating block is provided with a limiting groove for passing through the limiting rod (212) along the length direction of the floating plate (25).

5. The precision pressure regulating device according to claim 4, characterized in that, The third elastic element (26) is a spring, and its two ends are respectively attached to the traction beam (27) and the limiting rod (212).

6. The precision pressure regulating device according to claim 1, characterized in that, The second adjustment mechanism (2) includes two throttling holes (11) opened on the first cover plate (13). The throttling holes (11) are connected to the input cavity (7). The two throttling holes (11) are used to connect the air source (3) and the nozzle (24) respectively.

7. The precision pressure regulating device according to claim 1, characterized in that, The base (5) has a second mounting cavity, which is in communication with the output cavity (8); the feedback component includes a second cover plate (41) sealed to the second mounting cavity and a first diaphragm (42) disposed in the second mounting cavity. The first diaphragm (42) is used to move with the change in air pressure of the output cavity (8) and the regulating cavity, thereby controlling the movement of the second end of the floating plate (25) to adjust the air pressure of the output cavity (8) and the regulating cavity.

8. A control system, characterized in that, The application has the precision pressure regulating device as described in any one of claims 1-7.

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