Lamination detection apparatus

Abstract

The application discloses a lamination detection device which comprises at least one magazine module, a magazine conveying device, a lamination grabbing device, a lamination conveying device and a lamination detection device. The magazine module is placed on the magazine conveying device, each magazine module comprises a magazine for carrying laminations and an angle adjusting module below the magazine, the angle adjusting module adjusts the bottom of the magazine to a horizontal state. The lamination grabbing device picks up laminations from the magazine with the bottom adjusted to the horizontal state and places the picked laminations on a detection station of the lamination conveying device. The lamination detection device is located at the detection station and detects the side edges and the chamfer of the laminations at the detection station. The application adjusts the bottom of the magazine to the horizontal state, picks up laminations from the leveled magazine and detects the side edges and the chamfer of the laminations, realizes the detection before the laminations are packed and guarantees the quality of the laminations in the feeding bin.

Description

Technical Field

[0001] This invention belongs to the field of photovoltaic module manufacturing technology and relates to a stacking inspection device. Background Technology

[0002] Before silicon wafers are received into the cassette and the stacked wafers within the cassette are packaged, the stacked wafers typically need to be inspected. Existing methods for inspecting stacked wafers are all based on manual inspection, which has relatively low accuracy and efficiency. Summary of the Invention

[0003] To address the problems in related technologies, this application provides a stacking inspection device, the technical solution of which is as follows:

[0004] The stacked wafer inspection equipment includes at least one material box module, a material box conveying device, a stacked wafer gripping device, a stacked wafer conveying device, and a stacked wafer inspection device, wherein:

[0005] The material box module is placed on the material box conveying device. Each material box module includes a material box for carrying the stacked wafers and an angle adjustment module located below the material box. The angle adjustment module adjusts the angle of the material box so that the bottom of the material box is adjusted to a horizontal state. The stacked wafers are a group of silicon wafers stacked together.

[0006] The stack gripping device picks up stacked pieces from the material box that has been adjusted to a horizontal position at the bottom, and places the picked-up stacked pieces at the detection station of the stacked piece conveying device;

[0007] The stacked wafer inspection device is located at the inspection station and performs side and chamfer inspections on the stacked wafers located at the inspection station.

[0008] Optionally, the wafer stacking inspection equipment also includes a silicon wafer conveying device and a sorting and transverse conveying device. The material box conveying device includes a first side receiving device and a second side receiving device, which are located on both sides of the silicon wafer conveying device.

[0009] The sorting and transverse transfer device is used to pick up silicon wafers from the silicon wafer conveyor and place them on the first side receiving device or the second side receiving device.

[0010] Optionally, the stacking inspection equipment also includes an edge flushing inspection device, located at the edge flushing inspection station of the material box conveying device. The edge flushing inspection device includes an edge flushing inspection optical fiber, an optical fiber fixing bracket telescopic cylinder, wherein:

[0011] The telescopic cylinder of the fiber optic fixing bracket drives the edge-aligning detection fiber to extend, so as to detect the edge of the stacked sheets in the material box after the angle adjustment module is leveled.

[0012] Optionally, the angle adjustment module includes a lifting cylinder, a material box base, a rotating corner bracket, and a rotating block, wherein:

[0013] The drive end of the lifting cylinder abuts against the bottom of the material box through the through groove of the material box base;

[0014] A rotating corner bracket is fixed on the base of the material box. One end of the rotating block is connected to the rotating corner bracket by a pin, and the other end of the rotating block is fixed to the bottom of the material box.

[0015] Optionally, the angle adjustment module also includes a mounting base, a spring tension post, a spring, a buffer mounting bracket, and a buffer, wherein:

[0016] The mounting base is fixed on the material box base, and the spring tension column is mounted on the mounting base. One end of the spring is fixed to the bottom of the material box, and the other end is fixed to the spring tension column.

[0017] The buffer mounting bracket is fixed to the base of the material box, and the buffer is installed on the buffer mounting bracket and located below the bottom of the material box.

[0018] Optionally, the cassette conveying device includes a timing belt, a timing belt drive unit, clamping blocks, a timing belt mounting bracket, a cassette base support bracket, a slide rail, and a slider, wherein:

[0019] The timing belt is mounted on the timing belt mounting bracket, and the material box base support bracket is located below the material box base to support the material box base. The material box base is fixed to the timing belt by clamps. The timing belt drive unit controls the stop position of the material box by controlling the rotation of the timing belt. The slide rail is located on the material box base support bracket, and the slider is fixed below the material box base. The slider is slidably connected to the slide rail.

[0020] Optionally, a first baffle and a second baffle are respectively provided on the two perpendicular sides of the bottom of the material box. A first adjusting plate and a second adjusting plate are provided on the bottom of the material box. A first oblong hole is provided on the first adjusting plate and a second oblong hole is provided on the second adjusting plate. The first baffle is installed on the first oblong hole by a fastening nut and the second baffle is installed on the second oblong hole by a fastening nut.

[0021] The first baffle is vertically mounted on the first adjusting plate, and the second baffle is vertically mounted on the second adjusting plate. The first baffle and the second baffle limit the stack of pieces carried in the material box.

[0022] Optionally, a set of avoidance notches is provided at one of the diagonal corners of the bottom of the material box.

[0023] Optionally, the stacking gripper includes a gripper lifting mechanism, a connecting plate, a first gripper, a second gripper, and a gripper driving mechanism, wherein:

[0024] The first and second grippers are mounted on the connecting plate at intervals and are both connected to the gripper drive mechanism. The gripper drive mechanism drives the first and second grippers to move closer and further apart to grasp a stack of plates and release the stack of plates.

[0025] The drive end of the gripper lifting mechanism is connected to the connecting plate for transmission. The gripper lifting mechanism drives the first gripper and the second gripper to rise and fall through the connecting plate.

[0026] Optionally, the first gripper includes a first clamping part and a first mounting plate, the first clamping part is mounted on the first mounting plate, and the first mounting plate is connected to the drive end of the gripper drive mechanism via a slider;

[0027] The second gripper includes a second clamping part and a second mounting plate. The second clamping part is mounted on the second mounting plate, and the second mounting plate is connected to the drive end of the gripper drive mechanism via a slider.

[0028] The first clamping part and the second clamping part are arranged opposite to each other.

[0029] Optionally, the first clamping part and the second clamping part have the same structure, both including a clamping base plate, a limiting unit, and a cover plate, wherein:

[0030] The limiting unit is installed between the clamping base plate and the cover plate. The clamping base plate is used to support the lower part of a set of clamped pieces, and the cover plate is located above the stacked pieces. The limiting unit limits the edge of the stacked pieces.

[0031] Optionally, the first clamping part and the second clamping part structure respectively clamp a set of diagonals of a set of stacked pieces, and the limiting unit of the first clamping part and the limiting unit of the second clamping part respectively limit the diagonals.

[0032] Optionally, the stacking gripper also includes a pressure plate structure, which comprises a first pressure plate, a limiting plate, a guide rod, a linear bearing, a compression spring, and a cylinder, wherein:

[0033] The guide rod is installed through the connecting plate, with its upper end fixedly connected to the limiting plate and its lower end fixedly connected to the first pressure plate.

[0034] The compression spring is sleeved on the guide rod and located between the connecting plate and the first pressure plate;

[0035] The drive end of the cylinder is connected to the first pressure plate via a transmission.

[0036] The linear bearing is fitted between the guide rod and the connecting plate.

[0037] Optionally, the stacking detection device includes a rotating structure, a first camera, and a second camera. The rotating structure includes a rotating tray and is configured to rotate the stacked films carried on the rotating tray.

[0038] The first camera is located on the side of the rotating structure and is opposite to one side of the stacked pieces carried by the rotating structure; the second camera is located on the side of the first camera and is opposite to one chamfer of the stacked pieces carried by the rotating structure.

[0039] The first camera detects the side of the stacked pieces opposite to the first camera, and the second camera detects the chamfer of the stacked pieces opposite to the second camera.

[0040] Optionally, the rotating structure includes a rotating module, which comprises a motor and a transmission mechanism, wherein:

[0041] The rotating tray is configured to carry stacks of plates;

[0042] The motor's drive end is connected to the rotating tray via a transmission mechanism, and the motor drives the rotating tray to rotate through the transmission mechanism.

[0043] Optionally, the rotating structure also includes a swing arm, which includes a rotary cylinder, a rotary arm, a second pressure plate, a compression spring, and a linear bearing. The drive end of the rotary cylinder is connected to the first end of the rotary arm, and the second pressure plate is mounted on the second end of the rotary arm via the linear bearing. The compression spring is sleeved on the linear bearing and is located between the second pressure plate and the second end of the rotary arm. The rotary cylinder drives the rotary arm to rotate, thereby causing the second pressure plate to rotate towards the top of the rotating tray and away from the rotating tray.

[0044] The rotating structure also includes a lifting cylinder. The drive end of the lifting cylinder is connected to the mounting plate where the rotating cylinder is located. The lifting cylinder drives the second pressure plate to rise and fall by driving the mounting plate.

[0045] Optionally, the rotating structure also includes a correction unit and a correction camera. The correction camera takes pictures of the rotating tray. The correction unit includes an X-axis module and a Y-axis module that are respectively connected to the rotating tray via a drive. The X-axis module drives the rotating tray to move along the X-axis, and the Y-axis module drives the rotating tray to move along the Y-axis. The X-axis and Y-axis are perpendicular to each other on the horizontal plane.

[0046] The rotating structure also includes a lifting electric cylinder, an electric cylinder fixing plate, a guide column, and a support plate. The lifting electric cylinder is mounted on the electric cylinder fixing plate, and the support plate is mounted above the electric cylinder fixing plate via the guide column. The drive end of the lifting electric cylinder is fixed to the lower end face of the support plate, and a rotating module is mounted on the support plate. The lifting electric cylinder drives the rotating module to move up and down.

[0047] Optionally, the stacking inspection equipment also includes an NG stacking transfer device and an NG receiving device. The NG stacking transfer device is located at the downstream station of the stacking inspection device, and the NG stacking receiving device is located on the side of the NG stacking transfer device.

[0048] The NG stack transfer device reverses the direction of the stack conveyor and transports the stacks on the stack conveyor to the NG receiving device.

[0049] Optionally, the NG stacking transfer device includes a lifting unit, a reversing mounting frame, and a reversing conveyor belt. The reversing conveyor belt is mounted on the reversing mounting frame, and the lifting unit is connected to the reversing conveyor belt in a driving connection. The conveying direction of the conveyor belt is perpendicular to the conveying direction of the material box conveying device.

[0050] Optionally, the NG receiving device includes a buffer conveyor and an NG hopper. The buffer conveyor is connected to the reversing conveyor to receive the NG stacks output from the reversing conveyor and transport the NG stacks to the NG hopper.

[0051] Optionally, the NG hopper includes a receiving base plate, two vertical plates, and a receiving unit;

[0052] Two upright plates are installed on both sides of the receiving base plate and the spacing is adjustable. At least one set of transverse guide rails are provided on the inner wall of the two upright plates. Each receiving unit is slidably installed on the corresponding transverse guide rail. A retaining edge is provided on the end of each receiving unit away from the buffer conveying mechanism.

[0053] Optionally, the receiving unit includes two side plates, a bearing plate, and a handle, each slidably mounted on a corresponding transverse guide rail, wherein:

[0054] The bearing plate is installed at the bottom of the two side plates. Each side plate has a retaining edge installed at the end away from the conveying mechanism. The two ends of the handle are respectively installed on the retaining edges of the two side plates.

[0055] Optionally, the guard edge is installed at the end of the side plate through a waist-shaped hole or a row hole, and the distance between the guard edge and the side plate is adjustable to form material receiving units of different sizes.

[0056] Based on the above technical features, this application can achieve at least the following beneficial effects:

[0057] An adjustable angle module at the bottom of the material box allows for angle adjustment. A stacking gripper picks up stacked sheets from the leveled box for side and chamfer inspection. This automated inspection before packaging improves efficiency.

[0058] It should be understood that the above general description and the following detailed description are merely exemplary and do not limit the invention. Attached Figure Description

[0059] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with the invention and, together with the description, serve to explain the principles of the invention.

[0060] Figure 1 This is a schematic diagram of the structure of a stacking detection device provided in one embodiment of this application;

[0061] Figure 2 This is a schematic diagram of the structure of the material box conveying device and the edge flushing detection device provided in one embodiment of this application;

[0062] Figure 3A This is a schematic diagram of the structure of an angle adjustment module provided in one embodiment of this application;

[0063] Figure 3B This is a schematic diagram of the angle adjustment module provided in another embodiment of this application;

[0064] Figure 4 This is a bottom view of the material box provided in one embodiment of this application;

[0065] Figure 5A This is a schematic diagram of the stacked sheet gripping device provided in one embodiment of this application;

[0066] Figure 5B This is a schematic diagram of the structure of the first clamping part or the second clamping part provided in one embodiment of this application;

[0067] Figure 6A This is a schematic diagram of the stacking detection device provided in one embodiment of this application;

[0068] Figure 6B This is a schematic diagram of the rotating structure provided in one embodiment of this application;

[0069] Figure 6C This is a schematic diagram of the corrective part in a rotating structure provided in one embodiment of this application;

[0070] Figure 7A This is a schematic diagram of the NG stacking transfer device and NG receiving device provided in one embodiment of this application;

[0071] Figure 7B This is a schematic diagram of the NG stacking transfer device provided in one embodiment of this application;

[0072] Figure 7C This is a schematic diagram of the NG receiving device provided in one embodiment of this application.

[0073] The accompanying figure is labeled as follows:

[0074] 10. Material box module; 11. Material box; 1121. First baffle; 1122. Second baffle; 1123. First adjusting plate; 1124. Second adjusting plate; 1125. First oblong hole; 1126. Second oblong hole; 12. Angle adjustment module; 1211. Lifting cylinder; 1212. Material box base; 1213. Rotating angle seat; 1214. Rotating block; 1215. Mounting base; 1216. Spring tension column; 1217. Spring; 1218. Buffer; 1219. Buffer mounting bracket; 20. Material box conveying device; 21. First side receiving device; 22. Second side receiving device 23. Synchronous belt; 24. Synchronous belt drive unit; 25. Synchronous belt mounting bracket; 26. Material box base support frame; 27. Slide rail; 28. Slider; 30. Stacking gripper; 310. Gripper lifting mechanism; 320. Connecting plate; 330. First gripper; 331. First clamping part; 3311. Clamping base plate; 3311a. Slanted notch; 3312. Limiting unit; 3313. Cover plate; 332. First mounting plate; 340. Second gripper; 341. Second clamping part; 342. Second mounting plate; 350. Gripper drive mechanism; 370. Hydraulic damper; 381. First pressure plate; 382. 51. Limiting plate; 383. Guide rod; 384. Linear bearing; 385. Compression spring; 386. Reset cylinder; 40. Stacking conveyor; 50. Stacking detection device; 510. Rotating structure; 511. Rotating tray; 512. Motor; 513. Transmission mechanism; 5141. Rotary cylinder; 5142. Rotating arm; 5143. Second pressure plate; 5144. Compression spring; 5145. Linear bearing; 5146. Lifting cylinder; 5151. X-axis module; 5152. Y-axis module; 5161. Lifting electric cylinder; 5162. Electric cylinder fixing plate; 5163. Guide column; 5164. Support Support plate; 520, First camera; 530, Second camera; 60, Wafer stacking; 70, Silicon wafer conveying device; 80, Sorting and transverse movement device; 90, Edge flushing detection device; 91, Edge flushing detection optical fiber; 92, Fiber optic fixing bracket telescopic cylinder; 101, NG wafer stacking transfer device; 1011 Lifting part; 1012, Reversing mounting frame; 1013, Reversing conveyor belt; 102, NG receiving device; 1021, Buffer conveying mechanism; 1022, NG hopper; 1022a, Receiving base plate; 1022b, Vertical plate; 1022c, Side plate; 1022d, Bearing plate; 1022e, Handle. Detailed Implementation

[0075] Exemplary embodiments will now be described in detail, examples of which are illustrated in the accompanying drawings. When the following description relates to the drawings, unless otherwise indicated, the same numerals in different drawings denote the same or similar elements. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with the present invention. Rather, they are merely examples of apparatuses and methods consistent with some aspects of the invention as detailed in the appended claims.

[0076] In this application, the stacked wafer 60 refers to a three-dimensional structure, roughly rectangular or cubic in shape, formed by stacking several silicon wafers one by one. (See reference...) Figure 3A and Figure 3B .

[0077] Figure 1 This is a schematic diagram of the structure of a stacked sheet detection device provided in one embodiment of this application. The stacked sheet detection device provided in this application may include at least one material box module 10, a material box conveying device 20, a stacked sheet gripping device 30, a stacked sheet conveying device 40, and a stacked sheet detection device 50.

[0078] The material box module 10 is placed on the material box conveying device 20. Each material box module 10 includes a material box for carrying the stacked wafers and an angle adjustment module located below the material box. The angle adjustment module adjusts the angle of the material box so that the bottom of the material box is adjusted to a horizontal state. The stacked wafers are a group of stacked silicon wafers.

[0079] The stack gripping device 30 picks up the stacked pieces from the material box that has been adjusted to a horizontal position at the bottom, and places the picked-up stacked pieces at the detection station of the stacked piece conveying device 40.

[0080] The stacked wafer inspection device 50 is located at the inspection station and performs side inspection and chamfer inspection on the stacked wafers located at the inspection station.

[0081] In one possible implementation, the wafer stacking inspection equipment provided in this application may further include a silicon wafer conveying device 70, a sorting and transverse conveying device 80, and a material box conveying device 20 including a first side receiving device 21 and a second side receiving device 22, which are located on both sides of the silicon wafer conveying device 70.

[0082] The sorting and transverse transfer device 80 is used to pick up silicon wafers from the silicon wafer conveying device 70 and place them on the first side receiving device 21 or the second side receiving device 22. Optionally, the sorting and transverse transfer device 80 is equipped with two suction cups, which can simultaneously pick up two silicon wafers from the silicon wafer conveying device and place them on the first side receiving device 21 or the second side receiving device 22, thereby improving the silicon wafer receiving efficiency.

[0083] Please see Figure 2The diagram shown is a structural schematic of the material box conveying device and the edge flushing detection device provided in one embodiment of this application. The stacking detection equipment provided in this application may also include an edge flushing detection device 90. The edge flushing detection device 90 is located at the edge flushing detection station of the material box conveying device 20. The edge flushing detection device 90 includes an edge flushing detection optical fiber 91 and an optical fiber fixing bracket telescopic cylinder 92. The optical fiber fixing bracket telescopic cylinder 92 drives the edge flushing detection optical fiber 91 to extend, so as to detect the edge of the stacked sheets in the material box after the angle adjustment module is leveled.

[0084] By setting an edge flushing detection device 90, the edges of the stacked wafers 60 in the material box are detected to check whether the edges of the stacked wafers 60 are flush. Before taking the silicon wafers out of the material box, the edge flushing detection of the stacked wafers 60 is performed. If the edges of the stacked wafers 60 in the material box are not flush, the stacked wafers 60 can be straightened first, and then the stacked wafers can be picked up and put in. This can greatly reduce the damage to the silicon wafers caused by picking up the wafers with uneven edges of the stacked wafers 60.

[0085] Please see Figure 3A , Figure 3B As shown, the angle adjustment module 12 provided in this application may include a lifting cylinder 1211, a material box base 1212, a rotating angle seat 1213, and a rotating block 1214.

[0086] The material box base 1212 is provided with a through groove, and the driving end of the lifting cylinder 1211 abuts against the bottom of the material box 11 to be adjusted through the through groove of the material box base 1212.

[0087] A rotating corner bracket 1213 is fixed on the material box base 1212. One end of the rotating block 1214 is connected to the rotating corner bracket 1213 by a pin, and the other end of the rotating block 1214 is fixed to the bottom of the material box 11.

[0088] The lifting cylinder 1211 lifts the bottom of the material box 11 upwards. Under the action of the rotating block 1214 and the rotating angle seat 1213, the bottom of the material box 11 changes its angle relative to the horizontal plane, thereby adjusting the material box 11 to a horizontal state, that is, achieving the leveling adjustment of the bottom of the material box 1220. In other words, during the process of the lifting cylinder 1211 lifting the bottom of the material box 11 upwards, the rotating block 1214 rotates during the lifting process, thereby leveling the bottom of the material box 11 that is in contact with it.

[0089] The angle adjustment module 12 is used to adjust the material box to a horizontal state, which makes it easier for the stacking gripper 30 to pick up the stacked pieces from the material box and can reduce the damage to the stacked pieces when picking them up.

[0090] In one possible implementation, in order to ensure the stability of the bottom of the material box 11 during adjustment, the angle adjustment module 12 provided in this application may further include a mounting base 1215, a spring tension column 1216 and a spring 1217.

[0091] Mounting base 1215 is fixed to material box base 1212, spring tension column 1216 is mounted on mounting base 1215, one end of spring 1217 is fixed to the bottom of material box 11, and the other end is fixed to spring tension column 1216. When adjusting the angle of material box 11 relative to the horizontal plane, the spring 1217 connected to the bottom of material box 11 and material box base 1212 can ensure the stability of the bottom adjustment of material box 11.

[0092] During the process of lifting cylinder 1211 lifting the bottom of material box 1220, rotating block 1214 rotates during the lifting process, and spring 1217 is in a stretched state to buffer the lifting of material box 11.

[0093] After the stacking gripping device 30 picks up the stacked pieces 60 in the material box 11, the material box 11 needs to be restored to its tilted state and returned to the receiving position to receive the pieces again. The steps to restore the tilted state are as follows: the lifting cylinder 1211 retracts, and under the tension of the spring 1217, the rotating block 1214 rotates, which eventually makes the material box 11 tilt.

[0094] The angle adjustment module 12 may also include a buffer 1218 and a buffer mounting bracket 1219. The buffer mounting bracket 1219 is fixed on the material box base 1212. The buffer 1218 is installed on the buffer mounting bracket 1219 and is located below the bottom of the material box 11. During the process of the material box 11 descending to the tilted state, the material box 11 is buffered and supported by the buffer 1218 to prevent the material box 11 from returning to the tilted state under a large impact force.

[0095] Optionally, the drive end of the lifting cylinder 1211 abuts against the first side of the bottom of the material box 11, and the height of the first side is different from the height of the second side of the material box 11 opposite to the first side. For example, the first side is lower than the second side. In this way, the lifting cylinder 1211 pushes the first side up until the first side and the second side are at the same height, thus completing the leveling of the material box 11.

[0096] Please see Figure 4The diagram shows a bottom view of a material box provided in one embodiment of this application. A first baffle 1121 and a second baffle 1122 are respectively provided on the mutually perpendicular sides of the bottom of the material box 11. A first adjusting plate 1123 and a second adjusting plate 1124 are provided on the bottom of the material box 11. The first adjusting plate 1123 has a first oblong hole 1125, and the second adjusting plate 1124 has a second oblong hole 1126. The first baffle 1121 is installed in the first oblong hole 1125 by a fastening nut, and the second baffle 1122 is installed in the second oblong hole 1126 by a fastening nut. The positions of the first baffle 1121 and the second baffle 1122 can be adjusted through the first oblong hole 1125 and the second oblong hole 1126, thereby creating spaces of different sizes for the first baffle 1121, the second baffle 1122, and the bottom of the material box 11, thus accommodating silicon wafers of different sizes.

[0097] The first baffle 1121 is vertically mounted on the first adjusting plate 1123, and the second baffle 1122 is vertically mounted on the second adjusting plate 1124. The first baffle 1121 and the second baffle 1122 limit the stacked pieces 60 carried in the material box 11.

[0098] To facilitate the picking up of stacked sheets 60 by the stacked sheet gripping device 30, a set of avoidance notches are provided at a set of diagonal corners at the bottom of the material box 11. The stacked sheet gripping device 30 can pick up a set of diagonal corners of the stacked sheets 60 in the material box 11 through the avoidance notches, thereby reducing the contact area of ​​the stacked sheets 60 when picking them up and reducing damage to the stacked sheets 60 during the picking up process.

[0099] See still Figure 4 As shown, the cassette conveying device 20 provided in this application may include a timing belt 23, a timing belt drive unit 24, a clamping block, a timing belt mounting frame 25, a cassette base support frame 26, a slide rail 27, and a slider 28. The timing belt 23 is mounted on the timing belt mounting frame 25. The cassette base support frame 26 is located below the cassette base 1212 and is used to support the cassette base 1212. The cassette base 1212 is fixed to the timing belt 23 by the clamping block. The timing belt drive unit 24 controls the stop position of the cassette 11 by controlling the rotation of the timing belt 23. The slide rail 27 is located on the cassette base support frame 26. The slider 28 is fixed below the cassette base 1212 and is slidably connected to the slide rail 27.

[0100] In another possible implementation, the box conveying device may include a conveyor line, a conveyor line mounting frame, a position determination sensor mounted on the conveyor line mounting frame, and a blocking cylinder. The position determination sensor is located at the station before the blocking cylinder; the boxes conveyed by the conveyor line pass by the position determination sensor. The position determination sensor is used to determine whether the boxes conveyed by the box conveying device have reached the correct position, and the blocking cylinder is used to block the boxes that have reached the correct position. Alternatively, the position determination sensor is located at a detection station. When it determines that a box conveyed by the box conveying device has reached the detection station, it sends the detection information to the control module. The control module then controls the blocking cylinder to rise to block the box that has reached the correct position.

[0101] Please see Figure 5A As shown, the stacking gripper 30 provided in this application includes a gripper lifting mechanism 310, a connecting plate 320, a first gripper 330, a second gripper 340, and a gripper driving mechanism 350.

[0102] The first gripper 330 and the second gripper 340 are spaced apart and mounted on the connecting plate 320, and are both connected to the gripper drive mechanism 350. The gripper drive mechanism 350 drives the first gripper 330 and the second gripper 340 to move closer and further apart to grip and release a stack of sheets 60. Normally, when the gripper drive mechanism 350 drives the first gripper 330 and the second gripper 340 to move closer together, a stack of sheets 60 can be picked up. When the gripper drive mechanism 350 drives the first gripper 330 and the second gripper 340 to move further apart, a stack of sheets 60 can be released. The first gripper 330 and the second gripper 340 cooperate to pick up the stack of sheets 60 they are carrying from the material box 11.

[0103] The drive end of the gripper lifting mechanism 310 is connected to the connecting plate 320 for transmission. The gripper lifting mechanism 310 drives the first gripper 330 and the second gripper 340 to rise and fall through the connecting plate 320.

[0104] When it is necessary to pick up the stacked pieces 60 from the material box, the first gripper 330 and the second gripper 340 are usually driven to descend to the corresponding height of the material box by the gripper lifting mechanism 310. Then, the gripper driving mechanism 350 drives the first gripper 330 and the second gripper 340 to move closer to each other to hold the stacked pieces 60 from the material box. Then, the gripper lifting mechanism 310 drives the first gripper 330 and the second gripper 340 to rise to complete the picking action of the stacked pieces 60 in the material box.

[0105] In one possible implementation, the first gripper 330 may include a first clamping part 331 and a first mounting plate 332, with the first clamping part 331 mounted on the first mounting plate 332, and the first mounting plate 332 connected to the drive end of the gripper drive mechanism 350 via a slider; the second gripper 340 may include a second clamping part 341 and a second mounting plate 342, with the second clamping part 341 mounted on the second mounting plate 342, and the second mounting plate 3342 connected to the drive end of the gripper drive mechanism 50 via a slider; the first clamping part 331 and the second clamping part 341 are disposed opposite to each other.

[0106] Optionally, the first clamping part 331 and the second clamping part 341 have the same structure; please refer to [link / reference]. Figure 5B The diagram shown is a structural schematic of the first clamping part 331 or the second clamping part 341 provided in one embodiment of this application. The first clamping part 331 or the second clamping part 341 provided in this application may include a clamping base plate 3311, a limiting unit 3312 and a cover plate 3313, wherein: the limiting unit 3312 is installed between the clamping base plate 3311 and the cover plate 3313, the clamping base plate 3311 is used to support the lower part of a set of clamped stacked pieces 60, the cover plate 3313 is located above the stacked pieces 60, and the limiting unit 3312 limits the edge of the stacked pieces 60.

[0107] Typically, in order to reduce the contact area when clamping the stacked pieces 60 and to ensure the stability of picking up the stacked pieces 60, the first clamping part 331 and the second clamping part 341 provided in this application clamp a set of opposite corners of a set of stacked pieces 60, and the limiting unit 3312 of the first clamping part 331 and the limiting unit 3312 of the second clamping part 341 respectively limit the opposite corners.

[0108] To avoid damage to the pickup position of the stacked sheet 60 during pickup and to reduce the separation distance between the first clamping part 331 and the second clamping part 341, in this application, both the clamping base plate 3311 of the first clamping part 331 and the clamping base plate 3311 of the second clamping part 341 are provided with oblique notches 3311a at the position facing the clamping space. The notch line formed by the oblique notches 3311a on the first clamping part 331 and the second clamping part 341 is usually perpendicular to the diagonal of the clamped stacked sheet 60 to ensure stability when picking up the stacked sheet 60.

[0109] The stacking gripper 30 provided in this application may further include a hydraulic buffer 370, which is mounted on the first clamping part 331 or the second clamping part 341. The buffer end of the hydraulic buffer 370 is opposite to the driving end of the gripper drive mechanism 350 to buffer the drive of the gripper drive mechanism 350.

[0110] In practical applications, after the stack gripping device 30 picks up the stack 60, in order to prevent the stack from scattering during the process of the stack gripping device 30 holding the stack 60, the stack gripping device 30 provided in this application may also include a pressure plate structure, which can press down on the top of the picked-up stack 60.

[0111] In one possible implementation, the pressure plate structure provided in this application may include a first pressure plate 381, a limiting plate 382, ​​a guide rod 383, a linear bearing 384, a compression spring 385, and a reset cylinder 386, wherein:

[0112] The guide rod 383 is installed through the connecting plate 320. The upper end of the guide rod 383 is fixedly connected to the limiting plate 382, ​​and the lower end of the guide rod 383 is fixedly connected to the first pressure plate 381. The compression spring 385 is sleeved on the guide rod 383 and located between the connecting plate 320 and the first pressure plate 381. The reset cylinder 386 is installed between the connecting plate 320 and the limiting plate 382 to push the limiting plate 382 away from the first pressure plate 381. The linear bearing 384 is sleeved between the guide rod 383 and the connecting plate 320.

[0113] Before picking up the stacked piece 60, the reset cylinder 386 pushes the limiting plate 382 away from the first pressure plate 381 to make room for the stacked piece 60 to be picked up; after picking up the stacked piece 60, the reset cylinder 386 resets, and the first pressure plate 381 falls to the upper surface of the stacked piece 60 by the compression spring 385 and its own gravity, thereby pressing down on the stacked piece 60.

[0114] To further reduce the damage to the laminate 60 caused by the first pressure plate 381, a soft material is provided below the first pressure plate 381 provided in this application.

[0115] Please see Figure 6A As shown, it is a schematic diagram of the structure of a stacked sheet detection device provided in one embodiment of this application. The stacked sheet detection device 50 includes a rotating structure 510, a first camera 520 and a second camera 530. The rotating structure 510 includes a rotating tray 511 and is configured to rotate the stacked sheets 60 carried on the rotating tray.

[0116] The first camera 520 is disposed on the side of the rotating structure 510 and is opposite to one side of the stacked sheet 60 carried by the rotating structure 510. The second camera 530 is disposed on the side of the first camera 520 and is opposite to one chamfer of the stacked sheet 60 carried by the rotating structure 510.

[0117] The first camera 520 detects the side of the stacked sheet 60 opposite to the first camera 520, and the second camera 530 detects the chamfer of the stacked sheet 60 opposite to the second camera 530.

[0118] The stacking detection device 50 can detect, but is not limited to, edge chipping detection, stacking quantity detection, and stacking uniformity detection. The stacking detection device 50 can select one or more detection items according to different detection requirements.

[0119] Please see Figure 6B The diagram shown is a schematic representation of a rotating structure provided in one embodiment of this application. The rotating structure 510 provided in this application may include at least a rotating module, which can realize the rotation of the supported stacked sheets 60. In one possible implementation, the rotating module provided in this application may refer to... Figure 6C As shown, the rotating module may include at least a motor 512 and a transmission mechanism 513.

[0120] The rotary pallet 511 is configured to carry the stack 60. In practical applications, the stack 60 can be conveyed or placed on the rotary pallet 511 by a preceding conveying or handling device.

[0121] The drive end of the motor 512 is connected to the rotating tray 511 through the transmission mechanism 513, and the motor 512 drives the rotating tray 511 to rotate through the transmission mechanism 513.

[0122] The motor 512 can drive the rotating tray 511 to rotate at a small angle to make fine adjustments to the angle of the rotating tray 511. For example, before using the stacked plate 60 detection device, the motor 512 can be used to control the rotating tray 511 to make fine adjustments to the angle to achieve correction.

[0123] To achieve large-angle adjustment of the stacked pieces 60 carried on the rotating tray 511, the transmission mechanism 513 in this application can be a synchronous belt or a bevel gear reducer. The large angle mentioned here usually refers to 90°, but obviously, depending on the actual testing needs, the large angle can also be 180°, etc.

[0124] See still Figure 6B As shown, the rotating structure 510 provided in this application may further include a swing arm, which may include a rotating cylinder 5141, a rotating arm 5142, a second pressure plate 5143, a compression spring 5144, and a linear bearing 5145. The driving end of the rotating cylinder 5141 is connected to the first end of the rotating arm 5142. The second pressure plate 5143 is mounted on the second end of the rotating arm 5142 via the linear bearing 5145. The compression spring 5144 is sleeved on the linear bearing 5145 and is located between the second pressure plate 5143 and the second end of the rotating arm 5142. The rotating cylinder 5141 drives the rotating arm 5142 to rotate, thereby driving the second pressure plate 5143 to rotate upward toward the rotating tray 511 and away from the rotating tray 511.

[0125] When the second pressure plate 5143 needs to press down against the stacked pieces 60, the rotating structure 510 may also include a lifting cylinder 5146. The driving end of the lifting cylinder 5146 is connected to the mounting plate where the rotating cylinder 5141 is located. The lifting cylinder 5146 drives the second pressure plate 5143 to rise and fall by driving the mounting plate.

[0126] In order to avoid damage to the stacked sheet 60 when pressing it downwards, a soft material is provided on the downward pressing surface of the second pressure plate 5143 provided in this application.

[0127] In practical applications, the rotating tray 511 of the rotating structure 510 is usually calibrated before the inspection process of the stacked wafers 60. The rotating structure 510 may also include a correction unit and a correction camera 550. The correction camera 550 takes pictures of the rotating tray 11. The correction unit is still referred to as [reference needed]. Figure 6C As shown, the correction unit may include an X-axis module 151 and a Y-axis module 152 that are respectively connected to the rotating tray 11 for transmission. The X-axis module 151 drives the rotating tray 11 to move along the X-axis, and the Y-axis module drives the rotating tray 11 to move along the Y-axis. The X-axis and Y-axis are perpendicular to each other on the horizontal plane.

[0128] X-axis module 5151 includes an X-axis guide rail and an X-axis driver, and Y-axis module 5152 includes a Y-axis guide rail and a Y-axis driver. Rotary tray 511 is mounted on the Y-axis guide rail via a slider, and Y-axis module 5152 is mounted on the X-axis guide rail via a slider. The Y-axis driver drives the rotary tray 511 to move along the Y-axis guide rail, and the X-axis driver drives the Y-axis module 5152 to move along the X-axis guide rail. Here, the X-axis guide rail and Y-axis guide rail are perpendicular to each other.

[0129] To achieve the lifting and lowering of the rotating structure 510, please refer to [the original text]. Figure 6B As shown, the rotating structure 510 may further include a lifting electric cylinder 5161, an electric cylinder fixing plate 5162, a guide column 5163, and a support plate 5164. The lifting electric cylinder 5161 is mounted on the electric cylinder fixing plate 5162, and the support plate 5164 is mounted above the electric cylinder fixing plate 5162 via the guide column 5163. The driving end of the lifting electric cylinder 5161 is fixed to the lower end face of the support plate 5164. A rotating module is mounted on the support plate 5164, and the lifting electric cylinder 5161 drives the rotating module to move up and down.

[0130] In practical applications, the lifting cylinder 5161 drives the rotating module to rise, and the rotating pallet 511 on the rotating module is separated from the conveyor belt of the conveying device. The swing arm rotates the second pressure plate 5143 to above the stacked pieces 60 carried by the rotating pallet 511. The lifting cylinder 5146 in the swing arm descends, driving the second pressure plate 5143 to descend to the stacked pieces 60. The rotating pallet 511 and the second pressure plate 5143 work together on the stacked pieces 60. The motor 512 drives the rotating pallet 511 to rotate, thereby realizing the rotation of the stacked pieces 60 on the rotating pallet 511.

[0131] like Figure 7A The diagram shown is a structural schematic of an NG stack transfer device and an NG receiving device provided in one embodiment of this application. The NG stacks referred to in this application are NG stacks that do not meet the test requirements after being detected by the stack detection device 50. The stack detection equipment provided in this application may further include an NG stack transfer device 101 and an NG receiving device 102. The NG stack transfer device 101 is located at the downstream station of the stack detection device 50, and the NG stack receiving device 102 is located on the side of the NG stack transfer device. The NG stack transfer device 101 reverses the direction of the stacks 60 conveyed on the stack conveyor 40 and conveys them to the NG receiving device 102.

[0132] like Figure 7B The diagram shown is a structural schematic of an NG stacking transfer device provided in one embodiment of this application. The NG stacking transfer device provided in this application may include a lifting part 1011, a reversing mounting frame 1012, and a reversing conveyor belt 1013. The reversing conveyor belt 1013 is mounted on the reversing mounting frame 1012. The lifting part 1011 is connected to the reversing conveyor belt 1013 in a driving connection. The conveying direction of the conveyor belt is perpendicular to the conveying direction of the material box conveying device 20.

[0133] Figure 7C This is a schematic diagram of the NG stacking transfer device provided in one embodiment of this application, combined with... Figure 7A and Figure 7C As shown, the NG receiving device provided in this application may include a buffer conveyor mechanism 1021 and an NG hopper 1022. The buffer conveyor mechanism 1021 is connected to the reversing conveyor belt to receive the NG stacks output from the reversing conveyor belt and convey the NG stacks into the NG hopper 1022.

[0134] Figure 7C In the NG hopper, there may be a receiving base plate 1022a, two vertical plates 1022b, and receiving units. The two vertical plates 1022b are respectively installed on both sides of the receiving base plate 1022a and the interval is adjustable. At least one set of transverse guide rails are provided on the inner wall of the two vertical plates 1022b. Each layer of receiving units is slidably installed on the corresponding transverse guide rail. A retaining edge is provided on the end of each layer of receiving units away from the buffer conveying mechanism.

[0135] Optionally, the receiving unit may include two side plates 1022c, a bearing plate 1022d, and a handle 1022e, which are respectively slidably mounted on corresponding transverse guide rails, wherein:

[0136] The carrier plate 1022d is installed at the bottom of the two side plates 1022c. Each of the two side plates 1022c has a retaining edge installed at the end away from the conveying mechanism. The two ends of the handle 1022e are respectively installed on the retaining edges of the two side plates 1022c.

[0137] Optionally, the guard is installed at the end of the side plate 1022c through a waist-shaped hole or a row hole. The distance between the guard and the side plate 1022c is adjustable to form receiving units of different sizes, so that the NG hopper can be compatible with stacks of different sizes.

[0138] In summary, the stacked sheet inspection equipment provided in this application adjusts the angle of the material box by setting an adjustable leveling angle adjustment module at the bottom of the material box. The stacked sheet gripping device picks up the stacked sheets from the leveled material box for side edge inspection and chamfer inspection. The automatic inspection of the stacked sheets before packaging realizes automated inspection of the stacked sheets before packaging and improves the efficiency of stacked sheet inspection.

[0139] Other embodiments of the invention will readily occur to those skilled in the art upon consideration of the specification and practice of the invention described herein. This application is intended to cover any variations, uses, or adaptations of the invention that follow the general principles of the invention and include common knowledge or customary techniques in the art not invented herein. The specification and examples are to be considered exemplary only, and the true scope and spirit of the invention are indicated by the appended claims.

[0140] It should be understood that the present invention is not limited to the precise structure described above and shown in the accompanying drawings, and various modifications and changes can be made without departing from its scope. The scope of the invention is limited only by the appended claims.

Claims

1. A stacking inspection device, characterized in that, The stacked wafer inspection equipment includes at least one material box module, a material box conveying device, a stacked wafer gripping device, a stacked wafer conveying device, and a stacked wafer inspection device, wherein: The material box module is placed on the material box conveying device. Each material box module includes a material box for carrying the stacked wafers and an angle adjustment module located below the material box. The angle adjustment module adjusts the angle of the material box so that the bottom of the material box is adjusted to a horizontal state. The stacked wafers are a group of stacked silicon wafers. The stack gripping device picks up stacked pieces from the material box, which is adjusted to a horizontal state from the bottom, and places the picked-up stacked pieces at the detection station of the stacked piece conveying device. The stacking inspection device is located at the inspection station and performs side inspection and chamfer inspection on the stacked sheets located at the inspection station; the inspection items of the stacking inspection device include at least stacking neatness inspection. The angle adjustment module includes a material box base, a rotating angle seat, and a rotating block. The rotating angle seat is fixed on the material box base. One end of the rotating block is connected to the rotating angle seat via a pin, and the other end of the rotating block is fixed to the bottom of the material box. The angle adjustment module also includes a mounting base, a spring tension column, a spring, a buffer mounting bracket, and a buffer, wherein: The mounting base is fixed to the material box base, the spring tension column is mounted on the mounting base, one end of the spring is fixed to the bottom of the material box, and the other end is fixed to the spring tension column; The buffer mounting bracket is fixed to the material box base, and the buffer is mounted on the buffer mounting bracket and located below the bottom of the material box.

2. The stacking inspection device according to claim 1, characterized in that, The wafer stacking inspection equipment also includes a silicon wafer conveying device and a sorting transverse conveying device. The material box conveying device includes a first side receiving device and a second side receiving device, which are located on both sides of the silicon wafer conveying device. The sorting and transverse device is used to pick up silicon wafers from the silicon wafer conveying device and place them on the first side receiving device or the second side receiving device.

3. The stacking inspection device according to claim 1, characterized in that, The stacking inspection equipment also includes an edge flushing inspection device, which is located at the edge flushing inspection station of the material box conveying device. The edge flushing inspection device includes an edge flushing inspection optical fiber and an optical fiber fixing bracket telescopic cylinder, wherein: The telescopic cylinder of the fiber optic fixing bracket drives the edge-aligning detection fiber to extend, so as to detect the edge of the stacked sheets in the material box after the angle adjustment module is leveled.

4. The stacking inspection device according to claim 1, characterized in that, The angle adjustment module also includes a lifting cylinder, the drive end of which abuts against the bottom of the material box through a through groove in the material box base.

5. The stacking inspection device according to claim 4, characterized in that, The material box conveying device includes a timing belt, a timing belt drive unit, clamping blocks, a timing belt mounting frame, a material box base support frame, a slide rail, and a slider, wherein: The timing belt is mounted on the timing belt mounting bracket, and the material box base support bracket is located below the material box base to support the material box base. The material box base is fixed to the timing belt by the clamping block. The timing belt drive unit controls the stop position of the material box by controlling the rotation of the timing belt. The slide rail is located on the material box base support bracket, and the slider is fixed below the material box base and slidably connected to the slide rail.

6. The stacking inspection device according to claim 1, characterized in that, The stacking gripper includes a gripper lifting mechanism, a connecting plate, a first gripper, a second gripper, and a gripper driving mechanism, wherein: The first gripper and the second gripper are mounted on the connecting plate at intervals and are both connected to the gripper driving mechanism. The gripper driving mechanism drives the first gripper and the second gripper to move closer to each other and further away from each other in order to grasp a stack of sheets and release the stack of sheets. The drive end of the gripper lifting mechanism is connected to the connecting plate, and the gripper lifting mechanism drives the first gripper and the second gripper to rise and fall through the connecting plate.

7. The stacking inspection device according to claim 6, characterized in that, The stacking gripping device further includes a pressure plate structure, which comprises a first pressure plate, a limiting plate, a guide rod, a linear bearing, a compression spring, and a cylinder, wherein: The guide rod is installed through the connecting plate, the upper end of the guide rod is fixedly connected to the limiting plate, and the lower end of the guide rod is fixedly connected to the first pressure plate. The compression spring is sleeved on the guide rod and located between the connecting plate and the first pressure plate; The driving end of the cylinder is connected to the first pressure plate via a transmission. The linear bearing is sleeved between the guide rod and the connecting plate.

8. The stacking inspection device according to claim 1, characterized in that, The stacked sheet detection device includes a rotating structure, a first camera, and a second camera. The rotating structure includes a rotating tray and is configured to rotate the stacked sheets carried on the rotating tray. The first camera is disposed on the side of the rotating structure and opposite to one side of the stacked pieces carried by the rotating structure; the second camera is disposed on the side of the first camera and opposite to one chamfer of the stacked pieces carried by the rotating structure. The first camera detects the side of the stacked sheet opposite to the first camera, and the second camera detects the chamfer of the stacked sheet opposite to the second camera.

9. The stacking inspection device according to claim 8, characterized in that, The rotating structure includes a rotating module, which comprises a motor and a transmission mechanism, wherein: The rotating tray is configured to carry stacked pieces; The drive end of the motor is connected to the rotating tray via the transmission mechanism, and the motor drives the rotating tray to rotate via the transmission mechanism.

10. The stacking inspection device according to claim 9, characterized in that, The rotating structure also includes a swing arm, which comprises a rotary cylinder, a rotary arm, a second pressure plate, a compression spring, and a linear bearing. The drive end of the rotary cylinder is connected to the first end of the rotary arm. The second pressure plate is mounted on the second end of the rotary arm via the linear bearing. The compression spring is sleeved on the linear bearing and located between the second pressure plate and the second end of the rotary arm. The rotary cylinder drives the rotary arm to rotate, thereby causing the second pressure plate to rotate upwards toward the rotary tray and away from the rotary tray. The rotating structure also includes a lifting cylinder, the drive end of which is connected to the mounting plate where the rotating cylinder is located. The lifting cylinder drives the mounting plate to raise and lower the second pressure plate.

11. The stacking inspection device according to claim 1, characterized in that, The stacking inspection equipment also includes an NG stacking transfer device and an NG receiving device. The NG stacking transfer device is located at the downstream station of the stacking inspection device, and the NG stacking receiving device is located on the side of the NG stacking transfer device. The NG stack transfer device reverses the direction of the stack conveying device and transfers it to the NG receiving device.

12. The stacking inspection device according to claim 11, characterized in that, The NG receiving device includes a buffer conveyor mechanism and an NG hopper. The buffer conveyor mechanism is connected to the reversing conveyor belt to receive the NG stacks output from the reversing conveyor belt and transport the NG stacks to the NG hopper.

13. The stacking inspection device according to claim 12, characterized in that, The NG hopper includes a receiving base plate, two vertical plates, and a receiving unit; The two upright plates are respectively installed on both sides of the receiving base plate and the spacing is adjustable. At least one set of transverse guide rails are provided on the inner wall of the two upright plates. Each receiving unit is slidably installed on the corresponding transverse guide rail. A baffle is provided on the end of each receiving unit away from the buffer conveying mechanism. The baffle is configured to be adjustable in position along the direction perpendicular to the buffer conveying mechanism.

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