Microscopy imaging method, device and storage medium

Abstract

The application discloses a microscopic imaging method, which comprises the following steps: selecting a beam combination imaging device with at least two objectives, aiming the objectives at a to-be-measured object, and installing a camera at a camera interface of the beam combination imaging device; adjusting all the objectives so that there is a height difference in the depth of field intervals of all the objectives; and obtaining images of target regions corresponding to all the objectives by the camera. The application further discloses a microscopic imaging device and a storage medium. By using the beam combination imaging device with the single-camera multi-objective structure, the depth of field intervals of the camera can be increased by focusing different objectives on different height planes.

Description

Technical Field

[0001] This invention relates to the field of microscopic imaging technology, and more specifically, to a microscopic imaging method, device, and storage medium. Background Technology

[0002] Currently, the detection precision in the semiconductor inspection field is at the sub-micron level. Objective lenses with this level of resolution typically have a depth of field of only a few micrometers or tens of micrometers. A shallow depth of field makes it difficult to simultaneously capture clear images of the two surfaces of an object with a significant height difference.

[0003] The common method in the existing technology is to take two shots. The first shot focuses on the upper (or lower) surface of the object, and the second shot focuses on the lower (or upper) surface of the object. This requires two scans or continuous adjustment of the Z-axis height to change the focus surface. This not only increases the shooting time and reduces the detection speed, but also reduces the stability of the shooting system by constantly changing the Z-axis height. Summary of the Invention

[0004] To address at least one deficiency or improvement need in the prior art, the present invention provides a microscopic imaging method, system, and device. By using a beamforming imaging device with a single-camera multi-objective structure, different objectives are focused on planes at different heights, thereby increasing the depth-of-field range of the camera imaging.

[0005] To achieve the above objectives, according to a first aspect of the present invention, a microscopic imaging method is provided, the method comprising:

[0006] Select a beam combining imaging device with at least two objectives, point the objectives at the object to be tested, and install a camera at the camera interface of the beam combining imaging device;

[0007] Adjust all objectives so that there is a height difference in the depth of field range of all objectives;

[0008] The camera obtains images of the target areas corresponding to all the objectives.

[0009] The beam combining imaging device includes at least two lens tubes, an objective lens disposed at one end of each lens tube, and a light source corresponding to each lens tube; the lens tubes are arranged in parallel, and the objective lens has an infinity correction function;

[0010] The lens barrel includes a first lens barrel and at least one second lens barrel. One end of the first lens barrel is provided with a camera interface and the other end is connected to a first objective lens. One end of the second lens barrel is connected to a second objective lens and the other end is connected to the first lens barrel through a light-directing structure to guide the light collected by the second objective lens to the camera. A lens is provided in the first lens barrel, or in the first lens barrel and the second lens barrel, to focus the light path from infinity onto the target surface of the camera.

[0011] Furthermore, the above-mentioned microscopic imaging methods also include:

[0012] Adjusting all the objective lenses to create a height difference within their depth-of-field ranges specifically includes:

[0013] Adjust the objective lens so that the depth-of-field ranges of the objective lens are continuous in pairs.

[0014] Furthermore, the above-mentioned microscopic imaging methods also include:

[0015] Adjusting all the objective lenses to create a height difference within their depth-of-field ranges specifically includes:

[0016] Adjust the objective lens so that its depth of field range is discontinuous and covers different test surfaces of the object under test.

[0017] Furthermore, the above-mentioned microscopic imaging methods also include:

[0018] The objective lens is equipped with a corresponding objective lens adjustment assembly;

[0019] Adjusting all the objective lenses to create a height difference within their depth-of-field ranges specifically includes:

[0020] Adjust the objective lens adjustment assembly to create a height difference within the depth of field range of the objective lens.

[0021] Furthermore, the above-mentioned microscopic imaging methods also include:

[0022] The light source is connected to the lens barrel via a light-directing structure;

[0023] The image of the target area corresponding to the objective lens is obtained through the camera, specifically including:

[0024] The light sources corresponding to different objectives are turned on in a time-division manner, so that the camera can only acquire the image of the target area corresponding to one objective at a time; the camera or the object under test is moved to scan the target area of ​​the object under test, and the camera obtains an image of the entire target area;

[0025] Based on the correspondence between the light source turn-on time and the lens barrel and its target area, multiple images of the entire target area corresponding to different objectives are obtained.

[0026] Furthermore, the above-mentioned microscopic imaging methods also include:

[0027] The camera is a color camera; the light source is a monochromatic light source of different wavelengths, and each lens barrel corresponds to a monochromatic light source of one wavelength.

[0028] The image of the target area corresponding to the objective lens is obtained through the camera, specifically including:

[0029] Simultaneously turn on all light sources, move the camera or the object under test, scan the target area of ​​the object under test, and the camera obtains an image of the entire target area;

[0030] Based on the wavelength of the light source, the image of the target area is separated to obtain multiple images of the entire target area corresponding to different objectives.

[0031] Furthermore, the above-mentioned microscopic imaging methods also include:

[0032] The beam combining imaging device further includes a bandpass filter placed in each lens barrel, the bandpass filter being used to control the wavelength of light passing through the lens barrel; the bandpass filters in different lens barrels correspond to different wavelengths. The bandpass filter in the first lens barrel is positioned so as not to affect the light transmitted through the light redirection structure; the camera is a color camera.

[0033] The image of the target area corresponding to the objective lens is obtained through the camera, specifically including:

[0034] Simultaneously turn on all light sources, move the camera or the object under test, scan the target area of ​​the object under test, and the camera obtains an image of the entire target area;

[0035] Based on the wavelength of the bandpass filter, the image is separated to obtain the relationship between the image and the target region.

[0036] Furthermore, the above-mentioned microscopic imaging methods also include:

[0037] After obtaining multiple images from all the objectives through the camera, for the same area or pixel, the image with the highest clarity is selected from the multiple images; the multiple images with the highest clarity are combined to obtain a high-definition image of the entire target area.

[0038] According to a second aspect of the present invention, a microscopic imaging apparatus is also provided, comprising at least one processing unit and at least one storage unit, wherein the storage unit stores a computer program that, when executed by the processing unit, causes the processing unit to perform the steps of any of the methods described above.

[0039] According to a third aspect of the invention, a storage medium is also provided, which stores a computer program executable by an access authentication device, which, when run on the access authentication device, causes the access authentication device to perform the steps of any of the methods described above.

[0040] In summary, compared with the prior art, the above-described technical solutions conceived by this invention can achieve the following beneficial effects:

[0041] The microscopic imaging method provided by this invention uses a single-camera, multi-objective-structured beamforming device to focus different objectives on planes at different heights, which can increase the depth-of-field range of the camera imaging and reduce system complexity. Attached Figure Description

[0042] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0043] Figure 1 A schematic flowchart of a microscopic imaging method provided in an embodiment of the present invention;

[0044] Figure 2 This is a schematic diagram of the structure of a beam combining imaging device provided in an embodiment of the present invention;

[0045] Figure 3 A schematic diagram of the objective lens focusing height in a beam combining imaging device provided in an embodiment of the present invention;

[0046] Figure 4 This is a schematic diagram of the structure of another beam combining imaging device provided in an embodiment of the present invention;

[0047] Figure 5 This is a schematic diagram of the structure of another beam combining imaging device provided in an embodiment of the present invention;

[0048] Figure 6 This is a schematic diagram of a scanning method for a beam combining imaging device provided in an embodiment of the present invention. Detailed Implementation

[0049] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the invention. Furthermore, the technical features involved in the various embodiments of this invention described below can be combined with each other as long as they do not conflict with each other.

[0050] The terms "first," "second," "third," etc., used in the specification, claims, and accompanying drawings of this invention are used to distinguish different objects, not to describe a specific order. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or apparatus that includes a series of steps or units is not limited to the listed steps or units, but may optionally include steps or units not listed, or may optionally include other steps or units inherent to these processes, methods, products, or apparatuses.

[0051] like Figure 1 As shown, as an embodiment of the present invention, a microscopic imaging method is provided, the steps of which are as follows:

[0052] Select a beam combining imaging device with at least two objectives, point the objectives at the object to be tested, and install a camera at the camera interface of the beam combining imaging device;

[0053] Adjust all objectives so that there is a height difference in the depth of field range of all objectives;

[0054] The camera obtains images of the target areas corresponding to all the objectives.

[0055] This embodiment requires a single-camera multi-objective beam combining imaging device, the structure of which includes:

[0056] At least two microscope tubes, an objective lens disposed at one end of each microscope tube, and a light source corresponding to each microscope tube; the microscope tubes are arranged in parallel, and the objective lens has an infinity correction function;

[0057] The lens barrel includes a first lens barrel and at least one second lens barrel. One end of the first lens barrel is provided with a camera interface and the other end is connected to a first objective lens. One end of the second lens barrel is connected to a second objective lens and the other end is connected to the first lens barrel through a light-directing structure to guide the light collected by the second objective lens to the camera. A lens is provided in the first lens barrel, or in the first lens barrel and the second lens barrel, to focus the light path from infinity onto the target surface of the camera.

[0058] Figure 2 An embodiment of a specific beam combining imaging device is shown. For example... Figure 2 As shown, in this embodiment, it includes two lens tubes for light transmission: a first lens tube 3 and a second lens tube 4. The first lens tube 3 and the second lens tube 4 respectively enable the light collected by the first objective lens 61 and the light collected by the second objective lens 62 to be transmitted to a single camera 1 to achieve the above-mentioned function.

[0059] In this embodiment, the beam combining imaging device has a single camera interface 2 as the connection point to the camera 1. Therefore, a light-directing structure is needed to redirect the light from the object under test collected by the second objective lens. In this embodiment, the camera interface 2 is located at one end of the first lens barrel 3, and the other end of the first lens barrel 3 is set as the first objective lens 61. Therefore, the light collected by the first objective lens 61 directly enters the camera 1 through the first lens barrel 3. The second objective lens 62 is located at one end of the second lens barrel 4. The light collected by the second objective lens 62 passes through the second lens barrel 4 and then enters the camera 1 through the light-directing structure.

[0060] Furthermore, in this embodiment, the light redirection structure consists of a first beam combiner 71, a plane mirror 8, and a third objective lens 5. The third lens barrel 5 connects the first lens barrel 3 and the second lens barrel 4. A plane mirror 8 is positioned at the connection between the third lens barrel 5 and the second lens barrel 4, redirecting light from the second lens barrel 4 into the third lens barrel 5. The first beam combiner 71, located at the connection between the third lens barrel 5 and the first lens barrel 3, redirects light from the third lens barrel 5 to the first lens barrel 3, allowing it to enter the camera 1 via the camera interface 2, while simultaneously preventing obstruction of light from the first lens barrel 3 to the camera 1. The third lens barrel 5 is connected to one end of the second lens barrel 4; that is, one end of the second lens barrel 4 is connected to the third lens barrel 5, and the other end is connected to the second objective lens 62, thus avoiding waste of the second lens barrel 4 structure. A plane mirror 8 is positioned at one end of the second lens barrel 4 to redirect light from the second lens barrel 4 into the third lens barrel 5.

[0061] In this embodiment, the first lens barrel 3 and the second lens barrel 4 are arranged in parallel, so that after the first objective lens 61 and the second objective lens 62 are focused, their focal planes are parallel or coincident, avoiding the presence of an angle between the focal planes.

[0062] To more accurately redirect light rays, the normal direction of the first beam combiner 71 is the same as the bisector of the angle between the first lens tube 3 and the third lens tube 5, and the normal direction of the plane mirror 8 is the same as the bisector of the angle between the third lens tube 5 and the second lens tube 4. The angles of the beam combiner and mirrors are set to follow the law of reflection, allowing light rays from the second lens tube 4 to be redirected through the plane mirror 8 to the third lens tube 5, and then through the first beam combiner 71 to the camera 1.

[0063] Furthermore, as an optional embodiment, a lens barrel adjustment assembly 13 for the third lens barrel 5 is also included. The lens barrel adjustment assembly 13 can be used to adjust the length of the third lens barrel 5, and thus adjust the distance between the first lens barrel 3 and the second lens barrel 4, thereby changing the spacing between the target areas of the first objective lens 61 and the second objective lens 62.

[0064] In this embodiment, illumination is required for the object under test to achieve microscopic imaging. As a preferred method of illumination provision, coupling the illumination light path within the imaging light path can achieve better illumination. Therefore, based on this idea, a first light source 91 and a second light source 92 are arranged next to the first lens tube 3 and the second lens tube 4. The first light source 91 provides illumination to the area under test corresponding to the imaging light path in the first lens tube 3, and the second light source 92 provides illumination to the area under test corresponding to the imaging light path in the second lens tube 4. Similarly, a light-directing structure is used to make the illumination light path and the imaging light path coaxial. Therefore, the first light source 91 is connected to the first lens tube 3 through the fourth lens tube 10, and the second light source 92 is connected to the second lens tube 4 through the fifth lens tube 11. A second beam combiner 72 is arranged at the boundary between the fourth lens tube 10 and the first lens tube 3, and a third beam combiner 73 is arranged at the boundary between the fifth lens tube 11 and the second lens tube 4. Based on the same principle mentioned above, by setting the lens barrel and beam combiner as light redirection structures, the corresponding illumination light can be guided to the objective lens, thereby illuminating the object under test.

[0065] Those skilled in the art will readily recognize that the light source can be configured in ways not limited to those described above. For instance, the light source can be positioned at the bottom of the object under test. Specifically, the light source can be positioned below the platform supporting the object under test, corresponding to the position of the lens barrel. Alternatively, the light source can be configured using side illumination.

[0066] Furthermore, the first objective lens 61 and the second objective lens 62 are provided with corresponding objective lens adjustment components 12. The objective lens adjustment components 12 are used to achieve step S2 above, so that the first objective lens 61 and the second objective lens 62 are focused on the same focal plane. A preferred embodiment of the objective lens adjustment component 12 is a damped spiral structure, disposed on the first lens barrel 3 and the second lens barrel 4 near the first objective lens 61 and the second objective lens 62, for adjusting the extension and retraction of the first lens barrel 3 and the second lens barrel 4, thereby adjusting the focusing plane of the first objective lens 61 and the second objective lens 62.

[0067] Furthermore, it may also include an autofocus module for automatically focusing the first objective lens 61 and the second objective lens 62 onto a specific plane, such as the surface of the object under test. The autofocus system has various configuration options. As a preferred embodiment, this example selects... Figure 4The illustrated internal coaxial laser rangefinder autofocus method involves setting corresponding focusing light sources on the fourth lens barrel 10 and the fifth lens barrel 11, respectively, and using laser rangefinders for autofocus. The laser rangefinder autofocus method measures the working distance of the objective lens using a laser, transmits this information to a processing module (e.g., a microprocessor or PC), and the processing module then issues adjustment commands to a precision motion component (e.g., a motor). The objective lens, controlled by the precision motion component, adjusts its working distance to achieve the focusing position. Those skilled in the art will understand that an external focusing calculation module can also be used to automatically adjust the working distance of the objective lens to achieve the focusing position through image analysis of the camera 1.

[0068] Furthermore, this embodiment also includes a lens disposed within the lens barrel. The camera mentioned in this invention refers to an image processor chip, such as a CCD or CMOS chip; the camera 1 does not include a lens portion. The light collected by the first objective lens 61 and the second objective lens 62 enters the lens barrel and forms an infinity optical path. This infinity optical path cannot be directly imaged on the camera 1; therefore, a lens needs to be disposed within the lens barrel to converge the infinity optical path. A preferred arrangement is to place a lens 14 within the first lens barrel 3. Using a single lens 14, the light from both the first and second lens barrels 4 can be converged onto the camera 1. With this arrangement, the lens 14 does not need adjustment when the length of the third lens barrel 5 changes, meaning the light converging effect remains unaffected. Another arrangement is to place a corresponding lens in each lens barrel. In this arrangement, when the length of the light-directing structure, such as the third lens barrel 5, changes, the lens in the second lens barrel needs to be adaptively adjusted. The specific structure of the lens can be varied; for example, it can be a single lens or a lens group. The lens group can be multiple ordinary spherical lenses bonded together, ordinary spherical lenses spaced apart, or aspherical lenses calculated and configured as needed.

[0069] In this embodiment, the depths of field of the first objective lens 61 and the second objective lens 62 are set to not completely overlap. The depth of field range is related to the focal plane height of the objective lens. For example, when an objective lens with a depth of field of ±10μm is focused on a certain focal plane, its depth of field range is 10μm above and below that focal plane. That is, the image is sharp within the above-mentioned depth of field range. A preferred usage is as follows: Figure 3 As shown, by adjusting the focal plane height of the first objective lens 61 and the second objective lens 62 so that the depth-of-field ranges of the first objective lens 61 and the second objective lens 62 are exactly continuous, the beam combining imaging device can obtain a clear image within all the depth-of-field ranges covered by the first objective lens 61 and the second objective lens 62. Assuming that the depth of field of the first objective lens 61 and the second objective lens 62 is ±10μm, the depth of field of the beam combining imaging device is ±20μm.

[0070] Another preferred implementation is to adjust the depth-of-field ranges of the first objective lens 61 and the second objective lens 62 to be discontinuous. In this case, images can be simultaneously captured on a surface to be measured with a fixed height difference. For example, when the cross-section of the surface to be measured is concave or convex, and the height difference between the upper and lower surfaces is relatively fixed, the depth-of-field range of the first objective lens 61 can be set to cover the lower surface to be measured, and the depth-of-field range of the second objective lens 62 can cover the higher surface to be measured, allowing the entire surface to be measured to be detected simultaneously.

[0071] A third preferred implementation is to adjust the depth-of-field ranges of the first objective lens 61 and the second objective lens 62 to partially overlap. This can be applied to test surfaces with slight undulations. For example, when the depth of field of both the first objective lens 61 and the second objective lens 62 is ±10μm, and the test surface has slight undulations with a height difference of 25μm between the highest and lowest points, imaging with only one objective lens will result in an unclear image. In this case, setting the depth-of-field range of the first objective lens 61 and the second objective lens 62 to cover 25μm will allow for a clear image of the entire test surface.

[0072] Furthermore, the beam combining imaging device described in this embodiment may not be limited to, for example, Figure 2 The two lens tubes shown could, for example, be a three-tube structure, such as... Figure 5 As shown, it includes a first lens barrel and two second lens barrels, and in accordance with the above description, the depth of field range of the camera can be further expanded.

[0073] In this embodiment, camera 1 collects light from each objective lens for imaging, and further processing includes separating the images formed by different objective lenses. As an optional embodiment, imaging can be performed using a time-division multiplexing method. For example, the first light source 91 can be turned on during a first time period, at which time only the target area corresponding to the first objective lens 61 is illuminated, and camera 1 only acquires light from that area to image the target area corresponding to the first objective lens 61. During a second time period, the second light source 92 is turned on, at which time only the target area corresponding to the second objective lens 62 is illuminated, and camera 1 acquires light from that area to image the target area corresponding to the second objective lens 62. In practical applications, imaging can be performed by controlling the camera 1's response to the aforementioned light. The response time of camera 1, as well as the first and second time periods, can be set to several microseconds. Time-division imaging allows a single camera to image light collected from multiple objective lenses. Furthermore, the light source, lens barrel, and objective lens are in a one-to-one correspondence. For example, in this embodiment, the first light source 91 corresponds to the first lens barrel 3 and the first objective lens 61. When the first light source 91 is turned on, the imaging result recorded by the camera 1 at this time is matched with the target area corresponding to the first objective lens 61 to facilitate subsequent image processing steps.

[0074] As an optional embodiment, imaging can be achieved by setting bandpass filters and performing image separation. Different bandpass filters correspond to different wavelengths. For example, red and green bandpass filters are respectively set in the first lens barrel 3 and the second lens barrel 4. The first light source 91 and the second light source 92 are polychromatic light sources, and the wavelengths of the light corresponding to the polychromatic light sources should at least cover the wavelengths of all bandpass filters; for example, it could be white light covering both red and green light. When the first light source 91 and the second light source 92 are turned on simultaneously, the surface of the object under test will reflect light of multiple wavelengths. Because the first lens barrel 3 has a red bandpass filter, only red light can pass through in the first lens barrel 3; similarly, only green light passes through in the second lens barrel 4. At this time, the camera 1 will simultaneously image the red light in the first lens barrel and the green light in the second lens barrel. Subsequently, the red light image and the green light image can be separated by image separation, and the red light image can be matched one-to-one with the target area corresponding to the first lens barrel 3, and the green light image can be matched one-to-one with the target area corresponding to the second lens barrel 4, facilitating subsequent image processing steps. It is important to note that the bandpass filter in the first lens barrel 3 should be positioned so as not to interfere with the light transmitted through the second lens barrel 4. For example, in Figure 2 In this case, the bandpass filter of the first lens tube 3 can be positioned below the first beam combiner 71.

[0075] As an optional embodiment, imaging can also be achieved using monochromatic light source illumination and image separation. For example, the first light source 91 can be red light, and the second light source 92 can be green light. Since the light sources and lens barrels are configured in a one-to-one correspondence, when the first light source 91 and the second light source 92 are turned on simultaneously, the target area corresponding to the surface of the object under test will reflect light of different colors. The camera 1 will image the red light collected by the first objective lens 61 and the green light collected by the second objective lens 62. Similarly, the red light image and the green light image can be separated by image separation, and the red light image can be matched one-to-one with the target area corresponding to the first lens barrel 3, and the green light image can be matched one-to-one with the target area corresponding to the second lens barrel 4, which facilitates subsequent image processing steps.

[0076] Furthermore, the microscopic imaging method described in this embodiment achieves comprehensive imaging of the surface to be tested by scanning. Scanning imaging can be combined with the image separation method described above to achieve omnidirectional imaging of the entire target area of ​​the object under test. Typically, the method used is to fix the beam combining imaging device while the object under test moves to achieve scanning. Figure 6A specific implementation of the scanning method is shown. For example, when performing imaging detection on one side of the object to be tested, the beam combining imaging device can be fixed first, and then the beam combining imaging device can capture an image of region 101 on the surface to be tested of the object to be tested. Then, the object to be tested is controlled to move so that the beam combining imaging device sequentially images each region along the route of region 101-region 102-region 103-region 104. In this way, the imaging detection of this region on the surface to be tested of the object to be tested can be completed. Figure 6 The direction of the dotted line in the image represents the relative movement direction between the beam combining imaging device and the object under test in the above scanning method. Those skilled in the art will readily understand that the relative movement can also be achieved by moving the beam combining imaging device while keeping the object under test stationary, and the preset path is not limited to the method described in the above embodiments.

[0077] Furthermore, after obtaining the image of the surface under test using the aforementioned scanning method, image processing can be used to select the clearest image of the surface. Specifically, after acquiring multiple images from all the objective lenses using the camera, for the same area or pixel, the image with the highest clarity is selected from the multiple images; these images with the highest clarity are then combined to obtain a high-resolution image of the entire target area. For example, if the surface under test has slight undulations, the depth-of-field range of the two objective lenses can be set to cover the entire height range of the surface under test, controlling both objective lenses to scan and image the entire surface. The two objective lenses will image the entire surface under test separately according to different target areas. Further, image processing can be used to filter the clear images from the target area images, and then these clear images can be stitched together to obtain a clear image of the entire surface under test.

[0078] As another embodiment of the present invention, a microscopic imaging device is also provided, which includes at least one processing unit and at least one storage unit, wherein the storage unit stores a computer program, and when the computer program is executed by the processing unit, the processing unit performs the steps of any of the methods described above.

[0079] The present invention also provides a computer-readable storage medium having a computer program stored thereon, which, when executed by a processor, implements the steps of the above-described method. The computer-readable storage medium may include, but is not limited to, any type of disk, including floppy disks, optical disks, DVDs, CD-ROMs, microdrives, as well as magneto-optical disks, ROMs, RAMs, EPROMs, EEPROMs, DRAMs, VRAMs, flash memory devices, magnetic cards or optical cards, nanosystems (including molecular memory ICs), or any type of medium or device suitable for storing instructions and / or data.

[0080] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0081] Those skilled in the art will readily understand that the above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A microscopic imaging method, characterized in that, include: Select a beam combining imaging device with at least two objectives, point the objectives at the object to be tested, and install a camera at the camera interface of the beam combining imaging device; Adjust all objectives so that there is a height difference in the depth of field range of all objectives; The camera obtains images of the target areas corresponding to all the objectives. The beam combining imaging device includes at least two lens tubes, an objective lens disposed at one end of each lens tube, and a light source corresponding to each lens tube; the lens tubes are arranged in parallel, and the objective lens has an infinity correction function; The lens barrel includes a first lens barrel and at least one second lens barrel. One end of the first lens barrel is provided with a camera interface, and the other end is connected to a first objective lens. One end of the second lens barrel is connected to a second objective lens, and the other end is connected to the first lens barrel through a light-directing structure to guide the light collected by the second objective lens to the camera. A lens is provided in the first lens barrel, or in the first lens barrel and the second lens barrel, to converge the light path from infinity to the target surface of the camera. The depth of field of the first objective lens and the second objective lens is set to not completely overlap, and the depth of field range is highly correlated with the focusing surface of the objective lens. When the camera is a color camera; the light source is a monochromatic light source of different wavelengths; and each lens barrel corresponds to a monochromatic light source of one wavelength. The image of the target area corresponding to the objective lens is obtained through the camera, specifically including: Simultaneously turn on all light sources, move the camera or the object under test, scan the target area of ​​the object under test, and the camera obtains an image of the entire target area; Based on the wavelength of the light source, the image of the target area is separated to obtain multiple images of the entire target area corresponding to different objectives.

2. The microscopic imaging method as described in claim 1, characterized in that: Adjusting all the objective lenses to create a height difference within their depth-of-field ranges specifically includes: Adjust the objective lens so that the depth-of-field ranges of the objective lens are continuous in pairs.

3. The microscopic imaging method as described in claim 1, characterized in that: Adjusting all the objective lenses to create a height difference within their depth-of-field ranges specifically includes: Adjust the objective lens so that its depth of field range is discontinuous and covers different test surfaces of the object under test.

4. The microscopic imaging method as described in claim 1, characterized in that: The objective lens is equipped with a corresponding objective lens adjustment assembly; Adjusting all the objective lenses to create a height difference within their depth-of-field ranges specifically includes: Adjust the objective lens adjustment assembly to create a height difference within the depth of field range of the objective lens.

5. The microscopic imaging method as described in claim 1, characterized in that: The light source is connected to the lens barrel via a light-directing structure; The image of the target area corresponding to the objective lens is obtained through the camera, specifically including: The light sources corresponding to different objectives are turned on in a time-division manner, so that the camera can only acquire the image of the target area corresponding to one objective at a time; the camera or the object under test is moved to scan the target area of ​​the object under test, and the camera obtains an image of the entire target area; Based on the correspondence between the light source turn-on time and the lens barrel and its target area, multiple images of the entire target area corresponding to different objectives are obtained.

6. The microscopic imaging method as described in claim 1, characterized in that: The beam combining imaging device further includes a bandpass filter placed in each lens barrel, the bandpass filter being used to control the wavelength of light passing through the lens barrel; the bandpass filters in different lens barrels correspond to different wavelengths. The bandpass filter in the first lens barrel is positioned so as not to affect the light transmitted through the light redirection structure; the camera is a color camera. The image of the target area corresponding to the objective lens is obtained through the camera, specifically including: Simultaneously turn on all light sources, move the camera or the object under test, scan the target area of ​​the object under test, and the camera obtains an image of the entire target area; Based on the wavelength of the bandpass filter, the image is separated to obtain the relationship between the image and the target region.

7. The microscopic imaging method according to any one of claims 5-6, characterized in that: After obtaining multiple images from all the objectives through the camera, for the same area or pixel, the image with the highest clarity is selected from the multiple images; the multiple images with the highest clarity are combined to obtain a high-definition image of the entire target area.

8. A microscopic imaging device, characterized in that, The method includes at least one processing unit and at least one storage unit, wherein the storage unit stores a computer program that, when executed by the processing unit, causes the processing unit to perform the steps of the method according to any one of claims 1 to 7.

9. A storage medium, characterized in that, It stores a computer program executable by an access authentication device, which, when run on the access authentication device, causes the access authentication device to perform the steps of the method according to any one of claims 1 to 7.

Images