Crystal stick device and method

Abstract

The present application belongs to the technical field of crystal sticking rod, and particularly relates to a crystal sticking rod device and method. The crystal sticking rod device comprises an L-shaped sticking rod platform, a dovetail female head, a screw, a dovetail male head, a material plate, a sliding platform, a front-back rotating platform, a left-right rotating platform, a crystal, a resin strip, an inclination sensor, a wire, an angle display, a platform screw rod, a front-back rotating adjusting screw rod and a left-right rotating adjusting screw rod. The present application utilizes the principle of angle conversion, uses a 90-degree L-shaped sticking rod platform, vertically places the material plate and the crystal on the platform, adjusts the position of the crystal to make the end face direction of the crystal consistent with the end face direction of the material plate, thereby ensuring that the end face of the crystal sticking on the material plate is parallel to the cutting plane during slicing, and avoiding slicing deviation caused by sticking rod deviation; the real-time angle adjusting method is used to make the crystal direction angle controllable and adjustable, and has the advantages of convenient operation, high sticking rod directional precision and high production efficiency.

Description

Technical Field

[0001] This invention belongs to the field of crystal sticking technology, specifically relating to a crystal sticking device and method. Background Technology

[0002] In the semiconductor industry, after crystal growth is completed, it needs to be oriented and sliced ​​to obtain wafers with specific crystal orientations before being applied to semiconductor devices. Before the crystal slicing process, orientation rod bonding is performed, which involves gluing the crystal rod to the substrate so that it can be installed on the slicing equipment for multi-wire cutting of the crystal. The slicing process cuts the crystal into thin slices to ensure that the crystal orientation angles of the sliced ​​wafers meet the technical requirements of semiconductor devices.

[0003] In the conventional gluing process, the substrate plate is horizontally fixed on the gluing platform. Glue is used to horizontally adhere the oriented crystal to the substrate plate, keeping the crystal axis parallel to the substrate plate axis. After the glue cures, the substrate plate and crystal solidify into a single unit. The substrate plate, along with the crystal, is then installed onto the slicer for slicing. The crystal and substrate plate are mainly secured by a mechanical structure to keep the crystal axis parallel to the substrate plate axis. After the glue cures, the substrate plate with the attached crystal is removed and loaded into the slicing equipment for slicing. In this method, the reference surface of the bonding stage wears down with frequent use, easily causing deviations in the bonding angle of the crystal rods. During manual operation, the force applied to the crystal and the contamination of the adhesive can cause the crystal to shift during bonding. After bonding each crystal rod on the bonding stage, it is necessary to wait for the adhesive to fully cure before removing the material plate, which occupies the bonding stage for a long time and has low utilization. Due to adhesive stress and crystal stress, the crystal will deform when the pushing force is removed after bonding, resulting in positional shift. At this time, there is no intuitive data monitoring, and it is impossible to effectively verify the final positional accuracy of the crystal. In addition, in the slicing process, the parallel relationship between the crystal end face and the cutting surface ultimately affects the slicing accuracy. The crystal rod axis is only a reference. Relying entirely on the crystal rod axis for positioning will also lead to large deviations in the cut wafers, affecting the wafer quality.

[0004] To address the aforementioned issues, patent document CN101550604B discloses a device for bonding silicon single crystal rods. In this device, a hand-operated lever is located on the front and rear clamping plates, fixed to the base via a handle support rod, and movably connected to the handle support rod. The front clamping plate, the lower front clamping plate, and the rear clamping plate are located on both sides of the base, respectively mounted on the front clamping plate bracket and the rear clamping plate bracket, and perpendicular to the base. At least one of the front and rear clamping plates is movable. A centerline positioning strip is located on the base between the front and rear clamping plates. The front clamping plate bracket can be flipped on the base and fixed by a fixing pin. This invention is only suitable for bonding crystals without orientation requirements, and is not suitable for situations where crystal orientation is required. Furthermore, it uses mechanical fixing methods in the positioning and bonding process, fixing workpiece connectors, backing plates, etc., by mechanical clamping and extrusion of screws and bolts. The stability of the force during each fixing is uncontrollable, and the tightening or loosening of the bolts will affect the bonding angle. This invention does not have any fixing accuracy testing instruments, and fixing is done by feel alone, so the accuracy cannot be guaranteed. In addition, the structure is complex, the operation is difficult, and the efficiency is low.

[0005] Patent document CN115478325A discloses a stick-adhesive orientation instrument, a stick-adhesive orientation device, and a stick-adhesive orientation method, including a base, a material plate, a first control valve, a sliding plate, a reference plate, a fixed plate, a second control valve, a rotating mechanism, a measuring rotating arm, and a probe assembly. This patent belongs to the traditional stick-adhesive orientation method, which uses the design of a reference surface, a sliding plate, and a probe to achieve crystal positioning during the stick-adhesive process by measuring the distance between the crystal and the reference surface. The main drawbacks are: this invention positions the crystal indirectly, resulting in low positioning accuracy. It requires first positioning the material plate separately, then positioning the crystal, and finally determining the relative position between the crystal and the material plate. Furthermore, the material plate is fixed to the sliding plate, which moves during the stick-adhesive process, affecting the positioning accuracy of the material plate. Additionally, this invention involves many steps, has a complex structure, and is inconvenient to operate.

[0006] Patent document CN202922778U discloses an automatic orientation adhesive stick device, including a worktable, an X-ray tube, a counting tube, a backing plate, an angle measuring device, a lifting device, and a translation device. An X-ray tube is installed on one side of the front of the worktable, and there is a slit in the window next to the X-ray tube. A counting tube is installed behind the worktable in the X-ray path. An angle adjusting device and an angle measuring device are installed at the same rotation center between the slit and the counting tube. The lifting device and the translation device are installed above the angle adjusting device. A base plate is installed in the middle of the worktable. This patent utilizes an orientation instrument, motor, and various mechanical structures to automate the sticking process, focusing on controlling the crystal orientation accuracy. However, the crystal is fixed to the material plate, which in turn is fixed to the cutting equipment. Therefore, if the relative positions of the material plate and the crystal are not consistent, the crystal will eventually exhibit a cutting angle deviation on the cutting equipment. This invention ignores the influence of the consistency of the relative positions of the material plate and the crystal on the crystal orientation of the wafer after slicing. Furthermore, the invention's device has a complex structure and numerous operating steps, leading to a continuous increase in the cumulative error of each mechanical structure, which is detrimental to improving positioning accuracy. In addition, the device employs an orientation instrument, various motor circuits, and a control system, resulting in high costs. Summary of the Invention

[0007] This invention addresses the shortcomings and problems of existing technologies by proposing a crystal rod gluing device and method. The principle of this invention is that, on the same slicing machine, with the material plate stably fixed, the mechanical positioning stability ensures that the end face of the material plate remains parallel to the cutting plane. Since the end face of the crystal glued to the material plate must also remain parallel to the cutting plane during slicing, it is concluded that, provided the crystal orientation is accurate, the crystal end face should remain parallel to the cutting plane in space during slicing. Under this premise, this invention utilizes the principle of angle conversion, employing a 90-degree L-shaped gluing platform to vertically place the material plate and crystal on the platform. An angle sensor measures the angle values ​​of the crystal end face and the material plate end face in the X and Y horizontal directions. By adjusting the crystal position, the direction of the crystal end face is aligned with the direction of the material plate end face, thereby ensuring that the end face of the crystal glued to the material plate is parallel to the cutting plane during slicing. This achieves high-precision crystal rod slicing and avoids slicing deviations caused by gluing deviations. This method uses a high-precision tilt sensor with an accuracy of ±2″. In this invention, after the crystal is positioned, quick-drying adhesive is used for positioning and bonding, which can be completed within one minute. After crystal positioning, the material plate is removed, and high-strength adhesive is used for repeated and reliable bonding. This method greatly improves the efficiency of the gluing platform and increases production efficiency. In summary, this invention has advantages such as simple structure, convenient operation, high gluing rod orientation accuracy, and high production efficiency.

[0008] To address the problems existing in the background technology, the present invention adopts the following technical solution:

[0009] A crystal sticking device includes an L-shaped sticking platform, a dovetail groove female head, a screw, a dovetail groove male head, a material plate, a sliding platform, a front and rear rotating platform, a left and right rotating platform, a crystal, a resin strip, an angle sensor, a wire, an angle display, a platform screw, a front and rear rotating adjustment screw, and a left and right rotating adjustment screw.

[0010] Among them, the dovetail groove female head is installed on the L-shaped adhesive rod platform. The dovetail groove female head is provided with screws on the side, and the dovetail groove female head and the dovetail groove male head are fixed by the screws. The dovetail groove male head is connected to a material plate, and the material plate is fixed vertically.

[0011] The L-shaped adhesive rod platform is equipped with a sliding platform, and the sliding platform is equipped with a front and rear rotating platform. The front and rear rotating platforms are fixedly connected to the left and right rotating platforms, and the centers of the front and rear rotating platforms and the left and right rotating platforms are on the same axis. The platform screw is installed on the sliding platform, the front and rear rotation adjustment screw is installed on the front and rear rotating platforms, and the left and right rotation adjustment screw is installed on the left and right rotating platforms. The crystal is placed vertically on the left and right rotating platforms with the crystal end face facing upwards, and a resin strip is fixed to the side of the crystal.

[0012] The sliding platform is a linear slide, and the crystal is moved in a straight line by adjusting the platform screw, so that it moves towards the material plate.

[0013] The linear slide is driven by a lead screw or belt.

[0014] In this process, by adjusting the front and rear rotation adjustment screws on the front and rear rotation platforms and the left and right rotation adjustment screws on the left and right rotation platforms, the rotation platforms are rotated, which together adjust the direction of the crystal end face on the X and Y axes.

[0015] The front and rear rotating platforms and the left and right rotating platforms can be connected to the transmission mechanism by a rotary adjusting screw to drive the rotating platforms to rotate, such as an angle platform; or, the rotary adjusting screw can be directly connected to the rotating platforms to drive the rotating platforms to rotate.

[0016] In industrial applications, corner stage, also known as tilt stage, angle stage, or angle tilting stage, is mainly used to adjust the tilt angle of an object.

[0017] Preferably, the sliding platform, the front and rear rotating platform, and the left and right rotating platform are adjusted manually or electrically;

[0018] Preferably, the sliding range of the sliding platform is 1mm-100mm;

[0019] Preferably, the angle adjustment range of the front and rear rotating platforms is ±10°;

[0020] Preferably, the angle adjustment range of the left and right rotating platform is ±10°.

[0021] The tilt sensor is connected to the angle display via wires. The tilt sensor is movable. When placed on the end face of the material plate, it measures the direction of the end face of the material plate. When placed on the end face of the crystal, it measures the direction of the end face of the crystal. By adjusting the position of the crystal, the direction data of the crystal end face measured by the tilt sensor and the end face of the material plate are consistent. At this time, the crystal is glued to the material plate, which can ensure the accuracy of crystal sticking.

[0022] The method for attaching crystal rods using the above-mentioned crystal rod attaching device includes the following steps:

[0023] S1: Install the male dovetail groove of the fixed material plate into the inside of the female dovetail groove on the sticking rod worktable;

[0024] S2: Use tools to tighten the screws on the side of the dovetail groove female head;

[0025] S3: Place the crystal with the resin strip glued on onto the front and rear rotating platforms;

[0026] S4: Place the tilt sensor on the end face of the material plate;

[0027] S5: Observe the angle display, determine the angle values ​​between the end face of the material plate and the X and Y axes, and record them as X1 and Y1;

[0028] S6: Place the tilt sensor onto the surface of the crystal end face;

[0029] S7: Observe the angle display to determine the angle values ​​between the crystal end face and the X and Y axes, denoted as X2 and Y2;

[0030] S8: By adjusting the front and rear rotation adjustment screws on the front and rear rotating platforms and by adjusting the left and right rotation adjustment screws on the left and right rotating platforms, the rotating platforms are driven to rotate, so that the X2 and Y2 values ​​measured by the tilt sensor are equal to the recorded X1 and Y1 values.

[0031] S9: After the X2 and Y2 axis values ​​are adjusted, apply quick-drying glue to the side of the resin strip;

[0032] S10: Adjust the platform screw on the sliding platform to move the crystal toward the material plate, so that the resin strip on the crystal is close to the surface of the material plate and the resin strip is in contact with the material plate, while ensuring that the values ​​of X2 and Y2 are always equal to the values ​​of X1 and Y1.

[0033] S11: After the resin strip and the material plate are bonded and cured, the crystal, resin strip, material plate and dovetail male head are connected as a whole. At this time, the screws can be loosened and the whole thing can be removed.

[0034] S12: Apply glue thoroughly between the resin strip and the material plate to make the material plate and the resin strip bond more firmly and meet the cutting strength requirements;

[0035] S13: After the glue has cured, the integrated device consisting of the crystal, resin strip, material plate and dovetail groove male head is horizontally installed on the cutting equipment for slicing.

[0036] In steps S8-S10, if the crystal changes position during the movement of the sliding platform, it is still necessary to continuously adjust the front and rear rotating platforms and the left and right rotating platforms to adjust the crystal in the X and Y directions, so as to ensure that the crystal end face and the material plate end face are aligned in space after the final sticking.

[0037] In step S10, the quick-drying adhesive used is 101, 401, or 502 adhesive.

[0038] In step S12, in order to effectively control the flow direction of the adhesive, the material plate needs to be placed horizontally.

[0039] The beneficial effects of this invention are:

[0040] 1. This invention utilizes the fixed spatial relationship between the substrate, crystal, and cutting surface during crystal slicing. Since the substrate end face and crystal end face are aligned during crystal slicing, the orientation of the substrate end face and crystal end face in space is adjusted by the sticking device. Once their orientations are aligned, the sticking position of the crystal can be directly and accurately determined. On the one hand, this improves the convenience of sticking, simplifies operation, facilitates implementation, reduces process complexity, and increases sticking speed, thus improving production efficiency. On the other hand, in traditional sticking processes, the substrate is fixed first, and then the crystal position is determined. This process ignores the problem of inaccurate substrate positioning caused by wear of the sticking table, abnormal positioning, foreign object jamming, etc. Even if the crystal and substrate are aligned axially after inaccurate substrate positioning, the overall orientation of the two relative to the cutting surface is always inaccurate, ultimately leading to a large crystal orientation deviation of the cut wafer and affecting wafer quality. The sticking process of this invention directly determines that the substrate end face and crystal end face are aligned, that is, the requirement for substrate positioning is omitted during the bonding process; only the substrate needs to be fixed. In this invention, the position data of the end face of the material plate and the end face of the crystal are directly measured by the instrument, which has high accuracy, improves the accuracy of the stick position, reduces stick deviation, and facilitates the accurate control of crystal orientation during crystal slicing.

[0041] 2. The device of the present invention has a simple structure and uses only a simple mechanical device. It is equipped with a low-cost tilt sensor, which can accurately determine the position of the sticking rod. Compared with the traditional sticking process that uses X-ray diffractometers, complex positioning mechanisms, and high-cost motors, it saves investment and reduces costs.

[0042] 3. The tilt sensor in this method has high measurement accuracy, reaching the second level, which is more than two orders of magnitude higher than the accuracy grading in traditional orientation. This greatly improves the crystal orientation accuracy of the sticking rod and the crystal orientation accuracy of the cutting, thus improving product quality. Attached Figure Description

[0043] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0044] Figure 1 This is a schematic diagram showing the direction of the end face of the material plate during the crystal bonding process;

[0045] Figure 2 This is a schematic diagram showing the measurement of the crystal end face orientation during the crystal bonding process.

[0046] Figure 3 This is a schematic diagram of the crystal after it has been attached to the rod.

[0047] Figure 4 This is a front view of the structure of the crystal after it has been bonded to the rod.

[0048] Figure 5 This is a side view of the structure after the crystal is attached to the rod;

[0049] Figure 6 This is a top view of the structure of the crystal after it has been bonded to the rod.

[0050] Figure 7 This is a schematic diagram of the left-right rotating platform in Example 1;

[0051] Figure 8 This is a cross-sectional view of the left and right rotating platform in Example 1;

[0052] Figure 9 This is a schematic diagram of the rotation of the left and right rotating platform in Example 1;

[0053] Figure 10 This is a schematic diagram of the left-right rotating platform in Example 2;

[0054] Figure 11 This is a cross-sectional view of the left and right rotating platform in Example 2.

[0055] The components include: L-shaped adhesive rod platform 1, dovetail groove female head 2, screw 3, dovetail groove male head 4, material plate 5, sliding platform 6, front and rear rotating platform 7, left and right rotating platform 8, crystal 9, resin strip 10, tilt sensor 11, wire 12, angle display 13, platform screw 61, front and rear rotating adjustment screw 71, left and right rotating adjustment screw 81, left fixed bearing 82, adjusting shaft 83, rotating worm gear 84, right fixed bearing 85, rotating turbine 86, rotating platform 87, rotating platform base 22, rotating plane 23, left bearing 24, and right bearing 25. Detailed Implementation

[0056] The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0057] Example 1: A crystal sticking device, comprising an L-shaped sticking platform 1, a dovetail groove female head 2, a screw 3, a dovetail groove male head 4, a material plate 5, a sliding platform 6, a front and rear rotating platform 7, a left and right rotating platform 8, a platform screw 61, a front and rear rotating adjusting screw 71, a left and right rotating adjusting screw 81, a crystal 9, a resin strip 10, an angle sensor 11, a wire 12, an angle display 13, a left fixed bearing 82, an adjusting shaft 83, a rotating worm gear 84, a right fixed bearing 85, a rotating turbine 86, and a rotating platform 87;

[0058] Among them, the dovetail groove female head 2 is installed on the L-shaped adhesive rod platform 1. The dovetail groove female head 2 is provided with screws 3 on its side. The dovetail groove female head 2 and the dovetail groove male head 4 are fixed by the screws 3. The dovetail groove male head 4 is connected to a material plate 5, which is vertically fixed.

[0059] Among them, the L-shaped adhesive rod platform 1 is provided with a sliding platform 6, the sliding platform is connected to a front and rear rotating platform 7, the front and rear rotating platform 7 is connected to a left and right rotating platform 8, the crystal 9 is placed vertically on the left and right rotating platform 8 with the crystal end face facing upward, and a resin strip 10 is fixed on the side of the crystal 9.

[0060] Among them, the platform screw 61 is installed on the sliding platform 6, the front and rear rotation adjustment screw 71 is installed on the front and rear rotation platform 7, and the left and right rotation adjustment screw 81 is installed on the left and right rotation platform 8;

[0061] The sliding platform is a linear slide. The crystal moves in a straight line by adjusting the platform screw 61, causing it to move towards the material plate. The sliding range of the sliding platform is 100mm.

[0062] Among them, the left and right rotating platform 8 is a manual corner platform, the structure of which is shown in [reference needed]. Figure 7 and Figure 8 It consists of a left-right rotation adjusting screw 81, a left-side fixed bearing 82, an adjusting shaft 83, a rotating worm gear 84, a right-side fixed bearing 85, a rotating turbine 86, and a rotating platform 87. The rotating platform 87 is rotated by adjusting the left-right rotation adjusting screw 81 (see...). Figure 9This changes the orientation of the crystal end face placed on the rotating platform 87, which is used to adjust the angle between the crystal end face and the X-axis direction. The front and rear rotating platforms 7 are also manual corner stages. The front and rear rotating platforms and the left and right rotating platforms have the same structure. The front and rear rotating platforms and the left and right rotating platforms are fixedly connected at a 90-degree intersection, which is used to adjust the angle between the crystal end face and the Y-axis direction. The centers of the front and rear rotating platforms and the left and right rotating platforms are located on the same axis. The angle adjustment range of the front and rear rotating platforms and the left and right rotating platforms is ±10°.

[0063] The tilt sensor 11 is connected to the angle display 13 via a wire 12. The tilt sensor 11 is movable. When the tilt sensor is placed on the end face of the material plate, it measures the direction of the end face of the material plate. When the tilt sensor is placed on the end face of the crystal, it measures the direction of the end face of the crystal.

[0064] The method for attaching rods using a crystal rod-attaching device includes the following preparation steps:

[0065] S1: Install the dovetail groove male head 4 connected to the material plate 5 into the dovetail groove female head 2 on the sticking rod worktable 1;

[0066] S2: Use tools to tighten the screws 3 on the side of the dovetail groove female head 2 to fix the dovetail groove male head 4;

[0067] S3: Place the crystal 9 with the resin strip 10 glued on onto the left and right rotating platform 8;

[0068] S4: Place the tilt sensor 11 on the end face of the material plate, see Figure 1 ;

[0069] S5: Observe the angle display 13, determine the angle values ​​between the end face of the material plate and the X and Y axes, and record them as X1=0.2821°, Y1=-0.3483°;

[0070] S6: Place the tilt sensor 11 onto the crystal end face, see Figure 2 ;

[0071] S7: Observe the angle display 13 to determine the angle values ​​between the crystal end face and the X and Y axis directions, and record them as X2=0.7393°, Y2=0.8762°;

[0072] S8: By adjusting the forward and backward rotation adjustment screw 71, the tilt angle between the crystal end face and the Y-axis direction is changed, so that the Y2 value measured by the tilt sensor 11 is equal to the recorded Y1 value; by adjusting the left and right rotation adjustment screw 81, the tilt angle between the crystal end face and the X-axis direction is changed, so that the X2 value measured by the tilt sensor 11 is equal to the recorded X1 value.

[0073] S9: After the X2 and Y2 values ​​are adjusted, apply 502 quick-drying glue to the side of the resin strip 10;

[0074] S10: Adjust the platform screw 61 to move the sliding platform 6 toward the material plate, so that the resin strip 10 on the crystal 9 is close to the surface of the material plate 5, so that the resin strip is in contact with the material plate, while ensuring that the values ​​of X2 and Y2 are always equal to the values ​​of X1 and Y1.

[0075] S11: After the resin strip 10 and the material plate 5 are bonded and cured, the crystal 9, resin strip 10, material plate 5, and dovetail male connector 4 are connected as a whole. At this time, the screw 3 can be loosened and the whole assembly can be removed. See the schematic diagram after the crystal is bonded. Figure 3 Its front view, side view and top view are shown in Figure 4 , Figure 5 and Figure 6 , Figure 6 The X and Y directions of the crystal end face are shown;

[0076] S12: Place the material plate horizontally and apply the adhesive stick fully between the resin strip 10 and the material plate 5 to make the material plate 5 and the resin strip 10 bond more firmly and meet the cutting strength requirements.

[0077] S13: After the glue has cured, the integrated device consisting of crystal 9, resin strip 10, material plate 5 and dovetail groove male head 4 is horizontally installed onto the cutting equipment for slicing.

[0078] Example 2:

[0079] A crystal sticking device includes an L-shaped sticking platform 1, a dovetail groove female head 2, a screw 3, a dovetail groove male head 4, a material plate 5, a sliding platform 6, a front and rear rotating platform 7, a left and right rotating platform 8, a platform screw 61, a front and rear rotation adjustment screw 71, a left and right rotation adjustment screw 81, a crystal 9, a resin strip 10, an angle sensor 11, a wire 12, an angle display 13, a rotating platform base 22, a rotating plane 23, a left bearing 24, and a right bearing 25.

[0080] Among them, the dovetail groove female head 2 is installed on the L-shaped adhesive rod platform 1. The dovetail groove female head 2 is provided with screws 3 on its side. The dovetail groove female head 2 and the dovetail groove male head 4 are fixed by the screws 3. The dovetail groove male head 4 is connected to a material plate 5, which is vertically fixed.

[0081] Among them, the L-shaped adhesive rod platform 1 is provided with a sliding platform 6, the sliding platform is connected to a front and rear rotating platform 7, the front and rear rotating platform 7 is connected to a left and right rotating platform 8, the crystal 9 is placed vertically on the left and right rotating platform 8 with the crystal end face facing upward, and a resin strip 10 is fixed on the side of the crystal 9.

[0082] Among them, the platform screw 61 is installed on the sliding platform 6, the front and rear rotation adjustment screw 71 is installed on the front and rear rotation platform 7, and the left and right rotation adjustment screw 81 is installed on the left and right rotation platform 8;

[0083] The sliding platform is a linear slide. The crystal moves in a straight line by adjusting the platform screw 61, causing it to move towards the material plate. The sliding range of the sliding platform is 100mm.

[0084] The left and right rotating platform 8 consists of a left and right rotating adjusting screw 81, a rotating platform base 22, a rotating plane 23, a left bearing 24, and a right bearing 25, as shown in the figure. Figure 10 and Figure 11 The left and right rotation adjustment screw 81 is connected to the left bearing 24 and the right bearing 25. The left bearing 24 is connected to the rotating platform base 22, and the right bearing 25 is connected to the rotating platform base 22. A rotating plane 23 is fixed on the left and right rotation adjustment screw 81. When the left and right rotation adjustment screw 81 is rotated, the rotating plane 23 is rotated, changing the direction of the crystal end face placed on the rotating plane 23, which is used to adjust the angle between the crystal end face and the Y-axis direction. The front and rear rotating platforms and the left and right rotating platforms have the same structure. The front and rear rotating platforms and the left and right rotating platforms are fixedly connected at a 90-degree intersection, which is used to adjust the angle between the crystal end face and the X-axis direction. The centers of the front and rear rotating platforms and the left and right rotating platforms are located on the same axis. The angle adjustment range of the front and rear rotating platforms and the left and right rotating platforms is ±10°.

[0085] The tilt sensor 11 is connected to the angle display 13 via a wire 12. The tilt sensor 11 is movable. When the tilt sensor is placed on the end face of the material plate, it measures the direction of the end face of the material plate. When the tilt sensor is placed on the end face of the crystal, it measures the direction of the end face of the crystal.

[0086] The method for attaching rods using a crystal rod-attaching device includes the following preparation steps:

[0087] S1: Install the dovetail groove male head 4 connected to the material plate 5 into the dovetail groove female head 2 on the sticking rod worktable 1;

[0088] S2: Use tools to tighten the screws 3 on the side of the dovetail groove female head 2 to fix the dovetail groove male head 4;

[0089] S3: Place the crystal 9 with the resin strip 10 glued on onto the left and right rotating platform;

[0090] S4: Place the tilt sensor 11 on the end face of the material plate, see Figure 1 ;

[0091] S5: Observe the angle display 13, determine the angle values ​​between the end face of the material plate and the X and Y axes, and record them as X1=0.2005°, Y1=0.4749°;

[0092] S6: Place the tilt sensor 11 onto the crystal end face, see Figure 2;

[0093] S7: Observe the angle display 13 to determine the angle values ​​between the crystal and the X and Y axes, and record them as X2=0.8466°, Y2=0.3635°;

[0094] S8: By adjusting the forward and backward rotation adjustment screw 71, the tilt angle between the crystal end face and the X-axis direction is changed, so that the X2 value measured by the tilt sensor 11 is equal to the recorded X1 value; by adjusting the left and right rotation adjustment screw 81, the tilt angle between the crystal end face and the Y-axis direction is changed, so that the Y2 value measured by the tilt sensor 11 is equal to the recorded Y1 value.

[0095] S9: After the X2 and Y2 values ​​are adjusted, apply 101 quick-drying glue to the side of the resin strip 10;

[0096] S10: Adjust the platform screw 61 to move the sliding platform 6 toward the material plate, so that the resin strip 10 on the crystal 9 is close to the surface of the material plate 5, so that the resin strip is in contact with the material plate, while ensuring that the values ​​of X2 and Y2 are always equal to the values ​​of X1 and Y1.

[0097] S11: After the resin strip 10 and the material plate 5 are bonded and cured, the crystal 9, resin strip 10, material plate 5, and dovetail male connector 4 are connected as a whole. At this time, the fixing screw 3 can be loosened and the whole assembly can be removed. See the schematic diagram after the crystal is bonded. Figure 3 Its front view, side view and top view are shown in Figure 4 , Figure 5 and Figure 6 , Figure 6 The X and Y directions of the crystal end face are shown;

[0098] S12: Place the material plate horizontally and apply the adhesive stick fully between the resin strip 10 and the material plate 5 to make the material plate 5 and the resin strip 10 bond more firmly and meet the cutting strength requirements.

[0099] S13: After the glue has cured, the integrated device consisting of crystal 9, resin strip 10, material plate 5 and dovetail groove male head 4 is horizontally installed onto the cutting equipment for slicing.

[0100] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A crystal sticking device, characterized in that, Includes L-shaped adhesive rod platform (1), dovetail groove female head (2), screw (3), dovetail groove male head (4), material plate (5), sliding platform (6), front and rear rotating platform (7), left and right rotating platform (8), platform screw (61), front and rear rotating adjustment screw (71), left and right rotating adjustment screw (81), crystal (9), resin strip (10), tilt sensor (11), wire (12), and angle display (13); Among them, the dovetail groove female head (2) is installed on the L-shaped adhesive rod platform (1), and the dovetail groove female head (2) is provided with screws (3) on the side. The dovetail groove female head (2) and the dovetail groove male head (4) are fixed by screws (3). The dovetail groove male head (4) is connected to a material plate (5), and the material plate is fixed vertically. Among them, the L-shaped adhesive rod platform (1) is provided with a sliding platform (6), and a front and rear rotating platform (7) is connected to the sliding platform. A left and right rotating platform (8) is fixedly connected to the front and rear rotating platform (7). The centers of the front and rear rotating platform (7) and the left and right rotating platform (8) are located on the same axis. The platform screw (61) is installed on the sliding platform (6). The front and rear rotating adjustment screw (71) is installed on the front and rear rotating platform (7), and the left and right rotating adjustment screw (81) is installed on the left and right rotating platform (8). The crystal (9) is placed vertically on the left and right rotating platform (8), with the crystal end face facing upward. A resin strip (10) is fixed on the side of the crystal (9). Among them, the sliding platform (6) is a linear slide, and the crystal moves in a straight line by adjusting the platform screw (61) so that it moves towards the material plate; Among them, the front and rear rotating platforms (7) and the left and right rotating platforms (8) are connected to the transmission mechanism by the rotating adjustment screw, which drives the rotating platforms to rotate, or the rotating adjustment screw is directly connected to the rotating platforms, which drives the rotating platforms to rotate, and together adjusts the direction of the crystal end face on the X and Y axes; The tilt sensor (11) is connected to the angle display (13) via a wire (12). The tilt sensor (11) is movable. When the tilt sensor is placed on the end face of the material plate, it measures the direction of the end face of the material plate. When the tilt sensor is placed on the end face of the crystal, it measures the direction of the end face of the crystal. By adjusting the position of the crystal, the direction data of the end face of the material plate and the end face of the crystal measured by the tilt sensor are consistent. At this time, the crystal is glued to the material plate, which can ensure the accuracy of the sticking rod.

2. The crystal sticking device according to claim 1, characterized in that, The left and right rotating platform (8) is a corner platform, consisting of a left and right rotating adjusting screw (81), a left fixed bearing (82), an adjusting shaft (83), a rotating worm (84), a right fixed bearing (85), a rotating turbine (86), and a rotating platform (87). The rotating platform (87) is rotated by adjusting the left and right rotating adjusting screw (81), which changes the direction of the crystal end face on the rotating platform (87) and is used to adjust the angle between the crystal end face and the X-axis direction. The front and rear rotating platforms (7) are also corner platforms, used to adjust the angle between the crystal end face and the Y-axis direction. The front and rear rotating platforms (7) and the left and right rotating platforms (8) have the same structure and are fixedly connected at 90 degrees.

3. The crystal sticking device according to claim 1, characterized in that, The left and right rotating platform (8) consists of a left and right rotating adjustment screw (81), a rotating platform base (22), a rotating plane (23), a left bearing (24), and a right bearing (25). The left and right rotating adjustment screw (81) is connected to the left bearing (24) and the right bearing (25). The two bearings are connected to the rotating platform base (22). The rotating plane (23) is fixed on the left and right rotating adjustment screw (81). The rotating plane (23) is rotated by adjusting the screw, which changes the direction of the crystal end face placed on the rotating plane (23) and is used to adjust the angle between the crystal end face and the Y-axis direction. The front and rear rotating platform (7) is used to adjust the angle between the crystal end face and the X-axis direction. The front and rear rotating platform (7) and the left and right rotating platform (8) have the same structure and are fixedly connected at 90 degrees.

4. A crystal sticking device according to any one of claims 1-3, characterized in that, The sliding range of the sliding platform (6) is 1mm-100mm.

5. A crystal sticking device according to any one of claims 1-3, characterized in that, The angle adjustment range of the front and rear rotating platform (7) is ±10°, the angle adjustment range of the left and right rotating platform (8) is ±10°, and the accuracy of the tilt sensor (11) is ±2″.

6. A crystal sticking device according to any one of claims 1-3, characterized in that, The sliding platform (6), the front and rear rotating platform (7), and the left and right rotating platform (8) can be adjusted electrically or manually.

7. A method for attaching crystal rods using any one of the crystal rod attaching apparatuses described in claims 1-3, characterized in that, Includes the following steps: S1: Install the dovetail groove male head (4) of the connecting material plate (5) into the dovetail groove female head (2) on the L-shaped adhesive rod platform (1); S2: Use tools to tighten the screws on the side of the dovetail groove female head (3); S3: Place the crystal (9) with the resin strip (10) glued on onto the left and right rotating platform (8); S4: Place the tilt sensor (11) on the end face of the material plate; S5: Observe the angle display (13), determine the angle values ​​between the end face of the material plate and the X and Y axis directions, and record them as X1 and Y1; S6: Place the tilt sensor (11) onto the crystal end face; S7: Observe the angle display (13) to determine the angle values ​​between the crystal end face and the X and Y axis directions, denoted as X2, Y2; S8: By adjusting the front and rear rotation adjustment screws (71) on the front and rear rotating platform (7) and the left and right rotation adjustment screws (81) on the left and right rotating platform (8), the X2 and Y2 measured by the tilt sensor are equal to the recorded X1 and Y1 values; S9: After the X2 and Y2 values ​​are adjusted, apply quick-drying glue to the side of the resin strip (10); S10: Adjust the platform screw (61) on the sliding platform (6) to move the crystal (9) toward the material plate (5), so that the resin strip on the crystal is close to the surface of the material plate and the resin strip is in contact with the material plate, while ensuring that X2 and Y2 are always equal to X1 and Y1. S11: After the resin strip and the material plate are bonded and cured, the crystal (9), resin strip (10), material plate (5) and dovetail male head (4) are connected as a whole. At this time, loosen the screw (3) and remove the whole thing. S12: Apply glue thoroughly between the resin strip and the material plate to make the material plate and the resin strip bond more firmly and meet the cutting strength requirements; S13: After the glue has cured, the whole device consisting of the crystal (9), resin strip (10), material plate (5) and dovetail groove male head (4) is horizontally installed on the cutting equipment for slicing.

8. The method for attaching crystal rods according to claim 7, characterized in that, In steps S8-S10, if the crystal changes position during the movement of the sliding platform (6), it is still necessary to continuously adjust the front and rear rotating platform (7) and the left and right rotating platform (8) to adjust the crystal in the X and Y directions, so as to ensure that the crystal end face and the material plate end face are aligned in space after the final sticking.

9. The method for attaching crystal rods according to claim 7, characterized in that, In step S9, the fast-drying adhesive used is 101, 401, or 502 adhesive.

10. The method for attaching crystal rods according to claim 7, characterized in that, In step S12, the material plate needs to be placed horizontally.

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