High-productivity oven for cleaning chamber components and controlling metal contamination.
By designing a baking chamber with independent upper and lower fluid chambers, using gas pipelines and nozzles to provide an air curtain, and combining it with a low-manganese metal alloy, the problem of metal contamination of the bearing in traditional ovens at high temperatures is solved, achieving efficient cleaning.
CN117043534BActive Publication Date: 2026-06-30APPLIED MATERIALS INC
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- APPLIED MATERIALS INC
- Filing Date
- 2022-02-25
- Publication Date
- 2026-06-30
AI Technical Summary
Technical Problem
When a traditional oven heats the receiver at high temperatures, the oven material or heating element may contaminate the receiver, and the airflow arrangement can lead to metal contamination.
Method used
The baking chamber is designed with independent upper and lower fluid chambers, equipped with gas lines, nozzles and exhaust, and provides an air curtain surrounding the receiver, combined with low manganese content metal alloy materials to reduce metal contamination.
Benefits of technology
It effectively reduces metal contamination of the receiver at high temperatures, improves processing productivity, and reduces the risk of metal contamination.
✦ Generated by Eureka AI based on patent content.
Smart Images
Figure CN117043534B_ABST
Abstract
This document provides methods and apparatus for a baking chamber for processing chamber components. In some embodiments, the baking chamber includes: a housing defining a first chamber, wherein the first chamber includes: a first chamber body having a first floor and first sidewalls coupled to the first floor to a first cover of the first chamber body to define a first internal volume; a first support disposed in the first internal volume; a first gas line disposed in the first internal volume near the first cover; a first nozzle disposed between the first gas line and the first support; a first exhaust portion coupled to the first floor; and a first heater disposed in the first internal volume and between the first support and the first floor; and wherein the housing includes a door configured to facilitate the transfer of the chamber component into and out of the housing.
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