A method, system, and storage medium for monitoring and protecting the operation of a silicon wafer sorting machine.

Abstract

This invention belongs to the field of automated monitoring technology, specifically disclosing a method, system, and storage medium for monitoring and protecting the operation of a silicon wafer sorting machine. It uses two counters to synchronously count the pulse signals of an encoder on the basket base, and uses a proximity sensor's silicon wafer detection signal to determine in real time whether silicon wafers are present in the basket. The operating status of the basket is determined based on the synchronous counting of the first counter. When the basket is determined to be in continuous motion and contains silicon wafers, and / or the reset synchronous count value of the second counter is greater than a counting threshold, the basket is determined to be in a compressed state, generating an emergency stop control signal to shut down the silicon wafer sorting machine and prevent excessive damage to the silicon wafers in the basket. This invention improves the monitoring and protection efficiency of silicon wafer sorting operations, accurately and promptly detects basket compression, effectively avoids excessive silicon wafer damage, reduces material waste, and lowers carrier wear and labor costs.

Description

Technical Field

[0001] This invention belongs to the field of automated monitoring technology, specifically relating to a method, system, and storage medium for monitoring and protecting the operation process of a silicon wafer sorting machine. Background Technology

[0002] A silicon wafer sorting machine is a device used for sorting and inspecting silicon wafers. During the sorting process, a basket (a type of wafer carrier) containing a large number of silicon wafers is placed on a basket base. The basket base is U-shaped and connected to a servo screw, allowing it to move up and down. This moves the wafers from the basket onto a conveyor belt in the center of the base. The conveyor belt, driven by a motor, rotates, moving the wafers out and into the sorting machine's inlet channel, thus completing the sorting process. During the silicon wafer sorting process, due to various reasons (such as sensor failure, basket speed overshoot, operational errors, etc.), basket crushing sometimes occurs. This means that the wafers fail to be removed from the basket in time, and the basket continues to move downwards, resulting in a large number of wafers being crushed. If basket crushing occurs and braking measures are not taken in time, it will lead to the destruction of a large number of silicon wafers, resulting in material waste and increased material costs. In response to this situation, the most common protective measure is manual supervision. However, manual supervision increases labor costs, and people are prone to lapses in concentration, making it difficult to maintain constant focus. Furthermore, human reaction speed is too slow, with a long interval between detecting pressure and taking braking measures, which can lead to the damage of many silicon wafers. Therefore, the protection efficiency and quality of manual supervision are not high. Summary of the Invention

[0003] The purpose of this invention is to provide a method, system, and storage medium for monitoring and protecting the operation of a silicon wafer sorting machine, in order to solve the above-mentioned problems existing in the prior art.

[0004] To achieve the above objectives, the present invention adopts the following technical solution:

[0005] Firstly, a method for monitoring and protecting the operation of a silicon wafer sorting machine is provided, including:

[0006] During the operation of the silicon wafer sorting machine, the first synchronous count value of the first counter and the second synchronous count value of the second counter are collected in real time, and the silicon wafer detection signal of the proximity sensor is collected in real time. The first counter and the second counter are electrically connected to the encoder placed on the basket base. The encoder generates a pulse signal according to the displacement of the basket base and transmits it to the first counter and the second counter. The first counter and the second counter receive the pulse signal and count synchronously. The proximity sensor is placed below the basket base and is used to detect the silicon wafers in the basket and output the silicon wafer detection signal.

[0007] The presence of silicon wafers in the basket is determined based on real-time silicon wafer detection signals, thus obtaining real-time silicon wafer detection results.

[0008] Based on the increment of the first synchronous count value of the first counter within a fixed time period, it is determined whether the flower basket is in motion or stationary state within the fixed time period, and the time period state detection result is obtained.

[0009] The operating status detection results of the flower basket are obtained based on the status detection results of multiple consecutive time periods. The operating status detection results include continuous movement, intermittent movement, or continuous static state.

[0010] When the flower basket is determined to be stationary based on the time period status detection result, the second synchronization count value of the second counter is cleared to zero, so that the second counter starts synchronizing again.

[0011] At the current moment, when it is determined that the flower basket is in a continuous motion state based on the operation status detection result, and when it is determined that there is a silicon wafer inside the flower basket based on the real-time silicon wafer detection result, the first basket pressing state information is generated. When it is determined that the second synchronization count value is greater than the set count threshold, the second basket pressing state information is generated.

[0012] An emergency stop control signal is generated based on the status information of the first and / or second pressure baskets, and transmitted to the silicon wafer sorter so that the silicon wafer sorter stops operating according to the emergency stop control signal.

[0013] In one possible design, the method further includes:

[0014] During the operation of the silicon wafer sorting machine, the sensing and detection signals of the photoelectric sensor are collected in real time. The photoelectric sensor is installed on both sides below the conveyor belt of the silicon wafer sorting machine to sense and detect the silicon wafer parts that exceed the conveyor belt and are bent by pressure, and generate corresponding sensing and detection signals.

[0015] The system determines whether a silicon wafer has been bent by real-time sensing signals, and generates third pressure basket status information when it determines that a silicon wafer has been bent.

[0016] When generating an emergency stop control signal, the emergency stop control signal is generated based on the first basket pressure status information, the second basket pressure status information, and / or the third basket pressure status information.

[0017] In one possible design, when transmitting the emergency stop control signal to the silicon wafer sorter, the method further includes: recording the current time as the fault time, archiving the fault time, and incrementing the number of faults recorded for the day by 1.

[0018] In one possible design, the method further includes:

[0019] The system collects video streams from surveillance cameras, which are filming the silicon wafer sorting machine.

[0020] Integrate the monitoring video streams to obtain the silicon wafer sorting machine operation video, and archive the silicon wafer sorting machine operation video.

[0021] In one possible design, when determining whether the flower basket is in motion or stationary during a fixed time period based on the increment of the first synchronous count value of the first counter within that fixed time period, if the increment of the first synchronous count value is 0, it is determined that the flower basket is stationary during that fixed time period; if the increment of the first synchronous count value is greater than 0, it is determined that the flower basket is in motion during that fixed time period.

[0022] In one possible design, when obtaining the operating status detection result of the flower basket based on the status detection results of multiple consecutive time periods, if the status detection results of two consecutive time periods are both in motion, then the operating status detection result is a continuous motion state; if the status detection results of two consecutive time periods include one motion state and one stationary state, then the operating status detection result is an intermittent motion state; and if the status detection results of two consecutive time periods are both in stationary state, then the operating status detection result is a continuous stationary state.

[0023] In one possible design, when it is determined that there are no silicon wafers in the basket based on the real-time silicon wafer detection results, the first and second counters are cleared to zero, and the counting of the first and second counters ends.

[0024] Secondly, a monitoring and protection system for the operation of a silicon wafer sorting machine is provided, comprising a data acquisition unit, a detection unit, a first judgment unit, a second judgment unit, a reset unit, a first generation unit, and a second generation unit, wherein:

[0025] The acquisition unit is used to acquire the first synchronous count value of the first counter and the second synchronous count value of the second counter in real time during the operation of the silicon wafer sorting machine, and to acquire the silicon wafer detection signal of the proximity sensor in real time. The first counter and the second counter are both electrically connected to the encoder placed on the basket base. The encoder generates a pulse signal according to the displacement of the basket base and transmits it to the first counter and the second counter. The first counter and the second counter receive the pulse signal and count synchronously. The proximity sensor is placed below the basket base and is used to detect the silicon wafers in the basket and output the silicon wafer detection signal.

[0026] The detection unit is used to determine whether there are silicon wafers in the basket based on the real-time silicon wafer detection signal, and to obtain the real-time silicon wafer detection result.

[0027] The first determination unit is used to determine whether the flower basket is in motion or stationary state within the fixed time period based on the increment of the first synchronous count value of the first counter within the fixed time period, and to obtain the time period state detection result.

[0028] The second determination unit is used to obtain the operating status detection result of the flower basket based on the status detection results of multiple consecutive time periods. The operating status detection result includes continuous movement state, intermittent movement state, or continuous stationary state.

[0029] The reset unit is used to clear the second synchronous count value of the second counter to zero when the flower basket is determined to be in a stationary state based on the time period status detection result, so that the second counter can start synchronous counting again.

[0030] The first generation unit is used to determine, based on the running status detection result, that the flower basket is in a continuous motion state at the current moment, and to determine, based on the real-time silicon wafer detection result, that there is a silicon wafer inside the flower basket, to generate first basket pressing status information, and to generate second basket pressing status information when it is determined that the second synchronization count value is greater than the set count threshold.

[0031] The second generating unit is used to generate an emergency stop control signal based on the first pressure basket status information and / or the second pressure basket status information, and transmit the emergency stop control signal to the silicon wafer sorting machine so that the silicon wafer sorting machine stops operating according to the emergency stop control signal.

[0032] Thirdly, a monitoring and protection system for the operation of a silicon wafer sorting machine is provided, including:

[0033] Memory, used to store instructions;

[0034] A processor is configured to read instructions stored in the memory and execute the method described in any one of the first aspects above, according to the instructions.

[0035] Fourthly, a computer-readable storage medium is provided, characterized in that the computer-readable storage medium stores instructions that, when executed on a computer, cause the computer to perform any of the methods described in the first aspect.

[0036] Beneficial Effects: This invention uses two counters to synchronously count the pulse signals of the encoder on the basket base. It uses the silicon wafer detection signal from the proximity sensor to determine in real time whether silicon wafers are present in the basket. Based on the synchronous counting of the first counter, the operating status of the basket is determined. When the basket is determined to be in continuous motion and contains silicon wafers, and / or the reset synchronous count value of the second counter exceeds the counting threshold, the basket is determined to be in a compressed state. An emergency stop control signal is then generated to shut down the silicon wafer sorting machine, preventing significant damage to the silicon wafers inside the basket. This invention can replace traditional manual monitoring, improving the monitoring and protection efficiency of silicon wafer sorting operations. It can accurately and promptly detect basket compression, effectively avoiding significant silicon wafer damage, reducing material waste, and lowering carrier wear and labor costs. Attached Figure Description

[0037] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0038] Figure 1 This is a schematic diagram of the steps in the method of Embodiment 1 of the present invention;

[0039] Figure 2 This is a schematic diagram of the system configuration in Embodiment 2 of the present invention;

[0040] Figure 3 This is a schematic diagram of the system configuration in Embodiment 3 of the present invention. Detailed Implementation

[0041] It should be noted that the descriptions of these embodiments are intended to aid in understanding the invention and do not constitute a limitation thereof. The specific structural and functional details disclosed herein are merely for describing exemplary embodiments of the invention. However, the invention may be embodied in many alternative forms and should not be construed as being limited to the embodiments described herein.

[0042] It should be understood that, unless otherwise explicitly specified and limited, the term "connection" should be interpreted broadly. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be a connection within two components. Those skilled in the art can understand the specific meaning of the above terms in the embodiments according to the specific circumstances.

[0043] Specific details are provided in the following description to provide a complete understanding of the exemplary embodiments. However, those skilled in the art will understand that the exemplary embodiments can be implemented without these specific details. For example, the system may be shown in block diagrams to avoid obscuring the example with unnecessary details. In other embodiments, well-known processes, structures, and techniques may be shown without non-essential details to avoid obscuring the embodiments.

[0044] Example 1:

[0045] This embodiment provides a method for monitoring and protecting the operation of a silicon wafer sorting machine, which can be applied to a corresponding silicon wafer sorting machine controller, such as a PLC (Programmable Logic Controller). Figure 1 As shown, the method includes the following steps:

[0046] S1. During the operation of the silicon wafer sorting machine, the first synchronous count value of the first counter and the second synchronous count value of the second counter are collected in real time, and the silicon wafer detection signal of the proximity sensor is collected in real time. The first counter and the second counter are electrically connected to the encoder placed on the basket base. The encoder generates a pulse signal according to the displacement of the basket base and transmits it to the first counter and the second counter. The first counter and the second counter receive the pulse signal and count synchronously. The proximity sensor is placed below the basket base and is used to detect the silicon wafers in the basket and output the silicon wafer detection signal.

[0047] In practice, an encoder is pre-installed on the basket base. The encoder output is simultaneously connected to two high-speed counting points of the PLC. The counters corresponding to the two high-speed counting points in the PLC are designated as the first counter and the second counter, respectively. During the operation of the silicon wafer sorting machine, the encoder generates pulse signals based on the displacement of the basket base and transmits them to the first and second counters. The first and second counters receive the pulse signals and count synchronously. Furthermore, a proximity sensor is pre-installed on the conveyor belt below the basket base. During the operation of the silicon wafer sorting machine, the proximity sensor detects the silicon wafers in the basket above and outputs corresponding silicon wafer detection signals to the PLC.

[0048] S2. Determine whether there are silicon wafers in the basket based on the real-time silicon wafer detection signal, and obtain the real-time silicon wafer detection result.

[0049] In practice, the presence or absence of silicon wafers in the basket can be determined based on the real-time silicon wafer detection signal, thus obtaining the real-time silicon wafer detection result in the basket, i.e., whether there are silicon wafers or not.

[0050] S3. Based on the increment of the first synchronous count value of the first counter within a fixed time period, determine whether the flower basket is in motion or stationary state within the fixed time period, and obtain the time period state detection result.

[0051] In practice, the first synchronization count value of the first counter increases as the basket moves. If the increment of the first synchronization count value is 0 within a fixed time period (e.g., within 10ms), it is determined that the basket is stationary during that time period. If the increment of the first synchronization count value is greater than 0 within a fixed time period (e.g., within 10ms), it is determined that the basket is in motion during that time period. Under normal operating conditions, the movement of the basket is intermittent. That is, the basket moves down a little and then pauses, the conveyor belt removes a silicon wafer once, then the basket moves down a little again and pauses, the conveyor belt removes another silicon wafer, and so on, until all the silicon wafers in the basket are removed. If the increment of the first synchronization count value is 0 within a fixed interval, it indicates that the basket has not moved down and is stationary. Conversely, if the increment of the first synchronization count value is greater than 0 within a fixed interval, it indicates that the basket has moved down during that interval and is in motion.

[0052] S4. Obtain the operating status detection results of the flower basket based on the status detection results of multiple consecutive time periods. The operating status detection results include continuous movement status, intermittent movement status, or continuous static status.

[0053] In practice, the status detection results of multiple time intervals can be continuously monitored to determine the operational status of the flower basket. For example, if the status detection results of two consecutive time intervals are both in motion, the operational status detection result is a continuous motion state; if the status detection results of two consecutive time intervals include one motion state and one stationary state, the operational status detection result is an intermittent motion state; and if the status detection results of two consecutive time intervals are both in stationary states, the operational status detection result is a continuous stationary state.

[0054] S5. When the flower basket is determined to be stationary based on the time period status detection result, the second synchronization count value of the second counter is cleared to zero, so that the second counter starts synchronizing again.

[0055] In practice, if the flower basket is determined to be stationary based on the status detection results during a fixed time interval, the second synchronization count value of the second counter is cleared to zero, so that the second counter can start synchronizing again.

[0056] S6. At the current moment, if the basket is determined to be in continuous motion based on the running status detection result, and if a silicon wafer is determined to be present in the basket based on the real-time silicon wafer detection result, first basket pressure status information is generated. If the second synchronization count value is determined to be greater than the set count threshold, second basket pressure status information is generated.

[0057] In specific implementation, if the current operating status detection results indicate that the basket is in continuous motion, and the real-time silicon wafer detection results indicate that there are silicon wafers inside the basket, it means that not all the silicon wafers inside the basket have been moved out, and the basket is continuously moving downwards. This indicates that the basket is in a compressed state, and the first compressed state information is generated. When the second synchronization count value is greater than the set counting threshold, it indicates that the basket's downward movement exceeds the normal range. For example, under normal operating conditions, the basket moves intermittently, and the second counter restarts counting each time it stops. Therefore, under normal circumstances, the second synchronization count value is consistently stable within a certain range, which is considered the single-movement count value. To allow for a certain fluctuation range, 1.5 times the single-movement count value can be used as the counting threshold. If at some point the second synchronization count value exceeds the counting threshold, it indicates that the basket's downward movement is abnormal, meaning the basket is in a compressed state, and the second compressed state information is generated.

[0058] S7. Generate an emergency stop control signal based on the first pressure basket status information and / or the second pressure basket status information, and transmit the emergency stop control signal to the silicon wafer sorting machine so that the silicon wafer sorting machine stops operating according to the emergency stop control signal.

[0059] In practice, an emergency stop control signal can be generated based on the status information of the first and / or second pressure baskets, and transmitted to the silicon wafer sorting machine to stop operation. Simultaneously, the current time is recorded as the fault time, archived, and the number of faults recorded for the day is incremented by 1 for subsequent fault tracing. When the real-time silicon wafer detection results indicate that no silicon wafers are present in the basket, it means that all silicon wafers in the basket have been removed. At this point, the first and second counters can be reset to zero, and their counting can be stopped to prevent overflow of the corresponding counters due to prolonged encoder movement.

[0060] Furthermore, photoelectric sensors can be installed on both sides below the conveyor belt of the silicon wafer sorting machine, so that the light from the photoelectric sensors is angled upwards and the light spot falls on the position where the silicon wafer extends beyond the edge of the conveyor belt. The sensors can detect the part of the silicon wafer that extends beyond the conveyor belt and is bent. Once a basket pressure occurs, the part of the silicon wafer that extends beyond the edge of the conveyor belt will be bent. The photoelectric sensors can detect the bending of the silicon wafer and generate a corresponding sensing detection signal, which is transmitted to the controller. The controller determines whether a silicon wafer is bent based on the real-time sensing detection signal. When it is determined that a silicon wafer is bent, a third basket pressure status information is generated. When an emergency stop control signal is generated, an emergency stop control signal is generated based on the first basket pressure status information, the second basket pressure status information, and / or the third basket pressure status information.

[0061] Furthermore, surveillance cameras can be installed around the silicon wafer sorting machine to capture the silicon wafer sorting process. The resulting video streams can be integrated into a video recording of the silicon wafer sorting machine's operation for archiving. This allows for a complete record of the silicon wafer sorting machine's operation, facilitating subsequent fault tracing.

[0062] The method described in this embodiment can replace the traditional manual supervision method, improve the monitoring and protection efficiency of silicon wafer sorting operations, accurately and timely detect the situation of basket pressure, effectively avoid the damage of a large number of silicon wafers, reduce material waste, and reduce carrier wear and labor costs.

[0063] Example 2:

[0064] This embodiment provides a monitoring and protection system for the operation of a silicon wafer sorting machine, such as... Figure 2 As shown, it includes a data acquisition unit, a detection unit, a first determination unit, a second determination unit, a reset unit, a first generation unit, and a second generation unit, wherein:

[0065] The acquisition unit is used to acquire the first synchronous count value of the first counter and the second synchronous count value of the second counter in real time during the operation of the silicon wafer sorting machine, and to acquire the silicon wafer detection signal of the proximity sensor in real time. The first counter and the second counter are both electrically connected to the encoder placed on the basket base. The encoder generates a pulse signal according to the displacement of the basket base and transmits it to the first counter and the second counter. The first counter and the second counter receive the pulse signal and count synchronously. The proximity sensor is placed below the basket base and is used to detect the silicon wafers in the basket and output the silicon wafer detection signal.

[0066] The detection unit is used to determine whether there are silicon wafers in the basket based on the real-time silicon wafer detection signal, and to obtain the real-time silicon wafer detection result.

[0067] The first determination unit is used to determine whether the flower basket is in motion or stationary state within the fixed time period based on the increment of the first synchronous count value of the first counter within the fixed time period, and to obtain the time period state detection result.

[0068] The second determination unit is used to obtain the operating status detection result of the flower basket based on the status detection results of multiple consecutive time periods. The operating status detection result includes continuous movement state, intermittent movement state, or continuous stationary state.

[0069] The reset unit is used to clear the second synchronous count value of the second counter to zero when the flower basket is determined to be in a stationary state based on the time period status detection result, so that the second counter can start synchronous counting again.

[0070] The first generation unit is used to determine, based on the running status detection result, that the flower basket is in a continuous motion state at the current moment, and to determine, based on the real-time silicon wafer detection result, that there is a silicon wafer inside the flower basket, to generate first basket pressing status information, and to generate second basket pressing status information when it is determined that the second synchronization count value is greater than the set count threshold.

[0071] The second generating unit is used to generate an emergency stop control signal based on the first pressure basket status information and / or the second pressure basket status information, and transmit the emergency stop control signal to the silicon wafer sorting machine so that the silicon wafer sorting machine stops operating according to the emergency stop control signal.

[0072] Example 3:

[0073] This embodiment provides a monitoring and protection system for the operation of a silicon wafer sorting machine, such as... Figure 3 As shown, at the hardware level, it includes:

[0074] An encoder is used to generate pulse signals based on the displacement of the flower basket base and transmit them to the first and second counters;

[0075] A proximity sensor is used to detect silicon wafers inside the basket and generate a silicon wafer detection signal;

[0076] The first counter is used to receive pulse signals for synchronous counting to obtain the first synchronous count value;

[0077] The second counter is used to receive pulse signals for synchronous counting to obtain the second synchronous count value;

[0078] The data interface is used to establish data communication between the processor and the first counter, the second counter, and the proximity sensor.

[0079] Memory, used to store instructions;

[0080] The processor is used to read instructions stored in the memory and execute the silicon wafer sorting machine operation process monitoring and protection method in Embodiment 1 according to the instructions.

[0081] Optionally, the device also includes an internal bus, through which the processor, memory, and data interface can be interconnected. This internal bus can be an ISA (Industry Standard Architecture) bus, a PCI (Peripheral Component Interconnect) bus, or an EISA (Extended Industry Standard Architecture) bus, etc. The bus can be divided into an address bus, a data bus, a control bus, etc.

[0082] The memory may include, but is not limited to, random access memory (RAM), read-only memory (ROM), flash memory, first-in-first-out (FIFO) memory, and / or first-in-last-out (FILO) memory. The processor may be a general-purpose processor, including a central processing unit (CPU), a network processor (NP), etc.; it may also be a digital signal processor (DSP), an application-specific integrated circuit (ASIC), a field-programmable gate array (FPGA), or other programmable logic devices, discrete gate or transistor logic devices, or discrete hardware components.

[0083] Example 4:

[0084] This embodiment provides a computer-readable storage medium storing instructions. When these instructions are executed on a computer, the computer performs the silicon wafer sorting machine operation process monitoring and protection method described in Embodiment 1. The computer-readable storage medium refers to a data storage medium, which may include, but is not limited to, floppy disks, optical disks, hard disks, flash memory, USB flash drives, and / or Memory Sticks. The computer may be a general-purpose computer, a special-purpose computer, a computer network, or other programmable systems.

[0085] This embodiment also provides a computer program product containing instructions that, when executed on a computer, cause the computer to perform the silicon wafer sorting machine operation process monitoring and protection method in Embodiment 1. The computer can be a general-purpose computer, a special-purpose computer, a computer network, or other programmable system.

[0086] Finally, it should be noted that the above description is merely a preferred embodiment of the present invention and is not intended to limit the scope of protection of the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A method for monitoring and safeguarding the operation of a silicon wafer handler, characterized by, The method comprises the following steps: In the operation process of the silicon wafer sorting machine, the first synchronous counting value of a first counter and the second synchronous counting value of a second counter are collected in real time, and a silicon wafer detection signal of a proximity sensor is collected in real time, the first counter and the second counter are electrically connected with an encoder arranged on a basket base, the encoder generates a pulse signal according to the displacement of the basket base and transmits the pulse signal to the first counter and the second counter, the first counter and the second counter receive the pulse signal to perform synchronous counting, and the proximity sensor is arranged below the basket base and is used for detecting the silicon wafer in the basket to output the silicon wafer detection signal; Whether the silicon wafer exists in the basket is judged according to the real-time silicon wafer detection signal, and a real-time silicon wafer detection result is obtained; Whether the basket is in a motion state or a static state in a fixed time period is judged according to the first synchronous counting value increment of the first counter in the fixed time period, and a time period state detection result is obtained; A running state detection result of the basket is obtained according to a plurality of continuous time period state detection results, and the running state detection result comprises a continuous motion state, an intermittent motion state or a continuous static state; When it is judged that the basket is in the static state according to the time period state detection result, the second synchronous counting value of the second counter is cleared, and the second counter performs synchronous counting again; When the basket is in the continuous motion state according to the running state detection result at the current moment and there is a silicon wafer in the basket according to the real-time silicon wafer detection result, first basket pressing state information is generated, and when it is judged that the second synchronous counting value is greater than a set counting threshold, second basket pressing state information is generated; An emergency stop control signal is generated according to the first basket pressing state information and / or the second basket pressing state information, and the emergency stop control signal is transmitted to the silicon wafer sorting machine, so that the silicon wafer sorting machine stops operation according to the emergency stop control signal.

2. The method of claim 1, wherein the method further comprises: The method further comprises the following steps: In the operation process of the silicon wafer sorting machine, an inductive detection signal of a photoelectric sensor is collected in real time, the photoelectric sensor is installed below both sides of a conveying belt of the silicon wafer sorting machine and is used for inductively detecting a part of the silicon wafer that is pressed and bent beyond the conveying belt to generate a corresponding inductive detection signal; Whether the silicon wafer is pressed and bent is judged according to the real-time inductive detection signal, and when it is judged that the silicon wafer is pressed and bent, third basket pressing state information is generated; When the emergency stop control signal is generated, the emergency stop control signal is generated according to the first basket pressing state information, the second basket pressing state information and / or the third basket pressing state information.

3. The method of claim 1, wherein the method further comprises: When the emergency stop control signal is transmitted to the silicon wafer sorting machine, the method further comprises the following steps: recording the current moment as a fault time, archiving the fault time, and increasing the number of fault times of the day recorded in the archive by 1.

4. The method of claim 1, wherein the method further comprises: The method further comprises the following steps: A monitoring video stream of a monitoring camera is collected, and the monitoring camera is aimed at the silicon wafer sorting machine to take pictures; The monitoring video stream is integrated to obtain a silicon wafer sorting machine operation video, and the silicon wafer sorting machine operation video is archived.

5. The method of claim 1, wherein the method further comprises: In the first synchronization count value increment of the first counter within a fixed time period, when judging whether the flower basket is in a moving state or a static state within the fixed time period, if the first synchronization count value increment is 0, it is judged that the flower basket is in a static state within the fixed time period, and if the first synchronization count value increment is greater than 0, it is judged that the flower basket is in a moving state within the fixed time period.

6. The method of claim 1, wherein the method further comprises: In the running state detection result of the flower basket obtained according to a plurality of continuous period state detection results, if the continuous two period state detection results are both in a moving state, the running state detection result is a continuous moving state, if the continuous two period state detection results include one moving state and one static state, the running state detection result is an intermittent moving state, and if the continuous two period state detection results are both in a static state, the running state detection result is a continuous static state.

7. The method of claim 1, wherein the method further comprises: monitoring the operation of the wafer handler; and preventing the wafer handler from operating if the operation of the wafer handler is not within the predetermined range. When it is judged that there is no silicon wafer in the flower basket according to the real-time silicon wafer detection result, the first counter and the second counter are cleared, and the counting of the first counter and the second counter is ended.

8. A silicon wafer handler process monitoring guard system, comprising: The method comprises the following steps: The acquisition unit is used for acquiring the first synchronization count value of the first counter and the second synchronization count value of the second counter in real time during the operation of the silicon wafer sorting machine, and acquiring the silicon wafer detection signal of the proximity sensor in real time, the first counter and the second counter are both electrically connected with the encoder placed on the flower basket base, the encoder generates a pulse signal according to the displacement of the flower basket base and transmits it to the first counter and the second counter, the first counter and the second counter receive the pulse signal for synchronization counting, the proximity sensor is placed below the flower basket base and is used for detecting the silicon wafer in the flower basket and outputting the silicon wafer detection signal; The detection unit is used for judging whether there is a silicon wafer in the flower basket according to the real-time silicon wafer detection signal, and obtaining a real-time silicon wafer detection result; The first determination unit is used for judging whether the flower basket is in a moving state or a static state within a fixed time period according to the first synchronization count value increment of the first counter within the fixed time period, and obtaining a period state detection result; The second determination unit is used for obtaining a running state detection result of the flower basket according to a plurality of continuous period state detection results, and the running state detection result includes a continuous moving state, an intermittent moving state or a continuous static state; The reset unit is used for clearing the second synchronization count value of the second counter when it is judged that the flower basket is in a static state according to the period state detection result, so that the second counter re-counts synchronously; The first generation unit is used for generating first basket pressing state information when it is judged that the flower basket is in a continuous moving state according to the running state detection result and there is a silicon wafer in the flower basket according to the real-time silicon wafer detection result at the current time, and generating second basket pressing state information when it is judged that the second synchronization count value is greater than a set count threshold. The second generating unit is configured to generate an emergency stop control signal according to the first and / or second basket pressing state information, and transmit the emergency stop control signal to the wafer handler so that the wafer handler stops operation according to the emergency stop control signal.

9. A silicon wafer handler process monitoring guard system, comprising: The application further provides a wafer handler operation process monitoring and protection method, comprising the following steps: a memory configured to store instructions; a processor configured to read the instructions stored in the memory and execute the wafer handler operation process monitoring and protection method according to the instructions.

10. A computer-readable storage medium, characterized in that, The computer readable storage medium stores instructions, and when the instructions run on the computer, the computer executes the wafer handler operation process monitoring and protection method according to any one of claims 1-7.

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