A laser detection device supporting multiple detection modes

Abstract

The laser detection device supporting multiple detection modes according to the above embodiment, the control unit obtains the current detection mode, in the dark field detection mode, the control unit measures the first detection information and the second detection information through the first optical path unit, the second optical path unit, the first detection unit and the second detection unit; in the fluorescence detection mode, the control unit measures the third detection information and the fourth detection information through the first optical path unit, the first detection unit and the third detection unit. The technical scheme can automatically realize two detection modes, i.e. the dark field detection mode and the fluorescence detection mode, through the control of each unit in the device. The scattering light intensity distribution can be analyzed through the first detection information and the second detection information, the fluorescence intensity distribution can be analyzed through the third detection information and the fourth detection information, so as to obtain the surface features of the object to be detected, and the purpose of detecting the surface quality of the object to be detected is achieved.

Description

Technical Field

[0001] This application relates to the field of laser detection technology, specifically to a laser detection device that supports multiple detection modes. Background Technology

[0002] Wafers are the fundamental material for manufacturing integrated circuits in semiconductor processes. During the back-side thinning and grinding process, surface quality control is crucial. Wafers with poor surface quality can suffer from stress concentration, cracks, and even lead to significant losses due to wafer breakage during dicing. Generally, surface roughness is an important parameter for measuring wafer surface quality. It is a comprehensive evaluation of the microscopic geometric characteristics of all the minute gaps and peak-valley unevenness of the processed surface, reflecting the surface stress distribution and thus determining the quality of the surface.

[0003] In existing technologies, optical inspection equipment is often used to inspect the surface quality of wafers. During the inspection process, different detection modes need to be executed by the optical inspection equipment. In order to facilitate the switching of the optical inspection equipment between different detection modes, a turntable structure is usually used, and several through holes are set on the turntable for placing different polarizers or filters. The detection mode can be changed simply by rotating the turntable.

[0004] For existing optical inspection equipment, the turntable structure requires a large amount of internal space, which increases the size of the equipment and does not conform to the mainstream development trend. Moreover, the detection mode control process performed by optical inspection equipment is complex and has a low degree of automation, which cannot fully utilize the performance of the equipment and easily leads to long inspection times and low efficiency. Summary of the Invention

[0005] The main technical problem addressed in this application is how to overcome the low detection efficiency of existing optical inspection equipment.

[0006] To address the aforementioned technical problems, this application proposes a laser detection device supporting multiple detection modes, comprising a first optical path unit, a second optical path unit, a first detection unit, a second detection unit, a third detection unit, and a control unit. The first optical path unit is used to irradiate a preset detection position with a first laser. The detection position is used to place an object to be detected. The first laser can generate first scattered light on the surface of the object to be detected, and the first laser can excite the surface of the object to be detected to generate near-ultraviolet fluorescence and visible fluorescence. The second optical path unit is used to irradiate the detection position with a second laser. The second laser can generate second scattered light on the surface of the object to be detected, and the second laser has different wavelength parameters than the first laser. The first detection unit is used to detect the first scattered light or the near-ultraviolet fluorescence. The second detection unit is used to detect the second scattered light. The third detection unit is used to detect the visible fluorescence.

[0007] The laser detection device includes a dark field detection mode and a fluorescence detection mode. The control unit acquires the current detection mode. If the current detection mode is the dark field detection mode, the control unit controls the first optical path unit and the second optical path unit to irradiate the preset detection position with a first laser and a second laser, respectively. The control unit controls the first detection unit to measure the first scattered light and form first detection information, and controls the second detection unit to measure the second scattered light and form second detection information. If the current detection mode is the fluorescence detection mode, the control unit controls the first optical path unit to irradiate the detection position with a first laser. The control unit controls the first detection unit to measure the near-ultraviolet fluorescence and form third detection information, and controls the third detection unit to measure the visible fluorescence and form fourth detection information.

[0008] The first optical path unit includes a first laser, a first polarization module, and a first beam shaping module. The first laser generates the first laser beam, which, under the light adjustment of one or more reflectors, illuminates the detection position along a preset transmission optical path. The first polarization module is disposed on the transmission optical path of the first laser and is used to adjust the polarization state of the first laser. The first beam shaping module is disposed on the transmission optical path of the first laser and is used to adjust the spot size and shape of the first laser beam. In the dark field detection mode or the fluorescence detection mode, the control unit controls the first optical path unit to illuminate the detection position with the first laser beam, including: the control unit controls the first laser to generate the first laser beam; the control unit controls the first polarization module to switch to a first polarization state; the first polarization state is used to adjust the polarization state of the first laser beam; the first laser beam, after its polarization state has changed, passes through the first beam shaping module, and the spot size and shape of the first laser beam, after being adjusted by the first beam shaping module, illuminates the detection position.

[0009] The first optical path unit further includes an attenuator; the attenuator is disposed on the transmission optical path of the first laser and is used to adjust the beam transmission power of the first laser; in the dark field detection mode or the fluorescence detection mode, the control unit controls the attenuator to adjust the beam transmission power of the first laser.

[0010] The second optical path unit includes a second laser, a second polarization module, and a second beam shaping module. The second laser generates the second laser beam, which, under the light adjustment of one or more reflectors, illuminates the detection position along a preset transmission optical path. The second polarization module is disposed on the transmission optical path of the second laser and is used to adjust the polarization state of the second laser. The second beam shaping module is disposed on the transmission optical path of the second laser and is used to adjust the spot size and shape of the second laser beam. In the dark field detection mode, the control unit controls the second optical path unit to illuminate the detection position with the second laser beam, including: the control unit controls the second laser to generate the second laser beam; the control unit controls the second polarization module to switch to a second polarization state; the second polarization state is used to adjust the polarization state of the second laser beam; the second laser beam, after its polarization state has changed, passes through the second beam shaping module, and the spot size and shape of the second laser beam, after being adjusted by the second beam shaping module, illuminates the detection position.

[0011] The first detection unit includes a first detection channel assembly and a first measurement assembly; the first detection channel assembly is used to receive and condition the first scattered light or the near-ultraviolet fluorescence, and the first detection channel assembly has a first optical path for transmitting the first scattered light or the near-ultraviolet fluorescence; the first measurement assembly is used to measure the conditionated first scattered light or near-ultraviolet fluorescence; the first detection channel assembly includes a first filter module, a first polarization analyzer module, and a second polarization analyzer module; the first filter module is used to switch the filter state on the first optical path, and both the first polarization analyzer module and the second polarization analyzer module are used to switch the polarization analyzer state on the first optical path; in the dark field detection mode, the control unit controls the first detection unit to measure the first scattered light and form first detection information, including: the control unit controls the first polarization analyzer module to switch to the first polarization analyzer state, and controls the second polarization analyzer module to switch to the second polarization analyzer state; the first polarization analyzer state and the second polarization analyzer state are used to jointly detect the polarization state of the first scattered light; the control unit controls the first filter module to switch to the first filter state; the first filter state is used to allow only the first scattered light to pass through; the control unit controls the first measurement assembly to measure the first scattered light and form the first detection information.

[0012] The first filter module includes a plurality of first filters and a first switching mechanism; when the control unit controls the first switching mechanism to switch one of the plurality of first filters into the first optical path, the first filter state is formed.

[0013] The first polarization detection module includes a first polarizer, a first window, and a second switching mechanism. The second polarization detection module includes a second polarizer, a second window, and a third switching mechanism. When the control unit controls the second switching mechanism to switch one of the first polarizer and the first window into the first optical path, the first polarization detection state is formed. When the control unit controls the third switching mechanism to switch one of the second polarizer and the second window into the first optical path, the second polarization detection state is formed. The polarization detection state formed by the first polarization detection state and the second polarization detection state corresponds to the first polarization initiation module in the first optical path unit switching to the first polarization initiation state.

[0014] The second detection unit includes a second detection channel component and a second measurement component; the second detection channel component is used to receive and condition the second scattered light, and has a second optical path for transmitting the second scattered light; the second measurement component is used to measure the conditionated second scattered light; the second detection channel component includes a second filter module, a third polarization analyzer module, and a fourth polarization analyzer module; the second filter module is used to change the filter state in the second optical path, and the third and fourth polarization analyzer modules are both used to switch the polarization analyzer state in the second optical path; in the dark field detection mode, the control unit controls the second detection unit to measure the second scattered light and form second detection information, including: the control unit controls the third polarization analyzer module to switch to a third polarization analyzer state, and controls the fourth polarization analyzer module to switch to a fourth polarization analyzer state; the third and fourth polarization analyzer states are used to jointly detect the polarization state of the second scattered light; the second scattered light with a changed polarization state forms a second filter state after passing through the second filter module; the second filter state is used to allow only the second scattered light to pass through; the control unit controls the second measurement component to measure the second scattered light and form the second detection information.

[0015] The third polarization detection module includes a third polarizer, a third window, and a fourth switching mechanism. The fourth polarization detection module includes a fourth polarizer, a fourth window, and a fifth switching mechanism. When the control unit controls the fourth switching mechanism to switch one of the third polarizer and the third window into the second optical path, the third polarization detection state is formed. When the control unit controls the fifth switching mechanism to switch one of the fourth polarizer and the fourth window into the second optical path, the fourth polarization detection state is formed. The polarization detection state formed by the third polarization state and the fourth polarization state corresponds to the second polarization starting module in the second optical path unit switching to the second polarization starting state.

[0016] In the fluorescence detection mode, the control unit controls the first detection unit to measure the near-ultraviolet fluorescence and form third detection information, including: the control unit controls the first polarization analyzer to switch to a fifth polarization analyzer state, and controls the second polarization analyzer to switch to a sixth polarization analyzer state; the fifth polarization analyzer state and the sixth polarization analyzer state are used to jointly detect the polarization state of the near-ultraviolet fluorescence; the control unit controls the first filter module to switch to a third filter state; the third filter state is used to allow only the near-ultraviolet fluorescence to pass through; the control unit controls the first measurement component to measure the near-ultraviolet fluorescence and form the third detection information.

[0017] The first filter module includes a plurality of first filters and a first switching mechanism; when the control unit controls the first switching mechanism to switch one of the plurality of first filters into the first optical path, a first filter state or a third filter state is formed.

[0018] The first polarization detection module includes a first polarizer, a first window, and a second switching mechanism; the second polarization detection module includes a second polarizer, a second window, and a third switching mechanism; the control unit controls the second switching mechanism to switch one of the first polarizer and the first window into the first optical path to form the fifth polarization detection state; the control unit controls the third switching mechanism to switch one of the second polarizer and the second window into the first optical path to form the sixth polarization detection state; the polarization detection state formed by the fifth polarization detection state and the sixth polarization detection state may or may not correspond to the first polarization starting module in the first optical path unit switching to the first polarization starting state.

[0019] The third detection unit includes a third detection channel assembly and a third measurement assembly; the third detection channel assembly is used to receive and condition the visible fluorescence, and the third detection channel assembly has a third optical path for the transmission of the visible fluorescence; the third measurement assembly is used to measure the conditionated visible fluorescence; the third detection channel assembly includes a third filter module, and the third filter module includes a third filter located on the third optical path; in the fluorescence detection mode, the control unit controls the third detection unit to measure the visible fluorescence and form fourth detection information, including: the visible fluorescence is formed into a fourth filter state after passing through the third filter module; the fourth filter state is used to allow only the visible fluorescence to pass through; the control unit controls the third measurement assembly to measure the visible fluorescence and form the fourth detection information.

[0020] The first detection information and the second detection information, and / or the third detection information and the fourth detection information are used to analyze and obtain the surface feature information of the object to be detected. The surface feature information includes one or more of the following: particle distribution state, band gap distribution state, and lattice composition state.

[0021] The beneficial effects of this application are:

[0022] According to the above embodiment, a laser detection device supporting multiple detection modes has a dark field detection mode and a fluorescence detection mode. The control unit acquires the current detection mode. If the current detection mode is the dark field detection mode, the control unit controls the first optical path unit and the second optical path unit to irradiate the preset detection position with a first laser and a second laser, respectively. The control unit controls the first detection unit to measure the first scattered light and form first detection information, and controls the second detection unit to measure the second scattered light and form second detection information. If the current detection mode is the fluorescence detection mode, the control unit controls the first optical path unit to irradiate the detection position with a first laser. The control unit controls the first detection unit to measure the near-ultraviolet fluorescence and form third detection information, and controls the third detection unit to measure the visible fluorescence and form fourth detection information. The technical solution can automatically realize two detection modes, namely the dark field detection mode and the fluorescence detection mode, by controlling each unit within the device. The first and second detection information can be used to analyze the scattered light intensity distribution, and the third and fourth detection information can be used to analyze the fluorescence intensity distribution, thereby acquiring the surface features of the object to be detected and achieving the purpose of detecting the surface quality of the object to be detected. Attached Figure Description

[0023] Figure 1 This is a perspective view of a laser detection device in one embodiment of this application;

[0024] Figure 2 This is an exploded view of the shell and base plate in one embodiment of this application;

[0025] Figure 3 This is a structural diagram showing the connection between the internal components of the laser detection device and the control device in one embodiment of this application;

[0026] Figure 4 This is a front view of an internal component in one embodiment of this application;

[0027] Figure 5 This is one of the perspective views of the internal components in one embodiment of this application;

[0028] Figure 6 This is a second perspective view of the internal components in one embodiment of this application;

[0029] Figure 7 This is a structural diagram of the first support within the first offset module in one embodiment of this application;

[0030] Figure 8 This is a front view of each detection unit in one embodiment of this application;

[0031] Figure 9 This is a perspective view of the first detection unit in one embodiment of this application;

[0032] Figure 10 Figure (a) is an assembly diagram of each first conditioning lens in the first detection channel assembly in one embodiment of this application. Figure (b) is an assembly diagram of the narrowband filter and the bandpass filter, and Figure (c) is an assembly diagram of the first polarizer and the first window.

[0033] Figure 11 This is a schematic diagram illustrating the working principle of each detection unit in one embodiment of this application;

[0034] Figure 12 This is a control flowchart of the control unit in one embodiment of this application;

[0035] Figure 13 This is a flowchart illustrating the control of the first optical path unit and the second optical path unit in dark field detection mode in one embodiment of this application;

[0036] Figure 14 This is a flowchart illustrating the control of the first and second detection units in dark field detection mode according to one embodiment of this application;

[0037] Figure 15 This is a flowchart illustrating the control of the first optical path unit under fluorescence detection mode in one embodiment of this application;

[0038] Figure 16 This is a flowchart illustrating the control of the first detection unit and the third detection unit under fluorescence detection mode in one embodiment of this application;

[0039] Figure 17 This is a structural diagram of the control device in one embodiment of this application. Detailed Implementation

[0040] The present application will now be described in further detail with reference to the accompanying drawings and specific embodiments. Similar elements in different embodiments are referred to by related similar element reference numerals. In the following embodiments, many details are described to facilitate a better understanding of the present application. However, those skilled in the art will readily recognize that some features may be omitted in different situations, or may be replaced by other elements, materials, or methods. In some cases, certain operations related to the present application are not shown or described in the specification. This is to avoid obscuring the core parts of the present application with excessive description. For those skilled in the art, detailed description of these related operations is not necessary; they can fully understand the related operations based on the description in the specification and general technical knowledge in the art.

[0041] Furthermore, the features, operations, or characteristics described in the specification can be combined in any suitable manner to form various embodiments. At the same time, the steps or actions in the method description can be rearranged or adjusted in a manner obvious to those skilled in the art. Therefore, the various orders in the specification and drawings are only for the clear description of a particular embodiment and do not imply a necessary order, unless otherwise stated that a particular order must be followed.

[0042] The serial numbers assigned to components in this document, such as "first" and "second," are used only to distinguish the described objects and have no sequential or technical meaning. The terms "connection" and "linkage" used in this application, unless otherwise specified, include both direct and indirect connections (linkages).

[0043] Example 1

[0044] Please refer to Figures 1 to 11 The present application discloses a laser detection device that supports multiple detection modes, which mainly includes a first optical path unit 41, a second optical path unit 42, a first detection unit 51, a second detection unit 53, a third detection unit 52 and a control unit 6, which are described below.

[0045] The first optical path unit 41 has an optical path for laser emission and transmission, and is used to irradiate the preset detection position 201 with the first laser 410. The preset detection position 201 is used to place the object to be detected 202. Since the irradiation range of the laser is limited, the detection position 201 can be a specific small area. If the volume of the object to be detected 202 is large, the surface of the object to be detected 202 can be divided into many small areas, and these areas pass through the detection position 201 one by one, thereby gradually completing the irradiation of the surface of the object to be detected 202 with the laser. Because the first laser 410 can be scattered on the surface of the object to be detected 202, the first laser 410 can generate first scattered light on the surface of the object to be detected 202; furthermore, the first laser 410 can also excite the surface of the object to be detected 202 to generate near-ultraviolet fluorescence and visible fluorescence. It should be noted that the wavelength parameters of near-ultraviolet fluorescence and visible fluorescence are different. Near-ultraviolet fluorescence typically has a wavelength of 370-410 nm, while visible fluorescence typically has a wavelength of 410-550 nm.

[0046] The second optical path unit 42 has an optical path for laser emission and transmission. The second optical path unit 42 is used to irradiate the preset detection position 201 with the second laser 420. Similarly, the second laser 420 can generate second scattered light on the surface of the object to be detected 202. Moreover, the wavelength parameters of the second laser 420 are different from those of the first laser 410. For example, the first laser 410 uses a 355nm laser, while the second laser 420 uses a 532nm laser.

[0047] The primary function of the first detection unit 51 is to detect the first scattered light or near-ultraviolet fluorescence. The first scattered light is generated by the first laser 410 irradiating the surface of the object 202 to be detected, and the near-ultraviolet fluorescence is generated by the first laser 410 exciting the surface of the object 202 to be detected. The first detection unit 51 may include a first detection channel assembly 511 and a first measurement assembly 512. The first detection channel assembly 51 may be a dimming lens and is used to receive and condition the first scattered light or near-ultraviolet fluorescence. The first measurement assembly 512 may be an optical sensor assembly (such as a camera) and is used to measure the conditioned first scattered light and obtain first detection information, or the first measurement assembly 512 measures the conditioned near-ultraviolet fluorescence and obtains third detection information. It can be understood that the first measurement assembly 512 can form the first detection information by measuring data such as the intensity and polarization state of the first scattered light; similarly, the first measurement assembly 512 can form the third detection information by measuring data such as the intensity and polarization state of the near-ultraviolet fluorescence.

[0048] The main function of the second detection unit 53 is to detect the second scattered light, which is generated by the second laser 420 irradiating the surface of the object 202 to be detected. The second detection unit 53 may include a second detection channel assembly 531 and a second measurement assembly 532. The second detection channel assembly 531 may be a dimming lens tube used to receive and condition the second scattered light. The second measurement assembly 532 may be an optical sensor assembly (such as a camera) used to measure the conditionated second scattered light and obtain second detection information. It can be understood that the second measurement assembly 532 can form the second detection information by measuring data such as the light intensity and polarization state of the second scattered light.

[0049] The main function of the third measurement unit 52 is to detect visible fluorescence, which is generated by the excitation of the surface of the object to be detected by the first laser 410. The third detection unit 52 may include a third detection channel assembly 521 and a third measurement assembly 522; wherein the third detection channel assembly 521 may be a dimming lens tube used to receive and condition the visible fluorescence, and the third measurement assembly 522 may be an optical sensor assembly (such as a camera) used to measure the conditioned visible fluorescence and obtain fourth detection information. It can be understood that the third measurement assembly 522 can form the fourth detection information by measuring data such as the intensity of the visible fluorescence.

[0050] In one embodiment, Figures 1 to 11 The laser detection device in the middle has a dark field detection mode and a fluorescence detection mode. Dark field detection of the first and second scattered light is achieved by controlling the first optical path unit 41, the second optical path unit 42, the first detection unit 51, and the second detection unit 53. Fluorescence detection of near-ultraviolet and visible fluorescence is achieved by controlling the first optical path unit 41, the first detection unit 51, and the third detection unit 52. (See also...) Figure 3 To achieve the purpose of controlling each unit, a control unit 6 can be set up. The control unit 6 can be a logic processing device such as a computer, mobile terminal, or controller, and can also have devices such as a display, keyboard, mouse, buttons, or touch screen to facilitate user operation of the control unit 6.

[0051] In one embodiment, the control unit 6 is signal-connected to the first optical path unit 41, the second optical path unit 42, the first detection unit 51, the second detection unit 53, and the third detection unit 52, enabling control over each unit. For example, the control unit 6 acquires the current detection mode (dark field detection mode or fluorescence detection mode); if the current detection mode is dark field detection mode, the control unit 6 controls the first optical path unit 41 and the second optical path unit 42 to irradiate the preset detection position 201 with the first laser 410 and the second laser 420, respectively. Then, the control unit 6 controls the first detection unit 51 to measure the first scattered light and form the first detection information, and controls the second detection unit 53 to measure the second scattered light and form the second detection information; if the current detection mode is fluorescence detection mode, the control unit 6 controls the first optical path unit 41 to irradiate the detection position 201 with the first laser 410. Then, the control unit 6 controls the first detection unit 51 to measure the near-ultraviolet fluorescence and form the third detection information, and controls the third detection unit 52 to measure the visible fluorescence and form the fourth detection information.

[0052] In one embodiment, see Figures 3 to 6 The first optical path unit 41 includes a first laser 411, a first polarization module 415 and a first beam shaping module 416, which are described below.

[0053] The first laser 411 is used to generate a first laser 410, such as a 355nm laser. The first laser 410, under the light adjustment of one or more reflectors, illuminates the detection position 201 along a preset transmission optical path. Reflectors 413, 414, 417, and 418, for example, adjust the transmission direction of the first laser 410 to construct its transmission optical path. It is understood that, to control the first laser 411, a switch can be manually operated to control it to enter either a working state (emitting the first laser 410) or a non-working state (not emitting the first laser 410). Figure 3 The control unit 6 controls the first laser 411 to enter the working state of emitting the first laser 410 or to enter the non-working state of not emitting the first laser 410.

[0054] The first polarization module 415 is located in the transmission optical path of the first laser 410. Its main function is to adjust the polarization state of the first laser 410. For example, the first polarization module 415 is located in the laser transmission optical path after the reflector 414. The polarization direction of the laser beam is changed by some half-wave plates or quarter-wave plates.

[0055] The first beam shaping module 416 is disposed on the transmission optical path of the first laser 410 and is used to adjust the spot size and shape of the first laser 410. For example, the first beam shaping module 416 is disposed on the laser transmission optical path between the reflector 414 and the reflector 417, and can adjust the spot size and shape of the first laser 410 after the polarization state has changed.

[0056] In one specific embodiment, the first beam shaping module 416 is an optical path composed of a Powell prism and a cylindrical mirror. Then, after the first laser 410, whose polarization state has changed, passes through the first beam shaping module 416, it illuminates the detection position 201 perpendicularly to it under the directional adjustment of the reflectors 417 and 418. See [link to specific details]. Figure 6 .

[0057] In one specific embodiment, see Figures 4 to 7 The first polarization module 415 includes a first support 4151 and a first motor 4152. The first support 4151 has four sidewalls arranged in a cross shape, and each of the sidewalls has a waveplate. For example, sidewall 4153 has a half-waveplate, sidewall 4154 has a quarter-waveplate, sidewall 4155 has a half-waveplate, and sidewall 4156 has no waveplate and serves to block light. It can be understood that the fast axis directions of two half-waveplates can be different, so that different waveplates polarize the beam in different directions.

[0058] The shaft of the first motor 4152 is connected to the cross center of the first bracket 4151. The function of the first motor 4152 is to drive the first bracket 4151 to rotate and switch each sidewall of the first bracket 4151 to the transmission optical path of the first laser 410. It can be understood that, in order to control the first motor 4152, a switch can be manually operated to control the start and stop of the first motor 4152 to drive the first bracket 4151 to rotate to a predetermined position, or it can be controlled by... Figure 3 The control unit 6 controls the start and stop of the first motor 4152 to drive the first bracket 4151 to rotate to a predetermined position.

[0059] It should be noted that when the sidewall of the transmission optical path of the first laser 410 is equipped with a waveplate, the waveplate on the sidewall can change the polarization state of the first laser at a preset angle (i.e., the polarization direction determined by the waveplate). However, when the sidewall of the transmission optical path of the first laser 410 is not equipped with a waveplate, the sidewall can block the first laser 410 to prevent beam transmission.

[0060] In one embodiment, see Figure 3 , Figure 5 and Figure 6 The first optical path unit 41 also includes an attenuator 412, which is located in the transmission optical path of the first laser 410 and is used to adjust the beam transmission power of the first laser 410. Since the power of the laser emitting 355nm laser is not adjustable, an attenuator 412 is needed to modulate the laser power. For example, the attenuator 412 can be located at the laser emission outlet of the first laser 411, thereby directly adjusting the beam transmission power of the first laser 410 emitted by the first laser 411. It is understood that in some cases, if it is not necessary to adjust the beam transmission power of the first laser 410, the attenuator 412 can be omitted. It is understood that to control the attenuator 412, a switch can be manually operated to control the attenuator 412 to enter the working state of modulated laser power or the non-working state of unmodulated laser power, or it can be controlled by... Figure 3 The control unit 6 controls the attenuator 412 to enter the working state of modulated laser power or the non-working state of unmodulated laser power.

[0061] In one embodiment, see Figures 3 to 6 The second optical path unit 42 includes a second laser 421, a second polarization module 424, and a second beam shaping module 425, which are described below.

[0062] The second laser 421 is used to generate a second laser 420, such as a 532nm laser. The second laser 420, under the light adjustment of one or more reflectors, illuminates the detection position 201 along a preset transmission optical path. Reflectors 423 and 426, for example, adjust the transmission direction of the second laser 420 to construct its transmission optical path. It can be understood that, to control the second laser 421, a switch can be manually operated to control the first laser 421 to enter a working state that emits the second laser 420 or a non-working state that does not emit the second laser 420. Alternatively, it can be controlled by... Figure 3 The control unit controls the second laser 421 to enter the working state of emitting the second laser 420 or to enter the non-working state of not emitting the second laser 420.

[0063] The second polarization module 424 is located in the transmission optical path of the second laser 420. Its main function is to adjust the polarization state of the second laser 420. For example, the second polarization module 424 is located in the laser transmission optical path after the reflector 423. It changes the polarization direction of the laser beam by using some half-wave plates or quarter-wave plates.

[0064] The second beam shaping module 425 is disposed in the transmission optical path of the second laser 420 and is used to adjust the spot size and shape of the second laser 420. For example, the second beam shaping module 425 is disposed in the laser transmission optical path between the reflector 423 and the reflector 426, and can adjust the spot size and shape of the second laser 420 after the polarization state has changed.

[0065] In one specific embodiment, the second beam shaping module 425 is an optical path composed of a Powell prism and a cylindrical mirror. Then, the second laser 420, after its polarization state has changed, passes through the second beam shaping module 425 and, with the orientation adjusted by the reflector 426, illuminates the detection position 201 at an angle towards it. See details [link to specific embodiments]. Figure 6 .

[0066] In one specific embodiment, see Figures 4 to 7 The second offset module 424 includes a second bracket and a second motor (not labeled in the figure), but the specific structure can be found in the reference diagram. Figure 7 The first offset module 415 is located in the second support. The second support has four sidewalls arranged in a cross shape. Each of the sidewalls has a waveplate; for example, one sidewall has a half-waveplate, one has a quarter-waveplate, one has half-waveplates with different fast axis directions, and the last sidewall has no waveplate and serves to block light. The shaft of the second motor is connected to the center of the cross of the second support. The function of the second motor is to drive the second support to rotate and switch each sidewall of the second support onto the transmission optical path of the second laser 420. It can be understood that to control the second motor, it can be manually operated by a switch to control the start and stop of the second motor to drive the second support to a predetermined position, or it can be controlled by... Figure 3 The control unit in the middle controls the start and stop of the second motor to drive the second bracket to rotate to the predetermined position.

[0067] It should be noted that when the sidewall of the transmission optical path of the second laser 420 is provided with a waveplate, the waveplate provided on the sidewall can change the polarization state of the second laser 420 at a preset angle; when the sidewall of the transmission optical path of the second laser 420 is not provided with a waveplate, the sidewall can block the second laser 420 to prevent the beam from transmitting.

[0068] In one embodiment, reference Figure 5 and Figure 8For the first detection unit 51, the first detection channel assembly 511 has a first optical path 5110 for transmitting the first scattered light. The first detection channel assembly 511 includes multiple first conditioning lenses, each of which participates in conditioning the first scattered light. It can be understood that when one or more of the multiple first conditioning lenses are switched to the first optical path 5110, beam conditioning is performed on the first scattered light. It should be noted that when the first conditioning lens is a filter, the cut-in optical path can perform a filtering function; when the first conditioning lens is a polarizer, the cut-in optical path can perform a polarization detection function; when the first conditioning lens is a planar window, the cut-in optical path can achieve interference-free light transmission.

[0069] In one specific embodiment, the first detection channel component 511 further includes one or more first switching mechanisms, such as... Figure 9 The first switching mechanisms, represented by reference numerals 5131-5132, 5141-5142, and 5151-5152, are described in the accompanying drawings. Each of these first switching mechanisms is used to switch any one of the first conditioning lenses into the first optical path 5110. At least one first conditioning lens is fixed to each first switching mechanism. During linear motion, the relative position of the first conditioning lens and the first optical path 5110 changes. When the first conditioning lens is placed on the first optical path 5110, it is switched into the first optical path 5110.

[0070] In one specific embodiment, the plurality of first conditioning lenses include a plurality of first filters, first polarizers, second polarizers, first windows, and second windows. The plurality of first filters (e.g., a 355nm narrowband filter, a 370-410nm bandpass filter) have different filtering parameters, the first and second polarizers (e.g., P-polarizers, S-polarizers) have different polarization angles for light, and the first and second windows (e.g., U1 windows, U2 windows) are both planar lenses. The P-polarizers and S-polarizers are used to distinguish the polarization states of the lenses, while the U1 and U2 windows serve the same function.

[0071] It should be noted that polarizers are mainly used to transmit a specified polarization state while blocking other polarization states. Wire grid type polarizers are suitable for broadband applications, using a tiny array of wires to selectively transmit P-polarized light while reflecting S-polarized light. The S-polarized light is perpendicular to the incident plane, while the P-polarized light is parallel. Therefore, polarizers can be classified into P-polarizers and S-polarizers based on their different functions.

[0072] In one specific embodiment, see Figure 4 , Figure 5 ,as well as Figures 8 to 10A plurality of first filters and a first switching mechanism (as shown in the attached figures 5131-5132) are formed into a first filter module 513. The first filter module 531 is used to switch any one of the plurality of first filters (such as a 355nm narrowband filter 5133 and a 370-410nm bandpass filter 5134) into the first optical path 5110.

[0073] In one specific embodiment, a first polarizer (such as a P-polarizer), a first window (such as a U1 window), and another first switching mechanism (such as reference numerals 5141-5142) are formed into a first polarization analyzer module 514, which is used to switch any one of the first polarizer and the first window into the first optical path 5110.

[0074] In one specific embodiment, a second polarizer (such as an S polarizer), a second window (such as a U2 window), and a third switching mechanism (such as reference numerals 5151-5152) are formed into a second polarization detection module 515, which is used to switch any one of the second polarizer and the second window into the first optical path 5110.

[0075] It is understandable that the first filter module 513 can switch between multiple first filters, the first polarization analyzer module 514 can switch between a first polarizer and a first window, and the second polarization analyzer module 515 can switch between a second polarizer and a second window. Therefore, different detection modes can be constructed by switching between these modes. For example, a 355nm narrowband filter + P-polarizer + U2 window can constitute a 355nm, P-polarization-detected dark-field detection mode; a 355nm narrowband filter + U1 window + S-polarizer can constitute a 355nm, S-polarization-detected dark-field detection mode; a 370-410nm bandpass filter + P-polarizer + U2 window can constitute a near-ultraviolet fluorescence, P-polarization-detected fluorescence detection mode; and a 370-410nm bandpass filter + U1 window + S-polarizer can constitute a near-ultraviolet fluorescence, S-polarization-detected fluorescence detection mode.

[0076] See Figure 9 and Figure 10 Each first switching mechanism includes a first clamp and a first cylinder. The first clamp has multiple through holes sequentially arranged thereon, which are used to fix multiple first filters, or to fix a first polarizer and a first window, or to fix a second polarizer and a second window, respectively. The first cylinder has a retractable first connecting rod (…). Figure 9 (Unmarked in the image) and the first link is connected to the first clamp; the first cylinder here is used to switch the various through holes on the first clamp to the first optical path 5110 through the extension and retraction movement of the first link. It can be understood that, in order to control the first cylinder, a switch can be manually operated to control the start and stop of the first cylinder to drive the first clamp to move linearly to a predetermined position, or it can be controlled by... Figure 3 The control unit 6 controls the start and stop of the first cylinder to drive the first clamp to rotate to the predetermined position.

[0077] for example Figure 10 This includes Figure (a), Figure (b), and Figure (c). Figure (a) illustrates... Figure 9 The first clamp 5132 in the diagram fixes a 355nm narrowband filter and a 370-410nm bandpass filter, respectively. The first clamp 5132 is driven by a first cylinder 5131 to switch lenses. Figure (b) illustrates the first clamp 5142, which fixes a first polarizer and a first window (e.g., a P-polarizer and a U1 window), respectively. The first clamp 5142 is driven by a first cylinder 5141 to switch lenses. Figure (c) illustrates the first clamp 4152, which fixes a second polarizer and a second window (e.g., an S-polarizer and a U2 window), respectively. The first clamp 5152 is driven by a first cylinder 5151 to switch lenses.

[0078] In one embodiment, reference Figures 3 to 5 ,as well as Figure 8 For the first detection unit 53, the second detection channel assembly 531 has a second optical path 5310 for transmitting the second scattered light. The second detection channel assembly 531 includes multiple second conditioning lenses, each used to condition the second scattered light. It can be understood that when one or more of the multiple second conditioning lenses are switched to the second optical path 5310, beam conditioning is performed on the second scattered light. It should be noted that when the second conditioning lens is a filter, the cut-in optical path can perform a filtering function; when the second conditioning lens is a polarizer, the cut-in optical path can perform a polarization analysis function; when the second conditioning lens is a planar window, the cut-in optical path can achieve interference-free light transmission.

[0079] In one specific embodiment, the second detection channel assembly 531 further includes one or more second switching mechanisms, each of which is used to switch any one of the second conditioning lenses into the second optical path 5310. Each second switching mechanism has at least one second conditioning lens fixed to it, and changes the relative position of the second conditioning lens with respect to the second optical path 5310 during linear motion. When the second conditioning lens is placed on the second optical path 5310, it is switched into the second optical path 5310.

[0080] In one specific embodiment, the plurality of second conditioning lenses include a second filter, a third polarizer, a fourth polarizer, a third window, and a fourth window. The third and fourth polarizers (e.g., P-polarizer and S-polarizer) have different polarization angles for light, and the third and fourth window (e.g., U1 window and U2 window) are both planar lenses.

[0081] In one specific embodiment, the second filter can be a 532nm narrowband filter, which only allows the second scattered light of 532nm to pass through. Therefore, the second filter can be directly fixed on the second optical path 5310 without the aid of the second switching mechanism.

[0082] In one specific embodiment, a third polarizer (such as a P-polarizer), a third window (such as a U1 window), and a second switching mechanism form a third polarization detection module 534. The third polarization detection module 534 is used to switch any one of the third polarizer and the third window into the second optical path 5310. See [link to specific details] for details. Figure 8 .

[0083] In one specific embodiment, a fourth polarizer (such as an S-polarizer), a fourth window (such as a U2 window), and another second switching mechanism are formed into a fourth polarization detection module 535. The fourth polarization detection module 535 is used to switch any one of the fourth polarizer and the fourth window into the second optical path 5310. For details, please refer to [link to relevant documentation]. Figure 8 .

[0084] It can be understood that the second filter independently forms a second filter module 533, the third polarization analyzer module 534 can switch between the third polarizer and the third window, and the fourth polarization analyzer module 535 can switch between the fourth polarizer and the fourth window. Therefore, different detection modes can be configured by switching between these modes. For example, a 532nm narrowband filter + P polarizer + U2 window can form a 532nm, P-analyzed dark-field detection mode, and a 532nm narrowband filter + U1 window + S polarizer can form a 532nm, S-analyzed dark-field detection mode.

[0085] In one specific embodiment, each second switching mechanism includes a second clamp and a second cylinder. Further details regarding the second switching mechanism can be found in [reference needed]. Figure 9 The first switching mechanism, represented by reference numerals 5131-5132 in the attached diagram, includes a second clamp with multiple through holes sequentially arranged thereon. These through holes are used to fix a third polarizer and a third window (e.g., a P-polarizer and a U1 window), or a fourth polarizer and a fourth window (e.g., an S-polarizer and a U2 window), respectively. The second cylinder has a retractable second connecting rod connected to the second clamp. The second cylinder is used to switch the various through holes on the second clamp to the second optical path 5310 via the retraction and extension of the second connecting rod. Of course, the structure of the second clamp can also be referenced. Figure 10 Figures (b) and (c) in the diagram are not repeated here. It can be understood that to control the second cylinder, it can be manually operated via a switch to control its start and stop, thereby driving the second clamp to move linearly to a predetermined position. Alternatively, it can be controlled by... Figure 3The control unit 6 controls the start and stop of the second cylinder to drive the second clamp to rotate to the predetermined position.

[0086] In the above embodiments, the object to be detected 202 may include one or more of a wafer, an epitaxial thin film, and a metal thin film. As long as the object to be detected 202 is placed in the detection position 201, laser irradiation and scattered light detection can be performed.

[0087] In the above embodiments, the first laser 410 may be a 355nm laser, and the second laser 420 may be a 532nm laser. Since the 355nm laser has the ability to irradiate and excite matter, while the 532nm laser only has the ability to irradiate, the first laser 410 can generate first scattered light when irradiating the surface of the object to be detected 202, and can also excite the surface of the object to be detected 202 to generate near-ultraviolet fluorescence and visible fluorescence; the second laser can generate second scattered light when irradiating the surface of the object to be detected 202.

[0088] In the above embodiments, the first scattered light can be measured by the first detection unit 51, and the second scattered light can be measured by the second detection unit 53. Dark-field detection of the scattered light can be performed simply by setting the first detection unit 51 and the second detection unit 53 to dark-field detection mode. Of course, since the surface of the object to be detected 202 can be excited to generate near-ultraviolet fluorescence and visible fluorescence, fluorescence detection is also required. Because near-ultraviolet fluorescence typically has a wavelength of 370-410 nm, and visible fluorescence has a wavelength of 410-550 nm, corresponding bandpass filters are needed to detect them.

[0089] In the above embodiments, since the first detection unit 51 is equipped with multiple switchable first filters (such as a 355nm narrowband filter and a 370-410nm bandpass filter), and the 370-410nm bandpass filter serves to allow near-ultraviolet fluorescence to pass through, the near-ultraviolet fluorescence can be received and conditioned by means of the first detection channel component 511. Therefore, the function of the first measurement component 512 can also be to measure the conditioned near-ultraviolet fluorescence and obtain the third detection information. It can be understood that the first measurement component 512 can form the third detection information by measuring data such as the light intensity and polarization state of the near-ultraviolet fluorescence.

[0090] Understandable, Figure 8In this system, the first filter module 513 can switch between multiple first filters, the first polarization analyzer module 514 can switch between a first polarizer and a first window, and the second polarization analyzer module 515 can switch between a second polarizer and a second window. Thus, a fluorescence detection mode can be configured by switching these filters. For example, a 370-410nm bandpass filter + P-polarizer + U2 window can form a near-ultraviolet fluorescence detection mode with P-polarization detection, while a 370-410nm bandpass filter + U1 window + S-polarizer can form a near-ultraviolet fluorescence detection mode with S-polarization detection.

[0091] In one specific embodiment, see Figures 3 to 8 The third detection channel assembly 521 has a third optical path 5210 for visible fluorescence transmission. The third detection channel assembly 521 includes a third filter module 523, which includes a third filter disposed on the third optical path 5210. The third filter is used to participate in conditioning visible fluorescence.

[0092] In one specific embodiment, the third filter is a 410-550nm bandpass filter that is specifically designed to allow visible fluorescence to pass through. That is, it only allows visible fluorescence in the 410-550nm range to pass through. Therefore, the third filter does not need to be switched, but can be directly fixed on the third optical path 5210.

[0093] In the above embodiments, see Figure 11 The principle of detection by the first laser 410 and the second laser 420 is explained. When the first laser 410 illuminates the object 202 to be detected at the detection position 201, the surface of the object 202 generates first scattered light, near-ultraviolet fluorescence, and light. When the second laser 420 illuminates the object 202 to be detected at the detection position 201, the surface of the object 202 generates second scattered light. When the 355nm narrowband filter in the first detection unit 51 is switched into the optical path, the first measurement component 512 can only measure the first scattered light; when the 370-410nm bandpass filter in the first detection unit 51 is switched into the optical path, the first measurement component 512 can only measure the near-ultraviolet fluorescence. When the 532nm narrowband filter in the second detection unit 53 is fixed in the optical path, the second measurement component 532 can only measure the second scattered light. When the 410-550nm bandpass filter in the third detection unit 52 is fixed in the optical path, the third measurement component 522 can only measure visible fluorescence.

[0094] In one embodiment, see Figures 1 to 3To facilitate the integrated installation of the first optical path unit 41, the second optical path unit 42, the first detection unit 51, the second detection unit 53, and the third detection unit 52, a housing 1 and a base plate 2 can be provided for the laser detection device. The housing 1 is fixed on the base plate 2, and a cavity is formed inside the housing 1 to accommodate the first detection unit 51, the second detection unit 53, and the third detection unit 52.

[0095] In one specific embodiment, since the first laser 411 of the first optical path unit 41 and the laser 421 of the second optical path unit 42 are both generating heat, the first laser 411 and the second laser 421 can be placed outside the housing 1 so that they can quickly scatter to the external environment when they are working. Since the first polarization module 415 and the first beam shaping module 416 of the first optical path unit 41 do not require heat dissipation, and the second polarization module 424 and the second beam shaping module 425 of the second optical path unit 42 do not require heat dissipation, they can be placed inside the housing 1.

[0096] In one specific embodiment, see Figures 1 to 4 The housing 1 may include a main support frame 11, a cover plate 12, and a secondary support frame 13. The main support frame 11 is fixed to the base plate 2 and is an exposed, hollow structure, with its inner surface forming mounting positions for the first detection unit 51, the second detection unit 53, and the third detection unit 52. The cover plate 12 is detachably mounted on the main support frame 11; removing the cover plate 12 allows observation of the internal space of the main support frame 11 and the installed detection units. The secondary support frame 13 is fixed to the outer surface of the main support frame 11 and forms a mounting platform for the first laser 411.

[0097] In one specific embodiment, see Figures 1 to 4 The base plate 2 may include a main plate 21 and a sub-plate 22. The main plate 21 forms the bottom liner and is used to fix the housing 1. Of course, the surface of the main plate 21 can be larger to integrate and install other components. The sub-plate 22 is fixed to the main plate 21 and extends into the hollow shell of the main support frame 11. The sub-plate 22 is used to form the mounting positions for the first polarization module 415 and the first beam shaping module 416 in the first optical path unit 41, and the second polarization module 424 and the second beam shaping module 425 in the second optical path unit 42.

[0098] In one specific embodiment, the base plate 2 is provided with a detection position 201, which is used to place the object to be detected 202. For example, the main board 21 may be provided with a through hole that extends through the top and bottom. One end of the through hole allows the first laser 410, which is irradiated vertically, to pass through, and the second laser 420, which is irradiated at an angle, to pass through. The other end of the through hole serves as the detection position 201. As long as the object to be detected 202 is placed in the detection position 201, the first laser 410 and / or the second laser 420 can irradiate the surface of the object to be detected 202.

[0099] In one embodiment, reference Figures 1 to 5 The laser detection device also includes a power supply unit 3. The power supply unit 3 can be installed on the upper side of the housing 1 and connected to the first optical path unit 41, the second optical path unit 42, the first detection unit 51, the second detection unit 53, and the third detection unit 52, thereby supplying them with power. For example, the power supply unit 3 can generate DC power of different voltage levels to power the first laser 411 and the first motor 4152 in the first optical path unit 41, the second laser 421 and the second motor in the second optical path unit 42, the first measuring component 512 in the first detection unit 51, the second measuring component 532 in the second detection unit 53, and the third measuring component 522 in the third detection unit 52.

[0100] In the above embodiments, to obtain more detection information, a first laser 410 is generated by the first optical path unit 41 to irradiate and excite the object 202 to be detected at the detection position 201, and a second laser 420 generated by the second optical path unit 42 is used to irradiate the object 202 to be detected at the detection position 201. Therefore, multiple detection channels are needed to receive different emitted light or fluorescence. Specifically, the first detection unit 51 receives the first scattered light or near-ultraviolet fluorescence, the second detection unit 53 receives the second scattered light, and the third detection unit 52 receives visible fluorescence. The first detection unit 51 and the second detection unit 53 respectively implement the application requirements of dark-field detection mode during the detection of the first and second scattered light; the first detection unit 51 and the third detection unit 52 respectively implement the application requirements of fluorescence detection mode during the detection of near-ultraviolet fluorescence and visible fluorescence.

[0101] It is understandable that the laser detection device uses the principle of light scattering to illuminate the object under test with dual optical paths and constructs a simple and effective machine vision measurement system through multiple detection channels. By obtaining a variety of detection information, the surface quality of the object under test 202 is measured in multiple modes, thereby achieving the purpose of optimizing the device structure and enhancing detection performance.

[0102] Example 2

[0103] The structure and function of the laser detection device were introduced in Example 1. Now, from the perspective of the control unit 6, the control process of the laser detection device and its two detection modes (i.e., dark field detection mode and fluorescence detection mode) will be described in detail.

[0104] Please refer to Figure 3 and Figure 12 The control unit 6 mainly implements three control steps, namely steps 1000-3000, which are described below.

[0105] Step 1000: The control unit 6 acquires the current detection mode of the laser detection device. Since the laser detection device has both dark field detection mode and fluorescence detection mode, the currently selectable detection mode is either dark field detection mode or fluorescence detection mode. It is understood that the user can select and confirm which detection mode the control unit 6 acquires.

[0106] Step 2000: If the current detection mode is dark field detection mode, the control unit 6 issues relevant instructions to control the first optical path unit 41 and the second optical path unit 42 to irradiate the preset detection position 201 with the first laser 410 and the second laser 420 respectively. At this time, the object to be detected 202 on the detection position 201 generates the first scattered light and the second scattered light respectively under the irradiation of the first laser 410 and the second laser 420. Then, the control unit 6 issues relevant instructions to control the first detection unit 51 to measure the first scattered light and form the first detection information, and to control the second detection unit 53 to measure the second scattered light and form the second detection information.

[0107] Step 3000: If the current detection mode is fluorescence detection mode, the control unit 6 issues a relevant instruction to control the first optical path unit 41 to irradiate the detection position 201 with the first laser. At this time, the object to be detected 202 on the detection position 201 generates near-ultraviolet fluorescence and visible fluorescence under the excitation of the first laser 410. Then, the control unit 6 issues a relevant instruction to control the first detection unit 51 to measure the near-ultraviolet fluorescence and form the third detection information, and to control the third detection unit 52 to measure the visible fluorescence and form the fourth detection information.

[0108] Step 2000 above describes the control process of the control unit 6 on the first optical path unit 41, the second optical path unit 42, the first detection unit 51, and the second detection unit 53 in dark field detection mode. The following will combine... Figure 13 and Figure 14 This process will be explained in detail.

[0109] See Figure 13 This illustrates the control steps of the control unit 6 on the first optical path unit 41 and the second optical path unit 42, specifically including steps 2101-2106.

[0110] Step 2101: After the control unit 6 confirms that it has entered the dark field detection mode, it can simultaneously issue relevant control commands to the first optical path unit 41 and the second optical path unit 42 for timing control.

[0111] See Figures 3 to 6 The first optical path unit 41 includes a first laser 411, a first polarization module 415, a first beam shaping module 416, and an attenuator 412. The system includes a first laser 411 that generates a first laser 410, such as a 355nm laser, which is then directed to the detection position 201 along a preset transmission optical path by one or more reflectors. A first polarization module 415 is located on the transmission optical path of the first laser 410 and its main function is to adjust the polarization state of the first laser 410. For example, the first polarization module 415 uses half-wave plates or quarter-wave plates to change the polarization direction of the laser beam. A first beam shaping module 416 is located on the transmission optical path of the first laser 410 and is used to adjust the spot size and shape of the first laser 410. For example, the first beam shaping module 416 can adjust the spot size and shape of the first laser 410 after the polarization state has changed. An attenuator 412 is located on the transmission optical path of the first laser 410 and is used to adjust the beam transmission power of the first laser 410. For example, the attenuator 412 directly adjusts the beam transmission power of the first laser 410 emitted by the first laser 411. Then, the control unit 6 can issue relevant instructions to control the first optical path unit 41 to irradiate the first laser 410 onto the detection position 201. The timing control process can be found in steps 2102-2104 below.

[0112] Step 2102: The control unit 6 issues relevant instructions to control the first laser 411 to generate the first laser 410.

[0113] In step 2103, the control unit 6 issues relevant commands to control the attenuator 412 to adjust the beam transmission power of the first laser 410. It is understood that since the power of the first laser 411 emitting 355nm laser light is not adjustable, it is necessary to modulate the laser power by setting an additional attenuator 412.

[0114] In step 2104, the control unit 6 issues relevant commands to control the first polarization module 415 to switch to the first polarization state. This first polarization state is used to adjust the polarization state of the first laser 410, and can be P-polarization, S-polarization, or circular polarization. Since the first polarization module 415 includes a first support 4151 and a first motor 4152, the control unit 6 can control the start and stop of the first motor 4152 to drive the first support 4151 to rotate to a predetermined position, thereby switching the waveplate on one side wall of the first support 4151 to the transmission optical path of the first laser 410, achieving the purpose of adjusting the polarization state of the first laser 410.

[0115] It can be understood that the first laser 410 after the polarization state is changed passes through the first beam shaping module 416, and the size and shape of the spot of the first laser 410 are adjusted by the first beam shaping module 416 and then irradiate the detection position 201, thereby irradiating the object to be detected 202 placed on the detection position 201 and causing the surface of the object to be detected 202 to generate the first scattered light.

[0116] See Figures 3 to 6 The second optical path unit 42 includes a second laser 421, a second polarization module 424, and a second beam shaping module 425. The second laser 421 generates a second laser 420, such as a 532nm laser, which illuminates the detection position 201 along a preset transmission optical path after being adjusted by one or more reflectors. The second polarization module 424 is located on the transmission optical path of the second laser 420 and its main function is to adjust the polarization state of the second laser 420. For example, the second polarization module 424 uses half-wave plates or quarter-wave plates to change the polarization direction of the laser beam. The second beam shaping module 425 is located on the transmission optical path of the second laser 420 and is used to adjust the spot size and shape of the second laser 420. For example, the second beam shaping module 425 can adjust the spot size and shape of the second laser 420 after the polarization state has changed. Then, the control unit 6 can issue relevant instructions to control the second optical path unit 42 to irradiate the detection position 201 with the second laser 42. The timing control process can be found in steps 2105-2106 below.

[0117] Step 2105: Control unit 6 controls second laser 421 to generate second laser 420.

[0118] In step 2106, the control unit 6 controls the second polarization module 424 to switch to the second polarization state. This second polarization state is used to adjust the polarization state of the second laser 420, and can be P-polarization, S-polarization, or circular polarization. Since the second polarization module 424 includes a second support and a second motor, the control unit 6 can control the start and stop of the second motor to drive the second support to rotate to a predetermined position, thereby switching the waveplate on one side wall of the second support to the transmission optical path of the second laser 420, achieving the purpose of adjusting the polarization state of the second laser 420.

[0119] It can be understood that the second laser 420 after the polarization state is changed passes through the second beam shaping module 425, and the spot size and shape of the second laser 420 are adjusted by the second beam shaping module 425 and then irradiate the detection position 201, thereby irradiating the object to be detected 202 placed on the detection position 201 and causing the surface of the object to be detected 202 to generate the first scattered light.

[0120] See Figure 14 This illustrates the control steps of the control unit 6 on the first detection unit 51 and the second detection unit 53, specifically including steps 2201-2211.

[0121] Step 2201: After the control unit 6 confirms that it has entered the dark field detection mode, it can simultaneously issue relevant control commands to the first detection unit 51 and the second detection unit 53 for timing control.

[0122] refer to Figure 5 and Figure 8 The first detection unit 51 may include a first detection channel assembly 511 and a first measurement assembly 512. The first detection channel assembly 51 may be a dimming lens and is used to receive and condition the first scattered light or near-ultraviolet fluorescence. The first measurement assembly 512 may be an optical sensor assembly (such as a camera) and is used to measure the conditioned first scattered light or near-ultraviolet fluorescence. The first detection channel assembly 511 has a first optical path 5110 for transmitting the first scattered light, including a first filter module 513, a first polarization analyzer module 514, and a second polarization analyzer module 515. The first filter module 513 is used to switch the filter state on the first optical path 5110, and the first polarization analyzer module 514 and the second polarization analyzer module 515 are both used to switch the polarization analyzer state on the first optical path 5110. Then, the control unit 6 can issue relevant commands to control the first detection unit 51 to measure the first scattered light and form the first detection information. The timing control process can be seen in steps 2202-2206 below.

[0123] Step 2202: Control unit 6 issues relevant instructions to control the first polarization detection module 514 to switch to the first polarization detection state, which can be P polarization detection or circular polarization detection.

[0124] In step 2203, the control unit 6 issues a relevant command to control the second polarization detection module 515 to switch to the second polarization detection state, which can be S-polarization or circular polarization. Here, the first polarization detection state and the second polarization detection state are used together to detect the polarization state of the first scattered light.

[0125] In one specific embodiment, see Figure 8 , Figure 9 and Figure 10 The first polarization detection module 514 includes a first polarizer, a first window, and a second switching mechanism (as shown in reference numerals 5141-5142). The second polarization detection module 515 includes a second polarizer, a second window, and a third switching mechanism (as shown in reference numerals 5151-5152). The control unit 6 can control the second switching mechanism to switch one of the first polarizer (e.g., a P-polarizer) and the first window (e.g., a U1 window) into the first optical path 5110, forming a first polarization detection state. The control unit 6 can also control the third switching mechanism to switch one of the second polarizer (e.g., an S-polarizer) and the second window (e.g., a U2 window) into the first optical path 5110, forming a second polarization detection state. It should be noted that the polarization detection state formed by the first and second polarization detection states corresponds to the first polarization initiation module 414 in the first optical path unit 41 switching to the first polarization initiation state.

[0126] Step 2204: Control unit 6 issues relevant instructions to control the first filter module 513 to switch to the first filter state, where the first filter state is used to allow only the first scattered light to pass through.

[0127] In one specific embodiment, see Figure 8 , Figure 9 and Figure 10 The first filter module 513 includes multiple first filters and a first switching mechanism (as shown in the attached figures 5131-5132). The control unit 6 can control the first switching mechanism to switch one of the multiple first filters (such as a 355nm narrowband filter) into the first optical path 5110 to form a first filter state.

[0128] In one specific embodiment, if the first polarization module 414 in the first optical path unit 41 switches to the first polarization state of P polarization, then for the first polarization detection state, the second polarization detection state, and the first filtering state, a dark field detection mode with 355nm filtering and P polarization detection can be constructed by a 355nm narrowband filter + P polarizer + U2 window. If the first polarization module 414 in the first optical path unit 41 switches to the first polarization state of S polarization, a dark field detection mode with 355nm filtering and S polarization detection can be constructed by a 355nm narrowband filter + U1 window + S polarizer. If the first polarization module 414 in the first optical path unit 41 switches to the first polarization state of circular polarization, a dark field detection mode with 355nm filtering and no polarization detection can be constructed by a 355nm narrowband filter + U1 window + U2 window.

[0129] Step 2205: Control unit 6 issues relevant instructions to control the first measuring component 512 to measure the first scattered light.

[0130] Step 2206: Since the first measuring component 512 can form first detection information by measuring the first scattered light, the control unit 6 can obtain the first detection information.

[0131] See Figure 5 and Figure 8 The second detection unit 53 may include a second detection channel assembly 531 and a second measurement assembly 532. The second detection channel assembly 531 may be a dimming lens barrel used to receive and condition the second scattered light. The second measurement assembly 532 may be an optical sensor assembly (such as a camera) used to measure the conditioned second scattered light. The second detection channel assembly 531 has a second optical path 5310 for transmitting the second scattered light, including a second filter module 533, a third polarization analyzer module 534, and a fourth polarization analyzer module 535. The second filter module 533 is used to change the filter state on the second optical path 5310, and the third polarization analyzer module 534 and the fourth polarization analyzer module 535 are both used to switch the polarization analyzer state on the second optical path 5310. Then, the control unit 6 can issue relevant commands to control the second detection unit 53 to measure the second scattered light and form second detection information. The timing control process can be found in steps 2207-2211 below.

[0132] In step 2207, the control unit 6 issues a relevant command to control the third polarization detection module 534 to switch to the third polarization detection state, which can be P-polarization or circular polarization. In step 2208, the control unit 6 issues a relevant command to control the fourth polarization detection module 535 to switch to the fourth polarization detection state, which can be S-polarization or circular polarization. Here, the third and fourth polarization detection states are used to jointly detect the polarization state of the second scattered light.

[0133] In one specific embodiment, see Figure 8The third polarization detection module 534 includes a third polarizer, a third window, and a fourth switching mechanism. The fourth polarization detection module 535 includes a fourth polarizer, a fourth window, and a fifth switching mechanism. The control unit 6 can control the fourth switching mechanism to switch one of the third polarizer (e.g., a P-polarizer) and the third window (e.g., a U1 window) into the second optical path 5310, thus forming a third polarization detection state. Similarly, the control unit 6 can control the fifth switching mechanism to switch one of the fourth polarizer (e.g., an S-polarizer) and the fourth window (e.g., a U2 window) into the second optical path 5310, thus forming a fourth polarization detection state. It should be noted that the polarization detection state formed by the third and fourth polarization detection states corresponds to the second polarization initiation module 424 in the second optical path unit 42 switching to the second polarization initiation state.

[0134] Step 2209: Since the second filter module 533 has a second filter (such as a 532nm narrowband filter) and cannot be controlled, the second scattered light with a changed polarization state forms a second filtered state after passing through the second filter module 533. Here, the second filtered state is used to allow only the second scattered light to pass through.

[0135] In one specific embodiment, if the second polarization module 424 in the second optical path unit 42 switches to the second polarization state of P polarization, for the third polarization state, the fourth polarization state, and the second filtering state, a dark field detection mode with 532nm filtering and P polarization detection can be formed by a 532nm narrowband filter + P polarizer + U2 window. If the second polarization module 424 in the second optical path unit 42 switches to the second polarization state of S polarization, a dark field detection mode with 532nm filtering and S polarization detection can be formed by a 532nm band filter + U1 window + S polarizer. If the second polarization module 424 in the second optical path unit 42 switches to the second polarization state of circular polarization, a dark field detection mode with 532nm filtering and no polarization detection can be formed by a 532nm band filter + U1 window + U2 window.

[0136] Step 2210: Control unit 6 issues relevant instructions to control the second measuring component 532 to measure the second scattered light.

[0137] Step 2211: Since the second measurement component 532 can form second detection information by measuring the second scattered light, the control unit 6 can obtain the first detection information.

[0138] Step 3000 above describes the control process of the control unit 6 on the first optical path unit 41, the first detection unit 51, and the second detection unit 53 in fluorescence detection mode. The following will combine... Figure 15 and Figure 16 This process will be explained in detail.

[0139] See Figure 14This illustrates the control steps of the control unit 6 on the first optical path unit 41, specifically including steps 3101-3104.

[0140] Step 3101: After the control unit 6 confirms that it has entered the fluorescence detection mode, it can issue relevant control commands to the first optical path unit 41 for timing control.

[0141] See Figures 3 to 6 The first optical path unit 41 includes a first laser 411, a first polarization module 415, a first beam shaping module 416, and an attenuator 412. The system includes a first laser 411 that generates a first laser 410, such as a 355nm laser, which is then directed to the detection position 201 along a preset transmission optical path by one or more reflectors. A first polarization module 415 is located on the transmission optical path of the first laser 410 and its main function is to adjust the polarization state of the first laser 410. For example, the first polarization module 415 uses half-wave plates or quarter-wave plates to change the polarization direction of the laser beam. A first beam shaping module 416 is located on the transmission optical path of the first laser 410 and is used to adjust the spot size and shape of the first laser 410. For example, the first beam shaping module 416 can adjust the spot size and shape of the first laser 410 after the polarization state has changed. An attenuator 412 is located on the transmission optical path of the first laser 410 and is used to adjust the beam transmission power of the first laser 410. For example, the attenuator 412 directly adjusts the beam transmission power of the first laser 410 emitted by the first laser 411. Then, the control unit 6 can issue relevant instructions to control the first optical path unit 41 to irradiate the first laser 410 onto the detection position 201. The timing control process can be found in steps 3102-3104 below.

[0142] Step 3102: The control unit 6 issues relevant instructions to control the first laser 411 to generate the first laser 410.

[0143] In step 3103, the control unit 6 issues relevant commands to control the attenuator 412 to adjust the beam transmission power of the first laser 410. It is understood that since the power of the first laser 411 emitting 355nm laser light is not adjustable, it is necessary to modulate the laser power by setting an additional attenuator 412.

[0144] In step 3104, the control unit 6 issues relevant commands to control the first polarization module 415 to switch to the first polarization state, which is used to adjust the polarization state of the first laser 410. Since the first polarization module 415 includes a first support 4151 and a first motor 4152, the control unit 6 can control the start and stop of the first motor 4152 to drive the first support 4151 to rotate to a predetermined position, thereby switching the waveplate on one side wall of the first support 4151 to the transmission optical path of the first laser 410, achieving the purpose of adjusting the polarization state of the first laser 410.

[0145] It can be understood that the first laser 410 after the polarization state is changed passes through the first beam shaping module 416, and the size and shape of the first laser 410 spot are adjusted by the first beam shaping module 416 and then irradiate the detection position 201, thereby exciting the object 202 to be detected placed on the detection position 201 and causing the surface of the object 202 to generate near-ultraviolet fluorescence and visible fluorescence.

[0146] See Figure 16 This illustrates the control steps of the control unit 6 on the first detection unit 51 and the third detection unit 52, specifically including steps 3201-3209.

[0147] Step 3201: After the control unit 6 confirms that it has entered the fluorescence detection mode, it can simultaneously issue relevant control commands to the first detection unit 51 and the third detection unit 52 for timing control.

[0148] It should be noted that the first detection unit 51 may include a first detection channel assembly 511 and a first measurement assembly 512. The first detection channel assembly 51 may be a dimming lens and is used to receive and condition the first scattered light or near-ultraviolet fluorescence. The first measurement assembly 512 may be an optical sensor assembly (such as a camera) and is used to measure the conditioned first scattered light or near-ultraviolet fluorescence. The first detection channel assembly 511 has a first optical path 5110 for transmitting the first scattered light, including a first filter module 513, a first polarization analyzer module 514, and a second polarization analyzer module 515. The first filter module 513 is used to switch the filter state on the first optical path 5110, and the first polarization analyzer module 514 and the second polarization analyzer module 515 are both used to switch the polarization analyzer state on the first optical path 5110. Then, the control unit 6 can issue relevant commands to control the first detection unit 51 to measure the first scattered light and form the first detection information. The timing control process can be seen in steps 2202-2206 below.

[0149] Step 3202: Control unit 6 issues relevant instructions to control the first polarization detection module 514 to switch to the fifth polarization detection state, which can be P polarization detection or circular polarization detection.

[0150] In step 3203, the control unit 6 issues a relevant command to control the second polarization analyzer module 515 to switch to the sixth polarization analyzer state, which can be either S-polarization or circular polarization. The fifth and sixth polarization analyzer states are used together to detect the polarization state of near-ultraviolet fluorescence.

[0151] In one specific embodiment, see Figure 8 , Figure 9 and Figure 10 The first polarization detection module 514 includes a first polarizer, a first window, and a second switching mechanism (as indicated by the reference numerals 5141 and 5142 in the attached diagram). The second polarization detection module 515 includes a second polarizer, a second window, and a third switching mechanism (as indicated by the reference numerals 5151 and 5152 in the attached diagram). The control unit 6 can control the second switching mechanism to switch either the first polarizer (e.g., a P-polarizer) or the first window (e.g., a U1 window) into the first optical path 5110, forming a fifth polarization detection state. The control unit 6 can control the third switching mechanism to switch either the second polarizer (e.g., an S-polarizer) or the second window (e.g., a U1 window) into the first optical path 5110, forming a sixth polarization detection state. It should be noted that the polarization detection state formed by the fifth and sixth polarization detection states may or may not correspond to the first polarization initiation module 414 switching to the first polarization initiation state in the first optical path unit 41.

[0152] In step 3204, the control unit 6 issues a relevant command to control the first filter module 513 to switch to the third filter state, where the third filter state is used to allow only near-ultraviolet fluorescence.

[0153] In one specific embodiment, see Figure 8 , Figure 9 and Figure 10 The first filter module 513 includes multiple first filters and a first switching mechanism (as shown in the attached diagram, the mechanism of the first motor 5131 and the first clamp 5132). The control unit 6 can control the first switching mechanism to switch one of the multiple first filters (such as a 370-410nm bandpass filter) into the first optical path 5110 to form a third filter state.

[0154] In one specific embodiment, if the first polarizing module 414 in the first optical path unit 41 switches to the first polarizing state of P polarization, then for the fifth polarization state, the sixth polarization state, and the third filtering state, a near-ultraviolet fluorescence detection mode with P polarization detection can be formed by the 370-410nm bandpass filter + P polarizer + U2 window. If the first polarizing module 414 in the first optical path unit 41 switches to the first polarizing state of S polarization, a near-ultraviolet fluorescence detection mode with S polarization detection can be formed by the 370-410nm bandpass filter + U1 window + S polarizer. If the first polarizing module 414 in the first optical path unit 41 switches to the first polarizing state of circular polarization, a near-ultraviolet fluorescence detection mode with no polarization detection can be formed by the 370-410nm bandpass filter + U1 window + U2 window.

[0155] Step 3205: Control unit 6 issues relevant instructions to control the first measurement component 512 to measure near-ultraviolet fluorescence.

[0156] Step 3206: Since the first measuring component 512 can form third detection information by measuring near-ultraviolet fluorescence, the control unit 6 can obtain the third detection information.

[0157] See Figure 5 and Figure 8 The third detection unit 52 may include a third detection channel assembly 521 and a third measurement assembly 522. The third detection channel assembly 521 may be a dimming lens tube used to receive and condition visible fluorescence, and the third measurement assembly 522 may be an optical sensor assembly (such as a camera) used to measure the conditioned visible fluorescence. The third detection channel assembly 521 has a third optical path 5210 for visible fluorescence transmission, including a third filter module 523. Then, the control unit 6 can issue relevant commands to control the second detection unit 53 to measure visible fluorescence and form third detection information. The timing control process can be seen in steps 3207-3209 below.

[0158] In step 3207, the visible fluorescence is formed into a fourth filtered state after passing through the third filter module 523. Since the third filter module 523 includes a third filter (such as a bandpass filter of 410-550nm) disposed on the third optical path 5210, it can be used to allow only visible fluorescence to pass through.

[0159] Step 3208: Control unit 6 issues relevant instructions to control third measurement component 522 to measure visible fluorescence.

[0160] In step 3209, since the third measuring component 522 can form fourth detection information by measuring visible fluorescence, the control unit 6 can obtain the fourth detection information.

[0161] In the above embodiments, the control unit 6 acquires first and second detection information in dark field detection mode, and third and fourth detection information in fluorescence detection mode. Since the detection information reflects the surface features of the object 202 to be detected, the first and second detection information, and / or the third and fourth detection information can be used to analyze and obtain the surface feature information of the object to be detected. The surface feature information includes one or more of the following: particle distribution state, band gap distribution state, and lattice composition state.

[0162] It should be noted that this embodiment focuses on the control process of the control unit 6, rather than the data processing process of the probe information. Since the inventive point is not in the data processing process, the technology for obtaining surface feature information by analyzing the probe information can be an existing data processing technology or a future data processing technology, and no specific limitation is made here.

[0163] Example 3

[0164] Based on the laser detection device in the above embodiments, this embodiment discloses a control device, which can be found in the following reference. Figure 17 The control device mainly includes a memory 71 and a processor 72.

[0165] exist Figure 17 In this control device 7, the memory 71 and the processor 72 are the main components. The control device may also include detection and execution components connected to the processor 72; see reference for details. Figure 3 This will not be explained in detail here.

[0166] The memory 71 can serve as a computer-readable storage medium, here used to store a program, which can be... Figure 3 The program code corresponding to the control logic implemented by the control unit 6.

[0167] The processor 72 is connected to the memory 71 and is used to execute the program stored in the memory 71 to implement the control process implemented by the control unit 6 in the above embodiment. It should be noted that the functions implemented by the processor 72 can... Figure 3 The control unit 6 in the middle will not be described in detail here.

[0168] Those skilled in the art will understand that all or part of the functions of the various methods in the above embodiments can be implemented by hardware or by computer programs. When all or part of the functions in the above embodiments are implemented by computer programs, the program can be stored in a computer-readable storage medium, which may include: read-only memory, random access memory, disk, optical disk, hard disk, etc., and the program is executed by a computer to achieve the above functions. For example, the program can be stored in the memory of a device, and when the program in the memory is executed by the processor, all or part of the above functions can be achieved. In addition, when all or part of the functions in the above embodiments are implemented by computer programs, the program can also be stored in a server, another computer, disk, optical disk, flash drive, or external hard drive, etc., and can be downloaded or copied to the memory of a local device, or the system of the local device can be updated. When the program in the memory is executed by the processor, all or part of the functions in the above embodiments can be achieved.

[0169] The above examples illustrate this application only to aid in understanding its technical solution and are not intended to limit its scope. Those skilled in the art can make various simple deductions, modifications, or substitutions based on the ideas presented in this application.

Claims

1. A laser detection device supporting multiple detection modes, characterized in that, It includes a first optical path unit, a second optical path unit, a first detection unit, a second detection unit, a third detection unit, and a control unit; The first optical path unit is used to irradiate a first laser onto a preset detection position; the detection position is used to place an object to be detected; the first laser can generate first scattered light on the surface of the object to be detected, and the first laser can excite the surface of the object to be detected to generate near-ultraviolet fluorescence and visible fluorescence. The second optical path unit is used to irradiate the detection position with a second laser; the second laser can generate second scattered light on the surface of the object to be detected, and the wavelength parameters of the second laser are different from those of the first laser; The first detection unit is used to detect the first scattered light or the near-ultraviolet fluorescence; The second detection unit is used to detect the second scattered light; The third detection unit is used to detect the visible fluorescence; The laser detection device has a dark field detection mode and a fluorescence detection mode; The control unit acquires the current detection mode; If the current detection mode is the dark field detection mode, the control unit controls the first optical path unit and the second optical path unit to respectively irradiate the preset detection position with the first laser and the second laser; the control unit controls the first detection unit to measure the first scattered light and form the first detection information, and controls the second detection unit to measure the second scattered light and form the second detection information; If the current detection mode is the fluorescence detection mode, the control unit controls the first optical path unit to irradiate the detection position with a first laser; the control unit controls the first detection unit to measure the near-ultraviolet fluorescence and form third detection information, and controls the third detection unit to measure the visible fluorescence and form fourth detection information.

2. The laser detection device as described in claim 1, characterized in that, The first optical path unit includes a first laser, a first polarization module, and a first beam shaping module; The first laser is used to generate the first laser, and the first laser illuminates the detection position along a preset transmission optical path under the light adjustment of one or more reflectors; The first polarization mode group is disposed in the transmission optical path of the first laser and is used to adjust the polarization state of the first laser. The first beam shaping module is disposed on the transmission optical path of the first laser and is used to adjust the spot size and shape of the first laser. In the dark field detection mode or the fluorescence detection mode, the control unit controls the first optical path unit to irradiate the detection position with a first laser, including: The control unit controls the first laser to generate the first laser; The control unit controls the first polarization module to switch to a first polarization state; the first polarization state is used to adjust the polarization state of the first laser. The first laser, after its polarization state has been changed, passes through the first beam shaping module, and the size and shape of the first laser spot are adjusted by the first beam shaping module before illuminating the detection position.

3. The laser detection device as described in claim 2, characterized in that, The first optical path unit further includes an attenuator; the attenuator is disposed in the transmission optical path of the first laser and is used to adjust the beam transmission power of the first laser. In the dark field detection mode or the fluorescence detection mode, the control unit controls the attenuator to adjust the beam transmission power of the first laser.

4. The laser detection device as described in claim 2, characterized in that, The second optical path unit includes a second laser, a second polarization module, and a second beam shaping module; The second laser is used to generate the second laser, which is then directed to the detection position along a preset transmission optical path by one or more reflectors for light adjustment. The second polarization mode is disposed in the transmission optical path of the second laser and is used to adjust the polarization state of the second laser; The second beam shaping module is disposed on the transmission optical path of the second laser and is used to adjust the spot size and shape of the second laser. In the dark field detection mode, the control unit controls the second optical path unit to irradiate the detection position with a second laser, including: The control unit controls the second laser to generate the second laser; The control unit controls the second polarization module to switch to a second polarization state; the second polarization state is used to adjust the polarization state of the second laser. The second laser, after its polarization state has been changed, passes through the second beam shaping module, and the size and shape of the second laser spot are adjusted by the second beam shaping module before illuminating the detection position.

5. The laser detection device as described in claim 4, characterized in that, The first detection unit includes a first detection channel assembly and a first measurement assembly; The first detection channel component is used to receive and condition the first scattered light or the near-ultraviolet fluorescence, and the first detection channel component has a first optical path for transmitting the first scattered light or the near-ultraviolet fluorescence; The first measurement component is used to measure the conditioned first scattered light or near-ultraviolet fluorescence; The first detection channel assembly includes a first filter module, a first polarization analyzer module, and a second polarization analyzer module; The first filter module is used to switch the filter state on the first optical path, and both the first polarization analyzer module and the second polarization analyzer module are used to switch the polarization analyzer state on the first optical path. In the dark field detection mode, the control unit controls the first detection unit to measure the first scattered light and form first detection information, including: The control unit controls the first polarization detection module to switch to a first polarization detection state and controls the second polarization detection module to switch to a second polarization detection state; the first polarization detection state and the second polarization detection state are used to jointly detect the polarization state of the first scattered light; The control unit controls the first filter module to switch to a first filter state; the first filter state is used to allow only the first scattered light to pass through. The control unit controls the first measuring component to measure the first scattered light and generate the first detection information.

6. The laser detection device as described in claim 5, characterized in that, The first filter module includes a plurality of first filters and a first switching mechanism; When the control unit controls the first switching mechanism to switch one of the plurality of first filters into the first optical path, the first filtering state is formed.

7. The laser detection device as described in claim 5, characterized in that, The first polarization detection module includes a first polarizer, a first window, and a second switching mechanism; the second polarization detection module includes a second polarizer, a second window, and a third switching mechanism. When the control unit controls the second switching mechanism to switch one of the first polarizer and the first window to the first optical path, the first polarization detection state is formed. When the control unit controls the third switching mechanism to switch one of the second polarizer and the second window to the first optical path, the second polarization detection state is formed. The polarization state formed by the first polarization state and the second polarization state corresponds to the first polarization starting module in the first optical path unit switching to the first polarization starting state.

8. The laser detection device as described in claim 4, characterized in that, The second detection unit includes a second detection channel assembly and a second measurement assembly; The second detection channel component is used to receive and condition the second scattered light, and the second detection channel component has a second optical path for transmitting the second scattered light; The second measurement component is used to measure the conditioned second scattered light; The second detection channel assembly includes a second filter module, a third polarization analyzer module, and a fourth polarization analyzer module; the second filter module is used to change the filter state in the second optical path, and the third and fourth polarization analyzer modules are both used to switch the polarization analyzer state in the second optical path. In the dark field detection mode, the control unit controls the second detection unit to measure the second scattered light and form second detection information, including: The control unit controls the third polarization detection module to switch to the third polarization detection state and controls the fourth polarization detection module to switch to the fourth polarization detection state; the third polarization detection state and the fourth polarization detection state are used to jointly detect the polarization state of the second scattered light; The second scattered light, whose polarization state has changed, is formed into a second filtered state after passing through the second filter module; the second filtered state is used to allow only the second scattered light to pass through; The control unit controls the second measuring component to measure the second scattered light and generate the second detection information.

9. The laser detection device as described in claim 8, characterized in that, The third polarization detection module includes a third polarizer, a third window, and a fourth switching mechanism; the fourth polarization detection module includes a fourth polarizer, a fourth window, and a fifth switching mechanism. When the control unit controls the fourth switching mechanism to switch one of the third polarizer and the third window to the second optical path, the third polarization detection state is formed. When the control unit controls the fifth switching mechanism to switch one of the fourth polarizer and the fourth window to the second optical path, the fourth polarization detection state is formed. The polarization state formed by the third polarization state and the fourth polarization state corresponds to the second polarization module in the second optical path unit switching to the second polarization state.

10. The laser detection device as described in claim 5, characterized in that, In the fluorescence detection mode, the control unit controls the first detection unit to measure the near-ultraviolet fluorescence and form third detection information, including: The control unit controls the first polarization detection module to switch to the fifth polarization detection state and controls the second polarization detection module to switch to the sixth polarization detection state; the fifth polarization detection state and the sixth polarization detection state are used to jointly detect the polarization state of the near-ultraviolet fluorescence; The control unit controls the first filter module to switch to a third filter state; the third filter state is used to allow only the near-ultraviolet fluorescence to pass through. The control unit controls the first measurement component to measure the near-ultraviolet fluorescence and generate the third detection information.

11. The laser detection device as described in claim 10, characterized in that, The first filter module includes a plurality of first filters and a first switching mechanism; When the control unit controls the first switching mechanism to switch one of the plurality of first filters into the first optical path, a first filtering state or a third filtering state is formed.

12. The laser detection device as described in claim 10, characterized in that, The first polarization detection module includes a first polarizer, a first window, and a second switching mechanism; the second polarization detection module includes a second polarizer, a second window, and a third switching mechanism. When the control unit controls the second switching mechanism to switch one of the first polarizer and the first window to the first optical path, the fifth polarization detection state is formed. When the control unit controls the third switching mechanism to switch one of the second polarizer and the second window to the first optical path, the sixth polarization detection state is formed. The polarization state formed by the fifth polarization state and the sixth polarization state may or may not correspond to the first polarization starting module in the first optical path unit switching to the first polarization starting state.

13. The laser detection device as described in claim 1, characterized in that, The third detection unit includes a third detection channel assembly and a third measurement assembly; The third detection channel assembly is used to receive and modulate the visible fluorescence, and the third detection channel assembly has a third optical path for the transmission of the visible fluorescence; The third measurement component is used to measure the conditioned visible fluorescence; The third detection channel assembly includes a third filter module, which includes a third filter located on the third optical path; In the fluorescence detection mode, the control unit controls the third detection unit to measure the visible fluorescence and form fourth detection information, including: The visible fluorescence is filtered into a fourth filter state after passing through the third filter module; the fourth filter state is used to allow only the visible fluorescence to pass through. The control unit controls the third measurement component to measure the visible fluorescence and generate the fourth detection information.

14. The laser detection device as described in claim 1, characterized in that, The first detection information and the second detection information, and / or the third detection information and the fourth detection information are used to analyze and obtain the surface feature information of the object to be detected. The surface feature information includes one or more of the following: particle distribution state, band gap distribution state, and lattice composition state.

Images