Interdigital electrode vacuum coating device

Abstract

This invention discloses a vacuum coating apparatus for interdigital electrodes, comprising an upper clamp and a lower clamp connected in a detachable manner, and a positioning plate clamping between the upper and lower clamps. A PLZT ceramic sheet is embedded in the inner side of the positioning plate, and a positioning protrusion is provided on the inner ring of the positioning plate. The positioning protrusion contacts and engages with the outer circle of the PLZT ceramic sheet. The upper and lower clamps are provided with mutually spaced coating holes. The coating holes form a left electrode and a right electrode on the front and rear surfaces of the PLZT ceramic sheet, respectively. A side electrode is formed on the outer circle of the PLZT ceramic sheet. The left electrode or the right electrode on the front and rear surfaces of the PLZT ceramic sheet is electrically connected through the side electrode. The partition between the coating holes forms a non-coated portion on the surface of the PLZT ceramic sheet, which disconnects the left and right electrodes. Through the above method, the vacuum coating apparatus for interdigital electrodes of this invention is simple to clamp, easy to coat, has good repeatability, high quality and efficiency, and solves the requirement of back-conductivity for interdigital electrodes.

Description

Technical Field

[0001] This invention relates to the field of electrical engineering, and in particular to a vacuum coating apparatus for interdigital electrodes. Background Technology

[0002] Nuclear flash goggles (hereinafter referred to as goggles) are designed to protect the eyes of observers from nuclear flash damage and prevent flash blindness and retinal burns during a nuclear explosion, when a nuclear flash occurs and a high-intensity fireball is present.

[0003] In the nuclear flash goggles with automatic switching disclosed in patent CN202120844401.0, the PLZT ceramic electrode sheet changes its light transmission state through an electro-induced phase transition depending on the applied voltage. According to requirements, the PLZT ceramic sheet of the goggles needs to have two interdigitated metal electrodes on the left and right sides that are respectively conductive, and the patterns on the front and back sides of the electrodes must be completely identical, with the front and back also being conductive. Conventional fixture coating methods cannot meet these requirements. Summary of the Invention

[0004] The main technical problem solved by this invention is to provide a vacuum coating device for interdigital electrodes, which is simple to clamp, easy to coat, has good repeatability, high quality and high efficiency, and solves the requirement of interdigital electrode conductivity.

[0005] To solve the above-mentioned technical problems, the present invention provides a vacuum coating device for interdigitated electrodes, comprising an upper clamp and a lower clamp connected by a detachable mechanism, and a positioning piece clamping between the upper clamp and the lower clamp. A PLZT ceramic sheet is embedded in the inner side of the positioning piece. A positioning protrusion is provided on the inner ring of the positioning piece, and the positioning protrusion contacts and engages with the outer circle of the PLZT ceramic sheet. The upper clamp and the lower clamp are provided with mutually spaced coating holes. The coating holes form a left electrode and a right electrode on the front and rear surfaces of the PLZT ceramic sheet. A side electrode is formed on the outer circle of the PLZT ceramic sheet. The left electrode or the right electrode on the front and rear surfaces of the PLZT ceramic sheet is connected through the side electrode. The partition between the coating holes forms a non-coating portion on the surface of the PLZT ceramic sheet, which disconnects the left electrode and the right electrode.

[0006] In a preferred embodiment of the present invention, an interdigitated electrode portion is provided between the coating holes, and the interdigitated electrode portion has interdigitated electrode holes, which form interdigitated electrodes on the surface of the PLZT ceramic sheet.

[0007] In a preferred embodiment of the present invention, the interdigital electrode has electrode strips that are respectively connected to the left electrode and the right electrode.

[0008] In a preferred embodiment of the present invention, there is a gap between the coating hole and the PLZT ceramic sheet, and the interdigitated electrode portion presses against the surface of the PLZT ceramic sheet.

[0009] In a preferred embodiment of the present invention, the number of coating holes is two, and they are arranged symmetrically.

[0010] In a preferred embodiment of the present invention, the coating hole is an arc-shaped hole.

[0011] In a preferred embodiment of the present invention, the positioning protrusions are evenly distributed along the inner circle of the positioning piece, and there is a gap between the outer circle of the PLZT ceramic sheet and the inner circle of the positioning piece, thereby forming a side electrode on the outer circle of the PLZT ceramic sheet by coating.

[0012] In a preferred embodiment of the present invention, the upper clamp, the lower clamp, and the positioning plate are provided with two clamping holes on the left and right sides, and bolts are connected to the clamping holes. The bolts are connected to nuts to fix the upper clamp, the lower clamp, and the positioning plate.

[0013] In a preferred embodiment of the present invention, the two clamping holes may have the same or different diameters.

[0014] The beneficial effects of the present invention are: the interdigitated electrode vacuum coating device of the present invention fixes the PLZT ceramic sheet by means of an upper clamp, a lower clamp and a positioning plate, and there is no need to loosen the clamp during coating. The entire clamp can be coated on both sides, simplifying the coating process.

[0015] The present invention relates to a vacuum coating apparatus for interdigital electrodes. By utilizing the swirling coating characteristics during vacuum coating, semi-circular patterned metal film layers are deposited on the edges of the left and right electrodes respectively, which are connected to the interdigital lines. Furthermore, metal film layers are also deposited on the left and right side edges of the ceramic sheet, thus solving the requirements of separate conduction for the left and right interdigital electrodes and front and back conduction. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort, wherein:

[0017] Figure 1 This is a schematic diagram of a preferred embodiment of the interdigitated electrode vacuum coating apparatus of the present invention;

[0018] Figure 2 This is a schematic diagram of the upper clamp;

[0019] Figure 3 yes Figure 2 Sectional view along axis AA;

[0020] Figure 4This is a schematic diagram of the positioning plate;

[0021] Figure 5 This is a schematic diagram of the structure of the coated PLZT ceramic sheet;

[0022] The components in the attached diagram are labeled as follows: 1. Upper clamp, 11. Coating hole, 12. Partition, 13. Interdigitated electrode, 14. Clamping hole, 2. Lower clamp, 3. Positioning piece, 31. Positioning protrusion, 4. PLZT ceramic sheet, 41. Left electrode, 42. Right electrode, 43. Interdigitated electrode, 44. Non-coated part, 5. Bolt, 6. Nut. Detailed Implementation

[0023] The technical solutions in the embodiments of the present invention will be clearly and completely described below. The structures, proportions, sizes, etc., illustrated in the accompanying drawings are only for illustrative purposes to aid those skilled in the art and are not intended to limit the implementation conditions of the present invention. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in proportions, or adjustments to size, without affecting the effects and objectives of the present invention, should still fall within the scope of the technical content disclosed in the present invention. Furthermore, terms such as "upper," "lower," "left," "right," and "middle" used in this specification are merely for clarity of description and are not intended to limit the scope of implementation. Changes or adjustments to their relative relationships, without substantially altering the technical content, should also be considered within the scope of the present invention.

[0024] Please see Figure 1 A vacuum coating apparatus for interdigitated electrodes includes an upper clamp 1 and a lower clamp 2 connected in a detachable manner, and a positioning piece 3 clamping between the upper clamp 1 and the lower clamp 2. A PLZT ceramic sheet 4 is embedded inside the positioning piece 3. The upper clamp 1, the lower clamp 2, and the positioning piece 3 have two clamping holes 14, one on the left and one on the right. Bolts 5 are connected to the clamping holes 14, and the bolts 5 are connected to nuts 6 to fix the upper clamp 1, the lower clamp 2, and the positioning piece 3. The upper clamp 1, the lower clamp 2, and the positioning piece 3 can be assembled and disassembled using bolts 5 and nuts 6, resulting in a simple structure. The two clamping holes 14 can have the same or different diameters. To ensure alignment of the upper clamp 1 and the lower clamp 2, using clamping holes 14 with different diameters can avoid installation errors and has a foolproof function.

[0025] To ensure complete consistency of the pattern, the upper fixture 1 and lower fixture 2 are processed using wire cutting in pairs. During coating, the metal film material vaporizes and is deposited starting from the bottom. After coating one side, there is no need to loosen the fixture; the entire fixture is flipped over to coat the second side.

[0026] like Figure 2 and Figure 3As shown, the upper clamp 1 and lower clamp 2 are provided with mutually spaced coating holes 11. The coating holes 11 are arc-shaped holes and are not completely hollow structures. They have spaced support baffles inside, which ensure the strength of the clamps. There are two coating holes 11, which are symmetrically arranged. The coating holes 11 form a left electrode 41 and a right electrode 42 on the front and rear surfaces of the PLZT ceramic sheet 4. There is a gap between the coating holes 11 and the PLZT ceramic sheet 4, and the interdigitated electrode portion 13 presses against the surface of the PLZT ceramic sheet 4.

[0027] The inner ring of the positioning piece 3 has positioning protrusions 31, which contact and engage with the outer circle of the PLZT ceramic sheet 4. The positioning protrusions 31 are evenly distributed along the inner ring of the positioning piece 3, creating a gap between the outer circle of the PLZT ceramic sheet 4 and the inner ring of the positioning piece 3. This gap allows for the formation of side electrodes on the outer circle of the PLZT ceramic sheet through coating. The left electrode 41 or right electrode 42 on the front and rear surfaces of the PLZT ceramic sheet 4 are connected via these side electrodes. Because the positioning protrusions 31 are used to precisely fix the PLZT ceramic sheet 4, the remaining portion of the PLZT ceramic sheet 4 is exposed and does not contact the positioning piece 3. This ensures that the sides of the PLZT ceramic sheet 4 are also coated during the coating process.

[0028] like Figure 4 After the positioning piece 3 is clamped, a suspended part is created between the PLZT ceramic sheet 4 and the upper clamp 1 and the lower clamp 2. Utilizing the wrap-around coating characteristics during coating, the sheet bypasses the clamps and two semi-circular left electrodes 41 and right electrodes 42 are coated. The side part is also coated with a metal film layer. The surface of the PLZT ceramic sheet 4 achieves conductivity at the left electrode 41 and right electrode 42.

[0029] like Figure 5The partition 12 between the coating holes 11 forms a non-coating portion 44 on the surface of the PLZT ceramic sheet 4, which disconnects the left electrode 41 and the right electrode 42. An interdigitated electrode portion 13 is provided between the coating holes 11, and the interdigitated electrode portion 13 has interdigitated electrode holes, which form interdigitated electrodes 43 on the surface of the PLZT ceramic sheet 4. The interdigitated electrodes 43 have electrode strips that are respectively connected to the left electrode 41 and the right electrode 42. The non-coating portion 44 and the positioning protrusion 31 block the left electrode 41 and the right electrode 42 of the PLZT ceramic sheet 4, making them non-conductive. Meanwhile, since the interdigitated electrode section 13 consists of evenly spaced interdigitated electrode lines with a width of 0.1 mm, and the lines are independent and connected to the left and right coating holes 11 respectively, interdigitated electrodes 43 will be formed on the surface of the PLZT ceramic sheet 4 after coating. The width of the electrode lines is 0.10 mm, and the spacing between the electrode lines is 1.32 mm. The electrode lines are divided into two groups, one group is connected to the left electrode 41, and the other group is connected to the right electrode 42. The two groups of lines are distributed alternately.

[0030] Using a high-precision special fixture, the winding coating characteristics during vacuum coating are utilized to deposit semi-circular patterned metal film layers on the edges of the left and right interdigital electrodes, connecting them to the interdigital lines. Furthermore, metal film layers are also deposited on the left and right side edges of the ceramic sheet, thus solving the requirements of separate conduction for the left and right interdigital electrodes and front and back conduction.

[0031] Unlike existing technologies, the interdigital electrode vacuum coating device of this invention is simple to clamp, easy to coat, has good repeatability, and is of high quality and efficiency, thus solving the requirement of post-conduction of interdigital electrodes.

[0032] The present invention and its embodiments have been described above illustratively. This description is not restrictive, and the figures shown are only one embodiment of the present invention; the actual structure is not limited thereto. Therefore, if those skilled in the art are inspired by this description and design similar structures and embodiments without departing from the spirit of the present invention, such designs should fall within the protection scope of the present invention.

Claims

1. An interdigital electrode vacuum plating device, characterized by comprising: a substrate; a first electrode; a second electrode; a first dielectric layer; a second dielectric layer; and a third dielectric layer. The device includes a detachable upper clamp and a lower clamp, and a positioning piece clamping between the upper and lower clamps. A PLZT ceramic sheet is embedded inside the positioning piece. The inner ring of the positioning piece has a positioning protrusion that contacts and engages with the outer circumference of the PLZT ceramic sheet. The upper and lower clamps have mutually spaced coating holes. These coating holes form left and right electrodes on the front and rear surfaces of the PLZT ceramic sheet. A side electrode is formed on the outer circumference of the PLZT ceramic sheet. The left electrode on the front and rear surfaces of the PLZT ceramic sheet... The left and right electrodes are connected by a side electrode. The partition between the coating holes forms a non-coated part on the surface of the PLZT ceramic sheet. The non-coated part disconnects the left and right electrodes. An interdigitated electrode part is provided between the coating holes. The interdigitated electrode part has an interdigitated electrode hole. The interdigitated electrode hole forms an interdigitated electrode on the surface of the PLZT ceramic sheet. The interdigitated electrode has an electrode strip that is connected to the left and right electrodes respectively. There is a gap between the coating hole and the PLZT ceramic sheet. The interdigitated electrode part presses against the surface of the PLZT ceramic sheet.

2. The vacuum coating apparatus for interdigitated electrodes according to claim 1, characterized in that, The number of coating holes is two, and they are arranged symmetrically.

3. The vacuum coating apparatus for interdigitated electrodes according to claim 2, characterized in that, The coating hole is an arc-shaped hole.

4. The vacuum coating apparatus for interdigitated electrodes according to claim 1, characterized in that, The positioning protrusions are evenly distributed along the inner circle of the positioning piece, and there is a gap between the outer circle of the PLZT ceramic sheet and the inner circle of the positioning piece, thereby forming a side electrode on the outer circle of the PLZT ceramic sheet by coating.

5. The vacuum coating apparatus for interdigitated electrodes according to claim 1, characterized in that, The upper clamp, lower clamp, and positioning plate are provided with two clamping holes on the left and right sides. Bolts are connected to the clamping holes, and the bolts are connected to nuts to fix the upper clamp, lower clamp, and positioning plate.

6. The vacuum coating apparatus for interdigitated electrodes according to claim 5, characterized in that, The two clamping holes may have the same or different diameters.

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