Horizontal articulated robot

By replacing gear transmission with a linkage structure in a horizontal multi-joint robot, and designing linkage components of specific lengths and angles, the problems of linear motion and accuracy of the manipulator when the arm length is different are solved, and linear motion and high-precision delivery are achieved when the length is different.

CN117415799BActive Publication Date: 2026-05-15高术特科技有限公司
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
高术特科技有限公司
Filing Date
2023-07-17
Publication Date
2026-05-15

AI Technical Summary

Technical Problem

In existing horizontal multi-joint robots, the manipulators cannot perform linear motion when the lengths of the first and second parallelogram arms are different, and gear drives cause accuracy problems.

Method used

A linkage structure is used instead of gear transmission. The first and second arm linkages are connected by linkage components designed with specific lengths and angles, so that the operating component can achieve linear motion when the length of the second arm linkage is less than the length of the first arm linkage.

Benefits of technology

This invention enables the control component to perform linear motion even when the length of the second parallelogram arm is less than the length of the first parallelogram arm, and solves the accuracy problem caused by gear drive.

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Abstract

The present application relates to a horizontal multi-joint robot, in the case where the lengths of links of a first arm link section and a second arm link section are different, one side of the second arm link section is made to move linearly by rotation of the first arm link section. The above horizontal multi-joint robot includes the first arm link section, the second arm link section, and a transmission link section, the first arm link section includes a 1-1 arm link section member, a 1-2 arm link section member, a 1-3 arm link section member, and a common link section member, the second arm link section includes a 2-1 arm link section member, a 2-2 arm link section member, and a 2-3 arm link section member, and the transmission link section includes a first transmission link section member, a second transmission link section member, a third transmission link section member, and a fourth transmission link section member.
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Description

Technical Field

[0001] The present invention relates to a horizontal multi-joint robot, and more specifically, to a horizontal multi-joint robot in which, when the link lengths of the first arm link and the second arm link are different, one side of the second arm link can be made to move linearly by rotating the first arm link. Background Technology

[0002] When semiconductor manufacturing equipment transports substrates such as wafers, horizontal articulated transport robots are typically used. In a horizontal articulated robot, multiple arms are connected to the main body in multiple stages, and the substrate is mounted on a manipulator (fork, etc.) located at its front end. As a structure that can rotate independently of each other, the substrate can be transported to the desired position by rotating these multiple arms and manipulators.

[0003] Reference Figure 1a Existing horizontal multi-joint robots are parallel trapezoidal link conveyor robots, consisting of a first parallelogram arm and a second parallelogram arm. When the first parallelogram arm rotates, it needs to drive the transmission towards the second parallelogram arm; existing drive transmission methods use gears or conveyor belts. Figure 1a In the existing embodiment shown, the first parallelogram arm 10 and the second parallelogram arm 20 are connected by a gearbox 30, and an operating member 40 is connected to the second parallelogram arm 20. In the gearbox 30, the gear teeth z1 of the gear connected to the first parallelogram arm are the same as or larger than the gear teeth z2 of the gear connected to the second parallelogram arm. Moreover, the length a of the first parallelogram arm 10 is the same as the length b of the second parallelogram arm 20. When the first parallelogram arm 10 rotates, the second parallelogram arm 20 can perform linear motion.

[0004] On the other hand, refer to Figure 1b and Figure 1c The existing four-arm robot consists of upper left and right arms 10a and lower left and right arms 10b. In this case, when the lower arms move forward and backward, a gap should be left between the upper arm axis 2 and the lower arm axis 4 to avoid touching the upper arm axis 2. This is because, due to the increase in the size of the overall rotation axis of the arm and the increase in the number of motor axes 5, the entire drive unit becomes larger and differences in arm length occur, resulting in increased weight and adverse effects on competitiveness.

[0005] To compensate for this problem, when the lower arm moves forward or backward, the length of the second parallelogram arm was previously reduced to prevent collision with the central axis of the upper arm. For example... Figure 1d As shown, the length b of the second parallelogram arm 20 is less than the length a of the first parallelogram arm 10. Furthermore, as... Figure 1e and Figure 1f As shown, the improved four-arm robot structure compared to the prior art solves the above problems by connecting the upper left and right arms 10a and the lower left and right arms 10b to a common axis 3.

[0006] However, as Figure 1d As shown, when the length of the second parallelogram arm 20 is less than the length of the first parallelogram arm 10, if the first parallelogram arm 10 rotates, the operating component 40 will move in a curved path, thus failing to achieve accurate conveying. Furthermore, the first parallelogram arm 10 and the second parallelogram arm 20 transmit power through gears; therefore, even with the gear tooth clearance minimized, wear-induced backlash can still cause wobbling during long-term use, resulting in accuracy issues.

[0007] Existing technical documents

[0008] Patent documents

[0009] Korean Patent No. 10-1622421 Summary of the Invention

[0010] Technical issues

[0011] To address the problems of the prior art, the present invention aims to disclose a horizontal multi-joint robot in which, during the transmission process of the first parallelogram arm and the second parallelogram arm, a linkage structure is used instead of existing gears to achieve connection, so that even when the length of the second parallelogram arm is less than the length of the first parallelogram arm, the manipulator can still perform linear motion.

[0012] Problem-solving methods

[0013] A horizontal multi-joint robot according to an embodiment of the present invention is characterized by comprising a first arm linkage, a second arm linkage, and a transmission linkage. The first arm linkage includes: a first-1st arm linkage component with a rotation axis A and a link axis C formed on both sides; a first-2nd arm linkage component having the same length as the first-1st arm linkage component and link axes B and D formed on both sides; a first-3rd arm linkage component rotatably connected to the rotation axis A and the link axis B; and a common linkage component rotatably connected to the link axis C and the link axis D on both sides. The second arm linkage includes: a second-1st arm linkage component having a shorter length than the first-1st arm linkage component, with a link axis E formed on one side and the other side connected to the link axis C; a second-2nd arm linkage component having the same length as the second-1st arm linkage component, with a link axis F formed on one side and the other side connected to the link axis C. The aforementioned connecting rod shaft D is connected; the second-third arm connecting rod component is rotatably connected to the aforementioned connecting rod shaft E and the aforementioned connecting rod shaft F on both sides. The aforementioned transmission connecting rod includes: a first transmission connecting rod component, one side of which is connected to the aforementioned connecting rod shaft D, and a connecting rod shaft I is formed on the other side passing through the aforementioned first-first arm connecting rod component; a second transmission connecting rod component, one side of which is connected to the connecting rod shaft J formed in the aforementioned second-first arm connecting rod component, and the other side of which is connected to the aforementioned connecting rod shaft I; a third transmission connecting rod component, one side of which is formed to the connecting rod shaft G extending from the aforementioned connecting rod shaft C; and a fourth transmission connecting rod component, one side of which is connected to the connecting rod shaft H formed in the aforementioned first transmission connecting rod component, and the other side of which is connected to the aforementioned connecting rod shaft G. When the aforementioned first arm connecting rod rotates around the aforementioned rotation axis A, the aforementioned second arm connecting rod rotates with the transmission connecting rod, and the operating component connected to the aforementioned second arm connecting rod performs linear motion along the first direction.

[0014] Preferably, when the first arm link rotates back and forth between a first state in which it rotates in the forward direction in a vertical state and a second state in which it rotates in the backward direction, if the angle A1 between the length direction line of the first-1 arm link component and the length direction line of the first-3 arm link component is compared with the angle A2 between the length direction line of the common link component surrounding the link axis C and the length direction line of the second-1 arm link component, then in the first state, angle A1 is greater than angle A2, and in the second state, angle A1 is less than angle A2.

[0015] Furthermore, preferably, the present invention is characterized in that the lengths of the sides of the connecting rod shafts C and D of the aforementioned common connecting rod component are the same as the lengths of the sides of the connecting rod shafts I and J of the aforementioned second transmission connecting rod component.

[0016] Furthermore, preferably, the present invention is characterized in that the lengths of the sides of the connecting rod shaft C and the connecting rod shaft J of the second-first arm connecting rod component are the same as the lengths of the sides of the connecting rod shaft D and the connecting rod shaft I of the first transmission connecting rod component.

[0017] Furthermore, preferably, the present invention is characterized in that the length of the side of the connecting rod shaft C and the connecting rod shaft J of the second-first arm connecting rod component is twice the length of the side of the connecting rod shaft C and the connecting rod shaft D of the common connecting rod component.

[0018] Furthermore, preferably, the present invention is characterized in that the length of the side connecting the connecting rod shaft C and the connecting rod shaft G of the third transmission connecting rod component is greater than the length of the side connecting the connecting rod shaft D and the connecting rod shaft H of the first transmission connecting rod component.

[0019] Furthermore, preferably, the present invention is characterized in that the lengths of the sides of the connecting rod shafts G and H of the fourth transmission link component are greater than the lengths of the sides of the connecting rod shafts C and D of the common link component.

[0020] Furthermore, preferably, the present invention is characterized in that the length of the side of the connecting rod shaft C and the connecting rod shaft D of the above-mentioned common connecting rod component is twice the length of the side of the connecting rod shaft D and the connecting rod shaft H of the above-mentioned first transmission connecting rod component.

[0021] Furthermore, preferably, in the vertical state where the first arm link is perpendicular to the first direction, the length d' of the fourth transmission link member for performing the linear motion, connecting the link shaft G and the link shaft H, is calculated by the following mathematical formula 1:

[0022] Mathematical Formula 1

[0023]

[0024] Wherein, c represents the length of the connecting rod shaft H and the connecting rod shaft D of the first transmission link component, q represents the length of the connecting rod shaft G and the connecting rod shaft H, C' represents the angle between the length direction line of the common link component around the connecting rod shaft D and the length direction line of q, and N' represents the angle between the length direction line of the common link component around the connecting rod shaft D and the length direction line of the first transmission link component.

[0025] Furthermore, preferably, the length of q is calculated using the following mathematical formula 2:

[0026] Mathematical formula 2

[0027]

[0028] Wherein, c' represents the length of the connecting rod shaft C and connecting rod shaft G of the third transmission link component, and d represents the length of the connecting rod shaft I and connecting rod shaft J of the second transmission link component.

[0029] Furthermore, preferably, the angle C' mentioned above is calculated by the following mathematical formula 3:

[0030] Mathematical Formula 3

[0031]

[0032] Furthermore, preferably, the angle of N' is calculated by the following mathematical formula 4:

[0033] Mathematical expression 4

[0034]

[0035] Wherein, D' represents the angle between the length direction line of the common link component surrounding the link shaft D and the line connecting the link shaft D and the link shaft J.

[0036] Furthermore, preferably, the angle of D' is calculated by the following mathematical formula 5:

[0037] Mathematical formula 5

[0038]

[0039] Where e represents the length of the connecting rod shaft D and the connecting rod shaft I of the first transmission connecting rod component mentioned above.

[0040] Furthermore, preferably, the length of e is twice the length of d.

[0041] Furthermore, preferably, the reference line for the connecting rotation axis A and the connecting rod axis B of the first-to-third arm linkage is set along the first direction. When the first arm linkage changes from the vertical state to the first state due to rotation around the rotation axis A, the displacement Y of the operating member relative to the reference line in the second direction perpendicular to the first direction is calculated by the following mathematical formula 6:

[0042] Mathematical formula 6

[0043] Y=a×sinA′-b×sin(E′-M′-R′)

[0044] Wherein, a represents the length of the connecting rod shaft A and connecting rod shaft C of the first-1 arm link component in the first state; A' represents the angle between the length direction line of the first-1 arm link component around the rotation axis A and the length direction line of the first-3 arm link component; b represents the length of the connecting rod shaft C and connecting rod shaft E of the second-1 arm link component in the vertical state; E' represents the angle between the length direction line of the common link component around the connecting rod shaft C and the line connecting the connecting rod shaft C and the connecting rod shaft I in the first state; M' represents the angle between the line connecting the connecting rod shaft C and the connecting rod shaft I around the connecting rod shaft C and the line connecting the connecting rod shaft C and the connecting rod shaft J of the second-1 arm link component in the first state; and R' represents the angle between the line connecting the connecting rod shaft C and the connecting rod shaft J of the second-1 arm link component around the connecting rod shaft C and the line connecting the connecting rod shaft C and the connecting rod shaft E in the second state.

[0045] Furthermore, preferably, the angle E' mentioned above is calculated by the following mathematical formula 7:

[0046] Mathematical Formula 7

[0047]

[0048] Wherein, d represents the length of the connecting rod shaft I and connecting rod shaft J of the second transmission link component in the above vertical state, i represents the length of the connecting rod shaft C and connecting rod shaft I in the above first state, and e represents the length of the connecting rod shaft C and connecting rod shaft J of the second-first arm link component in the above vertical state.

[0049] Furthermore, preferably, the angle of M' is calculated by the following mathematical formula 8:

[0050] Mathematical formula 8

[0051]

[0052] Furthermore, preferably, the length of i is calculated by the following mathematical formula 9:

[0053] Mathematical formula 9

[0054]

[0055] Wherein, L' represents the angle between the line connecting the link shaft G and the link shaft D around the link shaft D in the second state and the length direction line of the first transmission link component, and J' represents the angle between the line connecting the link shaft G and the link shaft D around the link shaft D in the first state and the length direction line of the common link component.

[0056] Furthermore, preferably, the angle of L' is calculated by the following mathematical formula 10:

[0057] Mathematical formula 10

[0058]

[0059] Wherein, c represents the length of the connecting rod shaft H and connecting rod shaft D of the first transmission connecting rod component in the above vertical state, and h represents the length of the connecting rod shaft G and connecting rod shaft H in the above first state.

[0060] Furthermore, preferably, the angle of J' is calculated by the following mathematical formula 11:

[0061] Mathematical formula 11

[0062]

[0063] Where c' represents the length of the connecting rod shaft C and the connecting rod shaft G of the third transmission link component mentioned above.

[0064] Furthermore, preferably, the length of h is calculated by the following mathematical formula 12:

[0065] Mathematical expression 12

[0066]

[0067] Wherein, H' represents the angle between the length direction line of the third transmission link component and the length direction line of the common link component in the first state described above.

[0068] Furthermore, preferably, the angle of H' is calculated by the following mathematical formula 13:

[0069] Mathematical formula 13

[0070] H′=π-A′.

[0071] Furthermore, preferably, the present invention is characterized in that the connecting rod shaft J is spaced at a predetermined distance from the center of the width direction of the connecting rod component of the second-first arm.

[0072] Furthermore, preferably, the present invention is characterized in that the magnitude of the change of the operating component toward the second direction perpendicular to the first direction varies with the angle between the line connecting the link shaft C and the link shaft J and the line connecting the link shaft C and the link shaft E.

[0073] Furthermore, preferably, the present invention is characterized in that the range of change of the aforementioned operating member toward the second direction perpendicular to the aforementioned first direction varies with the length of the aforementioned third transmission link member.

[0074] Invention Effects

[0075] The present invention has the following effect: even when the length of the second parallelogram arm is less than the length of the first parallelogram arm, the operating component can still perform linear motion.

[0076] Furthermore, the present invention can enable the operating component to perform optimal linear motion by setting the length or angle of the transmission link.

[0077] Furthermore, in this invention, the transmission between the first parallelogram arm and the second parallelogram arm is achieved by a linkage structure, thus solving the accuracy problem caused by conventional gear or conveyor belt drives. Attached Figure Description

[0078] Figures 1a to 1f A diagram illustrating an existing horizontal multi-jointed robot.

[0079] Figure 2 A diagram is provided to briefly illustrate the structure of the horizontal multi-joint robot of the present invention.

[0080] Figure 3 The diagram illustrates several embodiments of the formation position of the link axis J of the horizontal multi-joint robot of the present invention.

[0081] Figure 4 This diagram illustrates the relationship between the lengths and angles of the linkage components that enable the manipulation component to perform linear motion along a first direction in a vertical state in the horizontal multi-joint robot of the present invention.

[0082] Figure 5 This diagram illustrates the relationship between the lengths and angles of the linkage components that enable the manipulation components to move linearly along a first direction when the horizontal multi-joint robot of the present invention is rotated from a vertical state to a second state and a first state.

[0083] Figures 6 to 9 A graph showing the displacement of the manipulation component toward the second direction as the length of the third transmission link component and R' vary when the arm link of the horizontal multi-joint robot of the present invention rotates around the rotation axis A by a predetermined angle.

[0084] Figure 10 A diagram is provided to briefly illustrate a horizontal multi-joint robot according to an embodiment of the present invention.

[0085] Figure 11 A diagram is provided to briefly illustrate another embodiment of the horizontal multi-joint robot of the present invention.

[0086] (Explanation of reference numerals in the attached diagram)

[0087] 100: First arm connecting rod section; 110: First-1st arm connecting rod assembly

[0088] 120: Linkage assembly of arm 1-2 130: Linkage assembly of arm 1-3

[0089] 140: Common connecting rod component; 200: Second arm connecting rod section

[0090] 210: 2-1 Arm Linkage Component 220: 2-2 Arm Linkage Component

[0091] 230: 2nd-3rd arm connecting rod assembly; 300: Transmission connecting rod section

[0092] 310: First transmission link assembly; 320: Second transmission link assembly

[0093] 330: Third transmission link assembly; 340: Fourth transmission link assembly

[0094] 400: Control Components Detailed Implementation

[0095] The preferred embodiments of the horizontal multi-joint robot of the present invention will now be described in detail with reference to the accompanying drawings. The same reference numerals are used for the same structural elements, and detailed descriptions of well-known functions and structures that may unnecessarily obscure the spirit of the invention will be omitted. The embodiments of the present invention are provided merely to provide a more complete explanation of the invention to those skilled in the art. Therefore, to ensure a clearer explanation, the shapes and dimensions of the structures shown in the drawings may be enlarged.

[0096] Figure 2 A diagram illustrating the structure of the horizontal multi-joint robot of the present invention is provided. Figure 3 The figures illustrate several embodiments of the formation position of the link axis J in the horizontal multi-joint robot of the present invention. Figure 4 This diagram illustrates the relationship between the lengths and angles of the linkage components in the horizontal multi-joint robot of the present invention, which enables the manipulation component to perform linear motion along a first direction in a vertical state during the first state. Figure 5 This diagram illustrates the relationship between the lengths and angles of the linkage components that enable the manipulation components to move linearly along a first direction when the horizontal multi-joint robot of the present invention is rotated from a vertical state to a second state and a first state.

[0097] The horizontal multi-joint robot of the present invention includes a first arm link 100, a second arm link 200, and a transmission link 300 (see reference). Figure 10 and Figure 11 ).

[0098] On the other hand, such as Figures 2 to 5As shown, a Cartesian coordinate system is used to illustrate the structure of the horizontal multi-joint robot of the present invention, with the rotation axis A set as the origin in the xy coordinate plane. In this specification, the x-axis direction is described as the first direction, and the y-axis direction can be described as the second direction.

[0099] The first arm linkage 100 includes a first-1st arm linkage component 110, a first-2nd arm linkage component 120, a first-3rd arm linkage component 130, and a common linkage component 140. The linkage components 110, 120, 130, and 140 are interconnected to form a parallelogram.

[0100] The first-1 arm linkage component 110 has a rotating shaft A on one side and a connecting shaft C on the other side. The rotating shaft A can be a fixed shaft connected to a motor. Therefore, the first-1 arm linkage component 110 can rotate around the rotating shaft A by the drive of the motor.

[0101] The first-second arm link component 120 has the same length as the first-first arm link component 110, with a link shaft B formed on one side and a link shaft D formed on the other side. Link shaft B and link shaft D are respectively spaced a predetermined distance from the rotation axis A and link shaft C along the x-axis direction.

[0102] One side of the first-third arm link member 130 is rotatably connected to the rotation axis A, and the other side is rotatably connected to the link axis B. The first-third arm link member 130 can be configured to be fixed along the x-axis. Therefore, even if the first-first arm link member 110 rotates, one side of the first-second arm link member 120 (the link axis B portion) cannot rotate.

[0103] The common link component 140 has the same length as the first-third arm link component 130, and is rotatably connected to the link shaft C on one side and rotatably connected to the link shaft D on the other side.

[0104] The second arm link 200 includes a second-first arm link component 210, a second-second arm link component 220, a second-third arm link component 230, and a common link component 140. The link components 210, 220, 230, and 140 are interconnected to form a parallelogram.

[0105] The second-first arm link component 210 has a shorter length than the first-first arm link component 110, and a link shaft C is formed on one side, with the other side rotatably connected to the link shaft C. The link shaft C is located between the rotation axis A (or link shaft B) and the link shaft C (or link shaft D).

[0106] The second-2nd arm link component 220 has the same length as the second-1st arm link component 210, with a link shaft F formed on one side and a link shaft D rotatably connected to the other side. The link shaft F is located between the rotation axis A (or link shaft B) and the link shaft C (or link shaft D).

[0107] The second-to-third arm linkage 230 has the same length as the first-to-third arm linkage 130, and is rotatably connected to the linkage shaft C on one side and to the linkage shaft F on the other side. The actuating member 400 is connected to the second-to-third arm linkage 230 along its length. The actuating member 400 can be used to handle workpieces, for example, for conveying semiconductor wafers.

[0108] The common link component 140 is a common component of the first arm link portion 100 and the second arm link portion 200, and its connection structure is as described above.

[0109] The transmission link 300 is used to transmit the rotation of the first arm link 100 to the second arm link 200, and includes a first transmission link component 310, a second transmission link component 320, a third transmission link component 330 and a fourth transmission link component 340.

[0110] One side of the first transmission link component 210 is rotatably connected to the link shaft D, and the other side has a link shaft I formed thereon. Figures 2 to 4 As shown, the first transmission link component 310 passes through the first-1 arm link component 110, so that the link shaft I is located outside the first-1 arm link component 110.

[0111] One side of the second transmission link member 320 is rotatably connected to the link shaft J formed in the second-first arm link member 210, and the other side is rotatably connected to the link shaft I of the first transmission link member 310. With the length direction of the second-first arm link member 210 as a reference, the link shaft J is located on the side closer to the link shaft C.

[0112] On the other hand, in this invention, with the width direction of the second-first arm connecting rod component 210 as a reference, the connecting rod shaft J can be located on one side, the opposite side, or the center. Figure 3 Part (a) shows an embodiment in which the connecting rod shaft J is formed close to the connecting rod shaft I with the center of the second-first arm connecting rod component 210 in the width direction as a reference. Figure 3 Part (b) shows an embodiment in which the connecting rod shaft J is formed away from the connecting rod shaft I with reference to the center of the width direction of the second-first arm connecting rod component 210.

[0113] The third transmission link member 330 extends from the link shaft C along the length direction of the first-first arm link member 110, and a link shaft G is formed on one side. The third transmission link member 330 can rotate together with the first-first arm link member 110.

[0114] One side of the fourth transmission link member 340 is rotatably connected to the link shaft H formed in the first transmission link member 310, and the other side is rotatably connected to the link shaft G of the third transmission link member 330. With the center of the first transmission link member 310 along its length as a reference, the link shaft H is located on the side closer to the link shaft D.

[0115] on the other hand, Figure 2 The vertical state and the first state of the horizontal multi-joint robot of the present invention are shown.

[0116] The vertical state refers to a state in the xy-coordinate plane where the rotation angle A' relative to the x-axis direction of the first-1st arm link component 110 and the first-2nd arm link component 120 is 90°. In the vertical state, the second-1st arm link component 210 and the second-2nd arm link component 220 are configured approximately along the y-axis direction via the transmission link, but the angle of rotation relative to the x-axis direction varies with the position of the link shaft J. Details will be explained below.

[0117] The first state refers to the state in which the first-1st arm linkage component 110 rotates in the direction of the operation component 400 in a vertical state. That is, the first state refers to the state in which the rotation angle A' of the first-1st arm linkage component 110 around the rotation axis A is greater than 90° and less than 180°. Figure 2 The first-1 arm connecting rod component 110 is shown rotating clockwise in the first state.

[0118] on the other hand, Figures 2 to 5 Although not shown, the horizontal multi-joint robot of the present invention can rotate to a second state. The second state refers to the state in which the first-1st arm link component 110 rotates in the backward direction along the manipulation component 400 in a vertical state. That is, the second state refers to the state in which the rotation angle A' of the first-1st arm link component 110 about the rotation axis A is greater than 0° and less than 90°.

[0119] In summary, the first state and the second state refer to the state of rotating to one side or the other side based on the vertical state.

[0120] On the other hand, refer to again Figure 3 If the connecting rod shaft J is formed at the center of the width direction of the connecting rod component 210 in the second-first arm, then in the vertical state, the first state, and the second state, line L1 and line L2 are aligned. However, in Figure 3In the illustrated embodiment, line L1 and line L2 are not aligned. In this case, a predetermined angle is formed around the connecting rod axis C between lines L1 and L2. This angle is ∠R' or ∠JCE.

[0121] Figure 3 The rotational state of the second-first arm linkage 210 in the vertical position is shown. As described above, the manipulation member 400 is connected to the linkage axis E, therefore, the position of the line L2 passing through the linkage axis E in the vertical position needs to be noted. That is, when the horizontal multi-joint robot of the present invention rotates from the vertical position to the first or second position, the line L2 passing through the linkage axis E connected to the manipulation member 400 can serve as a reference.

[0122] When in a vertical position, the second-first arm connecting rod component 210 rotates relative to the x-axis by an angle of 90° - ∠R'. Here, the rotation angle of the second-first arm connecting rod component 210 refers to... Figure 2 The direction of the rotation angle A' shown.

[0123] In the vertical position, with line L1 and line L2 aligned, ∠R' is 0°. Therefore, the rotation angle of the second-1st arm link component 210 and the second-2nd arm link component 220 relative to the x-axis direction is 90°.

[0124] like Figure 3 As shown in part (a), with the center of the second-first arm link 210 in the width direction as a reference and the link shaft J close to the link shaft I, ∠R' is greater than 0°. Therefore, the rotation angle (90°-∠R') between the second-first arm link 210 and the second-second arm link 220 is less than 90°.

[0125] like Figure 3 As shown in part (b), with the center of the second-first arm link 210 in the width direction as a reference, and the link axis J being far away from the link axis I, ∠R' is less than 0°. Therefore, the rotation angle (90°-∠R') of the second-first arm link 210 and the second-second arm link 220 is greater than 90°.

[0126] Reference Figure 2 When the first-1st arm connecting rod component 110 rotates to the first state (along the rotation axis A) in the vertical state, Figure 2 When rotating clockwise (as shown), the first-1st arm link component 110 and the first-2nd arm link component 120 are connected via the first-3rd arm link component 130 and the common link component 140, thus the first arm link portion 100 forms a parallelogram and rotates. Of course, the interior angles of the parallelogram change as the first arm link portion rotates.

[0127] Here, the transmission process of the transmission link 300 will be explained. The third transmission link 330, extending from the first-first arm link 100, rotates together with the first-first arm link 110. Therefore, the fourth transmission link 340 rotates counterclockwise around the link axis G, and as the angle with the third transmission link 330 gradually increases, the first transmission link 310 is directed towards... Figure 2 The push is directed to the right in the indicated direction. Therefore, the first transmission link component 310 rotates counterclockwise around the link axis D (see reference). Figure 2 (As shown, the position change of the connecting rod shaft I) gradually increases with the angle with the common connecting rod component 140, the second transmission connecting rod component 320 is directed towards... Figure 2 The direction shown is pushed to the right. Therefore, the second-first arm link component 210 rotates counterclockwise around the link axis C, and as the angle with the first-first arm link component 110 gradually increases, it moves to one side ( Figure 2 (As shown in the right direction) it moves. In this case, the second-1st arm link member 210 and the second-2nd arm link member 220 are connected via the second-3rd arm link member 230 and the common link member 140, so the second arm link portion 200 forms a parallelogram and rotates. Of course, the interior angles of the parallelogram change with the rotation of the second arm link portion. In this invention, when the second arm link portion 200 rotates, the operating member 400 connected to the second-3rd arm link member 230 moves linearly along the x-axis.

[0128] On the other hand, Figure 2 In the first state shown, when the first arm link rotates counterclockwise and moves sequentially to the vertical state and the second state, the process is reversed. This is something that can be fully understood by those skilled in the art.

[0129] As described above, the link lengths of the first arm link section (link components of the first-1st arm and the first-2nd arm) and the second arm link section (link components of the second-1st arm and the second-2nd arm) of the horizontal multi-joint robot of the present invention are different. Therefore, when the link lengths of the first arm link section and the second arm link section are different, the manipulation member 400 moves along the x-axis in a curved motion as the first arm link section and the second arm link section rotate. In the present invention, when the link lengths of the first arm link section and the second arm link section are different, the transmission link section 300 enables the manipulation member 400 to achieve near-linear forward and backward movements, and the linear movement of the manipulation member 400 depends on the length and angle conditions between the link components.

[0130] The following is for reference Figures 2 to 5The conditions required for the linear motion of the manipulator components of the horizontal multi-joint robot of the present invention will be described.

[0131] When the link lengths of the first arm link 100 and the second arm link 200 are different (when the length of the first-1st arm link component is greater than the length of the second-1st arm link component), in order for the manipulator 400 to perform linear motion, the angle conditions of the horizontal multi-joint robot in the first state and the angle conditions in the second state need to be met.

[0132] The angle condition for the first state: the angle between the length direction line of the first-1st arm connecting rod component 110 and the length direction line of the first-3rd arm connecting rod component 130 around the rotation axis A. Figure 2 The angle ∠CAB shown is greater than the angle between the length direction line of the common link member 140 around the link axis C and the length direction line of the second-first arm link member 210. Figure 2 ∠DCJ shown).

[0133] The angle condition for the second state: the angle between the length direction line of the first-1st arm connecting rod component 110 and the length direction line of the first-3rd arm connecting rod component 130 around the rotation axis A. Figure 2 The angle ∠CAB shown is less than the angle between the length direction line of the common link member 140 around the link axis C and the length direction line of the second-first arm link member 210. Figure 2 ∠DCJ shown).

[0134] If the angle conditions of the first state and the second state cannot be met (for example, ∠CAB=∠DCJ), the control component 400 will perform curved motion due to the difference in link length between the first arm link and the second arm link.

[0135] On the other hand, in order to satisfy the angle conditions of the first state and the second state, the length of the connecting rod component needs to meet the following length conditions.

[0136] First length condition: The length of the side (side CD) of the connecting rod shaft C and connecting rod shaft D of the common connecting rod component 140 should be the same as the length of the side (side IJ) of the connecting rod shaft I and connecting rod shaft J of the second transmission connecting rod component 320 (side CD = side IJ).

[0137] Second length condition: The length of the side (side CJ) of the connecting rod shaft C and connecting rod shaft J of the second-1st arm connecting rod component 210 should be the same as the length of the side (side DI) of the connecting rod shaft D and connecting rod shaft I of the first transmission connecting rod component 310 (side CJ = side DI).

[0138] Third length condition: The length of the side (side CJ) of the connecting rod shaft C and connecting rod shaft J of the second-1st arm connecting rod component 210 should be twice the length of the side (side CD) of the connecting rod shaft C and connecting rod shaft D of the common connecting rod component 140 (side CJ / 2 = side CD).

[0139] Fourth length condition: The length of the side (side CG) of the connecting rod shaft C and connecting rod shaft G of the third transmission link component 330 should be greater than the length of the side (side DH) of the connecting rod shaft D and connecting rod shaft H of the first transmission link component 310 (side DH < side CG).

[0140] Fifth length condition: The length of the side (side GH) of the connecting rod shaft G and connecting rod shaft H of the fourth transmission link component 340 should be greater than the length of the side (side CD) of the connecting rod shaft C and connecting rod shaft D of the common link component 140 (side CD < side GH).

[0141] Sixth length condition: The length of the side (side CD) of the connecting rod shaft C and connecting rod shaft D of the common connecting rod component 140 should be twice the length of the side (side DH) of the connecting rod shaft D and connecting rod shaft H of the first transmission connecting rod component 310 (side CD / 2 = side DH).

[0142] Reference Figure 5 In order for the control component 400 to perform linear motion, in the first state, the length (d' or side GH) of the connecting rod shaft G and connecting rod shaft H of the fourth transmission link component 340 is calculated by the following mathematical formula 1:

[0143] Mathematical Formula 1

[0144]

[0145] Wherein, c represents the length of the connecting rod shaft H and the connecting rod shaft D of the first transmission link component 310, q represents the length of the connecting rod shaft G and the connecting rod shaft H, C' represents the angle between the length direction line of the common link component 140 around the connecting rod shaft D and the length direction line of q, and N represents the angle between the length direction line of the common link component 140 around the connecting rod shaft D and the length direction line of the first transmission link component 310.

[0146] Furthermore, the length of q mentioned above is calculated using the following mathematical formula 2:

[0147] Mathematical formula 2

[0148]

[0149] Wherein, c' represents the length of the connecting rod shaft C and connecting rod shaft G of the third transmission link component 330, and d represents the length of the connecting rod shaft I and connecting rod shaft J of the second transmission link component 320.

[0150] Furthermore, the angle C' mentioned above is calculated using the following mathematical formula 3:

[0151] Mathematical Formula 3

[0152]

[0153] Furthermore, the angle of N mentioned above is calculated using the following mathematical formula 4:

[0154] Mathematical expression 4

[0155]

[0156] Wherein, D' represents the angle between the length direction line of the common link component 140 surrounding the link shaft D and the line connecting the link shaft D and the link shaft C.

[0157] Furthermore, the angle of D' mentioned above is calculated using the following mathematical formula 5:

[0158] Mathematical formula 5

[0159]

[0160] Where e represents the length of the connecting rod shaft D and the connecting rod shaft I of the first transmission connecting rod component 310.

[0161] Furthermore, as stated above, according to the first to third length conditions, the length of e (edge ​​DI) is twice the length of d (edge ​​IJ). Therefore, the above mathematical formula 5 can be calculated by the following mathematical formula 5-1:

[0162] Mathematical expression 5-1

[0163] D′tan -1 (2) Referring to the above mathematical formulas 1 to 5-1, in the first state, in order for the control component 400 to perform linear motion, the lengths of d' (side GH) and c' (side CG) are particularly important.

[0164] on the other hand, Figure 5 The diagram illustrates the relationship between the lengths and angles of each link component used to calculate the y-axis displacement value of the manipulation component 400 when the horizontal multi-joint robot of the present invention moves from a vertical state to a first state due to a predetermined rotation angle (∠A'). Here, Y can be a value in the y-axis direction relative to a preset reference line BL, and the reference line BL can be an x-axis line.

[0165] This Y value is calculated using the following mathematical formula 6. In the following mathematical formula, trigonometric formulas are used, such as the cosine law which defines the relationship between length and angle.

[0166] Mathematical formula 6

[0167] Y=a×sinA′-b×sin(E′-M′-R′)

[0168] Wherein, 'a' represents the length of the connecting rod shaft A and connecting rod shaft C of the first-1st arm connecting rod component 110 in the aforementioned vertical state; 'A' represents the angle between the length direction line of the first-1st arm connecting rod component 110 around the rotation axis A and the length direction line of the first-3rd arm connecting rod component 130; 'b' represents the length of the connecting rod shaft C and connecting rod shaft E of the second-1st arm connecting rod component 210 in the aforementioned vertical state; and 'E' represents the length of the common connecting rod component 14 around the connecting rod shaft C in the aforementioned first state. The angle between the length direction line of 0 and the line connecting the aforementioned link shaft C and the aforementioned link shaft I, M' represents the angle between the line connecting the aforementioned link shaft C and the aforementioned link shaft I around the aforementioned link shaft C in the second state and the line connecting the aforementioned link shaft C and the aforementioned link shaft J of the aforementioned second-1st arm link component 210 in the second state, and R' represents the angle between the line connecting the aforementioned link shaft C and the aforementioned link shaft J of the aforementioned second-1st arm link component 210 around the aforementioned link shaft C and the line connecting the aforementioned link shaft C and the link shaft I in the second state.

[0169] Furthermore, the angle E' is calculated using the following mathematical formula 7:

[0170] Mathematical Formula 7

[0171]

[0172] Wherein, d represents the length of the connecting rod shaft I and connecting rod shaft J of the second transmission link component 320 in the above vertical state, i represents the length of the connecting rod shaft C and connecting rod shaft I in the above vertical state, and e represents the length of the connecting rod shaft C and connecting rod shaft J of the second-first arm link component 210 in the above vertical state.

[0173] Furthermore, the angle of M' mentioned above is calculated by the following mathematical formula 8:

[0174] Mathematical formula 8

[0175]

[0176] Furthermore, the length of i is calculated by the following mathematical formula 9.

[0177] Mathematical formula 9

[0178]

[0179] Wherein, L' represents the angle between the line connecting the link shaft G and the link shaft D around the link shaft D in the first state and the length direction line of the first transmission link component 310, and J' represents the angle between the line connecting the link shaft G and the link shaft D around the link shaft D in the second state and the length direction line of the common link component.

[0180] Furthermore, the angle L' mentioned above is calculated using the following mathematical formula 10:

[0181] Mathematical formula 10

[0182]

[0183] Wherein, c represents the length of the connecting rod shaft H and connecting rod shaft D of the first transmission connecting rod component 310 in the above vertical state, and h represents the length of the connecting rod shaft G and connecting rod shaft H in the above first state.

[0184] Furthermore, the angle J' mentioned above is calculated using the following mathematical formula 11:

[0185] Mathematical formula 11

[0186]

[0187] Wherein, c' represents the length of the connecting rod shaft C and the connecting rod shaft G of the third transmission connecting rod component 330 mentioned above.

[0188] Furthermore, the length of h mentioned above is calculated using the following mathematical formula 12:

[0189] Mathematical expression 12

[0190]

[0191] Wherein, H' represents the angle between the length direction line of the third transmission link component 330 and the length direction line of the common link component 140 in the first state described above.

[0192] Furthermore, the angle H' mentioned above is calculated using the following mathematical formula 13:

[0193] Mathematical formula 13

[0194] H′=π-A′

[0195] Referring again to Equation 6 above, A' is related to ∠CAB, and E'-M'-R' is related to ∠DCJ. That is, as mentioned above, it can be seen that the Y value is related to the angular conditions used to make the control component 400 perform linear motion.

[0196] Figures 6 to 9This is a graph showing the displacement of the manipulation component toward the second direction as the arm link of the horizontal multi-joint robot of the present invention rotates around the rotation axis A by a predetermined angle, varying with the length (side CG or c') and R' of the third transmission link component.

[0197] Under the aforementioned angle and length conditions, the horizontal multi-joint robot of the present invention performs linear motion within a specified error range. This error range is a preset value, set to 1 mm in the embodiments of the present invention, but is not limited to this.

[0198] Figures 6 to 9 The x-axis shown refers to the rotation angle A', and the y-axis refers to the displacement value of the control component 400°. The rotation angle A' can be expressed in various units such as 60 degrees, radians, millis, and steradian degrees. Figures 6 to 9 The xy-axis coordinate plane shown illustrates the motion curves of the horizontal multi-joint robot of the present invention, and the displacement value Y is marked in the table shown below the curves.

[0199] Reference Figures 6 to 9 As shown in the graph, the horizontal multi-joint robot of the present invention can perform curved motion within the error range while simultaneously rotating in the first state, vertical state, and second state. Figures 6 to 9 This illustrates the horizontal multi-jointed robot of the present invention moving in a "W" shape around approximately 90° with a rotation angle A' as a reference. More precisely, as described above, due to the line L2 (refer to...) connected to the manipulation component 400... Figure 3 This is especially important, therefore, in the vertical state, the rotation angle A' based on the "W" shape is 90° - ∠R'.

[0200] On the other hand, Figures 6 to 9 In the experiments conducted, the length (side CG or c') and angle R' of the third transmission link component were used as the main variables for the linear motion of the horizontal multi-joint robot of the present invention.

[0201] In this invention, the edge CG(c') of the third transmission link component 330 and the edge DH(c) of the first transmission link component 310, which are one of the main variables, form a relationship similar to the gear rotation ratio. Specifically, when the horizontal multi-joint robot of this invention rotates, the third transmission link component 330 and the first transmission link component 310 rotate in tandem. The edge CG(c') of the third transmission link component 330 rotates with respect to the rotation axis A, while the edge DH(c) of the first transmission link component 310 rotates with respect to the link axis D. Therefore, it can be interpreted that the edge CG(c') with the larger radius and the edge DH(c) with the smaller radius form a gear-like meshing, thus forming a rotation ratio in which the smaller gear needs to rotate more than one revolution for the larger gear to rotate one revolution. The rotation ratio can be defined as c' / c.

[0202] The length (c') of this third transmission link component 330 causes changes in the vertical length of the "W"-shaped curve of the horizontal multi-joint robot's motion. For example... Figures 6 to 9 As shown, the larger the length (c') of the third transmission link component 330, the greater the difference in the variation of the displacement value Y according to the rotation angle A'.

[0203] Of course, the length (side GH) of the fourth transmission link component 340 or any of the variables in the above length conditions can be chosen to replace the length (c') of the third transmission link component 330 as the main variable.

[0204] On the other hand, the main variable, angle R', causes a tilting change in the "W"-shaped curve shape of the horizontal multi-joint robot's motion.

[0205] exist Figures 6 to 9 In this invention, an upper limit M1 and a lower limit M2 for the displacement value of the control component can be set. In one embodiment, the upper limit M1 is set to 110.1 mm, and the lower limit M2 is set to 109.1 mm, so that the error range of the displacement value Y is 1 mm. Furthermore, in... Figures 6 to 9 In this invention, an upper limit M3 and a lower limit M4 for the rotation angle A' can be set. In one embodiment, the upper limit M3 of the rotation angle can be set to 122°, and the lower limit M4 of the rotation angle can be set to 53.5°. Of course, there are various ways to set the displacement value and the upper limit M1 to the lower limit M4 of the rotation angle.

[0206] According to the present invention, the main variables that enable the control component 400 to perform optimal linear motion can be selected within the range of each upper limit line M1 to the lower limit line M4. Figures 6 to 9 In the experiment conducted, the length a of the first-1st arm connecting rod component 110 (or the first-2nd arm connecting rod component 120) was set to 340 mm, the length b of the second-1st arm connecting rod component 210 (or the second-2nd arm connecting rod component 220) was set to 230 mm, the length of side DH(c) was set to 50 mm, the length of side IJ(d) was set to 100 mm, and the length of side DI(e) was set to 200 mm (refer to...). Figure 5 ).

[0207] exist Figure 6 In the experiment, the angle R' was set to -0.004 radians. Under this condition, with angle R', it can be seen that the length c' of the third transmission link component 330 used to perform linear motion is 68 mm while satisfying the range from the upper limit line M1 to the lower limit line M4.

[0208] exist Figure 7In the experiment, the angle R' was set to -0.002 radians. Under this condition, with angle R', it can be seen that the length c' of the third transmission link component 330 used to perform linear motion is 68 mm, while satisfying the range from the upper limit line M1 to the lower limit line M4.

[0209] exist Figure 8 In the experiment conducted, angle R' was set to 0 radians. Under this condition, with angle R', it can be seen that the length c' of the third transmission link component 330 used to perform linear motion is 68 mm, while satisfying the range from the upper limit line M1 to the lower limit line M4.

[0210] exist Figure 9 In the experiment, the angle R' was set to +0.002 radians. Under this condition, with angle R', it can be seen that the length c' of the third transmission link component 330 used to perform linear motion is 68 mm, while satisfying the range from the upper limit line M1 to the lower limit line M4.

[0211] like Figures 6 to 9 As shown, when the angle R' is small, the change in Y value in the first state is greater than the change in Y value in the second state. The larger the angle R' is, the smaller the change in Y value in the first state is compared to the change in Y value in the second state.

[0212] In conclusion, Figures 6 to 9 In the experiment, when the arm link component rotates, the length c' of the third transmission link component 330 can be selected based on the change in the depth of the "W"-shaped curve, and the angle R' can be selected based on the change in the inclination of the "W"-shaped curve.

[0213] Of course, the optimal values ​​of the third transmission link component 330 and the angle R' can be randomly changed based on the length values ​​of other multiple link components under the aforementioned angle and length conditions.

[0214] Figure 10 To briefly illustrate a horizontal multi-joint robot according to an embodiment of the present invention, Figure 11 A diagram is provided to briefly illustrate another embodiment of the horizontal multi-joint robot of the present invention.

[0215] like Figure 10 As shown in the embodiment of the present invention, the horizontal multi-joint robot of the present invention can be in the form of a dual-arm robot, comprising a first arm link 100, a second arm link 200, and a transmission link 300 in the upper and lower parts, respectively. In this case, the upper and lower horizontal multi-joint robots can be connected to the first arm link 100.

[0216] Furthermore, according to embodiments of the present invention, the horizontal multi-joint robot of the present invention can be in the form of a four-armed robot with two arms arranged on the left and right sides. In this case, Figure 11 The left upper (or lower) horizontal multi-joint robot and the right upper (or lower) horizontal multi-joint robot shown can be connected to the first arm link 100.

[0217] Of course, the structure of the horizontal multi-joint robot of the present invention is not limited to the above embodiments, and various quantities can be formed according to the number of horizontal multi-joint robots.

[0218] While the present invention has been described above with reference to one embodiment shown in the accompanying drawings, this is merely an example, and it should be understood that those skilled in the art can implement various modifications and equivalent embodiments thereto. Therefore, the true scope of protection of the present invention should be determined solely by the appended claims.

Claims

1. A horizontal multi-joint robot, characterized in that, It includes the first arm connecting rod, the second arm connecting rod, and the transmission connecting rod. The aforementioned first arm connecting rod includes: The first-1 arm connecting rod component has a rotation axis A and a connecting rod axis C formed on both sides; The first-second arm connecting rod component has the same length as the first-first arm connecting rod component described above, and connecting rod shaft B and connecting rod shaft D are formed on both sides; The first-to-third arm connecting rod assembly is rotatably connected to the aforementioned rotating shaft A and the aforementioned connecting rod shaft B; and A common connecting rod assembly is rotatably connected to the connecting rod shaft C and the connecting rod shaft D on both sides. The aforementioned second arm connecting rod includes: The second-first arm connecting rod component has a shorter length than the first-first arm connecting rod component, and a connecting rod shaft E is formed on one side, while the other side is connected to the connecting rod shaft C. The second-2nd arm connecting rod component has the same length as the second-1st arm connecting rod component described above, with a connecting rod shaft F formed on one side and connected to the connecting rod shaft D on the other side; and The second and third arm connecting rod components are rotatably connected to the connecting rod shaft E and the connecting rod shaft F on both sides. The aforementioned transmission linkage includes: The first transmission link component is connected to the link shaft D on one side, and a link shaft I is formed on the other side that passes through the first-1 arm link component; The second transmission link component is connected on one side to the link shaft J formed in the first 2-1 arm link component, and on the other side to the link shaft I. The third transmission link component has a link shaft G formed on one side extending from the link shaft C; and The fourth transmission link component is connected on one side to the link shaft H formed in the first transmission link component, and on the other side to the link shaft G. When the first arm link rotates around the rotation axis A, the second arm link rotates along with the transmission link, and the operating component connected to the second arm link performs linear motion in the first direction.

2. The horizontal multi-joint robot according to claim 1, characterized in that, When the first arm link rotates back and forth between a first state where it is in a vertical position and a second state where it rotates in a backward direction, if the angle A1 between the length direction line of the first-1 arm link component and the length direction line of the first-3 arm link component is compared with the angle A2 between the length direction line of the common link component surrounding the link axis C and the length direction line of the second-1 arm link component, then in the first state, angle A1 is greater than angle A2, and in the second state, angle A1 is less than angle A2.

3. The horizontal multi-joint robot according to claim 2, characterized in that, The lengths of the sides of the connecting rod shafts C and D of the aforementioned common connecting rod component are the same as the lengths of the sides of the connecting rod shafts I and J of the aforementioned second transmission connecting rod component.

4. The horizontal multi-joint robot according to claim 2, characterized in that, The lengths of the sides of the connecting rod shafts C and J of the second-first arm connecting rod component are the same as the lengths of the sides of the connecting rod shafts D and I of the first transmission connecting rod component.

5. The horizontal multi-joint robot according to claim 2, characterized in that, The length of the side of the connecting rod shaft C and connecting rod shaft J of the above-mentioned second-1 arm connecting rod component is twice the length of the side of the connecting rod shaft C and connecting rod shaft D of the above-mentioned common connecting rod component.

6. The horizontal multi-joint robot according to claim 2, characterized in that, The lengths of the sides of the connecting rod shafts C and G of the third transmission link component are greater than the lengths of the sides of the connecting rod shafts D and H of the first transmission link component.

7. The horizontal multi-joint robot according to claim 2, characterized in that, The lengths of the sides of the connecting rod shafts G and H of the fourth transmission link component are greater than the lengths of the sides of the connecting rod shafts C and D of the common link component.

8. The horizontal multi-joint robot according to claim 2, characterized in that, The length of the side of the connecting rod shaft C and connecting rod shaft D of the aforementioned common connecting rod component is twice the length of the side of the connecting rod shaft D and connecting rod shaft H of the aforementioned first transmission connecting rod component.

9. The horizontal multi-joint robot according to claim 2, characterized in that, In the vertical state where the first arm link is perpendicular to the first direction, the length (d') of the fourth transmission link member connecting the link shaft G and the link shaft H for performing the linear motion is calculated by the following mathematical formula 1: Mathematical Formula 1 Wherein, c represents the length of the connecting rod shaft H and the connecting rod shaft D of the first transmission link component, q represents the length of the connecting rod shaft G and the connecting rod shaft H, C' represents the angle between the length direction line of the common link component around the connecting rod shaft D and the length direction line of q, and N' represents the angle between the length direction line of the common link component around the connecting rod shaft D and the length direction line of the first transmission link component.

10. The horizontal multi-joint robot according to claim 9, characterized in that, The length of q above is calculated by the following mathematical expression 2: Mathematical formula 2 Wherein, c' represents the length of the connecting rod shaft C and connecting rod shaft G of the third transmission link component, and d represents the length of the connecting rod shaft I and connecting rod shaft J of the second transmission link component.

11. The horizontal multi-joint robot according to claim 10, characterized in that, The angle C' mentioned above is calculated using the following mathematical formula 3: Mathematical Formula 3 。 12. The horizontal multi-joint robot according to claim 11, characterized in that, The angle of N' mentioned above is calculated by the following mathematical formula 4: Mathematical expression 4 Wherein, D' represents the angle between the length direction line of the common link component surrounding the link shaft D and the line connecting the link shaft D and the link shaft J.

13. The horizontal multi-joint robot according to claim 12, characterized in that, The angle of D' mentioned above is calculated by the following mathematical formula 5: Mathematical formula 5 Where e represents the length of the connecting rod shaft D and the connecting rod shaft I of the first transmission connecting rod component mentioned above.

14. The horizontal multi-joint robot according to claim 13, characterized in that, The length of e is twice the length of d.

15. The horizontal multi-joint robot according to claim 9, characterized in that, A reference line is set along the first direction for the connecting rotation axis A and the connecting rod axis B of the first-to-third arm linkage components. When the first arm linkage part rotates around the rotation axis A from the vertical state to the first state, the displacement Y of the operating component relative to the reference line toward the second direction perpendicular to the first direction is calculated by the following mathematical formula 6: Mathematical formula 6 Wherein, a represents the length of the connecting rod shaft A and connecting rod shaft C of the first-1 arm link component in the first state; A' represents the angle between the length direction line of the first-1 arm link component around the rotation axis A and the length direction line of the first-3 arm link component; b represents the length of the connecting rod shaft C and connecting rod shaft E of the second-1 arm link component in the vertical state; E' represents the angle between the length direction line of the common link component around the connecting rod shaft C and the line connecting the connecting rod shaft C and the connecting rod shaft I in the first state; M' represents the angle between the line connecting the connecting rod shaft C and the connecting rod shaft I around the connecting rod shaft C and the line connecting the connecting rod shaft C and the connecting rod shaft J of the second-1 arm link component in the first state; and R' represents the angle between the line connecting the connecting rod shaft C and the connecting rod shaft J of the second-1 arm link component around the connecting rod shaft C and the line connecting the connecting rod shaft C and the connecting rod shaft E in the first state.

16. The horizontal multi-joint robot according to claim 15, characterized in that, The angle E' mentioned above is calculated by the following mathematical formula 7: Mathematical Formula 7 Wherein, d represents the length of the connecting rod shaft I and connecting rod shaft J of the second transmission link component in the above vertical state, i represents the length of the connecting rod shaft C and connecting rod shaft I in the above first state, and e represents the length of the connecting rod shaft C and connecting rod shaft J of the second-first arm link component in the above vertical state.

17. The horizontal multi-joint robot according to claim 16, characterized in that, The angle of M' mentioned above is calculated by the following mathematical formula 8: Mathematical formula 8 。 18. The horizontal multi-joint robot according to claim 17, characterized in that, The length of i above is calculated by the following mathematical expression 9: Mathematical formula 9 Wherein, L' represents the angle between the line connecting the link shaft G and the link shaft D around the link shaft D in the second state and the length direction line of the first transmission link component, and J' represents the angle between the line connecting the link shaft G and the link shaft D around the link shaft D in the second state and the length direction line of the common link component.

19. The horizontal multi-joint robot according to claim 18, characterized in that, The angle L' mentioned above is calculated by the following mathematical formula 10: Mathematical formula 10 Wherein, c represents the length of the connecting rod shaft H and connecting rod shaft D of the first transmission connecting rod component in the above vertical state, and h represents the length of the connecting rod shaft G and connecting rod shaft H in the above second state.

20. The horizontal multi-joint robot according to claim 19, characterized in that, The angle J' mentioned above is calculated by the following mathematical formula 11: Mathematical formula 11 Where c' represents the length of the connecting rod shaft C and the connecting rod shaft G of the third transmission link component mentioned above.

21. The horizontal multi-joint robot according to claim 20, characterized in that, The length of h above is calculated by the following mathematical expression 12: Mathematical expression 12 Wherein, H' represents the angle between the length direction line of the third transmission link component and the length direction line of the common link component in the first state described above.

22. The horizontal multi-joint robot according to claim 21, characterized in that, The angle H' mentioned above is calculated by the following mathematical formula 13: Mathematical formula 13 。 23. The horizontal multi-joint robot according to claim 2, characterized in that, The aforementioned connecting rod shaft J is spaced at a specified distance from the center of the width direction of the aforementioned second-first arm connecting rod component.

24. The horizontal multi-joint robot according to claim 2, characterized in that, The magnitude of the change in the orientation of the aforementioned control component toward the second direction perpendicular to the first direction varies with the angle between the line connecting the aforementioned link shaft C and the aforementioned link shaft J and the line connecting the aforementioned link shaft C and the aforementioned link shaft E.

25. The horizontal multi-joint robot according to claim 2, characterized in that, The magnitude of the change in the orientation of the aforementioned control component toward the second direction perpendicular to the aforementioned first direction varies with the length of the aforementioned third transmission link component.