Method for manufacturing a plate-shaped member and plate-shaped member

Abstract

The present invention relates to a method for manufacturing a plate-like member, comprising the steps of: irradiating a laser on a surface (10A) of a base material (10) along a first track (T1) having a radius of curvature of 100 mm or more to form a plurality of openings (H1); irradiating a laser along a second track (T2) continuous with the first track (T1) and having a radius of curvature of less than 100 mm to form a plurality of openings (H2); and cutting out a plate-like member from the base material (10) with the openings (H1), (H2) as starting points; and the irradiation pitch (P2) on the first track (T1) and the second track (T2) is within a prescribed range.

Description

Technical Field

[0001] This invention relates to a method for manufacturing plate-shaped components and plate-shaped components. Background Technology

[0002] A method is known to be used to cut a plate-shaped component from a base material by irradiating it with a laser to create multiple openings and then fracturing the base material along these openings. For example, Patent Document 1 describes cutting a glass element from a flat glass component by irradiating it with a laser.

[0003] Existing technical documents

[0004] Patent documents

[0005] Patent Document 1: Japanese Patent Publication No. 2019-511989 Summary of the Invention

[0006] However, due to factors such as crack formation along the fracture surface where the material separates from the parent material at the opening, there is a risk of reduced strength in plate-shaped members. Therefore, it is necessary to suppress crack formation.

[0007] The present invention was made in view of the above-mentioned problems, and its object is to provide a method for manufacturing a plate-shaped member and a plate-shaped member capable of suppressing the generation of cracks.

[0008] To solve the above problems and achieve the objective, the method for manufacturing a plate-shaped member disclosed herein includes the following steps: irradiating the surface of a base material with a pulsed laser along a first trajectory having a radius of curvature of 100 mm or more, thereby forming a plurality of openings along the first trajectory on the surface of the base material; irradiating the surface of the base material with the laser along a second trajectory that is continuous with the first trajectory and has a radius of curvature of less than 100 mm, thereby forming a plurality of openings along the second trajectory on the surface of the base material; and cutting the plate-shaped member from the base material by fracturing the base material starting from the openings along the first and second trajectories; wherein the irradiation spacing of the laser on the first trajectory is 9 μm or less, and the irradiation spacing of the laser on the second trajectory is shorter than the irradiation spacing of the laser on the first trajectory.

[0009] To solve the above problems and achieve the objective, the plate-shaped member disclosed herein is a plate-shaped member having a first end face with a radius of curvature of 100 mm or more when viewed from the thickness direction and a second end face connected to the first end face with a radius of curvature of less than 100 mm when viewed from the thickness direction. A plurality of linear damage portions extending along the thickness direction of the plate-shaped member are formed on the first end face at a spacing of 9 μm or less, and a plurality of linear damage portions extending along the thickness direction of the plate-shaped member are formed on the second end face at a spacing shorter than the spacing of the damage portions on the first end face.

[0010] According to the present invention, a method for manufacturing a plate-shaped member capable of suppressing the generation of cracks and a plate-shaped member can be provided. Attached Figure Description

[0011] Figure 1 This is a schematic cross-sectional view of the base material.

[0012] Figure 2 This is a schematic diagram illustrating the illumination of a laser along the first trajectory.

[0013] Figure 3 This is a schematic diagram illustrating the illumination of a laser along a second trajectory.

[0014] Figure 4 This is a schematic diagram illustrating an example of an opening formed throughout the entire range of the trajectory.

[0015] Figure 5 This is a schematic diagram of a plate-shaped component.

[0016] Figure 6 This is a flowchart illustrating the manufacturing process of the plate-shaped component according to this embodiment.

[0017] Figure 7 This is a graph representing an example of stress distribution along the thickness direction of a plate-shaped member.

[0018] Figure 8 This is a schematic diagram illustrating the vehicle-mounted display of this embodiment.

[0019] Figure 9 This is a schematic diagram illustrating the cutting trajectory of the base material in the embodiment.

[0020] Figure 10 This is a schematic diagram illustrating the method for determining cracks. Detailed Implementation

[0021] Preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that the present invention is not limited to these embodiments; furthermore, in cases where multiple embodiments exist, embodiments combining various embodiments are also included. Additionally, regarding numerical values, ranges for rounding and ranges for general tolerances are included.

[0022] In this embodiment, laser L is irradiated onto the base material 10 to form an opening H in the base material 10, and the base material 10 is fractured starting from the opening H, thereby cutting out the plate-shaped member 100 from the base material 10.

[0023] Specifically, the method for manufacturing a plate-shaped member according to this embodiment is characterized by including the following steps: irradiating the surface of a base material with a pulsed laser along a first trajectory having a radius of curvature of 100 mm or more, thereby forming a plurality of openings along the first trajectory on the surface of the base material; irradiating the surface of the base material with the laser along a second trajectory that is continuous with the first trajectory and has a radius of curvature of less than 100 mm, thereby forming a plurality of openings along the second trajectory on the surface of the base material; and cutting the plate-shaped member from the base material by fracturing the base material starting from the openings along the first and second trajectories; wherein the irradiation spacing of the laser on the first trajectory is 9 μm or less, and the irradiation spacing of the laser on the second trajectory is shorter than the irradiation spacing of the laser on the first trajectory.

[0024] The following describes the base material 10 and the method for manufacturing the plate-shaped member 100 from the base material 10.

[0025] (Base material)

[0026] Figure 1 This is a schematic cross-sectional view of the base material. For example... Figure 1 As shown, the base material 10 is a transparent plate-like component. It should be noted that "plate-like" here is not limited to a flat plate; it can refer to a plate whose width is greater than its thickness, and "transparent" here refers to the transmission of visible light. Hereinafter, one main surface of the base material 10 is designated as surface 10A, the main surface opposite surface 10A is designated as surface 10B, and the thickness direction of the base material 10, i.e., the direction connecting surface 10B and surface 10A, is designated as the Z-direction.

[0027] Figure 1 In the example, the base material 10 appears as a rectangular flat plate when viewed from the Z-direction, but the shape of the base material 10 can be arbitrary. For example, the base material 10 is not limited to being rectangular when viewed from the Z-direction; it can also be a polygon, a circle, or an ellipse, etc. Furthermore, Figure 1 In the example, the base material 10 is flat, but it is not limited to this and can also be a curved flat shape. That is, the surfaces 10A and 10B of the base material 10 can also be curved surfaces that convex in the Z direction.

[0028] When the surfaces 10A and 10B of the base material 10 are curved surfaces convex in the Z direction, the radius of curvature of the surfaces 10A and 10B of the base material 10 is preferably 10,000 mm or less, more preferably 5,000 mm or less, and even more preferably 3,000 mm or less. When the surfaces 10A and 10B of the base material 10 are curved surfaces convex in the Z direction, the radius of curvature of the surfaces 10A and 10B of the base material 10 is preferably 10 mm or more, more preferably 50 mm or more, even more preferably 100 mm or more, and particularly preferably 200 mm or more.

[0029] The thickness D of the base material 10 is preferably 0.2 mm or more, more preferably 0.8 mm or more, and even more preferably 1 mm or more. The thickness D of the base material 10 is preferably 5 mm or less, more preferably 3 mm or less, and even more preferably 2 mm or less. The thickness D of the base material 10 refers to its length in the Z direction from surface 10A to surface 10B. By using a thickness D within this range, rigidity can be appropriately improved.

[0030] The base material 10 is preferably glass, more preferably alkali glass containing an alkali component. The base material 10 is the same material as the plate member 100 described later. However, when the plate member 100 is chemically strengthened as described later, the composition of the base material 10 corresponds to the composition of the central portion of the plate member 100 in the thickness direction. Specifically, if the element released during chemical strengthening is defined as the pre-substitution element, and the element introduced by substitution through chemical strengthening is defined as the substitution element, then the plate member 100 can be said to contain the composition of the pre-substitution element in place of the substitution element, relative to the chemically strengthened surface layer of the plate member 100.

[0031] (Manufacturing method of plate-shaped components)

[0032] Next, the method for manufacturing the plate-shaped member 100 from the base material 10 will be described. For example... Figure 1 As shown, in this manufacturing method, a laser L is irradiated onto the surface 10A of the base material 10 from the irradiation device A, forming an opening H on the surface 10A of the base material 10. That is, the opening H is a hole formed by the laser L.

[0033] The opening H is a linear damage portion extending from surface 10A to surface 10B, but it can also be a linear damage portion that does not extend to surface 10B. The linear damage portion may contain modified portions formed by laser L. The modified portions change in density or refractive index through structural changes in the glass or through melting and resolidification. In addition to modified portions, the linear damage portion may also contain voids, and cracks may exist between the voids.

[0034] Irradiation device A irradiates a pulsed laser L (pulsed laser). The spot diameter DL of laser L can be arbitrary, but is preferably 1 μm to 30 μm, more preferably 2 μm to 20 μm, and even more preferably 3 μm to 10 μm. By using a spot diameter DL within this range, an opening H of a size that can properly fracture the base material 10 can be formed. It should be noted that the spot diameter DL refers to the diameter at the point where laser L is most focused (the diameter at the focal point).

[0035] Furthermore, the wavelength of laser L is arbitrary, but can be, for example, from 350nm to 1100nm. Additionally, the irradiation device A can irradiate laser L with any output power, but can, for example, output laser L with an output value of 10W to 150W, and the output value of laser L can be changed.

[0036] The irradiation device A includes a light source A1, a condenser lens A2, and a scanning mechanism A3. The light source A1 is the source that generates laser light L. The condenser lens A2 is positioned relative to the light source A1 on the side of the laser light L's travel direction, allowing the laser light L from the light source A1 to be incident on it. The condenser lens A2 focuses the incident laser light L while projecting it onto the surface 10A. The scanning mechanism A3 is a mechanism for scanning (sweeping) the laser light L.

[0037] That is, the scanning mechanism A3 causes the laser L to irradiate the position on the surface 10A, i.e., the irradiation position is scanned (moved) in a direction parallel to the surface 10A. The scanning mechanism A3 can be any mechanism as long as it can scan the laser L, such as a current mirror.

[0038] It should be noted that the configuration of the irradiation device A is not limited to the above description, and can be any configuration capable of scanning the irradiation position in a direction parallel to the surface 10A while simultaneously irradiating the laser L. For example, it can be a configuration in which the position of the laser head irradiating the laser L, such as the light source A1 and the condenser lens A2, is fixed while the substrate 10 irradiated by the laser L is moved to scan the irradiation position. That is, it can be said that the irradiation position is scanned by moving the position of the laser spot L relative to the substrate 10.

[0039] In this manufacturing method, a plurality of openings H are formed at predetermined intervals along the scanning direction (movement direction) of the irradiation position while scanning the irradiation position with a laser L. That is, in this manufacturing method, a plurality of openings H arranged at predetermined intervals along the scanning trajectory of the irradiation position of the laser L are formed on the surface 10A of the base material 10.

[0040] (Trajectory)

[0041] Figure 2 This is a schematic diagram illustrating the illumination of a laser along a first trajectory. In this embodiment, as... Figure 2 As shown, the trajectory T is set in such a way that the trajectory T of the scanning laser L at the irradiation position on the surface 10A of the base material 10 includes a first trajectory T1 and a second trajectory T2.

[0042] The radius of curvature R1 of the first trajectory T1 when viewed from the Z direction is 100 mm or more, preferably 1000 mm or more, and more preferably 2500 mm or more. In this way, the radius of curvature of the first trajectory T1 is large, and its upper limit is not particularly limited. For example, it can be a straight line.

[0043] The second trajectory T2 is a continuous (connected to) trajectory T1. The radius of curvature R2 of the second trajectory T2, when viewed from the Z direction, is less than 100 mm, preferably 2 mm or more, and more preferably 3 mm or more. The radius of curvature R2 is preferably less than 10 mm, and more preferably less than 5 mm. Thus, the radius of curvature of the second trajectory T2 is smaller than that of the first trajectory T1, and it is curved.

[0044] It should be explained that Figure 2 In the example, the trajectory T includes four first trajectories T1 corresponding to the four sides of the rectangle and four second trajectories T2 disposed between a pair of first trajectories T1, but is not limited thereto. The trajectory T can be any shape containing the first trajectories T1 and the second trajectories T2.

[0045] (Irradiation by the laser along the first trajectory)

[0046] In this manufacturing method, such as Figure 2 As shown, a laser L is irradiated on the surface 10A of the base material 10 along a first trajectory T1. That is, a pulsed laser L is irradiated while the irradiation position of the laser L is scanned (moved) along the first trajectory T1. As a result, a plurality of openings H1 arranged along the first trajectory T1 are formed on the surface 10A of the base material 10.

[0047] In this manufacturing method, it is preferable that the diameter D1 of the opening H1 is 0.2 μm to 20 μm, more preferably 0.5 μm to 10 μm, and even more preferably 1 μm to 5 μm. By making the diameter D1 of the opening H1 within this range, the base material 10 can be properly fractured starting from the opening H1.

[0048] The distance between the centers of adjacent openings H1 along the first trajectory T1 is defined as the laser irradiation spacing P1 on the first trajectory. In this manufacturing method, the openings H1 are formed such that the irradiation spacing P1 is 9 μm or less. Furthermore, in this manufacturing method, it is preferable that the irradiation spacing P1 is 6 μm or more, more preferably more than 7 μm. The irradiation spacing P1 is preferably 8 μm or less.

[0049] Furthermore, in this manufacturing method, the irradiation spacing P1 is preferably 400% to 600% of the diameter D1 of the opening H1, and more preferably 450% to 550%.

[0050] Furthermore, in this manufacturing method, the irradiation spacing P1 is preferably 120% or more, more preferably 140% or more, relative to the spot diameter DL of the laser L. The irradiation spacing P1 is preferably 180% or less, more preferably 160% or less, relative to the spot diameter DL of the laser L.

[0051] By setting the irradiation spacing P1 to this range, when the base material 10 is fractured starting from the opening H1, it is possible to suppress the generation of cracks (cracks other than the opening H1) along the first trajectory T1.

[0052] (Irradiation of the laser along the second trajectory)

[0053] Figure 3 This is a schematic diagram illustrating the irradiation of a laser along a second trajectory. In this manufacturing method, as... Figure 3 As shown, laser L is irradiated on the surface 10A of the base material 10 along the second trajectory T2. That is, pulsed laser L is irradiated while the irradiation position of laser L is scanned (moved) along the second trajectory T2. As a result, a plurality of openings H2 arranged along the second trajectory T2 are formed on the surface 10A of the base material 10.

[0054] In this manufacturing method, it is preferable that the diameter D2 of the opening H2 is 0.2 μm to 20 μm, more preferably 0.5 μm to 10 μm, and even more preferably 1 μm to 5 μm. By making the diameter D2 of the opening H2 within this range, the base material 10 can be properly fractured starting from the opening H2.

[0055] The distance between the centers of adjacent openings H2 along the second trajectory T2 is defined as the laser irradiation spacing P2 on the second trajectory. In this manufacturing method, the opening H2 is formed such that the irradiation spacing P2 is shorter than the irradiation spacing P1 of the opening H1. Furthermore, in this manufacturing method, it is preferable that the irradiation spacing P2 is 7 μm or less, more preferably 6 μm or less. Additionally, in this manufacturing method, it is preferable that the irradiation spacing P2 is 5 μm or more.

[0056] Furthermore, in this manufacturing method, the irradiation spacing P2 is preferably 450% or less relative to the diameter D2 of the opening H2, and more preferably 350% to 400%.

[0057] Furthermore, in this manufacturing method, the irradiation spacing P2 is preferably 140% or less, and more preferably 120% or less, relative to the spot diameter DL of the laser L. Additionally, the irradiation spacing P2 is preferably 100% or more, relative to the spot diameter DL of the laser L.

[0058] Furthermore, in this manufacturing method, the radius of curvature R2 of the irradiation spacing P2 relative to the second trajectory T2 is preferably 2000% or less, more preferably 40% to 200%, and even more preferably 60% to 100%.

[0059] By setting the irradiation spacing P2 to this range, when the base material 10 is fractured starting from the opening H2, it is possible to suppress the generation of cracks (cracks other than the opening H2) along the second trajectory T2.

[0060] Figure 4This is a schematic diagram illustrating an example of forming an opening throughout the entire range of the trajectory. In this manufacturing method, as... Figure 4 As shown, an opening H is formed throughout the entire interval of trajectory T. That is, an opening H1 is formed within the interval of the first trajectory T1 in trajectory T with an illumination spacing P1, and an opening H2 is formed within the interval of the second trajectory T2 with an illumination spacing P2.

[0061] It should be explained that Figure 4 For ease of explanation, only a portion of the openings H1 and H2 on the first trajectory T1 and the second trajectory T2 are shown, but in reality, openings H1 and H2 are formed throughout the entire interval of the first trajectory T1 and the second trajectory T2.

[0062] Furthermore, in the above explanation, opening H1 is first formed along the first trajectory T1, and then opening H2 is formed along the second trajectory T2, which is continuous with the first trajectory T1. Therefore, in Figure 4 In the example, opening H1 or opening H2 is formed along the trajectory in the order of first trajectory T1, second trajectory T2 continuous with the first trajectory T1, first trajectory T1 continuous with the second trajectory T2, and second trajectory T2 continuous with the first trajectory T1.

[0063] However, the formation order of openings H1 and H2 is not limited to this. Alternatively, opening H2 can be formed first along the second trajectory T2, and then opening H1 can be formed along the first trajectory T1, which is continuous with the second trajectory T2. That is, in Figure 4 In the example, an opening H1 or an opening H2 can also be formed along the trajectory in the order of the second trajectory T2, the first trajectory T1 which is continuous with the second trajectory T2, the second trajectory T2 which is continuous with the first trajectory T1, and the first trajectory T1 which is continuous with the second trajectory T2.

[0064] Furthermore, the processing is not limited to continuous trajectories. For example, after each first trajectory T1 forms an opening H1, an opening H2 can be formed on each second trajectory T2; or after each second trajectory T2 forms an opening H2, an opening H1 can be formed on each first trajectory T1; or the formation of opening H1 on the first trajectory T1 and opening H2 on the second trajectory T2 can be performed simultaneously.

[0065] (A fracture that begins at the opening)

[0066] Figure 5 This is a schematic diagram of a plate-shaped member. After opening H1 is formed on the first trajectory T1 and opening H2 is formed on the second trajectory T2, in this manufacturing method, the base material 10 is broken with openings H1 and H2 as the starting point, thereby separating (cutting out) the plate-shaped member 100 from the base material 10.

[0067] Since opening H1 is formed along the first trajectory T1 and opening H2 is formed along the second trajectory T2, the base material 10 is fractured by taking openings H1 and H2 as starting points. The base material 10 fractures along the first trajectory T1 and the second trajectory T2, as shown below. Figure 5 As shown, a plate-shaped component 100 is cut out.

[0068] The details are described below. The plate-shaped member 100 has a first end face 101 as the fracture surface at the first trajectory T1 and a second end face 102 as the fracture surface at the second trajectory T2. The first end face 101 has a residual damage portion HA1 corresponding to the opening H1, and the second end face 102 has a residual damage portion HA2 corresponding to the opening H2.

[0069] Figure 5 For ease of explanation, only a portion of the damaged portions HA1 and HA2 on the first end face 101 and the second end face 102 are shown, but in reality, the damaged portions HA1 and HA2 are formed throughout the entire range of the first end face 101 and the second end face 102.

[0070] In this embodiment, the base material 10 can be fractured by inducing stress on the surface 10A along the trajectory T, starting from the openings H1 and H2. For example, by irradiating the surface 10A with a CO2 laser along the trajectory T, stress is induced on the surface 10A along the trajectory T, causing the base material 10 to fracture starting from the openings H1 and H2.

[0071] However, the method of fracturing the base material 10 starting from openings H1 and H2 is not limited to CO2 laser irradiation. It can also be achieved by applying a bending load along a trajectory T on the surface 10A using mechanical methods, thereby inducing stress on the surface 10A and causing the base material 10 to fracture starting from openings H1 and H2. Here, "mechanical method" refers to physically generating the bending load; for example, the bending load can be generated mechanically or manually by workers.

[0072] (Chemical fortification)

[0073] In this manufacturing method, the plate-shaped member 100 cut from the base material 10 may also be chemically strengthened to form a compressive stress layer on the surface of the plate-shaped member 100. The chemical strengthening treatment can be carried out by any method, but for example, it can be carried out by impregnating the plate-shaped member 100 in a molten salt containing an alkali metal.

[0074] Typically, a method can be described as immersing a plate-shaped component 100 in molten KNO3 salt for ion exchange treatment, followed by cooling to near room temperature. Treatment conditions such as the temperature of the molten KNO3 salt and the immersion time can be set to achieve desired surface compressive stress and the thickness of the compressive stress layer. It should be noted that the method of chemical strengthening is not limited to using potassium salts such as molten KNO3 salt; any method can be used. For example, sodium salts can also be used for chemical strengthening.

[0075] In addition, the chemical strengthening treatment is preferably carried out after the plate-shaped member 100 is cut out, but it is not limited to this. The base material 10 before cutting out can also be chemically strengthened, and then the plate-shaped member 100 can be cut out from the chemically strengthened base material 10.

[0076] (Manufacturing process)

[0077] Next, the process of this manufacturing method will be explained. Figure 6 This is a flowchart illustrating the manufacturing process of the plate-shaped component according to this embodiment.

[0078] like Figure 6 As shown, in this manufacturing method, a base material 10 is prepared, and a laser L is irradiated on the surface 10A of the base material 10 along a first trajectory T1 to form a plurality of openings H1 arranged along the first trajectory T1 (step S10).

[0079] Then, laser L is irradiated on the surface 10A of the base material 10 along a second trajectory T2 that is continuous with the first trajectory T1, forming a plurality of openings H2 arranged along the second trajectory T2 (step S12).

[0080] It should be noted that when a first trajectory T1 exists continuously with the second trajectory T2, an opening H1 is formed along the first trajectory T1. That is, in this embodiment, openings H1 and H2 are formed along trajectory T in the order of first trajectory T1, second trajectory T2, first trajectory T1... It should be noted that the execution order of steps S10 and S12 can be arbitrary; for example, openings H1 and H2 can be formed in the order of second trajectory T2, first trajectory T1, second trajectory T2... Alternatively, as described above, processing can be performed without following a continuous trajectory T, and instead, opening H1 of the first trajectory T1 and opening H2 of the second trajectory T2 can be formed separately.

[0081] Then, in this manufacturing method, the base material 10 is fractured starting from the openings H1 and H2 of the first trajectory T1 and the second trajectory T2, and the plate-shaped member 100 is cut out (step S14). Thus, the plate-shaped member 100 is manufactured, but for example, the plate-shaped member 100 cut from the base material 10 may also be chemically strengthened.

[0082] (Plate-shaped component)

[0083] The characteristics of the plate-shaped member 100 will be described below. The plate-shaped member 100 described below is manufactured by the manufacturing method described above, but the manufacturing method can be arbitrary as long as it has the characteristics described below.

[0084] like Figure 5 As shown, the plate-shaped member 100 includes a surface 100A as one main surface and a surface 100B as another main surface. That is, the area cut out by the plate-shaped member 100 from the surface 10A of the base material 10 becomes the surface 100A of the plate-shaped member 100, and the area cut out by the plate-shaped member 100 from the surface 10B of the base material 10 becomes the surface 100B of the plate-shaped member 100. In addition, the plate-shaped member 100 includes a first end face 101 as an end face formed by fracture along a first trajectory T1 and a second end face 102 as an end face formed by fracture along a second trajectory T2.

[0085] The thickness of the plate-like member 100, i.e., the distance in the Z direction from surface 100A to surface 100B, can be the same as the thickness D of the base material 10. Furthermore, in Figure 5 In the example, the plate member 100 is flat, but it is not limited to this; it can also be a bent flat plate. That is, the surfaces 100A and 100B of the plate member 100 can also be curved surfaces that convex in the Z direction.

[0086] When the surfaces 100A and 100B of the plate-shaped member 100 are curved surfaces convex in the Z direction, the radius of curvature of the surfaces 100A and 100B is preferably 10,000 mm or less, more preferably 5,000 mm or less, and even more preferably 3,000 mm or less. When the surfaces 100A and 100B of the plate-shaped member 100 are curved surfaces convex in the Z direction, the radius of curvature of the surfaces 100A and 100B is preferably 10 mm or more, more preferably 50 mm or more, even more preferably 100 mm or more, and particularly preferably 200 mm or more.

[0087] (First end face)

[0088] The first end face 101 of the plate-shaped member 100 is a cross-section formed by fracturing the base material 10 along the first trajectory T1. Therefore, at least a portion of the opening H1 formed in the base material 10 remains as a damage portion HA1 on the first end face 101. The damage portion HA1 is a part of the opening H1 formed by irradiation by the laser L, and can be considered a linear damage portion as an irradiation trace (laser trace) of the laser L. That is, a linear damage portion HA1 extending in the Z direction (axial direction) is formed on the first end face 101. Multiple damage portions HA1 are formed on the first end face 101 along the circumferential direction (i.e., along the first trajectory T1) with the Z direction as the axial direction.

[0089] Here, the radius of curvature of the line connecting the centers of each damaged section HA1 (corresponding to the first trajectory T1) when viewed from the Z direction is set as the radius of curvature RA1 of the first end face 101 when viewed from the Z direction. The radius of curvature RA1 of the first end face 101 corresponds to the radius of curvature R1 of the first trajectory T1, and is 100 mm or more, preferably 1000 mm or more, and more preferably 2500 mm or more. The upper limit of the radius of curvature RA1 of the first end face 101 is not particularly limited, for example, it can be on a straight line.

[0090] It should be noted that the center of the damaged part HA1 refers to the midpoint between end HA1a and end HA1b on surface 100A when the end of the damaged part HA1 on one side of the first end face 101 (i.e., along the direction of the first trajectory T1) is designated as end HA1a and the end of the damaged part HA1 on the other side is designated as end HA1b. In other words, it can be said to be the midpoint of the width ΔH1 described later.

[0091] The width ΔH1 of the damaged portion HA1 when viewed from the Z direction is preferably 20 μm or less, more preferably 10 μm or less, and even more preferably 5 μm or less. It should be noted that the distance from end point HA1a to end point HA1b on surface 100A is defined as the width ΔH1 of the damaged portion HA1.

[0092] Furthermore, the distance between the center of the damaged portion HA1 when viewed from the Z direction and the center of the damaged portion HA1 adjacent to it is defined as the spacing PA1. Spacing PA1 corresponds to the irradiation spacing P1 and is 9 μm or less. In this embodiment, spacing PA1 is preferably 6 μm or more, more preferably more than 7 μm. Spacing PA1 is preferably 8 μm or less.

[0093] Furthermore, the width ΔH1 of the spacing PA1 relative to the damaged portion HA1 is preferably 600% or less, more preferably 400% to 600%, and even more preferably 450% to 550%.

[0094] The spacing PA1 is such that the plate-shaped member 100 within this range suppresses the formation of cracks (excluding the damaged portion HA1) on the first end face 101.

[0095] It should be noted that the spacing PA1 can refer to the average of the spacing PA1 of 10 arbitrarily selected pairs of adjacent damage sections HA1 on each trajectory.

[0096] (Second end face)

[0097] The second end face 102 is a continuous (connected to) end face 101. The second end face 102 is a cross-section formed by fracturing the base material 10 along the second trajectory T2. Therefore, at least a portion of the opening H2 formed in the base material 10 remains as a damaged portion HA2 on the second end face 102.

[0098] The damage portion HA2 is part of the opening H2 formed by the irradiation of the laser L, and can be described as a linear damage portion as the irradiation trace (laser trace) of the laser L. That is, a linear damage portion HA2 extending in the Z direction (axial direction) is formed on the second end face 102. On the second end face 102, multiple damage portions HA2 are formed in the circumferential direction with the Z direction as the axial direction (i.e., along the second trajectory T2).

[0099] Here, the radius of curvature of the line connecting the centers of each damaged portion HA2 (corresponding to the second trajectory T2) when viewed from the Z direction is set as the radius of curvature RA2 of the second end face 102 when viewed from the Z direction. The radius of curvature RA2 of the second end face 102 corresponds to the radius of curvature R2 of the second trajectory T2, and is less than 100 mm, preferably less than 10 mm, and more preferably less than 5 mm. The radius of curvature RA2 of the second end face 102 is preferably 2 mm or more, and more preferably 3 mm or more.

[0100] Thus, the radius of curvature of the second end face 102 is smaller than that of the first end face 101, and it has an R shape. It should be noted that the center of the damaged part HA2 refers to the midpoint between end HA2a and end HA2b on surface 100A when the end of the damaged part HA2 on one side of the second end face 102 in the circumferential direction (i.e., along the direction of the second trajectory T2) is designated as end HA2a and the end of the damaged part HA2 on the other side is designated as end HA2b. In other words, it can be said to be the midpoint of the width ΔH2 described later.

[0101] The width ΔH2 of the damaged portion HA2 when viewed from the Z direction is the diameter D2 of the opening H2 (i.e., the diameter of the opening H2), preferably 20 μm or less, more preferably 10 μm or less, and even more preferably 5 μm or less. It should be noted that the distance from end HA2a to end HA2b on surface 100A is defined as the width ΔH2 of the damaged portion HA2.

[0102] Furthermore, the distance between the center of the damaged portion HA2 when viewed from the Z direction and the center of the damaged portion HA2 adjacent to it is defined as the spacing PA2. Spacing PA2 corresponds to the irradiation spacing P2 and is shorter than the spacing PA1 of the damaged portion HA1. Spacing PA2 is preferably 7 μm or less, more preferably 6 μm or less. Spacing PA2 is preferably 5 μm or more.

[0103] Furthermore, the width ΔH2 of the spacing PA2 relative to the damaged portion HA2 is preferably 450% or less, and more preferably 350% to 400%.

[0104] Furthermore, the radius of curvature RA2 of the spacing PA2 relative to the second end face 102 is preferably 2000% or less, more preferably 40% to 200%, and even more preferably 60% to 100%.

[0105] The spacing PA2 is such that the plate-like member 100 within this range suppresses the formation of cracks (cracks other than the damaged portion HA2) on the second end face 102.

[0106] It should be noted that the spacing PA2 can refer to the average of the spacing PA2 of 10 groups of adjacent pairs of damage HA2 arbitrarily selected on each trajectory.

[0107] Thus, the plate-shaped member 100 has a damaged portion HA1 formed on the first end face 101 and a damaged portion HA2 formed on the second end face 102. However, the damaged portions HA1 and HA2 can also be removed by grinding the first end face 101 and the second end face 102.

[0108] Preferably, the plate-shaped member 100 has no damage (cracks) other than the damaged portion HA1 on its first end face 101. In this embodiment, for example, a groove whose distance from the line connecting the centers of the damaged portions HA1 (corresponding to the first trajectory T1) to the bottom surface of the groove when viewed from the Z direction is 100 μm or more can be identified as a damage (crack) other than the damaged portion HA1 in the plate-shaped member of this embodiment.

[0109] Similarly, the plate-shaped member 100 preferably has no damage (cracks) other than the damage portion HA2 on its second end face 102. In this embodiment, a groove whose distance from the line connecting the centers of the damage portions HA2 (corresponding to the second trajectory T2) to the bottom surface of the groove when viewed from the Z direction is 100 μm or more can be identified as a damage portion (crack) other than the damage portion HA2 in the plate-shaped member of this embodiment.

[0110] (Materials for plate-shaped components)

[0111] The plate-shaped member 100 is a transparent plate-shaped member. The material of the plate-shaped member 100 is arbitrary, but glass is preferred. The plate-shaped member 100 can be amorphous glass or crystallized glass containing crystals on its surface and inside.

[0112] For example, alkali-free glass, soda-lime glass, soda-lime silicate glass, aluminosilicate glass, borosilicate glass, lithium aluminum silicate glass, borosilicate glass, etc., can be used as the plate-shaped member 100. For appropriate chemical strengthening, alkali glass is preferred as the material for the plate-shaped member 100.

[0113] Furthermore, aluminosilicate glass or lithium aluminosilicate glass is preferred as the plate-shaped component 100. This aluminosilicate glass or lithium aluminosilicate glass can easily incorporate large stresses through strengthening treatment even when thin, and can obtain high-strength glass even when thin. Chemically strengthened glass based on aluminosilicate glass (e.g., "Dragontrail" manufactured by AGC Corporation (registered trademark)) may also be used appropriately.

[0114] (Composition of glass)

[0115] The plate-shaped component 100 may contain 50% to 80% SiO2, 1% to 20% Al2O3 and 6% to 20% Na2O, based on the mole percentage of oxides.

[0116] In addition, the plate-shaped component 100 may contain 50-80% SiO2, 0.1-25% Al2O3, 3-30% Li2O+Na2O+K2O, 0-25% MgO, 0-25% CaO and 0-5% ZrO2, based on the mole percentage of oxides.

[0117] In addition, the plate-shaped component 100 may contain 50% to 80% SiO2, 1% to 20% Al2O3, 6% to 20% Na2O, 0% to 11% K2O, 0% to 15% MgO, 0% to 6% CaO and 0% to 5% ZrO2, based on the mole percentage of oxides.

[0118] It should be noted that the numerical range indicated by "~" refers to the range including the values ​​before and after "~" as lower and upper limits. For example, 50% to 80% here means 50% to 80% when the total molar percentage of the plate-like component 100 is set to 100%, and the same applies to other numerical ranges. Similarly, Li2O+Na2O+K2O refers to the total content of Li2O, Na2O, and K2O, and the same applies when "+" is used elsewhere.

[0119] More specifically, the following glass compositions are preferred compositions for the plate-shaped member 100. It should be noted, for example, that "containing 0% to 25% MgO" means that while MgO is not essential, it may be contained in no more than 25% of the plate.

[0120] (i) contains soda-lime silicate glass, (ii) and (iii) contain aluminosilicate glass, and (iv) and (v) contain lithium aluminosilicate glass.

[0121] (i) Glass comprising, in mole percent, 63%–73% SiO2, 0.1%–5.2% Al2O3, 10%–16% Na2O, 0%–1.5% K2O, 0%–5% Li2O, 5%–13% MgO and 4%–10% CaO.

[0122] (ii) Glass containing, in mole percent (%), 50%–74% SiO2, 1%–10% Al2O3, 6%–14% Na2O, 3%–11% K2O, 0%–5% Li2O, 2%–15% MgO, 0%–6% CaO, and 0%–5% ZrO2, wherein the total content of SiO2 and Al2O3 is less than 75%, the total content of Na2O and K2O is 12%–25%, and the total content of MgO and CaO is 7%–15%.

[0123] (iii) Glass containing, in mole percent, 68%–80% SiO2, 4%–10% Al2O3, 5%–15% Na2O, 0%–1% K2O, 0%–5% Li2O, 4%–15% MgO and 0%–1% ZrO2.

[0124] (iv) Glass containing, in mole percent, 67%–75% SiO2, 0%–4% Al2O3, 7%–15% Na2O, 1%–9% K2O, 0%–5% Li2O, 6%–14% MgO, and 0%–1.5% ZrO2, with a total SiO2 and Al2O3 content of 71%–75%, a total Na2O and K2O content of 12%–20%, and CaO content less than 1% when present.

[0125] (v) Glass containing, in mole percent, 56%–73% SiO2, 10%–24% Al2O3, 0%–6% B2O3, 0%–6% P2O5, 2%–7% Li2O, 3%–11% Na2O, 0%–5% K2O, 0%–8% MgO, 0%–2% CaO, 0%–5% SrO, 0%–5% BaO, 0%–5% ZnO, 0%–2% TiO2, and 0%–4% ZrO2.

[0126] (Compressive stress layer)

[0127] When the plate-shaped member 100 is chemically strengthened, it includes a compressive stress layer. The compressive stress layer is formed on the entire surface of the plate-shaped member 100, namely surface 100A, surface 100B, first end face 101 and second end face 102 in this invention.

[0128] It should be noted that the plate-shaped member 100 is not limited to having a compressive stress layer formed on all of the surfaces 100A, 100B, the first end face 101 and the second end face 102, but may also have a compressive stress layer formed on at least one of the surfaces 100A, 100B, the first end face 101 and the second end face 102 (preferably at least surface 100A).

[0129] Figure 7 This is a graph illustrating an example of stress distribution along the thickness of a plate-like member. The compressive stress layer is the layer within the plate-like member 100 where compressive stress exerts its effect. For example... Figure 7 As shown in the example, the plate member 100 is subjected to surface compressive stress S, which decreases as it moves toward the center of the thickness direction of the plate member.

[0130] exist Figure 7 In the example, the compressive stress layer can be considered as the portion of the entire plate member 100 extending from the surface to a depth where the stress is zero. It should be noted that tensile stresses act in layers deeper than the depth where the stress is zero within the plate member 100. Hereinafter, the compressive stress acting on the surface of the plate member 100, i.e., the surface of the compressive stress layer, will be referred to as the surface compressive stress CS.

[0131] The surface compressive stress CS of the plate-shaped member 100 is preferably 500 MPa to 1200 MPa, more preferably 650 MPa or more, and even more preferably 750 MPa or more. By keeping the surface compressive stress CS within this range, the reduction in impact resistance can be appropriately suppressed.

[0132] It should be noted that the method for measuring the surface compressive stress CS is arbitrary, but for example, it can be measured by using photoelastic analysis to determine the strain within the plate-shaped member 100. In this embodiment, for example, the surface compressive stress CS can be measured using a surface stress gauge FSM-6000LE manufactured by Orihara Corporation.

[0133] The depth DOL of the compressive stress layer of the plate member 100 is preferably 10 μm to 100 μm, more preferably 15 μm or more, even more preferably 25 μm or more, and particularly preferably 30 μm or more.

[0134] Depth DOL refers to the thickness of the compressive stress layer in the plate member 100. Specifically, depth DOL is the distance in the thickness direction from the surface of the plate member 100 where the surface compressive stress CS is applied to the depth where the compressive stress value is 0. By having depth DOL within this range, the plate member 100 can appropriately suppress the reduction in impact resistance.

[0135] It should be noted that the method for measuring depth DOL is arbitrary, but for example, it can be measured by using photoelastic analysis to determine the strain within the plate-like member 100. In this embodiment, for example, the surface stress gauge FSM-6000LE manufactured by Orihara Corporation can be used to measure depth DOL.

[0136] (Applications of plate-shaped components)

[0137] Figure 8 This is a schematic diagram illustrating the vehicle-mounted display of this embodiment. (As shown...) Figure 8 As shown, the plate-shaped member 100 of this embodiment is provided on the vehicle-mounted display 2 and is used as a covering material for the surface of the vehicle-mounted display.

[0138] The in-vehicle display 2 is a display device installed in a vehicle, for example, inside the vehicle, on the front side of the steering shaft 1. The in-vehicle display 2 displays, for example, the car navigation screen, various instruments such as the speedometer, and the start button, etc. However, Figure 8 Taking the configuration as an example, the vehicle-mounted display 2 using the plate-shaped member 100 can have any configuration. Furthermore, the plate-shaped member 100 is not limited to being used as a covering material for the surface of the vehicle-mounted display; it can be used for any purpose.

[0139] (Effect)

[0140] As explained above, the manufacturing method of this embodiment includes the following steps: irradiating the surface 10A of the base material 10 with a pulsed laser L along a first trajectory T1 having a radius of curvature of 100 mm or more, forming a plurality of openings H1 along the first trajectory T1; irradiating the surface 10A of the base material 10 with a laser L along a second trajectory T2 that is continuous with the first trajectory T1 and has a radius of curvature of less than 100 mm, forming a plurality of openings H2 along the second trajectory T2; and cutting the plate-shaped member 100 from the base material 10 by fracturing the base material 10 with the openings H1 and H2 along the first trajectory T1 and the second trajectory T2 as starting points. The irradiation spacing P1 of the laser L on the first trajectory T1 is 9 μm or less, and the irradiation spacing P2 of the laser L on the second trajectory T2 is shorter than the irradiation spacing P1.

[0141] Generally, when the base material 10 is fractured starting from the opening to cut out the plate-shaped member 100, cracks other than the opening may sometimes occur at the fracture cross-section. In contrast, in this embodiment, by setting the irradiation spacing P1 of the first trajectory T1 to 9 μm or less, cracks can be suppressed at the first end face 101 (cross-section) of the plate-shaped member 100 corresponding to the first trajectory T1.

[0142] Furthermore, the inventors discovered that during fracture, stress concentrates on the curved second trajectory T2, thus increasing the risk of crack formation on the second end face 102 corresponding to the second trajectory T2. In contrast, in this embodiment, by making the irradiation spacing P2 of the second trajectory T2 shorter than the irradiation spacing P1 of the first trajectory T1, crack formation on the second end face 102 can be suppressed. Thus, in this embodiment, when the base material 10 fractures along the first trajectory T1 and the second trajectory T2, crack formation can be suppressed by designing the irradiation spacings P1 and P2.

[0143] The base material 10 is preferably glass, and more preferably alkali glass. By using glass as the base material 10, it is possible to manufacture a glass plate member 100 appropriately, and by using alkali glass as the base material 10, it is possible to chemically strengthen the plate member 100 appropriately.

[0144] The irradiation spacing P1 of the laser L on the first trajectory T1 is preferably 120% to 180% of the laser spot diameter DL, and the irradiation spacing P2 of the laser L on the second trajectory T2 is preferably 140% or less of the laser spot diameter DL. By setting the irradiation spacings P1 and P2 to this range, crack initiation can be more appropriately suppressed.

[0145] The irradiation spacing P2 of the laser L on the second trajectory T2 is preferably 7 μm or less. By setting the irradiation spacing P2 to this range, the generation of cracks on the second end face 102 can be more appropriately suppressed.

[0146] The radius of curvature of the first trajectory T1 is preferably 1000 mm or more, and the radius of curvature of the second trajectory T2 is preferably 2 mm to 10 mm. According to this embodiment, when the base material 10 fractures along such trajectories, crack initiation can be appropriately suppressed.

[0147] The surface 10A of the base material 10 is preferably a curved surface with a radius of curvature of 10,000 mm or less. Such a curved base material 10 may sometimes have a higher risk of cracking upon fracture, but by setting the irradiation spacing P1 and P2 as in this embodiment, crack formation can be appropriately suppressed.

[0148] The plate-shaped member 100 is preferably used as a covering material for an in-vehicle display device. According to this embodiment, the generation of cracks can be appropriately suppressed in the plate-shaped member 100 provided on the in-vehicle display device.

[0149] The plate-shaped member 100 of this embodiment has a first end face 101 with a radius of curvature of 100 mm or more when viewed from the Z direction (thickness direction) and a second end face 102 connected to the first end face 101 and with a radius of curvature of less than 100 mm when viewed from the Z direction (thickness direction).

[0150] On the first end face 101, a plurality of linear damage portions HA1 extending along the thickness direction (Z direction) of the plate-like member 100 are formed at a spacing PA1 of 9 μm or less. On the second end face 102, a plurality of linear damage portions HA2 extending along the thickness direction of the plate-like member 100 are formed at a spacing PA2 shorter than the spacing PA1 of the damage portions HA1. In this embodiment, the spacing PA1 of the damage portions HA1 on the first end face 101 is 9 μm or less, and the spacing PA2 of the damage portions HA2 on the second end face 102 is shorter than the spacing PA1, thus crack initiation is suppressed.

[0151] Damage portions HA1 and HA2 are preferably laser marks. In this embodiment, the spacing PA1 of the laser marks on the first end face 101 is less than 9 μm, and the spacing PA2 of the laser marks on the second end face 102 is shorter than the spacing PA1, thus suppressing the generation of cracks.

[0152] The plate-shaped member 100 is preferably glass, and more preferably has a compressive stress layer on its surface. By using glass for the plate-shaped member 100, it can be used for various applications, and the compressive stress layer on its surface can improve its strength.

[0153] The spacing PA1 of the damaged portion HA1 on the first end face 101 is preferably 600% or less of the width ΔH1 of the damaged portion HA1 on the first end face 101, and the spacing PA2 of the damaged portion HA2 on the second end face 102 is preferably 450% or less of the width ΔH2 of the damaged portion HA2 on the second end face 102. By setting the spacings PA1 and PA2 to this range, crack initiation can be more appropriately suppressed.

[0154] The spacing PA2 of the damaged portion HA2 on the second end face 102 is preferably 7 μm or less. By setting the spacing PA2 to this range, the generation of cracks on the second end face 102 can be more appropriately suppressed.

[0155] The radius of curvature of the first end face 101 when viewed from the Z direction (thickness direction) is preferably 1000 mm or more, and the radius of curvature of the second end face 102 when viewed from the Z direction (thickness direction) is preferably 2 mm to 10 mm. According to this embodiment, when manufacturing a plate-shaped member 100 of this shape, crack generation can be appropriately suppressed.

[0156] The surface 100A of the plate member 100 is preferably a curved surface with a radius of curvature of 10,000 mm or less. Such a curved plate member 100 sometimes has a higher risk of cracking during manufacturing, but by setting the spacing PA1 and PA2 as in this embodiment, cracking can be appropriately suppressed.

[0157] The plate-shaped member 100 is preferably used as a covering material for an in-vehicle display device. According to this embodiment, the plate-shaped member 100 provided on the in-vehicle display device can appropriately suppress the generation of cracks.

[0158] As explained above, the following matters are disclosed in this specification.

[0159] [1] A method for manufacturing a plate-shaped component, comprising the following steps:

[0160] By irradiating the surface of the base material with a pulsed laser along a first trajectory with a radius of curvature of 100 mm or more, a plurality of openings along the first trajectory are formed on the surface of the base material.

[0161] By irradiating the surface of the base material with a laser along a second trajectory that is continuous with the first trajectory and has a radius of curvature of less than 100 mm, a plurality of openings along the second trajectory are formed on the surface of the base material; and

[0162] By fracturing the parent material starting from the opening along the first and second trajectories described above, a plate-shaped member is cut out from the parent material.

[0163] The irradiation spacing of the laser on the first trajectory is less than 9 μm, and the irradiation spacing of the laser on the second trajectory is shorter than the irradiation spacing of the laser on the first trajectory.

[0164] [2] The manufacturing method of the plate-shaped component according to [1], wherein the base material is glass.

[0165] [3] The manufacturing method of the plate-shaped component according to [2], wherein the base material is alkali glass.

[0166] [4] The method for manufacturing a plate-shaped member according to any one of [1] to [3], wherein the irradiation spacing of the laser on the first trajectory is 120% to 180% of the laser spot diameter, and the irradiation spacing of the laser on the second trajectory is 140% or less of the laser spot diameter.

[0167] [5] The method for manufacturing a plate-shaped member according to any one of [1] to [4], wherein the irradiation spacing of the laser on the second trajectory is 7 μm or less.

[0168] [6] The method for manufacturing a plate-shaped member according to any one of [1] to [5], wherein the irradiation spacing of the laser on the second trajectory is 5 μm or more.

[0169] [7] The method for manufacturing a plate-shaped member according to any one of [1] to [6], wherein the radius of curvature of the first trajectory is 1000 mm or more, and the radius of curvature of the second trajectory is 2 mm to 10 mm.

[0170] [8] A method for manufacturing a plate-shaped member according to any one of [1] to [6], wherein the surface of the base material is a curved surface with a radius of curvature of 10,000 mm or less.

[0171] [9] A plate-shaped member having a first end face with a radius of curvature of 100 mm or more when viewed from the thickness direction, and a second end face connected to the first end face and having a radius of curvature of less than 100 mm when viewed from the thickness direction, wherein,

[0172] Multiple linear damage portions extending along the thickness direction of the plate-shaped member are formed on the first end face at intervals of 9 μm or less.

[0173] On the second end face, a plurality of linear damage portions extending along the thickness direction of the plate-shaped member are formed at a spacing shorter than that of the damage portions on the first end face.

[0174]

[10] The plate-shaped member according to [9], wherein the plate-shaped member is glass.

[0175]

[11] According to

[10] , the plate-shaped member has a compressive stress layer on its surface.

[0176]

[12] The plate-shaped member according to any one of [9] to

[11] , wherein the spacing of the damaged portions of the first end face is 600% or less relative to the width of the damaged portions of the first end face, and the spacing of the damaged portions of the second end face is 450% or less relative to the width of the damaged portions of the second end face.

[0177]

[13] The plate-shaped member according to any one of [9] to

[12] , wherein the spacing of the damaged portions on the second end face is 7 μm or less.

[0178]

[14] The plate-shaped member according to any one of [9] to

[13] , wherein the radius of curvature of the first end face when viewed from the thickness direction is 1000 mm or more, and the radius of curvature of the second end face when viewed from the thickness direction is 2 mm to 10 mm.

[0179]

[15] The plate-shaped member according to any one of [9] to

[14] , wherein the surface of the plate-shaped member is a curved surface with a radius of curvature of 10,000 mm or less.

[0180]

[16] The plate-shaped member according to any one of [9] to

[15] is used as a covering material for a vehicle-mounted display device.

[0181] Example

[0182] The present invention will be specifically described below with reference to examples, but the present invention is not limited thereto. It should be noted that Examples 1 to 4 and Example 7 are examples, and Examples 5 and 6 are comparative examples.

[0183] (Example 1)

[0184] Next, the embodiments will be described. Figure 9 This is a schematic diagram illustrating the cutting trajectory of the base material in an embodiment. In Example 1, a base material with a length of 50 mm, a width of 50 mm, and a thickness of 1.3 mm is prepared. Dragontrail (registered trademark) manufactured by AGC Corporation is used as the base material.

[0185] like Figure 9 As shown in Example 1, a laser trajectory is defined for irradiating the surface of the base material with a longitudinal length LX of 30 mm, a transverse width WX of 30 mm, and a radius of curvature RX of the R portion, which is a plate-shaped member cut from the base material. This trajectory consists of a first trajectory T1AX extending laterally, a first trajectory T1BX extending longitudinally, and a second trajectory T2X forming the R portion connecting the first trajectories T1AX and T1BX. Specifically, the first trajectories T1AX and T1BX are straight lines, and the second trajectory T2X is a curve with a radius of curvature RX of 3 mm.

[0186] In Example 1, a pulsed laser is irradiated along a predetermined trajectory, forming multiple openings along the trajectory. The device and irradiation conditions for the pulsed laser are as follows.

[0187] Device: StarPico3 manufactured by Rofin

[0188] Irradiation conditions:

[0189] Wavelength: 1064nm

[0190] • Pulse width: <10ps

[0191] Output: 35W

[0192] • Frequency: 75kHz

[0193] • Pulse count: 4

[0194] • Spot diameter: 5μm

[0195] • Irradiation spacing on the first trajectory: 8μm

[0196] • Irradiation spacing on the second trajectory: 5μm

[0197] For a base material with an opening formed by laser irradiation under the above conditions, irradiation with a CO2 laser causes the base material to fracture along a trajectory, cutting out a plate-shaped component. The CO2 laser irradiation device and irradiation conditions are as follows.

[0198] Device: Rofin SR15i

[0199] • Pulse width: 20μs

[0200] • Pulse period: 200μs

[0201] • Spot diameter: 3mm

[0202] • Scanning speed: 60mm / s

[0203] It should be noted that in Examples 2 to 7 described later, when the base material did not break along the trajectory even when irradiated with a CO2 laser, a bending load was applied by hand to cause the base material to break along the trajectory, and a plate-shaped component was cut out.

[0204] (Example 2~Example 7)

[0205] In Example 2, the irradiation spacing of the pulsed laser on the second trajectory is set to 7 μm. Otherwise, the plate-shaped component is obtained in the same way as in Example 1.

[0206] In Example 3, the radius of curvature RX of the second trajectory T2X is set to 2mm. Otherwise, the plate-shaped member is obtained in the same way as in Example 1.

[0207] In Example 4, the irradiation spacing of the pulsed laser on the first trajectories T1AX and T1BX is set to 9μm. Otherwise, the plate-shaped component is obtained in the same way as in Example 1.

[0208] In Example 5, the irradiation spacing of the pulsed laser on the second trajectory is set to 8 μm, and the plate-shaped component is otherwise obtained in the same way as in Example 1.

[0209] In Example 6, the irradiation spacing of the pulsed laser on the first trajectories T1AX and T1BX is set to 10μm. Otherwise, the plate-shaped component is obtained in the same way as in Example 1.

[0210] In Example 7, Dragontrail (registered trademark) manufactured by AGC with a thickness of 2.0 mm was used as the base material. The base material was shaped by bending with a radius of curvature of 1800 mm along the short side as the bending axis. A plate-shaped component was cut from the base material by setting the first trajectory T1AX and T1BX as straight lines and the second trajectory T2X as a curved trajectory with a radius of curvature RX of 10 mm. The irradiation spacing of the pulsed laser on the first trajectory was set to 7 μm, and the irradiation spacing of the pulsed laser on the second trajectory was set to 5 μm. The other pulsed laser devices and irradiation conditions, as well as the CO2 laser devices and irradiation conditions, were the same as in Example 1.

[0211] (evaluate)

[0212] Table 1 shows the evaluation results for each example.

[0213] [Table 1]

[0214]

[0215] The method of cutting the plate-shaped components in each example is evaluated based on whether they can be cut using a CO2 laser. As shown in Table 1, if the plate-shaped components can be cut using a CO2 laser, it is recorded as CO2; if the plate-shaped components cannot be cut using a CO2 laser and are cut by hand, it is recorded as hand.

[0216] The cracks on the end faces (fracture surfaces) of the plate-like members in each example were also evaluated. Figure 10 This is a schematic diagram illustrating the method for determining cracks. (For example...) Figure 10 As shown, for each example of plate member 100X, the height C of the crack on the end face (fracture surface) when viewed from the main face is measured.

[0217] Specifically, using a digital microscope (Keyence VHX-6000), the first end face (fracture surface along the first trajectory T1AX, T1BX) and the second end face (fracture surface along the second trajectory T2X) are observed from a direction perpendicular to the main surface to visually confirm the presence of cracks (fractures). If cracks are present, the height C of the crack is measured.

[0218] Here, the distance C from the bottom surface of the crack to the line CLX connecting the centers of the damaged portions HAX corresponding to the openings formed in the base material is measured. Additionally, if there is a portion protruding from the line CLX, it is also identified as a crack, and the distance C from the line CLX to the tip of the protrusion is taken as the crack height.

[0219] Then, the maximum height C on the first trajectory T1AX, T1BX and the second trajectory T2X is calculated as the maximum crack.

[0220] For each case, an evaluation of A is given if the maximum crack is less than 100 μm and a plate-shaped component can be cut using a CO2 laser; an evaluation of B is given if the maximum crack is less than 100 μm and a plate-shaped component cannot be cut using a CO2 laser but can be cut by hand; and an evaluation of NG is given if the maximum crack is greater than 100 μm or a plate-shaped component cannot be cut using either a CO2 laser or by hand. Evaluations A and B are considered acceptable, while evaluation NG is considered unacceptable.

[0221] As shown in Table 1, in Examples 1 to 4, it can be seen that by setting the irradiation spacing of the first trajectory to 9 μm or less and making the irradiation spacing of the second trajectory shorter than that of the first trajectory, achieving an evaluation of A or B, crack generation can be suppressed. Furthermore, in Example 7, it can be seen that even with a curved surface shape where the radius of curvature of the base material is 10000 mm or less, crack generation can be suppressed using the above conditions.

[0222] On the other hand, in Comparative Example 5, it was found that the irradiation spacing of the second trajectory was not shorter than that of the first trajectory, and therefore could not suppress crack initiation. Furthermore, in Comparative Example 6, it was found that the irradiation spacing of the first trajectory exceeded 9 μm, and therefore could not suppress crack initiation.

[0223] The embodiments of the present invention have been described above, but are not intended to limit the scope of the embodiments. Furthermore, the aforementioned constituent elements include elements readily conceived by those skilled in the art, substantially identical elements, and elements of equal scope. Furthermore, the aforementioned constituent elements can be appropriately combined. Furthermore, various omissions, substitutions, or modifications of the constituent elements can be made without departing from the spirit of the aforementioned embodiments. This application is based on Japanese Patent Application No. 2021-100357, filed on June 16, 2021, the contents of which are incorporated herein by reference.

[0224] Symbol Explanation

[0225] 10. Base Material

[0226] 10A and 10B surfaces

[0227] 100 Plate-shaped members

[0228] 101 First end face

[0229] 102 Second end face

[0230] H1 and H2 openings

[0231] Damage sites HA1 and HA2

[0232] L laser

[0233] Irradiation spacing between P1 and P2

[0234] PA1, PA2 spacing

[0235] T1 First Trajectory

[0236] T2 Second Trajectory

Claims

1. A method for manufacturing a plate-shaped component, comprising the following steps: By irradiating the surface of a base material with a thickness of 0.2 mm or more along a first trajectory with a radius of curvature of 100 mm or more with a pulsed laser, a plurality of openings are formed on the surface of the base material along the first trajectory; By irradiating the surface of the base material with the laser along a second trajectory that is continuous with the first trajectory and has a radius of curvature of less than 100 mm, a plurality of openings are formed on the surface of the base material along the second trajectory; as well as A plate-shaped member is cut from the parent material by fracturing the parent material starting from an opening along the first and second trajectories; The opening is a linear damaged section containing the modified portion. The irradiation spacing of the laser on the first trajectory is less than 9 μm, and the irradiation spacing of the laser on the second trajectory is shorter than the irradiation spacing of the laser on the first trajectory.

2. The method for manufacturing a plate-shaped component according to claim 1, wherein, The base material is glass.

3. The method for manufacturing a plate-shaped component according to claim 2, wherein, The base material is alkali glass.

4. The method for manufacturing a plate-shaped component according to claim 1, wherein, The irradiation spacing of the laser on the first trajectory is 120% to 180% of the laser spot diameter, and the irradiation spacing of the laser on the second trajectory is less than 140% of the laser spot diameter.

5. The method for manufacturing a plate-shaped member according to any one of claims 1 to 4, wherein, The irradiation spacing of the laser on the second trajectory is less than 7 μm.

6. A method for manufacturing a plate-shaped member according to any one of claims 1 to 4, wherein, The irradiation spacing of the laser on the second trajectory is 5 μm or more.

7. A method for manufacturing a plate-shaped member according to any one of claims 1 to 4, wherein, The radius of curvature of the first trajectory is greater than 1000 mm, and the radius of curvature of the second trajectory is 2 mm to 10 mm.

8. A method for manufacturing a plate-shaped member according to any one of claims 1 to 4, wherein, The surface of the base material is a curved surface with a radius of curvature of less than 10,000 mm.

9. A plate-shaped member having a first end face with a radius of curvature of 100 mm or more when viewed from the thickness direction, and a second end face connected to the first end face with a radius of curvature of less than 100 mm when viewed from the thickness direction, wherein, The thickness of the plate-shaped member is 0.2 mm or more. Multiple linear damage portions, each including a modified portion, are formed on the first end face at intervals of less than 9 μm, extending along the thickness direction of the plate-like member. On the second end face, a plurality of linear damage portions extending along the thickness direction of the plate-shaped member and including modified portions are formed at a spacing shorter than that of the damage portions on the first end face.

10. The plate-like member according to claim 9, wherein, The plate-shaped component is glass.

11. The plate-like member according to claim 10, wherein, The plate-shaped member has a compressive stress layer on its surface.

12. The plate-shaped member according to any one of claims 9 to 11, wherein, The spacing between the damaged portions on the first end face is less than 600% of the width of the damaged portion on the first end face, and the spacing between the damaged portions on the second end face is less than 450% of the width of the damaged portion on the second end face.

13. The plate-shaped member according to any one of claims 9 to 11, wherein, The spacing of the damaged portions on the second end face is less than 7 μm.

14. The plate-shaped member according to any one of claims 9 to 11, wherein, The radius of curvature of the first end face when viewed from the thickness direction is 1000 mm or more, and the radius of curvature of the second end face when viewed from the thickness direction is 2 mm to 10 mm.

15. The plate-shaped member according to any one of claims 9 to 11, wherein, The surface of the plate-shaped component is a curved surface with a radius of curvature of less than 10,000 mm.

16. The plate-shaped member according to any one of claims 9 to 11, which is used as a covering material for a vehicle-mounted display device.

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