A helium cryogenic system containing a cavity device and a method of gas loading

Abstract

This invention relates to a gas filling platform for cavity-containing devices in a helium cryogenic system, comprising an integrated gas filling device, a helium recovery system connected to the integrated gas filling device, the cavity-containing device in the helium cryogenic system, and a high-purity helium storage device. The integrated gas filling device includes a low-pressure pipeline for gas supply and internal leakage detection of pipeline valves, a high-pressure pipeline for external leakage detection of pipelines, an extraction pipeline for evacuating the cavity-containing device, and a detection pipeline for analyzing the purity of helium in the cavity-containing device. The low-pressure pipeline, high-pressure pipeline, and detection pipeline are arranged independently and in parallel, and all three are connected to the extraction pipeline. Furthermore, the low-pressure pipeline, high-pressure pipeline, extraction pipeline, and detection pipeline are integrated into a box-type mobile vehicle. This invention also relates to a gas filling method for cavity-containing devices in a helium cryogenic system. This invention combines the advantages of being mobile, recoverable, and capable of online detection, significantly improving on-site gas filling efficiency and system operational reliability.

Description

Technical Field

[0001] This invention relates to the field of helium cryogenic system technology, and more specifically to a gas filling platform and gas filling method for cavity-containing devices in a helium cryogenic system. Background Technology

[0002] The application of cryogenic superconducting technology is rapidly developing in advanced scientific research fields such as accelerators. The entire operating environment needs to be completely covered by a high-purity, ultra-low-temperature helium environment. This involves a large number of cryogenic devices, and with the long-term online high-load operation of these devices, the frequency of maintenance and repair increases. According to the standard operating procedures (SOP) for maintenance or repair, the equipment cavity will be in a punctured state or intruded by impurity gases. Therefore, it is necessary to purge with high-purity helium before putting the system online.

[0003] However, there are several factors that restrict the gas filling of cavity-containing equipment at the helium cryogenic plant site: 1) The gas filling pipeline is complicated, including oil-containing oil lines, high-purity helium gas lines, instrument gas lines, etc., which are easily affected by non-clean environments and have a shortened service life; 2) There are pressure pipelines under pressurization conditions, which can easily lead to safety hazards; 3) Due to the limited space of equipment and the fixed location of power supply facilities, the safety factor of gas filling operation is low; 4) At least two staff members are required to complete the on-site gas filling operation, and with the waiting time for filling and discharging, the entire gas filling process is inefficient. Summary of the Invention

[0004] To address the problems existing in the prior art, the present invention provides a gas filling platform and gas filling method for cavity-containing equipment in a helium cryogenic system, which has the advantages of being mobile, recyclable, and capable of online detection, and can significantly improve the efficiency of on-site gas filling and the reliability of system operation.

[0005] This invention provides a gas filling platform for a cavity-containing device in a helium cryogenic system, comprising an integrated gas filling device, a helium recovery system connected to the integrated gas filling device, a cavity-containing device in the helium cryogenic system, and a high-purity helium storage device; the integrated gas filling device includes a low-pressure pipeline for supplying gas to the integrated gas filling device and checking for internal leaks in pipeline valves, a high-pressure pipeline for checking for external leaks in pipelines, an extraction pipeline for evacuating the cavity-containing device, and a detection pipeline for analyzing the purity of helium in the cavity-containing device after gas filling; the low-pressure pipeline, the high-pressure pipeline, and the detection pipeline are arranged independently and in parallel, and all three are connected to the extraction pipeline, and are integrated into a box-type mobile vehicle.

[0006] Furthermore, the first end of the low-pressure pipeline is connected to the high-purity helium storage device, and the second end is connected to the extraction pipeline. Between the first and second ends of the low-pressure pipeline, a pressure reducing valve, a first pressure gauge, and a first manual ball valve are sequentially provided along the airflow direction.

[0007] Furthermore, the first end of the high-pressure pipeline is connected to the high-purity helium storage device, and the second end is connected to the extraction pipeline. A second pressure gauge and a first pressure regulating valve are sequentially provided between the first and second ends of the high-pressure pipeline along the airflow direction.

[0008] Furthermore, the first end of the evacuation pipeline is connected to the cavity-containing device, and the second end is connected to the helium recovery system. Between the first and second ends of the evacuation pipeline, a second manual ball valve, a remote evacuation valve, a vacuum gauge, a near-end evacuation valve, and a small vacuum pump are sequentially provided.

[0009] Furthermore, the output end of the miniature vacuum pump is equipped with a post-oil filter, and the output end of the miniature vacuum pump is connected to the helium recovery system via a corrugated hose.

[0010] Furthermore, the small vacuum pump is a rotary vane pump with a negative pressure suction port, and the exhaust pressure of the small vacuum pump meets the positive pressure operating conditions.

[0011] Furthermore, the pipeline between the second manual ball valve and the cavity-containing device is made of stainless steel bellows, and the interface is fastened and sealed with a matching KF vacuum connector.

[0012] Furthermore, the first end of the detection pipeline is connected to the gas extraction pipeline, and the second end is connected to the gas purity analyzer. A second pressure regulating valve and a third pressure gauge are sequentially provided between the first end and the second end of the detection pipeline.

[0013] Furthermore, the exterior of the box-type mobile vehicle is equipped with a detachable dust cover, which includes an instrument observation window, an external valve knob, a vacuum pump oil replacement port, a small axial fan and its heat dissipation mesh assembly, and four swivel casters are evenly distributed on the bottom of the box-type mobile vehicle.

[0014] Furthermore, the helium recovery system includes an airbag, a helium purification device, and a helium delivery corrugated hose disposed between the small vacuum pump and the airbag.

[0015] The present invention also provides a method for filling a cavity-containing device in a helium cryogenic system, comprising:

[0016] Step S1: Provide a gas-filling platform for the cavity-containing device in the above-mentioned helium cryogenic system, and mechanically fasten the integrated gas-filling device to the helium recovery system, the cavity-containing device, and the high-purity helium storage device.

[0017] Step S2: Check for external leaks through the high-pressure pipeline. If no external leaks are found, proceed to step S3; otherwise, locate and address the leak.

[0018] Step S3: Perform an internal leak check on the valve of the integrated gas-filling device. If there is no internal leak, proceed to step S4; otherwise, handle the valve leak.

[0019] Step S4: Implement the helium purging process for the gas filling platform of the cavity-containing equipment in the helium cryogenic system;

[0020] Step S5: Analyze the impurity gas content in the cavity through the detection pipeline. If the impurity gas content measured by the gas purity analyzer is ≤10ppm, proceed to step S6; otherwise, return to step S4.

[0021] Step S6: Implement the pressure holding process for the cavity-containing equipment, and the gas filling process ends.

[0022] Further, step S2 includes:

[0023] Step S21: Close the pressure reducing valve, the first manual ball valve, the second pressure regulating valve, and the remote evacuation valve, and open the first pressure regulating valve.

[0024] Step S22: High-pressure high-purity helium is introduced into the high-purity helium storage device and continued for a preset time until the pipeline pressure is balanced.

[0025] Step S23: Observe the second pressure gauge. If the pointer of the second pressure gauge does not fluctuate or the reading does not change, it is considered that there is no external leakage in the pipeline. The remaining high-pressure high-purity helium gas is returned to the high-purity helium gas storage device by setting a pressure difference.

[0026] Further, step S3 includes:

[0027] Step S31: Close the first pressure regulating valve, the second pressure regulating valve, the remote evacuation valve, and the second manual ball valve, and open the pressure reducing valve and the first manual ball valve;

[0028] Step S32: Introduce high-purity helium at atmospheric pressure into the high-purity helium storage device.

[0029] Step S32: Turn on the small vacuum pump and open the near-end evacuation valve until the pressure display on the vacuum gauge stabilizes.

[0030] Step S33: Observe the vacuum gauge. If the reading of the vacuum gauge does not change or fluctuates by ≤1%, the valve is considered to have no internal leakage.

[0031] Further, step S4 includes:

[0032] Step S41: Open the small vacuum pump, the near-end evacuation valve, the far-end evacuation valve, and the second manual ball valve, while keeping the other valves closed;

[0033] Step S42: Observe the vacuum gauge. When the pressure shown by the vacuum gauge is lower than the preset value, close the proximal evacuation valve and the second manual ball valve, open the pressure reducing valve and the first manual ball valve, and adjust the gas supply pressure to a slightly positive pressure by real-time monitoring through the first pressure gauge.

[0034] Step S43: Slowly open the second manual ball valve until the pressure indicated by the vacuum gauge stabilizes at a slightly positive pressure level, then close the first manual valve;

[0035] Step S44: Connect the output end of the small vacuum pump to the helium recovery system, and repeat steps S41 to S43 three to four times.

[0036] Further, step S6 includes:

[0037] Step S61: Open the pressure reducing valve, the first manual ball valve, and the remote evacuation valve, and close the remaining valves;

[0038] Step S62: Slowly open the second manual ball valve until the vacuum gauge displays a slight positive pressure level;

[0039] Step S63: Close all valves and the small vacuum pump; the gas filling process is now complete.

[0040] This invention provides a gas-filling platform and method for cavity-containing equipment in a helium cryogenic system, which has the following beneficial effects:

[0041] 1) This invention can ensure the efficient implementation of maintenance post-gas transfer for various helium circulating power equipment in helium cryogenic systems;

[0042] 2) This invention organically integrates the user interface with the instrument display, making human-computer interaction more convenient;

[0043] 3) This invention encapsulates the core body inside the box, which can isolate external damage, reduce the risk of contamination, and extend the service life of the platform;

[0044] 4) This invention has the advantages of being mobile, recyclable, and capable of online detection, which can improve the efficiency of on-site gas placement, safety factor, and system operation reliability. Attached Figure Description

[0045] Figure 1 This is a structural block diagram of the gas-filling platform of the cavity device in the helium cryogenic system according to the present invention.

[0046] Figure 2 This is a flowchart of the gas filling method for cavity-containing devices in the helium cryogenic system according to the present invention. Detailed Implementation

[0047] The preferred embodiments of the present invention are given below with reference to the accompanying drawings and described in detail.

[0048] like Figure 1 As shown, the gas-filling platform for a cavity-containing device in a helium cryogenic system provided by the present invention includes an integrated gas-filling device 100, a helium recovery system 200 connected to the integrated gas-filling device 100, a cavity-containing device 300 in the helium cryogenic system, and a high-purity helium storage device 400. The helium recovery system 200 is used to collect impure helium discharged from the integrated gas-filling device 100, and the high-purity helium storage device 400 is used to supply helium to the integrated gas-filling device 100.

[0049] The integrated gas filling device 100 includes a low-pressure pipeline 120 for supplying gas to the integrated gas filling device 100 and for checking internal leaks in pipeline valves; a high-pressure pipeline 130 for checking external leaks in pipelines; an extraction pipeline 140 for evacuating the cavity-containing device 300; and a detection pipeline 150 for analyzing the purity of helium in the cavity-containing device 300 after gas filling. The low-pressure pipeline 120, high-pressure pipeline 130, and detection pipeline 150 are arranged independently and in parallel, and all three are connected to the extraction pipeline 140. Furthermore, the low-pressure pipeline 120, high-pressure pipeline 130, extraction pipeline 140, and detection pipeline 150 are integrated within a box-type mobile vehicle 110, thus forming the integrated gas filling device 100.

[0050] The first end of the low-pressure pipeline 120 is connected to the high-purity helium storage device 400, and the second end is connected to the extraction pipeline 140. A pressure reducing valve 121, a first pressure gauge 122, and a first manual ball valve 123 are sequentially installed between the first and second ends of the low-pressure pipeline 120 along the airflow direction. The pressure reducing valve 121 is used to regulate the gas supply pressure of the low-pressure pipeline 120. The first pressure gauge 122, with a range of 0-10 bar, monitors the pressure in real time to ensure that the gas supply pressure of the low-pressure pipeline 120 is within the range of 1-1.5 bar. The first manual ball valve 123 is used to regulate the rate of gas filling through the low-pressure pipeline 120, ensuring that the filling time is not less than 2 minutes, thereby guaranteeing the safety of filling the cavity-containing device 300.

[0051] The first end of the high-pressure pipeline 130 is connected to the high-purity helium storage device 400, and the second end is connected to the extraction pipeline 140. A second pressure gauge 131 and a first pressure regulating valve 132 are sequentially installed between the first and second ends of the high-pressure pipeline 130 along the airflow direction.

[0052] The first end of the evacuation pipeline 140 is connected to the cavity-containing device 300, and the second end is connected to the helium recovery system 200. Between the first and second ends of the evacuation pipeline 140, a second manual ball valve 146, a remote evacuation valve 141, a vacuum gauge 142, a near-end evacuation valve 143, and a small vacuum pump 144 are sequentially arranged in the evacuation pipeline 140 according to the airflow direction to form the evacuation process in the gas filling stage. To reduce the oil content in the recovered helium, a post-oil filter 145 with a filtration accuracy of 1μm to 100μm is installed at the output end of the small vacuum pump 144. To avoid wasting helium resources during the gas filling process, the output end of the small vacuum pump 144 is connected to the helium recovery system 200 via a corrugated hose 210. It should be noted that the terms "remote end" and "near end" in this invention refer to the distance from the small vacuum pump 144.

[0053] The small vacuum pump 144 is a rotary vane pump with a negative pressure suction port, and its exhaust pressure meets the requirements for positive pressure operation. In this embodiment, a negative pressure rotary vane pump with a suction ultimate vacuum of 10 Pa to 100 Pa is selected, and the vacuum gauge 142 is matched with a measurement range covering 10 Pa. -4 bar~2 bar. The exhaust pressure of the small vacuum pump 144 is not less than 1.1 bar, so that the recovered helium flows down the pressure difference to the helium recovery system 200.

[0054] In addition, the pipeline between the second manual ball valve 146 and the cavity-containing device 300 is made of stainless steel bellows, and the interface is fastened and sealed with a matching KF vacuum connector. The specifications of the KF vacuum connector can be selected according to the gas filling interface of different cavity-containing devices 300, thereby increasing the versatility of the present invention.

[0055] The first end of the detection pipeline 150 is connected to the extraction pipeline 140, and the second end is connected to the gas purity analyzer 153. A second pressure regulating valve 151 and a third pressure gauge 152 are sequentially installed between the first and second ends of the detection pipeline 150. The second pressure regulating valve 151 and the third pressure gauge 152, with a range of 0~10 bar, are used to regulate the inflow stability during online detection by the gas purity analyzer 153. The gas purity analyzer 153 features real-time digital display and easy maintenance and replacement. It connects to the pipeline using a matching KF vacuum connector. Its nitrogen content measurement range is 0~100 ppm, and the sampling flow rate is 0.5~1.0 L / s. A result of impurity content less than 10 ppm from the gas purity analyzer 153 is designated as the criterion for ending the gas filling process, improving the operational reliability of the helium cryogenic system.

[0056] The aforementioned box-type mobile vehicle 110 integrates four pipelines, along with the vacuum pump, instruments, and valves installed on those pipelines, into a single internal unit, forming an integrated gas-filling device 100. Specifically, the box-type mobile vehicle 110 is equipped with a removable dust cover, which includes an instrument observation window, external valve knobs, a vacuum pump oil replacement port, a small axial fan, and its heat dissipation mesh assembly. Furthermore, the bottom of the box-type mobile vehicle 110 is evenly distributed with four swivel casters.

[0057] The aforementioned helium recovery system 200 includes an air bag, a helium purification device, and a helium delivery corrugated hose located between a small vacuum pump and the air bag.

[0058] The aforementioned cavity-containing equipment 300 includes helium circulating equipment such as helium room temperature compressors and helium room temperature pump sets in helium cryogenic systems that need to be taken offline from the system and periodically punctured for maintenance.

[0059] This invention also provides a method for filling cavity-containing devices in a helium cryogenic system, such as... Figure 2 As shown, the method includes the following steps:

[0060] Step S1: Provide a gas-filling platform for the cavity-containing device in the above-mentioned helium cryogenic system, and mechanically fasten the integrated gas-filling device 100 to the helium recovery system 200, the cavity-containing device 300, and the high-purity helium storage device 400. The process begins.

[0061] Step S2 involves checking for external leaks via high-pressure pipeline 130. If no external leak is found, proceed to step S3; otherwise, locate and address the leak. Specifically, step S2 includes:

[0062] Step S21: Close the pressure reducing valve 121, the first manual ball valve 123, the second pressure regulating valve 151, and the remote evacuation valve 141, and open the first pressure regulating valve 132.

[0063] Step S22: High-pressure high-purity helium gas at 20 bar is introduced into the high-purity helium storage device 400 and continued for a period of time (e.g., 15 min) until the pipeline pressure is balanced.

[0064] Step S23: Observe the second pressure gauge 131. If the pointer of the second pressure gauge 131 does not fluctuate or the reading does not change, it is considered that there is no external leakage in the pipeline. The remaining high-pressure high-purity helium in the internal pipeline is returned to the high-purity helium storage device 400 by setting a pressure difference.

[0065] Step S3: Perform an internal leak check on the valves of the integrated gas-generating device 100. If there is no internal leak, proceed to step S4; otherwise, perform valve leak repair. Specifically, step S3 includes:

[0066] Step S31: Close the first pressure regulating valve 132, the second pressure regulating valve 151, the remote evacuation valve 141, and the second manual ball valve 153, and open the pressure reducing valve 121 and the first manual ball valve 123.

[0067] Step S32: High-purity helium gas at atmospheric pressure (1 bar) is introduced into the high-purity helium storage device 400.

[0068] Step S32: Turn on the small vacuum pump 144 and open the near-end evacuation valve 143 until the pressure display on the vacuum gauge 142 stabilizes.

[0069] Step S33: Observe vacuum gauge 142. If the reading of vacuum gauge 142 does not change or fluctuates by ≤1%, it is considered that the valve has no internal leakage.

[0070] Step S4 involves implementing the helium purging process for the gas-filling platform of the cavity-containing equipment in the helium cryogenic system. Specifically, step S4 includes:

[0071] Step S41: Open the small vacuum pump 144, the near-end evacuation valve 143, the far-end evacuation valve 141, and the second manual ball valve 146, while keeping the other valves closed.

[0072] Step S42: Observe the vacuum gauge 142. When the pressure shown by the vacuum gauge 142 is lower than the preset value of 100Pa, close the proximal evacuation valve 143 and the second manual ball valve 146, open the pressure reducing valve 121 and the first manual ball valve 123, and use the first pressure gauge 122 to detect in real time to adjust the gas supply pressure to a slightly positive pressure of 1.2bar.

[0073] Step S43: Slowly open the second manual ball valve 146 until the pressure shown by the vacuum gauge 142 stabilizes at a slightly positive pressure level of 1.1 ± 0.05 bar, then close the first manual valve 123.

[0074] Step S44: Connect the output of the small vacuum pump 144 to the helium recovery system 200, and repeat steps S41 to S43 three to four times.

[0075] Step S5: Analyze the content of impurity gas in the cavity through the detection pipeline 150. Specifically, open the second pressure regulating valve 151, the gas purity analyzer 153, and the second manual ball valve 146, while keeping the other valves closed; if the impurity content measured by the gas purity analyzer 153 is ≤ a preset value (e.g., 10 ppm), proceed to step S6; otherwise, return to step S4.

[0076] Step S6 involves performing the pressure-holding process for the cavity-containing device 300, ending the gas filling process. Specifically, step S6 includes:

[0077] Step S61: Open pressure reducing valve 121, first manual ball valve 123 and remote evacuation valve 141, and close the remaining valves.

[0078] Step S62: Slowly open the second manual ball valve 146 until the vacuum gauge 142 displays a slight positive pressure level of 1.1 ± 0.05 bar.

[0079] Step S63: Close all valves and the small vacuum pump 144. The gas filling process is now complete.

[0080] The gas filling platform and method for cavity-containing equipment in helium cryogenic systems provided by this invention can better meet the gas filling needs of cavity-containing equipment in cryogenic plants and promote the intensive development of helium cryogenic system operation and management. This invention can assess the purity of helium gas inside the cavity of the cavity-containing helium equipment after filling, ensuring the reliability of the helium cryogenic system after it goes online, and provides a technical approach for gas filling of cavity-containing equipment that needs to be taken offline for maintenance in similar closed-loop high-purity circulation systems.

[0081] The above description is merely a preferred embodiment of the present invention and is not intended to limit the scope of the invention. Various variations can be made to the above embodiments of the present invention. That is, all simple and equivalent changes and modifications made based on the claims and description of this invention fall within the protection scope of the claims of this patent. All aspects not described in detail in this invention are conventional technical content.

Claims

1. A gassing platform for a cavi ted device in a helium cryogenic system, characterized by, The helium recovery system, the cavity-containing equipment in the helium cryogenic system, and the high-purity helium storage device are connected with the integrated gas placement device; the integrated gas placement device comprises a low-pressure pipeline for supplying gas to the integrated gas placement device and checking internal leakage of pipeline valves, a high-pressure pipeline for checking external leakage of pipelines, a gas extraction pipeline for evacuating the cavity-containing equipment, and a detection pipeline for analyzing the purity of helium in the cavity-containing equipment after gas placement; the low-pressure pipeline, the high-pressure pipeline, and the detection pipeline are independently arranged side by side, and the low-pressure pipeline, the high-pressure pipeline, and the detection pipeline are connected with the gas extraction pipeline, and the low-pressure pipeline, the high-pressure pipeline, the gas extraction pipeline, and the detection pipeline are integrated in a box-type mobile vehicle; a first end of the gas extraction pipeline is connected with the cavity-containing equipment, and a second end is connected with the helium recovery system, and a second manual ball valve, a distal end evacuation valve, a vacuum gauge, a proximal end evacuation valve, and a small vacuum pump are sequentially arranged between the first end and the second end of the gas extraction pipeline; a first end of the low-pressure pipeline is connected with the high-purity helium storage device, and a second end is connected with the gas extraction pipeline, and a pressure reducing valve, a first pressure gauge, and a first manual ball valve are sequentially arranged along the gas flow direction between the first end and the second end of the low-pressure pipeline; a first end of the high-pressure pipeline is connected with the high-purity helium storage device, and a second end is connected with the gas extraction pipeline, and a second pressure gauge and a first pressure stabilizing valve are sequentially arranged along the gas flow direction between the first end and the second end of the high-pressure pipeline; a first end of the detection pipeline is connected with the gas extraction pipeline, and a second end is connected with a gas purity analyzer, and a second pressure stabilizing valve and a third pressure gauge are sequentially arranged between the first end and the second end of the detection pipeline.

2. A gassing platform for a cavi ty containing device in a helium cryogenic system according to claim 1, characterized in that, An output end of the small vacuum pump is provided with a rear oil filter, and the rear oil filter of the output end of the small vacuum pump is connected with the helium recovery system through a corrugated hose.

3. A gassing platform for a cavi ty containing device in a helium cryogenic system according to claim 1, characterized in that, The small vacuum pump adopts a rotary vane pump with negative pressure performance at an air suction port, and the exhaust pressure of the small vacuum pump meets the positive pressure working condition.

4. The gassing platform of a cavi ty-containing device in a helium cryogenic system of claim 1, wherein, A pipeline between the second manual ball valve and the cavity-containing equipment adopts a stainless steel bellows, and an interface adopts a matched KF vacuum connector for fastening and sealing.

5. The gassing platform of a cavi ty-containing device in a helium cryogenic system of claim 1, wherein, The box-type mobile vehicle is externally provided with a detachable dust cover, the detachable dust cover is provided with an instrument observation window, valve external knobs, a vacuum pump oil replacement port, and a small axial flow fan and a heat dissipation mesh port assembly, and the bottom of the box-type mobile vehicle is uniformly provided with four universal casters.

6. The gassing platform of a cavi ty-containing device in a helium cryogenic system of claim 1, wherein, The helium recovery system comprises a gas bag, a helium purification device, and a helium delivery corrugated hose arranged between the small vacuum pump and the gas bag.

7. A method of gas loading a device containing cavity in a helium cryogenic system, characterized by, The method comprises the following steps: S1. providing a gas placement platform of the cavity-containing equipment in the helium cryogenic system according to any one of claims 1-6, and mechanically fastening and connecting the integrated gas placement device with the helium recovery system, the cavity-containing equipment, and the high-purity helium storage device; S2. performing external leakage checking through the high-pressure pipeline, and if there is no external leakage, entering step S3; otherwise, performing leakage point positioning and processing; S3. performing valve internal leakage checking on the integrated gas placement device, and if there is no internal leakage of the valve, entering step S4; Otherwise, valve leakage processing is performed; Step S4, helium replacement process of the gas filling platform of the cavity-containing device in the helium cryogenic system is performed; Step S5, cavity impurity gas content analysis is performed through the detection pipeline, if the impurity gas content measured by the gas purity analyzer is ≤10ppm, step S6 is entered; otherwise, step S4 is returned; Step S6, pressure maintaining process of the cavity-containing device is performed, and the gas filling is ended.

8. The gas filling method of the cavity-containing device in the helium cryogenic system according to claim 7, characterized in that, The step S2 comprises: Step S21, the pressure reducing valve, the first manual ball valve, the second pressure stabilizing valve and the remote evacuation valve are closed, and the first pressure stabilizing valve is opened; Step S22, high-pressure high-purity helium gas is introduced by using the high-purity helium gas storage device, and the pipeline pressure is balanced for a preset time; Step S23, the second pressure gauge is observed, if the pointer of the second pressure gauge has no fluctuation or the reading has no change, it is considered that there is no external leakage in the pipeline, and the remaining high-pressure high-purity helium gas is returned to the high-purity helium gas storage device through the pressure difference.

9. A method of gas loading a chambered device in a helium cryogenic system according to claim 8, wherein, The step S3 comprises: Step S31, the first pressure stabilizing valve, the second pressure stabilizing valve, the remote evacuation valve and the second manual ball valve are closed, and the pressure reducing valve and the first manual ball valve are opened; Step S32, normal-pressure high-purity helium gas is introduced by using the high-purity helium gas storage device; Step S32, the small vacuum pump is opened, the near-end evacuation valve is opened, and the pressure of the vacuum gauge is displayed stably until the pressure of the vacuum gauge is displayed stably; Step S33, the vacuum gauge is observed, if the reading of the vacuum gauge does not change or fluctuates ≤1%, it is considered that there is no internal leakage in the valve.

10. The method of claim 9, wherein the method further comprises, The step S4 comprises: Step S41, the small vacuum pump, the near-end evacuation valve, the remote evacuation valve and the second manual ball valve are opened, and the remaining valves are kept closed; Step S42, the vacuum gauge is observed, when the pressure shown by the vacuum gauge is lower than a preset value, the near-end evacuation valve and the second manual ball valve are closed, the pressure reducing valve and the first manual ball valve are opened, and the gas supply pressure is adjusted to a slight positive pressure through the first pressure gauge in real time; Step S43, the second manual ball valve is slowly opened until the pressure shown by the vacuum gauge is stably at a slight positive pressure level, and the first manual ball valve is closed; Step S44, the output end of the small vacuum pump is connected to the helium recovery system, and steps S41-S43 are repeated three to four times.

11. A method of gas loading a chambered device in a helium cryogenic system according to claim 10, wherein, The step S6 comprises: Step S61, the pressure reducing valve, the first manual ball valve and the remote evacuation valve are opened, and the remaining valves are closed; Step S62, the second manual ball valve is slowly opened until the vacuum gauge displays a slight positive pressure level; Step S63, all valves and the small vacuum pump are closed, and the gas filling process is ended.

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