A cleaning system

Abstract

This invention discloses a cleaning system, including a tank structure, a dust removal mechanism, and a cleaning component. The tank structure includes a tank body with a receiving cavity open on one side. The dust removal mechanism is located on the open side and includes a driving component and a suction component. The suction component, driven by the driving component, is adapted to extend into or out of the receiving cavity through the opening. When the suction component is inside the receiving cavity, the driving component drives the dust removal component to reciprocate within the receiving cavity to extract dust particles. The cleaning component is located on the same side as the dust removal mechanism, avoiding the opening. The cleaning component includes a liquid delivery component and a spray component. The liquid delivery component has a liquid delivery channel, and the spray component is positioned facing the receiving cavity and connected to the liquid delivery component. The spray component communicates with the liquid delivery channel, and both ends of the liquid delivery channel are connected to an external water source so that the cleaning liquid in the liquid delivery channel is sprayed into the receiving cavity through the spray component. This cleaning system with the above structure is beneficial for improving the cleaning efficiency and safety of the tank.

Description

Technical Field

[0001] This invention relates to the field of solar cell texturing equipment technology, and more specifically to a cleaning system. Background Technology

[0002] With the dwindling availability of traditional energy sources, solar cells, as a renewable energy source, are receiving increasing attention. Improving photoelectric conversion efficiency and reducing cell costs have always been key objectives. In terms of improving photoelectric conversion efficiency, the pyramidal textured surface of the silicon wafer can increase the amount of light incident through multiple reflections. This is a commonly used structure in the fabrication of monocrystalline silicon solar cells, but this textured surface requires texturing equipment for manufacturing.

[0003] In existing technology, the texturing process for silicon wafers is as follows: pre-cleaning, water washing, texturing, water washing, post-cleaning, water washing, acid washing, water washing, slow lifting, and drying. The pre-cleaning tank uses hydrogen peroxide and potassium hydroxide to clean the silicon wafer surface. The texturing tank uses potassium hydroxide and additives to react with the silicon wafer within the tank to create a pyramidal texture. The acid washing tank uses hydrofluoric acid and hydrochloric acid to remove impurities from the silicon wafer surface. After completing the above process multiple times (generally around 200 times), all tanks need to be maintained and cleaned. This process requires manual cleaning, and for parts of the tanks that are difficult to clean, personnel must enter the tanks to clean them thoroughly.

[0004] However, existing tanks not only require manual cleaning, but sometimes also require personnel to enter the tank for cleaning, making the entire cleaning process time-consuming and labor-intensive. Furthermore, residual chemicals in the tank can pose safety risks to personnel, resulting in low cleaning efficiency and a low cleaning safety factor. Summary of the Invention

[0005] Therefore, the technical problem to be solved by the present invention is to overcome the shortcomings of existing tanks that require manual cleaning, resulting in low cleaning efficiency and low cleaning safety.

[0006] Therefore, the present invention provides a cleaning system, comprising:

[0007] The tank structure includes a tank body, a liquid inlet, and a liquid outlet. The tank body has a receiving cavity with an opening on one side. The liquid inlet has a liquid inlet channel, and the liquid outlet has a liquid outlet channel. Both the liquid inlet channel and the liquid outlet channel are connected to the outside and the receiving cavity.

[0008] A dust removal mechanism is configured to be disposed on one side of the opening. The dust removal mechanism includes a drive assembly and a suction assembly. The suction assembly is adapted to extend into or out of the receiving cavity from the opening under the drive assembly. When the suction assembly is located in the receiving cavity, the drive assembly is adapted to drive the dust removal assembly to reciprocate within the receiving cavity to suck up the dust particles in the receiving cavity.

[0009] A cleaning assembly is provided, adapted to avoid the dust removal mechanism and positioned on the same side of the opening. The cleaning assembly includes an infusion component and several spray components. The infusion component has an infusion channel. Each spray component is positioned facing the receiving cavity and connected to the infusion component. All spray components are in communication with the infusion channel. Both ends of the infusion channel are adapted to be connected to an external water source so that the cleaning fluid in the infusion channel is sprayed into the receiving cavity through the spray components.

[0010] Optionally, in the above-described cleaning system, the dust collection component includes a dust removal component, a dust collection pipe, and a dust collection structure. The dust removal component and the dust collection pipe are both disposed on one side of the opening. The dust removal component and the dust collection structure are both connected to the dust collection pipe. The dust collection structure is also connected to the drive component to extend into or out of the receiving cavity under the drive of the drive component, and to suck up the fragments and dust in the receiving cavity through the dust removal component.

[0011] Optionally, in the above-described cleaning system, one end of the suction pipe is connected to the dust removal component, and the other end is closed, so that the dust removal component creates a negative pressure between the suction pipe and the receiving cavity.

[0012] Optionally, in the above-described cleaning system, the vacuuming structure includes a connector, at least two vacuum heads, and a telescopic member. The connector has a connecting channel, and the telescopic member has a telescopic channel. Each of the vacuum heads is disposed on the connector and communicates with the connecting channel. One end of the telescopic member is connected to the connector, and the other end is connected to the vacuum pipe, so that the telescopic channel communicates the connecting channel and the vacuum pipe. The telescopic member is also connected to the drive assembly, so that the drive assembly drives the vacuum head to extend into or retract from the receiving cavity through the telescopic member.

[0013] Optionally, in the cleaning system described above, along the direction perpendicular to the movement of the vacuum head, the size of the connector is adapted to the size of the opposite sides of the receiving cavity, and the vacuum heads are evenly spaced on the connector.

[0014] Optionally, in the above-described cleaning system, the telescopic member has a fixed end and a telescopic end, and the drive assembly includes a first drive member, wherein the fixed end is configured to be stationary relative to the first drive member;

[0015] The driving end of the first driving member is adapted to connect with the telescopic end of the telescopic member to drive the telescopic end of the telescopic member to move closer to or further away from the fixed end.

[0016] Optionally, in the above-described cleaning system, the driving assembly further includes a second driving member and a guide rail. The guide rail is disposed on the outer peripheral wall of the suction pipe facing the opening side. The fixed end of the telescopic member is slidably connected to the guide rail and connected to the driving end of the second driving member, so that under the drive of the second driving member, the fixed end is adapted to drive the telescopic member to slide along the guide rail.

[0017] Optionally, in the above-described cleaning system, the infusion component is provided with several mounting portions, the mounting portions connecting the infusion channel to the outside, and the spray component is connected to the infusion component through the mounting portions.

[0018] Optionally, in the above-described cleaning system, the spraying component is provided with a plurality of spraying parts, all of which are connected to the infusion channel and are all arranged facing the receiving cavity side.

[0019] Optionally, in the cleaning system described above, the spray sections are evenly spaced on the spray member so that the spray surfaces formed by all the spray sections at least cover the bottom surface of the receiving cavity.

[0020] The technical solution provided by this invention has the following advantages:

[0021] 1. The cleaning system provided by the present invention includes a tank structure, a dust removal mechanism, and a cleaning assembly. The tank structure includes a tank body, a liquid inlet, and a liquid outlet. The tank body has a receiving cavity with an opening on one side. The liquid inlet has a liquid inlet channel, and the liquid outlet has a liquid outlet channel. Both the liquid inlet channel and the liquid outlet channel are connected to the outside and the receiving cavity. The dust removal mechanism is configured to be located on one side of the opening. The dust removal mechanism includes a driving assembly and a suction assembly. The suction assembly is adapted to extend into or out of the receiving cavity from the opening under the drive of the driving assembly. When the suction assembly is located in the receiving cavity, the driving assembly is adapted to drive the dust removal assembly to reciprocate within the receiving cavity to suck up the dust particles in the receiving cavity. The cleaning assembly is adapted to be located on the same side of the opening, avoiding the dust removal mechanism. The cleaning assembly includes a liquid delivery component and several spray components. The liquid delivery component has a liquid delivery channel. Each spray component is located facing the receiving cavity and connected to the liquid delivery component. All spray components are connected to the liquid delivery channel. Both ends of the liquid delivery channel are adapted to be connected to an external water source so that the cleaning liquid in the liquid delivery channel is sprayed into the receiving cavity through the spray components.

[0022] This cleaning system utilizes a dust removal mechanism and a cleaning assembly located on one side of a tank structure. The tank structure includes a tank body, a liquid inlet, and a liquid outlet. The tank body has a receiving cavity with an opening on one side. Both the dust removal mechanism and the cleaning assembly are located on the opening side, with the cleaning assembly positioned to avoid the dust removal mechanism. The liquid inlet has an inlet channel, and the liquid outlet has a drain channel, both communicating with the outside and the receiving cavity. This allows chemicals to enter the receiving cavity through the inlet channel, react with the silicon wafer, and then be discharged to the outside through the drain channel. The dust removal mechanism includes a drive assembly and a suction assembly. Driven by the drive assembly, the suction assembly extends from the opening of the tank body into the receiving cavity to collect residual dust and debris. While the suction assembly is collecting dust, the drive assembly also drives the suction assembly to reciprocate within the receiving cavity, ensuring that all residual dust and debris are completely removed. After the vacuuming component removes the debris and dust from the containment cavity, it exits the cavity under the drive of the drive component, completing the vacuuming action. The cleaning component includes an infusion unit and four spray units. The infusion unit has an infusion channel connected to an external water source, and the four spray units are all connected to the infusion unit and are positioned towards the containment cavity. This allows the spray units to spray the cleaning fluid from the infusion channel into the containment cavity, thereby cleaning the cavity wall. The cleaned cleaning fluid can be discharged to the outside through the drainage channel on the drain unit to prevent accumulation in the containment cavity. Once the containment cavity is clean, the spray units stop spraying the cleaning fluid, completing the cleaning action. Finally, the dust removal mechanism and the cleaning component vacuum and clean the containment cavity, eliminating the need for manual cleaning of the tank, which improves the cleaning efficiency of the tank and also avoids the need for personnel to enter the tank for cleaning, thus improving the cleaning safety factor of the tank.

[0023] 2. The cleaning system provided by the present invention includes a dust collection component comprising a dust removal component, a dust collection pipe, and a dust collection structure. Both the dust removal component and the dust collection pipe are located on one side of the opening and are connected to the dust collection pipe. The dust collection structure is also connected to a drive component to extend into or out of a receiving cavity under the drive of the drive component, and to collect dust and debris from the receiving cavity through the dust removal component. One end of the dust collection pipe is connected to the dust removal component, and the other end is closed, so that the dust removal component creates a negative pressure between the dust collection pipe and the receiving cavity. The dust collection structure includes a connector, at least two dust collection heads, and a telescopic component. The connector has a connecting channel, and the telescopic component has a telescopic channel. Any dust collection head is disposed on the connector and communicates with the connecting channel. One end of the telescopic component is connected to the connector, and the other end is connected to the dust collection pipe, so that the telescopic channel communicates with the connecting channel and the dust collection pipe. The telescopic component is also connected to the drive component, so that the drive component drives the dust collection head to extend into or out of the receiving cavity through the telescopic component.

[0024] This cleaning system comprises a dust collection assembly including a dust collector, a suction pipe, and a suction structure. Both the dust collector and the suction pipe are located on one side of the opening and are connected to the suction pipe. The suction structure is also connected to a drive assembly. This allows the suction structure to extend into the receiving cavity under the drive assembly and reciprocate within it. The dust collector provides suction force, drawing dust and debris from the receiving cavity through the suction pipe into the dust collector, thus cleaning the cavity. The suction structure then exits the receiving cavity under the drive structure, completing the dust removal process. By connecting one end of the suction pipe to the dust collector and sealing the other end, a negative pressure is created between the dust collector and the receiving cavity when suction force is applied, allowing the suction structure to draw dust and debris from the receiving cavity into the dust collector. The dust collection structure includes a connector, five suction heads, and a telescopic component. The connector has a connecting channel, and the telescopic component has a telescopic channel. All five suction heads are mounted on the connector and connected to the connecting channel. One end of the telescopic component is connected to the connector, and the other end is connected to the suction pipe. This telescopic channel connects the connecting channel and the suction pipe. When the dust collector provides suction, the suction heads draw dust and debris from the receiving cavity into the connecting channel, then through the telescopic channel into the suction pipe, and finally into the dust collector. The telescopic component is also connected to a drive assembly, allowing it to extend or retract under the drive's influence. This allows the telescopic component to move the suction heads into or out of the receiving cavity, eliminating the need for manual operation and improving the cleaning efficiency of dust and debris within the tank.

[0025] 3. In the cleaning system provided by the present invention, along the moving direction of the vertical suction head, the size of the connecting member is adapted to the size of the opposite two sides of the receiving cavity, and the suction heads are evenly spaced on the connecting member. The telescopic member has a fixed end and a telescopic end. The driving assembly includes a first driving member, wherein the fixed end is configured to be stationary relative to the first driving member; the driving end of the first driving member is adapted to connect with the telescopic end of the telescopic member to drive the telescopic end of the telescopic member to move closer to or away from the fixed end. The driving assembly also includes a second driving member and a guide rail. The guide rail is disposed on the outer peripheral wall of the suction pipe facing the opening side. The fixed end of the telescopic member is slidably connected to the guide rail and connected to the driving end of the second driving member, so that under the drive of the second driving member, the fixed end is adapted to drive the telescopic member to slide along the guide rail.

[0026] This cleaning system, by adapting the dimensions of the connector to the dimensions of the opposite sides of the receiving cavity along the vertical direction of the suction head's movement and by evenly spacing the suction heads on the connector, ensures that when the suction structure extends into the receiving cavity under the drive assembly, the connector can completely cover the bottom surface of the receiving cavity. Consequently, the evenly spaced suction heads on the connector can also completely cover the bottom surface of the receiving cavity, allowing the suction heads to completely remove debris and dust from the receiving cavity. This prevents debris and dust from remaining in the dead corners of the receiving cavity, thus improving the cleaning quality of debris and dust in the tank. By configuring a telescopic component with a fixed end and a telescopic end, and configuring a driving assembly including a first driving component, wherein the first driving component and the fixed end of the telescopic component are configured to be stationary, that is, the first driving component and the telescopic component can move synchronously, and at the same time, the driving end of the first driving component is connected to the telescopic end of the telescopic component, so that the driving end of the first driving component can drive the telescopic end of the telescopic component away from or close to the fixed end, that is, drive the vacuuming structure to extend into or out of the receiving cavity, thereby enabling the vacuuming structure to perform a vacuuming action or complete a vacuuming action. The drive assembly also includes a second drive member and a guide rail. The guide rail is set on the outer peripheral wall of the suction pipe facing the opening. The fixed end of the telescopic member is slidably set with the guide rail and is also connected to the drive end of the second drive member. This allows the telescopic member to slide on the guide rail under the drive of the second drive member, thereby causing the telescopic member to drive the suction structure to move synchronously. This allows the suction head to clean up the debris and dust in the cavity. At the same time, since the fixed end of the first drive member and the telescopic member are configured to be stationary, the first drive member will also move synchronously with the telescopic member, thus ensuring that the first drive member can always drive the telescopic end of the telescopic member away from or close to the fixed end.

[0027] 4. The cleaning system provided by the present invention includes an infusion fitting with several mounting portions, each connecting the infusion channel to the outside. A jetting component is connected to the infusion fitting via the mounting portions. The jetting component has several jetting portions, all of which are connected to the infusion channel and are oriented towards the receiving cavity. The jetting portions are evenly spaced on the jetting component so that the jetting surfaces formed by all the jetting portions at least cover the bottom surface of the receiving cavity.

[0028] This cleaning system features four mounting sections on the infusion unit, each connected to the outside and the infusion channel. In this embodiment, each mounting section is a mounting hole. The spray nozzles are mounted to the infusion unit via these mounting sections, allowing them to spray the cleaning fluid flowing within the infusion unit into the receiving cavity, thus cleaning the inner wall of the cavity. The spray nozzles, in this embodiment, are spray holes. All spray nozzles are connected to the infusion channel via the mounting sections and are all oriented towards the receiving cavity, enabling them to spray the cleaning fluid flowing within the infusion channel into the receiving cavity. By evenly spaced the spray nozzles, the cleaning fluid sprayed from each nozzle forms a spray surface that covers the bottom and side walls of the receiving cavity, ensuring complete cleaning of the inner wall of the cavity and improving the cleaning quality of the tank. Attached Figure Description

[0029] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0030] Figure 1 This is a schematic diagram of the structure of the dust suction structure in the cleaning system provided in an embodiment of the present invention, which extends into the receiving cavity under the drive of the first driving member;

[0031] Figure 2 This is a schematic diagram of the structure of the dust suction structure in the cleaning system provided in an embodiment of the present invention, which exits the receiving cavity under the drive of the first driving member;

[0032] Figure 3 This is a schematic diagram of the structure of the cleaning component in the cleaning system provided in the embodiment of the present invention, in which the spraying element sprays cleaning fluid toward the receiving cavity;

[0033] Figure 4 This is a schematic diagram of the dust collection structure in the cleaning system provided in an embodiment of the present invention;

[0034] Figure 5 This is a schematic diagram of the tank structure in the cleaning system provided in an embodiment of the present invention;

[0035] Explanation of reference numerals in the attached figures:

[0036] 1-Tank structure; 11-Tank body; 12-Liquid inlet; 13-Liquid outlet;

[0037] 21-Drive assembly; 211-First drive component; 212-Second drive component; 213-Guide rail; 22-Dust collection assembly; 221-Dust removal component; 222-Dust collection duct; 223-Dust collection structure; 2231-Connector; 2232-Dust collection head; 2233-Telescopic component;

[0038] 3-Cleaning assembly; 31-Infusion assembly; 32-Spray assembly. Detailed Implementation

[0039] The technical solution of the present invention will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0040] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0041] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0042] Furthermore, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0043] Example 1

[0044] This embodiment provides a cleaning system, such as Figures 1 to 5As shown, the system includes a tank structure 1, a dust removal mechanism, and a cleaning assembly 3. The tank structure 1 includes a tank body 11, a liquid inlet 12, and a liquid outlet 13. The tank body 11 has a receiving cavity with an opening on one side. The liquid inlet 12 has a liquid inlet channel, and the liquid outlet 13 has a liquid outlet channel. Both the liquid inlet channel and the liquid outlet channel communicate with the outside and the receiving cavity. The dust removal mechanism is configured to be located on one side of the opening. The dust removal mechanism includes a drive assembly 21 and a suction assembly 22. The suction assembly 22 is adapted to extend into or out of the receiving cavity from the opening under the drive of the drive assembly 21. When the dust removal component is in the receiving cavity, the drive assembly 21 is adapted to drive the dust removal component to reciprocate within the receiving cavity to extract the dust particles in the receiving cavity; the cleaning assembly 3 is adapted to avoid the dust removal mechanism being located on the same side of the opening. The cleaning assembly 3 includes a liquid delivery component 31 and several spray components 32. The liquid delivery component 31 has a liquid delivery channel. Any spray component 32 is arranged facing the receiving cavity side and connected to the liquid delivery component 31. All spray components 32 are connected to the liquid delivery channel. Both ends of the liquid delivery channel are adapted to be connected to an external water source so that the cleaning liquid in the liquid delivery channel is sprayed into the receiving cavity through the spray components 32.

[0045] The cleaning system described above, through a dust removal mechanism and a cleaning component 3 disposed on one side of the tank structure 1, includes a tank body 11, a liquid inlet 12, and a liquid outlet 13. In this embodiment, the liquid inlet 12 is an inlet pipe, and the liquid outlet 13 is a drain pipe. The tank body 11 has a receiving cavity with an opening on one side. Both the dust removal mechanism and the cleaning component 3 are disposed on the opening side, and the cleaning component 3 is disposed away from the dust removal mechanism. The liquid inlet 12 has an inlet channel, and the liquid outlet 13 has a drain channel. Both the inlet and drain channels are connected to the outside and the receiving cavity, allowing for efficient cleaning. The chemical substance can enter the receiving cavity through the liquid inlet channel, and after reacting with the silicon wafer, it is discharged to the outside through the liquid outlet channel. The dust removal mechanism includes a drive assembly 21 and a dust collection assembly 22. The dust collection assembly 22 can extend into the receiving cavity from the opening of the tank 11 under the drive of the drive assembly 21, and suck up the residual dust and debris in the receiving cavity. While the dust collection assembly 22 is sucking up the dust and debris, the drive assembly 21 also drives the dust collection assembly 22 to move back and forth in the receiving cavity, so that the dust collection assembly 22 can clean up the residual dust and debris in the receiving cavity. 2. After the debris and dust in the receiving cavity are sucked out, the vacuuming assembly 22 will exit the receiving cavity under the drive of the drive assembly 21, completing the vacuuming action. The cleaning assembly 3 includes an infusion component 31 and four spray components 32. In this embodiment, the infusion component 31 is an infusion tube, and the spray components 32 are nozzles. The infusion component 31 has an infusion channel connected to an external water source. The four spray components 32 are all connected to the infusion component 31 and are all arranged facing the receiving cavity side, so that the spray components 32 spray the cleaning fluid in the infusion channel toward the receiving cavity. In this embodiment, the cleaning fluid is a cleaning solution. Ionized water is used to clean the walls of the receiving cavity, and the cleaned cleaning solution can be discharged to the outside through the drain channel on the drain component 13 to avoid accumulation in the receiving cavity. The cleaning process continues until the receiving cavity is clean. Then, the spray component 32 stops spraying the cleaning solution and completes the cleaning action. Finally, the receiving cavity is vacuumed and cleaned by the dust removal mechanism and the cleaning component 3. This avoids manual cleaning of the tank 11 by personnel, which helps to improve the cleaning efficiency of the tank 11 and also avoids personnel entering the tank 11 to clean it, which helps to improve the cleaning safety factor of the tank 11.

[0046] The cleaning system provided in this embodiment, such as Figures 1 to 3 As shown, the dust collection assembly 22 includes a dust removal component 221, a dust collection pipe 222, and a dust collection structure 223. The dust removal component 221 and the dust collection pipe 222 are both located on one side of the opening. The dust removal component 221 and the dust collection structure 223 are both connected to the dust collection pipe 222. The dust collection structure 223 is also connected to the drive assembly 21 so that it can extend into or out of the receiving cavity under the drive of the drive assembly 21, and suck up the fragments and dust in the receiving cavity through the dust removal component 221.

[0047] The cleaning system described above includes a dust collection component 22 comprising a dust collector 221, a dust collection pipe 222, and a dust collection structure 223. In this embodiment, the dust collector 221 is an industrial dust collector. Both the dust collector 221 and the dust collection pipe 222 are located on one side of the opening. Both the dust collector 221 and the dust collection structure 223 are connected to the dust collection pipe 222, and the dust collection structure 223 is also connected to the drive component 21. This allows the dust collection structure 223 to extend into the receiving cavity under the drive of the drive component 21 and reciprocate within the cavity. The dust collector 221 provides suction force, thereby drawing dust particles from the receiving cavity into the dust collector 221 through the dust collection pipe 222, thus cleaning the dust particles from the receiving cavity. Afterward, the dust collection structure 223 exits the receiving cavity under the drive of the drive structure, completing the dust removal process.

[0048] The cleaning system provided in this embodiment, such as Figures 1 to 3 As shown, one end of the suction pipe 222 is connected to the dust removal component 221, and the other end is closed, so that the dust removal component 221 forms a negative pressure between the suction pipe 222 and the receiving cavity.

[0049] The cleaning system described above connects one end of the suction pipe 222 to the dust removal component 221 and closes the other end. When the dust removal component 221 provides suction force, it can create a negative pressure between the suction pipe 222 and the receiving cavity, thereby enabling the suction structure 223 to draw the fragments and dust in the receiving cavity into the dust removal component 221.

[0050] The cleaning system provided in this embodiment, such as Figure 4 As shown, the vacuuming structure 223 includes a connector 2231, at least two vacuum heads 2232, and a telescopic member 2233. The connector 2231 has a connecting channel, and the telescopic member 2233 has a telescopic channel. Any vacuum head 2232 is disposed on the connector 2231 and communicates with the connecting channel. One end of the telescopic member 2233 is connected to the connector 2231, and the other end is connected to the vacuum pipe 222, so that the telescopic channel communicates with the connecting channel and the vacuum pipe 222. The telescopic member 2233 is also connected to the drive assembly 21, so that the drive assembly 21 drives the vacuum head 2232 to extend into or out of the receiving cavity through the telescopic member 2233.

[0051] The cleaning system described above, by setting up a suction structure 223 including a connector 2231, five suction heads 2232, and a telescopic member 2233, wherein the connector 2231 is a connecting rod in this embodiment, and the telescopic member 2233 is a telescopic rod with sections sleeved together. The connector 2231 has a connecting channel, and the telescopic member 2233 has a telescopic channel. All five suction heads 2232 are mounted on the connector 2231 and communicate with the connecting channels. One end of the telescopic member 2233 is connected to the connector 2231, and the other end is connected to the suction pipe 222, thereby allowing the telescopic channel to connect the connecting channel and the suction pipe 222. When the dust removal component 221 provides suction force, the suction head 2232 draws the debris and dust in the receiving cavity into the connecting channel, and then into the suction pipe 222 through the telescopic channel, and finally into the dust removal component 221. At the same time, the telescopic component 2233 is also connected to the drive component 21, so that under the drive component 21, the telescopic component 2233 can extend or retract, thereby causing the telescopic component 2233 to drive the suction head 2232 to extend or retract into the receiving cavity, avoiding manual operation and improving the cleaning efficiency of debris and dust in the tank 11.

[0052] The cleaning system provided in this embodiment, such as Figure 1 As shown, along the moving direction of the vertical vacuum head 2232, the size of the connector 2231 is adapted to the size of the opposite two sides of the receiving cavity, and the vacuum heads 2232 are evenly spaced on the connector 2231.

[0053] The cleaning system described above, by adapting the size of the connector 2231 to the size of the opposite sides of the receiving cavity along the moving direction of the vertical suction head 2232 and by evenly spacing the suction heads 2232 on the connector 2231, allows the connector 2231 to completely cover the bottom surface of the receiving cavity when the suction structure 223 extends into the receiving cavity under the drive of the drive assembly 21. This allows the suction heads 2232, which are evenly spaced on the connector 2231, to completely cover the bottom surface of the receiving cavity. As a result, the suction heads 2232 can completely remove the debris and dust from the receiving cavity, preventing debris and dust from remaining in the dead corners of the receiving cavity, and thus improving the cleaning quality of debris and dust in the tank 11.

[0054] The cleaning system provided in this embodiment, such as Figures 1 to 3 As shown, the telescopic member 2233 has a fixed end and a telescopic end, and the drive assembly 21 includes a first drive member 211, wherein the fixed end is configured to be stationary relative to the first drive member 211; the drive end of the first drive member 211 is adapted to connect with the telescopic end of the telescopic member 2233 to drive the telescopic end of the telescopic member 2233 to move closer to or away from the fixed end.

[0055] The cleaning system described above, by setting the telescopic member 2233 to have a fixed end and a telescopic end, and setting the drive assembly 21 to include a first drive member 211, which in this embodiment is a first cylinder, wherein the first drive member 211 and the fixed end of the telescopic member 2233 are configured to be stationary, that is, the first drive member 211 and the telescopic member 2233 can move synchronously. At the same time, the drive end of the first drive member 211 is connected to the telescopic end of the telescopic member 2233, so that the drive end of the first drive member 211 can drive the telescopic end of the telescopic member 2233 away from or near the fixed end, that is, drive the vacuuming structure 223 to extend into or out of the receiving cavity, thereby enabling the vacuuming structure 223 to perform a vacuuming action or complete a vacuuming action.

[0056] In detail, a first sliding groove is provided on the suction pipe 222. The fixed end of the telescopic member 2233 extends into the suction pipe 222 through the first sliding groove and is connected to the suction pipe 222. The first driving member 211 is disposed in the suction pipe 222. At the same time, the fixed end of the telescopic member 2233 has an opening that connects the suction pipe 222 and the telescopic channel. The driving end of the first driving member 211 extends into the telescopic channel through the opening and connects to the telescopic end of the telescopic member 2233, thereby driving the telescopic member 2233 to extend and extend the suction structure 223 into the receiving cavity. This allows the suction head 2232 to suck up dust and debris, and transport the dust and debris from the connecting channel and the telescopic channel into the suction pipe 222. Finally, under the negative pressure provided by the dust removal member 221, the dust is sucked into the dust removal member 221.

[0057] In other optional embodiments, the suction pipe 222 is provided with a first sliding groove and a second sliding groove. The fixed end of the telescopic member 2233 extends into the suction pipe 222 through the first sliding groove and is connected to the suction pipe 222. The driving end of the first driving member 211 extends into the suction pipe 222 through the second sliding groove. At the same time, the fixed end of the telescopic member 2233 has an opening that connects the suction pipe 222 and the telescopic channel. The driving end of the first driving member 211 extends into the telescopic channel through the opening and connects with the telescopic end of the telescopic member 2233, thereby driving the telescopic member 2233 to extend and extend the suction structure 223 into the receiving cavity. This allows the suction head 2232 to suck up dust particles and transport them from the connecting channel and the telescopic channel into the suction pipe 222. Finally, under the negative pressure provided by the dust removal member 221, the dust particles are sucked into the dust removal member 221.

[0058] The cleaning system provided in this embodiment, such as Figures 1 to 3As shown, the drive assembly 21 also includes a second drive member 212 and a guide rail 213. The guide rail 213 is disposed on the outer peripheral wall of the suction pipe 222 facing the opening side. The fixed end of the telescopic member 2233 is slidably connected to the guide rail 213 and connected to the drive end of the second drive member 212, so that under the drive of the second drive member 212, the fixed end is adapted to drive the telescopic member 2233 to slide along the guide rail 213.

[0059] The cleaning system described above further includes a second driving component 212 and a guide rail 213 by setting the driving component 21. In this embodiment, the second driving component 212 is a second cylinder. The guide rail 213 is set on the outer peripheral wall of the suction pipe 222 facing the opening side. The fixed end of the telescopic component 2233 is slidably set with the guide rail 213 and is also connected to the driving end of the second driving component 212. This allows the telescopic component 2233 to slide on the guide rail 213 under the drive of the second driving component 212, thereby causing the telescopic component 2233 to drive the suction structure 223 to move synchronously. This allows the suction head 2232 to clean the debris and dust in the receiving cavity. At the same time, since the fixed end of the first driving component 211 and the telescopic component 2233 are configured to be stationary, the first driving component 211 will also move synchronously with the telescopic component 2233, thereby ensuring that the first driving component 211 can always drive the telescopic end of the telescopic component 2233 away from or close to the fixed end.

[0060] The cleaning system provided in this embodiment, such as Figures 1 to 3 As shown, the infusion unit 31 has several mounting parts, which connect the infusion channel to the outside. The spraying element 32 is connected to the infusion unit 31 through the mounting parts.

[0061] The cleaning system described above has four mounting portions on the infusion unit 31, each of which is connected to the outside and the infusion channel. In this embodiment, the mounting portion is a mounting hole. The spraying component 32 is installed on the infusion unit 31 through the mounting portion, so that the spraying component 32 can spray the cleaning fluid flowing in the infusion unit 31 into the receiving cavity through the mounting portion, thereby cleaning the inner wall of the receiving cavity with the cleaning fluid.

[0062] The cleaning system provided in this embodiment, such as Figures 1 to 3 As shown, the spray member 32 has several spray sections, all of which are connected to the infusion channel and are all oriented towards the receiving cavity side.

[0063] The cleaning system described above, through the spraying part provided on the spraying member 32, which in this embodiment is a spraying hole, all the spraying parts are connected to the infusion channel through the mounting part, and all the spraying parts are arranged facing the receiving cavity side, so that the spraying parts can spray the flowing cleaning liquid in the infusion channel into the receiving cavity.

[0064] The cleaning system provided in this embodiment, such as Figures 1 to 3 As shown, the spray sections are evenly spaced on the spray member 32 so that the spray surface formed by all the spray sections at least covers the bottom surface of the receiving cavity.

[0065] The cleaning system described above, by evenly spacing the spray sections on the spray member 32, forms a spray surface with the cleaning liquid sprayed by the spray section, and the spray surface covers the bottom surface of the receiving cavity and the side wall surface of the receiving cavity, thereby enabling the cleaning liquid to completely clean the inner wall of the receiving cavity, which is beneficial to improving the cleaning quality of the tank 11.

[0066] The cleaning system provided by this invention operates as follows:

[0067] First, the first driving component 211 drives the telescopic component 2233 to extend, which in turn causes the suction structure 223 to extend into the receiving cavity. Next, the dust removal component 221 activates, creating a negative pressure between the suction pipe 222 and the receiving cavity, causing the suction head 2232 to suck up the dust particles in the receiving cavity. Then, the second driving component 212 drives the telescopic component 2233 to slide back and forth on the guide rail 213, causing the suction structure 223 to move back and forth within the receiving cavity, ensuring the suction head 2232 completely sucks up the dust particles. Then, the first driving component 211 drives the telescopic component 2233 to retract, causing the suction structure 223 to exit the receiving cavity and complete the suction action. Finally, the spray component 32 sprays cleaning fluid from the infusion channel towards the receiving cavity, cleaning the inner wall of the cavity and draining it from the drain component 13. This completes the cleaning system's operation.

[0068] The cleaning system provided by this invention includes a dust removal mechanism and a cleaning component 3 disposed on one side of a tank structure 1. The tank structure 1 includes a tank body 11, a liquid inlet 12, and a liquid outlet 13. The tank body 11 has a receiving cavity with one side open. The dust removal mechanism and the cleaning component 3 are both disposed on the open side, with the cleaning component 3 avoiding the dust removal mechanism. The liquid inlet 12 has a liquid inlet channel, and the liquid outlet 13 has a liquid outlet channel. Both the liquid inlet channel and the liquid outlet channel are connected to the outside and the receiving cavity, allowing chemicals to enter through the liquid inlet channel. The dust enters the receiving cavity and, after reacting with the silicon wafer, is discharged to the outside through the drainage channel. The dust removal mechanism includes a drive assembly 21 and a dust collection assembly 22. The dust collection assembly 22, driven by the drive assembly 21, extends into the receiving cavity from the opening of the tank 11 and sucks up the remaining dust particles in the receiving cavity. While the dust collection assembly 22 is sucking up the dust particles, the drive assembly 21 also drives the dust collection assembly 22 to move back and forth in the receiving cavity, so that the dust collection assembly 22 can clean up the remaining dust particles in the receiving cavity. After the vacuuming assembly 22 has cleaned the debris and dust from the receiving cavity, it will exit the receiving cavity under the drive of the drive assembly 21, completing the vacuuming action. The cleaning assembly 3 includes an infusion component 31 and four spray components 32. The infusion component 31 has an infusion channel connected to an external water source. The four spray components 32 are all connected to the infusion component 31 and are all positioned facing the receiving cavity, so that the spray components 32 spray the cleaning fluid in the infusion channel into the receiving cavity, thereby cleaning the cavity wall surface of the receiving cavity. The cleaning process continues until the cavity is completely clean. The cleaning solution is then discharged to the outside through the drain channel on the drain component 13, preventing it from accumulating in the cavity. Once the cavity is clean, the spray component 32 stops spraying the cleaning solution and completes the cleaning action. Finally, the cavity is vacuumed and cleaned by the dust removal mechanism and the cleaning component 3, which avoids manual cleaning of the tank 11 by personnel, thus improving the cleaning efficiency of the tank 11. It also avoids personnel entering the tank 11 to clean it, thus improving the cleaning safety factor of the tank 11.

[0069] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom are still within the scope of protection of this invention.

Claims

1. A cleaning system, characterized in that, include: The tank structure (1) includes a tank body (11), an inlet (12) and a drain (13). The tank body (11) has a receiving cavity with an opening on one side. The inlet (12) has an inlet channel and the drain (13) has a drain channel. Both the inlet channel and the drain channel are connected to the outside and the receiving cavity. A dust removal mechanism is configured to be disposed on one side of the opening. The dust removal mechanism includes a drive assembly (21) and a suction assembly (22). The suction assembly (22) is adapted to extend into or out of the receiving cavity from the opening under the drive assembly (21). When the suction assembly (22) is located in the receiving cavity, the drive assembly (21) is adapted to drive the dust removal mechanism to reciprocate within the receiving cavity to suck up the dust particles in the receiving cavity. A cleaning assembly (3) is adapted to be disposed on the same side of the opening, avoiding the dust removal mechanism. The cleaning assembly (3) includes an infusion component (31) and a plurality of spray components (32). The infusion component (31) has an infusion channel. Each of the spray components (32) is disposed facing the receiving cavity and connected to the infusion component (31). All the spray components (32) are connected to the infusion channel. Both ends of the infusion channel are adapted to be connected to an external water source so that the cleaning liquid in the infusion channel is sprayed toward the receiving cavity through the spray components (32). The dust collection assembly (22) includes a dust removal component (221), a dust collection pipe (222), and a dust collection structure (223). The dust removal component (221) and the dust collection pipe (222) are both disposed on one side of the opening. The dust removal component (221) and the dust collection structure (223) are both connected to the dust collection pipe (222). The dust collection structure (223) is also connected to the drive assembly (21) so as to extend into or out of the receiving cavity under the drive of the drive assembly (21), and to suck up the fragments and dust in the receiving cavity through the dust removal component (221). The vacuuming structure (223) includes a connector (2231), at least two vacuum heads (2232), and a telescopic member (2233). The connector (2231) has a connecting channel, and the telescopic member (2233) has a telescopic channel. Each of the vacuum heads (2232) is disposed on the connector (2231) and communicates with the connecting channel. One end of the telescopic member (2233) is connected to the connector (2231), and the other end is connected to the vacuum pipe (222), so that the telescopic channel communicates the connecting channel and the vacuum pipe (222). The telescopic member (2233) is also connected to the drive assembly (21), so that the drive assembly (21) drives the vacuum head (2232) to extend into or retract from the receiving cavity through the telescopic member (2233).

2. The cleaning system according to claim 1, characterized in that, One end of the suction pipe (222) is connected to the dust removal component (221), and the other end is closed, so that the dust removal component (221) forms a negative pressure between the suction pipe (222) and the receiving cavity.

3. The cleaning system according to claim 2, characterized in that, Along the direction of movement perpendicular to the vacuum head (2232), the size of the connector (2231) is adapted to the size of the opposite sides of the receiving cavity, and the vacuum heads (2232) are evenly spaced on the connector (2231).

4. The cleaning system according to claim 3, characterized in that, The telescopic member (2233) has a fixed end and a telescopic end, and the drive assembly (21) includes a first drive member (211), wherein the fixed end is configured to be stationary relative to the first drive member (211); The driving end of the first driving member (211) is adapted to connect with the telescopic end of the telescopic member (2233) to drive the telescopic end of the telescopic member (2233) to move closer to or further away from the fixed end.

5. The cleaning system according to claim 4, characterized in that, The drive assembly (21) further includes a second drive member (212) and a guide rail (213). The guide rail (213) is disposed on the outer peripheral wall of the suction pipe (222) facing the opening side. The fixed end of the telescopic member (2233) is slidably connected to the guide rail (213) and connected to the drive end of the second drive member (212), so that under the drive of the second drive member (212), the fixed end is adapted to drive the telescopic member (2233) to slide along the guide rail (213).

6. The cleaning system according to claim 1, characterized in that, The infusion component (31) is provided with several mounting parts, the mounting parts are connected to the infusion channel and the outside, and the spray component (32) is connected to the infusion component (31) through the mounting parts.

7. The cleaning system according to claim 6, characterized in that, The spray member (32) is provided with a plurality of spray sections, all of which are connected to the infusion channel and are all arranged facing the receiving cavity side.

8. The cleaning system according to claim 7, characterized in that, The spray sections are evenly spaced on the spray member (32) so that the spray surfaces formed by all the spray sections at least cover the bottom surface of the receiving cavity.

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