Substrate tray handling device and vacuum sampling system

Abstract

This disclosure relates to the field of vacuum device technology, and discloses a substrate tray handling device and a vacuum sampling system. The substrate tray handling device includes a guide rail assembly, a sample transfer cart, a cart body drive assembly, and a sampling assembly. The guide rail assembly includes one or more guide rails. The sample transfer cart includes a cart body, a sliding assembly, and a support platform. The sliding assembly is located at the bottom of the cart body and is mounted on one or more guide rails, for driving the cart body to slide on one or more guide rails. The support platform is located at the top of the cart body and is used to support the sample holder assembly. The cart body drive assembly can be connected to the sample transfer cart and is used to drive the sample transfer cart to slide on one or more guide rails. The sampling assembly includes a sampling head and a sampling drive assembly, the sampling drive assembly being connected to the sampling head so that the sampling head can handle the substrate tray.

Description

Technical Field

[0001] This disclosure relates to the field of vacuum device technology, and in particular to a substrate tray placement and removal device and a vacuum sampling system. Background Technology

[0002] Vacuum equipment, such as large industrial MBE systems, often requires substrate trays that are both large and heavy. Furthermore, industrial MBE systems demand a very clean operating environment for sample loading and unloading, typically performed manually within a glove box. Manually removing substrate trays from sample holders for substrate placement is not only laborious and technically challenging but also carries significant risks. Currently, there is no automated substrate tray handling device for large industrial MBE systems. While existing vacuum robots can operate in a vacuum environment, they are prohibitively expensive. Summary of the Invention

[0003] This disclosure provides a substrate tray picking and placing device, including:

[0004] Guide rail assembly, including one or more guide rails;

[0005] Prototype vehicles, including:

[0006] Vehicle body;

[0007] A sliding component, disposed at the bottom of the vehicle body and mounted on one or more guide rails, for driving the vehicle body to slide on one or more guide rails; and

[0008] The support platform, located on top of the vehicle body, is used to support the sample rack assembly;

[0009] A vehicle drive assembly, connected to the prototype vehicle, is used to drive the prototype vehicle to slide on one or more guide rails; and

[0010] Sampling components, including:

[0011] Sampling head, used to pick up substrate trays; and

[0012] A sampling drive assembly, connected to a sampling head, includes a lifting drive mechanism and a rotating drive mechanism. The lifting drive mechanism is used to drive the sampling head to move up and down, and the rotating drive mechanism is used to drive the sampling head to rotate, so that the sampling head can pick up and place the substrate tray.

[0013] This disclosure provides a vacuum sampling system, including:

[0014] Vacuum cavity; and

[0015] According to any embodiment of the substrate tray picking and placing device of the present disclosure, the guide rail assembly, sample transfer carriage, sampling head and rotary drive mechanism of the substrate tray picking and placing device are disposed inside the vacuum chamber, and a part of the lifting drive mechanism is disposed outside the vacuum chamber and is sealed to the vacuum chamber. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this disclosure or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only one embodiment of this disclosure. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This diagram illustrates the structure of a substrate tray pick-and-place device according to some embodiments of the present disclosure;

[0018] Figure 2 A schematic diagram showing the rotation of the carrier platform in a prototype vehicle according to some embodiments of the present disclosure is provided.

[0019] Figure 3 A bottom view structural schematic diagram of a prototype vehicle according to some embodiments of the present disclosure is shown;

[0020] Figure 4 A schematic diagram illustrating the lifting and rotation of a sampling head according to some embodiments of the present disclosure is shown;

[0021] Figure 5 A bottom view schematic diagram of the lifting transmission device for a sampling head assembly according to some embodiments of the present disclosure is shown.

[0022] Figure 6 A schematic diagram of the internal structure of a lifting transmission device for a sampling assembly according to some embodiments of the present disclosure is shown.

[0023] Figure 7 This diagram illustrates the structure of a guide rail assembly according to some embodiments of the present disclosure;

[0024] Figure 8 This diagram illustrates the structure of a vehicle drive assembly according to some embodiments of the present disclosure;

[0025] Figure 9 A schematic diagram of a vacuum sampling system according to some embodiments of the present disclosure is shown;

[0026] In the above figures, the reference numerals represent:

[0027] 1-Substrate tray handling device

[0028] 10-Sample Vehicle

[0029] 101-Bearing Platform

[0030] 101' - The support platform after rotating 90°

[0031] 1011-Locking Hole

[0032] 102-Transmission rack

[0033] 103-Roller

[0034] 104-Fixed Guide Roller

[0035] 105-Flexible Guide Roller

[0036] 106-Anti-detachment hook

[0037] 107-Locking Pin

[0038] 108-Sample Vehicle Sensor

[0039] 109-Slewing Bearing

[0040] 110-Roof of the vehicle body

[0041] 111-Car Body

[0042] 112-Sliding component

[0043] 1101-Locking pin fixing block

[0044] 20-Sampling Head Assembly

[0045] 201-Sampling Head

[0046] 201' - Sampling head after 90° rotation

[0047] 202-Upper Limit Sensor

[0048] 203-Lower Limit Sensor

[0049] 204-Rotary Zero-position Sensor

[0050] 205-Rotary Drive Mechanism

[0051] 206-Trapezoidal Screw Nut Mechanism Housing

[0052] 207-Lifting Drive Mechanism

[0053] 2071-Lifting Drive Device

[0054] 2072-Lifting Transmission Device

[0055] 20721-Screw

[0056] 20722-Nut

[0057] 20723 - Skateboard

[0058] 20724-Fixing Plate

[0059] 20725-Pulley

[0060] 208-Substrate Tray

[0061] 209-Lifting Sensor

[0062] 210-Sampling Head Sensor

[0063] 211-Sampling Head Support Plate

[0064] 30-Guide rail assembly

[0065] 301-Guide Rail

[0066] 302-Guide Rail Base

[0067] 303-Gear

[0068] 304 Mechanical Limit Block

[0069] 305-Zero Position Sensor

[0070] 306-Limit Sensor

[0071] 40-Vehicle drive assembly

[0072] 401-Servo Motor

[0073] 402-Planetary Gearbox

[0074] 403-First Coupling

[0075] 404 Magnetohydrodynamic Drive Shaft

[0076] 405-Mounting Plate

[0077] 4051 - End Face Seal O-ring Groove

[0078] 2-Sample rack assembly

[0079] 3-Vacuum Chamber

[0080] 4-Glove box

[0081] 1000-Vacuum Sampling System Detailed Implementation

[0082] Some embodiments of this disclosure will now be described with reference to the accompanying drawings. Obviously, the described embodiments are merely exemplary embodiments of this disclosure, and not all embodiments.

[0083] In the description of this disclosure, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," "outer," "top," "bottom," "horizontal," and "longitudinal," etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this disclosure and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this disclosure. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. In the description of this disclosure, it should be noted that unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "coupling" should be interpreted broadly. For example, they can refer to fixed connections or detachable connections; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; and internal connections between two elements. In the description of this disclosure, "a plurality of" includes two or more quantities. Those skilled in the art can understand the specific meaning of the above terms in this disclosure according to the specific circumstances.

[0084] Figure 1 This diagram shows a schematic representation of the substrate tray handling device 1 according to some embodiments of the present disclosure. Figure 2 This diagram shows a rotational schematic of the carrier platform 101 in the transfer vehicle 10 according to some embodiments of the present disclosure. Figure 3 This diagram shows a bottom view of the prototype vehicle 10 according to some embodiments of the present disclosure. Figure 4 A schematic diagram of the structure of a sampling head assembly 20 according to some embodiments of the present disclosure is shown.

[0085] like Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown, in some embodiments of this disclosure, the substrate tray handling device 1 may include a guide rail assembly 30, a sample transfer cart 10, a vehicle body drive assembly 40, and a sampling assembly 20. The guide rail assembly 30 may include one or more guide rails. The sample transfer cart 10 may include a vehicle body 111, a sliding assembly 112, and a carrying platform 101. The sliding assembly 112 is disposed at the bottom of the vehicle body 111 and is disposed on one or more guide rails 301 (e.g., ...). Figure 7 As shown, a drive assembly 40 is used to drive the vehicle body 111 to slide on one or more guide rails 301. A support platform 101 is located on top of the vehicle body 111 and is used to support the sample holder assembly (not shown in the figure). The vehicle body drive assembly 40 can be connected to the sample transfer vehicle 10 and is used to drive the sample transfer vehicle 10 to slide on one or more guide rails.

[0086] like Figure 1 and Figure 4As shown, the sampling assembly 20 may include a sampling head 201 and a sampling drive assembly. The sampling head 201 is used to pick up the substrate tray 208, for example as... Figure 6 The sampling head 201 shown picks up the substrate tray 208. The sampling drive assembly is connected to the sampling head 201 and includes a lifting drive mechanism 207 and a rotation drive mechanism 205. The lifting drive mechanism 207 can be used to drive the sampling head 201 to move up and down, and the rotation drive mechanism 205 can be used to drive the sampling head 201 to rotate, so that the sampling head 201 can pick up and place the substrate tray 208.

[0087] Figure 7 A schematic diagram of the structure of a guide rail assembly 30 according to some embodiments of the present disclosure is shown.

[0088] like Figure 3 and Figure 7 As shown, in some embodiments, one or more guide rails 301 may include a left guide rail and a right guide rail. The sliding assembly 112 may include multiple sets of rollers 103, one or more fixed guide wheels 104, and one or more elastic guide wheels 105. The multiple sets of rollers 103 may be disposed at the bottom of the vehicle body 111 to support the sliding of the vehicle body 111 on the left and right guide rails. One or more fixed guide wheels 104 may be disposed on one side of the bottom of the vehicle body 111, for example, as shown in the image. Figure 3 As shown on the right side. One or more elastic guide wheels 105 may be provided on the other side of the bottom of the vehicle body 111, for example, as shown. Figure 3 As shown on the right side. One or more elastic guide wheels 105 and one or more fixed guide wheels 104 cooperate with each other and slide and engage on the outside of the left and right guide rails to limit and guide the sliding of the car body 111 on the left and right guide rails.

[0089] Those skilled in the art will understand that, although Figure 3 Only two fixed guide wheels 104 and two flexible guide wheels 105 are shown in the diagram, but the sample transfer vehicle 10 may include other numbers of fixed guide wheels 104 and flexible guide wheels 105.

[0090] like Figure 2 As shown, in some embodiments, the sliding assembly 112 may further include a transmission rack 102 disposed on one side of the vehicle body, for example, as Figure 3 The right side is shown.

[0091] like Figure 1 As shown, the substrate tray handling device 1 also includes a vehicle body drive assembly 40. The vehicle body drive assembly 40 includes a vehicle body drive device and a gear 303 (see...). Figure 1 and Figure 7 Gear 303 is coupled to the output end of the vehicle body drive unit and cooperates with the transmission rack 102 to drive the vehicle body 111 to slide on one or more guide rails 301. Figure 1 and Figure 7 As shown, a support plate can be fixedly installed at the lower end of the left guide rail, and the gear 303 can be rotatably mounted on the support plate and mesh with the transmission rack 102.

[0092] In some embodiments, such as Figure 1 As shown, the lifting drive mechanism 207 includes a lifting drive device 2071 and a lifting transmission device 2072. The lifting transmission device 2072 is connected to the lifting drive device 2071 and the sampling head 201, and is used to transmit the driving force of the lifting drive device 2071 to the sampling head 201 to drive the sampling head 201 to move up and down.

[0093] Figure 5 The diagram shows a bottom view of the lifting transmission device 2072 of the sampling head assembly 20 according to some embodiments of the present disclosure. Figure 6 A schematic diagram of the internal structure of the lifting transmission device 2072 of the sampling component 20 according to some embodiments of the present disclosure is shown.

[0094] like Figure 6 As shown, in some embodiments, the lifting transmission device 2072 may include a lead screw 20721, a nut 20722, and a sliding plate 20723. The lead screw 20721 is connected to the output end of the lifting drive device 2071 and can rotate under the drive of the lifting drive device 2071. The nut 20722 is threadedly connected to the lead screw 20721 for lifting under the drive of the lead screw and is capable of reverse self-locking. In some embodiments, the lead screw 20721 may be a trapezoidal lead screw. However, those skilled in the art will understand that the lead screw 20721 can take any suitable form, such as a ball screw.

[0095] like Figure 6 As shown, the lower part of the first side of the slide plate 20723 is fixedly connected to the nut 20722. For example, as... Figure 6 As shown, a nut seat can be provided on the lower left side of the slide plate 20723, and the nut seat can be fixedly connected to the nut 20722. The sampling head 201 can be rotatably connected to the upper part of the slide plate 20723. For example, as... Figure 6 As shown, the upper part of the slide plate 20723 may include a sampling head support plate 211, and the sampling head 201 can be rotatably mounted on the sampling head support plate 211, for example, by a shaft hole connection. The slide plate 20723 can be used to drive the sampling head 201 to rise and fall by the lifting and lowering of the nut 20722 under the rotation drive of the lead screw 20721.

[0096] like Figure 6 As shown, in some embodiments, the lifting transmission device 2072 may further include a fixed plate 20724 and at least one set of pulleys 20725. The fixed plate 20724 is located on the second side of the sliding plate 20723 (e.g., as shown in the image). Figure 6(As shown on the right), it can be fixedly installed, for example, by means of a frame, at one end of the guide rail assembly. The lead screw 20721 can also be fixedly connected to the fixing plate 20724, for example, by means of a frame.

[0097] like Figure 6 As shown, the surface of the fixing plate 20724 facing the second side of the lead screw 20721 and the slide plate 20723 is provided with a raised slide rail. At least one set of pulleys 20725 can be provided on the second side of the slide plate 20723. The pulleys are provided with grooves that match the slide rails and can slide on the slide rails for limiting and guiding the slide plate.

[0098] In some embodiments, at least one set of pulleys 20725 includes two sets of pulleys, which are rotatably mounted on the slide plate 20723 by screws. In some embodiments, the pulleys have U-shaped or V-shaped grooves that cooperate with the slide rails to limit and guide the slide plate 20723, making the up-and-down movement of the sampling head more stable and precise.

[0099] like Figure 5 and Figure 6 As shown, in some embodiments, the sampling assembly 20 may further include a lifting sensor 209, a housing 206, an upper limit sensor 202, and a lower limit sensor 203. The lifting sensor 209 is mounted on the nut or as shown in the diagram. Figure 6 The lower part of the slide plate is shown. The housing 206 is used to house the lifting transmission device 2072, for example, as shown... Figure 6 The diagram shows a lead screw 20721, a nut 20722, a portion of a sliding plate 20723, a fixing plate 20724, and at least one set of pulleys 20725. An upper limit sensor 202 is located on the upper part of the housing 206 and works in conjunction with a lifting sensor 209 to limit the upper position of the sampling head 201. A lower limit sensor 203 is located on the lower part of the housing 206 and works in conjunction with the lifting sensor 209 to limit the lower position of the sampling head 201.

[0100] In some embodiments, the upper limit sensor 202 and / or the lower limit sensor 203 can be embedded in the side wall of the housing 206 through the housing 206 to achieve better cooperation with the sensor 209. For example, a pre-drilled hole can be provided in the housing 206 for the sensing part of the upper limit sensor 202 and / or the lower limit sensor 203 to pass through the housing 206, facilitating sensing and limiting with the lifting sensor 209. This allows for a more compact device design, saving cost and space, and by placing the main body of the upper limit sensor 202 and / or the lower limit sensor 203 outside the housing, it is easy to disassemble and replace the upper limit sensor 202 and / or the lower limit sensor 203 as needed.

[0101] like Figure 5 and Figure 6As shown, in some embodiments, the sampling assembly 20 may further include a sampling head sensor 210 and a rotation zero-position sensor 204. The sampling head sensor 210 is disposed on the sampling head 201, for example as... Figure 6 As shown on the lower side. The rotational zero-position sensor 204 is mounted on the housing (e.g., as shown on the lower side). Figure 5 (as shown) or on the lifting transmission device (e.g., as shown) Figure 6 As shown, it works in conjunction with the sampling head sensor 210 to limit the sampling head to zero position, for example, it can be used to rotate the sampling head to zero.

[0102] In some embodiments, the rotary drive mechanism 205 may include a motor and a worm gear mechanism (not shown). The input end of the worm gear mechanism is connected to the output end of the motor, and the output end of the worm gear mechanism is connected to the sampling head 201 for driving the sampling head 201 to rotate, and is capable of reverse self-locking. Those skilled in the art will understand that, Figure 4 As shown, the motor of the rotary drive mechanism 205 can be a vacuum stepper motor.

[0103] In some embodiments, the sampling head support plate 211 ( Figure 6 A bearing housing (not shown in the figure) is installed on the bearing (shown in the figure). A bearing is installed inside the bearing housing. The outer ring of the bearing is fixed to the bearing housing. A rotating shaft is installed on the inner ring of the bearing. The upper flange of the rotating shaft is engaged and fixedly connected to the lower step of the worm wheel in the worm gear mechanism.

[0104] Figure 8 A schematic diagram of the structure of a lifting drive device 2071 or a vehicle body drive assembly 40 according to some embodiments of the present disclosure is shown. Figure 8 As shown, in some embodiments, the lifting drive device 2071 or the vehicle body drive device includes a servo motor 401, a planetary reducer 402, a coupling 403, a magnetohydrodynamic (MHD) drive shaft 404, and a mounting plate 405. The input end of the planetary reducer 402 is connected to the output shaft of the servo motor 401. The input end of the coupling 403 is connected to the output end of the planetary reducer 402. The input end of the MHD drive shaft 404 is connected to the output end of the coupling 403, and the MHD drive shaft 404 is used to transmit power in a vacuum-isolated manner. The output end of the MHD drive shaft 404 is connected to a gear 303 of the lifting drive device 2072 or the vehicle body drive assembly located in a vacuum environment.

[0105] Mounting plate 405 is located at the distal end of magnetohydrodynamic drive shaft 404, such as Figure 1 and Figure 8The upper end, as shown, is used to support the servo motor 401, planetary reducer 402, coupling 403, and magnetohydrodynamic drive shaft 404. The mounting plate 405 is provided with an end face sealing groove 4051, which, in conjunction with a sealing ring, achieves a sealed isolation. For example, the servo motor 401, planetary reducer 402, coupling 403, and magnetohydrodynamic drive shaft 404 can be directly or indirectly mounted onto the mounting plate 405, and the mounting plate 405 can be sealed and mounted into a vacuum chamber (e.g., as shown in the image). Figure 9 The glove box 4 shown may contain an inert gas (such as dry nitrogen) to transmit driving force to devices within the vacuum chamber, for example, to the lifting transmission device 2072 or the gear 303 of the vehicle body drive assembly and the sample transfer vehicle 10. Figure 8 The lifting drive device 2071 shown can be connected with Figure 1 The lifting transmission device 2072 shown is used to realize the transmission of power between the inside and outside. For example... Figure 8 The vehicle drive unit shown can be connected with Figure 1 The gear 303 shown is used to achieve power transmission between the inside and outside.

[0106] Those skilled in the art will understand that the planetary reducer 402 can be used to increase torque and provide a certain amount of reverse resistance.

[0107] Figure 4 A schematic diagram illustrating the lifting and rotation of a sampling head according to some embodiments of the present disclosure is shown. Figure 4 As shown, sampling head 201 and sampling head 201' after being raised and rotated 90°.

[0108] like Figure 3 As shown, in some embodiments, the transfer vehicle 10 may further include a slewing bearing 109, a locking pin fixing block 1101, and a locking pin 107. The slewing bearing 109 is rotatably connected to the top plate 110 of the vehicle body and is used to support the carrying platform 101. The slewing bearing 109 includes a plurality of slewing pin holes spaced apart on its outer peripheral surface. The locking pin fixing block 1101 is disposed on the top plate of the vehicle body and includes a locking pin mounting hole. The locking pin 107 can be installed in the locking pin mounting hole, and by inserting or pulling out one of the plurality of slewing pin holes, the carrying platform 101 can be locked or unlocked at multiple rotation angles.

[0109] In some embodiments, the locking pin 107 is a resilient pin, and the locking pin may also include a handle provided at the top of the locking pin. By pulling the handle, the locking pin 107 can be pulled out of the rotary pin hole, and when it is rotated back into the rotary pin hole, it can be automatically reset and inserted into the rotary pin hole.

[0110] Those skilled in the art will understand that the rotation of the support platform 101 facilitates the movement of the sample transfer vehicle 10 and the transfer from the sample holder assembly (e.g., such as...). Figure 9 Samples are taken from the sample holder assembly 2 shown. Figure 2 In the illustrated embodiment, only two rotation angles of the platform are locked, including the 0° bearing platform 101 and the bearing platform 101' after rotating 90°. However, the slewing bearing 109 may include more slewing pin holes, thereby enabling locking of the bearing platform 101 at more different angles, such as 30°, 60°, etc.

[0111] like Figure 2 As shown, in some embodiments, the transfer vehicle 10 may further include one or more anti-detachment hooks 106. One or more anti-detachment hooks 106 are disposed at the bottom of the vehicle body 111 and are clearance-fitted with one or more guide rails 301, for example... Figure 7 The left and / or right guide rails 301 shown cooperate to prevent the car body 111 from derailing.

[0112] like Figure 2 As shown, in some embodiments, the carrier platform 101 may include one or more locking holes 1011 for locking the sample holder assembly 2 onto the carrier platform 101.

[0113] Those skilled in the art will understand that the sample holder assembly 2 may be provided with a buckle that cooperates with the locking hole 1011 for locking.

[0114] like Figure 3 As shown, in some embodiments, the sample transfer vehicle 10 may further include one or more sample transfer vehicle sensors 108. One or more sample transfer vehicle sensors 108 may be disposed at the front and / or rear ends of the bottom of the vehicle body 111. For example, as... Figure 3 As shown, sample transfer sensors 108 are respectively installed at the front and rear ends of the bottom of the vehicle body 111. Figure 7 As shown, the guide rail assembly 30 includes a zero-position sensor 305 and / or a limit sensor 306. The zero-position sensor 305 is located at the end furthest from the sampling assembly 20 and works in conjunction with the sample transfer vehicle sensor 108 to electrically limit the zero position of the sample transfer vehicle. The limit sensor 306 is located at the end closest to the sampling assembly 20 and works in conjunction with the sample transfer vehicle sensor 108 to electrically limit the extreme positions of the sample transfer vehicle.

[0115] like Figure 7 As shown, in some embodiments, the guide rail assembly 30 may include a mechanical limiting block 304 disposed at at least one end of one or more guide rails 301 for mechanically limiting the sample transfer vehicle 10.

[0116] In some embodiments, the guide rail assembly 30 may further include a guide rail base 302. The guide rail base 302 is fixed to the vacuum chamber (e.g., as shown in the image). Figure 9 Inside the glove box 4 shown, one or more guide rails 301 are fixedly mounted on the guide rail base 302. Gears 303 can be mounted on one or more guide rails, for example... Figure 7 As shown on the left, it meshes with the transmission rack 102, driving the sample transfer vehicle 10 to slide.

[0117] Those skilled in the art will understand that one or more guide rails 301 can be fixed to the guide rail base 302 by screws.

[0118] In some embodiments, a vacuum sampling system 1000 may include a vacuum chamber and a substrate tray handling device 1 according to any embodiment of the present disclosure connected to the vacuum chamber. The guide rail assembly 30, the sample transfer cart 10, the sampling head 201, a portion of the lifting drive mechanism 207 (e.g., lifting transmission device 2072), and the rotation drive mechanism 205 of the substrate tray handling device 1 may be disposed inside the vacuum chamber, while another portion of the lifting drive mechanism 207 (e.g., lifting drive device 2071) and the vehicle body drive device may be disposed outside the vacuum chamber and sealed to the vacuum chamber.

[0119] Figure 9 A schematic diagram of a vacuum sampling system 1000 according to some embodiments of the present disclosure is shown. Figure 9 As shown, the vacuum sampling system 1000 can be a sampling system of an MBE system (e.g., a large industrial MBE system), including an inlet / outlet vacuum chamber 3, a vacuum chamber (e.g., a glove box 4) docked with the inlet / outlet vacuum chamber 3, and a substrate tray handling device 1 provided in any embodiment of this disclosure. The sample rack assembly 2 can be a sample rack assembly of an MBE system, and the substrate tray handling device 1 can be sealed to the vacuum chamber (e.g., the glove box 4) for automatically handling the substrate tray 208 on the sample rack assembly 2, facilitating substrate replacement by the operator.

[0120] Those skilled in the art will understand that, in some embodiments, the substrate tray handling device 1 may further include a controller (not shown). The controller may be connected to the lifting drive mechanism 207 and the rotation drive mechanism 205 of the vehicle body drive assembly 40 and the sampling drive assembly, for example, to the motors of the lifting drive mechanism 207 and the rotation drive mechanism 205, to control the operation of the motors. The controller may be configured to control the vehicle body drive assembly 40 to drive the sample transfer carriage 10 into position, for example, between a zero position and a limit position, and to dock at a docking station, a rotation station, a sampling station, etc., to transport the sample holder assembly 2. The controller may also be configured to control the lifting drive mechanism 207 to lift and lower the sampling head 201 for sampling, for example, sampling on the sample holder assembly 2. The controller may also be configured to control the rotation drive mechanism 205 to rotate the sampling head 201 to transfer the sample. In addition, the controller can also be connected to the sensors used in any embodiment of this disclosure to track the movement of the sample transfer vehicle 10 and the sampling component 20, and coordinate the control of the vehicle body drive component 40, the lifting drive mechanism 207 and the rotation drive mechanism 205 based on the tracking.

[0121] For example, in some embodiments, with Figure 9 Taking the vacuum sampling system 1000 shown as an example, the sampling operation process of the substrate tray picking and placing device 1 may include the following steps:

[0122] 1) The controller can control the vehicle drive assembly 40 to drive the sample transfer vehicle 10 to the docking position where it is connected to the vacuum chamber 3, placing the sample holder assembly 2 from inside the vacuum chamber 3 onto the support platform 101 and locking it through the locking hole 1011. For example, the placement and locking operations can be performed manually by the operator.

[0123] 2) The controller can control the vehicle drive assembly 40 to drive the sample transfer vehicle 10 to the rotating station, release the locking pin 107, rotate the carrying platform 101 90°, and then lock the current position by locking the pin 107. For example, the operator can manually perform the release, rotation, and locking operations. At this time, the sample holder assembly 2 is in a sample-ready posture.

[0124] 3) The controller can control the lifting drive mechanism 207 to drive the sampling head 201 to rise and fall to a height that matches the substrate tray 208 to be sampled. Taking the first layer substrate tray 208 as an example: the sampling head 201 is raised and lowered to the height of the first layer sampling position.

[0125] 4) The controller can control the vehicle drive assembly 40 to drive the sample transfer vehicle 10 to the sampling station, so that the sampling head 201 is located below the first substrate tray 208.

[0126] 5) The controller can also control the lifting drive mechanism 207 to drive the sampling head 201 to rise to a predetermined height, such as 30mm, so that the sampling head 201 lifts the first substrate tray 208 away from the sample holder assembly and falls onto the sampling head 201.

[0127] 6) The controller can control the vehicle body drive assembly 40 to drive the sample transfer vehicle 10 back to the rotary station.

[0128] 7) The controller can control the lifting drive mechanism 207 to drive the sampling head 201 to the zero position.

[0129] 8) The controller can also control the rotary drive mechanism 205 to drive the sampling head 201 to rotate, for example, rotate 90°, to the substrate pick-up and drop station to perform substrate pick-up and drop operations. For example, the substrate pick-up and drop operations can be performed manually by the operator.

[0130] Those skilled in the art will understand that the above sampling procedure is merely exemplary and can be modified as needed by changing the order of steps, merging steps, omitting steps, recombining steps, etc.

[0131] The substrate tray handling device according to some embodiments of this disclosure can bring beneficial technical effects. For example, by setting a guide rail in a vacuum chamber and a slidable sample transfer cart on the guide rail, and a lifting and rotating sampling head assembly at the other end of the guide rail, the automatic handling of the substrate tray 208 is achieved through the action coordination between the sample transfer cart and the sampling head assembly, reducing the labor intensity of workers, reducing risks, and improving the accuracy and efficiency of sampling. Furthermore, the substrate tray handling device is less expensive than a vacuum robot, and its main components are located in a vacuum chamber (e.g., glove box 4), which avoids moisture and oxidation problems caused by substrate exposure to the atmosphere, facilitating maintenance and extending its service life.

[0132] It should be noted that the above are merely exemplary embodiments of this disclosure and are not intended to limit this disclosure. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this disclosure should be included within the scope of protection of this disclosure.

Claims

1. A substrate tray picking and placing device, characterized in that, include: A guide rail assembly, used for mounting in a vacuum chamber, comprising one or more guide rails; A sample transfer vehicle, used to be placed in a vacuum chamber, includes: Vehicle body; A sliding component, disposed at the bottom of the vehicle body and on one or more guide rails, for driving the vehicle body to slide on the one or more guide rails; and A support platform, located on top of the vehicle body, is used to support the sample rack assembly; A vehicle body drive assembly, connected to the sample transfer vehicle, is used to drive the sample transfer vehicle to slide on one or more guide rails. The vehicle body drive assembly includes a vehicle body drive device disposed outside the vacuum chamber to provide driving force to the sample transfer vehicle disposed within the vacuum chamber; and Sampling components, including: A sampling head, designed to be positioned within a vacuum chamber and used to pick up a substrate tray; and A sampling drive assembly, connected to the sampling head, includes a lifting drive mechanism and a rotating drive mechanism. The lifting drive mechanism drives the sampling head to move up and down, and the rotating drive mechanism is disposed in a vacuum chamber and drives the sampling head to rotate, so that the sampling head can pick up and place a substrate tray. The lifting drive mechanism includes a lifting drive device disposed outside the vacuum chamber and a lifting transmission device disposed inside the vacuum chamber. The lifting transmission device is connected to the lifting drive device and the sampling head, and is used to transmit the driving force of the lifting drive device disposed outside the vacuum chamber to the sampling head disposed inside the vacuum chamber, so as to drive the sampling head to move up and down.

2. The substrate tray handling device according to claim 1, characterized in that, The one or more guide rails include a left guide rail and a right guide rail; The sliding component includes: Multiple sets of rollers are provided at the bottom of the vehicle body to support the vehicle body sliding on the left and right guide rails; One or more fixed guide wheels are disposed on one side of the bottom of the vehicle body; and One or more elastic guide wheels are disposed on the other side of the bottom of the vehicle body. The one or more elastic guide wheels cooperate with the one or more fixed guide wheels to slide and engage on the outside of the left and right guide rails, thereby limiting and guiding the sliding of the vehicle body on the left and right guide rails.

3. The substrate tray handling device according to claim 1, characterized in that, The sliding assembly also includes a transmission rack disposed on one side of the vehicle body. The vehicle drive assembly includes: The gear is coupled to the output end of the vehicle body drive device and engages with the transmission rack to drive the vehicle body to slide on one or more guide rails.

4. The substrate tray picking and placing device according to claim 3, characterized in that, The lifting drive device of the lifting drive mechanism or the vehicle drive device of the vehicle body drive assembly includes: Servo motor; A planetary gear reducer, wherein the input end of the planetary gear reducer is connected to the output shaft of the servo motor; A coupling, the input end of which is connected to the output end of the planetary reducer; A magnetohydrodynamic (MHD) drive shaft, the input end of which is connected to the output end of the coupling, the MHD drive shaft being used to transmit power in a vacuum-isolated manner, and the output end of the MHD drive shaft being connected to a gear of the lifting transmission device or the vehicle body drive assembly located in a vacuum chamber; and The mounting plate, located at the far end of the magnetohydrodynamic transmission shaft, is used to support the servo motor, planetary reducer, coupling, and magnetohydrodynamic transmission shaft. The mounting plate is provided with an end face sealing groove, which works with a sealing ring to achieve a vacuum seal.

5. The substrate tray handling device according to claim 1, characterized in that, The lifting transmission device includes: The lead screw is connected to the output end of the lifting drive device; A nut, threadedly connected to the lead screw, is used for lifting and lowering under the drive of the lead screw and is capable of reverse self-locking; and The slide plate has its lower part on the first side fixedly connected to the nut, and the sampling head is rotatably connected to the upper part of the slide plate. The slide plate is used to drive the sampling head up and down through the nut under the drive of the lead screw.

6. The substrate tray picking and placing device according to claim 5, characterized in that, The lifting transmission device also includes: A fixed plate is provided, the lead screw is fixedly connected to the fixed plate, and the surface of the fixed plate facing the second side of the lead screw and the slide plate is provided with a raised slide rail; At least one set of pulleys is provided on the second side of the skateboard, and the pulleys are provided with grooves that match the slide rail and can slide on the slide rail for limiting and guiding the skateboard.

7. The substrate tray picking and placing device according to claim 5, characterized in that, The sampling component also includes: A lifting sensor is mounted on the nut or on the lower part of the slide plate; A housing for accommodating the lifting transmission device; An upper limit sensor is disposed on the upper part of the housing and is used in conjunction with the lifting sensor to limit the upper position of the sampling head; A lower limit sensor is located at the lower part of the housing and is used in conjunction with the lifting sensor to limit the sampling head at the lower part.

8. The substrate tray handling device according to claim 1, characterized in that, The sample transfer vehicle also includes: A slewing bearing is rotatably connected to the top plate of the vehicle body and is used to support the load-bearing platform. The slewing bearing includes a plurality of slewing pin holes spaced apart on the outer peripheral surface. A locking pin fixing block is disposed on the top plate of the vehicle body, the locking pin fixing block including a locking pin mounting hole; and A locking pin is installed in the locking pin mounting hole. By inserting or pulling out one of the plurality of rotating pin holes, the support platform can be locked or unlocked at multiple rotation angles.

9. The substrate tray picking and placing device according to claim 1, characterized in that, The sample transfer vehicle includes one or more sample transfer vehicle sensors, which are disposed at the front and / or rear ends of the bottom of the vehicle body; The guide rail assembly includes a zero-position sensor and / or a limit sensor. The zero-position sensor is located at the end of the guide rail assembly away from the sampling assembly and works in conjunction with the sample transfer vehicle sensor to electrically limit the zero position of the sample transfer vehicle. The limit sensor is located at the end of the guide rail assembly close to the sampling assembly and works in conjunction with the sample transfer vehicle sensor to electrically limit the extreme position of the sample transfer vehicle.

10. The substrate tray picking and placing device according to claim 7, characterized in that, The sampling component also includes: A sampling head sensor is disposed on the sampling head; and A rotary zero-position sensor is installed on the housing or the lifting transmission device and works in conjunction with the sampling head sensor to limit the zero position of the sampling head.

11. The substrate tray handling device according to claim 1, characterized in that, The rotary drive mechanism includes: Electric motor; A worm gear mechanism is provided, wherein the input end of the worm gear mechanism is connected to the output end of the motor, and the output end of the worm gear mechanism is connected to the sampling head for driving the sampling head to rotate, and is capable of reverse self-locking.

12. The substrate tray handling device according to claim 1, characterized in that, The guide rail assembly includes a mechanical limiting block disposed at at least one end of one or more guide rails for mechanically limiting the sample transfer vehicle; and / or The sample transfer vehicle includes one or more anti-derailment hooks, which are disposed at the bottom of the vehicle body and are clearance-fitted with one or more guide rails to prevent the vehicle body from derailing; and / or The support platform includes one or more locking holes for locking the sample holder assembly onto the support platform.

13. The substrate tray handling device according to any one of claims 1-12, characterized in that, Also includes: The controller is connected to the lifting drive mechanism and the rotation drive mechanism of the vehicle body drive assembly and the sampling drive assembly, and is used to control the vehicle body drive assembly to drive the sample transfer vehicle to position, control the lifting drive mechanism to lift and lower the sampling head to collect samples, and control the rotation drive mechanism to rotate the sampling head to transfer samples.

14. A vacuum sampling system, characterized in that, include: Vacuum cavity; as well as According to any one of claims 1-13, the substrate tray picking and placing device, the guide rail assembly, the sample transfer cart, the sampling head and the rotary drive mechanism of the substrate tray picking and placing device are disposed inside the vacuum chamber, and the lifting drive device of the lifting drive mechanism is disposed outside the vacuum chamber and is sealed to the vacuum chamber.

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