An ultra-clean electromagnetic piezoelectric micropump

By using the structural design and ultra-clean materials of the electromagnetic piezoelectric micropump, the problems of high cost of magnetic levitation pumps and low flow rate of piezoelectric micropumps have been solved, achieving high-precision flow control and ultra-clean fluid transportation without liquid backflow.

CN117588389BActive Publication Date: 2026-07-03ZHEJIANG UNIV HIGH-END EQUIP RES INST
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
ZHEJIANG UNIV HIGH-END EQUIP RES INST
Filing Date
2023-11-21
Publication Date
2026-07-03

AI Technical Summary

Technical Problem

In existing technologies, magnetic levitation pumps are costly and complex to control, while piezoelectric micropumps have poor inlet and outlet flow control and low flow rate, which cannot meet the needs of ultra-clean fluid transportation.

Method used

Employing an ultra-clean electromagnetic piezoelectric micro-pump, the movement of the valve core magnet is controlled by an electromagnetic component, and fluid delivery is achieved by combining the deformation of piezoelectric materials. The use of ultra-clean materials and structural design avoids contamination and wear, and provides precise flow control.

Benefits of technology

It achieves high-precision flow control without the need for complex magnetic levitation control, avoids mechanical fatigue and liquid backflow, improves flow rate, and meets the requirements for ultra-clean fluid transportation.

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Abstract

This invention discloses an ultra-clean electromagnetic piezoelectric micropump, comprising: an electromagnetic component, a pump body, a pump cover, an elastic component, and a valve core magnet. The pump body is a cylindrical body with stepped through holes inside, divided into three sections axially. The wall surface of the second section of the pump body contains piezoelectric material, and several piezoelectric cavities with piezoelectric material on their walls are arranged in its internal cavity. The walls of the pump body and the piezoelectric cavities are respectively connected to an external power source. The first and third sections of the pump body are tightly fitted with two pump covers, forming an inlet flow channel and an outlet flow channel inside the pump body. An elastic component is installed in both the inlet and outlet flow channels, and a valve core magnet is fixed to the elastic component. The projected area of ​​the valve core magnet is larger than the cross-section of the flow channel in the second section of the pump body. An electromagnetic component is installed on the outer wall of the pump body to control the movement of the valve core magnet, thereby controlling the opening and closing of the inlet and outlet flow channels. This invention can achieve non-backflow bidirectional flow without changing the installation position, and has high output flow accuracy.
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