Air knife assembly and vapor deposition apparatus

Abstract

The application provides a wind knife assembly and a vapor deposition device, and relates to the technical field of glass manufacturing equipment.The wind knife assembly comprises a main blowing plate and a secondary blowing plate, at least one air inlet is arranged on the main blowing plate, and the gas entering from the air inlet enters into a first slit after sequentially passing through a first upper concave cavity, a second upper concave cavity and a first lower concave cavity.The wind knife assembly of the vapor deposition device provided by the application can make the airflow entering the wind knife assembly stable, achieve the purpose of uniform blowing, avoid the situation that the glass surface reaction is uneven due to uneven blowing, and ensure that the mixed gas maintains a low temperature when the mixed gas does not flow out of the first slit, thereby avoiding the reaction of the mixed gas in advance.The air suction assembly can uniformly suck away waste gas, thereby achieving uniform air suction, avoiding the situation that the glass surface reaction is uneven due to uneven air suction, and affecting the quality of products.

Description

Technical Field

[0001] This invention relates to the technical field of glass manufacturing equipment, and in particular to an air knife assembly and a vapor deposition apparatus. Background Technology

[0002] Chemical vapor deposition (CVD) is defined as the deposition of a solid thin film on a substrate surface due to a gas-phase chemical reaction. It is a thin film process in which the deposited material is typically atoms, molecules, or a combination of both. Generally speaking, any process that forms a solid thin film on a substrate through a surface-mediated reaction involving the adsorption of a gas-phase precursor is called CVD.

[0003] Chemical vapor deposition (CVD) is a process technology in which reactants undergo a chemical reaction under specific atmospheric conditions to produce a solid substance that is deposited on the surface of a heated solid substrate, thereby obtaining a solid material. This process is commonly used in glass manufacturing to form specific thin films on the glass surface, improving product quality.

[0004] Traditional CVD equipment is large and complex, making it unsuitable for certain production scenarios. CVD reactions require a certain temperature, resulting in CVD equipment operating in a high-temperature environment. The temperature of the mixed gas that does not reach the glass surface is too high, posing a safety hazard. Furthermore, it is difficult to ensure the uniformity of gas mixing, blowing, and suction at the same time, affecting product quality. Summary of the Invention

[0005] The purpose of this invention is to provide an air knife assembly and a vapor deposition apparatus to alleviate the technical problems of uneven mixing of mixed gases, unstable airflow blowing onto the glass surface, and uneven reaction on the glass surface during the gas suction process, which affect product quality.

[0006] The present invention provides an air knife assembly, comprising two abutting air-blowing plates, the two air-blowing plates being a main air-blowing plate and a secondary air-blowing plate, wherein the main air-blowing plate has a first upper concave cavity and a first lower concave cavity arranged from top to bottom on the side facing the secondary air-blowing plate; and the secondary air-blowing plate has a second upper concave cavity arranged on the side facing the main air-blowing plate.

[0007] A first gasket is provided between the main air blowing plate and the secondary air blowing plate. The first gasket forms a first slit between the main air blowing plate and the secondary air blowing plate. The first slit is located at the lower end of the air knife assembly.

[0008] At least one air inlet is provided on the main air blowing plate, and the air inlet is connected to the first upper concave cavity. The second upper concave cavity is connected to the first upper concave cavity and the first lower concave cavity respectively. The gas entering from the air inlet passes through the first upper concave cavity, the second upper concave cavity and the first lower concave cavity in sequence before entering the first slit.

[0009] In an optional embodiment, an inlet is provided at one end of the air blowing plate along its length, and an outlet is provided at the other end, with a cooling chamber formed between the inlet and the outlet; the cooling chamber is located at the lower end of the air blowing plate; and a temperature sensor is provided at both the inlet and the outlet.

[0010] In an optional embodiment, a mixing assembly is also included, the mixing assembly comprising a mixing tank, an air intake pipe group being provided at the upper end of the mixing tank, the air intake pipe group comprising multiple air intake pipes, the multiple air intake pipes including a main air intake pipe and at least one auxiliary air intake pipe; and a mixing pipe being provided at the lower end of the mixing tank, each of the mixing pipes being connected to an air inlet.

[0011] In an optional embodiment, the air intake pipeline includes a first air intake pipe, a flow sensor, and a second air intake pipe arranged in sequence. The flow sensor is connected to the second air intake pipe via a quick-connect fitting, and the second air intake pipe is connected to the mixing tank via a quick-connect fitting.

[0012] In an optional embodiment, a mixing cover is provided on the mixing tank, and the main air intake pipe is provided on the mixing cover, and the main air intake pipe is connected to a mesh nozzle provided at the lower end of the mixing cover.

[0013] In an optional embodiment, the mixing tank is provided with mixing plates and guide blocks alternately from top to bottom. The upper end surface of the guide block is provided with a downward concave upper guide concave surface, and the lower end surface of the guide block is provided with an upward concave lower guide concave surface. A guide hole is provided between the upper guide concave surface and the lower guide concave surface.

[0014] The mixing plate is provided with a plurality of mixing holes, which are arranged on the mixing plate to form a flow-blocking area on the mixing plate, and the flow-blocking area corresponds to the flow-guiding hole.

[0015] The first slit between the main air-blowing plate and the secondary air-blowing plate of the air knife assembly provided by this invention allows gas entering from the air inlet to enter the first upper concave cavity, then the second upper concave cavity, and then the first lower concave cavity, finally flowing out from the first slit. This makes the airflow entering the air knife assembly more stable, and then blown out from the first slit, achieving the purpose of uniform air blowing and avoiding uneven reaction on the glass surface caused by uneven air blowing.

[0016] The present invention provides a vapor deposition apparatus, comprising two suction components and an air knife assembly as described in any of the preceding embodiments, wherein the air knife assembly is disposed between the two suction components;

[0017] An assembly block is provided between the air intake assembly and the air knife assembly, and the assembly block makes the air intake assembly and the air intake assembly form the main body of the coating device;

[0018] A first baffle is provided on the side of the air intake assembly away from the air knife assembly, and second baffles are provided at both ends of the air knife assembly along its length. The two first baffles and the two second baffles form a rectangular frame, and the lower end of the rectangular frame is not higher than the lower end of the air knife assembly. The rectangular frame is used to limit the dispersion of the gas blown out by the air knife assembly.

[0019] In an optional embodiment, the air intake assembly includes two abutting air intake plates, which are a main air intake plate and a secondary air intake plate, respectively. On the side of the main air intake plate facing the secondary air intake plate, there are a third upper concave cavity and a third lower concave cavity from top to bottom; and on the side of the secondary air intake plate facing the main air intake plate, there is a fourth upper concave cavity.

[0020] A second gasket is provided between the main intake plate and the secondary intake plate. The first gasket forms a second slit between the main intake plate and the secondary intake plate. The second slit is located at the lower end of the intake assembly.

[0021] At least one air outlet is provided on the main intake plate, and the air outlet is connected to the third upper concave cavity. The fourth upper concave cavity is connected to the third upper concave cavity and the third lower concave cavity respectively. The gas entering from the first slit passes through the third lower concave cavity, the fourth upper concave cavity and the third upper concave cavity in sequence before entering the air outlet.

[0022] In an optional embodiment, two lifting components are included, which are disposed at both ends of the coating device body, and the two lifting components cooperate to adjust the height of the coating device body.

[0023] In an optional embodiment, the lifting assembly includes an adjusting base and an adjusting upper seat, with two guide columns disposed between the adjusting base and the adjusting upper seat;

[0024] An adjusting screw is provided on the adjusting upper seat, and the adjusting screw extends toward the adjusting base and is rotatably configured with the adjusting base;

[0025] An adjusting slider is screwed onto the adjusting screw, and two guide posts pass through the adjusting slider;

[0026] A connecting block is provided on the adjusting slider, and the connecting block is connected to the assembly block.

[0027] The air knife assembly of the vapor deposition apparatus provided by this invention can mix multiple gases evenly and blow the evenly mixed gases evenly onto the glass surface, resulting in a uniform reaction on the glass surface; the suction assembly can evenly remove waste gas, avoiding uneven reaction due to uneven suction, which would affect product quality. Attached Figure Description

[0028] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0029] Figure 1 This is a schematic diagram of the structure of the air knife assembly provided in an embodiment of the present invention;

[0030] Figure 2 for Figure 1 The schematic diagram of the air knife assembly shown is a structural schematic diagram of section AA.

[0031] Figure 3 for Figure 2 The diagram shows a partial enlarged view of section B of the structural schematic diagram of the air knife assembly at cross section AA.

[0032] Figure 4 for Figure 2 The diagram shows a partial enlarged view of section C of the structural schematic diagram of the air knife assembly at cross section AA.

[0033] Figure 5 for Figure 1 The schematic diagram of the air knife assembly shown is a schematic diagram of the main air blowing plate.

[0034] Figure 6 for Figure 1 The schematic diagram of the air knife assembly shown is a schematic diagram of the air blowing sub-plate.

[0035] Figure 7 for Figure 1 The schematic diagram of the structure of the first gasket of the air knife assembly shown is shown in the diagram.

[0036] Figure 8 A schematic diagram of the structure of a gas mixing assembly, which is another structural schematic diagram of the air knife assembly provided in an embodiment of the present invention;

[0037] Figure 9 for Figure 8 A schematic diagram of the DD cross-section of the gas mixing component shown;

[0038] Figure 10 for Figure 9 A partial enlarged view of E in the structural schematic diagram of the DD section of the gas mixing component shown;

[0039] Figure 11 This is a schematic diagram of the structure of a vapor deposition apparatus provided in an embodiment of the present invention;

[0040] Figure 12 for Figure 11 A schematic diagram of the assembly block of the vapor deposition apparatus shown;

[0041] Figure 13 for Figure 11 A schematic diagram of the gas-gathering assembly of the vapor deposition apparatus is shown.

[0042] Figure 14 for Figure 13 The diagram shown is a structural schematic of the FF of the intake assembly.

[0043] Figure 15 for Figure 14 A partial enlarged view of G in the structural schematic diagram of the intake assembly FF shown;

[0044] Figure 16 for Figure 13 The schematic diagram of the intake assembly shown is a schematic diagram of the intake main plate.

[0045] Figure 17 for Figure 13 The schematic diagram of the intake assembly shown is a schematic diagram of the intake sub-plate.

[0046] Figure 18 This is a schematic diagram of the vapor deposition apparatus provided in an embodiment of the present invention from another angle.

[0047] Icons: 100-Air knife assembly; 101-Main air blowing plate; 102-Secondary air blowing plate; 200-Air inlet; 300-First upper concave cavity; 400-Second upper concave cavity; 500-First lower concave cavity; 600-Cooling cavity; 700-First gasket; 800-First slit; 900-Water inlet; 110-Water outlet; 120-Main air inlet pipe; 130-Auxiliary air inlet pipe; 140-Mixing pipe; 150-Mixing tank; 160-Mesh nozzle; 170-Air inlet pipe; 171-First air inlet pipe; 172-Flow sensor; 173-Second air inlet pipe; 180-Mixing plate; 181-Mixing orifice; 182-Blocking area; 190-Guide block; 210-Upper guide concave surface; 220-Guide hole; 230-Lower guide concave surface; 240-Assembly block; 250-Suction assembly; 251-Suction main plate; 252-Suction secondary plate; 260-Connecting block; 270-Adjusting base; 280-Guide column; 290-Adjusting slider; 310-Adjusting screw; 320-Adjusting upper seat; 330-Third lower concave cavity; 340-Fourth upper concave cavity; 350-Second gasket; 360-Third upper concave cavity; 370-Air outlet; 380-Second baffle; 390-First baffle. Detailed Implementation

[0048] The terms “first,” “second,” “third,” etc., are used only for distinguishing descriptions and do not indicate a sequence number, nor should they be interpreted as indicating or implying relative importance.

[0049] Furthermore, terms such as "horizontal," "vertical," and "sag" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal relative to "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0050] In the description of this application, it should be noted that the terms "inner", "outer", "left", "right", "upper", "lower", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this application is in use. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0051] In the description of this application, unless otherwise expressly specified and limited, the terms “set up,” “install,” “connect,” and “link” shall be interpreted broadly, for example, as a fixed connection, a detachable connection, or an integral connection; as a mechanical connection or an electrical connection; as a direct connection or an indirect connection through an intermediate medium; or as a connection within two components.

[0052] The technical solution of this application will now be clearly and completely described with reference to the accompanying drawings.

[0053] Example

[0054] Reference Figures 1-10 The present invention provides an air knife assembly 100, comprising two abutting air-blowing plates, the two air-blowing plates being a main air-blowing plate 101 and a secondary air-blowing plate 102. On the side of the main air-blowing plate 101 facing the secondary air-blowing plate 102, a first upper concave cavity 300 and a first lower concave cavity 500 are provided from top to bottom; on the side of the secondary air-blowing plate 102 facing the main air-blowing plate 101, a second upper concave cavity 400 is provided.

[0055] A first gasket 700 is provided between the main air blowing plate 101 and the secondary air blowing plate 102. The first gasket 700 forms a first slit 800 between the main air blowing plate 101 and the secondary air blowing plate 102. The first slit 800 is located at the lower end of the air knife assembly 100.

[0056] At least one air inlet 200 is provided on the main air blowing plate 101, and the air inlet 200 is connected to the first upper concave cavity 300. The second upper concave cavity 400 is connected to the first upper concave cavity 300 and the first lower concave cavity 500 respectively. The gas entering from the air inlet 200 passes through the first upper concave cavity 300, the second upper concave cavity 400 and the first lower concave cavity 500 in sequence before entering the first slit 800.

[0057] In some embodiments, the air knife assembly 100 includes two air-blowing plates that abut against each other, one of which is a main air-blowing plate 101 and the other is a secondary air-blowing plate 102; in the height direction of the main air-blowing plate 101, a first upper concave cavity 300 and a first lower concave cavity 500 are arranged sequentially from top to bottom, wherein a second upper concave cavity 400 arranged on the secondary air-blowing plate 102 can communicate with both the first upper concave cavity 300 and the first lower concave cavity 500 simultaneously.

[0058] Generally, two air inlets 200 are provided on the main air blowing plate 101. The gas entering from the air inlet 200 enters the first upper concave cavity 300, the gas in the first upper concave cavity 300 enters the second upper concave cavity 400, and then enters the first lower concave cavity 500.

[0059] A first gasket 700 is provided between the main blowing plate 101 and the secondary blowing plate 102. The first gasket 700 creates a certain gap between the main blowing plate 101 and the secondary blowing plate 102. Since the first gasket 700 is U-shaped, it seals the upper, left and right directions, forming a first slit 800 at the lower end of the main blowing plate 101 and the secondary blowing plate 102. The gas flowing out from the first recessed cavity 500 enters the first slit 800, so the airflow blown out from the first slit 800 becomes stable and uniform, which is beneficial to the stability of the film formed on the glass surface.

[0060] Reference Figure 3 , Figure 4 , Figure 5 and Figure 6 In an optional embodiment, one end of the air blowing plate along its length is provided with an inlet 900 and the other end is provided with an outlet 110, and a cooling cavity 600 is formed between the inlet 900 and the outlet 110; the cooling cavity 600 is located at the lower end of the air blowing plate; and temperature sensors are provided at both the inlet 900 and the outlet 110.

[0061] The main air-blowing plate 101 and the secondary air-blowing plate 102 are generally fixed together by locking screws. The first gasket 700 seals the main air-blowing plate 101 and the secondary air-blowing plate 102 with the first gasket and forms a first slit 800 between the main air-blowing plate 101 and the secondary air-blowing plate 102 without the first gasket 700, so that the airflow is blown out from the first slit 800.

[0062] The lower ends of the main air-blowing plate 101 and the secondary air-blowing plate 102 form a lip, and the airflow blows towards the glass from the lip. In order to keep the temperature of the airflow blown from the lip within a certain range, both the main air-blowing plate 101 and the secondary air-blowing plate 102 are provided with an inlet 900 and an outlet 110, and a cooling chamber 600 is formed between the inlet 900 and the outlet 110. The inlet 900 and the outlet 110 are located at both ends of the length direction of the main air-blowing plate 101. Cooling water enters from the inlet 900 and flows out from the outlet 110. This cooling water can cool the lower ends of the main air-blowing plate 101 and the secondary air-blowing plate 102.

[0063] In order to better control the temperature of the airflow at the lip, temperature sensors are installed at both the inlet 900 and the outlet 110. By controlling the temperature of the cooling water flowing into the inlet 900 and the cooling water flowing out of the outlet 110, the temperature of the lip is controlled so that the lip temperature is within a certain range.

[0064] The mixed gas will react at a certain temperature. The cooling chamber 600 is provided on the air knife assembly 100 to ensure that the mixed gas is kept at a low temperature before it is blown out of the air knife assembly 100, so as to avoid the mixed gas reacting inside the air knife assembly 100 and causing danger.

[0065] Reference Figure 8 , Figure 9 and Figure 10 In an optional embodiment, the system further includes a mixing assembly, which includes a mixing tank 150. An air intake pipe assembly is provided at the upper end of the mixing tank 150. The air intake pipe assembly includes multiple air intake pipes 170, each of which includes a main air intake pipe 120 and at least one auxiliary air intake pipe 130. A mixing pipe 140 is provided at the lower end of the mixing tank 150, and each mixing pipe 140 is connected to an air inlet 200.

[0066] The mixing tank 150 of the mixing assembly is provided with a main intake pipe 120. The gas required in larger quantities enters the mixing tank 150 through the main intake pipe 120, while the gas required in smaller quantities enters the mixing tank 150 through the auxiliary intake pipe 130. Depending on the type of gas required, multiple auxiliary intake pipes 130 are provided on the mixing tank 150 accordingly. Generally, the mixing tank 150 is provided with only one main intake pipe 120 and two auxiliary intake pipes 130. The two auxiliary intake pipes 130 are located on both sides of the main intake pipe 120.

[0067] Reference Figure 8 In an optional embodiment, the air intake pipe 170 includes a first air intake pipe 171, a flow sensor 172, and a second air intake pipe 173 arranged in sequence. The flow sensor 172 is connected to the second air intake pipe 173 via a quick-connect fitting, and the second air intake pipe 173 is connected to the mixing tank 150 via a quick-connect fitting.

[0068] In order to precisely control the connection between the first intake pipe 171 of the intake pipe 170 and the air supply system, a flow sensor 172 is provided between the first intake pipe 171 and the second intake pipe 173. The flow sensor 172 monitors the flow rate of the gas in the intake pipe 170. The second intake pipe 173 is connected to the mixing tank 150 through a quick-connect coupling, which facilitates quick disassembly and assembly of the intake pipe 170 and the mixing tank 150.

[0069] In an optional embodiment, a mixing cover plate is provided on the mixing tank 150, and the main air intake pipe 120 is provided on the mixing cover plate, and the main air intake pipe 120 is connected to the mesh nozzle 160 provided at the lower end of the mixing cover plate.

[0070] In order to ensure that the gas entering the mixing tank 150 from the main intake pipe 120 can be fully mixed with other gases, a mesh nozzle 160 is provided in the mixing tank 150. The gas entering the main intake pipe 120 passes through the mesh nozzle 160 into the mixing tank 150, which disperses the airflow entering the main intake pipe 120, making it easier for the gas entering the main intake pipe 120 to mix with other gases.

[0071] Reference Figure 10 In an optional embodiment, the mixing tank 150 is provided with a mixing plate 180 and a guide block 190 alternately arranged from top to bottom. The upper end surface of the guide block 190 is provided with a downwardly concave upper guide concave surface 210, and the lower end surface of the guide block 190 is provided with an upwardly concave lower guide concave surface 230. A guide hole 220 is provided between the upper guide concave surface 210 and the lower guide concave surface 230.

[0072] The mixing plate 180 is provided with a plurality of mixing holes 181, which are arranged on the mixing plate 180 and form a flow-blocking region 182 on the mixing plate 180, and the flow-blocking region 182 corresponds to the flow-guiding hole 220.

[0073] To ensure thorough mixing of the gas entering the mixing tank 150, a mixing plate 180 and a guide block 190 are sequentially arranged inside the mixing tank 150. The guide holes 220 on the mixing plate 180 do not face the guide holes 220. Thus, the mixed gas enters the upper guide concave surface 210 through the guide holes 220, and then the gas gathers together and enters the lower guide concave surface 230 through the guide holes 220. This process of repeatedly dispersing and gathering the mixed gas ensures thorough mixing of various gases, forming a uniform mixed gas that flows towards the air inlet 200.

[0074] The first slit 800 between the main air-blowing plate 101 and the secondary air-blowing plate 102 of the air knife assembly 100 provided by the present invention allows gas entering from the air inlet 200 to enter the first upper concave cavity 300, then the second upper concave cavity 400, and then the first lower concave cavity 500, and finally out through the first slit 800. This makes the airflow entering the air knife assembly 100 more stable, and then blown out from the first slit 800, achieving the purpose of uniform air blowing and avoiding uneven reaction on the glass surface caused by uneven air blowing.

[0075] Reference Figures 11-18 The present invention provides a vapor deposition apparatus, including two suction components 250 and an air knife component 100 as described in any of the preceding embodiments, wherein the air knife component 100 is disposed between the two suction components 250.

[0076] An assembly block 240 is provided between the air intake assembly 250 and the air knife assembly 100, and the assembly block 240 makes the air intake assembly 250 and the air intake assembly 250 form the main body of the coating device.

[0077] A first baffle 390 is provided on the side of the air intake assembly 250 away from the air knife assembly 100, and a second baffle 380 is provided at both ends of the air knife assembly 100 along its length. The two first baffles 390 and the two second baffles 380 form a rectangular frame, and the lower end of the rectangular frame is not higher than the lower end of the air knife assembly 100. The rectangular frame is used to limit the dispersion of the gas blown out by the air knife assembly 100.

[0078] In some embodiments, an air knife assembly 100 is provided between the two air intake assemblies 250 of the vapor deposition apparatus. Excess air blown out by the air knife assembly 100 and waste gas generated during the film production process enter the air intake assembly 250 and are discharged through the air intake assembly 250.

[0079] An assembly block 240 is provided between the suction assembly 250 and the air knife assembly 100. The two assembly blocks 240 are used to assemble the suction assembly 250 and the air knife assembly 100 together to form the main body of the coating device.

[0080] In order to ensure that the gas and exhaust gas blown out by the air knife assembly 100 can be sucked away by the air intake assembly 250 as much as possible, the first baffle 390 and the second baffle 380 form a rectangular frame. The rectangular frame effectively controls the dispersion of the gas, so that as much gas as possible is sucked away by the air intake assembly 250 and the gas is prevented from drifting to the surroundings.

[0081] Reference Figure 13 , Figure 14 , Figure 15 , Figure 16 and Figure 17 In an optional embodiment, the suction assembly 250 includes two abutting suction plates, namely a main suction plate 251 and a secondary suction plate 252. On the side of the main suction plate 251 facing the secondary suction plate 252, there are a third upper concave cavity 360 and a third lower concave cavity 330 from top to bottom. On the side of the secondary suction plate 252 facing the main suction plate 251, there is a fourth upper concave cavity 340.

[0082] A second gasket 350 is provided between the main suction plate 251 and the secondary suction plate 252. The first gasket 700 forms a second slit between the main suction plate 251 and the secondary suction plate 252. The second slit is located at the lower end of the suction assembly 250.

[0083] At least one air outlet 370 is provided on the main intake plate 251, and the air outlet 370 is connected to the third upper concave cavity 360. The fourth upper concave cavity 340 is connected to the third upper concave cavity 360 and the third lower concave cavity 330 respectively. The gas entering from the first slit 800 passes through the third lower concave cavity 330, the fourth upper concave cavity 340 and the third upper concave cavity 360 in sequence before entering the air outlet 370.

[0084] The suction assembly 250 has a similar structure to the air knife assembly 100. The suction assembly 250 does not require temperature adjustment of the suction gas, and a cooling chamber 600 can also be provided on the suction assembly 250 to prevent the exhaust gas from reacting within it. This suction assembly 250 can achieve uniform air extraction, avoiding uneven reactions on the glass surface caused by uneven air extraction.

[0085] The air outlet 370 is generally connected to the air outlet branch pipe. Multiple air outlet branch pipes converge together and are connected to the air outlet main pipe. The air outlet main pipe is connected to the negative pressure device. The negative pressure device generates negative pressure in the air outlet branch pipe, which in turn generates negative pressure in the air intake assembly 250, thereby allowing the exhaust gas to enter the air intake assembly 250 from the second slit.

[0086] Reference Figure 11 and Figure 18 In an optional embodiment, two lifting components are included, which are disposed at both ends of the coating device body, and the two lifting components cooperate to adjust the height of the coating device body.

[0087] In an optional embodiment, the lifting assembly includes an adjusting base 270 and an adjusting upper seat 320, with two guide columns 280 disposed between the adjusting base 270 and the adjusting upper seat 320;

[0088] An adjusting screw 310 is provided on the adjusting upper seat 320, and the adjusting screw 310 extends toward the adjusting base 270 and is rotatably configured with the adjusting base 270;

[0089] An adjusting slider 290 is screwed onto the adjusting screw 310, and two guide posts 280 pass through the adjusting slider 290;

[0090] A connecting block 260 is provided on the adjusting slider 290, and the connecting block 260 is connected to the assembly block 240.

[0091] To better control the distance between the lip and the glass surface, lifting components are installed on both sides of the coating device body. The two lifting components work together to move the coating device body away from or closer to the glass.

[0092] The lifting assembly has two guide columns 280 on its adjusting base 270, with the upper ends of the guide columns 280 mounted on the adjusting upper seat 320. An adjusting slider 290 is provided between the adjusting base 270 and the adjusting upper seat 320. The coating device body moves up and down by adjusting the slider 290.

[0093] An adjusting screw 310 is mounted on the adjusting upper seat 320. A handwheel is mounted on the adjusting screw 310. By rotating the handwheel, the adjusting screw 310 is rotated. Since the guide column 280 restricts the rotation of the adjusting slider 290, the adjusting slider 290 moves up and down along the guide column 280, thereby causing the main body of the coating device to move up and down.

[0094] Bearings are mounted on both the upper adjusting seat 320 and the lower adjusting base 270. The adjusting screw 310 is connected to the upper adjusting seat 320 and the lower adjusting base 270 through the bearings. The threaded part of the adjusting screw 310 is generally located between the upper adjusting seat 320 and the lower adjusting base 270.

[0095] Generally, two guide posts 280 are set on both sides of the adjusting screw 310, which enables the adjusting slider 290 to rise and fall stably, thereby enabling the main body of the coating device to rise and fall stably.

[0096] Mounting holes are provided on the adjustment base 270 to facilitate the installation of the adjustment base 270 on other structures.

[0097] Compared with the prior art, the vapor deposition apparatus provided by the present invention has the air knife assembly 100 provided by the present invention, and thus has all the beneficial effects of the air knife assembly 100 provided by the present invention.

[0098] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A vapor deposition apparatus, characterized in that, It includes two air intake components (250) and an air knife component (100), wherein the air knife component (100) is disposed between the two air intake components (250); An assembly block (240) is provided between the suction assembly (250) and the air knife assembly (100), the assembly block (240) making the suction assembly (250) and the suction assembly (250) form the body of the coating device; The air knife assembly (100) includes two abutting air-blowing plates, namely a main air-blowing plate (101) and a secondary air-blowing plate (102). On the side of the main air-blowing plate (101) facing the secondary air-blowing plate (102), there are a first upper concave cavity (300) and a first lower concave cavity (500) from top to bottom. On the side of the secondary air-blowing plate (102) facing the main air-blowing plate (101), there is a second upper concave cavity (400). A first gasket (700) is provided between the main air blowing plate (101) and the secondary air blowing plate (102). The first gasket (700) forms a first slit (800) between the main air blowing plate (101) and the secondary air blowing plate (102). The first slit (800) is located at the lower end of the air knife assembly (100). At least one air inlet (200) is provided on the main air blowing plate (101), and the air inlet (200) is connected to the first upper concave cavity (300). The second upper concave cavity (400) is connected to the first upper concave cavity (300) and the first lower concave cavity (500) respectively. The gas entering from the air inlet (200) passes through the first upper concave cavity (300), the second upper concave cavity (400) and the first lower concave cavity (500) in sequence before entering the first slit (800). A first baffle (390) is provided on the side of the air intake assembly (250) away from the air knife assembly (100), and a second baffle (380) is provided at both ends of the air knife assembly (100) along its length. The two first baffles (390) and the two second baffles (380) form a rectangular frame, and the lower end of the rectangular frame is not higher than the lower end of the air knife assembly (100). The rectangular frame is used to limit the dispersion of the gas blown out by the air knife assembly (100).

2. The vapor deposition apparatus according to claim 1, characterized in that, The air blowing plate has an inlet (900) at one end along its length and an outlet (110) at the other end, and a cooling chamber (600) is formed between the inlet (900) and the outlet (110); the cooling chamber (600) is located at the lower end of the air blowing plate. Temperature sensors are provided at both the inlet (900) and the outlet (110).

3. The vapor deposition apparatus according to claim 1, characterized in that, It also includes a mixing assembly, which includes a mixing tank (150), an air intake pipe group is provided at the upper end of the mixing tank (150), the air intake pipe group includes multiple air intake pipes (170), the multiple air intake pipes (170) include a main air intake pipe (120) and at least one auxiliary air intake pipe (130); the lower end of the mixing tank (150) is provided with a mixing pipe (140), each of the mixing pipes (140) is connected to an air inlet (200).

4. The vapor deposition apparatus according to claim 3, characterized in that, The air intake pipe (170) includes a first air intake pipe (171), a flow sensor (172), and a second air intake pipe (173) arranged in sequence. The flow sensor (172) is connected to the second air intake pipe (173) through a quick-connect fitting, and the second air intake pipe (173) is connected to the mixing tank (150) through a quick-connect fitting.

5. The vapor deposition apparatus according to claim 3, characterized in that, The mixing tank (150) is provided with a mixing cover plate, and the main air intake pipe (120) is provided on the mixing cover plate. The main air intake pipe (120) is connected to the mesh nozzle (160) provided at the lower end of the mixing cover plate.

6. The vapor deposition apparatus according to claim 3, characterized in that, The mixing tank (150) is provided with a mixing plate (180) and a guide block (190) alternately arranged from top to bottom. The upper end surface of the guide block (190) is provided with a downward concave upper guide concave surface (210), and the lower end surface of the guide block (190) is provided with an upward concave lower guide concave surface (230). A guide hole (220) is provided between the upper guide concave surface (210) and the lower guide concave surface (230). The mixing plate (180) is provided with a plurality of mixing holes (181), which are arranged on the mixing plate (180) and form a flow-blocking area (182) on the mixing plate (180), and the flow-blocking area (182) corresponds to the flow-guiding hole (220).

7. The vapor deposition apparatus according to claim 1, characterized in that, The suction assembly (250) includes two abutting suction plates, namely a main suction plate (251) and a secondary suction plate (252). On the side of the main suction plate (251) facing the secondary suction plate (252), there are a third upper concave cavity (360) and a third lower concave cavity (330) from top to bottom. On the side of the secondary suction plate (252) facing the main suction plate (251), there is a fourth upper concave cavity (340). A second gasket (350) is provided between the main intake plate (251) and the secondary intake plate (252), and the first gasket (700) forms a second slit between the main intake plate (251) and the secondary intake plate (252), the second slit being located at the lower end of the intake assembly (250); At least one air outlet (370) is provided on the main intake plate (251), and the air outlet (370) is connected to the third upper concave cavity (360). The fourth upper concave cavity (340) is connected to the third upper concave cavity (360) and the third lower concave cavity (330) respectively. The gas entering from the first slit (800) passes through the third lower concave cavity (330), the fourth upper concave cavity (340) and the third upper concave cavity (360) in sequence before entering the air outlet (370).

8. The vapor deposition apparatus according to claim 1, characterized in that, It includes two lifting components, which are located at both ends of the coating device body, and the two lifting components work together to adjust the height of the coating device body.

9. The vapor deposition apparatus according to claim 8, characterized in that, The lifting assembly includes an adjustable base (270) and an adjustable upper seat (320), and two guide columns (280) are provided between the adjustable base (270) and the adjustable upper seat (320). An adjusting screw (310) is provided on the adjusting upper seat (320), and the adjusting screw (310) extends toward the adjusting base (270) and is rotatably configured with the adjusting base (270); An adjusting slider (290) is screwed onto the adjusting screw (310), and two guide posts (280) pass through the adjusting slider (290); A connecting block (260) is provided on the adjusting slider (290), and the connecting block (260) is connected to the assembly block (240).

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