A method and apparatus for work hardening brittle insulating material

Abstract

The present disclosure relates to the technical field of processing of hard and brittle insulating materials, and particularly relates to a method and device for processing hard and brittle insulating materials. The technical scheme provided by the embodiments of the present disclosure utilizes the principle of microwave-assisted discharge, and places a processing tool with electrical conductivity and a workpiece made of hard and brittle insulating material in a microwave resonant cavity; provides a preset thickness of electrically conductive powder to a processing area of the workpiece, and then emits microwaves of a preset frequency into the microwave resonant cavity. The microwaves reflect in the microwave resonant cavity to accumulate microwave energy. When the microwave energy causes a strong electric field between the processing end of the processing tool and the electrically conductive powder, and in turn forms spark discharge, the electrically conductive powder at the discharge position is vaporized and / or melted due to the high temperature of the discharge. The vaporized and / or melted electrically conductive powder is used to remove and process the workpiece, thereby improving the stability of the processing, and improving the processing efficiency while ensuring the processing accuracy.

Description

Technical Field

[0001] This disclosure relates to the field of processing technology for hard and brittle insulating materials, and specifically to a method and equipment for processing hard and brittle insulating materials. Background Technology

[0002] Hard and brittle insulating materials such as glass, quartz, and engineering ceramics are the "third generation of structural materials" after metals and plastics. They possess excellent comprehensive properties, including superhardness, wear resistance, high resistivity and melting point, and good thermal conductivity, making them widely used in microelectromechanical systems (MEMS). However, despite their superior performance and significant application value, the high hardness, brittleness, and electrical insulation of these ceramic materials pose considerable challenges to their processing.

[0003] Existing processing methods for hard and brittle insulating materials mainly include diamond grinding and electro-discharge machining (EDM). Diamond grinding is currently the most widely used and technologically mature method; however, it suffers from problems such as high diamond wheel wear, low processing efficiency, high processing cost, and susceptibility to micro-cracks and chipping on the machined surface. This is particularly problematic when machining microstructures, where the small tool size makes it prone to deformation or even breakage, affecting processing accuracy and stability. EDM for hard and brittle insulating materials is currently in the laboratory research stage and has not yet achieved industrial application. A necessary condition for EDM to generate discharge is the formation of a relatively complete hydrogen film on the electrode surface. However, this hydrogen film is unstable, and the working fluid circulation within the processing gap is poor, leading to poor discharge stability and low processing efficiency. Furthermore, the hydrogen film thickness varies considerably, making it difficult to guarantee processing accuracy. Therefore, existing processing methods for hard and brittle insulating materials cannot meet the comprehensive processing requirements of the workpieces, and there is an urgent need for a processing method with good stability and high precision. Summary of the Invention

[0004] In order to solve the problems in the related technology, the present disclosure provides a method and apparatus for processing hard and brittle insulating materials.

[0005] In a first aspect, embodiments of this disclosure provide an apparatus for processing hard and brittle insulating materials, the apparatus comprising: a microwave resonant cavity, a workpiece processing device, a conductive powder supply device, and a microwave feeding device, wherein...

[0006] The microwave resonant cavity is configured to house a workpiece made of a hard and brittle insulating material;

[0007] The workpiece processing device includes a workpiece processing mechanism and a conductive processing tool, and is configured to process the workpiece. The workpiece processing mechanism is used to drive the processing tool to move relative to the workpiece. The processing tool is placed inside the microwave resonant cavity, and the non-processing end of the processing tool is connected to the workpiece processing mechanism.

[0008] The conductive powder supply device is configured to supply conductive powder to the processing area of ​​the workpiece before the microwave feeding device emits microwaves of a preset frequency into the microwave resonant cavity.

[0009] The microwave feed device is configured to be connected to the microwave resonant cavity. After the conductive powder supply device provides conductive powder of a preset thickness to the processing area of ​​the workpiece, it emits microwaves of a preset frequency into the microwave resonant cavity. The microwaves are reflected and accumulate microwave energy in the microwave resonant cavity. When the microwave energy causes a strong electric field to be generated between the processing end of the processing tool and the conductive powder, thus forming a spark discharge, the conductive powder at the discharge location is vaporized and / or melted due to the high temperature of the discharge. The vaporized and / or melted conductive powder is used to remove material from the workpiece.

[0010] According to an embodiment of this disclosure, the workpiece processing mechanism includes: a fixture, a machine tool guide shaft, a machine tool spindle, a machine tool column, and a machine tool worktable; the processing tool, the fixture, the machine tool guide shaft, the machine tool spindle, and the machine tool column are sequentially connected and arranged perpendicularly to the machine tool worktable; the microwave resonant cavity includes an end cover and a cavity body, the cavity body has no bottom surface, the end cover and the cavity body are capable of relative movement, and an openable door is provided on the end cover or the cavity body for placing the workpiece in so as to fix it on the machine tool worktable and removing the workpiece from the machine tool worktable;

[0011] Wherein, the non-machining end of the machining tool is fixed on the fixture; the fixture is fixed on the machine tool guide shaft; the machine tool guide shaft is fixed on the machine tool spindle through a first through hole provided on the end cover of the microwave resonant cavity; the machine tool spindle is movably connected to the machine tool column; the end cover is fixed on the machine tool column by a fixing seat; the cavity is closedly connected to the machine tool worktable.

[0012] The machine tool spindle is configured to reciprocate vertically on the machine tool column via an automatic feed adjustment device, thereby driving the machining tool to reciprocate vertically with the machine tool spindle;

[0013] The machine tool table is configured to move horizontally via the automatic feed adjustment device, thereby causing the workpiece to move horizontally with the machine tool table. This is to create relative movement between the machining tool and the workpiece through the vertical reciprocating motion and / or the horizontal motion, so as to process the workpiece in combination with the relative motion.

[0014] According to embodiments of this disclosure, wherein,

[0015] The microwave feed device includes a microwave source, a microwave source protection device, a dual-directional coupler, and a power meter. The microwave source, the microwave source protection device, the dual-directional coupler, and the processing tool are connected in sequence via a coaxial cable. The dual-directional coupler is connected to the power meter via a coaxial cable. The power meter is used to measure the microwave power incident on the microwave resonant cavity. The microwave source protection device includes a circulator or a DC blocker.

[0016] According to embodiments of this disclosure, wherein,

[0017] When the dual-directional coupler is connected to the machining tool, the fixture is also provided with an adapter. The dual-directional coupler and the machining tool are connected through the adapter on the fixture via a second through hole provided on the end cap of the microwave resonant cavity.

[0018] According to an embodiment of this disclosure, the conductive powder supply device is connected to the workpiece processing device and includes: a powder supply mechanism and a powder supply pipe. Specifically, the conductive powder supply device is configured as follows:

[0019] The powder supply pipe is provided in the machining tool in the form of a through hole. The first end of the powder supply pipe is located at the machining end of the machining tool and is used to provide conductive powder to the machining area of ​​the workpiece. The second end of the powder supply pipe is located at the non-machining end of the machining tool. The fixture has an internal hole. One end of the internal hole of the fixture is connected to the powder supply pipe, and the other end is connected to the powder supply mechanism for filling in conductive powder. The conductive powder enters the second end of the powder supply pipe through the internal hole of the fixture from the powder supply mechanism, and then is directly sprayed onto the machining area of ​​the workpiece from the first end of the powder supply pipe. The fixture is provided with a switching mechanism to control the start and stop of the powder supply.

[0020] or,

[0021] The powder supply pipe is sleeved around the outside of the machining tool, with the machining end of the tool exposed outside the powder supply pipe. A powder supply passage is formed between the inner circumference of the powder supply pipe and the outer circumference of the machining tool. The first end of the powder supply pipe is used to provide conductive powder to the machining area of ​​the workpiece. The second end of the powder supply pipe is fixed to the fixture, which has an internal hole. One end of the internal hole of the fixture is connected to the powder supply pipe, and the other end is connected to the powder supply mechanism for injecting conductive powder. The conductive powder enters the second end of the powder supply pipe through the internal hole of the fixture from the powder supply mechanism, and then is directly sprayed onto the machining area of ​​the workpiece from the first end of the powder supply pipe through the powder supply passage. The fixture is equipped with a switching mechanism to control the start and stop of the powder supply.

[0022] According to an embodiment of this disclosure, the powder supply pipe and the processing tool have the same axial direction.

[0023] According to an embodiment of this disclosure, the powder supply mechanism includes: a powder supply tank, a powder suction pipe, a powder suction pump, and a powder delivery pipe; the inlet of the powder suction pump is connected to the powder supply tank through the powder suction pipe, and the outlet of the powder suction pump is connected to the internal hole of the fixture through the powder delivery pipe via a third through hole provided on the microwave resonant cavity.

[0024] According to embodiments of this disclosure, the device further includes a control module connected to the workpiece processing device, the conductive powder supply device, and the microwave feed device. The control module controls the conductive powder supply device to provide conductive powder of a preset thickness to the processing area of ​​the workpiece. Subsequently, it controls the microwave feed device to emit microwaves of a preset frequency into the microwave resonant cavity, causing the microwaves to reflect and accumulate energy within the cavity. When the microwave energy generates a strong electric field between the processing end of the processing tool and the conductive powder, resulting in a spark discharge, the conductive powder at the discharge location vaporizes and / or melts due to the high temperature of the discharge. The control module then uses the vaporized and / or melted conductive powder to remove the workpiece. The process is repeated cyclically: first, the conductive powder supply device provides conductive powder to the processing area of ​​the workpiece; then, the microwave feed device emits microwaves of a preset frequency into the microwave resonant cavity; and finally, the workpiece processing device uses the vaporized and / or melted conductive powder to remove the workpiece.

[0025] Secondly, this disclosure provides a method for processing hard and brittle insulating materials, the method comprising:

[0026] A conductive machining tool and a workpiece made of hard and brittle insulating material are placed inside a microwave resonant cavity;

[0027] A conductive powder of a predetermined thickness is provided to the processing area of ​​the workpiece. Then, microwaves of a predetermined frequency are emitted into the microwave resonant cavity. The microwaves are reflected and accumulate microwave energy in the microwave resonant cavity. When the microwave energy causes a strong electric field to be generated between the processing end of the processing tool and the conductive powder, thus forming a spark discharge, the conductive powder at the discharge location is vaporized and / or melted due to the high temperature of the discharge. The vaporized and / or melted conductive powder is used to remove material from the workpiece.

[0028] According to embodiments of this disclosure, the method further includes: cyclically providing conductive powder of a preset thickness to the processing area of ​​the workpiece, then emitting microwaves of a preset frequency into the microwave resonant cavity, and finally using the vaporized and / or melted conductive powder to remove the workpiece.

[0029] The technical solution provided in this disclosure utilizes the principle of microwave-assisted discharge. A conductive machining tool and a workpiece made of hard, brittle insulating material are placed inside a microwave resonant cavity. A conductive powder of a predetermined thickness is provided to the machining area of ​​the workpiece. Then, microwaves of a predetermined frequency are emitted into the microwave resonant cavity. The microwaves are reflected within the cavity, accumulating microwave energy. When the microwave energy causes a strong electric field to form between the machining end of the machining tool and the conductive powder, resulting in a spark discharge, the conductive powder at the discharge location vaporizes and / or melts due to the high temperature of the discharge. The vaporized and / or melted conductive powder is used to remove material from the workpiece, thereby improving machining stability and increasing machining efficiency while ensuring machining accuracy.

[0030] It should be understood that the above general description and the following detailed description are exemplary and explanatory only, and are not intended to limit this disclosure. Attached Figure Description

[0031] Other features, objects, and advantages of this disclosure will become more apparent from the following detailed description of non-limiting embodiments, taken in conjunction with the accompanying drawings. In the drawings:

[0032] Figure 1 This diagram shows a structural block diagram of an apparatus for processing hard and brittle insulating materials according to an embodiment of the present disclosure;

[0033] Figure 2 This diagram shows a structural block diagram of another apparatus for processing hard and brittle insulating materials according to an embodiment of the present disclosure;

[0034] Figure 3 This diagram illustrates the structural connection of a device for microwave-assisted electrical discharge machining of conductive materials according to a specific embodiment 1.

[0035] Figure 4 This diagram illustrates the structural connection of a device for microwave-assisted electrical discharge machining of conductive materials according to a specific embodiment 2.

[0036] Figure 5 A flowchart illustrating a method for processing a hard and brittle insulating material according to an embodiment of the present disclosure is shown. Detailed Implementation

[0037] In the following, exemplary embodiments of the present disclosure will be described in detail with reference to the accompanying drawings to enable those skilled in the art to readily implement them. Furthermore, for clarity, portions unrelated to the description of exemplary embodiments have been omitted from the drawings.

[0038] In this disclosure, it should be understood that terms such as “comprising” or “having” are intended to indicate the presence of features, figures, steps, behaviors, components, parts or combinations thereof disclosed in this specification, and are not intended to exclude the possibility of the presence or addition of one or more other features, figures, steps, behaviors, components, parts or combinations thereof.

[0039] It should also be noted that, unless otherwise specified, the embodiments and features described in this disclosure can be combined with each other. This disclosure will now be described in detail with reference to the accompanying drawings and embodiments.

[0040] As mentioned earlier, existing processing methods for hard and brittle insulating materials, namely diamond grinding and electro-discharge machining, each have their own problems. Diamond grinding suffers from low processing efficiency, high processing cost, and a tendency for micro-cracks and chipping to occur on the processed surface. Furthermore, it exhibits low processing accuracy and poor processing stability when machining small structures. Electro-discharge machining of hard and brittle insulating materials is currently a relatively immature technology, suffering from poor discharge stability, low processing efficiency, and difficulty in guaranteeing processing accuracy.

[0041] To further improve processing stability and increase processing efficiency while ensuring processing accuracy, this disclosure provides a method for processing hard and brittle insulating materials. According to an embodiment of this disclosure, a conductive processing tool and a workpiece made of hard and brittle insulating material are placed in a microwave resonant cavity; a conductive powder of a predetermined thickness is provided to the processing area of ​​the workpiece; then microwaves of a predetermined frequency are emitted into the microwave resonant cavity. The microwaves are reflected and accumulate microwave energy within the microwave resonant cavity. When the microwave energy causes a strong electric field to be generated between the processing end of the processing tool and the conductive powder, thus forming a spark discharge, the conductive powder at the discharge location is vaporized and / or melted due to the high temperature of the discharge. The vaporized and / or melted conductive powder is used to remove material from the workpiece.

[0042] This disclosure utilizes the principle of microwave-assisted discharge. The machining tool and workpiece are placed within a microwave resonant cavity. When microwaves of a specific frequency are fed into the cavity, microwave reflection or resonance occurs within the cavity, accumulating microwave energy. When the machining end of the tool (i.e., the part of the tool actually close to the workpiece during machining) is affected by the microwave energy, a strong electric field is generated. This causes free electrons on the surface of the machining end to absorb external electromagnetic energy, thus accelerating their movement. When the electric field strength increases to a certain level, a breakdown discharge effect is achieved. If only the electric spark generated by the discharge is used to machine the workpiece, not only is the machining efficiency low due to the relatively small discharge energy, but the discharge conditions are also harsh, and energy controllability is poor. If the input energy is too small, the discharge temperature is insufficient to melt and remove the workpiece material; however, a large input energy reduces machining accuracy and causes severe burn-out of the machining tool.

[0043] This disclosure creatively combines microwave-assisted discharge with conductive powder. Specifically, it provides a predetermined thickness of conductive powder to the processing area of ​​a workpiece made of hard and brittle insulating material, creating a layer of conductive powder between the processing end of the processing tool and the hard and brittle insulating material. This conductive powder makes the surface of the insulating workpiece conductive. Thus, when microwaves of a specific frequency are fed into the microwave resonant cavity, discharge is more likely to occur between the processing end of the processing tool and the conductive powder layer than between the processing end of the processing tool and the hard and brittle insulating material. Furthermore, the conductive powder at the discharge location vaporizes and / or melts under the influence of the high temperature of the discharge. The vaporized and / or melted conductive powder is then used to melt and remove the hard and brittle insulating material of the workpiece. Combined with the relative movement between the processing tool and the workpiece, microstructure processing is performed on the workpiece. Compared to existing diamond grinding methods, this disclosure overcomes the problems of poor machining stability, low machining accuracy, and high machining cost caused by tool deformation or even breakage when grinding hard and brittle insulating materials, as the machining method used in this disclosure is non-contact. Compared to electrolytic electrical discharge machining (EDM) and methods that only utilize microwave discharge to process workpieces, this disclosure does not simply use the high temperature of the EDM to melt and remove the workpiece material. Instead, it utilizes the characteristic that it is easier to discharge between the machining end of the tool and the conductive powder layer, allowing the discharge to be achieved with a relatively small input of microwave energy. This overcomes the problem of poor discharge stability in electrolytic EDM and EDM that only utilize microwave discharge to process hard and brittle insulating materials. Furthermore, it utilizes the effect of the high temperature of the EDM on the conductive powder, causing it to vaporize and / or melt at high temperatures. The workpiece is then melted and removed through this vaporized and / or melted conductive powder. This overcomes the problem of low machining efficiency in electrolytic EDM and EDM that only utilize microwave discharge to process hard and brittle insulating materials.

[0044] Figure 1 A structural block diagram of an apparatus for processing hard and brittle insulating materials according to an embodiment of the present disclosure is shown. Figure 1 As shown, an apparatus for processing hard and brittle insulating materials includes: a microwave resonant cavity 110, a workpiece processing device 120, a conductive powder supply device 130, and a microwave feed device 140. The microwave resonant cavity 110 is configured to hold a workpiece made of a hard and brittle insulating material. The workpiece processing device 120 includes a workpiece processing mechanism 121 and a conductive processing tool 122, configured to process the workpiece. The workpiece processing mechanism 121 drives the processing tool 122 to move relative to the workpiece. The processing tool 122 is housed within the microwave resonant cavity 110, and the non-processing end of the processing tool 122 is connected to the workpiece processing mechanism 121. The conductive powder supply device 130 is positioned within the microwave feed device 140. Before emitting microwaves of a preset frequency into the microwave resonant cavity 110, conductive powder is provided to the processing area of ​​the workpiece. The microwave feed device 140 is configured to be connected to the microwave resonant cavity 110 and to emit microwaves of a preset frequency into the microwave resonant cavity 110 after the conductive powder supply device 130 provides conductive powder of a preset thickness into the processing area of ​​the workpiece. The microwaves are reflected and accumulate microwave energy in the microwave resonant cavity 110. When the microwave energy causes a strong electric field to be generated between the processing end of the processing tool 122 and the conductive powder, thereby forming a spark discharge, the conductive powder at the discharge position is vaporized and / or melted by the high temperature of the discharge. The vaporized and / or melted conductive powder is used to remove the workpiece.

[0045] Figure 2 A structural block diagram of another apparatus for processing hard and brittle insulating materials according to an embodiment of the present disclosure is shown. Figure 2As shown, the equipment for processing hard and brittle insulating materials further includes a control module 150, which is connected to the workpiece processing device 120, the conductive powder supply device 130, and the microwave feed device 140. The control module 150 controls the conductive powder supply device 130 to provide conductive powder of a preset thickness to the processing area of ​​the workpiece, and then controls the microwave feed device 140 to emit microwaves of a preset frequency into the microwave resonant cavity 110. The microwaves are reflected and accumulate microwave energy within the microwave resonant cavity 110. When the microwave energy causes the processing end of the processing tool 122 to... When a strong electric field is generated between the conductive powder and the workpiece, resulting in a spark discharge, the conductive powder at the discharge location vaporizes and / or melts due to the high temperature of the discharge. The workpiece processing device 120 is controlled to remove the workpiece using the vaporized and / or melted conductive powder. The process involves first supplying conductive powder to the processing area of ​​the workpiece through the conductive powder supply device 130, then emitting microwaves of a preset frequency into the microwave resonant cavity 110 through the microwave feed device 140, and finally removing the workpiece using the vaporized and / or melted conductive powder through the workpiece processing device 120.

[0046] The following is combined with Figure 1 The specific components of each structure of the device shown are described through two specific embodiments.

[0047] Figure 3 The diagram shows a structural connection of an apparatus for processing hard and brittle insulating materials according to a specific embodiment 1.

[0048] like Figure 3 As shown, the workpiece processing mechanism 121 includes: a fixture 6, a machine tool guide shaft 7, a machine tool spindle 8, a machine tool column 9, and a machine tool worktable 10; the processing tool 122, the fixture 6, the machine tool guide shaft 7, the machine tool spindle 8, and the machine tool column 9 are sequentially connected and vertically arranged with respect to the machine tool worktable 10; the microwave resonant cavity 110 includes a cavity 11 and an end cap 12. The cavity 11 has no bottom surface, and the cavity 11 and the end cap 12 of the microwave resonant cavity 110 can move relative to each other. The cavity 11 is provided with an openable door 13 for placing the workpiece 14 to fix it on the machine tool worktable 10 and for removing the workpiece 14 from the machine tool worktable 10. The openable door 13 can also be provided on the end cap 12; this embodiment only describes it as being provided on the cavity 11. In addition, a first through hole and a second through hole are provided on the end cap 12 of the microwave resonant cavity 110. The fixture 6 is used to clamp the machining tool 122. The non-machining end of the machining tool 122 (i.e., the opposite end of the machining end of the machining tool) is fixed on the fixture 6, and the fixture 6 is fixed on the machine tool guide shaft 7.

[0049] The machine tool guide shaft 7 is fixed to the machine tool spindle 8 through a first through hole provided on the end cover 12 of the microwave resonant cavity 110. The diameter of the first through hole is the same as the diameter of the machine tool guide shaft 7. The machine tool spindle 8 is movably connected to the machine tool column 9. By connecting an automatic feed adjustment device, the machine tool spindle 8 can move vertically reciprocally on the machine tool column 9 (e.g., ...). Figure 3 (as shown in the Z-axis direction), thereby driving the machining tool 122 to reciprocate vertically with the machine tool spindle 8; the device also includes a fixed base 5, the end cover 12 of the microwave resonant cavity 110 is fixed to the machine tool column 9 through the fixed base 5, the cavity 11 is enclosedly connected to the machine tool worktable 10, and the machine tool worktable 10 can perform horizontal movement (e.g., via an automatic feed adjustment device) by connecting to the automatic feed adjustment device. Figure 3 (as shown in the X and Y axis directions), thereby causing the workpiece 14 to move horizontally with the machine tool table 10. The vertical reciprocating motion and / or the horizontal motion cause relative motion between the machining tool 122 and the workpiece 14, and the workpiece 14 is machined in combination with the relative motion.

[0050] According to an embodiment of this disclosure, the microwave feed device 140 includes: a solid-state microwave source 1, a microwave source protection device 2, a dual-directional coupler 3, and a power meter 4. The solid-state microwave source 1, the microwave source protection device 2, the dual-directional coupler 3, and the processing tool 122 are connected in sequence via a coaxial cable. The dual-directional coupler 3 is connected to the power meter 4 via a coaxial cable.

[0051] Microwaves with a preset frequency are generated by a solid-state microwave source 1, transmitted via a coaxial cable through a microwave source protection device 2 and a dual-directional coupler 3 to a machining tool 122, and finally emitted into a microwave resonant cavity 110 through the machining tool 122. Additionally, the dual-directional coupler 3 collects the microwave incident and reflected signals and transmits them to a power meter 4, which measures the microwave incident and reflected power. Specifically, the microwave source protection device 2 includes a circulator or a DC blocker.

[0052] According to an embodiment of this disclosure, the fixture 6 is provided with an adapter interface, and the dual directional coupler 3 and the processing tool 122 are connected through the adapter interface on the fixture 6 via a second through hole provided on the end cap 12 of the microwave resonant cavity 110. The diameter of the second through hole is the same as the diameter of the coaxial cable used for connection, so as to confine the microwave in the microwave resonant cavity 110 and prevent it from dissipating.

[0053] According to an embodiment of this disclosure, the conductive powder supply device 130 is connected to the workpiece processing device 120 and includes: a powder supply mechanism 131 and a powder supply pipe 132. The conductive powder supply device 130 is specifically configured as follows:

[0054] The powder supply pipe 132 is provided in the machining tool 122 in the form of a through hole. The first end of the powder supply pipe 132 is located at the machining end of the machining tool 122 and is used to provide conductive powder to the machining area of ​​the workpiece 14. The second end of the powder supply pipe 132 is located at the non-machining end of the machining tool 122. The fixture 6 has an internal hole. One end of the internal hole of the fixture 6 is connected to the powder supply pipe 132, and the other end is connected to the powder supply mechanism 131 for filling conductive powder. The conductive powder enters the second end of the powder supply pipe 132 through the internal hole of the fixture 6 from the powder supply mechanism 131, and then is directly sprayed onto the machining area of ​​the workpiece 14 from the first end of the powder supply pipe 132. The fixture 6 is provided with a switch mechanism inside to control the start and stop of the powder supply.

[0055] In specific embodiment 1, a through hole is provided in the machining tool, penetrating both the non-machining end and the machining end. This through hole serves as a powder supply conduit and mates with an internal hole in the fixture to deliver conductive powder from the powder supply mechanism through the internal hole in the fixture and then through the through hole to the machining area of ​​the workpiece. This method is suitable for machining tools with larger diameters.

[0056] Unlike the conductive powder supply device 130 described in Specific Embodiment 1, where the powder supply pipe 132 is provided in the processing tool 122 in a through-hole manner, in another Specific Embodiment 2, the conductive powder supply device 130's powder supply pipe 132 is sleeved around the processing tool 122. Figure 4 This diagram illustrates the structural connection of a device for processing hard and brittle insulating materials according to a specific embodiment 2. Figure 4 As shown, the conductive powder providing device 130 is specifically configured as follows:

[0057] The powder supply pipe 132 is sleeved around the machining tool 122, with the machining end of the machining tool 122 exposed outside the powder supply pipe 132. A powder supply passage is formed between the inner circumference of the powder supply pipe 132 and the outer circumference of the machining tool 122. The first end of the powder supply pipe 132 is used to provide conductive powder to the machining area of ​​the workpiece 14. The second end of the powder supply pipe 132 is fixed on the fixture 6. The fixture 6 has an internal hole, one end of which is connected to the powder supply pipe 132, and the other end is connected to the powder supply mechanism 131 for injecting conductive powder. The conductive powder enters the second end of the powder supply pipe 132 through the internal hole of the fixture 6 from the powder supply mechanism 131, and then is directly sprayed onto the machining area of ​​the workpiece 14 from the first end of the powder supply pipe 132 through the powder supply passage. The fixture 6 is equipped with a switching mechanism to control the start and stop of the powder supply.

[0058] In specific embodiment 2, a sleeve is fitted over the machining tool, and the space enclosed by the sleeve and the machining tool serves as a powder supply conduit. This conduit mates with an internal hole in the fixture to deliver conductive powder from the powder supply mechanism through the internal hole in the fixture and then through this space to the machining area of ​​the workpiece. This method is suitable for machining tools with smaller diameters.

[0059] According to an embodiment of this disclosure, the powder supply pipe 132 and the processing tool 122 have the same axis. Compared with different axes, having the same axis allows the conductive powder to flow down more smoothly and be laid on the processing area of ​​the workpiece.

[0060] For the two implementation methods of the powder supply pipe described in Specific Embodiments 1 and 2 above, one or both can be adopted depending on the actual application scenario. Compared with other methods, such as setting up a separate powder supply pipe next to the machining tool, these two implementation methods, because the powder supply pipe described in these two implementation methods is located directly above the machining area of ​​the workpiece, can more accurately lay the conductive powder onto the machining area of ​​the workpiece, and will not cause the conductive powder to be laid outside the machining area of ​​the workpiece due to the spray angle, thus having a more beneficial technical effect.

[0061] According to an embodiment of this disclosure, the powder supply mechanism 131 includes: a powder supply tank 1311, a powder suction pipe 1312, a powder suction pump 1313, and a powder delivery pipe 1314; the inlet of the powder suction pump 1313 is connected to the powder supply tank 1311 through the powder suction pipe 1312, and the outlet of the powder suction pump 1313 is connected to the internal hole of the clamp 6 through the powder delivery pipe 1314 via a third through hole provided on the microwave resonant cavity 110. Figure 3 and Figure 4The example given is of a third through-hole located on one side of the cavity. In actual implementation, this third through-hole can be placed at a suitable location on the microwave resonant cavity, depending on the requirements. Furthermore, when the conductive powder passes through the powder suction pump, it can be mixed with inert gases such as argon or radon to form a more fluid gas-powder mixture, making it easier to lay the conductive powder into the workpiece's processing area via the powder supply pipeline.

[0062] Specifically, after providing a predetermined thickness of conductive powder to the processing area of ​​the workpiece, microwaves of a specific frequency are fed into the microwave resonant cavity. The microwaves are reflected within the cavity, accumulating energy. When this energy generates a strong electric field between the processing tool and the conductive powder, resulting in a spark discharge, the conductive powder at the discharge location vaporizes and / or melts due to the high temperature. The vaporized and / or melted conductive powder is then used to remove impurities from the workpiece. Combined with the relative movement between the processing tool and the workpiece, microstructure processing is performed on the workpiece. This equipment improves processing stability and increases processing efficiency while maintaining accuracy.

[0063] Figure 5 A flowchart illustrating a method for processing a hard and brittle insulating material according to an embodiment of the present disclosure is shown. Figure 5 As shown, the method for processing hard and brittle insulating materials includes the following steps S510~S530:

[0064] In step S510, a conductive machining tool and a workpiece made of hard and brittle insulating material are placed inside the microwave resonant cavity.

[0065] According to embodiments of this disclosure, the structure of the machining tool can be designed according to the size of the hole or cavity in the workpiece being machined, and its type includes, but is not limited to, a forming electrode. The forming electrode has the same cross-sectional shape as the surface being machined and is used to machine various irregular holes, micro-holes, and complex cavities. Furthermore, the machining tool must be conductive, and its material can be a metallic material, such as copper, steel, and superhard alloys, or other materials with a dense structure and high mechanical strength, such as graphite. The forming size or cross-sectional size of the machining tool is determined according to the size of the cavity or hole being machined, and depends on the size of the three-dimensional microstructure.

[0066] According to embodiments of this disclosure, a microwave resonant cavity is a metallic cavity used as a resonant circuit in the microwave band. It is a closed metallic cavity in which the electromagnetic field is confined. Microwave resonant cavities come in many shapes, the most common being rectangular and cylindrical resonant cavities.

[0067] In step S520, conductive powder of a predetermined thickness is provided to the processing area of ​​the workpiece.

[0068] Specifically, the conductive powders in this disclosure include, but are not limited to, metallic conductive powders, such as iron powder and aluminum powder. In addition, conductive powders may also include carbon-based conductive powders, such as carbon nanotubes and graphene. At room temperature, the conductive powder is in a solid powder state. Under the high temperature conditions caused by spark discharge, the conductive powder vaporizes and / or melts, forming a conductive material in a gaseous and / or liquid state with an even higher temperature.

[0069] In practice, the type of conductive powder used and the thickness of the conductive powder laid on the processing area of ​​the workpiece can be determined according to different processing scenarios and processing objects, so that the conductive powder in the gaseous and / or liquid state can contact the processing area of ​​the workpiece in sufficient quantity and fully, thereby making better use of the conductive powder in the gaseous and / or liquid state to melt and remove the workpiece.

[0070] In step S530, microwaves of a preset frequency are then emitted into the microwave resonant cavity, and the microwaves are reflected within the microwave resonant cavity to accumulate microwave energy.

[0071] The principle of a microwave resonant cavity is based on the resonance phenomenon. When the frequency of the microwave signal equals the natural frequency of the cavity, energy is maximized within the cavity for transmission and storage. Since resonant cavities are typically made of metal, their smooth internal metal walls reflect the microwave signal, causing it to propagate back and forth within the cavity, forming a standing wave. When the wavelength of the microwave signal is an integer multiple of the cavity's length, the standing wave reaches its maximum value, thus causing resonance. The frequency of the microwave signal is related to the shape, geometry, and waveform of the microwave resonant cavity. In practical implementation, a microwave resonant cavity and a matching microwave frequency can be selected according to actual needs.

[0072] According to embodiments of this disclosure, transmitting microwaves of a preset frequency into a microwave resonant cavity can be achieved in the following manner:

[0073] A microwave source, a microwave source protection device, a dual directional coupler, and a processing tool are connected in sequence using a coaxial cable. The dual directional coupler is then connected to a power meter via a coaxial cable, so that the microwaves generated by the microwave source are emitted into the microwave resonant cavity through the processing tool. The power meter is used to measure the microwave power incident into the microwave resonant cavity.

[0074] According to embodiments of this disclosure, when the microwave source, microwave source protection device, dual directional coupler, and processing tool are connected sequentially, a coaxial cable is used as the transmission medium. Thus, microwaves with a preset frequency, generated by the microwave source, are transmitted to the processing tool via the coaxial cable through the microwave source protection device and dual directional coupler, and are ultimately emitted into the microwave resonant cavity by the processing tool.

[0075] Specifically, a microwave source is a device that generates microwave energy. A microwave source protection device is used to protect the microwave source. A dual directional coupler is connected to a power meter via a coaxial cable to measure the incident and reflected microwave power during the microwave feeding process. The difference between the two yields the actual microwave power fed into the microwave resonant cavity. Additionally, the microwave reflection signal can be used as a feedback signal to adjust the microwave frequency. Therefore, by obtaining the actual fed microwave power and adjusting the microwave frequency emitted by the microwave source using the microwave reflection signal, the microwave frequency matching the microwave resonant cavity can be accurately and efficiently determined, thereby enabling the microwave resonant cavity to resonate more quickly.

[0076] According to embodiments of this disclosure, microwaves are emitted into a microwave resonant cavity through a processing tool. Since the microwaves act directly on the processing tool, the accumulated microwave energy can precisely affect the tiny gap between the processing tool and the workpiece. This causes a strong electric field to be generated between the processing end of the processing tool and the conductive powder, thereby forming a spark discharge. The conductive powder at the discharge location is vaporized and / or melted by the high temperature of the discharge. The vaporized and / or melted conductive powder is then used to remove the workpiece.

[0077] In one specific embodiment, the microwave source is a solid-state microwave source. The microwaves generated by this fixed microwave source have a frequency of 2.45 GHz, a power P ranging from 0 ≤ P ≤ 3000 W, a duty cycle DR ranging from 5% ≤ DR ≤ 40%, and a pulse repetition frequency (PRF) ranging from 1 Hz ≤ PRF ≤ 1 MHz. Unlike traditional microwave sources, solid-state microwave sources are a new type of microwave power source that uses solid-state technology to replace traditional mechanical perturbation technology. They mainly consist of a laser, composite glass, and an amplifier, enabling directional control and high-precision positioning. They can generate high-power pulses and wideband modulation signals, and have advantages such as low cost, stable performance, and high safety and reliability.

[0078] In one specific embodiment, the microwave source protection device employs a circulator, which can prevent microwave source damage caused by microwave reflection signals generated during microwave discharge due to impedance mismatch or load changes.

[0079] In another specific embodiment, the microwave source protection device uses a DC blocker. The DC blocker prevents the microwave source from being damaged by high voltage and can effectively filter and block DC current, thereby improving the performance and stability of the fed microwave.

[0080] It should be noted that the method used in implementing this step is not limited to the method described above. As long as the method can achieve the following technical effect, namely: after transmitting microwaves of a preset frequency into the microwave resonant cavity, the microwaves are reflected and accumulate microwave energy within the microwave resonant cavity. When the microwave energy causes a strong electric field to be generated between the processing end of the processing tool and the conductive powder, thus forming a spark discharge, the conductive powder at the discharge location is vaporized and / or melted due to the high temperature of the discharge. All of these are within the scope of protection of this disclosure.

[0081] In addition, step S530 is executed after step S520 is completed. Step S530 cannot be executed simultaneously with step S520, nor can it be executed before step S520, so as to ensure that when the discharge occurs, there is a predetermined thickness of conductive powder in the processing area of ​​the workpiece that vaporizes and / or melts under the influence of the discharge heat.

[0082] In step S540, when the microwave energy causes a strong electric field to be generated between the processing end of the processing tool and the conductive powder, thereby forming a spark discharge, the conductive powder at the discharge location is vaporized and / or melted by the high temperature of the discharge, and the workpiece is removed using the vaporized and / or melted conductive powder.

[0083] According to an embodiment of this disclosure, the method for processing hard and brittle insulating materials further includes: cyclically performing the above steps S520 to S540, that is: cyclically providing conductive powder of a preset thickness to the processing area of ​​the workpiece, then emitting microwaves of a preset frequency into the microwave resonant cavity, and finally using the vaporized and / or melted conductive powder to remove the workpiece.

[0084] When performing the methods described in the embodiments of this disclosure, the workpiece can be processed using the equipment described in the foregoing embodiments, or any equipment capable of performing the method steps described in the embodiments of this disclosure can be used to process the workpiece.

[0085] The technical solution disclosed herein utilizes the principle of microwave-assisted discharge. A conductive machining tool and a workpiece made of hard, brittle insulating material are placed within a microwave resonant cavity. A conductive powder of a predetermined thickness is provided to the machining area of ​​the workpiece. Then, microwaves of a predetermined frequency are emitted into the microwave resonant cavity. The microwaves are reflected within the cavity, accumulating microwave energy. When the microwave energy causes a strong electric field to form between the machining end of the machining tool and the conductive powder, resulting in a spark discharge, the conductive powder at the discharge location vaporizes and / or melts due to the high temperature of the discharge. The vaporized and / or melted conductive powder is then used to remove material from the workpiece, thereby improving machining stability and increasing machining efficiency while maintaining machining accuracy.

[0086] The above description is merely a preferred embodiment of this disclosure and an explanation of the technical principles employed. Those skilled in the art should understand that the scope of the invention involved in this disclosure is not limited to technical solutions formed by specific combinations of the above-described technical features, but should also cover other technical solutions formed by arbitrary combinations of the above-described technical features or their equivalents without departing from the inventive concept. For example, technical solutions formed by substituting the above-described features with (but not limited to) technical features disclosed in this disclosure that have similar functions.

Claims

1. An apparatus for processing hard and brittle insulating materials, characterized in that, The device includes: a microwave resonant cavity, a workpiece processing device, a conductive powder supply device, and a microwave feed device, wherein the conductive powder supply device is connected to the workpiece processing device. The microwave resonant cavity is configured to house a workpiece made of a hard and brittle insulating material; The workpiece processing device includes a workpiece processing mechanism and a conductive processing tool, and is configured to process the workpiece. The workpiece processing mechanism is used to drive the processing tool to move relative to the workpiece. The processing tool is placed inside the microwave resonant cavity, and the non-processing end of the processing tool is connected to the workpiece processing mechanism. The conductive powder supply device includes a powder supply pipe, which is disposed in the processing tool in the form of a through hole, or the powder supply pipe is sleeved outside the processing tool in the form of a sleeve, and the powder supply pipe and the processing tool have the same axis; the conductive powder supply device is configured to supply conductive powder to the processing area of ​​the workpiece through the powder supply pipe before the microwave feeding device emits microwaves of a preset frequency into the microwave resonant cavity; The microwave feed device is configured to be connected to the microwave resonant cavity and includes a microwave source. The microwave source is connected to the processing tool via a coaxial cable and is used to emit microwaves of a preset frequency into the microwave resonant cavity through the processing tool after the conductive powder supply device provides conductive powder of a preset thickness to the processing area of ​​the workpiece. The microwaves are reflected and accumulate microwave energy in the microwave resonant cavity. When the microwave energy causes a strong electric field to be generated between the processing end of the processing tool and the conductive powder, thus forming a spark discharge, the conductive powder at the discharge position is vaporized and / or melted due to the high temperature of the discharge. The vaporized and / or melted conductive powder at the discharge position is used to remove material from the workpiece.

2. The device according to claim 1, characterized in that, in, The workpiece processing mechanism includes: a fixture, a machine tool guide shaft, a machine tool spindle, a machine tool column, and a machine tool worktable; the processing tool, the fixture, the machine tool guide shaft, the machine tool spindle, and the machine tool column are sequentially connected and arranged perpendicularly to the machine tool worktable; the microwave resonant cavity includes an end cover and a cavity body, the cavity body has no bottom surface, the end cover and the cavity body can move relative to each other, and an openable door is provided on the end cover or the cavity body for placing the workpiece in so as to fix it on the machine tool worktable and removing the workpiece from the machine tool worktable; Wherein, the non-machining end of the machining tool is fixed on the fixture; the fixture is fixed on the machine tool guide shaft; the machine tool guide shaft is fixed on the machine tool spindle through a first through hole provided on the end cover of the microwave resonant cavity; the machine tool spindle is movably connected to the machine tool column; the end cover is fixed on the machine tool column by a fixing seat; the cavity is closedly connected to the machine tool worktable. The machine tool spindle is configured to reciprocate vertically on the machine tool column via an automatic feed adjustment device, thereby driving the machining tool to reciprocate vertically with the machine tool spindle; The machine tool table is configured to move horizontally via the automatic feed adjustment device, thereby causing the workpiece to move horizontally with the machine tool table. This is to create relative movement between the machining tool and the workpiece through the vertical reciprocating motion and / or the horizontal motion, so as to process the workpiece in combination with the relative motion.

3. The device according to claim 2, characterized in that, in, The microwave feed device further includes a microwave source protection device, a dual-directional coupler, and a power meter. The microwave source, the microwave source protection device, the dual-directional coupler, and the processing tool are connected in sequence via a coaxial cable. The dual-directional coupler is connected to the power meter via a coaxial cable. The power meter is used to measure the microwave power incident on the microwave resonant cavity. The microwave source protection device includes a circulator or a DC blocker.

4. The device according to claim 3, characterized in that, in, When the dual-directional coupler is connected to the machining tool, the fixture is also provided with an adapter. The dual-directional coupler and the machining tool are connected through the adapter on the fixture via a second through hole provided on the end cap of the microwave resonant cavity.

5. The device according to any one of claims 2 to 4, characterized in that, in, The conductive powder providing device further includes a powder supply mechanism, and the conductive powder providing device is specifically configured as follows: When the powder supply pipe is installed in the machining tool in a through-hole manner, the first end of the powder supply pipe is located at the machining end of the machining tool, and is used to provide conductive powder to the machining area of ​​the workpiece. The second end of the powder supply pipe is located at the non-machining end of the machining tool. The fixture has an internal hole, one end of which is connected to the powder supply pipe, and the other end is connected to the powder supply mechanism for filling in conductive powder. The conductive powder enters the second end of the powder supply pipe through the internal hole of the fixture from the powder supply mechanism, and then is directly sprayed onto the machining area of ​​the workpiece from the first end of the powder supply pipe. The fixture is equipped with a switching mechanism to control the start and stop of the powder supply. or, When the powder supply pipe is sleeved around the machining tool, the machining end of the machining tool is exposed outside the powder supply pipe. A powder supply passage is formed between the inner circumference of the powder supply pipe and the outer circumference of the machining tool. The first end of the powder supply pipe is used to provide conductive powder to the machining area of ​​the workpiece. The second end of the powder supply pipe is fixed on the fixture. The fixture has an internal hole. One end of the internal hole of the fixture is connected to the powder supply pipe, and the other end is connected to the powder supply mechanism for filling conductive powder. The conductive powder enters the second end of the powder supply pipe through the internal hole of the fixture from the powder supply mechanism, and then is directly sprayed onto the machining area of ​​the workpiece from the first end of the powder supply pipe through the powder supply passage. The fixture is equipped with a switching mechanism to control the start and stop of the powder supply.

6. The device according to claim 5, characterized in that, in, The powder supply mechanism includes: a powder supply tank, a powder suction pipe, a powder suction pump, and a powder delivery pipe; the inlet of the powder suction pump is connected to the powder supply tank through the powder suction pipe, and the outlet of the powder suction pump is connected to the internal hole of the fixture through the powder delivery pipe via a third through hole provided on the microwave resonant cavity.

7. The device according to any one of claims 1 to 4, characterized in that, The device further includes a control module, which is connected to the workpiece processing device, the conductive powder supply device, and the microwave feed device. The control module controls the conductive powder supply device to provide conductive powder of a preset thickness to the processing area of ​​the workpiece. Subsequently, it controls the microwave feed device to emit microwaves of a preset frequency into the microwave resonant cavity, causing the microwaves to reflect and accumulate energy within the cavity. When the microwave energy generates a strong electric field between the processing end of the processing tool and the conductive powder, resulting in a spark discharge, the conductive powder at the discharge location vaporizes and / or melts due to the high temperature of the discharge. The control module then uses the vaporized and / or melted conductive powder to remove the workpiece. The process is repeated cyclically: first, the conductive powder supply device provides conductive powder to the processing area of ​​the workpiece; then, the microwave feed device emits microwaves of a preset frequency into the microwave resonant cavity; and finally, the workpiece processing device uses the vaporized and / or melted conductive powder at the discharge location to remove the workpiece.

8. A method for processing hard and brittle insulating materials, characterized in that, The method is applied to the device according to claim 1, and the method includes: The conductive machining tool and the workpiece made of hard and brittle insulating material are placed inside the microwave resonant cavity; Conductive powder of a predetermined thickness is supplied to the processing area of ​​the workpiece through the powder supply pipe. Then, microwaves of a predetermined frequency are emitted into the microwave resonant cavity through the processing tool. The microwaves are reflected and accumulate microwave energy in the microwave resonant cavity. When the microwave energy causes a strong electric field to be generated between the processing end of the processing tool and the conductive powder, thus forming a spark discharge, the conductive powder at the discharge location is vaporized and / or melted due to the high temperature of the discharge. The vaporized and / or melted conductive powder at the discharge location is used to remove material from the workpiece.

9. The method according to claim 8, characterized in that, The method further includes: first, providing conductive powder of a preset thickness to the processing area of ​​the workpiece in a cyclic manner; then, emitting microwaves of a preset frequency into the microwave resonant cavity through the processing tool; and finally, using the conductive powder at the discharge location after vaporization and / or melting to remove the workpiece.

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