An electrochemical mechanical polishing equipment for complex structure parts based on liquid carrier micro-particle electrolyte

Abstract

The application discloses a kind of complex structure parts electrochemical mechanical polishing equipment based on carrier liquid micro-particle electrolyte, including mechanical vibration mechanism and multi-degree-of-freedom transmission mechanism on base, and mechanical vibration mechanism is equipped with electrochemical processing mechanism between multi-degree-of-freedom transmission mechanism top, electrochemical processing mechanism is connected with liquid storage tank by temperature and humidity adjusting mechanism;Preloaded with carrier liquid micro-particle electrolyte in electrolytic cell, workpiece is clamped by pneumatic metal clamp, under the driving of multi-degree-of-freedom transmission mechanism, workpiece is contacted with carrier liquid micro-particle electrolyte in electrolytic cell all-around movement, simultaneously, voltage is applied by direct-current power supply, and the current loop of connection power supply positive pole, anode workpiece, electrolyte particle, cathode electrolytic cell and power supply negative pole is formed, during electrification process, workpiece surface is formed softened metal oxide film under the electrochemical action of carrier liquid micro-particle electrolyte;Workpiece is contacted with carrier liquid micro-particle in electrolytic cell by mechanical vibration mechanism and is vibrated, and the relative friction of multi-degree-of-freedom movement is generated, and the mechanical removal of surface oxide film is realized, and the electrochemical and mechanical circulation in polishing process is promoted, and the polishing efficiency is improved, and the machining accessibility of complex structure part polishing is good;It has the advantages of high efficiency, good polishing effect, simple operation and low cost.

Description

Technical Field

[0001] This invention relates to the field of parts polishing equipment, and more specifically to an electrochemical mechanical polishing equipment for complex structural parts based on a liquid-carrying microparticle electrolyte. Background Technology

[0002] Parts with complex curved surfaces, thin-walled structures, and microfluidic cavities are widely used in biomedicine, optical components, equipment manufacturing, and aerospace due to the functional advantages brought by their structures. Examples include implants in the medical field, optical lens molds in the optical field, gears in the manufacturing field, and turbine engine blades in the aerospace field. However, complex structural parts often have surface defects during the manufacturing process. For example, machined parts have burrs and tool marks on their surfaces, cast parts have relatively rough surfaces, and 3D printed parts have spheroidization and adhesion effects on their surfaces, often making them unsuitable for direct use. Therefore, post-processing such as polishing is required.

[0003] Mechanical polishing can achieve high polishing efficiency and surface quality, but in the process of polishing complex structural parts, due to the limitation of the polishing tool head radius, tool interference is prone to occur when polishing complex curved surfaces. At the same time, because the tool and the surface are in rigid contact, it will also generate large processing stress. Electrochemical polishing can help remove materials from difficult-to-machine metal materials. The liquid flow makes the metal surface highly accessible, but the polishing efficiency is low because the oxide film is difficult to remove in time. Electrochemical mechanical polishing first uses an electrochemical reaction to generate an oxide film on the surface of the part that is relatively easy to remove, and then removes the oxide film quickly through appropriate mechanical action. With the interaction of electrochemistry and mechanics, this process has better processing accessibility than mechanical polishing and higher processing efficiency than electrochemical polishing.

[0004] Therefore, electrochemical mechanical polishing (EMF) offers significant advantages over traditional single polishing techniques, including higher polishing efficiency and greater accessibility. Currently, polishing equipment for planar and tubular parts has been developed using this technology; however, for polishing complex metal parts, the following issues still need to be addressed:

[0005] 1. For parts with complex curved surfaces or complex cavities, it is necessary to ensure not only the accessibility of electrochemical processing but also the accessibility of mechanical processing. Currently, the widely used equipment that provides mechanical processing through surface grinding has low applicability to the above-mentioned parts. Therefore, it is also necessary to design polishing equipment that can also bring mechanical processing to various parts of complex structural surfaces.

[0006] 2. For parts with complex curved surfaces or cavities, it is necessary to ensure not only high accessibility but also high polishing efficiency. Although the proposed method of polishing point by point using a mechanical tool head that can release electrolyte can achieve high accessibility, it cannot polish all parts of the surface at the same time, which has certain limitations in achieving high polishing efficiency. Summary of the Invention

[0007] To overcome the shortcomings of the existing technology, the present invention aims to provide an electrochemical mechanical polishing device for complex structural parts based on a liquid-carrying microparticle electrolyte. The device pre-fills an electrolytic cell with a liquid-carrying microparticle electrolyte. A pneumatic metal clamp holds the workpiece, and a multi-degree-of-freedom transmission mechanism drives the workpiece to move and contact the liquid-carrying microparticle electrolyte in all directions within the electrolytic cell. Simultaneously, a DC power supply applies voltage, forming a current loop connecting the positive terminal of the power supply, the anode workpiece, the electrolyte particles, the cathode electrolytic cell, and the negative terminal of the power supply. During the energizing process, a softened metal oxide film forms on the workpiece surface under the electrochemical action of the electrolyte carried by the liquid-carrying microparticles. A mechanical vibration mechanism drives the liquid-carrying microparticles in the electrolytic cell to vibrate, generating relative friction with the multi-degree-of-freedom moving workpiece, achieving mechanical removal of the surface oxide film, promoting electrochemical and mechanical circulation during the polishing process, and improving polishing efficiency. Furthermore, the liquid-carrying microparticle electrolyte can make omnidirectional contact with the surface of the complex structural parts, resulting in good processability during polishing. This device has the advantages of high efficiency, good spatial accessibility, simple operation, and low cost.

[0008] To achieve the above objectives, the technical solution adopted by the present invention is as follows:

[0009] An electrochemical mechanical polishing device for complex structural parts based on liquid-carrying microparticle electrolyte includes a base 3001, a support frame 3008 on the rear side of the base, a liquid storage tank 4003, an electrical control box 5, and a multi-degree-of-freedom transmission mechanism 1 on the top of the support frame 3008, a mechanical vibration mechanism 3 on the base 3001 and the front side of the support frame 3008, and an electrochemical processing mechanism 2 between the mechanical vibration mechanism 3 and the multi-degree-of-freedom transmission mechanism 1; the electrochemical processing mechanism 2 includes an electrolytic cell 2008 placed on top of the mechanical vibration mechanism 3, an electrolytic cell metal ring 2001 connected to the negative terminal of the power supply in the electrical control box 5 at the opening of the electrolytic cell 2008, a cathode platinum mesh basket 2002 installed in the electrolytic cell metal ring 2001 and the electrolytic cell 2008, a pneumatic metal clamp assembly suspended above the cathode platinum mesh basket 2002, and the top of the pneumatic metal clamp assembly connected to the circumferential motion component of the multi-degree-of-freedom transmission mechanism 1.

[0010] The multi-degree-of-freedom transmission mechanism 1 includes a vertical motion component and a circular motion component, wherein:

[0011] The vertical motion component includes a slide rail 1105, the bottom end of which is connected to the top of the support frame 3008. The top end of the slide rail 1105 is provided with a motor connecting plate 1102, and a stepper motor 1101 is provided on the motor connecting plate 1102. The output shaft of the stepper motor 1101 is connected to the top end of the ball screw 1103 through a coupling. The bottom end of the ball screw 1103 is rotatably connected to the top of the support frame 3008. The ball screw 1103 is rotatably connected to the slider 1104 through a screw nut. The slider 1104 is slidably connected to the slide rail 1105.

[0012] The circular motion assembly includes a housing 1205 connected to the slider 1104. A servo motor 1201 is provided on the top of the housing 1205. The power output shaft 1202 of the servo motor 1201 is connected to the input shaft 1204 of the sun gear 1211 inside the housing. The input shaft 1204 of the sun gear is circumferentially fixed to the axis of the sun gear 1211. Multiple planet gears 1210 are evenly distributed on the outer periphery of the sun gear 1211. The axis of the planet gear 1210 is connected to the output shaft 1208 of the planet gear through the bearing 1209. The outer gear ring of the planet gear 1210 meshes with the inner gear ring 1207. A planet carrier 1203 is provided below the inner gear ring 1207. The outer periphery of the inner gear ring 1207 is adapted to be connected to the bearing 1106 provided at the bottom of the housing 1206.

[0013] The pneumatic metal clamp assembly of the electrochemical machining mechanism 2 includes a cylinder 2004 and a cylinder piston 2005 adapted to the cylinder 2004. A metal gripper 2006 is rotatably connected to the lower end of the cylinder 2004. The metal gripper 2006 has a two-link structure, and the middle joint of the two links is connected to the piston 2005 through a support rod 2007. The top of the cylinder 2004 is connected to the planetary gear output shaft 1208. A second conductive slip ring 1215 is provided on the outer periphery of the cylinder 2004. The bottom end of the second conductive slip ring 1215 is electrically connected to the metal gripper 2006. The top end of the second conductive slip ring 1215 is electrically connected to the first conductive slip ring 1214 at the bottom of the sun gear input shaft 1204 through a wire. The wire of the first conductive slip ring 1214 is connected to the positive terminal of the power supply in the electrical control box 5.

[0014] The mechanical vibration mechanism 3 includes a vibration isolation plate 3002 set on the top of the base 3001, a support column 3007 at each of the four corners of the vibration isolation plate 3002, a spring 3006 wrapped around the support column 3007, the top of the spring 3006 being connected to the bottom of the four corners of the vibration plate 3005, and a vibration motor 3003 set in the middle of the bottom of the vibration plate 3005.

[0015] The base 3001 is also equipped with an air compressor 3009. One end of the air blowing pipe 3004 is connected to the air outlet of the air compressor 3009, and the other end passes through the vibration isolation plate 3002 and is connected to the bottom of the electrolytic cell 2008.

[0016] The electrolytic cell 2008 of the electrochemical processing mechanism 2 is filled with a carrier liquid micro-particle electrolyte 2009, and a temperature and humidity regulating mechanism 4 is also provided between the electrolytic cell 2008 and the storage tank 4003.

[0017] The liquid-carrying microparticle electrolyte 2009 is composed of liquid-carrying microparticles and electrolyte.

[0018] The liquid-carrying microparticles are porous alumina ceramic particles with a particle size range of 1–2 mm.

[0019] The temperature and humidity control mechanism 4 includes a temperature control panel 4007 installed on the outer wall of the electrolytic cell 2008, and a humidity sensor 4006 and a temperature sensor 4004 installed on the inner wall of the electrolytic cell 2008. The temperature sensor 4004 is connected to the temperature control panel 4007 via a wire, and the humidity sensor 4006 is connected to the humidity control panel 4002 on the outer wall of the storage tank 4003 via a wire. The outer wall of the storage tank 4003 is also equipped with an electric proportional regulating valve 4001. The outlet end of the electric proportional regulating valve 4001 is connected to the inlet end of the dripping pipe 4005, and the outlet end of the dripping pipe 4005 extends into the electrolytic cell 2008.

[0020] Heating wires are arranged around the inner and outer walls of the electrolytic cell 2008.

[0021] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0022] (1) A workpiece with a complex structure is placed in a pneumatic metal clamp assembly. The pneumatic metal clamp assembly is activated to tighten and clamp the workpiece. The clamping size of the workpiece can be adjusted by the piston stroke. A wire is connected to the metal clamp, which is connected to the positive terminal of the DC power supply to achieve the connection between the positive terminal and the anode of the workpiece. The outer edge of the cathode platinum mesh basket 2002 is in contact with the electrolytic cell metal ring 2001. The wire on the electrolytic cell metal ring 2001 is connected to the negative terminal of the DC power supply to achieve the connection between the negative terminal and the cathode. After the DC power supply is turned on, the applied polishing potential causes the DC power supply, the anode workpiece, the carrier liquid micro-particle electrolyte 2009, and the cathode platinum mesh to form a current closed loop, which causes an oxidation reaction on the surface of the workpiece and forms an oxide film on the surface of the workpiece. The formed oxide film is softer than the original metal material of the workpiece, which is convenient for subsequent mechanical removal.

[0023] (2) The multi-degree-of-freedom transmission mechanism drives the workpiece to be placed in the electrolyte with micro-particles. The workpiece is driven to make full contact with the electrolyte in all directions through the up and down movement of the slider 1104 of the vertical motion component and the revolution and rotation of the planetary gear 1210 in the circular motion component. The electrolytic cell 2008 is vibrated by the mechanical vibration mechanism, which drives the micro-particles in the electrolyte 2009 to vibrate, so that they generate relative friction with the workpiece with multi-degree-of-freedom movement. The oxide film is removed by mechanical action, and the new surface of the lower layer is exposed, which promotes the electrochemical and mechanical cycle in the polishing process. The mechanical action can accelerate the removal of the oxide layer. Compared with the single processing process, the processing efficiency is significantly improved.

[0024] (3) The cathode platinum mesh basket 2002 structure can filter reaction products through the pores at the bottom of the platinum mesh basket while participating in the electrochemical reaction; it also facilitates the recycling and reuse of the carrier liquid microparticles after the reaction.

[0025] (4) This invention uses a liquid-carrying microparticle electrolyte 2009 instead of the liquid electrolyte in traditional electrochemical polishing. The liquid-carrying microparticle electrolyte 2009 has the following effects: ① The surface of the liquid-carrying microparticles is porous, allowing them to carry the electrolyte, thus forming a conductive path with less electrolyte; ② The liquid-carrying microparticles, with a size range of 1-2 mm, can fully contact the complex surface structure, ensuring the accessibility of the electrochemical polishing process; ③ The liquid-carrying microparticles scrape against the surface during the reaction, aiding in the removal of the surface oxide film; ④ The scraping action of the liquid-carrying microparticles helps the gas evolved on the anode surface to detach from the workpiece surface, preventing gas adhesion from adversely affecting the workpiece surface quality. This equipment uses this electrolyte to introduce mechanical action in a more flexible way, which helps simplify the equipment and facilitates operation and control.

[0026] (5) The electrochemical processing mechanism 2 of the present invention includes a temperature and humidity regulating mechanism 4 installed between the electrolytic cell 2008 and the storage tank 4003. Temperature control is achieved by adjusting the heating effect of the heating wire in the interlayer through the temperature control panel 4007; drip flow control is achieved by adjusting the electric proportional regulating valve 4001 through the humidity control panel 4002. If the humidity is too low, deionized water is added; if the humidity is too high, the air compressor 3008 is activated to introduce air through the air pipe 3004 to dry the electrolyte and reduce the humidity, thus achieving humidity control of the carrier microparticle electrolyte 2009. This comprehensive approach achieves temperature and humidity control of the carrier microparticle electrolyte 2009, thereby enabling controllable adjustment of the electrolyte conductivity.

[0027] In summary, the device of the present invention not only has the combined effects of electrochemical and mechanical processes, providing good processing accessibility and high polishing efficiency for complex surface structures, but also has a simple structural composition, making it easy to control. Attached Figure Description

[0028] Figure 1 This is an isometric view of the present invention.

[0029] Figure 2 This is a schematic diagram of the electrochemical processing mechanism 2 of the present invention.

[0030] Figure 3 This is a schematic diagram of the circular motion component of the present invention.

[0031] Figure 4 This is a schematic diagram of the mechanical vibration mechanism 3 of the present invention.

[0032] The components include: 1. Multi-degree-of-freedom transmission mechanism; 1101. Stepper motor; 1102. Motor support plate; 1103. Ball screw mechanism; 1104. Slider; 1105. Slide rail; 1201. Servo motor; 1202. Sun gear input shaft; 1203. Planetary gear carrier; 204. Sun gear output shaft; 1205. Housing; Lower housing - 1206, 1207. Internal gear ring; 1208. Planetary gear input shaft; 1209. Bearing; 1210. Planetary gear; 1211. Sun gear; 1214. First conductive slip ring; 1215. Second conductive slip ring; 2. Electrochemical machining mechanism; 2001. Electrolytic cell metal ring; 2002. Cathode platinum mesh basket; 2004. Cylinder 2005, Piston; 2006, Metal gripper; 2007, Support rod; 2008, Electrolytic cell; 2009, Liquid-carrying micro-particle electrolyte; 3. Mechanical vibration mechanism; 3001, Base; 3002, Vibration isolation plate; 3003, Vibration motor; 3004, Air blowing pipe; 3005, Vibrating plate; 3006, Spring; 3007, Support column; 3008, Support frame; 3009, Air compressor; 4. Temperature and humidity control assembly; 4001, Electric proportional control valve; 4002, Humidity control board; 4003, Liquid storage tank; 4004, Temperature sensor; 4005, Dropping pipe; 4006, Humidity sensor; 4007, Temperature control board; 5. Electrical control box. Detailed Implementation

[0033] The following are specific embodiments of the present invention. It should be noted that the present invention is not limited to the following specific embodiments. All equivalent modifications made based on the technical solutions of this application fall within the protection scope of the present invention.

[0034] An electrochemical mechanical polishing device for complex structural parts based on a liquid-carrying microparticle electrolyte includes a base 3001, a support frame 3008 at the rear of the base, a liquid storage tank 4003, an electrical control box 5, and a multi-degree-of-freedom transmission mechanism 1 respectively mounted on the top of the support frame 3008, a mechanical vibration mechanism 3 on the base 3001 and in front of the support frame 3008, and an electrochemical processing mechanism 2 positioned above the mechanical vibration mechanism 3 and between it and the multi-degree-of-freedom transmission mechanism 1; the electrochemical processing mechanism 2 includes an electrolytic cell 2008 placed on top of the mechanical vibration mechanism 3. The electrolytic cell 2008 has a metal ring 2001 at its opening, which is connected to the negative terminal of the power supply in the electrical control box 5. A cathode platinum mesh basket 2002 is installed inside the electrolytic cell 2008 and the metal ring 2001. A pneumatic metal clamp assembly is suspended above the cathode platinum mesh basket 2002. The top of the pneumatic metal clamp assembly is connected to the circumferential motion assembly of the multi-degree-of-freedom transmission mechanism 1. The cathode platinum mesh basket 2002 can filter reaction products while participating in the electrochemical reaction. After the reaction, it also facilitates the recycling and reuse of the carrier liquid fine particles.

[0035] The multi-degree-of-freedom transmission mechanism 1 includes a vertical motion component and a circular motion component, wherein:

[0036] The vertical motion component includes a slide rail 1105, the bottom end of which is connected to the top of the support frame 3008. The top end of the slide rail 1105 is provided with a motor connecting plate 1102, and a stepper motor 1101 is provided on the motor connecting plate 1102. The output shaft of the stepper motor 1101 is connected to the top end of the ball screw 1103 through a coupling. The bottom end of the ball screw 1103 is rotatably connected to the top of the support frame 3008. The ball screw 1103 is rotatably connected to the slider 1104 through a screw nut. The slider 1104 is slidably connected to the slide rail 1105.

[0037] The circular motion assembly includes a housing 1205 connected to the slider 1104. A servo motor 1201 is located on the top of the housing 1205. The power output shaft 1202 of the servo motor 1201 is connected to the input shaft 1204 of the sun gear 1211 inside the housing via a coupling. The input shaft 1204 of the sun gear is circumferentially fixed to the axis of the sun gear 1211 via a key. Multiple planet gears 1210 are evenly distributed on the outer circumference of the sun gear 1211. The axis of the planet gear 1210 is connected to the output shaft 1208 of the planet gear via a bearing 1209. The outer gear ring of the planet gear 1210 meshes with the inner gear ring 1207. A planet carrier 1203 is located below the inner gear ring 1207. The outer circumference of the inner gear ring 1207 is adapted to be connected to the bearing 1106 located at the bottom of the housing 1206. The planet gear 1210 rotates on its own axis and simultaneously revolves around the sun, causing the workpiece to make omnidirectional contact with the electrolyte on both the upper and lower circumferences. The combined action of the vertical motion component and the circular motion component ensures that the workpiece and the electrolyte are in full contact and generate mutual friction, thus significantly improving processing efficiency.

[0038] The pneumatic metal clamping assembly of the electrochemical machining mechanism 2 includes a cylinder 2004 and a cylinder piston 2005 adapted to the cylinder 2004. A metal gripper 2006 is rotatably connected to the lower end of the cylinder 2004. The metal gripper 2006 has a two-link structure, and the middle joint of the two links is connected to the piston 2005 through a support rod 2007. The top of the cylinder 2004 is connected to the output shaft 1208 of the planetary gear 1210 through a coupling. A second conductive slip ring 1215 is provided on the outer periphery of the cylinder 2004. The bottom end of the second conductive slip ring 1215 is electrically connected to the metal gripper 2006. The top end of the second conductive slip ring 1215 is electrically connected to the first conductive slip ring 1214 at the bottom of the sun gear input shaft 1204 through a wire. The wire of the first conductive slip ring 1214 is connected to the positive terminal of the power supply in the electrical control box 5, so that an oxidation reaction occurs on the surface of the workpiece, forming an oxide film on the surface of the workpiece. The formed oxide film is softer than the original metal material of the workpiece, which is convenient for subsequent mechanical removal.

[0039] The mechanical vibration mechanism 3 includes a vibration isolation plate 3002 mounted on top of a base 3001. Support columns 3007 are located at each of the four corners of the vibration isolation plate 3002. Springs 3006 are fitted around the support columns 3007. The tops of the springs 3006 are connected to the bottoms of the four corners of a vibration plate 3005. A vibration motor 3003 is located in the center of the bottom of the vibration plate 3005. The mechanical vibration mechanism causes the electrolytic cell 2008 to vibrate, which in turn causes the electrolyte particles inside to vibrate, generating relative friction with the multi-degree-of-freedom moving workpiece. This mechanical action removes the oxide film, exposing the underlying new surface and promoting the electrochemical and mechanical cycles during the polishing process. The mechanical assistance accelerates the removal of the oxide layer, resulting in superior polishing effects and significantly improved processing efficiency compared to a single processing method.

[0040] The base 3001 is also equipped with an air compressor 3009. One end of the air blowing pipe 3004 is connected to the air outlet of the air compressor 3009, and the other end passes through the vibration isolation plate 3002 and is connected to the bottom of the electrolytic cell 2008.

[0041] The electrolytic cell 2008 of the electrochemical processing mechanism 2 is filled with a carrier liquid micro-particle electrolyte 2009, and a temperature and humidity regulating mechanism 4 is also provided between the electrolytic cell 2008 and the storage tank 4003.

[0042] The liquid-carrying microparticle electrolyte 2009 is composed of liquid-carrying microparticles and electrolyte.

[0043] The liquid-carrying microparticles are porous alumina ceramic particles with a particle size of 1-2 mm.

[0044] The temperature and humidity control mechanism 4 includes a temperature control panel 4007 installed on the outer wall of the electrolytic cell 2008. Heating wires are arranged around the inner and outer walls of the electrolytic cell 2008. A humidity sensor 4006 and a temperature sensor 4004 are respectively installed on the inner wall of the electrolytic cell 2008. The temperature sensor 4004 is connected to the temperature control panel 4007 via a wire. The temperature sensor 4004 transmits the temperature of the electrolyte particles in the carrier liquid to the temperature control panel 4007. The temperature control panel 4007 controls the temperature by adjusting the heating effect of the heating wires in the interlayer. The temperature of the electrolytic cell affects the electrolyte temperature, changing the ion movement speed in the electrolyte and adjusting the polishing reaction rhythm. The humidity sensor 4006 is connected to the humidity control panel on the outer wall of the storage tank 4003 via a wire. The 4002 signal connection is used. An electric proportional control valve 4001 is also installed on the outer wall of the liquid storage tank 4003. The outlet end of the electric proportional control valve 4001 is connected to the inlet end of the dripping pipe 4005, and the outlet end of the dripping pipe 4005 extends into the electrolytic cell 2008. A humidity sensor 4006 detects the humidity of the carrier liquid microparticle electrolyte and transmits this information to the humidity control panel 4002. The humidity control panel 4002 controls the dripping flow rate by adjusting the electric proportional control valve 4001. If the humidity is too low, deionized water is added; if the humidity is too high, the air compressor 3008 is activated to introduce air through the air pipe 3004 to reduce the humidity, thereby achieving electrolyte humidity control. This comprehensive approach achieves temperature and humidity control of the carrier liquid microparticle electrolyte, regulating the reaction rhythm and making the workpiece polishing process more scientific and efficient.

[0045] The liquid-carrying microparticles in the electrolytic cell 2008 help the anolyte gas to detach from the workpiece surface through the scraping action of the particles, thus avoiding the adverse effects of gas adhesion on the processing process and the surface quality of the workpiece.

[0046] The working principle of this invention is as follows:

[0047] Before operation, a carrier liquid micro-particle electrolyte 2009 is placed in the electrolytic cell 2008, with the depth sufficient to submerge the anode workpiece during polishing. Then, the electrical control box 5 supplies power to the equipment, and the multi-degree-of-freedom transmission mechanism 1 moves the workpiece into the carrier liquid micro-particle electrolyte. The vertical movement of the slider 1104 of the vertical motion component and the revolution and rotation of the planetary gear shaft 1208 cause the workpiece to make full-circumferential contact with the electrolyte. The complex structure workpiece is placed in the pneumatic metal gripper 2006, and the pneumatic device is activated to tighten the gripper and clamp the workpiece. The clamping size of the gripper 2006 can be adjusted by the stroke of the piston 2005. A wire is connected to the metal clamp, which is connected to the positive terminal of the DC power supply to connect the positive terminal and the anode of the workpiece. The cathode platinum mesh 2002... The outer edge contacts the metal ring 2001 of the electrolytic cell. A wire on the metal ring 2001 is connected to the negative terminal of the DC power supply, connecting the negative and cathode terminals. When the DC power supply is turned on, a polishing potential is applied, forming a closed circuit between the DC power supply, the anode workpiece, the carrier electrolyte 2009 (fine particles), and the cathode platinum mesh 2002. This causes an oxidation reaction on the workpiece surface, forming an oxide film that is easier to remove than the metal substrate. Simultaneously, a mechanical vibration mechanism causes the electrolytic cell 2008 to vibrate, driving the carrier electrolyte to vibrate and generate relative friction with the multi-degree-of-freedom moving workpiece. This mechanical action removes the oxide film, exposing a new surface layer, promoting electrochemical and mechanical cycles during polishing, facilitating surface material removal, and improving polishing efficiency. Furthermore, a temperature and humidity control mechanism is installed to control the reaction rhythm in real time, ensuring a balanced reaction.

[0048] Furthermore, various different embodiments of the present invention can be combined in any way, as long as they do not violate the spirit of the present invention, they should also be regarded as the content disclosed by the present invention.

Claims

1. An electrochemical mechanical polishing device for complex structural parts based on liquid-carrying microparticle electrolyte, comprising a base (3001), a support frame (3008) provided on the rear side of the base, a liquid storage tank (4003), an electrical control box (5) and a multi-degree-of-freedom transmission mechanism (1) respectively provided on the top of the support frame (3008), a mechanical vibration mechanism (3) provided on the base (3001) and the front side of the support frame (3008), and an electrochemical processing mechanism (2) provided above the mechanical vibration mechanism (3) and between it and the multi-degree-of-freedom transmission mechanism (1); characterized in that: The electrochemical processing mechanism (2) includes an electrolytic cell (2008) placed on top of a mechanical vibration mechanism (3). The opening of the electrolytic cell (2008) is provided with an electrolytic cell metal ring (2001) connected to the negative terminal of the power supply in the electrical control box (5). A cathode platinum mesh basket (2002) is installed in the electrolytic cell metal ring (2001) and the electrolytic cell (2008). A pneumatic metal clamp assembly is suspended above the cathode platinum mesh basket (2002). The top of the pneumatic metal clamp assembly is connected to the circumferential motion assembly of the multi-degree-of-freedom transmission mechanism (1).

2. The electrochemical mechanical polishing equipment for complex structural parts based on liquid-carrying microparticle electrolyte according to claim 1, characterized in that: The multi-degree-of-freedom transmission mechanism (1) includes a vertical motion component and a circular motion component, wherein: The vertical motion component includes a slide rail (1105), the bottom end of which is connected to the top of the support frame (3008). The top end of the slide rail (1105) is provided with a motor connecting plate (1102), and a stepper motor (1101) is provided on the motor connecting plate (1102). The output shaft of the stepper motor (1101) is connected to the top end of a ball screw (1103) through a coupling. The bottom end of the ball screw (1103) is rotatably connected to the top of the support frame (3008). The ball screw (1103) is rotatably connected to a slider (1104) through a screw nut. The slider (1104) is slidably connected to the slide rail (1105). The circular motion assembly includes a housing (1205) connected to the slider (1104). A servo motor (1201) is provided on the top of the housing (1205). The power output shaft (1202) of the servo motor (1201) is connected to the input shaft (1204) of the sun gear (1211) inside the housing. The input shaft (1204) of the sun gear is circumferentially fixed to the axis of the sun gear (1211). Multiple planet gears (1210) are evenly distributed on the outer periphery of the sun gear (1211). The axis of the planet gear (1210) is connected to the output shaft (1208) of the planet gear through a bearing (1209). The outer gear ring of the planet gear (1210) meshes with the inner gear ring (1207). A planet carrier (1203) is provided below the inner gear ring (1207). The outer periphery of the inner gear ring (1207) is adapted to be connected to the bearing (1106) provided at the bottom of the housing (1206).

3. The electrochemical mechanical polishing equipment for complex structural parts based on liquid-carrying microparticle electrolyte according to claim 1, characterized in that: The pneumatic metal clamp assembly of the electrochemical processing mechanism (2) includes a cylinder (2004) and a cylinder piston (2005) adapted to the cylinder (2004). The lower end of the cylinder (2004) is rotatably connected to a metal jaw (2006). The metal jaw (2006) is a two-link structure. The middle joint of the two-link is connected to the piston (2005) through a support rod (2007). The top of the cylinder (2004) is connected to the planetary gear output shaft (1208). A second conductive slip ring (1215) is provided on the outer periphery of the cylinder (2004). The bottom end of the second conductive slip ring (1215) is electrically connected to the metal jaw (2006). The top end of the second conductive slip ring (1215) is electrically connected to the first conductive slip ring (1214) at the bottom of the sun gear input shaft (1204) through a wire. The wire of the first conductive slip ring (1214) is connected to the positive terminal of the power supply in the electrical control box (5).

4. The electrochemical mechanical polishing equipment for complex structural parts based on liquid-carrying microparticle electrolyte according to claim 1, characterized in that: The mechanical vibration mechanism (3) includes a vibration isolation plate (3002) set on the top of the base (3001), a support column (3007) at each of the four corners of the vibration isolation plate (3002), a spring (3006) wrapped around the support column (3007), the top of the spring (3006) being connected to the bottom of the four corners of the vibration plate (3005), and a vibration motor (3003) set in the middle of the bottom of the vibration plate (3005).

5. The electrochemical mechanical polishing equipment for complex structural parts based on liquid-carrying microparticle electrolyte according to claim 1, characterized in that: The base (3001) is also equipped with an air compressor (3009). One end of the air blowing pipe (3004) is connected to the air outlet of the air compressor (3009), and the other end passes through the vibration isolation plate (3002) and is connected to the bottom of the electrolytic cell (2008).

6. The electrochemical mechanical polishing equipment for complex structural parts based on liquid-carrying microparticle electrolyte according to claim 1, characterized in that: The electrochemical processing mechanism (2) is filled with a carrier liquid microparticle electrolyte (2009) in the electrolytic cell (2008), and a temperature and humidity regulating mechanism (4) is also provided between the electrolytic cell (2008) and the storage tank (4003).

7. The electrochemical mechanical polishing equipment for complex structural parts based on liquid-carrying microparticle electrolyte according to claim 6, characterized in that: The liquid-carrying microparticle electrolyte (2009) is composed of liquid-carrying microparticles and electrolyte.

8. The electrochemical mechanical polishing equipment for complex structural parts based on liquid-carrying microparticle electrolyte according to claim 7, characterized in that: The liquid-carrying microparticles are porous alumina ceramic particles with a particle size range of 1–2 mm.

9. The electrochemical mechanical polishing equipment for complex structural parts based on liquid-carrying microparticle electrolyte according to claim 6, characterized in that: The temperature and humidity control mechanism (4) includes a temperature control panel (4007) installed on the outer wall of the electrolytic cell (2008), a humidity sensor (4006) and a temperature sensor (4004) installed on the inner wall of the electrolytic cell (2008). The temperature sensor (4004) is connected to the temperature control panel (4007) via a wire, and the humidity sensor (4006) is connected to the humidity control panel (4002) on the outer wall of the storage tank (4003) via a wire. The outer wall of the storage tank (4003) is also provided with an electric proportional control valve (4001). The outlet end of the electric proportional control valve (4001) is connected to the inlet end of the dripping pipe (4005), and the outlet end of the dripping pipe (4005) extends into the electrolytic cell (2008).

10. The electrochemical mechanical polishing equipment for complex structural parts based on liquid-carrying microparticle electrolyte according to claim 1, characterized in that: Heating wires are arranged in a ring around the inner and outer wall interlayer of the electrolytic cell (2008).

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