A highly efficient combustion exhaust gas treatment device

Abstract

The invention discloses an efficient combustion type tail gas treatment device, comprising a gas passing unit, a combustion unit and a cooling and purification unit, wherein the gas passing unit is used to pass the tail gas; the combustion unit comprises a sleeved combustion tube, a heat preservation sleeve and an outer tube, the inner wall of the combustion tube comprises a metal fiber felt layer, the heat preservation sleeve and the combustion tube are designed so that the combustion material supplied by the external gas source can pass through the heat preservation sleeve and the combustion tube into the combustion chamber; the cooling and purification unit comprises a cooling and purification channel connected to the outlet end of the combustion chamber, which is used to cool and purify the tail gas after combustion. The invention has reasonable structure, sufficient and uniform combustion, no large-scale open flame and good safety.

Description

Technical Field

[0001] The invention relates to the technical field of harmful gas treatment, and in particular to a highly efficient combustion type tail gas treatment device. Background Art

[0002] In the manufacturing of semiconductor industry-related products such as chips, different waste gases are generated at each stage. For example, the thermal oxidation process of the thin film deposition process generates acidic waste gas containing unreacted halogen-containing oxidants, the CVD process generates waste gas containing SiH4, SiCl4, SiH2Cl2, PH3, HF, HCl, NH3, etc., the etching process generates acid, alkali, and organic waste gas, including some gaseous by-products (such as H2, NO, NH3, etc.), and the doping process generates acidic waste gas containing phosphine and arsine, etc. These tail gases are generally toxic and flammable. Improper handling will cause serious safety accidents, serious economic losses, and serious pollution to the environment.

[0003] Existing semiconductor tail gas treatment equipment is divided into many different types based on different principles, such as combustion tail gas treatment equipment, plasma tail gas treatment equipment, electric heating tail gas treatment equipment, etc. Among them, the existing combustion tail gas treatment equipment uses the high-temperature flame generated by the combustion head of the reaction chamber to fully burn the tail gas. Not only does it have the problem of uneven and insufficient combustion of the tail gas in the combustion chamber, but there is also a large range of open flames, which is poor in safety. Therefore, the existing technology needs to be further developed. Summary of the invention

[0004] The present invention discloses an efficient combustion type tail gas treatment device, which solves the technical problems of uneven combustion and wide-range open flames in the prior art combustion type tail gas treatment equipment, and has the technical effects of reasonable structure, sufficient and uniform combustion, no wide-range open flames and good safety. The technical scheme adopted is as follows:

[0005] An efficient combustion type tail gas treatment device, characterized by comprising:

[0006] A gas passing unit, comprising a gas passing cavity and a plurality of tail gas pipes, wherein the outlet ends of the plurality of tail gas pipes extend into the gas passing cavity;

[0007] A combustion unit, comprising a combustion tube, a heat-insulating sleeve and an outer tube, wherein the combustion tube encloses a combustion chamber, and the inlet end of the combustion chamber is connected to an air cavity, the inner wall of the combustion tube comprises a metal fiber felt layer, the heat-insulating sleeve is sleeved outside the combustion tube to play a heat-insulating role, the outer tube is sleeved outside the heat-insulating sleeve and forms an annular air inlet cavity sealed up and down with the heat-insulating sleeve, the annular air inlet cavity can be connected to an external air source, and the heat-insulating sleeve and the combustion tube are designed so that the combustion material supplied by the external air source can pass through the heat-insulating sleeve and the combustion tube into the combustion chamber;

[0008] A cooling and purification unit, comprising a cooling and purification channel connected to the outlet end of the combustion chamber, for cooling and purifying the exhaust gas after combustion;

[0009] On the basis of the above technical solution, the metal fiber felt is made by sintering metal fiber wires and can withstand high temperatures of 800-1450° C., and the pore size of the metal fiber felt gradually decreases from the outside to the inside.

[0010] On the basis of the above technical solution, the thermal insulation sleeve includes a high temperature resistant glass wool layer and an iron-chromium-aluminum fiber cloth layer, and the high temperature resistant glass wool layer and the iron-chromium-aluminum fiber cloth are stacked and staggered.

[0011] On the basis of the above technical solution, it also includes a support tube, which includes a plurality of through holes and is coaxially sleeved outside the thermal insulation sleeve for supporting the combustion tube and the thermal insulation sleeve.

[0012] Based on the above technical solution, the cooling and purification unit includes a first pipe section, a water tank and a second pipe section arranged in sequence along the air flow direction. The first pipe section is arranged close to the combustion unit for cooling and purifying the exhaust gas after combustion. The second pipe section is arranged side by side with the first pipe section on the same side for cooling and purifying the exhaust gas after combustion. The water tank is used to hold water and is respectively connected to the first pipe section and the second pipe section.

[0013] Based on the above technical solution, the first pipe section includes a first outer tube and a first inner tube which are nested together. The first outer tube is connected to the combustion chamber upward, and the first inner tube is connected to the inner cavity of the water tank downward. The first outer tube and the first inner tube enclose a first cooling cavity with a closed bottom end and an upper end connected to the inner cavity of the first inner tube. The first cooling cavity is connected to at least one first water inlet pipe so that cooling water accumulates in the cooling cavity from bottom to top and flows into the first inner tube.

[0014] Based on the above technical solution, the first inner tube extends outward to form a first extension section, the first extension section is fixedly connected to the top surface of the water tank, a plurality of water spray holes are circumferentially provided on the side wall of the first extension section, and the axis of the water spray hole extends inward and downward.

[0015] On the basis of the above technical solution, the second pipe section includes a through hollow cavity, which is connected to the water tank downward, and the end of the hollow cavity is connected to the exhaust gas outlet. A plurality of orifice plates are arranged in the hollow cavity, and the orifice plates are arranged axially at intervals and divide the hollow cavity into a plurality of sub-chambers, and at least one of the sub-chambers is provided with an atomizer, which can spray water mist into the sub-chamber to cool and purify the exhaust gas after combustion, and at least one of the sub-chambers contains a plurality of condensation adsorption balls, which are loose and porous.

[0016] On the basis of the above technical solution, it also includes a water pump, which is used to circulate water between the box body, the first pipe section and the second pipe section.

[0017] On the basis of the above technical solution, two adjacent orifice plates are arranged with a phase difference, so that the through holes on the two adjacent orifice plates are staggered.

[0018] On the basis of the above technical solution, it also includes a liquid-gas separator, which includes a separator shell, and a plurality of baffles are fixedly provided on the inner wall of the separator shell, and the ends of the baffles extend inward and downward through the center line of the separator shell, and the flow path formed between the plurality of baffles is winding, so that the liquid-gas mixture can collide with the baffles multiple times when passing through the flow path upward.

[0019] Beneficial Effects

[0020] The present invention has a reasonable structure, and the combustion tube is enclosed to form a combustion chamber. When the combustion material passes through the combustion tube and is ignited close to the combustion tube, the combustion chamber can be heated uniformly in a circumferential direction, and the temperature of the combustion chamber can be quickly increased and stably maintained. In this way, when the exhaust gas to be treated passes through the combustion chamber, it is conducive to full combustion, thereby improving the exhaust gas treatment efficiency.

[0021] In the present invention, the combustion tube includes a metal fiber felt, which is a loose and porous material. The combustion material is divided into several air streams during the process of passing through the metal fiber felt. On the one hand, the various components of the combustion material are fully mixed. On the other hand, when several combustion materials are ignited near the inner wall of the combustion tube, not only the flame formed by each combustion material is smaller, but also a large area of ​​open flame can be avoided, which greatly improves safety. In addition, the pore size of the metal fiber felt gradually decreases from the outside to the inside. When the combustion material in the annular air intake cavity passes through the metal fiber felt under the action of positive pressure, the flow rate of the combustion material slows down and collides with the fiber filaments in the fiber felt more and more frequently, that is, the resistance of the combustion material passing through the metal fiber felt gradually increases, so that the combustion material is enriched near the combustion chamber of the metal fiber felt. In this way, when the combustion material is ignited, the combustion material can be fully burned, and heat can be released efficiently to maintain the high temperature state of the combustion chamber, which is conducive to reducing the combustion cost. At the same time, it can greatly reduce the "black smoke" produced by incomplete combustion, which is conducive to maintaining the clean state of the combustion chamber. In the present invention, a thermal insulation sleeve is provided outside the combustion tube, wherein the thermal insulation sleeve can be made of glass wool layers and iron-chromium-aluminum fiber cloth layers stacked and staggered, with good thermal insulation effect, so that the temperature in the annular air inlet cavity is maintained at a set temperature, and at the same time it is beneficial to maintain the structure of the thermal insulation sleeve, improve the service life, and avoid collapse after long-term use. In addition, it also includes a support tube, which is made into a combustion tube and a thermal insulation sleeve like a skeleton, so that the combustion material enters the combustion chamber in a set manner.

[0022] In the present invention, the outlet end of the combustion tube is also connected in sequence with a first pipe section, a water tank and a second pipe section, which can cool and purify the high-temperature exhaust gas after combustion in steps, which is beneficial to improving the exhaust gas treatment effect. In addition, the first pipe section and the second pipe section are arranged side by side on the same side, which is beneficial to making the structure compact and saving space.

[0023] In addition, the second pipe section contains several sub-chambers. The condensation adsorption balls in the sub-chambers are loose and porous, which not only slows down the airflow and prolongs the condensation time of the exhaust gas, but also its loose and porous structure facilitates full contact between the exhaust gas and the condensed water. On the one hand, it improves the condensation effect, and on the other hand, it can flush the condensation adsorption balls in time to delay their service life. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the prior art descriptions are briefly introduced below. Obviously, the drawings described below are only one embodiment of the present invention, and for ordinary technicians in this field, other implementation drawings can be derived from the provided drawings without creative work.

[0025] Figure 1 : A schematic diagram of the three-dimensional structure of the present invention;

[0026] Figure 2 : A structural diagram of the front view of the present invention;

[0027] Figure 3 : A schematic diagram of the cross-sectional structure of the main view of the present invention;

[0028] Figure 4 : Schematic diagram of the cross-sectional structure of the combustion unit front view;

[0029] Figure 5 : Figure 4 Schematic diagram of the cross-sectional structure along the AA direction;

[0030] Figure 6 : Schematic diagram of the cross-sectional structure of the combustion unit and the gas passing unit front view;

[0031] Figure 7 : Figure 6 Schematic diagram of the cross-sectional structure along the BB direction;

[0032] Figure 8 : A schematic diagram of the structure of a sub-chamber in the present invention; DETAILED DESCRIPTION

[0033] The following description and accompanying drawings fully illustrate the specific embodiments of this article so that those skilled in the art can practice them. Parts and features of some embodiments may be included in or replace parts and features of other embodiments. The scope of the embodiments of this article includes the entire scope of the claims, as well as all available equivalents of the claims. Herein, the terms "first", "second", etc. are only used to distinguish one element from another, without requiring or implying any actual relationship or order between these elements. In fact, the first element can also be called the second element, and vice versa. Moreover, the terms "include", "comprise" or any other variant thereof are intended to cover non-exclusive inclusion, so that the structure, device or equipment including a series of elements includes not only those elements, but also other elements that are not explicitly listed, or also include elements inherent to such structure, device or equipment. In the absence of more restrictions, the elements defined by the sentence "including one..." do not exclude the existence of other identical elements in the structure, device or equipment including the elements. Each embodiment is described in a progressive manner herein, and each embodiment focuses on the differences from other embodiments, and the same and similar parts between the embodiments can be referred to each other.

[0034] The terms "longitudinal", "lateral", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc. in this document indicate the orientation or position relationship based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing this document and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In the description of this document, unless otherwise specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a mechanical connection or an electrical connection, it can also be the internal communication of two elements, it can be a direct connection, or it can be an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms can be understood according to specific circumstances.

[0035] As used herein, the term "plurality" means two or more than two, unless otherwise specified.

[0036] In this document, the character " / " indicates that the preceding and following objects are in an "or" relationship. For example, A / B means: A or B.

[0037] In this article, the term "and / or" is a description of the association relationship between objects, indicating that three relationships may exist. For example, A and / or B means: A or B, or, A and B.

[0038] like Figures 1 to 8The illustrated high-efficiency combustion-type tail gas treatment device comprises a gas passing unit 7 , a combustion unit 6 , a cooling and purification unit and a liquid-gas separator 1 .

[0039] The air passing unit 7 includes an air passing cavity 71 and a plurality of tail gas pipes 72, wherein the outlet ends of the plurality of tail gas pipes 72 extend into the air passing cavity 71;

[0040] The combustion unit 6 includes a combustion tube 61, an insulation sleeve 62 and an outer tube 63. The combustion tube 61 encloses a combustion chamber 64. The inner wall of the combustion tube 61 includes a metal fiber felt layer. In this embodiment, the metal fiber felt is made by sintering tungsten alloy metal fiber wire. The preparation process of the metal fiber felt is a prior art and will not be repeated here. In this embodiment, the porosity of the metal fiber felt is 85-95%, and the pore size of the metal fiber felt is 3-20 μm, which can withstand high temperatures of 800-1450°C, and the pore size of the metal fiber felt gradually decreases from the outside to the inside.

[0041] like Figure 4 As shown, the heat-insulating sleeve 62 is sleeved outside the combustion tube 61 to play a heat-insulating role. In this embodiment, the heat-insulating sleeve 62 includes a high-temperature resistant glass wool layer and an iron-chromium-aluminum fiber cloth layer. The high-temperature resistant glass wool layer and the iron-chromium-aluminum fiber cloth are stacked and staggered, so that the heat-insulating sleeve 62 is high-temperature resistant and has good heat-insulating performance. On the one hand, it can avoid the situation of low structural strength and easy collapse in the case of a single glass surface layer. On the other hand, the iron-chromium-aluminum fiber cloth layer can effectively enhance the structural strength of the heat-insulating sleeve 62 without affecting the penetration of the combustion material. The high-temperature resistant glass wool and the iron-chromium-aluminum fiber cloth are both existing technologies and will not be repeated here.

[0042] The outer cylinder 63 is sleeved outside the heat-insulating sleeve 62 and forms an annular air inlet cavity 65 which is sealed from top to bottom. The annular air inlet cavity 65 can be connected to an external gas source. In this embodiment, the external gas source includes at least natural gas and air components, such as Figure 1 and 2 As shown and described, the heat-insulating sleeve 62 and the combustion tube 61 are both porous structures, so that the combustion material supplied by the external gas source can pass through the heat-insulating sleeve 62 and the combustion tube 61 and enter the combustion chamber 64.

[0043] like Figure 5As shown, the porosity and aperture design of the combustion tube in the present invention allows the combustion material to be divided into several air streams during the process of passing through the metal fiber felt. On the one hand, the various components of the combustion material are fully mixed. On the other hand, when several combustion materials are ignited near the inner wall of the combustion tube, the flame formed by each combustion material is relatively small, which can avoid the generation of large-scale open flames and greatly improve safety. In addition, the aperture of the metal fiber felt gradually decreases from the outside to the inside. When the combustion material in the annular air intake cavity passes through the metal fiber felt under the action of positive pressure, the flow rate of the combustion material slows down and collides with the fiber filaments in the fiber felt multiple times and more frequently, that is, the resistance of the combustion material passing through the metal fiber felt gradually increases, and it moves forward in a tortuous manner, so that the flow rate of the combustion material at the metal fiber felt close to the combustion chamber is reduced to the minimum and enriched there. In this way, when the combustion material is ignited, the fuel material can be stably and continuously supplied, and the combustion material can be fully burned at the same time, and heat can be efficiently released to maintain the high temperature state of the combustion chamber, which is conducive to reducing the combustion cost. At the same time, it can greatly reduce the "black smoke" produced by incomplete combustion, which is conducive to maintaining the clean state of the combustion chamber.

[0044] It also includes a support tube 66. In this embodiment, the support tube 66 is made of stainless steel and is provided with a plurality of evenly arranged through holes (not shown). The support tube 66 is sleeved outside the thermal insulation sleeve 62 to support the combustion tube 61 and the thermal insulation sleeve 62, and the combustion tube 61 and the thermal insulation sleeve 62 are coaxially maintained in the support tube 66.

[0045] In this embodiment, the outlet of the external gas source is connected to an air inlet pipe 69, and the end of the air inlet pipe 69 extends into the annular air inlet cavity 65, wherein the end of the air inlet pipe 69 is closed, and the portion of the air inlet pipe 69 extending into the annular air inlet cavity 65 is provided with a plurality of circumferentially arranged air holes, and the combustion material in the air inlet pipe 69 can enter the annular air inlet cavity 65 through the air holes. In addition, the portion of the air inlet pipe 69 extending outside the annular air inlet cavity 65 is connected with a bellows section 610, which is convenient for connection with adjacent pipe fittings and prevents the air flow vibration in the pipe from being transmitted to the burner. In other embodiments of the present invention, there are multiple air inlet pipes 69, and the multiple air inlet pipes 69 are uniformly arranged circumferentially around the annular air inlet cavity 65. The inlet of the external gas source is connected to a plurality of branch pipes, and each branch pipe is provided with a solenoid valve and a flow meter to control the flow rate, and each component gas in the combustion material enters the air inlet pipe 69 through each branch pipe.

[0046] like Figure 4As shown, a first temperature sensor 68 is also included, and the first temperature sensor 68 is electrically connected to the external controller for monitoring the temperature in the annular air inlet cavity 65. In this embodiment, a second temperature sensor is also included, and the second temperature sensor adopts non-contact measurement to monitor the temperature value in the combustion chamber 64. More specifically, a position close to the center of the combustion chamber 64 can be selected as the monitoring point. Among them, the first temperature sensor 68 and the second temperature sensor are prior arts and will not be described in detail here.

[0047] It also includes an ignition unit 67, the ignition head of the ignition unit 67 corresponds to the position of the connection point between the external gas source and the annular air inlet chamber 65, and the ignition head of the ignition unit 67 is arranged close to the inner wall surface of the combustion tube 61. Specifically, the ignition unit 67 is arranged in the combustion chamber 61, and approaches the inner wall surface of the combustion tube 61 outwardly to ignite the combustion material, or the ignition unit is arranged in the metal fiber felt, and approaches the inner wall surface of the combustion tube 61 inwardly to ignite the combustion material.

[0048] like Figure 7 and 8 As shown, the combustion tube 61 is upwardly connected to the air cavity 71, and a plurality of tail gas pipes 72 are provided in the air cavity 71. The plurality of tail gas pipes 72 vertically pass through the top surface of the air cavity 71, and the plurality of tail gas pipes 72 are arranged circumferentially, and the outlets of the tail gas pipes 72 are downwardly close to the top of the combustion chamber 64. In this way, when the exhaust gas to be treated is discharged through the outlet of the tail gas pipe 72, the flow velocity slows down instantly, and is arranged roughly in a ring shape in the combustion chamber 64. The annular structure of the combustion tube 61 matches the exhaust gas diffusion area in the combustion chamber 64, which is conducive to uniform and sufficient combustion of the exhaust gas to achieve a purification effect.

[0049] The cooling and purification unit includes a cooling and purification channel connected to the outlet end of the combustion chamber 64, which is used to cool and purify the exhaust gas after combustion; specifically, the cooling and purification unit includes a first pipe section 5, a water tank 3 and a second pipe section 4 arranged in sequence along the air flow direction.

[0050] like Figure 3As shown, the first pipe section 5 is arranged near the combustion unit 6 for cooling and purifying the exhaust gas after combustion. Specifically, the first pipe section 5 includes a first outer pipe 51 and a first inner pipe 52 which are arranged in a nested manner, wherein the first outer pipe 51 and the first inner pipe 52 are coaxial with the combustion chamber 64, the first outer pipe 51 is fixedly connected to the combustion tube 61 upward, and the inner cavity of the first outer pipe 51 is communicated with the combustion chamber 64, the first inner pipe 52 is communicated with the inner cavity of the water tank 3 downward, and the first outer pipe 51 and the first inner pipe 52 are enclosed to form a bottom The first cooling chamber is closed at one end and the upper end is connected to the inner cavity of the first inner tube 52. In this embodiment, the first cooling chamber is connected with two first water inlet pipes 100, and the two first water inlet pipes 100 are symmetrically arranged. In addition, the first water inlet pipes 100 are arranged near the bottom of the first cooling chamber, and the first water inlet pipes 100 are designed so that the cooling water enters the first cooling chamber in a tangential direction and spirally climbs along the inner wall surface of the first outer tube 51. The cooling water accumulates from bottom to top in the cooling chamber and flows into the first inner tube 52.

[0051] like Figure 2 and 3 As shown, the first inner tube 52 extends outward to form a first extension section, and the first extension section extends out of the first outer tube 51. The first extension section is fixedly connected to the top surface of the water tank 3. In addition, three water spray holes 200 are circumferentially provided on the side wall of the first extension section, and the axis of each water spray hole 200 extends inward and downward. The sprayed cooling water cools the exhaust gas after combustion on the one hand, and at the same time adsorbs and settles the particulate matter therein.

[0052] like Figure 3 As shown, the water tank 3 is used to hold water and is connected to the inner cavities of the first pipe section 5 and the second pipe section 4 respectively. The second pipe section 4 is arranged side by side with the first pipe section 5 on the same side to cool and purify the exhaust gas after combustion, making the structure more compact.

[0053] The second pipe section 4 includes a through hollow cavity, which is downwardly connected to the water tank 3 and upwardly connected to the exhaust outlet. A plurality of orifice plates 41 are provided in the hollow cavity. Figure 3 and 8 As shown, the orifice plate 41 overlaps the boss on the inner wall of the hollow cavity, and a plurality of the orifice plates 41 are arranged axially at intervals and divide the hollow cavity into a plurality of sub-chambers 42; two adjacent orifice plates 41 are arranged with a phase difference, so that the through holes on the two adjacent orifice plates 41 are arranged staggered to prevent the exhaust gas from "passing through the hollow cavity without obstacles".

[0054] like Figure 3 As shown, a sub-chamber 42 in the middle section is provided with an atomizer 2, and there are four atomizers 2 arranged circumferentially. The atomizer 2 is a prior art and will not be described in detail here. The atomizer 2 can spray water mist into the sub-chamber 42 to cool down and purify the exhaust gas after combustion;

[0055] like Figure 3As shown, the other three sub-chambers 42 can contain a number of condensation adsorption balls, which are loose and porous and can be made of activated carbon blocks, or Hakaiden fillers, Raschig ring fillers or Ball ring fillers. In addition, the sub-chamber 42 containing the condensation adsorption balls can also be provided with a spray hole to facilitate the addition of cooling water to the sub-chamber.

[0056] In addition, a water pump is included, and the water pump is used to circulate water between the box body 3, the first pipe section 5 and the second pipe section 4, which is beneficial to saving water and reducing production costs.

[0057] The invention also includes a liquid-gas separator 1, which includes a separator housing 11, and a plurality of baffles 12 are fixedly arranged on the inner wall of the separator housing 11, and the ends of the baffles 12 extend inward and downward through the center line of the separator housing 11, and the flow path formed between the baffles 12 is zigzag, such as Figure 3 As shown, the liquid-gas mixture can collide with the baffle 12 multiple times when passing upward through the flow path, thereby improving the gas-liquid separation effect.

[0058] The present invention is described above by way of examples, but the present invention is not limited to the above specific embodiments, and any changes or modifications made based on the present invention belong to the scope of protection claimed by the present invention.

Claims

1. An efficient combustion type tail gas treatment device, characterized in that: include: The air passing unit (7) comprises an air passing cavity (71) and a plurality of tail gas pipes (72), wherein outlet ends of the plurality of tail gas pipes (72) extend into the air passing cavity (71); A combustion unit (6), comprising a combustion tube (61), a heat-insulating sleeve (62) and an outer tube (63), wherein the combustion tube (61) encloses a combustion chamber (64), and the inlet end of the combustion chamber (64) is communicated with an air passage cavity (71); the inner wall surface of the combustion tube (61) comprises a metal fiber felt layer; the heat-insulating sleeve (62) is sleeved outside the combustion tube (61) to perform a heat-insulating function; the outer tube (63) is sleeved outside the heat-insulating sleeve (62) and forms an annular air inlet cavity (65) sealed from top to bottom with the heat-insulating sleeve (62); the annular air inlet cavity (65) can be communicated with an external air source, and the heat-insulating sleeve (62) and the combustion tube (61) are designed so that the combustion material supplied by the external air source can pass through the heat-insulating sleeve (62) and the combustion tube (61) and enter the combustion chamber; A cooling and purification unit, comprising a cooling and purification channel communicated with the outlet end of the combustion chamber (64), and used for cooling and purifying the exhaust gas after combustion; The metal fiber felt is made by sintering metal fiber wires and can withstand high temperatures of 800-1450°C. The pore size of the metal fiber felt gradually decreases from the outside to the inside. The porosity of the metal fiber felt is 85-95%, and the pore size of the metal fiber felt is 3-20 μm.

2. The efficient combustion type exhaust gas treatment device according to claim 1, characterized in that: The heat-insulating sleeve (62) comprises a high-temperature resistant glass wool layer and an iron-chromium-aluminium fiber cloth layer, and the high-temperature resistant glass wool layer and the iron-chromium-aluminium fiber cloth are stacked and arranged in an alternating manner.

3. The efficient combustion type exhaust gas treatment device according to claim 1 or 2, characterized in that: It also includes a support tube (66), which includes a plurality of through holes and is coaxially sleeved outside the heat-insulating sleeve (62) and is used to support the combustion tube (61) and the heat-insulating sleeve (62).

4. The efficient combustion type exhaust gas treatment device according to claim 3, characterized in that: The cooling and purification unit comprises a first pipe section (5), a water tank (3) and a second pipe section (4) which are arranged in sequence along the airflow direction; the first pipe section (5) is arranged close to the combustion unit (6) for cooling and purifying the exhaust gas after combustion; the second pipe section (4) is arranged in parallel with the first pipe section (5) on the same side for cooling and purifying the exhaust gas after combustion; and the water tank (3) is used to contain water and is respectively connected to the first pipe section (5) and the second pipe section (4).

5. The efficient combustion type exhaust gas treatment device according to claim 4, characterized in that: The first pipe section (5) comprises a first outer pipe (51) and a first inner pipe (52) which are nested with each other. The first outer pipe (51) is connected to the combustion chamber (64) upwards, and the first inner pipe (52) is connected to the inner cavity of the water tank (3) downwards. The first outer pipe (51) and the first inner pipe (52) enclose a first cooling cavity which is closed at the bottom and connected to the inner cavity of the first inner pipe (52) at the top. The first cooling cavity is connected to at least one first water inlet pipe (100) so that cooling water accumulates in the cooling cavity from bottom to top and flows into the first inner pipe (52).

6. The efficient combustion type exhaust gas treatment device according to claim 5, characterized in that: The first inner tube (52) extends outward to form a first extension section, the first extension section is fixedly connected to the top surface of the water tank (3), a plurality of water spray holes (200) are circumferentially provided on the side wall of the first extension section, and the axes of the water spray holes (200) extend inward and downward.

7. The efficient combustion type exhaust gas treatment device according to claim 5, characterized in that: The second pipe section (4) includes a through hollow cavity, the hollow cavity is downwardly connected to the water tank (3), the end of the hollow cavity is connected to the exhaust gas outlet, a plurality of orifice plates (41) are arranged in the hollow cavity, the plurality of orifice plates (41) are axially spaced and divide the hollow cavity into a plurality of sub-chambers (42), and at least one of the sub-chambers (42) is provided with an atomizer (2), the atomizer (2) can spray water mist into the sub-chamber (42) to cool and purify the exhaust gas after combustion, and at least one of the sub-chambers (42) contains a plurality of condensation adsorption balls, the condensation adsorption balls are loose and porous.

8. The efficient combustion type exhaust gas treatment device according to claim 7, characterized in that: It also comprises a water pump, which is used to circulate water between the water tank (3), the first pipe section (5) and the second pipe section (4).

9. The efficient combustion type exhaust gas treatment device according to claim 8, characterized in that: The two adjacent orifice plates (41) are arranged with a phase difference, so that the through holes on the two adjacent orifice plates (41) are arranged in a staggered manner.

10. The efficient combustion type tail gas treatment device according to any one of claims 4 to 9, characterized in that: The invention also comprises a liquid-gas separator (1), the liquid-gas separator (1) comprising a separator shell (11), a plurality of baffles (12) being fixedly arranged on the inner wall of the separator shell (11), the ends of the baffles (12) extending inwardly and downwardly through the center line of the separator shell (11), and the flow path formed between the plurality of baffles (12) being in a zigzag shape, so that the liquid-gas mixture can collide with the baffles multiple times when passing upward through the flow path.

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