A three-wavelength color combiner and its preparation method

Abstract

The present application relates to a kind of three-wavelength color combiner and its preparation method.The three-wavelength color combiner of the present application includes four same size same material isosceles right prism one, isosceles right prism two, isosceles right prism three and isosceles right prism four, the inclined plane one of isosceles right prism one or the inclined plane two of isosceles right prism two is coated with color separation film layer one, the inclined plane three of isosceles right prism three or the inclined plane four of isosceles right prism four is coated with color separation film layer two;The color separation film layer index of color separation film layer one is T≥97% @450&@550nm and R≥97% @650nm AOI=45 °;The color separation film layer index of color separation film layer two is T≥98% @550nm and R≥98% @450nm AOI=45 °.

Description

Technical Field

[0001] This invention relates to a three-wavelength color combiner and its preparation method. Background Technology

[0002] Currently, there are two common types of color separators: the Philips RGB color separator and the X-CUBE color separator. The Philips RGB color separator consists of three prisms of different shapes. Two dichroic coatings are deposited on the dichroic surfaces of different prisms. Then, according to the design, one dichroic surface is glued together, and another dichroic surface has an air gap structure. Its structure is complex, the manufacturing process is difficult, and the manufacturing cost is high. The X-CUBE color separator, on the other hand, is composed of four identical isosceles right-angled prisms, but... Figure 9 As shown, this color separator is made by coating different color-separating film layers on the right-angled faces of four right-angled isosceles right-angled prisms, and then gluing the right-angled faces of two adjacent prisms together to form a prism structure with a square cross-section. This product has very high requirements for the gluing precision. If there is a deviation in the gluing of one face, it will affect the effect of the entire color separator. Summary of the Invention

[0003] This invention provides a three-wavelength color combiner and its preparation method. The color combiner provided by this invention divides four isosceles right-angled prisms of the same size and material into two groups. The two isosceles right-angled prisms in each group are bonded together by inclined surfaces, and the two groups are then bonded together by right-angled surfaces to form a prism structure with a rectangular cross-section. This not only requires coating a color-separating film layer on the inclined surfaces of two of the isosceles right-angled prisms, but also reduces the number of bonding surfaces. The bonding surfaces of the two groups of inclined surfaces are perpendicular to each other, so the performance of the color combiner will not be affected by the bonding deviation of one surface. This reduces the precision requirements of the bonding and makes the manufacturing process simpler and more convenient.

[0004] This invention is achieved through the following technical solution:

[0005] A three-wavelength color combiner / separator includes four isosceles right-angled prisms of the same size and material: prism one, prism two, prism three, and prism four.

[0006] A dichroic film layer 1 is deposited on the inclined surface 1 of isosceles right prism 1 or the inclined surface 2 of isosceles right prism 2, and overlaps and is bonded to the inclined surface 2 of isosceles right prism 2 or the inclined surface 1 of isosceles right prism 1. A dichroic film layer 2 is deposited on the inclined surface 3 of isosceles right prism 3 or the inclined surface 4 of isosceles right prism 4, and overlaps and is bonded to the inclined surface 4 of isosceles right prism 4 or the inclined surface 3 of isosceles right prism 3. The right angle surface 1 of isosceles right prism 2 and the right angle surface 2 of isosceles right prism 3 overlap and are bonded to each other. The bonding surface of inclined surface 1 and inclined surface 2 is perpendicular to the bonding surface of inclined surface 3 and inclined surface 4.

[0007] The color separation film layer one has the following specifications: T≥97%@450nm and R≥97%@650nm, AOI=45°; the color separation film layer two has the following specifications: T≥98%@550nm and R≥98%@450nm, AOI=45°.

[0008] Specifically, a color-separating film layer is deposited on the inclined surface of an isosceles right-angle prism. The color-separating film layer includes, from the inside out, a first Nb₂O₅ film layer, a first SiO₂ film layer, a second Nb₂O₅ film layer, a second SiO₂ film layer, a third Nb₂O₅ film layer, a third SiO₂ film layer, a fourth Nb₂O₅ film layer, a fourth SiO₂ film layer, a fifth Nb₂O₅ film layer, a fifth SiO₂ film layer, and a sixth Nb₂O₅ film layer. The sixth SiO2 film layer, the seventh Nb2O5 film layer, the seventh SiO2 film layer, the eighth Nb2O5 film layer, the eighth SiO2 film layer, the ninth Nb2O5 film layer, the ninth SiO2 film layer, the tenth Nb2O5 film layer, the tenth SiO2 film layer, the eleventh Nb2O5 film layer, the eleventh SiO2 film layer, the twelfth Nb2O5 film layer, the twelfth SiO2 film layer, the thirteenth Nb2O5 film layer, the thirteenth SiO2 film layer, and the fourteenth Nb2O5 film layer;

[0009] The second color-separating film layer is deposited on the inclined surface three of the isosceles right-angle prism three. The second color-separating film layer includes, sequentially arranged from the inside to the outside on the inclined surface of the isosceles right-angle prism three, a fifteenth Nb₂O₅ film layer, a fifteenth SiO₂ film layer, a sixteenth Nb₂O₅ film layer, a sixteenth SiO₂ film layer, a seventeenth Nb₂O₅ film layer, a seventeenth SiO₂ film layer, an eighteenth Nb₂O₅ film layer, an eighteenth SiO₂ film layer, a nineteenth Nb₂O₅ film layer, a nineteenth SiO₂ film layer, and so on. 20 Nb2O5 film, 20 SiO2 film, 21 Nb2O5 film, 21 SiO2 film, 22 Nb2O5 film, 22 SiO2 film, 23 Nb2O5 film, 23 SiO2 film, 24 Nb2O5 film, 24 SiO2 film, 25 Nb2O5 film, 25 SiO2 film, 26 Nb2O5 film and 26 SiO2 film.

[0010] When the three-wavelength color combiner and dichroic separator of the present invention is used as a dichroic separator, the three outgoing beams are perpendicular or parallel to each other at 90° or 180°, which makes it easy to optimize and adjust the optical path, and the optical path is reversible. The first dichroic film layer of the present invention has T≥97%@450nm and R≥97%@650nm AOI=45 degrees, and the second dichroic film layer has T≥98%@550nm and R≥98%@450nm AOI=45 degrees, thereby forming a three-wavelength color combiner and dichroic separator, which can combine three wavelengths of light into a new beam of light or split a beam of light into three wavelengths.

[0011] Specifically, the thickness of the first Nb₂O₅ film is 80.07-97.87 nm, the thickness of the first SiO₂ film is 195.71-239.20 nm, the thickness of the second Nb₂O₅ film is 25.95-31.71 nm, the thickness of the second SiO₂ film is 232.32-283.94 nm, the thickness of the third Nb₂O₅ film is 51.61-63.07 nm, the thickness of the third SiO₂ film is 175.88-214.96 nm, and the thickness of the fourth Nb₂O₅ film is 47.99 nm. -58.652nm, the thickness of the fourth SiO2 film is 188.64-230.560nm, the thickness of the fifth Nb2O5 film is 48.34-59.08nm, the thickness of the fifth SiO2 film is 213.30-260.70nm, the thickness of the sixth Nb2O5 film is 45.95-56.16nm, the thickness of the sixth SiO2 film is 190.62-232.98nm, the thickness of the seventh Nb2O5 film is 50.42-61.62nm, and the thickness of the seventh SiO2 film is 183... The thickness of the eighth Nb₂O₅ film is 50.382-61.58 nm, the thickness of the eighth SiO₂ film is 190.17-232.43 nm, the thickness of the ninth Nb₂O₅ film is 45.71-55.87 nm, the thickness of the ninth SiO₂ film is 213.624-261.10 nm, the thickness of the tenth Nb₂O₅ film is 48.51-59.29 nm, the thickness of the tenth SiO₂ film is 188.67-230.59 nm, and the eleventh Nb₂O₅ film... The thickness of the eleventh SiO2 film is 48.375-59.13 nm, the thickness of the eleventh SiO2 film is 174.73-213.55 nm, the thickness of the twelfth Nb2O5 film is 51.43-62.85 nm, the thickness of the twelfth SiO2 film is 232.182-283.78 nm, the thickness of the thirteenth Nb2O5 film is 26.48-32.36 nm, the thickness of the thirteenth SiO2 film is 196.51-240.17 nm, and the thickness of the fourteenth Nb2O5 film is 79.34-96.97 nm.

[0012] The thickness of the fifteenth Nb₂O₅ film is 45.77-55.94 nm, the thickness of the fifteenth SiO₂ film is 288.02-352.02 nm, the thickness of the sixteenth Nb₂O₅ film is 43.56-53.24 nm, the thickness of the sixteenth SiO₂ film is 115.60-141.28 nm, the thickness of the seventeenth Nb₂O₅ film is 31.89-38.97 nm, the thickness of the seventeenth SiO₂ film is 115.52-141.19 nm, and the thickness of the eighteenth Nb₂O₅ film is... The thickness of the b2O5 film is 44.06-53.86 nm; the thickness of the eighteenth SiO2 film is 310.92-380.02 nm; the thickness of the nineteenth Nb2O5 film is 45.25-55.31 nm; the thickness of the nineteenth SiO2 film is 119.91-146.55 nm; the thickness of the twentieth Nb2O5 film is 31.87-38.95 nm; the thickness of the twentieth SiO2 film is 114.65-142.33 nm; and the thickness of the twenty-first Nb2O5 film is... The thickness of the 5th film is 32.427-39.633 nm; the thickness of the 21st SiO2 film is 120.762-147.608 nm; the thickness of the 22nd Nb2O5 film is 44.67-54.593 nm; the thickness of the 22nd SiO2 film is 311.37-380.57 nm; the thickness of the 23rd Nb2O5 film is 42.59-52.05 nm; and the thickness of the 23rd SiO2 film is 120.42-147.18 nm. The thickness of the 24th Nb2O5 film is 30.357-37.10 nm, the thickness of the 24th SiO2 film is 129.54-158.323 nm, the thickness of the 25th Nb2O5 film is 34.32-41.94 nm, the thickness of the 25th SiO2 film is 369.66-369.66 nm, the thickness of the 26th Nb2O5 film is 40.91-50.00 nm, and the thickness of the 26th SiO2 film is 47.75-58.37 nm.

[0013] Using this coating, the film layer is thin, the film thickness control precision requirement is low, and the film layer sensitivity is low.

[0014] Specifically, in order to reduce light intensity loss, antireflective coatings are deposited on the two right-angled surfaces of the isosceles right-angled prism one, the non-bonded right-angled surface six of the isosceles right-angled prism three, and the right-angled surface four of the isosceles right-angled prism four that is parallel to the right-angled surface one.

[0015] Specifically, the antireflective coating layer includes, from the inside out, a twenty-seventh Nb₂O₅ film layer, a twenty-seventh SiO₂ film layer, a twenty-eighth Nb₂O₅ film layer, and a twenty-eighth SiO₂ film layer on the substrate.

[0016] The thickness of the twenty-seventh Nb2O5 film is 12.42-12.94 nm; the thickness of the twenty-seventh SiO2 film is 35.33-36.77 nm; the thickness of the twenty-eighth Nb2O5 film is 115.75-120.47 nm; and the thickness of the twenty-eighth SiO2 film is 87.23-90.79 nm.

[0017] The preparation method of a three-wavelength color combiner and dichroist includes the following steps:

[0018] Four isosceles right-angled prisms of the same size and material—isosceles right-angled prism 1, isosceles right-angled prism 2, isosceles right-angled prism 3, and isosceles right-angled prism 4—are prepared. A dichroic film layer 1 is deposited on the inclined surface 1 of isosceles right-angled prism 1, and a dichroic film layer 2 is deposited on the inclined surface 3 of isosceles right-angled prism 3. Then, the inclined surface 1 of isosceles right-angled prism 1 with the dichroic film layer 1 deposited on it and the inclined surface 2 of isosceles right-angled prism 2 are bonded together. The inclined surface 3 of isosceles right-angled prism 3 with the dichroic film layer 2 deposited on it and the inclined surface 4 of isosceles right-angled prism 4 are bonded together. Finally, the right-angled surface 1 of isosceles right-angled prism 2 and the right-angled surface 2 of isosceles right-angled prism 3 are bonded together, with the bonding surface of inclined surface 1 and inclined surface 2 perpendicular to the bonding surface of inclined surface 3 and inclined surface 4, thus obtaining the three-wavelength dichroic separator.

[0019] Specifically, an antireflective coating is deposited on the two right-angled surfaces of the isosceles right-angled prism one, the non-bonded right-angled surface six of the isosceles right-angled prism three, and the right-angled surface four of the isosceles right-angled prism four that is parallel to the right-angled surface one.

[0020] The color-combining and separating device provided by this invention has a simple structure, consisting of only four isosceles right-angled prisms of the same size, making it easy to manufacture. When used as a color separator, incident light enters through the third right-angled face of isosceles right-angled prism one, the transmitted light (T) is parallel to the incident light and exits through the fourth right-angled face of isosceles right-angled prism four, and two reflected lights (R1, R2) exit perpendicularly from the fifth right-angled face of isosceles right-angled prism one and the sixth right-angled face of isosceles right-angled prism three, respectively. Furthermore, the light path is reversible, allowing for color combination.

[0021] Compared with the prior art, the present invention has the following advantages:

[0022] The color mixing and separating device provided by this invention divides four isosceles right-angled prisms of the same size and material into two groups. The two isosceles right-angled prisms in each group are bonded together by an inclined plane, and the two groups are then bonded together by a right-angled plane to form a prism structure with a rectangular cross-section. This not only requires coating a color separating film layer on the inclined plane of two of the isosceles right-angled prisms, but also reduces the number of bonding surfaces. The bonding surfaces of the two groups of inclined planes are perpendicular to each other, so the use effect of the color mixing and separating device will not be affected by the bonding deviation of one surface. This reduces the precision requirements of bonding and makes the processing and manufacturing simpler and more convenient. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the structure of the three-wavelength color combiner and dichroist of the present invention (optical path diagram when used as a dichroist).

[0024] Figure 2 This is a spectral curve of the first color separation film layer in Example 1.

[0025] Figure 3 This is a spectral curve of the second color separation film layer in Example 1.

[0026] Figure 4 This is a spectral curve of the first color separation film layer in Example 2.

[0027] Figure 5 This is a spectral curve of the second color separation film layer in Example 2.

[0028] Figure 6 This is a spectral curve of the first color separation film layer in Example 3.

[0029] Figure 7 This is a spectral curve of the second color separation film layer in Example 3.

[0030] Figure 8 This is a schematic diagram of the structure of the three-wavelength color combiner and color separator of the present invention (optical path diagram when used as a color combiner).

[0031] Figure 9 This is a schematic diagram of the X-CUBE color combiner.

[0032] Figure 10 This is a spectral curve of the antireflection membrane in Example 1.

[0033] Figure 11 This is the spectral curve of the antireflection membrane in Example 2.

[0034] Figure 12 This is the spectral curve of the antireflection membrane in Example 3. Detailed Implementation

[0035] The present invention will be further described below with reference to specific embodiments.

[0036] Example 1

[0037] like Figure 1-3 As shown in Figure 8, the three-wavelength color combiner and dichroist of this embodiment includes four isosceles right-angle prisms of the same size and material: prism 1, prism 2, prism 3, and prism 4.

[0038] A dichroic film layer 5 is coated on the inclined surface 1-1 of isosceles right-angle prism 1, and overlaps and is bonded to the inclined surface 2-1 of isosceles right-angle prism 2. A dichroic film layer 6 is coated on the inclined surface 3-1 of isosceles right-angle prism 3, and overlaps and is bonded to the inclined surface 4-1 of isosceles right-angle prism 4. The right-angle surface 1-2-2 of isosceles right-angle prism 2 and the right-angle surface 2-2 of isosceles right-angle prism 3 overlap and are bonded to the inclined surface 4-1 of isosceles right-angle prism 3. The bonding surface of inclined surface 1-1 and inclined surface 2-1 is perpendicular to the bonding surface of inclined surface 3-1 and inclined surface 4-1.

[0039] The color separation film layer 5 has the following specifications: T ≥ 97% @ 450nm & @ 550nm and R ≥ 97% @ 650nm AOI = 45°; the color separation film layer 6 has the following specifications: T ≥ 98% @ 550nm and R ≥ 98% @ 450nm AOI = 45°.

[0040] The color separation film layer 5 includes, from the inside to the outside, a first Nb2O5 film layer, a first SiO2 film layer, a second Nb2O5 film layer, a second SiO2 film layer, a third Nb2O5 film layer, a third SiO2 film layer, a fourth Nb2O5 film layer, a fourth SiO2 film layer, a fifth Nb2O5 film layer, a fifth SiO2 film layer, a sixth Nb2O5 film layer, a sixth SiO2 film layer, a seventh Nb2O5 film layer, a seventh SiO2 film layer, an eighth Nb2O5 film layer, an eighth SiO2 film layer, a ninth Nb2O5 film layer, a ninth SiO2 film layer, a tenth Nb2O5 film layer, a tenth SiO2 film layer, an eleventh Nb2O5 film layer, an eleventh SiO2 film layer, a twelfth Nb2O5 film layer, a twelfth SiO2 film layer, a thirteenth Nb2O5 film layer, a thirteenth SiO2 film layer, and a fourteenth Nb2O5 film layer on the inclined surface of the isosceles right-angle prism 1.

[0041] The color separation film layer 26 includes, from the inside to the outside, the fifteenth SiO2 film layer, the fifteenth Nb2O5 film layer, the sixteenth SiO2 film layer, the sixteenth Nb2O5 film layer, the seventeenth SiO2 film layer, the seventeenth Nb2O5 film layer, the eighteenth SiO2 film layer, the eighteenth Nb2O5 film layer, the nineteenth SiO2 film layer, the nineteenth Nb2O5 film layer, the twentieth SiO2 film layer, the twentieth Nb2O5 film layer, the twenty-first SiO2 film layer, the twenty-first Nb2O5 film layer, the twenty-second SiO2 film layer, the twenty-second Nb2O5 film layer, the twenty-third SiO2 film layer, the twenty-third Nb2O5 film layer, the twenty-fourth SiO2 film layer, the twenty-fourth Nb2O5 film layer, the twenty-fifth SiO2 film layer, the twenty-fifth Nb2O5 film layer, the twenty-sixth SiO2 film layer, and the twenty-sixth Nb2O5 film layer on the inclined surface of the isosceles right-angle prism 33.

[0042] In this embodiment, the thickness of the first Nb₂O₅ film is 88.97 nm, the thickness of the first SiO₂ film is 217.45 nm, the thickness of the second Nb₂O₅ film is 28.83 nm, the thickness of the second SiO₂ film is 258.13 nm, the thickness of the third Nb₂O₅ film is 57.34 nm, the thickness of the third SiO₂ film is 195.42 nm, the thickness of the fourth Nb₂O₅ film is 53.32 nm, the thickness of the fourth SiO₂ film is 209.60 nm, the thickness of the fifth Nb₂O₅ film is 53.71 nm, the thickness of the fifth SiO₂ film is 237.00 nm, the thickness of the sixth Nb₂O₅ film is 51.05 nm, the thickness of the sixth SiO₂ film is 211.80 nm, and the thickness of the seventh Nb₂O₅ film is 56.02 nm. The thickness of the eighth Nb₂O₅ film is 204.43 nm, the thickness of the eighth SiO₂ film is 55.98 nm, the thickness of the ninth Nb₂O₅ film is 211.30 nm, the thickness of the ninth SiO₂ film is 50.79 nm, the thickness of the ninth SiO₂ film is 237.36 nm, the thickness of the tenth Nb₂O₅ film is 53.90 nm, the thickness of the tenth SiO₂ film is 209.63 nm, the thickness of the eleventh Nb₂O₅ film is 53.75 nm, the thickness of the eleventh SiO₂ film is 194.14 nm, the thickness of the twelfth Nb₂O₅ film is 57.14 nm, the thickness of the twelfth SiO₂ film is 257.98 nm, the thickness of the thirteenth Nb₂O₅ film is 29.42 nm, the thickness of the thirteenth SiO₂ film is 218.34 nm, and the thickness of the fourteenth Nb₂O₅ film is 88.15 nm.

[0043] The thickness of the fifteenth SiO2 film is 50.85 nm, the thickness of the fifteenth Nb2O5 film is 320.02 nm, the thickness of the sixteenth SiO2 film is 48.40 nm, the thickness of the sixteenth Nb2O5 film is 128.44 nm, the thickness of the seventeenth SiO2 film is 35.43 nm, the thickness of the seventeenth Nb2O5 film is 128.35 nm, the thickness of the eighteenth SiO2 film is 48.96 nm, the thickness of the eighteenth Nb2O5 film is 345.47 nm, the thickness of the nineteenth SiO2 film is 50.28 nm, the thickness of the nineteenth Nb2O5 film is 133.23 nm, the thickness of the twentieth SiO2 film is 35.41 nm, the thickness of the twentieth Nb2O5 film is 127.39 nm, and the thickness of the twenty-first SiO2 film is 127.39 nm. The thickness of the SiO2 film is 36.03 nm, the thickness of the twenty-first Nb2O5 film is 134.18 nm, the thickness of the twenty-second SiO2 film is 49.63 nm, the thickness of the twenty-second Nb2O5 film is 345.97 nm, the thickness of the twenty-third SiO2 film is 47.32 nm, the thickness of the twenty-third Nb2O5 film is 133.80 nm, the thickness of the twenty-fourth SiO2 film is 33.73 nm, the thickness of the twenty-fourth Nb2O5 film is 143.93 nm, the thickness of the twenty-fifth SiO2 film is 38.13 nm, the thickness of the twenty-fifth Nb2O5 film is 336.05 nm, the thickness of the twenty-sixth SiO2 film is 45.45 nm, and the thickness of the twenty-sixth Nb2O5 film is 53.06 nm. The spectral curve of the first color-separating film in this embodiment is as follows: Figure 2 As shown, the spectral curve of the second color separation film layer is as follows: Figure 3 As shown.

[0044] Anti-reflective coatings are deposited on the two right-angled surfaces of the isosceles right-angled prism 1, the non-adhesive right-angled surface 3-3 of the isosceles right-angled prism 3, and the right-angled surface 4-2 of the isosceles right-angled prism 4 that is parallel to the right-angled surface 2-2.

[0045] The method for preparing the three-wavelength color combiner / separator in this embodiment includes the following steps:

[0046] Four isosceles right-angled prisms of the same size and material—isosceles right-angled prism 1, isosceles right-angled prism 2, isosceles right-angled prism 3, and isosceles right-angled prism 4—are prepared. A dichroic film layer 5 is deposited on the inclined surface 1-1 of isosceles right-angled prism 1, and a dichroic film layer 2-1 is deposited on the inclined surface 3-1 of isosceles right-angled prism 3. Then, the inclined surface 1-1 of isosceles right-angled prism 1 with dichroic film layer 5 and the inclined surface 2-1 of isosceles right-angled prism 2 are bonded together. The inclined surface 3-1 of isosceles right-angled prism 3 with dichroic film layer 2-6 and the inclined surface 4-1 of isosceles right-angled prism 4 are bonded together. Finally, the right-angled surface 2-2 of isosceles right-angled prism 2 and the right-angled surface 3-2 of isosceles right-angled prism 3 are bonded together to obtain the three-wavelength dichroic separator.

[0047] Anti-reflective coatings are deposited on the two right-angled surfaces of the isosceles right-angled prism 1, the non-adhesive right-angled surface 3-3 of the isosceles right-angled prism 3, and the right-angled surface 4-2 of the isosceles right-angled prism 4, which is parallel to the right-angled surface 2-2.

[0048] The antireflection coating layer in this embodiment includes, from the inside out, a twenty-seventh Nb₂O₅ film layer, a twenty-seventh SiO₂ film layer, a twenty-eighth Nb₂O₅ film layer, and a twenty-eighth SiO₂ film layer on the substrate.

[0049] The thickness of the 27th Nb₂O₅ film is 12.68 nm; the thickness of the 27th SiO₂ film is 36.05 nm; the thickness of the 28th Nb₂O₅ film is 118.11 nm; and the thickness of the 28th SiO₂ film is 89.01 nm. Their spectral curves are as follows... Figure 10 As shown.

[0050] like Figure 1 As shown, in this embodiment, the incident white light enters from the right-angled face 3 (1-2) of isosceles right-angled prism one. The transmitted light T is parallel to the incident light and exits from the right-angled face 4 (4-2) of isosceles right-angled prism four. The two reflected lights R1 and R2 exit perpendicularly from the right-angled face 5 (1-3) of isosceles right-angled prism one and the right-angled face 6 (3-3) of isosceles right-angled prism three, respectively. Moreover, the light path is reversible, as... Figure 8 As shown, the color combiner and color separator of the present invention can split a beam of white light into three colors, and when used as a color combiner, it can combine the three colors into a new white light.

[0051] Example 2

[0052] Unlike Example 1, in this example, the thickness of the first Nb₂O₅ film layer is 97.87 nm, the thickness of the first SiO₂ film layer is 239.20 nm, the thickness of the second Nb₂O₅ film layer is 31.71 nm, the thickness of the second SiO₂ film layer is 283.94 nm, the thickness of the third Nb₂O₅ film layer is 63.07 nm, the thickness of the third SiO₂ film layer is 214.96 nm, the thickness of the fourth Nb₂O₅ film layer is 58.652 nm, the thickness of the fourth SiO₂ film layer is 230.560 nm, the thickness of the fifth Nb₂O₅ film layer is 59.08 nm, the thickness of the fifth SiO₂ film layer is 260.70 nm, the thickness of the sixth Nb₂O₅ film layer is 56.16 nm, the thickness of the sixth SiO₂ film layer is 232.98 nm, and the thickness of the seventh Nb₂O₅ film layer is 61.62 nm. The thickness of the SiO2 film is 224.87 nm; the thickness of the eighth Nb2O5 film is 61.58 nm; the thickness of the eighth SiO2 film is 232.43 nm; the thickness of the ninth Nb2O5 film is 55.87 nm; the thickness of the ninth SiO2 film is 261.10 nm; the thickness of the tenth Nb2O5 film is 59.29 nm; the thickness of the tenth SiO2 film is 230.59 nm; the thickness of the eleventh Nb2O5 film is 59.13 nm; the thickness of the eleventh SiO2 film is 213.55 nm; the thickness of the twelfth Nb2O5 film is 62.85 nm; the thickness of the twelfth SiO2 film is 283.78 nm; the thickness of the thirteenth Nb2O5 film is 32.36 nm; the thickness of the thirteenth SiO2 film is 240.17 nm; and the thickness of the fourteenth Nb2O5 film is 96.97 nm.

[0053] In this embodiment, the thickness of the fifteenth Nb₂O₅ film layer in the second color-separating film layer is 55.94 nm, the thickness of the fifteenth SiO₂ film layer is 352.02 nm, the thickness of the sixteenth Nb₂O₅ film layer is 53.24 nm, the thickness of the sixteenth SiO₂ film layer is 141.28 nm, the thickness of the seventeenth Nb₂O₅ film layer is 38.97 nm, the thickness of the seventeenth SiO₂ film layer is 141.19 nm, the thickness of the eighteenth Nb₂O₅ film layer is 53.86 nm, the thickness of the eighteenth SiO₂ film layer is 380.02 nm, the thickness of the nineteenth Nb₂O₅ film layer is 55.31 nm, the thickness of the nineteenth SiO₂ film layer is 146.55 nm, the thickness of the twentieth Nb₂O₅ film layer is 38.95 nm, and the thickness of the twentieth SiO₂ film layer is 142.33 nm. The thickness of the eleventh Nb₂O₅ film is 39.633 nm, the thickness of the twenty-first SiO₂ film is 147.608 nm, the thickness of the twenty-second Nb₂O₅ film is 54.593 nm, the thickness of the twenty-second SiO₂ film is 380.57 nm, the thickness of the twenty-third Nb₂O₅ film is 52.05 nm, the thickness of the twenty-third SiO₂ film is 147.18 nm, the thickness of the twenty-fourth Nb₂O₅ film is 37.10 nm, the thickness of the twenty-fourth SiO₂ film is 158.323 nm, the thickness of the twenty-fifth Nb₂O₅ film is 41.94 nm, the thickness of the twenty-fifth SiO₂ film is 369.66 nm, the thickness of the twenty-sixth Nb₂O₅ film is 50.00 nm, and the thickness of the twenty-sixth SiO₂ film is 58.37 nm. The spectral curve of the first color-separating film in this embodiment is as follows: Figure 4 As shown, the spectral curve of the second color separation film layer is as follows: Figure 5 As shown.

[0054] The antireflective coating layer comprises, from the inside out, a twenty-seventh Nb₂O₅ film layer, a twenty-seventh SiO₂ film layer, a twenty-eighth Nb₂O₅ film layer, and a twenty-eighth SiO₂ film layer on the substrate.

[0055] The thickness of the 27th Nb₂O₅ film is 12.42 nm; the thickness of the 27th SiO₂ film is 35.33 nm; the thickness of the 28th Nb₂O₅ film is 115.75 nm; and the thickness of the 28th SiO₂ film is 87.23 nm. Their spectral curves are shown below. Figure 11 As shown.

[0056] Example 3

[0057] like Figure 6 , 7Unlike Example 1, in this embodiment, the thickness of the first Nb₂O₅ film layer is 80.07 nm, the thickness of the first SiO₂ film layer is 195.71 nm, the thickness of the second Nb₂O₅ film layer is 25.95 nm, the thickness of the second SiO₂ film layer is 232.32 nm, the thickness of the third Nb₂O₅ film layer is 51.61 nm, the thickness of the third SiO₂ film layer is 175.88 nm, the thickness of the fourth Nb₂O₅ film layer is 47.99 nm, the thickness of the fourth SiO₂ film layer is 188.64 nm, the thickness of the fifth Nb₂O₅ film layer is 48.34 nm, the thickness of the fifth SiO₂ film layer is 213.30 nm, the thickness of the sixth Nb₂O₅ film layer is 45.95 nm, the thickness of the sixth SiO₂ film layer is 190.62 nm, the thickness of the seventh Nb₂O₅ film layer is 50.42 nm, and the thickness of the seventh SiO₂ film layer is... The thickness of the iO2 film is 183.99 nm, the thickness of the eighth Nb2O5 film is 50.382 nm, the thickness of the eighth SiO2 film is 190.17 nm, the thickness of the ninth Nb2O5 film is 45.71 nm, the thickness of the ninth SiO2 film is 213.62 nm, the thickness of the tenth Nb2O5 film is 48.51 nm, the thickness of the tenth SiO2 film is 188.67 nm, the thickness of the eleventh Nb2O5 film is 48.375 nm, the thickness of the eleventh SiO2 film is 174.73 nm, the thickness of the twelfth Nb2O5 film is 51.43 nm, the thickness of the twelfth SiO2 film is 232.182 nm, the thickness of the thirteenth Nb2O5 film is 26.48 nm, the thickness of the thirteenth SiO2 film is 196.51 nm, and the thickness of the fourteenth Nb2O5 film is 79.34 nm.

[0058] In this embodiment, the thickness of the fifteenth Nb₂O₅ film layer in the second color separation film layer is 45.77 nm, the thickness of the fifteenth SiO₂ film layer is 288.02 nm, the thickness of the sixteenth Nb₂O₅ film layer is 43.56 nm, the thickness of the sixteenth SiO₂ film layer is 115.60 nm, the thickness of the seventeenth Nb₂O₅ film layer is 31.89 nm, the thickness of the seventeenth SiO₂ film layer is 115.52 nm, the thickness of the eighteenth Nb₂O₅ film layer is 44.06 nm, the thickness of the eighteenth SiO₂ film layer is 310.92 nm, the thickness of the nineteenth Nb₂O₅ film layer is 45.25 nm, the thickness of the nineteenth SiO₂ film layer is 119.91 nm, the thickness of the twentieth Nb₂O₅ film layer is 31.87 nm, and the thickness of the twentieth SiO₂ film layer is 114.65 nm. The thickness of the eleventh Nb₂O₅ film is 32.427 nm, the thickness of the twenty-first SiO₂ film is 120.762 nm, the thickness of the twenty-second Nb₂O₅ film is 44.67 nm, the thickness of the twenty-second SiO₂ film is 311.37 nm, the thickness of the twenty-third Nb₂O₅ film is 42.59 nm, the thickness of the twenty-third SiO₂ film is 120.42 nm, the thickness of the twenty-fourth Nb₂O₅ film is 30.357 nm, the thickness of the twenty-fourth SiO₂ film is 129.54 nm, the thickness of the twenty-fifth Nb₂O₅ film is 34.32 nm, the thickness of the twenty-fifth SiO₂ film is 369.66 nm, the thickness of the twenty-sixth Nb₂O₅ film is 40.91 nm, and the thickness of the twenty-sixth SiO₂ film is 47.75 nm. The spectral curve of the first color-separating film in this embodiment is as follows: Figure 5 As shown, the spectral curve of the second color separation film layer is as follows: Figure 6 As shown.

[0059] The antireflective coating layer comprises, from the inside out, a twenty-seventh Nb₂O₅ film layer, a twenty-seventh SiO₂ film layer, a twenty-eighth Nb₂O₅ film layer, and a twenty-eighth SiO₂ film layer on the substrate.

[0060] The thickness of the 27th Nb₂O₅ film is 12.94 nm; the thickness of the 27th SiO₂ film is 36.77 nm; the thickness of the 28th Nb₂O₅ film is 120.47 nm; and the thickness of the 28th SiO₂ film is 90.79 nm. Their spectral curves are shown below. Figure 12 As shown.

[0061] The embodiments described above are merely illustrative of several implementations of the present invention, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the invention patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of the present invention, and these all fall within the protection scope of the present invention. Therefore, the protection scope of this invention patent should be determined by the appended claims.

Claims

1. A three-wavelength color combiner / separator, characterized in that: It includes four isosceles right-angled prisms of the same size and material: isosceles right-angled prism 1, isosceles right-angled prism 2, isosceles right-angled prism 3, and isosceles right-angled prism 4. A dichroic film layer 1 is deposited on the inclined surface 1 of isosceles right prism 1 or the inclined surface 2 of isosceles right prism 2, and overlaps and is bonded to the inclined surface 2 of isosceles right prism 2 or the inclined surface 1 of isosceles right prism 1. A dichroic film layer 2 is deposited on the inclined surface 3 of isosceles right prism 3 or the inclined surface 4 of isosceles right prism 4, and overlaps and is bonded to the inclined surface 4 of isosceles right prism 4 or the inclined surface 3 of isosceles right prism 3. The right angle surface 1 of isosceles right prism 2 and the right angle surface 2 of isosceles right prism 3 overlap and are bonded to each other. The bonding surface of inclined surface 1 and inclined surface 2 is perpendicular to the bonding surface of inclined surface 3 and inclined surface 4. The color separation film layer one has the following specifications: T≥97%@450nm and R≥97%@650nm, AOI=45°; the color separation film layer two has the following specifications: T≥98%@550nm and R≥98%@450nm, AOI=45°. A color-separating film layer is deposited on the inclined surface of an isosceles right-angle prism. This color-separating film layer includes, from the inside out on the inclined surface of the isosceles right-angle prism, a first Nb₂O₅ film layer with a thickness of 80.07-97.87 nm, a first SiO₂ film layer with a thickness of 195.71-239.20 nm, a second Nb₂O₅ film layer with a thickness of 25.95-31.71 nm, a second SiO₂ film layer with a thickness of 232.32-283.94 nm, a third Nb₂O₅ film layer with a thickness of 51.61-63.07 nm, and a fourth SiO₂ film layer with a thickness of 175.88-21 nm. The film consists of a third SiO2 film with a thickness of 4.96 nm, a fourth Nb2O5 film with a thickness of 47.99-58.652 nm, a fourth SiO2 film with a thickness of 188.64-230.560 nm, a fifth Nb2O5 film with a thickness of 48.34-59.08 nm, a fifth SiO2 film with a thickness of 213.30-260.70 nm, a sixth Nb2O5 film with a thickness of 45.95-56.16 nm, a sixth SiO2 film with a thickness of 190.62-232.98 nm, and a seventh SiO2 film with a thickness of 50.42-61.62 nm. The film consists of a seventh SiO2 film with a thickness of 183.99-224.87 nm, an eighth Nb2O5 film with a thickness of 50.382-61.58 nm, an eighth SiO2 film with a thickness of 190.17-232.43 nm, a ninth Nb2O5 film with a thickness of 45.71-55.87 nm, a ninth SiO2 film with a thickness of 213.624-261.10 nm, a tenth Nb2O5 film with a thickness of 48.51-59.29 nm, and a tenth SiO2 film with a thickness of 188.67-230.59 nm. The film consists of an eleventh Nb₂O₅ film with a thickness of 48.375-59.13 nm, an eleventh SiO₂ film with a thickness of 174.73-213.55 nm, a twelfth Nb₂O₅ film with a thickness of 51.43-62.85 nm, a twelfth SiO₂ film with a thickness of 232.182-283.78 nm, a thirteenth Nb₂O₅ film with a thickness of 26.48-32.36 nm, a thirteenth SiO₂ film with a thickness of 196.51-240.17 nm, and a fourteenth Nb₂O₅ film with a thickness of 79.34-96.97 nm. The second dichroic film layer is deposited on the inclined surface three of the isosceles right-angle prism three. The second dichroic film layer includes, from the inside to the outside, a fifteenth Nb₂O₅ film layer with a thickness of 45.77-55.94 nm, a fifteenth SiO₂ film layer with a thickness of 288.02-352.02 nm, a sixteenth Nb₂O₅ film layer with a thickness of 43.56-53.24 nm, a sixteenth SiO₂ film layer with a thickness of 115.60-141.28 nm, and a seventeenth Nb₂O₅ film layer with a thickness of 31.89-38.97 nm. The film consists of three layers: a seventeenth SiO2 film with a thickness of 115.52-141.19 nm, an eighteenth Nb2O5 film with a thickness of 44.06-53.86 nm, an eighteenth SiO2 film with a thickness of 310.92-380.02 nm, a nineteenth Nb2O5 film with a thickness of 45.25-55.31 nm, a nineteenth SiO2 film with a thickness of 119.91-146.55 nm, a twentieth Nb2O5 film with a thickness of 31.87-38.95 nm, and a film with a thickness of 114.65-14... The twentieth SiO2 film has a thickness of 2.33 nm; the twenty-first Nb2O5 film has a thickness of 32.427-39.633 nm; the twenty-first SiO2 film has a thickness of 120.762-147.608 nm; the twenty-second Nb2O5 film has a thickness of 44.67-54.593 nm; the twenty-second SiO2 film has a thickness of 311.37-380.57 nm; the twenty-third Nb2O5 film has a thickness of 42.59-52.05 nm; and the film has a thickness of 120.42-147.18 nm. The twenty-third SiO2 film, the twenty-fourth Nb2O5 film with a thickness of 30.357-37.10 nm, the twenty-fourth SiO2 film with a thickness of 129.54-158.323 nm, the twenty-fifth Nb2O5 film with a thickness of 34.32-41.94 nm, the twenty-fifth SiO2 film with a thickness of 369.66-369.66 nm, the twenty-sixth Nb2O5 film with a thickness of 40.91-50.00 nm, and the twenty-sixth SiO2 film with a thickness of 47.75-58.37 nm.

2. The three-wavelength color combiner and color separator according to claim 1, characterized in that: Anti-reflective coatings are deposited on the two right-angled surfaces of isosceles right-angled prism one, the non-bonded right-angled surface six of isosceles right-angled prism three, and the right-angled surface four of isosceles right-angled prism four that is parallel to right-angled surface one.

3. A three-wavelength color combiner and color separator according to claim 2, characterized in that: The antireflective coating layer includes, from the inside out, a twenty-seventh Nb2O5 film layer, a twenty-seventh SiO2 film layer, a twenty-eighth Nb2O5 film layer, and a twenty-eighth SiO2 film layer on the substrate.

4. A three-wavelength color combiner and color separator according to claim 3, characterized in that: The thickness of the 27th Nb2O5 film is 12.42-12.94 nm; the thickness of the 27th SiO2 film is 35.33-36.77 nm; the thickness of the 28th Nb2O5 film is 115.75-120.47 nm; and the thickness of the 28th SiO2 film is 87.23-90.79 nm.

5. A three-wavelength color combiner and color separator according to claim 1, characterized in that: The base material of the isosceles right-angle prism 1, isosceles right-angle prism 2, isosceles right-angle prism 3 and isosceles right-angle prism 4 is quartz glass.

6. The method for preparing a three-wavelength color combiner and dichroist according to any one of claims 1-5, characterized in that: Includes the following steps: Four isosceles right-angled prisms of the same size and material—isosceles right-angled prism 1, isosceles right-angled prism 2, isosceles right-angled prism 3, and isosceles right-angled prism 4—are prepared. A dichroic film layer 1 is deposited on the inclined surface 1 of isosceles right-angled prism 1, and a dichroic film layer 2 is deposited on the inclined surface 3 of isosceles right-angled prism 3. Then, the inclined surface 1 of isosceles right-angled prism 1 with the dichroic film layer 1 deposited on it and the inclined surface 2 of isosceles right-angled prism 2 are bonded together. The inclined surface 3 of isosceles right-angled prism 3 with the dichroic film layer 2 deposited on it and the inclined surface 4 of isosceles right-angled prism 4 are bonded together. Finally, the right-angled surface 1 of isosceles right-angled prism 2 and the right-angled surface 2 of isosceles right-angled prism 3 are bonded together, with the bonding surface of inclined surface 1 and inclined surface 2 perpendicular to the bonding surface of inclined surface 3 and inclined surface 4, thus obtaining the three-wavelength dichroic separator.

7. The method for preparing the three-wavelength color combiner and dichroist according to claim 6, characterized in that: The method also includes the following steps: antireflective coatings are deposited on the two right-angled surfaces of the isosceles right-angled prism one, the non-bonded right-angled surface six of the isosceles right-angled prism three, and the right-angled surface four of the isosceles right-angled prism four that is parallel to the right-angled surface one.

Images