A vacuum coating machine

Abstract

This invention discloses a vacuum coating machine, belonging to the field of vacuum coating technology. It includes a coating machine body and a vacuum pump. A first disc and a second disc are respectively arranged on both sides of the interior of the coating machine body. Multiple limiting components are arranged circumferentially on one side of the outer surface of the first and second discs. A locking mechanism is provided inside each limiting component, including a secondary gear disposed within the limiting component. When coating workpieces, multiple workpieces are first inserted into the limiting components inside the first and second discs, placing them in the secondary gears at different positions. Rotating the threaded rod causes the main gear to drive the meshing secondary gears to rotate. Using an arc-shaped plate, the locking plate locks the workpieces inside the secondary gears, ensuring that they do not shift during the coating process, thereby improving the coating effect.

Description

Technical Field

[0001] This invention relates to the field of vacuum coating technology, and in particular to a vacuum coating machine. Background Technology

[0002] Vacuum coating machines primarily refer to coating processes that require high vacuum levels. This category encompasses many types, including vacuum ion evaporation, magnetron sputtering, MBE (molecular beam epitaxy), and PLD (laser-dependent deposition modeling). The material to be coated is called the substrate, and the material being coated is called the target. Evaporation coating typically involves heating the target to evaporate surface components in the form of atomic clusters or ions, which then deposit onto the substrate surface. A thin film is formed through a film-forming process (scattered points – island structures – wandering structures – layered growth). Sputtering coating can be simply understood as using electrons or high-energy lasers to bombard the target, sputtering surface components in the form of atomic clusters or ions, which then deposit onto the substrate surface, undergoing a film-forming process to ultimately form a thin film.

[0003] In most existing coating operations, the workpiece is placed on a fixed plate without a limiting mechanism. This causes the fixed plate to rotate during the coating process, making it impossible for the workpiece to remain stably on the plate and making it easy for it to fall off.

[0004] An existing patent (publication number: CN211445891U) discloses a vacuum coating machine, comprising a housing, a vacuum pump, a motor, a rotating shaft, a bearing, a fixed plate, and a stand. Several connecting blocks are fixedly connected to the side wall of the bearing, and the connecting blocks are parallel to the fixed plate. A telescopic rod is fixedly connected to the side of the connecting blocks facing the fixed plate, and a fixed seat is fixedly connected to the end of the telescopic rod away from the connecting blocks. A limiting device is fixedly connected to the side of the fixed seat facing the fixed plate, and the limiting device has a space for accommodating the workpiece. When in use, the workpiece can be restricted on the fixed plate by the cooperation of the telescopic rod and the limiting device, thereby preventing the workpiece from falling off the fixed plate during rotation.

[0005] To address the aforementioned issues, existing patents offer solutions, but during the coating process, the workpiece may rotate and move, resulting in uneven coating and poor coating effect. Furthermore, multiple workpieces cannot be coated simultaneously, leading to low coating efficiency. Summary of the Invention

[0006] The purpose of this invention is to provide a vacuum coating machine that can solve the problems that may occur during the coating process of a workpiece, where the workpiece rotates and moves, resulting in uneven coating and poor coating effect, and also prevents the simultaneous coating of multiple workpieces, thus reducing coating efficiency.

[0007] To achieve the above objectives, the present invention provides the following technical solution: a vacuum coating machine, comprising a coating machine body, wherein a vacuum pump is provided at the top center of the coating machine body, a support cylinder is fixedly connected at the center of one side of the inner wall of the coating machine body, a first disc and a second disc are respectively provided on the inner two sides of the coating machine body, and a plurality of limiting components are arranged in a circumferential manner on one side of the outer surface of the first disc and the second disc, wherein a locking mechanism is provided inside the limiting components;

[0008] The locking mechanism includes a secondary gear disposed inside the limiting component. Multiple limiting sleeves are fixedly connected to the other side of the outer surface of the second disc. A cylindrical block is rotatably connected inside the limiting sleeve. A threaded rod is fixedly connected to one end face of the cylindrical block. The threaded rod passes through the interior of the second disc and is fixedly connected to a main gear. A secondary gear is meshed with the surface of the main gear. Multiple locking plates are disposed inside the secondary gear.

[0009] Preferably, a locking sleeve is threaded to one end of the outer circular surface of the threaded rod, and an arc-shaped plate is fixedly connected to one side of the outer surface of the auxiliary gear by a fixing bolt. The auxiliary gear is fixedly connected to a locking plate by the arc-shaped plate.

[0010] Preferably, both sides of the inner wall of the coating machine body are fixedly connected to limit rings. The first disk and the second disk have the same structure and function but are positioned opposite each other. The other side of the outer surface of the first disk and the second disk are fixedly connected to retaining rings, which are engaged inside the limit rings.

[0011] Preferably, a support rod is fixedly connected to the middle of the other side of the outer surface of the second disc, and the support rod is rotatably connected to the support cylinder. A servo motor is fixedly installed on one side of the outer surface of the coating machine body, and a drive rod is fixedly connected to the output end of the servo motor. The drive rod passes through the interior of the coating machine body and is fixedly connected to the first disc.

[0012] Preferably, the limiting component includes a first limiting plate fixedly connected to one side of the outer surface of the second disk. The first limiting plate is fixedly connected to a second limiting plate by a plurality of first U-shaped brackets. Limiting grooves are formed on the opposite surfaces of the first and second limiting plates. A ball is rotatably connected inside the limiting groove, and the ball is rotatably connected to the slide groove of the secondary gear.

[0013] Preferably, a transmission mechanism is provided at one edge of the outer surface of the second disk. The transmission mechanism includes a placement frame fixedly connected to one side of the outer surface of the second disk. The placement frame is fixedly connected to baffles by a plurality of second U-shaped frames.

[0014] Preferably, a slot is provided in the middle of the placement rack and the baffle, a toothed disc is rotatably connected inside the placement rack, the bottom end of the toothed disc is locked inside the placement rack, and multiple locking teeth are fixedly connected to the upper end of the inner wall of the toothed disc.

[0015] Preferably, a partition is fixedly connected to the middle of the inner wall of the gear disk, the partition is movably connected to the slot, and the inner wall of the gear disk meshes with the main gear.

[0016] Compared with the prior art, the beneficial effects of the present invention are:

[0017] 1. This application, by providing a first disc, a second disc, a limiting component, and a locking mechanism, allows multiple workpieces to be inserted into the limiting component inside the first and second discs during coating, enabling simultaneous coating of multiple workpieces and improving coating efficiency. Simultaneously, the workpieces are placed in auxiliary gears at different positions. The threaded rod can then be rotated, causing the main gear to drive the meshing auxiliary gears to rotate. The arc-shaped plate then locks the workpieces inside the auxiliary gears, ensuring that they do not shift position during coating and thus improving the coating effect.

[0018] 2. This application, by setting up a transmission mechanism, requires multiple rotations of the threaded rod at different positions during the locking process of multiple workpieces. This operation is cumbersome and inefficient. In this case, the gear disc can be rotated to make the locking teeth on the inner wall drive the main gear to rotate, thereby making the meshing secondary gear rotate synchronously. Then, the locking sleeve is used to fix the position of the main gear, thus ensuring the stability of the workpiece during rotation and simplifying the workpiece locking operation, thereby increasing work efficiency. Attached Figure Description

[0019] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0020] Figure 1 This is an overall structural view of the present invention;

[0021] Figure 2 This is a cross-sectional view of the present invention;

[0022] Figure 3 This is a schematic diagram showing the specific connection of the second disk of the present invention;

[0023] Figure 4 This is a schematic diagram showing the connection between the limiting component and the locking mechanism of the present invention;

[0024] Figure 5 This is a schematic diagram showing the disassembled connection of the limiting component and the locking mechanism of the present invention;

[0025] Figure 6 This is a schematic diagram showing the disassembled connection of the transmission mechanism of the present invention;

[0026] Figure 7 for Figure 6 A magnified view of a portion of point A in the middle.

[0027] Explanation of reference numerals in the attached figures:

[0028] 1. Coating machine body; 11. Support cylinder; 2. Vacuum pump; 3. Servo motor; 4. Drive rod; 5. First disc; 6. Limiting ring; 7. Second disc; 71. Snap ring; 8. Limiting assembly; 81. First limiting plate; 82. Ball bearing; 83. First U-shaped frame; 84. Second limiting plate; 9. Locking mechanism; 91. Secondary gear; 92. Slide groove; 93. Arc plate; 94. Locking plate; 95. Limiting sleeve; 96. Threaded rod; 97. Main gear; 98. Locking sleeve; 10. Transmission mechanism; 101. Placement frame; 102. Baffle; 103. Second U-shaped frame; 104. Groove; 105. Gear disc; 106. Partition. Detailed Implementation

[0029] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0030] Please see Figures 1 to 7 The present invention provides a technical solution:

[0031] A vacuum coating machine includes a coating machine body 1, a vacuum pump 2 is provided at the top center of the coating machine body 1, a support cylinder 11 is fixedly connected at the center of one side of the inner wall of the coating machine body 1, a first disk 5 and a second disk 7 are respectively provided on the inner two sides of the coating machine body 1, and a plurality of limiting components 8 are arranged in a circumferential manner on one side of the outer surface of the first disk 5 and the second disk 7, and a locking mechanism 9 is provided inside the limiting components 8.

[0032] The locking mechanism 9 includes a secondary gear 91 disposed inside the limiting component 8. Multiple limiting sleeves 95 are fixedly connected to the other side of the outer surface of the second disc 7. A cylindrical block is rotatably connected inside the limiting sleeve 95. A threaded rod 96 is fixedly connected to one end face of the cylindrical block. The threaded rod 96 passes through the interior of the second disc 7 and is fixedly connected to a main gear 97. The surface of the main gear 97 is meshed with the secondary gear 91. Multiple locking plates 94 are disposed inside the secondary gear 91.

[0033] The vacuum pump 2 mainly plays the role of vacuuming in the vacuum coating machine. This is because during vacuum coating, the thin film material must first evaporate into atoms or molecules, and then move in a straight line with a large free path, collide with the substrate surface and condense to form a thin film.

[0034] Specifically, such as Figure 3 , Figure 4 , Figure 5 As shown, a locking sleeve 98 is threaded to one end of the outer circular surface of the threaded rod 96, and an arc plate 93 is fixedly connected to one side of the outer surface of the auxiliary gear 91 by a fixing bolt. The auxiliary gear 91 is fixedly connected to a locking plate 94 by the arc plate 93.

[0035] By driving the threaded rod 96, the main gear 97 drives the secondary gear 91 to rotate, thereby causing the arc plate 93 to drive the locking plate 94 to rotate synchronously. The locking plate 94 locks the workpiece placed in the secondary gear 91, which can effectively prevent the workpiece from shifting position during the rotation coating process.

[0036] Specifically, such as Figure 2 As shown, both sides of the inner wall of the coating machine body 1 are fixedly connected to limit rings 6. The first disk 5 and the second disk 7 have the same structure and function, but their positions are opposite. The other side of the outer surface of the first disk 5 and the second disk 7 are fixedly connected to retaining rings 71, which are locked inside the limit rings 6.

[0037] By setting the first disk 5 and the second disk 7, the workpiece is kept at the same height during placement. The limiting component 8 and the locking mechanism 9 are used to lock both ends of the workpiece, ensuring that the workpiece will not shake during processing.

[0038] Specifically, such as Figure 1 , Figure 2 As shown, a support rod is fixedly connected to the middle of the other side of the outer surface of the second disc 7. The support rod is rotatably connected to the support cylinder 11. A servo motor 3 is fixedly installed on one side of the outer surface of the coating machine body 1. A drive rod 4 is fixedly connected to the output end of the servo motor 3. The drive rod 4 passes through the interior of the coating machine body 1 and is fixedly connected to the first disc 5.

[0039] Specifically, such as Figure 3 , Figure 4 , Figure 5 As shown, the limiting component 8 includes a first limiting plate 81 fixedly connected to one side of the outer surface of the second disk 7. The first limiting plate 81 is fixedly connected to a second limiting plate 84 by a plurality of first U-shaped frames 83. Limiting grooves are formed on the opposite surfaces of the first limiting plate 81 and the second limiting plate 84. A ball bearing 82 is rotatably connected inside the limiting groove. The ball bearing 82 is rotatably connected in the groove 92 of the secondary gear 91.

[0040] The first limiting plate 81 and the second limiting plate 84 have the same structure, but they are in opposite positions and are provided with multiple balls 82 in their limiting grooves. This allows the balls 82 to roll in the sliding grooves 92 during the rotation of the secondary gear 91, making the secondary gear 91 rotate more smoothly and without generating a damping sensation.

[0041] When coating workpieces, multiple workpieces are first inserted into the limiting components 8 inside the first disk 5 and the second disk 7, allowing multiple workpieces to be coated simultaneously, thus improving coating efficiency. Simultaneously, the workpieces are placed in the secondary gears 91 at different positions. By rotating the threaded rod 96, the main gear 97 drives the meshing secondary gear 91 to rotate, causing the secondary gear 91 to rotate within the limiting grooves formed by the first limiting plate 81 and the second limiting plate 84. Furthermore, the arc-shaped plate 93 is used to lock the workpieces inside the secondary gear 91 using the locking plate 94. During the rotation of the secondary gear 91, the balls 82 move within the sliding groove 92. The rolling motion makes the secondary gear 91 rotate more smoothly without any damping. Then, the locking sleeve 98 is rotated to fix the position of the main gear 97, thus ensuring that the locked workpiece will not shift during the coating process, thereby improving the coating effect. After completing the work limit locking operation, the servo motor 3 is started to make the first disk 5 rotate, and the other end of the workpiece drives the second disk 7 to rotate synchronously. This causes the support rod on the outside of the second disk 7 to rotate synchronously in the support cylinder 11. At the same time, the vacuum pump 2 is started to perform the coating operation on the workpiece inside the coating machine body 1, ensuring a better and more comprehensive coating effect.

[0042] Specifically, such as Figure 3 , Figure 6 , Figure 7 As shown, a transmission mechanism 10 is provided at one edge of the outer surface of the second disk 7. The transmission mechanism 10 includes a placement frame 101 fixedly connected to one side of the outer surface of the second disk 7. The placement frame 101 is fixedly connected to baffles 102 through multiple second U-shaped frames 103.

[0043] Specifically, such as Figure 3 , Figure 6 , Figure 7As shown, a slot 104 is provided in the middle of the placement rack 101 and the baffle 102. A gear 105 is rotatably connected inside the placement rack 101. The bottom end of the gear 105 is locked inside the placement rack 101. Multiple locking teeth are fixedly connected to the upper end of the inner wall of the gear 105.

[0044] Specifically, such as Figure 3 , Figure 6 , Figure 7 As shown, a partition 106 is fixedly connected to the middle of the inner wall of the gear disk 105. The partition 106 is movably connected to the slot 104. The inner wall of the gear disk 105 meshes with the main gear 97.

[0045] By fixing a partition 106 to the middle of the inner wall of the gear disk 105, the gear disk 105 always rotates in the placement frame 101, and the partition 106 rotates in the slot 104 formed by the placement frame 101 and the baffle 102.

[0046] In the process of locking multiple workpieces, it is necessary to rotate the threaded rod 96 at different positions multiple times to perform the locking operation. This operation is cumbersome and inefficient. In this case, after the workpiece is placed, the gear disk 105 is rotated. The gear disk 105 always rotates in the placement frame 101, and the partition 106 rotates in the slot 104 formed by the placement frame 101 and the baffle 102. This causes the locking teeth on the inner wall of the gear disk 105 to drive the main gear 97 to rotate, and the secondary gear 91 meshing with it rotates synchronously. This causes the arc plate 93 to drive the locking plate 94 to rotate synchronously, so that the locking plate 94 locks the workpiece in the secondary gear 91. Then, the locking sleeve 98 is used to fix the position of the main gear 97, thereby ensuring the stability of the workpiece during rotation and simplifying the workpiece locking operation, thus improving work efficiency.

[0047] Working Principle: In use, multiple workpieces are first inserted into the limiting components 8 inside the first disk 5 and the second disk 7, placing them in the secondary gears 91 at different positions. Then, the threaded rod 96 can be rotated, causing the main gear 97 to drive the meshing secondary gear 91 to rotate. The arc-shaped plate 93 then uses the locking plate 94 to lock the workpieces inside the secondary gear 91, ensuring no positional shift during the coating process and improving the coating effect. After locking the workpieces, the servo motor 3 can be activated, causing the first disk 5 to rotate. Simultaneously, the other end of the workpiece drives the second disk 7 to rotate, causing the support rod on the outer side of the second disk 7 to... The support cylinder 11 rotates synchronously, and the vacuum pump 2 is started at the same time, so that the workpieces in the coating machine body 1 can be coated to ensure better and more comprehensive coating effect. At the same time, in the process of locking multiple workpieces, the threaded rod 96 at different positions needs to be rotated multiple times to perform the locking operation. This operation is cumbersome and inefficient. At this time, the gear disk 105 can be rotated to make the locking teeth on the inner wall drive the main gear 97 to rotate, thereby making the meshing secondary gear 91 rotate synchronously. Then, the locking sleeve 98 is used to fix the position of the main gear 97, thus ensuring the stability of the workpiece during rotation and making the workpiece locking operation simpler and improving work efficiency.

[0048] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A vacuum coating machine, comprising a coating machine body (1), characterized in that: A vacuum pump (2) is provided at the top center of the coating machine body (1). A support cylinder (11) is fixedly connected to the middle of one side of the inner wall of the coating machine body (1). A first disc (5) and a second disc (7) are respectively provided on the inner two sides of the coating machine body (1). Multiple limiting components (8) are arranged in a circumferential pattern on one side of the outer surface of the first disc (5) and the second disc (7). A locking mechanism (9) is provided inside the limiting component (8). The locking mechanism (9) includes a secondary gear (91) disposed inside the limiting component (8). Multiple limiting sleeves (95) are fixedly connected to the other side of the outer surface of the second disc (7). A cylindrical block is rotatably connected inside the limiting sleeve (95). A threaded rod (96) is fixedly connected to one end face of the cylindrical block. The threaded rod (96) passes through the interior of the second disc (7) and is fixedly connected to a main gear (97). The surface of the main gear (97) is meshed with the secondary gear (91). Multiple locking plates (94) are disposed inside the secondary gear (91). One end of the outer circular surface of the threaded rod (96) is threadedly connected to a locking sleeve (98), and one side of the outer surface of the auxiliary gear (91) is fixedly connected to an arc plate (93) by a fixing bolt. The auxiliary gear (91) is fixedly connected to a locking plate (94) by the arc plate (93). The limiting component (8) includes a first limiting plate (81) fixedly connected to one side of the outer surface of the second disk (7). The first limiting plate (81) is fixedly connected to a second limiting plate (84) by a plurality of first U-shaped frames (83). Limiting grooves are opened on the opposite surfaces of the first limiting plate (81) and the second limiting plate (84). A ball (82) is rotatably connected inside the limiting groove. The ball (82) is rotatably connected to the slide groove (92) of the auxiliary gear (91).

2. The vacuum coating machine according to claim 1, characterized in that: Limiting rings (6) are fixedly connected to both sides of the inner wall of the coating machine body (1). The first disk (5) and the second disk (7) have the same structure and function but are located opposite each other. A retaining ring (71) is fixedly connected to the other side of the outer surface of the first disk (5) and the second disk (7). The retaining ring (71) is locked inside the limiting ring (6).

3. The vacuum coating machine according to claim 1, characterized in that: A support rod is fixedly connected to the middle of the other side of the outer surface of the second disc (7). The support rod is rotatably connected to the support cylinder (11). A servo motor (3) is fixedly installed on one side of the outer surface of the coating machine body (1). A drive rod (4) is fixedly connected to the output end of the servo motor (3). The drive rod (4) passes through the interior of the coating machine body (1) and is fixedly connected to the first disc (5).

4. A vacuum coating machine according to claim 1, characterized in that: A transmission mechanism (10) is provided at one edge of the outer surface of the second disk (7). The transmission mechanism (10) includes a placement frame (101) fixedly connected to one side of the outer surface of the second disk (7). The placement frame (101) is fixedly connected to baffles (102) by a plurality of second U-shaped frames (103).

5. A vacuum coating machine according to claim 4, characterized in that: A slot (104) is provided in the middle of the placement rack (101) and the baffle (102). A toothed disc (105) is rotatably connected inside the placement rack (101). The bottom end of the toothed disc (105) is locked inside the placement rack (101). Multiple locking teeth are fixedly connected to the upper end of the inner wall of the toothed disc (105).

6. A vacuum coating machine according to claim 5, characterized in that: A partition (106) is fixedly connected to the middle of the inner wall of the gear disc (105). The partition (106) is movably connected to the slot (104). The inner wall of the gear disc (105) meshes with the main gear (97).

Images