Target material inner wall cleaning device
By using coaxially arranged pipe assemblies and nozzle structures, the inner wall of the target material can be cleaned in all directions and dried quickly, solving the problems of time-consuming and labor-intensive processes and cleaning dead spots in existing technologies, thus improving cleaning efficiency and production efficiency.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- WUHAN FENGKE JINGSHENG ELECTRONIC MATERIALS CO LTD
- Filing Date
- 2024-04-02
- Publication Date
- 2026-08-04
AI Technical Summary
Existing methods for cleaning the inner wall of the target material are time-consuming, labor-intensive, inefficient, and prone to creating cleaning dead spots. Furthermore, natural air drying takes a long time, affecting the progress of production operations.
The first, second, and third pipe assemblies are arranged coaxially. The first and second nozzles achieve all-round cleaning, and the air blowing accelerates drying, avoids cleaning dead corners, and improves cleaning efficiency.
It achieves efficient cleaning of the inner wall of the target material, saving time and effort, avoiding cleaning dead corners, shortening drying time, and improving production progress.
Smart Images
Figure CN118045821B_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of target cleaning technology, and more particularly to a target inner wall cleaning device. Background Technology
[0002] In the manufacturing process of LCD panels, sputtering targets are typically used. These targets mainly consist of three parts: a flange section, a sputtering section, and a port section. During use, magnets are placed inside the target, which move along a specific trajectory while being cooled by water. The flange side of the target is mounted on the rotating base of the sputtering machine, which drives the target to rotate continuously. The base and flange are threaded together to form a rigid connection. The sputtering section, approximately three meters long, is located between the flange and port sections. The port section is generally used during the hoisting process. The target is lifted from its container, flange end facing down, and hoisted by an overhead crane to the corresponding base position on the sputtering machine. Workers then screw the corresponding bolts into the threaded holes of the flange port, securing them to the threaded holes on the base. A sealing ring is installed between the flange and the base to prevent cooling water from overflowing from the flange and causing a decrease in the vacuum level inside the cavity. After the target is installed in place, there is an anode rod on the side of the target. The target acts as the cathode. There is a potential difference between the anode rod and the target. Argon gas inside the sputtering machine is ionized to form argon plasma. The argon gas bombards the target, and the atoms on the target are bombarded and leave the target and deposited on the opposite glass substrate to form a thin film. The above is the process of target sputtering.
[0003] During the sputtering process, boring is performed inside the sputtering target, and coolant is introduced, which causes some contamination to the inner wall of the target. Although the cutting fluid (coolant) is poured out after boring, some cutting fluid remains on the inner wall of the target. Therefore, the inner wall needs to be thoroughly cleaned of cutting fluid before packaging the target. If the inner wall of the target is not clean enough, it can easily cause contamination of the magnetic rod or jamming during the rotation of the magnetic rod, thus affecting the sputtering process.
[0004] like Figure 1 As shown, the existing method for cleaning the inner wall of the target material involves a worker attaching a cleaning cloth 3000 to one end of a long rod 2000, holding the other end of the rod, and inserting the cleaning cloth 3000 into the through-hole of the target material 1000. By rotating the rod 2000, the cleaning cloth 3000 rotates round and round, thus cleaning the inner wall of the target material 1000. After one rotation, the rod is stepped back (the backward push is equal to the width of the cleaning cloth 3000), and then rotated again until the entire target material 1000 is wiped clean. If multiple cleanings are required, the rod 2000 needs to be removed, the cleaning cloth 3000 replaced, and the process repeated. After cleaning, the inner wall of the target material 1000 is allowed to air dry naturally.
[0005] The existing technology uses manual cleaning, which is time-consuming and labor-intensive, with low work efficiency, and it is easy to create cleaning dead corners during the wiping process. In addition, the natural air drying of the inner wall of the target material takes a long time, which affects the production progress.
[0006] Therefore, there is an urgent need to design a target material inner wall cleaning device to solve the above technical problems. Summary of the Invention
[0007] The purpose of this invention is to provide a target material inner wall cleaning device that saves time and effort, improves cleaning efficiency and effect, and speeds up production operations.
[0008] To achieve this objective, the present invention adopts the following technical solution:
[0009] This invention provides a target material inner wall cleaning device for cleaning the inner wall of a target material, the target material inner wall cleaning device comprising:
[0010] A first pipe assembly and a second pipe assembly are coaxially arranged. The first pipe assembly is located inside the second pipe assembly. One end of the first pipe assembly is provided with a first inlet, and the other end of the first pipe assembly is provided with a first nozzle. The first inlet is used for the flow of liquid and gas. One end of the second pipe assembly is provided with a second inlet, and the outer periphery of the second pipe assembly is provided with a second nozzle. The second inlet is used for the flow of liquid, and the first inlet and the second inlet are arranged on the same side and are isolated from each other.
[0011] A third conduit assembly is located on the outer periphery of the second conduit assembly and is coaxially arranged with the second conduit assembly. The third conduit assembly is configured to supply liquid outflow.
[0012] As an optional technical solution for a target inner wall cleaning device, the first nozzle is configured as at least one, and the first nozzle is used to clean the port section of the target.
[0013] As an optional technical solution for a target material inner wall cleaning device, the second nozzles are arranged in multiple rows at equal intervals, with each row of the second nozzles being evenly distributed in a ring around the circumference of the second pipe assembly.
[0014] As an optional technical solution for a target material inner wall cleaning device, a third nozzle is also provided on the outer periphery of the second pipe assembly. The third nozzle is located on the side close to the first nozzle and is positioned between the first nozzle and the second nozzle. The third nozzle is connected to the first inlet so that liquid and gas can flow through the third nozzle.
[0015] As an optional technical solution for a target inner wall cleaning device, the third nozzle is tilted toward the second nozzle.
[0016] As an optional technical solution for a target inner wall cleaning device, the target inner wall cleaning device further includes a guide wheel, which is sleeved on the second pipe assembly, and the outer diameter of the guide wheel is smaller than the inner diameter of the target.
[0017] As an optional technical solution for a target material inner wall cleaning device, the guide wheels are configured in multiple ways, and each guide wheel has at least one flow channel for the flow of cleaned liquid.
[0018] As an optional technical solution for a target material inner wall cleaning device, the outer diameter of the third pipe assembly is equal to the outer diameter of the guide wheel.
[0019] As an optional technical solution for a target material inner wall cleaning device, the guide wheel is provided with an avoidance opening, and the guide wheel is fitted onto the second pipe assembly through the avoidance opening.
[0020] As an optional technical solution for a target material inner wall cleaning device, the third pipe assembly is provided with multiple liquid outlets, and the multiple liquid outlets are evenly distributed in a ring about the axis of the third pipe assembly.
[0021] The beneficial effects of the present invention include at least the following:
[0022] This invention provides a target material inner wall cleaning device for cleaning the inner wall of a target material. The device includes a first pipe assembly, a second pipe assembly, and a third pipe assembly. All three components are coaxially arranged. The first pipe assembly is located inside the second pipe assembly. One end of the first pipe assembly has a first inlet, and the other end has a first nozzle. The first inlet communicates with the first nozzle and is used for the flow of liquid and gas. One end of the second pipe assembly has a second inlet, and the outer periphery of the second pipe assembly has a second nozzle. The second inlet communicates with the second nozzle and is used for the flow of liquid. The first and second inlets are located on the same side and are isolated from each other. The third pipe assembly is located on the outer periphery of the second pipe assembly and is configured to allow liquid to flow out. By incorporating the first, second, and third pipe assemblies, the cleaning efficiency of the target material's inner wall is improved, saving time and labor. It eliminates the need for manual wiping with long poles and cleaning cloths, as required in existing technologies. The first and second nozzles enable comprehensive cleaning of the target material's inner wall, preventing blind spots and enhancing the cleaning effect. After cleaning, gas is introduced through the first inlet and ejected through the first nozzle. Under gas pressure, the cleaned liquid is continuously driven away along the flange section, flowing out through the third pipe assembly and then out of the target material. Simultaneously, the gas also agitates the cleaned inner wall, accelerating its drying process, saving time, increasing efficiency, and solving the problem of lengthy natural air drying in existing technologies. Attached Figure Description
[0023] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments of the present invention will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the content of the embodiments of the present invention and these drawings without creative effort.
[0024] Figure 1 A schematic diagram illustrating the existing technology for cleaning the inner wall of a target material;
[0025] Figure 2 This is a schematic diagram of the target inner wall cleaning device provided in an embodiment of the present invention. Figure 1 ;
[0026] Figure 3 for Figure 2 A magnified view of a section at point A in the middle;
[0027] Figure 4This is a schematic diagram of the target inner wall cleaning device provided in an embodiment of the present invention. Figure 2 ;
[0028] Figure 5 This is a schematic diagram of the target material provided in an embodiment of the present invention;
[0029] Figure 6 This is a schematic diagram of the target material inner wall cleaning device and the target material provided in the embodiments of the present invention. Figure 1 ;
[0030] Figure 7 This is a schematic diagram of the target inner wall cleaning device and the target provided in the embodiment of the present invention. Figure 2 .
[0031] Figure Labels
[0032] 1000, Target material; 1001, Port section; 1002, Flange section; 2000, Long rod; 3000, Cleanroom cloth;
[0033] 100, First pipe assembly; 110, First inlet; 120, First nozzle; 200, Second pipe assembly; 210, Second inlet; 220, Second nozzle; 230, Third nozzle; 300, Third pipe assembly; 310, Liquid outlet; 400, Guide wheel; 410, Flow channel; 420, Clearance opening. Detailed Implementation
[0034] To make the technical problems solved by the present invention, the technical solutions adopted, and the technical effects achieved clearer, the technical solutions of the present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.
[0035] In the description of this invention, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.
[0036] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.
[0037] In the description of this embodiment, the terms "upper," "lower," "left," and "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the present invention. In addition, the terms "first" and "second" are used only for distinction in description and have no special meaning.
[0038] In the description of this embodiment, unless otherwise specified, the term "multiple" refers to two or more quantities.
[0039] This embodiment provides a target material inner wall cleaning device that saves time and effort, improves the cleaning efficiency and effect of the target material inner wall, and improves the production operation progress.
[0040] like Figures 2-7 As shown, the target material inner wall cleaning device is used to clean the inner wall of the target material 1000. The target material inner wall cleaning device mainly includes a first pipe assembly 100, a second pipe assembly 200, and a third pipe assembly 300. The first pipe assembly 100, the second pipe assembly 200, and the third pipe assembly 300 are all coaxially arranged. The first pipe assembly 100 is located inside the second pipe assembly 200. One end of the first pipe assembly 100 is provided with a first inlet 110, and the other end is provided with a first nozzle 120. The first inlet 110 is connected to the first nozzle 120 and is used for the flow of liquid and gas. One end of the second pipe assembly 200 is provided with a second inlet 210, and the outer periphery of the second pipe assembly 200 is provided with a second nozzle 220. The second inlet 210 is connected to the second nozzle 220 and is used for the flow of liquid. The first inlet 110 and the second inlet 210 are arranged on the same side and are isolated from each other. The third conduit assembly 300 is located on the outer periphery of the second conduit assembly 200, and the third conduit assembly 300 is configured to supply liquid and gas outflow.
[0041] Based on the above design, the first inlet 110 in this embodiment can flow with both liquid and gas, and both the liquid and gas have a certain pressure to facilitate the flow of liquid or gas through the first inlet 110 to the first nozzle 120, and finally ejected from the first nozzle 120. Optionally, the liquid can be an isopropanol solution, and the gas can be high-pressure air. The coaxial arrangement of the first pipe assembly 100, the second pipe assembly 200, and the third pipe assembly 300 facilitates the insertion of the target inner wall cleaning device into the through hole of the target 1000.
[0042] In actual operation, the operator inserts the inner wall cleaning device of the target material into the through hole of the target material 1000, so that the first nozzle 120 is located at the port section 1001 of the target material 1000, the second nozzle 220 is located at the sputtering section of the target material 1000, and the first inlet 110 and the second inlet 210 are both located outside the flange section 1002 of the target material 1000. This is conducive to connecting the first inlet 110 and the second inlet 210 to external liquid source equipment and gas source equipment. First, liquid is introduced through the first inlet 110, causing the first nozzle 120 to clean the port section 1001 of the target 1000. Then, liquid is introduced through the second inlet 210, causing the second nozzle 220 to clean the sputtering section of the target 1000. After cleaning, the liquid flow through the first inlet 110 and the second inlet 210 is shut off. Next, gas is introduced through the first inlet 110, causing the gas to be ejected by the first nozzle 120. Under the pressure of the gas, the cleaned liquid is continuously driven away along the flange section 1002, allowing it to flow out through the third pipe assembly 300 and then out of the target 1000. Simultaneously, the gas can also be discharged through the third pipe assembly 300. In this embodiment, the gas flow through the first pipe assembly 100 not only drives away the cleaned liquid but also blows across the inner wall of the cleaned target 1000, thereby accelerating the drying rate of the inner wall, saving time, and improving work efficiency.
[0043] Optionally, in this embodiment, the first inlet 110 is simultaneously connected to both the first high-pressure isopropanol storage tank and the high-pressure air storage tank, and the first high-pressure isopropanol storage tank and the high-pressure air storage tank operate independently without affecting each other. The second inlet 210 is connected to the second high-pressure isopropanol storage tank, and the first inlet 110 and the second inlet 210 are isolated from each other and do not affect each other.
[0044] In addition, in this embodiment, the first inlet 110 and the second inlet 210 are arranged on the same side, which makes it easier to blow out the cleaned liquid after the gas is introduced into the first inlet 110, thereby improving the work efficiency.
[0045] Compared with existing technologies, the arrangement of the first pipe assembly 100, the second pipe assembly 200, and the third pipe assembly 300 improves the cleaning efficiency of the inner wall of the target 1000, saving time and labor. It eliminates the need for manual wiping with a long rod 2000 and a cleaning cloth 3000 as in existing technologies. The first nozzle 120 and the second nozzle 220 enable comprehensive cleaning of the inner wall of the target 1000, avoiding blind spots and improving the cleaning effect. Simultaneously, after cleaning, gas is introduced through the first inlet 110 and ejected through the first nozzle 120. Under gas pressure, the cleaned liquid is continuously driven away along the flange section 1002, causing it to flow out through the third pipe assembly 300 and then out of the target 1000. At the same time, the gas can also blow on the inner wall of the cleaned target material 1000, thereby accelerating the drying rate of the inner wall of the target material 1000, saving time, improving work efficiency, and solving the problem of long drying time by natural air drying in the existing technology.
[0046] Optionally, in this embodiment, at least one first nozzle 120 is provided, and the first nozzle 120 is used to clean the port segment 1001 of the target material 1000. For example, the first nozzle 120 can be provided in one, two, three, or other quantities.
[0047] Optionally, such as Figure 4 and Figure 6 As shown, in this embodiment, the second nozzles 220 are arranged in multiple rows at equal intervals, with each row of second nozzles 220 being evenly distributed in a ring around the circumference of the second pipe assembly 200. For example, the second nozzles 220 are arranged in three rows at equal intervals, with three second nozzles 220 arranged at equal intervals in each row. The three second nozzles 220 cover a circular area, which can improve the cleaning efficiency of the second nozzles 220 on the inner wall of the target material 1000, ensure the cleaning effect, and guarantee no cleaning dead corners.
[0048] Optionally, in this embodiment, both the first nozzle 120 and the second nozzle 220 can be configured as a fan shape to increase the cleaning area and improve cleaning efficiency.
[0049] like Figure 4 As shown, in this embodiment, a third nozzle 230 is also provided on the outer periphery of the second pipe assembly 200. The third nozzle 230 is located on the side close to the first nozzle 120 and is located between the first nozzle 120 and the second nozzle 220. The third nozzle 230 is connected to the first inlet 110 so that liquid and gas can pass through the third nozzle 230.
[0050] The third nozzle 230 can improve the cleaning efficiency of the port segment 1001 of the target material 1000. On the other hand, when gas is introduced into the third nozzle 230, the amount of gas injected can be increased, thereby improving the efficiency of the liquid flowing out of the target material 1000 after the gas blows away the cleaning, saving time.
[0051] Optionally, three third nozzles 230 may be arranged at equal intervals around the outer periphery of the second pipe assembly 200.
[0052] For further information, please continue to refer to [link / reference]. Figure 4 In this embodiment, the third nozzle 230 is tilted toward the second nozzle 220. This is beneficial for the gas ejected from the third nozzle 230 to blow the liquid (cleaned liquid) sprayed from the second nozzle 220 toward the flange section 1002, thereby accelerating the flow rate of the cleaned liquid and saving time.
[0053] It should be noted that the internal communication structures between the first inlet 110 and the first nozzle 120, the second inlet 210 and the second nozzle 220, and the first inlet 110 and the third nozzle 230 in this embodiment are not shown in the figure and belong to conventional flow channel structures, which will not be described in detail here.
[0054] like Figure 4 As shown, in this embodiment, the target inner wall cleaning device further includes a guide wheel 400, which is sleeved on the second pipe assembly 200. The outer diameter of the guide wheel 400 is smaller than the inner diameter of the target 1000, which facilitates the insertion of the target inner wall cleaning device into the through hole of the target 1000 and avoids interference or collision between the guide wheel 400 and the inner wall of the target 1000. The guide wheel 400 also provides some support to the second pipe assembly 200, maintaining a certain gap between the second nozzle 220 and the inner wall of the target 1000, preventing the second nozzle 220 from directly contacting the inside of the target 1000 and clogging it, thereby improving the cleaning efficiency of the second nozzle 220 on the inner wall of the target 1000.
[0055] Optionally, the guide wheel 400 is provided with a clearance opening 420, and the guide wheel 400 is sleeved on the second pipe assembly 200 through the clearance opening 420. For example, the guide wheel 400 can be snapped to the outer wall of the second pipe assembly 200 by a snap-fit method, which also facilitates the disassembly and replacement of the guide wheel 400 in the later stage and saves costs.
[0056] Optionally, multiple guide wheels 400 are set at equal intervals, for example, three guide wheels 400 can be set at equal intervals.
[0057] Optionally, one end of the second pipe assembly 200 extending from the flange section 1002 can be connected to a handheld rotary handle or an electric rotary handle, thereby driving the inner wall cleaning device of the target material to rotate and improve the cleaning effect.
[0058] like Figure 4 As shown, in this embodiment, each guide wheel 400 has at least one flow channel 410 for the flow of cleaned liquid and gas. Exemplarily, two flow channels 410 can be provided, and the two flow channels 410 are symmetrically arranged about the clearance port 420, improving the stability and reliability of the guide wheel 400. The flow channel 410 improves the efficiency of liquid discharge after cleaning, preventing liquid accumulation in the through holes of the target material 1000 and improving work efficiency; furthermore, the flow channel 410 also facilitates timely gas discharge during purging.
[0059] Optionally, in this embodiment, the outer diameter of the third pipe assembly 300 is equal to the outer diameter of the guide wheel 400, thereby facilitating the insertion of the target material inner wall cleaning device into the through hole of the target material 1000 and avoiding interference and collision between the third pipe assembly 300 and the inner wall of the target material 1000.
[0060] For further information, please continue to refer to [link / reference]. Figure 4 In this embodiment, the third pipe assembly 300 is provided with multiple liquid outlets 310, and the multiple liquid outlets 310 are evenly distributed in a ring about the axis of the third pipe assembly 300. The liquid outlets 310 are connected to the outside of the target material 1000, and the cleaned liquid can flow out from the liquid outlets 310 of the third pipe assembly 300 to the outside of the target material 1000, thereby avoiding the phenomenon of liquid accumulation inside the through hole of the target material 1000 and improving working efficiency.
[0061] Obviously, the above description is merely a preferred embodiment of the present invention and the technical principles employed. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and various obvious changes, readjustments, and substitutions can be made without departing from the scope of protection of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments, and may include many other equivalent embodiments without departing from the concept of the present invention, the scope of which is determined by the scope of the appended claims.
[0062] Note that in the description of this specification, the references to terms such as "some embodiments," "other embodiments," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.
Claims
1. A target inner wall cleaning device for cleaning an inner wall of a target (1000), characterized in that, The target material inner wall cleaning device includes: A first pipe assembly (100) and a second pipe assembly (200) are coaxially arranged. The first pipe assembly (100) is located inside the second pipe assembly (200). One end of the first pipe assembly (100) is provided with a first inlet (110), and the other end of the first pipe assembly (100) is provided with a first nozzle (120). The first inlet (110) is used for the flow of liquid and gas. One end of the second pipe assembly (200) is provided with a second inlet (210), and the outer periphery of the second pipe assembly (200) is provided with a second nozzle (220). The second inlet (210) is used for the flow of liquid, and the first inlet (110) and the second inlet (210) are arranged on the same side and are isolated from each other. A third conduit assembly (300) is located on the outer periphery of the second conduit assembly (200) and is coaxially arranged with the second conduit assembly (200). The third conduit assembly (300) is configured to supply liquid and gas outflow. The first nozzle (120) is configured to be at least one, and the first nozzle (120) is used to clean the port segment (1001) of the target material (1000). The second pipe assembly (200) is further provided with a third nozzle (230) on its outer periphery. The third nozzle (230) is located on the side close to the first nozzle (120) and is positioned between the first nozzle (120) and the second nozzle (220). The third nozzle (230) communicates with the first inlet (110) to allow liquid and gas to flow through the third nozzle (230). The third nozzle (230) is inclined toward the second nozzle (220). The inner wall cleaning device for the target material also includes a guide wheel (400), which is sleeved on the second pipe assembly (200), and the outer diameter of the guide wheel (400) is smaller than the inner diameter of the target material (1000). The guide wheels (400) are configured in multiple ways, and each guide wheel (400) has at least one flow channel (410) for the flow of cleaned liquid.
2. The target material inner wall cleaning device according to claim 1, characterized in that, The second nozzle (220) is arranged in multiple rows at equal intervals, and each row of the second nozzle (220) is evenly distributed in a ring around the circumference of the second pipe assembly (200).
3. The target material inner wall cleaning device according to claim 1, characterized in that, The outer diameter of the third pipe assembly (300) is equal to the outer diameter of the guide wheel (400).
4. The target material inner wall cleaning device according to claim 1, characterized in that, The guide wheel (400) has a clearance opening (420), and the guide wheel (400) is fitted onto the second pipe assembly (200) through the clearance opening (420).
5. The target material inner wall cleaning device according to claim 1, characterized in that, The third pipe assembly (300) is provided with a plurality of liquid outlets (310), and the plurality of liquid outlets (310) are evenly distributed in a ring about the axis of the third pipe assembly (300).