A method for continuous feeding of a chemical vapor deposition solid-state precursor

Abstract

The application discloses a kind of chemical vapor deposition solid-state precursor continuous feeding method, it is related to casting and experimental equipment technical field, the chemical vapor deposition solid-state precursor continuous feeding method is realized by solid-state precursor continuous feeding equipment, the solid-state precursor continuous feeding equipment includes shell, reaction kettle is fixedly arranged in the bottom of shell inside, controllable solid-state precursor volatile device is fixedly nested and arranged at the top of reaction kettle, sealing mechanism is arranged at the top of shell inside, accommodating mechanism is arranged below sealing mechanism, barrier mechanism is fixedly arranged at the bottom of accommodating mechanism, and the barrier mechanism is fixedly connected to the top of controllable solid-state precursor volatile device.The application is high in degree of automation and can realize raw material supply by low-position feeding mode, reduce feeding difficulty, save labor while shorten the time required for feeding, to further improve feeding efficiency.

Description

Technical Field

[0001] This invention relates to the field of casting and experimental equipment technology, and in particular to a method for continuous supply of solid precursors for chemical vapor deposition. Background Technology

[0002] Chemical vapor deposition of refractory metal carbides typically uses the corresponding metal halide as a precursor, which reacts with methane, propylene, or other carbon-containing precursors at high temperatures. In chemical vapor deposition, the precursor is deposited on the material surface through diffusion, convection, and other means.

[0003] The invention patent with authorization announcement number CN 103122457 B discloses a continuous supply system for solid precursors for chemical vapor deposition, which consists of a vacuum chamber, a vacuum unit, a chemical exhaust gas adsorber, and a chemical exhaust gas processor. The vacuum isolation chamber is located at the top of the vacuum chamber, and the crucible and heating element are embedded in the vacuum chamber. The outer wall of the vacuum chamber has an air inlet that is connected to a controllable solid precursor volatilization device. The lower end of the vacuum chamber has a vacuum port that is connected to the chemical exhaust gas adsorber. The chemical exhaust gas adsorber is connected to the chemical exhaust gas processor through the vacuum unit.

[0004] This system enables continuous supply of solid precursors. By adjusting the position of the charge in the furnace through a servo mechanism, the volatilization temperature of the solid precursors can be precisely controlled, thereby precisely controlling the precursor flow rate. The supply system has a simple structure and is easily compatible with commonly used chemical vapor deposition equipment. It effectively improves the controllable volatility, continuity, and uniformity of solid precursors in the chemical vapor deposition process, ensuring the deposition of refractory metal carbide coatings or substrates.

[0005] However, after practical application by those skilled in the art, the above system still has some shortcomings. The most obvious one is that due to the structural limitations of the equipment, the addition of solid precursors can only be done by top feeding, i.e., high-level feeding. Manual feeding is difficult. At the same time, during the addition of solid precursors, technicians need to frequently operate the vacuum valve and vacuum pump, which is not only cumbersome but also wastes too much manpower and has a significant impact on feeding efficiency.

[0006] Therefore, it is necessary to invent a method for continuous supply of solid precursors for chemical vapor deposition to solve the above problems. Summary of the Invention

[0007] The purpose of this invention is to provide a method for continuous supply of solid precursors for chemical vapor deposition, so as to solve the problems mentioned in the background art.

[0008] To achieve the above objectives, the present invention provides the following technical solution: a continuous supply method for solid precursors for chemical vapor deposition (CVD), wherein the continuous supply method for solid precursors for CVD is implemented by a continuous supply device for solid precursors, the continuous supply device for solid precursors includes a housing, a reaction vessel is fixedly disposed at the bottom of the inner side of the housing, a controllable solid precursor volatilization device is fixedly nested at the top of the reaction vessel, a sealing mechanism is disposed at the top of the inner side of the housing, a receiving mechanism is disposed directly below the sealing mechanism, a blocking mechanism is fixedly disposed at the bottom of the receiving mechanism, and the blocking mechanism is fixedly connected to the top of the controllable solid precursor volatilization device;

[0009] The sealing mechanism includes a reciprocating screw, a drive motor, an outer sleeve, a first spring, an inner sleeve, a sealing cover plate, a side plate, and a trigger rod;

[0010] The reciprocating screw penetrates the inner wall of the outer casing and extends to the top of the outer casing. The drive motor is fixedly installed at the top of the outer casing and is connected to the reciprocating screw in a transmission manner. The outer sleeve, the first spring, the inner sleeve, and the sealing cover are sequentially sleeved on the outside of the reciprocating screw from top to bottom. The outer sleeve is connected to the reciprocating screw in a transmission manner. The first spring is fixedly connected between the outer sleeve and the inner sleeve. The inner sleeve is slidably sleeved on the outside of the reciprocating screw and is slidably nested on the inside of the outer sleeve in a vertical direction. The sealing cover is fixedly installed at the bottom end of the inner sleeve. The side plate is fixedly installed on the right side of the outer sleeve. The trigger rod is fixedly installed at the bottom of the side plate.

[0011] Preferably, the receiving mechanism includes a storage hopper, a sealing baffle, a bottom plate, a second spring, an L-shaped sealing plate, and a top rod.

[0012] Preferably, the sealing baffle is fixedly installed on the top of the inner side of the storage hopper, the bottom plate is fixedly installed on the inner wall of the storage hopper, the second spring is fixedly installed on the top of the bottom plate, the L-shaped sealing plate is fixedly connected to the top of the second spring, and the top rod is fixedly installed on the top of the L-shaped sealing plate.

[0013] Preferably, the blocking mechanism includes a feeding pipe, a feeding plate, a first feeding channel, a blocking plate, a second feeding channel, a trigger channel, an extension plate, and a third spring.

[0014] Preferably, the feeding pipe is fixedly connected between the controllable solid precursor volatilization device and the storage hopper, the feeding plate is fixedly disposed inside the feeding pipe, the first feeding channel passes through the feeding plate in a vertical direction, the baffle plate is slidably disposed through the side of the feeding pipe, the second feeding channel and the trigger channel pass through the baffle plate in a vertical direction from left to right, the extension plate is fixedly disposed at the bottom of the baffle plate, and the third spring is fixedly connected between the extension plate and the feeding pipe.

[0015] Preferably, the feeding and vacuuming mechanism includes a feeding tank, a vacuum pump, a confluence pipe, a first valve, a diverter pipe, and a second valve.

[0016] Preferably, the feeding hopper is located at the bottom inside the outer shell, the vacuum pump is fixedly installed at the top of the outer shell, the output end of the confluence pipe is fixedly connected to the input end of the vacuum pump, the first input end of the confluence pipe extends to the bottom inside the feeding hopper and is fixedly connected to the first valve, the second input end of the confluence pipe is fixedly installed through the top of the side of the storage hopper, the input end of the diverter pipe is fixedly connected to the output end of the vacuum pump, the first output end of the diverter pipe is fixedly connected to the second valve, and the second output end of the diverter pipe is connected to the top of the reciprocating screw through a rotary joint.

[0017] Preferably, the method specifically includes the following steps:

[0018] S1. The raw material is added to the feed hopper by bottom feeding, i.e., low-level feeding. Then, the vacuum pump and drive motor are started. Since the second input end of the confluence pipe is blocked by the L-shaped sealing plate, the raw material inside the feed hopper is forced open by the negative pressure and enters the confluence pipe. Then, it enters the reciprocating screw through the diversion pipe and finally falls into the storage hopper through the reciprocating screw for storage.

[0019] S2. After the drive motor starts, it drives the reciprocating screw to rotate continuously. When the reciprocating screw rotates, it drives the outer sleeve to move continuously downward. When the outer sleeve moves downward, it drives the sealing cover plate to move downward synchronously through the first spring and the inner sleeve, and drives the trigger rod to move downward synchronously through the side plate.

[0020] S3. When the outer sleeve descends to the first threshold distance, the bottom of the sealing cover plate contacts the top of the top rod. Subsequently, as the sealing cover plate continues to descend, the top rod is pressed and drives the L-shaped sealing plate to descend synchronously. During the descent of the L-shaped sealing plate, the second spring is continuously compressed.

[0021] S4. When the outer tube descends to the second threshold, the sealing cover is attached to the top of the storage hopper. At this time, the sealing cover blocks the top opening of the storage hopper, the sealing baffle blocks the bottom opening of the sealing cover, and the L-shaped sealing plate releases the blockage on the second input end of the merging pipe. The merging pipe no longer draws the raw material inside the feeding bucket, but instead continuously draws the air inside the storage hopper through its second input end connected to the storage hopper, and then inputs it into the diversion pipe, and then opens the second valve to discharge it.

[0022] S5. At this point, due to the obstruction of the storage hopper, the inner sleeve and the sealing cover cannot continue to descend. Subsequently, as the outer sleeve continues to descend, the first spring is continuously compressed by the inner sleeve, and at the same time, the outer sleeve continues to drive the trigger rod to descend through the side plate.

[0023] S6. When the outer tube descends to the third threshold, the bottom of the trigger rod contacts the inner wall of the trigger channel. As the trigger rod continues to descend, it drives the baffle plate to move to the left through the trigger channel. During the leftward movement of the baffle plate, the third spring is continuously stretched through the extension plate, which in turn drives the second feeding channel to move closer to the first feeding channel.

[0024] S7. When the outer tube descends to the fourth threshold, the trigger rod passes through the trigger channel and moves to below the baffle plate. At this time, the second feeding channel and the first feeding channel are collinear. The raw material inside the storage hopper passes through the second feeding channel and the first feeding channel under the action of gravity and falls into the controllable solid precursor volatilization device to achieve feeding.

[0025] S8. When the outer sleeve descends to the fifth threshold, the outer sleeve moves to the lowest end of the reciprocating thread on the outside of the reciprocating screw. Subsequently, as the reciprocating screw continues to rotate, the outer sleeve moves upward and resets. During the upward reset process of the outer sleeve, the blocking mechanism, the receiving mechanism, and the sealing mechanism reset in sequence.

[0026] S9. When the outer sleeve moves up to the sixth threshold, the outer sleeve reaches the top of the reciprocating thread on the outside of the reciprocating screw and reaches the initial position. As the reciprocating screw continues to rotate, the above operation is repeated.

[0027] The technical effects and advantages of this invention are as follows:

[0028] This invention incorporates a sealing mechanism, a receiving mechanism, a blocking mechanism, and a feeding and vacuuming mechanism. The feeding and vacuuming mechanism lifts the raw material, which, in conjunction with the sealing mechanism, is fed into the receiving mechanism. The sealing mechanism then triggers and seals the receiving mechanism, preventing the feeding and vacuuming mechanism from feeding raw material while continuously vacuuming the receiving mechanism. Finally, the sealing mechanism, limited by the receiving mechanism, triggers the blocking mechanism, thus automatically outputting the raw material from the receiving mechanism. Compared to similar devices and methods in the prior art, this invention offers a high degree of automation and allows for low-level feeding, reducing feeding difficulty, saving manpower, shortening feeding time, and improving feeding efficiency. Attached Figure Description

[0029] Figure 1 This is a schematic diagram of the overall front cross-sectional structure of the present invention.

[0030] Figure 2 This is a frontal cross-sectional view of the sealing mechanism of the present invention.

[0031] Figure 3 This is a frontal cross-sectional view of the receiving mechanism of the present invention.

[0032] Figure 4This is a frontal cross-sectional view of the barrier mechanism of the present invention.

[0033] Figure 5 This is a front view cross-sectional schematic diagram of the feeding and vacuuming mechanism of the present invention.

[0034] In the diagram: 1. Outer shell; 11. Reactor; 12. Controllable solid precursor volatilization device; 2. Sealing mechanism; 21. Reciprocating screw; 22. Drive motor; 23. Outer sleeve; 24. First spring; 25. Inner sleeve; 26. Sealing cover plate; 27. Side plate; 28. Trigger rod; 3. Receiving mechanism; 31. Storage hopper; 32. Sealing baffle; 33. Bottom plate; 34. Second spring; 35. L-shaped sealing plate; 36. Top rod; 4. Barrier mechanism; 41. Feeding pipe; 42. Feeding plate; 43. First feeding channel; 44. Barrier plate; 45. Second feeding channel; 46. Trigger channel; 47. Extension plate; 48. Third spring; 5. Feeding vacuum mechanism; 51. Feeding bucket; 52. Vacuum pump; 53. Merging pipe; 54. First valve; 55. Diverting pipe; 56. Second valve. Detailed Implementation

[0035] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0036] Example 1

[0037] This invention provides, for example Figure 1-5 The diagram illustrates a continuous supply method for solid precursors in chemical vapor deposition (CVD). This method is implemented using a continuous solid precursor supply device, which includes a housing 1. A reaction vessel 11 is fixedly disposed at the bottom inner side of the housing 1. A controllable solid precursor volatilization device 12 is fixedly nested at the top of the reaction vessel 11. A sealing mechanism 2 is disposed at the top inner side of the housing 1. A receiving mechanism 3 is disposed directly below the sealing mechanism 2. A barrier mechanism 4 is fixedly disposed at the bottom of the receiving mechanism 3 and is fixedly connected to the top of the controllable solid precursor volatilization device 12.

[0038] like Figure 2As shown, the sealing mechanism 2 includes a reciprocating screw 21, a drive motor 22, an outer sleeve 23, a first spring 24, an inner sleeve 25, a sealing cover plate 26, a side plate 27, and a trigger rod 28. The reciprocating screw 21 penetrates the inner wall of the outer casing 1 and extends to the top of the outer casing 1. The drive motor 22 is fixedly mounted on the top of the outer casing 1 and is connected to the reciprocating screw 21 in a transmission manner. The outer sleeve 23, the first spring 24, the inner sleeve 25, and the sealing cover plate 26 are sequentially sleeved from top to bottom. The outer sleeve 23 is located outside the reciprocating screw 21 and is connected to the reciprocating screw 21 in a transmission manner. The first spring 24 is fixedly connected between the outer sleeve 23 and the inner sleeve 25. The inner sleeve 25 is slidably sleeved on the outside of the reciprocating screw 21 and is slidably nested on the inside of the outer sleeve 23 in a vertical direction. The sealing cover plate 26 is fixedly installed at the bottom end of the inner sleeve 25. The side plate 27 is fixedly installed on the right side of the outer sleeve 23. The trigger rod 28 is fixedly installed at the bottom of the side plate 27.

[0039] like Figure 3 As shown, the receiving mechanism 3 includes a storage hopper 31, a sealing baffle 32, a bottom plate 33, a second spring 34, an L-shaped sealing plate 35, and a top rod 36. The sealing baffle 32 is fixedly disposed on the top inner side of the storage hopper 31, the bottom plate 33 is fixedly disposed on the inner wall of the storage hopper 31, the second spring 34 is fixedly disposed on the top of the bottom plate 33, the L-shaped sealing plate 35 is fixedly connected to the top of the second spring 34, and the top rod 36 is fixedly disposed on the top of the L-shaped sealing plate 35.

[0040] By setting up the sealing mechanism 2 and the receiving mechanism 3, the reciprocating screw 21 is continuously rotated after the drive motor 22 starts. When the reciprocating screw 21 rotates, it drives the outer sleeve 23 to move continuously downward. When the outer sleeve 23 moves downward, the sealing cover plate 26 moves downward synchronously through the first spring 24 and the inner sleeve 25. The trigger rod 28 moves downward synchronously through the side plate 27. After the bottom of the sealing cover plate 26 contacts the top of the top rod 36, as the sealing cover plate 26 continues to descend, the top rod 36 is pressed and drives the L-shaped sealing plate 35 to descend synchronously. During the descent of the L-shaped sealing plate 35, the second spring 34 is continuously compressed. The sealing cover plate 26 is attached to the top of the storage hopper 31. At this time, the sealing cover plate 26 seals the top opening of the storage hopper 31, and the sealing baffle 32 seals the bottom opening of the sealing cover plate 26. The L-shaped sealing plate 35 releases the seal on the second input end of the confluence pipe 53.

[0041] like Figure 4As shown, the blocking mechanism 4 includes a feeding pipe 41, a feeding plate 42, a first feeding channel 43, a blocking plate 44, a second feeding channel 45, a triggering channel 46, an extension plate 47, and a third spring 48. The feeding pipe 41 is fixedly connected between the controllable solid precursor evaporation device 12 and the storage hopper 31. The feeding plate 42 is fixedly disposed inside the feeding pipe 41. The first feeding channel 43 passes through the feeding plate 42 vertically. The blocking plate 44 is slidably disposed through the side of the feeding pipe 41. The second feeding channel 45 and the triggering channel 46 pass through the blocking plate 44 vertically from left to right. The extension plate 47 is fixedly disposed at the bottom of the blocking plate 44. The third spring 48 is fixedly connected between the extension plate 47 and the feeding pipe 41.

[0042] By setting the above structure, after the bottom end of the trigger rod 28 contacts the inner wall of the trigger channel 46, as the trigger rod 28 continues to descend, the trigger rod 28 drives the baffle plate 44 to move to the left through the trigger channel 46. During the leftward movement of the baffle plate 44, the third spring 48 is continuously stretched through the extension plate 47, which at the same time drives the second feeding channel 45 to move closer to the first feeding channel 43. When the trigger rod 28 passes through the trigger channel 46 and moves to below the baffle plate 44, the second feeding channel 45 and the first feeding channel 43 are collinear. Under the action of gravity, the raw material inside the storage hopper 31 passes through the second feeding channel 45 and the first feeding channel 43 and falls into the controllable solid precursor volatilization device 12 to achieve automatic feeding.

[0043] like Figure 5 As shown, the feeding and vacuuming mechanism 5 includes a feeding hopper 51, a vacuum pump 52, a confluence pipe 53, a first valve 54, a diverter pipe 55, and a second valve 56. The feeding hopper 51 is located at the bottom inside the outer casing 1. The vacuum pump 52 is fixedly installed at the top of the outer casing 1. The output end of the confluence pipe 53 is fixedly connected to the input end of the vacuum pump 52. The first input end of the confluence pipe 53 extends to the bottom inside the feeding hopper 51 and is fixedly connected to the first valve 54. The second input end of the confluence pipe 53 is fixedly installed through the top of the side of the storage hopper 31. The input end of the diverter pipe 55 is fixedly connected to the output end of the vacuum pump 52. The first output end of the diverter pipe 55 is fixedly connected to the second valve 56. The second output end of the diverter pipe 55 is connected to the top end of the reciprocating screw 21 through a rotary joint.

[0044] By setting up the above structure, it is possible to add raw materials into the feeding hopper 51 by bottom feeding, that is, low-level feeding. Then, the vacuum pump 52 is started. Since the second input end of the confluence pipe 53 is blocked by the L-shaped sealing plate 35, the raw materials inside the feeding hopper 51 are forced open by the first valve 54 under the action of negative pressure and enter the confluence pipe 53. Then, they enter the reciprocating screw 21 through the diverter pipe 55 and finally fall into the storage hopper 31 through the reciprocating screw 21 for storage. When the second input end of the confluence pipe 53 is no longer blocked, the confluence pipe 53 no longer sucks the raw materials inside the feeding hopper 51. Instead, it continuously sucks the air inside the storage hopper 31 through its second input end connected to the storage hopper 31, and then inputs it into the diverter pipe 55, and then opens the second valve 56 to discharge it.

[0045] Example 2

[0046] The method specifically includes the following steps:

[0047] S1. The raw material is added to the feed hopper 51 by bottom feeding, i.e., low-level feeding. Then, the vacuum pump 52 and drive motor 22 are started. Since the second input end of the confluence pipe 53 is blocked by the L-shaped sealing plate 35, the raw material inside the feed hopper 51 is forced open by the first valve 54 under the action of negative pressure and enters the confluence pipe 53. Then, it enters the reciprocating screw 21 through the diversion pipe 55 and finally falls into the storage hopper 31 through the reciprocating screw 21 for storage.

[0048] S2. After the drive motor 22 starts, it drives the reciprocating screw 21 to rotate continuously. When the reciprocating screw 21 rotates, it drives the outer sleeve 23 to move continuously downward. When the outer sleeve 23 moves downward, it drives the sealing cover plate 26 to move downward synchronously through the first spring 24 and the inner sleeve 25, and drives the trigger rod 28 to move downward synchronously through the side plate 27.

[0049] S3. When the outer sleeve 23 descends to the first threshold distance, the bottom of the sealing cover 26 contacts the top of the top rod 36. Subsequently, as the sealing cover 26 continues to descend, the top rod 36 is pressed and drives the L-shaped sealing plate 35 to descend synchronously. During the descent of the L-shaped sealing plate 35, the second spring 34 is continuously compressed.

[0050] S4. When the outer sleeve 23 descends to the second threshold, the sealing cover 26 adheres to the top of the storage hopper 31. At this time, the sealing cover 26 blocks the top opening of the storage hopper 31, the sealing baffle 32 blocks the bottom opening of the sealing cover 26, and the L-shaped sealing plate 35 releases the blockage on the second input end of the confluence pipe 53. The confluence pipe 53 no longer draws the raw material inside the feed hopper 51, but instead continuously draws the air inside the storage hopper 31 through its second input end connected to the storage hopper 31, and then inputs it into the diversion pipe 55, and then opens the second valve 56 to discharge it.

[0051] S5. At this time, due to the obstruction of the storage hopper 31, the inner sleeve 25 and the sealing cover plate 26 cannot continue to descend. Subsequently, as the outer sleeve 23 continues to descend, the first spring 24 is continuously compressed by the inner sleeve 25. At the same time, the outer sleeve 23 continues to drive the trigger rod 28 to descend through the side plate 27.

[0052] S6. When the outer tube 23 descends to the third threshold, the bottom of the trigger rod 28 contacts the inner wall of the trigger channel 46. Subsequently, as the trigger rod 28 continues to descend, the trigger rod 28 drives the baffle plate 44 to move to the left through the trigger channel 46. During the leftward movement of the baffle plate 44, the third spring 48 is continuously stretched through the extension plate 47, which in turn drives the second feeding channel 45 to move closer to the first feeding channel 43.

[0053] S7. When the outer tube 23 descends to the fourth threshold, the trigger rod 28 passes through the trigger channel 46 and moves to below the baffle plate 44. At this time, the second feeding channel 45 is collinear with the first feeding channel 43. The raw material inside the storage hopper 31 passes through the second feeding channel 45 and the first feeding channel 43 under the action of gravity and falls into the controllable solid precursor volatilization device 12 to achieve feeding.

[0054] S8. When the outer sleeve 23 descends to the fifth threshold, the outer sleeve 23 moves to the lowest end of the reciprocating thread on the outside of the reciprocating screw 21. Subsequently, as the reciprocating screw 21 continues to rotate, the outer sleeve 23 moves upward and resets. During the upward reset process of the outer sleeve 23, the blocking mechanism 4, the receiving mechanism 3 and the sealing mechanism 2 are reset in sequence.

[0055] S9. When the outer sleeve 23 moves upward to the sixth threshold, the outer sleeve 23 reaches the top of the reciprocating thread on the outside of the reciprocating screw 21 and reaches the initial position. Subsequently, as the reciprocating screw 21 continues to rotate, the above operation is repeated.

[0056] Finally, it should be noted that the above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A method for continuous supply of solid precursors for chemical vapor deposition, characterized in that: The continuous supply method for solid precursors for chemical vapor deposition is implemented by a continuous supply device for solid precursors. The continuous supply device for solid precursors includes a shell (1), a reactor (11) is fixedly installed at the bottom inside the shell (1), a controllable solid precursor volatilization device (12) is fixedly nested at the top of the reactor (11), a sealing mechanism (2) is installed at the top inside the shell (1), a receiving mechanism (3) is installed directly below the sealing mechanism (2), a barrier mechanism (4) is fixedly installed at the bottom of the receiving mechanism (3), and the barrier mechanism (4) is fixedly connected to the top of the controllable solid precursor volatilization device (12). The sealing mechanism (2) includes a reciprocating screw (21), a drive motor (22), an outer sleeve (23), a first spring (24), an inner sleeve (25), a sealing cover plate (26), a side plate (27), and a trigger rod (28); The reciprocating screw (21) penetrates the inner wall of the outer shell (1) and extends to the top of the outer shell (1). The drive motor (22) is fixedly installed on the top of the outer shell (1) and is connected to the reciprocating screw (21) in a transmission connection. The outer sleeve (23), the first spring (24), the inner sleeve (25) and the sealing cover plate (26) are sequentially sleeved on the outside of the reciprocating screw (21) from top to bottom. The outer sleeve (23) is connected to the reciprocating screw (21) in a transmission connection. The first spring (24) is fixedly connected between the outer sleeve (23) and the inner sleeve (25). The inner sleeve (25) is slidably sleeved on the outside of the reciprocating screw (21) and is slidably nested on the inside of the outer sleeve (23) in a vertical direction. The sealing cover plate (26) is fixedly installed at the bottom of the inner sleeve (25). The side plate (27) is fixedly installed on the right side of the outer sleeve (23). The trigger rod (28) is fixedly installed at the bottom of the side plate (27). The receiving mechanism (3) includes a storage hopper (31), a sealing baffle (32), a bottom plate (33), a second spring (34), an L-shaped sealing plate (35), and a top rod (36); The sealing baffle (32) is fixedly installed on the top of the inner side of the storage hopper (31), the bottom plate (33) is fixedly installed on the inner wall of the storage hopper (31), the second spring (34) is fixedly installed on the top of the bottom plate (33), the L-shaped sealing plate (35) is fixedly connected to the top of the second spring (34), and the top rod (36) is fixedly installed on the top of the L-shaped sealing plate (35). The blocking mechanism (4) includes a feeding pipe (41), a feeding plate (42), a first feeding channel (43), a blocking plate (44), a second feeding channel (45), a trigger channel (46), an extension plate (47), and a third spring (48). The feeding pipe (41) is fixedly connected between the controllable solid precursor volatilization device (12) and the storage hopper (31). The feeding plate (42) is fixedly installed inside the feeding pipe (41). The first feeding channel (43) passes through the feeding plate (42) in a vertical direction. The barrier plate (44) is slidably installed on the side of the feeding pipe (41). The second feeding channel (45) and the trigger channel (46) pass through the barrier plate (44) in a vertical direction from left to right. The extension plate (47) is fixedly installed at the bottom of the barrier plate (44). The third spring (48) is fixedly connected between the extension plate (47) and the feeding pipe (41). The feeding vacuum mechanism (5) includes a feeding tank (51), a vacuum pump (52), a confluence pipe (53), a first valve (54), a diversion pipe (55), and a second valve (56); The feeding hopper (51) is located at the bottom inside the outer shell (1). The vacuum pump (52) is fixedly installed at the top of the outer shell (1). The output end of the confluence pipe (53) is fixedly connected to the input end of the vacuum pump (52). The first input end of the confluence pipe (53) extends to the bottom inside the feeding hopper (51) and is fixedly connected to the first valve (54). The second input end of the confluence pipe (53) is fixedly installed through the top of the side of the storage hopper (31). The input end of the diverter pipe (55) is fixedly connected to the output end of the vacuum pump (52). The first output end of the diverter pipe (55) is fixedly connected to the second valve (56). The second output end of the diverter pipe (55) is connected to the top of the reciprocating screw (21) through a rotary joint.

2. The method for continuous supply of solid precursors for chemical vapor deposition according to claim 1, characterized in that, The method specifically includes the following steps: S1. The raw material is added to the feed hopper (51) by bottom feeding, i.e., low-level feeding. Then, the vacuum pump (52) and drive motor (22) are started. Since the second input end of the confluence pipe (53) is blocked by the L-shaped sealing plate (35), the raw material inside the feed hopper (51) is pushed open by the first valve (54) under the negative pressure and enters the confluence pipe (53). Then, it enters the reciprocating screw (21) through the diversion pipe (55) and finally falls into the storage hopper (31) through the reciprocating screw (21) for storage. S2. After the drive motor (22) starts, it drives the reciprocating screw (21) to rotate continuously. When the reciprocating screw (21) rotates, it drives the outer sleeve (23) to move continuously downward. When the outer sleeve (23) moves downward, it drives the sealing cover plate (26) to move downward synchronously through the first spring (24) and the inner sleeve (25). It drives the trigger rod (28) to move downward synchronously through the side plate (27). S3. When the outer sleeve (23) descends to the first threshold, the bottom of the sealing cover (26) contacts the top of the top rod (36). Subsequently, as the sealing cover (26) continues to descend, the top rod (36) is pressed and drives the L-shaped sealing plate (35) to descend synchronously. During the descent of the L-shaped sealing plate (35), the second spring (34) is continuously compressed. S4. When the outer sleeve (23) descends to the second threshold, the sealing cover (26) is attached to the top of the storage hopper (31). At this time, the sealing cover (26) blocks the top opening of the storage hopper (31), the sealing baffle (32) blocks the bottom opening of the sealing cover (26), and the L-shaped sealing plate (35) releases the blockage of the second input end of the confluence pipe (53). The confluence pipe (53) no longer draws the raw material inside the feed bucket (51), but continuously draws the air inside the storage hopper (31) through its second input end connected to the storage hopper (31), and then inputs it into the diversion pipe (55), and then opens the second valve (56) to discharge it. S5. At this time, due to the obstruction of the storage hopper (31), the inner sleeve (25) and the sealing cover (26) cannot continue to descend. Subsequently, as the outer sleeve (23) continues to descend, the first spring (24) is continuously compressed by the inner sleeve (25), and at the same time, the outer sleeve (23) continues to drive the trigger rod (28) to descend through the side plate (27). S6. When the outer tube (23) descends to the third threshold, the bottom of the trigger rod (28) contacts the inner wall of the trigger channel (46). As the trigger rod (28) continues to descend, the trigger rod (28) drives the baffle plate (44) to move to the left through the trigger channel (46). During the leftward movement of the baffle plate (44), the third spring (48) is continuously stretched through the extension plate (47), and at the same time, the second feeding channel (45) moves closer to the first feeding channel (43). S7. When the outer tube (23) descends to the fourth threshold, the trigger rod (28) passes through the trigger channel (46) and moves to below the baffle plate (44). At this time, the second feeding channel (45) is collinear with the first feeding channel (43). The raw material inside the storage hopper (31) passes through the second feeding channel (45) and the first feeding channel (43) under the action of gravity and falls into the controllable solid precursor volatilization device (12) to realize feeding. S8. When the outer tube (23) descends to the fifth threshold, the outer tube (23) moves to the lowest end of the reciprocating thread outside the reciprocating screw (21). Subsequently, as the reciprocating screw (21) continues to rotate, the outer tube (23) moves upward and resets. During the upward reset process of the outer tube (23), the blocking mechanism (4), the receiving mechanism (3) and the sealing mechanism (2) are reset one after another. S9. When the outer sleeve (23) moves up to the sixth threshold, the outer sleeve (23) reaches the top of the reciprocating thread on the outside of the reciprocating screw (21) and reaches the initial position. As the reciprocating screw (21) continues to rotate, the above operation is repeated.

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