A positioning control method for a piezoelectric positioning stage

Abstract

The present invention provides a positioning control method for a piezoelectric positioning stage, belonging to the technical field of position control. The method specifically comprises: determining waveform similarity between a displacement fluctuation signal and different preset fluctuation waveforms based on a displacement fluctuation signal, determining weight values ​​of the different preset fluctuation waveforms based on the waveform similarity, obtaining position tracking errors of different nonlinear tracking control models under different preset fluctuation waveforms, determining tracking accuracies of the different nonlinear tracking control models in combination with the weight values ​​of the different preset fluctuation waveforms, determining a screening control model of the nonlinear control model based on the tracking accuracy, and determining a displacement compensation amount of the piezoelectric positioning stage according to the screening control model, thereby further improving the reliability of position control of the piezoelectric positioning stage.

Description

Technical Field

[0001] The present invention belongs to the technical field of position control, and in particular relates to a positioning control method for a piezoelectric positioning stage. Background Art

[0002] Piezoelectric positioning stages, due to their high output force, high resolution, and fast response speed, are finding increasing application in key areas such as microassembly, scanning probe microscopy, piezoelectric fast tool servo, and biological cell micromanipulation. However, inherent nonlinearities and uncertainties such as hysteresis and creep negatively impact positioning and tracking performance, making positioning control of piezoelectric positioning stages a pressing technical challenge.

[0003] To address the above technical issues, existing technologies, such as the journal article "RBF Non-singular Fast Terminal Sliding Mode Tracking Control of a Piezoelectric Positioning Platform," adaptively model the piezoelectric positioning platform and effectively track time-varying sinusoidal signals based on the designed non-singular fast terminal sliding mode controller. However, these technologies still present the following technical issues:

[0004] When the piezoelectric positioning stage undergoes displacement changes of different amplitudes, there will be a certain degree of difference in the signal changes of the piezoelectric device. Therefore, if the tracking control method of the differentiated position controller cannot be adopted in combination with the signal changes of the piezoelectric device, the positioning processing efficiency of the piezoelectric positioning stage will be difficult to meet the requirements.

[0005] In response to the above technical problems, the present invention provides a positioning control method for a piezoelectric positioning stage. Summary of the Invention

[0006] To achieve the purpose of the present invention, the present invention adopts the following technical solutions:

[0007] According to one aspect of the present invention, a method for dividing product modules based on a clustering algorithm is provided.

[0008] A positioning control method for a piezoelectric positioning stage, characterized by comprising:

[0009] S1: obtaining a displacement fluctuation signal of the piezoelectric positioning stage in real time through the piezoelectric device of the piezoelectric positioning stage, determining a comprehensive fluctuation amount of the displacement fluctuation signal according to the waveform characteristics and displacement amplitude characteristics of the displacement fluctuation signal, and judging whether the comprehensive fluctuation amount meets the requirements. If so, determining the displacement compensation amount of the piezoelectric positioning stage through a PID tracking control model; if not, proceeding to the next step;

[0010] S2: determining waveform similarities between the displacement fluctuation signal and different preset fluctuation waveforms based on the displacement fluctuation signal, and determining weight values ​​of different preset fluctuation waveforms based on the waveform similarities;

[0011] S3 obtains position tracking errors of different nonlinear tracking control models under different preset fluctuation waveforms, and determines the tracking accuracy of different nonlinear tracking control models in combination with weight values ​​of different preset fluctuation waveforms. If no nonlinear tracking control model with a tracking accuracy greater than the preset accuracy exists, proceeds to the next step.

[0012] S4 determines a screening control model of the nonlinear control model based on the tracking accuracy, and determines the displacement compensation amount of the piezoelectric positioning stage according to the screening control model.

[0013] A further technical solution is that the displacement fluctuation signal is determined based on a fluctuation signal of an output voltage of a piezoelectric device of the piezoelectric positioning stage.

[0014] A further technical solution is that the waveform characteristics include skewness, slope and kurtosis.

[0015] A further technical solution is that the displacement amplitude characteristics include the maximum value and average value of the displacement amplitude, and the duration and number of times the displacement amplitude is greater than a preset amplitude.

[0016] A further technical solution is that the preset fluctuation waveform includes a triangular wave and a sine wave with different amplitudes and frequencies.

[0017] On the other hand, the present invention provides a computer device comprising: a memory and a processor in communication connection, and a computer program stored in the memory and capable of running on the processor, characterized in that when the processor runs the computer program, it executes the above-mentioned positioning control method for a piezoelectric positioning stage.

[0018] The beneficial effects of the present invention are:

[0019] 1. The comprehensive fluctuation amount of the displacement fluctuation signal is determined based on the waveform characteristics and displacement amplitude characteristics of the displacement fluctuation signal, which realizes the accurate evaluation of the fluctuation of the displacement fluctuation signal from two perspectives: the change of the waveform and the change of the displacement amplitude. Therefore, the PID tracking control model is used to output the displacement compensation amount when the fluctuation amplitude is small, thereby improving the efficiency of the tracking control processing.

[0020] 2. The tracking accuracy of different nonlinear tracking control models is determined by the position tracking error and weight value of the nonlinear tracking control model under different preset fluctuation waveforms. This not only takes into account the similarity of different preset fluctuation waveforms, but also realizes an accurate evaluation of the tracking accuracy of different nonlinear tracking control models by further combining the position tracking error under different preset fluctuation waveforms, and also lays the foundation for further improving the accuracy of the displacement compensation of the piezoelectric positioning table.

[0021] 3. The displacement compensation amount of the piezoelectric positioning stage is determined according to the screening control model, which realizes the screening of screening control models with higher tracking accuracy from the perspective of tracking accuracy. This not only reduces the difficulty of determining the displacement compensation amount of the piezoelectric positioning stage, but also further improves the accuracy of the position compensation amount.

[0022] Other features and advantages will be described in the following description, and in part will become apparent from the description, or understood by practicing the invention. The purpose and other advantages of the invention are realized and obtained by the structures particularly pointed out in the description and the drawings.

[0023] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, preferred embodiments are given below and described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] The above and other features and advantages of the present invention will become more apparent by describing in detail exemplary embodiments thereof with reference to the accompanying drawings.

[0025] Figure 1 is a flow chart of a positioning control method for a piezoelectric positioning stage;

[0026] Figure 2 is a flow chart of a method for determining a comprehensive fluctuation amount of a displacement fluctuation signal;

[0027] Figure 3 This is a flowchart of a method for determining waveform similarity. DETAILED DESCRIPTION

[0028] Example embodiments will now be described more fully with reference to the accompanying drawings. However, example embodiments can be embodied in many forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete and will fully convey the concepts of the example embodiments to those skilled in the art. Like reference numerals in the figures represent like or similar structures, and thus their detailed description will be omitted.

[0029] The terms "a", "an", "the", and "said" are used to indicate the presence of one or more elements / components / etc.; the terms "including" and "having" are used to express an open-ended inclusive meaning and mean that additional elements / components / etc. may be present in addition to the listed elements / components / etc.

[0030] Example 1

[0031] To solve the above problems, according to one aspect of the present invention, Figure 1 According to one aspect of the present invention, a positioning control method for a piezoelectric positioning stage is provided, which is characterized by specifically comprising:

[0032] S1: obtaining a displacement fluctuation signal of the piezoelectric positioning stage in real time through the piezoelectric device of the piezoelectric positioning stage, determining a comprehensive fluctuation amount of the displacement fluctuation signal according to the waveform characteristics and displacement amplitude characteristics of the displacement fluctuation signal, and judging whether the comprehensive fluctuation amount meets the requirements. If so, determining the displacement compensation amount of the piezoelectric positioning stage through a PID tracking control model; if not, proceeding to the next step;

[0033] Furthermore, the displacement fluctuation signal is determined based on a fluctuation signal of an output voltage of a piezoelectric device of the piezoelectric positioning stage.

[0034] Specifically, the waveform characteristics include skewness, slope, and kurtosis.

[0035] It should be further explained that the displacement amplitude characteristics include the maximum value and average value of the displacement amplitude, and the duration and number of times the displacement amplitude is greater than the preset amplitude.

[0036] In one possible embodiment, Figure 2 As shown, the method for determining the comprehensive fluctuation amount of the displacement fluctuation signal is:

[0037] Determining the maximum value and average value of the displacement amplitude of the displacement fluctuation signal, and the duration and number of times the displacement amplitude is greater than a preset amplitude based on the displacement amplitude characteristics of the displacement fluctuation signal, and determining the comprehensive amplitude variation of the displacement fluctuation signal based on the maximum value and average value of the displacement amplitude of the displacement fluctuation signal, and the duration and number of times the displacement amplitude is greater than the preset amplitude;

[0038] Determining the skewness and kurtosis of the displacement fluctuation signal based on the waveform characteristics of the displacement fluctuation signal, and determining the comprehensive waveform variation of the displacement fluctuation signal based on the variation data of the slope of the displacement fluctuation signal;

[0039] The comprehensive fluctuation amount of the displacement fluctuation signal is determined based on the comprehensive amplitude variation amount and the comprehensive waveform variation amount of the displacement fluctuation signal.

[0040] Furthermore, when the comprehensive fluctuation amount of the displacement fluctuation signal is within a preset fluctuation range, it is determined that the comprehensive fluctuation amount meets the requirement.

[0041] In another possible embodiment, the method for determining the comprehensive fluctuation amount of the displacement fluctuation signal is:

[0042] determining a maximum value of the displacement amplitude of the displacement fluctuation signal based on the displacement amplitude characteristic of the displacement fluctuation signal, and judging whether the maximum value of the displacement amplitude meets the requirement; if so, determining that the comprehensive fluctuation amount meets the requirement; if not, proceeding to the next step;

[0043] The number of times the displacement amplitude of the displacement fluctuation signal is greater than the preset amplitude is used as the amplitude deviation number, and the amplitude variation of different amplitude deviation numbers is determined based on the duration of the displacement amplitude greater than the preset amplitude for different amplitude deviation numbers and the displacement amplitude at different moments, and it is judged whether there are amplitude deviation numbers whose amplitude variation does not meet the requirements. If so, the process proceeds to the next step; if not, it is determined that the comprehensive fluctuation amount meets the requirements;

[0044] Determining the comprehensive amplitude variation of the displacement fluctuation signal based on the amplitude variation of different amplitude deviation times, the amplitude deviation times at which the amplitude variation does not meet the requirements, and the maximum displacement amplitude of the displacement fluctuation signal, and judging whether the comprehensive amplitude variation of the displacement fluctuation signal meets the requirements; if so, proceeding to the next step; if not, determining that the comprehensive fluctuation does not meet the requirements;

[0045] The skewness and kurtosis of the displacement fluctuation signal are determined by the waveform characteristics of the displacement fluctuation signal, and the comprehensive waveform variation of the displacement fluctuation signal is determined in combination with the change data of the slope of the displacement fluctuation signal. The comprehensive fluctuation amount of the displacement fluctuation signal is determined based on the comprehensive amplitude variation and the comprehensive waveform variation of the displacement fluctuation signal.

[0046] In another possible embodiment, the method for determining the comprehensive fluctuation amount of the displacement fluctuation signal is:

[0047] determining a maximum value of the displacement amplitude of the displacement fluctuation signal based on a displacement amplitude characteristic of the displacement fluctuation signal, and determining that the comprehensive fluctuation amount meets the requirement when the maximum value of the displacement amplitude meets the requirement;

[0048] When the maximum value of the displacement amplitude does not meet the requirement, the number of times the displacement amplitude of the displacement fluctuation signal is greater than the preset amplitude is used as the number of amplitude deviations, and the amplitude variation of different amplitude deviations is determined based on the duration of the displacement amplitude being greater than the preset amplitude for different amplitude deviations and the displacement amplitude at different moments. When the number of amplitude deviations for which the amplitude variation does not meet the requirement is greater than the preset number, it is determined that the comprehensive fluctuation amount does not meet the requirement.

[0049] When the number of amplitude deviations at which the amplitude variation does not meet the requirement is not greater than a preset number, determining the comprehensive amplitude variation of the displacement fluctuation signal based on the amplitude variation at different amplitude deviation times, the number of amplitude deviations at which the amplitude variation does not meet the requirement, and the maximum value of the displacement amplitude of the displacement fluctuation signal;

[0050] Determining the skewness and kurtosis of the displacement fluctuation signal based on the waveform characteristics of the displacement fluctuation signal, and determining the comprehensive waveform variation of the displacement fluctuation signal based on the variation data of the slope of the displacement fluctuation signal;

[0051] When the amplitude comprehensive variation and the fluctuation comprehensive variation both meet the requirements, determining the comprehensive fluctuation of the displacement fluctuation signal according to the amplitude comprehensive variation and the waveform comprehensive variation of the displacement fluctuation signal;

[0052] When any one of the amplitude comprehensive variation and the fluctuation comprehensive variation does not meet the requirements, it is determined that the comprehensive fluctuation does not meet the requirements.

[0053] In another possible embodiment, the method for determining the comprehensive fluctuation amount of the displacement fluctuation signal is:

[0054] Determining the maximum value and average value of the displacement amplitude of the displacement fluctuation signal, and the duration and number of times the displacement amplitude is greater than a preset amplitude based on the displacement amplitude characteristics of the displacement fluctuation signal, and determining the comprehensive amplitude variation of the displacement fluctuation signal based on the maximum value and average value of the displacement amplitude of the displacement fluctuation signal, and the duration and number of times the displacement amplitude is greater than the preset amplitude, and judging whether the comprehensive amplitude variation meets the requirements; if so, proceeding to the next step; if not, determining that the comprehensive fluctuation does not meet the requirements;

[0055] Determining the skewness and kurtosis of the displacement fluctuation signal based on the waveform characteristics of the displacement fluctuation signal, and determining the waveform comprehensive variation of the displacement fluctuation signal in combination with the variation data of the slope of the displacement fluctuation signal, and judging whether the waveform comprehensive variation meets the requirements. If so, proceeding to the next step; if not, determining that the comprehensive variation does not meet the requirements;

[0056] The comprehensive fluctuation amount of the displacement fluctuation signal is determined based on the comprehensive amplitude variation amount and the comprehensive waveform variation amount of the displacement fluctuation signal.

[0057] S2: determining waveform similarities between the displacement fluctuation signal and different preset fluctuation waveforms based on the displacement fluctuation signal, and determining weight values ​​of different preset fluctuation waveforms based on the waveform similarities;

[0058] Furthermore, the preset fluctuation waveform includes triangular waves and sine waves with different amplitudes and frequencies.

[0059] In one possible embodiment, Figure 3 As shown, the method for determining the waveform similarity is:

[0060] Dividing the displacement fluctuation signal into different waveform periods according to a preset time interval, and performing waveform similarity analysis between the displacement fluctuation signal of the different fluctuation periods and a preset fluctuation waveform according to the displacement amplitude characteristics and waveform characteristics of the different waveform periods;

[0061] The waveform similarity between the displacement fluctuation signal and the preset fluctuation waveform is determined by the waveform similarity of different fluctuation periods.

[0062] In another possible embodiment, the method for determining the waveform similarity is:

[0063] Dividing the displacement fluctuation signal into different waveform periods according to a preset time interval, and performing waveform similarity analysis between the displacement fluctuation signal of the different fluctuation periods and a preset fluctuation waveform according to the displacement amplitude characteristics and waveform characteristics of the different waveform periods;

[0064] Determine the fluctuation period whose waveform similarity does not meet the requirement based on the waveform similarity of different fluctuation periods, and use it as the deviation fluctuation period, and judge whether the number of deviation fluctuation periods is greater than the preset number of periods. If so, determine the waveform similarity between the displacement fluctuation signal and the preset fluctuation waveform based on the number of deviation fluctuation periods. If not, proceed to the next step.

[0065] Determining the comprehensive waveform similarity of the deviation fluctuation period according to the waveform similarities of different deviation fluctuation periods and the number of deviation fluctuation periods, judging whether the comprehensive waveform similarity of the deviation fluctuation period meets the requirements; if so, determining the waveform similarity between the displacement fluctuation signal and the preset fluctuation waveform based on the comprehensive waveform similarity of the deviation fluctuation period; if not, proceeding to the next step;

[0066] The number of similar periods between the displacement waveform signal and the preset fluctuation waveform and the waveform similarity of different similar periods are determined by the waveform similarity of different fluctuation periods, and the waveform similarity of the displacement fluctuation signal and the preset fluctuation waveform is determined in combination with the comprehensive waveform similarity of the deviation fluctuation period.

[0067] In another possible embodiment, the method for determining the waveform similarity is:

[0068] S21 divides the displacement fluctuation signal into different waveform periods according to a preset time interval, and performs waveform similarity analysis between the displacement fluctuation signal of the different fluctuation periods and a preset fluctuation waveform according to the displacement amplitude characteristics and waveform characteristics of the different waveform periods;

[0069] S22 determines the similarity between the displacement waveform signal and the preset fluctuation waveform by the waveform similarity of different fluctuation cycles, and determines whether the number of similar cycles meets the requirements. If so, the process proceeds to the next step, and if not, the process proceeds to step S24;

[0070] S23: determining a fluctuation period whose waveform similarity does not meet the requirement based on the waveform similarities of different fluctuation periods, and using it as a deviation fluctuation period; determining a comprehensive waveform similarity of the deviation fluctuation period based on the waveform similarities of the different deviation fluctuation periods and the number of deviation fluctuation periods; judging whether the comprehensive waveform similarity of the deviation fluctuation period meets the requirement; if so, determining the waveform similarity between the displacement fluctuation signal and the preset fluctuation waveform based on the number of similar periods; if not, proceeding to the next step;

[0071] S24 determines the number of similar periods between the displacement waveform signal and the preset fluctuation waveform and the waveform similarity of different similar periods through the waveform similarity of different fluctuation periods, and determines the waveform similarity between the displacement fluctuation signal and the preset fluctuation waveform in combination with the comprehensive waveform similarity of the deviation fluctuation period.

[0072] S3 obtains position tracking errors of different nonlinear tracking control models under different preset fluctuation waveforms, and determines the tracking accuracy of different nonlinear tracking control models in combination with weight values ​​of different preset fluctuation waveforms. If no nonlinear tracking control model with a tracking accuracy greater than the preset accuracy exists, proceeds to the next step.

[0073] Specifically, the method for determining the tracking accuracy of the nonlinear tracking control model is:

[0074] Determine the comprehensive tracking deviation of different nonlinear tracking control models under different preset fluctuation waveforms through position tracking errors under different fluctuation amplitudes under different preset fluctuation waveforms;

[0075] The tracking accuracy of different nonlinear tracking control models is determined based on the weight values ​​of different preset fluctuation waveforms and the comprehensive tracking deviations of the nonlinear tracking control models under different preset fluctuation waveforms.

[0076] Furthermore, the value range of the comprehensive tracking deviation under the preset fluctuation waveform is between 0 and 1, wherein the larger the comprehensive tracking deviation under the preset fluctuation waveform, the larger the comprehensive tracking deviation of the nonlinear tracking control model under the preset fluctuation waveform.

[0077] In another possible embodiment, the method for determining the tracking accuracy of the nonlinear tracking control model is:

[0078] Determining the comprehensive tracking deviations of different nonlinear tracking control models under different preset fluctuation waveforms through position tracking errors under different fluctuation amplitudes under different preset fluctuation waveforms, and determining weight values ​​of the preset fluctuation waveforms for which the comprehensive tracking errors of the different nonlinear tracking control models do not meet the requirements, and using the weight values ​​as deviation weight values;

[0079] Determine whether there is a nonlinear tracking control model whose deviation weight value meets the requirements. If so, take the nonlinear tracking control model whose deviation weight value meets the requirements as the accurate control model and proceed to the next step. If not, there is no nonlinear tracking control model whose tracking accuracy is greater than the preset accuracy.

[0080] Based on the comprehensive tracking deviations of different accurate control models under different preset fluctuation waveforms and the weight values ​​of different preset fluctuation waveforms, the corrected tracking deviations of different preset fluctuation waveforms are determined to determine whether there is an accurate control model whose corrected tracking error of the preset fluctuation waveform does not meet the requirement by a number within a preset number range; if so, the accurate control model whose corrected tracking error of the preset fluctuation waveform does not meet the requirement by a number within the preset number range is taken as a reliable control model and the process proceeds to the next step; if not, there is no nonlinear tracking control model whose tracking accuracy is greater than the preset accuracy;

[0081] The maximum value of the corrected tracking deviation of different reliable control models under different preset fluctuation waveforms is determined by using the corrected tracking deviation of the reliable control model under different preset fluctuation waveforms, and the tracking accuracy of different reliable control models is determined in combination with the average value of the corrected tracking deviation of the reliable control model under different preset fluctuation waveforms.

[0082] S4 determines a screening control model of the nonlinear control model based on the tracking accuracy, and determines the displacement compensation amount of the piezoelectric positioning stage according to the screening control model.

[0083] Furthermore, when the tracking accuracy of the reliable control model is greater than a preset accuracy, the reliable control model is determined to be a screening control model.

[0084] It should be noted that determining the displacement compensation amount of the piezoelectric positioning stage according to the screening control model specifically includes:

[0085] Determine the displacement compensation outputs of different screening control models in different accuracy intervals according to the tracking accuracy and displacement compensation outputs of different screening control models, and determine the reference values ​​of the position compensation outputs in different accuracy intervals by taking the average values ​​of the displacement compensation outputs of different screening control models in different accuracy intervals;

[0086] Determine the evaluation accuracy of different accuracy intervals by measuring the deviation between the displacement compensation output and the reference value of the position compensation output of the screening control model in different accuracy intervals and the tracking accuracy of different screening control models; determine the recommended compensation output in different accuracy intervals by screening control models whose deviation between the displacement compensation output and the reference value of the position compensation output meets the requirements;

[0087] The displacement compensation amount of the piezoelectric positioning stage is determined based on the evaluation accuracy rates and the recommended compensation output rates in different accuracy intervals.

[0088] Example 3

[0089] On the other hand, the present invention provides a computer device comprising: a memory and a processor in communication connection, and a computer program stored in the memory and capable of running on the processor, characterized in that when the processor runs the computer program, it executes the above-mentioned positioning control method for a piezoelectric positioning stage.

[0090] Through the above embodiments, the present application achieves the following technical effects:

[0091] 1. The comprehensive fluctuation amount of the displacement fluctuation signal is determined based on the waveform characteristics and displacement amplitude characteristics of the displacement fluctuation signal, which realizes the accurate evaluation of the fluctuation of the displacement fluctuation signal from two perspectives: the change of the waveform and the change of the displacement amplitude. Therefore, the PID tracking control model is used to output the displacement compensation amount when the fluctuation amplitude is small, thereby improving the efficiency of the tracking control processing.

[0092] 2. The tracking accuracy of different nonlinear tracking control models is determined by the position tracking error and weight value of the nonlinear tracking control model under different preset fluctuation waveforms. This not only takes into account the similarity of different preset fluctuation waveforms, but also realizes an accurate evaluation of the tracking accuracy of different nonlinear tracking control models by further combining the position tracking error under different preset fluctuation waveforms, and also lays the foundation for further improving the accuracy of the displacement compensation of the piezoelectric positioning table.

[0093] 3. The displacement compensation amount of the piezoelectric positioning stage is determined according to the screening control model, which realizes the screening of screening control models with higher tracking accuracy from the perspective of tracking accuracy. This not only reduces the difficulty of determining the displacement compensation amount of the piezoelectric positioning stage, but also further improves the accuracy of the position compensation amount.

[0094] The various embodiments in this specification are described in a progressive manner. Similar portions between the various embodiments can be referenced to each other, and each embodiment focuses on the differences from the other embodiments. In particular, the device, apparatus, and non-volatile computer storage medium embodiments are generally similar to the method embodiments, so their descriptions are relatively simplified. For relevant details, refer to the descriptions of the method embodiments.

[0095] The foregoing description of this specification describes specific embodiments. Other embodiments are within the scope of the appended claims. In some cases, the actions or steps recited in the claims can be performed in an order different from that described in the embodiments and still achieve the desired results. Furthermore, the processes depicted in the accompanying drawings do not necessarily require the specific order shown or the sequential order to achieve the desired results. In certain embodiments, multitasking and parallel processing are also possible or may be advantageous.

[0096] The foregoing description is merely one or more embodiments of this specification and is not intended to limit this specification. It will be apparent to those skilled in the art that various modifications and variations may be made to one or more embodiments of this specification. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of one or more embodiments of this specification are intended to be within the scope of the claims of this specification.

Claims

1. A positioning control method for a piezoelectric positioning stage, characterized in that: Specifically include: Acquiring a displacement fluctuation signal of the piezoelectric positioning stage in real time through the piezoelectric device of the piezoelectric positioning stage, determining a comprehensive fluctuation amount of the displacement fluctuation signal based on waveform characteristics and displacement amplitude characteristics of the displacement fluctuation signal, and judging whether the comprehensive fluctuation amount meets the requirements; if so, determining a displacement compensation amount of the piezoelectric positioning stage through a PID tracking control model; if not, proceeding to the next step; determining waveform similarities between the displacement fluctuation signal and different preset fluctuation waveforms based on the displacement fluctuation signal, and determining weight values ​​of the different preset fluctuation waveforms based on the waveform similarities; Obtaining position tracking errors of different nonlinear tracking control models under different preset fluctuation waveforms, and determining the tracking accuracy of different nonlinear tracking control models in combination with weight values ​​of different preset fluctuation waveforms, and proceeding to the next step when no nonlinear tracking control model with a tracking accuracy greater than the preset accuracy exists; A screening control model of the nonlinear control model is determined based on the tracking accuracy, and a displacement compensation amount of the piezoelectric positioning stage is determined according to the screening control model.

2. The positioning control method for a piezoelectric positioning stage according to claim 1, wherein: The displacement fluctuation signal is determined based on a fluctuation signal of an output voltage of a piezoelectric device of the piezoelectric positioning stage.

3. The positioning control method for a piezoelectric positioning stage according to claim 1, wherein: The waveform characteristics include skewness, slope, and kurtosis.

4. The positioning control method for a piezoelectric positioning stage according to claim 1, wherein: The displacement amplitude characteristics include the maximum value and average value of the displacement amplitude, and the duration and number of times the displacement amplitude is greater than a preset amplitude.

5. The positioning control method for a piezoelectric positioning stage according to claim 1, wherein: The method for determining the comprehensive fluctuation amount of the displacement fluctuation signal is: Determining the maximum value and average value of the displacement amplitude of the displacement fluctuation signal, and the duration and number of times the displacement amplitude is greater than a preset amplitude based on the displacement amplitude characteristics of the displacement fluctuation signal, and determining the comprehensive amplitude variation of the displacement fluctuation signal based on the maximum value and average value of the displacement amplitude of the displacement fluctuation signal, and the duration and number of times the displacement amplitude is greater than the preset amplitude, and judging whether the comprehensive amplitude variation meets the requirements; if so, proceeding to the next step; if not, determining that the comprehensive fluctuation does not meet the requirements; Determining the skewness and kurtosis of the displacement fluctuation signal based on the waveform characteristics of the displacement fluctuation signal, and determining the waveform comprehensive variation of the displacement fluctuation signal in combination with the variation data of the slope of the displacement fluctuation signal, and judging whether the waveform comprehensive variation meets the requirements. If so, proceeding to the next step; if not, determining that the comprehensive variation does not meet the requirements; The comprehensive fluctuation amount of the displacement fluctuation signal is determined based on the comprehensive amplitude variation amount and the comprehensive waveform variation amount of the displacement fluctuation signal.

6. The positioning control method for a piezoelectric positioning stage according to claim 1, wherein: The preset ripple waveform includes a triangular wave and a sine wave with different amplitudes and frequencies.

7. The positioning control method for a piezoelectric positioning stage according to claim 1, wherein: The method for determining the waveform similarity is: Dividing the displacement fluctuation signal into different waveform periods according to a preset time interval, and performing waveform similarity analysis between the displacement fluctuation signal of the different fluctuation periods and a preset fluctuation waveform according to the displacement amplitude characteristics and waveform characteristics of the different waveform periods; Determine the fluctuation period whose waveform similarity does not meet the requirement based on the waveform similarity of different fluctuation periods, and use it as the deviation fluctuation period, and judge whether the number of deviation fluctuation periods is greater than the preset number of periods. If so, determine the waveform similarity between the displacement fluctuation signal and the preset fluctuation waveform based on the number of deviation fluctuation periods. If not, proceed to the next step. Determining the comprehensive waveform similarity of the deviation fluctuation period according to the waveform similarities of different deviation fluctuation periods and the number of deviation fluctuation periods, judging whether the comprehensive waveform similarity of the deviation fluctuation period meets the requirements; if so, determining the waveform similarity between the displacement fluctuation signal and the preset fluctuation waveform based on the comprehensive waveform similarity of the deviation fluctuation period; if not, proceeding to the next step; The number of similar periods between the displacement fluctuation signal and the preset fluctuation waveform and the waveform similarity of different similar periods are determined by the waveform similarity of different fluctuation periods, and the waveform similarity of the displacement fluctuation signal and the preset fluctuation waveform is determined in combination with the comprehensive waveform similarity of the deviation fluctuation period.

8. The positioning control method for a piezoelectric positioning stage according to claim 1, wherein: The method for determining the tracking accuracy of the nonlinear tracking control model is: Determine the comprehensive tracking deviation of different nonlinear tracking control models under different preset fluctuation waveforms through position tracking errors under different fluctuation amplitudes under different preset fluctuation waveforms; The tracking accuracy of different nonlinear tracking control models is determined based on the weight values ​​of different preset fluctuation waveforms and the comprehensive tracking deviations of the nonlinear tracking control models under different preset fluctuation waveforms.

9. The positioning control method for a piezoelectric positioning stage according to claim 1, wherein: Determining the displacement compensation amount of the piezoelectric positioning stage according to the screening control model specifically includes: Determine the displacement compensation outputs of different screening control models in different accuracy intervals according to the tracking accuracy and displacement compensation outputs of different screening control models, and determine the reference values ​​of the position compensation outputs in different accuracy intervals by taking the average values ​​of the displacement compensation outputs of different screening control models in different accuracy intervals; Determine the evaluation accuracy of different accuracy intervals by measuring the deviation between the displacement compensation output and the reference value of the position compensation output of the screening control model in different accuracy intervals and the tracking accuracy of different screening control models; determine the recommended compensation output in different accuracy intervals by screening control models whose deviation between the displacement compensation output and the reference value of the position compensation output meets the requirements; The displacement compensation amount of the piezoelectric positioning stage is determined based on the evaluation accuracy rates and the recommended compensation output rates in different accuracy intervals.

10. A computer device comprising: A memory and a processor in communication connection, and a computer program stored in the memory and capable of running on the processor, characterized in that when the processor runs the computer program, a positioning control method for a piezoelectric positioning stage according to any one of claims 1 to 9 is executed.

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