High profile insulating substrate single electrode high resolution electrofluidic jet printing method, high resolution functional pattern and application thereof
By preparing a metal oxide nanolayer on the surface of an insulating substrate, the problem of unstable spraying on a highly insulating substrate is solved, enabling continuous deposition of high-resolution functional patterns. This method is applicable to a variety of insulating substrate materials and complex curved surfaces, and is low in cost without altering the nozzle structure.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- HUAZHONG UNIV OF SCI & TECH
- Filing Date
- 2024-03-21
- Publication Date
- 2026-06-26
AI Technical Summary
Existing technologies struggle to achieve continuous and stable deposition of high-resolution functional patterns on highly insulating substrates, especially on high-profile insulating substrates with a thickness greater than 1 mm. The nozzle structure is complex and costly, the spraying is unstable, and the nozzle is easily damaged.
A metal oxide nanolayer is prepared on the surface of an insulating substrate. The small size effect and high surface energy of the nanomaterial are used to enhance the electrostatic field between the nozzle and the substrate, which promotes stable, continuous and controllable jetting. High-resolution functional patterns are then printed on the substrate using electrohydraulic inkjet printing technology.
It achieves continuous and stable electrofluid printing on insulating substrates, reduces printing speed, improves jet stability, and can prepare ultra-high resolution functional patterns at the submicron to micron level. It is suitable for a variety of insulating substrate materials, has strong pattern adhesion, good heat resistance, is suitable for complex curved surfaces, and is low in cost.
Smart Images
Figure CN118254491B_ABST
Abstract
Description
Technical Field
[0001] This invention belongs to the technical field of electrofluid printing, and more specifically, relates to a high-resolution electrofluid printing method for a single electrode on a high-profile insulating substrate, a high-resolution functional pattern, and its application. Background Technology
[0002] Flexible electronics technology is a technique for fabricating large-area, high-precision, and stretchable electronic circuits on flexible substrates, with broad application prospects in fields such as large-area flexible displays, wearable smart electronic devices, and smart skin for aircraft. Electrofluid inkjet printing technology is a process that applies a strong electric field between a substrate and a printhead to induce the ejection of charged droplets. It can directly fabricate submicron-level patterns or electronic circuits on flexible or curved substrates, such as metal wires, sensors, transistors, and memristors, and is a key technology for the fabrication of flexible electronic circuits.
[0003] To achieve flexibility and insulation, the substrate materials used in flexible electronics are typically organic polymers, such as polyethylene terephthalate (PET), polyimide (PI), polydimethylsiloxane (PDMS), polycarbonate (PC), poly(p-naphthalene ester) (PEC), and glass fiber composites. However, implementing electrofluid inkjet printing on highly insulating substrate materials is extremely difficult. On the one hand, placing these highly insulating dielectric materials in an electric field significantly weakens the spatial electric field, preventing the droplets at the nozzle tip from exceeding the Taylor limit and generating jets. On the other hand, even if jetting is achieved by applying ultra-high voltage, the droplets on the insulating material surface will repel each other because their charges cannot be discharged in time, preventing the formation of a continuous and stable jet. Consequently, it is impossible to print continuous and uniform patterns, let alone high-resolution pattern printing. Therefore, how to achieve continuous and stable deposition of high-resolution functional patterns on insulating substrates has become a critical technical challenge that electrofluid inkjet printing technology urgently needs to solve.
[0004] To address the aforementioned technical problems, existing research typically involves placing an ultra-thin (usually 10-200 μm) flexible insulating substrate on a conductive substrate, grounding the conductive substrate, and applying a high voltage between the conductive substrate and the printhead to minimize the weakening effect of the insulating substrate on the electric field. However, for high-profile insulating substrates with a thickness greater than 1 mm, the problem of charge accumulation on the insulating substrate cannot be avoided, thus limiting its application range. In addition, some research has attempted to improve the printhead structure to enhance the electric field at the printhead tip to promote jetting. For example, Chinese patent document CN201811582280.6 discloses an electrostatic focusing electrohydrodynamic printing device and method, which increases the potential at the nozzle tip by adding multiple electrode rings and electrostatic lenses at the nozzle. Although deposition on the insulating substrate can be achieved, the nozzle structure is complex and costly, requiring multiple voltage sources to provide high voltage to the electrode rings. Furthermore, the electrode rings are located below the nozzle, which can easily cause interference and damage to the printhead during curved surface printing. Chinese patent document CN201911192414.8 discloses an inkjet printing device and method based on plasma jet guidance. It proposes adding a plasma nozzle to the side of the electrohydraulic printhead to generate a plasma jet, thereby creating an electric field-induced electrohydraulic jet at the substrate below the printhead. The entire device has a relatively complex structure, requires high assembly precision, and has a large lateral dimension, making it prone to interference when applied to high-profile substrates. The journal article "Electrospinning onto InsulatingSubstrates by Controlling Surface Wettability and Humidity" proposes promoting electrospinning deposition by controlling the wettability of the substrate. However, the method of creating a water film on an insulating substrate is only suitable for electrospinning without patterning. Common printing inks dissolve or flow when exposed to a water film, making patterning impossible. Furthermore, the water film, as an induction layer, is highly susceptible to electrical breakdown, potentially damaging the printhead and even high-voltage power supply equipment. The journal article "High-resolution ac-pulse modulated electrohydrodynamic jet printing on highly insulating substrates" proposes a method to continuously neutralize the deposited charge by applying an alternating pulse voltage between the substrate and the nozzle, which can initially solve the problem of jetting on insulating substrates. However, due to the frequent voltage switching, the jetting is difficult to maintain stably and continuously.
[0005] In summary, current research has not yielded a universally applicable solution to the technical challenges of electrofluid printing on insulating substrates. Therefore, there is an urgent need to propose a method that fundamentally addresses the implementation of electrofluid printing on highly insulating substrates, enabling the fabrication of high-resolution wires, electronic devices, and even flexible electronic systems. Summary of the Invention
[0006] In view of the above-mentioned defects or improvement needs of the prior art, the present invention provides a high-resolution current fluid inkjet printing method for a single electrode on a high-profile insulating substrate, a high-resolution functional pattern and its application, which can solve the problem of unstable current jet on a highly insulating, non-planar substrate, and realize the inkjet printing preparation of functional patterns on planar or curved insulating substrates.
[0007] To achieve the above objectives, according to one aspect of the present invention, a high-resolution electrofluid inkjet printing method for a single electrode on a high-profile insulating substrate is provided, comprising: S1: cleaning the insulating substrate and then placing it in an oxygen plasma etching machine for surface hydroxylation; S2: preparing a metal oxide nanolayer on the surface of the hydroxylated insulating substrate; S3: printing a high-resolution functional pattern on the surface of the insulating substrate coated with the metal oxide nanolayer using electrofluid inkjet printing technology.
[0008] Preferably, in step S2, metal oxide nanoparticles or metal oxide dispersions are used to prepare the metal oxide nanolayer.
[0009] Preferably, the metal oxide nanoparticles include one or more of the following: nano-alumina particles, nano-titanium oxide particles, nano-silica particles, and nano-zinc oxide particles; the metal oxide dispersion includes one or more of the following: nano-alumina dispersion, nano-titanium oxide dispersion, nano-silica dispersion, or nano-zinc oxide dispersion.
[0010] Preferably, the metal oxide dispersion includes a metal oxide aqueous dispersion or a metal oxide alcohol dispersion.
[0011] Preferably, when using a metal oxide aqueous dispersion, the prepared metal oxide nanolayer needs to be dried at 30–80°C; when using a metal oxide alcohol dispersion, the prepared metal oxide needs to be allowed to stand.
[0012] Preferably, the electrohydraulic ink material in the electrohydraulic inkjet printing technology is: conductive silver paste, gold ink, copper ink, polyimide (PI) precursor solution, photoresist, PEDOT:PSS solution, PEO, Nafion solution, or polyvinylidene fluoride (PVDF) solution.
[0013] Preferably, when using conductive silver paste, gold ink, copper ink or other metallic inks or PI precursor solutions as printing ink materials, the method further includes heat-treating the generated high-resolution functional pattern at 100-250°C for 10-30 minutes.
[0014] Preferably, the metal oxide nanolayer is obtained in step S2 by spin coating, blade coating, spray coating, magnetron sputtering, thermal evaporation, atomic layer deposition, physical vapor deposition, or chemical vapor deposition.
[0015] Preferably, in step S1, acetone, anhydrous ethanol, or deionized water are used to clean the insulating substrate.
[0016] Preferably, the insulating substrate is made of one or more of the following materials: polyethylene terephthalate, polyimide, polydimethylsiloxane, polycarbonate, poly(p-naphthalate), soda-lime glass, quartz glass, plexiglass, and glass fiber composite material.
[0017] The second aspect of this application provides a high-resolution functional pattern prepared by a high-profile insulating substrate single-electrode high-resolution current fluid inkjet printing method.
[0018] A third aspect of this application provides an application of the aforementioned high-resolution functional pattern in electronic circuits.
[0019] In summary, compared with the prior art, the high-resolution electrofluid inkjet printing method for a single electrode on a high-profile insulating substrate, the high-resolution functional pattern, and their applications provided by this invention have the following advantages:
[0020] 1. A metal oxide nanolayer is coated on the surface of an insulating substrate material. The small size effect and high surface energy of the nanomaterials are utilized to strengthen and stabilize the spatial electrostatic field between the nozzle and the insulating substrate, thereby effectively promoting stable, continuous, and controllable jet spraying. This enables continuous and stable electrohydraulic printing on the insulating substrate.
[0021] 2. The stabilizing effect of metal oxide nanolayers on electrohydraulic inkjet printing allows for a significant reduction in printing speed (down to the millimeter level per second), thereby greatly improving the jet stability of electrohydraulic inkjet printing. This enables the fabrication of ultra-high resolution (linewidth in the sub-micrometer to micrometer range) functional patterns, which is currently difficult to achieve with other printing methods or other electrohydraulic inkjet printing techniques. Consequently, ultra-high resolution complex patterns can be fabricated on demand.
[0022] 3. Applicable to a variety of different substrate materials. Printing is possible on a variety of insulating substrate materials, including but not limited to polyethylene terephthalate (PET), polyimide (PI), polydimethylsiloxane (PDMS), polycarbonate (PC), poly(p-naphthalene ester) (PEC), quartz glass, soda-lime glass, acrylic glass (PMMA), glass fiber composites, and other insulating substrate materials.
[0023] 4. The prepared functional patterns exhibit high interfacial adhesion strength. The nanomaterials on the surface of the insulating substrate have an ultra-high specific surface area, which can effectively adsorb droplets sprayed onto the substrate, promote the effective adhesion of complex patterns to the substrate, improve the interfacial adhesion strength of the patterns on the substrate, and prevent them from falling off.
[0024] 5. Conductive circuits can be directly fabricated on large-area complex curved surfaces. The process route proposed in this invention does not change the sharp nozzle structure, avoiding interference problems in the curved surface electrofluid printing process; using curved surface electrofluid printing equipment, conductive functional patterns can be directly fabricated on curved insulating substrates coated with nanomaterial layers, avoiding the curved surface adhesion problems caused by flexible film transfer methods.
[0025] 6. The prepared functional patterns exhibit excellent heat resistance. Since nano-metal oxide materials typically possess extremely high heat resistance temperatures, and complex patterns can be fabricated on the surface of glass fiber composite materials, they will not melt or fail even under extreme conditions such as those on aircraft surfaces. This presents broad application prospects in fields such as smart aircraft skin and conformal antennas.
[0026] 7. Does not alter the substrate's inherent properties. The nanoparticle layer is submicron thick, having virtually no impact on the substrate's light transmittance across various wavelengths; simultaneously, the nanoparticle layer itself, as a very thin insulating particle layer, has almost no effect on the electrical and optical properties of ordinary insulating substrate surfaces.
[0027] 8. Complex patterns can be fabricated at a relatively low cost. Compared to traditional patterning processes such as photolithography and vapor deposition, this process only requires spin-coating a thin layer of nanoparticles onto an insulating substrate, and then using electrohydraulic inkjet printing technology to fabricate high-resolution complex patterns. Moreover, it eliminates the need for designing complex printhead assemblies, resulting in a simple structure. Attached Figure Description
[0028] Figure 1 This is a step diagram of a high-profile insulating substrate single-electrode high-resolution current fluid inkjet printing method according to this application;
[0029] Figure 2 This is a flowchart of a high-resolution electrofluid inkjet printing method for a single electrode on a high-profile insulating substrate.
[0030] Figure 3 This is a schematic diagram illustrating the principle of electrohydraulic inkjet printing on an insulating substrate coated with a metal oxide nanolayer, as proposed in this invention.
[0031] Figure 4 This is an experimental diagram of charged jet spraying onto the surface of an insulating substrate during the implementation of the process principle proposed in this invention;
[0032] Figure 5This is an ultra-high resolution parallel line effect image prepared using silver paste printing based on the process principle proposed in this invention;
[0033] Figure 6 This is an ultra-high resolution parallel line effect image prepared by PEO printing using the process principle proposed in this invention;
[0034] Figure 7 An image showing the effect of printing a single ultra-high resolution rose using the process principle proposed in this invention.
[0035] Figure 8 An image showing the effect of printing a single bird at ultra-high resolution using the process principle proposed in this invention;
[0036] Figure 9 An image showing the printing effect of the first type of ultra-high resolution array pattern prepared using the process principle proposed in this invention;
[0037] Figure 10 An image showing the printing effect of the first type of ultra-high resolution array pattern prepared using the process principle proposed in this invention.
[0038] In all the accompanying drawings, the same reference numerals are used to denote the same elements or structures, wherein:
[0039] 1-Insulating substrate; 2-Metal oxide nanolayer; 3-High-resolution functional pattern; 4-Electro-hydraulic ink material; 5-Nozzle; 6-Voltage; 7-Substrate cleaning solution; 8-Deionized water; 9-Metal oxide dispersion; 10-Coating machine; 11-Hot plate. Detailed Implementation
[0040] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the invention. Furthermore, the technical features involved in the various embodiments of this invention described below can be combined with each other as long as they do not conflict with each other.
[0041] This invention proposes a high-resolution electrofluid inkjet printing method for a single electrode on a high-profile insulating substrate, relating to the field of flexible electronics manufacturing. Specifically, it relates to a method for achieving high-resolution patterning on an insulating substrate using electrofluid inkjet printing technology. This invention uses a highly insulating material as the printing substrate and proposes to prepare a thin layer of nanomaterials on the surface of the insulating material. The polarization effect of nanoparticles under an electrostatic field is used to enhance the external electrostatic field. Simultaneously, the charge generated by the polarization of the nanomaterial surface neutralizes the charge of the deposited droplets, avoiding charge repulsion during the deposition process and stabilizing the spatial electrostatic field between the nozzle and the insulating substrate, thereby effectively promoting continuous jet ejection. Furthermore, the small size effect of the nanoparticles can effectively anchor the falling ink droplets, preventing ink droplet diffusion, thus achieving high-resolution, stable, continuous, and controllable electrofluid inkjet printing. This enables the precise fabrication of conductive / non-conductive patterns and is of great significance for improving the fabrication capabilities of flexible or curved electronics.
[0042] The present invention provides a high-resolution electrofluid inkjet printing method for a single electrode on a high-profile insulating substrate, which specifically includes the following steps S1 to S3, as detailed below:
[0043] S1: The insulating substrate is cleaned and then placed in an oxygen plasma etching machine for surface hydroxylation.
[0044] Specifically, an insulating substrate 1 with a smooth and flat surface is selected and subjected to ultrasonic treatment for 15 minutes in acetone, anhydrous ethanol, and deionized water, respectively, and then cleaned three times to achieve surface cleanliness. The substrate material is then placed in an oxygen plasma etching machine for surface hydroxylation to further clean the surface and achieve hydrophilic treatment.
[0045] S2: Prepare a metal oxide nanolayer on the surface of a hydroxylated insulating substrate.
[0046] A metal oxide nanolayer 2 was prepared on the surface of the substrate material after cleaning.
[0047] In a further preferred embodiment, metal oxide nanolayers are prepared using metal oxide nanoparticles or metal oxide dispersions.
[0048] In a further preferred embodiment, the metal oxide nanoparticles include one or more combinations of nano-alumina particles, nano-titanium oxide particles, nano-silica particles, and nano-zinc oxide particles; the metal oxide dispersion 9 includes one or more combinations of nano-alumina dispersion, nano-titanium oxide dispersion, nano-silica dispersion, or nano-zinc oxide dispersion. The metal oxide dispersion should have good dispersibility.
[0049] In a further preferred embodiment, the metal oxide dispersion includes a metal oxide aqueous dispersion or a metal oxide alcohol dispersion.
[0050] In a further preferred embodiment, the method for preparing the nanoscale surface layer includes, but is not limited to, spin coating, blade coating, spray coating, magnetron sputtering, thermal evaporation, atomic layer deposition (ALD), physical vapor deposition (PVD), and chemical vapor deposition (CVD). If a solution method such as spin coating, blade coating, or spray coating is used to prepare a nanoscale metal oxide thin layer on the surface of an insulating substrate, the dispersion needs to be ultrasonically treated for 5-30 minutes before film formation to promote good dispersion.
[0051] If an aqueous dispersion of nano-metal oxides is used for spin-coating, heating in a hot plate or oven at 30-80°C for 10 minutes is required to promote rapid evaporation of water. If an ethanol dispersion of metal oxides is used for spin-coating, it needs to be allowed to stand in a clean air environment for 5 minutes to promote ethanol evaporation and form a solid nanofilm. If non-solution methods such as magnetron sputtering or thermal evaporation are used for film formation, no heat treatment or standing treatment is required.
[0052] S3: High-resolution functional patterns are obtained by printing on the surface of an insulating substrate coated with a metal oxide nanolayer using electrohydrocarbon inkjet printing technology.
[0053] In a further preferred embodiment, the electrohydraulic inkjet printing technology includes planar and curved surface electrohydraulic inkjet printing technologies.
[0054] In a further optimized solution, the printing effect can be further optimized by adjusting parameters such as voltage, air flow rate, and printing speed, enabling on-demand printing of high-resolution complex patterns.
[0055] In a further optimized scheme, multi-layer overprinting is achieved by adjusting the number of prints, resulting in different printing thicknesses, and the conductivity of the metallic ink or the thickness of the dielectric layer can be increased as needed.
[0056] As a further preferred embodiment of the present invention, the electrohydraulic ink material 4 includes, but is not limited to, conductive or non-conductive ink materials such as conductive silver paste, gold ink, copper ink, polyimide (PI) precursor solution, photoresist, PEDOT:PSS solution, PEO, Nafion solution, and polyvinylidene fluoride (PVDF) solution.
[0057] Furthermore, if conductive silver paste, gold ink, copper ink, or other metallic inks or PI precursor solutions are used as printing ink materials, they should be heat-treated at 100-250°C for 10-30 minutes in a hot plate 11 or oven to promote the connection between metal particles and improve conductivity.
[0058] Furthermore, if PEDOT:PSS, polyvinylidene fluoride (PVDF) solution, or Nafion solution is used as the printing ink material, post-printing heat treatment is not required.
[0059] Example
[0060] This application proposes a high-resolution single-electrode electrofluid inkjet printing method for high-profile insulating substrates, which specifically includes the following process steps:
[0061] In a preferred embodiment, the insulating substrate material is selected as soda-lime glass, the printing ink is selected as conductive silver paste, and the nanolayer material is selected as alumina nanolayer to specifically illustrate the above-mentioned process of the present invention. However, the material selection for the high-resolution electrofluid inkjet printing method on a high-insulation substrate proposed in the present invention is not limited to this.
[0062] S1: The insulating substrate is cleaned and then placed in an oxygen plasma etching machine for surface hydroxylation.
[0063] Take a 50*50*1mm soda-lime glass sheet and place it in substrate cleaning solution 7, such as acetone, isopropanol, and deionized water 8. Set the ultrasonic power to 70W and perform ultrasonic treatment for 10 minutes. Then use a nitrogen gun to dry the glass surface.
[0064] The cleaned glass substrate is placed in a reactive ion etching machine, and the oxygen plasma treatment power is set to 150W for 10 minutes to hydroxylate the glass surface, thereby achieving further surface cleaning and hydrophilic treatment.
[0065] S2: Prepare a metal oxide nanolayer on the surface of a hydroxylated insulating substrate.
[0066] The aqueous dispersion of nano-alumina was placed in an ultrasonic cleaner, and the ultrasonic power was set to 70W for 5 minutes to perform ultrasonic treatment in order to promote the uniform dispersion of nanoparticles.
[0067] Take 1-2 ml of the ultrasonically treated aqueous dispersion of nano-alumina into a dropper, place the pretreated glass slide on a spin coater 10, and set the spin coating speed to 2000 r / min and the acceleration to 500 r / min. 2 The spin coating time is 120s, and the dispersion is added to the glass slide for spin coating.
[0068] Since the solution method is used to form the film, the glass slide after spin coating needs to be placed on the hot plate 11, and the heating temperature is set to 30℃~80℃ for 10 minutes to promote the rapid evaporation of water in the dispersion so as to form a thin layer of solid nanoparticles on the glass surface.
[0069] S3: High-resolution functional patterns are obtained by printing on the surface of an insulating substrate coated with a metal oxide nanolayer using electrohydrocarbon inkjet printing technology.
[0070] Take 0.5 ml of conductive silver paste (viscosity 100 cp) into a syringe (capacity 1 ml), install a glass needle, place it on the electrohydraulic inkjet printing platform, set the voltage at nozzle 5 to 900 V, the printing height to 50 μm, the air flow rate to 0.1 kPa, the printing speed to 1 mm / s, and the number of printing layers to 1. Import the path file of the printing pattern into the device and start the on-demand printing preparation of the high-resolution pattern.
[0071] The printed patterned glass sheet is placed on a hot plate, and the heating temperature is set to 100℃~250℃, preferably 150℃, for 30 minutes to promote the connection between silver nanoparticles and thus improve the conductivity of the silver nanoparticle circuit.
[0072] Furthermore, the patterned glass slides, after heat curing, were left to cool in a clean air environment for 10 minutes. Then, the slides were observed under a super depth-of-field 3D microscope and a scanning electron microscope to obtain... Figures 4-6 The printing effect shows that the printing limit resolution of PEO lines is 900nm, and the printing limit resolution of silver paste lines is 1.5μm.
[0073] In a further preferred embodiment, the material of the insulating substrate includes, but is not limited to, one or more of polyethylene terephthalate (PET), polyimide (PI), polydimethylsiloxane (PDMS), polycarbonate (PC), poly(p-naphthalene ester) (PEC), soda-lime glass, quartz glass, plexiglass (PMMA), and glass fiber composite materials.
[0074] The second aspect of this application provides a high-resolution functional pattern prepared by a high-profile insulating substrate single-electrode high-resolution current fluid inkjet printing method.
[0075] A third aspect of this application provides an application of the aforementioned high-resolution functional pattern, which is used in electronic circuits.
[0076] Those skilled in the art will readily understand that the above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.
Claims
1. A high-resolution electrofluid inkjet printing method for a single electrode on a high-profile insulating substrate, characterized in that, include: S1: The insulating substrate is cleaned and then placed in an oxygen plasma etching machine for surface hydroxylation. S2: Prepare a metal oxide nanolayer on the surface of the hydroxylated insulating substrate; S3: High-resolution functional patterns are printed on the surface of an insulating substrate coated with a metal oxide nanolayer using electrohydrocarbon inkjet printing technology. In step S2, metal oxide nanolayers are prepared using metal oxide nanoparticles or metal oxide dispersions; The metal oxide dispersion is either a water-based dispersion of metal oxides or an alcohol-based dispersion of metal oxides. When using a water-based dispersion of metal oxides, the prepared metal oxide nanolayers need to be dried at 30℃~80℃; when using an alcohol-based dispersion of metal oxides, the prepared metal oxides need to be allowed to stand.
2. The method according to claim 1, characterized in that, The metal oxide nanoparticles include one or more of the following: nano-alumina particles, nano-titanium oxide particles, nano-silica particles, and nano-zinc oxide particles; the insulating substrate is made of one or more of the following: polyethylene terephthalate, polyimide, polydimethylsiloxane, polycarbonate, poly(p-naphthalate), soda-lime glass, quartz glass, plexiglass, and glass fiber composite materials. The metal oxide dispersion includes one or more of the following: nano-alumina dispersion, nano-titanium oxide dispersion, nano-silica dispersion, or nano-zinc oxide dispersion.
3. The method according to claim 1, characterized in that, The electrohydraulic ink materials used in electrohydraulic inkjet printing technology include: conductive silver paste, gold ink, copper ink, polyimide precursor solution, photoresist, PEDOT:PSS solution, PEO, Nafion solution, or polyvinylidene fluoride solution.
4. The method according to claim 3, characterized in that, When using metallic ink or PI precursor solution as printing ink material, the process also includes heat-treating the generated high-resolution functional pattern at 100℃~250℃ for 10~30 minutes.
5. The method according to claim 1, characterized in that, In step S2, the metal oxide nanolayer is obtained by spin coating, blade coating, spray coating, magnetron sputtering, thermal evaporation, atomic layer deposition, physical vapor deposition or chemical vapor deposition; in step S1, the insulating substrate is cleaned with acetone, anhydrous ethanol or deionized water.