A topography detection system

Abstract

The application provides a topography detection system, and relates to the technical field of 3D topography detection.The topography detection system comprises a motion unit, a topography detection unit and an alignment detection unit.The motion unit is used for fixing or moving adjustment of a measured part and the topography detection unit.The topography detection unit is used for topography detection of the measured part, so as to obtain topography detection information of the measured part.The alignment detection unit is used for alignment deviation detection of the measured part, so as to obtain alignment deviation error information of the measured part, and the measured part is aligned by the motion unit based on the alignment deviation error information.

Description

Technical Field

[0001] This application relates to the field of 3D shape detection technology, specifically to a shape detection system. Background Technology

[0002] In point scanning 3D topography inspection equipment, the probes / probes generally have high accuracy, but their measurement range / working distance is relatively short. When the initial installation of the mirror part under test has a large eccentricity or tilt error, during the surface scanning inspection process, some of the measured surfaces may be outside the detection range of the probe / probe, and there is even a possibility that the probe may collide with the measured surface. In addition, when the part needs to be inspected for changes in surface shape before and after processing, the part's fixed alignment deviation should be consistent during the two inspections. However, existing point scanning 3D inspection equipment lacks relevant support technology to address the issues of eccentricity, tilt, and alignment deviation errors. Summary of the Invention

[0003] In view of this, the embodiments of this specification provide a shape inspection system, which provides a way to quickly and effectively center and align the part being tested in shape inspection, and solves the existing defects of eccentric tilt and the inability to correct alignment deviation errors.

[0004] The embodiments in this specification provide the following technical solutions:

[0005] A shape detection system is provided, including a motion unit, a shape detection unit, and an alignment detection unit. The motion unit is used to fix or move and adjust the part under test. The shape detection unit is used to perform shape detection on the part under test to obtain shape detection information of the part under test. The alignment detection unit is used to perform alignment deviation detection on the part under test to obtain alignment deviation error information of the part under test, and to realize alignment deviation alignment of the part under test through the motion unit based on the alignment deviation error information.

[0006] In some embodiments, the motion unit includes a workpiece rotary table, a probe rotary table, a two-dimensional linear motion table, and a part posture adjustment table. The bottom of the workpiece rotary table is fixed to the mechanical frame, and the part posture adjustment table is fixed to the workpiece rotary table and can clamp and fix the part to be measured. The two-dimensional linear motion table is also fixed to the mechanical frame and located above the part to be measured. The probe rotary table is mounted on the two-dimensional linear motion table, so that the two-dimensional linear motion table can drive the probe rotary table to achieve two-dimensional displacement. The rotation axis of the probe rotary table is perpendicular to the motion trajectory plane of the two-dimensional linear motion table, and the rotation axis of the workpiece rotary table is parallel to the motion trajectory plane of the two-dimensional linear motion table.

[0007] In some embodiments, the topography detection unit includes a topography probe, an eccentricity detection sensor, an eccentricity detection reference surface, a horizontal displacement detection sensor, a horizontal displacement detection reference surface, a vertical displacement detection sensor, and a vertical displacement detection reference surface; the topography probe and the eccentricity detection sensor are both fixed on the probe rotation stage, thereby driving the topography probe and the eccentricity detection sensor to rotate around the rotation axis of the probe rotation stage; the eccentricity detection reference surface, the horizontal displacement detection sensor, and the vertical displacement detection sensor are all fixed on the two-dimensional linear motion stage, so that the two-dimensional linear motion stage can drive the eccentricity detection reference surface, the horizontal displacement detection sensor, and the vertical displacement detection sensor to achieve two-dimensional displacement.

[0008] In some embodiments, the measuring axes of the topography probe, the eccentricity detection sensor, the horizontal displacement detection sensor, and the vertical displacement detection sensor are all coplanar with the rotation axis of the workpiece rotary table on a first plane, and orthogonal to the rotation axis of the probe rotary table at a first point. The rotation axis of the eccentricity detection reference surface coincides with the rotation axis of the probe rotary table, or the center of the sphere of the eccentricity detection reference surface passes through the first point.

[0009] In some embodiments, the eccentricity detection sensor monitors eccentricity crosstalk during the rotation of the probe rotary table by detecting changes in the relative distance between itself and the eccentricity detection reference surface.

[0010] In some embodiments, when the two-dimensional linear motion stage moves the horizontal displacement detection sensor and the vertical displacement detection sensor, the displacement of the two-dimensional linear motion stage and the probe rotary table is obtained by measuring the distance change of the two-dimensional linear motion stage relative to the horizontal displacement detection reference surface and the vertical displacement detection reference surface, respectively.

[0011] In some embodiments, the alignment detection unit includes a line laser and a marker detector, and the horizontal displacement detection reference plane and the horizontal displacement detection sensor are arranged at an angle. The measuring axis of the horizontal displacement detection sensor is perpendicular to the horizontal displacement detection reference plane. The first emitted light from the line laser is reflected by the upper surface of the part under test to the horizontal displacement detection reference plane and then reflected again to the upper surface of the part under test to obtain a first projection mark and a second projection mark. The tilt or translation state of the part under test is adjusted by the part attitude adjustment stage so that the first projection mark and the second projection mark are aligned.

[0012] In some embodiments, the alignment detection unit further includes a light detection sensor. The first emitted light from the line laser is reflected by the upper surface of the part under test and forms a third projection mark on the detection surface of the light detection sensor. Based on the deviation of the third projection mark from the nominal position, the tilt or translation state of the part under test is adjusted by the part attitude adjustment stage to achieve alignment.

[0013] In some embodiments, the line laser is used to obtain a fourth projection mark on the part under test by emitting a second outgoing light beam, and the mark detector is used to detect the relative deviation information between the first projection mark and the orientation mark on the side of the part under test. The part under test is rotated and adjusted by the workpiece rotary table or the part posture adjustment table to achieve alignment between the fourth projection mark and the orientation mark on the side of the part under test.

[0014] In some embodiments, the line laser and the marker detector are implemented as a self-illuminating marker detection component, which is used to measure the alignment deviation between the diffuse reflection of the first projected marker on the side of the part under test and the orientation marker, and to capture the portion of light reflected by the second projected marker again through the upper surface of the part under test, in order to obtain the offset relative to the nominal position.

[0015] Compared with the prior art, the beneficial effects that can be achieved by the above-mentioned at least one technical solution adopted in the embodiments of this specification include at least the following: by setting up the topography detection unit and the alignment detection unit, the topography detection information and alignment deviation error information of the tested part can be effectively obtained, and the alignment deviation of the tested part can be aligned based on the alignment deviation error information. This provides a way to quickly and effectively center and align the tested part in topography detection, which solves the existing defects of eccentricity, tilt and alignment deviation error that cannot be corrected. It can achieve high consistency of repeated installation of the tested part between multiple tests to ensure the comparability of surface shape detection, and can avoid adverse risks such as abnormal measurement of the probe or mutual collision caused by excessive initial eccentricity or tilt error. Attached Figure Description

[0016] To more clearly illustrate the technical solutions of the embodiments of this application, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a schematic diagram of the morphology detection system provided in Embodiment 1 of this application;

[0018] Figure 2This is an example of an implementation method for the structural layout of the morphology detection system provided in Embodiment 1 of this application;

[0019] Figure 3 This is a schematic diagram of the tilt alignment detection principle of the tested part in Embodiment 1 of this application;

[0020] Figure 4 This is the curve showing the relationship between the projection spot offset and the alignment deviation in Embodiment 1 of this application;

[0021] Figure 5 This is another example of the structural layout of the morphology detection system provided in Embodiment 1 of this application;

[0022] Figure 6 This is a schematic diagram of the optical path principle for centering and aligning the tested part in Embodiment 2 of this application;

[0023] Figure 7 This is a schematic diagram of the alignment deviation detection principle of the tested part in Embodiment 2 of this application;

[0024] Figure 8 This is a schematic diagram of the tilt alignment detection principle of the tested part in Embodiment 2 of this application;

[0025] Figure 9 This is a schematic diagram of the eccentric alignment detection principle of the tested part in Embodiment 2 of this application;

[0026] Figure 10 This is an example of an implementation of the light detection sensor in Embodiment 2 of this application;

[0027] Figure 11 This is a schematic diagram of the structural layout of the morphology detection system provided in Embodiment 3 of this application.

[0028] Explanation of reference numerals in the attached figures:

[0029] 1-Mechanical frame, 2a-Workpiece rotary table, 2b-Probe rotary table, 2c-Two-dimensional linear motion stage, 2d-Part posture adjustment stage, 3-Measured part, 4a-Topology probe, 4b-Eccentricity detection sensor, 4c-Eccentricity detection reference surface, 4d-Horizontal displacement detection sensor, 4e-Horizontal displacement detection reference surface, 4f-Vertical displacement detection sensor, 4g-Vertical displacement detection reference surface, 5a-Line laser; 5b-Light ray detection sensor, 5b-1-Position sensor, 5b-2-Slit, 5c-Mark detector, 5d-Third emitted ray, 5e-First emitted ray, 5f-Second emitted ray, 5g-First projected mark, 5i-Second projected mark, 5j-Self-illuminating mark detection assembly Detailed Implementation

[0030] The embodiments of this application will now be described in detail with reference to the accompanying drawings.

[0031] The following specific examples illustrate the implementation of this application. Those skilled in the art can easily understand other advantages and effects of this application from the content disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. This application can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this application. It should be noted that, in the absence of conflict, the following embodiments and features in the embodiments can be combined with each other. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0032] It should also be noted that the illustrations provided in the following embodiments are merely schematic representations of the basic concept of this application. The drawings only show components relevant to this application and are not drawn according to the actual number, shape, and size of components in implementation. In actual implementation, the form, quantity, and proportion of each component can be arbitrarily changed, and the component layout may also be more complex. Furthermore, specific details are provided in the following description to facilitate a thorough understanding of the examples. However, those skilled in the art will understand that practice can be carried out without these specific details.

[0033] Example 1

[0034] like Figure 1 As shown, the topography detection system that enables centering and alignment provided in this application includes a motion unit 2, a part under test 3, a topography detection unit 4, and an alignment detection unit 5.

[0035] The motion unit 2 is used to fix or move the part 3 under test during the test. The morphology detection unit 4 is used to perform morphology detection on the part 3 under test to obtain morphology detection information of the part 3 under test. The alignment detection unit is used to perform alignment deviation detection on the part under test to obtain alignment deviation error information of the part under test, and to realize the alignment deviation alignment of the part under test through the motion unit based on the alignment deviation error information.

[0036] like Figure 1 As shown, the alignment detection system provided in this application includes a mechanical frame 1, a motion unit 2, a part under test 3, a shape detection unit 4, and an alignment detection unit 5. The part under test 3 has a rotational symmetry axis or a component with an approximate rotational symmetry axis, and its side has an orientation alignment mark 3a. The part under test 3 is clamped and fixed on a part attitude adjustment stage 2d.

[0037] Specifically, the motion unit 2 is used to fix or move the part 3 under test during the test. The motion unit 2 includes a workpiece rotary table 2a, a probe rotary table 2b, a two-dimensional linear motion table 2c, and a part posture adjustment table 2d.

[0038] The bottom of the workpiece rotary table 2a is fixed to the mechanical frame 1. The part posture adjustment table 2d is fixed to the workpiece rotary table 2a and can clamp and fix the part to be measured 3. The two-dimensional linear motion table 2c is also fixed to the mechanical frame and located above the part to be measured 3. The probe rotary table 2b is installed on the two-dimensional linear motion table 2c, so that the rotation axis of the workpiece rotary table 2a is parallel to the motion trajectory plane of the two-dimensional linear motion table 2c, and both are perpendicular to the horizontal plane. The probe rotary table 2b is fixed to the two-dimensional linear motion table 2c and is driven by it to achieve two-dimensional displacement. The rotation axis of the probe rotary table 2b is perpendicular to the motion trajectory plane of the two-dimensional linear motion table 2c, that is, parallel to the horizontal plane. The part posture adjustment table 2d is fixedly installed on the workpiece rotary table 2a, which can clamp and fix the part to be measured 3, and can also adjust the part to be measured 3 by horizontal translation, rotation or tilting. The two-dimensional linear motion stage 2c is equipped with horizontal modules for horizontal displacement and vertical modules for vertical displacement, respectively. Within the enclosed mechanical frame 1, the two-dimensional linear motion stage 2c can be positioned in the middle and has a certain distance from the measured part 3 below. The probe rotary table 2b is fixed to the lower part of the two-dimensional linear motion stage 2c near the measured part 3.

[0039] The shape detection unit 4 is used to perform shape detection on the part 3 under test in order to obtain shape detection information of the part 3 under test. Specifically, the shape detection unit 4 includes a shape probe 4a, an eccentric detection sensor 4b, an eccentric detection reference surface 4c, a horizontal displacement detection sensor 4d, a horizontal displacement detection reference surface 4e, a vertical displacement detection sensor 4f, and a vertical displacement detection reference surface 4g.

[0040] In some embodiments, the topography probe 4a and the eccentricity detection sensor 4b are arranged adjacently on the probe rotary table 2b; the eccentricity detection reference surface 4c is located on the two-dimensional linear motion stage 2c and above the probe rotary table 2b; the horizontal displacement detection sensor 4d and the vertical displacement detection sensor 4f are both located on the eccentricity detection reference surface 4c; the vertical displacement detection reference surface 4g is located at the top of the mechanical frame 1, and the horizontal displacement detection reference surface 4e is located on the left side of the mechanical frame 1. In some embodiments, the topography probe 4a and the eccentricity detection sensor 4b of the topography detection unit 4 can also be located on opposite sides of the eccentricity detection reference surface 4c, such as... Figure 5As shown, the topography probe 4a, the eccentricity detection sensor 4b, and the eccentricity detection reference surface 4c are all mounted on the probe rotary table 2b. The topography probe 4a and the eccentricity detection sensor 4b are fixed on the probe rotary table 2b, and are driven by the probe rotary table 2b to rotate around the axis of rotation of the probe rotary table 2b. Similarly, the eccentricity detection reference surface 4c, the horizontal displacement detection sensor 4d, and the vertical displacement detection sensor 4f are also fixed on the two-dimensional linear motion stage 2c, thereby enabling two-dimensional translation driven by the two-dimensional linear motion stage 2c. The measuring axes of the topography probe 4a, the eccentricity detection sensor 4b, the horizontal displacement detection sensor 4d, and the vertical displacement detection sensor 4f are all coplanar with the axis of rotation of the workpiece rotary table 2a on the first plane (defined as the XOZ plane), and are orthogonal to the axis of rotation of the probe rotary table 2b at the same point—point O.

[0041] Furthermore, the eccentric detection reference surface 4c can be a cylinder or a sphere. When it is a cylinder, its rotation axis coincides with the rotation axis of the probe rotary table 2b; when it is a sphere, its center passes through point O. The eccentric detection sensor 4b monitors the eccentric crosstalk during the rotation of the probe rotary table 2b and the eccentric crosstalk of the topography probe 4a by detecting the change in the relative distance between itself and the eccentric detection reference surface 4c. The horizontal displacement detection reference surface 4e and the vertical displacement detection reference surface 4g are both planes fixed on the mechanical frame 1, and their normals are parallel to the measurement axes of the horizontal displacement detection sensor 4d and the vertical displacement detection sensor 4f, respectively. When the two-dimensional linear motion stage 2c drives the horizontal displacement detection sensor 4d and the vertical displacement detection sensor 4f to move, it can obtain its own displacement by testing the change in its distance relative to the horizontal displacement detection reference surface 4e and the vertical displacement detection reference surface 4g. At the same time, it can obtain the displacement of the probe rotary table 2b by obtaining the displacement of the topography probe 4a and the eccentric detection sensor 4b.

[0042] The alignment detection unit 5 is used to detect the alignment deviation of the tested part 3 to obtain the alignment deviation error information of the tested part 3, and to achieve alignment of the tested part 3 through the motion unit 2 based on the alignment deviation error information. Specifically, the alignment detection unit 5 includes a line laser 5a and a marker detector 5c. The line laser 5a is located on the upper right side of the mechanical frame 1, and the marker detector 5c is located on the lower right side of the mechanical frame 1. The horizontal displacement detection reference surface 4e is a mirror surface. Figure 2 As shown, the horizontal displacement detection reference plane 4e and the horizontal displacement detection sensor 4d are arranged at an angle to each other, and the measuring axis of the horizontal displacement detection sensor 4d is still perpendicular to the horizontal displacement detection reference plane 4e. Figure 3As shown, the first emitted light beam 5e from the line laser 5a is reflected from the upper surface of the workpiece 3 to the horizontal displacement detection reference surface 4e, and then reflected again onto the upper surface of the workpiece 3. The two projection marks of the first emitted light beam 5e on the upper surface of the workpiece 3 are the first projection mark 5g and the second projection mark 5i, respectively. When the workpiece 3 has a tilting or translational deviation, the two projection marks, the first projection mark 5g and the second projection mark 5i, do not coincide, and the deviation between them also changes with the rotation angle of the workpiece rotary table 2a. Figure 4 The fluctuations shown are addressed by adjusting the tilt or translation of the measured part 3 using the part attitude adjustment stage 2d. Figure 4 The fluctuation amplitude shown is the smallest, that is, the first projection mark 5g and the second projection mark 5i of the two projection marks coincide. At this time, the measured part 3 is tilted and translated to achieve alignment, and the centering and alignment of the measured part 3 is completed.

[0043] Example 2

[0044] In this embodiment, the difference from Embodiment 1 is that, in addition to the line laser 5a and the marker detector 5c, the alignment detection unit 5 also includes a light detection sensor 5b. In some embodiments, the light detection sensor 5b may be a 2D image sensor, such as... Figure 10 The diagram shows a configuration consisting of a position sensor 5b-1 and a slit 5b-2 perpendicular to the XOZ plane. The projection of light onto the position sensor 5b-1 forms the corresponding projection mark point, which the position sensor 5b-1 is used to detect. For example... Figure 6 As shown, the line laser 5a can adjust the beam angle on the XOZ plane, and its third emitted beam 5d diverges within the XOZ plane but not in the direction perpendicular to the XOZ plane. The first emitted beam 5e (a portion of the beam) is reflected by the part under test 3 and collected and detected by the light detection sensor 5b; the second emitted beam 5f (another portion of the beam) is projected onto the side of the part under test 3 and collected and detected by the marker detector 5c.

[0045] like Figure 7 As shown, the projection of the second emitted light 5f from the line laser 5a onto the workpiece 3 under test is the first projection mark 5g. The mark detector 5c can detect the relative deviation between the first projection mark 5g and the orientation mark 3a on the side of the workpiece 3 under test. By rotating and adjusting the workpiece 3 under test using the workpiece rotary table 2 or the workpiece posture adjustment table 2d, the first projection mark 5g is aligned with the orientation mark 3a on the side of the workpiece 3 under test, thus achieving alignment of the workpiece 3 under test. Figures 7 to 9As shown, the first emitted light beam 5e from the line laser 5a is reflected by the upper surface of the workpiece 3 under test, forming a third projection mark 5h on the detection surface of the light detection sensor 5b. When the workpiece 3 under test has a tilt or translational deviation, the third projection mark 5h deviates from its nominal position. When the workpiece rotary table 2a rotates the workpiece 3 under test, the deviation of the third projection mark 5h changes with the rotation angle of the workpiece rotary table 2a. Figure 4 The fluctuation shown is adjusted by using the part attitude adjustment stage 2d to adjust the tilt or translation of the measured part 3, so that... Figure 4 The fluctuation amplitude shown is the smallest, at which point the adjustment and alignment of the tilt and translation state of the tested part 3 can be achieved.

[0046] Example 3

[0047] In this embodiment, the difference from Embodiment 2 is that the alignment detection unit 5 in Embodiment 3 may only include the self-illuminating mark detection component 5j, such as... Figure 11 As shown, the functions of the line laser 5a and the mark detection sensor 5c are implemented by the self-emissive mark detection component 5j. Its emitted light path principle is the same as in Embodiment 2. The self-emissive mark detection component 5j can not only measure the alignment deviation between the projected mark 5g on the side portion (diffuse reflection) of the tested part 3 and the orientation mark 3a, but also capture the portion of light reflected by the projected mark 5j after passing through the upper surface of the tested part 3, thereby measuring its offset relative to the nominal position. This allows for the determination of the tilt or translation deviation of the tested part 3, enabling alignment of the tested part 3 based on the tilt or translation deviation.

[0048] In this specification, similar or identical parts between the various embodiments can be referred to interchangeably, and each embodiment focuses on describing the differences from other embodiments. Furthermore, this specification uses specific terms to describe the embodiments. For example, "an embodiment," "one embodiment," and / or "some embodiments" refer to a particular feature, structure, or characteristic related to at least one embodiment of this specification. Therefore, it should be emphasized and noted that "an embodiment," "one embodiment," or "an alternative embodiment" mentioned twice or more in different locations in this specification do not necessarily refer to the same embodiment. In addition, certain features, structures, or characteristics in one or more embodiments of this specification can be appropriately combined.

[0049] The basic concepts have been described above. Obviously, for those skilled in the art, the detailed disclosure above is merely illustrative and does not constitute a limitation of this specification. Although not explicitly stated herein, those skilled in the art may make various modifications, improvements, and corrections to this specification. Such modifications, improvements, and corrections are suggested in this specification and therefore remain within the spirit and scope of the exemplary embodiments described herein.

Claims

1. A morphology detection system, characterized in that, The device includes a motion unit, a topography detection unit, and an alignment detection unit. The motion unit is used to fix or move and adjust the part under test and the topography detection unit. The topography detection unit is used to perform topography detection on the part under test to obtain topography detection information. The alignment detection unit is used to perform alignment deviation detection on the part under test to obtain alignment deviation error information, and based on the alignment deviation error information, the motion unit is used to align the part under test. The motion unit includes a workpiece rotary table, a probe rotary table, a two-dimensional linear motion table, and a part posture adjustment table. The bottom of the workpiece rotary table is fixed to the mechanical frame. The part posture adjustment table is fixed to the workpiece rotary table and can clamp and fix the part to be measured. The two-dimensional linear motion table is also fixed to the mechanical frame and is located above the part to be measured. The probe rotary table is mounted on the two-dimensional linear motion table, so that the two-dimensional linear motion table can drive the probe rotary table to achieve two-dimensional displacement. The rotation axis of the probe rotary table is perpendicular to the motion trajectory plane of the two-dimensional linear motion table, and the rotation axis of the workpiece rotary table is parallel to the motion trajectory plane of the two-dimensional linear motion table. The topography detection unit includes a topography probe, an eccentricity detection sensor, an eccentricity detection reference surface, a horizontal displacement detection sensor, a horizontal displacement detection reference surface, a vertical displacement detection sensor, and a vertical displacement detection reference surface. The topography probe and the eccentricity detection sensor are both fixed on the probe rotation stage, allowing them to rotate around the axis of the probe rotation stage. The eccentricity detection reference surface, the horizontal displacement detection sensor, and the vertical displacement detection sensor are all fixed on the two-dimensional linear motion stage, enabling the two-dimensional linear motion stage to drive the eccentricity detection reference surface, the horizontal displacement detection sensor, and the vertical displacement detection sensor to achieve two-dimensional displacement. The measuring axes of the topography probe, the eccentricity detection sensor, the horizontal displacement detection sensor, and the vertical displacement detection sensor are all coplanar with the rotation axis of the workpiece rotary table on a first plane, and are orthogonal to the rotation axis of the probe rotary table at the first point. The rotation axis of the eccentricity detection reference surface coincides with the rotation axis of the probe rotary table, or the center of the sphere of the eccentricity detection reference surface passes through the first point.

2. The morphology detection system according to claim 1, characterized in that, The eccentricity detection sensor monitors the eccentricity crosstalk during the rotation of the probe rotary table by detecting the change in the relative distance between itself and the eccentricity detection reference surface.

3. The morphology detection system according to claim 2, characterized in that, When the two-dimensional linear motion stage moves the horizontal displacement detection sensor and the vertical displacement detection sensor, the displacement of the two-dimensional linear motion stage and the probe rotary table is obtained by measuring the distance change of the two-dimensional linear motion stage relative to the horizontal displacement detection reference surface and the vertical displacement detection reference surface, respectively.

4. The morphology detection system according to claim 1, characterized in that, The alignment detection unit includes a line laser and a marker detector. The horizontal displacement detection reference plane and the horizontal displacement detection sensor are arranged at an angle. The measuring axis of the horizontal displacement detection sensor is perpendicular to the horizontal displacement detection reference plane. The first emitted light from the line laser is reflected by the upper surface of the part under test to the horizontal displacement detection reference plane and then reflected again to the upper surface of the part under test, obtaining a first projection mark and a second projection mark. The tilt or translation state of the part under test is adjusted by the part attitude adjustment stage, so that the first projection mark and the second projection mark are aligned.

5. The morphology detection system according to claim 4, characterized in that, The alignment detection unit also includes a light detection sensor. The first emitted light from the line laser is reflected by the upper surface of the part under test and forms a third projection mark on the detection surface of the light detection sensor. Based on the deviation of the third projection mark from the nominal position, the tilt or translation state of the part under test is adjusted by the part attitude adjustment stage to achieve alignment.

6. The morphology detection system according to claim 5, characterized in that, The line laser is used to obtain a fourth projection mark on the part under test by emitting a second outgoing light. The mark detector is used to detect the relative deviation information between the first projection mark and the orientation mark on the side of the part under test. The part under test is rotated and adjusted by the workpiece rotary table or the part posture adjustment table to achieve alignment between the fourth projection mark and the orientation mark on the side of the part under test.

7. The morphology detection system according to claim 6, characterized in that, The line laser and the marker detector are implemented as a self-illuminating marker detection component. The self-illuminating marker detection component is used to measure the alignment deviation between the diffuse reflection of the first projected marker on the side of the part under test and the orientation marker, and to capture the portion of light reflected by the second projected marker again through the upper surface of the part under test, so as to obtain the offset relative to the nominal position.

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