A mechanical hand for micro-nano operation

Abstract

This invention provides a robotic hand for micro / nano manipulation, comprising a micro-motion positioning device, a motion control device, an end effector, and a drive device. The end effector is mounted on the micro-motion positioning device. The motion control device can control the micro-motion positioning device to drive the end effector to move in at least three non-collinear directions, thereby adjusting the distance between the end effector and the micro / nano device. The drive device is electrically connected to the end effector via wires and is used to drive the end effector to generate electrostatic force on the micro / nano device, realizing direct grasping and release of the micro / nano device. The technical solution of this invention solves the problems of existing micro / nano manipulation devices, such as complex structure, difficulty in miniaturization, low accuracy of feedback information, poor stability, and high cost.

Description

Technical Field

[0001] This invention relates to the field of microelectromechanical systems (MEMS) technology, and more particularly to a robotic arm for micro-nano manipulation. Background Technology

[0002] Micro-nano manipulation is a technology that utilizes various driving principles and sensing feedback mechanisms to perform operations such as positioning, clamping, transporting, placing, and releasing tiny objects at the micrometer or nanometer scale. Micro-nano manipulation involves multiple interdisciplinary fields, such as mechanical engineering, electrical engineering, physics, chemistry, and biology, aiming to reveal physical phenomena and laws at the micro-nano scale, fabricate micro-nano structures or devices with new functions and properties, and achieve precise control and intervention in life processes and disease treatment.

[0003] Currently, there are many types of robotic arms used for micro-nano manipulation, which can be divided into contact and non-contact types according to the method of manipulating micro-devices. Contact types include various grippers that manipulate micro-devices by holding them in place. This method requires direct contact between the gripper and the micro-device, placing high demands on the gripper's control and sometimes causing mechanical damage to the micro-device. Contact types include electro-levitation and magnetic levitation. Electro-levitation uses electrostatic force to pick up, move, and release micro-devices; magnetic levitation uses magnetic force to manipulate micro-devices, generally requiring large coils and making miniaturization difficult. Existing micro-nano manipulation robotic arms have various limitations, including high cost, large size, direct contact with micro-devices, difficult control, complex structure, and low feedback accuracy. Summary of the Invention

[0004] To address the problems of existing micro-nano manipulation devices having complex structures or being difficult to miniaturize, or having low accuracy and poor stability in manipulation feedback or feedback information even though miniaturization and simplification are possible, or having high costs due to the use of piezoelectric ceramics for positioning the manipulator. This invention provides a manipulator for micro-nano manipulation.

[0005] The technical means employed in this invention are as follows:

[0006] A robotic arm for micro / nano manipulation includes a micro-motion positioning device, a motion control device, an end effector, and a drive device. The end effector is mounted on the micro-motion positioning device. The motion control device can be used to control the micro-motion positioning device to drive the end effector to move in at least three non-collinear directions, thereby adjusting the distance between the end effector and the micro / nano device. The drive device is electrically connected to the end effector via wires and is used to drive the end effector to generate electrostatic force on the micro / nano device, thereby realizing direct grasping and releasing of the micro / nano device.

[0007] Furthermore, the end effector includes a probe; the driving device is electrically connected to the probe via a wire; the driving device is used to drive the probe to generate an electrostatic force to form a connection with the micro / nano device; the driving device can adjust the magnitude of the electrostatic force for different distances between the probe and the micro / nano device and for micro / nano devices made of different materials, thereby enabling the probe to directly grasp and release the micro / nano device.

[0008] Furthermore, when the distance between the probe and the micro / nano device remains constant, the greater the electrostatic force adjusted by the driving device, the greater the gripping force of the probe on the micro / nano device.

[0009] Furthermore, the driving device drives the probe to generate electrostatic force to form a connection with the micro / nano device, thereby forming a resonant circuit between the driving device, the probe, and the micro / nano device. The connection between the probe and the micro / nano device is equivalent to a capacitor in the resonant circuit.

[0010] The driving device includes a signal source, an adjustable resistor, and an inductor array. The driving device can adjust the resistance value of the adjustable resistor and the inductance value of the inductor array through an adjustable knob and a multi-segment switch, and can send an output signal to the probe through the signal source.

[0011] The resonant frequency of the resonant circuit is related to the inductance value of the driving device and the distance between the probe and the micro / nano device. When the distance between the probe and the micro / nano device is constant, the resonant frequency of the resonant circuit can be adjusted by adjusting the inductance value of the driving device. The frequency of the resonant circuit can be adjusted by adjusting the resistance value of the driving device and the frequency and amplitude of the output signal sent to the probe. When the frequency of the resonant circuit reaches the resonant frequency, the electrostatic force can reach its maximum and gradually decrease as the frequency of the resonant circuit moves away from the resonant frequency.

[0012] Furthermore, when the probe is connected to the positive terminal of the driving device, it can generate an electrostatic force on the micro / nano device, thereby enabling a grasping operation.

[0013] When the probe is connected to the negative terminal of the driving device, the probe will not generate electrostatic force on the micro / nano device, thereby enabling a release operation;

[0014] The change of the probe's connection to the positive or negative terminal of the drive device is performed manually.

[0015] Furthermore, the end effector also includes a probe holder and a fastening screw. The probe holder is used to hold the probe, and one end of the fastening screw is fixedly connected to the probe holder, while the other end is fixedly connected to the micro-positioning device through a connecting device.

[0016] The micro-positioning device includes an X electric slide table, a Y electric slide table, a Z electric slide table, a connecting plate, a mounting plate, a support block, and a base plate.

[0017] The X-shaped electric slide is slidably mounted on the base plate; the support block is fixedly mounted above the X-shaped electric slide, and the Y-shaped electric slide is slidably mounted above the support block; the connecting plate is an L-shaped plate, the horizontal plate is fixedly mounted above the Y-shaped electric slide, and the Z-shaped electric slide is slidably mounted on the vertical plate of the connecting plate; the mounting plate is fixedly mounted on the side of the Z-shaped electric slide, and the connecting device is fixedly connected to the mounting plate;

[0018] In the direct coordinate system with the center of the base plate as the origin, the X electric slide can reciprocate linearly along the x direction on the base plate, the Y electric slide can reciprocate linearly along the y direction on the X electric slide, and the Z electric slide can reciprocate linearly along the z direction on the vertical plate of the connecting plate.

[0019] The motion control device is used to control the movement speed and movement distance of the X electric slide, the Y electric slide and the Z electric slide, thereby adjusting the distance between the end effector and the micro / nano device.

[0020] Furthermore, the base plate is provided with mounting holes for mounting and fixing the micro-positioning device, and the size of the base plate should be sufficient to keep the entire micro-positioning device balanced.

[0021] Furthermore, the connecting device is a screw, which can be threadedly connected to the fastening screw.

[0022] Compared with the prior art, the present invention has the following advantages:

[0023] The robotic arm for micro-nano manipulation provided by this invention can realize the movement of micro-nano devices and direct grasping and releasing operations. The position of the end effector can be precisely adjusted by the micro-motion positioning device, which improves the control accuracy. At the same time, by adjusting the output parameters of the drive device, the operation requirements of micro-nano devices of different sizes and materials can be met.

[0024] Based on the above reasons, this invention can be widely applied in the field of micro-nano manipulation devices. Attached Figure Description

[0025] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0026] Figure 1 This is a schematic diagram of the robotic arm structure for micro-nano manipulation described in this invention.

[0027] Figure 2 This is a schematic diagram of the micro-motion positioning device, the end effector, and the connecting device described in this invention.

[0028] Figure 3 This is a schematic diagram of the end effector structure described in this invention.

[0029] In the figure: 1. Micro-positioning device; 2. Motion control device; 3. Connecting device; 4. End effector; 5. Drive device; 6. X electric slide; 7. Z electric slide; 8. Connecting plate; 9. Y electric slide; 10. Base plate; 11. Support block; 12. Mounting plate; 13. Probe fixture; 14. Probe. Detailed Implementation

[0030] It should be noted that, unless otherwise specified, the embodiments and features described in the present invention can be combined with each other. The present invention will now be described in detail with reference to the accompanying drawings and embodiments.

[0031] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The following description of at least one exemplary embodiment is merely illustrative and is in no way intended to limit the present invention or its application or use. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0032] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the scope of exemplary embodiments according to the invention. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0033] Unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps described in these embodiments do not limit the scope of the invention. It should also be understood that, for ease of description, the dimensions of the various parts shown in the drawings are not drawn to actual scale. Techniques, methods, and devices known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and devices should be considered part of the specification. In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters in the following figures denote similar items; therefore, once an item is defined in one figure, it need not be further discussed in subsequent figures.

[0034] In the description of this invention, it should be understood that the orientation or positional relationship indicated by directional terms such as "front, back, up, down, left, right", "horizontal, vertical, horizontal" and "top, bottom" is generally based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing this invention and simplifying the description. Unless otherwise stated, these directional terms do not indicate or imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the scope of protection of this invention. The directional terms "inner" and "outer" refer to the inner and outer contours relative to the outline of each component itself.

[0035] For ease of description, spatial relative terms such as "above," "over," "on the upper surface of," "above," etc., are used herein to describe the spatial positional relationship of a device or feature as shown in the figures to other devices or features. It should be understood that spatial relative terms are intended to encompass different orientations in use or operation besides the orientation of the device as described in the figures. For example, if the device in the figures is inverted, a device described as "above" or "above" other devices or structures would subsequently be positioned as "below" or "under" other devices or structures. Thus, the exemplary term "above" can include both "above" and "below." The device may also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatial relative descriptions used herein will be interpreted accordingly.

[0036] Furthermore, it should be noted that the use of terms such as "first" and "second" to define components is merely for the purpose of distinguishing the corresponding components. Unless otherwise stated, the above terms have no special meaning and therefore should not be construed as limiting the scope of protection of this invention.

[0037] Example 1

[0038] like Figure 1-3 As shown, the present invention provides a robotic hand for micro-nano manipulation, including a micro-positioning device 1, a motion control device 2, an end effector 4, and a drive device 5. The end effector 4 is mounted on the micro-positioning device 1. The motion control device 2 can be used to control the micro-positioning device 1 to drive the end effector 4 to move in at least three non-collinear directions, thereby adjusting the distance between the end effector 4 and the micro / nano device. The drive device 5 is electrically connected to the end effector 4 through wires and is used to drive the end effector 4 to generate electrostatic force on the micro / nano device, thereby realizing the direct grasping and release of the micro / nano device.

[0039] Furthermore, the end effector 4 includes a probe 14, which can be prepared by electrochemical etching using materials such as tungsten wire or platinum wire; the driving device 5 is electrically connected to the probe 14 via a wire; the driving device 5 is used to drive the probe 14 to generate an electrostatic force to form a connection with the micro / nano device; the driving device 5 can adjust the magnitude of the electrostatic force for different distances between the probe 14 and the micro / nano device and for micro / nano devices made of different materials, so that the probe 14 can directly grasp and release the micro / nano device.

[0040] Furthermore, when the distance between the probe 14 and the micro / nano device remains constant, the greater the electrostatic force adjusted by the driving device 5, the greater the gripping force of the probe 14 on the micro / nano device.

[0041] Furthermore, the driving device 5 drives the probe 14 to generate electrostatic force to form a connection with the micro / nano device, thereby forming a resonant circuit between the driving device 5, the probe 14, and the micro / nano device. The connection between the probe 14 and the micro / nano device is equivalent to a capacitor in the resonant circuit.

[0042] The driving device 5 includes a signal source, an adjustable resistor, and an inductor array. The driving device 5 can adjust the resistance value of the adjustable resistor and the inductance value of the inductor array through an adjustable knob and a multi-segment switch, and can send an output signal to the probe 14 through the signal source. The driving device 5 is also equipped with a power amplifier.

[0043] The resonant frequency (resonant point) of the resonant circuit is related to the inductance value of the driving device 5 and the distance between the probe 14 and the micro / nano device. When the distance between the probe 14 and the micro / nano device is constant, the resonant frequency of the resonant circuit can be adjusted by adjusting the inductance value of the driving device 5. The frequency of the resonant circuit can be adjusted by adjusting the resistance value of the driving device 5 and the frequency and amplitude of the output signal sent to the probe 14. When the frequency of the resonant circuit reaches the resonant frequency, the electrostatic force can reach its maximum and gradually decrease as the frequency of the resonant circuit moves away from the resonant frequency.

[0044] Furthermore, when the probe 14 is connected to the positive electrode of the driving device 5, the probe 14 can generate an electrostatic force on the micro / nano device, thereby enabling a grasping operation.

[0045] When the probe 14 is connected to the negative terminal of the driving device 5, the probe 14 will not generate electrostatic force on the micro / nano device, thereby enabling a release operation.

[0046] The change of the connection between the probe 14 and the positive or negative terminal of the drive device 5 is performed manually.

[0047] Furthermore, the end effector 4 also includes a probe clamp 13 and a fastening screw 15. The probe clamp 13 is used to hold the probe, and one end of the fastening screw 15 is fixedly connected to the probe clamp 13, and the other end is fixedly connected to the micro-positioning device 1 through the connecting device 3.

[0048] The micro-positioning device 1 includes an X electric slide 6, a Y electric slide 9, a Z electric slide 7, a connecting plate 8, a mounting plate 12, a support block 11, and a base plate 10.

[0049] The X-shaped electric slide 6 is slidably mounted on the base plate 10; the support block 11 is fixedly mounted above the X-shaped electric slide 6, and the Y-shaped electric slide 9 is slidably mounted above the support block 11; the connecting plate 8 is an L-shaped plate, the horizontal plate is fixedly mounted above the Y-shaped electric slide 9, and the Z-shaped electric slide 7 is slidably mounted on the vertical plate of the connecting plate 8; the mounting plate 12 is fixedly mounted on the side of the Z-shaped electric slide 7, and the connecting device 3 is fixedly connected to the mounting plate 12;

[0050] In the direct coordinate system with the center of the base plate 10 as the origin, the X electric slide 6 can perform linear reciprocating motion along the x direction on the base plate 10, the Y electric slide 9 can perform linear reciprocating motion along the y direction on the X electric slide 6, and the Z electric slide 7 can perform linear reciprocating motion along the z direction on the vertical plate of the connecting plate 8.

[0051] The motion control device 2 is used to control the movement speed and movement distance of the X electric slide 6, the Y electric slide 9 and the Z electric slide 7, thereby adjusting the distance between the end effector 4 and the micro / nano device.

[0052] Furthermore, the motion control device 2 can be an existing controller, such as a PLC, which will not be described in detail here.

[0053] Furthermore, the X electric slide 6, the Y electric slide 9, and the Z electric slide 7 can all be existing electric slide products composed of precision stepper motors and high-precision helical transmission mechanisms. Through subdivision modulation and hysteresis control, the electric slide can achieve a motion accuracy of 1nm. This invention will not elaborate further.

[0054] Furthermore, the base plate 10 is provided with mounting holes for mounting and fixing the micro-positioning device 1, and the size of the base plate 10 should be sufficient to keep the entire micro-positioning device 1 balanced.

[0055] Furthermore, the connecting device 3 is a screw that can be threadedly connected to the fastening screw 5.

[0056] Based on the robotic arm for micro-nano manipulation provided by the present invention, it is possible to pick up, move and release micro-nano devices. By adjusting the output parameters of the driving device 5, the operation requirements of micro-nano devices of different sizes and materials can be met.

[0057] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and are not intended to limit them. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A robotic arm for micro / nano manipulation, characterized in that, The device includes a micro-positioning device, a motion control device, an end effector, and a drive device. The end effector is mounted on the micro-positioning device. The motion control device can be used to control the micro-positioning device to drive the end effector to move in at least three non-collinear directions, thereby adjusting the distance between the end effector and the micro / nano device. The drive device is electrically connected to the end effector via wires and is used to drive the end effector to generate electrostatic force on the micro / nano device, thereby achieving direct grasping and release of the micro / nano device. The end effector includes a probe; the driving device is electrically connected to the probe via a wire; the driving device is used to drive the probe to generate an electrostatic force to form a connection with the micro / nano device; the driving device can adjust the magnitude of the electrostatic force for different distances between the probe and the micro / nano device and for micro / nano devices made of different materials, so that the probe can directly grasp and release the micro / nano device. The driving device drives the probe to generate electrostatic force to form a connection with the micro / nano device, thereby forming a resonant circuit between the driving device, the probe, and the micro / nano device. The connection between the probe and the micro / nano device is equivalent to a capacitor in the resonant circuit. The driving device includes a signal source, an adjustable resistor, and an inductor array. The driving device can adjust the resistance value of the adjustable resistor and the inductance value of the inductor array through an adjustable knob and a multi-segment switch, and can send an output signal to the probe through the signal source. The resonant frequency of the resonant circuit is related to the inductance value of the driving device and the distance between the probe and the micro / nano device. When the distance between the probe and the micro / nano device is constant, the resonant frequency of the resonant circuit can be adjusted by adjusting the inductance value of the driving device. The frequency of the resonant circuit can be adjusted by adjusting the resistance value of the driving device and the frequency and amplitude of the output signal sent to the probe. When the frequency of the resonant circuit reaches the resonant frequency, the electrostatic force can reach its maximum and gradually decrease as the frequency of the resonant circuit moves away from the resonant frequency.

2. The robotic arm for micro / nano manipulation according to claim 1, characterized in that, When the distance between the probe and the micro / nano device remains constant, the greater the electrostatic force adjusted by the driving device, the greater the gripping force of the probe on the micro / nano device.

3. The robotic arm for micro / nano manipulation according to claim 1, characterized in that, When the probe is connected to the positive terminal of the driving device, it can generate an electrostatic force on the micro / nano device, thereby enabling a grasping operation. When the probe is connected to the negative terminal of the driving device, the probe will not generate electrostatic force on the micro / nano device, thereby enabling a release operation.

4. The robotic arm for micro / nano manipulation according to claim 1, characterized in that, The end effector also includes a probe holder and a fastening screw. The probe holder is used to hold the probe. One end of the fastening screw is fixedly connected to the probe holder, and the other end is fixedly connected to the micro-positioning device through a connecting device. The micro-positioning device includes an X electric slide table, a Y electric slide table, a Z electric slide table, a connecting plate, a mounting plate, a support block, and a base plate. The X-shaped electric slide is slidably mounted on the base plate; the support block is fixedly mounted above the X-shaped electric slide, and the Y-shaped electric slide is slidably mounted above the support block; the connecting plate is an L-shaped plate, the horizontal plate is fixedly mounted above the Y-shaped electric slide, and the Z-shaped electric slide is slidably mounted on the vertical plate of the connecting plate; the mounting plate is fixedly mounted on the side of the Z-shaped electric slide, and the connecting device is fixedly connected to the mounting plate; In the direct coordinate system with the center of the base plate as the origin, the X electric slide can reciprocate linearly along the x direction on the base plate, the Y electric slide can reciprocate linearly along the y direction on the X electric slide, and the Z electric slide can reciprocate linearly along the z direction on the vertical plate of the connecting plate. The motion control device is used to control the movement speed and movement distance of the X electric slide, the Y electric slide and the Z electric slide, thereby adjusting the distance between the end effector and the micro / nano device.

5. The robotic arm for micro / nano manipulation according to claim 4, characterized in that, The base plate is provided with mounting holes for mounting and fixing the micro-positioning device. The size of the base plate should be sufficient to keep the entire micro-positioning device balanced.

6. The robotic arm for micro / nano manipulation according to claim 4, characterized in that, The connecting device is a screw, which can be threadedly connected to the fastening screw.

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