Electro-optic modulator

Abstract

The present invention provides an electro-optic modulator, which includes a substrate layer, a waveguide arranged on the substrate layer, and an electrode structure; wherein the waveguide includes a waveguide core layer and a waveguide cladding; the waveguide core layer includes a slit waveguide, and the slit waveguide includes a first waveguide, an intermediate slit layer and a second waveguide; the electrode structure includes a plurality of electrodes, and the plurality of electrodes are used to generate an electric field; the electric field is used to change the characteristics of the functional material of the first waveguide, the characteristics of the functional material of the second waveguide, and the characteristics of the functional material of the intermediate slit layer, thereby changing the optical transmission characteristics of the waveguide, thereby realizing electro-optic modulation.

Description

Technical Field

[0001] The present invention relates to the field of optoelectronic technology, and more particularly to an electro-optical modulator. Background Art

[0002] Electro-optical modulators are a key component in photonic links. High-performance electro-optical modulators enable the transfer of electrical signals onto optical carriers, converting information from the electrical to the optical domain and thus enabling high-speed photonic links. Furthermore, electro-optical modulators can be used to construct functional devices such as electrically controlled optical switches and optical logic devices. They are also core components in optoelectronic systems such as optical switching and optical computing.

[0003] In the process of realizing the concept of the present invention, the inventors discovered that there are at least the following problems in the related art: the modulation efficiency of the electro-optical modulator in the related art is low. Summary of the Invention

[0004] To address the above needs, the present invention provides an electro-optic modulator comprising: a substrate layer, a waveguide disposed on the substrate layer, and an electrode structure. The waveguide comprises a waveguide core layer and a waveguide cladding. The waveguide core layer comprises a slot waveguide, which comprises a first waveguide, an intermediate slot layer, and a second waveguide. The electrode structure comprises a plurality of electrodes configured to generate an electric field. This electric field is configured to alter the properties of the functional material of the first waveguide, the functional material of the second waveguide, and the functional material of the intermediate slot layer, thereby changing the optical transmission properties of the waveguides and achieving electro-optical modulation.

[0005] According to an embodiment of the present invention, a functional material of the first waveguide is different from a functional material of the intermediate slit layer. A functional material of the second waveguide is different from a functional material of the intermediate slit layer.

[0006] According to an embodiment of the present invention, the functional materials of the first waveguide and the second waveguide include functional materials having an electro-optical modulation function.

[0007] According to an embodiment of the present invention, the functional material of the intermediate slit layer includes a functional material having an electro-optical modulation function.

[0008] According to an embodiment of the present invention, the first waveguide, the second waveguide and the plurality of electrodes are laterally distributed along a horizontal direction.

[0009] According to an embodiment of the present invention, the first electrode, the first waveguide, the second waveguide, and the plurality of electrodes are longitudinally distributed along a vertical direction.

[0010] According to an embodiment of the present invention, the electro-optic modulator further includes a covering layer, and the covering layer is located above the waveguide cladding layer to further confine the light field.

[0011] According to an embodiment of the present invention, when the covering layer is made of a conductive material, the covering layer serves as an electrode, and the covering layer and the plurality of electrodes are used together to generate an electric field.

[0012] According to an embodiment of the present invention, the waveguide core layer further includes a slab waveguide, a rectangular waveguide or a ridge waveguide.

[0013] According to an embodiment of the present invention, the electro-optical modulator is used to implement electro-optical modulation including phase modulation, frequency modulation, intensity modulation, polarization modulation and in-phase orthogonal modulation.

[0014] According to an embodiment of the present invention, the materials of the first waveguide, the second waveguide and the middle slit layer are all functional materials, and an electro-optic modulator is constructed by using two or more functional materials, thereby improving the modulation efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The above contents and other objects, features and advantages of the present invention will become more apparent through the following description of the embodiments of the present invention with reference to the accompanying drawings, in which:

[0016] Figure 1 shows a schematic cross-sectional view of an electro-optical modulator according to a first embodiment of the present invention;

[0017] Figure 2 shows a schematic cross-sectional view of an electro-optical modulator according to a second embodiment of the present invention;

[0018] Figure 3 shows a schematic cross-sectional view of an electro-optical modulator according to a third embodiment of the present invention;

[0019] Figure 4 shows a schematic cross-sectional view of an electro-optical modulator according to a fourth embodiment of the present invention;

[0020] Figure 5 shows a schematic cross-sectional view of an electro-optical modulator according to a fifth embodiment of the present invention;

[0021] Figure 6 shows a schematic cross-sectional view of an electro-optical modulator according to a sixth embodiment of the present invention;

[0022] Figure 7 shows a schematic cross-sectional view of an electro-optical modulator according to a seventh embodiment of the present invention;

[0023] Figure 8 shows a schematic cross-sectional view of an electro-optical modulator according to an eighth embodiment of the present invention;

[0024] Figure 9shows a schematic cross-sectional view of an electro-optical modulator according to a ninth embodiment of the present invention;

[0025] Figure 10 shows a schematic cross-sectional view of an electro-optical modulator according to a tenth embodiment of the present invention;

[0026] Figure 11 shows a schematic cross-sectional view of an electro-optical modulator according to an eleventh embodiment of the present invention;

[0027] Figure 12 shows a schematic cross-sectional view of an electro-optical modulator according to a twelfth embodiment of the present invention;

[0028] Figure 13 shows a schematic cross-sectional view of an electro-optical modulator according to a thirteenth embodiment of the present invention;

[0029] Figure 14 shows a schematic cross-sectional view of an electro-optical modulator according to a fourteenth embodiment of the present invention;

[0030] Figure 15 shows a schematic structural diagram of a Mach-Zehnder electro-optical modulator according to an embodiment of the present invention;

[0031] Figure 16 A schematic structural diagram of a Fabry-Perot interferometer electro-optical modulator according to an embodiment of the present invention is shown;

[0032] Figure 17 A schematic structural diagram of a micro-ring electro-optical modulator according to an embodiment of the present invention is shown;

[0033] Figure 18 A schematic structural diagram of another micro-ring electro-optical modulator according to an embodiment of the present invention is shown;

[0034] Figure 19 shows a structural schematic diagram of another micro-ring electro-optical modulator according to an embodiment of the present invention; and

[0035] Figure 20 A schematic structural diagram of an in-phase orthogonal electro-optic modulator according to an embodiment of the present invention is shown. DETAILED DESCRIPTION

[0036] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. However, it should be understood that these descriptions are exemplary only and are not intended to limit the scope of the present invention. In the following detailed description, for ease of explanation, many specific details are set forth to provide a comprehensive understanding of embodiments of the present invention. However, it is apparent that one or more embodiments may also be implemented without these specific details. In addition, in the following description, descriptions of known structures and technologies are omitted to avoid unnecessary confusion of the concept of the present invention.

[0037] The terms used herein are only for describing specific embodiments and are not intended to limit the present invention. The terms "comprise", "include", etc. used herein indicate the presence of the features, steps, operations and / or components, but do not exclude the presence or addition of one or more other features, steps, operations or components.

[0038] All terms used herein (including technical and scientific terms) have the meanings commonly understood by those skilled in the art unless otherwise defined. It should be noted that the terms used herein should be interpreted as having a meaning consistent with the context of this specification and should not be interpreted in an idealized or overly rigid manner.

[0039] Electro-optical modulators are a key component in photonic links. High-performance electro-optical modulators enable the transfer of electrical signals onto optical carriers, converting information from the electrical to the optical domain and thus enabling high-speed photonic links. Furthermore, electro-optical modulators can be used to construct functional devices such as electrically controlled optical switches and optical logic devices. They are also core components in optoelectronic systems such as optical switching and optical computing.

[0040] Electro-optic modulators such as phase modulators, intensity modulators and Y-branch modulators have been widely used in fields such as optical fiber communications and integrated optoelectronic chips.

[0041] In the process of realizing the concept of the present invention, the inventors discovered that there are at least the following problems in the related art: the modulation efficiency of the electro-optical modulator in the related art is low.

[0042] In view of this, there is an urgent need to provide an electro-optic modulator to improve the modulation efficiency of the electro-optic modulator.

[0043] The electro-optic modulator provided by the present invention can be used to realize optical phase modulation, intensity modulation, frequency modulation and polarization modulation, and can be applied in the fields of telecommunications, data communications, optical sensing, optical storage, optical computing and optical display.

[0044] Figure 1 FIG. 4 is a schematic cross-sectional view of an electro-optic modulator according to a first embodiment of the present invention.

[0045] like Figure 1As shown, this cross-sectional schematic diagram shows the internal structure of the electro-optical modulator 100 on a plane perpendicular to its light wave transmission path. The electro-optical modulator 100 includes a substrate layer 110, a waveguide and an electrode structure arranged on the substrate layer 110. The waveguide includes a waveguide core layer and a waveguide cladding 122. The waveguide core layer includes a slit waveguide 121, and the slit waveguide 121 includes a first waveguide 1211, an intermediate slit layer 1213 and a second waveguide 1212. The electrode structure includes a plurality of electrodes, and the plurality of electrodes are used to generate an electric field. The electric field is used to change the properties of the functional material of the first waveguide 1211, the properties of the functional material of the second waveguide 1212, and the properties of the functional material of the intermediate slit layer 1213, thereby changing the light transmission properties of the waveguide, thereby achieving electro-optical modulation.

[0046] According to an embodiment of the present invention, the waveguide is composed of two or more functional materials capable of electro-optical modulation. The functional material of the first waveguide 1211 and the functional material of the second waveguide 1212 can be the same or different. The functional material of the waveguide cladding 122 and the functional material of the intermediate slit layer 1213 can be the same or different.

[0047] According to an embodiment of the present invention, the material of the substrate layer 110 may be an insulating material, including but not limited to silicon dioxide.

[0048] According to an embodiment of the present invention, based on the characteristics of the slot waveguide 121, the slot waveguide 121 can further enhance the confinement of the light field by the electro-optic modulator 100. The light field refers to the manifestation of the light signal during transmission in the waveguide.

[0049] According to an embodiment of the present invention, the electrode structure may include multiple electrodes, and the number of electrodes is not limited in this field. The materials of each of the multiple electrodes may be the same or different.

[0050] According to an embodiment of the present invention, in order to facilitate the description of the direction of the electric field generated by the electrode, Figure 1 FIG. 1 shows a structural diagram of an electro-optical modulator 100 including two electrodes. Figure 1 The hollow arrows in show the transverse electric field direction.

[0051] According to the embodiment of the present invention, the present invention does not limit the method for generating the electric field, and the electric field may be generated by, but is not limited to, applying an external voltage to a plurality of electrodes.

[0052] According to an embodiment of the present invention, under the action of an electric field, the characteristics of the functional material of the first waveguide 1211, the characteristics of the functional material of the second waveguide 1212, and the characteristics of the functional material of the intermediate slit layer 1213 will be changed, and then the optical transmission characteristics of the waveguide will be changed. For example, the effective complex refractive index of the light field mode will change, thereby realizing electro-optical modulation.

[0053] According to an embodiment of the present invention, the optical transmission characteristics of the waveguide include optical phase characteristics, optical intensity characteristics, optical frequency characteristics, and optical polarization characteristics. The electro-optical modulation implemented by the electro-optical modulator 100 includes modulation of optical phase, optical intensity, optical frequency, and optical polarization.

[0054] According to an embodiment of the present invention, the modulation principle of the electro-optic modulator 100 may include but is not limited to the electro-optic effect, which includes a linear electro-optic effect (eg, the Pockels effect) and a nonlinear electro-optic effect (eg, the Kerr effect).

[0055] According to an embodiment of the present invention, the first waveguide 1211 , the second waveguide 1212 and the middle slit layer 1213 are all functional materials, and the electro-optic modulator 100 is constructed by using two or more functional materials, thereby improving the modulation efficiency.

[0056] According to an embodiment of the present invention, the functional material of the first waveguide 1211 is different from the functional material of the middle slit layer 1213. The functional material of the second waveguide 1212 is different from the functional material of the middle slit layer 1213.

[0057] According to embodiments of the present invention, the waveguide cladding 122 can be used to enhance confinement of the transmitted light field. The material of the waveguide cladding 122 can be a functional material with electro-optical modulation capabilities, enabling the waveguide cladding 122 to perform a modulation function. Specifically, when the material of the waveguide cladding 122 is a functional material with electro-optical modulation capabilities, the waveguide cladding 122 can increase the electro-optical interaction region, for example, by expanding the electro-optical interaction region from the waveguide core layer to the waveguide core layer and the waveguide cladding 122, thereby improving modulation efficiency.

[0058] According to an embodiment of the present invention, the material of the waveguide cladding 122 may also be other common materials to further confine the light field. The present invention does not limit the material of the waveguide cladding 122.

[0059] According to an embodiment of the present invention, in order to facilitate the description of the position of the waveguide cladding 122, the plurality of electrodes may include a first electrode 131 and a second electrode 132. Figure 1As shown, the waveguide cladding 122 can cover the waveguide core layer. The waveguide cladding 122 can also fill the gap between the first electrode 131 and the waveguide core layer. The waveguide cladding 122 can also fill the gap between the second electrode 132 and the waveguide core layer to enhance the confinement of the transmitted light field. The material of the waveguide cladding 122 filling the gap between the first electrode 131 and the waveguide core layer can be the same as or different from the material of the waveguide cladding 122 covering the waveguide core layer. The material of the waveguide cladding 122 filling the gap between the second electrode 132 and the waveguide core layer can be the same as or different from the material of the waveguide cladding 122 covering the waveguide core layer. The material of the waveguide cladding 122 filling the gap between the first electrode 131 and the waveguide core layer can be the same as or different from the material of the waveguide cladding 122 filling the gap between the second electrode 132 and the waveguide core layer. The material of the waveguide cladding 122 filled in the gap between the first electrode 131 and the waveguide core layer, and the material of the waveguide cladding 122 filled in the gap between the second electrode 132 and the waveguide core layer can be functional materials with electro-optical modulation function, or can be other ordinary materials, and the present invention does not limit this.

[0060] According to an embodiment of the present invention, the refractive index of the waveguide cladding 122 may be smaller than the refractive index of the waveguide core layer.

[0061] According to an embodiment of the present invention, since the refractive index of the waveguide cladding 122 is smaller than that of the waveguide core layer, a refractive index difference can be created between the waveguide cladding 122 and the waveguide core layer, so that the optical mode can be better confined in the waveguide, thereby improving the optical field confinement capability of the electro-optic modulator 100.

[0062] According to an embodiment of the present invention, the functional materials of the first waveguide 1211 and the second waveguide 1212 include functional materials having an electro-optical modulation function.

[0063] According to an embodiment of the present invention, the functional material of the middle slit layer 1213 includes a functional material having an electro-optical modulation function.

[0064] According to an embodiment of the present invention, functional materials of the first waveguide 1211 and the second waveguide 1212 include but are not limited to ferroelectric materials and two-dimensional materials.

[0065] According to the embodiment of the present invention, the modulation efficiency can be further improved based on the fact that the first waveguide 1211 and the second waveguide 1212 use functional materials with electro-optical modulation function.

[0066] According to an embodiment of the present invention, the functional material of the middle slit layer 1213 includes a functional material having an electro-optical modulation function.

[0067] According to an embodiment of the present invention, the functional material of the middle slit layer 1213 includes but is not limited to organic electro-optical thin film materials and ferroelectric materials.

[0068] According to the embodiments of the present invention, the present invention does not limit the dielectric constants of the various functional materials having electro-optical modulation functions used to construct the electro-optic modulator 100. For ease of description, the multiple electrodes may include a first electrode 131 and a second electrode 132. When the dielectric constant of the first electrode 131 has a different sign from the real part of the dielectric constant of the waveguide cladding 122, and when the dielectric constant of the second electrode 132 has a different sign from the real part of the dielectric constant of the waveguide cladding 122, a hybrid plasmon waveguide structure may be established, thereby further improving modulation efficiency.

[0069] According to an embodiment of the present invention, the first waveguide 1211 , the second waveguide 1212 and the plurality of electrodes are laterally distributed along the horizontal direction.

[0070] Figure 2 FIG. 4 is a schematic cross-sectional view of an electro-optic modulator according to a second embodiment of the present invention.

[0071] like Figure 2 As shown, this cross-sectional schematic diagram shows the internal structure of the electro-optic modulator 100 on a plane perpendicular to its light wave transmission path. In order to facilitate the description of the position arrangement of the electrodes, Figure 2 FIG. 1 shows a structural diagram of an electro-optical modulator 100 in which a plurality of electrodes include a first electrode 131 and a second electrode 132. Figure 2 As shown, the first electrode 131, the first waveguide 1211, the second waveguide 1212, and the second electrode 132 are arranged in the horizontal direction, and the horizontal central axis of the first electrode 131, the horizontal central axis of the first waveguide 1211, the horizontal central axis of the second waveguide 1212, and the horizontal central axis of the second electrode 132 are all approximately parallel to the horizontal central axis of the substrate layer 110. Since the first electrode 131, the first waveguide 1211, the second waveguide 1212, and the second electrode 132 are laterally distributed in the horizontal direction, the direction of the electric field generated by the first electrode 131 and the second electrode 132 is horizontal. Figure 2 The hollow arrows in show the electric field direction of the transverse electric field.

[0072] According to the embodiment of the present invention, based on the horizontal distribution of the first electrode 131 , the first waveguide 1211 , the second waveguide 1212 and the second electrode 132 , the electro-optic modulator 100 can achieve horizontal modulation.

[0073] According to an embodiment of the present invention, Figure 1 There is a gap between the first electrode 131 and the slot waveguide 121, which is different from the gap between the second electrode 132 and the slot waveguide 121. Figure 2The first electrode 131 and the slot waveguide 121 are placed side by side, closely adjacent to each other without a gap, and the second electrode 132 and the slot waveguide 121 are placed side by side, closely adjacent to each other without a gap, thereby reducing the distance between the first electrode 131 and the second electrode 132, increasing the electric field strength, and thereby improving the electro-optical modulation efficiency.

[0074] According to the embodiments of the present invention, the present invention does not limit the dielectric constants of the various functional materials having electro-optical modulation functions used to construct the electro-optic modulator 100. When the dielectric constants of the first electrode 131 and the second electrode 132 have different signs from the real part of the dielectric constant of the waveguide core layer, a hybrid plasmon waveguide structure can be established, thereby improving modulation efficiency.

[0075] Figure 3 FIG. 4 is a schematic cross-sectional view of an electro-optic modulator according to a third embodiment of the present invention.

[0076] like Figure 3 As shown, the electro-optic modulator 100 further includes a cover layer 140 , which is located above the waveguide cladding 122 and is used to further confine the optical field.

[0077] According to an embodiment of the present invention, a light field localization device structure may be constructed based on the cover layer 140 to further confine the light field.

[0078] According to an embodiment of the present invention, the first electrode 131, the first waveguide 1211, the second waveguide 1212 and the second electrode 132 are laterally distributed along the horizontal direction. Figure 3 The hollow arrows in show the electric field direction of the transverse electric field.

[0079] According to the embodiment of the present invention, the present invention does not limit the material of the cover layer 140, nor does it limit the dielectric constant of the material of the cover layer 140. When the real part of the dielectric constant of the cover layer 140 and the dielectric constant of the waveguide cladding 122 have different signs, a hybrid plasmon waveguide structure can be established, thereby further improving the modulation efficiency.

[0080] Figure 4 FIG. 4 is a schematic cross-sectional view of an electro-optic modulator according to a fourth embodiment of the present invention.

[0081] According to an embodiment of the present invention, compared to Figure 2 The electro-optic modulator 100 shown, Figure 4 The electro-optic modulator 100 shown in FIG. 1 includes a cover layer 140 , which may be located above the waveguide cladding 122 to further confine the optical field.

[0082] According to the embodiment of the present invention, the present invention does not limit the material of the cover layer 140, nor does it limit the dielectric constant of the material of the cover layer 140. When the real part of the dielectric constant of the cover layer 140 and the dielectric constant of the waveguide cladding 122 have different signs, a hybrid plasmon waveguide structure can be established, thereby further improving the modulation efficiency.

[0083] According to an embodiment of the present invention, the first electrode 131 and the slot waveguide 121 are placed side by side, closely adjacent to each other and without a gap, and the second electrode 132 and the slot waveguide 121 are placed side by side, closely adjacent to each other and without a gap, thereby reducing the distance between the first electrode 131 and the second electrode 132, increasing the electric field strength, and thereby improving the electro-optical modulation efficiency.

[0084] Figure 5 FIG. 4 is a schematic cross-sectional view of an electro-optical modulator according to a fifth embodiment of the present invention.

[0085] According to an embodiment of the present invention, when the covering layer 140 is made of a conductive material, the covering layer 140 serves as an electrode, and the covering layer and a plurality of electrodes are used together to generate an electric field.

[0086] According to an embodiment of the present invention, the cover layer 140 may be made of a metal or non-metal conductive material. In the case where the cover layer 140 is made of a conductive material, the cover layer 140 may be used to further confine the light field.

[0087] According to an embodiment of the present invention, when the cover layer 140 is made of a conductive material, the cover layer 140 can also serve as a third electrode. The third electrode and the first electrode 131 can be used to generate an electric field, and the third electrode and the second electrode 132 can also be used to generate an electric field. Figure 5 The two hollow arrows in φ respectively show the direction of the electric field generated by the third electrode and the first electrode 131 , and the direction of the electric field generated by the third electrode and the second electrode 132 .

[0088] Figure 6 FIG. 4 is a schematic cross-sectional view of an electro-optical modulator according to a sixth embodiment of the present invention. Figure 4 The difference between the electro-optic modulator 100 shown in FIG. Figure 6 The covering layer 140 is made of a conductive material and serves as a third electrode. Figure 6 The two hollow arrows in φ respectively show the direction of the electric field generated by the third electrode and the first electrode 131 , and the direction of the electric field generated by the third electrode and the second electrode 132 .

[0089] According to an embodiment of the present invention, the first electrode 131 and the slot waveguide 121 are placed side by side, closely adjacent to each other and without a gap, and the second electrode 132 and the slot waveguide 121 are placed side by side, closely adjacent to each other and without a gap, thereby reducing the distance between the first electrode 131 and the second electrode 132, increasing the electric field strength, and thereby improving the electro-optical modulation efficiency.

[0090] Figure 7 FIG. 4 is a schematic cross-sectional view of an electro-optic modulator according to a seventh embodiment of the present invention.

[0091] like Figure 7 As shown, for ease of description, the plurality of electrodes may include a first electrode 131 and a second electrode 132. The first electrode 131 and the second electrode 132 may be disposed on the waveguide cladding 122. The first electrode 131 may be located to the left of a vertical central axis of the waveguide cladding 122, and the second electrode 132 may be located to the right of the vertical central axis of the waveguide cladding 122. The first electrode 131 and the second electrode 132 are used to generate an electric field. Figure 7 The hollow arrows in show the directions of the electric fields generated by the first electrode 131 and the second electrode 132.

[0092] According to an embodiment of the present invention, a waveguide can be provided on a substrate layer 110. The waveguide includes a waveguide core layer and a waveguide cladding layer 122. The waveguide core layer includes a slot waveguide 121, which includes a first waveguide 1211, an intermediate slot layer 1213, and a second waveguide 1212. The functional material of the first waveguide 1211 is different from the functional material of the intermediate slot layer 1213. The functional material of the second waveguide 1212 is different from the functional material of the intermediate slot layer 1213. Under the action of an electric field, the electric field can be used to change the properties of the functional material of the first waveguide 1211, the functional material of the second waveguide 1212, and the functional material of the intermediate slot layer 1213, thereby changing the optical transmission characteristics of the waveguides and achieving electro-optical modulation.

[0093] According to an embodiment of the present invention, the electrode structure may be disposed on the waveguide cladding 122 or embedded in the waveguide cladding 122 .

[0094] Figure 8 FIG. 4 is a schematic cross-sectional view of an electro-optical modulator according to an eighth embodiment of the present invention.

[0095] like Figure 8 As shown, the electro-optic modulator 100 includes a substrate layer 110 , a waveguide, and an electrode structure. The waveguide may include a first waveguide 1211 , a slit layer 1214 , and a second waveguide 1212 . The slit layer 1214 may be disposed between the first waveguide 1211 and the second waveguide 1212 .

[0096] According to an embodiment of the present invention, the materials of the first waveguide 1211 , the second waveguide 1212 , and the slit layer 1214 are functional materials having an electro-optical modulation function, thereby improving the modulation efficiency.

[0097] According to an embodiment of the present invention, the functional material of the first waveguide 1211 is different from the functional material of the slit layer 1214. The functional material of the second waveguide 1212 is different from the functional material of the slit layer 1214.

[0098] According to an embodiment of the present invention, the first waveguide 1211 may be, but is not limited to, a slab waveguide, a rectangular waveguide, and a ridge waveguide, and the second waveguide 1212 may be, but is not limited to, a slab waveguide, a rectangular waveguide, and a ridge waveguide.

[0099] According to an embodiment of the present invention, the electrode structure includes a plurality of electrodes, and the plurality of electrodes are used to generate an electric field. The present invention does not limit the number of electrodes. As an example, Figure 8 FIG. 1 shows a structural diagram of an electro-optical modulator 100 including a first electrode 131 and a second electrode 132 .

[0100] According to an embodiment of the present invention, under the action of an electric field, the electric field is used to change the characteristics of the functional material of the first waveguide 1211, the characteristics of the functional material of the second waveguide 1212, and the characteristics of the functional material of the middle slit layer 1213, thereby changing the optical transmission characteristics of the waveguide, thereby realizing electro-optical modulation.

[0101] According to an embodiment of the present invention, the first waveguide 1211 , the second waveguide 1212 and the plurality of electrodes are longitudinally distributed along a vertical direction.

[0102] like Figure 8 As shown, for ease of description, the plurality of electrodes may include a first electrode 131 and a second electrode 132. The horizontal central axis of the first electrode 131, the horizontal central axis of the first waveguide 1211, the horizontal central axis of the second waveguide 1212, and the horizontal central axis of the second electrode 132 are all approximately parallel to the horizontal central axis of the substrate layer 110. Based on the longitudinal distribution of the first electrode 131, the first waveguide 1211, the second waveguide 1212, and the second electrode 132 along the vertical direction, the direction of the electric field generated between the first electrode 131 and the second electrode 132 may be longitudinal, Figure 8 The hollow arrows show the electric field direction of the longitudinal electric field.

[0103] According to an embodiment of the present invention, the functional material of the first waveguide 1211 and the functional material of the second waveguide 1212 include functional materials having an electro-optical modulation function. The functional materials of the first waveguide 1211 and the second waveguide 1212 can be the same or different. The functional material of the slit layer 1214 includes functional materials having an electro-optical modulation function.

[0104] According to the embodiments of the present invention, the present invention does not limit the dielectric constants of the various functional materials having electro-optical modulation capabilities used to construct the electro-optic modulator 100. When the dielectric constants of the first electrode 131 and the second electrode 132 have different signs from the real parts of the dielectric constants of the first waveguide 1211 and the second waveguide 1212, a hybrid plasmon waveguide structure can be established, thereby improving modulation efficiency.

[0105] Figure 9 FIG. 4 is a schematic cross-sectional view of an electro-optical modulator according to a ninth embodiment of the present invention.

[0106] like Figure 9 As shown, the electro-optic modulator 100 may further include a first cladding layer 150 and a second cladding layer 160 . The first cladding layer 150 may be filled between the first electrode 131 and the first waveguide 1211 , and the second cladding layer 160 may be filled between the second electrode 132 and the second waveguide 1212 .

[0107] According to an embodiment of the present invention, the material of the first cladding layer 150 and the material of the second cladding layer 160 are functional materials with electro-optic modulation capabilities. The materials of the first cladding layer 150 and the second cladding layer 160 can be the same or different. The first cladding layer 150 and the second cladding layer 160 can be used to improve the confinement of the light field by the electro-optic modulator 100 and increase the overlap between the light field and the functional material, thereby further improving the modulation efficiency.

[0108] According to the embodiments of the present invention, the present invention does not limit the dielectric constants of the various functional materials having electro-optic modulation functions used to construct the electro-optic modulator 100. When the dielectric constants of the first electrode 131 and the second electrode 132 have different signs from the real parts of the dielectric constants of the first cladding layer 150 and the second cladding layer 160, a hybrid plasmon waveguide structure can be established, thereby improving modulation efficiency.

[0109] Figure 10 FIG. 4 is a schematic cross-sectional view of an electro-optical modulator according to a tenth embodiment of the present invention.

[0110] like Figure 10 As shown, the electro-optical modulator 100 further includes a grating coupling component 170. The present invention does not limit the number of the grating coupling components 170. Figure 10 A portion of the grating coupling component 170 is shown. The grating coupling component 170 can be disposed on the slit layer 1214. The electro-optical modulator 100 can couple light into the modulator for transmission based on the grating coupling component 170, thereby achieving modulation. By integrating the grating coupling component 170 with the substrate layer 110, the first electrode 131, the first waveguide 1211, the slit layer 1214, the second waveguide 1212, and the second electrode 132, the integration level of the electro-optical modulator 100 can be effectively improved.

[0111] Figure 10 The first electrode 131, the first waveguide 1211, the second waveguide 1212 and the second electrode 132 are longitudinally distributed along the vertical direction. Figure 10 The hollow arrow in shows the electric field direction of the longitudinal electric field.

[0112] Figure 11 FIG. 4 is a schematic cross-sectional view of an electro-optical modulator according to an eleventh embodiment of the present invention.

[0113] like Figure 11 As shown, Figure 10 The electro-optic modulator 100 shown in FIG. 1 is different in that the electro-optic modulator 100 may include a first cladding layer 150 and a second cladding layer 160 . The first cladding layer 150 may be filled between the first electrode 131 and the first waveguide 1211 , and the second cladding layer 160 may be filled between the second electrode 132 and the second waveguide 1212 .

[0114] According to an embodiment of the present invention, the material of the first cladding layer 150 and the material of the second cladding layer 160 are functional materials with electro-optic modulation capabilities. The materials of the first cladding layer 150 and the second cladding layer 160 can be the same or different. The first cladding layer 150 and the second cladding layer 160 can be used to improve the confinement of the light field by the electro-optic modulator 100 and increase the overlap between the light field and the functional material, thereby further improving the modulation efficiency.

[0115] Figure 11 The first electrode 131 , the first waveguide 1211 , the second waveguide 1212 and the second electrode 132 are longitudinally distributed along the vertical direction, and the hollow arrows in the figure show the electric field direction of the longitudinal electric field.

[0116] Figure 12 FIG. 1 is a schematic cross-sectional view of an electro-optical modulator according to a twelfth embodiment of the present invention.

[0117] like Figure 12 As shown, the electro-optic modulator 100 includes a substrate layer 110, a first electrode 131, a second electrode 132, a waveguide core layer, a waveguide cladding layer 122, and a cover layer 140. The cover layer 140 may be located above the waveguide cladding layer 122 to further confine the optical field.

[0118] According to the embodiment of the present invention, the present invention does not limit the material of the cover layer 140, nor does it limit the dielectric constant of the material of the cover layer 140. When the real part of the dielectric constant of the cover layer 140 and the dielectric constant of the waveguide cladding 122 have different signs, a hybrid plasmon waveguide structure can be established, thereby further improving the modulation efficiency.

[0119] Figure 12The first electrode 131, the first waveguide 1211, the second waveguide 1212 and the second electrode 132 are distributed laterally along the horizontal direction. Figure 12 The hollow arrows in show the electric field direction of the transverse electric field.

[0120] Figure 13 FIG. 1 is a schematic cross-sectional view of an electro-optical modulator according to a thirteenth embodiment of the present invention.

[0121] According to an embodiment of the present invention, when the cover layer 140 is made of a conductive material, the cover layer 140 serves as a third electrode. The third electrode, the first electrode 131 and the second electrode 132 are used to generate an electric field.

[0122] According to the embodiment of the present invention, the present invention does not limit the material of the cover layer 140, nor does it limit the dielectric constant of the material of the cover layer 140. When the real part of the dielectric constant of the cover layer 140 and the dielectric constant of the waveguide cladding 122 have different signs, a hybrid plasmon waveguide structure can be established, thereby further improving the modulation efficiency.

[0123] Figure 14 FIG. 1 is a schematic cross-sectional view of an electro-optical modulator according to a fourteenth embodiment of the present invention.

[0124] According to an embodiment of the present invention, the electro-optic modulator 100 may further include an intermediate layer 180. The intermediate layer 180 may be disposed on the waveguide cladding 122 to reduce losses caused by the electrodes in the optical mode. The present invention does not impose any restrictions on the material of the intermediate layer 180.

[0125] Figure 15 FIG. 4 shows a schematic structural diagram of a Mach-Zehnder electro-optic modulator according to an embodiment of the present invention.

[0126] like Figure 15 As shown, a Mach-Zehnder electro-optical modulator (EOM) can be constructed based on the EOM 100. In an EOM, a voltage can be applied to one arm of the modulator to change the light transmission characteristics and achieve modulation. Furthermore, the EOM can further employ, but is not limited to, a push-pull structure. The EOM 100 can generate opposite phase shifts in the two arms of the Mach-Zehnder structure. Thus, while maintaining the same modulation voltage, the size of the EOM can be halved, or while maintaining the same EOM size, the modulation voltage can be halved.

[0127] According to an embodiment of the present invention, the number of electro-optical modulators 100 in a Mach-Zehnder electro-optical modulator can be two. At the input port, the incident light 300 is split into two optical paths. The incident light 300 transmitted in each optical path can pass through the electro-optical modulator 100 for phase modulation. At the output port, the phase-modulated light converges to form output light 400, i.e., the transmitted light, thereby achieving intensity modulation. The power splitter element 200 for splitting the light can include, but is not limited to, a Y-branch, a directional coupler, a multimode interferometer, and the like.

[0128] Figure 16 A schematic structural diagram of a Fabry-Perot interferometer electro-optic modulator according to an embodiment of the present invention is shown.

[0129] like Figure 16 As shown, a Fabry-Perot interferometer electro-optical modulator can be constructed based on the above-mentioned electro-optical modulator 100. The Fabry-Perot interferometer electro-optical modulator may include the electro-optical modulator 100 and an optical resonant element 600. The number of optical resonant elements 600 may be two, and the optical resonant elements 600 may be distributed on both sides of the electro-optical modulator 100. The optical resonant element 600 may be selected from materials including, but not limited to, reflective coatings, distributed Bragg grating reflectors, distributed feedback reflectors, gratings, or photonic crystal reflectors. Only when the wavelength of the incident light 300 is consistent with the resonant wavelength of the optical resonant element can the incident light 300 be transmitted and passed through the optical resonant element 600 to generate output light 400 and reflected light 500. The resonant wavelength of the optical resonant element 600 can be applied to the electro-optical modulator 100 by applying an external voltage, thereby achieving a shift in the resonant wavelength.

[0130] Figure 17 A schematic structural diagram of a micro-ring electro-optical modulator according to an embodiment of the present invention is shown.

[0131] like Figure 17 As shown, an all-pass micro-ring modulator can be constructed based on the electro-optic modulator 100. The all-pass micro-ring modulator includes a coupling region. Incident light 300, which contains incident signals of different wavelengths, enters the microcavity through the coupling region between the straight waveguide and the micro-ring 700. Light of a specific wavelength then resonates within the cavity, couples into the output port, and is output, generating output light 400.

[0132] Figure 18 A schematic structural diagram of another micro-ring electro-optical modulator according to an embodiment of the present invention is shown.

[0133] like Figure 18As shown, an up / down microring modulator can be constructed based on the electro-optic modulator 100. The up / down microring modulator includes two electro-optic modulators 100 and a microring 700. The up / down microring resonator can include two coupling regions. An incident signal containing different optical wavelengths, i.e., incident light 300, enters the microcavity through the coupling region between the straight waveguide and the microring 700. Light of a specific wavelength then resonates within the cavity, couples into the output port, and is output, generating output light 400.

[0134] Figure 19 A schematic structural diagram of another micro-ring electro-optical modulator according to an embodiment of the present invention is shown.

[0135] like Figure 19 As shown, a racetrack-type microring modulator can be constructed based on the electro-optic modulator 100. The structure of the microring 700 can be racetrack-type. Unlike traditional circular waveguides, the racetrack-type microring modulator can increase the coupling length between the microring waveguide and the straight waveguide, improving the coupling efficiency. By adjusting the coupling length, the coupling coefficient can be precisely controlled to achieve the desired resonant state. An incident signal containing different light wavelengths, namely, incident light 300, enters the microcavity through the coupling region between the straight waveguide and the microring 700. Then, light of a specific wavelength resonates in the cavity, couples into the output end, and is output, generating output light 400.

[0136] Figure 20 A schematic structural diagram of an in-phase orthogonal electro-optic modulator according to an embodiment of the present invention is shown.

[0137] like Figure 20 As shown, an in-phase / quadrature (IQ) electro-optical modulator (EOM) can be constructed based on the EO modulator 100. The IQ modulator can include two Mach-Zehnder interferometer structures 900. In one arm of the first-stage EOM, a first- and second-stage EOM is present. In the other arm, a first- and second-stage EOM is present, along with a 90-degree phase shifter 800. The EOM structure can include the EO modulator 100. Incident light 300 is split into two optical paths. Incident light 300 transmitted in the first optical path can pass through one arm of the EOM for modulation. Incident light 300 transmitted in the second optical path can pass through the other arm of the EOM for modulation. At the output port, the modulated light converges to form output light 400.

[0138] Those skilled in the art will appreciate that various combinations and / or combinations of features described in the various embodiments and / or claims of the present invention may be made, even if such combinations and / or combinations are not explicitly described in the present invention. In particular, various combinations and / or combinations of features described in the various embodiments and / or claims of the present invention may be made, without departing from the spirit and teachings of the present invention. All such combinations and / or combinations fall within the scope of the present invention.

[0139] The above describes embodiments of the present invention. However, these embodiments are for illustrative purposes only and are not intended to limit the scope of the present invention. Although each embodiment has been described separately above, this does not mean that the measures in each embodiment cannot be advantageously used in combination. The scope of the present invention is defined by the appended claims and their equivalents. Without departing from the scope of the present invention, those skilled in the art may make various substitutions and modifications, which are intended to fall within the scope of the present invention.

Claims

1. An electro-optic modulator, characterized in that: include: A substrate layer, a waveguide and an electrode structure disposed on the substrate layer; Wherein, the waveguide comprises a waveguide core layer and a waveguide cladding; the waveguide core layer comprises a slit waveguide, and the slit waveguide comprises a first waveguide, an intermediate slit layer, and a second waveguide; the functional material of the first waveguide and the functional material of the second waveguide comprise functional materials having a linear electro-optical effect; the functional material of the first waveguide is different from the functional material of the intermediate slit layer; the functional material of the second waveguide is different from the functional material of the intermediate slit layer; The electrode structure includes a plurality of electrodes, and the plurality of electrodes are used to generate an electric field; The electric field is used to change the characteristics of the functional material of the first waveguide, the characteristics of the functional material of the second waveguide, and the characteristics of the functional material of the middle slit layer, thereby changing the light transmission characteristics of the waveguide, thereby realizing electro-optical modulation.

2. The electro-optic modulator according to claim 1, characterized in that The waveguide cladding is covered on the waveguide core layer, and the material of the waveguide cladding includes a functional material with an electro-optic modulation function. The functional material of the waveguide cladding is a functional material that can expand the electro-optic interaction area from the waveguide core layer to the waveguide core layer and the waveguide cladding.

3. The electro-optic modulator according to claim 1, characterized in that The functional material of the middle slit layer includes a functional material having an electro-optical modulation function.

4. The electro-optic modulator according to claim 1, characterized in that The first waveguide, the second waveguide and the plurality of electrodes are laterally distributed along a horizontal direction.

5. The electro-optic modulator according to claim 1, characterized in that: The first waveguide, the second waveguide and the plurality of electrodes are longitudinally distributed along a vertical direction.

6. The electro-optic modulator according to claim 1, characterized in that: The electro-optic modulator further includes a cover layer, which is located above the waveguide cladding and is used to further confine the optical field.

7. The electro-optic modulator according to claim 6, characterized in that In the case that the material of the cover layer is a conductive material, the cover layer serves as an electrode, and the cover layer and the plurality of electrodes are used together to generate an electric field.

8. The electro-optic modulator according to claim 1, characterized in that: The waveguide core layer further comprises a planar waveguide, a rectangular waveguide or a ridge waveguide.

9. The electro-optic modulator according to claim 1, characterized in that: The electro-optic modulator is used to realize electro-optic modulation including phase modulation, frequency modulation, intensity modulation, polarization modulation and in-phase orthogonal modulation.

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