Display device defect detection method, detection system and detection device

Abstract

The present application provides a display device defect detection method, detection system and detection device, which relate to the field of display technology. In this detection method, a detection beam is used to detect the display device. The detection beam scanning is a non-contact detection, which avoids the problem of damage to the light-emitting unit due to probe contact during display device detection, and controls the detection beam to scan the light-emitting unit area along a set trajectory or a set pattern, so that the detection beam received by the light-emitting unit can be more uniform. At this time, the state of the light-emitting unit during the detection beam scanning is obtained, and the defect point of the display device is determined according to the state of the light-emitting unit, which can increase the detection accuracy of the defect point of the display device and reduce the error rate.

Description

Technical Field

[0001] The present application relates to the field of display technology, and in particular to a display device defect detection method, detection system, and detection device. Background Art

[0002] Display devices are widely used in monitors, televisions, projectors, and terminal devices as information display devices. As the application fields of display devices continue to expand, people's requirements for the display size and display performance of display devices continue to increase.

[0003] During the manufacturing and production of display devices, especially advanced display technologies like Micro (μ) LEDs, yield limits necessitate various optical and other equipment inspections. However, existing inspection methods are no longer sufficient to meet these requirements. Inspection of the light-emitting units in display devices results in significant errors and can easily damage the product. Summary of the Invention

[0004] Based on this, it is necessary to provide a display device defect detection method, detection system and detection device to address the problems of large detection errors and easy damage to products in the existing technology detection process.

[0005] In order to achieve the above-mentioned object, the present invention provides a method for detecting defects in a display device, the method comprising:

[0006] The display device includes a substrate and a light-emitting unit located on the substrate, and the detection method includes:

[0007] transmitting a detection beam;

[0008] Controlling the detection beam to scan a plurality of light-emitting unit areas, wherein the light-emitting unit area includes a single light-emitting unit or a plurality of light-emitting units arranged in an array;

[0009] Acquiring a state of the light emitting unit when the detection beam is scanning;

[0010] determining a defective point of the display device based on a state of the light emitting unit;

[0011] The scanning form of the detection beam includes scanning along a set trajectory or scanning at a fixed point according to a set pattern.

[0012] The present application also provides a display device defect detection system, wherein the display device includes a substrate and a light-emitting unit located on the substrate, and the detection system includes:

[0013] A transmitting module, used for transmitting a detection beam;

[0014] a scanning module, configured to control the detection beam to scan a plurality of light-emitting unit areas, wherein the light-emitting unit area includes a single light-emitting unit or a plurality of light-emitting units arranged in an array;

[0015] an acquisition device for acquiring a state of the light emitting unit when the detection beam is scanning;

[0016] a determination module, configured to determine a defective point of the display device based on a state of the light-emitting unit;

[0017] The scanning form of the detection beam includes scanning along a set trajectory or scanning at a fixed point according to a set pattern.

[0018] The present application also provides a display device defect detection device, wherein the display device includes a substrate and a light-emitting unit located on the substrate, and the detection device includes:

[0019] An electron beam emitting device, configured to emit a detection beam and scan a plurality of light-emitting unit areas using the detection beam, wherein the light-emitting unit area includes a single light-emitting unit or a plurality of light-emitting units arranged in an array;

[0020] an acquisition device for acquiring a state of the light emitting unit when the detection beam is scanning;

[0021] a control device for determining a defective point of the display device based on a state of the light-emitting unit;

[0022] The scanning form of the detection beam includes scanning along a set trajectory or scanning at a fixed point according to a set pattern.

[0023] The present application provides a display device defect detection method, detection system and detection device. In the detection method, a detection beam is used to detect the display device. The detection beam scanning is a non-contact detection, which avoids the problem of damage to the light-emitting unit due to probe contact during display device detection, and controls the detection beam to scan the light-emitting unit area along a set trajectory or a set pattern, so that the detection beam received by the light-emitting unit can be more uniform. At this time, the state of the light-emitting unit during the detection beam scanning is obtained, and the defect point of the display device is determined according to the state of the light-emitting unit, which can increase the detection accuracy of the defect point of the display device and reduce the error rate. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the conventional technology, the following briefly introduces the drawings required for use in the embodiments or the conventional technology descriptions. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0025] Figure 1 A schematic diagram of a flow chart of a display device defect detection method provided in an embodiment of the present application;

[0026] Figure 2 A schematic diagram of the arrangement structure of a light-emitting unit provided in an embodiment of the present application;

[0027] Figure 3 A schematic structural diagram of a detection beam scanning light-emitting unit provided in an embodiment of the present application;

[0028] Figure 4 A scanning schematic diagram of the first scanning method provided in an embodiment of the present application;

[0029] Figure 5 A scanning schematic diagram of the second scanning method provided in an embodiment of the present application;

[0030] Figure 6 A scanning schematic diagram in which a preset direction is a scanning direction provided in an embodiment of the present application;

[0031] Figure 7 A scanning schematic diagram in which another preset direction is a scanning direction provided in an embodiment of the present application;

[0032] Figure 8 A schematic diagram of a detection system provided in an embodiment of the present application;

[0033] Figure 9 A schematic structural diagram of a display device defect detection apparatus provided in an embodiment of the present application;

[0034] Figure 10 A schematic structural diagram of an electron beam emitting device provided in an embodiment of the present application;

[0035] Figure 11 A schematic diagram of the structure of an acquisition device provided in this application;

[0036] Figure 12 A schematic structural diagram of another display device defect detection device provided in an embodiment of the present application;

[0037] Figure 13 A schematic structural diagram of another display device defect detection device provided in an embodiment of the present application;

[0038] Figure 14 A schematic structural diagram of another display device defect detection device provided in an embodiment of the present application;

[0039] Figure 15 A schematic structural diagram of another display device defect detection device provided in an embodiment of the present application;

[0040] Figure 16 A schematic structural diagram of another display device defect detection apparatus provided in an embodiment of the present application.

[0041] Explanation of the accompanying drawings: a-detection beam; 01-transmitting module; 02-scanning module; 03-acquisition module; 04-determination module; 11-light-emitting unit; 12-electron beam emitting device; 13-acquisition device; 14-control device; 15-vacuum chamber; 16-substrate; 17-electron beam transmitting module; 18-transmitting control module; 19-electron beam deflection unit; 20-electron beam positioning unit; 21-parameter control unit; 22-image acquisition unit; 23-image processing unit; 24-image output unit; 25-image detection control unit; 26-image acquisition control unit; 27-auxiliary lighting unit; 28-data acquisition unit; 29-repairing device; 30-adjustment device; 31-wavelength filtering device; 32-device interface; 33-central controller; 34-signal generator; 35-vacuum pump; 36-cover plate. DETAILED DESCRIPTION

[0042] To facilitate understanding of the present application, the present application will be described more fully below with reference to the accompanying drawings. The accompanying drawings provide embodiments of the present application. However, the present application may be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided to make the disclosure of the present application more thorough and comprehensive.

[0043] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art to which this application pertains. The terms used herein in the specification of this application are for the purpose of describing specific embodiments only and are not intended to limit this application.

[0044] It should be understood that when an element is referred to as being "on," "adjacent to," or "connected to" another element, it can be directly on, adjacent to, or connected to the other element, or there can be intervening elements. Conversely, when an element is referred to as being "directly on," "directly adjacent to," or "directly connected to" another element, there are no intervening elements or layers. It should be understood that although the terms first, second, third, etc. may be used to describe various modes or units, these modes or units should not be limited by these terms. These terms are merely used to distinguish one mode or unit from another. Therefore, without departing from the teachings of the present invention, the first mode or unit discussed below may be represented as a second mode or unit.

[0045] As used herein, the singular forms "a," "an," and "the" may also include the plural forms, unless the context clearly indicates otherwise. It should also be understood that the terms "include," "comprising," "having," and the like specify the presence of stated features, integers, steps, operations, components, parts, or combinations thereof, but do not preclude the presence or addition of one or more other features, integers, steps, operations, components, parts, or combinations thereof. Also, in this specification, the term "and / or" includes any and all combinations of the relevant listed items.

[0046] Based on the content in the background technology, display devices, as information display devices, are widely used in monitors, televisions, projectors, and terminal devices such as mobile phones, tablets, smart watches, augmented reality (AR) and virtual reality (VR) devices. From the perspective of display panel technology, they include: cathode ray tube (CRT), plasma display panel (PDP), liquid crystal display (LCD), light-emitting diode (LED), and other display technologies. With the continuous expansion of application fields, people's requirements for the display size and display performance of display devices are constantly increasing. Display technologies such as organic light-emitting diodes (OLED) and active-matrix organic light-emitting diodes (AMOLED) have been widely used in different fields, such as lighting, advertising lights (signs), automotive displays, guide lights, indicator lights, screens, flat panel displays, medical displays, etc. Especially at present, with the continuous improvement of the application of ultra-large display fields, such as monitoring and command, high-definition broadcasting, high-end cinemas, medical diagnosis, advertising display, conferences and exhibitions, office displays, virtual reality and other commercial fields, Mini LED, Micro (μ) LED and other advanced display technologies have gradually entered our field of vision to solve technical bottlenecks.

[0047] However, in the preparation process of display devices, especially advanced display technologies such as Micro (μ) LED, due to the limitation of yield rate, various optical and other types of equipment need to be used for testing during the preparation process. However, contact detection requires the use of probes. As the light-emitting units are getting smaller and smaller, the manufacturing difficulty and cost of probes are getting higher and higher. In addition, traditional detection methods will also damage the light-emitting units, further leading to an increase in the false detection rate and a decrease in detection accuracy.

[0048] Based on this, the present application provides a display device defect detection method, detection system and detection device. The detection method uses a detection beam to detect the display device. The detection beam scanning is a non-contact detection, which avoids the problem of damage to the light-emitting unit due to probe contact during display device detection, and controls the detection beam to scan the light-emitting unit area along a set trajectory according to a set pattern, so that the detection beam received by the light-emitting unit can be more uniform. At this time, the state of the light-emitting unit during the detection beam scanning is obtained, and the defect point of the display device is determined according to the state of the light-emitting unit, which can increase the detection accuracy of the defect point of the display device and reduce the error rate.

[0049] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the present application is further described in detail below with reference to the accompanying drawings and specific implementation methods.

[0050] Please refer to Figure 1 , Figure 1 This is a flow chart of a method for detecting defects in a display device provided in an embodiment of the present application. The display device includes a substrate and a light-emitting unit located on the substrate. The detection method includes:

[0051] S100: Transmit a detection beam.

[0052] S101: Control the detection beam to scan a plurality of light-emitting unit areas.

[0053] The light-emitting unit area includes a single light-emitting unit or a plurality of light-emitting units arranged in an array.

[0054] S102: Acquire the state of the light-emitting unit during detection beam scanning.

[0055] S103: Determine a defective point of the display device based on the state of the light emitting unit.

[0056] The scanning form of the detection beam includes scanning along a set trajectory or scanning at a fixed point according to a set pattern.

[0057] Specifically, this embodiment does not impose any specific restrictions on the type of light-emitting unit; it can be multiple identical or multiple different light-emitting units. Micro (μ) LEDs are used as an example for illustration. The arrangement of the light-emitting units is not specifically limited; the light-emitting units can be arranged in an array or in a desired pattern. It should be noted that the light-emitting unit includes at least one set of red, green, and blue phosphors to form pixels. Each pixel contains the three primary colors of red (R), green (G), and blue (B). The pixels in the light-emitting unit can be illuminated when the detection beam scans across their location. If a light-emitting unit is defective, it may not illuminate, or may emit too brightly or too dimly. Based on the status of the light-emitting unit, it is possible to detect whether the light-emitting unit in the display device is defective. The detection beam continuously illuminates the pixels along a set trajectory to obtain the status of the light-emitting unit during the detection beam scanning. In other embodiments, if the detection beam size can cover a larger area, the scanning can be accomplished by emitting the beam at a fixed point, without adjusting the scanning position according to the set trajectory. In other embodiments, fixed-point scanning can be performed according to a set pattern.

[0058] In step S100 , transmitting the detection beam means that the detection system transmits the detection beam, which is not limited to the direction of the detection beam.

[0059] Optionally, in another embodiment of the present application, the detection beam a is a single electron beam, the single electron beam covers a single light-emitting unit area, and the parameters of the single electron beam are adjustable.

[0060] Specifically, the detection beam can be a single electron beam, which can cover a light-emitting unit area. The light-emitting unit area can include a single light-emitting unit or multiple light-emitting units arranged in an array. In other words, a single electron beam can cover a single light-emitting unit or a light-emitting unit in an array area, without specific limitations. It should be noted that the single electron beam can determine parameters such as intensity, size, and direction based on the location and type of the light-emitting unit. Furthermore, the detection beam can include a single detection beam or multiple detection beams, without specific limitations.

[0061] In step S101, this embodiment is described by taking the light emitting units arranged in an array as an example. Figure 2 , Figure 2 A schematic diagram of the arrangement structure of a light-emitting unit provided in an embodiment of the present application; Figure 3 , Figure 3A structural diagram of a detection beam scanning light-emitting unit provided in an embodiment of the present application; the detection beam a scans the area edges of several light-emitting units, and the detection beam a can scan a single light-emitting unit 11 or multiple light-emitting units 11 arranged in an array. The light-emitting units 11 arranged in an array can include a 2×2 array or a 3×3 array, and there is no specific limitation. It should be noted that the detection beam a does not make any specific limitation on the set trajectory during scanning. The set trajectory includes a pre-set clockwise trajectory or counterclockwise trajectory or a serpentine trajectory or a patterned trajectory, etc., which can be set as needed. The detection beam a does not make any specific limitation on the set pattern during scanning, and it can be set as needed. In addition, the detection beam a can be one beam or multiple beams. When a beam of detection beam a is used for detection, the beam of detection beam a scans the light-emitting unit area according to the set trajectory or the set pattern.

[0062] When there are multiple detection beams a, each detection beam a scans the light-emitting unit area according to a set trajectory or a set pattern, or each detection beam a scans a preset light-emitting unit area; it is also possible for some detection beams a to scan part of the light-emitting unit area, and another part of the detection beam a to scan another part of the light-emitting unit area. For example, when two detection beams a are used, one detection beam a scans part of the light-emitting unit area, and the other detection beam a scans other light-emitting unit areas; or, when multiple detection beams a are used, it is also possible for each detection beam a to first scan part of the light-emitting unit area, and then scan another part of the light-emitting unit area. For example, when two detection beams a are used, the first detection beam a first scans the first light-emitting unit area, and then scans the second light-emitting unit area. The second detection beam a first scans the second light-emitting unit area, and then scans the first light-emitting unit area. This can effectively improve the detection efficiency and reduce the detection error.

[0063] In step S102, the state of the light-emitting unit 11 during the scanning of the detection beam a is obtained. This can be the state of the light-emitting unit 11 being illuminated after the detection beam a scans the light-emitting unit area, and the brightness state of the light-emitting unit 11 is obtained. There is no specific limitation on the state of the light-emitting unit 11 during the scanning of the detection beam a. The light-emitting unit 11 can also be another state representative of a defect of the light-emitting unit 11. There is no specific limitation on the method of obtaining the state. It should be noted that the illumination of the light-emitting unit 11 is not necessarily a continuous process. When obtaining the state of the light-emitting unit 11, the detection beam a can be continuously emitted for scanning to obtain the state of the light-emitting unit 11, or the state of each light-emitting unit 11 can be obtained by illuminating each light-emitting unit one by one. There is no specific limitation on this.

[0064] In step S103, after obtaining the state of the light-emitting unit 11, the defective point in the display device can be determined according to the state of the light-emitting unit 11, that is, the abnormal light-emitting unit 11 can be determined. For example, whether the light-emitting unit 11 is defective can be determined according to the brightness state after the light-emitting unit 11 is scanned by the detection beam a. The defective light-emitting unit 11 includes the light-emitting unit 11 that cannot be lit, or the brightness of the light-emitting unit 11 is too bright, or the brightness of the light-emitting unit 11 is too bright or dark, etc.

[0065] The above-described display device defect detection method does not require the use of a detection probe. This non-contact detection method reduces damage to the light-emitting unit 11 and improves detection accuracy. Furthermore, because the detection beam a scans a plurality of light-emitting unit areas along a predetermined trajectory or pattern, the detection beam a received by the light-emitting unit 11 is more uniform. The state of the light-emitting unit 11 during the scanning of the detection beam a is obtained, and the display device defect point is determined based on the state of the light-emitting unit 11. This can improve the detection accuracy of the display device defect point and reduce the error rate.

[0066] Optionally, in another embodiment of the present application, refer to Figure 4 , Figure 4 This is a schematic diagram of the first scanning method provided in the embodiment of the present application; Figure 5 , Figure 5 A schematic diagram of a second scanning method provided in an embodiment of the present application; Figure 6 , Figure 6 A scanning schematic diagram of a preset direction provided in an embodiment of the present application is a scanning direction; Figure 7 , Figure 7 Another scanning schematic diagram provided in an embodiment of the present application in which a preset direction is a scanning direction; controlling the detection beam a to scan a plurality of light-emitting unit areas, including:

[0067] The detection beam a is controlled to scan a plurality of light-emitting unit areas using the first scanning mode and / or the second scanning mode and / or the third scanning mode.

[0068] The first scanning mode includes scanning a plurality of light-emitting unit areas in a preset area A.

[0069] The second scanning method includes scanning a plurality of light emitting unit areas at a preset position B.

[0070] The third scanning mode includes scanning a plurality of light emitting unit areas in a preset direction L as the scanning direction.

[0071] Specifically, in this embodiment, the detection beam a is a beam, and the light-emitting unit area includes a single light-emitting unit 11. When the light-emitting unit 11 is detected, the detection beam a scans the light-emitting unit 11 according to the required scanning method. Figure 4 As shown, the first scanning method can scan the light-emitting unit 11 within the preset area A, that is, the area where the light-emitting unit 11 may have defects is divided in advance, and the area is used as the preset area A. Only the light-emitting units 11 in the preset area A are scanned. This can save scanning time, improve the scanning rate, and quickly determine the defective light-emitting units 11.

[0072] like Figure 5 As described above, the second scanning method can scan the light-emitting unit 11 at the preset position point B, that is, for one or more light-emitting units 11 known in advance, the positions of these light-emitting units 11 are used as the preset position point B, so that the light-emitting unit 11 at the preset position point B can be accurately scanned, so that it can be accurately confirmed whether the light-emitting unit 11 at the preset position point B has defects, making defect detection more accurate.

[0073] The third scanning mode can scan the light emitting unit 11 in a preset direction L. The preset direction L is not specifically limited here and can be a row direction of multiple light emitting units 11 (e.g. Figure 7 ) or column-wise (as Figure 6 The preset direction L can also be other directions and can be set as needed. When testing along the preset direction L, defective light-emitting units 11 can be scanned more quickly and accurately. The preset direction L can be changed according to the position of the light-emitting unit 11 to be tested. A preset trajectory can be further used for scanning in the preset direction L. For example, in the row direction, the preset trajectory can be a serpentine trajectory.

[0074] It should be noted that, within one frame, the light emitting unit 11 may be scanned using the first scanning mode, the second scanning mode, or the third scanning mode; or within one frame, the light emitting unit 11 may be scanned using at least two of the first scanning mode, the second scanning mode, and the third scanning mode; for example, within one frame, the first scanning mode is first used to scan out defective light emitting units 11 in a preset area A, and then the positions of these light emitting units 11 are used as preset position points B, and then the second scanning mode is used to scan the defective light emitting units 11 detected by the first scanning mode again, so as to accurately scan out the defective light emitting units 11; or, within one frame, the third scanning mode is first used to scan out defective light emitting units 11 in a preset area A, and then the positions of these light emitting units 11 are used as preset position points B, and then the second scanning mode is used to scan the defective light emitting units 11 detected by the first scanning mode again, so as to accurately scan out the defective light emitting units 11. Scanning, first determine the preset direction L, and then scan all the light-emitting units 11 with the preset direction L as the scanning direction. At this time, the defective light-emitting units 11 can be scanned out. In order to make the detection more accurate, the defective area of ​​the light-emitting unit 11 scanned by the first scanning method can be used as the preset area A, and then the first scanning method is used for scanning. At this time, the defective light-emitting units 11 in the area can be confirmed. More accurately, the position of the defective light-emitting unit 11 scanned by the first scanning method is used as the preset position point B, and the second scanning method is used to scan the light-emitting unit 11 at the preset position point B. This scanning method can greatly improve the detection accuracy, reduce the false detection rate, and improve the detection efficiency.

[0075] Within a frame, there is no specific limitation on the scanning mode. It can be any one of the first scanning mode, the second scanning mode and the third scanning mode, or a combination of at least two of the first scanning mode, the second scanning mode and the third scanning mode, or a combination of the first scanning mode, the second scanning mode and the third scanning mode.

[0076] When using a detection beam A for detection, since the detection beam a is a beam, the detection of the light-emitting unit 11 is individual, for example, a single light-emitting unit 11 or a single light-emitting unit 11 in a certain array area. The detection beam a scans and detects multiple light-emitting unit areas, and each light-emitting unit area receives the same detection beam a. This scanning method can greatly improve the detection accuracy and reduce the false detection rate.

[0077] Optionally, in another embodiment of the present application, any frame of the scanned detection image includes multiple subframes, and the scanning mode of the detection beam a in any subframe is the first scanning mode, the second scanning mode, or the third scanning mode.

[0078] Specifically, within a frame, four subframes are used as an example. Within each of the four subframes, the scanning mode can be different. This scanning mode can improve scanning accuracy and reduce the false detection rate. Of course, the scanning mode of any subframe can also be the same, that is, within these four subframes, the scanning mode in each subframe is the same, for example, all are the first scanning mode, without specific limitation. It should be noted that within the third scanning mode, different scanning modes can be distinguished based on the preset direction L.

[0079] It should be noted that when there are multiple detection beams a, in different subframes in a frame, each detection beam a can detect different light-emitting unit areas according to the set pattern, or each detection beam a can scan and detect multiple light-emitting unit areas along the set trajectory, without any specific limitation.

[0080] In this detection method, a repair process may be included after the detection, that is, firstly, scanning of defects or abnormal points is completed on one or more subframes of a frame image, and secondly, confirmation and repair of defects or abnormal points are completed on one or more subsequent subframes.

[0081] Optionally, in another embodiment of the present application, any frame of the scanned detection image includes multiple subframes, and controlling the detection beam to scan a plurality of the light-emitting unit areas further includes:

[0082] In the first subframe, the detection beam a is controlled to scan the light-emitting unit area in the preset area A.

[0083] In the second subframe, the detection beam a is controlled to scan the light-emitting unit area of ​​the preset position point B; the preset position point B is the defect point preliminarily located in the first subframe.

[0084] In the third subframe, the repair beam is controlled to repair the light-emitting unit area of ​​the defective point.

[0085] In the fourth subframe, the detection beam a is controlled to scan the light-emitting unit area in the preset area A to complete the re-inspection.

[0086] Specifically, in this embodiment, detection beam a is used as a single beam, and the light-emitting unit area includes a single light-emitting unit 11. A frame may include multiple subframes, with four subframes being used as an example. In the first subframe, detection beam a is controlled to scan the light-emitting units 11 in a predetermined area A. This predetermined area A may include some or all of the light-emitting units 11 on the display panel, without specific limitation. Scanning within this predetermined area A reveals defective points of the display device within this predetermined area A. In the second subframe, the defective points obtained in the first subframe are used as predetermined locations B, and detection beam a is controlled to scan the light-emitting units 11 at these locations. This further determines whether these defective light-emitting units 11 are abnormal. For defective light-emitting units 11, a repair beam is used in the third subframe to repair them. It should be noted that the repair beam may be a laser beam, for example, without specific limitation. After the repair is complete, in the fourth subframe, detection beam a is controlled to scan the light-emitting units 11 in the predetermined area A to complete a re-inspection.

[0087] It should be noted that scanning the light-emitting unit 11 in the preset area A includes scanning along a set trajectory or a set pattern, and the scanning method may be different in different subframes. Among them, in the third scanning method, when scanning the light-emitting unit area in the preset area A, scanning can be performed in the first direction and the second direction in different subframes, respectively. The first direction and the second direction are set crosswise, for example, the first direction and the second direction are set perpendicularly. Of course, the first direction and the second direction are not limited.

[0088] Of course, in other embodiments, the scanning method on different subframes can also be the same, and multiple subframes can be scanned and judged to accurately locate the defect point and further repair the defect point. This detection method can promptly repair and re-inspect when a defect point is detected.

[0089] Optionally, in another embodiment of the present application, obtaining the state of the light emitting unit 11 when the detection beam a is scanning includes:

[0090] Acquire a scanning detection image of the light-emitting unit area when the detection beam a scans.

[0091] The state of the light emitting unit 11 is acquired based on the scanned detection image.

[0092] Specifically, when the detection beam a scans the light-emitting unit 11, it is necessary to obtain the status of the light-emitting unit 11. In this embodiment, taking the acquisition of an image after the light-emitting unit 11 is lit as an example, after the detection beam a scans, the abnormal light-emitting unit 11 will be different from other normal light-emitting units 11, and may not light up, or emit too brightly, or emit too dimly. At this time, the scanned detection image of the light-emitting unit 11 can highlight the light-emitting unit 11 that is not lit, too brightly, or too dimly. Based on the scanned detection image, the status of the light-emitting unit 11 can be obtained, thereby detecting the defective light-emitting unit 11. It should also be noted that there is no specific limitation on the acquisition of the status of the light-emitting unit 11.

[0093] Based on the above detection method, reference Figure 8 , Figure 8 This is a schematic diagram of a detection system provided in an embodiment of the present application. The present application also provides a display device defect detection system, in which the above-mentioned detection method is applied. The detection system includes:

[0094] Transmitting module 01 is used to transmit detection beam a.

[0095] The scanning module 02 is used to control the detection beam a to scan a plurality of light-emitting unit areas, where the light-emitting unit area includes a single light-emitting unit 11 or a plurality of light-emitting units 11 arranged in an array.

[0096] An acquisition module 03 is used to acquire the state of the light emitting unit 11 when the detection beam a is scanning;

[0097] The determination module 04 is configured to determine a defective point of the display device based on the state of the light emitting unit 11 .

[0098] The scanning form of the detection beam includes scanning along a set trajectory or scanning at a fixed point according to a set pattern.

[0099] Specifically, the transmitting module 01 is only used to transmit the detection beam a, which is a single electron beam. The detection beam can be one beam or multiple beams, and there is no specific limitation. The scanning module 02 is used to control the detection beam a to scan several light-emitting unit areas along a set trajectory or perform fixed-point scanning according to a set pattern. Since the light-emitting unit area includes a single light-emitting unit 11 or multiple light-emitting units 11 arranged in an array, the light-emitting units 11 in the light-emitting unit area will be illuminated at the same time. After the scanning module 02 scans the multiple light-emitting unit areas, the light-emitting units 11 in different light-emitting unit areas will be illuminated simultaneously or sequentially. The defective light-emitting unit 11 will not be illuminated or will emit too brightly or too dimly. The acquisition module 03 acquires the state of the light-emitting unit 11 when the detection beam a is scanning. For example, the acquisition module 03 can acquire the scanning detection image of the light-emitting unit 11 when the detection beam a is scanning. The determination module 04 can acquire the state of the light-emitting unit 11 by scanning the detection image, and determine the defective light-emitting unit 11 according to the state of the light-emitting unit 11.

[0100] The detection system uses the above-mentioned detection method for detection. The detection system transmits the detection beam a through the transmitting module 01, and scans multiple light-emitting units 11 through the scanning module 02, and then obtains the status of the light-emitting unit 11 during scanning through the acquisition module 03. According to the status of the light-emitting unit 11, the defective light-emitting unit 11 can be determined. Since no probe is required in the detection system, damage to the light-emitting unit 11 can be avoided and the false detection rate can be reduced.

[0101] Optionally, in another embodiment of the present application, the detection system further includes:

[0102] The repair module is used to transmit a repair beam and scan the light-emitting unit area through the repair beam to repair the light-emitting unit area of ​​the defective point.

[0103] Specifically, when a defective point is detected, the repair module can emit a repair beam to the light-emitting unit 11 in the light-emitting unit area of ​​the defective point. The repair beam can be a laser beam. The repair beam scans and repairs the light-emitting unit of the defective point. The repair principle is that each light-emitting unit 11 includes a group of normal light-emitting control units and at least one group of spare light-emitting control units. When the light-emitting unit 11 of the defective point is detected, it means that this group of light-emitting control units is defective or abnormal. The repair beam is emitted to cut off the connection of this group of light-emitting control units, and another group of spare light-emitting control units is enabled to achieve normal display.

[0104] In some embodiments, if the light emitting unit 11 is damaged and cannot be repaired online, the defect location can be recorded and then the defect can be peeled off and replaced by laser or other means.

[0105] It should be noted that the repair module can perform repairs after the overall inspection is completed, or it can perform repairs while inspecting. For example, in one frame, the first subframe and the second subframe determine the light-emitting unit 11 of the defective point, and the third subframe performs repairs. There is no specific limitation on this.

[0106] Based on the display device defect detection method, this application also provides a display device defect detection device, referring to Figure 9 , Figure 9 A schematic structural diagram of a display device defect detection device provided in an embodiment of the present application; the detection device includes:

[0107] The electron beam emitting device 12 is used to emit a detection beam a and scan a plurality of light-emitting unit areas through the detection beam a. The light-emitting unit area includes a single light-emitting unit 11 or a plurality of light-emitting units 11 arranged in an array.

[0108] The acquisition device 13 is used to acquire the state of the light emitting unit 11 when the detection beam a is scanning.

[0109] The control device 14 is configured to determine a defective point of the display device based on the state of the light emitting unit 11 .

[0110] The scanning form of the detection beam a includes scanning along a set trajectory or scanning at a fixed point according to a set pattern.

[0111] Specifically, during testing, the detection device is placed under vacuum conditions. For example, the light-emitting units 11 to be tested and the electron beam generator 12 can be placed within a vacuum chamber 15. The detection beam a is emitted to scan and test a plurality of light-emitting unit areas. In this embodiment, the light-emitting units 11 can be arranged in an array or a preset pattern on the substrate 16. It should be noted that the control device 14 also includes a hardware acceleration controller for accelerating the algorithm.

[0112] The electron beam emitting device 12 is used to emit the detection beam a and is located on one side of the light emitting unit 11. The electron beam emitting device 12 can emit one detection beam a or multiple detection beams a. The detection beam a is a single electron beam.

[0113] In this embodiment, the detection beam a is a single beam, and the light-emitting unit area includes a single light-emitting unit 11. The electron beam emitting device 12 is located within the vacuum chamber 15 and on the side of the light-emitting unit 11 away from the substrate 16, so that the detection beam a emitted by the electron beam emitting device 12 can reach the light-emitting unit 11. The electron beam emitting device 12 emits a single detection beam a and scans the multiple light-emitting units 11 with the detection beam a. The scanning method can include a first scanning method, a second scanning method, a third scanning method, etc., and is not specifically limited. The electron beam emitting device 12 is connected to the control device 14.

[0114] Optional, reference Figure 10 , Figure 10 A schematic structural diagram of an electron beam emitting device provided in an embodiment of the present application; in another embodiment of the present application, the electron beam emitting device 12 includes:

[0115] The electron beam emitting module 17 is used to emit the detection beam a.

[0116] The emission control module 18 is used to control the emission parameters and emission position of the detection beam a to achieve scanning of the light-emitting unit area.

[0117] Specifically, in this embodiment, the electron beam emitting module 17 is only used to emit the detection beam a. The detection beam a emitted by the electron beam emitting module 17 is a single electron beam. The positional relationship between the electron beam emitting module 17 and the light emitting unit 11 and the emission outlet are not specifically limited. For example, the electron beam emitting module 17 can also be Figure 9 When the detection beam a is emitted, the emission control module 18 changes the emission position of the detection beam a to achieve scanning of multiple light-emitting units 11.

[0118] Optional, such as Figure 10 As shown; in another embodiment of the present application, the emission control module 18 includes:

[0119] The electron beam deflection unit 19 is disposed at the output end of the electron beam emission module 17 and is used to deflect the detection beam a to adjust the scanning direction and scanning position.

[0120] Specifically, the electron beam deflection unit 19 is used to deflect the detection beam a. For example, when the detection beam a scans from the first light-emitting unit 11 to the second light-emitting unit 11, the electron beam deflection unit 19 deflects the detection beam a, and the scanning direction is turned to the position of the second light-emitting unit 11. The electron beam deflection unit 19 is also used to accurately locate and obtain the actual position information of the light-emitting unit 11, and control the deflection direction of the detection beam a to scan the specified precise position.

[0121] Optional, such as Figure 10 As shown, in another embodiment of the present application, the emission control module 18 further includes:

[0122] The electron beam positioning unit 20 is provided at the output end of the electron beam deflection unit 19 and is used to accurately position the scanning position of the detection beam a.

[0123] Specifically, the electron beam positioning unit 20 can accurately locate the scanning position of the detection beam a based on the position of the light-emitting unit 11. That is, when it is necessary to scan the second light-emitting unit 11, the position of the second light-emitting unit 11 is first confirmed, and then the electron beam positioning unit 20 is used to determine that the scanning position of the detection beam a is the position of the second light-emitting unit 11, which can increase the accuracy of the detection.

[0124] In addition, if Figure 10 As shown, the emission control module 18 further includes: a parameter control unit 21, which is provided at the output end of the electron beam emission module 17 and is used to adjust the parameters of the detection beam a.

[0125] Specifically, when the light-emitting unit 11 to be inspected changes, the parameter control unit 21 can control the size and intensity parameters of the detection beam a based on the parameters of the light-emitting unit 11, so that the parameters of the detection beam a adapt to the parameters of the light-emitting unit 11, thereby performing accurate inspection. In addition, the control device 14 can also control the parameter control unit 21 to precisely control the size of the detection beam a in single / single-row / single-column and / or multiple / multiple-row / multiple-column sizes based on the actual light-emitting unit size and the scanning trajectory of the detection beam, with the control accuracy within the actual controllable range of the control device 14. The parameter control unit 21 can also control the intensity of the detection beam a based on the vacuum cavity size formed by the vacuum cavity 15 and the distance to the light-emitting unit array, completing the inspection of the light-emitting unit 11 without damaging the light-emitting unit 11.

[0126] It should be noted that, in this embodiment, the positions of the electron beam deflection unit 19, the electron beam positioning unit 20 and the parameter control unit 21 in the emission control module 18 can be that the parameter control unit 21 is located on one side of the electron beam emission module 17, the electron beam deflection unit 19 is located on the side of the parameter control unit 21 away from the electron beam emission module 17, and the electron beam positioning unit 20 is located on the side of the electron beam deflection unit 19 away from the electron beam emission module 17, but there is no specific limitation on the positions of the electron beam deflection unit 19, the electron beam positioning unit 20 and the parameter control unit 21 in the emission control module 18, and this embodiment is only for illustration.

[0127] In addition, the emission control module 18 may further include:

[0128] The first control unit is connected to the electron beam deflection unit 19, the electron beam positioning unit 20, and the parameter control unit 21, and is used to control the electron beam deflection unit 19, the electron beam positioning unit 20, and the parameter control unit 21. The first control unit is also used to complete the transmission of detection results and data and the analysis and display of detection items. It should be noted that the first control unit can also be replaced by the control device 14 and configured as needed. This embodiment is only an example.

[0129] This detection device uses detection beam a to inspect display devices. Scanning detection with detection beam a is a non-contact method, avoiding damage to the light-emitting unit 11 due to probe contact during display device inspection, further reducing the false detection rate. Furthermore, detection beam a in this detection device is a single electron beam. During scanning, detection beam a is received more uniformly by the light-emitting unit 11, improving detection accuracy.

[0130] Optionally, in another embodiment of the present application, the acquisition device 13 includes an image acquisition device, and the image acquisition device is used to acquire a scanning detection image of the light-emitting unit 11.

[0131] Specifically, the acquisition device 13 can be an image acquisition device, which can be an industrial camera. When the detection beam a scans the light-emitting unit 11, the defective light-emitting unit 11 will not emit light, or emit light too brightly, or emit light too darkly. The image acquisition device can be used to photograph the defective light-emitting unit 11. At this time, the status of the defective light-emitting unit 11 can be seen in the captured scanning detection image.

[0132] refer to Figure 11 , Figure 11 This is a schematic diagram of the structure of an acquisition device provided in this application; the image acquisition device includes:

[0133] The image acquisition unit 22 is used to acquire the scanning detection image of the light emitting unit 11.

[0134] The image processing unit 23 is used to process the scanned detection image.

[0135] The image output unit 24 is used to output the processed scanned detection image.

[0136] Specifically, the image acquisition unit 22 may include, but is not limited to, a CCD camera or an image acquisition auxiliary device, such as a bracket, and may capture a scanning detection image of the light-emitting unit 11 by photographing the light-emitting unit 11. The image processing unit 23 may acquire the scanning detection image through the image acquisition unit 22 and process the scanning detection image, including, but not limited to, performing preliminary correction on the scanning detection image, generating a processed scanning detection image, and transmitting the image to the image output unit 24. The image output unit 24 may include, but is not limited to, outputting detection data such as the scanning detection image, the brightness of the scanning detection image, and the chromaticity of the scanning detection image, generating a sub-pixel adjustment control matrix and controlling sub-pixels, and acquiring and generating an initial scanning detection image or a precise positioning image.

[0137] In addition, in another embodiment of the present application, Figure 11 As shown, the image acquisition device further includes: an image detection control unit 25 and an image acquisition control unit 26. The image detection control unit 25 is used to control the start and stop of the image acquisition control unit 26; the image acquisition control unit 26 is used to control the acquisition device 13.

[0138] Specifically, the image detection control unit 25 is connected to the control device 14, and is used to receive or feedback various types of signals and perform corresponding operations, such as executing the scanning detection image acquisition instruction output by the control device 14, and controlling the image acquisition control unit 26 to start the acquisition device 13. The image acquisition control unit 26 is used to receive control instructions and turn on or off the acquisition device 13 according to the timing of the control instructions.

[0139] In addition, in another embodiment of the present application, Figure 11 As shown, the image acquisition device further includes: an auxiliary lighting unit 27, which is used to provide a lighting environment when the image acquisition unit acquires the scan detection image.

[0140] Specifically, when acquiring scanned test images, if the ambient light is too dark, the acquired scanned test images may be unclear. The auxiliary lighting unit 27 can be activated when the ambient light is too dark to provide a clearer image. Furthermore, by activating or deactivating the auxiliary lighting unit 27 at different stages of the test process or procedure, different test results can be obtained.

[0141] In addition, in another embodiment of the present application, Figure 11 As shown, the image acquisition device further includes: a data acquisition unit 28, which is used to cache and process the scanned detection image.

[0142] Specifically, the data acquisition unit 28 can rapidly store the scanned image data acquired by the image acquisition unit 22, compress and transmit the image data at high speed, and / or further process the scanned image data processed by the image processing unit 23 and / or further process the scanned image output by the image output unit 24. The provision of the data acquisition unit 28 can reduce the processing pressure on subsequent stages of the acquired scanned image data and effectively reduce the total amount of transmitted image data.

[0143] Furthermore, in another embodiment of the present application, the image acquisition device further includes a hardware acceleration controller (not shown in the figure), which is configured to acquire the spatial coordinates of the detection beam. It should be noted that the present application uses the image acquisition device as an example for illustration, but does not specifically limit this.

[0144] Optionally, in another embodiment of the present application, refer to Figure 12 , Figure 12 A schematic structural diagram of another display device defect detection device provided in an embodiment of the present application; the detection device further includes:

[0145] The repair device 29 is used to emit a repair beam to repair the defective light-emitting unit 11 .

[0146] Specifically, such as Figure 12 As shown, the repair device 29 can be set in the vacuum cavity 15, adjacent to the electron beam emitting device 12. The repair device 29 is used to emit a repair beam. The repair beam may include but is not limited to a laser beam. After the detection beam a completes the scanning detection of the light-emitting unit 11, the position information of the defective light-emitting unit 11 is sent to the repair device 29. The repair device 29 emits a repair beam, and the repair beam repairs the defective light-emitting unit 11. The repair device 29 can also be set on the outside of the vacuum cavity 15. When it is set on the outside of the vacuum cavity 15, it is located on the side close to the electron beam emitting device 12. At this time, the side wall of the vacuum cavity 15 needs to be set to a transparent material so that the repair beam can irradiate the light-emitting unit 11. It should be noted that the repair device 29 can also perform a clean inspection, etc. In addition, as Figure 12 As shown, when the repair device 29 is located in the vacuum chamber 15, the acquisition device 13 may also be located inside the vacuum chamber 15. The positions of the acquisition device 13 and the repair device 29 are not specifically limited.

[0147] Optional, reference Figure 13 , Figure 13 A schematic structural diagram of another display device defect detection device provided in an embodiment of the present application; the detection device further includes:

[0148] The adjusting device 30 is used to adjust the position of the acquiring device 13 to adapt to the scanning position of the electron beam emitting device 12.

[0149] Specifically, the adjustment device 30 may be a guide rail located on one side of the vacuum chamber 15. The adjustment device 30 is connected to the acquisition device 13 and is used to move and adjust the position of the acquisition device 13. In this embodiment, the adjustment device 30 may be located outside the vacuum chamber 15 and on the side of the light-emitting unit 11 away from the electron beam emitting device 12. The adjustment device 30 is connected to the acquisition device 13 and is used to move the acquisition device 13 to adapt to the scanning position of the electron beam emitting device 12. For example, when the detection beam a scans the light-emitting unit 11 at the first end of the light-emitting unit 11 arranged in the array, the acquisition device 13 moves along the adjustment device 30 to a position directly opposite the first end. When the detection beam a scans the light-emitting unit 11 at the second end of the light-emitting unit 11 arranged in the array, the acquisition device 13 moves along the adjustment device 30 to a position directly opposite the second end. This ensures synchronization between the detection beam a scanning the light-emitting unit 11 and the acquisition of the state image of the light-emitting unit 11. This can improve the accuracy of the acquisition device 13 in acquiring the scanned detection image.

[0150] Optional, reference Figure 14 , Figure 14 A schematic diagram of the structure of another display device defect detection device provided in an embodiment of the present application; Figure 15 , Figure 15 A schematic structural diagram of another display device defect detection device provided in an embodiment of the present application; the detection device further includes:

[0151] The wavelength filtering device 31 is located between the acquisition device 13 and the light emitting unit 11 and is used to filter the light of different wavelengths emitted by the light emitting unit 11 .

[0152] Specifically, such as Figure 14 As shown, the wavelength filtering device 31 can be located outside the vacuum cavity 15 and between the light emitting unit 11 and the acquisition device 13. In this case, the acquisition device 13 is located outside the vacuum cavity 15, and the substrate 16 on which the light emitting unit 11 is placed can be a transparent substrate. Figure 15 As shown, the wavelength filtering device 31 can be located inside the vacuum chamber 15, between the light-emitting unit 11 and the acquisition device 13. In this case, the acquisition device 13 can be located inside the vacuum chamber 15, and the substrate 16 on which the light-emitting unit 11 is placed can be an opaque substrate. After the detection beam a scans the light-emitting unit 11, the wavelength range of the light emitted by the light-emitting unit 11 is relatively large. If only the wavelengths within a certain range of the light emitted by the light-emitting unit 11 are to be detected for defects, the wavelength filtering device 31 can be provided. This wavelength filtering device 31 only allows light within this wavelength range to pass, thus enabling detection of defects in the light emitted by the light-emitting unit 11 within this wavelength range.

[0153] Optionally, in another embodiment of the present application, refer to Figure 16 , Figure 16 A schematic structural diagram of another display device defect detection device provided in an embodiment of the present application; the detection device further includes:

[0154] The device interface 32 has one end connected to the control device 14 and the other end connected to an external device, and is used to receive detection data from the external device and / or feed back detection results to the external device.

[0155] Specifically, the device interface 32 is used to connect an external device and a detection device. One end of the device interface 32 is connected to the control device 14, and the other end is connected to the external device. The external device can perform secondary detection or detection confirmation on the light-emitting unit 11. For example, the control device 14 can transmit the detection results to the external device through the device interface 32, and the external device can perform secondary analysis or detection on the detection results, including analysis or detection of defects in the light-emitting unit 11, repair results of the light-emitting unit 11, etc. In addition, the external device can also perform other detection on the light-emitting unit 11 and transmit the detection data to the control device 14 through the device interface 32 to assist the external device in performing secondary detection and other operations. The device interface 32 and the external device are connected using a bidirectional control bus. It should be noted that there is no specific limitation on the external device.

[0156] The repair device 29, the adjustment device 30, the wavelength filtering device 31 and the device interface 32 in the detection device can be selectively set and are not specifically limited.

[0157] Optionally, in another embodiment of the present application, the control device 14 further includes:

[0158] The central controller 33 is used to control the startup and operation of the entire detection device.

[0159] The signal generator 34 is used to generate a control signal according to the central controller 33 .

[0160] Specifically, the central controller 33 is used to control all peripheral devices on the detection device of the embodiment of the present application, including but not limited to the self-test of the detection device, the determination and implementation of AI-based autonomous system fault detection and repair processes and / or procedures, the determination of detection parameters and / or detection items, and the AI-based autonomous determination of required test processes and / or procedures. It should be noted that the central controller 33 includes but is not limited to a computer, an industrial computer, an independent high-speed storage device such as various types of RAM and SSD, an independent hardware acceleration board, a data acquisition unit, etc. The detection beam a scanning mode controlled by the central controller 33 and the flexible use of the parameters of the acquisition device 13 can accelerate the detection speed of the detection device of the present application.

[0161] The signal generator 34 includes but is not limited to a mixed signal / pattern generator, which is used to generate various signals and patterns when the detection method is applied, including but not limited to the scanning signal and / or pattern of the detection beam a, the matching signal and / or pattern of the electron beam emitting device 12, the detection parameter and / or detection item signal and / or pattern, the inspection signal and / or pattern of the adjustment device 30, the repair signal and / or pattern of the repair device 29, the secondary detection / detection confirmation of the equipment interface 32 and other signals and / or patterns.

[0162] like Figure 16As shown, in an embodiment of the present application, the detection device includes multiple control buses, which are described below. The first control bus 100, including a forward control line 100a and a feedback line 100b, connects the central controller 33 and the electron beam emitting device 12, and is used for the central controller 33 to send control signals and / or signaling to the electron beam emitting device 12, and receive feedback information from the electron beam emitting device 12. The second control bus 101 connects the central controller 33 and the repair device 29, and is used for the central controller 33 to control the repair device 29 to achieve real-time repair after detection. The third control bus 102 is a bidirectional control bus, connecting the signal generator 34 and the electron beam emitting device 12, and is used for the electron beam emitting device 12 to receive a specified signal / pattern to complete the emission of the detection beam. At the same time, the electron beam emitting device 12 feeds back the size and / or intensity / precise positioning information of the detection beam to the signal generator 34 to achieve accurate transmission of the detection beam. The fourth control bus 103 connects the electron beam emitting device 12 and the repair device 29 and is used to control the size and / or intensity / precise positioning of the repair beam of the repair device 29 and to generate a precisely controlled repair signal / pattern to repair the light-emitting unit. The fifth control bus 104 connects the signal generator 34 and the repair device 29 and is used to precisely control and generate the size and / or intensity / precise positioning of the repair beam used for the repair device, as well as a precisely controlled repair signal / pattern. The sixth control bus 105 connects the central controller 33 and the acquisition device 13, the adjustment device 30, and the wavelength filtering device 31 and is used by the central controller 33 to control the position, image acquisition, and timing of the acquisition device 13 during precise positioning, but is not limited to these. The seventh control bus 106 connects the electron beam emitting device 12 and the acquisition device 13 and is used to detect the precise positioning of the beam and the acquisition device 13 position information, and to map the position information, but is not limited to these. The eighth control bus 107 connects the device interface 32 and the central controller 33. This is a bidirectional control bus used by the central controller 33 to receive data detected by other external devices and, based on the detection results of the present embodiment, to provide feedback to the external detection devices regarding the detection results and the results of the light-emitting unit repair. This assists the external devices in performing secondary inspections, among other operations, but is not limited to these. The ninth control bus 108 enables bidirectional control and is used for secondary confirmation of repairs, i.e., re-inspection, as well as precise positioning of the repair device 29.

[0163] In addition, if Figure 15 As shown, the detection device also includes:

[0164] The vacuum pump 35 is used to evacuate the vacuum chamber 15 .

[0165] A first opening is located on the vacuum chamber 15 , and a cover plate 36 connected to the vacuum chamber 15 , the cover plate 36 is used to cover the first opening.

[0166] Specifically, in an embodiment of the present application, a cover plate 36 is provided on the vacuum chamber 15, and the cover plate 36 is used to cover the first opening on the vacuum chamber 15. The cover plate 36 can be opened to place the display device to be inspected in the vacuum chamber 15. In addition, the material of the cover plate 36 can also be a transparent material. When the orthographic projection of the light-emitting unit 11 to be inspected is located on the cover plate 36, the cover plate 36 can also serve as an observation window to ensure observation and inspection of the acquisition device 13.

[0167] The detection device is also provided with a vacuum pump 35, which is used to evacuate the vacuum chamber 15 to ensure that the electron beam emitting device 12 located in the vacuum chamber 15 can emit the detection beam a. It should be noted that the vacuum degree of the evacuation can be less than or equal to 10 -5 The central controller 33 monitors the vacuum level and / or vacuum holding time of the detection device in real time. If the vacuum level does not meet the actual requirements of the detection parameters and / or detection items, the central controller 33 stops the normal operation of all peripheral devices and waits for the vacuum level to recover to avoid damage and / or injury to the light-emitting unit and / or equipment on the system. If the vacuum holding time does not reach a preset threshold, the central controller 33 needs to feedback maintenance information on the vacuum pump and / or vacuum system.

[0168] Based on the detection device in the embodiment of the present application, a display device defect detection method is further described.

[0169] When the detection device is used for detection, the cover 36 is opened and the display device to be detected is placed in the vacuum chamber 15. The display device includes a substrate 16 and light-emitting units 11 located on the substrate 16. The light-emitting units 11 can be arranged in an array, such as Figure 15 As shown, the light-emitting unit 11 can be a Micro-LED, and the electron beam emitting device 12 is located on the side of the light-emitting unit 11 facing away from the substrate 16 to facilitate the emission of the detection beam a to the light-emitting unit 11. The cover 36 is then closed to seal the vacuum chamber 15. After the light-emitting unit 11 is placed, the central controller 33 on the control device 14 is confirmed to be connected to the peripheral devices of all detection devices, and the acquisition device 13 is connected to all peripheral devices of all detection devices. The central controller 33 is used to perform control.

[0170] Step S1: Perform a self-test on the detection device.

[0171] Step S2: Control the electron beam emitting device 12 to emit the detection beam a, and control the detection beam a to scan the light-emitting unit area along a set track or according to a set pattern.

[0172] Step S3 : the control acquisition device 13 acquires the state of the light emitting unit 11 .

[0173] Step S4 : Determine a defective point of the display device based on the state of the light emitting unit 11 .

[0174] Specifically, in step S1, the detection device is self-checked to ensure that the detection device can operate normally, including:

[0175] Step S1001: The central controller 33 completes the self-test of the display device defect detection apparatus according to a preset procedure / process and is in a working ready state; if the self-test fails, proceed to step S1002, otherwise proceed to step S1003.

[0176] Step S1002: The central controller 33 implements the AI-based autonomous system fault detection and repair process / procedure to determine and implement the process / procedure, and then returns to step S1.

[0177] Step S1003: The central controller 33 determines the detection parameters and / or detection items, and determines the actual detection process / procedure, as well as the peripheral equipment required to be used.

[0178] Step S1004: the central controller 33 controls the vacuum pump 35 to evacuate the vacuum chamber 15 to reach a vacuum degree. If the vacuum degree does not meet the actual requirements of the detection parameters and / or detection items, step S1005 is performed; otherwise, step S1006 is performed.

[0179] Step S1005: The central controller 33 stops the normal working state of the detection device, waits for the vacuum degree to be restored, and returns to execute step S1004.

[0180] Step S1006: the central controller 33 controls all required peripheral devices to complete the preparation and working sequence of detection parameters and / or detection parameters of detection items.

[0181] Step S1007: the acquisition device 13 completes the self-test of the display device test device according to the preset procedures / processes and enters the working preparation state. If the self-test fails, the process proceeds to step S1008, otherwise, the process proceeds to step S1009.

[0182] Step S1008: The image detection control unit 25 in the acquisition device 13 implements the AI-type autonomous system fault detection and repair process / procedure determination and implementation process / procedure, and returns to execute step S1007.

[0183] After the self-test is completed, the light-emitting unit is tested, that is, step 2, step 3 and step 4 are performed, including:

[0184] Step S1009 : The central controller 33 determines the actual position of the light-emitting unit, and then controls the coordinates of the electron beam emitting device 12 to be precisely aligned with the coordinates of the light-emitting unit.

[0185] Step S1010: controlling the electron beam emitting device 12 to emit the detection beam a, and controlling the detection beam a to scan the light-emitting unit.

[0186] The central controller 33 determines the actual position of the light-emitting unit, which can be determined based on the electron beam positioning unit 20 in the acquisition device 13, without any specific limitation; the electron beam emission module 17 emits the detection beam a, and the first control unit controls the parameter control unit 21 to determine the size and intensity of the detection beam a according to the type of the light-emitting unit, and controls the electron beam deflection unit 19 to adjust the scanning direction of the detection beam a so that the detection beam a can be scanned, and the electron beam positioning unit 20 determines the scanning position of the detection beam a.

[0187] While scanning, the acquisition device 13 is used to acquire the scanned detection image; including:

[0188] Step S1011: the image detection control unit 25 obtains the preparation and working sequence of the detection parameters and / or the detection parameters of the detection items.

[0189] Step S1012: the image detection control unit 25 initializes the preset station detection procedure / process detection station.

[0190] Step S1013: The image detection control unit 25 activates the image acquisition control unit 26 according to the acquired working sequence. If the auxiliary lighting unit 27 needs to be activated, step S1014 is performed; otherwise, step S1015 is performed.

[0191] Step S1014 : The image acquisition control unit 26 activates the auxiliary lighting unit 27 .

[0192] Step S1015: the image acquisition control unit 26 starts the image acquisition unit 22 according to the acquired detection parameters and / or detection parameters of the detection items and the working sequence.

[0193] Step S1016: The image processing unit 23 obtains the image data of the scanned detection image of the micro-luminescent unit. If the acquisition device 13 enables the image data pre-processing procedure / flow, step S1017 is performed, otherwise step S1018 is performed.

[0194] Step S1017: the image acquisition unit 22 activates the data acquisition unit 28. Since the image acquisition unit 22 acquires multiple scan detection images, it reads the image data of the previously cached scan detection images while caching the image data of the current scan detection image for analysis and processing.

[0195] Step S1018: The image acquisition unit 22 sends the image data of the scanned detection image to the image processing unit 23. If the acquisition device 13 enables the image data pre-processing procedure / flow, step S1019 is performed, otherwise step S1020 is performed.

[0196] Step S1019: the image acquisition unit 22 activates the data acquisition unit 28, caches the image data of the scanned detection image processed by the image processing unit 23, and reads the image data of the scanned detection image previously cached, and performs analysis and processing.

[0197] Step S1020: The image processing unit 23 sends the processed image data of the scanned detection image to the image output unit 24. If the acquisition device 13 enables the image data pre-processing procedure / flow, step S1021 is performed, otherwise step S1022 is performed.

[0198] Step S1021: the image output unit 24 activates the data acquisition unit 28, caches the image data, reads the image data of the previously cached scanned detection image, and performs analysis and processing.

[0199] Step S1022: The image output unit 24 outputs the image data of the valid scan detection image acquired by the acquisition device.

[0200] Step S1023 : the image acquisition control unit 26 stops the acquisition device 13 and completes the acquisition of the scanning detection image of the light emitting unit 11 .

[0201] At this time, the image data of the scanned detection image is the state of the light emitting unit 11 during scanning.

[0202] Step S1024: the central controller 33 determines a defective point of the display device according to the state of the light-emitting unit.

[0203] At this time, the detection result obtained by the central controller 33 is the defective light-emitting unit 11. After obtaining the detection result, the position of the defective light-emitting unit is transmitted to the repair device 29. The repair device 29 repairs the defective light-emitting unit by emitting a repair beam according to the position of the defective light-emitting unit.

[0204] For the above-mentioned detection process, after completing the above-mentioned steps, the central controller 33 may also include: receiving detection parameters and / or detection items and / or detection results. If the detection is abnormal, the central controller 33 uses the AI-type autonomous detection parameters and / or detection items and / or detection results fault detection process and / or procedures, including: controlling the vacuum pump 35 and / or the acquisition device 13 and / or the electron beam emitting device 12 to dynamically adjust the vacuum degree, the shutter speed of the camera, the beam scanning mode, etc. to generate a new detection embodiment for re-detection. Otherwise, the detection parameters and / or detection items and / or detection results complete the detection, and all the AI-type autonomously determined processes and / or procedures used in the detection are classified to establish new test cases for use in subsequent detection.

[0205] The detection device in the embodiment of the present application can adapt to various types of light-emitting units 11 and arrangements, and has higher adaptability; the electron beam emitting device 12 can be flexibly configured and can adapt to the detection of light-emitting units 11 of different types, surface shapes and patterns; and the flexible control of the detection beam a by the electron beam emitting device 12 can achieve detection (items) of different purposes and types, as well as precise positioning, detection and repair of light-emitting units (arrays), etc., which significantly improves the detection efficiency and detection accuracy.

Claims

1. A method for detecting defects in a display device, characterized in that: The display device includes a substrate and a light-emitting unit located on the substrate, and the detection method includes: transmitting a detection beam; Acquiring position information of a light-emitting unit area and accurately locating a scanning position of the detection beam, the light-emitting unit area including a single light-emitting unit or a plurality of light-emitting units arranged in an array; Controlling the deflection of the detection beam to scan a plurality of the light-emitting unit areas according to the scanning position to light up the light-emitting units; photographing the light-emitting state of the light-emitting unit when the detection beam is scanning; determining a defective point of the display device based on a state of the light emitting unit; The scanning form of the detection beam includes scanning along a set trajectory or scanning at a fixed point according to a set pattern; Any frame of the scanning detection image includes multiple subframes, and controlling the detection beam to scan a plurality of the light-emitting unit areas also includes: In a first subframe, controlling the detection beam to scan the light-emitting unit area in a preset area; In the second subframe, the detection beam is controlled to scan the light-emitting unit area at a preset position point; the preset position point is the defect point preliminarily located in the first subframe; In a third subframe, controlling the repair beam to perform online repair on the light-emitting unit area at the defective point, the light-emitting unit including a group of normal light-emitting control units and at least one group of spare light-emitting control units. When a light-emitting unit at a defective point is detected, the repair beam cuts off the connection of the normal light-emitting control unit with the defect or abnormality and activates a group of spare light-emitting control units to achieve normal display. In the fourth subframe, the detection beam is controlled to scan the light-emitting unit area in the preset area to complete the re-inspection, The detection beam is a single electron beam, which covers a single light-emitting unit. The intensity, size and direction of the single electron beam are determined according to the position and type of the light-emitting unit.

2. The detection method according to claim 1, characterized in that The controlling the detection beam to scan the plurality of light-emitting unit areas further includes: after the online repair, controlling the detection beam to scan the plurality of light-emitting unit areas to complete re-inspection.

3. The detection method according to claim 1, wherein The controlling the detection beam to scan a plurality of light-emitting unit areas includes: Controlling the detection beam to scan the plurality of light-emitting unit areas using a first scanning mode and / or a second scanning mode and / or a third scanning mode; The first scanning mode includes scanning the light emitting unit area in a preset area; The second scanning mode includes scanning the light emitting unit area at a preset position point; The third scanning method includes scanning the light emitting unit area in a preset direction as a scanning direction.

4. The detection method according to claim 3, characterized in that Any frame of the scanning detection image includes multiple subframes, and the scanning mode of the detection beam in any subframe is the first scanning mode, the second scanning mode, or the third scanning mode.

5. A display device defect detection device, the display device defect detection device is used to implement the method according to any one of claims 1 to 4, characterized in that: The display device includes a substrate and a light-emitting unit located on the substrate, and the detection device includes: An electron beam emitting device, configured to emit a detection beam, obtain position information of a light-emitting unit area and accurately locate a scanning position of the detection beam, and deflect the detection beam to scan a plurality of light-emitting unit areas according to the scanning position to illuminate the light-emitting units, wherein the light-emitting unit area includes a single light-emitting unit or a plurality of light-emitting units arranged in an array; an acquisition device, configured to capture the light-emitting state of the light-emitting unit when the detection beam is scanning; a control device for determining a defective point of the display device based on a state of the light-emitting unit; A repair device, configured to emit a repair beam to perform online repair on a defective light-emitting unit, wherein the light-emitting unit includes a set of main light-emitting control units and at least one set of backup light-emitting control units. The repair beam disconnects the main light-emitting control units of the defective light-emitting unit and activates the backup light-emitting control units. The scanning mode of the detection beam includes scanning along a set trajectory or scanning at a fixed point according to a set pattern. The detection beam is a single electron beam, the single electron beam covers a single light-emitting unit, and the intensity, size and direction of the single electron beam are determined according to the position and type of the light-emitting unit; The electron beam emitting device includes an emission control module for controlling the emission parameters and emission position of the detection beam to achieve scanning of the light-emitting unit area; The emission control module includes a parameter control unit, and parameters of the parameter control unit control the size and intensity parameters of the electron beam.

6. The detection device according to claim 5, characterized in that The electron beam emitting device comprises: The electron beam emission module is used to emit the detection beam.

7. The detection device according to claim 6, characterized in that The emission control module includes: an electron beam deflection unit, provided at the output end of the electron beam emission module, for deflecting the detection beam to adjust the scanning direction and scanning position; The electron beam positioning unit is arranged at the output end of the electron beam deflection unit and is used for accurately positioning the scanning position of the detection beam.

8. The detection device according to claim 6, characterized in that The parameter control unit is arranged at the output end of the electron beam emission module.

9. The detection device according to claim 5, characterized in that: The detection device also includes: an adjusting device for adjusting the position of the acquiring device to adapt to the scanning position of the electron beam emitting device; And / or, the detection device further includes: The wavelength filtering device is located between the acquisition device and the light emitting unit and is used to filter the light of different wavelengths emitted by the light emitting unit.

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