Ultra-precision vertical axis balancing system and machining system

Abstract

This invention relates to the field of ultra-precision machining and inspection technology, and provides an ultra-precision vertical axis balancing system and machining system. The ultra-precision vertical axis balancing system includes a base, an accumulator, a balancing assembly, and a connecting assembly. The balancing assembly includes two balancing cylinders, which are vertically parallel and spaced apart on the base. Each balancing cylinder includes a cylinder body, a cylinder rod, and a piston. The first end of the cylinder rod is located within the cylinder body, and the piston is located at the first end of the cylinder rod and within the cylinder body. The two spaces within the cylinder body above and below the piston are connected and have equal pressure. The accumulator is connected to both cylinder bodies. The connecting assembly includes a connecting rod, the first end of which is connected to the second end of one cylinder rod, and the second end of which is connected to the second end of the other cylinder rod. The connecting rod is configured to connect to the machining assembly. The ultra-precision vertical axis balancing system and machining system provided by this invention solve the problem of low balancing accuracy in existing balancing cylinder systems.

Description

Technical Field

[0001] This invention relates to the field of ultra-precision machining and testing technology, and in particular to an ultra-precision vertical axis balancing system and machining system. Background Technology

[0002] A typical hydrostatic vertical axis used in ultra-precision machine tools employs a closed-loop guideway structure, is driven by a linear motor, and achieves positional accuracy through an ultra-precision closed-loop feedback system. Currently, methods such as cylinders, hydraulic cylinders, or counterweights are commonly used to reduce the impact of gravity on system accuracy. However, using counterweights increases the mass of the moving parts, reducing the system's dynamic characteristics.

[0003] In existing technologies, machine tools typically use low-friction or frictionless cylinders or hydraulic cylinders for balancing. However, balancing cylinder systems achieve balance through the air pressure difference on both sides of the piston. Nevertheless, in this balancing cylinder system, speed changes or piston friction can cause fluctuations in the balancing force. Even with frictionless cylinders using air hydrostatic bearings, the air pressure fluctuations at the lower limit of the cylinder rod's stroke cannot be ignored, resulting in low balancing accuracy. Summary of the Invention

[0004] This invention provides an ultra-precision vertical axis balancing system and machining system to solve the problem of low balancing accuracy in existing balancing cylinder systems.

[0005] This invention provides an ultra-precision vertical axis balancing system, comprising: a base, an accumulator, a balancing assembly, and a connecting assembly; the balancing assembly includes two balancing cylinders, which are vertically parallel and spaced apart on the base. Each balancing cylinder includes a cylinder body, a cylinder rod, and a piston. The first end of the cylinder rod is located within the cylinder body, and the piston is located at the first end of the cylinder rod and within the cylinder body. The two spaces within the cylinder body above and below the piston are connected and have equal pressure. The accumulator is connected to both cylinder bodies. The connecting assembly includes a connecting rod, the first end of which is connected to the second end of one of the cylinder rods, and the second end of which is connected to the second end of the other cylinder rod. The connecting rod is configured to connect to a machining assembly.

[0006] According to the ultra-precision vertical axis balancing system provided by the present invention, the port of the cylinder is provided with an air static pressure bearing, and the cylinder rod is engaged with the air static pressure bearing.

[0007] According to the ultra-precision vertical axis balancing system provided by the present invention, the connecting assembly further includes a balancing rod, the first end of which is connected to the middle ball joint of the connecting rod, and the second end of which is configured to be connected to the machining assembly.

[0008] According to the ultra-precision vertical axis balancing system provided by the present invention, the middle part of the connecting rod is provided with a ball joint connector, the first end of the balancing rod is provided with a ball joint joint, and the ball joint joint cooperates with the ball joint connector.

[0009] The ultra-precision vertical axis balancing system provided by the present invention further includes a power failure protection device, which is sleeved on the balancing rod and connected to the base.

[0010] According to the ultra-precision vertical axis balancing system provided by the present invention, the accumulator is disposed on the base and is adjacent to one side of the two balancing cylinders.

[0011] According to the ultra-precision vertical axis balancing system provided by the present invention, the balancing cylinder is a hydraulic cylinder and the accumulator is a hydraulic accumulator; or, the balancing cylinder is a pneumatic cylinder and the accumulator is a pneumatic accumulator.

[0012] Another aspect of the present invention provides a machining system, comprising: a vertical guide rail, a machining component, and an ultra-precision vertical axis balancing system as described in any of the preceding claims, wherein the vertical guide rail is connected to the base, the machining component is slidably mounted on the vertical guide rail, and the machining component is connected to the connecting rod.

[0013] According to the machining system provided by the present invention, the machining component includes a linear motor, a slide, a spindle box, and a spindle. The output end of the linear motor is connected to the slide, the slide is slidably mounted on the vertical guide rail, the spindle box is mounted on the slide, and the spindle is mounted on the spindle box.

[0014] The ultra-precision vertical axis balancing system provided by this invention has two parallel and spaced-apart balancing cylinders connected by a connecting rod at their support ends. When balancing the machining component, the cylinder is filled with fluid of equal pressure (such as hydraulic oil or compressed air), and the current pressure is maintained by an accumulator. The difference in the pressure-bearing areas of the piston provides an upward thrust to the connecting rod, thereby balancing the weight of the machining component. Since the spaces above and below the piston in the cylinder are interconnected and have equal pressure, the advantage over the prior art is that the total fluid volume in the cylinder changes less when the cylinder rod is in any position, the internal pressure of the cylinder is more stable, and the accumulator can act as an extension of the internal volume of the cylinder, further improving the pressure fluctuation of the fluid in the cylinder when the stroke position and speed are reduced, thus improving the balancing accuracy of the machining component.

[0015] Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in this invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0017] Figure 1 This is one of the schematic diagrams of the ultra-precision vertical axis balancing system provided in the embodiments of the present invention.

[0018] Figure 2 This is the second schematic diagram of the ultra-precision vertical axis balancing system provided in the embodiments of the present invention.

[0019] Figure 3 This is one of the schematic diagrams of the processing system provided in the embodiments of the present invention.

[0020] Figure 4 This is a second schematic diagram of the processing system provided in the embodiment of the present invention.

[0021] Figure label:

[0022] 10. Ultra-precision vertical axis balancing system; 110. Base; 120. Accumulator; 130. Balancing component; 131. Balancing cylinder; 1311. Cylinder body; 1312. Cylinder rod; 1313. Piston; 1314. Air static pressure bearing; 140. Connecting component; 141. Connecting rod; 142. Balancing rod; 143. Ball joint connector; 144. Ball joint joint; 145. Ball head cover plate; 150. Power failure protection device; 20. Vertical guide rail; 210. Vertical axis feedback system; 30. Machining component; 310. Linear motor; 320. Slide; 330. Spindle box; 340. Spindle. Detailed Implementation

[0023] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without creative effort are within the scope of protection of this invention.

[0024] In the description of the embodiments of the present invention, it should be noted that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of the present invention. In addition, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0025] In the description of the embodiments of the present invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of the present invention according to the specific circumstances.

[0026] In embodiments of the present invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0027] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0028] The following is combined with Figures 1 to 4 This invention describes the ultra-precision vertical axis balancing system and machining system provided by the present invention.

[0029] See Figure 1 and Figure 2 As shown, the ultra-precision vertical axis balancing system 10 provided in this embodiment of the invention includes: a base 110, an energy accumulator 120, a balancing component 130, and a connecting component 140.

[0030] The balancing assembly 130 includes two balancing cylinders 131, which are vertically parallel and spaced apart on the base 110. Each balancing cylinder 131 includes a cylinder body 1311, a cylinder rod 1312, and a piston 1313. The first end of the cylinder rod 1312 is located inside the cylinder body 1311, and the piston 1313 is located at the first end of the cylinder rod 1312 and is located inside the cylinder body 1311. The two spaces above and below the piston 1313 within the cylinder body 1311 are connected and have equal pressure. The accumulator 120 is connected to both cylinder bodies 1311. The connecting assembly 140 includes a connecting rod 141, the first end of which is connected to the second end of one of the cylinder rods 1312, and the second end of which is connected to the second end of the other cylinder rod 1312. The connecting rod 141 is configured to connect to the processing assembly 30.

[0031] The ultra-precision vertical axis balancing system provided by this invention has two parallel and spaced-apart balancing cylinders 131 connected at their support ends by a connecting rod 141. When balancing the machining component 30, the cylinder 1311 is filled with fluid of equal pressure (such as hydraulic oil or compressed air), and the current pressure is maintained by an accumulator 120. The difference in the upper and lower pressure areas of the piston 1313 provides an upward thrust to the connecting rod 141, thereby balancing the weight of the machining component 30. Since the spaces above and below the piston 1313 in the cylinder 1311 are interconnected and have equal pressure, the advantage over the prior art is that the total fluid volume in the cylinder 1311 changes less when the cylinder rod 1312 is in any position, the internal pressure of the cylinder 1311 is more stable, and the accumulator can act as an extension of the internal volume of the cylinder 1311, further improving the pressure fluctuation of the fluid in the balancing cylinder 131 when the stroke position and speed are reduced, thus improving the balancing support accuracy of the machining component 30.

[0032] It should be noted that the above-mentioned "using the difference in the upper and lower areas of piston 1313 to provide an upward thrust to connecting rod 141" specifically refers to the pressure-bearing area of ​​the lower end face of piston 1313 being πR. 2 Where R is the radius of the lower end face of piston 1313, and the pressure area of ​​the upper end of the piston is π(R). 2 -r 2 ), where r is the radius of cylinder rod 1312. Since the pressure inside cylinder 1311 is the same everywhere, the pressure on the lower end face of piston 1313 is greater than the pressure on the upper end face, thus generating an upward thrust on cylinder rod 1312 through piston 1313.

[0033] Specifically, in this embodiment, the accumulator 120 is filled with a fluid, such as hydraulic oil or compressed air. Correspondingly, when the accumulator 120 is filled with hydraulic oil, the cylinder body 1311 of the balance cylinder 131 is provided with supporting force by the hydraulic oil; when the accumulator 120 is filled with compressed air, the cylinder body 1311 of the balance cylinder 131 is provided with supporting force by the compressed air. In this embodiment, hydraulic oil is preferred as the fluid.

[0034] Because the upper and lower parts of the cylinder 1311 are connected, hydraulic oil can communicate between the two parts of the cylinder 1311. Therefore, pressure fluctuations within the cylinder 1311 can be reduced, thereby improving the balance and support accuracy of the machining component 30.

[0035] See Figure 1 As shown, according to some embodiments of the present invention, the connecting assembly 140 further includes a balance rod 142. The first end of the balance rod 142 is ball-jointed to the middle of the connecting rod 141, and the second end of the balance rod 142 is configured to connect to the processing assembly 30. By providing the balance rod 142, it is easy to connect to the processing assembly 30 below the base 110, and the balance rod 142 provides balanced support to the processing assembly 30. Because there are installation errors in the cylinder rods 1312 of the two balance cylinders 131 and the connecting rod 141 after installation, the cylinder rods 1312 of the two balance cylinders 131 cannot maintain absolute parallelism, and the connecting rod 141 cannot be guaranteed to be absolutely horizontal. By configuring the first end of the balance rod 142 to the middle of the connecting rod 141 with a ball joint, the installation errors of the cylinder rods 1312 of the two balance cylinders 131 and the connecting rod 141 can be eliminated, ensuring that the balance rod 142 is always in a vertical state.

[0036] Specifically, see Figure 1 As shown, in this embodiment, the base 110 has an opening in the middle, and the second end of the balance rod 142 extends through the opening to the bottom of the base 110 so as to connect with the processing assembly 30.

[0037] See Figure 1 and Figure 2As shown, according to some embodiments of the present invention, a ball joint connector 143 is provided at the middle of the connecting rod 141, and a ball joint joint 144 is provided at the first end of the balance rod 142. The ball joint joint 144 mates with the ball joint connector 143. The fit between the ball joint joint 144 and the ball joint connector 143 can be automatically adjusted under the action of external force, so that the balance rod 142 always remains in a vertical state, without the need for a complex control system or manual intervention, thus improving the reliability and stability of the system. In specific implementation, the mating surfaces of the ball joint connector 143 and the ball joint joint 144 can be ground to reduce the friction of the ball joint fit. After grinding, there is almost no gap between the mating surfaces of the ball joint connector 143 and the ball joint joint 144, avoiding the balancing system from generating additional stress on the ultra-precision hydrostatic guide rail (hereinafter referred to as the vertical guide rail 20).

[0038] Specifically, see Figure 2 As shown, in this embodiment, the ball joint connector 143 is provided with a ball head cover plate 145. The ball head cover plate 145 can clamp the ball joint connector 144 located in the ball joint connector 143, and the preload can be adjusted by the mating surface between the ball joint connector 144 and the ball head cover plate 145.

[0039] See Figure 1 and Figure 2 As shown, according to some embodiments of the present invention, the ultra-precision vertical axis balancing system 10 further includes a power failure protection device 150, which is sleeved on the balance rod 142 and connected to the base 110. When the system experiences a sudden power failure, the pressure inside the accumulator 120 decreases, and the oil pressure inside the two balance cylinders 131 drops rapidly. The balance cylinders 131 can no longer provide sufficient support to maintain the positional stability of the machining component 30. At this time, the power failure protection device 150 can quickly clamp the balance rod 142 to prevent the machining component 30 (such as the spindle 340 and the tool on the spindle 340) from falling.

[0040] See Figure 1 and Figure 2 As shown, according to some embodiments of the present invention, an air static bearing 1314 is provided at the port of the cylinder body 1311, and the cylinder rod 1312 cooperates with the air static bearing 1314. By providing the air static bearing 1314 at the port of the cylinder body 1311, non-contact guidance can be provided for the cylinder rod 1312, reducing the friction between the cylinder rod 1312 and the cylinder body 1311, achieving extremely low friction for guiding the cylinder rod 1312, and reducing the impact of system friction on the vertical axis servo system.

[0041] It should be noted that the air static pressure bearing 1314 forms a very thin air film by introducing compressed air into the air gap between the bearing and the lever. This air film can provide guidance for the cylinder rod 1312 and reduce the friction between the cylinder rod 1312 and the cylinder body 1311.

[0042] See Figure 1 and Figure 2 As shown, according to some embodiments of the present invention, an accumulator 120 is disposed on a base 110, and the accumulator 120 is disposed adjacent to one side of two balance cylinders 131. By disposing the accumulator 120 adjacent to one side of two balance cylinders 131, the distance between the accumulator 120 and the cylinder body 1311 can be shortened, the flow distance of the fluid can be reduced, and the response speed of the balance cylinder 131 can be improved.

[0043] Specifically, in this embodiment, the accumulator 120 and the cylinder 1311 are connected by a fluid pipeline with a large diameter, which provides rapid response and energy transfer. The larger diameter can accommodate more liquid or gas fluid, thereby enabling rapid energy transfer when needed, and the larger diameter can reduce the possibility of pressure fluctuations.

[0044] The machining system provided by the present invention will be described below. The machining system described below can be referred to in correspondence with the ultra-precision vertical axis balancing system described above.

[0045] See Figure 3 and Figure 4 As shown, the processing system provided in this embodiment of the invention includes: a vertical guide rail 20, a processing component 30, and an ultra-precision vertical axis balancing system 10 as described in any of the above embodiments. The vertical guide rail 20 is connected to the base 110, the processing component 30 is slidably mounted on the vertical guide rail 20, and the processing component 30 is connected to the connecting rod 141.

[0046] The machining system provided by the present invention can improve the balance support accuracy of the machining component 30 by setting the ultra-precision vertical axis balancing system 10 described above.

[0047] Specifically, in this embodiment, the vertical guide rail 20 is an ultra-precision hydrostatic guide rail, and the ultra-precision hydrostatic guide rail is provided with a vertical axis feedback system 210, which is used to realize high-precision positioning and motion control on the vertical axis.

[0048] See Figure 3 and Figure 4As shown, according to some embodiments of the present invention, the machining assembly 30 includes a linear motor 310, a slide 320, a spindle box 330, and a spindle 340. The output end of the linear motor 310 is connected to the slide 320, which is slidably mounted on the vertical guide rail 20. The spindle box 330 is mounted on the slide 320, and the spindle 340 is mounted on the spindle box 330. The linear motor 310 is a motor capable of generating linear motion, and its output end is connected to the slide 320. The linear motor 310 can achieve smooth and high-precision linear motion through current control, and its output force and speed can be precisely controlled. The slide 320 serves as a mounting platform or carrier, and through its sliding engagement with the vertical guide rail 20, the entire assembly can move in the vertical direction. The spindle box 330 is mounted on the slide 320, and its function is to fix and support the spindle 340, and to move vertically together with the slide 320. The spindle box 330 typically possesses stability and rigidity to ensure the stable operation of the spindle 340. The spindle 340 is a key component used for machining. It is usually located inside the spindle box 330. With the support and positioning of the spindle box 330, the spindle 340 can maintain a stable rotation speed and position during machining to ensure machining accuracy and efficiency.

[0049] During operation, the linear motor 310, upon receiving a control signal, will move along the vertical guide rail 20 on the slide 320. The slide 320 maintains contact with the guide rail through a sliding fit, ensuring the smoothness and accuracy of the vertical movement. The spindle box 330 is fixed on the slide 320 and moves vertically together with the slide 320, while the spindle 340 performs rotational machining through the support and transmission mechanism provided by the spindle box 330.

[0050] As can be seen from the above description of the embodiments, the ultra-precision vertical axis balancing system 10 and machining system provided by the present invention have at least the following advantages:

[0051] (1) The ultra-precision vertical axis balancing system 10 provided by the present invention has two balancing cylinders 131 that are parallel to each other and spaced apart on the base 110. The support ends are connected by a connecting rod 141. When the processing component 30 is balanced, the cylinder body 1311 is filled with fluid of equal pressure (such as hydraulic oil or compressed air). The current pressure is maintained by the accumulator 120. The difference in the upper and lower pressure areas of the piston 1313 provides an upward thrust to the connecting rod 141, thereby balancing the gravity of the processing component 30. Since the upper and lower parts of the space in the cylinder body 1311 are connected to each other and the pressure is equal, the advantage over the prior art is that when the cylinder rod 1312 is in any position, the total fluid volume in the cylinder body 1311 changes less, the internal pressure of the cylinder body 1311 is more stable, and the accumulator can be used as an extension of the internal volume of the cylinder body 1311, further improving the pressure fluctuation of the fluid in the balancing cylinder 131 when the stroke position and speed are reduced, thus improving the balancing support accuracy of the processing component 30.

[0052] (2) The ultra-precision vertical axis balancing system 10 provided by the present invention, by setting a balance rod 142 that is ball-jointed to the middle of the connecting rod 141, and by configuring the first end of the balance rod 142 to be ball-jointed to the middle of the connecting rod 141, can eliminate the installation error of the cylinder rod 1312 of the two balance cylinders 131 and the connecting rod 141, so that the balance rod 142 is always in a vertical state.

[0053] (3) The ultra-precision vertical axis balancing system 10 provided by the present invention has a power failure protection device 150 installed on the base 110. When the system suddenly loses power, the pressure in the accumulator 120 decreases and the oil pressure in the two balance cylinders 131 decreases rapidly. The balance cylinders 131 can no longer provide enough support to maintain the position stability of the processing component 30. At this time, the power failure protection device 150 can quickly clamp the balance rod 142 to prevent the processing component 30 (such as the spindle 340 and the tool on the spindle 340) from falling.

[0054] (4) The ultra-precision vertical axis balancing system 10 provided by the present invention can provide non-contact guidance for the cylinder rod 1312 by setting an air static pressure bearing 1314 at the port of the cylinder body 1311, thereby reducing the friction between the cylinder rod 1312 and the cylinder body 1311 and reducing the influence of system friction on the vertical axis servo system.

[0055] (5) The processing system provided by the present invention can improve the balance support accuracy of the processing component 30 by setting the ultra-precision vertical axis balance system 10 described above.

[0056] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. An ultra-precise vertical axis balancing system, characterized by, The utility model relates to a super-precision vertical axis balance system, comprising: a base, an accumulator, a balance assembly and a connecting assembly; the balance assembly comprises two balance cylinders which are vertically parallel and spaced apart on the base, each of the balance cylinders comprises a cylinder body, a cylinder rod and a piston, the first end of the cylinder rod is located in the cylinder body, the piston is located at the first end of the cylinder rod and in the cylinder body, the two spaces above and below the piston in the cylinder body are in communication and have equal pressure, and the accumulator is connected to both of the cylinder bodies; the connecting assembly comprises a connecting rod, the first end of the connecting rod is connected to the second end of one of the cylinder rods, the second end of the connecting rod is connected to the second end of the other cylinder rod, and the connecting rod is configured to be connected to a machining assembly; the port of the cylinder body is provided with an air static pressure bearing, and the cylinder rod is matched with the air static pressure bearing; the connecting assembly further comprises a balance pull rod, the first end of the balance pull rod is connected to the middle spherical hinge of the connecting rod, and the second end of the balance pull rod is configured to be connected to the machining assembly; the middle part of the connecting rod is provided with a spherical hinge connecting seat, the first end of the balance pull rod is provided with a spherical hinge joint, and the spherical hinge joint is matched with the spherical hinge connecting seat; the utility model further comprises a power failure protection device, the power failure protection device is sleeved on the balance pull rod, and the power failure protection device is connected to the base.

2. The ultra-precision vertical axis balancing system of claim 1, wherein, The accumulator is located on the base and is located adjacent to one side of the two balance cylinders.

3. The ultra-precision vertical axis balancing system of claim 1, wherein, The balance cylinder is a hydraulic cylinder, and the accumulator is a hydraulic accumulator; alternatively, the balance cylinder is a pneumatic cylinder, and the accumulator is a pneumatic accumulator.

4. A processing system characterized by, The utility model relates to a super-precision vertical axis balance system, comprising: a vertical guide rail, a machining assembly and the super-precision vertical axis balance system according to any one of claims 1 to 3, the vertical guide rail is connected to the base, the machining assembly is slidingly matched with the vertical guide rail, and the machining assembly is connected to the connecting rod.

5. The processing system of claim 4, wherein, The machining assembly comprises a linear motor, a slide plate, a spindle box and a spindle, the output end of the linear motor is connected to the slide plate, the slide plate is slidingly matched with the vertical guide rail, the spindle box is located on the slide plate, and the spindle is located in the spindle box.

Images