Pure water resistivity adjusting device, pure water resistivity adjusting method and computer equipment

Abstract

The application relates to a pure water resistivity adjusting device, a pure water resistivity adjusting method and computer equipment. A driving adjusting assembly is communicated with a carbonic acid production assembly and a pure water pipeline, so that carbonic acid solution is driven into the pure water pipeline to reduce the resistivity of the pure water. Since water pressure information of the pure water pipeline is related to the flow of the pure water in the pure water pipeline, the driving adjusting assembly can also detect the water pressure information of the pure water pipeline, adjust the driving parameter of the driving adjusting assembly according to the water pressure information of the pure water pipeline, control the flux of the carbonic acid solution into the pure water pipeline, and then adjust the resistivity of the pure water in the pure water pipeline. Through the pure water resistivity adjusting device, the driving parameter of the driving adjusting assembly can be automatically adjusted according to the water pressure information of the pure water pipeline, the resistivity of the pure water is adjusted, and static electricity in the pure water is removed.

Description

Technical Field

[0001] This application relates to the field of chip processing technology, and in particular to a pure water resistivity adjustment device, a pure water resistivity adjustment method, and a computer device. Background Technology

[0002] In the current chip cutting process, pure water is needed to cool the cutting tools that generate heat during processing. However, pure water has a high resistivity and very high insulation, which causes static electricity to be generated due to friction during the flow of pure water, resulting in electrostatic adsorption pollution, electrostatic discharge damage and other damages.

[0003] In related technologies, a pressure reducing device is usually installed in the pure water pipeline. A carbon membrane is connected in parallel at both ends of the pressure reducing device. The pressure difference in the water pipe forms a siphon to add CO2 into the pure water. Static electricity is removed by reducing the resistivity of the pure water. However, the carbon membrane is easily damaged by the pressure of the pure water. Once the carbon membrane is damaged, it cannot effectively remove static electricity. Summary of the Invention

[0004] Therefore, it is necessary to provide a pure water resistivity adjustment device, a pure water resistivity adjustment method, and a computer device to address the above-mentioned technical problems, which can effectively remove static electricity.

[0005] In a first aspect, this application provides a pure water resistivity regulating device, the device comprising:

[0006] Carbonic acid production components, used to generate carbonic acid solutions;

[0007] At least one drive adjustment component is provided, with at least one input port of the drive adjustment component connected to the outlet of the carbonic acid production component. The input ports of each drive adjustment component are used to receive the carbonic acid solution. The output port of each drive adjustment component is connected to the inlet of a pure water pipeline. The drive adjustment component is used to drive the carbonic acid solution into the pure water pipeline, detect the water pressure information in the pure water pipeline, and adjust the drive parameters of the drive adjustment component according to the water pressure information to control the flow rate of the carbonic acid solution into the pure water pipeline.

[0008] In one embodiment, the drive adjustment component includes:

[0009] A pressure detection unit is connected to the pure water pipeline and is used to detect the water pressure information in the pure water pipeline, and output a pulse control signal according to the water pressure information and a preset functional relationship;

[0010] An electromagnetic metering pump is connected to the pressure detection unit. The input port of the electromagnetic metering pump is used to receive the carbonated solution, and the output port of the electromagnetic metering pump is connected to the inlet of the pure water pipeline. The electromagnetic metering pump is used to generate a drive control signal based on the pulse control signal and the preset target pure water resistivity, and to adjust the operating frequency of the electromagnetic metering pump based on the drive control signal.

[0011] In one embodiment, the pressure detection unit includes:

[0012] The pressure detection subunit is connected to the pure water pipeline and is used to detect the water pressure information in the pure water pipeline, and output a current control signal according to the water pressure information and the preset functional relationship.

[0013] The conversion subunit is connected to the electromagnetic metering pump and the pressure detection subunit respectively, and is used to convert the current control signal into a pulse control signal and output the pulse control signal to the electromagnetic metering pump.

[0014] In one embodiment, the conversion subunit includes:

[0015] A first converter, connected to the pressure detection subunit, is used to convert the current control signal into a voltage control signal;

[0016] The second converter is connected to both the electromagnetic metering pump and the first converter, and is used to convert the voltage control signal into a pulse control signal.

[0017] In one embodiment, the number of drive adjustment components is n, where n≥2;

[0018] The pure water resistivity control device also includes:

[0019] There are n-1 valve assemblies. The inlet of the i-th valve assembly is used to receive the carbonic acid solution. The first outlet of the i-th valve assembly is connected to the input port of the i-th drive adjustment assembly. The second outlet of the i-th valve assembly is connected to the input port of the (i+1)-th valve assembly. The first outlet of the (n-1)-th valve assembly is connected to the input port of the (n-1)-th drive adjustment assembly. The second outlet of the (n-1)-th valve assembly is connected to the input port of the n-th drive adjustment assembly. Wherein, n-2≥i≥1.

[0020] In one embodiment, the carbonic acid production assembly includes:

[0021] Pure water supply unit, used to output pure water;

[0022] Carbon dioxide supply unit, used to output carbon dioxide;

[0023] The delivery pipe has a first inlet connected to the output port of the pure water supply unit and a second inlet connected to the output port of the carbon dioxide supply unit. The pure water and carbon dioxide in the delivery pipe react to generate the carbonic acid solution.

[0024] A liquid storage unit, the opening of which is connected to the output port of the delivery pipe, is used to receive and store the carbonated solution flowing into the delivery pipe.

[0025] Secondly, this application provides a method for adjusting the resistivity of pure water, the method comprising:

[0026] Detect water pressure information in the pure water pipeline;

[0027] The driving parameters of the drive adjustment component are adjusted according to the water pressure information to control the flow rate of the carbonate solution into the pure water pipeline.

[0028] Thirdly, this application provides a computer device, including a memory and a processor, wherein the memory stores a computer program, and the processor executes the computer program to implement the steps of the method described in the above embodiments.

[0029] Fourthly, this application provides a computer-readable storage medium having a computer program stored thereon, which, when executed by a processor, implements the steps of the methods described in the above embodiments.

[0030] Fifthly, this application provides a computer program product, including a computer program that, when executed by a processor, implements the steps of the methods described in the above embodiments.

[0031] The aforementioned pure water resistivity adjustment device, pure water resistivity adjustment method, and computer equipment have a drive adjustment component connected to the carbonic acid production component and the pure water pipeline, respectively, to drive the carbonic acid solution into the pure water pipeline to reduce the resistivity of the pure water. Since the water pressure information of the pure water pipeline is related to the flow rate of pure water in the pure water pipeline, the drive adjustment component of this application can also detect the water pressure information of the pure water pipeline and adjust the drive parameters of the drive adjustment component according to the water pressure information of the pure water pipeline to control the flow rate of the carbonic acid solution into the pure water pipeline, thereby adjusting the resistivity of the pure water in the pure water pipeline. Through the pure water resistivity adjustment device of this application, the drive parameters of the drive adjustment component can be automatically adjusted according to the water pressure information of the pure water pipeline, thereby adjusting the resistivity of the pure water and removing static electricity from the pure water. Attached Figure Description

[0032] To more clearly illustrate the technical solutions in the embodiments of this application or the conventional technology, the drawings used in the description of the embodiments or the conventional technology will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0033] Figure 1 This is a schematic diagram of the pure water resistivity adjustment device in one embodiment;

[0034] Figure 2 This is a schematic diagram of the pure water resistivity adjustment device in another embodiment;

[0035] Figure 3 This is a schematic diagram of the pure water resistivity adjustment device in another embodiment;

[0036] Figure 4 This is a schematic diagram of the pure water resistivity adjustment device in another embodiment;

[0037] Figure 5 This is a schematic diagram of the pure water resistivity adjustment device in another embodiment;

[0038] Figure 6 This is a schematic diagram of the pure water resistivity adjustment device in another embodiment;

[0039] Figure 7 This is a schematic diagram of the pure water resistivity adjustment device in another embodiment;

[0040] Figure 8 This is a schematic flowchart of a pure water resistivity adjustment method according to one embodiment.

[0041] Explanation of reference numerals in the attached drawings: 1- Carbonic acid production assembly includes, 11- Pure water supply unit, 12- Carbon dioxide supply unit, 13- Delivery pipe, 14- Liquid storage unit, 2- Drive and regulating assembly, 21- Pressure detection unit, 211- Pressure detection subunit, 212- Conversion subunit, 2121- First converter, 2122- Second converter, 22- Electromagnetic metering pump, 3- Pure water pipeline. Detailed Implementation

[0042] To facilitate understanding of this application, a more complete description will be provided below with reference to the accompanying drawings, which illustrate embodiments of the present application. However, the present application can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that the disclosure of this application will be thorough and complete.

[0043] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application.

[0044] It is understood that the terms “first,” “second,” etc., used in this application may be used herein to describe various elements, but these elements are not limited by these terms. These terms are only used to distinguish one element from another.

[0045] Spatial relation terms such as “below,” “under,” “below,” “under,” “above,” “above,” etc., are used herein to describe the relationship between one element or feature shown in the figure and other elements or features. It should be understood that, in addition to the orientation shown in the figure, spatial relation terms also include different orientations of the device in use and operation. For example, if the device in the figure is flipped, the element or feature described as “below,” “under,” or “below” will be oriented “above” the other element or feature. Therefore, the exemplary terms “below” and “under” can include both above and below orientations. Furthermore, the device may also include other orientations (e.g., rotated 90 degrees or other orientations), and the spatial descriptive terms used herein will be interpreted accordingly.

[0046] It should be noted that when one element is considered to be "connected" to another element, it can be directly connected to the other element or connected to the other element through an intermediary element. Furthermore, in the following embodiments, "connection" should be understood as "electrical connection," "communication connection," etc., if there is transmission of electrical signals or data between the connected objects.

[0047] When used herein, the singular forms of “a,” “an,” and “the” may also include the plural forms unless the context clearly indicates otherwise. It should also be understood that the terms “comprising / including” or “having,” etc., specify the presence of the stated features, wholes, steps, operations, components, parts, or combinations thereof, but do not preclude the possibility of the presence or addition of one or more other features, wholes, steps, operations, components, parts, or combinations thereof. Meanwhile, the term “and / or” as used in this specification includes any and all combinations of the associated listed items.

[0048] In one embodiment, such as Figure 1 As shown, this application provides a pure water resistivity adjustment device, which includes: a carbonic acid production component 1 for generating a carbonic acid solution and at least one drive adjustment component 2.

[0049] At least one drive regulating component 2 has its input port connected to the outlet of the carbonic acid production component 1. The input ports of each drive regulating component 2 are used to receive carbonic acid solution. The output port of the drive regulating component 2 is connected to the inlet of the pure water pipe 3. The drive regulating component 2 is used to drive the carbonic acid solution into the pure water pipe 3, detect the water pressure information in the pure water pipe 3, and adjust the drive parameters of the drive regulating component 2 according to the water pressure information to control the flow rate of the carbonic acid solution into the pure water pipe 3.

[0050] Please see Figure 1 , Figure 1 Taking a pure water resistivity regulating device, for example, a drive regulating component 2 is included. The input port of the drive regulating component 2 is connected to the outlet of the carbonate production component 1, and the output port of the drive regulating component 2 is connected to the inlet of the pure water pipe 3, so as to transport the carbonate solution in the carbonate production component 1 into the pure water pipe 3. In actual operation, since the flow rate of pure water in the pure water pipe 3 may change constantly, if the carbonate solution is always introduced into the pure water pipe at a fixed flow rate per unit time, when the flow rate of pure water in the pure water pipe 3 increases, it will cause a large fluctuation in the resistivity of the pure water, and the resistivity of the pure water will increase, reducing the effect of removing static electricity.

[0051] To maintain a stable resistivity of the pure water within the pure water pipeline, the drive adjustment component 2 of this application can detect the water pressure information within the pure water pipeline 3 in real time. It is understood that the flow rate of the pure water within the pure water pipeline 3 is related to the water pressure information. For example, the higher the flow rate of the pure water within the pure water pipeline 3, the lower the water pressure within the pure water pipeline 3; that is, the flow rate of the pure water within the pure water pipeline 3 is negatively correlated with the water pressure information. Therefore, by detecting the water pressure information within the pure water pipeline 3, the drive parameters of the drive adjustment component 2 can be adjusted, thereby controlling the flow rate of the carbonate solution into the pure water pipeline and regulating the resistivity of the pure water within the pipeline, thus maintaining the resistivity of the pure water in a stable state.

[0052] The aforementioned pure water resistivity regulating device connects the driving regulating component to both the carbonic acid production component and the pure water pipeline. This facilitates the driving of the carbonic acid solution into the pure water pipeline, thereby reducing the resistivity of the pure water. Since the water pressure information of the pure water pipeline is related to the flow rate of the pure water within the pipeline, the driving regulating component of this application can also detect the water pressure information of the pure water pipeline and adjust its driving parameters accordingly. This controls the flow rate of the carbonic acid solution into the pure water pipeline, thereby regulating the resistivity of the pure water within the pipeline. Through this pure water resistivity regulating device, the driving parameters of the driving regulating component can be automatically adjusted based on the water pressure information of the pure water pipeline, thereby regulating the resistivity of the pure water and removing static electricity from the pure water.

[0053] In one embodiment, see Figure 2The drive adjustment component 2 includes: a pressure detection unit 21 and an electromagnetic metering pump 22.

[0054] The pressure detection unit 21 is connected to the pure water pipe 3 and is used to detect the water pressure information in the pure water pipe 3, and output a pulse control signal according to the water pressure information and the preset function relationship.

[0055] The electromagnetic metering pump 22 is connected to the pressure detection unit 21. The input port of the electromagnetic metering pump 22 is used to receive the carbonic acid solution, and the output port of the electromagnetic metering pump 22 is connected to the inlet of the pure water pipeline 3. The electromagnetic metering pump 22 is used to generate a drive control signal based on the pulse control signal and the preset target pure water resistivity, and adjust the working frequency of the electromagnetic metering pump 22 based on the drive control signal.

[0056] In the application, the pressure detection unit 21 is first connected to the pure water pipe 3 to detect the water pressure information within the pipe 3. After obtaining the water pressure information, the pressure detection unit 21 outputs a pulse control signal based on the water pressure information and a preset functional relationship. For example, when the detected water pressure is low, it indicates that the water flow in the pure water pipe is high. To maintain the stable resistivity of the pure water, more carbonate solution needs to be introduced into the pure water. Therefore, the pressure detection unit 21 outputs a high-frequency pulse control signal based on the preset functional relationship. In another example, when the detected water pressure is high, it indicates that the water flow in the pure water pipe is low. To maintain the stable resistivity of the pure water, the flow rate of carbonate solution into the pure water can be reduced. Therefore, the pressure detection unit 21 outputs a low-frequency pulse control signal based on the preset functional relationship.

[0057] When the electromagnetic metering pump 22 receives the pulse control signal output by the pressure detection unit 21, it can adjust the pulse control signal according to the preset target pure water resistivity to obtain a drive control signal. The drive control signal is used to control the operating frequency of the electromagnetic metering pump 22, thereby adjusting the flow rate of the carbonate solution into the pure water and regulating the resistivity of the pure water. Specifically, the frequency F1 of the drive control signal satisfies: F1=F2*x, where F2 is the frequency of the pulse control signal, x is the preset adjustment weight based on the preset target pure water resistivity, x>0, and x can be an integer or a decimal.

[0058] For example, the control weight x can be predetermined to be 0.2 based on the preset target pure water resistivity. When the pulse control signal output by the pressure detection unit 21 is a 50Hz pulse, i.e., F2=50Hz, the electromagnetic metering pump 22 can determine the frequency of the drive control signal to be 10Hz based on the control weight and the pulse control signal, and control the electromagnetic metering pump 22 to work at a frequency of 10Hz. When the pure water flow rate in the pure water pipe 3 changes, such as when the flow rate in the pure water pipe increases, the water pressure information in the pure water pipe decreases accordingly. When the pressure detection unit 21 outputs a 100Hz pulse control signal based on the detected water pressure information, the electromagnetic metering pump 22 determines the frequency of the drive control signal to be 20Hz based on the control weight and the pulse control signal, and controls the electromagnetic metering pump 22 to work at a frequency of 20Hz, appropriately increasing the flow rate of the carbonate solution into the pure water pipe 3 so as to keep the pure water resistivity stable.

[0059] In another example, the control weight x can be pre-determined to be 2 based on the preset target pure water resistivity. When the pressure detection unit 21 outputs a pulse control signal with a frequency of 50 Hz, i.e., F2 = 50 Hz, the electromagnetic metering pump 22 can determine the frequency of the drive control signal to be 100 Hz based on the control weight and the pulse control signal, and control the electromagnetic metering pump 22 to work at a frequency of 100 Hz. When the pure water flow rate in the pure water pipe 3 changes, such as when the flow rate in the pure water pipe decreases, the water pressure information in the pure water pipe increases accordingly. When the pressure detection unit 21 outputs a pulse control signal with a frequency of 30 Hz based on the detected water pressure information, the electromagnetic metering pump 22 determines the frequency of the drive control signal to be 60 Hz based on the control weight and the pulse control signal, and controls the electromagnetic metering pump 22 to work at a frequency of 20 Hz, appropriately reducing the flow rate of carbonate solution into the pure water pipe 3, so as to keep the pure water resistivity stable.

[0060] In application, a pressure detection range can be preset for the pressure detection unit 21. When the water pressure information detected by the pressure detection unit 21 is within the pressure detection range, the pressure detection unit 21 can output a pulse control signal according to the preset function relationship. When the water pressure information detected by the pressure detection unit 21 is less than the lower limit of the pressure detection range, it indicates that the pure water flow rate in the pure water pipeline is large, and the pressure detection unit 21 can output the maximum pulse control signal. When the water pressure information detected by the pressure detection unit 21 exceeds the upper limit of the pressure detection range, it indicates that the pure water flow rate in the pure water pipeline is small, and the pressure detection unit 21 can output the minimum or stop outputting the pulse control signal.

[0061] In one example, the pressure detection range of the pressure detection unit 21 is [0.320 MPa, 0.620 MPa]. The pressure detection unit 21 can output a pulse control signal of 0-100 Hz. When the water pressure detected by the pressure detection unit 21 is 0.5 MPa, the pressure detection unit 21 can output a pulse control signal according to a preset function relationship, for example, outputting a 75 Hz pulse control signal; when the water pressure detected by the pressure detection unit 21 is 0.3 MPa, the pressure detection unit 21 can output a 100 Hz pulse control signal; when the water pressure detected by the pressure detection unit 21 is 0.7 MPa, the pressure detection unit 21 can stop outputting the pulse control signal.

[0062] In one embodiment, see Figure 3 The pressure detection unit 21 includes a pressure detection subunit 211 and a conversion subunit 212.

[0063] The pressure detection subunit 211 is connected to the pure water pipe 3 and is used to detect the water pressure information in the pure water pipe 3, and output a current control signal according to the water pressure information and a preset functional relationship.

[0064] The conversion subunit 212 is connected to the electromagnetic metering pump 22 and the pressure detection subunit 211 respectively, and is used to convert the current control signal into a pulse control signal and output the pulse control signal to the electromagnetic metering pump 22.

[0065] The pressure detection subunit 211 can be a pressure transmitter, which can convert the detected liquid pressure parameters into standard electrical signals, such as current control signals. Since the operating frequency of the electromagnetic metering pump 22 needs to be adjusted, a conversion subunit 212 is also required to convert the current control signal output by the pressure detection subunit 211 into a pulse control signal. This allows the electromagnetic metering pump 22 to generate a drive control signal based on the pulse control signal and a preset target pure water resistivity.

[0066] In one embodiment, see Figure 4 The conversion subunit 212 includes: a first converter 2121 and a second converter 2122.

[0067] The first converter 2121 is connected to the pressure detection subunit 211 and is used to convert the current control signal into a voltage control signal. The second converter 2122 is connected to both the electromagnetic metering pump 22 and the first converter 2121 and is used to convert the voltage control signal into a pulse control signal.

[0068] Specifically, the pressure detection subunit 211 can be a pressure transmitter, the first converter 2121 can be a current-to-voltage converter, and the second converter 2122 can be a voltage-to-frequency converter. The pressure detection subunit 211 detects the change in water pressure in the pure water pipeline in real time and outputs a current control signal based on the detected water pressure information. The first converter 2121 converts the current control signal into a voltage control signal, and the second converter 2122 converts the voltage control signal into a pulse control signal, which is finally output to the electromagnetic metering pump 22.

[0069] In one example, the pressure detection subunit 211 is an OHR-3051 single-crystal silicon intelligent pressure transmitter. By adjusting the pressure detection range of the pressure transmitter, different pressure levels can be detected. The pressure transmitter can output a 4-20mA variable current based on the real-time detected water pressure information. The first converter 2121 can convert the received 4-20mA real-time current into a 0-10V voltage output, and the second converter 2122 then converts the received 0-10V voltage into a 0-100Hz pulse control signal output, with an output accuracy of 1%.

[0070] In one embodiment, see Figure 5 The carbon dioxide production component 1 includes: a pure water supply unit 11, a carbon dioxide supply unit 12, a delivery pipe 13, and a liquid storage unit 14.

[0071] The pure water supply unit 11 is used to output pure water. The carbon dioxide supply unit 12 is used to output carbon dioxide. The first inlet of the delivery pipe 13 is connected to the output port of the pure water supply unit, and the second inlet of the delivery pipe is connected to the output port of the carbon dioxide supply unit. The pure water and carbon dioxide in the delivery pipe react to generate a carbonic acid solution. The opening of the storage unit 14 is connected to the output port of the delivery pipe. The storage unit 14 is used to receive and store the carbonic acid solution flowing into the delivery pipe.

[0072] In the application, when the pure water output from the pure water supply unit 11 comes into contact with the carbon dioxide output from the carbon dioxide supply unit 12 in the delivery pipe 13, a chemical reaction occurs to generate a carbonic acid solution. The specific chemical reaction equation is: CO2 + H2O = H2CO3. The delivery pipe 13 stores the generated carbonic acid solution in the storage unit 14 so that the regulating component 2 can drive the carbonic acid solution into the pure water pipeline.

[0073] The carbonic acid production component 1 may also include a water level controller, and can set low water level lines, high water level lines, and overflow lines for the storage unit 14 to control the amount of carbonic acid solution in the storage unit 14, avoiding excessive carbonic acid solution generation and waste, and avoiding insufficient carbonic acid solution to reduce the resistivity of pure water in the pure water pipeline. The pure water supply unit 11 can be an ejector, the carbon dioxide supply unit 12 can be a CO2 gas cylinder, and the storage unit 14 can be a Teflon storage bottle.

[0074] In one embodiment, the number of drive adjustment components 2 is n, where n≥2;

[0075] The pure water resistivity control device also includes: n-1 valve assemblies 4, the inlet of the i-th valve assembly is used to receive carbonic acid solution, the first outlet of the i-th valve assembly is connected to the input of the i-th drive adjustment assembly, the second outlet of the i-th valve assembly is connected to the input of the (i+1)-th valve assembly, the first outlet of the (n-1)-th valve assembly is connected to the input of the (n-1)-th drive adjustment assembly, and the second outlet of the (n-1)-th valve assembly is connected to the input of the n-th drive adjustment assembly, where n-2≥i≥1.

[0076] Please see Figure 6 The inlet of the i-th valve assembly is used to receive the carbonated solution. The first outlet of the i-th valve assembly 4 is connected to the input port of the i-th electromagnetic metering pump 22, and the second outlet of the i-th valve assembly 4 is connected to the input port of the (i+1)-th valve assembly. The first outlet of the (n-1)-th valve assembly is connected to the input port of the (n-1)-th electromagnetic metering pump 22, and the second outlet of the (n-1)-th valve assembly is connected to the input port of the n-th electromagnetic metering pump 22. Each pressure detection unit 21 (not shown in the figure) is connected to the pure water pipeline to detect the water pressure information in the pure water pipeline. The pressure detection range of each pressure detection unit 21 can be different to detect the pressure at different levels. Based on the detected water pressure information, different drive control signals are output to expand the adjustable range of the flow rate of carbonated solution into the pure water pipeline. In application, the drive adjustment assembly 2 may also include valve bodies such as check valves, vent valves, and three-way valves.

[0077] In application, the pure water resistivity regulating device of this application can simultaneously cool multiple chip cutting tools. When the pure water resistivity regulating device of this application supports the operation of multiple chip cutting tools at the same time, the flow rate in the pure water pipeline is positively correlated with the number of chip cutting tools supported by the pure water resistivity regulating device. The more chip cutting tools supported by the pure water resistivity regulating device, the greater the flow rate in the pure water pipeline and the lower the water pressure information in the pure water pipeline 3. The fewer chip cutting tools supported by the pure water resistivity regulating device, the lower the flow rate in the pure water pipeline and the greater the water pressure information in the pure water pipeline 3. At this time, the pressure detection unit 21 of this application can detect the water pressure information in the pure water pipeline 3 and output a pulse control signal. Then, the operating frequency of the electromagnetic metering pump can increase or decrease with the frequency of the pulse control signal to change the flow rate of the carbonic acid solution into the pure water pipeline 3.

[0078] In one embodiment, taking the pure water resistivity regulating device as an example, which includes three drive regulating components 2, please refer to [link / reference]. Figure 7 (Pressure detection unit 21 not shown), the drive adjustment assembly 2 may also include a check valve S and a three-way valve P. Each electromagnetic metering pump 22 delivers the carbonate solution in the storage unit 4 to the pure water pipeline through the check valve S and the three-way valve P. In this example, the pressure detection ranges of each pressure detection unit 21 are different. The pressure detection range of the first pressure detection unit 21 is [0.320 MPa, 0.620 MPa], the pressure detection range of the second pressure detection unit 21 is [0.360 MPa, 0.650 MPa], and the pressure detection range of the third pressure detection unit 21 is [0.410 MPa, 0.650 MPa]. The preset target pure water resistivity is 0.6 Mohm, and the control weight x is predetermined to be 2 based on the preset target pure water resistivity. Assuming that each pressure detection unit 21 can output a pulse control signal of 0-100 Hz, for example, when the pure water resistivity adjustment device supports 1 When all 0 chip cutting tools are working, the water pressure in the pure water pipe is 0.5 MPa. The first pressure detection unit 21 can output a 40Hz pulse control signal, the second pressure detection unit 21 can output a 50Hz pulse control signal, and the third pressure detection unit 21 can output a 60Hz pulse control signal. Then, the first electromagnetic metering pump 22 can determine the drive control signal as 80Hz based on the adjustment weight and the 40Hz pulse control signal, and control the first electromagnetic metering pump 22 to work at a frequency of 80Hz. The second electromagnetic metering pump 22 can determine the drive control signal as 100Hz based on the adjustment weight and the 50Hz pulse control signal, and control the second electromagnetic metering pump 22 to work at a frequency of 100Hz. The third electromagnetic metering pump 22 can determine the drive control signal as 120Hz based on the adjustment weight and the 60Hz pulse control signal, and control the second electromagnetic metering pump 22 to work at a frequency of 120Hz.

[0079] When the flow rate of pure water in the pure water pipe 3 changes, such as reducing the number of chip cutting tools supported by the pure water resistivity regulating device (for example, when the number of chip cutting tools supported by the pure water resistivity regulating device changes from 10 to 7), the flow rate in the pure water pipe decreases, and the water pressure information in the pure water pipe increases. For example, when the water pressure information in the pure water pipe becomes 0.63 MPa, the first pressure detection unit 21 can stop outputting the pulse control signal, the second pressure detection unit 21 can output a 20Hz pulse control signal, and the third pressure detection unit 21 can output a 30Hz pulse control signal. Correspondingly, the first electromagnetic metering pump 22 stops working, the second electromagnetic metering pump 22 works at a frequency of 40Hz, and the third electromagnetic metering pump 22 works at a frequency of 60Hz. As a result, the flow rate of carbonic acid solution into the pure water pipe 3 decreases, and the resistivity of pure water in the pure water pipe 3 can remain stable.

[0080] When the flow rate of pure water in the pure water pipe 3 changes, such as reducing the number of chip cutting tools supported by the pure water resistivity regulating device (for example, when the number of chip cutting tools supported by the pure water resistivity regulating device changes from 10 to 13), the flow rate in the pure water pipe increases, and the water pressure information in the pure water pipe decreases, such as the water pressure information in the pure water pipe becoming 0.33 MPa. At this time, the first pressure detection unit 21 can output a 90Hz pulse control signal, the second pressure detection unit 21 can output a 100Hz pulse control signal, and the third pressure detection unit 21 can output a 100Hz pulse control signal. Correspondingly, the first electromagnetic metering pump 22 operates at a frequency of 180Hz, and the second and third electromagnetic metering pumps 22 both operate at a frequency of 200Hz. As a result, the flow rate of carbonated solution into the pure water pipe 3 increases, and the resistivity of pure water in the pure water pipe 3 can remain stable.

[0081] In one embodiment, such as Figure 8 As shown, this application also provides a method for adjusting the resistivity of pure water, the method comprising:

[0082] S801: Detects water pressure information in the pure water pipeline.

[0083] S802: Adjust the drive parameters of the drive regulating component according to the water pressure information to control the flow rate of carbonic acid solution into the pure water pipeline.

[0084] To maintain a stable resistivity of the pure water within the pure water pipeline, the drive adjustment component 2 of this application can detect the water pressure information within the pure water pipeline 3 in real time. It is understood that the flow rate of the pure water within the pure water pipeline 3 is related to the water pressure information. For example, the higher the flow rate of the pure water within the pure water pipeline 3, the lower the water pressure within the pure water pipeline 3; that is, the flow rate of the pure water within the pure water pipeline 3 is negatively correlated with the water pressure information. Therefore, by detecting the water pressure information within the pure water pipeline 3, the drive parameters of the drive adjustment component 2 can be adjusted, thereby controlling the flow rate of the carbonate solution into the pure water pipeline and regulating the resistivity of the pure water within the pipeline, thus maintaining the resistivity of the pure water in a stable state.

[0085] Furthermore, the pure water resistivity adjustment device and method of this application are not limited to the field of chip processing technology. They can be applied to any scenario where the resistivity of pure water needs to be adjusted or static electricity in pure water needs to be removed.

[0086] It should be understood that, although Figure 8 The steps in the flowchart are shown sequentially as indicated by the arrows, but these steps are not necessarily executed in the order indicated by the arrows. Unless otherwise specified herein, there is no strict order in which these steps are executed, and they can be performed in other orders. Figure 8 At least some of the steps in the process may include multiple steps or multiple stages. These steps or stages are not necessarily completed at the same time, but may be executed at different times. The execution order of these steps or stages is not necessarily sequential, but may be executed in turn or alternately with other steps or at least some of the steps or stages in other steps.

[0087] In one embodiment, this application provides a computer device including a memory and a processor. The memory stores a computer program, and the processor executes the computer program to implement the steps of the method described above.

[0088] In one embodiment, this application provides a computer-readable storage medium having a computer program stored thereon, which, when executed by a processor, implements the steps of the method described above.

[0089] In one embodiment, this application provides a computer program product including a computer program that, when executed by a processor, implements the steps of the methods described above.

[0090] Those skilled in the art will understand that all or part of the processes in the methods of the above embodiments can be implemented by a computer program instructing related hardware. The computer program can be stored in a non-volatile computer-readable storage medium, and when executed, it can include the processes of the embodiments of the methods described above. Any references to memory, storage, databases, or other media used in the embodiments provided in this application can include at least one of non-volatile and volatile memory. Non-volatile memory can include read-only memory (ROM), magnetic tape, floppy disk, flash memory, or optical storage, etc. Volatile memory can include random access memory (RAM) or external cache memory. By way of illustration and not limitation, RAM can be in various forms, such as static random access memory (SRAM) or dynamic random access memory (DRAM), etc.

[0091] In the description of this specification, references to terms such as "some embodiments," "other embodiments," and "ideal embodiments" indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the invention. In this specification, the illustrative descriptions of the above terms do not necessarily refer to the same embodiments or examples.

[0092] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0093] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the invention patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A pure water resistivity regulating device, characterized in that, The device includes: Carbonic acid production components, used to generate carbonic acid solutions; At least one drive adjustment component, at least one input port of the drive adjustment component is connected to the outlet of the carbonic acid production component, the input port of each drive adjustment component is used to receive the carbonic acid solution, the output port of the drive adjustment component is connected to the inlet of the pure water pipeline, the drive adjustment component is used to drive the carbonic acid solution into the pure water pipeline, detect the water pressure information in the pure water pipeline, and adjust the drive parameters of the drive adjustment component according to the water pressure information to control the flow rate of the carbonic acid solution into the pure water pipeline; The drive adjustment component includes: A pressure detection unit is connected to the pure water pipeline and is used to detect the water pressure information in the pure water pipeline, and output a pulse control signal according to the water pressure information and a preset functional relationship; An electromagnetic metering pump is connected to the pressure detection unit. The input port of the electromagnetic metering pump is used to receive the carbonated solution, and the output port of the electromagnetic metering pump is connected to the inlet of the pure water pipeline. The electromagnetic metering pump is used to generate a drive control signal based on the pulse control signal and the preset target pure water resistivity, and to adjust the operating frequency of the electromagnetic metering pump based on the drive control signal.

2. The pure water resistivity regulating device according to claim 1, characterized in that, The pressure detection unit includes: The pressure detection subunit is connected to the pure water pipeline and is used to detect the water pressure information in the pure water pipeline, and output a current control signal according to the water pressure information and the preset functional relationship. The conversion subunit is connected to the electromagnetic metering pump and the pressure detection subunit respectively, and is used to convert the current control signal into a pulse control signal and output the pulse control signal to the electromagnetic metering pump.

3. The pure water resistivity regulating device according to claim 2, characterized in that, The conversion subunit includes: A first converter, connected to the pressure detection subunit, is used to convert the current control signal into a voltage control signal; The second converter is connected to both the electromagnetic metering pump and the first converter, and is used to convert the voltage control signal into a pulse control signal.

4. The pure water resistivity regulating device according to claim 1, characterized in that, The number of drive adjustment components is n, where n≥2; The pure water resistivity control device also includes: There are n-1 valve assemblies. The inlet of the i-th valve assembly is used to receive the carbonic acid solution. The first outlet of the i-th valve assembly is connected to the input port of the i-th drive adjustment assembly. The second outlet of the i-th valve assembly is connected to the input port of the (i+1)-th valve assembly. The first outlet of the (n-1)-th valve assembly is connected to the input port of the (n-1)-th drive adjustment assembly. The second outlet of the (n-1)-th valve assembly is connected to the input port of the n-th drive adjustment assembly. Wherein, n-2≥i≥1.

5. The pure water resistivity regulating device according to claim 1, characterized in that, The carbonic acid production assembly includes: Pure water supply unit, used to output pure water; Carbon dioxide supply unit, used to output carbon dioxide; The delivery pipe has a first inlet connected to the output port of the pure water supply unit and a second inlet connected to the output port of the carbon dioxide supply unit. The pure water and carbon dioxide in the delivery pipe react to generate the carbonic acid solution. A liquid storage unit, the opening of which is connected to the output port of the delivery pipe, is used to receive and store the carbonated solution flowing into the delivery pipe.

6. A method for adjusting the resistivity of pure water, characterized in that, The method is applied to the pure water resistivity regulating device according to any one of claims 1-5; the method includes: Detect water pressure information in the pure water pipeline; The driving parameters of the drive adjustment component are adjusted according to the water pressure information to control the flow rate of the carbonate solution into the pure water pipeline.

7. A computer device comprising a memory and a processor, wherein the memory stores a computer program, characterized in that, When the processor executes the computer program, it implements the steps of the method of claim 6.

8. A computer-readable storage medium having a computer program stored thereon, characterized in that, When the computer program is executed by a processor, it implements the steps of the method of claim 6.

9. A computer program product, comprising a computer program, characterized in that, When the computer program is executed by a processor, it implements the steps of the method of claim 6.

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