Method, device and medium for evaluating measurement results

Abstract

According to an embodiment of the present disclosure, a method, device, and medium for evaluating measurement results are provided. In this method, a plurality of marker points are determined in a captured image of a target object. These marker points correspond to measurement signals of the target object, respectively, and include a first group of marker points and a second group of marker points corresponding to the first group of marker points. The spacing between the corresponding marker points in the first group of marker points and the second group of marker points is used to measure the target object. Then, the outline of the target object presented in the captured image is determined. Furthermore, based on the first group of marker points, the second group of marker points, and the distances between the plurality of marker points and the outline, the measurement results for the target object are evaluated. In this way, the measurement results can be evaluated quickly and accurately with a low false positive rate.

Description

Technical Field

[0001] Embodiments of the present disclosure generally relate to the field of data processing, and more particularly, to methods, devices, and media for evaluating measurement results. Background Art

[0002] In integrated circuit (IC) manufacturing, quantitative measurement is often required for wafers undergoing each process to ensure that key physical parameters (such as film thickness, line width, and doping concentration) meet process specifications. Existing photolithography measurement equipment measures line width by measuring signals within a certain range while scanning the wafer.

[0003] Specifically, unlike other electron microscopes, a linewidth scanning electron microscope (SEM) generates measurement signals at specific locations in the scanned image (e.g., the boundary of the object being measured) while scanning a wafer. Based on these measurement signals, the microscope then calculates the linewidth using methods such as thresholding and linear approximation. However, the linewidth determined in this way can be inaccurate, which can affect process optimization. Therefore, efficiently evaluating linewidth measurement results has become a pressing issue. Summary of the Invention

[0004] In a first aspect of the present disclosure, a method for evaluating a measurement result is provided. The method includes: determining a plurality of marker points in a captured image of a target object, the plurality of marker points respectively corresponding to measurement signals of the target object, the plurality of marker points including a first group of marker points and a second group of marker points corresponding to the first group of marker points, wherein the spacing between corresponding marker points in the first group of marker points and the second group of marker points is used to measure the target object; determining an outline of the target object presented in the captured image; and evaluating a measurement result of the target object based on the first group of marker points, the second group of marker points, and the distances between the plurality of marker points and the outline.

[0005] In a second aspect of the present disclosure, an electronic device is provided. The electronic device includes a processor and a memory coupled to the processor. The memory has instructions stored therein that, when executed by the processor, cause the electronic device to perform the method for evaluating measurement results according to the first aspect of the present disclosure.

[0006] In a third aspect of the present disclosure, a computer-readable storage medium is provided. The computer-readable storage medium stores a computer program. When executed by a processor, the computer program implements the method for evaluating a measurement result according to the first aspect of the present disclosure.

[0007] According to embodiments of the present disclosure, first and second sets of marker points are automatically determined from captured images. Measurement results are then evaluated based on the first and second sets of marker points, as well as the distances between the marker points and the contour. This approach not only automates measurement evaluation, but also eliminates manual verification, significantly reducing evaluation time and effort. Furthermore, considering the use of the maximum (or minimum) separation distance as the measurement result, embodiments of the present disclosure incorporate the first and second sets of marker points used to measure the target object into the measurement result evaluation process. The first and second sets of marker points not only indicate whether all marker points are offset, but also whether the offset affects the calculation of the maximum (or minimum) separation distance. In cases where the offset affects the maximum (or minimum) separation distance calculation, an evaluation conclusion tending toward "inaccurate measurement results" can be given. In cases where the offset does not affect the maximum (or minimum) separation distance calculation, an evaluation conclusion tending toward "accurate measurement results" can be given, even if some marker points are offset. This reduces false positives and improves the accuracy of measurement result evaluation.

[0008] It should be understood that the contents described in the summary of the present invention are not intended to limit the key features or important features of the embodiments of the present disclosure, nor are they intended to limit the scope of the present disclosure. Other features of the present disclosure will become easily understood through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] The above and other features, advantages and aspects of the embodiments of the present disclosure will become more apparent with reference to the following detailed description in conjunction with the accompanying drawings. In the accompanying drawings, the same or similar reference numerals represent the same or similar elements, wherein:

[0010] Figure 1 A schematic diagram illustrating an example environment in which various embodiments of the present disclosure can be implemented;

[0011] Figure 2 A flowchart illustrating a method for evaluating measurement results according to some embodiments of the present disclosure is shown;

[0012] Figure 3A shows one of the images obtained by using a linewidth scanning electron microscope according to some embodiments of the present disclosure;

[0013] Figure 3B shows a second image obtained by using a linewidth scanning electron microscope according to some embodiments of the present disclosure;

[0014] Figure 4 shows a marker point to be determined according to some embodiments of the present disclosure;

[0015] Figure 5 shows a marker image extracted from the captured image shown in FIG3 according to some embodiments of the present disclosure;

[0016] Figure 6 shows marking points to be determined according to other embodiments of the present disclosure;

[0017] Figure 7 A schematic diagram showing corresponding marking points in a first set of marking points and a second set of marking points according to some embodiments of the present disclosure;

[0018] Figures 8A to 8H A schematic diagram showing an offset between a first set of marking points and a second set of marking points according to some embodiments of the present disclosure is shown;

[0019] Figure 9 According to some embodiments of the present disclosure, Figure 3A The outline of the target object extracted from the captured image shown; and

[0020] Figure 10 A block diagram of an electronic device is shown in which one or more embodiments of the present disclosure may be implemented. DETAILED DESCRIPTION

[0021] The following describes embodiments of the present disclosure in more detail with reference to the accompanying drawings. Although certain embodiments of the present disclosure are shown in the accompanying drawings, it should be understood that the present disclosure can be implemented in various forms and should not be construed as limited to the embodiments described herein. Rather, these embodiments are provided to provide a more thorough and complete understanding of the present disclosure. It should be understood that the drawings and embodiments of the present disclosure are for illustrative purposes only and are not intended to limit the scope of protection of the present disclosure.

[0022] In the description of the embodiments of the present disclosure, the term "including" and similar terms should be understood as open inclusion, that is, "including but not limited to." The term "based on" should be understood as "based at least in part on." The term "one embodiment" or "the embodiment" should be understood as "at least one embodiment." The terms "first," "second," etc. may refer to different or the same objects. Other explicit and implicit definitions may also be included below.

[0023] As mentioned above, linewidth measurements using equipment such as linewidth scanning electron microscopes can be inaccurate, so the accuracy of the measured linewidths needs to be evaluated. Current evaluation methods rely primarily on manual verification. However, manual verification often consumes significant time and labor, hindering semiconductor process optimization.

[0024] One solution proposes a method for automatically evaluating measurement results. For clarity, the following description uses the line width measurement result as an example, unless otherwise specified. In this solution, multiple marker points are determined from a captured image of a target object, each of which corresponds to a measurement signal for the target object. For example, when a linewidth scanning electron microscope scans a wafer, it can generate measurement signals at specific locations in the scanned image (e.g., the boundary of the target object). Based on these measurement signals, multiple marker points can be placed on the boundary of the target object, thereby generating the captured image described above.

[0025] In the above solution, after determining multiple marker points, the marker points are grouped based on their positions, and the outline of the target object in the captured image is determined. The measurement results determined based on the measurement signal are then evaluated based on the number of groups and the distance between the marker points and the outline. It should be noted that the "measurement results determined based on the measurement signal" herein may specifically refer to the line width obtained by calculating the spacing between the marker points. For example, the marker points generated based on the measurement signal appear in pairs. For clarity, one marker point in a pair will be referred to as the first marker point, and the other marker point in the pair will be referred to as the second marker point. For example, the first marker points are arranged in one column, representing one boundary of the target object, such as the left boundary of the target object. The second marker points are arranged in another column, representing another boundary of the target object, such as the right boundary of the target object. The two marker points in a pair of marker points have a first spacing between them. By calculating the first spacing for each pair of marker points, a marker point spacing set can be obtained. Based on the marker point spacing set, the line width of the target object can be determined by, for example, finding the maximum, minimum, or average value.

[0026] In the above solution, closely spaced markers are grouped together, and the distribution of the markers can be determined based on the number of groups. For example, when the markers are divided into two groups, the markers can be considered to be two roughly parallel groups of markers. Such markers can represent a pair of boundaries of the target object (e.g., the upper and lower boundaries or the left and right boundaries of the target object). Therefore, such markers can be considered to meet expectations, and the line width calculated based on such markers can be considered accurate. When the markers are divided into X groups, and X≠2, it can be considered that some of the markers have shifted, and therefore, such markers can be considered to not meet expectations, and the line width calculated based on such markers can be considered inaccurate.

[0027] However, there is a high false positive rate in the above evaluation method.

[0028] Take the example of determining the line width of the target object by finding the maximum value. In this example, the maximum spacing in the marker point spacing set can be used as the line width of the target object. Assuming that a part of the marker points in the left column (that is, the first marker points) are offset toward the right, and the marker points in the right column (the second marker points) are not offset, then all the marker points will be divided into three groups through the grouping method in the above solution. As mentioned above, this will cause the line width measured based on these marker points to be evaluated as "inaccurate". However, in fact, the offset of a part of the marker points in the left column toward the right does not affect the calculation of the maximum spacing in the marker point spacing set. In other words, in the above solution, the "line width measured based on these marker points" should be evaluated as "accurate". Therefore, in the above solution, the measurement result that should have been evaluated as "accurate" is evaluated as "inaccurate", that is, a false detection occurs.

[0029] In view of this, an embodiment of the present disclosure proposes a method for automatically evaluating measurement results that is different from the above-mentioned solution. In an embodiment of the present disclosure, a plurality of marking points are determined in a captured image of a target object, and the plurality of marking points respectively correspond to the measurement signals of the target object. The plurality of marking points include a first group of marking points and a second group of marking points corresponding to the first group of marking points. The distance between the corresponding marking points in the first group of marking points and the second group of marking points is used to measure the target object. In an embodiment of the present disclosure, the outline of the target object presented in the captured image is also determined. Then, based on the first group of marking points, the second group of marking points, and the distances between the plurality of marking points and the outline, the measurement results of the target object are evaluated.

[0030] As will be more clearly understood from the following description, according to embodiments of the present disclosure, first and second sets of marker points are automatically determined from captured images. Measurement results are then evaluated based on the first and second sets of marker points, as well as the distances between the marker points and the contour. This approach not only automates measurement result evaluation, eliminating the need for manual verification and significantly reducing evaluation time and effort, but also incorporates the first and second sets of marker points used to measure the target object into the measurement result evaluation process, considering the case where the maximum (or minimum) separation distance is selected as the measurement result. In addition to indicating whether all marker points are offset, the first and second sets of marker points can also indicate whether the offset affects the calculation of the maximum (or minimum) separation distance. In cases where the offset affects the calculation of the maximum (or minimum) separation distance, an evaluation conclusion tending to indicate an "inaccurate measurement result" can be given. In cases where the offset does not affect the calculation of the maximum (or minimum) separation distance, an evaluation conclusion tending to indicate an "accurate measurement result" can still be given, even if some marker points are offset. This reduces false positives and improves the accuracy of measurement result evaluation.

[0031] Various example implementations of the solution will be described in detail below with reference to the accompanying drawings.

[0032] See first Figure 1 , which illustrates a schematic diagram of an example environment 100 in which various embodiments of the present disclosure can be implemented. Example environment 100 may generally include an electronic device 120. In some embodiments, electronic device 120 may be a device with computing capabilities, such as a personal computer, workstation, server, etc. The scope of the present disclosure is not limited in this respect.

[0033] Electronic device 120 obtains as input a captured image 110 of a target object. The target object may be a component of an integrated circuit or any other suitable type of electronic component. Examples of target objects include, but are not limited to, metal wires or electronic devices (such as transistors) within an integrated circuit. In some embodiments, captured image 110 may be obtained by capturing the target object using a linewidth scanning electron microscope. It should be understood that captured image 110 of the target object may also be obtained using any other suitable device, such as another type of microscope. The scope of the present disclosure is not limited in this respect.

[0034] In some embodiments, the captured image 110 may be input by a user to the electronic device 120. In some embodiments, the captured image 110 may have been pre-stored in the electronic device 120. In some embodiments, the electronic device 120 may also be communicatively coupled to other devices to obtain the captured image 110 from the other devices. The scope of the present disclosure is not limited in this respect.

[0035] The electronic device 120 automatically extracts the marker points corresponding to the measurement signal from the captured image 110, determines the first set of marker points, the second set of marker points, and obtains the outline of the target object in the captured image 110. Furthermore, the electronic device 120 evaluates the measurement result by considering the first set of marker points, the second set of marker points, and the distance between the marker points and the outline to obtain an evaluation result 130. This will be discussed below in conjunction with Figures 2 to 9 Described in further detail.

[0036] Figure 2 FIG. 2 is a flow chart showing a method 200 for evaluating a measurement result according to some embodiments of the present disclosure. In some embodiments, the method 200 may be performed by: Figure 1 The electronic device 120 shown executes the method 200. It should be understood that the method 200 may further include additional blocks not shown and / or may omit one (or some) of the blocks shown, and the scope of the present disclosure is not limited in this respect.

[0037] At block 201, electronic device 120 determines a plurality of marker points in captured image 110 of a target object. The plurality of marker points correspond to measurement signals of the target object. In some embodiments, the target object may be a transistor, and the measurement signal may be used to measure the width of a gate in the transistor. Figure 3A An image 300 captured using a linewidth scanning electron microscope according to some embodiments of the present disclosure is shown. Figure 3A The captured image 300 shown in FIG. Figure 1 An example of a captured image 110 is shown in FIG.

[0038] like Figure 3A As shown in FIG, a captured image 300 shows an outline 310 of a target object. Dashed lines 302 and 304 in the captured image 300 are used to indicate a region of interest (ROI) for line width measurement. In other words, the line width scanning electron microscope determines the size of the target object based on the portion of the target object between the dashed lines 302 and 304 (in the image). Figure 3A In the example, it is the width of the gate of a transistor. In captured image 300, the dotted box 320 between dotted lines 302 and 304 and the "X"-shaped bright spots within dotted box 322 are markers corresponding to the measurement signal. For ease of explanation, the following description refers to FIG. 3 . However, it should be understood that the target object may be any other suitable object, such as a connecting wire, and the measurement signal may be any other suitable signal for measuring the size of the target object, and the scope of the present disclosure is not limited in this respect.

[0039] In some embodiments, the electronic device 120 may determine multiple marker points based on the brightness characteristics of the marker points in the captured image 110. The brightness characteristics are related to the pixel values ​​of one or more pixels included in the marker point. To determine these marker points, the electronic device 120 may take the brightness characteristics into consideration in various ways.

[0040] In some embodiments, for a marker point to be determined, the electronic device 120 may obtain brightness values ​​of a first number of pixels at a preset position of the marker point to be determined, and determine the marker point to be determined as one of the multiple marker points if the sum of the obtained brightness values ​​is not less than a first preset threshold. Figure 4 , which shows a marker point 400 to be determined according to some embodiments of the present disclosure. Figure 4 In the example, the marker point 400 to be determined is in the shape of a cross. The electronic device 120 can obtain the brightness values ​​of 9 pixels at the preset position indicated by the dotted box 410. In the embodiment of the present invention, the selection of the preset position is representative, and the selection of the preset position can reflect the overall situation of the marker point to be determined or a representative position situation. The electronic device 120 can calculate the sum of the brightness values ​​of these 9 pixels. If the sum of the brightness values ​​is not less than the preset threshold, the electronic device 120 can determine the marker point 400 to be determined as a marker point. Alternatively, the electronic device 120 can also determine the marker point to be determined as one of multiple marker points when the acquired brightness values ​​are not less than the preset threshold.

[0041] exist Figure 4 In the example, the electronic device 120 can compare the brightness values ​​of the nine pixels with a preset threshold value. If the brightness values ​​of the nine pixels are all greater than the preset threshold value, the electronic device 120 can determine the marker point 400 to be determined as a marker point. The electronic device 120 can traverse the region of interest in the captured image 110 to extract all marker points therefrom. In this way, marker points can be efficiently and automatically extracted from the captured image based on brightness features. Figure 5 A marker image 500 extracted from the captured image 300 shown in FIG. 3 according to some embodiments of the present disclosure is shown.

[0042] In other embodiments, the electronic device 120 may obtain the brightness values ​​of a second number of pixels at a preset position of the marker point to be determined. Figure 6 , which shows a marker point 600 to be determined according to some other embodiments of the present disclosure. Figure 6In the example shown in FIG, the marker point 600 to be determined is a square. The electronic device 120 may obtain the brightness values ​​of 25 pixels at the preset position indicated by the dotted box 610. The electronic device 120 may calculate the mean and variance of the brightness values ​​of these pixels and determine the marker point 600 to be determined as a marker point if the mean is not less than the second preset threshold and the variance is not less than the third preset threshold.

[0043] It should be noted that the mean value of the pixels at the preset locations can reflect the overall brightness of the marker point at the preset locations. The preset locations can be evenly or unevenly distributed on the marker point to be determined. In the case of unevenness, areas requiring special attention can be selected based on actual needs. In addition, the variance assessment can reflect the uniformity of the brightness of the pixels at the preset locations to prevent large brightness deviations.

[0044] In this way, the marker points can be extracted from the captured image efficiently and automatically. Figure 4 and Figure 6 The shapes of the marking points and the corresponding preset positions shown in FIG. 1 are merely exemplary, and the scope of the present disclosure is not limited in this respect.

[0045] In some embodiments, the electronic device 120 can also identify the marker points in the captured image 110 based on the neural network model, and determine multiple marker points in the captured image 110 based on the recognition results. The neural network model can be trained. During the training process, training samples can be input into the neural network model to be trained. The training samples include training images and predetermined real marker points in the training images. Furthermore, the neural network model to be trained can be used to predict the marker points in the training image, and the value of the loss function can be determined based on the distance between the real marker points and the predicted marker points. The value of the loss function is minimized through multiple rounds of training to determine the parameter values ​​of the neural network model. Furthermore, the electronic device 120 can use the trained neural network model to identify the marker points in the captured image 110. With the help of the trained neural network model, marker points can be automatically extracted from the captured image more accurately. The neural network model can be trained by other electronic devices and provided to the electronic device 120 for use.

[0046] The above describes multiple example methods for extracting marker points from the captured image 110. It should be understood that the electronic device 120 may also extract marker points in any other suitable manner, and the scope of the present disclosure is not limited in this respect.

[0047] refer to Figure 3B , Figure 3BFIG2 shows a second image obtained by using a line width scanning electron microscope according to some embodiments of the present disclosure. Figure 3B In the figure, dotted line box 330 is used to illustrate the first group of marker points, and dotted line box 340 is used to illustrate the second group of marker points. In some embodiments, the multiple marker points determined by electronic device 120 include a first group of marker points and a second group of marker points corresponding to the first group of marker points. The distance between the corresponding marker points in the first group of marker points and the second group of marker points is used to measure the target object.

[0048] refer to Figure 7 , Figure 7 A schematic diagram of corresponding marker points in a first group of marker points and a second group of marker points according to some embodiments of the present disclosure is shown. The multiple marker points determined by the electronic device 120 include a column of marker points on the left (representing the left boundary of the target object) and a column of marker points on the right (representing the right boundary of the target object). The electronic device 120 can divide these marker points into two groups in an appropriate manner, thereby determining one column of marker points in the two columns of marker points (for example, the column of marker points on the left) as the first group of marker points, and determining the other column of marker points in the two columns of marker points (for example, the column of marker points on the right) as the second group of marker points. In some embodiments, the one-to-one correspondence between the first group of marker points and the second group of marker points can be a one-to-one correspondence between the first group of marker points and the second group of marker points. For example, for any marker point I1i in the first group of marker points, there is a corresponding marker point I2i in the second group of marker points, where i represents the sequence number of the marker point in the group of marker points to which it belongs.

[0049] In some embodiments, the distances between corresponding marker points in the first group of marker points and the second group of marker points can be calculated to obtain a marker point distance set, and then the measurement results of the target object can be determined based on the marker point distance set, such as by finding the maximum value, minimum value or average value.

[0050] For example, the first group of markers includes markers I11, I12, I13, I14, ..., and I1i, and the second group of markers includes marker I21 corresponding to marker I11, marker I22 corresponding to marker I12, marker I23 corresponding to marker I13, marker I24 corresponding to marker I14, ..., and I2i corresponding to marker I1i. By calculating the distance h1 between marker I11 and marker I21, the distance h2 between marker I12 and marker I22, the distance h3 between marker I13 and marker I23, the distance h4 between marker I14 and marker I24, ..., and the distance hi between marker I1i and marker I2i, a marker distance set H can be obtained, H = {h1, h2, h3, h4, ..., hi}. The measurement result can then be determined based on the maximum value (minimum value or average value) among h1, h2, h3, h4, ... hi.

[0051] In some embodiments, the marking point includes a first coordinate and a second coordinate, and the second coordinate is used to determine the distance between corresponding marking points in the first group of marking points and the second group of marking points. The electronic device 120 can use one of the two marking points with the same first coordinate as a marking point in the first group of marking points, and use the other marking point of the two marking points with the same first coordinate as a corresponding marking point in the second group of marking points. For example, the first group of marking points and the second group of marking points are both along Figure 7 In this example, the first coordinate may be the vertical coordinate of the marking point, and the second coordinate may be the horizontal coordinate of the marking point. In another example, the first set of marking points and the second set of marking points may also be arranged along the vertical direction of the marking point. Figure 7 The first coordinate may be the horizontal coordinate of the marking point, and the second coordinate may be the vertical coordinate of the marking point. The scope of the present disclosure is not limited in this respect.

[0052] For example, the first coordinate and the second coordinate of the marking point can be the coordinates of the center of the marking point, or the first coordinate and the second coordinate can also be the coordinates of any suitable position on the marking point. It should be noted that, in order to facilitate uniformity, the coordinates of different marking points should be selected in the same manner.

[0053] refer to Figure 7, the horizontal coordinates (i.e., the second coordinates) of the marking point I11 and the marking point I21 are different, but the vertical coordinates (i.e., the first coordinates) are the same, so the marking point I11 can be determined as a marking point in the first group of marking points, and the marking point I21 can be determined as a corresponding marking point in the second group of marking points. The horizontal coordinates (i.e., the second coordinates) of the marking point I12 and the marking point I22 are different, but the vertical coordinates (i.e., the first coordinates) are the same, so the marking point I12 can be determined as a marking point in the first group of marking points, and the marking point I22 can be determined as a corresponding marking point in the second group of marking points. The horizontal coordinates (i.e., the second coordinates) of the marking point I13 and the marking point I23 are different, but the vertical coordinates (i.e., the first coordinates) are the same, so the marking point I13 can be determined as a marking point in the first group of marking points, and the marking point I23 can be determined as a corresponding marking point in the second group of marking points, and so on. The embodiments of the present disclosure are not listed one by one. This method allows the first and second sets of marker points to be determined from multiple marker points simply by comparing the first coordinates, resulting in fast processing and minimal resource usage. Furthermore, for corresponding marker points in the first and second sets, the distance between the two marker points can be determined simply by calculating the difference in the second coordinates. This simplified calculation method facilitates accurate measurement of target objects.

[0054] Return Reference Figure 2 In block 202, the electronic device 120 determines the outline of the target object in the captured image 110. It should be noted that in the context of the present disclosure, the outline of the target object may refer to the outline of the portion of the target object corresponding to the measured size. In some embodiments, the electronic device 120 may remove multiple markers from the captured image 110 to obtain a reference image associated with the target object. Figure 3A and Figure 5 , since the electronic device 120 Figure 3A The captured image 300 shown has the Figure 5 As a result, the obtained reference image will lose the pixel information corresponding to the position of the removed marker point in the original captured image 300. Therefore, it is necessary to compensate the pixel information of the reference image.

[0055] In some embodiments, for a first pixel corresponding to any marker point in a reference image, the electronic device 120 may determine the pixel value of the first pixel based on the pixel value of at least one second pixel adjacent to the first pixel in the reference image. In one example, the electronic device 120 may determine the pixel value of the first pixel by considering the pixel to the left of the first pixel, the pixel to the upper left of the first pixel, and the pixel above the first pixel. More specifically, the pixel value of the first pixel may be determined based on the following formula (1):

[0056] v(x, y) = 0.33×(v(x-1, y) + v(x-1, y-1) + v(x, y-1)) (1)

[0057] Where x represents the horizontal coordinate, y represents the vertical coordinate, and v( ) represents the pixel value. Therefore, v(x, y) represents the pixel value of the first pixel, v(x-1, y) represents the pixel value of the pixel to the left of the first pixel, v(x-1, y-1) represents the pixel value of the pixel to the upper left of the first pixel, and v(x, y-1) represents the pixel value of the pixel above the first pixel. In this way, the pixel values ​​of the missing pixels can be predicted relatively accurately, thereby ensuring the quality of the obtained reference image.

[0058] In yet another example, the electronic device 120 may determine the pixel value of the first pixel by considering the pixel to the left of the first pixel, the pixel above the first pixel, and the pixel to the upper right of the first pixel. More specifically, the pixel value of the first pixel may be determined based on the following formula (2):

[0059] v(x, y) = 0.33×(v(x-1, y) + v(x, y-1) + v(x+1, y-1)) (2)

[0060] Wherein x represents the horizontal coordinate of the first pixel, y represents the vertical coordinate of the first pixel, and v( ) represents the pixel value of the pixel. Therefore, v(x, y) represents the pixel value of the first pixel, v(x-1, y) represents the pixel value of the pixel to the left of the first pixel, v(x, y-1) represents the pixel value of the pixel above the first pixel, and v(x+1, y-1) represents the pixel value of the pixel point in the upper right corner of the first pixel. It should be understood that the electronic device 120 can also perform pixel information compensation in any other suitable manner, such as by considering the pixel values ​​of pixels at other positions, and the scope of the present disclosure is not limited in this respect.

[0061] After determining the pixel value of the first pixel, the electronic device 120 can use the determined pixel value to fill the first pixel in the reference image to update the reference image. The electronic device 120 can traverse all the marking points to complete the pixel information compensation of the reference image. Further, the electronic device 120 can extract the outline of the target object from the updated reference image. As an example, the electronic device 120 can use the hollowing out internal point method to extract the outline. More specifically, the electronic device 120 can binarize the updated reference image and traverse each pixel in the binarized image: if the pixel is black and the 8 pixels adjacent to the pixel are all black, then the pixel is set to white. In this way, the outline of the target object can be extracted efficiently and automatically. Figure 9According to some embodiments of the present disclosure, Figure 3A The outline 900 of the target object is extracted from the captured image 300. It should be understood that the electronic device 120 can also extract the outline of the target object by any other suitable method, such as boundary tracking method, region growing method or region splitting and merging method, and the scope of the present disclosure is not limited in this respect.

[0062] In other embodiments, the electronic device 120 may also use a preset default pixel value to compensate the reference image. In still other embodiments, the electronic device 120 may not compensate the reference image and directly extract the contour of the target object from it. It should be understood that the electronic device 120 may also extract the contour of the target object based on the reference image in any other suitable manner, and the scope of the present disclosure is not limited in this respect.

[0063] Return Reference Figure 2 In box 203, the electronic device 120 evaluates the measurement results for the target object based on the first group of marker points, the second group of marker points, and the distances between the multiple marker points and the contour. In some embodiments, the electronic device 120 can determine multiple evaluation distances corresponding to the multiple marker points. Each evaluation distance indicates the distance between the corresponding marker point and the contour. In one example, for each marker point, the electronic device 120 can determine the distance between the marker point and each pixel on the contour of the target object, and determine the smallest distance therebetween as the evaluation distance corresponding to the marker point. In another example, for each marker point, the electronic device 120 can determine the distance between the marker point and each pixel on the contour of the target object, and determine the average of the smallest multiple distances (for example, the smallest 5 distances) therebetween as the evaluation distance corresponding to the marker point.

[0064] Furthermore, the electronic device 120 may calculate the degree of dispersion between the multiple determined evaluation distances. In one example, the degree of dispersion may be represented by the maximum evaluation distance among the multiple evaluation distances. In another example, the degree of dispersion may be represented by the average of the multiple evaluation distances. In yet another example, the degree of dispersion may be represented by the standard deviation or variance of the multiple evaluation distances. The degree of dispersion may reflect the degree to which the marker corresponding to the measurement signal fits the contour of the target object.

[0065] The electronic device 120 may evaluate the measurement result based on the discreteness of the multiple evaluation distances, the arrangement of the first group of marking points, and the arrangement of the second group of marking points.

[0066] In some embodiments, the electronic device 120 may determine a distance component of the evaluation result 130 corresponding to the evaluation based on the degree of discreteness, where the distance component is negatively correlated with the degree of discreteness. Since the degree of discreteness reflects the degree to which the marker corresponding to the measurement signal fits the contour of the target object, the smaller the degree of discreteness, that is, the closer the marker fits the contour of the target object, the more accurate the measurement result.

[0067] In some embodiments, the electronic device 120 may determine an arrangement component based on the arrangement of the first set of marker points and the arrangement of the second set of marker points, and then generate an evaluation result for the measurement result based on the distances (e.g., distance components) between the multiple marker points and the contour. The arrangement of the first set of marker points and the arrangement of the second set of marker points can reflect whether the marker points are offset and whether the offset affects the calculation of the maximum spacing (or minimum spacing / average spacing), and then quantify this situation to obtain the arrangement component, thereby efficiently and automatically performing quantitative analysis on the arrangement of the first set of marker points and the arrangement of the second set of marker points.

[0068] In some embodiments, the electronic device 120 determines whether there is an abnormality in the arrangement of the first group of marking points and the arrangement of the second group of marking points to obtain an abnormality detection result, and then determines an arrangement component related to the arrangement of the marking points based on the abnormality detection result.

[0069] For example, the electronic device 120 may determine whether there is an abnormality in the arrangement of the first group of marking points and the arrangement of the second group of marking points based on whether there is an offset in the marking points and whether the offset affects the calculation of the maximum spacing (or minimum spacing / average spacing).

[0070] In some embodiments, the electronic device 120 calculates the spacing between corresponding markers in the first and second groups of markers to obtain a marker spacing set, and the electronic device 120 determines the measurement result based on a preset calculation strategy and the marker spacing set. Then, the electronic device 120 determines whether there is an abnormality in the arrangement of the first and second groups of markers based on a preset condition that matches the preset calculation strategy. In this way, a matching relationship can be established between the determination of whether there is an abnormality in the arrangement of the first and second groups of markers and the calculation method of the measurement result, thereby facilitating a quick determination of whether the arrangement of the first and second groups of markers will affect the measurement result.

[0071] As described above, the electronic device 120 can calculate the distance between the first set of marker points and the corresponding marker points in the second set of marker points based on the second coordinate. For details, please refer to the above embodiment and will not be repeated here. The electronic device 120 can traverse the distance between the first set of marker points and the corresponding marker points in the second set of marker points to obtain a marker point distance set.

[0072] Combined with reference Figures 8A to 8H , Figures 8A to 8H A schematic diagram showing the offset between the first set of marking points and the second set of marking points according to some embodiments of the present disclosure is shown, wherein Figures 8A to 8D The second direction in Figures 8E to 8H In some embodiments, the first set of marking points are arranged along the first direction, and the second set of marking points are arranged along the third direction. The first direction and the third direction are in the same direction. Figure 8A and Figure 8B As shown, the first set of marking points and the second set of marking points are roughly parallel.

[0073] The electronic device 120 determines whether there is an abnormality in the arrangement of the first group of marker points by determining whether there is a marker point in the first group of marker points that is offset in a specific direction. If the electronic device 120 determines that at least one marker point in the first group of marker points is offset in a second direction compared to other marker points in the first group of marker points, and the offset is greater than a preset offset, it determines that there is an abnormality in the arrangement of the first group of marker points. If the electronic device 120 determines that at least one marker point in the second group of marker points is offset in a fourth direction compared to other marker points in the second group of marker points, and the offset is greater than a preset offset, it determines that there is an abnormality in the arrangement of the second group of marker points. In this way, marker points that have an impact on the measurement results can be quickly and accurately identified. Once such marker points are found, it can be determined that the first group of marker points (or the second group of marker points) is abnormal, and the processing speed is fast and relatively accurate.

[0074] In some embodiments, the electronic device 120 may calculate the distance between two adjacent marking points in the first group of marking points in the second direction, and then determine whether one of the two marking points is offset toward the second direction and the offset is greater than a preset offset based on the calculated distance. The second direction intersects the first direction, for example, the second direction is perpendicular to the first direction. The second direction is as follows: Figures 8A to 8D As shown or Figures 8E to 8H As shown, the specific calculation strategy can be determined based on a preset calculation strategy, which will be explained in detail below and is not detailed here. In some embodiments, the preset offset is greater than or equal to N times the width of the marker itself, where N is a positive integer. For example, the value of N ranges from [t, 3t]. For example, the value of N is 2t, where t represents the width of the marker itself. As a result, cases with smaller offsets can be ignored, thereby reducing the false detection rate.

[0075] In some embodiments, the electronic device 120 may calculate the difference between the second coordinates of two adjacent marking points in the first group of marking points to obtain the distance between the two marking points in the second direction. The electronic device 120 may determine whether one of the two marking points is offset in the second direction based on the positive or negative sign of the difference. The electronic device 120 may determine whether the offset is greater than a preset offset based on the magnitude of the difference. For example, the electronic device 120 may traverse the difference d1i of the second coordinates of two adjacent marking points in the first group of marking points using formula (3).

[0076] d1i=I1(i+1)·x-I1i·x(3)

[0077] Where x represents the horizontal coordinate (also known as the second coordinate), I1i·x represents the horizontal coordinate of the i-th marker in the first set of markers, and I1(i+1)·x represents the horizontal coordinate of the i+1-th marker in the first set of markers.

[0078] Reference Figures 8A to 8H The first group of markers is a column of markers on the left, and the second group of markers is a column of markers on the right. When the difference d1i between the second coordinates of two adjacent markers is negative, it indicates that the second marker I1(i+1) is offset to the left relative to the first marker I1i. When the difference is greater than 2t (i.e., d1i is less than -2t), it can be considered that the second marker is offset to the left relative to the other markers in the first group, and the offset is greater than a preset offset. When the difference d1i between the second coordinates of two adjacent markers is positive, it indicates that the second marker I1(i+1) is offset to the right relative to the first marker I1i. When the difference is greater than 2t (i.e., d1i>2t), it can be considered that the second marker I1(i+1) is offset to the right relative to the other markers in the first group, and the offset is greater than a preset offset.

[0079] Accordingly, the electronic device 120 can calculate the distance between two adjacent marking points in the second group of marking points in the fourth direction, and then determine based on the calculation result whether one of the two marking points is offset toward the fourth direction and the offset is greater than the preset offset. The fourth direction is opposite to the second direction.

[0080] In some embodiments, the electronic device 120 may calculate the difference between the second coordinates of two adjacent marking points in the second group of marking points to obtain the distance between the two adjacent marking points in the fourth direction. For example, the electronic device 120 may determine whether one of the two marking points is offset toward the fourth direction based on the positive or negative sign of the difference. The electronic device 120 may determine whether the offset is greater than a preset offset based on the magnitude of the difference. For example, the electronic device 120 may traverse the difference d2i of the second coordinates of two adjacent marking points in the second group of marking points using formula (4).

[0081] d2i=I2(i+1)·x-I2i·x(4)

[0082] Among them, x represents the horizontal coordinate of the marker point (that is, the second coordinate), I2i·x represents the horizontal coordinate of the i-th marker point in the second set of marker points, and I2(i+1)·x represents the horizontal coordinate of the i+1-th marker point in the second set of marker points.

[0083] Reference Figures 8A to 8H The second group of marking points is a column of marking points on the right. When the difference d1i between the second coordinates of two adjacent marking points is positive, it indicates that the latter marking point I2(i+1) of the two adjacent marking points is offset to the right relative to the previous marking point I2i. When the difference is greater than 2t (i.e., d2i>2t), it can be considered that the latter marking point of the two adjacent marking points is offset to the right relative to the other marking points in the second group of marking points, and the offset is greater than the preset offset. When the difference d1i between the second coordinates of the two adjacent marking points is negative, it indicates that the latter marking point I2(i+1) of the two adjacent marking points is offset to the left relative to the previous marking point I2i. When the difference is greater than 2t (i.e., d2i<-2t), it can be considered that the latter marking point I2(i+1) of the two adjacent marking points is offset to the left relative to the other marking points in the second group of marking points, and the offset is greater than the preset offset.

[0084] In some embodiments, according to a preset calculation strategy, the electronic device 120 may determine the maximum spacing in the marker point spacing set as the measurement result. In this example, when a marker point in the first group of marker points is offset relative to other marker points in a direction away from the second group of marker points, the maximum spacing may be too large, thereby causing inaccurate measurement results. Therefore, in the embodiment of the present disclosure, the second direction includes a direction from the second group of marker points to the first group of marker points, and the fourth direction is opposite to the second direction, such as Figures 8A to 8DAs shown. When a certain marking point in the first group of marking points is offset toward the second direction relative to other marking points in the first group of marking points and the offset is greater than the preset offset, it means that the marking point is offset in the direction away from the second group of marking points. The existence of this marking point will cause the measurement result to be biased. Therefore, it can be determined that there is an abnormality in the arrangement of the first group of marking points. Similar to the first group of marking points, when a certain marking point in the second group of marking points is offset toward the fourth direction relative to other marking points and the offset is greater than the preset offset, it means that the marking point is offset in the direction away from the first group of marking points. At this time, the existence of this marking point will also cause the measurement result to be biased. Therefore, it can be determined that there is an abnormality in the arrangement of the second group of marking points.

[0085] For example, referring to Figure 8A , the first group of marking points is a column of marking points on the left, and the second group of marking points is a column of marking points on the right. In the first group of marking points, the difference between the second coordinates of the marking point I11 and the marking point I12 is d11. When d11<-2t, it can be considered that the latter marking point I12 is offset toward the left relative to the previous marking point I11, and the offset is greater than the preset offset, and then it can be considered that the latter marking point I12 is offset toward the left (that is, the second direction) relative to other marking points in the first group of marking points. In this way, the existence of the marking point I12 will cause the maximum spacing in the marking point spacing concentration to be too large, and then cause the measurement result to be too large, so that it can be determined that the arrangement of the first group of marking points is abnormal. It should be noted that when d11>-2t, the difference d12 between the second coordinates of the marking point I12 and the marking point I13 can continue to be calculated, and so on. The implementation of the present disclosure will no longer be listed one by one. It should also be noted that, with reference to Figure 8D When d11>2t, it can be considered that the next marking point I12 is offset toward the right relative to the previous marking point I11, and the offset is greater than the preset offset. However, since the existence of the marking point I12 does not affect the maximum spacing in the marking point spacing set, although the marking point I12 is offset, it can still be considered that the marking point I12 does not affect the measurement result.

[0086] For example, referring to Figure 8B, the first group of marking points is a column of marking points on the left, and the second group of marking points is a column of marking points on the right. In the second group of marking points, the difference between the second coordinates of marking point I21 and marking point I22 is d21. When d21>2t, it can be considered that the latter marking point I22 is offset toward the right relative to the previous marking point I21, and the offset is greater than the preset offset, and then it can be considered that the latter marking point I22 is offset toward the right (that is, the fourth direction) relative to other marking points in the second group of marking points. In this way, the existence of marking point I22 will cause the maximum spacing in the marking point spacing concentration to be too large, and then cause the measurement result to be too large, so that it can be determined that the arrangement of the second group of marking points is abnormal. It should be noted that when d21<2t, the difference d22 between the second coordinates of marking point I22 and marking point I23 can be continued to be calculated, and so on. The implementation of the present disclosure will no longer be listed one by one. It should also be noted that, with reference to Figure 8C When d21<-2t, it can be considered that the next marking point I22 is offset toward the left relative to the previous marking point I21, and the offset is greater than the preset offset. However, since the existence of the marking point I22 does not affect the maximum spacing in the marking point spacing set, although the marking point I22 is offset, it can still be considered that the marking point I22 does not affect the measurement result.

[0087] In other embodiments, according to a preset calculation strategy, the electronic device 120 may determine the minimum spacing in the set of marker spacings as the measurement result. In this example, when a marker in the first set of markers is offset relative to other markers toward the direction close to the second set of markers, the minimum spacing may be smaller, thereby causing inaccurate measurement results. Therefore, in the embodiment of the present disclosure, the second direction includes a direction from the first set of markers to the second set of markers, and the fourth direction is opposite to the second direction, such as Figures 8E to 8H As shown. When a certain marking point in the first group of marking points is offset in the second direction relative to the other marking points and the offset is greater than the preset offset, it means that the marking point is offset in the direction close to the second group of marking points. The presence of this marking point will cause the measurement result to be smaller. Therefore, it can be determined that there is an abnormality in the arrangement of the first group of marking points. Similar to the first group of marking points, when a certain marking point in the second group of marking points is offset in the fourth direction relative to the other marking points and the offset is greater than the preset offset, it means that the marking point is offset in the direction close to the first group of marking points. The presence of this marking point will also cause the measurement to be smaller. Therefore, it can be determined that there is an abnormality in the arrangement of the second group of marking points.

[0088] For example, referring to Figure 8E, the first group of marking points is a column of marking points on the left, and the second group of marking points is a column of marking points on the right. In the first group of marking points, the difference between the second coordinates of the marking point I11 and the marking point I12 is d11. When d11>2t, it can be considered that the latter marking point I12 is offset toward the right relative to the previous marking point I11, and the offset is greater than the preset offset, and then it can be considered that the latter marking point I12 is offset toward the right (that is, the second direction) relative to other marking points in the first group of marking points. In this way, the existence of the marking point I12 will cause the minimum spacing in the marking point spacing set to be smaller, and then cause the measurement result to be smaller, so that it can be determined that the arrangement of the first group of marking points is abnormal. It should be noted that when d11<2t, the difference d12 between the second coordinates of the marking point I12 and the marking point I13 can continue to be calculated, and so on. The implementation of the present disclosure will no longer be listed one by one. It should also be noted that, with reference to Figure 8H When d11<-2t, it can be considered that the next marking point I12 is offset toward the left relative to the previous marking point I11, and the offset is greater than the preset offset. However, since the existence of the marking point I12 does not affect the minimum spacing in the marking point spacing set, although the marking point I12 is offset, it can still be considered that the marking point I12 does not affect the measurement result.

[0089] For example, referring to Figure 8F , the first group of marking points is a column of marking points on the left, and the second group of marking points is a column of marking points on the right. In the second group of marking points, the difference between the second coordinates of marking point I21 and marking point I22 is d21. When d21<-2t, it can be considered that the latter marking point I22 is offset toward the left relative to the previous marking point I21, and the offset is greater than the preset offset, and then it can be considered that the latter marking point I22 is offset toward the left (that is, the fourth direction) relative to other marking points in the second group of marking points. In this way, the existence of marking point I22 will cause the minimum spacing in the marking point spacing set to be smaller, and then cause the measurement result to be smaller, so that it can be determined that the arrangement of the second group of marking points is abnormal. It should be noted that when d21>-2t, the difference d22 between the second coordinates of marking point I22 and marking point I23 can continue to be calculated, and so on. The implementation of the present disclosure will no longer be listed one by one. It should also be noted that, with reference to Figure 8G When d21>2t, it can be considered that the next marking point I22 is offset toward the right relative to the previous marking point I21, and the offset is greater than the preset offset. However, since the existence of the marking point I22 does not affect the minimum spacing in the marking point spacing set, although the marking point I22 is offset, it can still be considered that the marking point I22 does not affect the measurement result.

[0090] In some embodiments, if the electronic device 120 determines that at least one marker point in the first group of marker points is offset in a second direction relative to other marker points in the first group of marker points, and the offset is greater than a preset offset, the at least one marker point in the first group of marker points (i.e., the marker point that is offset in the second direction and the offset is greater than the preset offset) is marked as a first abnormal marker point. Furthermore, if the electronic device 120 determines that at least one marker point in the second group of marker points is offset in a fourth direction relative to other marker points in the second group of marker points, and the offset is greater than the preset offset, the at least one marker point in the second group of marker points (i.e., the marker point that is offset in the fourth direction and the offset is greater than the preset offset) is marked as a second abnormal marker point. In this way, marker points in the first and second groups of marker points that affect the measurement results can be marked, thereby facilitating recording and subsequent processing.

[0091] In some embodiments, if the electronic device 120 determines that at least one marker point in the first group of marker points is offset toward the fourth direction compared to other marker points in the first group of marker points, and the offset is greater than a preset offset, the at least one marker point in the first group of marker points (i.e., the marker point offset toward the fourth direction and with an offset greater than the preset offset) is marked as a first marker point to be removed. If the electronic device 120 determines that at least one marker point in the second group of marker points is offset toward the second direction compared to other marker points in the second group of marker points, and the offset is greater than the preset offset, the at least one marker point in the second group of marker points (i.e., the marker point offset toward the second direction and with an offset greater than the preset offset) is marked as a second marker point to be removed. In this way, the first marker point to be removed and the second marker point to be removed can be prevented from affecting the distance component.

[0092] Taking the example of the electronic device 120 determining the maximum spacing in the marker point spacing set as the measurement result, in this example, when a marker point in the first group of marker points (or the second group of marker points) is offset toward the fourth direction (or the second direction) relative to other marker points in the first group of marker points (or the second group of marker points), and the offset is greater than the preset offset, it means that the marker point is offset toward the direction close to the second group of marker points (or the first group of marker points). This marker point will not affect the maximum spacing, but the marker point is actually still offset. When calculating the spacing between the marker point and the contour, the existence of this marker point will cause the spacing between the marker point and the contour to be larger. According to formula (5) below, a larger spacing between the marker point and the contour will cause the distance component to be smaller. It will be more clearly understood from the following description that the existence of this marker point will cause the evaluation result to tend to give the conclusion that "the measurement result is inaccurate". But in fact, the existence of this marker point has no effect on the measurement result. Therefore, in this example, the electronic device 120 determines this marker point in the first group of marker points (for example Figure 8D Mark the marking point I12 in the first set of marking points as the first marking point to be removed, and remove the marking point in the second set of marking points (for example Figure 8C The first and second marker points to be removed are marked as the second marker points to be removed. The electronic device 120 then removes the first and second marker points to be removed when calculating the distances between the multiple marker points and the contour, thereby preventing the first and second marker points from affecting the evaluation results and reducing the false positive rate.

[0093] In some embodiments, when determining the first mark point to be removed and the second mark point to be removed, the electronic device 120 removes the currently marked first abnormal mark point and the second abnormal mark point, thereby preventing normal mark points from being mistakenly detected as mark points to be removed.

[0094] In some embodiments, when determining the first abnormal marking point and the second abnormal marking point, the electronic device 120 removes the currently marked first marking point to be removed and the second marking point to be removed, thereby preventing normal marking points from being mistakenly detected as abnormal marking points.

[0095] In some embodiments, the first group of markers is arranged along a first direction, and the second group of markers is arranged along a third direction. If the electronic device 120 determines that at least one marker in the first group of markers is offset in the second direction or the fourth direction relative to other markers in the first group of markers, and the offset is greater than a preset offset, the arrangement of the first group of markers is determined to be abnormal. If the electronic device 120 determines that at least one marker in the second group of markers is offset in the second direction or the fourth direction relative to other markers in the second group of markers, and the offset is greater than a preset offset, the arrangement of the second group of markers is determined to be abnormal. The first direction is in the same direction as the third direction, the second direction intersects the first direction, and the fourth direction is opposite to the second direction. The second direction is determined based on a preset calculation strategy. In some embodiments, the preset offset is greater than or equal to N times the width of the marker itself, where N is a positive integer.

[0096] The electronic device 120 may calculate the distance between two adjacent marking points in the first group of marking points (and the second group of marking points) in the second direction and the fourth direction, and then determine, based on the calculated distance, whether one of the two marking points is offset in the second direction or the fourth direction, and whether the offset is greater than a preset offset. The specific calculation method can be found in the aforementioned embodiment and will not be described in detail here.

[0097] In some embodiments, the electronic device 120 determines the average spacing in the marker point spacing set as the measurement result, wherein the first direction includes the direction from the second group of marker points to the first group of marker points, or the direction from the first group of marker points to the second group of marker points. When a marker point in the first group of marker points is offset in a direction away from the second group of marker points relative to other marker points in the first group of marker points, the average spacing will be larger. When a marker point in the first group of marker points is offset in a direction close to the second group of marker points relative to other marker points in the first group of marker points, the average spacing will be smaller. Therefore, the embodiments of the present disclosure enable the second direction to be either the direction from the second group of marker points to the first group of marker points or the direction from the second group of marker points to the first group of marker points, and the fourth direction is opposite to the second direction, such as Figures 8A to 8D As shown or Figures 8E to 8H As shown. Therefore, in the first group of marking points, regardless of whether the marking points are offset in the second direction or the fourth direction, as long as the offset is greater than the preset offset, the arrangement of the first group of marking points can be determined to be abnormal. Similarly, in the second group of marking points, regardless of whether the marking points are offset in the second direction or the fourth direction, as long as the offset is greater than the preset offset, the arrangement of the second group of marking points can be determined to be abnormal.

[0098] For example, referring to Figure 8A , the first group of marking points is a column of marking points on the left, and the second group of marking points is a column of marking points on the right. In the first group of marking points, the difference between the second coordinates of marking point I11 and marking point I12 is d11. When d11<-2t, it can be considered that the latter marking point I12 is offset toward the left relative to the previous marking point I11, and the offset is greater than the preset offset. It can then be considered that the latter marking point I12 is offset toward the left (i.e., the second direction) relative to the other marking points in the first group of marking points. In this way, the existence of marking point I12 will cause the average spacing of the marking point spacing concentration to be larger, which will in turn cause the measurement result to be larger. Therefore, it can be determined that the arrangement of the first group of marking points is abnormal. Reference Figure 8D , when d11>2t, it can be considered that the next marking point I12 is offset toward the right relative to the previous marking point I11, and the offset is greater than the preset offset, and then it can be considered that the next marking point I12 is offset toward the right (that is, the fourth direction) relative to the other marking points in the first group of marking points. In this way, the existence of the marking point I12 will cause the average spacing in the marking point spacing concentration to be smaller, and then cause the measurement result to be smaller, thereby determining that the arrangement of the first group of marking points is abnormal. It should be noted that when d11>-2t, and d11<2t, the difference d12 between the second coordinates of the marking point I12 and the marking point I13 can continue to be calculated, and so on. The implementation of the present disclosure will not be listed one by one.

[0099] For example, referring to Figure 8B, the first group of marking points is a column of marking points on the left, and the second group of marking points is a column of marking points on the right. In the second group of marking points, the difference between the second coordinates of marking point I21 and marking point I22 is d21. When d21>2t, it can be considered that the latter marking point I22 is offset toward the right relative to the previous marking point I21, and the offset is greater than the preset offset. It can then be considered that the latter marking point I22 is offset toward the right (that is, the fourth direction) relative to other marking points in the second group of marking points. In this way, the existence of marking point I22 will cause the average spacing in the marking point spacing concentration to be larger, which in turn causes the measurement result to be larger. Therefore, it can be determined that the arrangement of the second group of marking points is abnormal. Reference Figure 8C , when d21<-2t, it can be considered that the next marking point I22 is offset toward the left relative to the previous marking point I21, and the offset is greater than the preset offset, and then it can be considered that the next marking point I22 is offset toward the left (that is, the second direction) relative to the other marking points in the second group of marking points. In this way, the existence of the marking point I22 will cause the average spacing in the marking point spacing concentration to be smaller, and then cause the measurement result to be smaller, thereby determining that the arrangement of the second group of marking points is abnormal. It should be noted that when d21<2t, and d21>-2t, the difference d22 between the second coordinates of the marking point I22 and the marking point I23 can continue to be calculated, and so on. The implementation of the present disclosure will no longer be listed one by one.

[0100] In some embodiments, if the electronic device 120 determines that at least one marking point in the first group of marking points is offset toward the second direction or the fourth direction compared to other marking points in the first group of marking points, and the offset is greater than a preset offset, the at least one marking point in the first group of marking points (i.e., the marking point that is offset toward the second direction or the fourth direction and the offset is greater than the preset offset) is marked as a first abnormal marking point; if the electronic device 120 determines that at least one marking point in the second group of marking points is offset toward the second direction or the fourth direction compared to other marking points in the second group of marking points, and the offset is greater than the preset offset, the at least one marking point in the second group of marking points (i.e., the marking point that is offset toward the second direction or the fourth direction and the offset is greater than the preset offset) is marked as a second abnormal marking point. In this way, the marking points in the first and second groups of marking points that affect the measurement results can be marked, thereby facilitating recording and subsequent processing.

[0101] In some embodiments, the electronic device 120 determines that an arrangement component has a first value in response to an abnormality in the arrangement of the first and second groups of marker points. The electronic device 120 also determines that the arrangement component has a second value in response to the arrangement of each group of marker points in the first and second groups of marker points being normal. The arrangement component is positively correlated with the accuracy of the measurement result, with the first value being smaller than the second value. Therefore, when an abnormality exists in the arrangement of the first and second groups of marker points, the electronic device 120 can determine that the arrangement component has a smaller first value (relative to the second value), thereby causing the evaluation result to conclude that the measurement result is inaccurate. When the arrangement of each group of marker points in the first and second groups of marker points is normal, the electronic device 120 can determine that the arrangement component has a larger second value (relative to the first value), thereby causing the evaluation result to conclude that the measurement result is accurate. It should be noted that in this disclosure, the phrase "an abnormality exists in the arrangement of the first and second groups of marker points" can specifically include at least one of the following three situations. The first situation is that the arrangement of the first and second groups of marker points is abnormal, while the arrangement of the second group of marker points is normal. The second situation is that the arrangement of the second set of marking points is abnormal, and the arrangement of the first set of marking points is normal. The third situation is that the arrangement of the first set of marking points is abnormal, and the arrangement of the second set of marking points is also abnormal.

[0102] The electronic device 120 may obtain the evaluation result 130 by combining the distance component and the arrangement component. In one example, the electronic device 120 may determine the evaluation result 130 for the measurement result based on the following equation (5):

[0103] (5)

[0104] Where S represents the evaluation result, D represents the degree of dispersion of the multiple evaluation distances, N1 represents that there is an abnormality in the arrangement of the first group of marking points and the arrangement of the second group of marking points, N2 represents that the arrangement of each group of marking points in the first group of marking points and the second group of marking points is normal, and C1 and C2 are constants greater than 0. For example, C1 can be equal to 100, and C2 can be equal to 50. It should be understood that C1 and C2 can also be any other suitable values, and the scope of the present disclosure is not limited in this respect.

[0105] In another example, the electronic device 120 may determine the evaluation result 130 for the measurement result based on the following equation (6):

[0106] (6)

[0107] Where S represents the evaluation result, D represents the degree of dispersion of the multiple evaluation distances, N1 represents that there is an abnormality in the arrangement of the first group of marking points and the arrangement of the second group of marking points, N2 represents that the arrangement of each group of marking points in the first group of marking points and the second group of marking points is normal, and B1 and B2 are constants greater than 0. For example, B1 can be equal to 2, and B2 can be equal to 100. It should be understood that B1 and B2 can also be any other suitable values, and the scope of the present disclosure is not limited in this respect.

[0108] In equations (5) and (6), the larger the evaluation result S, the more accurate the measurement result. In one example, when the evaluation result S is greater than a preset threshold, the electronic device 120 can determine that the measurement result is accurate. In this way, the measurement result can be quantitatively measured, thereby avoiding erroneous judgments caused by subjective factors during manual verification, thereby advantageously improving the accuracy of the evaluation result 130.

[0109] In some embodiments, the electronic device 120 may also obtain multiple captured images obtained by capturing the target object multiple times, and then select multiple candidate images from the multiple captured images. The arrangement of each set of marker points in the first set of marker points and the second set of marker points in the candidate images is normal. In other words, the arrangement components of these candidate images are all C2 (or B2). Furthermore, the electronic device 120 evaluates the measurement results of each candidate image in the multiple candidate images based on the standard deviation of the measurement results of the multiple candidate images. For example, the electronic device 120 first calculates the mean of the measurement results of the multiple candidate images, such as the average line width, using formula (7).

[0110] (7)

[0111] in, is the average line width, is the line width of the i-th candidate image, and n is the number of candidate images. Furthermore, the electronic device 120 calculates the standard deviation of the measurement results of the multiple candidate images based on the average line width using formula (8).

[0112] (8)

[0113] in, Indicates the standard deviation of the measurement results.

[0114] After determining the standard deviation of the measurement results of multiple candidate images, a reference range can be determined based on the mean of the measurement results of the multiple candidate images and the standard deviation of the measurement results of the multiple candidate images. For a particular candidate image, the accuracy of the measurement result of the candidate image can be further evaluated based on whether the measurement result of the candidate image falls within the reference range. For example, the reference range can be shown as formula (9).

[0115] (9)

[0116] If the measurement result of the candidate image is outside the reference range, the measurement result of the candidate image deviates too much from the overall image, and the accuracy of the measurement result is low. Therefore, the evaluation result obtained by the above embodiment can be corrected. If the measurement result of the candidate image is within the reference range, the measurement result of the candidate image deviates less from the overall image, and the accuracy of the measurement result is high. Therefore, the evaluation result obtained by the above embodiment can be corrected.

[0117] Through the above combination Figures 1 to 9 As can be seen from the description, in the method for evaluating measurement results according to various embodiments of the present disclosure, a first set of marker points and a second set of marker points are automatically determined from the captured image. The measurement results are then evaluated based on the arrangement of the first and second sets of marker points, as well as the distances between the marker points and the contour. This approach, on the one hand, automates the evaluation of measurement results, eliminating reliance on manual verification and significantly reducing the time and manpower required for evaluation. On the other hand, considering the case where the maximum spacing (or minimum spacing) is selected as the measurement result, the embodiments of the present disclosure incorporate the arrangement of the first and second sets of marker points into the measurement result evaluation process. The arrangement of the first and second sets of marker points not only indicates whether all marker points are offset, but also whether the two sets of marker points affect the calculation of the maximum spacing (or minimum spacing). For arrangements that affect the calculation of the maximum spacing (or minimum spacing), an evaluation conclusion tending toward "inaccurate measurement results" can be given. For arrangements that do not affect the calculation of the maximum spacing (or minimum spacing), even if some marker points are offset, an evaluation conclusion tending toward "accurate measurement results" can still be given. In this way, the false detection in the above solution can be avoided, thereby improving the accuracy of the evaluation of the measurement results.

[0118] Referenced above Figures 1 to 9 An example implementation of the method according to the present disclosure is described in detail, and reference will be made to Figure 10 Describes the implementation of the corresponding device.

[0119] Figure 101 shows a block diagram of an electronic device / server 1000 in which one or more embodiments of the present disclosure may be implemented. The electronic device / server 1000 may be used to implement, for example, Figure 1 The electronic device 120 is shown. It should be understood that Figure 10 The illustrated electronic device / server 1000 is merely exemplary and should not be construed as limiting the functionality and scope of the embodiments described herein.

[0120] like Figure 10 As shown, electronic device / server 1000 is in the form of a general-purpose electronic device. Components of electronic device / server 1000 may include, but are not limited to, one or more processors or processing units 1010, memory 1020, storage device 1030, one or more communication units 1040, one or more input devices 1050, and one or more output devices 1060. Processing unit 1010 may be a real or virtual processor and is capable of performing various processes according to programs stored in memory 1020. In a multi-processor system, multiple processing units execute computer-executable instructions in parallel to increase the parallel processing capabilities of electronic device / server 1000.

[0121] The electronic device / server 1000 typically includes multiple computer storage media. Such media can be any available media that is accessible to the electronic device / server 1000, including but not limited to volatile and non-volatile media, removable and non-removable media. The memory 1020 can be a volatile memory (e.g., registers, cache, random access memory (RAM)), a non-volatile memory (e.g., read-only memory (ROM), electrically erasable programmable read-only memory (EEPROM), flash memory), or some combination thereof. The storage device 1030 can be a removable or non-removable medium and can include machine-readable media such as a flash drive, a disk, or any other medium that can be used to store information and / or data (e.g., training data for training) and can be accessed within the electronic device / server 1000.

[0122] The electronic device / server 1000 may further include additional removable / non-removable, volatile / non-volatile storage media. Figure 10 As shown in FIG, a magnetic disk drive for reading from or writing to a removable, non-volatile magnetic disk (e.g., a "floppy disk") and an optical disk drive for reading from or writing to a removable, non-volatile optical disk may be provided. In these cases, each drive may be connected to the bus (not shown) by one or more data media interfaces. Memory 1020 may include a computer program product 1025 having one or more program modules configured to perform various methods or actions of various embodiments of the present disclosure.

[0123] The communication unit 1040 enables communication with other electronic devices via a communication medium. Additionally, the functionality of the components of the electronic device / server 1000 can be implemented as a single computing cluster or multiple computing machines that can communicate via a communication connection. Thus, the electronic device / server 1000 can operate in a networked environment using logical connections to one or more other servers, network personal computers (PCs), or other network nodes.

[0124] Input device 1050 may be one or more input devices, such as a mouse, keyboard, or trackball. Output device 1060 may be one or more output devices, such as a display, speaker, or printer. Electronic device / server 1000 may also communicate with one or more external devices (not shown) via communication unit 1040 as needed. External devices such as storage devices, display devices, and the like may also be used to communicate with one or more devices that allow a user to interact with electronic device / server 1000, or with any device that allows electronic device / server 1000 to communicate with one or more other electronic devices (e.g., a network card, a modem, etc.). Such communication may be performed via an input / output (I / O) interface (not shown).

[0125] According to an exemplary implementation of the present disclosure, a computer-readable storage medium is provided, on which one or more computer instructions are stored, wherein the one or more computer instructions are executed by a processor to implement the method described above.

[0126] Various aspects of the present disclosure are described herein with reference to flowcharts and / or block diagrams of methods, apparatus (systems), and computer program products implemented according to the present disclosure. It should be understood that each block of the flowcharts and / or block diagrams, and combinations of blocks in the flowcharts and / or block diagrams, can be implemented by computer-readable program instructions.

[0127] These computer-readable program instructions can be provided to a processing unit of a general-purpose computer, a special-purpose computer, or other programmable data processing device, thereby producing a machine, such that when these instructions are executed by the processing unit of the computer or other programmable data processing device, a device is generated that implements the functions / actions specified in one or more blocks in the flowchart and / or block diagram. These computer-readable program instructions can also be stored in a computer-readable storage medium, where these instructions cause the computer, programmable data processing device, and / or other device to operate in a specific manner. Thus, the computer-readable medium storing the instructions comprises an article of manufacture that includes instructions for implementing various aspects of the functions / actions specified in one or more blocks in the flowchart and / or block diagram.

[0128] Computer-readable program instructions may also be loaded onto a computer, other programmable data processing apparatus, or other device, so that a series of operational steps are performed on the computer, other programmable data processing apparatus, or other device to produce a computer-implemented process, thereby causing the instructions executed on the computer, other programmable data processing apparatus, or other device to implement the functions / actions specified in one or more boxes in the flowchart and / or block diagram.

[0129] The flow charts and block diagrams in the accompanying drawings show the possible architecture, functions and operations of the systems, methods and computer program products according to multiple implementations of the present disclosure. In this regard, each box in the flow chart or block diagram can represent a part for a module, program segment or instruction, and a part for a module, program segment or instruction comprises one or more executable instructions for realizing the logical function of the specification. In some alternative implementations, the functions marked in the box can also occur in a sequence different from that marked in the accompanying drawings. For example, two continuous boxes can actually be executed substantially in parallel, and they can sometimes be executed in the opposite order, depending on the functions involved. It should also be noted that each box in the block diagram and / or flow chart, and the combination of the boxes in the block diagram and / or flow chart can be realized by a special hardware-based system that performs the function or action of the specification, or can be realized by a combination of special hardware and computer instructions.

[0130] While various implementations of the present disclosure have been described above, the foregoing description is intended to be illustrative, non-exhaustive, and not limited to the disclosed implementations. Many modifications and variations will be apparent to those skilled in the art without departing from the scope and spirit of the described implementations. The terminology used herein is selected to best explain the principles of the implementations, their practical applications, or improvements to existing technologies, or to enable others skilled in the art to understand the implementations disclosed herein.

Claims

1. A method for evaluating measurement results, characterized in that include: Determining a plurality of marking points in a captured image of a target object on a wafer, the plurality of marking points respectively corresponding to measurement signals of the target object, the plurality of marking points comprising a first group of marking points and a second group of marking points, the first group of marking points and the second group of marking points corresponding one to one in number, and spacing between corresponding marking points in the first group of marking points and the second group of marking points being used to perform line width measurement on the target object; determining an outline of the target object in the captured image; Determining whether there is an abnormality between the arrangement of the first group of marking points and the arrangement of the second group of marking points; In response to at least one of the arrangement of the first group of marking points and the arrangement of the second group of marking points being abnormal, determining that an arrangement component associated with the arrangement of the marking points has a first value; In response to the arrangement of each group of marker points in the first group of marker points and the second group of marker points being normal, determining that the arrangement component has a second value, wherein the first value is less than the second value, and the arrangement component is positively correlated with the accuracy of the measurement result for the target object; as well as An evaluation result for the measurement result is generated based on the arrangement component and the distances between the plurality of marking points and the contour.

2. The method for evaluating measurement results according to claim 1, characterized in that The measurement results are determined as follows: Calculating the distances between corresponding marking points in the first group of marking points and the second group of marking points to obtain a marking point distance set; as well as Determining the measurement result based on a preset calculation strategy and the marker point spacing set; And determining whether there is an abnormality between the arrangement of the first group of marking points and the arrangement of the second group of marking points includes: Based on a preset condition that matches the preset calculation strategy, it is determined whether there is any abnormality in the arrangement of the first group of marking points and the arrangement of the second group of marking points.

3. The method for evaluating measurement results according to claim 2, characterized in that The first group of marking points is arranged along a first direction, the second group of marking points is arranged along a third direction, and based on a preset condition matching the preset calculation strategy, determining whether there is an abnormality in the arrangement of the first group of marking points and the arrangement of the second group of marking points includes: If at least one marking point in the first group of marking points is offset toward a second direction compared to other marking points in the first group of marking points, and the offset is greater than a preset offset, determining that there is an abnormality in the arrangement of the first group of marking points; and If at least one marking point in the second group of marking points is offset toward a fourth direction compared to other marking points in the second group of marking points, and the offset is greater than the preset offset, it is determined that there is an abnormality in the arrangement of the second group of marking points; The first direction is the same as the third direction, the second direction intersects the first direction, the fourth direction is opposite to the second direction, and the second direction is determined based on the preset calculation strategy.

4. The method for evaluating measurement results according to claim 3, characterized in that The method for evaluating a measurement result further comprises: If at least one marking point in the first group of marking points is offset toward the second direction compared to other marking points in the first group of marking points, and the offset is greater than the preset offset, marking the at least one marking point in the first group of marking points as a first abnormal marking point; and If at least one marking point in the second group of marking points is offset toward the fourth direction compared with other marking points in the second group of marking points, and the offset is greater than the preset offset, it is marked as a second abnormal marking point.

5. Method for evaluating measurement results according to claim 4, characterized in that The method for evaluating a measurement result further comprises: If at least one marking point in the first group of marking points is offset toward the fourth direction compared to other marking points in the first group of marking points, and the offset is greater than the preset offset, marking the at least one marking point in the first group of marking points as a first marking point to be removed; If at least one marking point in the second group of marking points is offset toward the second direction compared to other marking points in the second group of marking points, and the offset is greater than the preset offset, marking the at least one marking point in the second group of marking points as a second marking point to be removed; and When calculating the distances between the plurality of marking points and the contour, the first to-be-removed marking points and the second to-be-removed marking points are removed.

6. The method for evaluating measurement results according to claim 3, characterized in that Determining the measurement result based on a preset calculation strategy and the marker point spacing set includes: Determine the maximum distance in the marker point distance set as the measurement result, wherein the second direction includes a direction from the second group of marker points to the first group of marker points; or The minimum distance in the marker point distance set is determined as the measurement result, and the second direction includes a direction from the first group of marker points to the second group of marker points.

7. The method for evaluating measurement results according to claim 3, characterized in that Based on a preset condition matching the preset calculation strategy, determining whether there is an abnormality in the arrangement of the first group of marking points and the arrangement of the second group of marking points further includes: If at least one marking point in the first group of marking points is offset toward the fourth direction compared to other marking points in the first group of marking points, and the offset is greater than the preset offset, it is determined that there is an abnormality in the arrangement of the first group of marking points; If at least one marking point in the second group of marking points is offset toward the second direction compared with other marking points in the second group of marking points, and the offset is greater than the preset offset, it is determined that there is an abnormality in the arrangement of the second group of marking points.

8. Method for evaluating measurement results according to claim 7, characterized in that Determining the measurement result based on a preset calculation strategy and the marker point spacing set includes: An average distance in the marker point distance set is determined as the measurement result, wherein the first direction includes a direction from the second group of marker points to the first group of marker points, or a direction from the first group of marker points to the second group of marker points.

9. The method for evaluating measurement results according to claim 7, characterized in that The method for evaluating a measurement result further comprises: If at least one marking point in the first group of marking points is offset toward the second direction or the fourth direction compared to other marking points in the first group of marking points, and the offset is greater than the preset offset, marking the at least one marking point in the first group of marking points as a first abnormal marking point; If at least one marking point in the second group of marking points is offset toward the second direction or the fourth direction compared to other marking points in the second group of marking points, and the offset is greater than the preset offset, at least one marking point in the second group of marking points is marked as a second abnormal marking point.

10. The method for evaluating measurement results according to claim 3 or 7, characterized in that The preset offset is greater than or equal to N times the width of the marking point itself, where N is a positive integer.

11. The method for evaluating measurement results according to claim 1, characterized in that The marking point includes a first coordinate and a second coordinate, the second coordinate being used to determine a distance between corresponding marking points in the first group of marking points and the second group of marking points, and determining a plurality of marking points in a captured image of the target object includes: Using one of the two marking points with the same first coordinates as a marking point in the first group of marking points; and The other of the two marking points is used as the corresponding marking point in the second group of marking points.

12. The method for evaluating measurement results according to claim 1, characterized in that The method for evaluating a measurement result further comprises: Acquiring a plurality of photographed images obtained by photographing the target object multiple times; selecting a plurality of candidate images from the plurality of captured images, wherein the arrangement of each group of marking points in the first group of marking points and the second group of marking points in the candidate images is normal; and The measurement result of each candidate image in the plurality of candidate images is evaluated based on a standard deviation of the measurement results of the plurality of candidate images.

13. The method for evaluating measurement results according to claim 1, characterized in that Evaluating a measurement result for the target object based on the first set of marker points, the second set of marker points, and distances between the plurality of marker points and the contour includes: determining a plurality of evaluation distances corresponding to the plurality of marker points, each evaluation distance indicating a distance between a corresponding marker point and the contour; and The measurement result is evaluated based on the discreteness of the plurality of evaluation distances, the arrangement of the first group of marking points, and the arrangement of the second group of marking points.

14. Method for evaluating measurement results according to claim 13, characterized in that Evaluating a measurement result for the target object based on the first set of marker points, the second set of marker points, and distances between the plurality of marker points and the contour includes: determining a distance component based on the degree of dispersion, wherein the distance component is negatively correlated with the degree of dispersion; and The distance component and the arrangement component are combined to obtain an evaluation result.

15. The method for evaluating measurement results according to claim 1, characterized in that The target object includes a transistor, and the measurement result includes a line width of a gate in the transistor.

16. An electronic device, characterized in that: include: processor; as well as a memory coupled to the processor, the memory having instructions stored therein, the instructions, when executed by the processor, causing the electronic device to perform a method for evaluating a measurement result, the method comprising: Determining a plurality of marking points in a captured image of a target object on a wafer, the plurality of marking points respectively corresponding to measurement signals of the target object, the plurality of marking points comprising a first group of marking points and a second group of marking points, the first group of marking points and the second group of marking points corresponding one to one in number, and spacing between corresponding marking points in the first group of marking points and the second group of marking points being used to perform line width measurement on the target object; determining an outline of the target object in the captured image; Determining whether there is an abnormality between the arrangement of the first group of marking points and the arrangement of the second group of marking points; In response to at least one of the arrangement of the first group of marking points and the arrangement of the second group of marking points being abnormal, determining that an arrangement component associated with the arrangement of the marking points has a first value; In response to the arrangement of each of the first and second groups of marker points being normal, determining that the arrangement component has a second value, wherein the first value is less than the second value, and the arrangement component is positively correlated with the accuracy of the measurement result for the target object; and An evaluation result for the measurement result is generated based on the arrangement component and the distances between the plurality of marking points and the contour.

17. The electronic device according to claim 16, wherein: The measurement results are determined as follows: Calculating the distances between corresponding marking points in the first group of marking points and the second group of marking points to obtain a marking point distance set; as well as Determining the measurement result based on a preset calculation strategy and the marker point spacing set; And determining whether there is an abnormality between the arrangement of the first group of marking points and the arrangement of the second group of marking points includes: Based on a preset condition that matches the preset calculation strategy, it is determined whether there is any abnormality in the arrangement of the first group of marking points and the arrangement of the second group of marking points.

18. The electronic device according to claim 17, wherein: The first group of marking points is arranged along a first direction, the second group of marking points is arranged along a third direction, and based on a preset condition matching the preset calculation strategy, determining whether there is an abnormality in the arrangement of the first group of marking points and the arrangement of the second group of marking points includes: If at least one marking point in the first group of marking points is offset toward a second direction compared to other marking points in the first group of marking points, and the offset is greater than a preset offset, determining that there is an abnormality in the arrangement of the first group of marking points; and If at least one marking point in the second group of marking points is offset toward a fourth direction compared to other marking points in the second group of marking points, and the offset is greater than the preset offset, it is determined that there is an abnormality in the arrangement of the second group of marking points; The first direction is the same as the third direction, the second direction intersects the first direction, the fourth direction is opposite to the second direction, and the second direction is determined based on the preset calculation strategy.

19. A computer-readable storage medium having a computer program stored thereon, characterized in that: When the computer program is executed by a processor, the computer program implements the method for evaluating measurement results according to any one of claims 1 to 15 .

Images