Microfluidic substrate, display device, and microfluidic device

Abstract

The present application provides a microfluidic substrate, a display device and a microfluidic device, wherein the microfluidic substrate includes a first film layer and a second film layer arranged opposite to each other, wherein the fluid contacts both the first film layer and the second film layer and moves in the relative area between the first film layer and the second film layer. The fluid includes a first fluid and a second fluid, wherein the refractive index of the first fluid is n1, the refractive index of the second fluid is n2, the refractive index of the first film layer is n3, n1≠n2 and n1<n3. The side of the first film layer close to the second film layer includes a plurality of first surfaces, wherein the angle between the normal of the first surface and the normal of the plane where the microfluidic substrate is located is θ1, θ1≥arcsin(n1 / n3); wherein n3≤n2, or, n2<n3 and θ1<arcsin(n2 / n3). In the present application, by setting the size of θ1 between the critical angle size corresponding to the first fluid and the critical angle size corresponding to the second fluid, combined with the propagation of external light, the positions of the first fluid and the second fluid can be determined respectively.

Description

Technical Field

[0001] The present application relates to the field of microfluidics, and in particular to a microfluidic substrate, a display device, and a microfluidic device. Background Art

[0002] Microfluidics is a technology characterized by the manipulation of fluids at micrometers or smaller scales. This technology has intersected with disciplines such as chemistry, biology, engineering, and physics, demonstrating a wide range of applications. Droplet microfluidics has attracted widespread attention due to its advantages such as easy fluid manipulation, high monodispersity, miniaturization, low cost, high sensitivity, and high throughput. The application of microfluidic droplet technology mainly lies in the manipulation of droplets, such as achieving functions such as splitting, merging, mixing, and sorting of droplets.

[0003] In the process of manipulating droplets using microfluidics technology, it is often necessary to obtain the position information of the droplets, but existing methods for detecting the position of droplets often have adverse effects. Summary of the Invention

[0004] In view of this, the present application provides a microfluidic substrate, a display device, and a microfluidic device to solve the problem of difficulty in obtaining position information of droplets.

[0005] In a first aspect, embodiments of the present application provide a microfluidic substrate comprising a first membrane layer and a second membrane layer disposed opposite each other, wherein a fluid contacts both the first membrane layer and the second membrane layer and moves in a region facing each other between the first membrane layer and the second membrane layer. The fluid comprises a first fluid and a second fluid, wherein the refractive index of the first fluid is n1, the refractive index of the second fluid is n2, and the refractive index of the first membrane layer is n3, where n1 ≠ n2 and n1 < n3.

[0006] The first film layer includes a plurality of first surfaces on a side adjacent to the second film layer. The angle between the normal of each of the first surfaces and the normal of the plane on which the microfluidic substrate is located is θ1, where θ1 ≥ arcs in (n1 / n3), wherein n3 ≤ n2, or n2 < n3 and θ1 < arcs in (n2 / n3).

[0007] In this embodiment, by setting the inclination of the first surface and combining the differences in propagation processes of external light in the area where the first fluid is located and the area where the second fluid is located, the relative positions of the first fluid and the second fluid can be distinguished.

[0008] In a possible implementation, at least a portion of the first surface is a plane.

[0009] In a possible implementation, at least a portion of the first surface is a curved surface.

[0010] In a possible implementation, an angle between a normal line of a surface of the second film layer on a side close to the first film layer and a normal line of a plane where the microfluidic substrate is located is 0.

[0011] In this embodiment,

[0012] In one possible implementation, the refractive index of the second film layer is n4, n4=n3; the side of the second film layer close to the first film layer includes multiple second surfaces, and the angle between the normal of the second surface and the normal of the plane where the microfluidic substrate is located is θ2, θ2=θ1.

[0013] In one possible implementation, the microfluidic substrate further includes a third film layer, which is located on the side of the first film layer away from the second film layer, and includes a plurality of protrusions on the side of the third film layer facing the first film layer; the first film layer is conformally attached to the plurality of protrusions.

[0014] In a possible implementation, the microfluidic substrate further includes a driving layer, and the second membrane layer is located on a side of the first membrane layer close to the driving layer.

[0015] In a possible implementation, the microfluidic substrate further includes a light absorbing layer, and the light absorbing layer is located between the second membrane layer and the driving layer.

[0016] In a possible implementation, the second fluid is a dielectric fluid and n3≤n2, and the second fluid further includes a self-luminous material.

[0017] In a possible implementation, the microfluidic substrate further includes a driving layer, and the first membrane layer is located on a side of the second membrane layer close to the driving layer.

[0018] In one possible implementation, the first film layer includes a plurality of first regions and a plurality of second regions, the first surface is located in the first region, the second region includes a third surface, and an angle between a normal line of the third surface and a normal line of a plane where the microfluidic substrate is located is 0;

[0019] The first area and the second area are arranged in an array.

[0020] In a second aspect, an embodiment of the present application provides a display device comprising the microfluidic substrate provided in the first aspect.

[0021] In a third aspect, an embodiment of the present application provides a microfluidic device, comprising the microfluidic substrate provided in the first aspect.

[0022] In the present application, by setting the size of θ1 between the critical angle size corresponding to the first fluid and the critical angle size corresponding to the second fluid, the external light can be totally reflected on the first surface in contact with the first fluid or on the first surface in contact with the second fluid, so that the propagation conditions of the external light in the area where the first fluid is located are different from the propagation conditions in the area where the first fluid is located, which helps to confirm the positions of different fluids. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following is a brief introduction to the drawings required for use in the embodiments. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0024] Figure 1 is a schematic cross-sectional view of a partial structure of a microfluidic substrate related to the present application;

[0025] Figure 2 A schematic cross-sectional view of a partial structure of a microfluidic substrate provided in this application;

[0026] Figure 3 A schematic cross-sectional view of a partial structure of a microfluidic substrate provided in this application;

[0027] Figure 4 A schematic cross-sectional view of a partial structure of a microfluidic substrate provided in this application;

[0028] Figure 5 A schematic cross-sectional view of a partial structure of a microfluidic substrate provided in this application;

[0029] Figure 6 A schematic cross-sectional view of a partial structure of a microfluidic substrate provided in this application;

[0030] Figure 7 A schematic cross-sectional view of a partial structure of a microfluidic substrate provided in this application;

[0031] Figure 8 A schematic cross-sectional view of a partial structure of a microfluidic substrate provided in this application;

[0032] Figure 9 A schematic cross-sectional view of a partial structure of a microfluidic substrate provided in this application;

[0033] Figure 10 A schematic diagram of a partial structure of a microfluidic substrate provided in this application;

[0034] Figure 11 for Figure 10 The schematic cross-sectional view of a partial structure of the microfluidic substrate along the AA' direction is shown. DETAILED DESCRIPTION

[0035] In order to better understand the technical solution of the present application, the embodiments of the present application are described in detail below with reference to the accompanying drawings.

[0036] It should be clear that the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of this application.

[0037] The terms used in the embodiments of the present application are for the purpose of describing specific embodiments only and are not intended to limit the present application. The singular forms "a", "an", "the" and "the" used in the embodiments of the present application and the appended claims are also intended to include plural forms unless the context clearly indicates otherwise.

[0038] It should be understood that the term "and / or" as used herein simply describes a relationship between associated objects, indicating that three possible relationships exist. For example, "A and / or B" can represent: A alone, A and B together, or B alone. Furthermore, the character " / " in this document generally indicates an "or" relationship between the associated objects.

[0039] Figure 1 The figure is a cross-sectional schematic diagram of a partial structure of a microfluidic substrate related to the present application.

[0040] like Figure 1 As shown, the existing microfluidic substrate 10' may include a driving electrode e1, a common electrode e2, and a first hydrophobic layer a and a second hydrophobic layer b arranged opposite to each other. A control electric field for driving the movement of a droplet c can be generated between the driving electrode e1 and the common electrode e2. The relative area between the first hydrophobic layer a and the second hydrophobic layer b can be used for the droplet c to move therein, and the droplet c can contact both the first hydrophobic layer a and the second hydrophobic layer b.

[0041] Controlling the electric field can achieve the effect of controlling the movement of droplet c by changing the surface tension between droplet c and the first hydrophobic layer a, the surface tension between droplet c and the second hydrophobic layer b, and then changing the contact angles between droplet c and the first hydrophobic layer a and the second hydrophobic layer b respectively.

[0042] The ability to control droplet movement through electric fields has made microfluidic substrates a focus of attention in fields such as biomedical research and drug synthesis screening. In the process of controlling droplet movement using a microfluidic substrate 10', it is often necessary to determine the position of droplet c on the microfluidic substrate 10'. For example, when conducting a drug synthesis experiment using the microfluidic substrate 10', it is necessary to obtain positional information on droplets c containing different drug components on the microfluidic substrate 10' to ensure the accuracy of the experiment. In the prior art, a colored dye is typically added to the droplet c, and the corresponding positional information of the droplet c is obtained through optical detection. However, this method often brings some problems; for example, the method of adding a colored dye to the droplet carries the risk of contaminating the components in the droplet c.

[0043] Figure 2 This is a schematic cross-sectional view of a partial structure of a microfluidic substrate provided in this application.

[0044] In order to solve the above problems, the present invention provides a microfluidic substrate 10. Figure 2 As shown, the microfluidic substrate 10 includes a first film layer 11 and a second film layer 12 arranged relatively to each other. The first film layer 11 and the second film layer 12 can both be hydrophobic layers in contact with the droplets. When the microfluidic substrate 10 is needed to control the movement of the droplets, the fluid including the droplets can be injected between the first film layer 11 and the second film layer 12.

[0045] The first film layer 11 and the second film layer 12 may both be made of Teflon.

[0046] The microfluidic substrate 10 may further include a driving layer 13 , and the driving layer 13 may include a driving device 13 a for driving the droplets to move, wherein the driving device 13 a may have a property of reflecting light.

[0047] Fluid A contacts both the first membrane layer 11 and the second membrane layer 12 and moves in the relative region between the first membrane layer 11 and the second membrane layer 12. Surface tension between at least a portion of fluid A and the first membrane layer 11 and the second membrane layer 12, respectively, can be affected by the electric field of the microfluidic substrate 10.

[0048] Fluid A includes a first fluid A1 and a second fluid A2. The microfluidic substrate 10 can control the movement of at least one of the first and second fluids A1 and A2. The refractive index of the first fluid A1 is n1, the refractive index of the second fluid A2 is n2, and the refractive index of the first film layer 11 is n3, where n1 ≠ n2 and n1 < n3.

[0049] The first film layer 11 includes a plurality of first surfaces 01 on one side thereof close to the second film layer 12 . The angle between the normal line of the first surface 01 and the normal line of the plane where the microfluidic substrate 10 is located is θ1, where θ1≥arcs in(n1 / n3).

[0050] Fluid A can contact the side of the first film layer 11 that is closest to the second film layer 12. The contact surface between fluid A and the first film layer 11 can include the first surface 01. If the contact surface between the first fluid A1 and the first film layer 11 includes the first surface 01, and there is external light L incident on the first film layer 11 in a direction perpendicular to the plane of the microfluidic substrate 10, when the external light L propagates to the first surface 01 at the interface between the first fluid A1 and the first film layer 11, the angle between the external light L and the normal to the first surface 01 is equal to θ1. At this point, since n1 < n3, according to the law of refraction, the critical angle corresponding to light traveling from the first film layer 11 to the first fluid A1 is arcs in(n1 / n3). Considering that the incident angle of the external light L when propagating to the first surface 01 is equal to θ1, and θ1 ≥ arcs in(n1 / n3), the external light L cannot pass through the first surface 01 and enter the first fluid A1. At this time, the external light L cannot propagate to the driving device 13a corresponding to the area where the first fluid A1 is located. Therefore, an observer located on the side of the first film layer 11 away from the driving layer 13 will find it difficult to observe the driving device 13a corresponding to the area where the first fluid A1 is located. The reason is that the observer often needs to observe the driving device 13a through the light reflected by the driving device 13a.

[0051] Since the contact surface between the second fluid A2 and the first film layer 11 may also include the first surface 01 , when the external light L propagates from the first film layer 11 to the second fluid A2 , the external light L may propagate to the first surface 01 in contact with the second fluid A2 .

[0052] It should be noted that the position of the first fluid A1 on the microfluidic substrate 10 may be different from the position of the second fluid A2 on the microfluidic substrate 10, so the first surface 01 in contact with the first fluid A1 and the first surface 01 in contact with the second fluid A2 are not the same first surface 01.

[0053] Here, n3≤n2, or n2<n3 and θ1<arcs in(n2 / n3).

[0054] During the propagation of external light L from the first film layer 11 to the second fluid A2, when n3 ≤ n2, there is no corresponding critical angle when the external light L propagates to the first surface O1 corresponding to the second fluid A2. This is because the process of external light L propagating from the first film layer 11 to the second fluid A2 can be regarded as the process of external light L propagating from an optically sparse medium to an optically dense medium, and no total internal reflection occurs. Therefore, the external light L can propagate into the second fluid A2. At this time, the external light L can propagate to the driving device corresponding to the region where the second fluid A2 is located. An observer located on the side of the first film layer 11 away from the driving layer 13 can observe the driving device corresponding to the region where the second fluid A2 is located. Since it is difficult to observe the driving device corresponding to the region where the first fluid A1 is located, the observer can distinguish the relative positions of the first fluid A1 and the second fluid A2 by whether or not the driving device can be observed.

[0055] When n2<n3 and θ1<arcs in(n2 / n3), the angle between the ambient light L and the normal to the first surface O1 corresponding to the second fluid A2 can be smaller than the critical angle arcs in(n2 / n3) corresponding to the first surface O1 in contact with the second fluid A2. Therefore, the ambient light L will not be totally reflected during its propagation toward the second fluid A2. In other words, the ambient light L can enter the second fluid A2. In this case, the ambient light L can propagate to the driving device corresponding to the area where the second fluid A2 is located. The observer can then distinguish the relative positions of the first fluid A1 and the second fluid A2 by whether the driving device can be observed.

[0056] In this embodiment, by adjusting the inclination of first surface O1, the magnitude of θ1 can be set to lie between the critical angle corresponding to first fluid A1 and the critical angle corresponding to second fluid A2. Combined with the propagation of ambient light L on first surface O1 in contact with first fluid A1 and first surface O1 in contact with second fluid A2, the relative positions of first fluid A1 and second fluid A2 can be distinguished. Furthermore, by setting n3 ≤ n2, the propagation of ambient light L on first surface O1 in contact with first fluid A1 and first surface O1 in contact with second fluid A2 can be differentiated.

[0057] In one embodiment of the present application, Figure 2 As shown, at least a portion of the first surface 01 is planar.

[0058] In a possible implementation of this embodiment, as Figure 2 As shown, the θ1 corresponding to different first surfaces 01 are of the same size.

[0059] Figure 3 This is a schematic cross-sectional view of a partial structure of a microfluidic substrate provided in this application.

[0060] In a possible implementation of this embodiment, as Figure 3 As shown, different first surfaces 01 correspond to different sizes of θ1.

[0061] Figure 4 This is a schematic cross-sectional view of a partial structure of a microfluidic substrate provided in this application.

[0062] In one embodiment of the present application, Figure 4 As shown, at least a portion of the first surface 01 is a curved surface.

[0063] Figure 5 This is a schematic cross-sectional view of a partial structure of a microfluidic substrate provided in this application.

[0064] In one embodiment of the present application, Figure 5 As shown, the multiple first surfaces 01 include flat surfaces and curved surfaces.

[0065] In one embodiment of the present application, Figure 2 As shown, the microfluidic substrate 10 further includes a driving layer 13 , and the second membrane layer 12 is located on a side of the first membrane layer 11 close to the driving layer 13 .

[0066] In this embodiment, if external light L is incident on the second film layer 12 from the first film layer 11 through the second fluid A2, since the second film layer 12 is located on the side of the first film layer 11 close to the drive layer 13, the external light L can reach the drive layer 13 after passing through the second film layer 12 and be reflected by the drive device 13a. The reflected portion of the external light L can then be emitted from the microfluidic substrate 10 in the opposite direction of its original propagation path within the microfluidic substrate 10, allowing an observer to observe the drive device 13a in the area where the second fluid A2 is located.

[0067] Figure 6 This is a schematic cross-sectional view of a partial structure of a microfluidic substrate provided in this application.

[0068] In one embodiment of the present application, Figure 6 As shown, the microfluidic substrate 10 further includes a light absorbing layer 14 , which is located between the second film layer 12 and the driving layer 13 .

[0069] In this embodiment, when ambient light L propagates from the first film layer 11 to the first surface 01 in contact with the first fluid A1 in a direction perpendicular to the plane of the microfluidic substrate 10, the ambient light L is likely to undergo total internal reflection at the first surface 01 due to n1 < n3 and θ1 ≥ arcs in (n1 / n3). At this point, if observed from the direction from the first film layer 11 to the second film layer 12, the area containing the first fluid A1 may appear white (because the ambient light L is reflected in this area). Meanwhile, when n3 ≤ n2, or n2 < n3 and θ1 < arcs in (n2 / n3), the ambient light L will not undergo total internal reflection at the first surface 01 in contact with the second fluid A2. The ambient light L can pass through the first surface 01 and enter the second fluid A2. Subsequently, after passing through the second fluid A2, the ambient light L can enter the light absorbing layer 14 through the second film layer 12. The light absorbing layer 14 absorbs the incident ambient light L, making it difficult for the ambient light L to reach the driving layer 13 and generate reflected light. Therefore, if viewed from the direction from the first film layer 11 to the second film layer 12, the area where the second fluid A2 is located can appear black. In this embodiment, the locations of the first fluid A1 and the second fluid A2 can be determined based on the color differences corresponding to different areas on the microfluidic substrate 10.

[0070] In one embodiment of the present application, the second fluid A2 is a dielectric fluid and n3≤n2, and the second fluid A2 further includes a self-luminous material.

[0071] The fluid between the first film layer 11 and the second film layer 12 may include a target fluid and a medium fluid, wherein the microfluidic substrate 10 can drive the target fluid to move, but the microfluidic substrate 10 is generally difficult to drive the medium fluid to move. The medium fluid may include silicone oil, air, etc.

[0072] If the second fluid A2 includes a self-luminous material, the second fluid A2 can emit light. A portion of the light generated by the second fluid A2 can propagate from the second fluid A2 toward the first film layer 11. Since n3 ≤ n2, there is a high risk that the light generated by the second fluid A2 will undergo total internal reflection at the first surface 01 in contact with the second fluid A2. Furthermore, a portion of the light generated by the second fluid A2 (referred to as a minority light) can travel through the first fluid A1 toward the first film layer 11. Since n1 < n3, this minority light will not undergo total internal reflection at the first surface 01 in contact with the first fluid A1.

[0073] In one embodiment of the present application, Figure 2 As shown, the angle between the normal line of the surface of the second film layer 12 on the side close to the first film layer 11 and the normal line of the plane where the microfluidic substrate 10 is located is 0.

[0074] When external light L propagates from fluid A toward the second film layer 12 in a direction perpendicular to the plane of the microfluidic substrate 10, the propagation direction of the external light L is perpendicular to the interface between the second fluid A2 and the second film layer 12. Therefore, the external light L can pass through the interface and enter the second film layer 12. In the process of entering the second film layer 12, the propagation process of the external light L can be unaffected by the relationship between the refractive index of the second film layer 12 and the refractive index of the second fluid A2.

[0075] Figure 7 This is a schematic cross-sectional view of a partial structure of a microfluidic substrate provided in this application.

[0076] In one embodiment of the present application, Figure 7 As shown, the microfluidic substrate 10 further includes a driving layer 13 , and the first membrane layer 11 is located on a side of the second membrane layer 12 close to the driving layer 13 .

[0077] When external light L propagating in a direction perpendicular to the plane of the microfluidic substrate 10 is incident on the first film layer 11 from the second film layer 12 through fluid A, the angle between the normal of the surface of the second film layer 12 on the side closest to the first film layer 11 and the normal of the plane of the microfluidic substrate 10 is zero. Therefore, the probability of the external light L changing its propagation path when passing through the interface between the first film layer 11 and the fluid A is low. When n2 < n3, since n1 < n3, total internal reflection will not occur during the process of external light L being incident on the first film layer 11 through the first fluid A1 or during the process of external light L being incident on the first film layer 11 through the second fluid A2. This means that external light L can successfully propagate to the drive layer 13, whether propagating from the region corresponding to the first fluid A1 to the first film layer 11 or from the region corresponding to the second fluid A2 to the first film layer 11.

[0078] However, after at least a portion of the external light L is reflected by the driver device 13a, the resulting reflected light has difficulty passing through the interface between the first fluid A1 and the first film layer 11, given that arcs in (n1 / n3) ≤ θ1 < arcs in (n2 / n3). Therefore, an observer located on the side of the second film layer 12 away from the first film layer 11 will have difficulty observing the driver device 13a in the area where the first fluid A1 is located. Conversely, the reflected light can pass through the interface between the second fluid A2 and the first film layer 11, allowing an observer located on the side of the second film layer 12 away from the first film layer 11 to observe the driver device 13a in the area where the second fluid A2 is located. Therefore, the configuration of this embodiment facilitates determining the respective locations of the first fluid A1 and the second fluid A2.

[0079] Figure 8 This is a schematic cross-sectional view of a partial structure of a microfluidic substrate provided in this application.

[0080] In one embodiment of the present application, Figure 8 As shown, the refractive index of the second film layer 12 is n4, n4=n3; the side of the second film layer 12 close to the first film layer 11 includes multiple second surfaces 02, and the angle between the normal of the second surface 02 and the normal of the plane where the microfluidic substrate 10 is located is θ2, θ2=θ1.

[0081] The first fluid A1 may be in contact with both the first surface 01 and the second surface 02. When external light L is emitted from the first film layer 11 toward the first fluid A1, due to n1 < n3 and θ1 ≥ arcs in (n1 / n3), a portion of the external light L undergoes total internal reflection at the first surface 01 in contact with the first fluid A1. Alternatively, a portion of the external light L may pass through the first surface 01 in contact with the second fluid A2 and enter the first fluid A1, then pass through the first fluid A1 and enter the second film layer A2, where it is reflected by the drive device 13a in the drive layer 13. In this case, the reflected portion of the external light L may enter the second film layer 12 and propagate to the second surface 02 in contact with the first fluid A1. However, due to n4 = n3 and θ2 = θ1, the reflected portion of the external light L is more likely to undergo total internal reflection at the second surface 02 in contact with the first fluid A1, making it less likely to pass through the second surface 02 and enter the first fluid A1. Therefore, the arrangement of this embodiment further reduces the probability of observing the driving device 13a in the area where the first fluid A1 is located, which helps to determine the position of the first fluid A1.

[0082] Figure 9 This is a schematic cross-sectional view of a partial structure of a microfluidic substrate provided in this application.

[0083] In one embodiment of the present application, Figure 9 As shown, the microfluidic substrate 10 also includes a third film layer 14, which is located on the side of the first film layer 11 away from the second film layer 12, and the side of the third film layer 14 facing the first film layer 11 includes multiple protrusions 14a; the first film layer 11 is conformally attached to the multiple protrusions 14a.

[0084] When preparing the first film layer 11, the first film layer 11 can be prepared on the side of the third film layer 14 including the protrusion 14a (for example, the first film layer 11 is prepared by a vapor deposition process), so that the first film layer 11 can be conformally attached to multiple protrusions 14a. Then, the portion of the first film layer 11 corresponding to the protrusion 14a on the side away from the third film layer 14 can form a first surface 01, which helps to reduce the difficulty of preparing the first film layer 11.

[0085] The third film layer 14 can be at least one of a film layer containing electrodes for driving the movement of the droplets, an insulating layer, and a glass substrate. The electrodes for driving the movement of the droplets can be patterned to form protrusions 14a. Alternatively, the glass substrate can be patterned using methods such as etching to create structures corresponding to the protrusions 14a.

[0086] Figure 10 This is a schematic diagram of a partial structure of a microfluidic substrate provided in this application. Figure 11 for Figure 10 The schematic cross-sectional view of the microfluidic substrate along the AA' direction is shown. Figure 10 The area marked by the dotted line on the first film layer may correspond to the first area, and the other areas on the first film layer may correspond to the second area. Figure 10 The area marked by the dotted box on the second film layer may correspond to the third area, and the other areas on the second film layer may correspond to the fourth area.

[0087] In one embodiment of the present application, Figure 10 and Figure 11 The first film layer 11 includes a plurality of first regions 1a and a plurality of second regions 1b. The first surface 01 is located in the first region 1a. The second region 1b includes a third surface 03. The angle between the normal line of the third surface 03 and the normal line of the plane where the microfluidic substrate 10 is located is 0.

[0088] The first area 1a and the second area 1b are arranged in an array.

[0089] In the embodiment of the present application, the first surface 01 is located in the first region 1a. When the first fluid A1 contacts the portion of the first film layer 11 on the side near the second film layer 12 corresponding to the first region 1a, the position of the first fluid A1 can be determined by the propagation of ambient light L in the first region 1a. Furthermore, by selectively providing the first surface 01 and the third surface 03 on the side of the first film layer 11 near the second film layer 12, an array arrangement of the first surface 01 and the third surface 03 is achieved, which helps reduce manufacturing costs while enabling the determination of the position of the fluid A.

[0090] In one embodiment of the present application, Figure 10 and Figure 11 The second film layer 12 includes a plurality of third regions 1c and a plurality of fourth regions 1d. The second surface 02 is located in the third region 1c. The fourth region 1d includes a fourth surface 04. The angle between the normal line of the fourth surface 04 and the normal line of the plane where the microfluidic substrate 10 is located is 0.

[0091] Along a direction perpendicular to the plane of the microfluidic substrate 10 , the first region 1 a at least partially overlaps with the third region 1 c , and the second region 1 b at least partially overlaps with the fourth region 1 d .

[0092] In the embodiment of the present application, the at least partial overlap of the first region 1a and the third region 1c allows fluid A to contact both the first surface 01 and the second surface 02. This, combined with the propagation of ambient light L on the first surface 01 and the second surface 02, helps improve the accuracy of determining the location of fluid A. Furthermore, the at least partial overlap of the second region 1b and the fourth region 1d means that the distribution of the first surface 01 on the first film layer 11 and the second surface 02 on the second film layer 12 can be identical. Since θ1 = θ2 can occur, this arrangement helps reduce manufacturing complexity.

[0093] The present application provides a display device, which includes the microfluidic substrate 10 provided in the above embodiment.

[0094] The present application provides a microfluidic device, which includes a microfluidic substrate 10 as provided in the above embodiment. The microfluidic device can be applied to biomedical research, drug synthesis screening, environmental monitoring and protection, health quarantine, forensic identification, biological reagent detection and other fields.

[0095] The microfluidic device provided in the present application can detect the position of the droplet, and the detection process will not affect the control process of the droplet by the microfluidic device.

[0096] In this specification, reference can be made to the same or similar parts between the various embodiments. In particular, for the device embodiment and the terminal embodiment, since they are basically similar to the method embodiment, the description is relatively simple, and the relevant parts can be referred to the description in the method embodiment.

Claims

1. A microfluidic substrate, characterized in that The microfluidic substrate comprises a first membrane layer and a second membrane layer disposed opposite to each other, wherein a fluid contacts both the first membrane layer and the second membrane layer and moves in an opposite region between the first membrane layer and the second membrane layer; The fluid includes a first fluid and a second fluid, the refractive index of the first fluid is n1, the refractive index of the second fluid is n2, the refractive index of the first film layer is n3, n1≠n2 and n1<n3; The first film layer includes a plurality of first surfaces on a side close to the second film layer, and an angle between a normal line of the first surface and a normal line of a plane where the microfluidic substrate is located is θ1, θ1 ≥ arcsin(n1 / n3); Wherein, n3≤n2, or, n2<n3 and θ1<arcsin(n2 / n3).

2. The microfluidic substrate according to claim 1, characterized in that At least a portion of the first surface is planar.

3. The microfluidic substrate according to claim 1, characterized in that At least a portion of the first surface is a curved surface.

4. The microfluidic substrate according to claim 1, characterized in that An angle between a normal line of a surface of the second film layer on a side close to the first film layer and a normal line of a plane where the microfluidic substrate is located is 0.

5. The microfluidic substrate according to claim 1, characterized in that The refractive index of the second film layer is n4, n4=n3; the second film layer includes multiple second surfaces on the side close to the first film layer, and the angle between the normal of the second surface and the normal of the plane where the microfluidic substrate is located is θ2, θ2=θ1.

6. The microfluidic substrate according to claim 1, characterized in that The microfluidic substrate further includes a third film layer, which is located on a side of the first film layer away from the second film layer, and includes a plurality of protrusions on a side of the third film layer facing the first film layer; the first film layer is conformally attached to the plurality of protrusions.

7. The microfluidic substrate according to claim 1, characterized in that The microfluidic substrate further includes a driving layer, and the second membrane layer is located on a side of the first membrane layer close to the driving layer.

8. The microfluidic substrate according to claim 7, characterized in that The microfluidic substrate further includes a light absorbing layer, and the light absorbing layer is located between the second film layer and the driving layer.

9. The microfluidic substrate according to claim 7, characterized in that The second fluid is a dielectric fluid and n3≤n2. The second fluid also includes a self-luminous material.

10. The microfluidic substrate according to claim 4, characterized in that The microfluidic substrate further includes a driving layer, and the first membrane layer is located on a side of the second membrane layer close to the driving layer.

11. The microfluidic substrate according to claim 1, characterized in that The first film layer includes a plurality of first regions and a plurality of second regions, the first surface is located in the first region, the second region includes a third surface, and an angle between a normal line of the third surface and a normal line of a plane where the microfluidic substrate is located is 0; The first areas and the second areas are arranged in an array.

12. A display device, characterized in that: The microfluidic substrate comprises the microfluidic substrate according to any one of claims 1 to 11.

13. A microfluidic device, characterized in that: The microfluidic substrate comprises the microfluidic substrate according to any one of claims 1 to 11.

Images