A gas flow in-situ measurement and verification method and system

Abstract

The present application relates to the field of gas flow detection technology, and in particular to a method and system for in-situ measurement and verification of gas flow, which includes: pre-analyzing a three-dimensional model of a gas container to determine an available temperature acquisition area; arranging temperature collectors symmetrically along the circumference of the gas container in a preset arrangement method for the available temperature acquisition area to determine a first temperature acquisition group and a second temperature acquisition group; sequentially instructing the first temperature acquisition group and the second temperature acquisition group to perform outer wall temperature acquisition in a preset dynamic detection and adjustment method to determine outer wall temperature information; and calculating according to the outer wall temperature information and a preset flow calculation formula to determine the gas flow value. The present application has the effect of improving the accuracy of the gas flow detection results in the gas container.

Description

Technical Field

[0001] The present application relates to the field of gas flow detection technology, and in particular to a method and system for in-situ measurement and calibration of gas flow. Background Art

[0002] In semiconductor industry processing and manufacturing, some process gases are usually used for material processing. The flow rate of process gases has a significant impact on the quality of semiconductor processing and manufacturing. Therefore, it is necessary to perform corresponding flow detection on the process gases in order to accurately control the flow rate of the gas flow during precise processing.

[0003] In the related art, when performing air flow detection, a gas flow meter is usually used to measure the gas flow in situ, that is, a temperature sensor is used to detect the temperature on the inner wall of the gas container, and the corresponding gas flow is calculated based on the collected temperature to obtain the specific flow value of the gas used.

[0004] With respect to the above-mentioned related technologies, when the temperature sensor is set on the inner wall of the gas container and multiple point detection is performed, it is necessary to open holes in the gas container at multiple points, or design a single opening with a larger aperture, so as to facilitate the insertion of the temperature sensor into the gas container, which affects the sealing of the gas container. When there is gas convection in the gas container, the gas temperature under the convection becomes unevenly distributed, which has a great impact on the detection accuracy of the gas flow. Summary of the invention

[0005] In order to improve the accuracy of gas flow detection results in a gas container, the present application provides a gas flow in-situ measurement and calibration method and system.

[0006] In the first aspect, the present application provides a gas flow in-situ measurement and verification method, which adopts the following technical solution:

[0007] A gas flow in-situ measurement and verification method, comprising:

[0008] Conduct a three-dimensional model analysis of the gas container in advance to determine the available temperature collection area;

[0009] The temperature collectors are symmetrically arranged along the circumference of the gas container in the available temperature collection area according to a preset arrangement method to determine a first temperature collection group and a second temperature collection group;

[0010] Instructing the first temperature collection group and the second temperature collection group to collect the outer wall temperature in sequence using a preset dynamic detection and adjustment method to determine the outer wall temperature information;

[0011] Calculate the gas flow value based on the outer wall temperature information and the preset flow calculation formula;

[0012] The first temperature collection group and the preset flow calculation formula are as follows:

[0013] ,

[0014] ,

[0015] in, represents the standard volume flow rate calculated for the i-th time, It indicates the density under standard conditions. represents the sum of the volume of the cavity and the intake pipe, is the gas constant, represents the cavity wall temperature, represents the difference between the average temperature in the cavity and the wall temperature, It represents the mean value of the volume flow rate from the 1st to the i-th standard condition.

[0016] By adopting the above technical solution, temperature collectors are symmetrically arranged on the outer wall of the gas container, and dynamic outer wall temperature information is collected, so that temperature detection can be performed without inserting the temperature collector into the gas container, thereby reducing the probability of inaccurate airflow detection due to poor airtightness.

[0017] Optionally, the dynamic detection and adjustment method includes:

[0018] When receiving the temperature acquisition signal, instructing the first temperature acquisition group or the second temperature acquisition group to perform temperature acquisition;

[0019] Obtaining the gas flow rate of the gas container for calculation and analysis to determine the gas flow rate change rate;

[0020] When the gas flow rate change rate is higher than the preset stable flow rate change rate, instructing the first temperature acquisition group and the second temperature acquisition group to perform alternating temperature acquisition;

[0021] When the gas flow rate change rate is equal to or less than the preset stable flow rate change rate, the alternating temperature acquisition of the first temperature acquisition group and the second temperature acquisition group is stopped.

[0022] By adopting the above technical solution, the method of alternately collecting outer wall temperature information can collect more comprehensive information at multiple positions, so that even if container convection occurs in the gas container and the temperature distribution of the gas is uneven, reliable outer wall temperature information can still be obtained, which helps to improve the accuracy of gas flow calculation. At the same time, the two groups of temperature collectors can be used as backup for each other, so that when one group of temperature collectors is abnormal or damaged, the corresponding temperature collection operation can still be carried out, thereby improving the reliability and stability of detection.

[0023] Optionally, when the first temperature collection group and the second temperature collection group are replaced to collect temperature, the method further includes:

[0024] Collect the peripheral temperature of the outer wall of the container to determine the ambient temperature;

[0025] If the ambient temperature is within the preset ambient intervention temperature range, a matching analysis is performed based on the ambient temperature to determine the temperature acquisition intervention coefficient;

[0026] Perform temperature correction calculation based on the temperature acquisition intervention coefficient and the outer wall temperature information to determine the corrected outer wall temperature information;

[0027] Calculation is performed based on the corrected outer wall temperature information and the preset flow calculation formula.

[0028] By adopting the above technical solution, when the first temperature acquisition group and the second temperature acquisition group alternately collect the outer wall temperature information, the ambient temperature is detected and analyzed, and the temperature acquisition intervention coefficient is calculated based on the matching to correct the measurement error caused by the temperature collector being affected by the external environment, which helps to further improve the detection accuracy of the outer wall temperature information.

[0029] Optionally, the outer wall temperature collection also includes:

[0030] Performing self-checks on the temperature collectors of the first temperature collection group and the second temperature collection group to find abnormal temperature collectors;

[0031] When the number of abnormal temperature collectors is greater than a preset basic number, the abnormal temperature collectors are marked to determine the abnormal position and adjacent temperature collectors;

[0032] Analyze the spacing between the abnormal location and the adjacent temperature collectors, and match them according to the spacing to determine the temperature transfer coefficient;

[0033] Calculation is performed based on the temperature transfer coefficient and the adjacent temperature information collected by the adjacent temperature collector to determine the supplementary temperature information of the abnormal position.

[0034] By adopting the above technical solution, the first temperature collection group and the second temperature collection group can perform corresponding self-checks when collecting temperature, so as to find out the abnormal temperature collectors and check the temperature collectors at the abnormal positions.

[0035] Optionally, the gas container model analysis includes:

[0036] Performing model acquisition on the gas container model and performing model feature analysis to determine an unusable temperature acquisition area of ​​the gas container;

[0037] Mark the unavailable temperature collection areas to identify the remaining conventional areas;

[0038] The gas container wall thickness analysis is performed based on the gas container model and the remaining conventional areas, and the area with uniform wall thickness is marked as the available temperature acquisition area.

[0039] By adopting the above technical solution, during the gas container model analysis process, the areas where it is not convenient to arrange the temperature collector are analyzed, and the areas with uniform thickness of the gas container are screened out for marking, thereby facilitating reducing the interference caused by uneven thickness at the collection position when performing temperature detection on multiple symmetrically arranged temperature collectors.

[0040] Optionally, the symmetrical arrangement of the temperature collectors includes:

[0041] Performing analysis based on the available temperature acquisition area and the gas container model to determine a first symmetric area and a second symmetric area;

[0042] Performing detection position planning according to the first symmetric area and the preset minimum interval distribution parameter to determine detection position information, wherein the detection position information includes the detection position and the number of detection positions;

[0043] The second symmetrical area is mirrored according to the detection position information to determine the detection position of the temperature collector.

[0044] By adopting the above technical solution, a first symmetrical area and a second symmetrical area are divided in the available temperature collection area, and the detection position is planned according to the minimum interval distribution parameter, so that the temperature collector can effectively detect the appropriate required outer wall temperature information when arranged.

[0045] In the second aspect, the present application provides a gas flow in-situ measurement and calibration system, which adopts the following technical solution:

[0046] A gas flow in-situ measurement and verification system, comprising:

[0047] The acquisition area analysis module performs a three-dimensional model analysis on the gas container in advance to determine the available temperature acquisition area;

[0048] A temperature collector arrangement module is used to arrange the temperature collectors symmetrically along the circumference of the gas container in the available temperature collection area according to a preset arrangement method to determine a first temperature collection group and a second temperature collection group;

[0049] The temperature dynamic acquisition module sequentially instructs the first temperature acquisition group and the second temperature acquisition group to acquire the outer wall temperature using a preset dynamic detection and adjustment method to determine the outer wall temperature information;

[0050] Calculate the gas flow value based on the outer wall temperature information and the preset flow calculation formula;

[0051] The temperature acquisition correction module matches the corresponding temperature acquisition intervention coefficient according to the ambient temperature and performs corresponding temperature correction calculations to correct the temperature acquisition intervention brought about by the environment;

[0052] The flow conversion module calculates the corresponding gas flow value according to the preset flow rate and wall temperature difference law;

[0053] The collector layout planning module plans the temperature collection area suitable for the layout of the temperature collector according to the container model analysis, and plans the mirrored temperature collector detection position for the temperature collector to be installed;

[0054] A memory for storing a program of any one of the gas flow in-situ measurement verification methods;

[0055] The program in the processor and the memory can be loaded and executed by the processor to implement any one of the gas flow in-situ measurement and verification methods.

[0056] By adopting the above technical solution, temperature collectors are symmetrically arranged on the outer wall of the gas container, and dynamic outer wall temperature information is collected, so that temperature detection can be performed without inserting the temperature collector into the gas container, thereby reducing the probability of inaccurate airflow detection due to poor airtightness.

[0057] In summary, the present application includes at least one of the following beneficial technical effects:

[0058] 1. Symmetrically arrange temperature collectors on the outer wall of the gas container and dynamically collect the outer wall temperature information, so that temperature detection can be performed without inserting the temperature collector into the gas container, thereby reducing the probability of inaccurate airflow detection caused by poor air tightness;

[0059] 2. The method of alternately collecting the outer wall temperature information can collect the temperature information of multiple positions more comprehensively, so that even if the temperature distribution of the gas generated by the container is uneven due to the container convection in the gas container, reliable outer wall temperature information can still be obtained, which helps to improve the calculation accuracy of the gas flow. At the same time, the two groups of temperature collectors can be used as backup for each other, so that when one group of temperature collectors is abnormal or damaged, the corresponding temperature collection operation can still be carried out, thereby improving the reliability and stability of the detection;

[0060] 3. When the first temperature collection group and the second temperature collection group collect the outer wall temperature information alternately, the ambient temperature is detected and analyzed, and the temperature collection intervention coefficient is calculated based on the matching to correct the measurement error caused by the temperature collector being affected by the external environment, which helps to further improve the detection accuracy of the outer wall temperature information. BRIEF DESCRIPTION OF THE DRAWINGS

[0061] Figure 1 It is a method flow chart of steps S100 to S103 in this application.

[0062] Figure 2 It is a method flow chart of steps S200 to S203 in this application.

[0063] Figure 3 It is a method flow chart of steps S300 to S303 in this application.

[0064] Figure 4 It is a method flow chart of steps S400 to S403 in this application.

[0065] Figure 5 It is a method flow chart of steps S500 to S502 in this application.

[0066] Figure 6 It is a method flow chart of steps S600 to S602 in this application.

[0067] Figure 7 It is a schematic diagram of the module structure of the gas flow in-situ measurement and calibration system in this application.

[0068] Figure 8 It is a schematic diagram of the system connection between the gas flow in-situ measurement and calibration system and the semiconductor processing system in this application. DETAILED DESCRIPTION

[0069] In order to make the purpose, technical solutions and advantages of this application more clear, the following Figure 1-8 It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0070] The embodiments of the present invention are further described in detail below in conjunction with the accompanying drawings.

[0071] The embodiment of the present application discloses a method for in-situ measurement and calibration of gas flow, which performs model analysis on the gas container in advance to divide an available temperature collection area that is convenient for a temperature collector to collect effective outer wall temperature information, and respectively sets a symmetrical first temperature collection group and a second temperature collection group to dynamically and alternately collect the outer wall of the gas container, so that the corresponding gas flow can be calculated based on the collected temperature, thereby improving the accuracy of gas flow detection without opening a hole in the gas container, which helps to improve the sealing of the gas container.

[0072] Reference Figure 1 The method flow of the gas flow in-situ measurement verification method includes the following steps:

[0073] Step S100: Perform a three-dimensional model analysis on the gas container in advance to determine an available temperature acquisition area.

[0074] The available temperature collection area is the area on the gas container that is convenient for the installation of the temperature collector. During the installation process of different gas containers, corresponding pipelines need to be installed on the outside of the container. This area is not suitable for arranging the temperature collector. Therefore, by analyzing the three-dimensional model of the gas container, the area that does not require pipeline connection and has no obstacles on the surface can be screened out for marking. The gas container model can be obtained by searching through the pre-set three-dimensional drawing library. Different gas container models have corresponding specifications, and gas containers of different specifications have different temperature collection areas.

[0075] Step S101: symmetrically arranging temperature collectors in the available temperature collection area along the circumference of the gas container in a preset arrangement method to determine a first temperature collection group and a second temperature collection group.

[0076] After the available temperature collection area is divided, the temperature collectors are arranged by a preset arrangement method, so that the temperature collectors are divided into a first temperature collection group and a second temperature collection group, and the first temperature collection group and the second temperature collection group are arranged symmetrically along the axis of the gas container.

[0077] For example, on a cylindrical gas container, the first temperature collection group and the second temperature collection group are arranged in a spiral shape, so that no matter whether the first temperature collection group is independently collecting temperature or the second temperature collection group is independently collecting temperature, a temperature sample of the wall of the gas container can be obtained. When the first temperature collection group and the second temperature collection group perform alternating collection, a more uniform container outer wall temperature value sample in three-dimensional orientation can be obtained. Since the first temperature collection group and the second temperature collection group are symmetrically arranged, when the collection is performed alternately in a short time, two groups of symmetrically detected container outer wall temperature values ​​can be obtained, and the detection rate and value reliability are higher. In this embodiment, the temperature collector is a temperature sensor. The specific arrangement method is further explained in the subsequent steps.

[0078] In addition, the purpose of setting up two groups of temperature collection groups is not only to be able to more efficiently and accurately collect instantaneous temperature changes, but also to enable the two groups of temperature collectors to replace each other for independent temperature collection. Therefore, when one group of temperature collectors is damaged, the other group of temperature collectors can still work and is not easily affected in the collection of outer wall temperature information.

[0079] Step S102: instructing the first temperature collection group and the second temperature collection group to collect the outer wall temperature in sequence using a preset dynamic detection and adjustment method to determine the outer wall temperature information.

[0080] The dynamic detection and adjustment method is to instruct the first temperature acquisition group and the second temperature acquisition group to alternately collect the outer wall temperature. The specific adjustment steps will be further described in the following. The method of alternately collecting the outer wall temperature information by the first temperature acquisition group and the second temperature acquisition group can make it possible to effectively detect from multiple positions even when the airflow in the gas container is convective. The gas flow calculation at the corresponding position can be realized through the temperature at different positions, so that the detection result is more in line with the actual situation. The temperatures collected by different temperature acquisition groups are recorded to obtain multiple outer wall temperature detection parameters, which are defined as outer wall temperature information.

[0081] Step S103: Calculate according to the outer wall temperature information and a preset flow calculation formula to determine the gas flow value.

[0082] By calculating according to the preset flow calculation formula, the relationship between the outer wall temperature information and the corresponding gas flow can be obtained, and the gas flow value can be calculated, thereby completing the verification of other flows through temperature detection. The calculation formula used is as follows:

[0083] ,

[0084] ,

[0085] in, represents the standard volume flow rate calculated for the i-th time, It indicates the density under standard conditions. represents the sum of the volume of the cavity and the intake pipe, is the gas constant, Indicates the cavity wall temperature, which is obtained by detecting the temperature collector arranged on the wall of the gas container. represents the difference between the average temperature in the cavity and the wall temperature, and calculates The average temperature in the cavity and the wall temperature difference are analyzed by presetting the training model to form a corresponding analysis formula, so that when the outer wall temperature of the gas container is collected, the , It represents the mean value of the volume flow rate from the 1st to the i-th standard condition.

[0086] Among them, the pre-set training model is an algebraic training model. The calculation formula of is embedded in the algebraic training model, specifically: ,in, represents the initial temperature in the cavity, represents the specific heat of gas at constant volume, represents the gas adiabatic index, represents the convective heat transfer coefficient, represents the area of ​​the cavity inner wall, Indicates the preset mass flow rate of the mass flow controller. , , , All are non-variable values, which can be obtained by looking up the table and pre-entered into the algebraic training model by the staff. This can be found by looking up the design drawings of the gas container. When the temperature sensor collects the initial temperature in the cavity When the initial temperature , and then it is input into the algebraic training model to calculate .

[0087] Reference Figure 2 , the dynamic detection and adjustment method includes:

[0088] Step S200: when a temperature acquisition signal is received, instruct the first temperature acquisition group or the second temperature acquisition group to perform temperature acquisition.

[0089] The temperature acquisition signal is a control signal that instructs the temperature collector to collect the outer wall temperature. When the temperature acquisition signal is received, it indicates that temperature information will be collected. At this time, the first temperature acquisition group and the second temperature acquisition group are instructed to collect temperature, thereby facilitating the subsequent calculation of gas flow.

[0090] Step S201: Obtain the gas flow rate of the gas container for calculation and analysis to determine the gas flow rate change rate.

[0091] The gas flow rate detection sensor can detect the rate of change of the gas flow rate at the gas flow outlet of the gas container, and define the rate of change as the gas flow rate change rate, so as to facilitate subsequent further analysis. The purpose of detecting the gas flow rate change rate is to find out whether the current gas flow rate has changed significantly within a unit time, so as to reflect whether the airflow in the gas container has changed dramatically. When the airflow has a significant change in flow rate, it is easy to generate a certain amount of internal convection, which makes the temperature of the gas transferred to the gas container uneven.

[0092] Step S202: when the gas flow rate change rate is higher than the preset stable flow rate change rate, instruct the first temperature acquisition group and the second temperature acquisition group to perform alternating temperature acquisition.

[0093] The stable flow rate change rate is a pre-set flow rate change rate value, indicating that the gas flow rate is in a state of low change. The specific stable flow rate change rate is set by the staff according to the actual situation. When the airflow change rate is higher than the stable flow rate change rate, it means that the temperature distribution of the outer wall of the gas container is prone to uneven. At this time, it is necessary to comprehensively collect the temperature of the outer wall of the gas container and calculate the average value to eliminate the impact of uneven temperature distribution. At this time, the first temperature collection group and the second temperature collection group are instructed to alternately collect the outer wall temperature at different positions.

[0094] By alternately collecting temperature, energy consumption can be reduced to a certain extent compared to continuous temperature collection. The reason is that when two groups of temperature collectors collect temperatures at multiple collection locations, the use of relatively more temperature collectors will cause an increase in energy consumption. Therefore, by alternately collecting temperatures with two groups of temperature collection groups, energy consumption can be reduced to a certain extent.

[0095] Step S203: When the gas flow rate change rate is equal to or less than the preset stable flow rate change rate, the alternating temperature acquisition of the first temperature acquisition group and the second temperature acquisition group is stopped.

[0096] When the gas flow rate change rate is equal to or less than the preset stable flow rate change rate, it means that the gas flow rate is stable, and it is not easy to generate gas convection inside the gas container, so that the temperature is not easy to be unevenly distributed. At this time, there is no need to alternately collect the outer wall temperature to reduce the use of temperature collectors and energy consumption. In addition, another set of unactivated collectors can be used as backup temperature collectors.

[0097] Reference Figure 3 When the first temperature collection group and the second temperature collection group are replaced to collect temperature, the method further includes:

[0098] Step S300: collecting the peripheral temperature of the outer wall of the container to determine the ambient temperature.

[0099] The purpose of collecting ambient temperature is to find out whether the ambient temperature will affect the collection of the temperature collector. By setting a corresponding temperature detector on the surface of the gas container, the ambient temperature around the gas container can be detected.

[0100] Step S301: If the ambient temperature is within a preset ambient intervention temperature range, a matching analysis is performed according to the ambient temperature to determine a temperature acquisition intervention coefficient.

[0101] The environmental intervention temperature range is a pre-set temperature range value, which means that when the temperature in the environment reaches a certain temperature range, it will affect the detection result of the temperature collector on the outer wall of the gas container, and the temperature collection of the temperature collector needs to be corrected accordingly. When making corrections, an intervention coefficient database is established in advance, and different temperature collection intervention coefficients are stored in the intervention coefficient database, and the environmental temperatures matching the different intervention coefficients are stored. When the environmental temperature is input, the corresponding temperature collection intervention coefficient is automatically matched and output for subsequent calls.

[0102] Step S302: Perform temperature correction calculation based on the temperature acquisition intervention coefficient and the outer wall temperature information to determine the corrected outer wall temperature information.

[0103] After matching the temperature acquisition intervention coefficient, the corrected outer wall temperature information can be obtained by multiplying the external temperature information and the temperature acquisition intervention coefficient, and is defined as the corrected outer wall temperature information.

[0104] Step S303: Calculation is performed based on the corrected outer wall temperature information and a preset flow calculation formula.

[0105] After obtaining the corrected outer wall temperature information, by bringing the corrected outer wall temperature information into the flow calculation formula for calculation, a gas flow detection value that is more in line with the actual situation can be obtained.

[0106] Reference Figure 4 , when collecting the outer wall temperature, it also includes:

[0107] Step S400: performing a self-check on the temperature collectors of the first temperature collection group and the second temperature collection group to find abnormal temperature collectors.

[0108] During the process of collecting the outer wall temperature, by performing self-checks on the temperature collectors of the first temperature collection group and the second temperature collection group, it is possible to find out the temperature collectors that cannot work normally or fail when collecting temperature, mark the temperature collectors and define them as abnormal temperature collectors.

[0109] Step S401: When the number of abnormal temperature collectors is greater than a preset basic number, the abnormal temperature collectors are marked to determine the abnormal positions and adjacent temperature collectors.

[0110] The basic number is a pre-set positive integer value. In this embodiment, the basic number is one. When the number of abnormal temperature collectors is greater than one, it indicates that there is an abnormal temperature collector. In this case, the position of the abnormal temperature collector is marked and the position is defined as an abnormal position. The two temperature collectors adjacent to the abnormal position are defined as adjacent temperature collectors for further analysis.

[0111] Step S402: Analyze the spacing between the abnormal position and the adjacent temperature collectors, and match them according to the spacing to determine the temperature transfer coefficient.

[0112] After knowing the abnormal position and the adjacent temperature collector, the distance between the temperature collector and the abnormal position is analyzed. When the airflow is stably output in the gas container, different interval distances will produce corresponding temperature transfer changes. By pre-establishing a temperature transfer coefficient matching database, different interval distances are stored in the temperature transfer coefficient matching database, and the temperature transfer coefficients corresponding to different interval distances are stored. When the interval distance is input, the temperature transfer coefficient is matched and output.

[0113] Step S403: Calculate based on the temperature transfer coefficient and the adjacent temperature information collected by the adjacent temperature collector to determine the supplementary temperature information of the abnormal position.

[0114] After knowing the temperature transfer coefficient, the outer wall temperature information collected by the adjacent temperature collector is defined as the adjacent temperature information. The outer wall temperature value at the abnormal position can be obtained by multiplying the temperature corresponding to the adjacent temperature information and the temperature transfer coefficient. The outer wall temperature value is defined as supplementary temperature information to facilitate the calculation of the corresponding gas flow value through the supplementary temperature information.

[0115] Reference Figure 5 , the model analysis of the gas container includes:

[0116] Step S500: performing model acquisition and model feature analysis on the gas container model to determine an unavailable temperature acquisition area of ​​the gas container.

[0117] When analyzing the gas container model, by performing feature analysis on the three-dimensional model of the gas container, the area on the gas container that requires pipeline installation or is uneven can be analyzed, and the area can be marked and defined as an unavailable temperature collection area.

[0118] Step S501: marking the unavailable temperature collection area to determine the remaining regular area.

[0119] After marking the unavailable temperature collection area, other areas except the unavailable temperature collection area can be known, and the other areas are defined as remaining regular areas.

[0120] Step S502: Perform a gas container wall thickness analysis based on the gas container model and the remaining conventional areas, and mark the area with uniform wall thickness as an available temperature acquisition area.

[0121] There are areas with different wall thicknesses in the remaining conventional areas. By performing corresponding model wall thickness analysis on the gas container, we can find out the areas with relatively uniform wall thickness. We can mark these areas and define them as areas that can be used for temperature collection, so that when the temperature collector is subsequently arranged and alternating temperature collection is performed, it is not easy to have excessive temperature detection deviations. When performing wall thickness analysis, the 3D model of the gas container can be input into 3D analysis software, such as Solidworks, Geomcaliper or UG, and the specific wall thickness values ​​of different areas can be obtained by using the wall thickness analysis tool.

[0122] Reference Figure 6 , when the temperature collectors are arranged symmetrically, they include:

[0123] Step S600: performing analysis based on the available temperature acquisition area and the gas container model to determine a first symmetric area and a second symmetric area.

[0124] By symmetrically dividing the available temperature collection area, the available temperature collection area can be divided into a first symmetrical area and a second symmetrical area, and the first symmetrical area and the second symmetrical area are symmetrical about the axis of the gas container model.

[0125] Step S601: Perform detection position planning according to the first symmetric area and the preset minimum interval distribution parameter to determine detection position information, where the detection position information includes the detection position and the number of detection positions.

[0126] The minimum interval distribution parameters are the pre-set minimum interval distance and interval direction. By arranging according to the minimum interval distance and interval direction, the distribution position and number of temperature collectors distributed in the first symmetrical area can be known. The distribution position is defined as the detection position, and the distribution number is defined as the number of detection positions. The detection position and the number of detection positions are recorded to form the detection position information.

[0127] Step S602: mirror planning is performed on the second symmetrical area according to the detection position information to determine the detection position of the temperature collector.

[0128] After knowing the detection position and the number of detections, since the first symmetrical area and the second symmetrical area are arranged symmetrically about the container collector, the detection position in the first symmetrical area is mirrored to the second symmetrical area to quickly obtain the detection position of the temperature collector in the second symmetrical area, so as to facilitate the arrangement of the temperature collector in the second symmetrical area.

[0129] Reference Figure 7 Based on the same inventive concept, an embodiment of the present invention provides a gas flow in-situ measurement and verification system, including:

[0130] The acquisition area analysis module performs a three-dimensional model analysis on the gas container in advance to determine the available temperature acquisition area;

[0131] A temperature collector arrangement module is used to arrange the temperature collectors symmetrically along the circumference of the gas container in the available temperature collection area according to a preset arrangement method to determine a first temperature collection group and a second temperature collection group;

[0132] The temperature dynamic acquisition module sequentially instructs the first temperature acquisition group and the second temperature acquisition group to acquire the outer wall temperature using a preset dynamic detection and adjustment method to determine the outer wall temperature information;

[0133] Calculate the gas flow value based on the outer wall temperature information and the preset flow calculation formula;

[0134] The temperature acquisition correction module matches the corresponding temperature acquisition intervention coefficient according to the ambient temperature and performs corresponding temperature correction calculations to correct the temperature acquisition intervention brought about by the environment;

[0135] The flow conversion module calculates the corresponding gas flow value according to the preset flow rate and wall temperature difference law;

[0136] The collector layout planning module plans the temperature collection area suitable for the layout of the temperature collector according to the container model analysis, and plans the mirrored temperature collector detection position for the temperature collector to be installed;

[0137] A memory for storing a program of any one of the gas flow in-situ measurement verification methods;

[0138] The program in the processor and the memory can be loaded and executed by the processor to implement any one of the gas flow in-situ measurement and verification methods.

[0139] Reference Figure 8 In the semiconductor manufacturing process, the corresponding process gas is selected from the gas source system, and the process gas is output after being detected by the MFC precision gas flow detection instrument and then passed into the processing chamber to assist semiconductor processing. At the same time, the in-situ calibration device connected in parallel with the processing chamber detects and controls the gas flow from time to time to achieve the measurement and calibration of the MFC precision gas flow monitoring instrument.

[0140] Those skilled in the art can clearly understand that for the convenience and simplicity of description, only the division of the above-mentioned functional modules is used as an example. In actual applications, the above-mentioned functions can be assigned to different functional modules as needed, that is, the internal structure of the device is divided into different functional modules to complete all or part of the functions described above. The specific working process of the system, device and unit described above can refer to the corresponding process in the aforementioned method embodiment, and will not be repeated here.

[0141] An embodiment of the present invention provides a computer-readable storage medium storing a computer program that can be loaded by a processor and execute a gas flow in-situ measurement and verification method.

[0142] Computer storage media include, for example, various media that can store program codes, such as USB flash drives, mobile hard disks, read-only memories (ROM), random access memories (RAM), magnetic disks or optical disks.

[0143] Based on the same inventive concept, an embodiment of the present invention provides an intelligent terminal, including a memory and a processor, wherein the memory stores a computer program that can be loaded by the processor and execute a gas flow in-situ measurement and calibration method.

[0144] Those skilled in the art can clearly understand that for the convenience and simplicity of description, only the division of the above-mentioned functional modules is used as an example. In actual applications, the above-mentioned functions can be assigned to different functional modules as needed, that is, the internal structure of the device is divided into different functional modules to complete all or part of the functions described above. The specific working process of the system, device and unit described above can refer to the corresponding process in the aforementioned method embodiment, and will not be repeated here.

[0145] The above are all preferred embodiments of the present application, and are not intended to limit the protection scope of the present application. Any feature disclosed in this specification (including the abstract and drawings), unless otherwise stated, can be replaced by other equivalent or alternative features with similar purposes. That is, unless otherwise stated, each feature is only an example of a series of equivalent or similar features.

Claims

1. A gas flow in-situ measurement and verification method, characterized in that: include: Conduct a three-dimensional model analysis of the gas container in advance to determine the available temperature collection area; The temperature collectors are symmetrically arranged along the circumference of the gas container in the available temperature collection area according to a preset arrangement method to determine a first temperature collection group and a second temperature collection group; Instructing the first temperature collection group and the second temperature collection group to collect the outer wall temperature in sequence using a preset dynamic detection and adjustment method to determine the outer wall temperature information; Calculate the gas flow value based on the outer wall temperature information and the preset flow calculation formula; The first temperature collection group and the preset flow calculation formula are as follows: ， ， in, represents the standard volume flow rate calculated for the i-th time, It indicates the density under standard conditions. It represents the sum of the volume of the cavity and the intake pipe. is the gas constant, represents the cavity wall temperature, represents the difference between the average temperature in the cavity and the wall temperature, It represents the mean value of the volume flow rate from the 1st to the i-th standard condition.

2. The gas flow in-situ measurement and verification method according to claim 1, characterized in that: The dynamic detection and adjustment method comprises: When receiving the temperature acquisition signal, instructing the first temperature acquisition group or the second temperature acquisition group to perform temperature acquisition; Obtaining the gas flow rate of the gas container for calculation and analysis to determine the gas flow rate change rate; When the gas flow rate change rate is higher than the preset stable flow rate change rate, instructing the first temperature acquisition group and the second temperature acquisition group to perform alternating temperature acquisition; When the gas flow rate change rate is equal to or less than the preset stable flow rate change rate, the alternating temperature acquisition of the first temperature acquisition group and the second temperature acquisition group is stopped.

3. The gas flow in-situ measurement and verification method according to claim 2, characterized in that: When the first temperature collection group and the second temperature collection group are replaced to collect temperature, the method further includes: Collect the peripheral temperature of the outer wall of the container to determine the ambient temperature; If the ambient temperature is within the preset ambient intervention temperature range, a matching analysis is performed based on the ambient temperature to determine the temperature acquisition intervention coefficient; Perform temperature correction calculation based on the temperature acquisition intervention coefficient and the outer wall temperature information to determine the corrected outer wall temperature information; Calculation is performed based on the corrected outer wall temperature information and the preset flow calculation formula.

4. The gas flow in-situ measurement and verification method according to claim 2, characterized in that: When collecting the outer wall temperature, it also includes: Performing self-checks on the temperature collectors of the first temperature collection group and the second temperature collection group to find abnormal temperature collectors; When the number of abnormal temperature collectors is greater than a preset basic number, the abnormal temperature collectors are marked to determine the abnormal position and adjacent temperature collectors; Analyze the spacing between the abnormal location and the adjacent temperature collectors, and match them according to the spacing to determine the temperature transfer coefficient; Calculation is performed based on the temperature transfer coefficient and the adjacent temperature information collected by the adjacent temperature collector to determine the supplementary temperature information of the abnormal position.

5. The gas flow in-situ measurement and verification method according to claim 1, characterized in that: Model analysis of gas containers includes: Performing model acquisition on the gas container model and performing model feature analysis to determine an unusable temperature acquisition area of ​​the gas container; Mark the unavailable temperature collection areas to identify the remaining conventional areas; The gas container wall thickness analysis is performed based on the gas container model and the remaining conventional areas, and the area with uniform wall thickness is marked as the available temperature acquisition area.

6. The gas flow in-situ measurement and verification method according to claim 1 or 5, characterized in that: Symmetrical arrangement of temperature collectors includes: Performing analysis based on the available temperature acquisition area and the gas container model to determine a first symmetric area and a second symmetric area; Performing detection position planning according to the first symmetric area and the preset minimum interval distribution parameter to determine detection position information, wherein the detection position information includes the detection position and the number of detection positions; The second symmetrical area is mirrored according to the detection position information to determine the detection position of the temperature collector.

7. A gas flow in-situ measurement and verification system, characterized in that: include: The acquisition area analysis module performs a three-dimensional model analysis on the gas container in advance to determine the available temperature acquisition area; A temperature collector arrangement module is used to arrange the temperature collectors symmetrically along the circumference of the gas container in the available temperature collection area according to a preset arrangement method to determine a first temperature collection group and a second temperature collection group; The temperature dynamic acquisition module sequentially instructs the first temperature acquisition group and the second temperature acquisition group to acquire the outer wall temperature using a preset dynamic detection and adjustment method to determine the outer wall temperature information; Calculate the gas flow value based on the outer wall temperature information and the preset flow calculation formula; The temperature acquisition correction module matches the corresponding temperature acquisition intervention coefficient according to the ambient temperature and performs corresponding temperature correction calculations to correct the temperature acquisition intervention brought about by the environment; The flow conversion module calculates the corresponding gas flow value according to the preset flow rate and wall temperature difference law; The collector layout planning module plans the temperature collection area suitable for the layout of the temperature collector according to the container model analysis, and plans the mirrored temperature collector detection position for the temperature collector to be installed; A memory for storing a program of the gas flow in-situ measurement and verification method according to any one of claims 1 to 6; The program in the memory can be loaded and executed by the processor to implement the gas flow in-situ measurement and verification method as claimed in any one of claims 1 to 6.

Images