A five-degree-of-freedom laser interferometer and measurement method for the movement of equal-thickness interference fringes

Abstract

This invention discloses a five-degree-of-freedom laser interferometer and measurement method for moving equal-thickness interference fringes, relating to the field of laser interferometric multi-degree-of-freedom motion measurement technology. The invention designs a two-way laser interferometric measurement section comprising a beam splitter, a reflective-coated beam splitter, a target test cube, and an observation camera. First, by adjusting the position and orientation of each reflective-coated beam splitter and the target test cube, two translational degrees of freedom are measured. Then, by rotating the target reflector of the target test cube, the rotational degrees of freedom of the two sections are measured. These rotational degrees of freedom measurements are combined to achieve three rotational degrees of freedom, resulting in a total of five degrees of freedom motion measurement. The overall structure is simple, and the beam experiences minimal reflection and transmission during transmission, minimizing parallelism errors and significantly improving measurement accuracy.

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