Flat six-degree-of-freedom micro-motion device

Abstract

The application provides a flat six-freedom micro-motion device, belonging to the technical field of nanometer positioning, comprising: an upper motion platform, which is provided with a first flexible component arranged integrally with the upper motion platform; a first piezoelectric ceramic stack actuator, which is connected with the input end of the first flexible component; a lower motion platform, which is provided with a second flexible component arranged integrally with the lower motion platform; the output end of the second flexible component is connected with the upper motion platform through a fastener; a second piezoelectric ceramic stack actuator, which is connected with the input end of the second flexible component; a first sensing component, one end of which is connected to the lower motion platform and the other end of which is directed to the edge of the upper motion platform; and a second sensing component, one end of which is connected to the lower motion platform and the other end of which is directed to the upper motion platform. The application realizes full-flexible detection without assembly and has a compact structure and a small volume.

Description

TECHNICAL FIELD

[0001] The present application belongs to the technical field of nanometer positioning, and relates to a micro-motion device, in particular to a flat six-degree-of-freedom micro-motion device. BACKGROUND

[0002] With the development of science and technology, micro-nano technology is increasingly applied in the fields of semiconductor manufacturing, precision machining, nanotechnology, microelectronic engineering, precision optics and bioengineering, and the demand for high-precision micro-positioning mechanisms is rising.

[0003] For example, a spatial six-degree-of-freedom parallel micro-motion platform disclosed in Chinese patent (CN 108081247 A) is composed of a moving platform, a fixed platform and six structural identical support chains. A six-degree-of-freedom large-stroke uncoupling large-hollow series-parallel piezoelectric micro-motion platform disclosed in Chinese patent (CN 109687757 B) is composed of a base, a moving table, a second platform and a first platform. The platform connects the second platform and the first platform through six guide units, and each guide unit is internally provided with a corresponding driving unit to realize accurate control. Chinese patent (CN 116141835 A) proposes a high-precision large-size six-degree-of-freedom micro-motion device, which can realize accurate micro-adjustment of the position of three axes and the angle of three-axis rotation, and is beneficial to accurately adjusting the position and angle of a workpiece placement table.

[0004] However, the above-mentioned micro-motion platforms or micro-motion devices are not all flexible, and need to be assembled, which will cause friction between adjacent two structures. In addition, the existing micro-motion platforms or micro-motion devices have a relatively large structure and are not compact. SUMMARY

[0005] The present application aims to solve the above-mentioned problems of the prior art, and proposes a flat six-degree-of-freedom micro-motion device which can realize a full flexible structure, does not need to be assembled, and has a relatively small size.

[0006] The purpose of the present application can be achieved by the following technical scheme: a flat six-degree-of-freedom micro-motion device, comprising:

[0007] an upper moving platform, and a first flexible component integrally arranged on the upper moving platform, wherein the number of the first flexible components is three, and the three first flexible components are arranged in a central symmetry, and the output end of the first flexible component is connected with the upper moving platform;

[0008] three first piezoelectric ceramic stack actuators connected to the upper moving platform through epoxy resin glue, and the driving end of each first piezoelectric ceramic stack actuator is connected with the input end of each first flexible component correspondingly;

[0009] The lower moving platform is arranged in parallel with the upper moving platform, and a second flexible assembly is arranged on the lower moving platform in an integral manner.

[0010] The three second piezoelectric ceramic stack actuators are connected to the lower moving platform through epoxy resin glue, and the driving ends of the three second piezoelectric ceramic stack actuators are connected to the input ends of the three second flexible assemblies in a corresponding manner.

[0011] The three first sensing assemblies are connected to the lower moving platform at one end and face the edge of the upper moving platform at the other end, wherein the displacement vectors in three directions of the upper moving platform are detected by the three first sensing assemblies to form the displacement in the X-axis direction, the displacement in the Y-axis direction and the angle θ of rotation around the Z-axis. Z ;

[0012] The three second sensing assemblies are connected to the lower moving platform at one end and face the upper moving platform at the other end, wherein the displacement vectors in three directions of the lower moving platform are detected by the three second sensing assemblies to form the displacement in the Z-axis direction, the angle θ of rotation around the X-axis and the angle θ of rotation around the Y-axis. X Y .

[0013] In the above-mentioned flat six-degree-of-freedom micro-motion device, the upper and lower sides of the first flexible assembly along the output direction of the first piezoelectric ceramic stack actuator are flush with the upper and lower sides of the upper moving platform, so that the first flexible assembly is arranged horizontally; the upper and lower sides of the second flexible assembly along the output direction of the second piezoelectric ceramic stack actuator are respectively protruded from the corresponding upper and lower sides of the lower moving platform, so that the second flexible assembly is arranged vertically, wherein the included angle between the output directions of any two adjacent first piezoelectric ceramic stack actuators and the included angle between the output directions of any two adjacent second piezoelectric ceramic stack actuators are both 120°.

[0014] In the above-mentioned flat six-degree-of-freedom micro-motion device, the three first piezoelectric ceramic stack actuators connected to the upper moving platform are arranged in a ring shape around the center of the upper moving platform, the three second piezoelectric ceramic stack actuators connected to the lower moving platform are arranged in a divergent manner around the center of the lower moving platform, and the output ends of the three second piezoelectric ceramic stack actuators all face away from the center of the lower moving platform.

[0015] ​In the flat six-degree-of-freedom micro-motion device, first guide structures are arranged at the input end and the output end of the first flexible assembly, and second guide structures are arranged at the input end and the output end of the second flexible assembly, wherein the first guide structures and the second guide structures are arranged in a sheet shape, or in a column shape, or in a strip shape, and the two first guide structures at the input end and the output end of the first flexible assembly are parallel to each other, and the two second guide structures at the input end and the output end of the second flexible assembly are parallel to each other.

[0016] In the flat six-degree-of-freedom micro-motion device, three first sensing assemblies are connected to adjacent sides of the lower motion platform, and two of the three first sensing assemblies are symmetrically arranged about the X-axis, and the other first sensing assembly is arranged on the Y-axis. Z The displacement in the X-axis direction is calculated by the average of the data measured by the two first sensing assemblies symmetrically arranged about the X-axis, and the angle of rotation about the Z-axis is calculated by the difference between the data measured by the two first sensing assemblies and the corresponding data.

[0017] In the flat six-degree-of-freedom micro-motion device, one of the three second sensing assemblies is opposite to the center of the upper motion platform, and the other two second sensing assemblies are arranged on the X-axis and the Y-axis respectively and at the edges of the lower motion platform, and the second sensing assembly on the X-axis is arranged opposite to the two first sensing assemblies symmetrically arranged about the X-axis, and the second sensing assembly on the Y-axis is arranged opposite to the first sensing assembly on the Y-axis. X The angle of rotation about the X-axis is calculated by the difference between the data measured by the second sensing assembly opposite to the center of the upper motion platform and the data measured by the corresponding second sensing assembly, and the angle of rotation about the Y-axis is calculated by the difference between the data measured by the second sensing assembly on the X-axis and the data measured by the corresponding second sensing assembly. Y .

[0018] In the flat six-degree-of-freedom micro-motion device, the first sensing assembly comprises a first support, one end of the first support is connected to the lower motion platform, and the other end of the first support is connected with a first capacitive displacement sensor, wherein the first capacitive displacement sensor faces the edge of the upper motion platform, and a first preset distance is arranged between the first capacitive displacement sensor and the upper motion platform.

[0019] In the flat six-degree-of-freedom micro-motion device, the second sensing assembly comprises a second support, one end of the second support is connected to the lower motion platform, and the other end of the second support is connected with a second capacitive displacement sensor, wherein the second capacitive displacement sensor faces the upper motion platform, and a corresponding second preset distance is arranged between the second capacitive displacement sensor and the upper motion platform.

[0020] In the flat six-degree-of-freedom micro-motion device, the distances between the second supports on which the three second capacitive displacement sensors are located and the upper motion platform are respectively d1, d2 and d3, the distance between the second capacitive displacement sensor on the X-axis and the second capacitive displacement sensor corresponding to the center of the upper motion platform is L1, the distance between the second capacitive displacement sensor on the Y-axis and the second capacitive displacement sensor corresponding to the center of the upper motion platform is L2, and the distances between the three first capacitive sensors and the corresponding sides of the upper motion platform are respectively d4, d5 and d6.

[0021] The data measured by the second capacitive displacement sensor corresponding to the center of the upper motion platform is the displacement value in the Z-axis direction.

[0022] The data measured by the second capacitive displacement sensor on the Y-axis and the data measured by the second capacitive displacement sensor corresponding to the center of the upper motion platform can be used to calculate the angle of rotation around the X-axis.

[0023] The data measured by the second capacitive displacement sensor on the X-axis and the data measured by the second capacitive displacement sensor corresponding to the center of the upper motion platform can be used to calculate the angle of rotation around the Y-axis.

[0024] The data measured by the first capacitive displacement sensor on the Y-axis is the displacement value in the Y-axis direction.

[0025] The data measured by the two first capacitive displacement sensors symmetrically arranged on the X-axis can be used to calculate the displacement value (d5+d6) / 2 in the X-axis direction and the angle of rotation around the Z-axis.

[0026] Compared with the prior art, the beneficial effects of the present application are:

[0027] The present invention provides a flat six-degree-of-freedom micro-motion device, which achieves fully flexible detection through a first flexible component and a second flexible component. Moreover, the first flexible component and the upper motion platform, which serves as the carrier of the first flexible component, are integrally set together, and the second flexible component and the upper motion platform, which serves as the carrier of the second flexible component, are also integrally set together, eliminating the need for assembly and the corresponding friction, thereby improving measurement accuracy. In addition, both the upper motion platform and the lower motion platform have a flat plate structure, making the entire micro-motion device compact and small in size. Attached Figure Description

[0028] Fig. 1 This is a schematic diagram of the structure of a flat six-degree-of-freedom micro-motion device according to the present invention.

[0029] Fig. 2 This is a partial structural schematic diagram of a flat six-degree-of-freedom micro-motion device according to the present invention.

[0030] Fig. 3 This is a schematic diagram of the structure of the second flexible component in a preferred embodiment of the present invention.

[0031] In the figure, 10 is the upper motion platform; 20 is the first flexible component; 21 is the first guide structure; 30 is the first piezoelectric ceramic stacked actuator; 31 is piezoelectric ceramic stacked actuator one; 32 is piezoelectric ceramic stacked actuator two; 33 is piezoelectric ceramic stacked actuator three; 40 is the lower motion platform; 50 is the second flexible component; 51 is the second guide structure; 60 is the second piezoelectric ceramic stacked actuator; 61 is the piezoelectric ceramic stacked actuator four; 62 is the piezoelectric ceramic stacked actuator five; 63 is the piezoelectric ceramic stacked actuator six; 70 is the first sensing component; 71 is the first support; 72 is the first capacitive displacement sensor; 80 is the second sensing component; 81 is the second support; 82 is the second capacitive displacement sensor. Detailed Implementation

[0032] The following are specific embodiments of the present invention, which are described in conjunction with the accompanying drawings. However, the present invention is not limited to these embodiments.

[0033] It should be noted that all directional indications (such as up, down, left, right, front, back, etc.) in the embodiments of the present invention are only used to explain the relative positional relationship and movement of each component in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indication will also change accordingly.

[0034] like Figs. 1 to 3 As shown, the present invention provides a flat six-degree-of-freedom micro-motion device, comprising:

[0035] An upper moving platform 10 is provided, and a first flexible assembly 20 is arranged on the upper moving platform 10 in an integral manner. The first flexible assembly 20 is provided in three numbers and is arranged in a central symmetry. The output end of the first flexible assembly 20 is connected to the upper moving platform 10.

[0036] Three first piezoelectric ceramic stack actuators 30 are connected to the upper moving platform 10 through epoxy resin glue respectively, and the driving end of the three first piezoelectric ceramic stack actuators 30 is connected to the input end of the three first flexible assemblies 20 respectively.

[0037] A lower moving platform 40 is arranged in parallel with the upper moving platform 10, and a second flexible assembly 50 is arranged on the lower moving platform 40 in an integral manner. The second flexible assembly 50 is provided in three numbers and is arranged in a central symmetry. The output end of the second flexible assembly 50 is connected to the upper moving platform 10 through a fastener.

[0038] Three second piezoelectric ceramic stack actuators 60 are connected to the lower moving platform 40 through epoxy resin glue respectively, and the driving end of the three second piezoelectric ceramic stack actuators 60 is connected to the input end of the three second flexible assemblies 20 respectively.

[0039] Three first sensing assemblies 70 are connected to the lower moving platform 40 at one end and face the edge of the upper moving platform 10 at the other end. The displacement vector in three directions of the upper moving platform 10 is detected through the three first sensing assemblies 70, forming the displacement in the X-axis direction, the displacement in the Y-axis direction, and the angle θ Z of rotation around the Z-axis.

[0040] Three second sensing assemblies 80 are connected to the lower moving platform 40 at one end and face the upper moving platform 10 at the other end. The displacement vector in three directions of the lower moving platform 40 is detected through the three second sensing assemblies 80, forming the displacement in the Z-axis direction, the angle θ X of rotation around the X-axis, and the angle θ Y of rotation around the Y-axis.

[0041] It is worth mentioning that the first flexible assembly 20 and the second flexible assembly 50 in the embodiment are a mechanical structure composed of flexible elements and rigid elements, which utilizes the elastic deformation of the flexible elements to transmit motion and force.

[0042] That is, a whole plate-shaped metal material is cut into a structure with uneven transverse thickness by wire cutting. When the mechanism is subjected to external force, the position with small transverse thickness deforms, thereby forming a corresponding displacement or rotation amount.

[0043] In the embodiment, different flexible components are designed according to different parameters detected by the upper moving platform 10 and the lower moving platform 40, so as to meet the detection of corresponding parameters. In addition, the first flexible component 20 and the second flexible component 50 in the embodiment are also formed on the metal plate in a wire cutting manner, so as to realize the integrated setting of the first flexible component 20 and the upper moving platform 10 and the integrated setting of the second flexible component 50 and the lower moving platform 40.

[0044] In addition, the working principle of the first piezoelectric ceramic stack actuator 30 and the second piezoelectric ceramic stack actuator 60 in the embodiment is based on the piezoelectric effect, which converts electrical energy into mechanical movement. The working principle of the piezoelectric ceramic stack actuator generally includes the following steps: first, apply voltage: when voltage is applied to both ends of the piezoelectric ceramic material, an electric field is generated in the material; second, piezoelectric effect: the crystal structure of the piezoelectric ceramic material changes slightly, causing the size of the material to change slightly, which is proportional to the strength of the electric field; third, mechanical displacement: due to the piezoelectric effect, the piezoelectric ceramic material will undergo slight mechanical displacement; fourth, vibration effect: when the frequency of the electric field is high enough, the piezoelectric ceramic material will produce a vibration effect, so that the actuator produces high-frequency mechanical vibration, achieving high-precision control.

[0045] The flat six-degree-of-freedom micro-motion device provided by the application realizes full-flexible detection through the first flexible component 20 and the second flexible component 50, and the first flexible component 20 and the upper moving platform 10 as the carrier of the first flexible component 20 are integrally arranged, and the second flexible component 50 and the upper moving platform 10 as the carrier of the second flexible component 50 are integrally arranged, without the need for assembly, without the corresponding friction, improving the measurement accuracy, and in addition, the upper moving platform 10 and the lower moving platform 40 are both flat and plate-shaped structures, making the structure of the entire micro-motion device compact and small in size.

[0046] It is worth mentioning that the upper and lower sides of the first flexible component 20 along the output direction of the first piezoelectric ceramic stack actuator 30 are flush with the upper and lower sides of the upper moving platform 10, so that the first flexible component 20 is horizontally arranged; the upper and lower sides of the second flexible component 50 along the output direction of the second piezoelectric ceramic stack actuator 60 are respectively protruded from the corresponding upper and lower sides of the lower moving platform 40, so that the second flexible component 50 is vertically arranged, wherein the included angle between the output directions of any two adjacent first piezoelectric ceramic stack actuators 30 is 120°, and the included angle between the output directions of any two adjacent second piezoelectric ceramic stack actuators 60 is also 120°.

[0047] Further preferably, the three first piezoelectric ceramic stack actuators 30 connected to the upper motion platform 10 are arranged in a ring shape around the center of the upper motion platform 10, the three second piezoelectric ceramic stack actuators 60 connected to the lower motion platform 40 are arranged in a divergent shape around the center of the lower motion platform 40, and the output ends of the three second piezoelectric ceramic stack actuators 60 all face away from the center of the lower motion platform 40.

[0048] Preferably, the first guiding structure 21 is arranged at the input end and the output end of the first flexible assembly 20 respectively, and the second guiding structure 51 is arranged at the input end and the output end of the second flexible assembly 50 respectively, wherein the first guiding structure 21 and the second guiding structure 51 are arranged in a sheet shape, or in a column shape, or in a strip shape, and the two first guiding structures 21 at the input end and the output end of the first flexible assembly 20 are parallel to each other, and the two second guiding structures 51 at the input end and the output end of the second flexible assembly 50 are parallel to each other.

[0049] In the embodiment, the first guiding structure 21 and the second guiding structure 51 can be used as a guide for motion or force, and can reduce parasitic displacement, and can also adjust the stiffness of the first flexible assembly 20 and the second flexible assembly 50.

[0050] Preferably, the three first sensing assemblies 70 are connected to the adjacent two sides of the lower motion platform 40 respectively, and two of the three first sensing assemblies 70 are symmetrically arranged around the X axis, and the other first sensing assembly 70 is located on the axis of the Y axis, wherein the average of the data measured by the two first sensing assemblies 70 symmetrically arranged around the X axis is used to calculate the displacement in the X axis direction, and the difference between the data measured by the two first sensing assemblies 70 and the corresponding measured data is used to calculate the angle θ of rotation around the Z axis. Z The data measured by the first sensing assembly 70 located on the axis of the Y axis is used to calculate the displacement in the Y axis direction.

[0051] Preferably, one of the three second sensing assemblies 80 is located at the center of the upper moving platform 10, the other two of the three second sensing assemblies 80 are located on the X-axis and the Y-axis respectively and at the edge of the lower moving platform 40, and the second sensing assembly 80 on the X-axis is located opposite to the two first sensing assemblies 70 symmetrically arranged with the X-axis as the axis, and the second sensing assembly 80 on the Y-axis is located opposite to the first sensing assembly 70 on the Y-axis, wherein the displacement in the Z-axis direction is calculated by the data measured by the second sensing assembly 80 opposite to the center of the upper moving platform 10, the angle θ of rotation around the X-axis is calculated by the difference between the data measured by the second sensing assembly 80 on the Y-axis and the data measured by the second sensing assembly 80 corresponding to the center of the upper moving platform 10, and the angle θ of rotation around the Y-axis is calculated by the difference between the data measured by the second sensing assembly 80 on the X-axis and the data measured by the second sensing assembly 80 corresponding to the center of the upper moving platform 10. X Y .

[0052] Preferably, the first sensing assembly 70 comprises a first bracket 71 arranged in an L shape, one end of the first bracket 71 is connected to the lower moving platform 40, and the other end of the first bracket 71 is connected with the first capacitive displacement sensor 72, wherein the first capacitive displacement sensor 72 faces the edge of the upper moving platform 10 and is arranged with a corresponding first preset distance from the upper moving platform 10.

[0053] Preferably, the second sensing assembly 80 comprises a second bracket 81 arranged in an I shape, one end of the second bracket 81 is connected to the lower moving platform 40, and the other end of the second bracket 81 is connected with the second capacitive displacement sensor 82, wherein the second capacitive displacement sensor 82 faces the upper moving platform 10 and is arranged with a corresponding second preset distance from the upper moving platform 10.

[0054] It is worth mentioning that the distances between the second brackets 81 where the three second capacitive displacement sensors 82 are located and the upper moving platform 10 are d1, d2, and d3 respectively, the distance between the second capacitive displacement sensor 82 on the X-axis and the second capacitive displacement sensor 82 corresponding to the center of the upper moving platform 10 is L1, the distance between the second capacitive displacement sensor 82 on the Y-axis and the second capacitive displacement sensor 82 corresponding to the center of the upper moving platform 10 is L2, the distances between the three first capacitive sensors and the corresponding sides of the upper moving platform 10 are d4, d5, and d6 respectively, and the distance between the two first capacitive displacement sensors 72 symmetrically arranged with the X-axis as the axis is L6.

[0055] ​The data measured by the second capacitive displacement sensor 82 corresponding to the center of the upper moving platform 10 is the displacement value in the Z-axis direction.

[0056] The data measured by the second capacitive displacement sensor 82 on the Y-axis and the data measured by the second capacitive displacement sensor 82 corresponding to the center of the upper moving platform 10 can be used to calculate the angle of rotation around the X-axis.

[0057] The data measured by the second capacitive displacement sensor 82 on the X-axis and the data measured by the second capacitive displacement sensor 82 corresponding to the center of the upper moving platform 10 can be used to calculate the angle of rotation around the Y-axis.

[0058] The data measured by the first capacitive displacement sensor 72 on the Y-axis is the displacement value in the Y-axis direction.

[0059] The data measured by the two first capacitive displacement sensors 72 symmetrically arranged on the X-axis can be used to calculate the displacement value (d5+d6) / 2 in the X-axis direction and the angle of rotation around the Z-axis.

[0060] For example, before the micro-motion device starts to move, the first piezoelectric ceramic stack actuator 30 and the second piezoelectric ceramic stack actuator 60 are both preloaded to half of the maximum driving voltage, and the displacement is half of the maximum value, so as to form a negative displacement.

[0061] The three first piezoelectric ceramic stack actuators 30 on the upper moving platform 10 are marked as piezoelectric ceramic stack actuator one 31, piezoelectric ceramic stack actuator two 32, and piezoelectric ceramic stack actuator three 33, respectively. The three second piezoelectric ceramic stack actuators 60 on the lower moving platform 40 are marked as piezoelectric ceramic stack actuator four 61, piezoelectric ceramic stack actuator five 62, and piezoelectric ceramic stack actuator six 63, respectively.

[0062] In the upper moving platform 10, when the piezoelectric ceramic stack actuator one 31, the piezoelectric ceramic stack actuator two 32, and the piezoelectric ceramic stack actuator three 33 simultaneously output the same displacement d, an angle of rotation around the Z-axis θ can be generated. Z When the piezoelectric ceramic stack actuator one 31 outputs a displacement of d, and the piezoelectric ceramic stack actuator two 32 and the piezoelectric ceramic stack actuator three 33 output a displacement of -d / 2, a translation in the X-axis direction can be generated. When the piezoelectric ceramic stack actuator two 32 outputs a displacement of -d, and the piezoelectric ceramic stack actuator three 33 outputs a displacement of d, a translation in the Y-axis direction can be generated.

[0063] In the lower motion platform 40, when the piezoelectric ceramic stack actuator four 61, the piezoelectric ceramic stack actuator five 62 and the piezoelectric ceramic stack actuator six 63 simultaneously output the same displacement d, a translation along the Z-axis direction can be generated; when the piezoelectric ceramic stack actuator four 61 outputs a displacement of d, an angle θ of rotation around the X-axis can be generated X ; when the piezoelectric ceramic stack actuator four 61 outputs a displacement of d / 2 and the piezoelectric ceramic stack actuator five 62 or the piezoelectric ceramic stack actuator six 63 outputs a displacement of d, an angle θ of rotation around the Y-axis can be generated Y .

[0064] It should be noted that the terms "first", "second", "one", etc. in the present application are only for the purpose of description, and cannot be understood as indicating or implying the relative importance of the technical features indicated, or implicitly indicating the number of the technical features indicated. Therefore, the features defined as "first", "second" can explicitly or implicitly include at least one of the features. In the description of the present application, the meaning of "a plurality of" is at least two, for example, two, three, etc., unless otherwise specifically limited. The terms "connection", "fixation", etc. should be understood broadly, for example, "fixation" can be fixed connection, or detachable connection, or integral; can be mechanical connection, or electrical connection; can be direct connection, or indirect connection through an intermediate medium; can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise specifically limited. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0065] In addition, the technical solutions of various embodiments of the present application can be combined with each other, but it must be based on the fact that a person skilled in the art can realize it, when the combination of technical solutions appears contradictory or unachievable, it should be considered that the combination of technical solutions does not exist, nor within the scope of protection required by the present application.

[0066] The specific embodiments described herein are merely illustrative of the spirit of the present application. Those skilled in the art of the present application can make various modifications or supplements to the described specific embodiments or replace them with similar ways, without deviating from the spirit of the present application or exceeding the scope defined by the appended claims.

Claims

1. A flat, six-degree-of-freedom micro-motion device, characterized in that, include: An upper motion platform is provided, and a first flexible component is integrally set on the upper motion platform. The number of the first flexible components is three, and the three first flexible components are centrally symmetrically arranged. The output end of the first flexible component is connected to the upper motion platform. Three first piezoelectric ceramic stacked actuators are respectively connected to the upper motion platform by epoxy resin, and the driving ends of the three first piezoelectric ceramic stacked actuators are respectively connected to the input ends of the three first flexible components. The lower motion platform is arranged parallel to the upper motion platform, and a second flexible component is integrally set on the lower motion platform. There are three second flexible components, and the three second flexible components are arranged in a centrally symmetrical manner. The output end of the second flexible component is connected to the upper motion platform through fasteners. Three second piezoelectric ceramic stacked actuators are respectively connected to the lower motion platform by epoxy resin, and the drive ends of the three second piezoelectric ceramic stacked actuators are respectively connected to the input ends of the three second flexible components. Three first sensing components are connected at one end to the lower motion platform and at the other end to the edge of the upper motion platform. These three first sensing components detect the displacement vectors of the upper motion platform in three directions, forming the displacement along the X-axis, the displacement along the Y-axis, and the angle of rotation about the Z-axis. ; Three second sensing components are connected at one end to the lower motion platform and at the other end to the upper motion platform. These three second sensing components detect the displacement vectors of the lower motion platform in three directions, forming the displacement along the Z-axis and the rotation angle around the X-axis. and the angle of rotation around the Y-axis .

2. The flat six-degree-of-freedom micro-motion device according to claim 1, characterized in that, The upper and lower sides of the first flexible component along the output direction of the first piezoelectric ceramic stacked actuator are aligned with the upper and lower sides of the upper motion platform, making the first flexible component horizontally positioned. The upper and lower sides of the second flexible component along the output direction of the second piezoelectric ceramic stacked actuator protrude from the corresponding upper and lower sides of the lower motion platform, making the second flexible component vertically positioned. The angle between the output directions of any two adjacent first piezoelectric ceramic stacked actuators and the angle between the output directions of any two adjacent second piezoelectric ceramic stacked actuators are both 120°.

3. The flat six-degree-of-freedom micro-motion device according to claim 1, characterized in that, The three first piezoelectric ceramic stacked actuators connected to the upper motion platform are arranged in a ring around the center of the upper motion platform, and the three second piezoelectric ceramic stacked actuators connected to the lower motion platform are arranged divergently from the center of the lower motion platform, and the output terminals of the three second piezoelectric ceramic stacked actuators are all away from the center of the lower motion platform.

4. A flat six-degree-of-freedom micro-motion device according to claim 1, characterized in that, A first guide structure is provided at the input end and the output end of the first flexible component, and a second guide structure is provided at the input end and the output end of the second flexible component. The first guide structure and the second guide structure are arranged in a sheet-like shape, or in a column-like shape, or in a strip-like shape. The two first guide structures located at the input end and the output end of the first flexible component are parallel to each other, and the two second guide structures located at the input end and the output end of the second flexible component are parallel to each other.

5. A flat six-degree-of-freedom micro-motion device according to claim 1, characterized in that, Three first sensing components are respectively connected to adjacent sides of the lower motion platform. Two of the three first sensing components are symmetrically arranged with the X-axis as the axis, and the third first sensing component is located on the Y-axis. The displacement in the X-axis direction is calculated by the average of the data measured by the two first sensing components symmetrically arranged with the X-axis as the axis, and the rotation angle around the Z-axis is calculated by the difference between the data measured by the two first sensing components and the corresponding measured data. The displacement in the Y-axis direction is calculated using data measured by the first sensing component located on the Y-axis.

6. A flat six-degree-of-freedom micro-motion device according to claim 5, characterized in that, One of the three second sensing components faces the center of the upper motion platform. The other two second sensing components are located on the X-axis and Y-axis, respectively, and are situated at the edge of the lower motion platform. The second sensing component on the X-axis is positioned opposite two first sensing components symmetrically arranged around the X-axis, and the second sensing component on the Y-axis is positioned opposite a first sensing component on the Y-axis. The displacement in the Z-axis direction is calculated using data measured by the second sensing component facing the center of the upper motion platform, and the angle of rotation around the X-axis is calculated by the difference between the data measured by the second sensing component on the Y-axis and the data measured by the second sensing component corresponding to the center of the upper motion platform. The angle of rotation around the Y-axis is calculated by the difference between the data measured by the second sensing component on the X-axis and the data measured by the second sensing component corresponding to the center of the upper motion platform. .

7. A flat six-degree-of-freedom micro-motion device according to claim 6, characterized in that, The first sensing component includes a first bracket, one end of which is connected to the lower motion platform, and the other end of which is connected to a first capacitive displacement sensor. The first capacitive displacement sensor faces the edge of the upper motion platform and is provided with a corresponding first preset distance from the upper motion platform.

8. A flat six-degree-of-freedom micro-motion device according to claim 7, characterized in that, The second sensing component includes a second bracket, one end of which is connected to the lower motion platform, and the other end of which is connected to a second capacitive displacement sensor. The second capacitive displacement sensor faces the upper motion platform and is provided with a corresponding second preset distance from the upper motion platform.

9. A flat six-degree-of-freedom micro-motion device according to claim 8, characterized in that, The distances between the second support where the three second capacitive displacement sensors are located and the upper motion platform are respectively The distance between the second capacitive displacement sensor located on the X-axis and the second capacitive displacement sensor corresponding to the center of the upper motion platform is... The distance between the second capacitive displacement sensor located on the Y-axis and the second capacitive displacement sensor corresponding to the center of the upper motion platform is... The distances between the three first capacitive displacement sensors and the corresponding sides of the upper motion platform are respectively The distance between the two first capacitive displacement sensors symmetrically arranged with the X-axis as the axis is ; Among them, the data measured by the second capacitive displacement sensor corresponding to the center of the upper motion platform is the displacement value in the Z-axis direction; The data measured by the second capacitive displacement sensor located on the Y-axis and the data measured by the second capacitive displacement sensor corresponding to the center of the upper motion platform can be used to calculate the angle of rotation around the X-axis. ; The data measured by the second capacitive displacement sensor located on the X-axis and the data measured by the second capacitive displacement sensor corresponding to the center of the upper motion platform can be used to calculate the angle of rotation around the Y-axis. ; The first capacitive displacement sensor located on the Y-axis measures the displacement value in the Y-axis direction; The data measured by two first capacitive displacement sensors symmetrically arranged with the X-axis as the axis can be used to calculate the displacement value in the X-axis direction. and the angle of rotation around the Z-axis

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