Non-ferromagnetic conductor motion speed and defect detection device

Abstract

The application discloses a non-ferromagnetic conductor motion speed and defect detection device, which comprises a shell, a first plate, an elastic piece, a coil and a transducer component. The first plate is connected with the shell and movable relative to the shell. The elastic piece is arranged between the first plate and the shell. The coil is connected with the first plate and moves with the first plate. The coil is used for forming a magnetic field in at least a partial area of the circumference of the shell. The transducer component is connected with the shell and used for converting a displacement signal of the first plate relative to the shell into an electric signal. The application can detect the change of Lorentz force generated in the motion process of the non-ferromagnetic conductor, and convert the change of the Lorentz force into the change of the electric signal, thereby meeting the requirement of accurately detecting the motion speed and internal micro-defects of the non-ferromagnetic conductor on a daily production line.

Description

Technical Field

[0001] This invention belongs to the field of electromagnetic measurement technology, specifically relating to a device for detecting the speed and defects of a non-ferromagnetic conductor. Background Technology

[0002] High-conductivity non-ferromagnetic materials such as copper, aluminum, and graphite, after being manufactured using precision processes, are widely used in cutting-edge fields such as new energy, aerospace, and nuclear industry, and their corresponding structural components play a crucial role. Summary of the Invention

[0003] This invention is based on the inventor's discoveries and understanding of the following facts and problems:

[0004] The inventors recognized that high-precision components made from non-ferromagnetic materials are obtained through plastic processing. Even minute defects in the material, such as bubbles, cracks, or non-metallic inclusions, can affect the quality and performance of the final product. On automated production lines, precisely controlling the material's production speed not only significantly improves production efficiency but also ensures product consistency and reliability. Therefore, accurately detecting the movement speed and internal defects of non-ferromagnetic conductor materials during production is crucial, affecting not only product performance but also ensuring the efficiency and reliability of the entire production process.

[0005] The present invention aims to at least partially solve one of the technical problems in the related art.

[0006] Therefore, embodiments of the present invention propose a device for detecting the motion speed and defects of a non-ferromagnetic conductor, which can monitor the motion speed and internal defects of the non-ferromagnetic conductor.

[0007] The nonferromagnetic conductor motion speed and defect detection device of this invention includes:

[0008] case;

[0009] A first plate is connected to the housing and is movable relative to the housing;

[0010] An elastic element is disposed between the first plate and the housing;

[0011] A coil connected to the first plate, the coil moving with the first plate, the coil being used to generate a magnetic field in at least a portion of the circumferential region of the housing;

[0012] A transducer is connected to the housing and is used to convert the displacement signal of the first plate relative to the housing into an electrical signal.

[0013] The non-ferromagnetic conductor motion speed and defect detection device of the present invention can detect the changes in Lorentz force generated during the motion of the non-ferromagnetic conductor and convert the changes in Lorentz force into changes in electrical signals, thus meeting the increasing demand on daily production lines for accurate detection of the motion speed and internal micro-defects of non-ferromagnetic conductors.

[0014] In some embodiments, the coil is a planar coil, the first plate has a first end face, and the coil is attached to the first end face.

[0015] In some embodiments, the first plate is movable relative to the housing along a first direction, and the first direction is parallel to the first end face;

[0016] And / or, the magnetization direction of the magnetic field generated by the coil is perpendicular to the first end face;

[0017] And / or, it also includes a first electrode and a second electrode, the first electrode and the second electrode being electrically connected to the coil;

[0018] And / or, the coil is made of aluminum, copper, copper-aluminum alloy, or gold;

[0019] And / or, the coil is formed by electroplating, evaporation deposition, or sputtering.

[0020] And / or, the thickness D of the coil satisfies 0 < D ≤ 300 μm;

[0021] And / or, the coil is mesh-like, or the coil comprises multiple parallel straight conductor segments, the multiple straight conductor segments being connected end to end in sequence to form a serpentine planar coil;

[0022] And / or, the current flowing through the coil is 0 to 100 mA.

[0023] In some embodiments, the elastic element is a support beam having an elastic segment, one end of the support beam being connected to the housing, and the other end of the support beam being connected to the first plate.

[0024] In some embodiments, the elastic segment is Z-shaped or arc-shaped;

[0025] And / or, the elastic segment is integrally formed with the support beam;

[0026] And / or, the first plate and the housing are spaced apart, and there are multiple support beams, with the first plate connected to the housing via the multiple support beams;

[0027] And / or, the supporting beam and the first plate are made of silicon.

[0028] In some embodiments, the transducer includes:

[0029] A fixed electrode plate is connected to the housing.

[0030] A movable electrode plate is connected to the first plate and moves synchronously with the first plate. The fixed electrode plate and the movable electrode plate are arranged opposite to each other to form a capacitor.

[0031] A detection module is used to acquire the electrical signal between the fixed electrode plate and the movable electrode plate.

[0032] In some embodiments, the fixed electrode plate has a plurality of parallel first conductor plates, and the movable electrode plate has a plurality of parallel second conductor plates. The first conductor plates and the second conductor plates are arranged in parallel and staggered to form multiple sets of capacitors.

[0033] And / or, it also includes a third electrode and a ground electrode, the detection module being connected to the third electrode and the ground electrode;

[0034] And / or, the fixed electrode plate and the movable electrode plate are made of silicon.

[0035] In some embodiments, the use includes the following steps:

[0036] The non-ferromagnetic conductor to be tested moves along a first direction and passes through the magnetic field formed by the coil;

[0037] Obtain the capacitance data in the transducer component;

[0038] Based on the capacitance data, the velocity of the non-ferromagnetic conductor is obtained;

[0039] Determine whether there are any abrupt changes in the capacitance data;

[0040] If so, then the non-ferromagnetic conductor has a defect.

[0041] In some embodiments, the housing is a silicon-based housing or a III-V semiconductor housing.

[0042] In some embodiments, the non-ferromagnetic conductor motion speed and defect detection device is a micro / nano device;

[0043] And / or, the conductivity of the non-ferromagnetic conductor is ≥1×10⁻⁶. 5 S / m. Attached Figure Description

[0044] Figure 1 This is a schematic diagram of the structure of a non-ferromagnetic conductor motion speed and defect detection device according to an embodiment of the present invention.

[0045] Figure 2This is a schematic diagram of the arrangement of the fixed electrode plate and the movable electrode plate in an embodiment of the present invention.

[0046] Figure 3 This is a schematic diagram of the coil structure according to an embodiment of the present invention.

[0047] Figure 4 This is a connection diagram of the detection module in an embodiment of the present invention.

[0048] Figure 5 This is a waveform diagram of a non-ferromagnetic conductor in an embodiment of the present invention, showing whether or not it has defects.

[0049] Figure 6 This is a flowchart illustrating the detection process of a non-ferromagnetic conductor motion speed and defect detection device according to an embodiment of the present invention.

[0050] Figure label:

[0051] 100. Devices for detecting the speed and defects of non-ferromagnetic conductors;

[0052] 1. Shell;

[0053] 2. First board;

[0054] 3. Coil; 31. First electrode; 32. Connecting metal layer; 33. Second electrode;

[0055] 4. Transducer component; 41. Fixed electrode plate; 42. Movable electrode plate; 43. Third electrode; 44. Grounding electrode; 45. Detection circuit;

[0056] 5. Elastic components. Detailed Implementation

[0057] Embodiments of the present invention are described in detail below, examples of which are illustrated in the accompanying drawings. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain the present invention, and should not be construed as limiting the present invention.

[0058] The following combination Figures 1-6 The nonferromagnetic conductor motion speed and defect detection device 100 of the present invention will be described in detail.

[0059] like Figure 1 As shown, the non-ferromagnetic conductor motion speed and defect detection device 100 of this embodiment includes a housing 1, a first plate 2, an elastic element 5, a coil 3, and a transducer 4. The first plate 2 is connected to the housing 1 and is movable relative to the housing 1. The elastic element 5 is disposed between the first plate 2 and the housing 1. The coil 3 is connected to the first plate 2 and moves with the first plate 2. The coil 3 is used to form a magnetic field in at least a portion of the circumferential region of the housing 1. The transducer 4 is connected to the housing 1 and is used to convert the displacement signal of the first plate 2 relative to the housing 1 into an electrical signal.

[0060] It should be understood that when coil 3 is energized, it can generate a magnetic field within a certain area around the casing 1. When a non-ferromagnetic conductor moves in a certain direction (e.g., as...), Figure 1 When the coil 3 enters the magnetic field in the left-right direction (as shown in the diagram) and passes through the magnetic field, according to Ohm's law for a moving conductor, induced eddy currents are formed inside the moving conductor. Under the action of the induced eddy currents and the excitation magnetic field, a Lorentz force F is formed inside the non-ferromagnetic conductor in the opposite direction to its motion. According to Newton's third law, the coil 3 is subjected to a force Fr that is equal in magnitude and opposite in direction to the Lorentz force F. When there are defects (cracks, non-metallic inclusions, etc.) inside the non-ferromagnetic conductor, the eddy currents inside the non-ferromagnetic conductor change, causing the Lorentz force on the coil 3 to change, which causes the first plate 2 and the coil 3 to be displaced relative to the shell 1. The transducer 4 will generate an electrical signal according to the change in the displacement of the first plate 2 and the coil 3. The presence of defects in the non-ferromagnetic conductor can be determined by the abnormal signal in the electrical signal, and the speed of the conductor can be determined by the electrical signal (e.g., the reference value of the actual output capacitance data).

[0061] Meanwhile, the speed of a non-ferromagnetic conductor can be detected by the time the electrical signal appears when the conductor enters the magnetic field and the time the electrical signal terminates when the conductor leaves the magnetic field.

[0062] The nonferromagnetic conductor motion speed and defect detection device 100 of this invention can detect the changes in Lorentz force generated during the motion of the nonferromagnetic conductor and convert the changes in Lorentz force into changes in electrical signals, thus meeting the increasing demand on daily production lines for accurate detection of the motion speed and internal micro-defects of nonferromagnetic conductors.

[0063] Optionally, the electrical signal can be a current signal, voltage signal, resistance signal, capacitance signal, etc., that converts displacement changes.

[0064] like Figure 3 As shown, in some embodiments, the coil 3 is a planar coil 3, the first plate 2 has a first end face, the coil 3 is attached to the first end face, the planar coil 3 is convenient to arrange, and the magnetization direction of the magnetic field generated by the coil 3 is perpendicular to the first end face.

[0065] Furthermore, the first plate 2 is movable relative to the housing 1 along a first direction, and the first direction is parallel to the first end face; wherein, the first direction can be... Figure 1 As shown in the left and right directions, after the planar coil 3 is arranged on the first plate 2, when the non-ferromagnetic conductor passes through the magnetic field, it cuts the magnetic field lines and induced eddy currents are formed inside the non-ferromagnetic conductor. Under the action of the induced eddy currents and the excitation magnetic field, a Lorentz force F opposite to its direction of motion will be formed inside the non-ferromagnetic conductor.

[0066] When the non-ferromagnetic conductor is free of defects, the Lorentz force F will not change abnormally, and the electrical signal generated by the transducer 4 can determine that the non-ferromagnetic conductor is qualified. The magnetic field generated by the planar coil 3, which is perpendicular to the first end face, can provide a more accurate and stable Lorentz force F acting on the non-ferromagnetic conductor, making it easier to judge abnormal signals.

[0067] Optionally, the coil 3 can be made of aluminum, copper, copper-aluminum alloy or gold, which has good conductivity and better stability, and is more suitable for the production of micro and nano devices. The coil 3 can be formed by electroplating, evaporation deposition or sputtering process, which can improve the structural stability of the coil 3 and the stability of the connection between the coil 3 and the first plate 2, and avoid the problems of difficult assembly and poor structural stability between the coil 3 and the first plate 2.

[0068] Optionally, the thickness D of coil 3 satisfies 0 < D ≤ 300 μm. For example, the thickness of coil 3 can be 10 μm, 26 μm, 77 μm, 132 μm, 150 μm, 230 μm, 268 μm or 300 μm. In practical applications, the thickness of coil 3 can be determined according to parameters such as the material of coil 3, the magnitude of the current, the shape and cross-sectional dimensions of coil 3, to ensure that it meets the performance requirements while avoiding material waste caused by excessive thickness of coil 3.

[0069] Furthermore, the non-ferromagnetic conductor motion speed and defect detection device 100 of this embodiment of the invention also includes a first electrode 31 and a second electrode 33, which are electrically connected to the coil 3; the first electrode 31 and the second electrode 33 are disposed on the housing 1, and the first electrode 31 and the second electrode 33 are used to be electrically connected to the coil 3, one of the first electrode 31 and the second electrode 33 is used for current to flow into the coil and the other is used for current to flow out of the coil, so as to realize the energization of the coil 3.

[0070] The coil 3 is connected to the first electrode 31 and the second electrode 33 through a connecting metal layer 32. The connecting metal layer 32 can be attached to the housing 1. Since the coil 3 will move relative to the housing 1, a certain section of the connecting metal layer 32 can have a certain degree of flexibility, and can be bent to a certain extent according to the position of the coil 3, so as to ensure effective connection between the first electrode 31 and the coil 3.

[0071] Furthermore, coil 3 includes multiple parallel straight conductor segments, which are connected end-to-end to form a serpentine planar coil 3, such as... Figure 3 As shown.

[0072] Alternatively, coil 3 may be mesh-like, for example, coil 3 may be a mesh structure formed by multiple longitudinally arranged conductor segments and multiple transversely arranged conductor segments, or coil 3 may be rose-shaped.

[0073] In this embodiment of the invention, the current flowing through coil 3 is 0 to 100 mA. When the current flowing through coil 3 is 0, it is in a shutdown state. In the working state, the current in coil 3 is determined according to the actual magnetic field strength requirements, thereby facilitating the acquisition of the displacement signal and the converted electrical signal of coil 3.

[0074] For example, during operation, the current flowing through coil 3 is 8mA, 18mA, 27mA, 44mA, 50mA, 76mA, 81mA, 98mA, or 100mA.

[0075] When the current flowing through coil 3 is too large, higher requirements are placed on the performance of coil 3, which will increase the cost and manufacturing difficulty. In this embodiment of the invention, the detection requirements can be met when the current is 100mA or less.

[0076] In some embodiments, the elastic element 5 is a support beam with an elastic segment. One end of the support beam is connected to the housing 1, and the other end is connected to the first plate 2. That is, the first plate 2 is connected to the housing 1 through the support beam, and the first plate 2 is suspended relative to the housing 1. This reduces the frictional resistance when the first plate 2 moves. When the coil 3 is subjected to a force Fr that is equal in magnitude and opposite in direction to the Lorentz force F, it can respond more flexibly, the displacement signal is easier to capture, and the displacement signal can more sensitively reflect the defects of non-ferromagnetic conductors.

[0077] Optionally, the first plate 2 and the housing 1 are spaced apart, and there are multiple support beams. The first plate 2 is connected to the housing 1 through multiple support beams. For example, the first plate 2 is rectangular, and there are four support beams. The four support beams are respectively located at the four corners of the first plate 2, and the deformation direction of the elastic segment of the support beam is the same as the first direction. That is, when the coil 3 is subjected to the force Fr, the first plate 2 can move in the first direction (the left and right direction shown in the figure).

[0078] Furthermore, the elastic segment is Z-shaped or arc-shaped. The segment is elastic by the Z-shaped folding segment or the arc-shaped bending segment, and the first plate 2 can be displaced relative to the shell 1 after being subjected to force.

[0079] The elastic section and the support beam are integrally formed, meaning that the support beam and the elastic section are formed simultaneously during processing and manufacturing, and are an integrated structure, which improves the stability of the structure.

[0080] Alternatively, the elastic segment in this embodiment of the invention is a spring.

[0081] In some embodiments, the support beam and the first plate 2 are made of silicon.

[0082] like Figure 1 and Figure 2As shown in some embodiments, the transducer 4 includes a fixed electrode plate 41, a movable electrode plate 42, and a detection module. The fixed electrode plate 41 is connected to the housing 1; the movable electrode plate 42 is connected to the first plate 2, and the movable electrode plate 42 moves synchronously with the first plate 2. The fixed electrode plate 41 and the movable electrode plate 42 are arranged opposite to each other and form a capacitor; the detection module is used to acquire the electrical signal between the fixed electrode plate 41 and the movable electrode plate 42.

[0083] It should be understood that the fixed electrode plate 41 is fixedly connected to the housing 1 and does not move relative to the housing 1. The movable electrode plate 42 is connected to the first plate 2. When the coil 3 is subjected to a force, the coil 3, the first plate 2 and the movable electrode plate 42 can move synchronously, thereby changing the displacement between the fixed electrode plate 41 and the movable electrode plate 42. A capacitor is formed between the fixed electrode plate 41 and the movable electrode plate 42. When the displacement between the fixed electrode plate 41 and the movable electrode plate 42 changes, the detection module can obtain the capacitance change signal.

[0084] Specifically, in this embodiment of the invention, by detecting changes in the capacitance signal, the displacement change of the first plate after the force on the coil 3 changes, is obtained, and the presence of defects in the non-ferromagnetic conductor is determined.

[0085] like Figure 4 As shown, the detection module is the detection circuit 45. The non-ferromagnetic conductor motion speed and defect detection device 100 of this embodiment of the invention also includes a third electrode 43 and a ground electrode 44. The third electrode 43 is a DC electrode and is connected to the transducer 4. The detection module is connected to the third electrode 43 and the ground electrode 44.

[0086] In some embodiments, the fixed electrode plate 41 has a plurality of parallel first conductor plates, and the movable electrode plate 42 has a plurality of parallel second conductor plates. The first conductor plates and the second conductor plates are arranged in parallel and staggered to form multiple sets of capacitors. It should be understood that the plurality of first conductor plates are comb-shaped, the plurality of second conductor plates are comb-shaped, and the plurality of first conductor plates and the plurality of second conductor plates are one-to-one corresponding and staggered to form comb-shaped capacitors. This can more effectively, more accurately, and more sensitively reflect the displacement signal of the first plate 2, realize precise detection, and also facilitate the packaging of the non-ferromagnetic conductor motion speed and defect detection device 100, realize the integration of magnetic source and micromechanical structure, and form micro-nano device.

[0087] In this embodiment of the invention, the fixed electrode plate 41 and the movable electrode plate 42 are made of silicon, and the housing 1 is a silicon-based housing 1 or a III-V semiconductor housing 1, which can ensure the stability and performance of each component.

[0088] In some embodiments, the non-ferromagnetic conductor motion speed and defect detection device 100 is a micro-nano device.

[0089] Furthermore, the conductivity of the non-ferromagnetic conductor is ≥1×10⁻⁶. 5 S / m, under the influence of induced eddy currents and excitation magnetic fields, a Lorentz force F is formed inside the non-ferromagnetic conductor, which is opposite to the direction of the conductor's motion. The high conductivity ensures that F is large enough, and enables the first plate 2 to be effectively displaced, thereby enabling detection.

[0090] Many components in this invention are made of silicon, which has good mechanical support properties and can also effectively dissipate heat. Silicon has excellent thermal conductivity and can be used to prepare high-efficiency heat dissipation materials, thereby improving the stability and reliability of electronic devices.

[0091] This invention integrates a magnetic source with a micromechanical structure by energizing coil 3 to generate a magnetic field. Compared with Lorentz force sensors that use permanent magnets, it has a simpler structure, is no longer affected by the collapse of the device layer caused by the weight of the permanent magnet itself, and has the advantages of smaller size, easy packaging, and mass production. It can be widely used in the field of non-destructive testing of non-ferromagnetic materials.

[0092] like Figure 5 and Figure 6 As shown, in some embodiments, the following steps are included in use:

[0093] S101. The non-ferromagnetic conductor to be tested moves along the first direction and passes through the magnetic field formed by coil 3. The direction of movement of the non-ferromagnetic conductor can be moved along the left and right directions shown in the figure, from left to right.

[0094] S102, Obtain the capacitance data in the transducer 4, such as Figure 5 As shown. When a non-ferromagnetic conductor has no defects, the capacitance data only includes the baseline value. When a non-ferromagnetic conductor has defects, the capacitance data includes both the baseline value and the abrupt change value.

[0095] S103. Based on capacitance data, obtain the speed of movement of the non-ferromagnetic conductor. Specifically, the speed of passage of the non-ferromagnetic conductor can be obtained based on the reference value actually output in the capacitance data, thereby determining the speed of movement of the production line.

[0096] S104. Determine if there are abrupt changes in the capacitance data. Detecting abrupt changes in the capacitance data can help determine if the non-ferromagnetic conductor has a defect.

[0097] S105. If yes, then the non-ferromagnetic conductor has a defect. If no, then the non-ferromagnetic conductor is qualified.

[0098] Specifically, in this embodiment of the invention, the waveform of a single cycle of the nonferromagnetic conductor's motion speed and defect detection device (100 micro-nano device) detecting the presence or absence of defects in the nonferromagnetic conductor is shown in the figure below. Figure 5As shown, region I is the defective part, and region II is the defect-free part.

[0099] In the automated production process, the non-ferromagnetic conductor movement speed and defect detection device 100 is installed on the production line. After the non-ferromagnetic conductor is processed, it moves along the production line and passes through the magnetic field generated by the non-ferromagnetic conductor movement speed and defect detection device 100. When the non-ferromagnetic conductor passes through the magnetic field, the capacitance change data can be obtained through the transducer 4. Based on the relevant data, the movement speed of the non-ferromagnetic conductor and whether there are defects can be determined, thereby controlling the quality of the product and facilitating the control of the production efficiency of the production line to ensure product consistency.

[0100] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0101] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this invention, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0102] In this invention, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a connection that allows communication between them; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0103] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "over," and "on top" of the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0104] In this invention, the terms "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to a specific feature, structure, material, or characteristic described in connection with that embodiment or example, which is included in at least one embodiment or example of the invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0105] Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of the present invention.

Claims

1. A device for detecting the motion speed and defects of a non-ferromagnetic conductor, characterized in that, include: case; The first plate is connected to the housing and is movable relative to the housing, and is suspended relative to the housing. An elastic element is disposed between the first plate and the housing; A coil is connected to the first plate and moves with the first plate. The coil is used to generate a magnetic field in at least a portion of the circumferential region of the housing. The coil is a planar coil. The first plate has a first end face. The coil is attached to the first end face. The coil is formed by electroplating, evaporation deposition, or sputtering. A transducer is connected to the housing and is used to convert the displacement signal of the first plate relative to the housing into an electrical signal.

2. The non-ferromagnetic conductor motion speed and defect detection device according to claim 1, characterized in that, The first plate is movable relative to the housing along a first direction, and the first direction is parallel to the first end face; And / or, the magnetization direction of the magnetic field generated by the coil is perpendicular to the first end face; And / or, it also includes a first electrode and a second electrode, the first electrode and the second electrode being electrically connected to the coil; And / or, the coil is made of aluminum, copper, copper-aluminum alloy, or gold; And / or, the thickness D of the coil satisfies 0 < D ≤ 300 μm; And / or, the coil is mesh-like, or the coil comprises multiple parallel straight conductor segments, the multiple straight conductor segments being connected end to end in sequence to form a serpentine planar coil; And / or, the current flowing through the coil is 0 to 100 mA.

3. The non-ferromagnetic conductor motion speed and defect detection device according to claim 1, characterized in that, The elastic element is a support beam, which has an elastic section. One end of the support beam is connected to the shell, and the other end of the support beam is connected to the first plate.

4. The non-ferromagnetic conductor motion speed and defect detection device according to claim 3, characterized in that, The elastic segment is Z-shaped or arc-shaped; And / or, the elastic segment is integrally formed with the support beam; And / or, the first plate and the housing are spaced apart, and there are multiple support beams, with the first plate connected to the housing via the multiple support beams; And / or, the supporting beam and the first plate are made of silicon.

5. The non-ferromagnetic conductor motion speed and defect detection device according to claim 1, characterized in that, The transducer component includes: A fixed electrode plate is connected to the housing. A movable electrode plate is connected to the first plate and moves synchronously with the first plate. The fixed electrode plate and the movable electrode plate are arranged opposite to each other to form a capacitor. A detection module is used to acquire the electrical signal between the fixed electrode plate and the movable electrode plate.

6. The non-ferromagnetic conductor motion speed and defect detection device according to claim 5, characterized in that, The fixed electrode plate has multiple parallel first conductor plates, and the movable electrode plate has multiple parallel second conductor plates. The first conductor plates and the second conductor plates are arranged in parallel and staggered to form multiple sets of capacitors. And / or, it also includes a third electrode and a ground electrode, the detection module being connected to the third electrode and the ground electrode; And / or, the fixed electrode plate and the movable electrode plate are made of silicon.

7. The non-ferromagnetic conductor motion speed and defect detection device according to claim 5 or 6, characterized in that, The following steps are included in its use: The non-ferromagnetic conductor to be tested moves along a first direction and passes through the magnetic field formed by the coil; Obtain the capacitance data in the transducer component; Based on the capacitance data, the velocity of the non-ferromagnetic conductor is obtained; Determine whether there are any abrupt changes in the capacitance data; If so, then the non-ferromagnetic conductor has a defect.

8. The non-ferromagnetic conductor motion speed and defect detection device according to claim 1, characterized in that, The housing is a silicon-based housing or a III-V semiconductor housing.

9. The non-ferromagnetic conductor motion speed and defect detection device according to claim 1, characterized in that, The non-ferromagnetic conductor motion speed and defect detection device is a micro / nano device; And / or, the conductivity of the non-ferromagnetic conductor is ≥1×10⁻⁶. 5 S / m.

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