Multi-channel liquid-conducting pipe fittings, integrated circuit copper stripping liquid production system and production process

Abstract

The present invention relates to the field of liquid-conducting pipe fittings, and specifically to multi-channel liquid-conducting pipe fittings, wherein a main pipe body has a first tube cavity, a second tube cavity and a third tube cavity which are connected in sequence, and the inner diameters of the three tube cavities are increased in sequence, and the first tube cavity is located at one end of the main pipe body. The diameter of the first core body is larger than the inner diameter of the first tube cavity and smaller than the inner diameter of the second tube cavity. The diameter of the second core body is larger than the inner diameter of the second tube cavity and smaller than the inner diameter of the third tube cavity. The first driver is used to control the relative movement of the first core body and the main pipe body along the axial direction, so that the first core body can push the second core body, thereby regulating the flow area of ​​the main pipe body. The integrated circuit copper stripping liquid production system includes a multi-channel liquid-conducting pipe fitting, and the integrated circuit copper stripping liquid production process relies on the integrated circuit copper stripping liquid production system. It can effectively improve the quantitative accuracy of liquid phase components, reduce quantitative errors, and make the configuration process of liquid phase components more controllable.

Description

Technical Field

[0001] The invention relates to the field of liquid-conducting pipe fittings, and in particular to a multi-channel liquid-conducting pipe fitting, an integrated circuit copper stripping liquid production system and a production process. Background Art

[0002] In the process of multi-component liquid phase preparation, the amount of each component needs to be accurately controlled. When conveying liquid components, the quantitative effect of traditional pipes is poor, and it is difficult to ensure that each component is strictly configured according to the predetermined ratio, which is prone to quantitative errors.

[0003] In view of this, this application is hereby filed. Summary of the invention

[0004] The first object of the present invention is to provide a multi-channel liquid guiding tube, which can effectively improve the quantitative accuracy of liquid components, reduce quantitative errors, and make the configuration process of liquid components more controllable.

[0005] The second object of the present invention is to provide an integrated circuit copper stripping solution production system, which can effectively improve the quantitative accuracy of each component, reduce the quantitative error, make the configuration process of the integrated circuit copper stripping solution more controllable, and ensure the quality of the stripping solution.

[0006] The third object of the present invention is to provide an integrated circuit copper stripping solution production process, which can effectively improve the quantitative accuracy of each component, reduce the quantitative error, make the configuration process of the integrated circuit copper stripping solution more controllable, and ensure the quality of the stripping solution.

[0007] The embodiment of the present invention is achieved as follows:

[0008] A multi-channel liquid-conducting tube component comprises a main pipe body, a first core body, a second core body and a first driver.

[0009] The main body has a first lumen, a second lumen and a third lumen which are connected in sequence, and the inner diameters of the three increase in sequence, and the first lumen is located at one end of the main body. The diameter of the first core body is larger than the inner diameter of the first lumen and smaller than the inner diameter of the second lumen. The diameter of the second core body is larger than the inner diameter of the second lumen and smaller than the inner diameter of the third lumen.

[0010] The first core is located on a side of the first tube cavity close to the second tube cavity, and the second core is located on a side of the first core away from the first tube cavity. Along the axial direction of the main tube, the first core and the second core can both be slidably fitted in the main tube. The second core is equipped with a first elastic member to push the second core toward the third tube cavity close to one end of the second tube cavity.

[0011] The first driver is used to control the relative movement of the first core and the main tube along the axial direction, so that the first core can push the second core, thereby adjusting the flow area of ​​the main tube.

[0012] Furthermore, the main tube body also has a fourth lumen, the inner diameter of the fourth lumen is greater than the inner diameter of the third lumen, the fourth lumen is located at an end of the third lumen away from the first lumen and is connected to the third lumen.

[0013] The multi-channel liquid-conducting tube also includes a third core body, the diameter of which is larger than the inner diameter of the third tube cavity and smaller than the inner diameter of the fourth tube cavity, and the third core body is arranged in the fourth tube cavity. Along the axial direction of the main tube body, the third core body can be slidably matched with the main tube body. The third core body is matched with a second elastic member to push the third core body toward the fourth tube cavity close to one end of the third tube cavity.

[0014] The first driver is used to control the relative movement of the first core and the main tube along the axial direction, so that the first core can push the second core and the third core in sequence, thereby adjusting the flow area of ​​the main tube.

[0015] Furthermore, the multi-channel liquid guiding tube also includes: a first matching rod.

[0016] One end of the main tube body away from the first lumen is closed by a sealing block, and the sealing block has a matching inner lumen.

[0017] The third core body is connected to the first mating rod, the first mating rod is arranged along the axial direction of the main pipe body and penetrates into the mating inner cavity, the first mating rod is slidably mated with the sealing block, and the second elastic member abuts between the inner wall of the mating inner cavity away from the first tube cavity and the end of the first mating rod.

[0018] Furthermore, the multi-channel liquid guiding tube also includes: a second matching rod.

[0019] A matching hole is provided on one side of the third core body close to the second core body, and the matching hole extends along the axial direction of the main tube body and extends to the first matching rod. The second core body is connected to the second matching rod, and the second matching rod is arranged along the axial direction of the main tube body and slidably matched in the matching hole, and the first elastic member abuts between an end wall of the matching hole away from the first tube cavity and an end of the second matching rod.

[0020] Furthermore, the multi-channel liquid guiding tube also includes: an end seat and a control rod.

[0021] The first core is connected to a control rod, which is arranged along the axial direction of the main body. The control rod passes through the second core, the second matching rod, the first matching rod and the sealing block in sequence through the side of the second core close to the first core. The end of the control rod away from the first core is fixedly connected to the end seat, and the end seat is located on the side of the sealing block away from the first lumen. The first driver is used to drive the main body to move away from and close to the end seat along the axial direction.

[0022] Furthermore, the second core body is provided with a first connecting hole connecting a side close to the first core body and a side far from the first core body.

[0023] The first connecting hole includes: a first flow channel, a second flow channel and a third flow channel. The first flow channel is located on the side of the second core body away from the first core body, the third flow channel is located on the side of the second core body close to the first core body, and the second flow channel connects the first flow channel and the third flow channel. The first flow channel and the third flow channel are both arranged along the axial direction of the main body, and the second flow channel is arranged along the radial direction of the main body.

[0024] An arc-shaped chute is provided on the end wall of the first flow channel near the second flow channel, and both ends of the arc-shaped chute pass through the side of the second core body near the first core body, and an arc-shaped piece is slidably matched in the arc-shaped chute, and the length of the arc-shaped piece is greater than the length of the arc-shaped chute. The central axis of the circular ring corresponding to the arc-shaped piece is perpendicular to the central axis of the main body and the central axis of the second flow channel at the same time.

[0025] The outer ring wall of the arc-shaped part is provided with a matching notch.

[0026] When the second core body fits against the end wall of the third tube cavity close to the second tube cavity, the end of the arc-shaped member away from the central axis of the main tube body is pushed into the arc-shaped slide groove, and the other end of the arc-shaped member extends out of the arc-shaped slide groove. A part of the matching notch is located in the first flow channel, and the other part of the matching notch is located in the second flow channel. The matching notch connects the first flow channel and the second flow channel.

[0027] When the first core pushes the second core, the first core pushes one end of the arc-shaped piece close to the central axis of the main body into the arc-shaped slot, and the other end of the arc-shaped piece extends out of the arc-shaped slot. The matching notches are all located in the first flow channel, and the arc-shaped piece blocks the first flow channel and the second flow channel.

[0028] A production system for integrated circuit copper stripping liquid comprises a liquid preparation container, a center seat, a second driver and the above-mentioned multi-channel liquid guiding pipe member.

[0029] There are a plurality of multi-channel liquid guiding pipe pieces, and the plurality of multi-channel liquid guiding pipe pieces are evenly spaced and arranged along the circumference of the central seat.

[0030] A plurality of multi-channel liquid guiding pipes share one end seat, which is fixedly connected to the center seat, the outer diameter of the center seat is smaller than the outer diameter of the end seat, and the center seat and the end seat are coaxially arranged.

[0031] The second driver is built in the center seat. A rotating part is arranged at one end of the center seat away from the end seat. The rotating part is in transmission cooperation with the second driver.

[0032] The liquid preparation container is detachably connected to the rotating part.

[0033] The side of the liquid dispensing container close to the center seat is fitted with the end wall of the main pipe body, and a liquid injection hole is opened on the side of the liquid dispensing container close to the center seat, and the aperture of the liquid injection hole is adapted to the outer diameter of the main pipe body.

[0034] The second driver is used to drive the liquid preparation container to rotate so that the liquid injection hole is aligned with the main pipe corresponding to the component to be added.

[0035] Furthermore, a reference column is arranged in the liquid preparation container, the reference column is fixedly connected to a side wall of the liquid preparation container close to the center seat, and the reference column extends along the axial direction of the main pipe body.

[0036] A rotating ring is arranged at one end of the reference column away from the central seat, and the rotating ring is connected with a stirring blade.

[0037] The reference column is built with a spring structure and an internal meshing ratchet mechanism, the dial of the internal meshing ratchet mechanism is matched with the winding gear of the spring structure, and the release gear of the spring structure is matched with the rotating ring. The inner ratchet of the internal meshing ratchet mechanism has an outer gear ring.

[0038] The outer wall of the reference column is provided with an upper chord slot, which is arranged along the axial direction of the reference column, and a upper chord rack is slidably matched in the upper chord slot. The upper chord rack is fixedly connected with a push plate, which extends to the liquid injection hole, and the push plate is provided with a liquid passing port, which is used for the main body to inject liquid into the liquid distribution container.

[0039] The winding rack is matched with a reset elastic part. In the natural state, the winding rack is located at one end of the winding slide groove close to the center seat, and the winding rack is separated from the inner ratchet.

[0040] When the main pipe body extends into the liquid dispensing container through the liquid injection hole, the main pipe body pushes the push plate, so that the winding rack meshes with the inner ratchet and drives the inner meshing ratchet mechanism to wind the clockwork structure.

[0041] Furthermore, the push plate is also provided with a drainage rod, which is arranged in the liquid passage port.

[0042] A lever is arranged at the periphery of one end of the liquid-passing port close to the main pipe body. One end of the lever extends to one side of the push plate close to the main pipe body, and the other end extends through the liquid-passing port and is connected to the drainage rod.

[0043] When the main tube body contacts the push plate, the main tube body pushes the lever away from one end of the drainage rod, so that the drainage rod moves toward the inside of the first tubular cavity.

[0044] A production process for integrated circuit copper stripping liquid comprises: connecting supply pipelines of a non-hydroxylamine stripper, a solvent, an additive and ultrapure water to four main pipes in the above-mentioned integrated circuit copper stripping liquid production system respectively, and using the integrated circuit copper stripping liquid production system to configure the integrated circuit copper stripping liquid product in a liquid preparation container.

[0045] Among them, the mass fraction of the non-hydroxylamine stripper is 8 to 11 parts, and the non-hydroxylamine stripper includes: at least one of triethanolamine, diethanolamine, monoethanolamine, o-toluidine, diphenylamine, triethylenediamine, caprolactam, N-methyl 1-ethanolamine, dimethylformamide, tert-butylamine, N-dimethylformamide, and N,N-dimethylpropionamide.

[0046] The mass fraction of the solvent is 47 to 50 parts, and the solvent includes at least one of propylene glycol phenyl ether, hexamethylphosphoric acid triamide, ethylene glycol butyl ether, ethylene glycol, polyethylene glycol, diethylene glycol, ethylene glycol monomethyl ether, butanol, octanol, cyclopentyl methyl ether, dipropylene glycol dimethyl ether, diethylene glycol dimethyl ether, and N-methylpyrrolidone.

[0047] The mass fraction of the additive is 1 to 2.5 parts, and the additive includes: at least one of dodecylphenol polyoxyethylene ether, N-hydroxyethyl piperazine, nonylphenol polyoxyethylene ether, polyvinyl imidazoline, 1-methyl-5-nitroimidazole, N,N-dimethylpropylene urea, succinic acid, 2-aminobenzothiazole, phytic acid, gluconic acid, and xylitol.

[0048] The mass fraction of ultrapure water is 37.2~41.2 parts.

[0049] The beneficial effects of the technical solution of the embodiment of the present invention include:

[0050] The multi-channel liquid-conducting pipe provided in the embodiment of the present invention can effectively improve the quantitative accuracy of the liquid phase components, reduce the quantitative error, and make the configuration process of the liquid phase components more controllable. The integrated circuit copper stripping solution production system provided in the embodiment of the present invention can effectively improve the quantitative accuracy of each component, reduce the quantitative error, make the configuration process of the integrated circuit copper stripping solution more controllable, and ensure the quality of the stripping solution. The integrated circuit copper stripping solution production process provided in the embodiment of the present invention can effectively improve the quantitative accuracy of each component, reduce the quantitative error, make the configuration process of the integrated circuit copper stripping solution more controllable, and ensure the quality of the stripping solution. BRIEF DESCRIPTION OF THE DRAWINGS

[0051] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments are briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without creative work.

[0052] Figure 1 A schematic diagram of a first working state of a multi-channel liquid guiding tube provided by an embodiment of the present invention;

[0053] Figure 2 for Figure 1A schematic diagram of the structure of the first core and the second core;

[0054] Figure 3 A schematic diagram of a second working state of the multi-channel liquid guiding tube provided by an embodiment of the present invention;

[0055] Figure 4 for Figure 2 A schematic diagram of the structure of the first core and the second core;

[0056] Figure 5 A schematic diagram of a third working state of the multi-channel liquid guiding tube provided by an embodiment of the present invention;

[0057] Figure 6 A schematic diagram of a fourth working state of the multi-channel liquid guiding tube provided by an embodiment of the present invention;

[0058] Figure 7 A schematic diagram of the structure of the integrated circuit copper stripping solution production system provided by an embodiment of the present invention (when the main pipe is not extended);

[0059] Figure 8 for Figure 7 Structural diagram of the middle push plate;

[0060] Fig. 9 for Figure 7 Schematic diagram of the coordination between the middle winding rack and the internal meshing ratchet mechanism;

[0061] Fig.10 A schematic diagram of the structure of the integrated circuit copper stripping solution production system provided by an embodiment of the present invention (when the main pipe is extended);

[0062] Fig.11 for Fig.10 Structural diagram of the middle push plate;

[0063] Fig.12 It is a schematic diagram of the coordination between the clockwork structure and the internal meshing ratchet mechanism;

[0064] Fig.13 This is the photoresist residue image of the glass sample under a metallographic optical microscope.

[0065] Description of reference numerals:

[0066] Multi-channel liquid guiding tube 1000; main body 100; first tube cavity 110; second tube cavity 120; third tube cavity 130; fourth tube cavity 140; sealing block 150; matching inner cavity 151; second elastic member 152; liquid inlet channel 160; end seat 200; first core body 300; control rod 310; second core body 400; first communication hole 410; first flow channel 411; second flow channel 412; third flow channel 413; arc member 414; matching notch 415; second matching rod 420; third core body 5 00; second connecting hole 510; first matching rod 520; matching hole 521; first elastic member 522; integrated circuit copper stripping solution production system 2000; liquid preparation container 600; liquid injection hole 610; reference column 620; rotating ring 621; stirring blade 622; spring structure 623; internal meshing ratchet mechanism 624; winding slide groove 625; winding rack 626; push plate 627; liquid outlet 628; drainage rod 700; lever 710; center seat 800; second driver 810; rotating part 820. DETAILED DESCRIPTION

[0067] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings here can be arranged and designed in various different configurations.

[0068] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the invention claimed for protection, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0069] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0070] The terms “first”, “second”, “third”, “fourth”, etc. are merely used for distinguishing descriptions and should not be understood as indicating or implying relative importance.

[0071] In addition, the terms "parallel", "vertical", etc. do not mean that the components must be absolutely parallel or vertical, but can be slightly tilted. For example, "parallel" only means that its direction is more parallel than "vertical", and does not mean that the structure must be completely parallel, but can be slightly tilted.

[0072] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "disposed" and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0073] In order to overcome the shortcomings of the prior art, please refer to Figure 1 to Figure 6 The present embodiment provides a multi-channel liquid guiding tube 1000, which includes: a main body 100, an end seat 200, a first core body 300, a control rod 310, a second core body 400, a second matching rod 420, a third core body 500 and a first matching rod 520.

[0074] The main body 100 has a first tubular cavity 110, a second tubular cavity 120, a third tubular cavity 130 and a fourth tubular cavity 140 which are coaxially arranged and connected in sequence, and the inner diameters of the four increase in sequence. The inner diameter of the first tubular cavity 110 is smaller than that of the second tubular cavity 120, the inner diameter of the second tubular cavity 120 is smaller than that of the third tubular cavity 130, and the inner diameter of the third tubular cavity 130 is smaller than that of the fourth tubular cavity 140.

[0075] The diameter of the first core body 300 is larger than the inner diameter of the first lumen 110 and smaller than the inner diameter of the second lumen 120. The diameter of the second core body 400 is larger than the inner diameter of the second lumen 120 and smaller than the inner diameter of the third lumen 130. The diameter of the third core body 500 is larger than the inner diameter of the third lumen 130 and smaller than the inner diameter of the fourth lumen 140. In this embodiment, the difference between the diameter of the first core body 300 and the inner diameter of the second lumen 120, the difference between the diameter of the second core body 400 and the inner diameter of the third lumen 130, and the difference between the diameter of the third core body 500 and the inner diameter of the fourth lumen 140 are all equal.

[0076] One end of the main tube body 100 away from the first tube cavity 110 is closed by a sealing block 150, and the sealing block 150 has a matching inner cavity 151. The third core body 500 is arranged in the fourth tube cavity 140, the second core body 400 is arranged on the side of the third core body 500 away from the sealing block 150, and the first core body 300 is arranged on the side of the second core body 400 away from the sealing block 150. The third core body 500, the second core body 400 and the first core body 300 are all arranged coaxially with the main tube body 100.

[0077] The third core body 500 is coaxially fixedly connected with the first matching rod 520, and the first matching rod 520 is located on the side of the third core body 500 away from the second core body 400. The first matching rod 520 is axially arranged along the main tube body 100 and penetrates into the matching inner cavity 151. The first matching rod 520 is slidably matched with the sealing block 150 and is slidably sealed with the sealing block 150. A second elastic member 152 is abutted between the inner wall of the side of the matching inner cavity 151 away from the first tube cavity 110 and the end of the first matching rod 520.

[0078] A matching hole 521 is formed on one side of the third core 500 close to the second core 400 . The matching hole 521 extends along the axial direction of the main body 100 and extends to the first matching rod 520 . The matching hole 521 is coaxially arranged with the third core 500 and the first matching rod 520 .

[0079] The second core body 400 is coaxially fixedly connected with the second matching rod 420. The second matching rod 420 is located on the side of the second core body 400 away from the first core body 300. The second matching rod 420 is axially arranged along the main tube 100 and slidably matched in the matching hole 521. A first elastic member 522 is abutted between the end wall of the matching hole 521 away from the first tube cavity 110 and the end of the second matching rod 420.

[0080] The first core body 300 is coaxially fixedly connected with the control rod 310, and the control rod 310 is located on the side of the first core body 300 away from the first tubular cavity 110. The control rod 310 is arranged along the axial direction of the main body 100. The control rod 310 passes through the second core body 400 close to the side of the first core body 300, and successively penetrates the second core body 400 and the second matching rod 420 and extends into the matching hole 521. The control rod 310 further penetrates the first matching rod 520, extends into the matching inner cavity 151 and finally penetrates the sealing block 150. The end of the control rod 310 away from the first core body 300 is fixedly connected to the end seat 200, and the end seat 200 is located on the side of the sealing block 150 away from the first tubular cavity 110.

[0081] The side wall of the main body 100 is provided with a liquid inlet channel 160 , which is communicated with the fourth tube cavity 140 . The liquid inlet channel 160 is used to communicate with an external liquid delivery tube. The liquid delivery tube may be a flexible tube, but is not limited thereto.

[0082] The main tube 100 is further provided with a first driver (not shown in the figure) for driving it to move axially away from and close to the end seat 200 .

[0083] The second core body 400 is provided with a first connecting hole 410 which connects the side close to the first core body 300 and the side far from the first core body 300. The aperture and number of the first connecting holes 410 can be flexibly adjusted according to actual needs. The flow area of ​​the first connecting holes 410 is set to be greater than or equal to the flow area between the outer wall of the first core body 300 and the inner wall of the second tube cavity 120.

[0084] The third core body 500 is provided with a second connecting hole 510 which connects the side close to the second core body 400 and the side far from the second core body 400. The aperture and number of the second connecting holes 510 can be flexibly adjusted according to actual needs. The flow area of ​​the second connecting holes 510 is set to be greater than or equal to the flow area between the outer wall of the second core body 400 and the inner wall of the third tube cavity 130.

[0085] The flow area of ​​the first tube cavity 110 is greater than or equal to the flow area between the outer wall of the third core body 500 and the inner wall of the fourth tube cavity 140 .

[0086] When the first core body 300 is in contact with the end wall of the second tube cavity 120 close to the first tube cavity 110, the main tube body 100 is in contact with the end seat 200, the second core body 400 is in contact with the end wall of the third tube cavity 130 close to the second tube cavity 120 under the action of the first elastic member 522, and the third core body 500 is in contact with the end wall of the fourth tube cavity 140 close to the third tube cavity 130 under the action of the second elastic member 152, and the main tube body 100 is in a closed state (i.e., a first working state). Figure 1 and Figure 2 At this time, the third core 500 blocks between the fourth lumen 140 and the third lumen 130, but the liquid can pass through the third core 500 through the second connecting hole 510; the second core 400 blocks between the third lumen 130 and the second lumen 120, but the liquid can pass through the second core 400 through the first connecting hole 410; the first core 300 blocks between the second lumen 120 and the first lumen 110.

[0087] When the main body 100 is needed to transport the target liquid, the first driver can be used to drive the main body 100 to move axially so as to separate from the end seat 200. When the main body 100 is separated from the end seat 200, the first core 300 moves relative to the main body 100 toward the end where the sealing block 150 is located. Before the first core 300 contacts the second core 400, the liquid can flow out through the second connecting hole 510, the first connecting hole 410, the gap between the outer wall of the first core 300 and the inner wall of the second lumen 120, and the first lumen 110. The upper limit of the flow area is the flow area between the outer wall of the first core 300 and the inner wall of the second lumen 120. At this time, the second working state is entered. Figure 3 and Figure 4 shown.

[0088] When the main body 100 moves further away from the end seat 200, the first core 300 fits with the second core 400, the first core 300 closes the first connecting hole 410 and pushes the second core 400 to move toward the third core 500. Before the second core 400 contacts the third core 500, and after the first core 300 leaves the second tube cavity 120, the liquid can flow out through the second connecting hole 510, the gap between the outer wall of the second core 400 and the inner wall of the third tube cavity 130, the second tube cavity 120, and the first tube cavity 110. The upper limit of the flow area is the flow area between the outer wall of the second core 400 and the inner wall of the third tube cavity 130. At this time, it enters the third working state. Figure 5 shown.

[0089] When the main body 100 moves further away from the end seat 200, the second core body 400 fits with the third core body 500, the second core body 400 closes the second connecting hole 510 and pushes the third core body 500 to move toward the sealing block 150. After the first core body 300 leaves the third tube cavity 130, the liquid can flow out through the gap between the outer wall of the third core body 500 and the inner wall of the fourth tube cavity 140, the third tube cavity 130, the second tube cavity 120, and the first tube cavity 110. The upper limit of the flow area is the flow area between the outer wall of the third core body 500 and the inner wall of the fourth tube cavity 140. At this time, it enters the fourth working state. Figure 6 shown.

[0090] Through the above design, different flow areas can be selected according to different liquid dosage requirements by adjusting the distance between the main body 100 and the end seat 200. For example, at the beginning of liquid addition, a larger flow area can be selected, and near the end, a smaller flow area can be selected, which not only ensures the efficiency of liquid addition, but also facilitates accurate control of the amount of liquid added at the end, improves the quantitative accuracy of liquid addition, and makes the configuration process of liquid components more controllable.

[0091] In this embodiment, the first communication hole 410 includes: a first flow channel 411, a second flow channel 412 and a third flow channel 413. The first flow channel 411 is located on the side of the second core 400 away from the first core 300, the third flow channel 413 is located on the side of the second core 400 close to the first core 300, and the second flow channel 412 connects the first flow channel 411 and the third flow channel 413. The first flow channel 411 and the third flow channel 413 are both arranged along the axial direction of the main body 100, and the second flow channel 412 is arranged along the radial direction of the main body 100.

[0092] An arc-shaped chute is provided on the end wall of the first flow channel 411 near the second flow channel 412, and both ends of the arc-shaped chute pass through the side of the second core 400 near the first core 300. An arc-shaped member 414 is slidably fitted in the arc-shaped chute, and the length of the arc-shaped member 414 is greater than the length of the arc-shaped chute. The central axis of the circular ring corresponding to the arc-shaped member 414 is perpendicular to the central axis of the main body 100 and the central axis of the second flow channel 412 at the same time.

[0093] The outer wall of the arc-shaped member 414 is provided with a matching notch 415 .

[0094] When the second core body 400 fits against the end wall of the third tube cavity 130 close to the second tube cavity 120, the end of the arc member 414 away from the central axis of the main tube body 100 is pushed into the arc groove, and the other end of the arc member 414 extends out of the arc groove. A part of the matching notch 415 is located in the first flow channel 411, and the other part of the matching notch 415 is located in the second flow channel 412. The matching notch 415 connects the first flow channel 411 with the second flow channel 412.

[0095] When the first core 300 pushes the second core 400, the first core 300 pushes one end of the arc member 414 close to the central axis of the main body 100 into the arc groove, and the other end of the arc member 414 extends out of the arc groove. The matching notches 415 are all located in the first flow channel 411, and the arc member 414 blocks the first flow channel 411 and the second flow channel 412.

[0096] Through this design, with the cooperation of the arc-shaped member 414, when the first core body 300 wants to push the second core body 400, the first core body 300 first contacts the arc-shaped member 414 and pushes the arc-shaped member 414. In this way, the other end of the arc-shaped member 414 will be pushed out of the arc-shaped slide groove, which can promote the separation of the second core body 400 and the end wall of the third tube cavity 130 close to the second tube cavity 120, thereby avoiding difficulty in pushing the second core body 400 due to accidental adhesion.

[0097] It is understandable that the second connecting hole 510 may also adopt a structural design similar to the first connecting hole 410, which will not be described in detail here.

[0098] See also Figure 7 to Figure 12 This embodiment also provides an integrated circuit copper stripping solution production system 2000, which includes: a liquid preparation container 600, a center seat 800, a second driver 810 and the above-mentioned multi-channel liquid guiding pipe 1000.

[0099] There are multiple multi-channel liquid guiding pipes 1000, and the multiple multi-channel liquid guiding pipes 1000 are evenly spaced along the circumference of the center seat 800. The number of multi-channel liquid guiding pipes 1000 can be flexibly adjusted according to actual needs. For example, according to the number of components of the integrated circuit copper stripping liquid, a multi-channel liquid guiding pipe is configured for each liquid component, but it is not limited thereto.

[0100] In the integrated circuit copper stripping solution production system 2000, a plurality of multi-channel liquid guiding pipes 1000 share an end seat 200. The end seat 200 is fixedly connected to the center seat 800, the outer diameter of the center seat 800 is smaller than the outer diameter of the end seat 200, and the center seat 800 is coaxially arranged with the end seat 200. The main body 100 of the multi-channel liquid guiding pipe 1000 is slidably matched with the center seat 800.

[0101] The second driver 810 is built in the center seat 800 . A rotating portion 820 is provided at one end of the center seat 800 away from the end seat 200 . The rotating portion 820 is in transmission cooperation with the second driver 810 .

[0102] The liquid preparation container 600 is detachably connected to the rotating part 820 .

[0103] When the liquid preparation container 600 is detachably connected to the rotating part 820, the side of the liquid preparation container 600 close to the center seat 800 fits against the end wall of the main body 100, and a liquid injection hole 610 is opened on the side of the liquid preparation container 600 close to the center seat 800, and the aperture of the liquid injection hole 610 is adapted to the outer diameter of the main body 100.

[0104] The second driver 810 is used to drive the liquid preparation container 600 to rotate so that the liquid injection hole 610 is aligned with the main body 100 of the multi-channel liquid guiding tube 1000 corresponding to the component to be added.

[0105] Through this design, it is possible to add each liquid component of the stripping liquid one by one. When a certain component needs to be added, the second driver 810 is used to drive the liquid preparation container 600 to rotate so that the injection hole 610 is aligned with the main body 100 of the liquid component to be added. When adding the liquid component, the corresponding main body 100 extends into the liquid preparation container 600 through the injection hole 610 and opens, and the appropriate flow area can be selected according to the injection amount. The main body 100 is reset after the injection is completed. In this way, the components that are not currently added will not accidentally enter the liquid preparation container 600, and in the process of adding the current component, the liquid preparation container 600 is locked by the extended main body 100, and will not accidentally rotate to cause component loss.

[0106] Furthermore, a reference column 620 is disposed in the liquid preparation container 600 . The reference column 620 is fixedly connected to a side wall of the liquid preparation container 600 close to the center seat 800 , and the reference column 620 extends along the axial direction of the main tube 100 .

[0107] A rotating ring 621 is provided at one end of the reference column 620 away from the center seat 800 . The rotating ring 621 is rotatably sleeved on the reference column 620 and is rotationally sealed with the reference column 620 . The rotating ring 621 is coaxially arranged with the reference column 620 , and is connected to a stirring blade 622 .

[0108] The reference column 620 has a spring structure 623 and an internal meshing ratchet mechanism 624 built therein, the dial of the internal meshing ratchet mechanism 624 is in transmission cooperation with the winding gear of the spring structure 623, and the release gear of the spring structure 623 is in transmission cooperation with the rotating ring 621. The inner ratchet of the internal meshing ratchet mechanism 624 has an outer gear ring.

[0109] The outer wall of the reference column 620 is provided with an upper chord slot 625, which is arranged along the axial direction of the reference column 620, and a upper chord rack 626 is slidably fitted in the upper chord slot 625. The upper chord rack 626 is fixedly connected with a push plate 627, which extends to the liquid injection hole 610 and is provided with a liquid passing port 628, which is used for the main body 100 to inject liquid into the liquid dispensing container 600.

[0110] The winding rack 626 is equipped with a reset elastic member (not shown in the figure). In the natural state, the winding rack 626 is located at one end of the winding slot 625 close to the center seat 800 under the action of the reset elastic member. At this time, the winding rack 626 is separated from the inner ratchet of the internal meshing ratchet mechanism 624.

[0111] When the main body 100 extends into the liquid preparation container 600 through the liquid injection hole 610, the main body 100 pushes the push plate 627 to make the winding rack 626 slide along the winding groove 625, and the winding rack 626 then meshes with the inner ratchet of the inner meshing ratchet mechanism 624 and drives the inner meshing ratchet mechanism 624 to wind up the clockwork structure 623.

[0112] When a component is injected, the corresponding main body 100 retracts, the push plate 627 is released, the winding rack 626 is reset under the action of the reset elastic member, the rotating ring 621 rotates under the action of the clockwork structure 623, and the stirring blade 622 can stir and mix the liquid phase in the liquid preparation container 600.

[0113] When the next component is added, the winding rack 626 is further wound and the rotating ring 621 is prevented from rotating further, which can prevent the liquid from splashing onto the outer wall of the main body 100 and causing loss, and also avoid the possible error in the component ratio. At the same time, each time a new component is added, the clockwork structure 623 is wound a certain amount to ensure that the stirring blade 622 can fully mix the mixed phase after the addition of liquid is completed.

[0114] In addition, when the amount of a component added is relatively small, a smaller flow area is usually selected for addition, and correspondingly, the extension of the main body 100 is small, and the winding amount is relatively small. On the contrary, when the amount of a component added is relatively large, a larger flow area is usually selected for addition at the beginning, and correspondingly, the extension of the main body 100 is large, and the winding amount is relatively large. It is convenient to add the corresponding winding amount according to different addition amounts.

[0115] Optionally, the push plate 627 is further provided with a drainage rod 700, which is disposed in the liquid port 628. A lever 710 is disposed at the periphery of one end of the liquid port 628 close to the main body 100. One end of the lever 710 extends to a side of the push plate 627 close to the main body 100, and the other end extends through the liquid port 628 and is connected to the drainage rod 700.

[0116] When the main body 100 contacts the push plate 627, the main body 100 pushes the lever 710 away from one end of the drainage rod 700, so that the drainage rod 700 moves toward the inside of the first lumen 110. This design can effectively avoid liquid splashing during injection and avoid residual liquid at the mouth of the main body 100.

[0117] The present embodiment also provides an integrated circuit copper stripping liquid production process, which includes: connecting the supply pipelines of the non-hydroxylamine stripping agent, solvent, additive and ultrapure water to the liquid inlet channels 160 of the four main pipes 100 in the above-mentioned integrated circuit copper stripping liquid production system 2000 respectively, and using the integrated circuit copper stripping liquid production system 2000 to configure the integrated circuit copper stripping liquid product in the liquid preparation container 600.

[0118] Among them, the mass fraction of the non-hydroxylamine stripper is 8 to 11 parts, and the non-hydroxylamine stripper includes: at least one of triethanolamine, diethanolamine, monoethanolamine, o-toluidine, diphenylamine, triethylenediamine, caprolactam, N-methyl 1-ethanolamine, dimethylformamide, tert-butylamine, N-dimethylformamide, and N,N-dimethylpropionamide.

[0119] The mass fraction of the solvent is 47 to 50 parts, and the solvent includes at least one of propylene glycol phenyl ether, hexamethylphosphoric acid triamide, ethylene glycol butyl ether, ethylene glycol, polyethylene glycol, diethylene glycol, ethylene glycol monomethyl ether, butanol, octanol, cyclopentyl methyl ether, dipropylene glycol dimethyl ether, diethylene glycol dimethyl ether, and N-methylpyrrolidone.

[0120] The mass fraction of the additive is 1 to 2.5 parts, and the additive includes: at least one of dodecylphenol polyoxyethylene ether, N-hydroxyethyl piperazine, nonylphenol polyoxyethylene ether, polyvinyl imidazoline, 1-methyl-5-nitroimidazole, N,N-dimethylpropylene urea, succinic acid, 2-aminobenzothiazole, phytic acid, gluconic acid, and xylitol.

[0121] The mass fraction of ultrapure water is 37.2~41.2 parts.

[0122] In the technical solution, the distribution ratio of each group of the prepared integrated circuit copper stripping solution product is more accurately controlled, and the performance of the integrated circuit copper stripping solution product is further guaranteed.

[0123] 50mL of the prepared integrated circuit copper stripping solution was placed in a beaker, and after being kept constant in a water bath at 55℃, a 3cm*3cm glass sample was placed in it. After a certain period of time, the sample was taken out, cleaned with water spray, and then blown dry with an air knife. Whether there was any photoresist residue was observed under a metallographic optical microscope. It was observed that when the stripping time was controlled within the range of 8~15min, no photoresist residue was found. Fig.13 As shown. It can be seen that the integrated circuit copper stripping liquid product has a fast photoresist stripping rate, good stripping effect, and no residue.

[0124] In addition, in this integrated circuit copper stripping solution product, each component is not easy to volatilize, which can reduce the harm to the environment and safety. The evaporation amount of each component is small, the liquid has a long service life and stable performance.

[0125] In summary, the multi-channel liquid guiding tube 1000 provided in the embodiment of the present invention can effectively improve the quantitative accuracy of the liquid phase components, reduce the quantitative error, and make the configuration process of the liquid phase components more controllable. The integrated circuit copper stripping solution production system 2000 provided in the embodiment of the present invention can effectively improve the quantitative accuracy of each component, reduce the quantitative error, make the configuration process of the integrated circuit copper stripping solution more controllable, and ensure the quality of the stripping solution. The integrated circuit copper stripping solution production process provided in the embodiment of the present invention can effectively improve the quantitative accuracy of each component, reduce the quantitative error, make the configuration process of the integrated circuit copper stripping solution more controllable, and ensure the quality of the stripping solution.

[0126] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A multi-channel liquid guiding pipe, characterized in that: include: A main body, a first core body, a second core body and a first driver; The main body has a first lumen, a second lumen and a third lumen which are connected in sequence, and the inner diameters of the three lumens are increased in sequence. The first lumen is located at one end of the main body; the diameter of the first core body is larger than the inner diameter of the first lumen and smaller than the inner diameter of the second lumen; the diameter of the second core body is larger than the inner diameter of the second lumen and smaller than the inner diameter of the third lumen; The first core is located on a side of the first tube cavity close to the second tube cavity, and the second core is located on a side of the first core away from the first tube cavity; along the axial direction of the main tube, both the first core and the second core can be slidably fitted in the main tube; the second core is equipped with a first elastic member to push the second core toward one end of the third tube cavity close to the second tube cavity; The second core body is provided with a first connecting hole connecting a side close to the first core body and a side far from the first core body; The first driver is used to control the relative movement of the first core and the main pipe along the axial direction, so that the first core can push the second core, thereby adjusting the flow area of ​​the main pipe.

2. The multi-channel liquid conduit according to claim 1, characterized in that: The main tube body further has a fourth lumen, the inner diameter of the fourth lumen is larger than the inner diameter of the third lumen, the fourth lumen is located at an end of the third lumen away from the first lumen and is connected to the third lumen; The multi-channel catheter also includes a third core body, the diameter of which is larger than the inner diameter of the third tube cavity and smaller than the inner diameter of the fourth tube cavity, and the third core body is arranged in the fourth tube cavity; along the axial direction of the main tube body, the third core body can be slidably matched with the main tube body; the third core body is matched with a second elastic member, so as to push the third core body toward the fourth tube cavity close to one end of the third tube cavity; The third core body is provided with a second connecting hole connecting a side close to the second core body and a side far from the second core body; The first driver is used to control the relative axial movement of the first core and the main pipe, so that the first core can push the second core and the third core in sequence, thereby regulating the flow area of ​​the main pipe.

3. The multi-channel liquid guiding tube according to claim 2, characterized in that: The multi-channel liquid guiding tube further comprises: a first matching rod; One end of the main tube away from the first lumen is closed by a sealing block, and the sealing block has a matching inner cavity; The third core body is connected to the first mating rod, the first mating rod is arranged along the axial direction of the main tube body and penetrates into the mating inner cavity, the first mating rod is slidably fitted with the sealing block, and the second elastic member abuts between the inner wall of the mating inner cavity on one side away from the first tube cavity and the end of the first mating rod.

4. The multi-channel liquid guiding tube according to claim 3, characterized in that: The multi-channel liquid guiding tube further comprises: a second matching rod; A mating hole is provided on one side of the third core body close to the second core body, and the mating hole extends along the axial direction of the main tube body and extends to the first mating rod; the second core body is connected to the second mating rod, and the second mating rod is arranged along the axial direction of the main tube body and slidably fits in the mating hole, and the first elastic member abuts between an end wall of the mating hole away from the first tube cavity and an end of the second mating rod.

5. The multi-channel liquid guiding tube according to claim 4, characterized in that: The multi-channel liquid guiding pipe also includes: an end seat and a control rod; The first core body is connected to the control rod, and the control rod is arranged along the axial direction of the main body. The control rod passes through the second core body, the second matching rod, the first matching rod and the sealing block in sequence through the side of the second core body close to the first core body. The end of the control rod away from the first core body is fixedly connected to the end seat, and the end seat is located on the side of the sealing block away from the first tube cavity; the first driver is used to drive the main body to move away from and approach the end seat along the axial direction.

6. The multi-channel liquid conduit according to claim 1, characterized in that: The first connecting hole comprises: a first flow channel, a second flow channel and a third flow channel; the first flow channel is located on a side of the second core body away from the first core body, the third flow channel is located on a side of the second core body close to the first core body, and the second flow channel connects the first flow channel and the third flow channel; the first flow channel and the third flow channel are both arranged along the axial direction of the main body, and the second flow channel is arranged along the radial direction of the main body; An arc-shaped slide groove is provided on an end wall of the first flow channel close to the second flow channel, and both ends of the arc-shaped slide groove penetrate to a side of the second core body close to the first core body, and an arc-shaped piece is slidably fitted in the arc-shaped slide groove, and the length of the arc-shaped piece is greater than the length of the arc-shaped slide groove; the central axis of the circular ring corresponding to the arc-shaped piece is perpendicular to the central axis of the main body and the central axis of the second flow channel at the same time; The outer ring wall of the arc-shaped member is provided with a matching notch; When the second core body is in contact with the end wall of the third tube cavity close to the second tube cavity, the end of the arc-shaped member away from the central axis of the main tube body is pushed into the arc-shaped slide groove, and the other end of the arc-shaped member extends out of the arc-shaped slide groove, a part of the matching notch is located in the first flow channel, and another part of the matching notch is located in the second flow channel, and the matching notch connects the first flow channel and the second flow channel; When the first core body pushes the second core body, the first core body pushes one end of the arc-shaped part close to the central axis of the main body into the arc-shaped slot, and the other end of the arc-shaped part extends out of the arc-shaped slot, and the matching notches are all located in the first flow channel, and the arc-shaped part blocks the first flow channel and the second flow channel.

7. An integrated circuit copper stripping solution production system, characterized in that: include: A liquid dispensing container, a center seat, a second driver, and a multi-channel liquid guiding pipe member as claimed in any one of claims 1 to 6; There are a plurality of multi-channel liquid guiding pipes, and the plurality of multi-channel liquid guiding pipes are evenly spaced along the circumference of the central seat; A plurality of the multi-channel liquid guiding tubes share one end seat; the end seat is fixedly connected to the center seat, the outer diameter of the center seat is smaller than the outer diameter of the end seat, and the center seat is coaxially arranged with the end seat; The second driver is built into the center seat, and a rotating part is provided at one end of the center seat away from the end seat, and the rotating part is in transmission cooperation with the second driver; The liquid preparation container is detachably connected to the rotating part; The side of the liquid dispensing container close to the center seat is in contact with the end wall of the main body, and a liquid injection hole is provided on the side of the liquid dispensing container close to the center seat, and the diameter of the liquid injection hole is adapted to the outer diameter of the main body; The second driver is used to drive the liquid preparation container to rotate so that the liquid injection hole is aligned with the main pipe corresponding to the component to be added.

8. The integrated circuit copper stripping solution production system according to claim 7, characterized in that: A reference column is provided in the liquid dispensing container, the reference column is fixedly connected to a side wall of the liquid dispensing container close to the center seat, and the reference column extends along the axial direction of the main pipe; A rotating ring is provided at one end of the reference column away from the central seat, and the rotating ring is connected with a stirring blade; The reference column is built with a spring structure and an internal meshing ratchet mechanism, the dial of the internal meshing ratchet mechanism is in transmission cooperation with the winding gear of the spring structure, and the release gear of the spring structure is in transmission cooperation with the rotating ring; the inner ratchet of the internal meshing ratchet mechanism has an outer gear ring; An upper chord slot is provided on the outer wall of the reference column, and the upper chord slot is arranged along the axial direction of the reference column, and an upper chord rack is slidably matched in the upper chord slot; a push plate is fixedly connected to the upper chord rack, and the push plate extends to the liquid injection hole, and a liquid passing port is provided on the push plate, and the liquid passing port is used for the main pipe to inject liquid into the liquid dispensing container; The winding rack is equipped with a reset elastic member. In a natural state, the winding rack is located at one end of the winding slot close to the center seat, and the winding rack is separated from the inner ratchet. When the main pipe body extends into the liquid dispensing container through the liquid injection hole, the main pipe body pushes the push plate, so that the winding rack meshes with the inner ratchet and drives the inner meshing ratchet mechanism to wind the clockwork structure.

9. The integrated circuit copper stripping solution production system according to claim 8, characterized in that: The push plate is also provided with a drainage rod, and the drainage rod is arranged in the liquid passage port; A lever is provided at the periphery of one end of the liquid outlet close to the main pipe body; one end of the lever extends to a side of the push plate close to the main pipe body, and the other end extends through the liquid outlet and is connected to the drainage rod; When the main pipe body contacts the push plate, the main pipe body pushes the lever away from one end of the drainage rod, so that the drainage rod moves toward the inside of the first lumen.

10. A production process for integrated circuit copper stripping solution, characterized in that: include: Connecting the supply pipelines of the non-hydroxylamine stripper, the solvent, the additive and the ultrapure water to the four main pipes in the integrated circuit copper stripper production system according to any one of claims 7 to 9, respectively, and using the integrated circuit copper stripper production system to prepare the integrated circuit copper stripper product in the liquid preparation container; The non-hydroxylamine stripping agent has a mass fraction of 8 to 11 parts, and the non-hydroxylamine stripping agent includes at least one of triethanolamine, diethanolamine, monoethanolamine, o-toluidine, diphenylamine, triethylenediamine, caprolactam, N-methyl-1-ethanolamine, dimethylformamide, tert-butylamine, N-dimethylformamide, and N,N-dimethylpropionamide; The mass fraction of the solvent is 47 to 50 parts, and the solvent includes at least one of propylene glycol phenyl ether, hexamethyl phosphoric acid triamide, ethylene glycol butyl ether, ethylene glycol, polyethylene glycol, diethylene glycol, ethylene glycol monomethyl ether, butanol, octanol, cyclopentyl methyl ether, dipropylene glycol dimethyl ether, diethylene glycol dimethyl ether, and N-methylpyrrolidone; The mass fraction of the additive is 1 to 2.5 parts, and the additive includes at least one of dodecylphenol polyoxyethylene ether, N-hydroxyethyl piperazine, nonylphenol polyoxyethylene ether, polyvinyl imidazoline, 1-methyl-5-nitroimidazole, N,N-dimethylpropylene urea, succinic acid, 2-aminobenzothiazole, phytic acid, gluconic acid, and xylitol; The mass fraction of the ultrapure water is 37.2 to 41.2 parts.

Images