Temperature control system, test equipment and temperature control method

Abstract

The present invention belongs to the field of temperature control technology, and discloses a temperature control system, a test device and a temperature control method. The temperature control system includes a first control component, a first-level control component, a second control component, a second-level control component and a heat exchanger. The first control component has a liquid-cooled control medium to control the temperature of the test component; the first-level control component has a first-level control medium to control the temperature of the liquid-cooled control medium; the second control component is arranged in the test chamber and can generate a control airflow for controlling the temperature of the test chamber; the second-level control component has a flowing second-level control medium to exchange heat with the control airflow; the first-level control medium and the second-level control medium exchange heat through the heat exchanger so that the first-level control medium evaporates and the second-level control medium cools. In this way, when the temperature control system is used, only one set of temperature adjustment system is needed, which effectively reduces the overall manufacturing cost of the temperature control system, thereby helping to reduce the cost of the entire test link.

Description

Technical Field

[0001] The present invention relates to the technical field of temperature control, and in particular to a temperature control system, a testing device and a temperature control method. Background Art

[0002] In the testing process of semiconductor, new energy and other components, the test components need to complete corresponding tests in a specific environment to verify the performance of the test components during actual use. During the testing process, not only the temperature of the environment needs to be precisely controlled, but also the temperature of the test components themselves needs to be precisely controlled.

[0003] In the prior art, the test equipment has two temperature control systems, one for adjusting the temperature of the test chamber and the other for adjusting the temperature of the test component. Both temperature control systems need to be running continuously to ensure that the temperature of the test chamber and the test component can meet the requirements.

[0004] The two temperature control systems can more flexibly meet the different test temperature requirements of the test components and the test chambers, but the medium used for temperature control needs to be temperature controlled separately, which leads to high overall manufacturing costs of the two temperature control systems and high costs in the testing process. Summary of the invention

[0005] The purpose of the present invention is to provide a temperature control system, a test device and a temperature control method, which solves the problem in the prior art that the test components need to use two independent temperature control systems in the test link to flexibly control the temperature of the test link and the test components, and the manufacturing cost of the two independent temperature control systems is high, resulting in a high cost of the entire test link.

[0006] To achieve this object, the present invention adopts the following technical solutions:

[0007] In a first aspect, the present invention provides a temperature control system, comprising:

[0008] A first control component has a liquid cooling control pipeline, in which a liquid cooling control medium flows to control the temperature of the test component;

[0009] A primary control component, comprising a primary control pipeline connected to the liquid cooling control pipeline, wherein a primary control medium flows in the primary control pipeline to control the temperature of the liquid cooling control medium;

[0010] A second regulating component, disposed in the test chamber and capable of generating a regulating airflow for regulating the temperature of the test chamber;

[0011] A secondary regulating component, having a secondary regulating pipeline connected to the second regulating component, wherein the secondary regulating pipeline has a flowing secondary regulating medium for exchanging heat with the regulating airflow;

[0012] The heat exchange component is connected to both the primary control pipeline and the secondary control pipeline. The primary control medium and the secondary control medium exchange heat through the heat exchange component so that the primary control medium evaporates and the secondary control medium cools.

[0013] Optionally, the primary control component includes a primary compressor, a primary condensing module and an economizer; the primary control pipeline includes:

[0014] A primary condensation branch, one end of which is connected to the exhaust port of the primary compressor, and the other end of which is connected to the primary condensation module, so as to transmit the gaseous primary regulating medium generated by the primary compressor to the primary condensation module to form a liquid primary regulating medium;

[0015] A primary control branch, one end of which is connected to the primary condensing module, and the other end of which is connected to the liquid cooling control pipeline. The economizer is arranged in the primary control branch to conduct heat exchange with the liquid primary control medium to the liquid cooling control pipeline to form a gaseous primary control medium after heat exchange with the first control medium;

[0016] A primary reflux branch, one end of which is connected to the liquid cooling control pipeline, and the other end of which is connected to the primary compressor to guide the gaseous primary control medium to the inlet of the primary compressor;

[0017] A primary evaporation branch, one end of which is connected to the primary control branch, and the other end of which is connected to the primary reflux branch. The heat exchange element is arranged on the primary evaporation branch. The primary evaporation branch is used to guide the liquid primary control medium into the heat exchange element to form a gaseous primary heat exchange medium for heat exchange with the secondary control medium.

[0018] Optionally, the primary control component further includes:

[0019] The primary heat regenerator is arranged in the primary regulating branch and the primary reflux branch to enable the liquid primary regulating medium to exchange heat with the gaseous primary regulating medium.

[0020] Optionally, the primary control component further includes:

[0021] A first control valve is arranged in the first-stage evaporation branch and is located between the heat exchange element and the first-stage compressor;

[0022] A diversion branch, one end of which is connected to the primary evaporation branch, and the other end of which is connected to the primary regulation branch;

[0023] The second control valve is arranged in the diversion branch to control the on-off of the diversion branch.

[0024] Optionally, the secondary control component includes: a secondary compressor and a secondary condensing module, and the secondary control pipeline includes:

[0025] A secondary condensation branch, one end of which is connected to the secondary compressor, and the other end of which is connected to the secondary condensation module to guide the gaseous secondary regulating medium discharged from the secondary compressor into the secondary condensation module;

[0026] A secondary cooling branch, one end of which is in communication with the secondary condensation module, and the other end of which is in communication with the heat exchange element, so as to guide the liquid secondary regulating medium discharged from the secondary condensation module into the heat exchange element for heat exchange and condensation with the primary regulating medium;

[0027] A secondary control branch is connected to the heat exchange element at one end and to the second control component at the other end, so that the secondary control medium that has completed heat exchange and condensation can flow through the secondary heat regenerator and the third expansion valve and then enter the second control component to exchange heat with the control airflow, and the secondary control branch is connected to the secondary compressor to control the temperature of the exhaust gas from the secondary compressor.

[0028] Optionally, the secondary control component further includes:

[0029] The secondary heat regenerator is arranged in the secondary control branch so that the secondary control medium that has completed heat exchange condensation can exchange heat with the secondary control medium flowing through the second control component.

[0030] Optionally, the secondary control component further includes:

[0031] A secondary reflux branch has one end connected to the secondary regulating branch and the other end connected to the secondary compressor.

[0032] Optionally, the secondary control component further includes:

[0033] The buffer tank is connected to the secondary control branch and the secondary cooling branch respectively.

[0034] In a second aspect, the present invention further provides a testing device, which comprises:

[0035] Test chamber;

[0036] A test component is disposed in the test chamber;

[0037] The temperature control system as described in any one of the first aspects is used to control the temperature of the test chamber and the test component.

[0038] In a third aspect, a temperature control method is applied to the temperature control system described in any one of the first aspects, comprising:

[0039] Part of the first-level control medium is heat exchanged with the liquid-cooled control medium, and the other part of the first-level control medium is heat exchanged with the secondary control medium so that the first-level control medium evaporates and the secondary control medium is cooled, and the cooled secondary control medium is heat exchanged with the control airflow, the liquid-cooled control medium that completes the heat exchange controls the temperature of the test component, and the control airflow that completes the heat exchange controls the temperature of the test chamber.

[0040] Beneficial effects of the present invention:

[0041] In the first aspect, by setting a heat exchanger, the primary control medium and the secondary control medium can form heat exchange, and the primary control medium evaporates, while the secondary control medium cools, and the primary control medium exchanges heat with the liquid-cooled control medium flowing in the liquid-cooled control pipeline through the primary control pipeline to ensure that the temperature of the liquid-cooled control medium meets the requirements. After the liquid-cooled control medium and the test component continue to exchange heat, the temperature of the test component can meet the requirements. After the cooled secondary control medium exchanges heat with the control airflow, the temperature of the control airflow meets the requirements, and the control airflow can control the temperature of the test chamber to within the target temperature range. The primary control medium and the secondary control medium will return to the heat exchanger again for heat exchange and continue to circulate. In this way, when the temperature control system is used, the various heat exchange media inside the temperature control system are sequentially exchanged to realize the cyclic control of the temperature of the test component and the test chamber. It is no longer necessary to set up two sets of temperature control structures separately. Only one set of temperature control system is needed to make the temperature of the test component and the test chamber reach the target temperature range, which effectively reduces the overall manufacturing cost of the temperature control system, thereby helping to reduce the cost of the entire test link.

[0042] Secondly, when the test equipment is in use, the temperature control system can be used to simultaneously control the temperature of the test components and the test chamber environment, and the test components and the test chamber can be kept within different target temperature ranges without the need to set up two separate temperature control systems. This can effectively reduce the manufacturing cost of the test equipment and thereby reduce the cost of the testing process.

[0043] Thirdly, through this temperature control method, the temperature control of the test component and the test chamber can be completed simultaneously and with the help of one system, without the need to set up two separate temperature control systems, which effectively reduces the cost of the test chamber. BRIEF DESCRIPTION OF THE DRAWINGS

[0044] Figure 1 Schematic diagram of the structure of the temperature control system in the embodiment of the present invention.

[0045] Figure 2It is a structural schematic diagram of the first control component of the temperature control system in an embodiment of the present invention.

[0046] Figure 3 It is a structural schematic diagram of a primary control component of a temperature control system in an embodiment of the present invention.

[0047] Figure 4 Schematic diagram of the structure of the second control component of the temperature control system in an embodiment of the present invention.

[0048] Figure 5 Schematic diagram of the structure of the secondary control component of the temperature control system in the embodiment of the present invention.

[0049] In the figure:

[0050] 1. First control component; 11. Expansion tank; 12. Cold storage tank; 13. Check valve; 14. Liquid level gauge; 16. Liquid inlet pipeline; 17. Liquid return pipeline; 171. Liquid-cooled evaporator; 18. Circulation pump; 19. Electric heating pipe; 191. Temperature detector; 2. First-level control component; 21. First-level compressor; 22. First-level condensing module; 23. Economizer; 24. First-level condensing branch; 25. First-level control branch; 251. First expansion valve; 26. First-level reflux branch; 261. First-level regenerator; 27. First-level evaporation branch; 271. Second expansion valve; 272. First control valve; 273. Diversion branch; 274. Second control valve control valve; 28, liquid storage tank; 29, subcooling branch; 291, subcooling expansion valve; 3, second control component; 31, fan; 32, heating wire; 33, fin evaporator; 4, secondary control component; 41, secondary compressor; 42, secondary condensing module; 43, secondary condensing branch; 44, secondary cooling branch; 45, secondary control branch; 46, secondary regenerator; 47, third expansion valve; 48, secondary reflux branch; 49, buffer tank; 491, unloading valve; 5, heat exchanger; 6, test component; 7, test chamber; 100, pressure sensor; 200, temperature sensor; 300, oil separator; 400, drying filter. DETAILED DESCRIPTION

[0051] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention. It should also be noted that, for ease of description, only parts related to the present invention, rather than all structures, are shown in the accompanying drawings.

[0052] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0053] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0054] In the description of this embodiment, the terms "upper", "lower", "left", "right" and other directions or positional relationships are based on the directions or positional relationships shown in the drawings, and are only for the convenience of description and simplification of operation, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operate in a specific direction, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.

[0055] The embodiments of the present invention disclose a temperature control system, a testing device and a temperature control method.

[0056] Reference Figure 1 The temperature control system includes a first control component 1, a first-level control component 2, a second-level control component 3, a second-level control component 4 and a heat exchanger 5. The first control component 1 has a liquid-cooling control pipeline, in which a liquid-cooling control medium flows to control the temperature of the test component 6; the first-level control component 2 has a first-level control pipeline connected to the liquid-cooling control pipeline, in which a first-level control medium flows to control the temperature of the liquid-cooling control medium; the second control component 3 is arranged in the test chamber 7 and can generate a control airflow for controlling the temperature of the test chamber 7; the second-level control component 4 has a second-level control pipeline connected to the second-level control component 3, in which a second-level control medium flows to exchange heat with the control airflow; the heat exchanger 5 is connected to both the first-level control pipeline and the second-level control pipeline, and the first-level control medium exchanges heat with the second-level control medium through the heat exchanger 5 so that the first-level control medium evaporates and the second-level control medium cools.

[0057] It should be understood that the liquid-cooled control medium, the primary control medium and the secondary control medium used above have different corresponding evaporation temperatures. The liquid-cooled control medium can be selected according to the temperature control requirements that the actual test component 6 needs to meet, while the primary control medium and the secondary control medium are selected according to the heat exchange requirements during the control process. Taking the test temperature of the test component 6 that needs to meet -40°C and the test chamber 7 that needs to meet -70°C as an example, the liquid-cooled control medium and the control airflow can be stably maintained within the corresponding temperature range, and the evaporation temperature of the primary control medium can be -45°C, which can exchange heat with the first control medium when it is vaporized so that the first control medium is maintained at about -40°C, while the evaporation temperature of the secondary control medium can be -80°C, which can exchange heat with the first control medium when it is vaporized so that the control airflow is maintained at about -70°C. Based on the different states of different types of control media at different temperatures and pressures, the various control media can be heat-exchanged with each other by setting up pipelines so that the entire temperature control system can be integrated.

[0058] Specifically, a liquid-cooled evaporator 171 is provided on the liquid-cooled control pipeline, and the liquid-cooled evaporator 171 is connected to the primary control pipeline, and the primary control medium and the liquid-cooled control medium are heat-exchanged through the liquid-cooled evaporator 171, so that the temperature of the liquid-cooled control medium meets the requirements and circulates into the test component 6 to control the temperature of the test component 6. After the heat exchange, the primary control medium circulates into the heat exchange element 5 to exchange heat with the secondary control medium, so that the primary control medium evaporates, and the secondary control medium is further cooled, and the evaporated primary control medium flows into the first control pipeline again to exchange heat with the liquid-cooled control medium, so as to maintain the temperature of the liquid-cooled control medium within the target temperature range.

[0059] The cooled secondary regulating medium flows through the second regulating component 3 through the secondary regulating pipeline. The second regulating component 3 is arranged in the test chamber 7. The second regulating component 3 can generate a regulating airflow. The regulating airflow exchanges heat with the secondary regulating medium to reach the target temperature range. The secondary regulating medium can be converted from liquid to gas after heat exchange with the regulating airflow. At this time, the evaporation temperature of the secondary regulating medium is the temperature of the regulating airflow.

[0060] By setting the heat exchanger 5, the primary control medium and the secondary control medium can form heat exchange, and the primary control medium evaporates, while the secondary control medium cools. The primary control medium exchanges heat with the liquid-cooled control medium flowing in the liquid-cooled control pipeline through the primary control pipeline to ensure that the temperature of the liquid-cooled control medium meets the requirements. After the liquid-cooled control medium and the test component 6 continue to exchange heat, the temperature of the test component 6 can meet the requirements. The cooled secondary control medium can flow through the second control component 3 and exchange heat with the control airflow, so that the temperature of the control airflow meets the requirements. The control airflow can control the temperature of the test chamber 7 to within the target temperature range. The primary control medium and the secondary control medium will return to the heat exchanger 5 again for heat exchange and continuous circulation. When the temperature control system is in use, the various control media inside the temperature control system are exchanged in turn to achieve cyclic control of the temperature of the test component 6 and the test chamber 7. There is no need to set up two sets of temperature control structures separately. Only one set of temperature control system is needed to make the temperature of the test component 6 and the test chamber 7 reach the target temperature range, which effectively reduces the overall manufacturing cost of the temperature control system, thereby helping to reduce the cost of the entire testing process.

[0061] Reference Figure 2 Optionally, the first regulating component 1 includes an expansion tank 11 and a cold storage tank 12, and the expansion tank 11 and the cold storage tank 12 are connected by a one-way valve 13. A liquid level gauge 14 and a liquid filling port can also be set on the expansion tank 11. The expansion tank 11 is used for medium expansion and storage of liquid cooling regulating medium, and the cold storage tank 12 is used to store circulating medium to ensure that the temperature of the liquid cooling regulating medium meets the preliminary requirements. The liquid cooling regulating pipeline can include a liquid inlet pipeline 16 and a liquid return pipeline 17, one end of the liquid inlet pipeline 16 is connected to the cold storage tank 12, and the other end is connected to the liquid return pipeline 17. The connection between the liquid inlet pipeline 16 and the liquid return pipeline 17 is located in the test component 6, and the liquid return pipeline 17 is connected to the cold storage tank 12 to realize the circulation of the liquid cooling regulating medium.

[0062] A circulation pump 18, an electric heating tube 19 and a temperature detector 191 are sequentially arranged on the liquid inlet pipeline 16. The circulation pump 18 draws the liquid cooling control medium into the liquid cooling control pipeline for circulation. The temperature detector 191 is used to detect the temperature of the liquid cooling control medium. The electric heating tube 19 can be used to heat the liquid cooling control medium.

[0063] The liquid return pipeline 17 is provided with a liquid-cooled evaporator 171, which is connected to the primary control pipeline. The primary control medium and the liquid-cooled control medium exchange heat through the liquid-cooled evaporator 171, and the primary control medium absorbs heat and flows back to the original place to form a circulating flow.

[0064] Reference Figure 3Optionally, the primary regulating component 2 includes a primary compressor 21, a primary condensing module 22 and an economizer 23; the primary regulating pipeline includes a primary condensing branch 24, a primary regulating branch 25, a primary reflux branch 26 and a primary evaporation branch 27.

[0065] One end of the primary condensation branch 24 is connected to the exhaust port of the primary compressor 21, and the other end is connected to the primary condensation module 22, so as to transmit the gaseous primary regulating medium generated by the primary compressor 21 to the primary condensation module 22 to form a liquid primary regulating medium.

[0066] Specifically, the primary compressor 21 can convert the primary control medium into a high-temperature and high-pressure gaseous state. The primary condensation branch 24 is also provided with a pressure sensor 100, a temperature sensor 200 and an oil separator 300. The return port of the oil separator 300 is connected to the primary compressor 21, so that the lubricating oil of the primary compressor 21 brought out by the primary control medium is separated and returned to the primary compressor 21. The primary condensation module 22 can cool the high-temperature and high-pressure gaseous primary control medium to convert the primary control medium into a high-pressure and low-temperature liquid primary control medium.

[0067] One end of the primary control branch 25 is connected to the primary condensing module 22, and the other end is connected to the liquid cooling control pipeline. The economizer 23 is arranged in the primary control branch 25 to conduct heat exchange with the liquid primary control medium to the liquid cooling control pipeline to exchange heat with the first control medium to form a gaseous primary control medium.

[0068] Specifically, a liquid storage tank 28 and a filter dryer 400 are arranged on one side of the primary control branch 25 and close to the primary condensing module 22 to preliminarily process the primary control medium. A first flow channel and a second flow channel are provided in the economizer 23, which are in contact with each other but not connected. Part of the primary control medium discharged from the filter dryer 400 flows through the first flow channel, while the other part flows through the second flow channel through the subcooling branch 29. A subcooling expansion valve 291 is arranged on the subcooling branch 29 to reduce the pressure of the primary control medium passing through the cold branch 29. The reduced-pressure primary control medium and the high-pressure primary control medium flow in the second flow channel and the first flow channel respectively.

[0069] The primary regulating medium flowing in the second flow channel has a lower pressure and less heat, so the high-pressure and low-temperature liquid primary regulating medium in the first flow channel can further transfer heat to the primary regulating medium in the second flow channel, so that the primary regulating medium flowing out of the second flow channel is a low-temperature and low-pressure gaseous primary regulating medium, and the primary regulating medium in the first flow channel is supercooled to form a liquid with a lower temperature. A first expansion valve 251 can also be set at the outlet end of the economizer 23. After passing through the first expansion valve 251, the liquid flows to the liquid-cooled evaporator 171. The first expansion valve 251 allows the supercooled high-pressure liquid to release the pressure and then exchange heat with the liquid-cooled regulating medium to regulate the temperature of the liquid-cooled regulating medium.

[0070] One end of the primary reflux branch 26 is connected to the liquid cooling control pipeline, and the other end is connected to the primary compressor 21 to guide the gaseous primary control medium to the inlet of the primary compressor 21 .

[0071] Specifically, the supercooled liquid primary regulating medium will absorb heat and become gaseous after heat exchange with the liquid-cooled regulating medium. The gaseous primary regulating medium can return to the primary compressor 21 along the primary reflux branch 26. A pressure sensor 100 and a temperature sensor 200 can also be set on the primary reflux branch 26 to detect whether the air pressure and temperature meet the recovery requirements of the primary compressor 21.

[0072] One end of the primary evaporation branch 27 is connected to the primary control branch 25, and the other end is connected to the primary reflux branch 26. The heat exchanger 5 is arranged in the primary evaporation branch 27. The primary evaporation branch 27 is used to guide the liquid primary control medium into the heat exchanger 5 to form heat exchange with the secondary control medium to form a gaseous primary control medium.

[0073] Specifically, a second expansion valve 271 is provided on the first-level evaporation branch 27. The high-pressure supercooled liquid first-level regulating medium flows through the second expansion valve 271 and then flows into the heat exchange element 5 to release the pressure and exchange heat with the secondary regulating medium flowing into the heat exchange element 5. The first-level regulating medium absorbs heat and becomes a low-temperature and low-pressure gas, while the secondary regulating medium is cooled and becomes a high-pressure and low-temperature liquid.

[0074] Through the primary condensation branch 24, the primary control branch 25, the primary reflux branch 26 and the primary evaporation branch 27, the primary control medium can be changed from a high-temperature and high-pressure gaseous state to a high-pressure and low-temperature liquid state, and through the heat exchange between the high-pressure and low-temperature liquid state and the low-temperature and low-pressure liquid state, a high-pressure supercooled liquid primary control medium is formed. A part of the primary control medium is used for temperature control of the liquid-cooled control medium, and the other part is used for cooling the secondary control medium. The secondary control medium is used for temperature control of the test chamber 7, so that the temperature control of the test component 6 and the temperature control of the test chamber 7 can be shared.

[0075] Reference Figure 3 Optionally, the primary regulating component 2 further includes a primary regenerator 261. The primary regenerator 261 is disposed in the primary regulating branch 25 and the primary reflux branch 26, so that the liquid primary regulating medium exchanges heat with the gaseous primary regulating medium.

[0076] Specifically, the primary heat regenerator 261 is the same as the economizer 23 , and has a first flow channel and a second flow channel in the primary heat regenerator 261 . The first flow channel is connected to the primary regulating branch 25 , and the second flow channel is connected to the primary reflux branch 26 .

[0077] The low-temperature supercooled liquid primary regulating medium will absorb heat and rise in temperature when exchanging heat with the liquid-cooled regulating medium. The heated primary regulating medium will enter the second flow channel in the primary heat regenerator 261 along the primary reflux branch 26. At this time, the primary regulating medium in the first flow channel will release heat again, causing the primary regulating medium in the second flow channel to be superheated and become a low-temperature and low-pressure gas, and then flow back to the primary compressor 21.

[0078] Optionally, the primary regulating component 2 further includes a first control valve 272, a diversion branch 273 and a second control valve 274. The first control valve 272 is arranged in the primary evaporation branch 27 and is located between the heat exchanger 5 and the primary compressor 21; one end of the diversion branch 273 is connected to the primary evaporation branch 27, and the other end is connected to the primary regulating branch 25; the second control valve 274 is arranged in the diversion branch 273 to control the opening and closing of the diversion branch 273.

[0079] Specifically, the first control valve 272 and the second control valve 274 are both solenoid valves, wherein the first control valve 272 is used to control the on-off between the primary evaporation branch 27 and the primary compressor 21 , and the second control valve 274 is used to control the on-off of the diversion branch 273 .

[0080] When the temperature of the test component 6 and the test chamber 7 is regulated, only the first control valve 272 is opened, the second control valve 274 is closed, and the primary regulating medium flowing out of the heat exchanger 5 only flows to the primary compressor 21. When only the temperature of the test component 6 is regulated, the first control valve 272 is closed, the second control valve 274 is opened, and the primary regulating medium flowing out of the heat exchanger 5 flows to the primary regenerator 261. When only the temperature of the test chamber 7 is regulated, only the first control valve 272 is opened, the second control valve 274 is closed, and the primary regulating medium flowing out of the heat exchanger 5 only flows to the primary compressor 21.

[0081] In this way, the entire temperature control system can flexibly change the flow direction of the primary control medium according to the needs of temperature control, thereby making the temperature control system have a higher adaptability.

[0082] Reference Figure 4Optionally, the second regulating component 3 includes a fan 31, a heating wire 32 and a fin evaporator 33, wherein the secondary regulating pipeline is at least partially arranged around the fin evaporator 33. The fan 31 can generate a regulating airflow when it is running, and the regulating airflow can generate heat exchange when passing through the heating wire 32 and the fin evaporator 33, and the start and stop of the heating wire 32 can be controlled separately. When the regulating airflow flows through the fin evaporator 33, the regulating airflow can exchange heat with the secondary regulating medium, so that the temperature of the regulating airflow changes, thereby achieving the purpose of regulating the temperature in the test chamber 7.

[0083] Reference Figure 5 Optionally, the secondary control component 4 includes a secondary compressor 41 and a secondary condensation module 42. The secondary control pipeline includes a secondary condensation branch 43, a secondary cooling branch 44 and a secondary control branch 45.

[0084] One end of the secondary condensation branch 43 is connected to the secondary compressor 41 , and the other end is connected to the secondary condensation module 42 to guide the gaseous secondary regulating medium discharged from the secondary compressor 41 into the secondary condensation module 42 .

[0085] Specifically, the secondary condensation module 42 and the primary condensation module 22 may be the same condensation module, and a pressure sensor 100 is provided on the secondary condensation branch 43 to detect the pressure of the gas discharged from the secondary compressor 41. The secondary compressor 41 can convert the secondary control medium into a high-temperature and high-pressure gaseous state, and the gaseous secondary control medium is guided by the secondary condensation branch 43 to the secondary condensation module 42 for preliminary condensation into a high-pressure and low-temperature liquid state.

[0086] One end of the secondary cooling branch 44 is connected to the secondary condensation module 42, and the other end is connected to the heat exchange element 5, so as to guide the liquid secondary control medium discharged from the secondary condensation module 42 into the heat exchange element 5 for heat exchange and condensation with the primary control medium.

[0087] Specifically, the secondary cooling branch 44 is provided with an oil separator 300 and a drying filter 400, and the return air port of the oil separator 300 is connected to the exhaust port of the secondary compressor 41. The secondary control medium preliminarily cooled by the secondary condensation module 42 will flow into the secondary cooling branch 44, and when flowing through the oil separator 300, the gaseous secondary control medium will flow back to the exhaust port of the secondary compressor 41, and the liquid secondary control medium will flow into the heat exchange element 5, exchange heat with the primary control medium, and be further condensed to form a high-pressure and low-temperature liquid secondary control medium.

[0088] One end of the secondary control branch 45 is connected to the heat exchange element 5, and the other end is connected to the second control component 3, so that the secondary control medium that has completed heat exchange and condensation can flow through the secondary regenerator 46 and the third expansion valve 47 and then enter the second control component 3 to exchange heat with the control airflow, and the secondary control branch 45 is connected to the secondary compressor 41 to control the temperature of the exhaust gas from the secondary compressor 41.

[0089] Specifically, the low-temperature and high-pressure liquid secondary regulating medium can flow along the secondary regulating branch 45 through the secondary heat regenerator 46 and the third expansion valve 47, and then flow through the second regulating component 3 after pressure and temperature adjustment. The regulating airflow can then form heat exchange with the secondary regulating medium. After absorbing heat, the secondary regulating medium can be converted from liquid to gas and flow back to the secondary compressor 41 along the secondary regulating branch 45.

[0090] Through the secondary condensation branch 43, the secondary cooling branch 44 and the secondary control branch 45, the high-temperature and high-pressure gaseous secondary control medium is first cooled by the secondary condensation module 42, and then passes through the heat exchange component 5 to exchange heat with the primary control medium and is cooled for a second time to become a low-temperature liquid, and then flows through the second control component 3 to absorb heat and become a gas, and then flows back to the secondary compressor 41 to form a circulation, so as to realize the temperature control of the test chamber 7.

[0091] Optionally, the secondary control component 4 further includes a secondary heat regenerator 46 . The secondary heat regenerator 46 is disposed in the secondary control branch 45 so that the secondary control medium that has completed heat exchange condensation can exchange heat with the secondary control medium flowing through the second control component 3 .

[0092] Specifically, the secondary control medium in the second flow channel can further absorb the heat in the secondary control medium in the first flow channel, so that the secondary control medium can ensure complete vaporization before flowing to the secondary compressor 41, and the secondary control medium in the first flow channel can be further cooled. A third expansion valve 47 connected to the first flow channel is also provided between the secondary regenerator 46 and the fin evaporator 33 to regulate the pressure of the high-temperature and low-temperature secondary control medium.

[0093] Specifically, the secondary regenerator 46 also has a first flow channel and a second flow channel. The first flow channel is for the high-pressure and low-temperature secondary regulating medium flowing out of the heat exchange element 5 to flow to the second regulating component 3, while the second flow channel is for the secondary regulating medium flowing through the second regulating component 3 to flow to the secondary compressor 41.

[0094] Optionally, the secondary regulating component 4 further includes a secondary reflux branch 48. One end of the secondary reflux branch 48 is in communication with the secondary regulating branch 45, and the other end is in communication with the secondary compressor 41.

[0095] Specifically, the provision of the secondary return branch 48 enables the gaseous secondary control medium flowing into the secondary control branch 45 to flow back into the secondary compressor 41 .

[0096] Optionally, the secondary regulating component 4 further includes a buffer tank 49. The buffer tank 49 is communicated with the secondary regulating branch 45 and the secondary cooling branch 44 respectively.

[0097] Specifically, a load relief valve 491 is provided at the inlet of the buffer tank 49 , and the inlet is connected to the secondary cooling branch 44 , while the outlet of the buffer tank 49 is connected to the secondary regulating branch 45 , and the connection position is close to the inlet of the secondary compressor 41 .

[0098] When the temperature control system is running or stopped, the buffer tank 49 is connected to the corresponding branch. When the temperature control system is not running, the secondary control medium may evaporate due to the ambient temperature, and the pressure in the branch will increase. When the pressure exceeds the pressure of the relief valve 491, the relief valve 491 will open, and the secondary control medium will enter the buffer tank 49 to expand to ensure that the air pressure in the branch meets the requirements. When the temperature control system is running, the secondary control medium in the buffer tank 49 will enter the secondary compressor 41 for circulation. The buffer tank 49 is a pressure-bearing container with a specified volume, and its maximum pressure limit is higher than the highest pressure in the branch. The specific type and setting method of the buffer tank 49 can be designed according to the actual application scenario.

[0099] This embodiment also provides a test device, which includes a test chamber 7, a test component 6, and a temperature control system as in the above embodiment. The test component 6 is arranged in the test chamber 7, and the temperature control system is used to control the temperature of the test chamber 7 and the test component 6.

[0100] When the test equipment is in use, the temperature control system can be used to simultaneously control the temperature of the test component 6 and the test chamber 7, and the test component 6 and the test chamber 7 can be kept within different target temperature ranges, without the need to set up two separate temperature control systems. This can effectively reduce the manufacturing cost of the test equipment and thereby reduce the cost of the test process.

[0101] The temperature control method is applied to the temperature control system in the above embodiment, and includes:

[0102] Part of the primary control medium is heat exchanged with the liquid-cooled control medium, and the other part of the primary control medium is heat exchanged with the secondary control medium so that the primary control medium evaporates and the secondary control medium is cooled, and the cooled secondary control medium is heat exchanged with the control airflow, and the liquid-cooled control medium that completes the heat exchange controls the temperature of the test component 6, and the control airflow that completes the heat exchange controls the temperature of the test chamber 7.

[0103] Through this temperature control method, the temperature control of the test component 6 and the test chamber 7 can be completed simultaneously and with the help of a set of temperature control systems, without the need to set up two separate temperature control systems, effectively reducing the cost of the test chamber 7.

[0104] The following specifically explains the temperature control principle of the test component 6 and the test chamber 7 by combining the above-mentioned temperature control method and temperature control system and taking liquid cooling control medium and control air flow cooling as examples:

[0105] First, the temperature of the test component 6 and the test chamber 7 is controlled simultaneously.

[0106] The first-stage compressor 21 is turned on, the second-stage compressor 41 is turned on with a delay of 3 minutes, the first control valve 272 is opened, and the second control valve 274 is closed.

[0107] The liquid-cooled control medium flows along the liquid-cooled control pipeline through the electric heating tube 19, the test component 6 and the liquid-cooled evaporator 171. During the circulation of the liquid-cooled control medium, the primary control medium can flow along the primary control pipeline into the liquid-cooled evaporator 171 to exchange heat with the liquid-cooled control medium. There is a temperature difference during the heat exchange process. There is a deviation value ΔT1 between the evaporation temperature of the primary control medium and the cooling temperature of the liquid-cooled control medium. The cooling temperature of the liquid-cooled control medium is set to SP1, and the real-time temperature of the liquid-cooled control medium is PV1. PV1-ΔT1 is converted to the saturated pressure of the primary control medium, which is the evaporation pressure setting value of the primary control medium.

[0108] After passing through the economizer 23, the primary control medium will pass through the first expansion valve 251 and the pressure will be reduced. The opening of the first expansion valve 251 will continue to change. During the pressure release process, the temperature of the liquid-cooled evaporator 171 will drop, thereby reducing the temperature of the liquid-cooled control medium. The temperature threshold t1 is set according to the actual test requirements. When PV1 drops to SP1+t1, the electric heating pipe 19 starts to run to avoid PV1 being too much lower than SP1. When PV1 is less than SP1 to a certain value, the power of the electric heating pipe 19 increases. Conversely, when PV1 is greater than the value, the power of the electric heating pipe 19 decreases. In this way, the heating output and the cooling of the liquid-cooled control medium by the primary control medium are finally balanced, and PV1 is stabilized at SP1±0.5℃. The specific accuracy can be set and changed according to the actual situation, and the maximum accuracy can reach 0.1℃ or even higher.

[0109] After the secondary compressor 41 is started, the secondary control medium will flow into the heat exchanger 5 along the secondary control pipeline to exchange heat with the primary control medium. There is a deviation value ΔT2 between the evaporation temperature of the primary control medium and the cooling temperature of the secondary control medium. The real-time temperature of the secondary control medium is PV2. PV2-ΔT2 is converted into the saturation pressure of the primary control medium and used as the evaporation pressure setting value of the primary control medium. After the primary control medium is adjusted by the second expansion valve 271, the opening of the second expansion valve 271 also changes continuously. During the pressure drop process, the primary control medium exchanges heat with the secondary control medium in the heat exchanger 5, causing the temperature of the secondary control medium to drop. When the pressure of the primary control medium reaches the lower limit, the temperature of the secondary control medium also reaches the target temperature. At this time, the second expansion valve 271 maintains a stable opening.

[0110] The temperature of the control airflow in the test chamber 7 is detected. There is a deviation value ΔT between the evaporation temperature of the secondary control medium and the temperature of the test chamber 7. The temperature of the control airflow is set to SP, and the real-time temperature of the control airflow is PV. PV-ΔT is converted into the saturated pressure corresponding to the secondary control medium, and used as the setting value of the low pressure of the secondary compressor 41. The adjustment pressure of the secondary control medium passing through the third expansion valve 47 will decrease, so that when the secondary control medium flows through the fin evaporator 33, the temperature of the fin evaporator 33 is reduced, thereby cooling the control airflow. The temperature threshold t1 is set according to the actual test requirements. When PV drops to SP+t1, the heating wire 32 is started. The greater the PV drop, the higher the power of the heating wire 32, and vice versa. The power of the heating wire 32 decreases. Finally, the heating amount is balanced with the cooling amount of the secondary control medium and the fin evaporator 33, so that PV is stabilized at SP±0.5℃. Similarly, the accuracy can be achieved to 0.1℃ or even higher according to the actual temperature control requirements.

[0111] Second, only the test component 6 is temperature-controlled.

[0112] Only one stage of the compressor 21 is turned on, the first control valve 272 is closed, and the second control valve 274 is opened.

[0113] The operation process of the first-stage control component 2 and the first control component 1 is the same as above. At this time, the second expansion valve 271 adopts a fixed opening, and is controlled by the difference between the suction temperature and the suction pressure corresponding to the saturation temperature (i.e., the suction superheat value), to ensure that the suction superheat value of the first-stage compressor 21 is greater than a certain value (such as 5°C). Part of the first-stage control medium passes through the second expansion valve 271 and enters the heat exchange element 5. At this time, there is no heat exchange. Before entering the first-stage regenerator 261 through the second solenoid valve, it enters the liquid-cooled evaporator 171 together with the first-stage control medium throttled by the first expansion valve 251 and is inhaled, and finally flows back to the first-stage compressor 21.

[0114] Third, only the test chamber 7 is temperature-controlled.

[0115] After the first-stage compressor 21 is turned on, the second-stage compressor 41 is turned on with a delay of 3 minutes, the first control valve 272 is opened, and the second control valve 274 is closed.

[0116] The operation process of the first-stage control component 2, the second-stage control component 4 and the second control component 3 is the same as above and will not be repeated here. At this time, the first expansion valve 251 adopts a fixed opening, and is controlled by the difference between the suction temperature and the suction pressure corresponding to the saturation temperature (i.e., the suction superheat value), to ensure that the suction superheat value of the first-stage compressor 21 is greater than a certain value (such as 5°C). At this time, part of the first-stage control medium passes through the first expansion valve 251, the first-stage regenerator 261, and the liquid-cooled evaporator 171, and then mixes with another part of the first-stage control medium flowing through the heat exchanger 5 and returns to the first-stage compressor 21.

[0117] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. For those skilled in the art, various obvious changes, readjustments and substitutions can be made without departing from the protection scope of the present invention. It is not necessary and impossible to list all the embodiments here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the claims of the present invention.

Claims

1. Temperature control system, characterized in that: include: A first control component (1) has a liquid cooling control pipeline, in which a liquid cooling control medium flows to control the temperature of a test component (6); A primary control component (2) has a primary control pipeline connected to the liquid cooling control pipeline, and a primary control medium flows in the primary control pipeline to control the temperature of the liquid cooling control medium; A second regulating component (3) is disposed in the test chamber (7) and is capable of generating a regulating airflow for regulating the temperature of the test chamber (7); A secondary regulating component (4) having a secondary regulating pipeline connected to the second regulating component (3), wherein the secondary regulating pipeline has a flowing secondary regulating medium for exchanging heat with the regulating airflow; A heat exchanger (5) is connected to both the primary control pipeline and the secondary control pipeline, and the primary control medium and the secondary control medium exchange heat through the heat exchanger (5) so that the primary control medium evaporates and the secondary control medium cools; The primary control component (2) comprises a primary compressor (21), a primary condensing module (22) and an economizer (23); the primary control pipeline comprises: A primary condensation branch (24), one end of which is connected to the exhaust port of the primary compressor (21), and the other end of which is connected to the primary condensation module (22), so as to transmit the gaseous primary regulating medium generated by the primary compressor (21) to the primary condensation module (22) to form a liquid primary regulating medium; A primary control branch (25), one end of which is connected to the primary condensing module (22), and the other end of which is connected to the liquid cooling control pipeline, wherein the economizer (23) is arranged on the primary control branch (25) to conduct heat exchange with the liquid primary control medium to the liquid cooling control pipeline to exchange heat with the first control medium to form a gaseous primary control medium; A primary reflux branch (26), one end of which is connected to the liquid cooling control pipeline, and the other end of which is connected to the primary compressor (21) so as to guide the gaseous primary control medium to the inlet of the primary compressor (21); a primary evaporation branch (27), one end of which is in communication with the primary control branch (25), and the other end of which is in communication with the primary reflux branch (26); the heat exchange element (5) is arranged on the primary evaporation branch (27); the primary evaporation branch (27) is used to guide the liquid primary control medium into the heat exchange element (5) to form heat exchange with the secondary control medium to form a gaseous primary heat exchange medium; The secondary control component (4) comprises: a secondary compressor (41) and a secondary condensation module (42), and the secondary control pipeline comprises: A secondary condensation branch (43), one end of which is in communication with the secondary compressor (41), and the other end of which is in communication with the secondary condensation module (42) so as to guide the gaseous secondary regulating medium discharged from the secondary compressor (41) into the secondary condensation module (42); A secondary cooling branch (44), one end of which is in communication with the secondary condensation module (42) and the other end of which is in communication with the heat exchange element (5), so as to guide the liquid secondary control medium discharged from the secondary condensation module (42) into the heat exchange element (5) for heat exchange and condensation with the primary control medium; A secondary control branch (45) is connected to the heat exchange element (5) at one end and to the second control component (3) at the other end, so that the secondary control medium that has completed heat exchange and condensation can flow through the secondary heat regenerator (46) and the third expansion valve (47) and then enter the second control component (3) to exchange heat with the control airflow, and the secondary control branch (45) is connected to the secondary compressor (41) to control the temperature of the exhaust gas from the secondary compressor (41).

2. The temperature control system according to claim 1, characterized in that: The primary control component (2) further comprises: The primary heat regenerator (261) is arranged on the primary regulating branch (25) and the primary reflux branch (26) so as to allow the liquid primary regulating medium to exchange heat with the gaseous primary regulating medium.

3. The temperature control system according to claim 2, characterized in that: The primary control component (2) further comprises: a first control valve (272) disposed in the primary evaporation branch (27) and located between the heat exchange element (5) and the primary compressor (21); A flow guide branch (273), one end of which is connected to the primary evaporation branch (27), and the other end of which is connected to the primary regulation branch (25); The second control valve (274) is arranged on the diversion branch (273) to control the opening and closing of the diversion branch (273).

4. The temperature control system according to claim 1, characterized in that: The secondary control component (4) further comprises: A secondary heat regenerator (46) is arranged in the secondary control branch (45) so that the secondary control medium that has completed heat exchange condensation can exchange heat with the secondary control medium flowing through the second control component (3).

5. The temperature control system according to claim 1, characterized in that: The secondary control component (4) further comprises: A secondary return branch (48) has one end connected to the secondary regulating branch (45) and the other end connected to the secondary compressor (41).

6. The temperature control system according to claim 1, characterized in that: The secondary control component (4) further comprises: The buffer tank (49) is respectively connected to the secondary control branch (45) and the secondary cooling branch (44).

7. Testing equipment, characterized in that, include: Test chamber (7); A testing component (6) is arranged in the testing chamber (7); The temperature control system according to any one of claims 1 to 6, is used to control the temperature of the test chamber (7) and the test component (6).

8. A temperature control method, characterized in that: The temperature control system according to any one of claims 1 to 6 comprises: Part of the primary control medium is heat exchanged with a liquid-cooled control medium, and another part of the primary control medium is heat exchanged with a secondary control medium so that the primary control medium evaporates and the secondary control medium cools, and the cooled secondary control medium is heat exchanged with a control airflow, the liquid-cooled control medium that has completed the heat exchange controls the temperature of the test component (6), and the control airflow that has completed the heat exchange controls the temperature of the test chamber (7).

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