For laser radar metalens scanning device and laser radar

Abstract

The present application relates to a metalens scanning device and a laser radar for laser radar. The metalens scanning device for laser radar includes a first collimating metalens, a second reconfigurable zoom metalens and a third collimating metalens in sequence along the light propagation direction. The first collimating metalens, the second reconfigurable zoom metalens and the third collimating metalens are arranged on the same optical axis. The first collimating metalens and the third collimating metalens are used to collimate the light beam. The second reconfigurable zoom metalens includes a plurality of metalens arranged in an array on a plane perpendicular to the optical axis, and the focal length of the metalens is adjustable. The metalens scanning device for laser radar of the present application has a simple structure and a compact size, which is conducive to the miniaturization design of the metalens scanning device for laser radar, and then is conducive to simplifying the structure of the laser radar device and realizing the miniaturization design of the laser radar device.

Description

Technical Field

[0001] The present application relates to the technical field of micro-nano optics and laser radar scanning chips, and in particular to a super lens scanning device and laser radar for laser radar. Background Art

[0002] LiDAR is a scanning sensor that uses non-contact laser ranging technology. It detects targets by emitting laser beams and collects reflected beams to form point clouds and obtain data. After photoelectric processing, the data can generate accurate three-dimensional images. LiDAR is commonly used in scientific and industrial fields such as three-dimensional remote sensing, precision modeling, and autonomous driving.

[0003] LiDAR mainly consists of transmitter, receiver, signal processing and display units, among which the transmitter mainly includes laser module, optical modulation module, scanning control module, etc. The laser module is used to emit laser of a certain wavelength to provide a laser light source. The optical modulation module optically modulates the incident laser light source, and then projects the laser beam into the space under the control of the scanning control module to scan in a preset manner. The receiver collects the returned information and the signal processing unit processes the information, and finally presents it on the display unit in the form of an image. The scanning control module of the traditional structure is controlled by a mechanical microsystem. On the one hand, the multi-point scanning device has a complex structure and a large volume, and the quality reliability is difficult to control. On the other hand, the system will cause serious wear and damage under long-term operation, resulting in a shortened service life.

[0004] Therefore, the relevant technology still needs to be further improved. Summary of the invention

[0005] Based on this, it is necessary to provide a laser radar superlens scanning device and laser radar to address the problems in related technologies that the laser radar device has a complex structure, a large size, and is difficult to achieve a small size and a compact structure.

[0006] A super lens scanning device for laser radar, the super lens scanning device for laser radar comprising:

[0007] A laser light source for emitting multiple beams of parallel light; and

[0008] A metalens group, the metalens group comprising a first collimating metalens, a second reconfigurable variable focus metalens and a third collimating metalens sequentially arranged along the light propagation direction, the first collimating metalens, the second reconfigurable variable focus metalens and the third collimating metalens being arranged on a common optical axis, and the first collimating metalens being used to collimate a light beam of an incident light source;

[0009] The second reconfigurable zoom metalens includes a plurality of microlenses arranged in an array on a plane perpendicular to the optical axis, which are used to achieve ideal focusing or divergence of multi-beam parallel light rays, and the focal length of the microlenses is individually adjustable; the third collimating metalens is used to convert the divergent light beams after convergence into parallel light emission, thereby achieving multi-beam laser emission angle control.

[0010] In one embodiment, the microlens includes a substrate and a plurality of annular structures sequentially arranged along a radial direction on one side of the substrate, and in a direction parallel to the optical axis and away from the substrate, each of the annular structures includes a first electrode layer, a phase change material layer, and a second electrode layer sequentially stacked on the substrate;

[0011] The first electrode layer and the second electrode layer are used to exert independent electrical control on the phase-change material layer, and the phase-change material layer is configured to change the focal length of the microlens by changing its temperature, voltage or current.

[0012] In one embodiment, the refractive index of the phase change material layer can be changed according to the change of the magnitude of the applied voltage.

[0013] In one embodiment, the plurality of annular structures are concentric circles with gradually increasing radial sizes, so that the microlenses constitute a circular Fresnel superlens.

[0014] In one embodiment, the phase change material of the phase change material layer includes one of a liquid crystal material, a chalcogenide phase change material and a transition metal oxide.

[0015] In one embodiment, the material of the first electrode layer includes indium tin oxide or indium gallium zinc oxide.

[0016] In one embodiment, the first collimating metalens and the third collimating metalens are capable of changing the phase of a light beam incident into the first collimating metalens and the third collimating metalens to collimate the light beam.

[0017] In one embodiment, any one of the first collimating superlens and the third collimating superlens includes a substrate and a subwavelength microstructure array disposed on the substrate, the subwavelength microstructure array includes a plurality of microstructures disposed on one side of the substrate and arranged in an array on the substrate, and the microstructure includes a nano-medium column.

[0018] In one of the embodiments, the laser light source includes one of a distributed feedback laser, a quantum well laser, a gallium aluminum arsenide laser, a gallium arsenide laser, and an indium gallium aluminum phosphide laser.

[0019] According to another aspect of the present application, a laser radar is provided, comprising a superlens scanning device for a laser radar according to any of the above-mentioned embodiments.

[0020] The above-mentioned superlens scanning device for laser radar realizes the collimation of the light beam through the first collimating superlens and the third collimating superlens, and realizes the focusing or divergence of the parallel light beam through the adjustable focal length of the second reconfigurable zoom superlens, or in other words, the adjustable focal length of the second reconfigurable zoom superlens can realize the regulation of the exit angle of the multi-beam light, and then the superlens scanning device for laser radar in the present application can project the light beam to a preset position and make it detect and scan in a preset manner. The present application utilizes the setting of the first collimating superlens, the second reconfigurable zoom superlens and the third collimating superlens, while realizing the collimation, focusing or divergence of the light, so that the superlens scanning device for laser radar in the present application has a simple structure and a small size, which is conducive to the miniaturization design of the superlens scanning device for laser radar. Furthermore, it is conducive to the laser radar device using the superlens scanning device for laser radar in the present application to realize a lighter, thinner and easier to concentrate design, which is conducive to simplifying the structure and integrated system packaging of the laser radar device, and is conducive to the miniaturization design of the laser radar device. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 This is a schematic diagram of the structure of an integrated light source of the present application.

[0022] Figure 2 2. A front view of a second reconfigurable variable-focus metalens.

[0023] Figure 3 A diagram showing the steps for preparing the second reconfigurable variable-focus metalens.

[0024] Figure 4 A diagram showing the steps for preparing a first collimating metalens or a third collimating metalens.

[0025] Description of reference numerals:

[0026] 10. Integrated light source;

[0027] 100, laser light source; 200, super lens group; 210, first collimating super lens; 211, substrate; 212, nano dielectric layer; 213, second photoresist layer; 220, second reconfigurable zoom super lens; 221, substrate; 222, first electrode layer; 223, phase change material layer; 224, second electrode layer; 225, first photoresist layer; 230, third collimating super lens. DETAILED DESCRIPTION

[0028] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.

[0029] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0030] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of this application, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0031] In this application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0032] In the present application, unless otherwise clearly specified and limited, a first feature being “above” or “below” a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being “above”, “above”, and “above” a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being “below”, “below”, and “below” a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0033] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are for illustrative purposes only and are not intended to be the only implementation method.

[0034] The laser radar device mainly consists of a transmitter, a receiver, a signal processing and display unit, among which the transmitter mainly includes a laser module, an optical modulation module, a scanning control module, etc. The laser module is used to emit a laser of a certain wavelength to provide a laser light source. The optical modulation module optically modulates the incident laser light source, and then projects the laser beam into the space under the control of the scanning control module for scanning in a preset manner. The receiver collects the returned information and the signal processing unit processes the information, and finally presents it on the display unit in the form of an image.

[0035] The traditional structure of the laser radar device is controlled by a mechanical microsystem, which increases the size of the laser radar device on the one hand, and causes serious wear and tear after long-term operation on the other hand, shortening the service life of the laser radar device. Therefore, there is an urgent need for a radar scanning device that has a simple structure, a small size, and can realize the collimation, focusing and divergence of the laser.

[0036] Based on this, the present application provides a superlens scanning device and a laser radar for laser radar.

[0037] like Figure 1 As shown, the metalens group 200 provided by the present application includes a first collimating metalens 210, a second reconfigurable zoom metalens 220 and a third collimating metalens 230 in sequence along the direction of propagation of the light emitted by the laser light source, and the first collimating metalens 210, the second reconfigurable zoom metalens 220 and the third collimating metalens 230 are arranged on the same optical axis, and the light passes through the first collimating metalens 210, the second reconfigurable zoom metalens 220 and the third collimating metalens 230 in sequence, wherein the first collimating metalens 210 and the third collimating metalens 230 are used to collimate the light beam, and the second reconfigurable zoom metalens 220 includes a plurality of microlenses arranged in an array on a plane perpendicular to the optical axis, and the focal length of the microlenses is individually adjustable, so that the focal length of the second reconfigurable zoom metalens 220 is adjustable, and then the second reconfigurable zoom metalens 220 can realize the focusing or divergence of multi-beam parallel light beams. The third collimating metalens is used to convert the divergent light beam after convergence into parallel light emission.

[0038] The metalens group 200 provided in the present application realizes the collimation of the light beam through the first collimating metalens 210 and the third collimating metalens 230, and realizes the focusing or divergence of the parallel light beam through the adjustable focal length of the second reconfigurable zoom metalens 220, or in other words, the adjustable focal length of the second reconfigurable zoom metalens 220 can realize the regulation of the exit angle of the multi-beam light, and then the light beam can be projected to a preset position through the metalens group 200 of the present application and detected and scanned in a preset manner. The present application utilizes the setting of the first collimating metalens 210, the second reconfigurable zoom metalens 220 and the third collimating metalens 230, while realizing the collimation, focusing or divergence of the light, so that the metalens group 200 of the present application has a simple structure and a compact size, which is conducive to the miniaturization design of the metalens group 200.

[0039] In some embodiments, Figure 2 As shown, the microlens in the second reconfigurable variable focus metalens 220 includes a substrate 221 and a plurality of annular structures radially arranged in sequence on one side of the substrate 221. In a direction parallel to the optical axis and away from the substrate 221, each annular structure includes a first electrode layer 222, a phase change material layer 223, and a second electrode layer 224 stacked on the substrate 221. The first electrode layer 222 and the second electrode layer 224 are used to apply separate electrical control to the phase change material layer 223. The phase change material layer 223 is configured to change the focal length of the microlens by changing its temperature, voltage or current.

[0040] It can be understood that the phase change material used in the phase change material layer 223 will undergo a phase change when a voltage is applied, and the refractive index of the phase change material layer 223 can change according to the change in the magnitude of the applied voltage, thereby changing the focal length of the microlens, thereby changing the focal length of the second reconfigurable zoom superlens 220, and changing the phase of the light passing through the second reconfigurable zoom superlens 220. According to the correspondence between the phase change of the light and the focal length, the voltage can be reversely adjusted to obtain the ideal focal length of the second reconfigurable zoom superlens 220, thereby enabling the second reconfigurable zoom superlens 220 to appropriately converge or diffuse the light.

[0041] In some embodiments, the plurality of annular structures are concentric circles with gradually increasing radial dimensions so that the microlenses constitute a circular Fresnel metalens. At least two of each annular structure or a plurality of microlenses can control voltages individually to ensure electrical independence between the plurality of microlenses, and each microlens can be individually controlled by an external power supply or an external integrated circuit (such as a CMOS circuit). By changing the voltages of the plurality of microlenses arranged in the array respectively, the focal length of the second reconfigurable zoom metalens 220 can be adjusted, and the focus of the light passing through the second reconfigurable zoom metalens 220 can be moved along the optical axis direction, and then the light passing through the second reconfigurable zoom metalens 220 is transformed into a plane wave with a certain exit angle after passing through the third collimating metalens 230.

[0042] In some embodiments, the material of the substrate 221 includes but is not limited to transparent materials such as aluminum oxide, silicon dioxide, and gallium nitride. The phase change material of the phase change material layer 223 includes one of a liquid crystal material, a sulfur-based phase change material, and a transition metal oxide. In other words, the phase change material of the phase change material layer 223 includes but is not limited to a liquid crystal material, a sulfur-based phase change material, tungsten selenide, two-dimensional materials such as graphene, III-V compounds, etc. The materials of the first electrode layer 222 and the second electrode layer 224 include but are not limited to transparent electrode materials such as indium tin oxide and indium gallium zinc oxide.

[0043] Continue reading Figure 1 The first collimating superlens 210 and the third collimating superlens 230 can change the phase of the light beam incident into the first collimating superlens 210 and the third collimating superlens 230 to collimate the light beam, or in other words, can convert the divergent light beam into parallel light. In some embodiments, the materials of the first collimating superlens 210 and the third collimating superlens 230 include but are not limited to single crystal silicon, silicon dioxide, titanium dioxide, glass, silicon nitride, aluminum oxide, polymers, dielectrics, III-V compounds, etc.

[0044] In some embodiments, any one of the first collimating metalens 210 and the third collimating metalens 230 includes a substrate 211 and a subwavelength microstructure array disposed on the substrate 211, the subwavelength microstructure array includes a plurality of microstructures disposed on one side of the substrate 211 and arranged in an array on the substrate 211, and the microstructures include nano-medium columns. The subwavelength microstructure array can adjust the phase of a light beam passing therethrough to achieve collimation of the light beam.

[0045] In some embodiments, the material of the substrate 211 includes but is not limited to transparent materials such as aluminum oxide, silicon dioxide, and gallium nitride.

[0046] In some embodiments, the distance between the second reconfigurable zoom metalens 220 and the third collimating metalens 230 is equal to the sum of the focal lengths of the second reconfigurable zoom metalens 220 and the third collimating metalens 230, so as to facilitate the second reconfigurable zoom metalens 220 and the third collimating metalens 230 to form a lens combination or a lens series connection, and to improve the quality of light passing through the second reconfigurable zoom metalens 220 and the third collimating metalens 230, and to correct the optical distortion of the light, so as to obtain better imaging quality. Among them, the distance between the second reconfigurable zoom metalens 220 and the third collimating metalens 230 represents the distance between the center of the second reconfigurable zoom metalens 220 and the center of the third collimating metalens 230.

[0047] Continue reading Figure 1 As shown, the present application also provides an integrated light source 10, including the above-mentioned superlens group 200 and a laser light source 100, and the laser light source 100 and the superlens group 200 are arranged on the same optical axis. In some embodiments, the laser light source 100 is one of a distributed feedback laser, a quantum well laser, a gallium aluminum arsenide (GaAlAs) / gallium arsenide (GaAs) laser or an indium gallium aluminum phosphide (InGaAsP / InP) laser, and is used to emit multi-beam parallel light.

[0048] In some embodiments, the material selection of the metalens group 200 and the microstructure of the first collimating metalens 210, the microlens of the second reconfigurable zoom metalens 220, and the microstructure of the third collimating metalens 230 can be set to match the wavelength of the light emitted by the laser light source 100 to maximize the output power of the laser. The first collimating metalens 210 collimates the light emitted from the laser light source 100, the second reconfigurable zoom metalens 220 focuses or diverges the light emitted from the first collimating metalens 210, and the third collimating metalens 230 converts the light emitted from the second reconfigurable zoom metalens 220 into parallel light.

[0049] The present application also provides a laser radar device, including the integrated light source 10 of any of the above embodiments, the laser radar device also includes a radar chip and a receiving system, the radar chip is used to control the integrated light source 10 and the receiving system, and the receiving system is used to receive the echo signal reflected by the target to realize the detection function. The laser radar device of the present application adopts the above-mentioned integrated light source 10 and the above-mentioned super lens group 200, and has a simple structure and is convenient for miniaturization. At the same time, the focal length of the second lens of the super lens group 200 is adjustable, and the spacing and focal length of the second lens and the third collimating super lens 230 are matched, so that the laser radar device has the advantages of high resolution, large-angle detection, less distortion and long life.

[0050] The present application also provides a manufacturing method for manufacturing the metalens group 200 of any of the above embodiments, the manufacturing method comprising: first, preparing a first collimating metalens 210, a second reconfigurable zoom metalens 220 and a third collimating metalens 230, and then arranging the prepared first collimating metalens 210, the second reconfigurable zoom metalens 220 and the third collimating metalens 230 on a common optical axis.

[0051] The steps of preparing the second reconfigurable variable focus metalens 220 include:

[0052] S11, prepare a substrate 221, the material of the substrate 221 includes but is not limited to transparent materials such as aluminum oxide, silicon dioxide, and gallium nitride.

[0053] S12, sequentially disposing a first electrode layer 222, a phase change material layer 223, and a second electrode layer 224 on the substrate 221. The first electrode layer 222, the phase change material layer 223, and the second electrode layer 224 are stacked on the substrate 221, and the first electrode layer 222, the phase change material layer 223, and the second electrode layer 224 can be sequentially deposited on the substrate 221 by a deposition process.

[0054] S13, forming a first photoresist layer 225 on the second electrode layer 224, wherein the first photoresist layer 225 covers at least a portion of the second electrode layer 224 to facilitate subsequent photolithography.

[0055] S14. A plurality of first photoresist openings are formed on the first photoresist layer 225 to expose the portion of the second electrode layer 224 that needs to be etched away, and the second electrode layer 224, the phase change material layer 223 and the first electrode layer 222 are sequentially etched at the exposed portion, i.e., the portion corresponding to the first photoresist opening. Alternatively, it can be understood that a plurality of first electrode openings are formed on the first electrode layer 222, and the plurality of first electrode openings are connected to the plurality of first photoresist openings one by one, i.e., the first electrode openings are connected to the first photoresist openings, and the second electrode layer 224, the phase change material layer 223 and the first electrode layer 222 corresponding to the first photoresist openings are removed, and the first photoresist layer 225 is retained to remove the second electrode layer 224, the phase change material layer 223 and the first electrode layer 222 covered by the first photoresist openings.

[0056] S15 , cleaning and removing the first photoresist layer 225 , forming the above-mentioned multiple microlenses, and forming the second reconfigurable variable focus metalens 220 .

[0057] The above-mentioned step of preparing the second reconfigurable zoom metalens 220 can be carried out by sequentially depositing the first electrode layer 222, the phase change material layer 223 and the second electrode layer 224 by magnetron sputtering deposition, spin-coating photoresist on the second electrode layer 224, exposing and developing the required first photoresist opening, and etching the first electrode layer 222, the phase change material layer 223 and the second electrode layer 224 corresponding to the area without photoresist protection (the area of ​​the first photoresist opening) by ion beam etching, and removing the remaining first photoresist layer 225 by using a stripping solution, acetone, isopropyl alcohol and deionized water in sequence to form the corresponding second reconfigurable zoom metalens 220.

[0058] The steps of preparing the first collimating superlens 210 / the third collimating superlens 230 include:

[0059] S21, preparing a substrate 211, the material of the substrate 211 includes but is not limited to transparent materials such as aluminum oxide, silicon dioxide, and gallium nitride.

[0060] S22 , disposing a nano-medium layer 212 on the substrate 211 . The nano-medium layer 212 may be deposited on the substrate 211 by deposition.

[0061] S23 , forming a second photoresist layer 213 on the nano-dielectric layer 212 , wherein the second photoresist layer 213 covers at least a portion of the nano-dielectric layer 212 , so as to facilitate subsequent photolithography.

[0062] S24, forming a plurality of second photoresist openings on the second photoresist layer 213 to expose the portion of the nano-dielectric layer 212 that needs to be etched away, forming a plurality of dielectric openings on the nano-dielectric layer 212, the dielectric openings being connected to the second photoresist openings, or in other words, etching away the portion of the nano-dielectric layer 212 corresponding to the second photoresist opening to form the second photoresist opening, retaining the portion of the nano-dielectric layer 212 protected by the second portion of the photoresist layer where the second photoresist opening is removed.

[0063] S25 , removing the second photoresist layer 213 to form the above-mentioned nano-dielectric pillars, and further forming the above-mentioned sub-wavelength microstructure array.

[0064] The method steps for preparing the third collimating superlens 230 are similar to those for the first collimating superlens 210. The above-mentioned preparation of the first collimating superlens 210 / the third collimating superlens 230 can be performed by depositing a nano-dielectric layer 212 on a substrate 211 by magnetron sputtering deposition, spin-coating a photoresist on the nano-dielectric layer 212, exposing and developing the required second photoresist opening, and etching away the nano-dielectric layer 212 in the area without photoresist protection by an inductively coupled plasma etching method. The remaining second photoresist layer 213 is removed in sequence using a degumming solution, acetone, isopropyl alcohol, and deionized water to form the corresponding first collimating superlens 210 / the third collimating superlens 230.

[0065] The metalens group 200 provided in the present application realizes the collimation of the light beam through the first collimating metalens 210 and the third collimating metalens 230, and realizes the focusing or divergence of the parallel light beam through the adjustable focal length of the second reconfigurable zoom metalens 220, so that the light beam can be projected to a preset position through the metalens group 200 of the present application and detected and scanned in a preset manner. The present application utilizes the setting of the first collimating metalens 210, the second reconfigurable zoom metalens 220 and the third collimating metalens 230, while realizing the modulation and control of the light beam, it is beneficial to use the integrated light source 10 of the metalens group 200 of the present application to realize a lighter, thinner and easier to concentrate design, which is beneficial to simplifying the structure of the laser radar device and facilitating the miniaturization design of the laser radar device.

[0066] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0067] The above-mentioned embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the invention patent. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent of the present application shall be subject to the attached claims.

Claims

1. A superlens scanning device for laser radar, characterized in that: The super lens scanning device for laser radar comprises: A laser light source for emitting multiple beams of parallel light; and A metalens group, the metalens group comprising a first collimating metalens, a second reconfigurable variable focus metalens and a third collimating metalens sequentially arranged along the light propagation direction, the first collimating metalens, the second reconfigurable variable focus metalens and the third collimating metalens being arranged on a common optical axis, the first collimating metalens being used to collimate a light beam of an incident light source; the distance between the second reconfigurable variable focus metalens and the third collimating metalens being equal to the sum of the focal lengths of the second reconfigurable variable focus metalens and the third collimating metalens; The second reconfigurable zoom metalens includes a plurality of microlenses arranged in an array on a plane perpendicular to the optical axis, which are used to achieve ideal focusing or divergence of multi-beam parallel light, and the focal length of the microlenses is individually adjustable; the third collimating metalens is used to convert the divergent light beams after convergence into parallel light for emission, so as to achieve multi-beam laser emission angle control; at least two of the plurality of microlenses can control voltage individually; The microlens comprises a substrate and a plurality of annular structures sequentially arranged along a radial direction on one side of the substrate, wherein each of the annular structures comprises a first electrode layer, a phase change material layer and a second electrode layer sequentially stacked on the substrate in a direction parallel to the optical axis and away from the substrate; The first electrode layer and the second electrode layer are used to apply independent electrical control to the phase change material layer, and the phase change material layer is configured to change the focal length of the microlens by changing its temperature, voltage or current; The plurality of annular structures are concentric circles with gradually increasing radial dimensions, so that the microlenses constitute a circular Fresnel superlens; Any one of the first collimating superlens and the third collimating superlens includes a substrate and a subwavelength microstructure array disposed on the substrate, wherein the subwavelength microstructure array includes a plurality of microstructures disposed on one side of the substrate and arranged in an array on the substrate, and the microstructure includes a nano-medium column.

2. The superlens scanning device for laser radar according to claim 1, characterized in that: The refractive index of the phase change material layer can be changed according to the change of the magnitude of the applied voltage.

3. The super lens scanning device for laser radar according to claim 1, characterized in that: The phase change material of the phase change material layer includes one of a liquid crystal material, a sulfur-based phase change material and a transition metal oxide.

4. The superlens scanning device for laser radar according to claim 1, characterized in that: The material of the first electrode layer includes indium tin oxide or indium gallium zinc oxide.

5. The superlens scanning device for laser radar according to claim 1, characterized in that: The first collimating superlens and the third collimating superlens are capable of changing the phase of the light beam incident into the first collimating superlens and the third collimating superlens to collimate the light beam.

6. The super lens scanning device for laser radar according to claim 1, characterized in that: The laser light source includes one of a distributed feedback laser, a quantum well laser, a gallium aluminum arsenide laser, a gallium arsenide laser and an indium gallium aluminum phosphide laser.

7. A laser radar, characterized in that: It comprises a super lens scanning device for laser radar as described in any one of claims 1 to 6.

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