A fully automatic vacuum plasma cleaning machine

Abstract

The invention relates to the technical field of 3C electronic cleaning, and specifically to a fully automatic vacuum plasma cleaning machine. The invention comprises a machine body, a processing chamber shell and a high-frequency generator. Two I-shaped guide rails are fixedly arranged inside the processing chamber shell. Electrode plates are installed at positions of the processing chamber shell on the opposite sides of the two I-shaped guide rails. A sliding table is slidably installed between the two I-shaped guide rails. A tray mechanism for supporting a target product is arranged on the top of the sliding table, and a connecting component for driving the sliding table to slide along the I-shaped guide rail is arranged between the sliding table and a sealing door. An air inlet pipe is connected to the top of the processing chamber shell, and a gas supply mechanism connected to the air inlet pipe is arranged inside the machine body. The gas supply mechanism is used to supply gas for glow discharge to the inside of the processing chamber shell. The invention allows a frame carrying the target product to be intermittently flipped so that the target product is fully in contact with plasma, thereby avoiding a cleaning blind spot and facilitating rapid replacement of gas cylinders.

Description

Technical Field

[0001] The invention relates to the technical field of 3C electronic cleaning, in particular to a fully automatic vacuum plasma cleaning machine. Background Art

[0002] Plasma cleaning is a new high-tech technology. Its principle is to generate high-energy disordered plasma in a vacuum chamber by igniting a radio frequency power supply under a certain pressure, and bombard the surface of the product to be cleaned by plasma to achieve the cleaning purpose. With the improvement of the degree of integration of electronic circuits, the smaller chip feature size, and the development and use of new materials, the requirements for surface treatment and cleaning are becoming higher and higher. The plasma surface cleaning process has become an important means to improve product reliability and yield rate, and is an indispensable step in the production process.

[0003] The prior art discloses a Chinese patent with publication number CN 114927442 A (IPC classification number H01L21 / 67): a vacuum plasma cleaning machine, and discloses a loading and unloading robot and a loading and unloading mobile platform. The pneumatic clamp on the loading and unloading robot clamps the workpiece to be cleaned and places it on the bottom plate of the mobile platform. The bottom plate lifting mechanism of the cleaning station pushes the bottom plate on which the workpiece is placed into the vacuum chamber for plasma cleaning.

[0004] However, the above-mentioned prior art still has certain defects, that is, during use, the contact surface between the workpiece to be cleaned placed on the bottom plate and the bottom plate is a cleaning blind area, and the cleaning effect on the workpiece surface in this area is poor, or even impossible to clean, thereby reducing the cleaning quality of the workpiece. Summary of the invention

[0005] The object of the present invention is to provide a fully automatic vacuum plasma cleaning machine to solve the problems raised in the above background technology.

[0006] The purpose of the present invention can be achieved through the following technical solutions:

[0007] A fully automatic vacuum plasma cleaning machine comprises a machine body, a processing chamber shell and a high-frequency generator, wherein the processing chamber shell is fixedly installed inside the machine body, the high-frequency generator is fixedly embedded outside the processing chamber shell, a sealing door is hingedly installed on the front side of the processing chamber shell, and a viewing window is provided on the sealing door, two I-shaped guide rails are fixedly installed inside the processing chamber shell, electrode plates are installed at positions of the processing chamber shell located on the opposite sides of the two I-shaped guide rails, and a sliding platform is slidably installed between the two I-shaped guide rails;

[0008] A tray mechanism for holding the target product is provided on the top of the sliding platform, and a joint component for driving the sliding platform to slide along the I-shaped guide rail is provided between the sliding platform and the sealing door;

[0009] An air inlet pipe is connected to the top of the processing chamber shell, and a gas supply mechanism connected to the air inlet pipe is arranged inside the machine body. The gas supply mechanism is used to supply gas for glow discharge into the processing chamber shell.

[0010] In a preferred embodiment, the tray mechanism comprises an inner frame and an outer frame fixed at both ends of the top of the sliding platform, the two outer frames are arranged on opposite sides of the two inner frames, and the two inner frames are both rotatably mounted with a turntable, and the edges of the two turntables are both rotatably mounted with a plurality of shafts evenly distributed in a ring shape, and the opposite ends of the shafts on the two turntables extend to the inside of the outer frames on the corresponding sides respectively;

[0011] The tray mechanism also includes a frame arranged between opposite sides of the two turntables, the frame is arranged corresponding to the two oppositely arranged shaft rods, and the opposite ends of the two oppositely arranged shaft rods are fixedly connected to the outside of the frame at their positions, a frame cover is hingedly installed on the top of the frame, and a locking assembly is also provided between the frame cover and the frame.

[0012] In a preferred embodiment, both ends of the top of the sliding platform are provided with a driving assembly for driving the turntable on the side to rotate, and the driving assembly includes an outer gear ring fixedly sleeved on the outer side of one end of the turntable close to the outer frame on the end and an arc-shaped rack fixed on the inner side of the outer frame on the end, and a motor 1 is fixedly installed on the outer side of the outer frame, and the end of the output shaft of the motor 1 is fixedly connected to a gear disk meshing with the outer gear ring on the end;

[0013] The ends of the shaft rods on the outer sides of the two ends of the frame body that are opposite to each other are fixedly sleeved with gears 1 that mesh with the arc-shaped racks on the inner side of the outer frame at the ends.

[0014] In a preferred embodiment, the locking assembly includes an insertion frame 1 fixed to the frame cover and the outside of the frame body, an L-shaped plate is movably inserted between the two insertion frames 1, and a spring 1 is fixedly connected between the inner bottom end of the L-shaped plate and the insertion frame 1 outside the frame body.

[0015] In a preferred embodiment, a buffer assembly is provided on the inner side of the frame body and the frame cover, the buffer assembly is composed of a protrusion and a buffer spring, and the frame body and the frame cover are fixedly connected to the protrusions at corresponding positions through the buffer spring;

[0016] A U-shaped groove is also provided inside the frame, and a partitioning mesh plate is movably inserted inside the U-shaped groove.

[0017] In a preferred embodiment, the linkage assembly consists of a T-shaped cylinder 1 fixed at one end of the bottom of the sliding platform away from the sealing door, a T-shaped cylinder 2 fixed on the inner side of the sealing door, and a connecting rod located between T-shaped cylinder 1 and T-shaped cylinder 2, and the two ends of the connecting rod are respectively rotatably connected to T-shaped cylinder 1 and T-shaped cylinder 2.

[0018] In a preferred embodiment, the gas supply mechanism comprises a fan-shaped bracket arranged inside the machine body, the fan-shaped bracket and the machine body are rotatably mounted via a round rod, a gas cylinder is arranged on the top of the fan-shaped bracket, and a sleeve is threadedly connected to the port position of the gas cylinder;

[0019] The air supply mechanism also includes an air supply pipe arranged inside the body and a docking pipe connected to the air supply pipe. A connecting hose is provided between the air supply pipe and the air intake pipe. The docking pipe is slidably installed on the inner side of the body. An electromagnetic flowmeter is installed at the connection between the air supply pipe and the docking pipe. An air supply control assembly is provided between the docking pipe and the sleeve.

[0020] In a preferred embodiment, the air supply control assembly includes a seat block fixed to the inner side of the machine body and a spur rack fixed to the outer side of the butt pipe, a motor 2 is fixedly mounted on the bottom of the seat block, and a gear 2 meshing with the spur rack is fixedly connected to the end of the output shaft of the motor 2;

[0021] The air supply control assembly also includes a baffle ring fixed on the inner side of the sleeve and a orifice plate fixed on the inner side of the butt tube, a top column is fixedly connected to the bottom of the orifice plate, a plug is provided on the inner side of the sleeve at the side of the baffle ring away from the orifice plate, two ear blocks are fixedly provided on the outer side of the plug, and a plug rod that movably penetrates the corresponding ear blocks is fixedly provided at the positions of the two ear blocks at the bottom of the baffle ring, and a spring two that fixes the baffle ring and the ear block is movably sleeved on the outer side of the plug rod.

[0022] In a preferred embodiment, a limit assembly is provided between the fan-shaped bracket and the machine body, the limit assembly includes a second plug-in frame fixed to the machine body and the outside of the fan-shaped bracket, an insert strip is movably inserted between the two insert strips, a seat plate is fixed at the bottom end of the insert strip, and the limit assembly also includes a limit strip fixed to the outside of the machine body and a limit groove opened on the outside of the fan-shaped bracket;

[0023] A fixed block is fixedly arranged outside the inserting strip, and a guide rod which is inserted and connected with the top of the second inserting frame fixed on the outside of the fan-shaped bracket is movably penetrated on the fixed block, and a spring four which is movably sleeved outside the guide rod and fixedly connects the fixed block and the corresponding second inserting frame is fixedly arranged.

[0024] In a preferred embodiment, a heat dissipation mechanism is provided at the bottom of the body, the heat dissipation mechanism includes a net holder fixed to the inner side of the body, two baffles are fixedly provided between the net holder and the inner bottom surface of the body, a dustproof net 1 is fixedly installed at the positions of the bottom of the body corresponding to the back sides of the two baffles, and a dustproof net 2 is fixedly installed at the position of the bottom of the body corresponding to the position between the two baffles;

[0025] A bracket is fixedly installed at the bottom of the inner side of the body, a driving motor is fixedly installed at the top of the bracket, an impeller is fixedly connected to the end of the output shaft of the driving motor, and a rotating rod that movably penetrates the second dustproof net is fixedly connected to the axial center line position of the bottom end of the outer side of the impeller;

[0026] Baffle frames are fixedly provided at the two end positions of the two dustproof nets 1 at the bottom of the outer side of the machine body, and a fixed sleeve on the outer side of the rotating rod is provided with a cam plate located at the bottom end of the outer side of the machine body, a tripod is provided between the two oppositely arranged baffle frames, and sliders slidably connected to the corresponding baffle frames are fixedly provided at both ends of the tripod, a straight rod that movably passes through the slider is fixedly provided inside the baffle frame, and a spring 3 is provided on the outer side of the straight rod for fixedly connecting the slider and the baffle frame.

[0027] Beneficial effects of the present invention:

[0028] 1. The present invention utilizes a rotating toothed disc to drive a turntable of an outer gear ring to rotate, thereby driving a frame carrying a target product to rotate. In the process of driving the turntable to rotate, gears 1 at the ends of shafts at both ends of the frame are sequentially meshed with multiple sets of arc-shaped racks on the outer frame to intermittently drive gears 1 to rotate, thereby causing the frame carrying the target product to flip, so that the target product is fully in contact with the plasma, and a cleaning blind area is avoided;

[0029] 2. The present invention utilizes the joint assembly so that when the sealed door is opened, the swinging connecting rod can be used to pull the sliding table along the I-shaped guide rail to slide out of the processing chamber shell. Conversely, the sliding table carrying the tray mechanism is pushed back to the inside of the processing chamber shell, so as to facilitate the picking and placing of the target product.

[0030] 3. The present invention provides a fan-shaped bracket with a swingable structure, so as to facilitate the rapid replacement of the gas cylinder. Meanwhile, in the process of supplying gas to the inside of the processing chamber shell, the meshing setting between the second gear and the spur rack can be used to control the lifting of the docking pipe, so as to realize the control of opening and closing of the port of the gas cylinder;

[0031] 4. The present invention utilizes a rotating impeller to discharge the hot air inside the machine body during the operation of the equipment to the outside of the machine body, and automatically draws cold air from the outside into the machine body, so as to utilize the flow of airflow to continuously remove the heat generated during the operation of the vacuum plasma cleaning machine, thereby avoiding excessive heat accumulation and affecting the normal operation of the equipment. In addition, a cam plate that rotates synchronously with the impeller is used to intermittently squeeze the tripod, and during the reciprocating motion of the tripod and the circular motion of the cam plate, the cleaning strip installed thereon can be used to clean the dust attached to the dustproof net 1 and the dustproof net 2 at the corresponding positions in real time. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, for those skilled in the art, other drawings can be obtained based on these drawings without creative work.

[0033] Figure 1It is a schematic diagram of the overall structure of the present invention from a first viewing angle;

[0034] Figure 2 is a schematic diagram of the overall structure of the present invention from a second viewing angle;

[0035] Figure 3 It is an overall front view of the present invention;

[0036] Figure 4 The present invention Figure 3 Schematic diagram of the AA section structure;

[0037] Figure 5 This is a schematic diagram of the structure of the interior of the processing chamber shell from a first perspective of the present invention;

[0038] Figure 6 This is a schematic diagram of the structure of the interior of the processing chamber shell from a second viewing angle of the present invention;

[0039] Figure 7 It is a schematic diagram of the overall structure of the tray mechanism of the present invention;

[0040] Figure 8 It is a partial structural schematic diagram of the tray mechanism of the present invention;

[0041] Fig. 9 The present invention Figure 7 A schematic diagram of the structure enlargement of part A;

[0042] Fig.10 It is a schematic diagram of the overall structure of the gas supply mechanism of the present invention;

[0043] Fig.11 It is a schematic diagram of the partial structure of the gas supply mechanism of the present invention;

[0044] Fig.12 The present invention Fig.11 The overall top view of the

[0045] Fig.13 The present invention Fig.12 Schematic diagram of the CC section structure;

[0046] Fig.14 The present invention Fig.13 A schematic diagram of the structure of part B in the middle is enlarged;

[0047] Fig.15 It is a schematic diagram of the partial structure of the stopper assembly of the present invention;

[0048] Fig.16 The present invention Figure 3 Schematic diagram of the cross-section structure along the BB axis;

[0049] Fig.17 It is a schematic diagram of the partial structure of the present invention as viewed from the bottom;

[0050] Fig.18 The present invention Fig.17 Schematic diagram of the enlarged structure of part C in the middle.

[0051] The reference numerals in the figure are as follows: 1, machine body; 2, processing chamber shell; 3, sealing door; 4, viewing window; 5, high-frequency generator; 6, tray mechanism; 61, inner frame; 62, outer frame; 63, turntable; 64, outer gear ring; 65, arc-shaped rack; 66, frame; 67, frame cover; 68, lock assembly; 681, plug-in frame one; 682, L-shaped plate; 683, spring one; 69, shaft; 610, gear one; 611, protrusion; 612, partition mesh plate; 7, gas supply mechanism; 71, fan-shaped bracket; 72, gas cylinder; 73, sleeve; 74, butt pipe; 75, seat block; 76, gear two; 77, straight rack; 78, orifice plate; 79, top column; 710, retaining ring ;711, plug;712, ear block;713, plug rod;714, spring two;8, heat dissipation mechanism;81, net support;82, baffle;83, bracket;84, impeller;85, dust net one;86, dust net two;87, rotating rod;88, cam plate;89, baffle frame;810, tripod;811, slider;812, straight rod;813, spring three;9, electrode plate;10, I-beam guide rail;11, sliding table;12, joint assembly;121, T-shaped cylinder one;122, T-shaped cylinder two;123, connecting rod;13, limit strip;14, plug frame two;15, plug strip;16, seat plate;17, fixed block;18, guide rod;19, spring four. DETAILED DESCRIPTION

[0052] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0053] The present invention is a device for processing components of 3C products in the core electronics industry, and is used for cleaning components of 3C products, wherein chips, circuit boards, integrated circuits, semiconductors, etc. are all important components of 3C products.

[0054] Example 1

[0055] Refer to the instruction manual Figure 1 and Figure 3-6A fully automatic vacuum plasma cleaning machine according to an embodiment of the present invention comprises a machine body 1, a processing chamber shell 2 and a high-frequency generator 5, wherein the processing chamber shell 2 is fixedly installed inside the machine body 1, the high-frequency generator 5 is fixedly embedded on the outside of the processing chamber shell 2, a sealing door 3 is hingedly installed on the front side of the processing chamber shell 2, and a viewing window 4 is provided on the sealing door 3, two I-shaped guide rails 10 are fixedly provided inside the processing chamber shell 2, and electrode plates 9 are installed at positions of the processing chamber shell 2 on the opposite sides of the two I-shaped guide rails 10, and a sliding table 11 is slidably installed between the two I-shaped guide rails 10, wherein a vacuum pump for vacuumizing the closed processing chamber shell 2 and a vacuum breaking solenoid valve for destroying the vacuum environment of the closed processing chamber shell 2 after cleaning are also installed inside the machine body 1;

[0056] A tray mechanism 6 for holding the target product is provided on the top of the sliding platform 11 , and a connecting component 12 for driving the sliding platform 11 to slide along the I-shaped guide rail 10 is provided between the sliding platform 11 and the sealing door 3 .

[0057] It should be noted that the present invention places the target product to be cleaned on the tray mechanism 6, and then pushes the tray mechanism 6 carrying the target product into the processing chamber shell 2 by using the associated component 12 during the process of closing the sealing door 3, and evacuates the processing chamber shell 2 by using a vacuum pump, and ionizes the gas by using a high-frequency generator 5 under vacuum conditions to form plasma (the fourth state of matter), and then uses the plasma to perform surface treatment on the target product.

[0058] like Figure 7-8 As shown, the tray mechanism 6 includes an inner frame 61 and an outer frame 62 fixed at both ends of the top of the sliding platform 11, and the two outer frames 62 are arranged on the opposite sides of the two inner frames 61. The two inner frames 61 are both rotatably mounted with a turntable 63, and the edges of the two turntables 63 are both rotatably mounted with a plurality of shafts 69 evenly distributed in an annular shape, and the opposite ends of the shafts 69 on the two turntables 63 extend to the inside of the outer frames 62 on the corresponding sides respectively;

[0059] The tray mechanism 6 also includes a frame 66 disposed between opposite sides of the two turntables 63, the frame 66 is disposed correspondingly to two shaft rods 69 disposed oppositely, and the opposite ends of the two shaft rods 69 disposed oppositely are fixedly connected to the outer side of the frame at the position, wherein the shaft rod 69 is located at the outer side of the frame near the upper end, so that the frame 66 can automatically sink under the action of its own gravity without external force driving, so that the frame cover 67 is at the upper end position, which is convenient for taking and placing the target product, and the frame cover 67 is hingedly installed on the top of the frame 66, wherein the frame 66 and the frame cover 67 are both provided with a mesh structure, so that the plasma formed by the gas ionization can more easily enter the cavity carrying the target product to clean the surface of the target product, and a locking assembly 68 is also provided between the frame cover 67 and the frame 66;

[0060] Both ends of the top of the sliding platform 11 are provided with a driving assembly for driving the rotating disc 63 on the side to rotate, and the driving assembly includes an outer gear ring 64 fixedly sleeved on the outer side of one end of the rotating disc 63 close to the outer frame 62 on the side and an arc-shaped rack 65 fixed on the inner side of the outer frame 62 on the side. A motor 1 is fixedly installed on the outer side of the outer frame 62, and the end of the output shaft of the motor 1 is fixedly connected with a gear disc meshing with the outer gear ring 64 on the side.

[0061] The shafts 69 on the outer sides of both ends of the frame 66 are fixedly sleeved at the opposite ends with gears 610 meshing with the arc-shaped racks 65 on the inner side of the outer frame 62 at the end, wherein a plurality of arc-shaped racks 65 are provided and evenly distributed in a ring shape on the inner side of the outer frame 62, so as to intermittently drive the gears 610 to rotate, thereby turning over the frame 66 carrying the target product, so that the target product can fully contact with the plasma and avoid the occurrence of a cleaning blind spot, which refers to the state in which the contact surface of the target product when in contact with the carrying surface cannot contact with the plasma when the target product remains stationary.

[0062] It should be noted that, in the process of cleaning the target product, the sealing door 3 is first opened, and the sliding table 11 of the tray mechanism 6 is slid out of the processing chamber shell 2 along the I-shaped guide rail 10 by using the joint component 12, and then the locking state between the frame cover 67 and the frame body 66 is locked by the contact lock component 68, the frame cover 67 is opened, the target is flattened and placed inside the frame body 66, and then the frame cover 67 is buckled, and the locking component 68 is used to keep the frame cover 67 and the frame body 66 in a buckled state, and the sealing door 3 is closed, and the sliding table 11 is pushed into the processing chamber shell 2 by using the joint component 12, waiting for plasma cleaning;

[0063] During the plasma cleaning process, the control end controls the motor 1 to drive the gear disc to rotate, and the rotating gear disc drives the outer gear ring 64 to rotate, driving the turntable 63 to rotate, and the turntable 63 will drive the frame 66 to rotate during the rotation process. During this period, when the frame 66 rotates with the turntable 63, if the gear 1 610 at the end of the shaft 69 at both ends of the frame 66 does not mesh with the area where the arc-shaped rack 65 on the outer frame 62 is located, the frame 66 will rotate by itself under the action of its own gravity. The rotating disk 63 is rotated, and the frame 66 carrying the target product is turned over 180°, so that the target product inside the frame 66 is turned over synchronously, ensuring that the target product is fully in contact with the plasma, eliminating the occurrence of cleaning blind spots, and improving the cleaning quality.

[0064] Furthermore, if Figure 8As shown, the frame body 66 and the frame cover 67 are both provided with a buffer component inside, the buffer component is composed of a protrusion 611 and a buffer spring, and the frame body 66 and the frame cover 67 are fixedly connected to the protrusion 611 at the corresponding position through the buffer spring, wherein the buffer components inside the frame body 66 and the frame cover 67 are provided with multiple groups, and are evenly distributed inside the frame body 66 and the frame cover 67, for effectively buffering the target product placed or the target product in the flipping process, and reducing damage to the product;

[0065] A U-shaped groove is also provided on the inner side of the frame 66, and a partition mesh plate 612 is movably inserted inside the U-shaped groove, wherein a plurality of U-shaped grooves can be provided, and the spacing between adjacent U-shaped grooves can be set to be equal or unequal, so that the partition mesh plate 612 can be inserted into the U-shaped groove according to the size of the target product to be cleaned, thereby dividing the groove into a plurality of cleaning chambers that do not interfere with each other.

[0066] like Figure 7 and Fig. 9 As shown, the locking assembly 68 includes an insertion frame 681 fixed on the frame cover 67 and the outer side of the frame body 66, and an L-shaped plate 682 is movably inserted and inserted between the two insertion frames 681, wherein a groove can be provided at the inner bottom end of the L-shaped plate 682, so that the L-shaped plate 682 can be pulled downward by buckling the groove to release the locking state between the frame cover 67 and the frame body 66, and a spring 683 is fixedly connected between the inner bottom end of the L-shaped plate 682 and the insertion frame 681 on the outer side of the frame body 66, wherein when the spring 683 is in a natural state, the top end of the L-shaped plate 682 is in a state of being inserted into the insertion frame 681 on the outer side of the frame cover 67 under the action of the spring 683, so as to prevent the frame cover 67 from opening during the flipping process of the frame body 66, causing the target product to fall out of the frame body 66, and causing damage to the target product that falls out or causing the target product to be partially not cleaned properly.

[0067] like Figure 5-6 As shown, the connecting assembly 12 is composed of a T-shaped cylinder 121 fixed to the bottom of the sliding platform 11 at one end away from the sealing door 3, a T-shaped cylinder 122 fixed to the inner side of the sealing door 3, and a connecting rod 123 located between the T-shaped cylinder 121 and the T-shaped cylinder 122, and the two ends of the connecting rod 123 are rotatably connected to the T-shaped cylinder 121 and the T-shaped cylinder 122 respectively.

[0068] It should be noted that when the sealing door 3 is in a fully closed state, the connecting rod 123 is in a state of being parallel to the I-shaped guide rail 10, and when the sealing door 3 is pulled open to a state of being perpendicular to the front side of the machine body 1 (it is intended to set this state as the maximum pull-out limit), the connecting rod 123 changes from the initial parallel state to an inclined state, and the sliding platform 11 slides out of the processing chamber shell 2 under the drive of the connecting rod 123, but does not leave the I-shaped guide rail 10. In the process of opening the sealing door 3, as the sealing door 3 is opened, the connecting rod 123 is in a state of being perpendicular to the front side of the machine body 1. When the door 3 is opened, the connecting rod 123 begins to change from a state parallel to the I-shaped guide rail 10 (it is intended that the connecting rod 123 is in a straight state) to an inclined state gradually, and in the process of the connecting rod 123 changing from a flat state to an inclined state, the connecting rod 123 will be used to pull the sliding table 11 along the I-shaped guide rail 10 to slide out of the processing chamber shell 2. Conversely, in the process of closing the sealing door 3, the connecting rod 123 changes from an inclined state to a straight state, and pushes the sliding table 11 of the tray carrying mechanism 6 to retract into the processing chamber shell 2.

[0069] like Figure 2 and Fig.10 As shown, an air inlet pipe is connected to the top of the processing chamber shell 2, and a gas supply mechanism 7 connected to the air inlet pipe is provided inside the machine body 1. The gas supply mechanism 7 is used to supply gas for glow discharge to the inside of the processing chamber shell 2. The gas includes but is not limited to nitrogen, argon, hydrogen, oxygen, and carbon dioxide, which are selected according to the cleaning requirements. The gas supply mechanism 7 includes a fan-shaped bracket 71 provided on the inner side of the machine body 1, and the fan-shaped bracket 71 is rotatably installed with the machine body 1 through a round rod. A gas cylinder 72 is provided on the top of the fan-shaped bracket 71, wherein a sink groove can be provided at the inner bottom of the fan-shaped bracket 71 to limit the gas cylinder 72, and the gas stored in the gas cylinder 72 is pressurized storage, and a sleeve 73 is threadedly connected to the port position of the gas cylinder 72;

[0070] The air supply mechanism 7 also includes an air supply pipe arranged inside the body 1 and a docking pipe 74 connected to the air supply pipe. A connecting hose is provided between the air supply pipe and the air intake pipe. The docking pipe 74 is slidably installed on the inner side of the body 1, wherein the movable installation form between the docking pipe 74 and the inner side of the body 1 can be set to a restriction groove on the surface of the docking pipe 74, and a restriction block (specifically drawn in the figure) slidably connected to the inside of the restriction groove is fixedly provided on the inner side of the body 1 to ensure that the docking pipe can only move linearly in the vertical direction. An electromagnetic flowmeter is installed at the connection between the air supply pipe and the docking pipe 74, and an air supply control assembly is provided between the docking pipe 74 and the sleeve 73.

[0071] It should be noted that, in the process of supplying gas for glow discharge into the processing chamber shell 2, the gas supply control component is controlled by the control end to form a passage between the docking tube 74 and the sleeve 73, so that the gas inside the gas cylinder can be released, and the amount of gas entering the processing chamber shell 2 under the vacuum state is measured and controlled by the electromagnetic flowmeter.

[0072] Furthermore, if Figure 1 and Fig.15 As shown, a limiting assembly is provided between the fan-shaped bracket 71 and the body 1, and the limiting assembly includes an insert frame 14 fixed to the body and the outside of the fan-shaped bracket 71, and an insert strip 15 is movably inserted and connected between the two insert frames 14, and a seat plate 16 is fixed at the bottom end of the insert strip 15, wherein a through groove can be provided on the seat plate 16, so as to facilitate the downward pulling of the seat plate 16 to release the restricted state of the fan-shaped bracket 71, and the limiting assembly also includes a limiting strip 13 fixed to the outside of the body 1 and a limiting groove provided on the outside of the fan-shaped bracket 71, wherein the contact surface of the limiting strip 13 and the limiting groove is set to an arc structure, which can ensure that the deflection of the fan-shaped bracket 71 is not blocked;

[0073] A fixed block 17 is fixedly provided on the outside of the insertion strip 15, and a guide rod 18 fixed on the top of the second insertion frame 14 outside the fan-shaped bracket 71 is movably inserted and penetrated on the fixed block 17. A spring four 19 fixedly connecting the fixed block 17 and the corresponding second insertion frame 14 is movably sleeved on the outside of the guide rod 18. Among them, when the spring four 19 is in a natural state, the guide rod 18 is still in a state of penetrating the fixed block 17, and the top end of the insertion strip 15 is in a state of penetrating the inside of the second insertion frame 14 outside the body 1, so that when there is no external force, the insertion strip 15 always maintains a state of penetrating the inside of the second insertion frame 14 outside the body 1, that is, it maintains a limited state to the fan-shaped bracket 71.

[0074] It should be noted that, after the gas cylinder 72 filled with gas is placed inside the sink groove on the fan-shaped bracket 71, the fan-shaped bracket 71 is rotated with the round rod as the central axis and stored inside the body 1. During this process, it is necessary to control the insertion strip 15 to be completely separated from the inside of the insertion frame 14 on the outside of the body 1. After the fan-shaped bracket 71 is deflected until the limit groove on its surface is completely aligned with the limit strip 13 on the outside of the body 1, the pulling force on the seat plate 16 is removed, so that the top end of the insertion strip 15 is passed through the inside of the insertion frame 14 on the outside of the body 1 under the action of the restoring force of the spring four 19, completing the limitation of the fan-shaped bracket 71, thereby ensuring the smooth progress of the gas supply process.

[0075] like Figure 10-14 As shown, the air supply control assembly includes a seat block 75 fixed to the inside of the body 1 and a spur rack 77 fixed to the outside of the butt joint 74. A second motor is fixedly installed at the bottom of the seat block 75. A second gear 76 meshing with the spur rack 77 is fixedly connected to the end of the output shaft of the second motor. The meshing setting between the second gear 76 and the spur rack 77 can be used to control the lifting of the butt joint 74, thereby controlling the opening and closing of the port of the gas cylinder 72.

[0076] The air supply control assembly also includes a baffle ring 710 fixed to the inner side of the sleeve 73 and a perforated plate 78 fixed to the inner side of the butt tube 74. A top column 79 is fixedly connected to the bottom of the orifice plate 78. The bottom end surface of the top column 79 is located at a level higher than the bottom end surface of the butt tube 74. The bottom end surface of the butt tube 74 in the initial state (i.e., the gear 2 76 does not drive the spur rack 77 to drive the butt tube 74 to move downward) is coplanar with the top end surface of the sleeve 73 at the corresponding position. At the same time, the inner diameter of the butt tube 74 is equal to the outer diameter of the sleeve 73. The inner side of the sleeve 73 is located at the baffle plate 710. A plug 711 is provided on the side of the ring 710 away from the orifice plate 78, and two ear blocks 712 are fixedly provided on the outside of the plug 711. A plug rod 713 that movably penetrates the corresponding ear blocks 712 is fixedly provided at the position of the two ear blocks 712 at the bottom of the retaining ring 710, and a spring 2 714 that fixedly connects the retaining ring 710 and the ear block 712 is movably sleeved on the outside of the plug rod 713. When the plug 711 completely blocks the inner hole on the retaining ring 710, the spring 2 714 is still in a stretched state, which is used to ensure that the plug 711 is in a blocked state for the air supply port in the absence of external force.

[0077] It should be noted that in the process of using the gas supply control component to control the supply of gas to the inside of the processing chamber shell 2 under the vacuum state, the control end is used to control the motor 2 to drive the gear 2 76 to rotate, and the rotating gear 2 76 is used to drive the butt joint 74 to move in the direction of the sleeve 73, so that the butt joint 74 is sleeved on the outside of the sleeve 73. At the same time, the downward top column 79 is used to push the plug 711 to move downward, and the spring 2 714 is continuously stretched along the axial direction of the plug rod 713 to release the blocking state of the inner hole on the retaining ring 710. At this time, the gas inside the gas cylinder 72 will automatically overflow under the action of pressure, and pass through the inner hole on the retaining ring 710 and the air hole of the orifice plate 78 in turn, and then enter the processing chamber shell 2 through the gas supply pipe, the connecting hose, and the air inlet pipe. The gas supply in this process is measured and controlled by the electromagnetic flowmeter installed at the connection between the gas supply pipe and the butt joint 74;

[0078] On the contrary, when the air supply process needs to be blocked, it is only necessary to drive the second gear 76 to rotate in the opposite direction through the second motor, thereby driving the butt joint 74 upward.

[0079] Example 2

[0080] Refer to the instruction manual Figure 2 and Figure 16-18In one embodiment of the present invention, a fully automatic vacuum plasma cleaning machine is provided with a heat dissipation mechanism 8 at the bottom of the machine body 1. The heat dissipation mechanism 8 includes a net holder 81 fixed to the inner side of the machine body 1. Two baffles 82 are fixedly provided between the net holder 81 and the inner bottom end surface of the machine body 1. The two baffles 82 can be used to divide the space formed between the net holder 81 and the bottom of the inner cavity of the machine body 1 into a middle exhaust area and air intake areas on both sides to achieve better heat dissipation. The positions of the bottom of the machine body 1 corresponding to the back sides of the two baffles 82 are fixedly embedded with a dustproof net 1 85, and the position of the bottom of the machine body 1 corresponding to the position between the two baffles 82 is fixedly embedded with a dustproof net 2 86;

[0081] A bracket 83 is fixedly installed at the bottom of the inner side of the body 1, a driving motor is fixedly installed on the top of the bracket 83, an impeller 84 is fixedly connected to the end of the output shaft of the driving motor, and a rotating rod 87 that movably penetrates the second dustproof net 86 is fixedly connected to the axial center line position of the bottom end of the outer side of the impeller 84;

[0082] Baffle frames 89 are fixedly provided at the two ends of the two dustproof nets 1 85 at the bottom of the outer side of the machine body 1, and a cam plate 88 of a diamond structure located at the bottom of the outer side of the machine body 1 is fixedly provided on the outer side of the rotating rod 87, and a tripod 810 is provided between the two baffle frames 89 that are arranged opposite to each other, wherein cleaning strips are detachably installed at the two ends of the cam plate 88 and the straight section area between the two baffle frames 89 that are arranged opposite to each other on the tripod 810 through bolts, which are used to clean the dust attached to the dustproof net 1 85 and the dustproof net 2 86 in real time, thereby ensuring the air inlet and outlet effects. Both ends of the angle bracket 810 are fixed with a slider 811 slidably connected to the corresponding baffle frame 89, and a straight rod 812 that movably passes through the slider 811 is fixed inside the baffle frame 89. A spring three 813 that fixedly connects the slider 811 and the baffle frame 89 is movably sleeved on the outer side of the straight rod 812. When the slider 811 is located in the baffle frame 89 near one end of the cam plate 88, the spring three 813 is still in a compressed state, so that when there is no external force, the cleaning strips on the two tripods 810 and the corresponding dustproof net 85 are set apart.

[0083] It should be noted that, during the operation of the vacuum plasma cleaning machine, the driving motor can be synchronously controlled by the control end to drive the impeller 84 to rotate, and the rotating impeller 84 is used to discharge the hot air inside the body 1 to the outside of the body 1. While discharging the hot air, the cold air from the outside will pass through the dustproof net 85 into the body 1 to maintain the air pressure inside and outside the body 1 stable. At the same time, the flow of air can also be used to continuously take away the heat generated during the operation of the vacuum plasma cleaning machine to avoid excessive heat accumulation and affect the normal operation of the equipment.

[0084] In the process of cooling the running equipment, the rotating impeller 84 can also be used to drive the rotating rod 87 to rotate, thereby driving the cam plate 88 to perform circular motion. During the circular motion, the cam plate 88 will intermittently squeeze the two tripods 810 and push the tripods 810 to move along the straight rod 812 inside the baffle frame 89 at the location, while compressing the corresponding spring three 813. After the cam plate 88 is completely free from squeezing the tripod 810, the tripod 810 will reset under the compression restoring force of the corresponding spring three 813, waiting for the next round of squeezing. In addition, during the reciprocating motion of the tripod 810 and the circular motion of the cam plate 88, the cleaning strip installed thereon can be used to clean the dust attached to the dustproof net 1 85 and the dustproof net 2 86 at the corresponding position in real time.

[0085] In the above technical scheme, the vacuum pump mentioned is the RH0100 Haokaide vacuum pump; the vacuum breaking solenoid valve mentioned is the VB21 vacuum breaker produced by Spirax Sarco; the motor one and motor two mentioned are both servo motors with model JSMA-PUC02D; the electromagnetic flowmeter mentioned is the LD-LDBE type electromagnetic flowmeter.

[0086] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments, and the above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, and these changes and improvements all fall within the scope of the present invention to be protected.

Claims

1. A fully automatic vacuum plasma cleaning machine, comprising a machine body (1), a processing chamber shell (2) and a high-frequency generator (5), wherein the processing chamber shell (2) is fixedly mounted inside the machine body (1), the high-frequency generator (5) is fixedly embedded on the outside of the processing chamber shell (2), a sealing door (3) is hingedly mounted on the front side of the processing chamber shell (2), and a viewing window (4) is provided on the sealing door (3), characterized in that: Two I-shaped guide rails (10) are fixedly arranged inside the processing chamber shell (2); electrode plates (9) are installed at positions of the processing chamber shell (2) located on opposite sides of the two I-shaped guide rails (10); and a sliding platform (11) is slidably installed between the two I-shaped guide rails (10); A tray mechanism (6) for supporting the target product is provided on the top of the sliding platform (11), and a joint component (12) for driving the sliding platform (11) to slide along the I-shaped guide rail (10) is provided between the sliding platform (11) and the sealing door (3); The tray mechanism (6) comprises an inner frame (61) and an outer frame (62) fixed at two ends of the top of the sliding platform (11); the two outer frames (62) are arranged on opposite sides of the two inner frames (61); a turntable (63) is rotatably installed on each of the two inner frames (61); a plurality of shafts (69) evenly distributed in an annular shape are rotatably installed at the edges of the two turntables (63); and opposite ends of the shafts (69) on the two turntables (63) extend to the inside of the outer frames (62) on the corresponding sides respectively; The tray mechanism (6) further comprises a frame (66) disposed between opposite sides of the two rotating disks (63); the frame (66) is disposed correspondingly to two shaft rods (69) disposed oppositely, and opposite ends of the two shaft rods (69) disposed oppositely are fixedly connected to the outer side of the frame at the position; a frame cover (67) is hingedly mounted on the top end of the frame (66); a locking assembly (68) is further disposed between the frame cover (67) and the frame (66); Both ends of the top of the sliding platform (11) are provided with a driving assembly for driving the rotating disc (63) on the side to rotate, the driving assembly comprising an outer gear ring (64) fixedly sleeved on the outer side of one end of the rotating disc (63) close to the outer frame (62) on the side, and an arc-shaped rack (65) fixed on the inner side of the outer frame (62) on the side, a motor 1 is fixedly mounted on the outer side of the outer frame (62), and the end of the output shaft of the motor 1 is fixedly connected to a gear disc meshing with the outer gear ring (64) on the side; The ends of the shaft rods (69) on the outside of both ends of the frame (66) opposite to each other are fixedly sleeved with a gear (610) meshing with the arc-shaped rack (65) on the inside of the outer frame (62) at the corresponding end; The locking assembly (68) comprises an insert frame (681) fixed to the frame cover (67) and the outside of the frame body (66); an L-shaped plate (682) is movably inserted and connected between the two insert frames (681); and a spring (683) is fixedly connected between the inner bottom end of the L-shaped plate (682) and the insert frame (681) outside the frame body (66); The frame body (66) and the frame cover (67) are both provided with a buffer assembly inside, the buffer assembly being composed of a protrusion (611) and a buffer spring, and the frame body (66) and the frame cover (67) are fixedly connected to the protrusions (611) at corresponding positions via the buffer spring; The frame (66) is also provided with a U-shaped groove on the inner side, and a partitioning mesh plate (612) is movably inserted into the U-shaped groove; An air inlet pipe is provided at the top of the processing chamber shell (2), and a gas supply mechanism (7) in communication with the air inlet pipe is provided inside the machine body (1). The gas supply mechanism (7) is used to supply gas for glow discharge into the processing chamber shell (2).

2. The fully automatic vacuum plasma cleaning machine according to claim 1, characterized in that: The joint assembly (12) is composed of a T-shaped cylinder 1 (121) fixed to the bottom of the sliding platform (11) at one end away from the sealing door (3), a T-shaped cylinder 2 (122) fixed to the inner side of the sealing door (3), and a connecting rod (123) located between the T-shaped cylinder 1 (121) and the T-shaped cylinder 2 (122), and the two ends of the connecting rod (123) are respectively rotatably connected to the T-shaped cylinder 1 (121) and the T-shaped cylinder 2 (122).

3. The fully automatic vacuum plasma cleaning machine according to claim 1, characterized in that: The gas supply mechanism (7) comprises a fan-shaped bracket (71) arranged inside the machine body (1), the fan-shaped bracket (71) and the machine body (1) being rotatably mounted via a round rod, a gas cylinder (72) being arranged on the top of the fan-shaped bracket (71), and a sleeve (73) being threadedly connected to the port of the gas cylinder (72); The air supply mechanism (7) further comprises an air supply pipe arranged inside the machine body (1) and a butt joint pipe (74) connected to the air supply pipe, a connecting hose is provided between the air supply pipe and the air inlet pipe, the butt joint pipe (74) is slidably mounted inside the machine body (1), an electromagnetic flow meter is installed at the connection between the air supply pipe and the butt joint pipe (74), and an air supply control assembly is provided between the butt joint pipe (74) and the sleeve (73).

4. The fully automatic vacuum plasma cleaning machine according to claim 3, characterized in that: The air supply control assembly comprises a seat block (75) fixed on the inner side of the machine body (1) and a spur rack (77) fixed on the outer side of the butt pipe (74); a second motor is fixedly mounted on the bottom of the seat block (75); and a second gear (76) meshing with the spur rack (77) is fixedly connected to the end of the output shaft of the second motor; The air supply control assembly further comprises a retaining ring (710) fixed on the inner side of the sleeve (73) and an orifice plate (78) fixed on the inner side of the butt-jointed tube (74); a top column (79) is fixedly connected to the bottom of the orifice plate (78); a plug (711) is provided on the inner side of the sleeve (73) at a side of the retaining ring (710) away from the orifice plate (78); two ear blocks (712) are fixedly provided on the outer side of the plug (711); a plug rod (713) movably penetrating the corresponding ear blocks (712) is fixedly provided at the bottom of the retaining ring (710) at positions corresponding to the two ear blocks (712); a spring (714) movably sleeved on the outer side of the plug rod (713) for fixedly connecting the retaining ring (710) and the ear block (712).

5. The fully automatic vacuum plasma cleaning machine according to claim 3, characterized in that: A limiting assembly is provided between the fan-shaped bracket (71) and the machine body (1), the limiting assembly comprising a second plug-in frame (14) fixed to the machine body and the outside of the fan-shaped bracket (71), an inserting strip (15) movably inserted and connected between the two inserting frames (14), a seat plate (16) fixed at the bottom end of the inserting strip (15), and the limiting assembly further comprising a limiting strip (13) fixed to the outside of the machine body (1) and a limiting groove opened on the outside of the fan-shaped bracket (71); A fixed block (17) is fixedly provided on the outer side of the inserting strip (15), and a guide rod (18) is movably inserted through the fixed block (17) and connected to the top of the second inserting frame (14) fixed on the outer side of the fan-shaped bracket (71). A spring four (19) is movably sleeved on the outer side of the guide rod (18) and fixedly connects the fixed block (17) and the corresponding second inserting frame (14).

6. The fully automatic vacuum plasma cleaning machine according to claim 1, characterized in that: The bottom end of the machine body (1) is provided with a heat dissipation mechanism (8), the heat dissipation mechanism (8) comprising a net holder (81) fixed to the inner side of the machine body (1), two baffles (82) fixedly provided between the net holder (81) and the inner bottom end surface of the machine body (1), a dustproof net 1 (85) fixedly installed at positions on the bottom of the machine body (1) opposite to the two baffles (82), and a dustproof net 2 (86) fixedly installed at a position between the two baffles (82) at the bottom of the machine body (1); A bracket (83) is fixedly mounted on the bottom inner side of the machine body (1), a driving motor is fixedly mounted on the top of the bracket (83), an impeller (84) is fixedly connected to the end of the output shaft of the driving motor, and a rotating rod (87) that movably penetrates the second dustproof net (86) is fixedly connected to the axis line position of the bottom outer side of the impeller (84); The outer bottom of the body (1) is fixedly provided with a baffle frame (89) at both ends of the two dustproof nets (85), and the outer fixed sleeve of the rotating rod (87) is provided with a cam plate (88) located at the outer bottom of the body (1). A tripod (810) is provided between the two baffle frames (89) arranged opposite to each other, and a slider (811) slidably connected to the inside of the corresponding baffle frame (89) is fixedly provided at both ends of the tripod (810), a straight rod (812) movably penetrating the slider (811) is fixedly provided inside the baffle frame (89), and a spring (813) is movably provided on the outer sleeve of the straight rod (812) for fixedly connecting the slider (811) and the baffle frame (89).

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