Optical axis deflection angle and translation amount measuring method suitable for laser tracker error correction

Abstract

The invention provides an optical axis deflection angle and translation amount measuring method suitable for error correction of a laser tracker, and the method comprises the steps that the laser tracker emits an initial laser beam, the initial laser beam is emitted to a position sensitive detector to form a light spot, and the position of the light spot has corresponding two-dimensional coordinate information; sequentially placing the position sensitive detector at a plurality of different distances from the laser tracker, and acquiring position coordinates of a plurality of pairs of light spots formed on the position sensitive detector by the positive mirror measurement light path and the reverse mirror measurement light path corresponding to the plurality of different distances; according to the position coordinates of each pair of light spots, the relative distance between the position coordinates of each pair of light spots is obtained; and according to the plurality of relative distances and different far and near distances, obtaining a relative position relationship between an intersection point of a horizontal axis and a vertical axis of the laser tracker and an intersection point of a positive mirror measurement light path and a reverse mirror measurement light path, and an optical axis deflection angle and a translation amount suitable for error correction of the laser tracker.

Description

Technical Field

[0001] At least one embodiment of the present disclosure relates to the technical field of instrument measurement and calibration, and more specifically to a method for measuring optical axis deflection and translation suitable for error correction of a laser tracker. Background Art

[0002] The laser tracker is a high-end precision geometric measurement instrument that has the ability to measure the geometric dimensions, form and position errors of large parts and the morphology / features of complex components with high precision. Ideally, the optical axis of the laser tracker's emitted measurement laser should be perpendicular to the horizontal and vertical axes and intersect at one point. However, due to machining errors and assembly errors, the optical axis is not perpendicular to the plane where the horizontal / vertical axis is located, and there is a certain angle. The intersection of the optical axis and this plane does not coincide with the intersection of the horizontal and vertical axes and there is a certain distance, which causes measurement errors and affects the coordinate measurement accuracy of the laser tracker. Summary of the invention

[0003] In order to solve at least one of the above-mentioned and other technical problems in the prior art, the present disclosure provides a method for measuring the optical axis deflection angle and translation amount suitable for error correction of a laser tracker, which can correct the measurement error of the laser tracker and improve the coordinate measurement accuracy of the laser tracker.

[0004] According to one aspect of the present disclosure, a method for measuring the optical axis deflection angle and translation amount applicable to error correction of a laser tracker is provided, comprising:

[0005] The laser tracker emits an initial laser beam, which is emitted onto a position sensitive detector to form a light spot, and the position of the light spot has corresponding two-dimensional coordinate information;

[0006] Adjust the azimuth and pitch angle of the laser tracker to a positive mirror mode, in which case the path of the initial laser beam transmission forms a positive mirror measurement optical path; adjust the azimuth and pitch angle of the laser tracker to a reverse mirror mode, in which case the path of the initial laser beam transmission forms a reverse mirror measurement optical path;

[0007] Sequentially placing the position sensitive detector at a plurality of different distances from the laser tracker, and obtaining position coordinates of a plurality of pairs of light spots formed on the position sensitive detector by the positive mirror measurement light path and the reverse mirror measurement light path corresponding to the plurality of different distances;

[0008] According to the position coordinates of each pair of the light spots, a relative distance between the position coordinates of each pair of the light spots is obtained;

[0009] According to the above-mentioned relative distances, the relative position relationship between the intersection of the horizontal axis and the vertical axis of the above-mentioned laser tracker and the intersection of the above-mentioned positive mirror measurement light path and the above-mentioned inverted mirror measurement light path, as well as the optical axis deflection angle and translation amount suitable for error correction of the above-mentioned laser tracker are obtained.

[0010] According to an embodiment of the present disclosure, the position coordinates of each pair of the above light spots are {(x a ,y a ), (x b ,y b )}, then the relative distance D between the position coordinates of each pair of the above light spots satisfies formula (1):

[0011] (1).

[0012] According to an embodiment of the present disclosure, the plurality of different distances include a first distance L1, a second distance L1', a third distance L2 and a fourth distance L2' arranged in order from near to far; the plurality of relative distances include a first relative distance D1, a second relative distance D1', a third relative distance D2 and a fourth relative distance D2';

[0013] The intersection of the positive mirror measurement optical path and the inverted mirror measurement optical path is located on the right side of the intersection of the horizontal axis and the vertical axis of the laser tracker as the positive direction position, and the distance L between the intersection of the optical path and the intersection of the horizontal axis and the vertical axis of the laser tracker is a Meet L a > L2> L1, at this time, the distance L between the intersection of the above optical path and the intersection of the horizontal axis and the vertical axis of the above laser tracker a , the above optical axis deviation angle α1 and the above translation amount d1 satisfy formula (2):

[0014] (2),

[0015] Among them, L1 is the above-mentioned first distance, L2 is the above-mentioned third distance, D1 is the above-mentioned first relative distance, and D2 is the above-mentioned third relative distance; the above-mentioned optical axis deviation angle is the angle formed by the normal of the plane where the intersection of the horizontal axis and the vertical axis of the above-mentioned laser tracker is located and the above-mentioned positive mirror measurement light path; the above-mentioned translation amount is the distance between the intersection of the above-mentioned horizontal axis and the vertical axis and the intersection point of the plane where the above-mentioned intersection is located and the above-mentioned positive mirror measurement light path.

[0016] According to an embodiment of the present disclosure, the intersection of the positive mirror measurement optical path and the inverted mirror measurement optical path is on the right side of the intersection of the horizontal axis and the vertical axis of the laser tracker, that is, the positive direction position, and the distance L between the intersection of the optical path and the intersection of the horizontal axis and the vertical axis of the laser tracker is b Satisfy L2> L b> L1, at this time, the distance L between the intersection of the above optical path and the intersection of the horizontal axis and the vertical axis of the above laser tracker b , the above optical axis deviation angle α2 and the above translation amount d2 satisfy formula (3):

[0017] (3).

[0018] According to an embodiment of the present disclosure, the intersection of the positive mirror measurement optical path and the inverted mirror measurement optical path is located on the right side of the intersection of the horizontal axis and the vertical axis of the laser tracker as the positive direction position, and the distance L between the intersection of the optical path and the intersection of the horizontal axis and the vertical axis of the laser tracker is c Satisfy L2> L b >L c >L1, at this time, the distance L between the intersection of the above optical path and the intersection of the horizontal axis and the vertical axis of the above laser tracker c , the above optical axis deviation angle α3 and the above translation amount d3 satisfy formula (4):

[0019] (4).

[0020] According to an embodiment of the present disclosure, the intersection of the positive mirror measurement optical path and the inverted mirror measurement optical path is located on the right side of the intersection of the horizontal axis and the vertical axis of the laser tracker as the positive direction position, and the distance L between the intersection of the optical path and the intersection of the horizontal axis and the vertical axis of the laser tracker is d Satisfies L2>L1>L d At this time, the distance L between the intersection of the optical path and the intersection of the horizontal axis and the vertical axis of the laser tracker is d , the above optical axis deviation angle α4 and the above translation amount d4 satisfy formula (5):

[0021] (5).

[0022] According to an embodiment of the present disclosure, the intersection of the positive mirror measurement optical path and the inverted mirror measurement optical path is located to the left of the intersection of the horizontal axis and the vertical axis of the laser tracker as a negative direction position. At this time, the distance L between the intersection of the optical path and the intersection of the horizontal axis and the vertical axis of the laser tracker is e , the above optical axis deviation angle α5 and the above translation amount d5 satisfy formula (6):

[0023] (6).

[0024] According to an embodiment of the present disclosure, based on the plurality of relative distances, the positive and negative conditions of the determination values ​​based on the plurality of relative distances are obtained; and

[0025] According to the positive or negative situation of the above-mentioned determination value, determine the distance between the intersection of the horizontal axis and the vertical axis of the above-mentioned laser tracker and the intersection of the above-mentioned positive mirror measurement optical path and the above-mentioned inverted mirror measurement optical path, and the solution formula of the optical axis deflection angle and the translation amount of the above-mentioned laser tracker, so as to obtain the above-mentioned optical axis deflection angle and the translation amount;

[0026] The determination value is the product of the difference between the first relative distance D1 and the second relative distance D1' and the difference between the third relative distance D2 and the fourth relative distance D2', and the determination value satisfies the formula: (D1-D1')(D2-D2').

[0027] According to an embodiment of the present disclosure, when the above judgment value is greater than zero, that is, (D1-D1')(D2-D2')>0, the distance L between the intersection of the positive mirror measurement optical path and the inverted mirror measurement optical path and the intersection of the horizontal axis and the vertical axis of the laser tracker, the optical axis deflection angle α, and the translation amount d satisfy formula (7):

[0028] (7),

[0029] Wherein, D1' is the second relative distance, and D2' is the fourth relative distance.

[0030] According to an embodiment of the present disclosure, when the judgment value is less than zero, (D1-D1')(D2-D2')<0, the distance L between the intersection of the positive mirror measurement optical path and the inverted mirror measurement optical path and the intersection of the horizontal axis and the vertical axis of the laser tracker, the optical axis deflection angle α, and the translation amount d satisfy formula (8):

[0031] (8).

[0032] According to an embodiment of the present disclosure, an initial laser beam is emitted by a laser tracker, and the initial laser beam is emitted to a position sensitive detector to form a light spot, and the position of the light spot has corresponding two-dimensional coordinate information; the azimuth and pitch angle of the laser tracker are adjusted to a positive mirror mode, and the path of the initial laser beam transmission forms a positive mirror measurement optical path; the azimuth and pitch angle of the laser tracker are adjusted to a reverse mirror mode, and the path of the initial laser beam transmission forms a reverse mirror measurement optical path; the position sensitive detector is sequentially placed at a plurality of different distances from the laser tracker, and the position coordinates of a plurality of pairs of light spots formed on the position sensitive detector by the positive mirror measurement optical path and the reverse mirror measurement optical path corresponding to the plurality of different distances are obtained; according to the position coordinates of each pair of light spots, the relative distance between the position coordinates of each pair of light spots is obtained; according to the plurality of relative distances and the different distances, the relative position relationship between the intersection of the horizontal axis and the vertical axis of the laser tracker and the intersection of the positive mirror measurement optical path and the reverse mirror measurement optical path, as well as the optical axis deflection angle and the translation amount suitable for error correction of the laser tracker are obtained, so that the measurement error of the laser tracker can be corrected, and the coordinate measurement accuracy of the laser tracker is improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] The above contents and other purposes, features and advantages of the present disclosure will become more apparent through the following description of the embodiments of the present disclosure with reference to the accompanying drawings, in which:

[0034] Figure 1 A flow chart schematically shows a method for measuring an optical axis deflection angle and a translation amount applicable to error correction of a laser tracker according to an embodiment of the present disclosure;

[0035] Figure 2 A schematic diagram showing the working principle of a method for measuring an optical axis deflection angle and a translation amount applicable to error correction of a laser tracker according to an embodiment of the present disclosure is shown;

[0036] Figure 3 A schematic diagram showing a principle diagram of obtaining the optical axis deflection angle and translation amount when the distance between the intersection of the positive mirror measurement optical path and the inverted mirror measurement optical path and the intersection of the horizontal axis and the vertical axis of the laser tracker is greater than a third distance in the optical axis deflection angle and translation amount measurement method applicable to laser tracker error correction according to an embodiment of the present disclosure;

[0037] Figure 4 A schematic diagram showing a principle diagram of obtaining the optical axis deflection angle and translation amount when the distance between the intersection of the positive mirror measurement optical path and the inverted mirror measurement optical path and the intersection of the horizontal axis and the vertical axis of the laser tracker is less than the third distance and greater than the first distance in the optical axis deflection angle and translation amount measurement method applicable to the laser tracker error correction according to an embodiment of the present disclosure;

[0038] Figure 5The schematic diagram shows that the distance between the intersection of the positive mirror measurement light path and the inverted mirror measurement light path and the intersection of the horizontal axis and the vertical axis of the laser tracker in the optical axis deflection angle and translation amount measurement method suitable for laser tracker error correction according to an embodiment of the present disclosure is less than L b When the distance is greater than the first distance, the principle diagram of obtaining the optical axis deflection angle and the translation amount;

[0039] Figure 6 A schematic diagram showing a principle diagram of obtaining the optical axis deflection angle and the translation amount when the distance between the intersection of the positive mirror measurement optical path and the inverted mirror measurement optical path and the intersection of the horizontal axis and the vertical axis of the laser tracker is less than a first distance in the optical axis deflection angle and translation amount measurement method applicable to the laser tracker error correction according to an embodiment of the present disclosure; and

[0040] Figure 7 The schematic diagram shows a principle diagram of obtaining the optical axis deflection angle and translation amount when the intersection of the positive mirror measurement light path and the inverted mirror measurement light path in the optical axis deflection angle and translation amount measurement method suitable for laser tracker error correction according to an embodiment of the present disclosure is at the negative direction position of the intersection of the horizontal axis and the vertical axis of the laser tracker.

[0041] In the above drawings, the meanings of the reference numerals are as follows:

[0042] 1-Laser tracker;

[0043] 2- Position sensitive detector;

[0044] 3-Positive mirror to measure the optical path;

[0045] 4-Inverted mirror measurement light path;

[0046] 5-The intersection of the horizontal and vertical axes of the laser tracker;

[0047] 6-The intersection of the positive mirror measurement light path and the inverted mirror measurement light path. DETAILED DESCRIPTION

[0048] Hereinafter, embodiments of the present disclosure will be described with reference to the accompanying drawings. However, it should be understood that these descriptions are exemplary only and are not intended to limit the scope of the present disclosure. In the following detailed description, for ease of explanation, many specific details are set forth to provide a comprehensive understanding of the embodiments of the present disclosure. However, it is apparent that one or more embodiments may also be implemented without these specific details. In addition, in the following description, descriptions of known structures and technologies are omitted to avoid unnecessary confusion of the concepts of the present disclosure.

[0049] The terms used herein are only for describing specific embodiments and are not intended to limit the present disclosure. The terms "comprise", "include", etc. used herein indicate the existence of the features, steps, operations and / or components, but do not exclude the existence or addition of one or more other features, steps, operations or components.

[0050] All terms (including technical and scientific terms) used herein have the meanings commonly understood by those skilled in the art unless otherwise defined. It should be noted that the terms used herein should be interpreted as having a meaning consistent with the context of this specification and should not be interpreted in an idealized or overly rigid manner.

[0051] When using expressions such as "at least one of A, B, and C, etc.", they should generally be interpreted according to the meaning of the expression commonly understood by those skilled in the art (for example, "a system having at least one of A, B, and C" should include but is not limited to a system having A alone, B alone, C alone, A and B, A and C, B and C, and / or A, B, C, etc.).

[0052] Due to machining errors and assembly errors, the optical axis of the laser tracker is not perpendicular to the plane where the horizontal / vertical axis is located, and there is a certain deviation angle. The intersection of the optical axis and this plane does not coincide with the intersection of the horizontal and vertical axes and there is a certain distance between them, which causes measurement errors and affects the coordinate measurement accuracy of the laser tracker.

[0053] In view of this, the present disclosure provides a method for measuring the deflection angle and translation amount of an optical axis suitable for error correction of a laser tracker, wherein an initial laser beam is emitted by a laser tracker, and the initial laser beam is emitted to a position sensitive detector to form a light spot, and the position of the light spot has corresponding two-dimensional coordinate information; the azimuth and pitch angles of the laser tracker are adjusted to a positive mirror mode, at which time the path of the initial laser beam transmission forms a positive mirror measurement light path; the azimuth and pitch angles of the laser tracker are adjusted to an inverted mirror mode, at which time the path of the initial laser beam transmission forms an inverted mirror measurement light path; the position sensitive detector is sequentially placed at a plurality of locations not far from the laser tracker At the same distance, the position coordinates of multiple pairs of light spots formed on the position sensitive detector by the positive mirror measurement light path and the inverted mirror measurement light path corresponding to multiple different distances are obtained; according to the position coordinates of each pair of light spots, the relative distance between the position coordinates of each pair of light spots is obtained; according to the multiple relative distances and different distances, the relative position relationship between the intersection of the horizontal axis and the vertical axis of the laser tracker and the intersection of the positive mirror measurement light path and the inverted mirror measurement light path, as well as the optical axis deflection angle and translation amount suitable for error correction of the laser tracker are obtained, which can correct the measurement error of the laser tracker and improve the coordinate measurement accuracy of the laser tracker.

[0054] Figure 1The flowchart of the method for measuring the optical axis deviation angle and translation amount applicable to the error correction of the laser tracker according to the embodiment of the present disclosure is schematically shown.

[0055] According to some embodiments of the present disclosure, Figure 1 As shown, the above-mentioned method for measuring the optical axis deflection angle and translation amount applicable to the error correction of the laser tracker includes: operations S101 to S105.

[0056] In operation S101 , a laser tracker emits an initial laser beam, and the initial laser beam is emitted to form a light spot on a position sensitive detector, and the position of the light spot has corresponding two-dimensional coordinate information.

[0057] In operation S102, the azimuth and pitch angle of the laser tracker are adjusted to the positive mirror mode, and the path of the initial laser beam transmission forms a positive mirror measurement optical path; the azimuth and pitch angle of the laser tracker are adjusted to the reverse mirror mode, and the path of the initial laser beam transmission forms a reverse mirror measurement optical path.

[0058] In operation S103, the position sensitive detector is sequentially placed at a plurality of different distances from the laser tracker to obtain position coordinates of a plurality of pairs of light spots formed on the position sensitive detector by the positive mirror measurement light path and the reverse mirror measurement light path corresponding to the plurality of different distances.

[0059] In operation S104, a relative distance between the position coordinates of each pair of light spots is obtained according to the position coordinates of each pair of light spots.

[0060] In operation S105, the relative position relationship between the intersection of the horizontal axis and the vertical axis of the laser tracker and the intersection of the positive mirror measurement optical path and the reverse mirror measurement optical path, as well as the optical axis deflection angle and translation amount suitable for error correction of the laser tracker are obtained according to multiple relative distances and different near and far distances.

[0061] According to some embodiments of the present disclosure, a laser tracker is used to emit an initial laser beam, and the initial laser beam is emitted to a position sensitive detector to form a light spot, and the position of the light spot has corresponding two-dimensional coordinate information; the azimuth and pitch angle of the laser tracker are adjusted to a positive mirror mode, and the path of the initial laser beam transmission forms a positive mirror measurement light path; the azimuth and pitch angle of the laser tracker are adjusted to a reverse mirror mode, and the path of the initial laser beam transmission forms a reverse mirror measurement light path; the position sensitive detector is sequentially placed at a plurality of different distances from the laser tracker, and the position sensitive detector is obtained at a plurality of different distances. The position coordinates of multiple pairs of light spots formed on the position sensitive detector by the positive mirror measurement light path and the inverted mirror measurement light path corresponding to each other are obtained; according to the position coordinates of each pair of light spots, the relative distance between the position coordinates of each pair of light spots is obtained; according to multiple relative distances and different long and short distances, the relative position relationship between the intersection of the horizontal axis and the vertical axis of the laser tracker and the intersection of the positive mirror measurement light path and the inverted mirror measurement light path, as well as the optical axis deflection angle and the translation amount suitable for error correction of the laser tracker are obtained; based on the optical axis deflection angle and the translation amount, the measurement error of the laser tracker is corrected, and the coordinate measurement accuracy of the laser tracker is improved.

[0062] According to some alternative embodiments of the present disclosure, the azimuth and pitch angle of the laser tracker are set to As the positive mirror mode of the laser tracker, the azimuth angle The value range is , pitch angle is a fixed value, which is related to the parameters of the laser tracker itself; the azimuth and pitch angle of the laser tracker are set to As an inverted mirror mode of the laser tracker.

[0063] According to some embodiments of the present disclosure, the position coordinates of each pair of light spots are {(x a ,y a ), (x b ,y b )}, the relative distance D between the position coordinates of each pair of light spots satisfies formula (1):

[0064] (1).

[0065] Figure 2 The working principle diagram of the method for measuring the optical axis deflection angle and translation amount applicable to the error correction of the laser tracker according to the embodiment of the present disclosure is schematically shown.

[0066] According to some embodiments of the present disclosure, Figure 2 As shown, with the geometric center of the laser tracker 1 as the coordinate origin and the optical axis of the laser tracker 1 as the z-axis, the position sensitive detector 2 is placed at different distances to obtain the corresponding position coordinates of each pair of light spots and the relative distance between the position coordinates of each pair of light spots.

[0067] According to some embodiments of the present disclosure, multiple different distances include a first distance L1, a second distance L1', a third distance L2 and a fourth distance L2' arranged in order from near to far; multiple relative distances include a first relative distance D1, a second relative distance D1', a third relative distance D2 and a fourth relative distance D2'.

[0068] According to some embodiments of the present disclosure, the first distance L1 and the second distance L1' satisfy L1'= L1+ΔL; the third distance L2 and the fourth distance L2' satisfy L2'= L2+ΔL.

[0069] According to some embodiments of the present disclosure, the position sensitive detector 2 is placed at a first distance L1 from the laser tracker 1, and the first light spot position coordinates (x1, y1) measured by the positive mirror and the second light spot position coordinates (x2, y2) measured by the inverted mirror are obtained. The first relative distance between the first light spot position coordinates and the second light spot position coordinates satisfies .

[0070] According to some embodiments of the present disclosure, the position sensitive detector 2 is placed at a second distance L1' from the laser tracker 1, and the third light spot position coordinates (x1', y1') measured by the positive mirror and the fourth light spot position coordinates (x2', y2') measured by the inverted mirror are obtained. The second relative distance between the third light spot position coordinates and the fourth light spot position coordinates satisfies .

[0071] According to some embodiments of the present disclosure, the position sensitive detector 2 is placed at a third distance L2 from the laser tracker 1, and the fifth light spot position coordinates (x3, y3) measured by the positive mirror and the sixth light spot position coordinates (x4, y4) measured by the reverse mirror are obtained. The third relative distance between the fifth light spot position coordinates and the sixth light spot position coordinates satisfies .

[0072] According to some embodiments of the present disclosure, the position sensitive detector 2 is placed at a fourth distance L2' from the laser tracker 1, and the seventh light spot position coordinates (x3', y3') measured by the positive mirror and the eighth light spot position coordinates (x4', y4') measured by the reverse mirror are obtained. The fourth relative distance between the seventh light spot position coordinates and the eighth light spot position coordinates satisfies .

[0073] According to some embodiments of the present disclosure, the intersection 6 of the positive mirror measurement light path and the inverted mirror measurement light path is defined as a positive direction on the right side of the intersection 5 of the horizontal axis and the vertical axis of the laser tracker 1, and the intersection 6 of the positive mirror measurement light path and the inverted mirror measurement light path is defined as a negative direction on the left side of the intersection 5 of the horizontal axis and the vertical axis of the laser tracker 1.

[0074] Figure 3 A schematic diagram shows a principle diagram of obtaining the optical axis deflection angle and translation amount when the distance between the intersection of the positive mirror measurement light path and the inverted mirror measurement light path and the intersection of the horizontal axis and the vertical axis of the laser tracker in the method for measuring the optical axis deflection angle and translation amount suitable for laser tracker error correction according to an embodiment of the present disclosure is greater than a third distance.

[0075] According to some embodiments of the present disclosure, Figure 3 As shown, the intersection 6 of the positive mirror measurement optical path and the inverted mirror measurement optical path is on the right side of the intersection 5 of the horizontal axis and the vertical axis of the laser tracker 1, that is, the positive direction position, and the distance L between the intersection 6 of the optical path and the intersection 5 of the horizontal axis and the vertical axis of the laser tracker 1 is a Meet L a > L2> L1, i.e. the distance L between the intersection point 6 of the optical path and the intersection point 5 of the horizontal axis and the vertical axis of the laser tracker 1 a Greater than the third distance L2. Figure 3 The following formula can be obtained:

[0076] .

[0077] At this time, according to the above formula, the distance L between the intersection point 6 of the optical path and the intersection point 5 of the horizontal axis and the vertical axis of the laser tracker 1 is a , the solution formula for the optical axis deviation angle α1 and the translation amount d1 (2) satisfies:

[0078] (2).

[0079] Among them, L1 is the first distance, L2 is the third distance, D1 is the first relative distance, and D2 is the third relative distance; the optical axis deviation angle is the angle formed between the normal of the plane where the intersection of the horizontal axis and the vertical axis of the laser tracker is located and the positive mirror measurement light path; the translation amount is the distance between the intersection of the horizontal axis and the vertical axis and the intersection of the plane where the intersection is located and the positive mirror measurement light path.

[0080] Figure 4 A schematic diagram shows a principle diagram of obtaining the optical axis deflection angle and translation amount when the distance between the intersection of the positive mirror measurement light path and the inverted mirror measurement light path and the intersection of the horizontal axis and the vertical axis of the laser tracker in the method for measuring the optical axis deflection angle and translation amount suitable for laser tracker error correction according to an embodiment of the present disclosure is less than the third distance and greater than the first distance.

[0081] According to some embodiments of the present disclosure, Figure 4 As shown, the intersection 6 of the positive mirror measurement optical path and the inverted mirror measurement optical path is on the right side of the intersection 5 of the horizontal axis and the vertical axis of the laser tracker 1, that is, the positive direction position, and the distance L between the intersection 6 of the optical path and the intersection 5 of the horizontal axis and the vertical axis of the laser tracker 1 is b Satisfy L2> L b> L1, i.e. the distance L between the intersection point 6 of the optical path and the intersection point 5 of the horizontal and vertical axes of the laser tracker 1 b is smaller than the third distance and larger than the first distance. Figure 4 The following formula can be obtained:

[0082] .

[0083] At this time, according to the above formula, the distance L between the intersection point 6 of the optical path and the intersection point 5 of the horizontal axis and the vertical axis of the laser tracker 1 is b , the solution formula for the optical axis deviation angle α2 and the translation amount d2 satisfies:

[0084] (3).

[0085] Figure 5 The schematic diagram shows that the distance between the intersection of the positive mirror measurement light path and the inverted mirror measurement light path and the intersection of the horizontal axis and the vertical axis of the laser tracker in the optical axis deflection angle and translation amount measurement method suitable for laser tracker error correction according to an embodiment of the present disclosure is less than L b When the distance is greater than the first distance, the principle diagram of obtaining the optical axis deviation angle and the translation amount.

[0086] According to some embodiments of the present disclosure, Figure 5 As shown, the intersection 6 of the positive mirror measurement optical path and the inverted mirror measurement optical path is on the right side of the intersection 5 of the horizontal axis and the vertical axis of the laser tracker 1, that is, the positive direction position, and the distance L between the intersection 6 of the optical path and the intersection 5 of the horizontal axis and the vertical axis of the laser tracker 1 is c Satisfy L2> L b >L c > L1, i.e. the distance L between the intersection point 6 of the optical path and the intersection point 5 of the horizontal and vertical axes of the laser tracker 1 c Less than L b Greater than the first distance. Figure 5 The following formula can be obtained:

[0087] .

[0088] At this time, according to the above formula, the distance L between the intersection point 6 of the optical path and the intersection point 5 of the horizontal axis and the vertical axis of the laser tracker 1 is c , the solution formula for the optical axis deviation angle α3 and the translation amount d3 satisfies:

[0089] (4).

[0090] Figure 6A schematic diagram shows a principle diagram of obtaining the optical axis deflection angle and translation amount when the distance between the intersection of the positive mirror measurement light path and the inverted mirror measurement light path and the intersection of the horizontal axis and the vertical axis of the laser tracker in the method for measuring the optical axis deflection angle and translation amount suitable for laser tracker error correction according to an embodiment of the present disclosure is less than a first distance.

[0091] According to some embodiments of the present disclosure, Figure 6 As shown, the intersection 6 of the positive mirror measurement optical path and the inverted mirror measurement optical path is on the right side of the intersection 5 of the horizontal axis and the vertical axis of the laser tracker 1, that is, the positive direction position, and the distance L between the intersection 6 of the optical path and the intersection 5 of the horizontal axis and the vertical axis of the laser tracker 1 is d Satisfies L2>L1>L d , that is, the distance L between the intersection point 6 of the optical path and the intersection point 5 of the horizontal axis and the vertical axis of the laser tracker 1 d is smaller than the first distance. Figure 6 The following formula can be obtained:

[0092] .

[0093] At this time, according to the above formula, the distance L between the intersection point 6 of the optical path and the intersection point 5 of the horizontal axis and the vertical axis of the laser tracker 1 is d , the solution formula for the optical axis deviation angle α4 and the translation amount d4 satisfies:

[0094] (5).

[0095] Figure 7 The schematic diagram shows a principle diagram of obtaining the optical axis deflection angle and translation amount when the intersection of the positive mirror measurement light path and the inverted mirror measurement light path in the optical axis deflection angle and translation amount measurement method suitable for laser tracker error correction according to an embodiment of the present disclosure is at the negative direction position of the intersection of the horizontal axis and the vertical axis of the laser tracker 1.

[0096] According to some embodiments of the present disclosure, Figure 7 As shown, the intersection 6 of the positive mirror measurement optical path and the inverted mirror measurement optical path is on the left side of the intersection 5 of the horizontal axis and the vertical axis of the laser tracker 1 as the negative direction position. When the intersection 6 of the positive mirror measurement optical path and the inverted mirror measurement optical path is on the left side of the intersection 5 of the horizontal axis and the vertical axis of the laser tracker 1, Figure 7 The following formula can be obtained:

[0097] .

[0098] At this time, according to the above formula, the distance L between the intersection of the optical path and the intersection of the horizontal axis and the vertical axis of the laser tracker 1 is e , the solution formula for the optical axis deviation angle α5 and the translation amount d5 satisfies:

[0099] (6).

[0100] According to some embodiments of the present disclosure, Figure 3 , Figure 4 , Figure 5 , Figure 6 and Figure 7 It can be obtained that the optical axis deviation angle is the angle formed by the normal of the plane where the intersection of the horizontal axis and the vertical axis of the laser tracker is located and the positive mirror measurement light path. The optical axis deviation angle is also the angle formed by the normal of the plane where the intersection of the horizontal axis and the vertical axis of the laser tracker is located and the inverted mirror measurement light path; the translation amount is the distance between the intersection of the horizontal axis and the vertical axis and the intersection of the plane where the intersection is located and the positive mirror measurement light path. The translation amount is also the distance between the intersection of the horizontal axis and the vertical axis and the intersection of the plane where the intersection is located and the inverted mirror measurement light path.

[0101] According to some embodiments of the present disclosure, the above-mentioned method for measuring the optical axis deflection angle and translation amount applicable to error correction of the laser tracker further includes:

[0102] According to the plurality of relative distances, obtaining positive and negative conditions of determination values ​​based on the plurality of relative distances; and

[0103] According to the positive or negative situation of the judgment value, the distance between the intersection of the horizontal axis and the vertical axis of the laser tracker and the intersection of the positive mirror measurement optical path and the reverse mirror measurement optical path, the solution formula of the optical axis deflection angle and the translation amount of the laser tracker are determined, so as to obtain the optical axis deflection angle and the translation amount;

[0104] According to some embodiments of the present disclosure, the determination value is the product of the difference between the first relative distance D1 and the second relative distance D1' and the difference between the third relative distance D2 and the fourth relative distance D2', and the determination value satisfies the formula: (D1-D1')(D2-D2').

[0105] According to some embodiments of the present disclosure, (D1-D1')(D2-D2')>0, at this time, the judgment value is positive, and the relative position of the intersection 5 of the horizontal axis and the vertical axis of the laser tracker and the intersection 6 of the positive mirror measurement light path and the inverted mirror measurement light path is determined. Figure 3 , Figure 6 and Figure 7 If all three cases are met, then the distance L between the intersection 6 of the positive mirror measurement optical path and the inverted mirror measurement optical path and the intersection 5 of the horizontal axis and the vertical axis of the laser tracker 1, the optical axis deviation angle α, and the translation d are solved by formula (7):

[0106] (7),

[0107] Wherein, D1' is the second relative distance, and D2' is the fourth relative distance.

[0108] According to some embodiments of the present disclosure, (D1-D1')(D2-D2')<0, at this time, the judgment value is negative, and the relative position of the intersection point 5 of the horizontal axis and the vertical axis of the laser tracker and the intersection point 6 of the positive mirror measurement light path and the inverted mirror measurement light path is determined. Figure 4 and Figure 5 If the above conditions are consistent, the distance L between the intersection 6 of the positive mirror measurement optical path and the inverted mirror measurement optical path and the intersection 5 of the horizontal axis and the vertical axis of the laser tracker 1, the optical axis deviation angle α, and the translation d are solved by formula (8):

[0109] (8).

[0110] The present invention obtains the optical axis deflection angle and translation amount suitable for laser tracker error correction by measurement, and corrects the laser tracker based on the optical axis deflection angle and translation amount according to actual measurement conditions, thereby correcting the measurement error of the laser tracker and improving the coordinate measurement accuracy of the laser tracker.

[0111] It will be appreciated by those skilled in the art that the features described in the various embodiments and / or claims of the present disclosure may be combined and / or combined in a variety of ways, even if such combinations and / or combinations are not explicitly described in the present disclosure. In particular, the features described in the various embodiments and / or claims of the present disclosure may be combined and / or combined in a variety of ways without departing from the spirit and teachings of the present disclosure. All of these combinations and / or combinations fall within the scope of the present disclosure.

[0112] The embodiments of the present disclosure are described above. However, these embodiments are only for illustrative purposes and are not intended to limit the scope of the present disclosure. Although the embodiments are described above separately, this does not mean that the measures in the various embodiments cannot be used in combination to advantage. The scope of the present disclosure is defined by the attached claims and their equivalents. Without departing from the scope of the present disclosure, those skilled in the art may make a variety of substitutions and modifications, which should all fall within the scope of the present disclosure.

Claims

1. A method for measuring the optical axis deflection and translation suitable for error correction of a laser tracker, wherein: include: The laser tracker emits an initial laser beam, which is emitted to a position sensitive detector to form a light spot, and the position of the light spot has corresponding two-dimensional coordinate information; Adjusting the azimuth and pitch angle of the laser tracker to a positive mirror mode, in which case the path of the initial laser beam transmission forms a positive mirror measurement optical path; adjusting the azimuth and pitch angle of the laser tracker to a reverse mirror mode, in which case the path of the initial laser beam transmission forms a reverse mirror measurement optical path; Sequentially placing the position sensitive detector at a plurality of different distances from the laser tracker, and obtaining position coordinates of a plurality of pairs of light spots formed on the position sensitive detector by the positive mirror measurement light path and the reverse mirror measurement light path corresponding to the plurality of different distances; According to the position coordinates of each pair of the light spots, a relative distance between the position coordinates of each pair of the light spots is obtained; According to the multiple relative distances and the different near and far distances, the relative position relationship between the intersection of the horizontal axis and the vertical axis of the laser tracker and the intersection of the positive mirror measurement light path and the reverse mirror measurement light path, as well as the optical axis deflection angle and translation amount suitable for error correction of the laser tracker are obtained.

2. The method for measuring the optical axis deflection angle and translation amount suitable for error correction of a laser tracker according to claim 1, wherein: The position coordinates of each pair of light spots are {(x a ,y a ), (x b ,y b )}, then the relative distance D between the position coordinates of each pair of the light spots satisfies formula (1): （1）。 3. The method for measuring the optical axis deflection angle and translation amount suitable for error correction of a laser tracker according to claim 2, wherein: The multiple different distances include a first distance L1, a second distance L1', a third distance L2 and a fourth distance L2' arranged in order from near to far; the multiple relative distances include a first relative distance D1, a second relative distance D1', a third relative distance D2 and a fourth relative distance D2'; The intersection of the positive mirror measurement optical path and the inverted mirror measurement optical path is located on the right side of the intersection of the horizontal axis and the vertical axis of the laser tracker as the positive direction position, and the distance L between the intersection of the optical path and the intersection of the horizontal axis and the vertical axis of the laser tracker is a Meet L a > L2> L1, at this time, the distance L between the intersection of the optical path and the intersection of the horizontal axis and the vertical axis of the laser tracker a , the optical axis deviation angle α1 and the translation amount d1 satisfy formula (2): （2）， Among them, L1 is the first distance, L2 is the third distance, D1 is the first relative distance, and D2 is the third relative distance; the optical axis deviation angle is the angle formed by the normal of the plane where the intersection of the horizontal axis and the vertical axis of the laser tracker is located and the positive mirror measurement light path; the translation amount is the distance between the intersection of the horizontal axis and the vertical axis and the intersection of the plane where the intersection is located and the positive mirror measurement light path.

4. The method for measuring the optical axis deflection angle and translation amount suitable for error correction of a laser tracker according to claim 3, wherein: The intersection of the positive mirror measurement optical path and the inverted mirror measurement optical path is on the right side of the intersection of the horizontal axis and the vertical axis of the laser tracker, that is, the positive direction position, and the distance L between the intersection of the optical path and the intersection of the horizontal axis and the vertical axis of the laser tracker is b Satisfy L2> L b > L1, at this time, the distance L between the intersection of the optical path and the intersection of the horizontal axis and the vertical axis of the laser tracker b , the optical axis deviation angle α2 and the translation amount d2 satisfy formula (3): （3）。 5. The method for measuring the optical axis deflection angle and translation amount suitable for error correction of a laser tracker according to claim 4, wherein: The intersection of the positive mirror measurement optical path and the inverted mirror measurement optical path is located on the right side of the intersection of the horizontal axis and the vertical axis of the laser tracker as the positive direction position, and the distance L between the intersection of the optical path and the intersection of the horizontal axis and the vertical axis of the laser tracker is c Satisfy L2> L b >L c >L1, at this time, the distance L between the intersection of the optical path and the intersection of the horizontal axis and the vertical axis of the laser tracker c , the optical axis deviation angle α3 and the translation amount d3 satisfy formula (4): （4）。 6. The method for measuring the optical axis deflection angle and translation amount suitable for error correction of a laser tracker according to claim 5, wherein: The intersection of the positive mirror measurement optical path and the inverted mirror measurement optical path is located on the right side of the intersection of the horizontal axis and the vertical axis of the laser tracker as the positive direction position, and the distance L between the intersection of the optical path and the intersection of the horizontal axis and the vertical axis of the laser tracker is d Satisfies L2>L1>L d At this time, the distance L between the intersection of the optical path and the intersection of the horizontal axis and the vertical axis of the laser tracker is d , the optical axis deviation angle α4 and the translation amount d4 satisfy formula (5): （5）。 7. The method for measuring the optical axis deflection angle and translation amount suitable for error correction of a laser tracker according to claim 6, wherein: The intersection of the positive mirror measurement optical path and the inverted mirror measurement optical path is located on the left side of the intersection of the horizontal axis and the vertical axis of the laser tracker as the negative direction position. At this time, the distance L between the intersection of the optical path and the intersection of the horizontal axis and the vertical axis of the laser tracker is e , the optical axis deviation angle α5 and the translation amount d5 satisfy formula (6): （6）。 8. The method for measuring the optical axis deflection angle and translation amount suitable for error correction of a laser tracker according to any one of claims 1 to 7, wherein: Also includes: According to the plurality of relative distances, obtaining positive and negative conditions of determination values ​​based on the plurality of relative distances; as well as According to the positive or negative situation of the determination value, determine the distance between the intersection of the horizontal axis and the vertical axis of the laser tracker and the intersection of the positive mirror measurement optical path and the inverted mirror measurement optical path, and the solution formula of the optical axis deflection angle and the translation amount of the laser tracker, so as to obtain the optical axis deflection angle and the translation amount; The determination value is the product of the difference between the first relative distance D1 and the second relative distance D1' and the difference between the third relative distance D2 and the fourth relative distance D2', and the determination value satisfies the formula: (D1-D1')(D2-D2').

9. The method for measuring the optical axis deflection angle and translation amount suitable for error correction of a laser tracker according to claim 8, wherein: When the judgment value is greater than zero, that is, (D1-D1')(D2-D2')>0, the distance L between the intersection of the positive mirror measurement light path and the reverse mirror measurement light path and the intersection of the horizontal axis and the vertical axis of the laser tracker, the optical axis deviation angle α, and the translation amount d satisfy formula (7): （7）， Wherein, D1' is the second relative distance, and D2' is the fourth relative distance.

10. The method for measuring the optical axis deflection angle and translation amount suitable for error correction of a laser tracker according to claim 9, wherein: When the judgment value is less than zero, (D1-D1')(D2-D2')<0, the distance L between the intersection of the positive mirror measurement light path and the reverse mirror measurement light path and the intersection of the horizontal axis and the vertical axis of the laser tracker, the optical axis deviation angle α, and the translation amount d satisfy formula (8): （8）。

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