Method for measuring optical axis deflection angle and translation for laser tracker error correction

Abstract

The disclosure provides a method for measuring optical axis deflection angle and translation amount suitable for laser tracker error correction, comprising: a laser tracker emits an initial laser beam, the initial laser beam exits onto a position sensitive detector to form a light spot, the position of the light spot has corresponding two-dimensional coordinate information; the position sensitive detector is placed at a plurality of different distances away from the laser tracker in turn, and a plurality of pairs of position coordinates of light spots formed by a positive mirror measurement light path and an inverted mirror measurement light path on the position sensitive detector corresponding to the plurality of different distances are obtained; according to the position coordinates of each pair of light spots, the relative distance between the position coordinates of each pair of light spots is obtained; according to a plurality of relative distances and different distances, the relative position relationship between the intersection of the horizontal axis and the vertical axis of the laser tracker and the intersection of the positive mirror measurement light path and the inverted mirror measurement light path, and the optical axis deflection angle and the translation amount suitable for laser tracker error correction are obtained.

Description

Technical Field

[0001] At least one embodiment of this disclosure relates to the field of instrument measurement and calibration technology, and more specifically to a method for measuring the optical axis deflection angle and translation amount suitable for error correction of a laser tracker. Background Technology

[0002] A laser tracker is a high-precision geometric measurement instrument capable of accurately measuring the geometric dimensions, form and position errors, and morphology / features of large components and complex parts. Ideally, the optical axis of the laser emitted by the laser tracker should be perpendicular to the horizontal and vertical axes and intersect at a single point. However, due to machining errors and assembly errors, the optical axis may not be perpendicular to the plane containing the horizontal / vertical axes, exhibiting a certain angle of deviation. Furthermore, the intersection point of the optical axis with this plane may not coincide with the intersection points of the horizontal and vertical axes and may be some distance away, thus generating measurement errors and affecting the coordinate measurement accuracy of the laser tracker. Summary of the Invention

[0003] To address at least one of the technical problems mentioned above and others in the prior art, this disclosure provides a method for measuring the optical axis deflection angle and translation amount suitable for error correction of laser trackers, which can correct the measurement error of laser trackers and improve the coordinate measurement accuracy of laser trackers.

[0004] According to one aspect of this disclosure, a method for measuring the optical axis deflection angle and translation amount suitable for error correction of a laser tracker is provided, comprising:

[0005] The laser tracker emits an initial laser beam, which strikes a position-sensitive detector to form a light spot. The position of the light spot has corresponding two-dimensional coordinate information.

[0006] Adjust the azimuth and pitch angle of the laser tracker to the upright mirror mode. At this time, the path of the initial laser beam transmission forms the upright mirror measurement optical path. Adjust the azimuth and pitch angle of the laser tracker to the inverted mirror mode. At this time, the path of the initial laser beam transmission forms the inverted mirror measurement optical path.

[0007] The position-sensitive detectors are placed sequentially at multiple different distances from the laser tracker to obtain the position coordinates of multiple pairs of light spots formed on the position-sensitive detectors by the positive mirror measurement optical path and the reverse mirror measurement optical path corresponding to the multiple different distances.

[0008] Based on the position coordinates of each pair of light spots, the relative distance between the position coordinates of each pair of light spots is obtained;

[0009] Based on the aforementioned relative distances, the relative positional relationship between the intersection of the horizontal and vertical axes of the laser tracker and the intersection of the optical paths of the positive and reverse mirrors is obtained, along with the optical axis deflection and translation amount applicable to the error correction of the laser tracker.

[0010] According to embodiments of this disclosure, the position coordinates of each pair of the above-mentioned light spots are {(x... a y a ), (x b y b If the relative distance D between the position coordinates of each pair of the above light spots satisfies formula (1):

[0011] (1).

[0012] According to embodiments of this disclosure, the plurality of different distances include a first distance L1, a second distance L1', a third distance L2, and a fourth distance L2' arranged in order from near to far; the plurality of relative distances include a first relative distance D1, a second relative distance D1', a third relative distance D2, and a fourth relative distance D2'.

[0013] The intersection of the aforementioned positive mirror measurement optical path and the aforementioned reverse mirror measurement optical path is located to the right of the intersection of the horizontal and vertical axes of the aforementioned laser tracker, which is taken as the positive direction position, and the distance L between the intersection of the aforementioned optical paths and the intersection of the horizontal and vertical axes of the aforementioned laser tracker is... a Satisfy L a When L2 > L1, the distance L between the intersection of the above optical paths and the intersection of the horizontal and vertical axes of the laser tracker is... a The optical axis deflection angle α1 and the translation amount d1 mentioned above satisfy formula (2):

[0014] (2),

[0015] Wherein, L1 is the first distance, L2 is the third distance, D1 is the first relative distance, and D2 is the third relative distance; the optical axis deflection angle is the angle formed between the normal of the plane where the intersection of the horizontal and vertical axes of the laser tracker is located and the optical path of the positive mirror measurement; the translation amount is the distance between the intersection of the horizontal and vertical axes and the intersection point of the plane where the intersection point is located and the optical path of the positive mirror measurement.

[0016] According to an embodiment of this disclosure, the intersection of the positive mirror measurement optical path and the reverse mirror measurement optical path is to the right of the intersection of the horizontal and vertical axes of the laser tracker, i.e., in the positive direction position, and the distance L between the intersection of the optical paths and the intersection of the horizontal and vertical axes of the laser tracker is... b Satisfying L2 > L b> L1, at this time, the distance L between the intersection of the above optical paths and the intersection of the horizontal and vertical axes of the above laser tracker. b The optical axis deflection angle α2 and the translation amount d2 mentioned above satisfy formula (3):

[0017] (3).

[0018] According to an embodiment of this disclosure, the intersection of the positive mirror measurement optical path and the reverse mirror measurement optical path is located to the right of the intersection of the horizontal and vertical axes of the laser tracker, which is considered the positive direction position, and the distance L between the intersection of the optical paths and the intersection of the horizontal and vertical axes of the laser tracker is... c Satisfying L2 > L b >L c >L1, at this time, the distance L between the intersection of the above optical paths and the intersection of the horizontal and vertical axes of the above laser tracker. c The optical axis deflection angle α3 and the translation amount d3 satisfy formula (4):

[0019] (4).

[0020] According to an embodiment of this disclosure, the intersection of the positive mirror measurement optical path and the reverse mirror measurement optical path is located to the right of the intersection of the horizontal and vertical axes of the laser tracker, which is considered the positive direction position, and the distance L between the intersection of the optical paths and the intersection of the horizontal and vertical axes of the laser tracker is... d Satisfying L2 > L1 > L d At this point, the distance L between the intersection of the aforementioned optical paths and the intersection of the horizontal and vertical axes of the aforementioned laser tracker is... d The optical axis deflection angle α4 and the translation amount d4 satisfy formula (5):

[0021] (5).

[0022] According to an embodiment of this disclosure, the intersection of the positive mirror measurement optical path and the reverse mirror measurement optical path is located to the left of the intersection of the horizontal and vertical axes of the laser tracker, which is considered a negative direction position. At this time, the distance L between the intersection of the optical paths and the intersection of the horizontal and vertical axes of the laser tracker is... e The optical axis deflection angle α5 and the translation amount d5 mentioned above satisfy formula (6):

[0023] (6).

[0024] According to embodiments of this disclosure, the sign of a determination value based on a plurality of the aforementioned relative distances is obtained; and

[0025] Based on the positive and negative values ​​of the above judgment values, the distance between the intersection of the horizontal and vertical axes of the laser tracker and the intersection of the optical path of the positive mirror and the optical path of the reverse mirror, the optical axis deflection angle of the laser tracker, and the translation amount are determined, thereby obtaining the optical axis deflection angle and the translation amount.

[0026] The above-mentioned judgment value is the product of the difference between the first relative distance D1 and the second relative distance D1' and the difference between the third relative distance D2 and the fourth relative distance D2', and the above-mentioned judgment value satisfies the formula: (D1-D1')(D2-D2').

[0027] According to an embodiment of this disclosure, when the above-mentioned determination value is greater than zero, i.e. (D1-D1')(D2-D2')>0, the distance L between the intersection of the above-mentioned positive mirror measurement optical path and the above-mentioned reverse mirror measurement optical path and the intersection of the horizontal axis and the vertical axis of the above-mentioned laser tracker, the above-mentioned optical axis deflection angle α, and the above-mentioned translation amount d satisfy formula (7):

[0028] (7),

[0029] Wherein, D1' is the second relative distance mentioned above, and D2' is the fourth relative distance mentioned above.

[0030] According to an embodiment of this disclosure, when the above-mentioned determination value is less than zero, (D1-D1')(D2-D2')<0, the distance L between the intersection of the above-mentioned positive mirror measurement optical path and the above-mentioned reverse mirror measurement optical path and the intersection of the horizontal axis and the vertical axis of the above-mentioned laser tracker, the above-mentioned optical axis deflection angle α, and the above-mentioned translation amount d satisfy formula (8):

[0031] (8).

[0032] According to embodiments of this disclosure, an initial laser beam is emitted using a laser tracker. The initial laser beam is emitted onto a position-sensitive detector to form a light spot, the position of which has corresponding two-dimensional coordinate information. The azimuth and elevation angles of the laser tracker are adjusted to a positive mirror mode, at which point the transmission path of the initial laser beam forms a positive mirror measurement optical path. The azimuth and elevation angles of the laser tracker are then adjusted to a reverse mirror mode, at which point the transmission path of the initial laser beam forms a reverse mirror measurement optical path. The position-sensitive detector is placed sequentially at multiple different distances from the laser tracker, and the position coordinates of multiple pairs of light spots formed on the position-sensitive detector by the positive and reverse mirror measurement optical paths corresponding to the multiple different distances are obtained. Based on the position coordinates of each pair of light spots, the relative distance between the position coordinates of each pair of light spots is obtained. Based on the multiple relative distances and the different distances, the relative positional relationship between the intersection of the horizontal and vertical axes of the laser tracker and the intersection of the positive and reverse mirror measurement optical paths, as well as the optical axis deflection angle and translation amount suitable for laser tracker error correction, are obtained. This can correct the measurement error of the laser tracker and improve the coordinate measurement accuracy of the laser tracker. Attached Figure Description

[0033] The foregoing contents, as well as other objects, features, and advantages of this disclosure, will become clearer from the following description of embodiments with reference to the accompanying drawings, in which:

[0034] Figure 1 A flowchart illustrating a method for measuring optical axis deflection and translation amount suitable for laser tracker error correction according to an embodiment of the present disclosure is shown schematically.

[0035] Figure 2 This schematic diagram illustrates the working principle of a method for measuring optical axis deflection and translation amount applicable to laser tracker error correction according to an embodiment of the present disclosure;

[0036] Figure 3 The schematic diagram illustrates the principle of obtaining the optical axis deflection and translation amount when the distance between the intersection of the positive mirror measurement optical path and the reverse mirror measurement optical path and the intersection of the horizontal axis and the vertical axis of the laser tracker is greater than a third distance in the measurement method for optical axis deflection and translation amount applicable to laser tracker error correction according to an embodiment of the present disclosure.

[0037] Figure 4 The schematic diagram illustrates the principle of obtaining the optical axis deflection and translation amount when the distance between the intersection of the positive mirror measurement optical path and the reverse mirror measurement optical path and the intersection of the horizontal axis and the vertical axis of the laser tracker is less than a third distance and greater than a first distance in the measurement method for optical axis deflection and translation amount applicable to laser tracker error correction according to an embodiment of the present disclosure;

[0038] Figure 5This schematically illustrates that in the method for measuring the optical axis deflection and translation amount applicable to laser tracker error correction according to embodiments of the present disclosure, the distance between the intersection of the positive mirror measurement optical path and the reverse mirror measurement optical path and the intersection of the horizontal and vertical axes of the laser tracker is less than L. b Schematic diagram for obtaining the optical axis deflection angle and translation amount when the distance is greater than the first distance;

[0039] Figure 6 This schematically illustrates the principle of obtaining the optical axis deflection and translation amount when the distance between the intersection of the positive mirror measurement optical path and the reverse mirror measurement optical path and the intersection of the horizontal and vertical axes of the laser tracker is less than a first distance in the measurement method for optical axis deflection and translation amount applicable to laser tracker error correction according to embodiments of the present disclosure; and

[0040] Figure 7 The schematic diagram illustrates the principle of obtaining the optical axis deflection and translation amount when the intersection of the positive mirror measurement optical path and the reverse mirror measurement optical path in the measurement method for laser tracker error correction according to an embodiment of the present disclosure is located in the negative direction of the intersection of the horizontal axis and the vertical axis of the laser tracker.

[0041] The meanings of the reference numerals in the above figures are as follows:

[0042] 1-Laser tracker;

[0043] 2-Position-sensitive detector;

[0044] 3-Optical path for measuring the positive mirror;

[0045] 4- Reverse mirror measurement optical path;

[0046] 5. The intersection of the horizontal and vertical axes of the laser tracker;

[0047] 6- The intersection of the optical path for measuring with the upright mirror and the optical path for measuring with the inverted mirror. Detailed Implementation

[0048] The embodiments of the present disclosure will now be described with reference to the accompanying drawings. However, it should be understood that these descriptions are exemplary only and are not intended to limit the scope of the disclosure. In the following detailed description, numerous specific details are set forth to provide a thorough understanding of the embodiments of the present disclosure for ease of explanation. However, it will be apparent that one or more embodiments may be practiced without these specific details. Furthermore, descriptions of well-known structures and techniques are omitted in the following description to avoid unnecessarily obscuring the concepts of the present disclosure.

[0049] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit this disclosure. The terms “comprising,” “including,” etc., as used herein indicate the presence of the stated features, steps, operations, and / or components, but do not exclude the presence or addition of one or more other features, steps, operations, or components.

[0050] All terms used herein (including technical and scientific terms) have the meanings commonly understood by those skilled in the art, unless otherwise defined. It should be noted that the terms used herein are to be interpreted in a manner consistent with the context of this specification, and not in an idealized or overly rigid way.

[0051] When using expressions such as "at least one of A, B and C", they should generally be interpreted in accordance with the meaning that is commonly understood by those skilled in the art (e.g., "a system having at least one of A, B and C" should include, but is not limited to, a system having A alone, a system having B alone, a system having C alone, a system having A and B, a system having A and C, a system having B and C, and / or a system having A, B and C, etc.).

[0052] Due to machining errors and assembly / adjustment errors, the optical axis of the laser tracker is not perpendicular to the plane containing the horizontal / vertical axes, and there is a certain angle of deviation. Furthermore, the intersection of the optical axis with this plane does not coincide with the intersection of the horizontal and vertical axes and there is a certain distance between them, which generates measurement errors and affects the coordinate measurement accuracy of the laser tracker.

[0053] In view of this, this disclosure provides a method for measuring the optical axis deflection angle and translation amount suitable for error correction of laser trackers. The method involves emitting an initial laser beam from the laser tracker, which strikes a position-sensitive detector to form a light spot. The position of the light spot has corresponding two-dimensional coordinate information. The azimuth and elevation angles of the laser tracker are adjusted to a positive mirror mode, at which point the path of the initial laser beam transmission forms the positive mirror measurement optical path. The azimuth and elevation angles of the laser tracker are then adjusted to a reverse mirror mode, at which point the path of the initial laser beam transmission forms the reverse mirror measurement optical path. The position-sensitive detector is then sequentially placed at multiple locations at a distance from the laser tracker. At the same near and far distances, the position coordinates of multiple pairs of light spots formed on the position-sensitive detector by the positive and reverse mirror measurement optical paths corresponding to multiple different near and far distances are obtained; based on the position coordinates of each pair of light spots, the relative distance between the position coordinates of each pair of light spots is obtained; based on multiple relative distances and different near and far distances, the relative positional relationship between the intersection of the horizontal and vertical axes of the laser tracker and the intersection of the positive and reverse mirror measurement optical paths is obtained, as well as the optical axis deflection angle and translation amount applicable to the error correction of the laser tracker. This can correct the measurement error of the laser tracker and improve the coordinate measurement accuracy of the laser tracker.

[0054] Figure 1A flowchart illustrating a method for measuring optical axis deflection and translation amount suitable for laser tracker error correction according to an embodiment of the present disclosure is shown.

[0055] According to some embodiments of this disclosure, such as Figure 1 As shown, the above-mentioned measurement method for optical axis deflection angle and translation amount applicable to laser tracker error correction includes: operations S101~S105.

[0056] In operation S101, the laser tracker emits an initial laser beam, which is emitted onto the position-sensitive detector to form a light spot. The position of the light spot has corresponding two-dimensional coordinate information.

[0057] In operation S102, the azimuth and pitch angle of the laser tracker are adjusted to the upright mirror mode, at which time the initial laser beam transmission path forms the upright mirror measurement optical path; the azimuth and pitch angle of the laser tracker are adjusted to the inverted mirror mode, at which time the initial laser beam transmission path forms the inverted mirror measurement optical path.

[0058] In operation S103, the position-sensitive detector is placed at multiple different distances from the laser tracker to obtain the position coordinates of multiple pairs of light spots formed on the position-sensitive detector by the positive mirror measurement optical path and the reverse mirror measurement optical path corresponding to the multiple different distances.

[0059] In operation S104, the relative distance between the position coordinates of each pair of light spots is obtained based on the position coordinates of each pair of light spots.

[0060] In operation S105, based on multiple relative distances and different distances, the relative positional relationship between the intersection of the horizontal and vertical axes of the laser tracker and the intersection of the optical paths of the front and rear mirrors is obtained, as well as the optical axis deflection angle and translation amount applicable to the error correction of the laser tracker.

[0061] According to some embodiments of this disclosure, an initial laser beam is emitted using a laser tracker. The initial laser beam is emitted onto a position-sensitive detector to form a light spot, the position of which has corresponding two-dimensional coordinate information. The azimuth and pitch angles of the laser tracker are adjusted to a positive mirror mode, at which point the transmission path of the initial laser beam forms a positive mirror measurement optical path. The azimuth and pitch angles of the laser tracker are adjusted to a reverse mirror mode, at which point the transmission path of the initial laser beam forms a reverse mirror measurement optical path. The position-sensitive detector is then placed sequentially at multiple different distances from the laser tracker to obtain the optical path corresponding to the position at multiple different distances. The position coordinates of multiple pairs of light spots formed on the position-sensitive detector by the corresponding positive and reverse mirror measurement optical paths are obtained. Based on the position coordinates of each pair of light spots, the relative distance between the position coordinates of each pair of light spots is obtained. Based on multiple relative distances and different distances, the relative positional relationship between the intersection of the horizontal and vertical axes of the laser tracker and the intersection of the positive and reverse mirror measurement optical paths is obtained, as well as the optical axis deflection angle and translation amount applicable to the error correction of the laser tracker. Based on the optical axis deflection angle and translation amount, the measurement error of the laser tracker is corrected, and the coordinate measurement accuracy of the laser tracker is improved.

[0062] According to some alternative embodiments of this disclosure, the azimuth and elevation angles of the laser tracker are set to... As the positive mirror mode of the laser tracker, the azimuth angle The range of values ​​is Pitch angle These are fixed values ​​and are related to the parameters of the laser tracker itself; the azimuth and elevation angles of the laser tracker are set to... As a mirror mode for laser trackers.

[0063] According to some embodiments of this disclosure, the position coordinates of each pair of light spots are {(x a y a ), (x b y b If the relative distance D between the position coordinates of each pair of light spots satisfies formula (1):

[0064] (1).

[0065] Figure 2 The diagram illustrates the working principle of a method for measuring optical axis deflection and translation amount applicable to laser tracker error correction according to an embodiment of the present disclosure.

[0066] According to some embodiments of this disclosure, such as Figure 2 As shown, with the geometric center of the laser tracker 1 as the origin and the optical axis of the laser tracker 1 as the z-axis, the position-sensitive detector 2 is placed at different distances to obtain the position coordinates of each pair of light spots and the relative distance between the position coordinates of each pair of light spots.

[0067] According to some embodiments of this disclosure, multiple different distances include a first distance L1, a second distance L1', a third distance L2, and a fourth distance L2' arranged in order from near to far; multiple relative distances include a first relative distance D1, a second relative distance D1', a third relative distance D2, and a fourth relative distance D2'.

[0068] According to some embodiments of this disclosure, the first distance L1 and the second distance L1' satisfy L1' = L1 + ΔL; the third distance L2 and the fourth distance L2' satisfy L2' = L2 + ΔL.

[0069] According to some embodiments of this disclosure, the position-sensitive detector 2 is placed at a first distance L1 from the laser tracker 1 to obtain the position coordinates (x1, y1) of the first light spot measured by the upright mirror and the position coordinates (x2, y2) of the second light spot measured by the inverted mirror. The first relative distance between the position coordinates of the first light spot and the position coordinates of the second light spot satisfies... .

[0070] According to some embodiments of this disclosure, the position-sensitive detector 2 is placed at a second distance L1' from the laser tracker 1 to obtain the position coordinates (x1', y1') of the third spot measured by the upright mirror and the position coordinates (x2', y2') of the fourth spot measured by the inverted mirror. The second relative distance between the position coordinates of the third spot and the position coordinates of the fourth spot satisfies .

[0071] According to some embodiments of this disclosure, the position-sensitive detector 2 is placed at a third distance L2 from the laser tracker 1 to obtain the position coordinates (x3, y3) of the fifth spot measured by the upright mirror and the position coordinates (x4, y4) of the sixth spot measured by the inverted mirror. The third relative distance between the position coordinates of the fifth spot and the position coordinates of the sixth spot satisfies .

[0072] According to some embodiments of this disclosure, the position-sensitive detector 2 is placed at a fourth distance L2' from the laser tracker 1 to obtain the position coordinates (x3', y3') of the seventh spot measured by the upright mirror and the position coordinates (x4', y4') of the eighth spot measured by the inverted mirror. The fourth relative distance between the position coordinates of the seventh spot and the position coordinates of the eighth spot satisfies .

[0073] According to some embodiments of this disclosure, the intersection point 6 of the positive mirror measurement optical path and the reverse mirror measurement optical path is defined as the positive direction to the right of the intersection point 5 of the horizontal axis and the vertical axis of the laser tracker 1, and the intersection point 6 of the positive mirror measurement optical path and the reverse mirror measurement optical path is defined as the negative direction to the left of the intersection point 5 of the horizontal axis and the vertical axis of the laser tracker 1.

[0074] Figure 3 The schematic diagram illustrates the principle of obtaining the optical axis deflection angle and translation amount when the distance between the intersection of the positive mirror measurement optical path and the reverse mirror measurement optical path and the intersection of the horizontal axis and the vertical axis of the laser tracker is greater than a third distance in the measurement method for optical axis deflection angle and translation amount applicable to laser tracker error correction according to an embodiment of the present disclosure.

[0075] According to some embodiments of this disclosure, such as Figure 3 As shown, the intersection point 6 of the positive mirror measurement optical path and the reverse mirror measurement optical path is to the right of the intersection point 5 of the horizontal and vertical axes of the laser tracker 1, i.e., in the positive direction position, and the distance L between the intersection point 6 of the optical paths and the intersection point 5 of the horizontal and vertical axes of the laser tracker 1 is... a Satisfy L a > L2> L1, that is, the distance L between the intersection point 6 of the optical path and the intersection point 5 of the horizontal and vertical axes of the laser tracker 1. a Greater than the third distance L2. (By...) Figure 3 The following formula can be obtained:

[0076] .

[0077] At this point, according to the above formula, the distance L between the intersection point 6 of the optical path and the intersection point 5 of the horizontal and vertical axes of the laser tracker 1 is... a The formula (2) for solving the optical axis deflection angle α1 and the translation d1 satisfies:

[0078] (2).

[0079] Wherein, L1 is the first distance, L2 is the third distance, D1 is the first relative distance, and D2 is the third relative distance; the optical axis deflection angle is the angle formed between the normal of the plane where the horizontal and vertical axes of the laser tracker intersect and the optical path of the positive mirror measurement; the translation amount is the distance between the intersection of the horizontal and vertical axes and the intersection of the plane where the intersection point is located and the optical path of the positive mirror measurement.

[0080] Figure 4 The schematic diagram illustrates the principle of obtaining the optical axis deflection and translation amount when the distance between the intersection of the positive mirror measurement optical path and the reverse mirror measurement optical path and the intersection of the horizontal axis and the vertical axis of the laser tracker is less than a third distance but greater than a first distance in the measurement method for optical axis deflection and translation amount applicable to laser tracker error correction according to embodiments of the present disclosure.

[0081] According to some embodiments of this disclosure, such as Figure 4 As shown, the intersection point 6 of the positive mirror measurement optical path and the reverse mirror measurement optical path is to the right of the intersection point 5 of the horizontal and vertical axes of the laser tracker 1, i.e., in the positive direction position, and the distance L between the intersection point 6 of the optical paths and the intersection point 5 of the horizontal and vertical axes of the laser tracker 1 is... b Satisfying L2 > L bL1 is the distance L between the intersection point 6 of the optical path and the intersection point 5 of the horizontal and vertical axes of the laser tracker 1. b The distance is less than the third distance but greater than the first distance. (By...) Figure 4 The following formula can be obtained:

[0082] .

[0083] At this point, according to the above formula, the distance L between the intersection point 6 of the optical path and the intersection point 5 of the horizontal and vertical axes of the laser tracker 1 is... b The formula (3) for solving the optical axis deflection angle α2 and the translation d2 satisfies:

[0084] (3).

[0085] Figure 5 This schematically illustrates that in the method for measuring the optical axis deflection and translation amount applicable to laser tracker error correction according to embodiments of the present disclosure, the distance between the intersection of the positive mirror measurement optical path and the reverse mirror measurement optical path and the intersection of the horizontal and vertical axes of the laser tracker is less than L. b The schematic diagram for obtaining the optical axis deflection angle and translation amount when the distance is greater than the first distance.

[0086] According to some embodiments of this disclosure, such as Figure 5 As shown, the intersection point 6 of the positive mirror measurement optical path and the reverse mirror measurement optical path is to the right of the intersection point 5 of the horizontal and vertical axes of the laser tracker 1, i.e., in the positive direction position, and the distance L between the intersection point 6 of the optical paths and the intersection point 5 of the horizontal and vertical axes of the laser tracker 1 is... c Satisfying L2 > L b >L c L1 is the distance L between the intersection point 6 of the optical path and the intersection point 5 of the horizontal and vertical axes of the laser tracker 1. c Less than L b Greater than the first distance. (By) Figure 5 The following formula can be obtained:

[0087] .

[0088] At this point, according to the above formula, the distance L between the intersection point 6 of the optical path and the intersection point 5 of the horizontal and vertical axes of the laser tracker 1 is... c The formula (4) for solving the optical axis deflection angle α3 and the translation d3 satisfies:

[0089] (4).

[0090] Figure 6The schematic diagram illustrates the principle of obtaining the optical axis deflection and translation amount when the distance between the intersection of the positive mirror measurement optical path and the reverse mirror measurement optical path and the intersection of the horizontal axis and the vertical axis of the laser tracker is less than a first distance in the measurement method for optical axis deflection and translation amount applicable to laser tracker error correction according to an embodiment of the present disclosure.

[0091] According to some embodiments of this disclosure, such as Figure 6 As shown, the intersection point 6 of the positive mirror measurement optical path and the reverse mirror measurement optical path is to the right of the intersection point 5 of the horizontal and vertical axes of the laser tracker 1, i.e., in the positive direction position, and the distance L between the intersection point 6 of the optical paths and the intersection point 5 of the horizontal and vertical axes of the laser tracker 1 is... d Satisfying L2 > L1 > L d That is, the distance L between the intersection point 6 of the optical path and the intersection point 5 of the horizontal and vertical axes of the laser tracker 1. d Less than the first distance. (By) Figure 6 The following formula can be obtained:

[0092] .

[0093] At this point, according to the above formula, the distance L between the intersection point 6 of the optical path and the intersection point 5 of the horizontal and vertical axes of the laser tracker 1 is... d The formula (5) for solving the optical axis deflection angle α4 and the translation d4 satisfies:

[0094] (5).

[0095] Figure 7 The schematic diagram illustrates the principle of obtaining the optical axis deflection and translation amount when the intersection of the positive mirror measurement optical path and the reverse mirror measurement optical path in the measurement method for optical axis deflection and translation amount applicable to laser tracker error correction according to an embodiment of the present disclosure is located in the negative direction of the intersection of the horizontal axis and the vertical axis of the laser tracker 1.

[0096] According to some embodiments of this disclosure, such as Figure 7 As shown, the intersection point 6 of the positive mirror measurement optical path and the reverse mirror measurement optical path is located to the left of the intersection point 5 of the horizontal and vertical axes of the laser tracker 1, which is considered the negative direction position. When the intersection point 6 of the positive mirror measurement optical path and the reverse mirror measurement optical path is to the left of the intersection point 5 of the horizontal and vertical axes of the laser tracker 1, the negative direction is determined by... Figure 7 The following formula can be obtained:

[0097] .

[0098] At this point, according to the above formula, the distance L between the intersection of the optical path and the intersection of the horizontal and vertical axes of the laser tracker 1 is... e The formula (6) for solving the optical axis deflection angle α5 and the translation d5 satisfies:

[0099] (6).

[0100] According to some embodiments of this disclosure, by Figure 3 , Figure 4 , Figure 5 , Figure 6 and Figure 7 Therefore, the optical axis deflection angle is the angle formed between the normal of the plane containing the intersection of the horizontal and vertical axes of the laser tracker and the optical path of the front mirror measurement. The optical axis deflection angle is also the angle formed between the normal of the plane containing the intersection of the horizontal and vertical axes of the laser tracker and the optical path of the inverted mirror measurement. The translation amount is the distance between the intersection of the horizontal and vertical axes and the plane containing the intersection and the intersection of the front mirror measurement optical path. The translation amount is also the distance between the intersection of the horizontal and vertical axes and the plane containing the intersection and the intersection of the inverted mirror measurement optical path.

[0101] According to some embodiments of this disclosure, the above-mentioned measurement method for optical axis deflection angle and translation amount applicable to laser tracker error correction further includes:

[0102] Based on multiple relative distances, obtain the positive or negative value of the determination value based on multiple relative distances; and

[0103] Based on the sign of the judgment value, the distance between the intersection of the horizontal and vertical axes of the laser tracker and the intersection of the optical paths of the front and reverse mirrors, the optical axis deflection angle of the laser tracker, and the translation amount are determined, thereby obtaining the optical axis deflection angle and the translation amount.

[0104] According to some embodiments of this disclosure, the determination value is the product of the difference between the first relative distance D1 and the second relative distance D1' and the difference between the third relative distance D2 and the fourth relative distance D2', and the determination value satisfies the formula: (D1-D1')(D2-D2').

[0105] According to some embodiments of this disclosure, (D1-D1')(D2-D2')>0, in which case the determination value is positive, and the relative position of the intersection point 5 of the horizontal and vertical axes of the laser tracker with the intersection point 6 of the positive mirror measurement optical path and the reverse mirror measurement optical path is determined. Figure 3 , Figure 6 and Figure 7 If all three conditions are met, then the solution formula (7) for the distance L between the intersection point 6 of the positive mirror measurement optical path and the intersection point 5 of the horizontal and vertical axes of the laser tracker 1, the optical axis deflection angle α, and the translation d satisfies:

[0106] (7),

[0107] Where D1' is the second relative distance and D2' is the fourth relative distance.

[0108] According to some embodiments of this disclosure, (D1-D1')(D2-D2')<0, in which case the determination value is negative, and the relative position of the intersection point 5 of the horizontal and vertical axes of the laser tracker with the intersection point 6 of the positive mirror measurement optical path and the reverse mirror measurement optical path is determined. Figure 4 and Figure 5 If all conditions are met, then the solution formula (8) for the distance L between the intersection point 6 of the positive mirror measurement optical path and the intersection point 5 of the horizontal and vertical axes of the laser tracker 1, the optical axis deflection angle α, and the translation d satisfies:

[0109] (8).

[0110] This disclosure obtains the optical axis deflection angle and translation amount suitable for error correction of the laser tracker by measurement, and corrects the laser tracker based on the optical axis deflection angle and translation amount according to the actual measurement situation, thereby correcting the measurement error of the laser tracker and improving the coordinate measurement accuracy of the laser tracker.

[0111] Those skilled in the art will understand that the features described in the various embodiments and / or claims of this disclosure can be combined or combined in various ways, even if such combinations or combinations are not explicitly described in this disclosure. In particular, the features described in the various embodiments and / or claims of this disclosure can be combined or combined in various ways without departing from the spirit and teachings of this disclosure. All such combinations and / or combinations fall within the scope of this disclosure.

[0112] The embodiments of this disclosure have been described above. However, these embodiments are for illustrative purposes only and are not intended to limit the scope of this disclosure. Although various embodiments have been described above, this does not mean that the measures in the various embodiments cannot be used advantageously in combination. The scope of this disclosure is defined by the appended claims and their equivalents. Various substitutions and modifications can be made by those skilled in the art without departing from the scope of this disclosure, and all such substitutions and modifications should fall within the scope of this disclosure.

Claims

1. A method for measuring the optical axis deflection angle and the translation of a laser tracker for error correction, wherein, include: The laser tracker emits an initial laser beam, which is emitted onto a position-sensitive detector to form a light spot. The position of the light spot has corresponding two-dimensional coordinate information. Adjust the azimuth and pitch angle of the laser tracker to the upright mirror mode, at which time the path of the initial laser beam transmission forms the upright mirror measurement optical path; adjust the azimuth and pitch angle of the laser tracker to the inverted mirror mode, at which time the path of the initial laser beam transmission forms the inverted mirror measurement optical path. The position-sensitive detector is placed sequentially at multiple different distances from the laser tracker, and the position coordinates of multiple pairs of light spots formed on the position-sensitive detector by the positive mirror measurement optical path and the reverse mirror measurement optical path corresponding to the multiple different distances are obtained; Based on the position coordinates of each pair of light spots, the relative distance between the position coordinates of each pair of light spots is obtained; Based on the multiple relative distances, the sign of the determination value based on the multiple relative distances is obtained; as well as Based on the sign of the judgment value, the distance between the intersection of the horizontal and vertical axes of the laser tracker and the intersection of the optical path of the positive mirror and the optical path of the reverse mirror, the optical axis deflection angle of the laser tracker, and the formula for calculating the translation amount are determined, thereby obtaining the optical axis deflection angle and the translation. wherein the position coordinates of each pair of the light spots are {(x a , y a ), (x b , y b )}, and the relative distance D between the position coordinates of each pair of the light spots satisfies formula (1): （1）； The plurality of different distances include a first distance L1, a second distance L1', a third distance L2, and a fourth distance L2' arranged in order from near to far; the plurality of relative distances include a first relative distance D1, a second relative distance D1', a third relative distance D2, and a fourth relative distance D2'; The determination value is the product of the difference between the first relative distance D1 and the second relative distance D1' and the difference between the third relative distance D2 and the fourth relative distance D2', and the determination value satisfies the formula: (D1-D1')(D2-D2').

2. The method for measuring the optical axis deflection angle and translation amount suitable for error correction of laser trackers according to claim 1, wherein... The intersection of the positive mirror measurement optical path and the reverse mirror measurement optical path is located to the right of the intersection of the horizontal and vertical axes of the laser tracker, with the positive direction position defined as such. The distance L between the intersection of the optical paths and the intersection of the horizontal and vertical axes of the laser tracker is... a Satisfy L a When L2 > L1, the distance L between the intersection of the optical path and the intersection of the horizontal and vertical axes of the laser tracker is... a The optical axis deflection angle α1 and the translation amount d1 satisfy formula (2): （2）， wherein, L1 is the first distance, L2 is the third distance, D1 is the first relative distance, and D2 is the third relative distance; the optical axis deflection angle is the angle formed between the normal of the plane where the horizontal and vertical axes of the laser tracker intersect and the optical path of the positive mirror measurement; the translation amount is the distance between the intersection of the horizontal and vertical axes and the intersection point of the plane where the intersection point is located and the optical path of the positive mirror measurement.

3. The method for measuring optical axis deflection angle and translation applicable to error correction of a laser tracker according to claim 2, wherein, The intersection of the positive mirror measurement light path and the inverted mirror measurement light path is on the right side of the intersection of the horizontal axis and the vertical axis of the laser tracker, i.e. the positive direction position, and the distance L of the intersection of the light paths from the intersection of the horizontal axis and the vertical axis of the laser tracker b L2> L b > L1, at this time, the distance L of the intersection of the light paths from the intersection of the horizontal axis and the vertical axis of the laser tracker b , the optical axis deflection angle α2 and the translation amount d2 satisfy formula (3): （3）。 4. The method for measuring optical axis deflection angle and translation amount suitable for error correction of a laser tracker according to claim 3, wherein, The intersection of the positive mirror measurement optical path and the reverse mirror measurement optical path is located to the right of the intersection of the horizontal and vertical axes of the laser tracker, with the positive direction position defined as such. The distance L between the intersection of the optical paths and the intersection of the horizontal and vertical axes of the laser tracker is... c Satisfying L2 > L b >L c >L1, at this time, the distance L between the intersection of the optical path and the intersection of the horizontal and vertical axes of the laser tracker. c The optical axis deflection angle α3 and the translation amount d3 satisfy formula (4): （4）。 5. The method for measuring optical axis deflection angle and translation amount suitable for error correction of a laser tracker according to claim 4, wherein, The intersection of the positive mirror measurement optical path and the reverse mirror measurement optical path is located to the right of the intersection of the horizontal and vertical axes of the laser tracker, with the positive direction position defined as such. The distance L between the intersection of the optical paths and the intersection of the horizontal and vertical axes of the laser tracker is... d Satisfying L2 > L1 > L d At this time, the distance L between the intersection of the optical path and the intersection of the horizontal and vertical axes of the laser tracker is... d The optical axis deflection angle α4 and the translation amount d4 satisfy formula (5): （5）。 6. The method of measuring optical axis declination and translation applicable to error correction of a laser tracker according to claim 5, wherein, The intersection point of the positive mirror measurement light path and the inverted mirror measurement light path is on the left side of the intersection point of the horizontal axis and the vertical axis of the laser tracker as a negative direction position, and at this time, the distance L between the intersection point of the light paths and the intersection point of the horizontal axis and the vertical axis of the laser tracker e The optical axis deflection angle α5 and the translation amount d5 satisfy formula (6): （6）。 7. The method of measuring optical axis declination and translation applicable to error correction of a laser tracker according to claim 1, wherein, When the determination value is greater than zero, i.e. (D1-D1')(D2-D2')>0, the distance L between the intersection of the positive mirror measurement optical path and the reverse mirror measurement optical path and the intersection of the horizontal and vertical axes of the laser tracker, the optical axis deflection angle α, and the translation amount d satisfy formula (7): （7）， Wherein, D1' is the second relative distance, and D2' is the fourth relative distance.

8. The method for measuring optical axis deflection angle and translation amount suitable for error correction of a laser tracker according to claim 7, wherein, When the determination value is less than zero, (D1-D1')(D2-D2')<0, the distance L between the intersection of the positive mirror measurement optical path and the reverse mirror measurement optical path and the intersection of the horizontal and vertical axes of the laser tracker, the optical axis deflection angle α, and the translation amount d satisfy formula (8): （8）。

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