A super-pure water treatment system for cleaning a terminal

Abstract

The application belongs to the field of pure water treatment, and particularly relates to a cleaning terminal ultrapure water treatment system. The existing open overflow is continuously added with new ultrapure water, which increases the use amount of pure water and use cost. The present application provides the following scheme. The system comprises a cleaning pool and a resin bed arranged on one side of the cleaning pool. A circulating pump is arranged between the cleaning pool and the resin bed. The liquid suction end of the circulating pump is fixedly communicated with the cleaning pool. The liquid outlet end of the circulating pump is fixedly communicated with a water inlet pipe. In the process of taking and placing the workpiece, the two inclined plate top portions are close to each other, thereby forming a closed space, reducing the contact between the pure water and the air, avoiding the reaction between the pure water and the air, and simultaneously treating the pure water through the exchange resin in the resin bed, so that the pure water can be recycled, the waste of the pure water is reduced, the cleaning cost is reduced, and the exchange resin in the resin bed is discharged through the threaded head driving the spiral blade to rotate, thereby facilitating the replacement of the exchange resin.

Description

Technical Field

[0001] This invention relates to the field of pure water treatment technology, and in particular to an ultrapure water treatment system for a cleaning terminal. Background Technology

[0002] Semiconductor front-end equipment components have very high cleanliness requirements, especially those that come into contact with wafers, which are extremely sensitive to particulate matter. The cleanliness of these components directly affects the yield of chips. Therefore, cleaning before packaging is particularly important and must be done in an ISO 6 or higher cleanroom using ultrapure water with a resistivity of not less than 4MΩ.

[0003] The conventional approach involves producing ultrapure water with an Ω rating of at least 15MΩ from a pure water station. This ultrapure water then enters a cleanroom through reversible PVC pipes. The cleanroom then adds the ultrapure water to a tank. However, the water quality of ultrapure water deteriorates rapidly upon contact with air. Initially, the Ω rating is >5MΩ, but as it comes into contact with air or the parts to be cleaned enter the tank, the Ω rating drops quickly to <1MΩ, far below the cleaning requirements. The traditional method is to increase the overflow and continuously add new ultrapure water, which increases the amount of pure water used and the operating cost. Therefore, an ultrapure water treatment system for the cleaning terminal is proposed. Summary of the Invention

[0004] The purpose of this invention is to address the shortcomings of existing technologies, such as the need to continuously add new ultrapure water by opening the overflow, which increases the amount of pure water used and the operating cost. Therefore, this invention proposes an ultrapure water treatment system for cleaning terminals.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] An ultrapure water treatment system for a cleaning terminal includes a cleaning tank and a resin bed disposed on one side of the cleaning tank. A circulation pump is provided between the cleaning tank and the resin bed. The pumping end of the circulation pump is fixedly connected to the cleaning tank, and the outlet end of the circulation pump is fixedly connected to an inlet pipe. A connecting sleeve is threadedly connected to the top of the resin bed. A first connecting pipe and a second connecting pipe are fixedly passed through the inner circumference of the connecting sleeve. The first connecting pipe is fixedly connected to the inlet pipe, and one end of the second connecting pipe is fixedly connected to an outlet pipe.

[0007] The top of the cleaning tank is provided with a lifting plate, and the bottom of the lifting plate is fixedly connected to an inner box. Both sides of the lifting plate are hinged with cover plates for sealing the top of the inner box. The water outlet pipe passes through the lifting plate and communicates with the inner box. A distribution pipe is provided in the resin bed, and the first connecting pipe is inserted into the distribution pipe.

[0008] Two symmetrically arranged inclined plates are rotatably connected between the inner walls of the two sides of the inner box. Two top plates that cooperate with the inclined plates are fixedly connected to the bottom inner wall of the inner box. Electric push rods are fixedly connected to both sides of the washing pool, and the output ends of the electric push rods are fixed to the lifting plate.

[0009] As a further embodiment of the present invention, the bottom of each inclined plate is fixedly connected with a through drain pipe, and the top of each drain pipe is hinged with a floating cover for sealing the top of the drain pipe.

[0010] As a further embodiment of the present invention, two limiting posts for limiting the inclined plate are fixedly connected to the inner walls on both sides of the inner box.

[0011] As a further embodiment of the present invention, an inclined filter plate is fixedly connected to the inner circumferential wall of the resin bed.

[0012] As a further embodiment of the present invention, the bottom of the filter plate is fixedly connected to a connecting pipe, the bottom of the connecting pipe is fixedly connected to a discharge pipe, the discharge pipe passes through the resin bed, one end of the discharge pipe is threaded to a threaded head, one side of the threaded head is fixedly connected to a rotating shaft, and a spiral blade for discharging is fixedly connected to the circumference of the rotating shaft, the spiral blade being located inside the discharge pipe.

[0013] As a further embodiment of the present invention, the discharge pipe is in contact with the bottom inner wall of the resin bed, and two guide plates are fixedly connected between the bottom inner wall of the resin bed and the bottom of the filter plate, with the discharge pipe located between the two guide plates.

[0014] As a further embodiment of the present invention, a filter box is fixedly connected to the bottom of the distribution pipe, and the filter box is located below the filter plate.

[0015] As a further embodiment of the present invention, a treatment box is provided on one side of the resin bed, and a sodium hydroxide solution is provided inside the treatment box. An air pump is fixedly installed on the top of the treatment box, and an air extraction pipe is fixedly connected to the air extraction end of the air pump. Two second branch pipes are fixedly connected to the circumference of the air extraction pipe, and the two second branch pipes are respectively connected to the resin bed and the inner box. An exhaust pipe is fixedly connected to the air outlet end of the air pump, and the exhaust pipe passes through the treatment box and is located inside the treatment box. An exhaust pipe is fixedly connected to the top of the treatment box, and two first branch pipes are fixedly connected to the circumference of the exhaust pipe, and the first branch pipes are respectively connected to the resin bed and the inner box.

[0016] As a further embodiment of the present invention, control valves are installed around the circumference of both the first branch pipe and the second branch pipe.

[0017] As a further embodiment of the present invention, both the first branch pipe and the second branch pipe are flexible hoses.

[0018] Compared with the prior art, the beneficial effects of the present invention are:

[0019] 1. The present invention installs an inner box in the cleaning tank, with a rotating inclined plate installed at the bottom of the inner box. This allows the tops of the two inclined plates to approach each other during the handling of workpieces, thereby forming a closed space, reducing the contact between pure water and air, and preventing pure water from reacting with air.

[0020] 2. The present invention, by installing a drain pipe at the bottom of the inclined plate, with a floating cover hinged to the top of the drain pipe, allows the pure water remaining in the inclined plate to flow downward through the drain pipe. After the liquid level drops, the floating cover falls and closes, further preventing the pure water from reacting with the air.

[0021] 3. This invention utilizes a combination of a circulating pump and a resin bed to extract pure water from the cleaning tank via a circulating pump and distribute it into the resin bed through a distribution pipe. The pure water is then treated by the exchange resin in the resin bed, allowing it to circulate and reducing waste and cleaning costs.

[0022] 4. The present invention features a discharge pipe installed on one side of the resin bed, with a spiral blade installed inside the discharge pipe. Rotating the threaded head drives the spiral blade to rotate, thereby discharging the exchange resin from the resin bed, which facilitates the replacement of the exchange resin.

[0023] In this invention, during the process of picking up and placing the workpiece, the tops of the two inclined plates approach each other to form a closed space, reducing the contact between pure water and air and preventing pure water from reacting with air. At the same time, the pure water is treated by the exchange resin in the resin bed, allowing the pure water to circulate, reducing waste of pure water and lowering cleaning costs. The spiral blades are driven to rotate by the threaded head, thereby discharging the exchange resin in the resin bed, which facilitates the replacement of the exchange resin. Attached Figure Description

[0024] Figure 1 This is a first-view three-dimensional structural diagram of an ultrapure water treatment system for a cleaning terminal proposed in this invention.

[0025] Figure 2 This is a second-view three-dimensional structural diagram of an ultrapure water treatment system for a cleaning terminal proposed in this invention.

[0026] Figure 3 This is a schematic cross-sectional view of the inner tank structure of an ultrapure water treatment system for a cleaning terminal proposed in this invention.

[0027] Figure 4 This is a cross-sectional view of the resin bed and treatment tank of an ultrapure water treatment system for a cleaning terminal proposed in this invention.

[0028] Figure 5This is a magnified structural diagram of point A of an ultrapure water treatment system for a cleaning terminal proposed in this invention.

[0029] Figure 6 This is a partial structural diagram of the resin bed in an ultrapure water treatment system for a cleaning terminal proposed in this invention.

[0030] In the diagram: 1. Cleaning tank; 2. Lifting plate; 3. Cover plate; 4. Electric push rod; 5. Circulation pump; 6. Resin bed; 7. Connecting sleeve; 8. Discharge pipe; 9. Treatment box; 10. Air pump; 11. Inner box; 12. Inclined plate; 13. Drain pipe; 14. Floating cover; 15. Top plate; 16. Limiting post; 17. Distribution pipe; 18. Exhaust pipe; 19. Air outlet pipe; 20. First branch pipe; 21. Air extraction pipe; 22. Second branch pipe; 23. Water outlet pipe; 24. Water inlet pipe; 25. First connecting pipe; 26. Second connecting pipe; 27. Filter plate; 28. Connecting pipe; 29. ​​Threaded head; 30. Rotating shaft; 31. Spiral blade; 32. Guide plate; 33. Filter box. Detailed Implementation

[0031] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments.

[0032] Example 1

[0033] Reference Figures 1-6 An ultrapure water treatment system for a cleaning terminal includes a cleaning tank 1 and a resin bed 6 disposed on one side of the cleaning tank 1. The cleaning tank 1 contains pure water, and the resin bed 6 contains ion exchange resin for treating pure water. A circulation pump 5 is disposed between the cleaning tank 1 and the resin bed 6. The pumping end of the circulation pump 5 is fixedly connected to the cleaning tank 1, and the outlet end of the circulation pump 5 is fixedly connected to an inlet pipe 24. A connecting sleeve 7 is threadedly connected to the top of the resin bed 6. A first connecting pipe 25 and a second connecting pipe 26 are fixedly passed through the inner circumference of the connecting sleeve 7. The first connecting pipe 25 is fixedly connected to the inlet pipe 24, and one end of the second connecting pipe 26 is fixedly connected to an outlet pipe 23.

[0034] A lifting plate 2 is installed on the top of the cleaning tank 1. An inner box 11 is fixedly connected to the bottom of the lifting plate 2. Cover plates 3 for sealing the top of the inner box 11 are hinged on both sides of the lifting plate 2. The water outlet pipe 23 passes through the lifting plate 2 and communicates with the inner box 11. A distribution pipe 17 is installed in the resin bed 6. The first connecting pipe 25 is inserted into the distribution pipe 17. The circulation pump 5 draws pure water from the cleaning tank 1 and lets the pure water enter the resin bed 6 through the distribution pipe 17. The pure water is treated by the exchange resin in the resin bed 6. As the water pressure in the resin bed 6 increases, the treated pure water returns to the cleaning tank 1 through the drain pipe 13, so that the pure water can be circulated and the waste of pure water is reduced.

[0035] Two symmetrically arranged inclined plates 12 are rotatably connected between the inner walls of the two sides of the inner box 11. Two top plates 15 that cooperate with the inclined plates 12 are fixedly connected to the bottom inner wall of the inner box 11. Electric push rods 4 are fixedly connected to both sides of the cleaning pool 1. The output ends of the electric push rods 4 are fixed to the lifting plate 2. When placing the workpiece, the inner box 11 moves upward and leaves the water surface. After that, the inclined plates 12 at the bottom of the inner box 11 disengage from the top plates 15, and the inclined plates 12 rotate under their own weight. The tops of the two inclined plates 12 approach each other, thus forming a closed space, reducing the contact between pure water and air, and preventing pure water from reacting with air.

[0036] Example 2

[0037] Reference Figures 1-6 Based on Embodiment 1, the present invention provides a new technical solution:

[0038] In this invention, the bottom of each inclined plate 12 is fixedly connected with a through drain pipe 13, and the top of each drain pipe 13 is hinged with a floating cover 14 for sealing the top of the drain pipe 13. The pure water stored in the inclined plate 12 flows downward through the drain pipe 13. After the liquid level drops, the floating cover 14 falls and closes, further preventing the pure water from reacting with the air.

[0039] In particular, two limiting posts 16 are fixedly connected to the inner walls on both sides of the inner box 11 for limiting the inclined plate 12. The limiting posts 16 play the role of limiting the inclined plate 12 and restricting its angle.

[0040] It should be noted that an inclined filter plate 27 is fixedly connected to the inner circumference of the resin bed 6, and the filter plate 27 blocks the resin.

[0041] In this invention, a connecting pipe 28 is fixedly connected to the bottom of the filter plate 27, and a discharge pipe 8 is fixedly connected to the bottom of the connecting pipe 28. The discharge pipe 8 passes through the resin bed 6. A threaded head 29 is threaded to one end of the discharge pipe 8. A rotating shaft 30 is fixedly connected to one side of the threaded head 29. A spiral blade 31 for discharging is fixedly connected to the circumference of the rotating shaft 30. The spiral blade 31 is located inside the discharge pipe 8. By rotating the threaded head 29, the spiral blade 31 is driven to rotate, thereby discharging the exchange resin in the resin bed 6, which facilitates resin replacement.

[0042] In particular, the discharge pipe 8 is in contact with the bottom inner wall of the resin bed 6. Two guide plates 32 are fixedly connected between the bottom inner wall of the resin bed 6 and the bottom of the filter plate 27. The discharge pipe 8 is located between the two guide plates 32. After the resin particles with smaller size pass through the filter plate 27, they can be guided by the guide plates 32 and enter the discharge pipe 8, thereby improving the discharge effect.

[0043] It should be noted that a filter box 33 is fixedly connected to the bottom of the distribution pipe 17. The filter box 33 is located below the filter plate 27, and the filter box 33 prevents the water outlet from being blocked.

[0044] In this invention, a treatment box 9 is provided on one side of the resin bed 6. The treatment box 9 contains a sodium hydroxide solution. An air pump 10 is fixedly installed on the top of the treatment box 9. The air pump 10 is fixedly connected to an air extraction pipe 21 at its extraction end. Two second branch pipes 22 are fixedly connected to the circumference of the air extraction pipe 21. The two second branch pipes 22 are respectively connected to the resin bed 6 and the inner box 11. An exhaust pipe 18 is fixedly connected to the air outlet end of the air pump 10. The exhaust pipe 18 passes through the treatment box 9 and is located inside the treatment box 9. An exhaust pipe 19 is fixedly connected to the top of the treatment box 9. Two first branch pipes 20 are fixedly connected to the circumference of the exhaust pipe 19. The first branch pipes 20 are respectively connected to the resin bed 6 and the inner box 11. When the air pump 10 is started, the air pump 10 draws air from the inner box 11 and then discharges it into the treatment box 9. The air then reacts with the sodium hydroxide solution in the treatment box 9 to remove carbon dioxide from the air and is discharged back into the inner box 11 to reduce the reaction between carbon dioxide in the air and pure water.

[0045] In particular, control valves are installed around the circumference of both the first branch pipe 20 and the second branch pipe 22, which facilitates the replacement of the passage.

[0046] It should be noted that both the first branch pipe 20 and the second branch pipe 22 are flexible hoses, which facilitate movement.

[0047] Working Principle: In use, the cleaning tank 1 is filled with pure water. When a workpiece needs to be placed, the electric push rod 4 is activated. The electric push rod 4 drives the inner tank 11 upwards via the lifting plate 2. When the inner tank 11 is removed from the water surface, its bottom inclined plate 12 disengages from the top plate 15, causing the inclined plate 12 to rotate under its own weight. The tops of the two inclined plates 12 approach each other, forming a closed space, reducing the contact between pure water and air, and preventing a reaction between the pure water and air. The pure water remaining in the inclined plate 12 flows downwards through the drain pipe 13. After the liquid level drops, the float cover 14 falls and closes, further preventing a reaction between the pure water and air. After the workpiece is placed, the cover plate 3 is closed, and then the air pump 10 is activated. The air pump 10 extracts the air from the inner tank 11 and discharges it into the treatment tank 9, where it reacts with the sodium hydroxide solution to remove carbon dioxide from the air. The air is then discharged back into the inner tank 11. After the gas treatment is completed, the inner chamber 11 is moved downwards. During the downward movement of the inner chamber 11, the inclined plate 12 is opened by the top plate 15, allowing pure water to enter the inner chamber 11 for immersion and cleaning of the workpiece. At the same time, the circulation pump 5 is started, which draws pure water from the cleaning tank 1 and sends it into the resin bed 6 through the distribution pipe 17. The pure water is treated by the exchange resin in the resin bed 6. As the water pressure in the resin bed 6 increases, the treated pure water returns to the cleaning tank 1 through the drain pipe 13, thus circulating the pure water and reducing waste. When the exchange resin needs to be replaced, the water in the resin bed 6 is drained, and then the threaded head 29 is rotated to disengage it from the drain pipe 8. The threaded head 29 then drives the spiral blade 31 to rotate, thereby discharging the exchange resin in the resin bed 6 for easy use.

[0048] However, as is well known to those skilled in the art, the working principles and wiring methods of the electric actuator 4, the circulation pump 5, and the air pump 10 are commonplace and are all conventional methods or common knowledge. They will not be described in detail here. Those skilled in the art can make any selections according to their needs or convenience.

[0049] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. An ultrapure water treatment system for a cleaning terminal, comprising a cleaning tank (1) and a resin bed (6) disposed on one side of the cleaning tank (1), characterized in that, A circulation pump (5) is provided between the cleaning tank (1) and the resin bed (6). The pumping end of the circulation pump (5) is fixedly connected to the cleaning tank (1), and the outlet end of the circulation pump (5) is fixedly connected to the inlet pipe (24). The top of the resin bed (6) is threadedly connected to a connecting sleeve (7). A first connecting pipe (25) and a second connecting pipe (26) are fixedly passed through the inner circumference of the connecting sleeve (7). The first connecting pipe (25) is fixedly connected to the inlet pipe (24), and one end of the second connecting pipe (26) is fixedly connected to the outlet pipe (23). The top of the cleaning tank (1) is provided with a lifting plate (2), and the bottom of the lifting plate (2) is fixedly connected to an inner box (11). Both sides of the lifting plate (2) are hinged with cover plates (3) for sealing the top of the inner box (11). The water outlet pipe (23) passes through the lifting plate (2) and communicates with the inner box (11). The resin bed (6) is provided with a distribution pipe (17), and the first connecting pipe (25) is inserted into the distribution pipe (17). Two symmetrically arranged inclined plates (12) are rotatably connected between the inner walls of the two sides of the inner box (11). Two top plates (15) that cooperate with the inclined plates (12) are fixedly connected to the bottom inner wall of the cleaning pool (1). Electric push rods (4) are fixedly connected to both sides of the cleaning pool (1). The output ends of the electric push rods (4) are fixed to the lifting plate (2). The bottom of each inclined plate (12) is fixedly connected to a through drain pipe (13), and the top of each drain pipe (13) is hinged to a floating cover (14) for sealing the top of the drain pipe (13). A treatment box (9) is provided on one side of the resin bed (6). Sodium hydroxide solution is provided inside the treatment box (9). An air pump (10) is fixedly installed on the top of the treatment box (9). An air extraction pipe (21) is fixedly connected to the air extraction end of the air pump (10). Two second branch pipes (22) are fixedly connected to the circumference of the air extraction pipe (21). The two second branch pipes (22) are respectively connected to the resin bed (6) and the inner box (11). An exhaust pipe (18) is fixedly connected to the air outlet end of the air pump (10). The exhaust pipe (18) passes through the treatment box (9) and is located inside the treatment box (9). An exhaust pipe (19) is fixedly connected to the top of the treatment box (9). Two first branch pipes (20) are fixedly connected to the circumference of the exhaust pipe (19). The first branch pipes (20) are respectively connected to the resin bed (6) and the inner box (11). When placing the workpiece, the inner box (11) moves upward and leaves the water surface. The inclined plate (12) at the bottom of the inner box (11) then separates from the top plate (15), causing the inclined plate (12) to rotate under its own weight. The tops of the two inclined plates (12) move closer to each other, thus forming a closed space and reducing the contact between pure water and air. After the workpiece is placed, the inner box (11) moves downward and the top plate (15) pushes open the inclined plate (12), allowing pure water to enter the inner box (11) and thus soak and clean the workpiece.

2. The ultrapure water treatment system for a cleaning terminal according to claim 1, characterized in that, The inner walls on both sides of the inner box (11) are fixedly connected to two limiting posts (16) for limiting the inclined plate (12).

3. The ultrapure water treatment system for a cleaning terminal according to claim 1, characterized in that, An inclined filter plate (27) is fixedly connected to the inner circumference of the resin bed (6).

4. The ultrapure water treatment system for a cleaning terminal according to claim 3, characterized in that, The bottom of the filter plate (27) is fixedly connected to a connecting pipe (28), and the bottom of the connecting pipe (28) is fixedly connected to a discharge pipe (8). The discharge pipe (8) passes through the resin bed (6). One end of the discharge pipe (8) is threadedly connected to a threaded head (29). A rotating shaft (30) is fixedly connected to one side of the threaded head (29). A spiral blade (31) for discharging is fixedly connected to the circumference of the rotating shaft (30). The spiral blade (31) is located inside the discharge pipe (8).

5. The ultrapure water treatment system for a cleaning terminal according to claim 4, characterized in that, The discharge pipe (8) is in contact with the bottom inner wall of the resin bed (6), and two guide plates (32) are fixedly connected between the bottom inner wall of the resin bed (6) and the bottom of the filter plate (27), and the discharge pipe (8) is located between the two guide plates (32).

6. The ultrapure water treatment system for a cleaning terminal according to claim 5, characterized in that, A filter box (33) is fixedly connected to the bottom of the distribution pipe (17), and the filter box (33) is located below the filter plate (27).

7. The ultrapure water treatment system for a cleaning terminal according to claim 6, characterized in that, Control valves are installed around the circumference of both the first branch pipe (20) and the second branch pipe (22).

8. The ultrapure water treatment system for a cleaning terminal according to claim 7, characterized in that, Both the first branch pipe (20) and the second branch pipe (22) are flexible hoses.

Images