Universal pressure device and sintering equipment using the same

Abstract

The present invention provides a universal pressure device and a sintering device using the same, wherein the pressure device comprises a mounting seat, a piston, a pressure head and a positioning pin. A first plug-in structure is provided on the mounting seat, and piston holes and positioning holes are alternately provided at each column of the first plug-in structure. The piston is movably arranged in the corresponding piston hole. The second plug-in structure on the pressure head matches the first plug-in structure; the two sides of the pressure head are positioned by positioning pins respectively. The present invention adopts a new pressure head layout mode, and each pressure head can correspond to one or more pistons, which can realize a wide range of flexible adjustment of the pressure area and the pressure value, improve the versatility of the device, and can realize both single-piece production of different products and small-batch production. The pressure head can be quickly replaced without removing the mounting seat, thereby improving the convenience of operation and production efficiency. At the same time, the pressure head can achieve symmetrical distribution and balanced pressure, which can improve product quality and extend the service life of the device and equipment.

Description

Technical Field

[0001] The present invention relates to the technical field of pressure devices, and in particular to a universal pressure device and sintering equipment using the same. Background Art

[0002] In the fields of sintering, plastic sealing, stamping, welding, etc., the pressure applying device is an indispensable and important equipment. The function of the pressure applying device is to apply pressure to the workpiece to achieve functions such as material molding, device connection, sealing test, heat treatment, etc.

[0003] Generally, the pressure value and pressure area of ​​the pressure applying device are fixed, or can only be changed within a very small range. Therefore, it cannot be applied to various application scenarios with different pressure value and pressure area requirements. In addition, in the current multi-pressure applying device, the multiple pressure heads are generally of the same model, and the flexible layout of pressure heads of different models cannot be achieved.

[0004] For example, in the field of semiconductor sintering, a sintering mold is a mold that connects semiconductor devices together by applying a certain temperature and pressure to the sintering interface. It is generally used for nano silver or copper sintering. Since the connection interface of the product after hot pressing sintering has high mechanical strength, high melting point, good thermal conductivity and electrical conductivity, it is favored by high-end semiconductor products, especially third-generation semiconductor connections. The accuracy, balance and reproducibility of pressure during the sintering process are the most important factors affecting the sintering quality.

[0005] In actual production, from the sintering of single chips to the sintering of power modules, the sintering area is 25mm 2 Up to 7500mm 2 The sintering pressure is between 8 MPa and 30 MPa, and the span of sintering area and sintering pressure (area * pressure) is very large. Commonly used sintering molds are mainly mass production sintering molds and general sintering molds. Mass production sintering molds are sintering molds customized according to specific models of products. Although they have high production efficiency, they have poor flexibility in use. Once the product structure is slightly adjusted, the mold may become unusable. General sintering molds generally have one or several sintering pressure heads, but they can only be sintered for one or a few products, and cannot achieve mass production of different products. In addition, when the pressure head is only installed in a certain area for pressure sintering, the pressure in other areas will act on the mold itself, resulting in asymmetric distribution of mold pressure, which will cause uneven pressure on the mold surface under huge sintering pressure. Long-term deformation of the mold surface will cause uneven sintering pressure, which will not only affect the sintering quality, but also shorten the service life of the mold. Summary of the invention

[0006] One of the purposes of the present invention is to solve the shortcomings existing in the prior art and propose a universal pressurizing device to achieve flexible changes in the pressure area and the pressure value, meet the application requirements of different scenarios, and improve versatility; at the same time, it can have the layout flexibility of multiple pressure heads to make the pressure distribution balanced and extend the service life of the device.

[0007] The second object of the present invention is to provide a sintering device, which uses the universal pressure device as described above, adopts a new pressure head layout method, improves the versatility of the sintering mold, covers almost all sintering needs, and can realize both single-piece production of different products and small-batch production. The pressure head can be quickly replaced without disassembling the mold, improving the convenience of operation and production efficiency. At the same time, the pressure head can be symmetrically distributed and the pressure is balanced, which can improve product quality and extend the service life of the sintering mold.

[0008] To achieve the above object, the present invention adopts the following technical solutions:

[0009] According to a first aspect of the present invention, a universal pressurizing device is provided, comprising a mounting seat, a pressure head, a positioning pin and a piston.

[0010] The mounting seat is provided with a plurality of rows of first plug-in structures, each row of the first plug-in structures extends along a first direction, and the plurality of rows of first plug-in structures are arranged at intervals in a second direction, and the second direction is perpendicular to the first direction.

[0011] A plurality of piston holes and a plurality of positioning holes are provided at each row of the first insertion structures, and the plurality of piston holes and the plurality of positioning holes are staggeredly arranged in the first direction.

[0012] The piston is disposed in the corresponding piston hole so as to be movable along a third direction, and the third direction is perpendicular to the first direction and the second direction.

[0013] The pressure head is provided with a second insertion structure matching the structure of the first insertion structure, and the second insertion structure is inserted into the corresponding first insertion structure; the two sides of the first direction of the pressure head are positioned by the positioning pins respectively, and the positioning pins are assembled in the corresponding positioning holes; the pressure head corresponds to at least one piston, and the piston is used to drive the pressure head to move along the third direction.

[0014] Preferably, the first plug-in structure and the second plug-in structure are mutually matched groove and convex block structures or convex block and groove structures. In other words, one of the first plug-in structure and the second plug-in structure is a groove structure, and the other is a convex block structure mutually matched with the groove structure.

[0015] Preferably, the first plug-in structure is a stepped groove structure, and the second plug-in structure is a stepped block structure matching the stepped groove structure; or, the first plug-in structure is a stepped block structure, and the second plug-in structure is a stepped groove structure matching the stepped block structure.

[0016] Preferably, a second plug-in structure is provided on the pressure head, and the second plug-in structure extends along the first direction; or, at least two second plug-in structures are provided on the pressure head, each second plug-in structure extends along the first direction, and at least two second plug-in structures are arranged at intervals in the second direction.

[0017] Preferably, an air pipe interface is provided on the mounting seat, a gas channel is provided inside the mounting seat, and the air pipe interface is communicated with the gas channel, and the gas channel is respectively communicated with a plurality of piston holes in each column.

[0018] Preferably, the mounting seat includes a first seat plate and a second seat plate which are arranged in sequence in the third direction, and the first plug-in structure is arranged on a side of the second seat plate away from the first seat plate; the piston hole passes from the first seat plate to the second seat plate and passes through to the first plug-in structure; the positioning hole is arranged on the second seat plate; a avoidance groove is provided on a side of the first seat plate close to the second seat plate, and the avoidance groove corresponds to the positioning hole.

[0019] Preferably, the positioning pin includes a pin head and a pin column portion which are sequentially arranged along its axial direction, a plunger hole is radially arranged inside the pin head, and a spring plunger is arranged in the plunger hole; a clamping groove is arranged on the hole wall of the positioning hole; after the positioning pin is assembled to the corresponding positioning hole, the end of the spring plunger enters the corresponding clamping groove.

[0020] Preferably, a chamfered surface is provided on a side of the positioning hole facing the first seat plate, and the mounting groove extends along the third direction to the chamfered surface.

[0021] Preferably, the pin head is an axially symmetrically arranged special-shaped structure; there are two spring plungers, and the two spring plungers are symmetrically arranged on the pin head; the inner wall of the positioning hole on the side away from the first seat plate is provided with a limit step, and there are two limit steps, and the two limit steps are symmetrically arranged in the first direction, and an assembly channel matching the structure of the pin head is formed between the two limit steps.

[0022] According to a second aspect of the present invention, a sintering device is provided, the sintering device comprising a carrier seat and the universal pressurizing device as described above, the carrier seat and the mounting seat in the universal pressurizing device are arranged relative to each other in a third direction, the carrier seat is detachably provided with a carrier, and the carrier corresponds to the pressure head on the mounting seat. Preferably, the third direction corresponds to the pressure application direction of the pressure head.

[0023] Compared with the prior art, the present invention has the following beneficial effects:

[0024] The universal pressure device of the present invention adopts a new pressure head layout mode. Each pressure head can correspond to one or more pistons, which can realize flexible adjustment of the pressure area and pressure value in a wide range, and improve the versatility of the pressure device; it can realize both single-piece production of different products and small-batch production. The pressure head can be quickly replaced without removing the mounting seat, which improves the convenience of operation and production efficiency. At the same time, the pressure head can be symmetrically distributed, the pressure is balanced, and the service life of the device can be extended.

[0025] The universal pressure device is applied in the sintering equipment of the present invention, and a new pressure head layout method is adopted. Each pressure head can correspond to one or more pistons, which can realize a wide range of flexible adjustment of the sintering area and the sintering pressure, improve the versatility of the sintering equipment, cover almost all sintering needs, and can realize both single-piece production of different products and small-batch production. The pressure head can be quickly replaced without removing the mounting seat, which improves the convenience of operation and production efficiency. At the same time, the pressure head can be symmetrically distributed and the pressure is balanced, which can improve the sintering quality and extend the service life of the sintering equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a structural schematic diagram of the universal pressurizing device of the present invention.

[0027] Figure 2 It is a schematic diagram of the disassembled structure of the universal pressurizing device of the present invention.

[0028] Figure 3 It is a structural schematic diagram of the first seat plate in the present invention.

[0029] Figure 4 It is a structural schematic diagram of the second seat plate in the present invention.

[0030] Figure 5 It is a schematic diagram of the structure of the positioning pin in the present invention.

[0031] Figure 6 It is a cross-sectional view of the positioning pin in the present invention.

[0032] Figure 7 It is a structural schematic diagram of the locating pin assembly process in the present invention.

[0033] Figure 8 It is a schematic diagram of the structure after the positioning pin is assembled to the positioning hole in the present invention.

[0034] Fig. 9 It is a cross-sectional view of the universal pressurizing device of the present invention.

[0035] Fig.10 It is a cross-sectional view of the universal pressurizing device of the present invention at another cross-sectional plane.

[0036] Fig.11 It is a cross-sectional view of another universal pressurizing device of the present invention.

[0037] Fig.12 It is a cross-sectional view of another universal pressurizing device of the present invention at another cutting plane.

[0038] Fig.13 The figure is a schematic diagram of the structure of a pressing block in the present invention.

[0039] Fig.14 It is a schematic structural diagram of another type of pressing block in the present invention.

[0040] Fig.15 It is a schematic structural diagram of another universal pressurizing device of the present invention.

[0041] Fig.16 It is a schematic structural diagram of another universal pressurizing device of the present invention.

[0042] Fig.17 The figure is a schematic structural diagram of another universal pressurizing device of the present invention.

[0043] Fig.18 It is a schematic structural diagram of the sintering equipment of the present invention.

[0044] In the figure, 10-mounting seat, 11-first plug-in structure, 12-piston hole, 13-positioning hole, 131-clamping groove, 132-chamfered surface, 133-limiting step, 134-assembly channel, 14-trachea interface, 15-gas channel, 16-first seat plate, 161-avoidance groove, 17-second seat plate, 18-first limiting member, 20-pressure head, 21-second plug-in structure, 22-pressure applying part, 30-positioning pin, 31-pin head, 311-plunger hole, 32-pin column part, 33-spring plunger, 40-piston, 50-carrier seat, 51-carrier, 52-second limiting member. DETAILED DESCRIPTION

[0045] In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the embodiment of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the embodiment of the present invention. Obviously, the described embodiment is a part of the embodiment of the present invention, not all of the embodiments. Based on the described embodiment of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work belong to the scope of protection of the present invention. It can be understood that some technical means of the various embodiments described herein can be replaced or combined with each other without conflict.

[0046] In the description of the present invention, if there are terms such as "first", "second", etc., they are only used to distinguish the objects described, and do not have any order or technical meaning. Therefore, the objects defined as "first", "second", etc. may explicitly or implicitly include one or more of the objects. In addition, "one" or "a" and similar words do not indicate a quantity limitation, but indicate the existence of at least one, and "multiple" means not less than two.

[0047] In the description of the present specification, reference to "one embodiment" or "some embodiments" etc. means that one or more embodiments of the present invention include a specific feature, structure or characteristic described in conjunction with the embodiment. Therefore, the phrases "in one embodiment", "in some embodiments", "in some other embodiments", "in some other embodiments", etc. appearing in different places in this specification do not necessarily refer to the same embodiment, but mean "one or more but not all embodiments", unless otherwise specifically emphasized in other ways.

[0048] According to a first aspect of the present invention, a universal pressurizing device is provided, which can be applied to various fields such as sintering, plastic sealing, stamping, welding, etc., and can achieve flexible adjustment of the pressure area and pressure value over a wide range, thereby improving versatility.

[0049] Please refer to Figure 1 In some embodiments, the universal pressurizing device includes a mounting seat 10 , a pressure head 20 , a positioning pin 30 and a piston 40 .

[0050] Reference Figure 2 A plurality of rows of first plug-in structures 11 are provided on the mounting seat 10 , each row of the first plug-in structures 11 extends along the first direction X, and the plurality of rows of first plug-in structures 11 are arranged at intervals in the second direction Y, and the second direction Y is perpendicular to the first direction X.

[0051] A plurality of piston holes 12 and a plurality of positioning holes 13 are disposed at each row of the first insertion structures 11 , and the plurality of piston holes 12 and the plurality of positioning holes 13 are alternately disposed in the first direction X.

[0052] The piston 40 is movably disposed in the corresponding piston hole 12 along a third direction Z, which is perpendicular to the first direction X and the second direction Y. Further, the structure of the piston hole 12 matches that of the piston 40 to ensure that the piston 40 can slide in the corresponding piston hole 12 in a sealed manner.

[0053] Combination Figure 1 and Figure 2 The pressure head 20 is provided with a second insertion structure 21 matching the structure of the first insertion structure 11, and the second insertion structure 21 is inserted into the corresponding first insertion structure 11. The two sides of the pressure head 20 in the first direction X are positioned by positioning pins 30 respectively, and the positioning pins 30 are assembled in the corresponding positioning holes 13. The pressure head 20 corresponds to at least one piston 40, and the piston 40 is used to drive the pressure head 20 to move along the third direction Z.

[0054] It should be noted that in the universal pressurizing device, the third direction Z corresponds to the direction of pressure application, and the pressure application direction can be set to be in the vertical direction or the horizontal direction. In actual applications, most devices apply pressure in the vertical direction. Therefore, in a preferred embodiment of the present invention, the third direction Z corresponds to the vertical direction, and the first direction X and the second direction Y are parallel to the horizontal plane. Of course, the present invention is not limited to this. In other embodiments, the direction of the pressurizing device can be adjusted according to the actual application scenario.

[0055] In addition, the outermost holes at both ends of each column of the first plug-in structure 11 are both positioning holes 13. In this way, when the pressure head 20 is installed at the two end parts of the first plug-in structure 11, the positioning pin 30 can still be used to position the pressure head 20. At the same time, since a plurality of piston holes 12 are provided at each column of the first plug-in structure 11, and the first plug-in structure 11 has multiple columns, the pistons 40 in the mounting seat 10 are arranged in a matrix or in a row. In application, the pressure value of each piston 40 can be controlled within a certain range, and the size and number of the pressure head 20 can be designed according to the pressurization requirements of different products. Each pressure head 20 can correspond to one piston 40 or multiple pistons 40, so that the pressure area and pressure value can be adjusted steplessly within a larger range. At the same time, for application scenarios using multiple pressure heads, multiple pressure heads 20 can be symmetrically arranged or balanced on the mounting seat 10, so that the pressure is balanced, thereby extending the service life of the device.

[0056] During the assembly process of the above-mentioned universal pressurizing device, a plurality of pistons 40 are first installed in the corresponding piston holes 12 in sequence, and then the second insertion structure 21 of the pressure head 20 is inserted into the corresponding first insertion structure 11 along the first direction X, and the position of the pressure head 20 is adjusted. Thereafter, the positioning pins 30 are assembled in the positioning holes 13 on both sides of the first direction X of the pressure head 20, and the positioning pins 30 on both sides are used to limit the movement of the pressure head 20 along the first direction X. Alternatively, after the piston 40 is installed, the installation position of the pressure head 20 is first determined, and the positioning pins 30 are assembled in the positioning holes 13 on one side of the first direction X of the installation position, and then the second insertion structure 21 of the pressure head 20 is inserted into the corresponding first insertion structure 11 along the first direction X, so that the pressure head 20 reaches the installation position, and then the positioning pins 30 are assembled in the positioning holes 13 on the other side of the pressure head 20, and the positioning pins 30 on both sides are used to limit the movement of the pressure head 20 along the first direction X. During the operation of the universal pressurizing device, the pressure of the piston 40 is transmitted to the corresponding pressure head 20, and the product can be pressurized by the pressure head 20. When the pressure head 20 needs to be replaced, it is only necessary to remove the positioning pins 30 on both sides of the pressure head 20 and then pull the pressure head 20 out of the corresponding first plug-in structure 11. The operation is simple and quick, and can be completed without disassembling the mounting seat 10.

[0057] The universal pressure device of the present invention adopts a new pressure head layout mode. Each pressure head 20 can correspond to one or more pistons 40, which can realize flexible adjustment of the pressure area and pressure value in a wide range, and improve the versatility of the pressure device; it can realize both single-piece production of different products and small-batch production. The pressure head 20 can be quickly replaced without removing the mounting seat 10, which improves the convenience of operation and production efficiency. At the same time, the pressure head 20 can be symmetrically distributed, the pressure is balanced, and the service life of the device can be extended.

[0058] It should be noted that the specific shapes of the first plug-in structure 11 and the second plug-in structure 21 can be reasonably set according to actual conditions, so as to realize the plug-in cooperation between the pressure head 20 and the mounting seat 10 and enable the mounting seat 10 to limit the pressure head 20 in the second direction Y and the third direction Z. For example, the first plug-in structure 11 and the second plug-in structure 21 can be designed as a groove and a protrusion structure or a protrusion and a groove structure that cooperate with each other. In other words, one of the first plug-in structure 11 and the second plug-in structure 21 is a groove structure, and the other is a protrusion structure that cooperates with the groove structure. In addition, the specific shape of the groove or the protrusion can also be reasonably set according to actual conditions.

[0059] Reference Fig. 9 and Fig.10In some embodiments, the first insertion structure 11 is a stepped groove structure that is wide at the top and narrow at the bottom, and the second insertion structure 21 is a stepped block structure that is wide at the top and narrow at the bottom and matches the stepped groove structure. When the ram 20 is inserted into the mounting seat 10, the stepped block structure enters the corresponding stepped groove structure, so that the movement of the ram 20 in the second direction Y and the third direction Z is restricted.

[0060] Reference Fig.11 and Fig.12 In other embodiments, the first insertion structure 11 is a stepped block structure that is narrow at the top and wide at the bottom, and the second insertion structure 21 is a stepped groove structure that is narrow at the top and wide at the bottom and matches the stepped block structure. When the ram 20 is inserted into the mounting seat 10, the stepped block structure enters the corresponding stepped groove structure, so that the movement of the ram 20 in the second direction Y and the third direction Z is restricted.

[0061] It should be noted that the number, extension length and arrangement of the second plug-in structures 21 on each pressure head 20 can be reasonably set according to actual conditions. Fig.13 In some embodiments, the size of the pressure head 20 is relatively small, and a second plug-in structure 21 is provided on the pressure head 20. The side away from the second plug-in structure 21 is a pressure-applying portion 22. The second plug-in structure 21 extends along the first direction X, and the extension length of the second plug-in structure 21 enables the pressure head 20 to correspond to a piston. In other embodiments, at least two second plug-in structures 21 may be provided on the pressure head 20, each of which extends along the first direction X, and at least two second plug-in structures 21 are arranged at intervals in the second direction Y. Fig.14 As shown, in other embodiments, three second plug-in structures 21 are provided on the pressure head 20, each of which extends along the first direction X, and the three second plug-in structures 21 are arranged at intervals in the second direction Y, and the side away from the second plug-in structure 21 is the pressure applying portion 22. The extension length of each second plug-in structure 21 enables it to correspond to three pistons, so that the pressure head can correspond to nine pistons.

[0062] Furthermore, the number, size and arrangement of the pressure heads 20 can be reasonably set according to the application scenario. Preferably, in the application scenario using multiple pressure heads 20, the multiple pressure heads 20 are symmetrically arranged on the mounting base 10 to ensure pressure balance, thereby extending the service life of the device and improving product quality. Figure 1 In some embodiments, three pressure heads 20 are symmetrically arranged on the mounting seat 10. The two sides of each pressure head 20 are positioned by positioning pins 30. Each pressure head 20 can correspond to 9 pistons, and the pressure on each pressure head 20 is kept consistent. Figure 5 In other embodiments, a small pressure head 20 is provided at the center of the mounting seat 10, and the pressure head 20 may correspond to a piston, which can meet the pressure requirements of a small area. Fig.16 In other embodiments, nine pressure heads 20 are provided on the mounting seat 10, and the two sides of each pressure head 20 are positioned by positioning pins 30. The nine pressure heads 20 are arranged symmetrically in three rows and three columns. Each pressure head 20 can correspond to 9 pistons, and the pressure on each pressure head 20 remains consistent, which can meet the needs of large-area pressurization or small-batch production. Fig.17 In some other embodiments, a plurality of pressure heads 20 are evenly arranged on the mounting seat 10, which can meet the need for pressurization over a large area or realize mass production of products.

[0063] Combination Figure 1 , Fig. 9 and Fig.10 In some embodiments, a trachea interface 14 is provided on the mounting base 10, a gas channel 15 is provided inside the mounting base 10, and the trachea interface 14 is connected to the gas channel 15, and the gas channel 15 is respectively connected to the multiple piston holes 12 in each column. In application, the trachea interface 14 can be used to pass high-pressure gas into the gas channel 15, so that the high-pressure gas acts on each piston 40, and then the pressure of the piston 40 is applied to the corresponding pressure head 20. The pressure of the high-pressure gas can be adjusted as needed, so as to adjust the pressure on each piston 40, and then adjust the pressure of the pressure head 20, thereby improving the versatility and adjustment flexibility of the pressurizing device.

[0064] Combination Figure 2 , Figure 3 and Figure 4 In some embodiments, the mounting seat 10 includes a first seat plate 16 and a second seat plate 17 sequentially arranged in the third direction Z, and the first seat plate 16 and the second seat plate 17 can be detachably connected by bolts and other parts. The first plug-in structure 11 is arranged on the side of the second seat plate 17 away from the first seat plate 16. The piston hole 12 passes from the first seat plate 16 to the second seat plate 17 and penetrates to the first plug-in structure 11. The positioning hole 13 is arranged on the second seat plate 17; the side of the first seat plate 16 close to the second seat plate 17 is provided with a avoidance groove 161, and the avoidance groove 161 corresponds to the positioning hole 13.

[0065] Reference Figure 5 and Figure 6 The positioning pin 30 includes a pin head 31 and a pin column 32 arranged in sequence along its axial direction. A plunger hole 311 is radially arranged inside the pin head 31, and a spring plunger 33 is arranged inside the plunger hole 311. The spring plunger 33, also called a ball plunger or a positioning bead / positioning column, can adopt related products in the prior art. Its working principle is to adjust the preload force by installing a spring inside the screw thread and controlling the screw-in depth.

[0066] Reference Figure 4A card slot 131 is provided on the hole wall of the positioning hole 13; after the positioning pin 30 is assembled to the corresponding positioning hole 13, the end of the spring plunger 33 enters the corresponding card slot 131, thereby fixing the positioning pin.

[0067] Furthermore, a chamfered surface 132 is provided on one side of the positioning hole 13 facing the first seat plate 16 , and the clamping groove 131 extends along the third direction Z to the chamfered surface 132 .

[0068] During the assembly of the positioning pin 30, the pin head 31 is inserted into the positioning hole 13, and the position of the pin head 31 is adjusted so that the spring plunger 33 is inserted into the card slot 131. The pin column 32 can position the pressure head. During the disassembly of the positioning pin 30, the positioning pin 30 is moved along the third direction Z toward the first seat plate 16 so that the spring plunger 33 moves out of the card slot 131. At the same time, the avoidance slot 161 can play a role of avoidance; then, the positioning pin 30 is rotated so that the spring plunger 33 does not correspond to the upper and lower parts, and then the positioning pin 30 is pulled downward, and the chamfered surface 132 can be used to retract the spring plunger 33, so that the positioning pin 30 can be removed from the positioning hole 13.

[0069] Reference Figure 5 and Figure 6 In some preferred embodiments, the pin head 31 is an axle-symmetrically arranged special-shaped structure. Specifically, the pin head 31 has two parallel surfaces and two arcuate surfaces arranged opposite to each other, and each arcuate surface protrudes outward along the radial direction of the positioning pin 30. There are two spring plungers 33, and the two spring plungers 33 are symmetrically arranged on the pin head 31.

[0070] Correspondingly, refer to Figure 4 A limiting step 133 is provided on the inner wall of the positioning hole 13 on the side away from the first seat plate. There are two limiting steps 133, and the two limiting steps 133 are symmetrically arranged in the first direction X. The two opposite side surfaces of the two limiting steps are perpendicular to the first direction X, and an assembly channel 134 matching the structure of the pin head 31 is formed between the two limiting steps 133.

[0071] Reference Figure 7 and Figure 8 During assembly, first align the pin head 31 with the assembly channel 134, insert the pin head 31 upward into the positioning hole 13, and when the pin head 31 passes over the limiting step 133 (corresponding to Figure 7 After the positioning pin 30 is rotated 90 degrees, the spring plungers 33 on both sides enter the corresponding card slots 131 (corresponding to Figure 8The positioning pin 30 is in the state shown in the figure) to prevent the positioning pin 30 from rotating. At the same time, the positioning pin 30 is limited in the third direction Z by the limiting step 133, thereby improving the assembly accuracy and stability of the positioning pin. During the disassembly process of the positioning pin 30, the positioning pin 30 is moved along the third direction Z toward the first seat plate 16, so that the spring plunger 33 moves out of the clamping groove 131. At the same time, the avoiding groove 161 can play a avoiding role; then, the positioning pin 30 is rotated 90 degrees, so that the pin head 31 corresponds to the assembly channel 134 up and down, and then the positioning pin 30 is pulled downward, and the chamfered surface 132 can be used to retract the spring plunger 33, so that the positioning pin 30 is removed from the positioning hole 13.

[0072] In the above-mentioned universal pressurizing device, the pressure head 20 is inserted in an insertion manner, and the assembly and disassembly process of the positioning pin 30 is simple and quick, and the pressure head 20 can be quickly replaced without disassembling the mounting seat 10, thereby improving production efficiency.

[0073] According to a second aspect of the present invention, a sintering device is provided. Fig.18 In some embodiments, the sintering equipment includes a carrier seat 50 and the universal pressurizing device as described above, the carrier seat 50 and the mounting seat 10 in the universal pressurizing device are arranged relative to each other in the third direction Z, and a carrier 51 is detachably provided on the carrier seat 50, and the carrier 51 corresponds to the pressure head 20 on the mounting seat 10. Among them, the third direction Z corresponds to the pressure application direction of the pressure head 20 in the universal pressurizing device. The universal pressurizing device can be used as an upper mold assembly of the sintering equipment, and the carrier seat 50 can be used as a lower mold assembly of the sintering equipment. The carrier 51 is used to position and install the product to be sintered. The pressure head 20 is a quick-release structure, and the carrier 51 is set to be detachable. In application, the pressure head 20 can be flexibly arranged on the mounting seat 10 and the carrier 51 can be installed on the carrier seat 50 accordingly according to different product sintering requirements.

[0074] Furthermore, first limit members 18 are respectively provided on both sides of the mounting seat 10 in the second direction Y; second limit members 52 are respectively provided on both sides of the carrier seat 50 in the second direction Y, and the structure of the second limit members 52 matches the structure of the first limit members 18. The first limit members 18 and the second limit members 52 can adopt the upper and lower mold limit structures in the prior art, for example, matching structures such as bayonet pins can be adopted. When the sintering equipment is molded, the first limit member 18 cooperates with the second limit member 52 to ensure the mold positioning accuracy.

[0075] In other embodiments, a heating device may be installed in the mounting seat 10 and the carrier seat 50 to heat and pressurize the product at the same time to achieve hot pressing sintering. The installation method of the heating device may adopt the installation method of the heating device in the existing sintering equipment, which will not be repeated here.

[0076] The above-mentioned sintering equipment can be applied to the field of semiconductor sintering to realize processes such as nanosilver sintering or copper sintering. In this sintering equipment, a new pressure head layout method is adopted. Each pressure head can correspond to one or more pistons, which can realize a wide range of flexible adjustment of the sintering area and sintering pressure, improve the versatility of the sintering equipment, cover almost all sintering needs, and can realize both single-piece production of different products and small-batch production. The pressure head can be quickly replaced without removing the mounting seat, which improves the convenience of operation and production efficiency. At the same time, the pressure head can be symmetrically distributed and the pressure is balanced, which can improve the sintering quality and extend the service life of the sintering equipment.

[0077] The present invention has been described by the above-mentioned relevant embodiments, however, the above-mentioned embodiments are only examples for implementing the present invention. It must be pointed out that the disclosed embodiments do not limit the scope of the present invention. On the contrary, changes and modifications made without departing from the spirit and scope of the present invention are all within the scope of patent protection of the present invention.

Claims

1. A universal pressurizing device, characterized in that: The universal pressurizing device comprises a mounting seat, a pressure head, a positioning pin and a piston; The mounting seat is provided with an air pipe interface; the mounting seat is provided with a plurality of rows of first plug-in structures, each row of the first plug-in structures extends along a first direction, and the plurality of rows of first plug-in structures are arranged at intervals in a second direction, and the second direction is perpendicular to the first direction; A plurality of piston holes and a plurality of positioning holes are provided at each row of the first insertion structures, and the plurality of piston holes and the plurality of positioning holes are staggered in the first direction; The piston is movably disposed in the corresponding piston hole along a third direction, wherein the third direction is perpendicular to the first direction and the second direction; The pressure head is provided with a second insertion structure matching the structure of the first insertion structure, and the second insertion structure is inserted into the corresponding first insertion structure; the first insertion structure and the second insertion structure are mutually matched groove and convex block structures or convex block and groove structures; the two sides of the pressure head in the first direction are positioned by the positioning pins respectively, and the positioning pins are assembled in the corresponding positioning holes; the pressure head corresponds to at least one piston, and the piston is used to drive the pressure head to move along the third direction; The mounting seat includes a first seat plate and a second seat plate arranged in sequence in the third direction, the first plug-in structure is arranged on a side of the second seat plate away from the first seat plate; the piston hole passes from the first seat plate to the second seat plate and penetrates to the first plug-in structure; the positioning hole is arranged on the second seat plate; a avoidance groove is arranged on a side of the first seat plate close to the second seat plate, and the avoidance groove corresponds to the positioning hole.

2. The universal pressurizing device according to claim 1, characterized in that: The first plug-in structure is a stepped groove structure, and the second plug-in structure is a stepped block structure matching the stepped groove structure; or, the first plug-in structure is a stepped block structure, and the second plug-in structure is a stepped groove structure matching the stepped block structure.

3. The universal pressurizing device according to claim 1, characterized in that: The pressure head is provided with a second plug-in structure, and the second plug-in structure extends along the first direction; or, the pressure head is provided with at least two second plug-in structures, each second plug-in structure extends along the first direction, and at least two second plug-in structures are arranged at intervals in the second direction.

4. The universal pressurizing device according to claim 1, characterized in that: A gas channel is provided inside the mounting seat, and the gas pipe interface is communicated with the gas channel, and the gas channel is respectively communicated with a plurality of piston holes in each row.

5. The universal pressurizing device according to claim 1, characterized in that: The positioning pin includes a pin head and a pin column portion which are sequentially arranged along its axial direction, a plunger hole is radially arranged inside the pin head, and a spring plunger is arranged in the plunger hole; a clamping groove is arranged on the hole wall of the positioning hole; after the positioning pin is assembled to the corresponding positioning hole, the end of the spring plunger enters the corresponding clamping groove.

6. The universal pressurizing device according to claim 5, characterized in that: A chamfered surface is provided on one side of the positioning hole facing the first seat plate, and the mounting groove extends along the third direction to the chamfered surface.

7. The universal pressurizing device according to claim 5, characterized in that: The pin head is a special-shaped structure arranged axially symmetrically; there are two spring plungers, which are symmetrically arranged on the pin head; a limiting step is provided on the inner wall of the positioning hole on the side away from the first seat plate, and there are two limiting steps, which are symmetrically arranged in the first direction, and an assembly channel matching the structure of the pin head is formed between the two limiting steps.

8. A sintering device, characterized in that: The sintering equipment includes a carrier seat and a universal pressurizing device as described in any one of claims 1 to 7, wherein the carrier seat and a mounting seat of the universal pressurizing device are arranged relative to each other in a third direction, and a carrier is detachably arranged on the carrier seat, and the carrier corresponds to the pressure head on the mounting seat.

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