MEMS sensor testing tooling and MEMS sensor testing equipment

Abstract

The present invention provides a detection tool for a MEMS sensor and a detection device for a MEMS sensor, which belongs to the field of testing, and includes a rotating component and a vibrating component, wherein the rotating component includes a rotating shaft that can rotate around its own axis, and the MEMS sensor is arranged on the rotating shaft and is located on one side of the rotating shaft in the diameter direction; the vibrating component includes a second vibrating table and a fixed frame arranged on the second vibrating table, wherein the fixed frame can reciprocate along the axis of the rotating shaft with the rotation of the rotating shaft, and the end of the rotating shaft can be rotatably mounted on the fixed frame, and the fixed frame can drive the rotating shaft to reciprocate along its own axis. Compared with the prior art, the present invention cooperates with the vibrating component and the rotating component to make the sensor vibrate along the axis and also rotate around the axis, thereby more effectively eliminating unqualified sensors and solving the technical problem that the existing detection equipment cannot effectively screen out unqualified products.

Description

Technical Field

[0001] The present invention belongs to the field of force testing, and more specifically, relates to a testing tool for a MEMS sensor. The present invention also relates to a testing device for a MEMS sensor. Background Art

[0002] MEMS is the abbreviation of Micro Electro Mechanical systems. Micro Electro Mechanical Systems (MEMS) technology is a cutting-edge technology in the 21st century based on micro / nanotechnology. It refers to the technology for designing, processing, manufacturing, measuring and controlling micro / nano materials. It can integrate mechanical components, optical systems, drive components and electronic control systems into a micro system as an integral unit. This micro-electromechanical system can not only collect, process and send information or instructions, but also take actions autonomously or according to external instructions based on the information obtained.

[0003] Micromechanical gyroscopes all use the concept of vibrating objects to sense angular velocity. Micromechanical gyroscopes designed to use vibration to induce and detect Coriolis force have no rotating parts and do not require bearings. Micromechanical gyroscopes are used to measure the rotation speed of the car (turning or rolling). Together with low accelerometers, they form an active control system. The so-called active control system means that once the state of the car is found to be abnormal, the system will correct the abnormal state in time before the accident occurs or respond to the abnormal state correctly to prevent the accident from happening. For example, when turning, the system measures the angular velocity through the gyroscope to know whether the steering wheel is turned too much or not enough, and actively applies appropriate brakes to the inner or outer wheels to prevent the car from leaving the lane.

[0004] During use, micromechanical gyroscopes are prone to use problems in harsh working conditions due to issues such as yield rate. However, existing testing tools can only simulate the rotational conditions or linear vibration conditions of micromechanical gyroscope MEMS sensors. The detection efficiency of defective MEMS sensors is poor and cannot meet the use requirements of MEMS sensors under harsh working conditions. Summary of the invention

[0005] The object of the present invention is to provide a detection tool for a MEMS sensor, so as to solve the technical problem that the existing detection equipment has a poor simulation effect on the use condition of the MEMS sensor.

[0006] To achieve the above object, the technical solution adopted by the present invention is: to provide a detection tool for a MEMS sensor, comprising:

[0007] The rotating assembly comprises a rotating shaft capable of rotating around its own axis, and the MEMS sensor is arranged on the rotating shaft and located on one side in the diameter direction of the rotating shaft;

[0008] The vibration component includes a second vibration table and a fixed frame arranged on the second vibration table. The fixed frame can vibrate back and forth along the axis of the rotating shaft as the rotating shaft rotates. The end of the rotating shaft can be rotatably installed on the fixed frame, and the fixed frame can drive the rotating shaft to vibrate back and forth along its own axis.

[0009] In a possible implementation, the rotating assembly further includes a mounting plate, which is disposed on the rotating shaft and is used to mount the MEMS sensor to be detected.

[0010] In a possible implementation, the vibration assembly further includes a positioning ring, which is coaxial with the rotating shaft, and the top of the positioning ring is fixedly connected to the fixed frame, and the bottom is sleeved on the outer circumference of the rotating shaft, and the rotating shaft is rotatably adapted to the positioning ring.

[0011] In a possible implementation, the vibration assembly further includes a first vibration table disposed on top of the second vibration table, the fixing frame is movably disposed on the top of the first vibration table in an up-and-down direction, and the rotating shaft is rotatably disposed on the first vibration table.

[0012] In a possible implementation, the rotating assembly further includes a driving motor, which is slidably disposed on the second vibration table along an up-and-down direction, and is used to drive the rotating shaft to rotate and can drive the first vibration table to vibrate axially along the rotating shaft.

[0013] In a possible implementation, the first vibration table is provided with a mounting groove, and the drive motor is disposed in the mounting groove.

[0014] In a possible implementation, the positioning ring includes a fixed ring and a movable ring, both of which are coaxial with the rotating shaft, and the fixed ring is sleeved on the outer circumference of the movable ring, the fixed ring is connected to the fixed frame, and the movable ring is fixedly connected to the top of the rotating shaft.

[0015] In a possible implementation, a connecting plate is provided at the bottom of the fixing frame, and the connecting plate is lockably slidably adapted to the first vibration table along the axial direction of the rotating shaft.

[0016] In a possible implementation, a limit bracket is provided on the top of the fixed frame, and the limit bracket includes a connecting strip and two plug-in strips. The two plug-in strips are fixedly connected by the connecting strip, so two plug-in holes are opened on the top of the fixed frame. The two plug-in strips can pass through the two plug-in holes in the up and down directions respectively, and the bottoms of the two plug-in strips are symmetrically distributed on both sides of the axis of the fixed ring and are fixedly connected to the fixed ring.

[0017] Compared with the prior art, the beneficial effect of the MEMS sensor detection tooling provided by the present invention is that the rotating shaft in the rotating component can simulate the working environment of the MEMS sensor during the rotation process. At the same time, the vibration component can drive the axis of the rotating shaft to vibrate reciprocatingly, and then during the circular centrifugal test of the MEMS sensor, its linear vibration working condition is simulated, so that the simulation process of the MEMS sensor is closer to the actual use condition of the MEMS sensor, which is conducive to more efficient screening of defective MEMS sensors, so as to solve the technical problem that the existing test tooling cannot effectively screen out defective products, thereby helping to ensure the reliability of the MEMS sensor during use.

[0018] Another object of the present invention is to provide a MEMS sensor detection device, including the above-mentioned MEMS sensor detection tooling.

[0019] Compared with the prior art, the MEMS sensor detection device of the present invention has all the advantages of the above-mentioned MEMS sensor detection tooling, which will not be described in detail here. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the embodiments or the prior art description. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work. In the drawings:

[0021] Figure 1 A front view of a detection tool for a MEMS sensor provided by the present invention;

[0022] Figure 2 This is a simplified diagram of the internal structure of the detection tooling of the MEMS sensor of the present invention.

[0023] In the figure:

[0024] 1. Rotating assembly; 11. Rotating shaft; 12. Mounting plate; 13. Driving motor;

[0025] 2. Vibration assembly; 21. Fixed frame; 211. Connecting plate; 212. Positioning bracket; 22. Positioning ring; 221. Fixed ring; 222. Moving ring; 23. First vibration table; 231. Mounting slot; 24. Electromagnet; 25. Power circuit; 26. Control shaft; 27. Reduction gear; 28. Connecting plate; 29. ​​Second vibration table;

[0026] 3.MEMS sensors. DETAILED DESCRIPTION

[0027] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments may be combined with each other.

[0028] In the description of the present invention, it should be noted that if terms such as "upper", "lower", "inside" and "back" appear to indicate orientation or positional relationship, they are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0029] In addition, in the description of the present invention, unless otherwise clearly defined, the terms "installed", "connected", "connection", and "connector" should be understood in a broad sense. For example, the connection can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, an indirect connection through an intermediate medium, or a connection between two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood in combination with specific circumstances.

[0030] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0031] Please also read Figure 1 to Figure 2 Now, the detection tooling of the MEMS sensor provided by the present invention is described.

[0032] In general, the existing detection devices can only simulate the vibration or rotation conditions of the MEMS sensor 3, and cannot effectively detect the defective MEMS sensor 3. To address this problem, the detection tooling of the MEMS sensor 3 in the present invention integrates the rotating component 1 on the vibration component 2, so that the MEMS sensor 3 can move axially while driving the MEMS sensor 3 to perform centrifugal motion, thereby simulating the radial rotation and axial vibration conditions of the MEMS sensor 3 at the same time.

[0033] Based on the above overall design concept, in a specific embodiment, the detection tooling of the MEMS sensor 3 includes a rotating component 1 and a vibration component 2: wherein the rotating component 1 includes a rotating shaft 11 that can rotate around its own axis, and the MEMS sensor 3 is arranged on the rotating shaft 11 and is located on one side of the diameter direction of the rotating shaft 11; the vibration component 2 includes a second vibration table 29 and a fixed frame 21 arranged on the second vibration table 29, the fixed frame 21 can vibrate back and forth along the axis of the rotating shaft 11 as the rotating shaft 11 rotates, the end of the rotating shaft 11 can be rotatably installed on the fixed frame 21, and the fixed frame 21 can drive the rotating shaft 11 to vibrate back and forth along its own axis.

[0034] Compared with the prior art, the rotating shaft 11 in the rotating component 1 can simulate the working environment of the MEMS sensor 3 during the rotation process. At the same time, the vibration component 2 can drive the axis of the rotating shaft 11 to vibrate reciprocatingly, and then simulate the linear vibration working condition of the MEMS sensor 3 during the circular centrifugal test, so that the simulation process of the MEMS sensor 3 is closer to the actual use condition of the MEMS sensor 3, which is conducive to more efficient screening of defective MEMS sensors 3, so as to solve the technical problem that the existing test tooling cannot effectively screen out defective products, thereby helping to ensure the reliability of the MEMS sensor 3 during use.

[0035] It should be noted that, during the specific use of the detection fixture in the present invention, the installation posture of the MEMS sensor 3 on the rotating shaft 11 can be flexibly adjusted according to actual detection requirements, and its specific installation posture is not described here.

[0036] Based on the above embodiments, further, in some feasible implementation schemes, in order to install the MEMS sensor 3 on the rotating shaft 11, the rotating component 1 also includes a mounting plate 12, and the mounting plate 12 is arranged on the rotating shaft 11. The mounting plate 12 is used to install the MEMS sensor 3 to be tested. More specifically, bolt holes and positioning bolts for positioning the MEMS sensor 3 are provided on the mounting plate 12 to prevent the MEMS sensor 3 from falling from the mounting plate 12 during the test; optionally, the plate surface of the mounting plate 12 is perpendicular to the rotating shaft 11, and the MEMS sensors 3 to be tested are evenly distributed around the rotating shaft 11, so that the force at each angle is balanced during the rotation of the mounting plate 12, thereby improving the stability of the rotation of the rotating shaft 11.

[0037] In some feasible embodiments, the vibration component 2 also includes a positioning ring 22, which is coaxial with the rotating shaft 11, and the top of the positioning ring 22 is fixedly connected to the fixed frame 21, and the bottom is sleeved on the outer periphery of the rotating shaft 11, and the rotating shaft 11 is rotatably adapted to the positioning ring 22. The positioning ring 22 can prevent the radial displacement of the rotating shaft 11 while preventing the axial displacement of the rotating shaft 11 by mutual cooperation with the fixed frame 21, so that the rotating shaft 11 can move with the movement of the fixed frame 21.

[0038] In some feasible embodiments, the vibration assembly 2 also includes a first vibration table 23 disposed on the top of the second vibration table 29, the fixed frame 21 is movably disposed on the top of the first vibration table 23 in the up and down directions, and the rotating shaft 11 is rotatably disposed on the first vibration table 23. In this way, the present embodiment can form a stable connection between the rotating shaft 11 and the second vibration table 29 through the first vibration table 23, thereby preventing the rotating shaft 11 from being offset during rotation.

[0039] Furthermore, in order to drive the rotating shaft 11 to rotate, in some feasible embodiments, the rotating assembly 1 also includes a driving motor 13, and the driving motor 13 is slidably arranged on the second vibration table 29 along the up and down directions. The driving motor 13 is used to drive the rotating shaft 11 to rotate, and can drive the first vibration table 23 to vibrate along the axial direction of the rotating shaft 11. Furthermore, in order to install the drive motor 13, the first vibration table 23 is provided with a mounting groove 231, and the drive motor 13 is arranged in the mounting groove 231 to prevent the drive motor 13 from rotating around the axial direction of the rotating shaft 11; in addition to the above feasible implementation mode, in order to drive the rotating shaft 11 to move up and down, the first vibration table 23 in the present invention can be elastically movably arranged on the second vibration table 29, and the elastic expansion and contraction direction of the first vibration table 23 is parallel to the axis of the rotating shaft 11. The vibration component 2 in the present invention also includes an electromagnet 24 arranged on the first vibration table 23, and a power circuit 25 for powering the electromagnet 24. The drive motor 13 can be connected to the switch drive of the power circuit 25 to drive the power circuit 25 to be turned on and off by the rotation of the drive motor 13. In this way, during the rotation of the drive motor 13, when the switch is rotated to a suitable angle, the power circuit 25 becomes a passage, and the electromagnet 24 generates electromagnetic force to overcome the first vibration table 23 and the second vibration table 29. The elastic supporting force between them makes the first vibration table 23 close to the second vibration table 29; as the drive motor 13 rotates, when the switch is rotated to other angles, the electric circuit 25 is broken, the electromagnet 24 loses power and is demagnetized, and the first vibration table 23 moves away from the support table under the action of the elastic support. The above process acts reciprocatingly, so that the first vibration table 23 continuously vibrates along the axial direction of the rotating shaft 11, so that the drive motor 13 can control the rotation of the rotating shaft 11 and the vibration of the rotating shaft 11, so as to enhance the functionality of the drive motor 13, and can simultaneously control the vibration frequency and rotation speed of the first vibration table 23 by adjusting the speed of the motor, which not only saves the space occupied by the entire detection tooling, but also can ensure that the number of vibrations and the number of rotations received by the MEMS sensor 3 in unit time are always in a multiple relationship by improving the linkage between vibration and rotation, so as to improve the stability of the detection of the MEMS sensor 3 in this embodiment and the consistency of the detection standard.

[0040] Optionally, in the above embodiment, further, the vibration component 2 also includes a control shaft 26, a reduction gear 27 and a power connecting plate 28. The power output end of the motor is meshed and connected with the reduction gear 27. The reduction gear 27 is drivingly connected to the control shaft 26, and the axial direction of the control shaft 26 is perpendicular to the power output shaft of the motor. The middle part of the power connecting plate 28 is connected to the end of the control shaft 26. As the control shaft 26 rotates, the two ends of the power connecting plate 28 can connect or disconnect the power circuit 25 during the rotation of the control shaft 26, thereby controlling the electromagnet 24 in a manner of controlling the on and off of the power circuit 25.

[0041] In order to facilitate the installation of the rotating shaft 11, in some feasible embodiments, the positioning ring 22 includes a fixed ring 221 and a movable ring 222, both of which are coaxial with the rotating shaft 11, and the fixed ring 221 is sleeved on the outer circumference of the movable ring 222, the fixed ring 221 is connected to the fixed frame 21, and the movable ring 222 is fixedly connected to the top of the rotating shaft 11. In this way, the present embodiment can connect the fixed frame 21 and the rotating shaft 11 respectively through the fixed ring 221 and the movable ring 222, and can axially lock the rotating shaft 11 while preventing the rotating shaft 11 from radially deviating.

[0042] In some feasible embodiments, a connecting plate 211 is provided at the bottom of the fixed frame 21, and the connecting plate 211 can be locked and slidably adapted to the first vibration table 23 along the axial direction of the rotating shaft 11, and then the distance between the fixed frame 21 and the first vibration table 23 can be adjusted by sliding the connecting plate 211 on the first vibration table 23, thereby facilitating the assembly of the rotating shaft 11 and the fixed ring 221 mentioned above.

[0043] In some feasible embodiments, a limiting bracket 212 is provided on the top of the fixed frame 21. The limiting bracket 212 includes a connecting strip and two plug-in strips. The two plug-in strips are fixedly connected by the connecting strip, so two plug-in holes are opened on the top of the fixed frame 21. The two plug-in strips can pass through the two plug-in holes in the up and down directions respectively. The bottoms of the two plug-in strips are symmetrically distributed on both sides of the axis of the fixed ring 221 and are fixedly connected to the fixed ring 221. In the specific implementation process, after assembling the rotating shaft 11, the moving ring 222 and the fixed ring 221, the fixed ring 221 can be connected to the two plug-in strips in this embodiment, thereby forming a stable connection between the fixed ring 221 and the plug-in strips.

[0044] In summary, the rotating shaft 11 in the rotating component 1 of the present invention can simulate the working condition environment of the MEMS sensor 3 during the rotation process. At the same time, the vibration component 2 can drive the axis of the rotating shaft 11 to vibrate reciprocatingly, and then simulate the linear vibration working condition of the MEMS sensor 3 during the circumferential centrifugal test, so that the simulation process of the MEMS sensor 3 is closer to the actual use condition of the MEMS sensor 3, which is conducive to more efficiently screening out defective MEMS sensors 3, so as to solve the technical problem that the existing test tooling cannot effectively screen out defective products, thereby helping to ensure the reliability of the MEMS sensor 3 during use; in addition to the above-mentioned beneficial effects In addition to the effect, the present invention can also drive the on and off of the power circuit 25 by rotating the driving motor 13, thereby switching the electromagnet 24 between being energized and being de-energized, so that the electromagnet 24 reciprocates and adsorbs the second vibration table 29 located below the first vibration table 23. During this process, the first vibration table 23 is always subjected to the elastic support force that keeps itself away from the second vibration table 29. The above process is repeated, so that the first vibration table 23 reciprocates along the axial direction of the rotating shaft 11, so as to test the vibration of the MEMS sensor 3 while performing a rotation test. Moreover, in the test process of the present invention, the vibration test and the rotation test are performed in conjunction, which is beneficial to ensure the stability of the detection of the MEMS sensor 3 and the consistency of the detection standard.

[0045] Based on the same inventive concept, the present invention further proposes a MEMS sensor detection device, which includes the detection tooling of the MEMS sensor 3 mentioned above.

[0046] Compared with the prior art, the detection device of the MEMS sensor in the present invention has all the advantages of the detection tooling of the above-mentioned MEMS sensor 3, which will not be described in detail here.

[0047] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A detection tool for a MEMS sensor, characterized in that: include: A rotating assembly (1) comprising a rotating shaft (11) capable of rotating about its own axis, wherein a MEMS sensor (3) is arranged on the rotating shaft (11) and is located on one side in a diameter direction of the rotating shaft (11); A vibration assembly (2), comprising a second vibration table (29) and a fixed frame (21) arranged on the second vibration table (29), wherein the fixed frame (21) can vibrate back and forth along the axis of the rotation shaft (11) as the rotation shaft (11) rotates, an end of the rotation shaft (11) can be rotatably mounted on the fixed frame (21), and the fixed frame (21) can drive the rotation shaft (11) to vibrate back and forth along its own axis; The vibration component (2) further comprises a positioning ring (22), wherein the positioning ring (22) is coaxial with the rotating shaft (11), the top of the positioning ring (22) is fixedly connected to the fixing frame (21), the bottom is sleeved on the outer circumference of the rotating shaft (11), and the rotating shaft (11) and the positioning ring (22) are rotationally adapted; The vibration assembly (2) further comprises a first vibration table (23) arranged on the top of the second vibration table (29), the fixed frame (21) is movably arranged on the top of the first vibration table (23) in the up-down direction, and the rotating shaft (11) is rotatably arranged on the first vibration table (23); The rotating assembly (1) further comprises a driving motor (13), wherein the driving motor (13) is slidably disposed on the second vibration table (29) in an up-down direction, and the driving motor (13) is used to drive the rotating shaft (11) to rotate, and can drive the first vibration table (23) to vibrate along the axial direction of the rotating shaft (11); The positioning ring (22) comprises a fixed ring (221) and a movable ring (222); the fixed ring (221) and the movable ring (222) are both coaxial with the rotating shaft (11); the fixed ring (221) is sleeved on the outer circumference of the movable ring (222); the fixed ring (221) is connected to the fixed frame (21); and the movable ring (222) is fixedly connected to the top of the rotating shaft (11).

2. The MEMS sensor detection tooling according to claim 1, characterized in that: The rotating assembly (1) further comprises a mounting plate (12), wherein the mounting plate (12) is arranged on the rotating shaft (11), and the mounting plate (12) is used for mounting a MEMS sensor (3) to be detected.

3. The detection tooling for the MEMS sensor according to claim 1, characterized in that: The first vibration table (23) is provided with a mounting groove (231), and the drive motor (13) is arranged in the mounting groove (231).

4. The MEMS sensor detection tooling according to claim 1, characterized in that: A connecting plate (211) is provided at the bottom of the fixed frame (21), and the connecting plate (211) is lockably slidably adapted to the first vibration table (23) along the axial direction of the rotating shaft (11).

5. The MEMS sensor detection tooling according to claim 1, characterized in that: A limiting bracket (212) is provided at the top of the fixed frame (21), and the limiting bracket (212) comprises a connecting strip and two plug-in strips, and the two plug-in strips are fixedly connected via the connecting strip, so that two plug-in holes are provided at the top of the fixed frame (21), and the two plug-in strips can pass through the two plug-in holes in the upper and lower directions respectively, and the bottoms of the two plug-in strips are symmetrically distributed on both sides of the axis of the fixed ring (221) and are fixedly connected to the fixed ring (221).

6. A MEMS sensor detection device, characterized in that: A detection tool comprising a MEMS sensor as claimed in any one of claims 1 to 5.

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