Peripheral pump for conveying liquefied high-purity electronic gas

Abstract

The invention discloses a peripheral pump for conveying liquefied high-purity electronic gas. According to the peripheral pump, a peripheral pump impeller capable of being in transmission connection with the rotating output end of an external power source is rotationally supported in a pump shell; the pump shell is provided with a liquid inlet, a liquid outlet and a cooling cavity capable of being communicated with a refrigerant outlet and a refrigerant backflow opening of an external refrigeration source. Non-metal gaskets are coaxially arranged on the two sides of the peripheral pump impeller and fixed to the pump shell, and gaps are formed between the end walls of the non-metal gaskets and the end wall of the peripheral pump impeller. By designing the non-metal gasket, the vortex pump impeller does not make contact with the pump shell made of the metal material when rotating, so that metal chippings are avoided, and the phenomenon that the purity of electronic gas is affected due to the existence of the metal chippings when the liquid electronic gas is pumped is prevented; the cooling cavity and an external refrigeration source are used for pre-cooling the pump shell, and liquid electronic gas is prevented from being heated and gasified in the pumping process.

Description

Technical Field

[0001] The invention relates to the field of electronic gas transportation, and more particularly to a vortex pump for transporting liquefied high-purity electronic gas. Background Art

[0002] Electronic gas is one of the important raw materials in the electronics industry. With the rapid development of industries such as photovoltaic power generation and ultra-large-scale integrated circuits, the market demand for electronic gas has increased significantly.

[0003] The quality control of electronic gases is mainly divided into two aspects, namely system purity control and system sealing performance control; the system sealing performance is more directly related to the stable operation of the equipment.

[0004] At present, it is difficult to purify electronic gases. Slight purity differences will greatly affect product quality. In particular, metal elements in electronic gases are required to be purified to level 9-12, so the requirements for the sealing performance of the equipment system are particularly important.

[0005] Traditional electronic gas transportation is mainly based on plunger pumps and diaphragm compressors. Plunger pumps are widely used in low-temperature liquid transportation. They have controllable flow, high head and are easy to maintain, but there is a problem of pump packing leakage. The applicable medium is mostly low-temperature liquefiable inert gas (liquid nitrogen, liquid argon, etc.). When transporting dangerous media such as liquefied silane, there is a safety risk of material explosion after leakage, which leaves a safety hazard to the stable operation of the device. Diaphragm compressors have a large delivery capacity and stable operation, but they occupy too much space and have a complex structure. Under low-temperature conditions, their diaphragms are prone to fatigue and their service life is easily reduced.

[0006] Therefore, how to provide a vortex pump for conveying liquefied high-purity electronic gas so as to overcome the above problems is an issue that needs to be urgently resolved by those skilled in the art. Summary of the invention

[0007] In view of this, the present invention provides a vortex pump for conveying liquefied high-purity electronic gas.

[0008] In order to achieve the above object, the present invention adopts the following technical solution:

[0009] A vortex pump for conveying liquefied high-purity electronic gas, comprising: a pump casing, a vortex pump impeller and a non-metallic gasket, wherein the vortex pump impeller is rotatably supported in the pump casing, and the vortex pump impeller can be drivingly connected to the rotating output end of an external power source; the pump casing is provided with a liquid inlet and a liquid outlet communicated with the interior thereof, and the axis of the vortex pump impeller is located between the liquid inlet and the liquid outlet; two non-metallic gaskets are coaxially provided, the vortex pump impeller is arranged between the two non-metallic gaskets, and the vortex pump impeller and the non-metallic gasket are coaxially provided. Axis arrangement, one end walls of the two non-metallic gaskets are tightly fixed to the inner wall of the pump casing, and the other end walls of the two non-metallic gaskets each have a gap with the two end walls of the vortex pump impeller, and the blades of the vortex pump impeller, the liquid inlet and the liquid outlet are all located outside the area surrounded by the non-metallic gaskets; a cooling cavity is provided on the shell wall of the pump casing, and a connection port 1 and a connection port 2 connected to the cooling cavity are provided on the pump casing, and the connection port 1 and the connection port 2 are respectively connected to the refrigerant outflow port and the refrigerant return port of an external cooling source.

[0010] It can be seen from the above technical scheme that, compared with the prior art, the present invention discloses a vortex pump for conveying liquefied high-purity electronic gas. The present invention designs two non-metallic gaskets in the pump casing, so that the vortex pump impeller will not contact the metal pump casing when rotating at high speed, thereby avoiding the generation of metal debris and preventing the liquid electronic gas from being mixed with metal debris when the vortex pump is pumping liquid electronic gas, and the purity of the electronic gas will not be affected during the pumping process; since a vortex pump impeller is used, this structure has a high pumping efficiency for liquid electronic gas and consumes little power; by designing a cooling chamber, before starting to pump the liquid electronic gas, the cooling chamber and an external cooling source can be used to pre-cool the pump casing and the vortex pump impeller to prevent the liquid electronic gas from being heated and vaporized during the pumping process.

[0011] Preferably, the pump casing comprises a pump casing body and an end cover, one end of the pump casing body is open and detachably blocked by the end cover, the pump casing body is provided with the liquid inlet and the liquid outlet communicated with the interior thereof, the vortex pump impeller is rotatably supported inside the pump casing body, the two non-metallic gaskets are respectively fixed to the end cover and the pump casing body, and the cooling cavity, the first connection port and the second connection port are integrally formed on the end cover. The vortex pump impeller, the cooling cavity, the first connection port and the second connection port can be reliably arranged.

[0012] Preferably, a countersunk hole is provided on the end surface of the non-metallic gasket, a through hole is coaxially provided on the bottom wall of the countersunk hole, a threaded hole 1 is provided on the end cover, and a threaded hole 2 is provided on the inner wall of the pump housing body, one end of bolt 1 passes through the countersunk hole and the through hole on one non-metallic gasket in sequence and then is screwed into the threaded hole 1, one end of bolt 2 passes through the countersunk hole and the through hole on another non-metallic gasket in sequence and then is screwed into the threaded hole 2, and the bolt heads of bolt 1 and bolt 2 are respectively embedded in the corresponding countersunk holes. The two non-metallic gaskets can be reliably fixed to the end cover and the pump housing body respectively.

[0013] Preferably, it also includes a magnetic transmission component, which includes a connecting shell, a sealing sleeve, a mounting tube, a bearing, a rotating shaft, a mounting wheel, a magnet block, a connecting shell, a rotating shaft, a mounting tube and a magnet block, the connecting shell is open at both ends, the sealing sleeve has one end open and the other end closed, one end of the connecting shell is fixed to the pump shell body, and the other end of the connecting shell is sealed and fixed to the open end of the sealing sleeve; the mounting tube is located in the connecting shell, one end of the mounting tube is fixed to the pump shell body, and a plurality of the bearings are coaxially and tightly embedded inside the mounting tube; the pump shell body has a hole and the rotating shaft is inserted therein, one end of the rotating shaft is coaxially fixed to the vortex pump impeller, and the other end of the rotating shaft is coaxially fixed to the mounting wheel after coaxially passing through a plurality of the bearings, the mounting wheel is coaxially arranged in the sealing sleeve, and a plurality of the outer wall of the mounting wheel is circumferentially evenly fixed The magnet block one, there is a gap between the magnet block one and the inner wall of the sealing sleeve; one end of the connecting shell two is open, and the open end of the connecting shell two is sealed and fixed to one end of the connecting shell one provided with the sealing sleeve, the connecting shell two is internally rotatably supported by the rotating shaft, the rotating shaft two is coaxially arranged with the rotating shaft, one end of the rotating shaft two is located outside the connecting shell two, and the other end of the rotating shaft two is coaxially fixed with the mounting cylinder; the mounting cylinder is located on the inner side of the connecting shell two, the sealing sleeve is coaxially limited on the inner side of the mounting cylinder, and a plurality of the magnet blocks two are evenly fixed on the inner side wall of the mounting cylinder in the circumferential direction, and there is a gap between the magnet block two and the outer side wall of the sealing sleeve, the plurality of the magnet blocks one and the plurality of the magnet blocks two are respectively positioned opposite to each other, the magnet block one and the magnet block two have opposite magnetic properties, and the end of the rotating shaft two located on the outer side of the connecting shell two can be transmission-connected with the rotating output end of an external power source. The above design ensures, on the one hand, that the rotating shaft 2 can reliably drive the vortex pump impeller to rotate, and on the other hand, that external impurities will not enter the pump casing when the rotating shaft 2 drives the vortex pump impeller to rotate.

[0014] Preferably, two bearings 1 are provided, and the two bearings 1 are arranged close to the two ends of the mounting tube, respectively. Bearing 1 can reliably support the rotation of shaft 1.

[0015] Preferably, the magnetic transmission assembly further comprises a bearing 2, the connecting shell 2 comprises a shell 1 and a shell 2, the shell 1 is open at both ends, one end of the shell 1 is sealed and fixed with one end of the connecting shell 1 provided with the sealing sleeve, the other end of the shell 1 is sealed and fixed with one end of the shell 2, the mounting cylinder is located inside the shell 1, the bearing 2 is tightly embedded inside the shell 2, the rotating shaft 2 is coaxially and tightly penetrated in the inner ring of the bearing 2, one end of the rotating shaft 2 is coaxially fixed with the mounting cylinder after passing through the shell 2, and the other end of the rotating shaft 2 can be connected to the rotation output end of the external power source after passing through the shell 2; there are multiple bearings 2, and the multiple bearings 2 are arranged in sequence along the length direction of the rotating shaft 2. The rotating shaft 2 and the mounting cylinder can be reliably arranged.

[0016] Preferably, the end surface of the non-metallic gasket is parallel to the end wall of the vortex pump impeller. This design ensures that there is a small and relatively constant gap between the end surface of the non-metallic gasket and the end wall of the vortex pump impeller. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying creative work.

[0018] Figure 1 The front view of a vortex pump that delivers liquefied high-purity electronic gas

[0019] Figure 2 A cross-sectional view of a vortex pump that delivers liquefied high-purity electronic gas. Figure 1 ;

[0020] Figure 3 yes Figure 1 A partial enlarged view of the middle A;

[0021] Figure 4 A cross-sectional view of a vortex pump that delivers liquefied high-purity electronic gas. Figure 2 .

[0022] In the figure:

[0023] 01 is the pump casing, 010 is the pump casing body, 0100 is the liquid inlet, 0101 is the liquid outlet, 011 is the end cover, 0110 is the cooling chamber, 0111 is the connection port one, 0112 is the connection port two, 02 is the vortex pump impeller, 03 is the non-metallic gasket, 04 is the bolt one, 05 is the bolt two, 06 is the connection shell one, 07 is the sealing sleeve, 08 is the mounting tube, 09 is the bearing one, 10 is the rotating shaft one, 11 is the mounting wheel, 12 is the magnet block one, 13 is the connection shell two, 130 is the shell one, 131 is the shell two, 14 is the rotating shaft two, 15 is the mounting tube, 16 is the magnet block two, and 17 is the bearing two. DETAILED DESCRIPTION

[0024] The technical solutions in the embodiments of the present invention are described clearly and completely below. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0025] The present invention discloses a vortex pump for conveying liquefied high-purity electronic gas. The present invention designs two non-metallic gaskets 03 in a pump housing 01, so that the vortex pump impeller 02 will not contact the metal pump housing 01 when rotating at high speed, thereby avoiding the generation of metal debris and preventing the liquid electronic gas from being mixed with metal debris when the vortex pump is pumping the liquid electronic gas, and the purity of the electronic gas will not be affected during the pumping process.

[0026] Since the non-metallic gasket 03 is used, the relative friction between the non-metallic gasket 03 and the metal vortex pump impeller 02 is relatively small, there is no direct friction between metal parts, no external leakage of the pump will occur, and the safety during operation is high;

[0027] Since the vortex pump impeller 02 is used, this structure has a high pumping efficiency for liquid electronic gas and consumes less power;

[0028] By designing the cooling chamber 0110, before starting to pump the liquid electronic gas, the cooling chamber 0110 and the external cooling source can be used to pre-cool the pump housing 01 and the vortex pump impeller 02 to prevent the liquid electronic gas from being heated and vaporized during the pumping process;

[0029] The vortex pump takes up less space and is suitable for conveying low-density easily gasified media, and the average flow rate is constant during its operation;

[0030] By designing a magnetic transmission component, the rotating shaft 14 can drive the mounting cylinder 15 to rotate. When the mounting cylinder 15 rotates, it can drive the multiple magnet blocks 16 to rotate. When the multiple magnet blocks 16 rotate around the rotating shaft 14, the multiple magnet blocks 12 will also be driven by the magnet blocks 16, thereby realizing the rotation of the mounting wheel 11. When the mounting wheel 11 rotates, it will drive the rotating shaft 10 to rotate, thereby realizing the rotation of the vortex pump impeller 02. Since the mounting tube 08, the bearing 09, the mounting wheel 11 and the magnet block 12 are all located in the sealing area jointly defined by the pump casing body 010, the connecting casing 06 and the sealing sleeve 07, therefore, when the rotating shaft 14 drives the vortex pump impeller 02 to rotate, external impurities will not enter the pump casing body 010.

[0031] Example

[0032] See attached Figure 1-4 The overall and partial structural schematic diagram of an embodiment of the present invention specifically discloses a vortex pump for conveying liquefied high-purity electronic gas, including: a pump housing 01, a vortex pump impeller 02 and a non-metallic gasket 03;

[0033] A vortex pump impeller 02 is rotatably supported in the pump housing 01, and the vortex pump impeller 02 can be connected to the rotation output end of the external power source. The external power source referred to here is an electric motor or an internal combustion engine. The electric motor is a variable frequency motor or an industrial frequency motor. The external power source can drive the vortex pump impeller 02 to rotate; the vortex pump impeller 02 is the prior art, and the vortex pump impeller 02 includes an impeller body and blades uniformly distributed on the periphery of the impeller body in the circumferential direction. The impeller level of the vortex pump impeller 02 is 1-10;

[0034] The pump housing 01 is provided with a liquid inlet 0100 and a liquid outlet 0101 which are connected to the interior thereof. The axis of the vortex pump impeller 02 is located between the liquid inlet 0100 and the liquid outlet 0101. In the present embodiment, the liquid inlet direction of the liquid inlet 0100 and the liquid outlet direction of the liquid outlet 0101 are both perpendicular to the axis of the vortex pump impeller 02. The liquid inlet direction of the liquid inlet 0100 is parallel to the liquid outlet direction of the liquid outlet 0101. When the vortex pump impeller 02 rotates, the liquefied electronic gas can enter the pump housing 01 from the liquid inlet 0100 and be discharged from the pump housing 01 from the liquid outlet 0101.

[0035] Two non-metallic washers 03 are coaxially arranged. In this embodiment, the cross-sectional shape of the non-metallic washers 03 is rectangular. The material of the non-metallic washers 03 can be polytetrafluoroethylene. The end face of the non-metallic washers 03 is parallel to the end wall of the vortex pump impeller 02. The vortex pump impeller 02 is arranged between the two non-metallic washers 03. The vortex pump impeller 02 and the non-metallic washers 03 are coaxially arranged. One end wall of the two non-metallic washers 03 is tightly fixed to the inner wall of the pump housing 01. The other end walls of the two non-metallic washers 03 each have a very small gap with the two end walls of the vortex pump impeller 02. The blades of the vortex pump impeller 02 , the liquid inlet 0100 and the liquid outlet 0101 are all located outside the area surrounded by the non-metallic gasket 03, and the non-metallic gasket 03 corresponds to the position of the impeller body of the vortex pump impeller 02; when the vortex pump impeller 02 is running at a high speed, due to its own deformation or axial movement, the vortex pump impeller 02 may contact the non-metallic gasket 03. Since it is a non-metallic gasket 03, no metal debris will be generated when the vortex pump impeller 02 contacts the non-metallic gasket 03, that is, it is ensured that the transported electronic gas will not be mixed with metal debris. The present application will not cause pollution to the transported electronic gas while ensuring the pumping capacity;

[0036] A cooling chamber 0110 is provided on the shell wall of the pump housing 01. A connection port 1 0111 and a connection port 2 0112 which are connected to the cooling chamber 0110 are provided on the pump housing 01. The connection port 1 0111 and the connection port 2 0112 are respectively connected to the refrigerant flow outlet and the refrigerant return port of an external cooling source. The external cooling source cools the refrigerant and then transports it to the cooling chamber 0110, that is, refrigerant circulates in the cooling chamber 0110. The refrigerant will cool the pump housing 01 during the process of flowing in the cooling chamber 0110. The purpose of this design is to reduce the temperature of the pump housing 01 and the vortex pump impeller 02 to prevent the liquid electronic gas from being heated and vaporized during the process of pumping the liquefied electronic gas in the present application.

[0037] The pump casing 01 includes a pump casing body 010 and an end cover 011. One end of the pump casing body 010 is open and removably sealed with the end cover 011. The pump casing body 010 is provided with a liquid inlet 0100 and a liquid outlet 0101 which are connected to the interior thereof. A vortex pump impeller 02 is rotatably supported inside the pump casing body 010. Two non-metallic gaskets 03 are respectively fixed to the end cover 011 and the pump casing body 010. A cooling cavity 0110, a connection port 1 0111 and a connection port 2 0112 are integrally formed on the end cover 011.

[0038] A countersunk hole is provided on the end face of the non-metallic gasket 03, a through hole is coaxially provided on the bottom wall of the countersunk hole, a threaded hole 1 is provided on the end cover 011, and a threaded hole 2 is provided on the inner wall of the pump casing body 010. One end of the bolt 1 04 is screwed into the threaded hole 1 after passing through the countersunk hole and the through hole on one non-metallic gasket 03 in sequence, and one end of the bolt 2 05 is screwed into the threaded hole 2 after passing through the countersunk hole and the through hole on another non-metallic gasket 03 in sequence. The bolt heads of the bolt 1 04 and the bolt heads of the bolt 2 05 are respectively embedded in the corresponding countersunk holes. The two non-metallic gaskets 03 can be reliably fixed on the end cover 011 and the pump casing body 010 respectively, and at the same time, the bolt heads of the bolt 1 04 and the bolt heads of the bolt 2 05 will not contact the vortex pump impeller 02, thereby avoiding the generation of metal debris.

[0039] More specifically, it also includes a magnetic transmission assembly, which includes a connecting shell 1 06, a sealing sleeve 07, a mounting tube 08, a bearing 1 09, a rotating shaft 10, a mounting wheel 11, a magnet block 12, a connecting shell 2 13, a rotating shaft 2 14, a mounting tube 15 and a magnet block 2 16;

[0040] The two ends of the connecting shell 06 are open, one end of the sealing sleeve 07 is open and the other end is closed, one end of the connecting shell 06 is fixed to the pump shell body 010, and the other end of the connecting shell 06 is sealed and fixed to the open end of the sealing sleeve 07;

[0041] The mounting tube 08 is located in the connecting shell 06, one end of the mounting tube 08 is fixed to the pump shell body 010, and a plurality of bearings 09 are coaxially and tightly embedded inside the mounting tube 08. The bearings 09 in this embodiment are sliding bearings;

[0042] The pump housing body 010 is opened with a rotating shaft 10 inserted therein, one end of the rotating shaft 10 is coaxially fixed with the vortex pump impeller 02, and the other end of the rotating shaft 10 is coaxially fixed with the mounting wheel 11 after coaxially passing through a plurality of bearings 09, the mounting wheel 11 is coaxially arranged in the sealing sleeve 07, a plurality of magnet blocks 12 are evenly fixed on the outer side wall of the mounting wheel 11 in the circumferential direction, and there is a gap between the magnet block 12 and the inner side wall of the sealing sleeve 07;

[0043] One end of the connecting shell 13 is open, and the open end of the connecting shell 13 is sealed and fixed with one end of the sealing sleeve 07 provided with the connecting shell 1 06. A rotating shaft 14 is rotatably supported inside the connecting shell 13. The rotating shaft 14 is coaxially arranged with the rotating shaft 10. One end of the rotating shaft 14 is located outside the connecting shell 13, and the other end of the rotating shaft 14 is coaxially fixed with the mounting cylinder 15; the mounting cylinder 15 is located on the inner side of the connecting shell 13, and the sealing sleeve 07 is coaxially limited on the inner side of the mounting cylinder 15. A plurality of magnet blocks 16 are evenly fixed on the inner side wall of the mounting cylinder 15 in the circumferential direction, and there is a magnet block 16 between the magnet block 16 and the outer side wall of the sealing sleeve 07. The plurality of magnet blocks 12 and the plurality of magnet blocks 2 16 are respectively positioned opposite to each other, the magnet blocks 12 and the magnet blocks 2 16 have opposite magnetic properties, and the plurality of magnet blocks 12 and the plurality of magnet blocks 2 16 are respectively magnetically attracted to each other, and the end of the rotating shaft 2 14 located outside the connecting shell 2 13 can be connected to the rotating output end of the external power source by transmission. Specifically, the end of the rotating shaft 2 14 located outside the connecting shell 2 13 can be equipped with a driven gear or a driven pulley, and the rotating output end of the external power source can be correspondingly equipped with a driving gear or a driving pulley, the driven gear is meshed with the driving gear, and the driven pulley and the driving pulley are equipped with a pair of belts together;

[0044] The rotating shaft 14 can drive the installation cylinder 15 to rotate. When the installation cylinder 15 rotates, it can drive the multiple magnet blocks 16 to rotate. When the multiple magnet blocks 16 rotate around the rotating shaft 14, the multiple magnet blocks 12 will also be driven by the magnet blocks 16, thereby realizing the rotation of the installation wheel 11. When the installation wheel 11 rotates, it will drive the rotating shaft 10 to rotate, thereby realizing the rotation of the vortex pump impeller 02. Since the mounting tube 08, the bearing 09, the mounting wheel 11 and the magnet block 12 are all located in the sealing area jointly defined by the pump casing body 010, the connecting casing 06 and the sealing sleeve 07, therefore, when the rotating shaft 14 drives the vortex pump impeller 02 to rotate, external impurities will not enter the pump casing body 010.

[0045] There are two bearings 09 in the present application, and the two bearings 09 are arranged close to the two ends of the mounting tube 08 respectively. The bearings 09 can provide reliable rotation support for the rotating shaft 10.

[0046] To be more specific, the magnetic transmission assembly also includes a bearing 17, and the connecting shell 13 includes a shell 130 and a shell 131. Both ends of the shell 130 are open, one end of the shell 130 is sealed and fixed to one end of the connecting shell 06 provided with a sealing sleeve 07, and the other end of the shell 130 is sealed and fixed to one end of the shell 131. The mounting tube 15 is located on the inner side of the shell 130, and the bearing 17 is tightly embedded in the shell 131. A rotating shaft 14 is coaxially and tightly penetrated in the inner ring of the bearing 17. One end of the rotating shaft 14 is coaxially fixed to the mounting tube 15 after passing through the shell 131, and the other end of the rotating shaft 14 can be connected to the rotating output end of the external power source after passing through the shell 131. There are multiple bearings 17, and the multiple bearings 17 are arranged in sequence along the length direction of the rotating shaft 14. There are two bearings 17 in this embodiment. The above design ensures that the rotating shaft 14 and the mounting tube 15 can be reliably arranged.

[0047] When the vortex pump is in operation:

[0048] First, start the external cooling source to circulate the refrigerant in the cooling chamber 0110 for a period of time, that is, pre-cool the pump housing 01 to prevent the liquid electronic gas from being gasified in the pump housing 01 when the liquefied electronic gas is transported;

[0049] Secondly, after a period of time has passed since the pre-cooling of the pump housing 01 was started, the external power source is started, and the external power source starts to drive the vortex pump impeller 02 to rotate, thereby starting to pump the liquid electronic gas.

[0050] The present application is suitable for continuous operation under the working condition of 0.1-2.5MPa pressure difference. The pumping flow rate is adjusted by adjusting the speed of the vortex pump impeller 02. The flow control range of the vortex pump in the present application is 1-40m 3 / h, the lift is 5-150m, and the temperature range of the transported medium is 0℃ to -196℃, where the medium refers to electronic gas.

[0051] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0052] The above description of the disclosed embodiments enables one skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to one skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A vortex pump for conveying liquefied high-purity electronic gas, characterized in that: include: A pump housing (01), a vortex pump impeller (02) and a non-metallic gasket (03), wherein the vortex pump impeller (02) is rotatably supported in the pump housing (01), and the vortex pump impeller (02) can be transmission-connected to the rotation output end of an external power source; the pump housing (01) is provided with a liquid inlet (0100) and a liquid outlet (0101) which are connected to the interior thereof, and the axis of the vortex pump impeller (02) is located between the liquid inlet (0100) and the liquid outlet (0101); two non-metallic gaskets (03) are coaxially provided, and the vortex pump impeller (02) is arranged between the two non-metallic gaskets (03); the vortex pump impeller (02) and the non-metallic gasket (03) are coaxially arranged, and the two non-metallic gaskets (03) are coaxially arranged. One end wall of the ring (03) is tightly fixed to the inner wall of the pump housing (01), and the other end wall of the two non-metallic gaskets (03) each has a gap with the two end walls of the vortex pump impeller (02), and the blades of the vortex pump impeller (02), the liquid inlet (0100) and the liquid outlet (0101) are all located outside the area surrounded by the non-metallic gaskets (03); a cooling cavity (0110) is provided on the shell wall of the pump housing (01), and a connection port 1 (0111) and a connection port 2 (0112) connected to the cooling cavity (0110) are provided on the pump housing (01), and the connection port 1 (0111) and the connection port 2 (0112) are respectively connected to the refrigerant outflow port and the refrigerant return port of an external refrigeration source.

2. A vortex pump for conveying liquefied high-purity electronic gas according to claim 1, characterized in that: The pump casing (01) comprises a pump casing body (010) and an end cover (011); one end of the pump casing body (010) is open and is detachably sealed with the end cover (011); the pump casing body (010) is provided with a liquid inlet (0100) and a liquid outlet (0101) which are connected to the interior thereof; the vortex pump impeller (02) is rotatably supported inside the pump casing body (010); the two non-metallic gaskets (03) are respectively fixed to the end cover (011) and the pump casing body (010); the cooling cavity (0110), the first connection port (0111) and the second connection port (0112) are integrally formed on the end cover (011).

3. A vortex pump for conveying liquefied high-purity electronic gas according to claim 2, characterized in that: A countersunk hole is provided on the end face of the non-metallic gasket (03), a through hole is coaxially provided on the bottom wall of the countersunk hole, a threaded hole 1 is provided on the end cover (011), and a threaded hole 2 is provided on the inner wall of the pump casing body (010), one end of bolt 1 (04) is screwed into the threaded hole 1 after passing through the countersunk hole and the through hole on one non-metallic gasket (03) in sequence, one end of bolt 2 (05) is screwed into the threaded hole 2 after passing through the countersunk hole and the through hole on another non-metallic gasket (03) in sequence, and the bolt head of bolt 1 (04) and the bolt head of bolt 2 (05) are respectively embedded in the corresponding countersunk holes.

4. A vortex pump for conveying liquefied high-purity electronic gas according to claim 2, characterized in that: It also includes a magnetic transmission component, which includes a connecting shell (06), a sealing sleeve (07), a mounting tube (08), a bearing (09), a rotating shaft (10), a mounting wheel (11), a magnet block (12), a connecting shell (13), a rotating shaft (14), a mounting tube (15) and a magnet block (16), wherein both ends of the connecting shell (06) are open, one end of the sealing sleeve (07) is open and the other end is closed, one end of the connecting shell (06) is fixed to the pump casing body (010), and the other end of the connecting shell (06) is sealed and fixed to the open end of the sealing sleeve (07); the mounting tube (08) is located in the connecting shell (06), one end of the mounting tube (08) is fixed to the pump shell body (010), and a plurality of the bearings (09) are coaxially and tightly embedded inside the mounting tube (08); the pump shell body (010) has an opening and is provided with the rotating shaft (10), one end of the rotating shaft (10) is coaxially fixed to the vortex pump impeller (02), and the other end of the rotating shaft (10) is coaxially fixed to the mounting wheel (11) after coaxially passing through a plurality of the bearings (09), and the mounting wheel (11) is coaxially arranged in the sealing sleeve (07), and the outer wall of the mounting wheel (11) is circumferentially A plurality of magnet blocks 1 (12) are evenly fixed, and a gap is formed between the magnet block 1 (12) and the inner wall of the sealing sleeve (07); one end of the connecting shell 2 (13) is open, and the open end of the connecting shell 2 (13) is sealed and fixed to one end of the connecting shell 1 (06) provided with the sealing sleeve (07); the connecting shell 2 (13) internally supports the rotating shaft 2 (14), and the rotating shaft 2 (14) is coaxially arranged with the rotating shaft 1 (10), one end of the rotating shaft 2 (14) is located outside the connecting shell 2 (13), and the other end of the rotating shaft 2 (14) is coaxially fixed with the mounting tube (15); The mounting tube (15) is located on the inner side of the second connecting shell (13), the sealing sleeve (07) is coaxially limited on the inner side of the mounting tube (15), a plurality of the second magnet blocks (16) are evenly fixed on the inner side wall of the mounting tube (15) in the circumferential direction, a gap is provided between the second magnet block (16) and the outer side wall of the sealing sleeve (07), the plurality of the first magnet blocks (12) and the plurality of the second magnet blocks (16) are respectively positioned opposite to each other, the magnet blocks (12) and the second magnet blocks (16) have opposite magnetic properties, and one end of the second rotating shaft (14) located on the outer side of the second connecting shell (13) can be transmission-connected to the rotating output end of an external power source.

5. A vortex pump for conveying liquefied high-purity electronic gas according to claim 4, characterized in that: Two bearings (09) are provided, and the two bearings (09) are arranged close to the two ends of the mounting tube (08) respectively.

6. A vortex pump for conveying liquefied high-purity electronic gas according to claim 4, characterized in that: The magnetic transmission assembly also includes a bearing 2 (17). The connecting shell 2 (13) includes a shell 1 (130) and a shell 2 (131). The shell 1 (130) has openings at both ends. One end of the shell 1 (130) is sealed and fixed to one end of the connecting shell 1 (06) provided with the sealing sleeve (07). The other end of the shell 1 (130) is sealed and fixed to one end of the shell 2 (131). The mounting tube (15) is located on the inner side of the shell 1 (130). The bearing 2 (17) is tightly embedded in the shell 1 (130). The second rotating shaft (14) is installed inside the second housing (131), and the second rotating shaft (14) is coaxially and tightly penetrated in the inner ring of the second bearing (17). One end of the second rotating shaft (14) is coaxially fixed with the mounting tube (15) after passing through the second housing (131), and the other end of the second rotating shaft (14) can be connected to the rotation output end of the external power source after passing through the second housing (131). There are multiple second bearings (17), and the multiple second bearings (17) are arranged in sequence along the length direction of the second rotating shaft (14).

7. A vortex pump for conveying liquefied high-purity electronic gas according to claim 1, characterized in that: The end surface of the non-metallic gasket (03) is parallel to the end wall of the vortex pump impeller (02).

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