A power module cleaning device

Abstract

This invention provides a power module cleaning device, comprising: a base plate with vertically arranged electrode plates fixed at both ends; a vertical plate with a support plate fixedly arranged on it, the vertical plate being fixedly connected to the base plate; a transfer frame with grooves matching the power module; and a clamping assembly for forming a clamping position with the support plate to hold the power module. The beneficial effects of this invention are: by generating a horizontal plasma flow through the vertically arranged electrode plates, and by clamping the power module with the clamping assembly and then removing it from the transfer frame, the power module is better exposed to the plasma flow, thus improving the cleaning effect.

Description

Technical Field

[0001] This invention belongs to the field of semiconductor processing technology, and in particular relates to a power module cleaning device. Background Technology

[0002] The power module production process requires the use of a power module cleaning device to clean the surface of the power module. When the two electrode plates are placed vertically, a horizontal plasma flow is generated during operation. In order to facilitate the rapid cleaning of multiple power modules, multiple power modules are usually transferred through a transfer frame. After cleaning, the transfer frame is used to transfer multiple power modules. The horizontal plasma flow is blocked by the frame, resulting in low cleaning efficiency. Summary of the Invention

[0003] In view of this, the present invention aims to provide a power module cleaning device in order to solve at least one of the above-mentioned technical problems.

[0004] To achieve the above objectives, the technical solution of the present invention is implemented as follows:

[0005] A power module cleaning device, comprising:

[0006] A base plate, wherein vertically arranged electrode plates are fixed at both ends of the base plate;

[0007] A vertical plate, on which a support plate is fixedly mounted, and the vertical plate is fixedly connected to the base plate;

[0008] A transfer frame, wherein the transfer frame has grooves that match the power module;

[0009] A clamping assembly, which is used to form a clamping position for clamping the power module with the support plate.

[0010] Furthermore, the clamping assembly includes a sliding plate, and the upright plate has a strip-shaped hole that matches the sliding plate. The strip-shaped hole is vertically arranged, and the sliding plate is movably connected to the inside of the strip-shaped hole. A clamping plate is fixed on the sliding plate, and the clamping plate and the support plate form a clamping position for clamping the power module.

[0011] The skateboard is equipped with a drive component to move the skateboard.

[0012] Furthermore, the driving assembly includes a driving block, which is movably connected to the upright plate. A horizontal plate is fixed on the sliding plate, and a guide post is provided on the horizontal plate. A guide groove is opened on the driving block, and the guide post is installed inside the guide groove.

[0013] The guide groove includes an upper horizontal guide groove and a lower horizontal guide groove. The upper and lower horizontal guide grooves are connected at their ends near the transfer frame through a vertical guide groove. The lower horizontal guide groove is connected to the middle of the upper horizontal guide groove at its end away from the transfer frame through an oblique guide groove.

[0014] Furthermore, a first elastic piece is provided at one end of the inclined guide groove near the upper horizontal guide groove, and the end of the first elastic piece away from the transfer frame is fixedly connected to the drive block.

[0015] A second elastic plate is provided on the side wall of the lower end of the inclined guide groove near the lower horizontal guide groove, and the upper end of the second elastic plate is fixedly connected to the drive block.

[0016] Furthermore, a connecting rod is provided at one end of the drive block near the transfer frame, and a drive rod is fixed at one end of the connecting rod near the transfer frame. The diameter of the drive rod is larger than the diameter of the connecting rod. A mounting hole matching the diameter of the drive rod is opened on the upright plate. The diameter of the mounting hole matches the diameter of the drive rod. The drive rod is installed inside the mounting hole. An annular boss is fixed inside the end of the mounting hole away from the transfer frame. A compression spring is provided between the annular boss and the drive rod.

[0017] Furthermore, the connecting rod is threadedly connected to the drive block;

[0018] The end face of the drive block near the transfer frame is in contact with the upright plate.

[0019] Furthermore, a guide rod is fixedly provided on the upright plate, and a guide hole is opened on the horizontal plate, with the guide rod installed inside the guide hole;

[0020] The horizontal plate is fixedly installed on the end face of the slide away from the transfer frame.

[0021] Furthermore, the power module cleaning device also includes a support member, on which a receiving plate is fixedly mounted, and at the lower end of the support member a base is fixedly mounted.

[0022] Furthermore, the receiving plate has receiving slots corresponding to the power module.

[0023] Furthermore, the transfer frame has a strip-shaped through hole on its side.

[0024] Compared with the prior art, the power module cleaning device of the present invention has the following advantages:

[0025] The power module cleaning device of the present invention generates a horizontal plasma flow through a vertically arranged electrode plate. After the power module is clamped by the clamping component, it is removed from the transfer frame, so that the power module is better exposed to the plasma flow, thereby improving the cleaning effect. Attached Figure Description

[0026] The accompanying drawings, which form part of this invention, are used to provide a further understanding of the invention. The illustrative embodiments of the invention and their descriptions are used to explain the invention and do not constitute an undue limitation of the invention. In the drawings:

[0027] Figure 1 This is a three-dimensional structural diagram of the device described in an embodiment of the present invention;

[0028] Figure 2 This is a schematic diagram of the three-dimensional structure of the support member according to an embodiment of the present invention;

[0029] Figure 3 As described in the embodiments of the present invention Figure 2 Schematic diagram of the structure at point A in the middle;

[0030] Figure 4 This is a schematic diagram of the three-dimensional structure of the transfer frame according to an embodiment of the present invention;

[0031] Figure 5 This is a first-view three-dimensional structural diagram of the vertical board mounting slide according to an embodiment of the present invention;

[0032] Figure 6 This is a second-view three-dimensional structural diagram of the vertical board mounting slide according to an embodiment of the present invention;

[0033] Figure 7 This is a schematic cross-sectional view of the drive rod according to an embodiment of the present invention;

[0034] Figure 8 This is a schematic diagram of the three-dimensional structure of the vertical plate according to an embodiment of the present invention;

[0035] Figure 9 This is a schematic diagram of the three-dimensional structure of the skateboard according to an embodiment of the present invention;

[0036] Figure 10 This is a schematic diagram of the horizontal plate three-dimensional structure according to an embodiment of the present invention;

[0037] Figure 11 This is a schematic diagram of the installation state of the guide post and guide groove according to an embodiment of the present invention.

[0038] Explanation of reference numerals in the attached figures:

[0039] 1. Vertical plate; 2. Electrode plate; 3. Transfer frame; 4. Support component; 5. Drive rod; 6. Drive block; 7. Slide plate; 8. Horizontal plate; 9. Compression spring; 10. First elastic plate; 11. Second elastic plate; 101. Support plate; 102. Guide rod; 103. Mounting hole; 104. Strip hole; 201. Base plate; 301. Strip through hole; 302. Groove; 401. Receiving plate; 402. Receiving groove; 403. Base; 501. Connecting rod; 601. Upper horizontal guide groove; 602. Lower horizontal guide groove; 603. Vertical guide groove; 604. Inclined guide groove; 701. Clamping plate; 801. Guide hole; 802. Guide post. Detailed Implementation

[0040] It should be noted that, unless otherwise specified, the embodiments and features described in the present invention can be combined with each other.

[0041] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, are only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this invention, unless otherwise stated, "a plurality of" means two or more.

[0042] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art will understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0043] The present invention will now be described in detail with reference to the accompanying drawings and embodiments.

[0044] like Figures 1 to 11As shown, a power module cleaning device includes: a base plate 201, with vertically arranged electrode plates 2 fixed at both ends of the base plate 201; a vertical plate 1, with a support plate 101 fixed on the vertical plate 1, the number of support plates 101 being multiple, the multiple support plates 101 being evenly arranged along the height direction, the vertical plate 1 being fixedly connected to the base plate 201; a transfer frame 3, with grooves 302 matching the power module on the transfer frame 3, the grooves 302 corresponding to the support plates 101, each support plate 101 having two corresponding grooves 302, the grooves 302 being located on both sides of the inner end of the transfer frame 3; and a clamping assembly, the clamping assembly being used to form a clamping position for clamping the power module with the support plate 101.

[0045] The clamping assembly includes a slide plate 7, and a strip hole 104 matching the slide plate 7 is opened on the upright plate 1. The strip hole 104 is vertically arranged, and the slide plate 7 is movably connected to the inner side of the strip hole 104. A clamping plate 701 is fixed on the slide plate 7, and the clamping plate 701 and the support plate 101 form a clamping position for clamping the power module. The slide plate 7 is correspondingly provided with a drive assembly for driving the slide plate 7 to move.

[0046] The drive assembly includes a drive block 6, which is movably connected to the upright plate 1. A horizontal plate 8 is fixed on the slide plate 7, and a guide post 802 is provided on the horizontal plate 8. A guide groove is opened on the drive block 6, and the guide post 802 is installed inside the guide groove. The guide groove includes an upper horizontal guide groove 601 and a lower horizontal guide groove 602. The upper horizontal guide groove 601 and the lower horizontal guide groove 602 are connected at one end near the transfer frame 3 through a vertical guide groove 603. The lower horizontal guide groove 602 is connected to the middle end of the upper horizontal guide groove 601 through an oblique guide groove 604.

[0047] A first elastic piece 10 is provided at one end of the inclined guide groove 604 near the upper horizontal guide groove 601. The end of the first elastic piece 10 away from the transfer frame 3 is fixedly connected to the drive block 6. A second elastic piece 11 is provided on the side wall of the lower end of the inclined guide groove 604 near the lower horizontal guide groove 602. The upper end of the second elastic piece 11 is fixedly connected to the drive block 6.

[0048] A connecting rod 501 is provided at one end of the drive block 6 near the transfer frame 3. A drive rod 5 is fixed at one end of the connecting rod 501 near the transfer frame 3. The diameter of the drive rod 5 is larger than the diameter of the connecting rod 501. A mounting hole 103 matching the drive rod 5 is opened on the upright plate 1. The mounting hole 103 corresponds to the transfer frame 3. The diameter of the mounting hole 103 matches the diameter of the drive rod 5. The drive rod 5 is installed inside the mounting hole 103. An annular boss is fixed inside the end of the mounting hole 103 away from the transfer frame 3. A compression spring 9 is provided between the annular boss and the drive rod 5. The compression spring 9 plays a limiting role.

[0049] The connecting rod 501 is threadedly connected to the drive block 6; the end face of the drive block 6 near the transfer frame 3 is in contact with the upright plate 1, and the drive block 6 plays a limiting role.

[0050] A guide rod 102 is fixed on the upright plate 1, and a guide hole 801 is opened on the horizontal plate 8. The guide rod 102 is installed inside the guide hole 801. The guide rod 102 plays a guiding role in the movement of the slide plate 7, making the movement of the slide plate 7 more stable. The horizontal plate 8 is fixedly installed on the end face of the slide plate 7 away from the transfer frame 3.

[0051] To prevent plasma flow leakage, the device can be installed inside the enclosure.

[0052] In other embodiments, the power module cleaning device further includes a support member 4, on which multiple receiving plates 401 are fixedly mounted. Each support plate 101 corresponds to one receiving plate 401, and a base 403 is fixedly mounted at the lower end of the support member 4. The receiving plates 401 have receiving grooves 402 corresponding to the power modules, which position the power modules. A strip-shaped through hole 301 is formed on the side of the transfer frame 3, facilitating plasma passage and improving cleaning efficiency. The transfer frame 3 places the lower end face of one end of multiple power modules on the upper end face of the support plate 101, then moves the receiving grooves 402 on the receiving plates 401 of the support member 4 to align and insert the other end of the power modules, supporting the other end of the power modules. Finally, the transfer frame 3 is moved to expose the power modules to the plasma flow generated by the electrode plate 2.

[0053] Work process:

[0054] In this implementation, the power modules are inserted into the grooves 302 of the transfer frame 3 on both sides, and multiple power modules are inserted sequentially. Then, the transfer frame 3 moves towards the upright plate 1, and the lower end face of the power module contacts the upper end face of the support plate 101. The transfer frame 3 drives the drive rod 5 to move towards the drive plate. At this time, the guide post 802 is located at the end of the upper horizontal guide groove 601 away from the transfer frame 3. Figure 11 In the lower part of the diagram (at point a), when the guide post 802 moves along the upper horizontal guide groove 601 (during this process, the first elastic sheet 10 provides support to prevent the guide post 802 from falling into the inclined guide groove 604) to the vertical guide groove 603, the guide post 802 and the slide plate 7 move downwards, the clamping plate 701 and the support plate 101 clamp the power module, and then move away from the drive plate. Under the action of the compression spring 9, the drive plate resets, and the guide post 802 moves in the lower horizontal guide groove 602 (during this process, the second elastic sheet 11 deforms and the guide post 802 can pass through) to one end of the lower horizontal guide groove 602 away from the transfer frame 3 (e.g., ...). Figure 11 (Point b in the above image) Figure 11The arrows in the above figure indicate the direction of movement of the guide post 802. The description in this process is for the convenience of understanding that the guide rod 102 moves relative to the guide groove. In reality, the guide post 802 only moves up and down, and the drive plate only moves left and right.

[0055] Turn on the power of electrode plate 2 to emit plasma to clean the surface of the power module.

[0056] After cleaning, the groove 302 of the transfer frame 3 is aligned with both sides of the power module and inserted. Then, the transfer frame 3 moves towards the upright plate 1, and the transfer frame 3 drives the drive rod 5 to move towards the drive plate. At this time, the guide post 802 is located at the end of the lower horizontal guide groove 602 away from the transfer frame 3. Figure 11 (See Figure b in the upper middle section) When the guide post 802 moves along the lower horizontal guide groove 602 (during this process, the second elastic plate 11 provides support and guides the guide post 802 into the inclined guide groove 604), the guide post 802 moves upward within the inclined guide groove 604 under the guidance of the inclined guide groove 604 (driving the slide plate 7 upward, releasing the clamping plate 701 and support plate 101 from clamping the power module). The guide post 802 passes through the upper end of the inclined guide groove 604, causing the first elastic plate 10 to deform, allowing the guide post 802 to enter the upper horizontal guide groove 601. When the guide post 802 is not aligned with the vertical guide groove 603, the movement of the transfer frame 3 stops. Under the elastic force of the compression spring 9, the guide post 802 moves upward into the upper horizontal guide groove 601 away from the transfer frame 3 to complete the reset, facilitating continued use next time. Figure 11 The arrows in the lower middle diagram indicate the direction of movement of the guide post 802. The description in this process is for the convenience of understanding that the guide rod 102 moves relative to the guide groove. In reality, the guide post 802 only moves up and down, while the drive plate only moves left and right.

[0057] The process of pushing the transfer frame 3 can complete the clamping and unclamping functions, making the operation convenient and improving work efficiency.

[0058] A horizontal plasma flow is generated by the vertically arranged electrode plate 2. After the power module is clamped by the clamping assembly, it is removed from the transfer frame 3, so that the power module is better exposed to the plasma flow, thus improving the cleaning effect.

[0059] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the present invention, and they should all be covered within the scope of the claims and specification of the present invention.

[0060] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A power module cleaning device, characterized in that, include: A base plate (201) is provided with vertically arranged electrode plates (2) at both ends of the base plate (201); A vertical plate (1) is provided, on which a support plate (101) is fixedly mounted, and the vertical plate (1) is fixedly connected to the base plate (201); The transfer frame (3) has a groove (302) that matches the power module; A clamping assembly is provided, which is used to form a clamping position for clamping the power module with the support plate (101); the clamping assembly includes a sliding plate (7), and the upright plate (1) has a strip hole (104) that matches the sliding plate (7). The strip hole (104) is vertically arranged, and the sliding plate (7) is movably connected to the inside of the strip hole (104). A clamping plate (701) is fixed on the sliding plate (7), and the clamping plate (701) and the support plate (101) form a clamping position for clamping the power module. The slide plate (7) is provided with a drive assembly for driving the slide plate (7) to move; the drive assembly includes a drive block (6), the drive block (6) is movably connected to the upright plate (1), a horizontal plate (8) is fixed on the slide plate (7), a guide post (802) is provided on the horizontal plate (8), a guide groove is opened on the drive block (6), and the guide post (802) is installed on the inner side of the guide groove; The guide groove includes an upper horizontal guide groove (601) and a lower horizontal guide groove (602). The upper horizontal guide groove (601) and the lower horizontal guide groove (602) are connected at one end near the transfer frame (3) through a vertical guide groove (603). The lower horizontal guide groove (602) is connected to the middle of the upper horizontal guide groove (601) at one end away from the transfer frame (3) through an oblique guide groove (604). The oblique guide groove (604) is provided with a first elastic piece (10) at one end near the upper horizontal guide groove (601). The first elastic piece (10) is fixedly connected to the drive block (6) at one end away from the transfer frame (3). The lower end of the inclined guide groove (604) is provided with a second elastic plate (11) on the side wall near the lower horizontal guide groove (602). The upper end of the second elastic plate (11) is fixedly connected to the drive block (6). The drive block (6) is provided with a connecting rod (501) near the transfer frame (3). The connecting rod (501) is fixed with a drive rod (5) near the transfer frame (3). The diameter of the drive rod (5) is larger than the diameter of the connecting rod (501). The upright plate (1) is provided with a mounting hole (103) that matches the drive rod (5). The diameter of the mounting hole (103) matches the diameter of the drive rod (5). The drive rod (5) is installed inside the mounting hole (103). An annular boss is fixed inside the end of the mounting hole (103) away from the transfer frame (3). A compression spring (9) is provided between the annular boss and the drive rod (5).

2. The power module cleaning device according to claim 1, characterized in that: The connecting rod (501) is threadedly connected to the drive block (6); The drive block (6) is attached to the end face of the adjacent transfer frame (3) and the upright plate (1).

3. The power module cleaning device according to claim 2, characterized in that: A guide rod (102) is fixed on the upright plate (1), and a guide hole (801) is opened on the horizontal plate (8). The guide rod (102) is installed on the inner side of the guide hole (801). The horizontal plate (8) is fixedly installed on the end face of the slide plate (7) away from the transfer frame (3).

4. The power module cleaning device according to claim 1, characterized in that: The power module cleaning device also includes a support member (4), on which a receiving plate (401) is fixed, and a base (403) is fixed at the lower end of the support member (4).

5. The power module cleaning device according to claim 4, characterized in that: The receiving plate (401) has a receiving groove (402) corresponding to the power module.

6. The power module cleaning device according to claim 1, characterized in that: The transfer frame (3) has a strip-shaped through hole (301) on its side.

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