Reaction cavity scraper and reaction cavity

Abstract

The invention relates to the technical field of waste gas treatment, and provides a reaction cavity scraper and a reaction cavity, the scraper comprises a scraper mounting seat, a scraper assembly and a driving assembly, and a mounting space is formed in the scraper mounting seat; the scraper assembly comprises a scraper mounting part, an air inlet scraper plate and an inner wall scraper plate, and the scraper mounting part is rotationally arranged in the mounting space; the inner wall scraper plate is connected to the first side of the scraper mounting component and is suitable for abutting against the inner wall of a reaction chamber of the reaction chamber, and the air inlet scraper plate is connected to the second side of the scraper mounting component and is suitable for abutting against an air inlet of the reaction chamber; the driving assembly drives the scraper mounting component to rotate. The driving assembly drives the scraper mounting part on the scraper mounting seat to rotate so as to drive the air inlet scraper plate and the inner wall scraper plate on the scraper mounting part to rotate synchronously, the inner wall scraper plate removes dust accumulated on the inner wall of the reaction chamber, the air inlet scraper plate removes dust accumulated at an air inlet, and the working efficiency of the equipment is improved.

Description

Technical Field

[0001] The invention relates to the technical field of waste gas treatment, and in particular to a reaction chamber scraper and a reaction chamber. Background Art

[0002] With the rapid development of the pan-semiconductor industry, a large amount of waste gas (NF3, PH3, B2H6, SiH4, etc.) will inevitably be generated during the production process. Most of these waste gases are heavier than air. If they are discharged into the atmosphere, they will be deposited on the ground after spreading and reach a very high concentration, causing serious environmental pollution and endangering human health. If they encounter open flames or other ignition sources, they will cause fires or even explosions. In order to avoid the harm of waste gas to the human body and the environment, a waste gas treatment system is used to treat the waste gas in the pan-semiconductor production process.

[0003] During the use of the existing waste gas treatment system, dust is prone to block the reaction chamber, causing the system to stop running, thereby reducing the system's working efficiency. Summary of the invention

[0004] The invention provides a reaction chamber scraper and a reaction chamber, which are used to solve the defect in the prior art that dust easily blocks the reaction chamber and reduces the working efficiency.

[0005] The present invention provides a reaction chamber scraper, characterized by comprising: A scraper mounting seat, wherein the scraper mounting seat is annular and an installation space is formed inside the scraper mounting seat; The scraper assembly comprises a scraper mounting component, an air inlet scraper plate and an inner wall scraper plate, wherein the scraper mounting component is rotatably arranged in the mounting space, and the scraper mounting component is formed with an air passage; the inner wall scraper plate is connected to a first side of the scraper mounting component, and the inner wall scraper plate is suitable for abutting against an inner wall of a reaction chamber of a reaction chamber, and the air inlet scraper plate is connected to a second side of the scraper mounting component, and the air inlet scraper plate is suitable for abutting against an air inlet of the reaction chamber; The driving assembly is connected to the scraper mounting component to drive the scraper mounting component to rotate.

[0006] According to a reaction chamber scraper provided by the present invention, the scraper mounting component comprises a scraper mounting plate rotatably arranged in the mounting space, and the outer peripheral surface of the scraper mounting plate has transmission teeth; the driving assembly comprises: A driving member, arranged on the scraper mounting seat; A driving connecting rod, slidably disposed on the scraper mounting seat and connected to the output of the driving member; The first finger component has a first clamping portion that cooperates with the transmission tooth, and the driving member is used to drive the driving connecting rod to drive the first finger component to move, so as to push the scraper mounting plate to rotate in the positive direction.

[0007] According to a reaction chamber scraper provided by the present invention, the first finger component comprises: A first finger member, rotatably disposed on the driving connecting rod, wherein the first finger member has the first clamping portion; A first elastic member is disposed between the first finger member and the driving connecting rod. When the driving member pushes the scraper mounting plate to rotate in the forward direction, the first elastic member is used to make the first clamping portion fit against the transmission tooth.

[0008] A reaction chamber scraper provided according to the present invention further includes a limiting assembly arranged on the scraper mounting seat, wherein the limiting assembly is used to limit the reverse rotation of the scraper mounting plate.

[0009] According to a reaction chamber scraper provided by the present invention, the limiting component comprises: A limiting connecting rod is passed through the scraper mounting seat, and the limiting connecting rod and the driving connecting rod are arranged at intervals along the circumference of the scraper mounting seat; The second finger component includes a second finger component and a second elastic component. The second finger component is rotatably connected to the limiting connecting rod. The second finger component has a second clamping portion that cooperates with the transmission tooth. The second elastic component is arranged between the second finger component and the limiting connecting rod.

[0010] According to a reaction chamber scraper provided by the present invention, a first step surface is formed in the installation space, the scraper installation component further includes a spherical pressure-bearing piece arranged on the first step surface, the scraper installation plate is supported on the spherical pressure-bearing piece, and / or,

[0011] The scraper mounting component also includes a guide member arranged on the scraper mounting plate, and the guide member abuts against the inner annular surface of the scraper mounting seat.

[0012] According to a reaction chamber scraper provided by the present invention, the air inlet scraper plate includes a first scraper segment and a second scraper segment, the first scraper segment is arranged along the radial direction of the scraper mounting component, the second scraper segment is arranged at an end of the first scraper segment away from the center of the scraper mounting component, a first preset angle is formed between the first scraper segment and the second scraper segment, and an end of the second scraper segment away from the first scraper segment is away from the center of the scraper mounting component.

[0013] According to a reaction chamber scraper provided by the present invention, the air inlet scraper plates are multiple and circumferentially arranged.

[0014] According to a reaction chamber scraper provided by the present invention, the inner wall scraper plates are multiple and circumferentially arranged.

[0015] According to a reaction chamber scraper provided by the present invention, the ends of the plurality of inner wall scraper plates away from the scraper mounting component are connected through a scraper bottom ring.

[0016] The present invention also provides a reaction chamber, comprising a reaction body and any one of the reaction chamber scrapers described above; The reaction body is formed with a reaction chamber; The scraper mounting seat is arranged on the reaction body, and the inner wall scraper plate abuts against the inner wall of the reaction chamber, and the air inlet scraper plate abuts against the air inlet of the reaction chamber.

[0017] The reaction chamber scraper provided by the present invention is arranged on the reaction body through a scraper mounting seat. The driving component drives the scraper mounting component on the scraper mounting seat to rotate, so as to drive the air inlet scraper plate and the inner wall scraper plate on the scraper mounting component to rotate synchronously. The inner wall scraper plate removes dust accumulated on the inner wall of the reaction chamber, and the air inlet scraper plate removes dust accumulated at the air inlet, thereby avoiding shutdown caused by blockage of the reaction chamber and the air inlet, thereby improving the working efficiency of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0019] Figure 1 This is one of the structural schematic diagrams of the reaction chamber provided by the present invention.

[0020] Figure 2 This is one of the structural schematic diagrams of the reaction chamber scraper provided by the present invention.

[0021] Figure 3 This is the second structural schematic diagram of the reaction chamber scraper provided by the present invention.

[0022] Figure 4 yes Figure 2 AA section view.

[0023] Figure 5 yes Figure 4 Schematic diagram of the local enlarged structure at point B.

[0024] Figure 6 It is a schematic structural diagram of the cooperation between the scraper assembly and the drive assembly provided by the present invention.

[0025] Figure 7It is a structural schematic diagram of the driving assembly provided by the present invention.

[0026] Figure 8 It is one of the structural schematic diagrams of the reaction entity provided by the present invention.

[0027] Fig. 9 This is the second structural schematic diagram of the reaction entity provided by the present invention.

[0028] Fig.10 yes Fig. 9 CC section view.

[0029] Fig.11 This is one of the structural schematic diagrams of the torch mounting flange provided by the present invention.

[0030] Fig.12 This is the second structural schematic diagram of the torch mounting flange provided by the present invention.

[0031] Fig.13 yes Fig.12 DD section view.

[0032] Fig.14 It is a schematic diagram of the cross-sectional structure of the flare mounting flange provided by the present invention.

[0033] Fig.15 It is a structural schematic diagram of the cooperation between the air intake scraper mechanism and the air intake pipeline provided by the present invention.

[0034] Fig.16 It is a cross-sectional schematic diagram of the cooperation between the air intake scraper mechanism provided by the present invention and the air intake pipeline.

[0035] Fig.17 It is a structural schematic diagram of the guide assembly provided by the present invention.

[0036] Fig.18 It is a structural schematic diagram of the flexible scraper provided by the present invention.

[0037] Fig.19 yes Fig.16 Schematic diagram of the local enlarged structure at E.

[0038] Reference numerals: 100. Air intake pipe; 110. Negative pressure detection port; 210, guide assembly; 211, first guide tube; 212, second guide tube; 213, elbow; 220, flexible scraper; 221, scraper section of detection port; 222, flexible section; 223, connecting section; 230, driving component; 231, driving cylinder; 2311, piston rod; 232, cylinder connecting sleeve; 240, second connecting ferrule; 241, scraper connecting rod; 250, first connecting ferrule; 251, pressure detection port; 300, reaction chamber scraper; 310, scraper mounting seat; 311, mounting space; 312, first step surface; 320, scraper assembly; 321, scraper mounting component; 3211, scraper mounting plate; 32111, first ring plate; 32112, second ring plate; 32113, connecting plate; 3212, spherical pressure-bearing member; 3213, guide member; 322, air inlet scraper plate; 3221, first scraper segment; 3222, second scraper segment; 323, inner wall scraper plate; 324, scraper bottom ring; 330, drive assembly; 331, drive member; 332, drive connecting rod; 333, first finger member; 3331, first finger member; 3332, first elastic member; 334, guide column; 340, limit assembly; 341, limit connecting rod; 342, second finger member; 400, reaction body; 410, reaction chamber; 420, inner cavity; 430, outer cavity; 440, upper flange; 450, lower flange; 460, sealed cavity; 470, upper tube; 480, lower tube; 490, insulation layer; 500, torch mounting flange; 510, torch component; 511, torch mounting base; 512, torch; 5122, flame pipe; 513, first inert gas channel; 514, first inert gas pipe; 520, flange body; 521, flange plate; 5211, first partition plate; 522, upper cover plate; 5221, second partition plate; 523, through hole; 524, reaction gas channel; 526, second inert gas channel; 527, second inert gas pipe; 528, reaction gas pipe; 530, orifice plate component; 531, outer orifice plate; 532, inner orifice plate; 533, rock wool; 540, air inlet pipe. DETAILED DESCRIPTION

[0039] The following embodiments of the present invention are described in further detail in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0040] In the description of the embodiments of the present invention, it should be noted that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the embodiments of the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as limitations on the embodiments of the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0041] In the description of the embodiments of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present invention can be understood according to specific circumstances.

[0042] In the embodiments of the present invention, unless otherwise clearly specified and limited, the first feature being "above" or "below" the second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "above" and "above" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0043] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the embodiment of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0044] Combine the following Figure 1-Figure 14 The reaction chamber of the present invention is described.

[0045] The embodiment of the present invention provides a reaction chamber, such as Figure 1 As shown, the reaction chamber includes a reaction body 400 and a reaction chamber scraper 300. The reaction chamber scraper 300 is used to remove dust accumulated inside the reaction chamber to protect the reaction chamber from being blocked.

[0046] like Figures 2 to 4As shown, the reaction chamber scraper 300 includes a scraper mounting seat 310, a scraper assembly 320 and a driving assembly 330. The scraper mounting seat 310 is annular, and an installation space 311 is formed inside the scraper mounting seat 310; the scraper assembly 320 includes a scraper mounting component 321, an air inlet scraper plate 322 and an inner wall scraper plate 323. The scraper mounting component 321 is rotatably arranged in the installation space 311, and the scraper mounting component 321 is formed with an air passage; the inner wall scraper plate 323 is connected to a first side of the scraper mounting component 321, and the inner wall scraper plate 323 is suitable for abutting against the inner wall of the reaction chamber 410 of the reaction chamber, and the air inlet scraper plate 322 is connected to a second side of the scraper mounting component 321, and the air inlet scraper plate 322 is suitable for abutting against the air inlet of the reaction chamber; the driving assembly 330 is connected to the scraper mounting component 321 to drive the scraper mounting component 321 to rotate.

[0047] It can be understood that the reaction chamber includes a reaction body 400, a reaction chamber 410 is formed inside the reaction body 400, an air inlet connected to the reaction chamber 410 is formed at the upper part of the reaction chamber, a scraper mounting seat 310 is arranged on the reaction body 400, a scraper assembly 320 is rotatably mounted in the installation space 311 inside the scraper mounting seat 310, and a driving assembly 330 is connected to the scraper mounting component 321 to drive the scraper mounting component 321 to rotate, thereby driving the air inlet scraper plate 322 and the inner wall scraper plate 323 on the scraper mounting component 321 to rotate; during the rotation of the inner wall scraper plate 323, dust accumulated on the inner wall of the reaction chamber 410 is removed; during the rotation of the air inlet scraper plate 322, dust accumulated at the air inlet is removed, thereby avoiding blockage of the reaction chamber 410 and the air inlet, thereby improving work efficiency.

[0048] The reaction chamber scraper provided in the embodiment of the present invention is set on the reaction body 400 through the scraper mounting seat 310, and the driving component 330 drives the scraper mounting component 321 on the scraper mounting seat 310 to rotate, so as to drive the air inlet scraper plate 322 and the inner wall scraper plate 323 on the scraper mounting component 321 to rotate synchronously, and the inner wall scraper plate 323 removes the dust accumulated on the inner wall of the reaction chamber 410, and the air inlet scraper plate 322 removes the dust accumulated at the air inlet, thereby avoiding shutdown caused by blockage of the reaction chamber 410 and the air inlet, thereby improving the working efficiency of the equipment.

[0049] In one embodiment of the present invention, Figure 3 and Figure 5 As shown, the scraper mounting component 321 includes a scraper mounting plate 3211 rotatably disposed in the mounting space 311 , and the outer peripheral surface of the scraper mounting plate 3211 has transmission teeth, which are driven to rotate by the driving assembly 330 to realize the rotation of the scraper mounting plate 3211 .

[0050] Optional, such as Figure 6 and Figure 7As shown, the driving assembly 330 includes a driving member 331, a driving connecting rod 332 and a first finger component 333: the driving member 331 is arranged on the scraper mounting seat 310; the driving connecting rod 332 is slidably arranged on the scraper mounting seat 310 and is connected to the output of the driving member 331; the first finger component 333 has a first clamping portion that cooperates with the transmission tooth, and the driving member 331 is used to drive the driving connecting rod 332 to drive the first finger component 333 to move, so as to promote the scraper mounting plate 3211 to rotate in the forward direction.

[0051] It can be understood that the output of the driving member 331 is connected to the first end of the driving link 332, and the first finger component 333 is arranged at the second end of the driving link 332. The driving member 331 drives the driving link 332 to reciprocate close to the scraper mounting plate 3211 or away from the scraper mounting plate 3211, so as to drive the first finger component 333 to reciprocate; in the process of the driving link 332 moving from a position away from the scraper mounting plate 3211 to a position close to the scraper mounting plate 3211, the first finger component 333 pushes the scraper mounting plate 3211 to rotate forward; in this way, the driving link 332 is driven to reciprocate continuously by the driving member 331 to realize the forward rotation of the scraper mounting plate 3211.

[0052] Furthermore, the first finger component 333 includes a first finger component 3331 and a first elastic component 3332. The first finger component 3331 is rotatably arranged on the driving connecting rod 332, and the first finger component 3331 has a first clamping portion that is clamped with the transmission tooth; the first elastic component 3332 is arranged between the first finger component 3331 and the driving connecting rod 332, and the first elastic component 3332 is used to make the first clamping portion fit with the transmission tooth.

[0053] It can be understood that the first finger member 3331 is rotatably arranged at the second end of the driving connecting rod 332 through a pin shaft, and the elastic member is sleeved on the pin shaft. One end of the elastic member is limited to the first finger member 3331, and the other end of the elastic member is limited to the driving connecting rod 332; the driving member 331 pushes the scraper mounting plate 3211 to rotate forward, and under the action of the first elastic member 3332, the first finger member 3331 is always in contact with the transmission tooth.

[0054] For example, the driving member 331 is a driving cylinder, the scraper mounting seat 310 and the driving cylinder have a cylinder mounting island at the corresponding position, the driving cylinder is mounted on the cylinder mounting island, a sealing gasket is arranged between the driving cylinder and the cylinder mounting island, the driving connecting rod 332 is slidably arranged in the scraper mounting seat 310, and is connected to the output of the driving cylinder; the first elastic member 3332 is a torsion spring. Among them, the sealing gasket material can be selected from high temperature and corrosion resistant materials, such as Teflon or graphite sealing gaskets.

[0055] The working principle of the driving assembly 330 is as follows: the driving cylinder drives the driving connecting rod 332 to move back and forth, and the driving torsion spring presses the first finger piece 3331 onto the transmission teeth on the outer peripheral surface of the scraper mounting plate 3211. The first finger piece 3331 is driven back and forth by the driving cylinder to push the scraper mounting plate 3211 forward to achieve positive rotation. It should be noted that the torsion spring acts to keep the first clamping portion of the first finger piece 3331 attached to the transmission tooth surface of the scraper mounting plate 3211 during the process of driving the first finger piece 3331 to move, so as to prevent the first finger piece 3331 from being separated from the transmission teeth of the scraper mounting plate 3211, resulting in the scraper mounting plate 3211 not moving.

[0056] Furthermore, a guide groove is provided on the driving connecting rod 332, and a guide column 334 is slidably provided on the guide groove. The guide column 334 can be connected to the torch mounting flange 500 above the reaction body 400. Through the cooperation between the guide groove and the guide column 334, a guiding function is provided for the reciprocating movement of the driving connecting rod 332; and the guide column 334 prevents the driving connecting rod 332 from rotating.

[0057] In an optional embodiment of the present invention, Figure 3 and Figure 6 As shown, the reaction chamber scraper further includes a limiting assembly 340 disposed on the scraper mounting seat 310 , and the limiting assembly 340 is used to limit the reverse rotation of the scraper mounting plate 3211 .

[0058] Optionally, the limiting assembly 340 may adopt a structure similar to that of the driving assembly 330 , except that the driving connecting rod 332 is fixed in position and the limiting assembly 340 does not have the driving member 331 .

[0059] Specifically, the limiting assembly 340 includes a limiting link 341 and a second finger component 342. The limiting link 341 is inserted through the scraper mounting seat 310 and fixed to the scraper mounting seat 310 through a connecting component. The limiting link 341 and the driving link 332 are arranged at intervals along the circumference of the scraper mounting seat 310. The second finger component 342 includes a second finger piece and a second elastic piece. The second finger piece is rotatably connected to the limiting link 341, and the second finger piece has a second clamping portion that cooperates with the transmission gear. The second elastic piece is arranged between the second finger piece 342 and the limiting link 341. It should be noted that the limiting assembly 340 can also use other ratchet mechanisms to prevent the scraper mounting plate 3211 from rotating in the opposite direction.

[0060] For example, the number of the limiting assembly 340 and the number of the driving assembly 330 are both one, and the limiting assembly 340 and the driving assembly 330 are symmetrically arranged; of course, in other embodiments, the number of the driving assembly 330 can be multiple, and the multiple driving assemblies 330 are preferably evenly distributed along the circumferential direction.

[0061] It should be noted that the scraper mounting seat 310 has a limit mounting island at a position corresponding to the limit assembly 340, and the limit connecting rod 341 is assembled on the limit mounting island and fixed by a connecting component, which can be a bolt, and the limit connecting rod 341 and the scraper mounting seat 310 are sealed by a sealing gasket, and the sealing gasket material can be selected from a high temperature and corrosion resistant material, such as Teflon or graphite sealing gaskets. A guide groove can be opened on the limit connecting rod 341, and a guide column 334 is slidably arranged on the guide groove to prevent the limit connecting rod 341 from rotating.

[0062] In one embodiment of the present invention, Figure 5 As shown, a first step surface 312 is formed in the installation space 311 , and the scraper installation component 321 further includes a spherical pressure-bearing member 3212 arranged on the first step surface 312 , and the scraper installation plate 3211 is supported on the spherical pressure-bearing member 3212 .

[0063] For example, the spherical pressure-bearing member 3212 can be a universal wheel, which is arranged circumferentially along the first step surface 312, and the scraper mounting plate 3211 is supported by the plurality of universal wheels; the universal wheels are used to prevent the scraper mounting plate 3211 from rubbing against the scraper mounting seat 310 to cause excessive resistance, thereby ensuring the normal operation of the scraper mounting plate 3211. It should be noted that the number and position of the universal wheels can be reasonably designed according to needs.

[0064] In one embodiment of the present invention, Figure 6 As shown, the scraper mounting plate 3211 includes a first ring plate 32111, a second ring plate 32112 coaxially arranged on the outside of the first ring plate 32111, and a connecting plate 32113 arranged between the first ring plate 32111 and the second ring plate 32112, the inner wall scraper plate 323 is vertically arranged on the second ring plate 32112, and the middle part of the air inlet scraper plate 322 is arranged on the connecting plate 32113.

[0065] Optionally, the connecting plates 32113 are arranged radially, and there are multiple connecting plates 32113 arranged circumferentially; preferably, multiple connecting plates 32113 are evenly distributed circumferentially. The number of air inlet scraper plates 322 matches the number of connecting plates 32113, and for example, the number of air inlet scraper plates 322 is equal to the number of connecting plates 32113; it should be noted that the number of air inlet scraper plates 322 can also be less than the number of connecting plates 32113.

[0066] It can be understood that the first ring plate 32111 corresponds to the flame pipe mounting hole of the flange body 520, the flame passes through the first ring plate 32111 and enters the reaction chamber 410 of the reaction body 400, and the first ring plate 32111 is the flame burning position. It should be noted here that the torch mounting flange 500 includes the flange body 520 and the torch component 510, the flame pipe mounting hole is the position on the flange body 520 where the torch component 510 is mounted, the torch component 510 generates flame when working, and the vacancy between the connecting plates 32113 serves as a gas passage, so that the scraper mounting plate 3211 formed by the first ring plate 32111, the second ring plate 32112, and the connecting plate 32113 in this embodiment can avoid the flame and does not interfere with the inflow of the gas at the air inlet.

[0067] Further, such as Figure 5 As shown, the scraper mounting component 321 further includes a guide member 3213 disposed on the scraper mounting plate 3211 , and the guide member 3213 abuts against the inner annular surface of the scraper mounting seat 310 .

[0068] Specifically, the second ring plate 32112 is provided with a plurality of guide members 3213 arranged circumferentially, and preferably, the plurality of guide members 3213 are uniformly distributed along the circumferential direction. In this embodiment, the guide members 3213 can be guide wheels, which are arranged on the second ring plate 32112 using roller shafts, and the outer circles of all guide wheels are tangent to the inner circle surface of the scraper mounting seat 310. The number of guide wheels can be adjusted according to the size and requirements of the scraper mounting plate 3211. The guide wheels are used to ensure that the scraper mounting plate 3211 is concentric with the reaction chamber 410, and then ensure that the inner wall scraper plate 323 rotates concentrically with the reaction chamber 410, so as to improve the cleaning effect of the reaction chamber 410.

[0069] In one embodiment of the present invention, Figure 6 As shown, the air inlet scraper plate 322 includes a first scraper segment 3221 , and the first scraper segment 3221 is arranged along the radial direction of the scraper mounting component 321 .

[0070] In the example, the first scraper segment 3221 is arranged on the connecting plate 32113; preferably, the air inlet scraper plate 322 also includes a second scraper segment 3222, and the second scraper segment 3222 is arranged at an end of the first scraper segment 3221 away from the center of the scraper mounting component 321, and there is a first preset angle between the first scraper segment 3221 and the second scraper segment 3222, and the end of the second scraper segment 3222 away from the first scraper segment 3221 is away from the center of the scraper mounting component 321, so that the air inlet scraper plate 322 is designed to be bent.

[0071] It can be understood that the scraper mounting plate 3211 drives the air inlet scraper plate 322 to rotate. When the air inlet scraper plate 322 scrapes off the dust at the air inlet, the dust is easily accumulated between the scraper mounting plate 3211 and the torch mounting flange, causing the air inlet scraper plate 322 to get stuck. The air inlet scraper plate 322 is bent at one end away from the center of the scraper mounting plate 3211. During the rotation of the air inlet scraper plate 322, the dust on the air inlet and the torch mounting flange can be scraped off and guided to the middle of the scraper mounting plate 3211 to push out the reaction chamber 410.

[0072] Furthermore, the first preset angle is 120-150°, preferably 135°.

[0073] In one embodiment of the present invention, Figure 3 As shown, there are multiple inner wall scraper plates 323 arranged circumferentially, and the number and size of the inner wall scraper plates 323 can be reasonably designed according to demand or the inner diameter of the reaction chamber 410; preferably, the multiple inner wall scraper plates 323 are evenly distributed circumferentially.

[0074] Furthermore, one end of the plurality of inner wall scraper plates 323 away from the scraper mounting component 321 is connected via a scraper bottom ring 324 , and the scraper bottom ring 324 is used to fix the plurality of inner wall scraper plates 323 to increase the overall strength of the inner wall scraper plates 323 .

[0075] like Figure 1 , Figure 3 and Figure 8 As shown, the reaction chamber includes a reaction body 400 and a reaction chamber scraper provided by any of the above embodiments; the reaction body 400 forms a reaction chamber 410; the scraper mounting seat 310 is arranged on the reaction body 400, and the inner wall scraper plate 323 abuts against the inner wall of the reaction chamber 410, and the air inlet scraper plate 322 abuts against the air inlet of the reaction chamber.

[0076] like Figures 8 to 10 As shown, the reaction body 400 includes an inner cavity 420 and an outer cavity 430 arranged outside the inner cavity 420, a sealed cavity 460 is formed between the inner cavity 420 and the outer cavity 430, a reaction chamber 410 is formed inside the inner cavity 420, and a medium inlet and a medium outlet are arranged on the outer cavity 430.

[0077] It is understandable that various media can be introduced into the sealed cavity 460 through the medium inlet as needed to cool, keep warm or increase the temperature of the reaction chamber 410. The medium introduced into the sealed cavity 460 can be liquid, gas or other media.

[0078] For example, when the temperature of the reaction chamber 410 needs to be lowered, cooling water can be introduced into the sealed cavity 460 through the medium inlet; if the internal temperature of the reaction chamber 410 needs to be protected, high-temperature steam can be introduced through the medium inlet. It should be noted here that when the exhaust gas is introduced into the reaction chamber 410 through the air inlet, the corrosive gas (such as fluoride) in the exhaust gas will corrode the inner wall of the inner cavity 420 at high temperature. The cooling water can reduce the temperature of the inner cavity 420, thereby reducing and slowing down the corrosion; when the temperature of the reaction chamber 410 is too high, the high temperature will cause the temperature outside the outer cavity 430 to be high. The cooling water can reduce the wall temperature of the outer cavity 430 to protect the safety of employees during equipment maintenance and inspection; in addition, when the reaction chamber 410 is partially treating the exhaust gas, a higher temperature is required to decompose the exhaust gas. By introducing high-temperature steam into the sealed cavity 460, the temperature of the reaction chamber 410 can be protected, heat loss can be reduced, and the temperature inside the cavity can be increased.

[0079] It should be noted that in the prior art, when the reaction chamber is in use, the waste gas enters the reaction chamber through the air inlet, and dust is prone to block the air inlet, causing the equipment to stop running, thereby affecting the working efficiency; and the treatment method for the dust blockage in the reaction chamber is to wash the reaction chamber with water, which will cause the temperature inside the reaction chamber to decrease, thereby reducing the processing efficiency. In addition, the reaction chamber after cooling cannot process the waste gas with high temperature requirements. The present invention installs a reaction chamber scraper on the reaction body 400, and drives the air inlet scraper plate 322 and the inner wall scraper plate 323 to rotate through the driving component 330 to remove the dust accumulated on the inner wall of the reaction chamber 410 and the dust accumulated at the air inlet, thereby avoiding the shutdown caused by the blockage of the reaction chamber 410 and the air inlet, extending the maintenance cycle, and thus improving the working efficiency of the equipment; and according to the waste gas treatment requirements, low-temperature and high-temperature gases are introduced into the sealed cavity 460 between the inner cavity 420 and the outer cavity 430 through the medium inlet to cool, keep warm or heat the reaction chamber 410, thereby improving the processing efficiency.

[0080] In this embodiment, Fig.10 As shown, the inner cavity 420 and the outer cavity 430 are both tubular, and the inner cavity 420 and the outer cavity 430 are respectively an inner tube and an outer tube, and the reaction body 400 also includes an upper flange 440 and a lower flange 450, the upper end of the inner cavity 420 and the upper end of the outer cavity 430 are connected to the upper flange 440, and the lower flange 450 is connected to the lower end of the inner cavity 420 and the lower end of the outer cavity 430.

[0081] Specifically, the upper flange 440 is provided with a slot for positioning the inner cavity 420 and the outer cavity 430. The upper flange 440 and the inner cavity 420, and the upper flange 440 and the outer cavity 430 can be connected by ISO calipers, and the connection method is convenient and fast; the lower flange 450 is also provided with a slot for positioning the inner cavity 420 and the outer cavity 430, and is also connected by ISO calipers.

[0082] The upper flange 440 and the lower flange 450 are both annular. The inner diameter of the lower flange 450 is smaller than the inner diameter of the inner tube to form an inner step at the lower part of the reaction chamber 410. The upper flange 440 has an O-ring groove and its inner diameter is the same as the inner diameter of the inner tube.

[0083] Preferably, the airflow directions of the medium inlet and the medium outlet are tangent to the sealed cavity 460 between the inner cavity 420 and the outer cavity 430 .

[0084] For example, an upper tube 470 is connected to the upper portion of the outer wall of the outer cavity 430 to serve as a medium inlet; a lower tube 480 is connected to the lower portion of the outer wall of the outer cavity 430 to serve as a medium outlet; the upper tube 470 and the lower tube 480 are arranged non-radially so that the medium can be quickly introduced or exported; preferably, the upper tube 470 and the lower tube 480 are arranged tangentially.

[0085] Further, the inner wall of the inner cavity 420 has a thermal insulation layer 490. For example, the reaction chamber 410 is equipped with a thermal insulation layer 490, which is installed on the inner step of the lower flange 450. The thermal insulation layer 490 can be a thermal insulation layer, and the thermal insulation layer uses a high temperature resistant thermal insulation material, such as aluminum silicate ceramic fiber, refractory bricks, etc.

[0086] In a specific embodiment of the present invention, Figure 1 As shown, the reaction chamber further includes a torch mounting flange 500 , the reaction chamber scraper is arranged on the reaction body 400 , the torch mounting flange 500 is arranged on the reaction chamber scraper, and the torch mounting flange 500 has an air inlet channel connected to the reaction chamber 410 .

[0087] It is understandable that gas is introduced into the reaction chamber 410 through the air inlet channel to perform reaction processing in the reaction chamber 410, and the inner wall scraper plate 323 of the reaction chamber scraper rotates along the inner wall of the reaction chamber 410 to remove dust accumulated on the inner wall of the reaction chamber 410. It should be noted here that the end of the air inlet channel close to the reaction chamber 410 serves as the air inlet, and during the rotation of the inner wall scraper plate 323, the air inlet scraper plate 322 of the reaction chamber scraper simultaneously removes dust accumulated on the air inlet.

[0088] Optional, such as Fig.11 and Fig.14As shown, the torch mounting flange 500 includes a flange body 520 and an air inlet pipe 540, wherein the flange body 520 is configured with an air inlet channel; the air inlet channel includes a through hole 523 and a reaction gas channel 524, wherein the through hole 523 extends from the first side of the flange body to the second side, and one end of the air inlet pipe 540 is penetrated through the through hole 523 and is located on the first side of the flange body; the reaction gas channel 524 is provided with a reaction gas inlet on the first side of the flange body, and the reaction gas channel 524 is provided with an orifice plate component 530 on the second side of the flange body, and the orifice plate component 530 is used to allow the reaction gas to enter the reaction chamber 410 in a balanced manner; wherein the first side of the flange body is the side away from the reaction chamber 410, and the second side of the flange body is the side close to the reaction chamber 410. It should be noted that the end of the air inlet channel close to the reaction chamber 410 is used as the air inlet, that is, the end of the through hole 523 and the reaction gas channel 524 close to the reaction chamber 410 is used as the air inlet.

[0089] It can be understood that an exhaust gas channel is provided in the air inlet pipe 540, and the exhaust gas enters the reaction chamber 410 on the second side of the flange body through the exhaust gas channel and the through hole 523; at the same time, the reaction gas enters the reaction gas channel 524 through the reaction gas inlet, and is discharged by the orifice plate component 530 on the second side of the flange body, and the exhausted reaction gas gathers on the second side of the flange body; finally, the reaction gas contacts the exhaust gas in the reaction chamber 410 on the second side of the flange body, so that the exhaust gas reacts with the reaction gas in the reaction chamber 410, and the toxic and harmful substances in the exhaust gas are converted accordingly after the reaction, thereby completing the treatment of the exhaust gas.

[0090] In one embodiment of the present invention, Fig.12 and Fig.13 As shown, the flange body includes a flange plate 521 , which is a cavity structure with an opening at the lower end. The orifice plate component 530 is arranged at the opening position of the flange plate 521 , and a reaction gas channel 524 is formed between the orifice plate component 530 and the flange plate 521 .

[0091] In this embodiment, Figure 1 As shown, the outer circumference of the flange plate 521, the outer circumference of the scraper mounting seat 310, and the outer circumference of the upper flange 440 are of equal size.

[0092] like Figure 12 to Figure 14As shown, the flange body also includes an upper cover plate 522, and the upper cover plate 522, the flange plate 521, and the orifice plate component 530 are stacked from top to bottom. A second inert gas channel 526 is constructed between the flange plate 521 and the upper cover plate 522, and a second inert gas inlet is provided on the upper cover plate 522. The through hole 523 passes through the flange plate 521 and the upper cover plate 522 in sequence; the air inlet pipe 540 is welded on the upper cover plate 522 and passes through the flange plate 521 with a gap between the flange plate 521, so that a second inert gas outlet is formed between the outer wall of the air inlet pipe 540 and the flange plate 521; the second inert gas channel 526 is passed with inert gas to protect the air inlet pipe 540 from being blocked by dust accumulation. A second inert gas pipe 527 is installed on the upper cover plate 522, and the second inert gas pipe 527 serves as a second inert gas inlet.

[0093] It can be understood that the exhaust gas enters the second side of the flange body through the exhaust gas channel and the through hole 523. At the same time, the inert gas is introduced through the second inert gas inlet, and the inert gas enters the second inert gas channel 526 through the second inert gas inlet and is discharged from the second inert gas outlet. The inert gas discharged from the second inert gas outlet is mixed with the exhaust gas through the through hole 523, and the mixed gas enters the second side of the flange body through the through hole 523 to prevent the exhaust gas from contacting with the air and reacting in the exhaust gas channel or at the mouth of the intake pipe 540 to produce waste and dust, or to produce acidic substances that corrode the pipeline. Correspondingly, after the exhaust gas is mixed with the inert gas, the reaction gas enters the reaction gas channel 524 through the reaction gas inlet, and is discharged by the orifice plate component 530 on the second side of the flange body. The discharged reaction gas gathers on the second side of the flange body; finally, the reaction gas and the mixed gas (exhaust gas and inert gas) contact in the reaction chamber 410 on the second side of the flange body, so that the exhaust gas and the mixed gas react in the reaction chamber 410, and after the reaction, the toxic and harmful substances in the exhaust gas are converted accordingly, thereby completing the treatment of the exhaust gas.

[0094] Among them, according to the type of exhaust gas, the inert gas can be selected as nitrogen, argon or other rare gases.

[0095] like Fig.13 and Fig.14 As shown, the lower surface of the upper cover plate 522 has a second partition plate 5221 to separate the second inert gas channel 526 into a second inner circle cavity and a second outer circle cavity. The second partition plate 5221 is provided with an inert gas through hole connecting the second inner circle cavity and the second outer circle cavity. A plurality of second inert gas inlets are provided at positions corresponding to the upper cover plate 522 and the second outer circle cavity.

[0096] It is understandable that a plurality of air inlet pipes 540 are provided on the flange body, and the inert gas enters the second outer ring cavity through a plurality of second inert gas inlets, and after the inert gas is evenly distributed in the second outer ring cavity, enters the second inner ring cavity through the inert gas through hole, and then enters the reaction chamber 410 through the second inert gas outlet between the air inlet pipe 540 and the flange plate 521. In this way, it can be ensured that the outer wall of each air inlet pipe 540 is wrapped by the inert gas, so that the exhaust gas entering the reaction chamber 410 from the inside of the air inlet pipe 540 does not contact the gas reaction gas at the mouth of the air inlet pipe 540, preventing the formation of dust accumulation at the mouth to block the air inlet, thereby avoiding problems such as air inlet blockage. It should be noted here that the mouth of the air inlet pipe 540 is the end of the air inlet pipe 540 close to the reaction chamber 410.

[0097] Optional, such as Fig.13 As shown, the orifice plate component 530 includes an outer orifice plate 531, an inner orifice plate 532 and rock wool 533. The outer orifice plate 531 is arranged at the opening position of the flange body. The outer orifice plate 531 and the flange plate 521 form a reaction gas channel 524. The flange plate 521 has a reaction gas inlet. The inner orifice plate 532 is arranged on the side of the outer orifice plate 531 away from the flange body, and the rock wool 533 is arranged between the outer orifice plate 531 and the inner orifice plate 532.

[0098] It can be understood that the reaction gas enters the reaction gas channel 524 through the reaction gas inlet, flows out through the outer orifice plate 531 and then enters the rock wool 533, and enters the inner orifice plate 532 after the reaction gas is evenly distributed by the rock wool 533, and finally flows out to the reaction chamber 410 through the inner orifice plate 532.

[0099] Furthermore, the flange plate 521 has a first partition plate 5211 to divide the reaction gas channel 524 into a first inner circle cavity and a first outer circle cavity. The first partition plate 5211 is provided with a reaction gas through hole connecting the first inner circle cavity and the first outer circle cavity. The outer orifice plate 531 is provided with a first air vent at a position corresponding to the first inner circle cavity. The inner orifice plate 532 is provided with a second air vent at a position corresponding to the first inner circle cavity.

[0100] It can be understood that the upper cover plate 522 is arranged above the first inner ring cavity of the flange plate 521, and a reaction gas pipe 528 is installed at the position of the flange plate 521 corresponding to the first outer ring cavity, and the reaction gas pipe 528 serves as a reaction gas inlet; the reaction gas pipe 528 can be one, or multiple reaction gas pipes arranged circumferentially along the flange plate 521, and the reaction gas enters the first outer ring cavity through the reaction gas inlet, and the reaction gas enters the first inner ring cavity through the reaction gas through hole after being evenly distributed in the first outer ring cavity, and enters the rock wool 533 from the first vent hole of the outer hole plate 531, and the reaction gas is blocked and distributed by the rock wool 533. After being evenly distributed by the rock wool 533, the reaction gas enters the reaction chamber 410 through the second vent hole of the inner hole plate 532. It should be noted here that while the rock wool 533 blocks the reaction gas, it can allow the reaction gas to pass through the interior, and enter the second through hole 523 after being evenly distributed inside the rock wool 533.

[0101] It should be noted that the rock wool 533 is used to prevent dust from entering the reaction gas channel 524 formed by the flange plate 521 and the inner hole plate 532 in the reverse direction, and to balance the gas entering the reaction chamber 410 from the outer hole plate 531 (and at the same time, the dust in the reaction chamber 410 can be pressed downward). In addition, if some dust accumulates on the inner hole plate 532, the air inlet scraper plate 322 is driven to rotate, and the dust at the bottom of the entire inner hole plate 532 can be scraped off to prevent the dust accumulation on the inner hole plate 532 from clogging the air inlet.

[0102] In one embodiment of the present invention, the air intake pipe 540 includes a first air intake section and a second air intake section connected to each other, the second air intake section is passed through the flange body 520, and the cross-sectional size of the first air intake section gradually increases from an end close to the second air intake section to an end away from the second air intake section.

[0103] It is understandable that the air inlet pipe 540 is designed to be large at the top and small at the bottom, and a bell mouth is formed at the top of the air inlet pipe 540, and the exhaust gas flows in from the first air inlet section with a large mouth, and enters the reaction chamber 410 from the second air inlet section with a small mouth. It should be noted here that the air inlet pipe 540 is designed to be large at the top and small at the bottom using the Bernoulli principle, so that the flow rate is high and the pressure is low, thereby reducing the accumulation of dust at the mouth of the air inlet pipe 540.

[0104] It should be noted that the air inlet of the air inlet pipe 540 is inside the flange plate 521 and has a certain distance from the lower end surface of the flange plate 521, which can ensure that the exhaust gas contacts the inert gas first.

[0105] In one embodiment of the present invention, Fig.12 and Fig.13As shown, the torch component 510 is installed in the middle of the flange body 520; the torch component 510 includes a torch mounting seat 511 and a torch 512, the torch mounting seat 511 is installed on the flange body 520, and is located on the first side of the flange body; the flame pipe 5122 of the torch 512 is passed through the torch mounting seat 511, and a first inert gas channel 513 is formed between the outer wall of the flame pipe 5122 and the torch mounting seat 511, and the torch mounting seat 511 has a first inert gas inlet connected to the first inert gas channel 513.

[0106] Specifically, the torch mounting seat 511 is mounted on the upper cover plate 522, and the torch 512 is mounted on the torch mounting seat 511. There are sealing rings between the torch mounting seat 511 and the upper cover plate 522, and between the torch 512 and the torch mounting seat 511. The flame pipe 5122 of the torch 512 is inserted into the torch mounting seat 511 and the flange body 520. The flange body 520 has a flame pipe mounting hole for the flame pipe 5122 to pass through. The flame pipe 5122 and the flame pipe inserted into the torch mounting seat 511 are sealed. There is a gap between the flame duct 5122 and the flame duct mounting hole of the flange body 520, so that the outer wall of the flame duct 5122, the torch mounting seat 511, and the inner wall of the flame duct mounting hole form a first inert gas channel 513, and the outer wall of the torch mounting seat 511 is installed with a first inert gas pipe 514, the first inert gas pipe 514 serves as a first inert gas inlet, and the annular opening formed by the lower end of the flame duct 5122 and the lower end of the flame duct mounting hole serves as a first inert gas outlet.

[0107] It is understandable that the inert gas enters the upper portion of the first inert gas channel 513 formed by the torch mounting bracket 511 and the flame pipe 5122 through the first inert gas inlet, flows through the lower portion of the first inert gas channel 513 and flows out from the first inert gas outlet to the reaction chamber 410 .

[0108] It should be noted that in the prior art, long-term operation of the flare 512 may cause high-temperature shutdown or high-temperature damage, and exhaust gas corrosion. However, the present invention forms a first inert gas channel 513 on the outside of the flame pipe 5122 to protect the flame pipe 5122 of the flare 512 from being corroded by high temperature and exhaust gas, thereby increasing the service life and improving the equipment processing efficiency.

[0109] Further, such as Fig.12 As shown, there is a first angle between the center line of the first inert gas inlet and the radial direction of the flame duct 5122 .

[0110] It can be understood that the inert gas enters the first inert gas pipe 514 eccentrically and flows out in the first inert gas channel 513 in a rotation manner, thereby further improving the service life of the flame pipe 5122 and the equipment processing efficiency.

[0111] An embodiment of the present invention further provides an exhaust gas treatment device, comprising the reaction chamber scraper provided by any of the above embodiments, or comprising the reaction chamber provided by any of the above embodiments.

[0112] In one embodiment of the present invention, Fig.15 and Fig.16 As shown, the exhaust gas treatment device also includes an intake pipe 100 and an intake scraper mechanism. The intake pipe 100 is connected to one end of the first intake section away from the second intake section. The intake pipe 100 has a negative pressure detection port 110, and the intake scraper mechanism is connected to the negative pressure detection port 110.

[0113] Specifically, the air intake scraper mechanism includes a guide assembly 210, a flexible scraper 220 and a driving component 230; the guide assembly 210 is suitable for connecting to the negative pressure detection port 110; the flexible scraper 220 is passed through the guide assembly 210; the driving component 230 is connected to the flexible scraper 220, and the driving component 230 is suitable for driving the flexible scraper 220 to move toward or away from the negative pressure detection port 110 along the extension direction of the guide assembly 210.

[0114] Specifically, the driving component 230 drives the flexible scraper 220 to move toward the negative pressure detection port 110 to move to the first position, at which time the flexible scraper 220 extends into the negative pressure detection port 110 and pushes away the blockage at the negative pressure detection port 110; the driving component 230 drives the flexible scraper 220 to move away from the negative pressure detection port 110 to move to the second position, at which time the flexible scraper 220 is away from the negative pressure detection port 110, so that the driving component 230 drives the flexible scraper 220 to switch between the first position and the second position. In the first position, the flexible scraper 220 extends into the negative pressure detection port 110 and pushes the blockage to move; in the second position, the flexible scraper 220 is away from the negative pressure detection port 110.

[0115] It should be noted that during the normal operation of the exhaust gas treatment equipment, the flexible scraper 220 is in the second position; when the blocked negative pressure detection port 110 needs to be cleaned, the flexible scraper 220 is switched from the second position to the first position, and in the process of the flexible scraper 220 moving from the second position to the first position, the blockage in the negative pressure detection port 110 is cleared.

[0116] It can be understood that the flexible scraper 220 is connected to the negative pressure detection port 110 of the air intake pipe 100 through the guide component 210, and moves along the extension direction of the guide component 210 to realize reciprocating movement between the first position and the second position; in the first position, the flexible scraper 220 extends into the negative pressure detection port 110 and pushes the blockage to move, so that the blocked negative pressure detection port 110 can be cleaned during the normal operation of the equipment, avoiding shutdown for cleaning, thereby improving the processing efficiency; in the second position, the flexible scraper 220 is away from the negative pressure detection port 110 and does not affect the normal use of the equipment; thereby, the blocked negative pressure detection port 110 of the equipment is regularly cleaned through the air intake scraper mechanism to avoid blockage and extend the maintenance cycle.

[0117] The present invention connects the guide component 210 via the negative pressure detection port 110 of the air intake pipe 100, inserts the flexible scraper 220 into the guide component 210, and drives the flexible scraper 220 to move closer to or away from the negative pressure detection port 110 via the driving component 230. The flexible scraper 220 moves closer to the negative pressure detection port 110 to push away the blockage at the negative pressure detection port 110, thereby cleaning the blocked negative pressure detection port 110 and avoiding shutdown caused by blockage, thereby improving the equipment utilization efficiency. In addition, by using the flexible scraper 220 to clean the negative pressure detection port 110, the installation direction and position of the driving component 230 can be adjusted, thereby reducing the installation space, and can be suitable for installation environments with limited space.

[0118] In this embodiment, the air intake pipeline 100 has a negative pressure detection tube, which serves as the negative pressure detection port 110. The diameter of the negative pressure detection tube is relatively small. Gases such as silane and phosphine in the exhaust gas are easily formed into a dusty state through chemical reactions, and adhere to the inner wall of the negative pressure detection tube, causing the negative pressure detection port 110 to be blocked. By installing the guide assembly 210 of the air intake scraper mechanism on the negative pressure detection tube, the blockage of the negative pressure detection port 110 of the negative pressure detection pipeline is cleared to avoid the alarm of the negative pressure detection system.

[0119] It can be understood that the negative pressure detection port 110 of the negative pressure detection pipeline can be cleared and cleaned by the air intake scraper mechanism, and the cleaning can be performed without stopping the machine, thus avoiding blockage, extending the maintenance cycle of the equipment, and improving the use efficiency.

[0120] In one embodiment of the present invention, the guide assembly 210 includes a guide tube, and the flexible scraper 220 is inserted into the guide tube, and the guide tube provides a guide function for the movement of the flexible scraper 220 .

[0121] Optional, such as Fig.17As shown, the guide tube includes a first guide tube 211 and a second guide tube 212 that are connected. The first guide tube 211 and the second guide tube 212 have a preset angle. The first guide tube 211 is connected to the negative pressure detection port 110. The flexible scraper 220 is inserted into the first guide tube 211 and the second guide tube 212. One end of the flexible scraper 220 is close to the negative pressure detection port 110, and the other end of the flexible scraper 220 is connected to the driving component 230.

[0122] It should be noted that due to the limited floor space of the exhaust gas treatment equipment, the installation space of the air intake scraper mechanism is limited, and the traditional scraper cannot be installed. The present invention realizes the bending design of the guide tube by having an angle between the first guide tube 211 and the second guide tube 212 to reduce the installation space, which can be suitable for installation in the limited space of the exhaust gas treatment equipment.

[0123] Furthermore, the first guide tube 211 and the second guide tube 212 are connected by a bent tube 213, and the first guide tube 211 and the second guide tube 212 are connected with a smooth transition, so that the flexible scraper 220 is arranged in a smooth transition at the connection position between the first guide tube 211 and the second guide tube 212, thereby avoiding the flexible scraper 220 from getting stuck or damaged at the connection position between the first guide tube 211 and the second guide tube 212 due to the bending transition.

[0124] Optionally, the guide pipe can be a flexible pipe, and the guide pipe can be bent according to the installation space of the exhaust gas treatment device so that the guide pipe is composed of multiple sections. Optionally, the guide pipe includes the first guide pipe 211, the bent pipe 213 and the second guide pipe 212 after being bent.

[0125] It should be noted that when the guide tube is designed to be bent, the inside of the guide tube should be guaranteed to be free of deformation to ensure the stability of the flexible scraper 220 during movement.

[0126] In this embodiment, the guide assembly 210 includes a second guide tube 212, a bent tube 213 and a first guide tube 211 connected in sequence, and the first guide tube 211 and the second guide tube 212 are arranged vertically; of course, in other embodiments, the angle between the first guide tube 211 and the second guide tube 212 can be designed to be 0°~180° according to the actual installation space, preferably 45°~135°.

[0127] In an optional embodiment of the present invention, Fig.16 and Fig.18 As shown, the flexible scraper 220 includes a detection port scraper segment 221, a flexible segment 222 and a connecting segment 223 which are connected in sequence. The detection port scraper segment 221 is located in the first guide tube 211, the connecting segment 223 is located in the second guide tube 212, and the flexible segment 222 is at least partially located in the curved tube 213.

[0128] It can be understood that the detection port scraper segment 221 is located in the first guide tube 211, and the connecting segment 223 is located in the second guide tube 212. The first guide tube 211 and the second guide tube 212 are both straight tubes, and the detection port scraper segment 221 and the connecting segment 223 are both straight segments; during the process of the driving component 230 driving the flexible scraper 220 to move, the detection port scraper segment 221 is always located in the first guide tube 211, and the connecting segment 223 is always located in the second guide tube 212, then the length of the flexible segment 222 is greater than the length of the curved tube 213. During the movement of the flexible scraper 220, the flexible segment 222 is at least partially located in the curved tube 213 to ensure the stability of the detection port scraper segment 221 along the axial movement of the first guide tube 211, thereby improving the cleaning effect.

[0129] Optionally, the cross-section of the flexible scraper 220 may be any shape such as rectangular, triangular, elliptical, etc., to adapt to negative pressure detection ports 110 of different shapes. The present application does not specifically limit the outer contour shape of the flexible scraper 220 .

[0130] In one embodiment of the present invention, Fig.15 and Fig.16 As shown, the air intake scraper mechanism also includes a first connecting sleeve 250, which has three connecting ports, namely a first connecting port, a second connecting port and a third connecting port. The first connecting port is connected to the negative pressure detection port 110, the second connecting port is connected to the first guide tube 211 of the guide assembly 210, and the third connecting port serves as a pressure detection port 251.

[0131] For example, the first connecting ferrule 250 adopts a three-way ferrule, the first connecting port and the second connecting port are arranged opposite to each other, respectively connecting the first guide tube 211 and the negative pressure detection port 110, and the middle connecting port of the three-way ferrule is used as the pressure detection port 251 for connecting the negative pressure detection component. It should be noted that the negative pressure detection port 110 and the guide assembly 210 are connected by the first connecting ferrule 250, which is convenient for maintenance and assembly.

[0132] In one embodiment of the present invention, Fig.16 and Fig.19 As shown, the air intake scraper mechanism also includes a second connecting sleeve 240 , a first end of the second connecting sleeve 240 is sleeved on the second guide tube 212 , and the driving component 230 is connected to the second end of the second connecting sleeve 240 .

[0133] For example, the upper end of the second connecting sleeve 240 is connected to the lower end of the second guide tube 212 , and the driving component 230 is fixed to the lower end of the second connecting sleeve 240 .

[0134] In this embodiment, the second connecting ferrule 240 adopts a straight-through ferrule, and the lower part of the second guide tube 212 is connected to the straight-through ferrule. According to the size of the second guide tube 212, the second connecting ferrule 240 can select a straight-through reducing ferrule. It should be noted that in this embodiment, the driving component 230 and the guide assembly 210 are assembled using the second connecting slot, which is convenient for maintenance and assembly.

[0135] Furthermore, the driving component 230 includes a driving cylinder 231 and a cylinder connecting sleeve 232. The driving cylinder 231 is connected to the lower end of the second connecting sleeve 240 through the cylinder connecting sleeve 232. The driving cylinder 231 and the cylinder connecting sleeve 232 are threadedly connected, and a sealing gasket is arranged between the driving cylinder 231 and the cylinder connecting sleeve 232. The sealing gasket includes but is not limited to a Teflon sealing gasket.

[0136] It is understandable that if Fig.16 and Fig.19 As shown, the piston rod 2311 of the driving cylinder 231 is located inside the cylinder connecting sleeve 232, and the cylinder connecting sleeve 232 ensures that the piston rod 2311 can move freely. It should be noted here that the length of the cylinder connecting sleeve 232 changes adaptively with the driving stroke to ensure that the piston rod 2311 is free and does not interfere with the cylinder stroke).

[0137] In a preferred embodiment of the present invention, a scraper connecting rod 241 is provided in the second connecting sleeve 240, and the scraper connecting rod 241 connects the flexible scraper 220 and the output of the driving component 230; specifically, the scraper connecting rod 241 connects the connecting section 223 of the flexible scraper 220 and the piston rod 2311.

[0138] It is understandable that the scraper connecting rod 241 in the second connecting sleeve 240 is used to connect the flexible scraper 220 and the driving cylinder 231 on the one hand, and to provide a guide for the movement of the flexible scraper 220 on the other hand. It should be noted here that the piston rod 2311 needs space to move, so there will be a large space in the front when the cylinder is pulled back. The large space is not conducive to the movement of the flexible scraper 220 (the large space makes the flexible scraper 220 twisted without guidance), so the scraper connecting rod 241 provides a guide for the movement of the flexible scraper 220 in the large space.

[0139] In this embodiment, the driving cylinder 231 adopts a double driving cylinder, and the double driving cylinder adopts two specifications of air pipes to prevent the air pipes from being installed incorrectly during the installation process.

[0140] Optionally, the exhaust gas treatment equipment also includes a negative pressure detection component, which is connected to the pressure detection port 251 between the guide assembly 210 and the negative pressure detection port 110. The negative pressure detection component includes a negative pressure detection pipeline and a negative pressure sensor. The negative pressure sensor is connected to the pressure detection port 251 through the negative pressure detection pipeline, and is used to monitor the air pressure in the negative pressure detection pipeline.

[0141] Furthermore, the first guide tube 211 is connected to the negative pressure detection tube of the air intake pipe through the first connecting sleeve 250. The first connecting sleeve 250 is connected to the negative pressure detection pipeline. The negative pressure detection system also includes a negative pressure purge component, which can introduce gas into the negative pressure detection tube and also realize a certain anti-blocking function.

[0142] It should be noted that the negative pressure detection system detects negative pressure at the pressure detection port 251. During the negative pressure detection process, a long low-pressure airflow is blown into the first connecting sleeve 250, and even into the negative pressure detection pipe and the air intake scraper mechanism. In this embodiment, gas can be introduced into the negative pressure detection pipe through the negative pressure purge component, which can prevent the waste gas and dust circulating in the negative pressure detection pipe from entering the negative pressure detection pipe and the air intake scraper mechanism, and avoid corrosion and blockage of the negative pressure detection pipe, the negative pressure sensor, and the air intake scraper mechanism.

[0143] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A reaction chamber scraper, characterized in that: include: A scraper mounting seat, wherein the scraper mounting seat is annular and an installation space is formed inside the scraper mounting seat; The scraper assembly comprises a scraper mounting component, an air inlet scraper plate and an inner wall scraper plate, wherein the scraper mounting component is rotatably arranged in the mounting space, and the scraper mounting component is formed with an air passage; the inner wall scraper plate is connected to a first side of the scraper mounting component, and the inner wall scraper plate is suitable for abutting against an inner wall of a reaction chamber of a reaction chamber, and the air inlet scraper plate is connected to a second side of the scraper mounting component, and the air inlet scraper plate is suitable for abutting against an air inlet of the reaction chamber; The driving assembly is connected to the scraper mounting component to drive the scraper mounting component to rotate.

2. The reaction chamber scraper according to claim 1, characterized in that: The scraper installation component includes a scraper installation plate rotatably arranged in the installation space, and the outer peripheral surface of the scraper installation plate has transmission teeth; the driving assembly includes: A driving member, arranged on the scraper mounting seat; A driving connecting rod, slidably disposed on the scraper mounting seat and connected to the output of the driving member; The first finger component has a first clamping portion that cooperates with the transmission tooth, and the driving member is used to drive the driving connecting rod to drive the first finger component to move, so as to push the scraper mounting plate to rotate in the positive direction.

3. The reaction chamber scraper according to claim 2, characterized in that: The first finger component comprises: A first finger member, rotatably disposed on the driving connecting rod, wherein the first finger member has the first clamping portion; A first elastic member is disposed between the first finger member and the driving connecting rod. When the driving member pushes the scraper mounting plate to rotate in the forward direction, the first elastic member is used to make the first clamping portion fit against the transmission tooth.

4. The reaction chamber scraper according to claim 2, characterized in that: It also includes a limiting component arranged on the scraper mounting seat, and the limiting component is used to limit the reverse rotation of the scraper mounting plate.

5. The reaction chamber scraper according to claim 4, characterized in that: The limiting component comprises: A limiting connecting rod is passed through the scraper mounting seat, and the limiting connecting rod and the driving connecting rod are arranged at intervals along the circumference of the scraper mounting seat; The second finger component includes a second finger component and a second elastic component. The second finger component is rotatably connected to the limiting connecting rod. The second finger component has a second clamping portion that cooperates with the transmission tooth. The second elastic component is arranged between the second finger component and the limiting connecting rod.

6. The reaction chamber scraper according to claim 2, characterized in that: A first step surface is formed in the installation space, The scraper installation component further includes a spherical pressure-bearing member arranged on the first step surface, the scraper installation plate is supported on the spherical pressure-bearing member, and / or, The scraper mounting component also includes a guide member arranged on the scraper mounting plate, and the guide member abuts against the inner annular surface of the scraper mounting seat.

7. The reaction chamber scraper according to any one of claims 1 to 6, characterized in that: The air inlet scraper plate includes a first scraper segment and a second scraper segment, the first scraper segment is arranged along the radial direction of the scraper mounting component, the second scraper segment is arranged at an end of the first scraper segment away from the center of the scraper mounting component, a first preset angle is formed between the first scraper segment and the second scraper segment, and an end of the second scraper segment away from the first scraper segment is away from the center of the scraper mounting component.

8. The reaction chamber scraper according to any one of claims 1 to 6, characterized in that: The air inlet scraper plates are multiple and arranged circumferentially, and / or, The inner wall scraper plates are multiple and arranged circumferentially.

9. The reaction chamber scraper according to claim 8, characterized in that: One end of the plurality of inner wall scraper plates away from the scraper mounting component is connected through a scraper bottom ring.

10. A reaction chamber, characterized in that: It comprises a reaction body and a reaction chamber scraper as claimed in any one of claims 1 to 9; The reaction body is formed with a reaction chamber; The scraper mounting seat is arranged on the reaction body, and the inner wall scraper plate abuts against the inner wall of the reaction chamber, and the air inlet scraper plate abuts against the air inlet of the reaction chamber.

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