Spectral measurement method, device and system based on filtering spectrometer and medium

By constructing a multi -level cross -level micro -ring resonance cavity optical filter and filter tablet spectrometer, the problem of high -precision demand for resolution and high accuracy in the existing technology cannot be met, the measurement of high -precision spectrum is achieved, and the accuracy of measurement is improved. Sex and craftsmanship.

CN119354332AInactive Publication Date: 2025-01-24GLITTERINTECH (XUZHOU) LTD
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Patent Information

Application Number
CN202411507570.X
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-10-28
Publication Date
2025-01-24
Estimated Expiration
Not applicable · inactive patent

AI Technical Summary

Technical Problem

The existing filtered on-chip spectrometer only involves the structure of the secondary cross-cascaded microring and its usage method, and cannot meet the usage scenarios where resolution requires high accuracy.

Method used

By constructing an optical filter including a directional coupler, at least three micro-ring resonant cavities cascaded across optical waveguides, and phase modulators respectively disposed on each micro-ring resonant cavity, the phase modulator is used to modulate light, Achieve high-precision spectral measurement.

Benefits of technology

The optical filter and filter tablet spectrum with more than three cross -level joint micro -ring resonance structures can be used to meet the use scenarios that can meet high -precision needs. The tolerance range of the technical stability of the directional coupler has improved the accuracy of the spectrum measurement.

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Abstract

The invention discloses a spectral measurement method, device and system based on a filtering type spectrograph and a medium. The spectrograph comprises an optical filter and a measurement module which are cascaded. The optical filter comprises a directional coupler, at least three micro-ring resonant cavities and phase modulators, the micro-ring resonant cavities are in cross cascade connection through optical waveguides, the phase modulators are arranged on the micro-ring resonant cavities, and the minimum value of the second-order ring length difference between every two adjacent micro-ring resonant cavities and the preset spectrograph scanning bandwidth meet the preset condition. According to the FSR length of each micro-ring resonant cavity, a preset target wavelength reconstruction amount and a preset reconstruction algorithm, determining a phase modulation amount corresponding to each micro-ring resonant cavity, inputting an incident light source into an optical filter, and respectively inputting each determined phase modulation amount into a corresponding phase modulator; and each phase modulator modulates the light passing through the corresponding micro-ring resonant cavity according to each phase modulation quantity, and a spectral information measurement result determined by the measurement module according to the output light of the optical filter is obtained.
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Description

Technical Field

[0001] The present application relates to the technical field of filter-on-chip spectrometers, and in particular to a spectrum measurement method, device, system and medium based on a filter-type spectrometer. Background Art

[0002] In the field of modern science and technology, the development of optical waveguide technology and microelectronic device technology has promoted the development of spectral analysis technology. Among them, on-chip spectrometer, as a new type of spectral analysis tool, has attracted widespread attention due to its small size and high resolution. The types of on-chip spectrometers mainly include computational, Fourier and filtering types.

[0003] Due to the limitation of the Fourier transform principle, it is difficult for Fourier-type on-chip spectrometers to improve both bandwidth and accuracy. Computational on-chip spectrometers mainly include Mach-Zehnder interferometer (MZI) spectrometers and micro-ring resonator (MRR) spectrometers. MZI spectrometers are limited by the information sampling capability of their finite impulse response filter systems. Although MRR computational spectrometers have stronger information sampling capabilities, the computing power required to solve high-precision spectra has become another limitation of the system. Therefore, computational on-chip spectrometers have gradually shown their limitations in solving the problem of high-precision and high-complexity spectral measurements. By cascading multiple micro-ring resonators or MZIs, filter-type on-chip spectrometers can achieve optical filtering characteristics with a single peak morphology within a certain bandwidth. Using dynamically modulated optical filters, scanning spectral sampling and analysis can be achieved, which to a certain extent solves the problems of the previous two on-chip spectrometers.

[0004] However, the number of microrings involved in the filter-on-chip spectrometer directly determines the resolution. For scenarios with high-precision resolution requirements, it is necessary to construct and use three or more cross-cascade microrings. However, the existing filter-on-chip spectrometers only involve the construction and use of two-level cross-cascade microrings, and the construction and use of three or more cross-cascade microrings are unknown. Summary of the invention

[0005] The present application aims to solve one of the technical problems in the related art to a certain extent. To this end, the present application provides a spectrum measurement method, device, system and medium based on a filter spectrometer.

[0006] As a first aspect of the present application, a spectrum measurement method based on a filter-type on-chip spectrometer is provided, wherein the filter-type on-chip spectrometer includes a cascaded optical filter and a measurement module, wherein the optical filter includes a directional coupler, at least three microring resonant cavities cross-cascaded through an optical waveguide, and a phase modulator respectively arranged on each of the microring resonant cavities, and the minimum value of the second-order ring length difference between two adjacent microring resonant cavities meets a preset condition with a preset spectrometer scanning bandwidth, and the method includes:

[0007] Determining the phase modulation amount corresponding to each microring resonant cavity according to the free spectrum range (FSR) length of each microring resonant cavity, a preset target wavelength reconstruction amount, and a preset reconstruction algorithm;

[0008] Inputting the incident light source into the optical filter, and inputting the determined phase modulation amounts into corresponding phase modulators, so that each phase modulator modulates the light passing through the corresponding microring resonant cavity according to each phase modulation amount;

[0009] A spectral information measurement result determined by the measurement module according to the output light of the optical filter is obtained.

[0010] Optionally, the preset conditions include:

[0011]

[0012] In formula (1), FSR max represents the preset spectrometer scanning bandwidth, λ represents the central band wavelength, and n g represents the group refractive index of the medium in the microring resonator, ΔL 2nd It represents the minimum value of the second-order ring length difference between two adjacent microring resonators.

[0013] Optionally, the measurement module includes a light information sampling circuit module and a processing module; and obtaining the spectral information measurement result determined by the measurement module according to the output light of the optical filter includes:

[0014] The spectral information measurement result determined by the processing module according to the sampling result is obtained; wherein the sampling result is obtained by the light information sampling circuit module collecting the light generated after the output light of the optical filter passes through the sample object.

[0015] Optionally, in the step of determining the phase modulation amount corresponding to each of the microring resonators according to the free spectrum range (FSR) length of each of the microring resonators, a preset target wavelength reconstruction amount, and a preset reconstruction algorithm, the phase modulation amount corresponding to each of the microring resonators is determined by the following formula:

[0016] mod{Δλ,FSR i}=Δλ i (t) (a);

[0017]

[0018] In formula (a) and formula (b), Δλ represents the preset target wavelength reconstruction amount, FSR i represents the FSR length of the i-th microring resonator, Δλ i (t) represents the wavelength reconstruction of the i-th microring resonator, mod{Δλ,FSR i} represents the effect of Δλ on FSR i Perform modulo operation, t represents time, represents the phase modulation amount corresponding to the i-th microring resonator.

[0019] As a second aspect of the present application, an electronic device is provided, wherein the electronic device includes:

[0020] one or more processors;

[0021] A memory having one or more computer programs stored thereon, when the one or more computer programs are executed by the one or more processors, the one or more processors implement the spectral measurement method based on the filter-type on-chip spectrometer provided according to the first aspect of the present application.

[0022] As a third aspect of the present application, a spectrum measurement system is provided, wherein the spectrum measurement system comprises the electronic device provided in the second aspect of the present application and a filter-type on-chip spectrometer, wherein the filter-type on-chip spectrometer comprises an optical filter, wherein the optical filter comprises a directional coupler, at least three microring resonant cavities cross-connected and cascaded through an optical waveguide, and a phase modulator respectively arranged on each of the microring resonant cavities, wherein a minimum value of a second-order ring length difference between two adjacent microring resonant cavities satisfies a preset condition with respect to a preset spectrometer scanning bandwidth;

[0023] Each phase modulator is used to modulate the light passing through the corresponding microring resonant cavity according to the phase modulation amount input to itself after the incident light source is input to the optical filter; wherein each phase modulation amount is determined according to the free spectrum range FSR length of each microring resonant cavity, the preset target wavelength reconstruction amount and the preset reconstruction algorithm;

[0024] The measurement module is used to determine a spectrum information measurement result according to the output light of the optical filter.

[0025] Optionally, the preset conditions include:

[0026]

[0027] In formula (1), FSR max represents the preset spectrometer scanning bandwidth, λ represents the central band wavelength, and n g represents the group refractive index of the medium in the microring resonator, ΔL 2nd It represents the minimum value of the second-order ring length difference between two adjacent microring resonators.

[0028] Optionally, the measurement module includes an optical information sampling circuit module and a processing module, the optical information sampling circuit module is used to collect the light generated after the output light of the optical filter passes through the sample object to obtain a sampling result; the processing module is used to determine the spectral information measurement result based on the sampling result.

[0029] Optionally, the number of the microring resonant cavities in the optical filter is 5, the ring length of each of the microring resonant cavities is 300 μm, 310 μm, 320 μm, 330 μm and 340 μm, and the scanning bandwidth of the filter-on-chip spectrometer is 126 nm.

[0030] As a fourth aspect of the present application, a computer-readable medium is provided, on which a computer program is stored, wherein when the computer program is executed by a processor, the spectral measurement method based on the filter-type on-chip spectrometer provided according to the first aspect of the present application is implemented.

[0031] In the spectral measurement method based on the filter-on-chip spectrometer provided in the embodiment of the present application, an optical filter including a directional coupler, at least three microring resonant cavities cross-cascaded by optical waveguides, and phase modulators respectively arranged on each of the microring resonant cavities is constructed, and the minimum value of the second-order ring length difference between two adjacent microring resonant cavities is set based on preset conditions and a preset spectrometer scanning bandwidth, and a filter-on-chip spectrometer including a cascaded optical filter and a measurement module is further constructed. Furthermore, according to the free spectral range FSR length of each microring resonant cavity, a preset target wavelength reconstruction amount and a preset reconstruction algorithm, the phase modulation amount corresponding to each microring resonant cavity is determined, the incident light source is input into the optical filter, and the determined phase modulation amounts are respectively input into the corresponding phase modulators, so that each phase modulator modulates the light passing through the corresponding microring resonant cavity according to each phase modulation amount, and obtains the spectral information measurement result determined by the measurement module according to the output light of the optical filter. Provided are a method of constructing an optical filter and a filter-on-chip spectrometer using three or more cross-cascaded microring resonators and a method of using the same. The method can be used in scenarios with high-precision requirements for resolution, and has strong information sampling capabilities and low computing power requirements. At the same time, the tolerance range of the process stability of the directional coupler is expanded, and the accuracy of spectral measurement is improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] The present application is further described below in conjunction with the accompanying drawings:

[0033] Figure 1 It is a flow chart of an implementation of a spectrum measurement method based on a filter-type on-chip spectrometer provided in an embodiment of the present application;

[0034] Figure 2a is a schematic diagram of an implementation of an optical filter provided in an embodiment of the present application;

[0035] Figure 2b is a schematic diagram of an implementation of a filter-on-chip spectrometer provided in an embodiment of the present application;

[0036] Figure 2c is a schematic diagram of another implementation of the filter-on-chip spectrometer provided in an embodiment of the present application;

[0037] Figure 3 This is a flow chart of an implementation method of obtaining spectral information measurement results provided in an embodiment of the present application;

[0038] Figure 4 It is a module diagram of an implementation of an electronic device provided in an embodiment of the present application;

[0039] Figure 5It is a schematic diagram of a computer-readable medium provided in an embodiment of the present application.

[0040] Description of Reference Numerals

[0041] 101: Processor 102: Memory

[0042] 103: I / O interface 104: bus DETAILED DESCRIPTION

[0043] The embodiments of the present application are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements with the same or similar functions. The embodiments based on the embodiments are intended to be used to explain the present application and cannot be understood as limiting the present application.

[0044] References to "one embodiment" or "an example" or "an example" in this specification mean that a particular feature, structure, or characteristic described in conjunction with the embodiment itself may be included in at least one embodiment disclosed in the present application. The appearance of the phrase "in one embodiment" in various places in the specification does not necessarily refer to the same embodiment.

[0045] The currently available filter-type on-chip spectrometers only involve the construction and use of two-stage cross-cascade microrings, and the construction and use of three-stage and above cross-cascade microrings are unknown.

[0046] To this end, the applicant of the present application constructs an optical filter based on at least three microring resonators, and further constructs a filter-type on-chip spectrometer based on the optical filter, and provides a spectral measurement method to achieve spectral measurement using the filter-type on-chip spectrometer.

[0047] As a first aspect of the present application, a spectrum measurement method based on a filter-type on-chip spectrometer is provided, wherein the filter-type on-chip spectrometer includes a cascaded optical filter and a measurement module, wherein the optical filter includes a directional coupler (DC), at least three micro-ring resonant cavities cross-cascaded through an optical waveguide, and a phase modulator respectively arranged on each of the micro-ring resonant cavities, and the minimum value of the second-order ring length difference between two adjacent micro-ring resonant cavities meets a preset condition with respect to a preset spectrometer scanning bandwidth, such as Figure 1 As shown, the method may include:

[0048] In step S110, the phase modulation amount corresponding to each microring resonant cavity is determined according to the free spectral range (FSR) length of each microring resonant cavity, the preset target wavelength reconstruction amount and the preset reconstruction algorithm;

[0049] In step S120, the incident light source is input into the optical filter, and the determined phase modulation amounts are respectively input into corresponding phase modulators, so that each phase modulator modulates the light passing through the corresponding microring resonator according to each phase modulation amount;

[0050] In step S130, a spectrum information measurement result determined by the measurement module according to the output light of the optical filter is obtained.

[0051] like Figure 2a As shown, it is a schematic diagram of an implementation of the optical filter provided in the embodiment of the present application. It can be seen that the optical filter includes a directional coupler, five micro-ring resonant cavities cross-connected and cascaded through an optical waveguide, and a phase modulator respectively arranged on each micro-ring resonant cavity. The phase modulator arranged on each micro-ring resonant cavity can be one or two. The directional coupler, i.e., DC, arranged at the input end determines the amount of input light transmitted from the optical waveguide to the first-stage micro-ring resonant cavity. The output light of the micro-ring resonant cavity at the end, i.e., the fifth-stage micro-ring resonant cavity, is also output through the optical waveguide.

[0052] Understandably, Figure 2a The figure is only an exemplary description, and the number of microring resonant cavities in the optical filter is not limited to five. Through the construction method provided in the embodiment of the present application, that is, cross-connecting the microring resonant cavities through optical waveguides, cross-connecting three or more microring resonant cavities can be achieved.

[0053] The single peak period length of a single microring resonator can usually be described by the concept of free spectral range (FSR) length, and the FSR length of a single microring resonator is closely related to its cavity length. By cross-connecting at least three microring resonators, a transmission single peak with a larger FSR length can be obtained. At this time, the maximum FSR of the single peak of the entire optical filter is the scanning bandwidth that can be achieved by the filter-on-chip spectrometer, but at this time, the maximum FSR length of the single peak of the entire optical filter is closely related to the minimum value of the second-order ring length difference.

[0054] Each microring resonant cavity has a cavity length. The second-order ring length difference refers to the difference in cavity length between two adjacent microring resonant cavities. When at least three microring resonant cavities are cross-connected, there are at least two second-order ring length differences. The minimum second-order ring length difference refers to the minimum value of the at least two second-order ring length differences. For example, in Figure 2a In the optical filter shown, five microring resonators are cross-connected in cascade, and there are four second-order ring length differences. At this time, the minimum value of the second-order ring length difference refers to the minimum value of the four second-order ring length differences.

[0055] The FSR length of a single peak determines the resolution and the amount of energy that passes through. The smaller the FSR length, the higher the resolution and the less energy that passes through. The larger the FSR length, the lower the resolution and the more energy that passes through.

[0056] The applicant of the present application proposes that, since in the constructed optical filter, the maximum FSR length of the single peak of the entire optical filter is closely related to the minimum value of the second-order ring length difference, and the FSR length of the single peak determines the resolution and the amount of energy passed, then according to the required high and low resolution and the amount of energy passed, the appropriate FSR length of the single peak is selected, that is, the preset spectrometer scanning bandwidth. The conditions between the minimum value of the second-order ring length difference between two adjacent micro-ring resonators and the preset spectrometer scanning bandwidth are preset, and the minimum value of the second-order ring length difference can be determined according to the preset spectrometer scanning bandwidth and the preset conditions. Then, according to the minimum value of the second-order ring length difference, an optical filter is constructed using a suitable micro-ring resonator. Ultimately, the required high and low resolution and the amount of energy passed can be achieved.

[0057] Moreover, this cross-connection of at least three micro-ring resonators can achieve the effect that can be achieved by a micro-ring resonator with the same cavity length as the minimum difference between the second-order ring lengths, which is similar to the effect of multiplying the transmittance S21 (or transmission coefficient) of an additional micro-ring resonator. In this way, the depth of the single peak of the entire optical filter will be greatly improved. In addition, this construction method does not require high process stability for directional couplers, and has a large tolerance range.

[0058] The applicant of the present application further proposes that by simultaneously performing proportional phase modulation on each level of the cross-cascaded micro-ring resonant cavity, the single peak translation of the entire optical filter can be achieved. To achieve proportional phase modulation on each level of the micro-ring resonant cavity, the phase adjustment amount provided to each level of the micro-ring resonant cavity needs to meet the following requirements:

[0059] Δδ 1 :Δδ 2 :...:Δδ i =ΔL 1 :ΔL 2 :…:ΔL i (a);

[0060] In formula (a), Δδ 1 :Δδ 2 :…:Δδ i The phase adjustment provided to the first, second, ..., i-th microring resonator is represented in sequence, ΔL 1 :ΔL 2 :…:ΔL iThe cavity lengths of the first, second, ..., i-th microring resonator are represented in sequence.

[0061] The cavity length of each microring resonant cavity is closely related to its own FSR length. Therefore, the phase modulation amount corresponding to each microring resonant cavity can be determined according to the FSR length of each microring resonant cavity, the preset target wavelength reconstruction amount and the preset reconstruction algorithm.

[0062] After the incident light source is input into the optical filter and the determined phase modulation amounts are respectively input into the corresponding phase modulators, the incident light source is input into the microring resonant cavity via the directional coupler. The phase modulator modulates the light passing through its own microring resonant cavity according to the phase modulation amount input into itself. The output light of the last-stage microring resonant cavity, i.e., the output light of the optical filter, is captured by the measurement module to determine the spectral information measurement result.

[0063] In the spectral measurement method based on the filter-on-chip spectrometer provided in the embodiment of the present application, an optical filter including a directional coupler, at least three microring resonant cavities cross-cascaded by optical waveguides, and phase modulators respectively arranged on each of the microring resonant cavities is constructed, and the minimum value of the second-order ring length difference between two adjacent microring resonant cavities is set based on preset conditions and a preset spectrometer scanning bandwidth, and a filter-on-chip spectrometer including a cascaded optical filter and a measurement module is further constructed. Furthermore, according to the free spectral range FSR length of each microring resonant cavity, a preset target wavelength reconstruction amount and a preset reconstruction algorithm, the phase modulation amount corresponding to each microring resonant cavity is determined, the incident light source is input into the optical filter, and the determined phase modulation amounts are respectively input into the corresponding phase modulators, so that each phase modulator modulates the light passing through the corresponding microring resonant cavity according to each phase modulation amount, and obtains the spectral information measurement result determined by the measurement module according to the output light of the optical filter. Provided are a method of constructing an optical filter and a filter-on-chip spectrometer using three or more cross-cascaded microring resonators and a method of using the same. The method can be used in scenarios with high-precision requirements for resolution, and has strong information sampling capabilities and low computing power requirements. At the same time, the tolerance range of the process stability of the directional coupler is expanded, and the accuracy of spectral measurement is improved.

[0064] It should be noted that the present application does not necessarily involve the method for selecting the number of micro-ring resonant cavities in the optical filter and the method for setting the cavity length of each micro-ring resonant cavity, so they are not described.

[0065] As mentioned above, the FSR length of a single microring resonator is closely related to its cavity length and can be expressed as:

[0066]

[0067] In formula (b), FSR i represents the FSR length of the i-th microring resonator, λ represents the central band wavelength, and n g represents the group refractive index of the medium in the microring resonator, and ΔL represents the cavity length of the i-th microring resonator.

[0068] However, after cross-connecting at least three micro-ring resonators, the maximum FSR length of the single peak of the entire optical filter (i.e., the scanning bandwidth that can be achieved by the filter-on-chip spectrometer) is closely related to the minimum value of the second-order ring length difference. Accordingly, in some embodiments, the preset conditions include:

[0069]

[0070] In formula (1), FSR max represents the preset spectrometer scanning bandwidth, λ represents the central band wavelength, and n g represents the group refractive index of the medium in the microring resonator, ΔL 2nd It represents the minimum value of the second-order ring length difference between two adjacent microring resonators.

[0071] In the spectrum measurement method based on the filter-type on-chip spectrometer provided in the embodiment of the present application, the appropriate single-peak FSR length, that is, the preset spectrometer scanning bandwidth, is selected according to the required high and low resolution and the amount of energy passing through. The condition between the minimum value of the second-order ring length difference between two adjacent micro-ring resonators and the preset spectrometer scanning bandwidth is preset, and the minimum value of the second-order ring length difference can be determined according to the preset spectrometer scanning bandwidth and the preset condition. Then, an optical filter is constructed using a suitable micro-ring resonator according to the minimum value of the second-order ring length difference. Ultimately, the required high and low resolution and the amount of energy passing through can be achieved.

[0072] The currently existing filter-on-chip spectrometers, in addition to the serious drawback of only involving the construction and use of secondary cross-cascade microrings, also have the serious drawback of a single use method, that is, the sample to be measured can only be placed at the front end of the spectrometer. However, using the filter-on-chip spectrometer provided in the embodiment of the present application, the sample to be measured can also be placed between the optical filter and the measurement module. Correspondingly, in some embodiments, the measurement module includes an optical information sampling circuit module and a processing module, and the spectral information measurement result determined by the measurement module according to the output light of the optical filter (i.e., step S130) is obtained, such as Figure 3As shown, it may include: in step S131, obtaining the spectral information measurement result determined by the processing module according to the sampling result; wherein the sampling result is obtained by the light information sampling circuit module collecting the light generated after the output light of the optical filter passes through the sample object.

[0073] In the embodiment of the present application, the measuring module may include an optical information sampling circuit module and a processing module, wherein the processing module may be a personal computer (PC), a microcontroller unit (MCU), a control / computing module, etc. It is understandable that the filter-type on-chip spectrometer may include an on-chip optical filter driving module in addition to the optical filter and the measuring module, and the on-chip optical filter driving module may drive the optical filter in common ways such as constant current, constant voltage, constant power and pulse width modulation (PWM) under the control of the above-mentioned processing module.

[0074] like Figure 2b As shown, a schematic diagram of an implementation of the filter-on-chip spectrometer provided in an embodiment of the present application shows that the sample object can be placed between the optical filter and the measurement module, that is, between the optical filter and the light information sampling circuit module. And at this time, the incident light can be a wide-spectrum light source. In other words, the optical filter can modulate the wide-spectrum light source and irradiate it onto the sample, and the measurement module then performs spectral measurement on the reflected light / transmitted light generated by the output light of the optical filter after passing through the sample object.

[0075] It should be emphasized that, when using the filter-on-chip spectrometer provided in the embodiment of the present application, the sample to be tested is not limited to being placed between the optical filter and the measurement module. Consistent with the existing filter-on-chip spectrometer, the sample to be tested can also be placed at the front end of the filter-on-chip spectrometer. Figure 2c As shown, a schematic diagram of another implementation of the filter-on-chip spectrometer provided in an embodiment of the present application shows that the filter-on-chip spectrometer can directly perform spectral measurement on the spectral light source to be measured after passing through the sample object. That is to say, at this time, the sample object is placed at the front end of the filter-on-chip spectrometer, and the wide-spectrum light source or other light source generates the spectral light source to be measured after passing through the sample object, which is input into the filter-on-chip spectrometer.

[0076] In the spectral measurement method based on the filter-on-chip spectrometer provided in the embodiment of the present application, the sample object to be measured can be placed at the front end of the filter-on-chip spectrometer or between the optical filter and the measurement module of the filter-on-chip spectrometer, which effectively expands the usage of the spectrometer.

[0077] In some embodiments, in the step of determining the phase modulation amount corresponding to each microring resonant cavity according to the free spectrum range FSR length of each microring resonant cavity, the preset target wavelength reconstruction amount and the preset reconstruction algorithm (i.e., step S110), the phase modulation amount corresponding to each microring resonant cavity is determined by the following formula:

[0078] mod{Δλ,FSR i}=Δλ i (t) (2);

[0079]

[0080] In formula (2) and formula (3), Δλ represents the preset target wavelength reconstruction amount, FSR i represents the FSR length of the i-th microring resonator, Δλ i (t) represents the wavelength reconstruction of the i-th microring resonator, mod{Δλ,FSR i} represents the effect of Δλ on FSR i Perform modulo operation, t represents time, represents the phase modulation amount corresponding to the i-th microring resonator.

[0081] As a second aspect of the present application, an electronic device is provided, wherein: Figure 4 As shown, the electronic device includes:

[0082] One or more processors 101;

[0083] The memory 102 stores one or more computer programs. When the one or more computer programs are executed by the one or more processors 101, the one or more processors 101 implement the spectral measurement method based on the filter-type on-chip spectrometer provided in the first aspect of the present application.

[0084] The electronic device may further include one or more I / O interfaces 103 connected between the processor 101 and the memory 102 and configured to implement information interaction between the processor 101 and the memory 102 .

[0085] Among them, the processor 101 is a device with data processing capabilities, including but not limited to a central processing unit (CPU), etc.; the memory 102 is a device with data storage capabilities, including but not limited to random access memory (RAM, more specifically SDRAM, DDR, etc.), read-only memory (ROM), electrically erasable programmable read-only memory (EEPROM), flash memory (FLASH); the I / O interface (read-write interface) is connected between the processor and the memory, and can realize information exchange between the processor and the memory, including but not limited to a data bus (Bus), etc.

[0086] In some embodiments, the processor 101 , the memory 102 , and the I / O interface 103 are connected to each other via a bus 104 , and further connected to other components of the computing device.

[0087] As a third aspect of the present application, a spectrum measurement system is provided, characterized in that the spectrum measurement system comprises the electronic device provided according to the second aspect of the present application and a filter-type on-chip spectrometer, the filter-type on-chip spectrometer comprises an optical filter, the optical filter comprises a directional coupler and at least three micro-ring resonant cavities cross-connected by optical waveguides, and a phase modulator respectively arranged on each of the micro-ring resonant cavities, and the minimum value of the second-order ring length difference between two adjacent micro-ring resonant cavities meets a preset condition with respect to a preset spectrometer scanning bandwidth;

[0088] Each phase modulator is used to modulate the light passing through the corresponding microring resonant cavity according to the phase modulation amount input to itself after the incident light source is input to the optical filter; wherein each phase modulation amount is determined according to the free spectrum range FSR length of each microring resonant cavity, the preset target wavelength reconstruction amount and the preset reconstruction algorithm;

[0089] The measurement module is used to determine a spectrum information measurement result according to the output light of the optical filter.

[0090] The construction principle and usage (ie, the spectrum measurement method) of the filter-on-chip spectrometer in the spectrum measurement system have been described in detail above and will not be repeated here.

[0091] In some embodiments, the preset conditions include:

[0092]

[0093] In formula (1), FSR max represents the preset spectrometer scanning bandwidth, λ represents the central band wavelength, and n g represents the group refractive index of the medium in the microring resonator, ΔL 2ndIt represents the minimum value of the second-order ring length difference between two adjacent microring resonators.

[0094] In some embodiments, the measurement module includes an optical information sampling circuit module and a processing module. The optical information sampling circuit module is used to collect the light generated after the output light of the optical filter passes through the sample object to obtain a sampling result; the processing module is used to determine the spectral information measurement result based on the sampling result.

[0095] In addition, in the embodiment of the present application, there is no specific limitation on the phase adjustment method adopted by the phase modulator, for example, it can be an electrical adjustment method, a thermal adjustment method, etc.

[0096] In the embodiments of the present application, there is no specific limitation on the optical integration platform used to realize the filter-type on-chip spectrometer. For example, the spectrometer can be realized on different optical integration platforms such as a silicon-based (Silicon) optical platform (pure silicon or silicon germanium platform), a silicon nitride (Silicon Nitride, SiN) optical platform, an indium phosphide (Indium Phosphide, InP) or indium arsenide (Indium Arsenide, InAs) and other III-V optical platforms, and a lithium phosphate (Lithium Niobate, LN) optical platform.

[0097] In some embodiments, the number of the microring resonant cavities in the optical filter is 5, the ring length of each of the microring resonant cavities is 300 μm, 310 μm, 320 μm, 330 μm and 340 μm, and the scanning bandwidth of the filter-on-chip spectrometer is 126 nm.

[0098] like Figure 2a As shown, it is a schematic diagram of an implementation of the optical filter provided in the embodiment of the present application. The applicant of the present application constructed the optical filter to verify the spectrum measurement method based on the filter-on-chip spectrometer provided in the present application. In the verification process, the various parameters selected are shown in the following Table 1.

[0099] Table 1

[0100] Basic parameters index λ(unit: μm) 1.55 <![CDATA[n g (Group refractive index of the medium in the microring resonator)]]> 1.9 <![CDATA[ΔL 2nd (Unit: μm)]]> 10 DC CE (coupling coefficient of directional coupler) 0.05 Cavity length (unit: μm) 300、310、320、330、340 Phase modulation range 0-2π

[0101] Using the above parameters, the maximum single peak FSR length calculated according to the above formula (1) is It is about 126nm. Finally, the wavelength resolution in the spectral information measurement result is 0.03nm, the intensity change resolution of adjacent points is less than -50dB, and the scanning bandwidth of the filtered on-chip spectrometer is indeed 126nm. It can be seen that the spectral information measurement result obtained by the spectral measurement method based on the filtered on-chip spectrometer provided in the embodiment of the present application can achieve good consistency with the actual spectral line.

[0102] As a fourth aspect of this application, Figure 5 As shown, a computer-readable medium is provided, on which a computer program is stored, wherein when the computer program is executed by a processor, the spectral measurement method based on the filter-type on-chip spectrometer provided in the first aspect of the present application is implemented.

[0103] It can be understood by a person of ordinary skill in the art that all or part of the processes in the above-mentioned embodiment methods can be implemented by instructing the relevant hardware through a computer program. Accordingly, the computer program can be stored in a non-volatile computer-readable storage medium, and the computer program can implement the method of any of the above-mentioned embodiments when executed. Among them, any reference to memory, storage, database or other media used in the embodiments provided in the embodiments of the present application may include non-volatile and / or volatile memory. Non-volatile memory may include read-only memory (ROM), programmable ROM (PROM), electrically programmable ROM (EPROM), electrically erasable programmable ROM (EEPROM) or flash memory. Volatile memory may include random access memory (RAM) or external cache memory. By way of illustration and not limitation, RAM is available in many forms, such as static RAM (SRAM), dynamic RAM (DRAM), synchronous DRAM (SDRAM), double data rate SDRAM (DDRSDRAM), enhanced SDRAM (ESDRAM), synchronous link (Synchlink) DRAM (SLDRAM), memory bus (Rambus) direct RAM (RDRAM), direct memory bus dynamic RAM (DRDRAM), and memory bus dynamic RAM (RDRAM), etc.

[0104] The above are only specific embodiments of the present application, but the protection scope of the present application is not limited thereto. Those skilled in the art should understand that the present application includes but is not limited to the contents described in the drawings and the above specific embodiments. Any modification that does not deviate from the functional and structural principles of the present application will be included in the scope of the claims.

Claims

1. A spectrum measurement method based on a filter-type on-chip spectrometer, wherein the filter-type on-chip spectrometer comprises a cascaded optical filter and a measurement module, characterized in that: The optical filter comprises a directional coupler, at least three micro-ring resonant cavities cross-connected and cascaded through optical waveguides, and phase modulators respectively arranged on each of the micro-ring resonant cavities, and the minimum value of the second-order ring length difference between two adjacent micro-ring resonant cavities meets a preset condition with a preset spectrometer scanning bandwidth. The method comprises: Determining the phase modulation amount corresponding to each microring resonant cavity according to the free spectrum range (FSR) length of each microring resonant cavity, a preset target wavelength reconstruction amount, and a preset reconstruction algorithm; Inputting the incident light source into the optical filter, and inputting the determined phase modulation amounts into corresponding phase modulators, so that each phase modulator modulates the light passing through the corresponding microring resonant cavity according to each phase modulation amount; A spectral information measurement result determined by the measurement module according to the output light of the optical filter is obtained.

2. The method according to claim 1, characterized in that The preset conditions include: In formula (1), FSR max represents the preset spectrometer scanning bandwidth, λ represents the central band wavelength, and n g represents the group refractive index of the medium in the microring resonator, ΔL 2nd It represents the minimum value of the second-order ring length difference between two adjacent microring resonators.

3. The method according to claim 1, characterized in that The measuring module includes a light information sampling circuit module and a processing module; the obtaining of the spectral information measurement result determined by the measuring module according to the output light of the optical filter includes: The spectral information measurement result determined by the processing module according to the sampling result is obtained; wherein the sampling result is obtained by the light information sampling circuit module collecting the light generated after the output light of the optical filter passes through the sample object.

4. The method according to any one of claims 1 to 3, characterized in that In the step of determining the phase modulation amount corresponding to each microring resonant cavity according to the free spectrum range FSR length of each microring resonant cavity, the preset target wavelength reconstruction amount and the preset reconstruction algorithm, the phase modulation amount corresponding to each microring resonant cavity is determined by the following formula: mod{Dλ,FSR i }=Dl i (t) (a); In formula (a) and formula (b), Δλ represents the preset target wavelength reconstruction amount, FSR i represents the FSR length of the i-th microring resonator, Δθ i (t) represents the wavelength reconstruction of the i-th microring resonator, mod{Δθ,FSR i } represents the effect of Δθ on FSR i Perform modulo operation, t represents time, represents the phase modulation amount corresponding to the i-th microring resonator.

5. An electronic device, characterized in that: The electronic device comprises: one or more processors; A memory having one or more computer programs stored thereon, wherein when the one or more computer programs are executed by the one or more processors, the one or more processors implement the spectral measurement method based on the filter-type on-chip spectrometer according to any one of claims 1-4.

6. A spectrum measurement system, characterized in that: The spectrum measurement system comprises the electronic device according to claim 5 and a filter-type on-chip spectrometer, wherein the filter-type on-chip spectrometer comprises an optical filter, wherein the optical filter comprises a directional coupler, at least three micro-ring resonant cavities cross-connected and cascaded by optical waveguides, and phase modulators respectively arranged on each of the micro-ring resonant cavities, wherein a minimum value of a second-order ring length difference between two adjacent micro-ring resonant cavities satisfies a preset condition with respect to a preset spectrometer scanning bandwidth; Each phase modulator is used to modulate the light passing through the corresponding microring resonant cavity according to the phase modulation amount input to itself after the incident light source is input to the optical filter; wherein each phase modulation amount is determined according to the free spectrum range FSR length of each microring resonant cavity, the preset target wavelength reconstruction amount and the preset reconstruction algorithm; The measurement module is used to determine a spectrum information measurement result according to the output light of the optical filter.

7. The spectrum measurement system according to claim 6, characterized in that: The preset conditions include: In formula (1), FSR max represents the preset spectrometer scanning bandwidth, λ represents the central band wavelength, and n g represents the group refractive index of the medium in the microring resonator, ΔL 2nd It represents the minimum value of the second-order ring length difference between two adjacent microring resonators.

8. The spectrum measurement system according to claim 6, characterized in that: The measurement module includes an optical information sampling circuit module and a processing module. The optical information sampling circuit module is used to collect the light generated after the output light of the optical filter passes through the sample object to obtain a sampling result; the processing module is used to determine the spectral information measurement result based on the sampling result.

9. The spectral measurement system according to any one of claims 6 to 8, characterized in that: The number of the microring resonant cavities in the optical filter is 5, the ring lengths of the microring resonant cavities are 300 μm, 310 μm, 320 μm, 330 μm and 340 μm, and the scanning bandwidth of the filter-on-chip spectrometer is 126 nm.

10. A computer readable medium having a computer program stored thereon, characterized in that: When the computer program is executed by a processor, the spectrum measurement method based on a filter-type on-chip spectrometer according to any one of claims 1 to 4 is implemented.

Citation Information

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